CN101219592A - Apparatus for and method of manufacturing photosensitive laminated body - Google Patents
Apparatus for and method of manufacturing photosensitive laminated body Download PDFInfo
- Publication number
- CN101219592A CN101219592A CNA2007103068947A CN200710306894A CN101219592A CN 101219592 A CN101219592 A CN 101219592A CN A2007103068947 A CNA2007103068947 A CN A2007103068947A CN 200710306894 A CN200710306894 A CN 200710306894A CN 101219592 A CN101219592 A CN 101219592A
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- photosensitive
- substrate
- photosensitive film
- working position
- film
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
- B32B37/16—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with all layers existing as coherent layers before laminating
- B32B37/20—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with all layers existing as coherent layers before laminating involving the assembly of continuous webs only
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/0046—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by constructional aspects of the apparatus
- B32B37/0053—Constructional details of laminating machines comprising rollers; Constructional features of the rollers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B41/00—Arrangements for controlling or monitoring lamination processes; Safety arrangements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/18—Handling of layers or the laminate
- B32B2038/1891—Using a robot for handling the layers
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- Materials For Photolithography (AREA)
- Laminated Bodies (AREA)
- Lining Or Joining Of Plastics Or The Like (AREA)
Abstract
The invention provides a manufacturing apparatus of photosensitive laminated body and a manufacturing method thereof. The position deviation amount is calculated by the position relationship between the back ends and the front ends of the glass base plate and the photosensitive resin layer detected by a CCD vidicon, and a transport capacity of the photosensitive film is adjusted, or the position of a half-cutting part formed on the photosensitive resin layer is adjusted.
Description
Technical field
The present invention relates between a pair of crimping roller, send with substrate with being provided with the strip photosensitive film of photosensitive material layer (photonasty ウ エ Block) on the supporting mass, described photosensitive material layer is attached on the described substrate, makes the manufacturing installation and the manufacture method of the photosensitive laminate of photosensitive laminate thus.
Background technology
For example, substrate for liquid crystal panel, printed wiring are to constitute by attach the photonasty lamellar body (photosensitive film) with photo-sensitive resin (photosensitive material layer) on substrate surface with substrate, PDP panel substrate.The photonasty lamellar body stacks gradually photo-sensitive resin and diaphragm on the flexiplast supporting mass.
The manufacturing installation that uses when the attaching of this photonasty lamellar body is usually in the following way: with substrates such as the interval conveyance glass substrate of the regulation of being separated by or resin substrates; and corresponding with the scope of the photo-sensitive resin that attaches on the described substrate, peel off diaphragm from described photonasty lamellar body.
For example, the spy opens in the flat 11-34280 communique in the disclosed manufacturing installation, and as shown in Figure 9, the duplexer film of sending from film roller 1 (photonasty lamellar body) 1a is wound on deflector roll 2a, and 2b is last and extend along the film conveyance face of level.The rotary encoder 3 of output and the pulse signal of the corresponding quantity of conveying capacity of duplexer film 1a is installed on this deflector roll 2b.
The duplexer film 1a that extends along the film conveyance face of level is wound on the suction roll 4, and between described deflector roll 2b and described suction roll 4, be provided with hemisection cutting mill 5 and outside film exfoliating device 6.
Outer film exfoliating device 6 is reeled by take up roll 9 firmly be crimped between by pressure roller 8a, 8b on the released part of adventitia at the splicing tape 7a that will send from splicing tape roller 7 after.Thus, the released part of adventitia is peeled off and is wound on the take up roll 9 with splicing tape 7a from photo-sensitive resin.
Dispose a pair of laminating roll 12a in the downstream of suction roll 4, the released part pressed and overlapped that 12b, laminating roll 12a, 12b will peel off the duplexer film 1a of adventitia is connected on by base board delivery device 10 with above a plurality of substrates 11 of predetermined distance conveyance.At this laminating roll 12a, the downstream of 12b configuration support membrane take up roll 13.The light transmission support membrane (not shown) that is attached on the substrate 11 remains under the state on the substrate 11 photo-sensitive resin, is wound on the support membrane take up roll 13 with the remnant of adventitia.
In addition, for the released part of the duplexer film 1a that will peel off adventitia correctly is attached in the scope of wishing in the substrate 11, need be benchmark with the released part and the boundary member between the remnant of adventitia,, send duplexer film 1a between the 12b accurately at laminating roll 12a.
But duplexer film 1a is the film that has formed photo-sensitive resin on the flexible support film, because conveyance under the state of having given tension force, so thereby might produce deviation because of the position of the described boundary member of influence of the elongation of generation in the transmission.In addition, because laminating roll 12a, 12b attaches under the state that has heated duplexer film 1a and substrate 11, so particularly at laminating roll 12a, the elongation of duplexer film 1a becomes big near the 12b.
In this case, if can detect the position of the described boundary member of described duplexer film 1a between the 12b, can adjust this position so and carry out high-precision attaching and handle at laminating roll 12a.But by laminating roll 12a, it is impossible realize that because laminating roll 12a, 12b hinders detection that the position that detects boundary member under the state of duplexer film 1a and substrate 11 in the 12b clamping.
Therefore, at the photosensitive laminate of sampling check manufacturing, under the situation of sticking position precise decreasing, there is following unfavorable condition: adjust the processing such as conveying capacity of duplexer film 1a, make decrease in efficiency, and make the photosensitive laminate outside the allowed band, decrease in yield thus.
Summary of the invention
The object of the present invention is to provide a kind of manufacturing installation and manufacture method of photosensitive laminate, it can be easily and detects the attaching state of photosensitive material layer with respect to substrate accurately, in addition, can adjust the sticking position of photosensitive material layer, produce high-quality photosensitive laminate effectively.
The invention provides a kind of manufacturing installation of photosensitive laminate; it is sent and stack gradually the strip photosensitive film that photosensitive material layer and diaphragm form on supporting mass; the corresponding working position of the boundary position of formation and released part and remnant on described diaphragm; peel off the described released part of described diaphragm; pass out to continuously between a pair of crimping roller that heated with the substrate of supplying with predetermined distance; the described remnant of the described diaphragm of configuration between described substrate; and the described photosensitive material layer that will expose is attached on the described substrate; make photosensitive laminate thus; the manufacturing installation of described photosensitive laminate is characterised in that to have:
Test section, it is configured in the downstream of described crimping roller, detects the described working position of the described strip photosensitive film that attaches on the end of described substrate and the described substrate;
Apart from calculating part, it calculates the distance between described end and described working position.
In addition; the invention provides a kind of manufacture method of photosensitive laminate; it is sent and stack gradually the strip photosensitive film that photosensitive material layer and diaphragm form on supporting mass; the corresponding working position of the boundary position of formation and released part and remnant on described diaphragm; peel off the described released part of described diaphragm; pass out to continuously between a pair of crimping roller that heated with the substrate of supplying with predetermined distance; the described remnant of the described diaphragm of configuration between described substrate; and the described photosensitive material layer that will expose is attached on the described substrate; make photosensitive laminate thus; the manufacture method of described photosensitive laminate is characterised in that, comprising:
Detect the step of the described working position of the described strip photosensitive film that attaches on the end of described substrate and the described substrate;
Calculate the step of the distance between described end and described working position.
In the present invention, the end by detecting substrate and its are gone up the working position of the strip photosensitive film of attaching, can be easily and detect the attaching state of photosensitive material layer with respect to substrate accurately.In addition, by adjusting the sticking position of photosensitive material layer, can make high-quality photosensitive laminate efficiently with respect to substrate according to detected attaching state.
By the explanation of following preferred implementation, will understand above-mentioned purpose, feature and advantage more in conjunction with the accompanying drawings.
Description of drawings
Fig. 1 is the summary pie graph of the manufacturing installation of first embodiment of the present invention.
Fig. 2 is the profile of the strip photosensitive film that uses in the described manufacturing installation.
Fig. 3 is the key diagram that is bonded with the state of adhesive labels on the described strip photosensitive film.
Fig. 4 is the key diagram that attaches the detection attaching status detection portion of mechanism and downstream configuration thereof.
Fig. 5 detects the block diagram that the attaching state carries out the function of position adjustment.
Fig. 6 detects the attaching state and the flow chart of the processing revised.
Fig. 7 is the key diagram of the attaching state of two photosensitive films attaching on the glass substrate.
Fig. 8 is the summary pie graph of the manufacturing installation of second embodiment of the present invention.
Fig. 9 is the summary pie graph of the manufacturing installation of prior art.
The specific embodiment
Fig. 1 is the summary pie graph of manufacturing installation 20 of the photosensitive laminate of first embodiment of the present invention, this manufacturing installation 20 carries out following operation: at liquid crystal or organic EL in the manufacturing process with colour filter etc., arranged side by side strip photosensitive film 22a, each photo-sensitive resin 28 (describing below) of 22b and heat is transferred on the glass substrate 24. Photosensitive film 22a, 22b set the width dimensions of regulation respectively for, and for example described photosensitive film 22a constitutes wideer than described photosensitive film 22b.
Fig. 2 is the photosensitive film 22a that uses in the manufacturing installation 20, the profile of 22b.This photosensitive film 22a, 22b constitutes by stacked flexible base film (supporting mass) 26, photo-sensitive resin (photosensitive material layer) 28, diaphragm 30.
As shown in Figure 1, manufacturing installation 20 has: the first and second film delivering mechanism 32a, 32b, it is accommodated photosensitive film 22a, 22b is wound into two (can be more than two) photosensitive film roller 23a of roller shape, 23b, and can be from each photosensitive film roller 23a, send described photosensitive film 22a on the 23b synchronously, 22b; The first and second organisation of working 36a, 36b, it is at each the photosensitive film 22a that sends, and forms hemisect position (working position) 34 as the boundary position that can cut off along width on the diaphragm 30 of 22b; And the first and second label bonding agency 40a, 40b, it bonds to the adhesive labels 38 (with reference to figure 3) that has non-bonded part 38a on the part on each diaphragm 30.
First and second label bonding agency 40a; be provided on the downstream of 40b each photosensitive film 22a; 22b is altered to first and second 42a of reservoir mechanism that send continuously from intermittently sending; 42b; with specific length at interval from each photosensitive film 22a; peel off first and second mechanism for stripping 44a of diaphragm 30 on the 22b, 44b; be heated under the state of set point of temperature the substrate transferring mechanism 45 of glass substrate 24 conveyances to the sticking position; the photo-sensitive resin 28 that will expose because of peeling off of described diaphragm 30 and described glass substrate 24 one and the attaching mechanism 46 that attaches side by side.
Near the upstream of the sticking position in attaching mechanism 46, configuration directly detects as each photosensitive film 22a, the 47a of first and second testing agency of half and half cutting part 34 of the boundary position of 22b, 47b.
At first and second film delivering mechanism 32a, near the downstream of 32b, the photosensitive film 22a that configuration will roughly be finished using, the rear end of 22b and the new photosensitive film 22a that uses, the front end of 22b attaches respectively attaches platform 49.Attaching the downstream configuration film terminal location detector 51 of platform 49, it is used for control because of photosensitive film roller 23a, the coiling deviation of 23b and the deviation of the width that causes.At this, make first and second film delivering mechanism 32a, 32b moves along width, carries out the adjustment of film terminal location, but also can set the position adjusting mechanism that has made up roller carries out the adjustment of film terminal location.In addition, first and second film delivering mechanism 32a, 32b also can filling photosensitive film roller 23a, 23b and send photosensitive film 22a, and the axle of sending of 22b constitutes multiaxises such as diaxon or three.
First and second processing structure 36a, 36b are configured in roller to 50 downstream, and roller is used to calculate accommodate to 50 and is wound on first and second film delivering mechanism 32a, each the photosensitive film roller 23a on the 32b, the roller footpath of 23b.First and second organisation of working 36a, 36b have single round sword 52 respectively, and this circle sword 52 is along photosensitive film 22a, and the width of 22b is advanced, and forms hemisect position 34 on the position at regulation two places of the nubbin 30b of clamping diaphragm 30 (Fig. 2).
As shown in Figure 2, hemisect position 34 needs tripping protection film 30 at least, in fact in order to cut off this diaphragm 30 reliably, sets the penetraction depth of circle sword 52, makes to be cut into photo-sensitive resin 28 and even basilar memebrane 26.Justify sword 52 in the following way: under the state of fixing not rotating,, move and the mode at formation hemisect position 34 on the width of 22b at photosensitive film 22a; Or not at described photosensitive film 22a, the last slip of 22b and rotating is moved on described width simultaneously and is formed the mode at described hemisect position 34.Substitute circle sword 52, the mode that is formed by blade, crush-cutting sword (thomson (ト system ソ Application) sword) etc. for example except laser and hyperacoustic cutting mode have been used in employing, can also be adopted in this hemisect position 34.
In addition; first and second organisation of working 36a; 36b also can be respectively at photosensitive film 22a; the conveyance direction of 22b (arrow A direction) goes up at interval the distance L corresponding with the width of remnant 30b and disposes two, the remnant 30b (Fig. 2) of clamping diaphragm 30 and form two hemisect positions 34 simultaneously.
For and the remnant 30b of 24 residual accordingly diaphragms 30 of glass substrate, first and second label bonding agency 40a, 40b supply with the released part 30aa that will peel off side the place ahead and peel off the adhesive labels 38 that the released part 30ab of proceeds posterolateral links.As shown in Figure 2, in diaphragm 30, the part of peeling off earlier is the released part 30aa of front, on the other hand, after the part peeled off be the released part 30ab of back, clamping remnant 30b.
As shown in Figure 3, adhesive labels 38 constitutes rectangle, is for example formed by the resin material identical with diaphragm 30.Adhesive labels 38 has non-bonded part (the comprising little bonding) 38a that does not apply bonding agent at central portion, and the both sides of this non-bonded part 38a are to have on the length direction both ends of described adhesive labels 38 and bonding first adhesive portion 38b of the released part 30aa of front and the second adhesive portion 38c bonding with the released part 30ab of back.
As shown in Figure 1, first and second label bonding agency 40a, 40b has the interval predetermined distance respectively and can attach the absorption layer 54a～54g of seven adhesive labels 38 at most, and on based on the sticking position of the described adhesive labels 38 of described absorption layer 54a～54g the configuration of free lifting ground be used for from below keep photosensitive film 22a, 22b bears platform 56.
In order to absorb the photosensitive film 22a that the upstream is surveyed, the described photosensitive film 22a in the conveyance at intermittence of 22b and downstream, speed difference between the continuous conveyance of 22b, at the 42a of first and second reservoir mechanism, the last configuration of 42b is along direction of arrow swing dance roller 60 freely.Second 42b of reservoir mechanism goes up configuration dance roller 61, and it is used for from first and second film delivering mechanism 32a, and each photosensitive film 22a that 32b sends, 22b arrive each the carrying channel electrical path length that attaches mechanism 46 and be adjusted into identical.
At the 42a of first and second reservoir mechanism, first and second mechanism for stripping 44a of the downstream of 42b configuration, 44b have the tube of suction 62 respectively, and it is used to interdict photosensitive film 22a, and 22b is sending the tension change of side, make the tension stabilityization when stacked.Near configuration stripper roll 63 each sucks tube 62, and pass through this stripper roll 63 from photosensitive film 22a, the last diaphragm of peeling off with the peel angle of acute angle 30 of 22b except remnant 30b, is wound on respectively in the diaphragm coiling portion 64.
First and second mechanism for stripping 44a, configuration can be given photosensitive film 22a, first and second tension control mechanism 66a of 22b tension force, 66b on the downstream of 44b.First and second tension control mechanism 66a, 66b has working cylinder 68 respectively, under the driving effect of described working cylinder 68, by each dance roller 70 swing displacement, can adjust the photosensitive film 22a that slips with each dance roller 70, the tension force of 22b.And, also can use first and second tension control mechanism 66a as required, 66b can not use yet.
The 47a of first and second testing agency, 47b for example have the photosensitive film of detection 22a, the laser extensometer of the hemisect portion 34 of the last formation of 22b or ccd video camera 72a, 72b.
Preferably in substrate heating part 74 or sticking position nearby carry out the temperature measuring of glass substrate 24.As assay method, except contact (for example thermocouple), can also be contactless.
The upstream of substrate heating part 74 is provided with the substrate accumulator 71 of accommodating a plurality of glass substrates 24.The hand 75a that each glass substrate 24 of accommodating in this substrate accumulator 71 is adsorbed on robot 75 goes up on the absorption layer 79 that is provided with and taking-up, is inserted in the substrate heating part 74.
Attach rubber rollers (crimping roller) 80a that mechanism 46 has upper and lower settings and is heated to set point of temperature, 80b.Rubber rollers 80a, 80b and backing roll 82a, 82b slips.The backing roll 82b of one side is by constituting the pressure cylinder 84a of roller clamping section 83, and 84b is by being pressed on the rubber rollers 80b side.
Dispose movably contact preventing roller 86 near rubber rollers 80a, it is used to prevent photosensitive film 22a, and 22b contacts with described rubber rollers 80a.Configuration preheats portion 87 near the upstream that attaches mechanism 46, and it is used for photosensitive film 22a, and 22b preheats set point of temperature.This preheats portion 87 and for example has heating arrangements such as infrared ray rod heater.
And, as shown in Figure 4, at the conveyance direction both ends of detecting glass substrate 24 near the downstream of substrate front-end detection sensor 94 respectively be attached to the both ends of diaphragm 30 remaining on the photo-sensitive resin 28 on the glass substrate 24.For example, 3 ccd video camera 96a～96c (test section) of configuring area sensor formation.These ccd video cameras 96a～96c is spaced apart at photosensitive film 22a with predetermined distance, on the width of 22b.The light that the relative lighting source 98a～98c that disposes with each ccd video camera 96a～96c, lighting source 98a～98c will be not constitute the wavelength of photo-sensitive resin 28 sensitization is by photosensitive film 22a, and 22b shines on ccd video camera 96a～96c.
The downstream of substrate transferring roller 92 is provided with cooling body 123 and the automatic mechanism for stripping 142 of substrate.The automatic mechanism for stripping 142 of substrate is peeled off the strip basilar memebrane 26 that is attached on each glass substrate 24 that predetermined distance separates continuously, have prestripping portion 144, relatively path stripper roll 146, wireline reel 148 and attach machine 150 automatically.Wireline reel 148 carries out torque control and gives tension force to basilar memebrane 26 when driving, on the other hand, preference is as by being provided with the FEEDBACK CONTROL that tension detector (not shown) carries out tension force on stripper roll 146.Prestripping portion 144 has the liftable rod 156 of peeling off between glass substrate 24.
The downstream configuration analyzer 158 of the automatic mechanism for stripping 142 of substrate, analyzer 158 is determined at the regional location of the actual photo-sensitive resin 28 that attaches on the glass substrate 24.This analyzer 158 has the video cameras such as CCD 160 of for example glass substrate 24 that is pasted with photo-sensitive resin 28 being made a video recording.
And the downstream of the automatic mechanism for stripping 142 of substrate is provided with the photosensitive laminate accumulator 132 of accommodating a plurality of photosensitive laminates 106, the regional location that these a plurality of photosensitive laminates 106 are measured on the photo-sensitive resin 28 by analyzer 158.In the automatic mechanism for stripping 142 of substrate, the photosensitive laminate 106 of having peeled off basilar memebrane 26 and remnant 30b is adsorbed on the absorption layer 136 that is provided with on the hand 134a of robot 134 and taking-up, is housed in the photosensitive laminate accumulator 133.
And, in above-mentioned such manufacturing installation that constitutes 20, though first and second film delivering mechanism 32a, 32b, first and second organisation of working 36a, 36b, first and second label bonding agency 40a, 40b, the 42a of first and second reservoir mechanism, 42b, first and second mechanism for stripping 44a, 44b, first and second tension control mechanism 66a, 66b and the 47a of first and second testing agency, 47b is configured in the top that attaches mechanism 46, but also can be in contrast, from described first and second film delivering mechanism 32a, 32b begins to the described 47a of first and second testing agency, till the 47b, be configured to the below of described attaching mechanism 46, photosensitive film 22a, 22b turn upside down and photo-sensitive resin 28 is attached to the downside of glass substrate 24, and, also can constitute described manufacturing installation 20 integral body by linearity.
As shown in Figure 1, manufacturing installation 20 integral body are by 100 controls of lamination operation control part, for example lamination control part 102, substrate heating control section 104 and hemisect control part 108 etc. all are set in each function portion of this manufacturing installation 20, and they interconnect by the in-process network.And lamination operation control part 100 is connected with plant network, carries out the information processing that is used to produce from the production management of the indication information (condition enactment or production information) of the not shown CPU of factory and operational management etc.
104 controls of substrate heating control section receive glass substrate 24 from upstream process, and this glass substrate 24 is heated to temperature desired, are supplied in the action of attaching mechanism 46 and the information processing of this glass substrate 24 etc. then.
Fig. 5 illustrates based on lamination control part 102 and hemisect control part 108 and detects the attaching state of photo-sensitive resin 28 with respect to glass substrate 24, and adjusts the functional block diagram of its position.
In addition; lamination control part 102 and hemisect control part 108 have sticking position calculating part 124 and attach condition judgement portion 126; wherein; sticking position calculating part 124 calculates the sticking position of diaphragm 30 with respect to glass substrate 24 based on the both ends of detected glass substrate 24 of ccd video camera 96a～96c and diaphragm 30, attaches condition judgement portion 126 and judges the attaching state according to described sticking position.
Attach the result of determination of condition judgement portion 126, transmit pulse correction portion 128 or hemisect position correction portion 130 supply correction data to roller according to the state of attaching.Roller transmits pulse correction portion 128 and transmits pulse according to revising data, adjust the roller that is supplied in roller control part 123.In addition, hemisect position correction portion 130 adjusts first and second organisation of working 36a based on organisation of working control part 133, the working timing of 36b according to revising data.
In manufacturing installation 20, be isolated into the first dust free room 112a and the second dust free room 112b by next door 110.Accommodate among the first dust free room 112a from first and second film connecting gear 32a, 32b arrives first and second tension control mechanism 66a, 66b, and accommodate the 47a of first and second testing agency, the mechanism that 47b is later among the second dust free room 112b.The first dust free room 112a and the second dust free room 112b are communicated with by breakthrough part 114.
At the action of the manufacturing installation 20 of above-mentioned formation, below to describing about manufacture method of the present invention.
At first, from first and second film connecting gear 32a, each photosensitive film roller 23a of the last installation of 32b sends photosensitive film 22a, 22b among the 23b.With photosensitive film 22a, the 22b conveyance is to first and second organisation of working 36a, among the 36b.
At first and second organisation of working 36a, among the 36b, circle sword 52 is along photosensitive film 22a; the width of 22b moves; begin to photo-sensitive resin 28 and even the described photosensitive film 22a of basilar memebrane 26 incisions from diaphragm 30,22b forms hemisect position 34 (with reference to figure 2).And then, photosensitive film 22a, 22b stops after the conveyance of arrow A direction with the width L (Fig. 2) of the remnant 30b of diaphragm 30 is corresponding, forms hemisect position 34 under the effect of advancing of circle sword 52.Thus, at photosensitive film 22a, 22b last clamping remnant 30b and the place ahead released part 30aa and rear released part 30ab are set.
In addition, the width L of remnant 30b is at photosensitive film 22a, and under the prerequisite that 22b does not have to extend, to supply with at the rubber rollers 80a that attaches mechanism 46, the distance that the glass substrate between 80b is 24 is set for benchmark.
Then, with each photosensitive film 22a, the 22b conveyance is to first and second label bonding agency 40a, among the 40b, the regulation sticking portion of diaphragm 30 is configured to bears on the platform 56.At first and second label bonding agency 40a; among the 40b; the adhesive labels 38 of regulation sheet number is adsorbed pad 54b～54g and adsorbs maintenance, and each adhesive labels 38 strides across the remnant 30b of diaphragm 30, with front released part 30aa and back released part 30ab one bonding (with reference to figure 3).
For example, as shown in Figure 1, be bonded with the photosensitive film 22a of seven adhesive labels 38,22b is via the 42a of first and second reservoir mechanism, 42b and prevented to send after the tension change of side, and conveyance is to first and second mechanism for stripping 44a, 44b continuously.First and second mechanism for stripping 44a, among the 44b, photosensitive film 22a, basilar memebrane 26 absorption of 22b remains on and sucks on the tube 62, and diaphragm 30 remaining remnant 30b and from described photosensitive film 22a, peeling off on the 22b.Via stripper roll 63 this diaphragm 30 is peeled off and is wound in the diaphragm coiling portion 64.
At first and second mechanism for stripping 44a; under the effect of 44b; at diaphragm 30 remaining remnant 30b and after basilar memebrane 26 is peeled off; photosensitive film 22a, 22b is by first and second tension control mechanism 66a, and 66b carries out tension adjustment; and then; by the 47a of first and second testing agency, the laser extensometer of 47b or ccd video camera 72a, 72b detects half cutting part 34.
In this case, at photosensitive film 22a, under the prerequisite that 22b does not have to extend, laser extensometer or ccd video camera 72a, when 72b detects the hemisect position 34 (Fig. 2) of back released part 30ab side,, dispose the hemisect position 34 of the released part 30aa side of front on the assigned position between the 80b in advance at rubber rollers 80a, set the 47a of first and second testing agency, the length of the carrying channel between 47b and the attaching mechanism 46.
At this; at laser extensometer or ccd video camera 72a; 72b detects after the hemisect position 34 of released part 30ab side of back; with photosensitive film 22a; the corresponding distance L of width of the remnant 30b of 22b conveyance and diaphragm 30 stops, on the other hand then; under the effect of substrate transferring mechanism 45, under pre-warmed state with glass substrate 24 conveyances to sticking position.Glass substrate 24 and photosensitive film 22a arranged side by side, the attaching part of the photo-sensitive resin 28 of 22b is corresponding and be configured in rubber rollers 80a for the time being, between the 80b.
Then, rise, with the regulation press pressure glass substrate 24 is sandwiched rubber rollers 80a, between 80b by making backing roll 82b and rubber rollers 80b.Roller control part 123 (Fig. 5) transmits pulsed drive roller drive motor 120 based on roller, under the turning effort of rubber rollers 80a, along arrow C direction conveyance photosensitive film 22a, 22b and glass substrate 24.Its result, each photo-sensitive resin 28 transfer printing (lamination) arranged side by side are to glass substrate 24.In this case, when photosensitive film 22a, 22b do not extend, photosensitive film 22a, hemisect position 34 beginnings of the photo-sensitive resin 28 of 22b released part 30ab side from behind correctly are transferred on the regulation position of glass substrate 24.
And, as lamination, speed is 1.0m/min～10.0m/min, rubber rollers 80a, and the temperature of 80b is 80 ℃～140 ℃, described rubber rollers 80a, the rubber hardness of 80b is 40 degree～90 degree, this rubber rollers 80a, and the press pressure of 80b (line pressure) is 50N/cm～400N/cm.
Substrate front-end detection sensor 94 detects the front end of glass substrate 24, via rubber rollers 80a, 80b finishes photosensitive film 22a, when a slice amount of 22b is laminated on the glass substrate 24, the rotation of described rubber rollers 80a is stopped, on the other hand, be pressed with described photosensitive film 22a, the described glass substrate 24 of 22b (below be also referred to as attach substrate 24a) by substrate transferring roller 92 gripping layers.At this moment, as described later, use the position of the ccd video camera 96a～rearward end of 96c detection glass substrate 24 in advance and the rearward end of photo-sensitive resin 28.
Then; rubber rollers 80b keeps out of the way along the direction of leaving rubber rollers 80a and removes clamping; and the rotation of beginning substrate transferring roller 92; to attach the width corresponding distance L of substrate 24a along the remnant 30b of conveyance of arrow C direction and diaphragm 30, the hemisect position 34 of the back of diaphragm 30 moves near the assigned position in below of rubber rollers 80a.At this moment, as described later, the position of the leading section of the glass substrate 24 after using ccd video camera 96a～96c to detect lamination to finish and the leading section of photo-sensitive resin 28.
On the other hand, by substrate transferring mechanism 45 with next glass substrate 24 towards the sticking position conveyance.By repeating aforesaid operations, make continuously and attach substrate 24a.
At this moment, as shown in Figure 4, each end that attaches substrate 24a is covered by remnant 30b each other.So when photo-sensitive resin 28 was transferred on the glass substrate 24, rubber rollers 80a, 80b can not polluted by described photo-sensitive resin 28.
After attaching mechanism 46 is cooled off by cooling body 122 by the attaching substrate 24a of lamination, transfer to prestripping portion 144.In this prestripping portion 144, peel off rod 156 and get involved 24 of glass substrates and rise, thus, lift the diaphragm 30 of 24 of glass substrates, peel off from the rear end and the front end of the glass substrate 24 of adjacency.
Then, at the automatic mechanism for stripping 142 of substrate, under the turning effort of wireline reel 148, go up continuous reeling basilar memebrane 26 from attaching substrate 24a.And then, when fault stops cutting off and the cut-out of substandard products when separating after, attach automatically machine 150 automatically attaches the attaching substrate 24a that has begun new lamination treatment basilar memebrane 26 front end and be wound up into the rear end of the basilar memebrane 26 on the wireline reel 148.
The attaching substrate 24a that has peeled off basilar memebrane 26 be configured in analyzer 158 corresponding inspection stations on.Check on the station at this, under the state of glass substrate 24 positioning and fixing, take the image of glass substrate 24 and photo-sensitive resin 28 by 4 video cameras 160.Then, handle, calculate sticking position by implementing image.
The attaching substrate 24a that will confirm the sticking position of photo-sensitive resin 28 by robot 134 takes out, and is accommodated in the photosensitive laminate accumulator 132 as photosensitive laminate 106.
In addition, in the above description, though prerequisite is with from first and second film delivering mechanism 32a, the photosensitive film 22a that sends among the 32b, 22b is not supplied in with extending and attaches mechanism 46, but in fact because have flexible photosensitive film 22a, 22b is subjected to the influence of tension force or heat and has extended ormal weight, so I'm afraid not is transferred to photo-sensitive resin 28 on the assigned position of glass substrate 24 accurately.
At this,, the modification method of photo-sensitive resin 28 with respect to the sticking position of glass substrate 24 described based on Fig. 5～Fig. 7.
At first, finish the stacked of a slice amount, when substrate front-end detection sensor 94 detected the leading section (step S1) of glass substrate 24, roller control part 123 control roll drive motors 120 stopped the rotation of rubber rollers 80a.Thus, make photosensitive film 22a, the conveyance of 22b stops (step S2).
Then, shine the rearward end of glass substrate 24 and photo-sensitive resin 28 from the illumination light of lighting source 98a～98c, see through their illumination light by ccd video camera 96a～96c acceptance, detected the image information (step S3) of the attaching state that shows described rearward end thus.The detected described image information of ccd video camera 96a～96c is supplied in sticking position calculating part 124, implements the image of regulation and handle, thus the sticking position of computational back-end portion (step S4).
Under this situation, shown in Fig. 7 (A), the image information that sticking position calculating part 124 obtains according to ccd video camera 96a～96c, calculate the rearward end of glass substrate 24 and attach thereon photosensitive film 22a, between the rearward end of the photo-sensitive resin 28 of 22b apart from EB1, EB2 and EA1, EA2.In addition, sticking position calculating part 124 calculates the sidepiece and the photosensitive film 22a of glass substrates 24, between the 22b and photosensitive film 22a, between the 22b apart from EB3, EA3, EA4.
Then; between substrate, transmit photosensitive film 22a; 22b; photosensitive film 22a wherein; the transmitting range L of 22b is corresponding with the width of the remnant 30b of diaphragm 30; after stopping then transmitting (step S5), re-use the image information (step S6) that ccd video camera 96a～96c detects the attaching state of the leading section that glass substrate 24 and photo-sensitive resin 28 are shown, in sticking position calculating part 124, calculate the sticking position (step S7) of leading section.
In this case, shown in Fig. 7 (B), sticking position calculating part 124 calculates the leading section of glass substrates 24 and attaches thereon photosensitive film 22a, between the leading section of the photo-sensitive resin 28 of 22b apart from FB1, FB2 and FA1, FA2.In addition, sticking position calculating part 24 calculates the sidepiece and the photosensitive film 22a of glass substrates 24, between the 22b and photosensitive film 22a, between the 22b apart from FB3, FA3, FA4.
Attach each sticking position that condition judgement portion 126 calculates according to sticking position calculating part 124, judge the attaching state (step S8) of photo-sensitive resin 28 with respect to glass substrate 24.
For example, if each that calculates apart from EB1, EB2, EA1, EA2, FB1, FB2, FA1, FA2 all in allowed band, being judged to be does not so have position deviation (step S9), does not carry out the correction of position deviation, proceeds to attach and handles.
On the other hand, though each exceeds allowed band apart among EB1, EB2, EA1, EA2, FB1, FB2, FA1, the FA2 certain, but by adjusting glass substrate 24 and photosensitive film 22a, the relative position relation of 22b and when can be formed in the allowed band, attach condition judgement portion 126 and judge glass substrate 24 and photosensitive film 22a, position deviation between 22b (step S10) is carried out correction data that the roller that transmits between substrate transmits pulse with correction and is supplied in roller and transmits pulse correction portion 128.Roller transmits pulse correction portion 128 and transmits pulse according to described correction data correction roller, is supplied in roller control part 123.Roller control part 123 will with photosensitive film 22a, the corresponding distance of the width L of the remnant 30b of 22b is revised and the corresponding amount of described correction data, conveyance photosensitive film 22a, 22b (step S11).Its result, the position deviation between the both ends of the both ends of glass substrate 24 and photo-sensitive resin 28 can be in allowed band.
In addition, exceed allowed band at each apart among EB1, EB2, EA1, EA2, FB1, FB2, FA1, the FA2 certain, even adjust glass substrate 24 and photosensitive film 22a, the relative position relation of 22b, when not being adapted to position deviation in the allowed band yet, estimation is photosensitive film 22a, and 22b extends to the above or photosensitive film 22a of allowed band, and the property difference between 22b is very big.Under this situation, the correction data that the position at hemisect position 34 will be revised by attaching condition judgement portion 126 are supplied in hemisect position correction portion 130.Hemisect position correction portion 130 will be supplied in organisation of working control part 133 according to the Working position data of revising data correction, and organisation of working control part 133 forms hemisect position 34 (step S12) on based on the position of revised Working position data.
In addition, at the sidepiece and the photosensitive film 22a that attach substrate 24a, between the sidepiece of 22b apart from EB3, EA4 and photosensitive film 22a, between 22b surpass allowed band apart from EA3 the time, for example, supply with each photosensitive film 22a, the conveyer of 22b or photosensitive film 22a by making, 22b moves along the direction vertical with the conveyance direction according to the correction data of its distance, can adjust.
As mentioned above, by adjusting the sticking position of photo-sensitive resin 28, can make high-quality attaching substrate 24a with respect to glass substrate 24.
In addition, in the first embodiment, though use two photosensitive film roller 23a, 23b is not limited thereto, and also can adopt a photosensitive film roller or the photosensitive film roller more than three.In addition, below the explanation second embodiment in too.
Fig. 8 is the summary pie graph of the manufacturing installation 300 of second embodiment of the invention.Also have, the composed component identical with the manufacturing installation 20 of first embodiment adopts identical Reference numeral, omits its detailed description.
Manufacturing installation 300 has film shut-off mechanism 48 between substrate, and it is configured in the downstream that attaches mechanism 46, can one cut off the photosensitive film 22a of 24 of each glass substrates, 22b.
In the manufacturing installation 300 that so constitutes, identical with above-mentioned first embodiment, attach mechanism 46 by the attaching substrate 24a of lamination along the conveyance of arrow C direction.And, attach reach between substrate 24a and substrate between during film shut-off mechanism 48 corresponding positions, film shut-off mechanism 48 moves along the arrow C direction with the conveyance speed identical with described attaching substrate 24a between this substrate, attach two photosensitive film 22a of one cut-out between substrate 24a, 22b at this simultaneously.
After this cut off, film shut-off mechanism 48 turned back to the position of readiness of regulation between substrate, and on the other hand, order is peeled off (the sheet leaf is peeled off (Mei Leaf Bao From) on attaching substrate 24a) basilar memebrane 26 and remnant 30b, thus make photosensitive laminate 106.
Claims (13)
1. the manufacturing installation of a photosensitive laminate; it is sent and stack gradually the strip photosensitive film that photosensitive material layer and diaphragm form on supporting mass; the corresponding working position of the boundary position of formation and released part and remnant on described diaphragm; peel off the described released part of described diaphragm; pass out to continuously between a pair of crimping roller that heated with the substrate of supplying with predetermined distance; the described remnant of the described diaphragm of configuration between described substrate; and the described photosensitive material layer that will expose is attached on the described substrate; make photosensitive laminate thus; the manufacturing installation of described photosensitive laminate is characterised in that to have:
Test section, it is configured in the downstream of described crimping roller, detects the described working position of the described strip photosensitive film that attaches on the end of described substrate and the described substrate;
Apart from calculating part, it calculates the distance between described end and described working position.
2. the manufacturing installation of photosensitive laminate according to claim 1, it is characterized in that described upstream-side-end and the end of downstream side of distance between described working position and described substrate and the distance between described working position of calculating described substrate apart from calculating part.
3. the manufacturing installation of photosensitive laminate according to claim 1 and 2 is characterized in that, has the adjustment part, and the sticking position of described photosensitive material layer with respect to described substrate adjusted according to described distance in this adjustment part.
4. the manufacturing installation of photosensitive laminate according to claim 3 is characterized in that, the conveying capacity of described strip photosensitive film with respect to described substrate adjusted according to described distance in described adjustment part.
5. the manufacturing installation of photosensitive laminate according to claim 3 is characterized in that, the Working position of described working position is adjusted according to described distance in described adjustment part.
6. the manufacturing installation of photosensitive laminate according to claim 1 is characterized in that, described test section detects the end and the described working position of described substrate according to the light quantity of the light that sees through described strip photosensitive film.
7. the manufacturing installation of photosensitive laminate according to claim 1 is characterized in that, attaches the photosensitive material layer of multi-disc strip photosensitive film on described substrate side by side.
8. the manufacturing installation of photosensitive laminate according to claim 7 is characterized in that, described test section is made of a plurality of described test section of described each working position that detects described each strip photosensitive film.
9. the manufacture method of a photosensitive laminate; it is sent and stack gradually the strip photosensitive film that photosensitive material layer and diaphragm form on supporting mass; the corresponding working position of the boundary position of formation and released part and remnant on described diaphragm; peel off the described released part of described diaphragm; pass out to continuously between a pair of crimping roller that heated with the substrate of supplying with predetermined distance; the described remnant of the described diaphragm of configuration between described substrate; and the described photosensitive material layer that will expose is attached on the described substrate; make photosensitive laminate thus; the manufacture method of described photosensitive laminate is characterised in that, comprising:
Detect the step of the described working position of the described strip photosensitive film that attaches on the end of described substrate and the described substrate;
Calculate the step of the distance between described end and described working position.
10. the manufacture method of photosensitive laminate according to claim 9 is characterized in that, according to described distance, adjusts the sticking position of described photosensitive material layer with respect to described substrate.
11. the manufacture method of photosensitive laminate according to claim 10 is characterized in that, according to described distance, adjusts the conveying capacity of described strip photosensitive film with respect to described substrate, adjusts the sticking position of described photosensitive material layer thus.
12. the manufacture method of photosensitive laminate according to claim 10 is characterized in that, according to described distance, adjusts the Working position of described working position, adjusts the sticking position of described photosensitive material layer thus.
13. the manufacture method of photosensitive laminate according to claim 9 is characterized in that, attaches the described strip photosensitive film of multi-disc on described substrate side by side.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006293134 | 2006-10-27 | ||
| JP2006293134A JP4769165B2 (en) | 2006-10-27 | 2006-10-27 | Photosensitive laminate manufacturing apparatus and manufacturing method |
| JP2006-293134 | 2006-10-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101219592A true CN101219592A (en) | 2008-07-16 |
| CN101219592B CN101219592B (en) | 2012-09-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007103068947A Expired - Fee Related CN101219592B (en) | 2006-10-27 | 2007-10-23 | Apparatus for and method of manufacturing photosensitive laminated body |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4769165B2 (en) |
| KR (1) | KR20080038019A (en) |
| CN (1) | CN101219592B (en) |
| TW (1) | TW200831291A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103052464A (en) * | 2010-07-29 | 2013-04-17 | 住友化学株式会社 | Method for cutting polarizing plate and polarizing plate cut by said method |
| CN105437722A (en) * | 2014-09-09 | 2016-03-30 | 日立成套设备机械股份有限公司 | Lamination device of film |
| US9595398B2 (en) | 2013-08-30 | 2017-03-14 | Corning Incorporated | Low resistance ultracapacitor electrode and manufacturing method thereof |
| CN109641440A (en) * | 2016-06-08 | 2019-04-16 | 康宁股份有限公司 | Laminating apparatus |
| CN112974122A (en) * | 2021-04-09 | 2021-06-18 | 江苏源美竹木业有限责任公司 | Glue coating roller, back glue type floor glue coating system and glue coating method |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2327546A1 (en) | 2009-11-27 | 2011-06-01 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Method and apparatus for laminating a first and a second sheet |
| EP2327547A1 (en) | 2009-11-27 | 2011-06-01 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Apparatus and method for laminating a first and a second sheet |
| KR101278034B1 (en) * | 2011-08-09 | 2013-06-24 | (주)피엔티 | Apparatus for laminating films automatically |
| KR101303603B1 (en) * | 2011-08-10 | 2013-09-11 | (주)피엔티 | Apparatus for laminating films automatically |
| KR101301568B1 (en) * | 2012-08-21 | 2013-09-10 | 주식회사 마이크로원 | A multiple-stage frame connecting apparatus of dust collecting filter |
| KR101898005B1 (en) * | 2016-10-19 | 2018-09-12 | 박재현 | Sheet Laminating Apparatus |
| KR101951193B1 (en) * | 2018-08-28 | 2019-02-22 | 김종관 | Multi-Rows Film Laminating Apparatus |
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| EP0973066A1 (en) * | 1998-07-16 | 2000-01-19 | Somar Corporation | Film applying apparatus |
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| JP3316093B2 (en) * | 1993-08-10 | 2002-08-19 | 富士写真フイルム株式会社 | Photosensitive laminated material and method for producing the same |
| JPH10109811A (en) * | 1996-09-30 | 1998-04-28 | Asahi Glass Co Ltd | Method for sticking hologram film |
| JP2004345354A (en) * | 2003-04-24 | 2004-12-09 | Mitsui Chemicals Inc | Method and apparatus for laminating film |
| JP4456426B2 (en) * | 2004-07-06 | 2010-04-28 | 富士フイルム株式会社 | Detection device |
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- 2006-10-27 JP JP2006293134A patent/JP4769165B2/en not_active Expired - Fee Related
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2007
- 2007-10-22 TW TW96139473A patent/TW200831291A/en unknown
- 2007-10-23 KR KR1020070106537A patent/KR20080038019A/en not_active Application Discontinuation
- 2007-10-23 CN CN2007103068947A patent/CN101219592B/en not_active Expired - Fee Related
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH01134280A (en) * | 1987-11-19 | 1989-05-26 | Nec Corp | Gate array |
| EP0973066A1 (en) * | 1998-07-16 | 2000-01-19 | Somar Corporation | Film applying apparatus |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103052464A (en) * | 2010-07-29 | 2013-04-17 | 住友化学株式会社 | Method for cutting polarizing plate and polarizing plate cut by said method |
| CN103052464B (en) * | 2010-07-29 | 2015-02-11 | 住友化学株式会社 | Method for cutting polarizing plate and polarizing plate cut by said method |
| US9595398B2 (en) | 2013-08-30 | 2017-03-14 | Corning Incorporated | Low resistance ultracapacitor electrode and manufacturing method thereof |
| CN105437722A (en) * | 2014-09-09 | 2016-03-30 | 日立成套设备机械股份有限公司 | Lamination device of film |
| CN105437722B (en) * | 2014-09-09 | 2019-03-22 | 日立成套设备机械股份有限公司 | The laminater and its method of operating of film |
| CN109641440A (en) * | 2016-06-08 | 2019-04-16 | 康宁股份有限公司 | Laminating apparatus |
| CN109641440B (en) * | 2016-06-08 | 2021-03-05 | 康宁股份有限公司 | Laminating apparatus |
| CN112974122A (en) * | 2021-04-09 | 2021-06-18 | 江苏源美竹木业有限责任公司 | Glue coating roller, back glue type floor glue coating system and glue coating method |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20080038019A (en) | 2008-05-02 |
| CN101219592B (en) | 2012-09-26 |
| JP4769165B2 (en) | 2011-09-07 |
| TW200831291A (en) | 2008-08-01 |
| JP2008110492A (en) | 2008-05-15 |
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