CN101254677A - Manufacturing installation of light sensitivity stacking body and production method thereof - Google Patents
Manufacturing installation of light sensitivity stacking body and production method thereof Download PDFInfo
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- CN101254677A CN101254677A CNA200810080893XA CN200810080893A CN101254677A CN 101254677 A CN101254677 A CN 101254677A CN A200810080893X A CNA200810080893X A CN A200810080893XA CN 200810080893 A CN200810080893 A CN 200810080893A CN 101254677 A CN101254677 A CN 101254677A
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- photoelectric sheet
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
- B32B37/16—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with all layers existing as coherent layers before laminating
- B32B37/20—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with all layers existing as coherent layers before laminating involving the assembly of continuous webs only
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
- B32B37/15—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with at least one layer being manufactured and immediately laminated before reaching its stable state, e.g. in which a layer is extruded and laminated while in semi-molten state
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B41/00—Arrangements for controlling or monitoring lamination processes; Safety arrangements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/08—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the cooling method
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- Lining Or Joining Of Plastics Or The Like (AREA)
- Laminated Bodies (AREA)
Abstract
The invention relates to a photosensitive laminate formed by sticking a strip-like photosensitive sheet (22) to a glass base plate (24) by a sticking unit (46), when the corner portion of the front end portion of a glass base plate (24) reaches to a photograph region (98) of a photograph portion (94), an image including the corner portion (96) and a reference sheet (99) is photographed, the position offset (delta K) of the corner portion (96) relative to the reference sheet (99) is calculated according to the image information. If the position offset (delta K) is not in a permitted scope, the interference between a cutting mechanism (48) and the glass base plate (24) can be avoided by prohibiting the cutting process of the cutting mechanism or changing the cutting position.
Description
Technical field
The present invention relates to make above-mentioned photosensitive material layer adhere to manufacturing installation and manufacture method that aforesaid substrate is made the photosensitive laminate of photosensitive laminate between a pair of hold-down roller by the banded photoelectric sheet of establishing photosensitive material layer on substrate and the supporter is delivered to.
Background technology
For example, substrate for liquid crystal panel, printed wiring photonasty sheet (sheet) body (photoelectric sheet) that will have a photo-sensitive resin (photosensitive material layer) with substrate with substrate, PDP sticks on substrate surface and constitutes.The photonasty lamellar body for example is sequentially stacked photo-sensitive resin and a diaphragm on the pliability plastic support.
Paste the employed manufacturing installation of this photonasty lamellar body; adopt common following mode; that is, substrates such as glass substrate or resin substrate are separated with the interval of each regulation and be delivered between the lamination roller and make the corresponding diaphragm of scope of the photo-sensitive resin of having peeled off and sticked on aforesaid substrate after the photonasty lamellar body also be delivered between above-mentioned lamination roller.
For example; in No. 3316093 disclosed manufacturing installation of communique of special permission; as shown in Figure 7, send photonasty lamellar body 2 by roller 1 and supply with hemisect device 3, will on the supporter that constitutes photonasty lamellar body 2, cut off by stacked diaphragm and photo-sensitive resin with the interval of stipulating.Then, above-mentioned photonasty lamellar body 2 is supplied with diaphragms removes portion 4, with adhesion zone etc. make peel off with the corresponding diaphragm of substrate 5 adhesion scopes after, supply with between hot hold-down roller 6a, 6b.On the other hand, carry the substrate 5 after the heating between thermotropism hold- down roller 6a, 6b, via by peeling off the photo-sensitive resin that diaphragm exposes, with 2 heating of photonasty lamellar body be crimped on substrate 5 below.Add the substrate 5 behind the thermo-compressed photonasty lamellar body 2, spread out of the back from hot hold- down roller 6a, 6b and supply with separator 7, make photosensitive laminate by the photonasty lamellar body 2 that cuts off 5 of substrates.
Here, photonasty lamellar body 2 is stacked photo-sensitive resin and diaphragms and form on flexual supporter, owing to carry with the state of giving tension force, so photonasty lamellar body 2 can extend.Particularly owing to hot hold- down roller 6a, 6b heating photonasty lamellar body 2 sticks on the substrate 5, so near the extension hot hold- down roller 6a, 6b is very big.
At this moment, must adjust the position of substrate 5 with respect to photonasty lamellar body 2, in the prescribed limit of substrate 5 decision correctly peel off diaphragm photo-sensitive resin the position and paste.But when carrying out such adjustment processing, owing to supply with the positional fluctuation of the substrate 5 of separator 7, so worry separator 7 and substrate 5 interferences, substrate 5 can breakage.
For fear of such situation, can consider near separator 7 placement substrate acquisition sensor, survey the position of substrate 5 with respect to separator 7.
But, in order to ensure the space that is provided with of substrate acquisition sensor, the distance between the substrate 5 to be set when big, the scope that is helpless to the photonasty lamellar body 2 between the substrate 5 of manufacturing of photosensitive laminate increases, and is very uneconomic.Therefore, the distance between the substrate 5 must be set narrow as much as possible.
Summary of the invention
The objective of the invention is to, provide instrumentation accurately to paste the substrate position of banded photoelectric sheet, avoided substrate and with the interference between the cut-out portion that cuts off between substrate and can reduce the manufacturing that is helpless to photosensitive laminate and the manufacturing installation and the manufacture method of the photosensitive laminate of the amount of discarded banded photoelectric sheet definitely.
In addition, the present invention also aims to, provide the configuration of a kind of instrumentation portion not have the manufacturing installation and the manufacture method of the photosensitive laminate of influence for the space of cut-out portion.
The present invention is a kind of manufacturing installation of making the photosensitive laminate of photosensitive laminate; this device will be on supporter lamination photosensitive material layer and diaphragm and the banded photoelectric sheet that forms are sent successively; forming and the released part and the corresponding working position of the boundary position between the remainder of said protection film until the part of above-mentioned photosensitive material layer from said protection film; after peeling off the above-mentioned released part of said protection film; with the substrate of supplying with the interval of regulation above-mentioned banded photoelectric sheet is sent between heated a pair of hold-down roller continuously; the above-mentioned remainder of configuration said protection film between aforesaid substrate; make the above-mentioned photosensitive material layer that exposes stick on aforesaid substrate simultaneously; then; between aforesaid substrate, cut off and separate above-mentioned banded photoelectric sheet; thereby manufacturing photosensitive laminate; it is characterized in that possessing:
To be provided in from the cut-out portion that cuts off above-mentioned banded photoelectric sheet to the downstream of the throughput direction of above-mentioned photosensitive laminate with predetermined distance position spaced and the corner positions that constitutes the aforesaid substrate of above-mentioned photosensitive laminate carry out instrumentation instrumentation portion and
According to the control part of controlling above-mentioned cut-out portion by the above-mentioned corner positions of above-mentioned instrumentation portion instrumentation.
In addition; the present invention is a kind of manufacture method of making the photosensitive laminate of photosensitive laminate; in this manufacture method; will be on supporter successively the banded photoelectric sheet of lamination photosensitive material layer and diaphragm send; forming and the released part and the corresponding working position of the boundary position between the remainder of said protection film until the part of above-mentioned photosensitive material layer from said protection film; after peeling off the above-mentioned released part of said protection film; with the substrate of supplying with the interval of regulation above-mentioned banded photoelectric sheet is sent between heated a pair of hold-down roller continuously; the above-mentioned remainder of configuration said protection film between aforesaid substrate; and make the above-mentioned photosensitive material layer that exposes stick on aforesaid substrate; then; between aforesaid substrate, cut off and separate above-mentioned banded photoelectric sheet; thereby manufacturing photosensitive laminate; it is characterized in that, constitute by following operation:
To be provided in from the cut-out portion that cuts off above-mentioned banded photoelectric sheet to the downstream of the throughput direction of above-mentioned photosensitive laminate with predetermined distance position at interval on and the corner positions that constitutes the aforesaid substrate of above-mentioned photosensitive laminate carry out instrumentation operation and
According to the operation of controlling above-mentioned cut-out portion by the above-mentioned corner positions of above-mentioned instrumentation portion instrumentation.
Among the present invention, the assigned position in the downstream of the cut-out portion of the banded photoelectric sheet between the cut-out substrate, the corner positions of instrumentation substrate, and according to the result of this instrumentation, whether judgement disposes banded photoelectric sheet between substrate at the assigned position of cut-out portion, according to this result of determination control cut-out portion, thus, can avoid the interference between substrate and the cut-out portion.
In addition, owing to come the position of instrumentation substrate in the downstream of cut-out portion configuration instrumentation portion, so needn't guarantee the configuration space of instrumentation portion in cut-out portion.Thereby, the substrate spacing in the cut-out portion can be set as much as possible for a short time, thus, can reduce the manufacturing that is helpless to photosensitive laminate and the amount of discarded banded photoelectric sheet.
By the following explanation of example preferred embodiment of accompanying drawing and companion, above-mentioned purpose, feature and advantage will be further clear and definite.
Description of drawings
Fig. 1 is the summary pie graph of the manufacturing installation of present embodiment.
Fig. 2 is the profile of the banded photoelectric sheet that uses of the manufacturing installation of present embodiment.
Fig. 3 is the key diagram of the state of bonding mark on banded photoelectric sheet.
Fig. 4 is the configuration relation key diagram of shut-off mechanism and photography portion.
Fig. 5 is the key diagram in the photography zone of photography portion.
Fig. 6 is that the circuit according to the image information control shut-off mechanism of being obtained by photography portion constitutes block diagram.
Fig. 7 is the summary pie graph of the manufacturing installation of prior art.
The specific embodiment
Fig. 1 is the summary pie graph of manufacturing installation 20 of the photosensitive laminate of present embodiment, in liquid crystal or organic EL production process with colour filter etc., the operation of the hot transfer printing of photo-sensitive resin 28 (aftermentioned) (lamination) that this manufacturing installation 20 carries out the banded photoelectric sheet 22 that will be made of the wide size of regulation to the glass substrate 24.
Fig. 2 is the profile of the banded photoelectric sheet 22 of manufacturing installation 20 uses.This band shape photoelectric sheet 22, stacked pliability basilar memebrane (supporter) 26, photo-sensitive resin (photosensitive material layer) 28 and diaphragm 30 and constitute.
As shown in Figure 1; manufacturing installation 20 possesses: accommodate photoelectric sheet roller 23 with banded photoelectric sheet 22 coiling tubulars, and the thin plate delivering mechanism 32 that above-mentioned banded photoelectric sheet 22 can be sent from photoelectric sheet roller 23; on the width of the diaphragm 30 of the banded photoelectric sheet of sending 22 and photo-sensitive resin 28, form half cut-off position (working position) 34a as 2 boundary members that can cut off; the organisation of working 36 (adding the Ministry of worker) of 34b (with reference to Fig. 2); the mark bonding agency 40 bonding with the bonding mark 38 (with reference to Fig. 3) that makes part have a non-bonded part 38a and diaphragm 30.
Downstream at mark bonding agency 40 sets: be used to make banded photoelectric sheet 22 to carry from beat-type and change to the storage mechanism 42 that continous way is carried; peel off the mechanism for stripping 44 of diaphragm 30 at interval from banded photoelectric sheet 22 with the length of regulation; glass substrate 24 is supplied with the substrate feed mechanism 45 of adhesion position with the state of the temperature that is heated to regulation; with make the photo-sensitive resin that exposes by peeling off of said protection film 30 28 and above-mentioned glass substrate 24 adhesions be the labelling machine 46 of one.
Near the upstream of the paste position of labelling machine 46, set the photography portion 47 that the image of the banded photoelectric sheet 22 that comprises half cut-off position 34a, 34b is photographed.Manufacturing installation 20 according to by the half cut-off position 34a of photography portion 47 photographies, the image of 34b, is calculated half cut-off position 34a, the 34b position offset with respect to labelling machine 46, carries out the revisal of the amount of sending into of banded photoelectric sheet 22.
Near the downstream of thin plate delivering mechanism 32, set the stickup platform 49 of the front end stickup of the rear end of the banded photoelectric sheet 22 that will use substantially and the banded photoelectric sheet 22 that newly uses.In order to control the skew that is offset the width that causes by the coiling of photoelectric sheet roller 23, set the end end position detector 51 of film in the downstream of pasting platform 49.Here, the end of film end position adjustment mobile thin plate delivering mechanism 32 on width carries out, but also can set up the position adjusting mechanism that has made up roller carries out.
Organisation of working 36 is configured in to be used to calculate by thin plate delivering mechanism 32 accommodates the roller in roller footpath of photoelectric sheet roller 23 of coiling to 50 downstream.Organisation of working 36 possesses a pair of round sword 52a, the 52b that separates with distance M.Circle sword 52a, 52b be along the width walking of banded photoelectric sheet 22, forms half cut-off position 34a, 34b (with reference to Fig. 2) on the position, 2 place of the regulation of the nubbin B that clamps diaphragm 30.
As shown in Figure 2, necessary at least tripping protection film 30 of half cut-off position 34a, 34b and photo-sensitive resin 28 are in fact according to cutting the penetraction depth of setting round sword 52a, 52b until pliability basilar memebrane 26 like that.Circle sword 52a, 52b, employing is moved on the width of banded photoelectric sheet 22 under the non-rotary state being fixed, while in the mode that forms half cut-off position 34a, 34b with do not slide above above-mentioned banded photoelectric sheet 22 and rotate to above-mentioned width and move to form the mode of above-mentioned half cut-off position 34a, 34b.Also can adopt the mode that forms this half cut-off position 34a, 34b by for example blade except utilizing laser and hyperacoustic cut-out mode, crush-cutting sword replacements such as (Thomson swords) circle sword 52a, 52b.
When photoresist 28 is sticked on glass substrate 24, for example, set half cut-off position 34a, 34b like that according to becoming from the both ends of above-mentioned glass substrate 24 respectively the position that enters 10mm to each inboard.In addition, the nubbin B of the diaphragm 30 between the glass substrate 24, the mask when sticking on above-mentioned glass substrate 24 plays a role with making photoresist 28 frame shapes in labelling machine 46 described later.
Because with 24 corresponding nubbin B that remain diaphragm 30 of glass substrate, so mark bonding agency 40 is supplied with the bonding mark 38 that the released part A with the released part A of half cut-off position 34b side and half cut-off position 34a side is connected.
As shown in Figure 3, bonding mark 38 constitutes rectangles, is for example formed by the resin material identical with diaphragm 30.Bonding mark 38 has non-bonded part (the comprising little bonding) 38a that is not coated with binding agent at central portion, simultaneously in the both sides of this non-bonded part 38a, be that the both ends of the length direction of above-mentioned bonding mark 38 have and bonding the 1st adhesive portion 38b of the place ahead released part A and the 2nd adhesive portion 38c bonding with rear released part A.
As shown in Figure 1, mark bonding agency 40 possesses the adsorption gasket 54a~54g of maximum 7 pieces of bonding marks 38 that Pasting separates with the interval of each regulation, but and on by the paste position of the above-mentioned bonding mark 30 of above-mentioned adsorption gasket 54a~54g decision the configuration of free lifting ground be used for from below the supporting station 56 of the banded photoelectric sheet 22 of maintenance.
For the beat-type of the banded photoelectric sheet 22 that absorbs upstream side carry and the continuous conveying of the above-mentioned banded photoelectric sheet 22 in downstream between speed difference, store mechanism 42 and possess the dance roller (dancer roll) 60 that freely shakes along the direction of arrow.
The mechanism for stripping 44 that disposes in the downstream of storing mechanism 42 possesses the suction tube (suctiondrum) 62 that is used to stop the tension change that to send side of banded photoelectric sheet 22, the tension stabilityization when making lamination.Sucking near the tube 62, configuration stripper roll 63, the diaphragm of peeling off from banded photoelectric sheet 22 with the peel angle of acute angle by means of this stripper roll 63 30, except nubbin B, protected film coiling portion 64 winds up.
Set the tension control mechanism 66 that to give tension force to banded photoelectric sheet 22 in the downstream of mechanism for stripping 44.Shake displacement by the floating roller (tension dancer) 70 of tension force under the driving effect of hydraulic cylinder 68, tension control mechanism 66 just can be adjusted the tension force of banded photoelectric sheet 22.In addition, tension control mechanism 66 also can be deleted as long as use according to necessity.
The temperature measuring of preferred glass substrate 24 is carried out in substrate heating part 74 or near the paste position.Except contact (for example thermocouple), also can be contactless as method for measuring.
In addition, on the assigned position in the downstream of substrate conveying roller 90d, set the photography portion 94 that the image of the end of the glass substrate 24 of having pasted banded photoelectric sheet 22 is taken.As Fig. 4 and shown in Figure 5, photography portion 94 possesses: two-dimension light source 95, the illumination light of transmission as the bight 96 of the end of glass substrate 24 exported, cut to acceptance from two-dimension light source 95, take above-mentioned bight 96 image ccd video camera 97 and be configured in ccd video camera 97 the part in photography zone 98 on, be used for the reference plate 99 of position in bight 96 of the image in instrumentation photography zone 98.
Here, distance L is represented the distance between shut-off mechanism 48 and the reference plate 99.In addition, the width of the direction vertical of glass substrate 24 with throughput direction than the width of banded photoelectric sheet 22 set wide, the bight 96 of glass substrate 24 with the state configuration that do not overlap with banded photoelectric sheet 22 in photography zone 98.In addition, the bight 96 of using ccd video camera 97 to take is different with other 3 bights of glass substrate 24, forms the shape of the throughput direction inclination of relative glass substrate 24.
In addition, in manufacturing installation 20 according to above formation, thin plate delivering mechanism 32, organisation of working 36, mark bonding agency 40, store mechanism 42, mechanism for stripping 44, tension control mechanism 66 and photography portion 47 are configured in the top of labelling machine 46, but also can be in contrast, be configured in the below of above-mentioned labelling machine 46 till will be from above-mentioned thin plate delivering mechanism 32 to above-mentioned photography portion 47, make banded photoelectric sheet 22 up and down conversely, make photo-sensitive resin 28 stick on the downside of glass substrate 24, in addition, the transport path of banded photoelectric sheet 22 is constituted with linearity.
In the manufacturing installation 20, be divided into the 1st clean room 112a and the 2nd clean room 112b by means of partition wall 110.In the 1st clean room 112a, accommodate from thin plate delivering mechanism 32 to tension control mechanism till 66, accommodate later mechanism of photography portion 47 among the 2nd clean room 112b.The 1st clean room 112a and the 2nd clean room 112b are communicated with via breakthrough part 114.
Fig. 6 represents the control circuit block diagram of manufacturing installation 20.The control circuit 20 of manufacturing installation 20 possesses: the image processing part 126 of handling the image of being taken by the ccd video camera 97 that constitutes photography portion 94, calculate that portion 128 is calculated with respect to the position offset of the position offset Δ K of the limit portion of reference plate 99 in bight 96 and according to the cut-out control part 130 of the action of the position offset Δ K control shut-off mechanism 48 of calculating the bight 96 that portion 128 calculates by position offset according to processed image information.Cut off position offset Δ K that control part 130 judges bights 96 whether in allowed band, its result of determination is presented on the display part 132, on the other hand, when above-mentioned position offset Δ K is not in allowed band, forbid that the cut-out of the banded photoelectric sheet 22 that undertaken by shut-off mechanism 48 handles the control of perhaps changing off-position.
Below from the action of manufacture method related aspect of the present invention explanation according to above-mentioned such manufacturing installation that constitutes 20.
At first, by the photoelectric sheet roller 23 that is installed on the thin plate delivering mechanism 32 banded photoelectric sheet 22 is sent.Banded photoelectric sheet 22 is transported to organisation of working 36.
In organisation of working 36; circle sword 52a, 52b move along the width of banded photoelectric sheet 22; from diaphragm 30 to photo-sensitive resin 28 and even the above-mentioned banded photoelectric sheet 22 of pliability base protective film 26 incision, only form half cut-off position 34a, 34b (with reference to Fig. 2) that the width M with the nubbin B of diaphragm 30 separates.By this, on banded photoelectric sheet 22, establish the place ahead released part A and rear released part A (with reference to Fig. 2) with the state of clamping nubbin B.
In addition, set the width M of nubbin B as benchmark as prerequisite, with the distance between the glass substrate 24 between the rubber roll 80a, the 80b that supply with labelling machine 46 not prolong banded photoelectric sheet 22.In addition, one group of half cut-off position 34a, 34b forming with width M are formed on the banded photoelectric sheet 22 with the interval of the datum length of the photo-sensitive resin 28 that sticks on glass substrate 24.
Then, banded photoelectric sheet 22 is transported to mark bonding agency 40, the adhesion part of the regulation of configuration protection film 30 on supporting station 56.In mark bonding agency 40; keep the bonding mark 38 of regulation piece number by adsorption gasket 54b~54g absorption, the state of crossing over the nubbin B of diaphragms 30 with each bonding mark 38 makes the released part A at the released part A in the place ahead and rear be bonded as one (with reference to Fig. 3).
For example, as shown in Figure 1, the banded photoelectric sheet 22 of bonding 7 pieces of bonding marks 38 is delivered to mechanism for stripping 44 continuously after storing the tension change that mechanism 42 prevents to send side.In mechanism for stripping 44, the pliability basilar memebrane 26 of banded photoelectric sheet 22 keeps by sucking tube 62 absorption, and diaphragm 30 remaining nubbin B and peeling off from above-mentioned banded photoelectric sheet 22.This diaphragm 30 is stripped from by means of stripper roll 63, by diaphragm coiling portion 64 coilings (with reference to Fig. 1).
Under the effect of mechanism for stripping 44; remaining nubbin B of diaphragm 30 and after peeling off from pliability basilar memebrane 26; banded photoelectric sheet 22 carries out tension adjustment by tension control mechanism 66, constantly the image of the banded photoelectric sheet 22 that comprises half cut-off position 34a, 34b is taken in the photography of regulation in photography portion 47 then.
Banded photoelectric sheet 22 by photography portion 47 is transported to labelling machine 46, carry out 28 pairs of glass substrates 24 of photo-sensitive resin transfer process (lamination).At this moment, adjust the half cut-off position 34a in the labelling machine 46, the position of 34b according to the image of the half cut-off position 34a, the 34b that take by photography portion 47.
In labelling machine 46, initial, rubber roll 80a, 80b are set to the state that separates, and when the half cut-off position of banded photoelectric sheet 22 34a was positioned state on the assigned position between rubber roll 80a, the 80b, the conveying of banded photoelectric sheet 22 temporarily stopped.Under this state, when the leading section that is heated to the glass substrate 24 of set point of temperature by the substrate heating part 74 that constitutes substrate feed mechanism 45 is transferred portion 76 and is transported between rubber roll 80a, the 80b, under the effect of press cylinder 84, backing roll 82b and rubber roll 80b rise, and clamp glass substrate 24 and banded photoelectric sheet 22 with the extruding force of regulation between rubber roll 80a, 80b.In addition, rubber roll 80a, 80b are heated to the stack temperature of regulation.
Then, rubber roll 80a, 80b rotation is carried glass substrate 24 and banded photoelectric sheet 22 along arrow Y direction.Its result, photo-sensitive resin 28 is heated fusing, and transfer printing (lamination) is on glass substrate 24.
In addition, condition as lamination is: speed is 1.0m/min~10.0m/min, the temperature of rubber roll 80a, 80b is 80 ℃~150 ℃, and the rubber hardness of above-mentioned rubber roll 80a, 80b is 40 degree~90 degree, and the squeeze pressure (line pressure) of this rubber roll 80a, 80b is 50N/cm~400N/cm.
When the banded photoelectric sheet 22 that finishes 1 piece of glass substrate 24 lamination, rubber roll 80a, 80b stop the rotation, and on the other hand, the leading section of the glass substrate 24 of the banded photoelectric sheet 22 of lamination is clamped by substrate conveying roller 90a.At this moment, half cut-off position 34b is configured on the assigned position between rubber roll 80a, the 80b.
And; rubber roll 80b retreats and removes clamping along the direction of separating from rubber roll 80a; and substrate conveying roller 90a restarts with low speed rotation; banded photoelectric sheet 22 is stacked in photosensitive laminate behind the glass substrate 24; be transferred the corresponding distance of width M with the nubbin B of diaphragm 30 along arrow Y direction; next half cut-off position 34a be transported to rubber roll 80a below near assigned position after, the rotation of rubber roll 80a, 80b stops.In addition, below will only between half cut-off position 32a, 32b, carry the processing of banded photoelectric sheet 22 to be called " carrying between substrate ".
On the other hand, under above-mentioned state, carry next glass substrate 24 to paste position by means of substrate feed mechanism 45.By above repeatedly action, make photosensitive laminate continuously.
At this moment, as shown in Figure 4, the nubbin B of the protected film 30 in photosensitive laminate end separately covers.Thereby when being transferred to photoresist 28 on the glass substrate 24, rubber roll 80a, 80b can not polluted by above-mentioned photo-sensitive resin 28.
After the photosensitive laminate of being made by labelling machine 46 is carried banded photoelectric sheet 22 between with labelling machine 46 substrates, when being in temporary transient halted state, by the banded photoelectric sheet between the glass substrate 24 22 is cut off separating by being provided in shut-off mechanism 48 between substrate conveying roller 90b, the 90c.
Here, owing to supply with banded photoelectric sheet 22, and in labelling machine 46, be heated and stick on the glass substrate 24, so can extend with the state of giving regulation tension force.At this moment, worry the banded photoelectric sheet 22 of 24 of glass substrates to be configured on the off-position of shut-off mechanism 48 regulations because of the elongation of banded photoelectric sheet 22.
Therefore, cut off the Position Control shut-off mechanism 48 of control part 130 bases, thereby avoid the interference between glass substrate 24 and the shut-off mechanism 48 by the glass substrate 24 of photography portion 94 instrumentations on the assigned position in the downstream that is configured in shut-off mechanism 48.
Constitute the ccd video camera 97 of the photography portion 94 in the downstream be provided in shut-off mechanism 48, the illumination light that receives from two-dimension light source 95 by means of glass substrate 24, thus the image in the bight 96 of glass substrate 24 is photographed.At this moment, comprise the image in bight 96 and the image of reference plate 99 in the image in photography zone 98.As shown in Figure 5, because glass substrate 24 is set also widelyer than banded photoelectric sheet 22, so can not take the image in bight 96 reliably because of banded photoelectric sheet 22 is hindered.
Image by ccd video camera 97 is taken is sent to image processing part 126 as image information, handles by the image of implementing regulation, obtains the positional information of bight 96 and reference plate 99.At this moment, because the shape that the bight 96 that is taken tilts with respect to the throughput direction formation of glass substrate 24 so can not confuse with banded photoelectric sheet 22, can obtain the positional information in bight 96 reliably.The positional information that obtains is sent to position offset and calculates portion 128, calculates the position offset Δ K of bight 96 with respect to reference plate 99.
In allowed limits whether the position offset Δ K in the bight 96 that 130 judgements of cut-out control part are calculated.At this moment, as shown in Figure 4, because the distance L of shut-off mechanism 48 and reference plate 99 is by constant fixing,, judge whether interference of glass substrate 24 and shut-off mechanism 48 so can obtain the rearward end and the relation of the position between the shut-off mechanism 48 of glass substrate 24 according to the position offset Δ K that calculates.
Cut off control part 130 and on display part 132, show result of determination, and under the situation that is judged to be possible interference, control shut-off mechanism 48 is forbidden the control of the cut-out processing of banded photoelectric sheet 22.By this, it is damaged just can to avoid glass substrate 24 to occur in advance.In addition, as long as according to calculating the position offset Δ K that portion 128 calculates by position offset, set the off-position that shut-off mechanism 48 and glass substrate 24 do not interfere with each other and cut off processing, just can not interrupt and the manufacturing that continues to be undertaken by manufacturing installation 20 photosensitive laminate is handled.
On the other hand, on the photosensitive laminate that is separated by shut-off mechanism 48, pliability basilar memebrane 26 is installed, this pliability basilar memebrane 26 is stripped from the back to next treatment process supply with the diaphragm 30 of 24 of glass substrates.
In addition, in the above-described embodiment, its structure is, according to sticking on glass substrate 24 by the banded photoelectric sheet 22 that 1 photoelectric sheet roller 23 is supplied with, thereby make the photosensitive laminate of so-called 1 stickup, but its structure for example also can be, supplies with banded photoelectric sheet 22 and sticks on 2 adhesions of the what is called production line on the glass substrate 24,3 photosensitive laminates such as adhesion production line from 2 photoelectric sheet rollers or the photoelectric sheet roller more than 3.
Claims (12)
1. the manufacturing installation of a photosensitive laminate; this device will stack gradually the banded photoelectric sheet (22) that photosensitive material layer (28) and diaphragm (30) form and send on supporter (26); form and the released part (A) of said protection film (30) and the corresponding working position (34a of boundary position between the remainder (B) in part from said protection film (30) to above-mentioned photosensitive material layer (28); 34b); in the above-mentioned released part (A) of peeling off said protection film (30) afterwards; with the substrate of supplying with the interval of regulation (24) with above-mentioned banded photoelectric sheet (22) continuously to heated a pair of hold-down roller (80a; send 80b); between aforesaid substrate (24), dispose the above-mentioned remainder (B) of said protection film (30); and make the above-mentioned photosensitive material layer (28) that exposes stick on aforesaid substrate (24); then; between aforesaid substrate (24), above-mentioned banded photoelectric sheet (22) is cut off and separation; to make photosensitive laminate, this manufacturing installation possesses:
Instrumentation portion (94), its to be provided in from the cut-out portion (48) that cuts off above-mentioned banded photoelectric sheet (22) to the downstream of the throughput direction of above-mentioned photosensitive laminate with the predetermined distance position spaced and the position in bight (96) that constitutes the aforesaid substrate (24) of above-mentioned photosensitive laminate carry out instrumentation and
Control part (130), its basis is controlled above-mentioned cut-out portion (48) by the position in the above-mentioned bight (96) of above-mentioned instrumentation portion (94) instrumentation.
2. the manufacturing installation of photosensitive laminate according to claim 1 is characterized in that,
The width in the direction vertical with above-mentioned throughput direction of aforesaid substrate (24) is set to wideer than the width in the direction vertical with above-mentioned throughput direction of above-mentioned banded photoelectric sheet (22).
3. the manufacturing installation of photosensitive laminate according to claim 2 is characterized in that,
By the above-mentioned bight (96) of above-mentioned instrumentation portion (94) instrumentation position, constitute by the shape that tilts with respect to above-mentioned throughput direction.
4. the manufacturing installation of photosensitive laminate according to claim 1 is characterized in that,
Above-mentioned control part (130) according to the position of above-mentioned bight (96), is judged presence of interference between above-mentioned cut-out portion (48) and the aforesaid substrate (24), controls above-mentioned cut-out portion (48) according to above-mentioned result of determination.
5. the manufacturing installation of photosensitive laminate according to claim 4 is characterized in that,
Above-mentioned control part (130) when judging above-mentioned cut-out portion (48) and aforesaid substrate (24) interference, carries out making above-mentioned cut-out portion (48) handle the control of forbidding to the cut-out of above-mentioned banded photoelectric sheet (22).
6. the manufacturing installation of photosensitive laminate according to claim 4 is characterized in that,
Above-mentioned control part (130) when judging above-mentioned cut-out portion (48) and aforesaid substrate (24) interference, is carried out the control of the above-mentioned cut-out portion of change (48) to the off-position of above-mentioned banded photoelectric sheet (22).
7. the manufacturing installation of photosensitive laminate according to claim 1 is characterized in that,
Above-mentioned instrumentation portion (94), possesses video camera (97), it is to photographing simultaneously at the reference plate (99) that sets with the predetermined distance position spaced to the downstream of the throughput direction of above-mentioned photosensitive laminate from above-mentioned cut-out portion (48) and the image of above-mentioned bight (96)
Above-mentioned instrumentation portion (94) is to carrying out instrumentation by the above-mentioned bight (96) of above-mentioned video camera (97) photography with respect to the position of said reference sheet (99).
8. the manufacture method of a photosensitive laminate; will be on supporter (26) lamination photosensitive material layer (28) and diaphragm (30) and the banded photoelectric sheet (22) that forms is sent successively; form and the released part (A) of said protection film (30) and the corresponding working position (34a of boundary position between the remainder (B) in part from said protection film (30) to above-mentioned photosensitive material layer (28); 34b); after the above-mentioned released part (A) of said protection film (30) peeled off; with the substrate of supplying with the interval of regulation (24) with above-mentioned banded photoelectric sheet (22) to heated a pair of hold-down roller (80a; send continuously 80b); between aforesaid substrate (24), dispose the above-mentioned remainder (B) of said protection film (30); and make the above-mentioned photosensitive material layer (28) that exposes stick on aforesaid substrate (24); then; between aforesaid substrate (24), above-mentioned banded photoelectric sheet (22) is cut off and separation; thereby make this photosensitive laminate, described manufacture method is made of following operation:
To be provided in from the cut-out portion (48) that cuts off above-mentioned banded photoelectric sheet (22) to the downstream of the throughput direction of above-mentioned photosensitive laminate with the predetermined distance position spaced and the position in bight (96) that constitutes the aforesaid substrate (24) of above-mentioned photosensitive laminate carry out instrumentation operation and
According to the position in the above-mentioned bight (96) of institute's instrumentation, control above-mentioned cut-out portion (48), cut off the operation of the above-mentioned banded photoelectric sheet (22) between aforesaid substrate (24).
9. the manufacture method of photosensitive laminate according to claim 8 is characterized in that,
According to the position in the above-mentioned bight (96) of instrumentation, judge presence of interference between above-mentioned cut-out portion (48) and the aforesaid substrate (24), control above-mentioned cut-out portion (48) according to above-mentioned result of determination.
10. the manufacture method of photosensitive laminate according to claim 9 is characterized in that,
When judging above-mentioned cut-out portion (48) and aforesaid substrate (24) interference, carry out making above-mentioned cut-out portion (48) handle the control of forbidding to the cut-out of above-mentioned banded photoelectric sheet (22).
11. the manufacture method of photosensitive laminate according to claim 9 is characterized in that,
When judging above-mentioned cut-out portion (48) and aforesaid substrate (24) interference, carry out the control of the above-mentioned cut-out portion of change (48) to the off-position of above-mentioned banded photoelectric sheet (22).
12. the manufacture method of photosensitive laminate according to claim 8 is characterized in that,
To photographing simultaneously at the reference plate (99) that sets with the predetermined distance position spaced to the conveyance direction downstream side of above-mentioned photosensitive laminate from above-mentioned cut-out portion (48) and the image of above-mentioned bight (96), the captured above-mentioned bight (96) of instrumentation is with respect to the position of said reference sheet (99).
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JP2007049507A JP2008216295A (en) | 2007-02-28 | 2007-02-28 | Apparatus and method for manufacturing photosensitive laminate |
JP2007049507 | 2007-02-28 |
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Cited By (4)
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CN101898366A (en) * | 2009-05-29 | 2010-12-01 | 富士胶片株式会社 | The cutting-off method of duplexer |
CN102196720A (en) * | 2010-03-19 | 2011-09-21 | 株式会社日立高新技术 | Assembling device of flat panel display FPD module |
CN105197659A (en) * | 2015-08-26 | 2015-12-30 | 蚌埠市高德机械自动化科技有限公司 | Automatic cloth ironing machine of filter element plate of filter |
CN109641440A (en) * | 2016-06-08 | 2019-04-16 | 康宁股份有限公司 | Laminating apparatus |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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TW201237983A (en) * | 2011-03-11 | 2012-09-16 | Lan Teh Industry Co Ltd | Hot cutting device for semiconductor process |
US9340451B2 (en) | 2013-02-28 | 2016-05-17 | Corning Incorporated | Machining of fusion-drawn glass laminate structures containing a photomachinable layer |
KR102240570B1 (en) | 2014-05-13 | 2021-04-15 | 삼성전자주식회사 | Method and apparatus for generating spanning tree,method and apparatus for stereo matching,method and apparatus for up-sampling,and method and apparatus for generating reference pixel |
-
2007
- 2007-02-28 JP JP2007049507A patent/JP2008216295A/en active Pending
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2008
- 2008-02-13 KR KR1020080013192A patent/KR20080080001A/en not_active Application Discontinuation
- 2008-02-26 CN CNA200810080893XA patent/CN101254677A/en active Pending
- 2008-02-27 TW TW097106724A patent/TW200843955A/en unknown
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101898366A (en) * | 2009-05-29 | 2010-12-01 | 富士胶片株式会社 | The cutting-off method of duplexer |
CN102196720A (en) * | 2010-03-19 | 2011-09-21 | 株式会社日立高新技术 | Assembling device of flat panel display FPD module |
CN105197659A (en) * | 2015-08-26 | 2015-12-30 | 蚌埠市高德机械自动化科技有限公司 | Automatic cloth ironing machine of filter element plate of filter |
CN109641440A (en) * | 2016-06-08 | 2019-04-16 | 康宁股份有限公司 | Laminating apparatus |
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JP2008216295A (en) | 2008-09-18 |
KR20080080001A (en) | 2008-09-02 |
TW200843955A (en) | 2008-11-16 |
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