KR20080088372A - Film feeding apparatus and film feeding method - Google Patents

Film feeding apparatus and film feeding method Download PDF

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Publication number
KR20080088372A
KR20080088372A KR1020080016183A KR20080016183A KR20080088372A KR 20080088372 A KR20080088372 A KR 20080088372A KR 1020080016183 A KR1020080016183 A KR 1020080016183A KR 20080016183 A KR20080016183 A KR 20080016183A KR 20080088372 A KR20080088372 A KR 20080088372A
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KR
South Korea
Prior art keywords
film
conveying
conveyance
downstream
roller pair
Prior art date
Application number
KR1020080016183A
Other languages
Korean (ko)
Inventor
료 모리
아키히코 하세
Original Assignee
후지필름 가부시키가이샤
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Priority to JP2007086403A priority Critical patent/JP4861873B2/en
Priority to JPJP-P-2007-00086403 priority
Application filed by 후지필름 가부시키가이샤 filed Critical 후지필름 가부시키가이샤
Publication of KR20080088372A publication Critical patent/KR20080088372A/en

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    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67132Apparatus for placing on an insulating substrate, e.g. tape
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H23/00Registering, tensioning, smoothing or guiding webs
    • B65H23/04Registering, tensioning, smoothing or guiding webs longitudinally
    • B65H23/32Arrangements for turning or reversing webs
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L21/6836Wafer tapes, e.g. grinding or dicing support tapes

Abstract

The film conveying apparatus 48 is provided with the unit main body 94, and this unit main body 94 is a conveyance opposite to the conveyance direction along the conveyance path 88 in the state in which the elongate photosensitive web 22 was stopped. Is moved in the direction. The unit main body 94 has a cutting mechanism 106 for cutting the elongate photosensitive web 22, a first film conveying roller pair 112a and a second film disposed on the upstream side of the cutting mechanism 106. The conveying roller pair 112b and the 3rd film conveying roller pair 112c arrange | positioned at the conveyance direction downstream side of the said cutting mechanism 106 are accommodated.

Description

Film conveying apparatus and film conveying method {FILM FEEDING APPARATUS AND FILM FEEDING METHOD}

The present invention relates to a film conveying apparatus and a film conveying method for retaining the tip of a stopped film and conveying the film along a conveying path.

For example, the board | substrate for liquid crystal panels, the board | substrate for printed wirings, and the board | substrate for PDP panels are comprised by attaching the photosensitive sheet body (photosensitive web) which has a photosensitive resin layer (photosensitive material layer) to the surface of a board | substrate. For example, the photosensitive resin layer and the protective film are laminated | stacked sequentially on the flexible plastic support body.

The manufacturing apparatus used for the attachment of this kind of photosensitive sheet body usually conveys a substrate such as a glass substrate or a resin substrate at predetermined intervals and transports them between lamination rollers, and also in the range of the photosensitive resin layer adhered to the substrate. The system which conveys the photosensitive sheet | seat which peeled the corresponding protective film between the said lamination rollers is employ | adopted.

For example, in the lamination method of the dry resist film disclosed by Unexamined-Japanese-Patent No. 8-183146, as shown in FIG. 8, a board | substrate preheat part, a laminate part, a board | substrate cooling part, a board | substrate film cut part, The film removal part is arrange | positioned sequentially along the conveyance direction of the board | substrate 1. The substrate 1 is heated to a predetermined temperature by the preheat heater 2 of the substrate preheating unit, and then transferred to the laminate unit.

A pair of laminate rollers 3a and 3b are disposed in the laminate portion, and the dry resist film 4 is transferred between the laminate rollers 3a and 3b because the substrate 1 and the dry resist film 4 are transferred. The substrate 1 is thermocompressed. In addition, the cover film 5 is peeled off beforehand in the dry resist film 4, and the resist layer which is not shown in figure is thermocompressed toward the board | substrate 1 side.

Moreover, the board | substrate 1 to which the dry resist film 4 was thermocompression-bonded is conveyed to the board | substrate cooling part via the conveyance roller 6, and is cooled by the board | substrate cooling means 7. As the dry resist film 4 is cooled by the substrate cooling unit, the resist layer of the dry resist film 4 is cured and the adhesion to the substrate 1 is improved. Therefore, the peeling of a resist layer is prevented from occurring by the stress of cutting | disconnection, when cut | disconnecting the dry resist film 4 in the board | substrate film cutting part of the next stage.

Subsequently, the dry resist film 4 which connects the board | substrates 1 to each other is a board | substrate film cutting part, and is cut | disconnected by the board | substrate film cutting means 8 provided with the cutter, and the said board | substrate 1 is made of film Are rejected. In this film removing part, after the board | substrate 1 is reheated by the heating roll 9, the dry resist film between the cut surfaces formed between the said board | substrates 1 through the film peeling means 10, and formed by a cutting process. (4) is removed from the substrate (1).

In the said prior art, only the dry resist film 4 may be conveyed in an arrow direction. For example, when starting lamination by automatic operation or when conveying and removing the said dry resist film 4 heated by the lamination rollers 3a and 3b for one minute without removing the board | substrate 1 during automatic operation, This is when the dry resist film 4 is discharged and cut by manual operation and finished.

When this kind of treatment is performed, the dry resist film 4 is stopped in a state of being cut by the film cutting means 8 on the substrate. And when a work is resumed, the front-end | tip part of the dry resist film 4 is arrange | positioned downstream of the said board | substrate film cutting means 8 under the rotational action of the conveyance roller arrange | positioned upstream of the board | substrate film cutting means 8, and so on. Is conveyed to the conveying roller.

However, since the dry resist film 4 is in direct sliding contact with the conveying roller, static electricity due to peeling charging or the like is generated, and the dry resist film 4 may adhere to a film conveying guide member (not shown) or the like. . Thereby, the dry resist film 4 is not conveyed satisfactorily, and clogging is easy to occur, for example, normal equipment conveyance of the board | substrate 1 is interrupted | blocked, and the malfunction of equipment, such as the said board | substrate 1 being damaged, arises. There is a problem.

The present invention solves this kind of problem, and it is possible to prevent clogging of the film with a simple configuration and process as much as possible, to maintain the tip of the stopped film and to smoothly and reliably move the film along the conveying path. It aims at providing the film conveying apparatus and film conveying method which can be conveyed.

This invention relates to the film conveying apparatus for holding the tip part of the film which is stopped and conveying the said film along a conveyance path.

The film conveying apparatus is a unit main body which accommodates the cutting mechanism which cuts a film, the upstream film conveyance roller pair arrange | positioned at the conveyance direction upstream of the said cutting mechanism, and the downstream film conveyance roller pair arrange | positioned at the conveyance direction downstream of the said cutting mechanism. And an opposite direction of conveyance along the conveying path opposite to the conveying direction along the conveying path in the state in which the film is stopped when the distal end portion of the film cut by the cutting mechanism is sandwiched between the downstream film conveying roller pairs. Rotational torque in the film conveying direction for conveying the film in the conveying direction with respect to the drive mechanism for moving the film and the unit body moving in the conveying direction and the upstream film conveying roller pair and the downstream film conveying roller pair; It is provided with a torque motor to give.

Moreover, this invention relates to the film conveyance method for holding the tip part of the film which is stopped, and conveying the said film along a conveyance path.

The film conveying method includes the steps of moving the film conveying roller pair in a film conveying direction while moving the film in a direction opposite to the conveying direction while the film is stopped, and sandwiching the tip of the film by the film conveying roller pair; Moreover, it has a process of sending out the said film in the said conveyance direction under the rotation action of the said film conveyance roller.

In the present invention, the film conveying roller pair rotates in the film conveying direction while the film is stopped and moves in the conveying opposite direction opposite to the conveying direction. For this reason, compared with the case where a film is conveyed toward a film conveyance roller pair, it can hold | maintain the said film in a desired flat shape, and it becomes possible to prevent clogging of the said film as much as possible. Thereby, the front-end | tip part of a film is reliably held by a simple structure and process, and the said film can be conveyed smoothly and satisfactorily along a conveyance path.

The above objects, features, and advantages will become more apparent from the following description of the preferred embodiments in cooperation with the accompanying drawings.

1: is a schematic block diagram of the manufacturing system 20 of the photosensitive laminated body which mounts the film conveyance apparatus which concerns on embodiment of this invention. This manufacturing system 20 uses the photosensitive resin layer 28 (to be described later) of the elongate photosensitive web 22 having a predetermined width dimension in a manufacturing process such as a liquid crystal or a color filter for an organic EL or the like on the glass substrate 24. Thermal transfer (lamination) is performed.

2 is a cross-sectional view of an elongate photosensitive web 22 used in the manufacturing system 20. This elongate photosensitive web 22 is comprised by laminating | stacking the flexible base film (support) 26, the photosensitive resin layer (photosensitive material layer) 28, and the protective film 30. As shown in FIG.

As shown in FIG. 1, the manufacturing system 20 accommodates the photosensitive web roll 23 which wound the elongate photosensitive web 22 in roll shape, and the said elongate photosensitive web 22 from the said photosensitive web roll 23 is carried out. It is a boundary part of two places which can cut | disconnect in the width direction of the web delivery mechanism 32 which can send out the said, and the protective film 30 and the photosensitive resin layer 28 of the said elongate photosensitive web 22 which were sent out. A processing mechanism 36 forming half cut portions 34a and 34b (see FIG. 2), and an adhesive label 38 (see FIG. 3) having a non-adhesive portion 38a on a portion thereof is attached to the protective film 30. It is provided with a label adhesion mechanism 40 to adhere.

Downstream of the label adhesive mechanism 40 is a reservoir mechanism 42 for changing the elongate photosensitive web 22 from tact transfer to continuous transfer and a protective film from the elongate photosensitive web 22. The peeling mechanism 44 which peels 30 at predetermined length space | intervals is arrange | positioned.

Downstream of the peeling mechanism 44, the substrate supply mechanism 45 which supplies the glass substrate 24 to the attachment position in the state heated at the predetermined temperature, and the photosensitive resin layer exposed by peeling of the protective film 30 ( The attachment mechanism 46 which attaches 28 to the said glass substrate 24 integrally, and the film conveyance apparatus 48 which concern on this embodiment are arrange | positioned.

In the downstream vicinity of the web delivery mechanism 32, a mounting table 49 is attached to the rear end of the elongated photosensitive web 22, which has been substantially used, and the tip of the elongated photosensitive web 22 to be used. Downstream of the mounting base 49, the film terminal position detector 53 is disposed in order to control the shift in the width direction due to the shift in winding of the photosensitive web roll 23.

The processing mechanism 36 is disposed downstream of the roller pair 50 for calculating the roll diameter of the photosensitive web roll 23 accommodated in the web delivery mechanism 32. The processing mechanism 36 has a pair of round blades 52a and 52b spaced apart by the distance M (see FIG. 2). The round blades 52a and 52b travel in the width direction of the elongate photosensitive web 22 and are half-cut portions 34a and 34b at two predetermined positions between the remaining portions B of the protective film 30. ) (See FIG. 2).

The half cut portions 34a and 34b need to cut at least the protective film 30 and the photosensitive resin layer 28, and in fact, the rounded edges 52a and 52b of the round blades 52a and 52b are cut out to the flexible base film 26. The incision depth is set. The round blades 52a and 52b move in the width direction of the elongate photosensitive web 22 in a fixed state without being rotated to form half cut portions 34a and 34b or the elongate photosensitive web 22. A method of forming the half cut portions 34a and 34b by moving in the width direction while rotating the image without slipping is adopted.

When the half cut portions 34a and 34b are attached to the glass substrate 24 with the photosensitive resin layer 28, for example, the half cut portions 34a and 34b are positioned to enter inwards from each end of the glass substrate 24 by 10 mm, respectively. Is set. In addition, when the remaining part B of the protective film 30 between the glass substrates 24 attaches the photosensitive resin layer 28 to the said glass substrate 24 in a frame shape in the attachment mechanism 46 mentioned later, It functions as a mask of.

Since the label adhesive mechanism 40 leaves the remaining part B of the protective film 30 corresponding to the glass substrate 24, the peeling part A and the half cut part 34a on the half cut part 34b side are left. The adhesive label 38 which connects the peeling part A of the side is supplied.

As shown in FIG. 3, the adhesive label 38 is comprised by the narrow elongate shape, for example, is formed with the same resin material as the protective film 30. As shown in FIG. The adhesive label 38 has a non-adhesive portion (including microadhesion) 38a to which a pressure-sensitive adhesive is not applied at the center, and both sides of the non-adhesive portion 38a, that is, the length of the adhesive label 38. It has the 1st adhesion part 38b adhering to the peeling part A of a front side, and the 2nd adhesion part 38c adhering to the back peeling part A at the both ends of a direction.

As shown in FIG. 1, the label sticking mechanism 40 is equipped with the adsorption pads 54a-54g which can attach up to 7 adhesive labels 38 spaced at predetermined intervals, and is the said adsorption pad 54a. At the attachment position of the adhesive label 38 by ˜54 g), a receiving table 56 for holding the elongate photosensitive web 22 from below is provided to be liftable.

The reservoir mechanism 42 is a dancer roller capable of swinging in the direction of an arrow so as to absorb the speed difference between the tact conveyance of the upstream elongate photosensitive web 22 and the continuous conveyance of the elongate photosensitive web 22 downstream. 60).

The peeling mechanism 44 disposed downstream of the reservoir mechanism 42 is provided with a suction drum 62 for blocking tension fluctuations on the delivery side of the elongate photosensitive web 22 and stabilizing tension during lamination. The peeling roller 63 is arrange | positioned in the vicinity of the suction drum 62, and the protective film 30 peeled off from the elongate photosensitive web 22 at an acute peeling angle via this peeling roller 63 is the remaining part ( Except for B), the film is wound around the protective film winding 64.

On the downstream side of the peeling mechanism 44, a tension control mechanism 66 capable of applying tension to the elongate photosensitive web 22 is disposed. The tension control mechanism 66 can adjust the tension of the elongate photosensitive web 22 by the swing of the tension dancer 70 under the driving action of the cylinder 68. In addition, the tension control mechanism 66 may be used as needed and can be deleted.

The board | substrate supply mechanism 45 is a board | substrate heating part (for example, heater) 74 arrange | positioned so that the glass substrate 24 may be fitted, and the conveyance part which conveys this glass substrate 24 to arrow Y direction ( 76 and a stop position detection sensor 78 for detecting a stop position of the rear end of the glass substrate 24. The substrate heating unit 74 constantly monitors the temperature of the glass substrate 24, and in the event of an abnormality, stops or alarms the conveying unit 76, and transmits abnormality information to transfer the abnormal glass substrate 24 in a later step. It can be used for NG emissions, quality control or production control. The air floating plate which is not shown in figure is arrange | positioned at the conveyance part 76, and the glass substrate 24 floats and is conveyed in the arrow Y direction. The conveyance of the glass substrate 24 can also be performed with a roller conveyor.

It is preferable to perform temperature measurement of the glass substrate 24 in the board | substrate heating part 74 or just before an attachment position. As a measuring method, in addition to a contact type (for example, a thermocouple), a non-contact type may be sufficient.

The attachment mechanism 46 is provided above and below, and is provided with the rubber roller (compression roller) 80a, 80b heated to predetermined temperature. The backup rollers 82a and 82b are in sliding contact with the rubber rollers 80a and 80b. One backup roller 82b is pressed by the pressure cylinder 84 which comprises the roller clamp part 83 to the rubber roller 80b side.

The glass substrate 24 is conveyed through the conveyance path 88 extended from the attachment mechanism 46 to the arrow Y direction. Film conveyance rollers 90a and 90b and the substrate conveyance roller 92 are arrange | positioned at this conveyance path 88. As shown in FIG. It is preferable that the space | interval of the rubber roller 80a, 80b and the board | substrate conveyance roller 92 is set to the length of one sheet or less of the glass substrate 24.

As shown in FIG. 4, the film conveying apparatus 48 is provided with the unit main body 94, This unit main body 94 conveys direction (arrow (Y) direction) and a conveyance opposite direction through the drive mechanism 96. As shown in FIG. Move in the {arrow (Z) direction} direction. The drive mechanism 96 includes a motor 100 mounted to the temporary stand 98, and the ball screw 102 connected to the motor 100 and extending in the horizontal direction is rotatable to the temporary stand 98. Supported. The ball screw 102 is screwed to the nut part 104 formed in the lower part of the unit main body 94, and the unit main body 94 is mounted on the guide rail 105 so as to be retractable. In addition, the drive mechanism 96 may be comprised by the self propellered drive part attached to the unit main body 94. FIG.

In the unit main body 94, the inter-substrate cutting mechanism 106 which cuts the elongate photosensitive web 22 between each glass substrate 24 is accommodated. This cutting mechanism 106 is provided with the cutter 108 which cut | disconnects the elongate photosensitive web 22 in the width direction, and the film press part 110 which can raise and fall facing the said cutter 108. As shown in FIG.

In the conveyance direction (arrow (Y) direction) upstream of the cutting mechanism 106, while the 1st film conveyance roller pair 112a and the 2nd film conveyance roller pair 112b are arrange | positioned, the conveyance direction of the said cutting mechanism 106 On the downstream side, the third film conveying roller pair 112c is disposed.

The 1st film conveyance roller pair 112a-the 3rd film conveyance roller pair 112c are equipped with the drive roller 114a, 114b, and 114c, and the driven roller 116a, 116b, and 116c. Torque motors 118a to 118c are applied to the driving rollers 114a to 114c to impart rotational torque in the film feeding direction (arrow C direction) for feeding the elongate photosensitive web 22 in the conveying direction. The driven rollers 116a to 116c may be displaced in a direction of being close to and separated from the driving rollers 114a to 114c through the cylinders 120a to 120c.

Guide plates 122a and 122b are disposed between the first film conveying roller pair 112a and the third film conveying roller pair 112c along the conveying path 88 with the cutting mechanism 106 interposed therebetween. On the guide plate 122b disposed downstream of the cutting mechanism 106, the belt member 124 is attached to the upper surface portion on which the elongate photosensitive web 22 is in sliding contact. The belt member 124 is, for example, coated with urethane on a polyester canvas, and fine irregularities of mesh shape are formed on the surface thereof. The antistatic bar 126 is arrange | positioned above the guide plate 122b as needed.

The rotary roller 128 is provided in the downstream vicinity of the 3rd film conveyance roller pair 12c. The rotary roller 128 is rotationally driven through the motor 130 and is capable of lifting and lowering under the action of the cylinder 132 and conveying the discharged long-shaped photosensitive web 22 (hereinafter also referred to as discharge film 22a). Guide to an aggregating furnace 134 branching from the furnace 88.

The film conveyance mechanism 138 which conveys the discharge film 22a to the accumulation box (integrated part) 136 is arrange | positioned in the accumulation path 134. As shown in FIG. The film conveying mechanism 138 is provided with guide belts 142a and 142b which are circumferentially run through the motors 140a and 140b, respectively. An anti-adhesion material 144 is installed in the integrated box 136, and an inclined surface 146 is formed on the bottom surface.

In the unit main body 94, the first film detection sensor 148 is disposed near the outlet of the third film conveying roller pair 112c, and the second film detection sensor 150 is disposed on the lower side of the film transfer mechanism 138. Is placed. The 1st film detection sensor 148 and the 2nd film detection sensor 150 are a transmissive optical sensor, for example, and it detects the presence of the elongate photosensitive web 22 by being turned on (shielding).

As shown in FIG. 1, in the manufacturing system 20, the web delivery mechanism 32, the processing mechanism 36, the label adhesion mechanism 40, the reservoir mechanism 42, the peeling mechanism 44, and the tension control mechanism 66 ) Is disposed above the attachment mechanism 46, but on the contrary, the web delivery mechanism 32 to the tension control mechanism 66 is disposed below the attachment mechanism 46 to form an elongated photosensitive web. The structure of attaching the photosensitive resin layer 28 to the lower side of the glass substrate 24 may be sufficient as the up-and-down of 22, and the conveyance path of the elongate photosensitive web 22 may be comprised linearly.

The interior of the manufacturing system 20 is partitioned into a first clean room 162a and a second clean room 162b through partition walls 160. The first clean room 162a and the second clean room 162b communicate with each other through the through part 164. The manufacturing system 20 is controlled via the control unit 166.

The operation of the manufacturing system 20 configured as described above will be described with reference to the conveying method according to the present embodiment.

First, the elongate photosensitive web 22 is sent out from the photosensitive web roll 23 attached to the web delivery mechanism 32. The elongate photosensitive web 22 is conveyed to the processing mechanism 36.

In the processing mechanism 36, the round blades 52a and 52b move in the width direction of the elongate photosensitive web 22 to move the elongate photosensitive web 22 from the protective film 30 to the photosensitive resin layer 28 to the flexible. The incision to the base film 26 is cut. As a result, half-cut portions 34a and 34b spaced apart by the width M of the remaining portion B of the protective film 30 are formed, and the remaining portion B is formed in the elongated photosensitive web 22. A peeling part A on the front side and a peeling part A on the back side are formed in between (refer FIG. 2).

Subsequently, the elongate photosensitive web 22 is conveyed to the label adhesive mechanism 40, and the predetermined attachment part of the protective film 30 is arrange | positioned on the accommodating stand 56. In the label adhesion mechanism 40, the predetermined number of adhesive labels 38 are adsorbed and held by the adsorption pads 54b to 54g. And each adhesive label 38 is integrally adhere | attached on the peeling part A of the front and the peeling part A of the back over the remaining part B of the protective film 30 (refer FIG. 3).

For example, as shown in FIG. 1, the elongate photosensitive web 22 to which the seven adhesive labels 38 adhere | attached prevents the tension fluctuation of the sending side via the reservoir mechanism 42, and then removes the peeling mechanism ( Is conveyed continuously. In the peeling mechanism 44, the flexible base film 26 of the elongate photosensitive web 22 is adsorbed and held on the suction drum 62, and the protective film 30 leaves the remaining portion B, and the elongated photosensitive It peels off the web 22. This protective film 30 is peeled off through the peeling roller 63 and wound up by the protective film winding part 64 (refer FIG. 1).

After the protective film 30 is peeled from the flexible base film 26 under the action of the peeling mechanism 44, leaving the remaining portion B, the elongated photosensitive web 22 is tensioned by the tension control mechanism 66. Adjustment is made.

Subsequently, the elongate photosensitive web 22 is conveyed to the attachment mechanism 46, and the thermal transfer process (lamination) of the photosensitive resin layer 28 with respect to the glass substrate 24 is performed. In the attachment mechanism 46, the rubber rollers 80a and 80b are set in the state separated from previously. And the conveyance of the said elongate photosensitive web 22 is stopped once in the state in which the half cut part 34a of the elongate photosensitive web 22 was positioned in the predetermined position between rubber rollers 80a and 80b.

Moreover, when the front-end | tip part of the glass substrate 24 heated by the board | substrate heating part 74 which comprises the board | substrate supply mechanism 45 is carried in between the rubber rollers 80a and 80b by the conveyance part 76, Under the action of the pressure cylinder 84, the backup roller 82b and the rubber roller 80b are raised. Thus, the glass substrate 24 and the elongate photosensitive web 22 are sandwiched between the rubber rollers 80a and 80b at a predetermined press pressure. In addition, the rubber rollers 80a and 80b are heated by predetermined | prescribed lamination temperature.

Next, the rubber rollers 80a and 80b rotate, and the glass substrate 24 and the elongate photosensitive web 22 are conveyed in the arrow Y direction. Thereby, the photosensitive resin layer 28 is melted by heat, and is thermally transferred (laminated) to the glass substrate 24.

Moreover, as lamination conditions, the speed is 1.0 m / min-10.0 m / min, the temperature of the rubber rollers 80a, 80b is 80 degreeC-140 degreeC, and the rubber hardness of the said rubber rollers 80a, 80b is 40 degree-90 degree The press pressures (linear pressure) of the rubber rollers 80a and 80b are 50 N / cm to 400 N / cm.

Rotation of the rubber rollers 80a and 80b is stopped when the lamination of one sheet of the elongate photosensitive web 22 with respect to the glass substrate 24 is complete | finished. On the other hand, the front end of the photosensitive laminated body 170 which is the glass substrate 24 in which the elongate photosensitive web 22 was laminated is clamped by the board | substrate conveyance roller 92. As shown in FIG. At this time, the half cut part 34b is arrange | positioned in the predetermined position between the rubber rollers 80a and 80b.

And the rubber roller 80b is evacuated in the direction away from the rubber roller 80a, a clamp is released, and rotation of the board | substrate conveyance roller 92 is restarted at low speed again. The photosensitive laminated body 170 is conveyed by the distance corresponding to the width | variety M of the remaining part B of the protective film 30 in the arrow Y direction, and the next half cut part 34a is a rubber roller 80a. After being conveyed to the predetermined position of the vicinity of (), rotation of the rubber rollers 80a and 80b is stopped.

On the other hand, the next glass substrate 24 is conveyed toward the attachment position through the substrate supply mechanism 45 in the said state. By repeating the above operation, the photosensitive laminated body 170 is continuously manufactured.

The photosensitive laminate 170 laminated by the attachment mechanism 46 is separated by cutting the elongate photosensitive web 22 between the glass substrates 24 by the cutting mechanism 106 accommodated in the unit body 94. do. The separated photosensitive laminated body 170 is equipped with the flexible base film 26, and this flexible base film 26 is peeled with the protective film 30 between the glass substrates 24, and then processed. Supplied to the process.

By the way, in the said manufacturing system 20, only the elongate photosensitive web 22 may be conveyed along the conveyance path 88. For example, when starting lamination by automatic operation, in addition to discarding the predetermined number of long shape photosensitive webs 22 in the accumulation box 136, it cuts by the cutting mechanism 106, and the said elongate shape This is a case where the distal end portion of the photosensitive web 22 is disposed corresponding to the cutting mechanism 106.

On the other hand, in order to stop automatic operation, the lamination process is stopped once and automatic operation is started immediately after discharging the glass substrate 24 after lamination.

In addition, when the glass substrate 24 is not supplied from the board | substrate supply mechanism 45 to the attachment mechanism 46 during the said automatic operation, the elongate photosensitive web 22 heated by the rubber roller 80a may be taken as an example. It is a case where it conveys in order to remove 1 minute.

Moreover, it is a case where the said elongate photosensitive web 22 is cut | disconnected by the cutting mechanism 106, after discharging the elongate photosensitive web 22 to the integrated box 136 by manual operation.

And when this kind of process is performed, the elongate photosensitive web 22 is stopped in the state cut | disconnected by the cutting mechanism 106. FIG. For this reason, as shown in FIG. 5, the front end part of the said elongate photosensitive web 22 is arrange | positioned between the 2nd film conveyance roller pair 112b and the 3rd film conveyance roller pair 112c.

Therefore, in the present embodiment, the unit main body 94 in the state of stopping the elongate photosensitive web 22 is stopped under the rotational action of the motor 100 constituting the drive mechanism 96 (the direction of the arrow Z). Start the move. At that time, as shown in FIG. 6, the torque motors 118a-118c drive the 1st film conveyance roller pair 112a-the 3rd film conveyance roller pair 112c, and each drive roller 114a-114c has an arrow. It is rotationally driven in the direction (C) (film feed direction). For this reason, in the 1st film conveyance roller pair 112a and the 2nd film conveyance roller pair 112b, it rotates without slipping on the elongate photosensitive web 22 in which the drive rollers 114a and 114b are stopped, and peeling off. The charging can be prevented.

On the other hand, when the unit main body 94 moves in the direction of the arrow Z, the rotary roller 128 and the guide belts 142a and 142b are respectively rotated and driven. Moreover, the film press part 110 is raised up once, and is preventing contact with the elongate photosensitive web 22. As shown in FIG.

As the unit body 94 moves in the direction of the arrow Z, the third film conveying roller pair 112c is sandwiched between the distal ends of the elongate photosensitive web 22 while rotating. Therefore, the front end of the elongate photosensitive web 22 is drawn out relatively in the arrow Y direction with respect to the 3rd film conveyance roller pair 112c.

Here, when the 1st film detection sensor 148 arrange | positioned near the exit of the 3rd film conveyance roller pair 112c is light-shielded (on), the timer which is not shown from the light-shielding timing of this 1st film detection sensor 148 is shown. By means of revelation. Then, after the predetermined time elapses, the rotating roller 128 is lowered under the action of the cylinder 132 (see FIG. 7).

In addition, this timer has a function of maintaining the protrusion amount of the tip of the elongate photosensitive web 22 within an appropriate range by setting the timing for lowering the rotary roller 128, while the elongated photosensitive web 22 is blocked. It also has a function as an abnormality detection means for stopping the installation by the.

At the timing when the rotary roller 128 is lowered, the movement of the unit body 94 in the direction of the arrow Z is stopped, and the film conveying rollers 90a and 90b are driven to drive the arrow of the elongate photosensitive web 22. The conveyance in the (Y) direction is started. The rotary roller 128 is lifted up through the cylinder 132 when the first film detection sensor 148 is turned off (transmissive) after the discharge film 22a is cut by the cutting mechanism 106.

On the other hand, the tip end of the discharge film 22a conveyed from the conveyance path 88 to the integration path 134 via the rotating roller 128 is conveyed between guide belts 142a and 142b. Accordingly, the discharge film 22a is conveyed in the integration box 136 under the guiding action of the guide belts 142a and 142b, and is well integrated along the inclination of the inclined surface 146 in the integration box 136. At that time, the antistatic adhesive material 144 is provided on the inner surface side of the integration box 136, and the discharge film 22a can be reliably integrated in the integration box 136 in a desired integration posture.

The second film detection sensor 150 is provided on the lower side of the guide belts 142a and 142b. When it is detected that the discharge film 22a of the prescribed amount is conveyed between the guide belts 142a and 142b through the second film detection sensor 150, the web feed by the film conveying rollers 90a and 90b is once stopped. . This is because when the discharge film 22a of a predetermined amount or more is conveyed between the guide belts 142a and 142b, the discharge film 22a is pushed out of the integrated box 136.

In this case, in this embodiment, when discharging | discharging the discharge film 22a by which the front-end | tip is arrange | positioned corresponding to the cutting mechanism 106 to the accumulation box 136, a 1st film is in the state which this discharge film 22a stopped. The unit main body 94 is moving in the conveyance opposite direction (arrow Z direction), rotating the conveying roller pair 112a-the 3rd film conveying roller pair 112c in the film conveyance direction.

For this reason, when conveying the discharge film 22a to the arrow Y direction under the rotation action of the 1st film conveyance roller pair 112a and the 2nd film conveyance roller pair 112b in the state which stopped the unit main body 94. FIG. In comparison with the above, the discharge film 22a can be maintained in a desired planar shape while being able to prevent peeling charging and the like. Therefore, the tip part of the discharge film 22a can be gripped more reliably by the 3rd film conveyance roller pair 112c, and the clogging of the said discharge film 22a can be prevented as much as possible.

Thereby, the film conveying apparatus 48 reliably keeps the front-end | tip of the discharge film 22a with a simple structure and process, and it is smooth to move the said discharge film 22a along the integration path 134 from the conveyance path 88. Moreover, the effect that it becomes possible to convey reliably is acquired. In addition, the said process is performed similarly in various situations in which the operation | movement which conveys only elongate photosensitive web 22 (exhaust film 22a) is required.

Moreover, it can have various functions shown below by using the 1st film detection sensor 148 and the 2nd film detection sensor 150. FIG.

First, when both the first film detection sensor 148 and the second film detection sensor 150 detect the discharge film 22a (on), the movement in the direction of the arrow Z of the unit main body 94 is stopped. In addition, the film conveying rollers 90a and 90b are driven to enable the conveying operation of the discharge film 22a.

In addition, when only the 1st film detection sensor 148 is turned on, an origin return operation is performed and it detects whether the 2nd film detection sensor 150 is turned on. And when the 2nd film detection sensor 150 does not turn on even if it passes for a fixed time, it determines with the clogging abnormality generate | occur | producing in the discharge film 22a in the integration furnace 134.

In addition, when the 1st film detection sensor 148 is off (transmission) and the 2nd film detection sensor 150 is ON (shielding) even if it passes for a fixed time, the discharge film 22a of the discharge film 22a will be carried out. It is judged that clogging abnormality has occurred.

In addition, after the operation | movement which conveys the discharge film 22a to the guide belt 142a, 142b side is performed, even if it passes for a fixed time, the 1st film detection sensor 148 and the 2nd film detection sensor 150 will be in each timing. If it is not turned on, it is determined that clogging abnormality has occurred in the discharge film 22a.

Moreover, the sensor 172 which performs discharge film clogging detection and full magnification detection can be arrange | positioned in the upper part of the integration box 136. FIG. The sensor 172 is turned on (light-shielding) during the discharge operation of the discharge film 22a. After the transfer of the discharge film 22a is completed, the sensor 172 is cut between substrates and turned off (transmission) by timing from a timer. If not, generate an alarm. In addition, the timing from a timer is set to the time to which the rear end of the discharge film 22a falls to the integration box 136 via the 3rd film conveyance roller pair 112c and the guide belts 142a and 142b.

In addition, in this embodiment, the countermeasure against blackout is performed corresponding to the part which the discharge film 22a contacts by static electricity. For example, the belt material 124 for antistatic measures is provided in the upper surface of the guide plate 122b, and the electrostatic adsorption of the discharge film 22a can be prevented.

BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic block diagram of the manufacturing system of the photosensitive laminated body which mounts the film conveyance apparatus which concerns on embodiment of this invention.

2 is a cross-sectional view of an elongate photosensitive web used in the manufacturing system.

3 is an explanatory view of a state in which an adhesive label is adhered to an elongate photosensitive web.

It is a schematic block diagram of the said film conveyance apparatus.

5 is an operation explanatory diagram of the film conveying apparatus.

6 is an operation explanatory diagram of the film conveying apparatus.

7 is an operation explanatory diagram of the film conveying apparatus.

8 is an explanatory view of a lamination method of a dry resist film according to the prior art.

Claims (12)

  1. As the film conveying apparatus 48 for holding the tip part of the film 22 which is stopped, and conveying the said film 22 along the conveyance path 88:
    On the cutting mechanism 106 which cuts the said film 22, the upstream film conveying roller pair 112a arrange | positioned at the conveyance direction upstream of the said cutting mechanism 106, and the conveyance direction downstream of the said cutting mechanism 106. A unit body 94 in which downstream film conveying roller pairs 112c disposed are accommodated;
    When the front end of the film 22 cut by the cutting mechanism 106 is sandwiched between the downstream film conveying roller pair 112c, the unit main body 94 is held in the state where the film 22 is stopped. A drive mechanism 96 moving along the conveying path 88 in a conveying opposite direction opposite to the conveying direction; And
    When the unit 94 main body moves in the opposite direction to the conveyance, the film 22 is conveyed in the conveying direction with respect to the upstream film conveying roller pair 112a and the downstream film conveying roller pair 112c. The film conveying apparatus characterized by including the torque motors (118a, 118b) which provide rotational torque in a film conveyance direction.
  2. The said main unit 94 is arrange | positioned downstream of the said downstream side film conveying roller pair 112c, and moves the said conveyance path 88 under the rotation action of the said downstream side film conveying roller pair 112c. And a rotating roller (128) for guiding the tip of the film (22) to be sent out along the integration path (134) branched from the conveyance path (88).
  3. 3. The film conveying apparatus according to claim 2, wherein the rotating roller (128) is configured to be able to move back and forth with respect to the integrated path (134) under the action of the cylinder (132).
  4. The film conveying apparatus of Claim 2 in which the film conveyance mechanism (138) which conveys the said film (22) to the accumulation site | part 136 is arrange | positioned in the said accumulation path 134.
  5. 5. The apparatus of claim 4, further comprising: a first film detection sensor (148) disposed near an exit of said downstream film conveying roller pair (112c); And
    The film conveying apparatus characterized by including the 2nd film detection sensor (150) arrange | positioned at the said film conveyance mechanism (138).
  6. The film according to any one of claims 1 to 5, wherein the film is an elongated photosensitive web (22) in which a photosensitive material layer (28) and a protective film (30) are sequentially laminated on a support (26);
    The unit main body 94 sends the elongate photosensitive web 22 from which the peeling portion of the protective film 30 is peeled between the heated pair of pressing rollers 80a and 80b to be attached to the substrate 24. A film conveying apparatus, characterized in that it is disposed downstream of the laminate mechanism (46).
  7. As a film conveying method for holding the tip of the film 22 that is stationary and conveying the film 22 along the conveying path 88:
    Moving the film conveying roller pair (112a) in the film conveying direction in the stopped state while moving the film 22 in the conveying opposite direction opposite to the conveying direction; And
    It has a process of fitting the front-end | tip of the said film 22 between the said film conveyance roller pairs 112a, and sending out the said film 22 to the said conveyance direction under the rotation action of the said film conveyance roller 112a. Film conveyance method made into.
  8. The cutting mechanism 106 which cuts the said film 22, the upstream film conveying roller pair 112a arrange | positioned in the conveyance direction upstream of the said cutting mechanism 106, and the said cutting mechanism 106 The upstream film conveying roller pair 112a and the downstream film conveying roller while moving the unit body 94 in which the downstream film conveying roller pair 112c disposed on the conveying direction downstream side of the conveying direction is opposite to the conveying direction. The film conveying method of providing a rotation torque to the film conveyance direction for sending out the said film 22 to the said conveyance direction with respect to a pair (112c).
  9. The film 22 is sent out in the conveying direction under the rotational action of the downstream film conveying roller pair 112c, while the tip of the film 22 is pressed by the rotating roller 128. And a conveying path (134) branched from the conveying path (88) under rotational action.
  10. 10. The film according to claim 9, wherein the film (22) guided to the integration path (134) by the rotating roller (128) is conveyed to the accumulation site (136) through a film transport mechanism (138). Bounce method.
  11. The process of Claim 10 which detects the presence or absence of the said film (22) by the 1st film detection sensor (148) arrange | positioned in the vicinity of the exit of the said downstream film conveying roller pair (112c); And
    The film conveyance method characterized by having the process of detecting the presence or absence of the said film (22) by the 2nd film detection sensor (150) arrange | positioned at the said film conveyance mechanism (138).
  12. 12. The film according to any one of claims 7 to 11, wherein the film is an elongated photosensitive web (22) in which a photosensitive material layer (28) and a protective film (30) are sequentially laminated on a support (26);
    The lamination mechanism 46 which sends the said elongate photosensitive web 22 which peeled the peeling part of the said protective film 30 between the heated pair of crimping rollers 80a and 80b, and attaches to the board | substrate 24, and is downstream. The unit main body (94) moves in the said conveyance direction and the said conveyance opposite direction in the film conveyance method characterized by the above-mentioned.
KR1020080016183A 2007-03-29 2008-02-22 Film feeding apparatus and film feeding method KR20080088372A (en)

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JP2007086403A JP4861873B2 (en) 2007-03-29 2007-03-29 Film transport apparatus and film transport method
JPJP-P-2007-00086403 2007-03-29

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KR20150140778A (en) * 2013-04-09 2015-12-16 블루 솔루션즈 Device for separating at least two adjacent strands of material and system including such a device
KR20190061779A (en) * 2017-11-28 2019-06-05 즈-충 천 Parallel method for packaging electronic component and coating adhesive on carrier tape and mechanism for same

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JP5633249B2 (en) * 2010-08-26 2014-12-03 セイコーエプソン株式会社 Conveying apparatus, recording apparatus, and conveying method
JP5801591B2 (en) * 2011-04-11 2015-10-28 日本写真印刷株式会社 Thermal transfer apparatus and thermal transfer method
KR102057186B1 (en) * 2012-03-14 2019-12-18 아이세루 가부시키가이샤 Cutting machine
JP6350453B2 (en) * 2015-08-28 2018-07-04 株式会社村田製作所 Web transport device
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JP3905605B2 (en) * 1997-07-17 2007-04-18 富士フイルム株式会社 Film pasting method and apparatus
JP2005347618A (en) * 2004-06-04 2005-12-15 Fuji Photo Film Co Ltd Photosensitive web unit, and manufacturing apparatus and method of photosensitive laminate
JP4881585B2 (en) * 2004-07-06 2012-02-22 富士フイルム株式会社 Photosensitive laminate manufacturing apparatus and manufacturing method

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KR20150140778A (en) * 2013-04-09 2015-12-16 블루 솔루션즈 Device for separating at least two adjacent strands of material and system including such a device
KR101532328B1 (en) * 2013-09-30 2015-06-30 엘아이지인베니아 주식회사 Cleaning apparatus of encapsulation film for FPD manufacturing
KR20190061779A (en) * 2017-11-28 2019-06-05 즈-충 천 Parallel method for packaging electronic component and coating adhesive on carrier tape and mechanism for same

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JP2008242345A (en) 2008-10-09
JP4861873B2 (en) 2012-01-25
CN101274507A (en) 2008-10-01

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