CN101460382B - Stripping method and stripper of outer layer body - Google Patents

Stripping method and stripper of outer layer body Download PDF

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Publication number
CN101460382B
CN101460382B CN2007800201102A CN200780020110A CN101460382B CN 101460382 B CN101460382 B CN 101460382B CN 2007800201102 A CN2007800201102 A CN 2007800201102A CN 200780020110 A CN200780020110 A CN 200780020110A CN 101460382 B CN101460382 B CN 101460382B
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CN
China
Prior art keywords
outer layer
layer body
substrate
stripping
tension force
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Expired - Fee Related
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CN2007800201102A
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Chinese (zh)
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CN101460382A (en
Inventor
末原和芳
伊本贤一
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Fujifilm Corp
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Fujifilm Corp
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Publication of CN101460382A publication Critical patent/CN101460382A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H29/00Delivering or advancing articles from machines; Advancing articles to or into piles
    • B65H29/54Article strippers, e.g. for stripping from advancing elements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H41/00Machines for separating superposed webs
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2220/00Function indicators
    • B65H2220/09Function indicators indicating that several of an entity are present
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2405/00Parts for holding the handled material
    • B65H2405/50Gripping means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2555/00Actuating means
    • B65H2555/30Multi-axis

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
  • Materials For Photolithography (AREA)
  • Laminated Bodies (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)

Abstract

In a support stripper (122), chucks (142a, 142b) grip a base film (26) and move along a speed pattern of S-shaped curve, at first, to start stripping the base film (26) from a sticking substrate (24a). Until the base film (26) is stripped entirely from the sticking substrate (24a), the chucks (142a, 142b) move along a curved speed pattern to thereby complete the stripping work of the base film (26).

Description

The stripping means of outer layer body and stripping off device
Technical field
The present invention relates to the stripping means and the stripping off device of outer layer body, the stripping means of this outer layer body will be pasted on the outer layer body of the multilayer film on the substrate from said strippable substrate.
Background technology
For example, substrate for liquid crystal panel, printed wiring with substrate, PDP panel with substrate in, on substrate surface, be pasted with photo sensitivity sheet material (photo sensitivity fabric) with photosensitive material (photoresist) layer.Photo sensitivity sheet material (photo sensitivity シ-ト body) has photosensitive material layer and protective film in flexible plastic supporting mass laminated.
This kind photo sensitivity sheet material is pasted photosensitive material layer in the part or after peeling off protective film comprehensively on substrates such as glass substrate or resin substrate.Then, from the strippable substrate supporting mass, obtain being pasted with the adhesive substrate of photosensitive material layer thus.
For example, the spy opens the stripping means and the stripping off device of 2002-No. 234667 disclosed films of communique, and is shown in figure 15, possesses: substrate absorption hand 2, its absorption and mobile glass substrate 1; First clamper (clamper) 3, its clamping is also peeled off the film F (outer layer body) that is pasted on the said glass substrate 1; Cylinder 4, it makes said first clamper 3 sway in Figure 15; Horizontal guide rail 5a, it makes this cylinder 4 move along fore-and-aft direction; Vertical guide rail 5b, it moves this cylinder 4 along the vertical direction; Second clamper 6, the said film F after its clamping is peeled off; Film pusher 7, its said film F after with said peeling off is promoted to horizontal direction.
So, at first substrate to be adsorbed hand 2 and be configured to the flat-hand position shown in the long and two-short dash line among Figure 15, when placing glass substrate 1, this substrate absorption hand 2 adsorbs said glass substrates 1 and erects.
Then, first clamper 3 is controlled from the part of glass substrate 1 to the outstanding film F in outside, and said first clamper 3 moves to any direction via cylinder 4.Therefore, film F is peeled off from the bight of glass substrate 1.
In addition, first clamper 3 moves along the direction of arrow under the guiding function of horizontal guide rail 5a and vertical guide rail 5b, and behind glass substrate 1 stripping film F, this film F is transferred to second clamper 6.At this moment, the film F after being stripped from is promoted to horizontal direction via film pusher 7, and each film F is accommodated in stack.
Shown in figure 16, in described present technology, from peel off T1 between beginning then during, glass substrate 1 rises with speed V1, on the other hand, first clamper 3 is with speed (V2-V1) descend.Thus, film F is stripped from the peeling rate of speed V2 in fact.
In addition, during from time T 1 to time T3, first clamper 3 stops, and on the other hand, glass substrate 1 rises with speed V2.Therefore, keep relative velocity V2 in peeling off.
But, in described present technology, peel off when beginning (near the time zero), because the decline of the rising of glass substrate 1 and first clamper 3 and film F is applied with rapid peeling off begins to move at film.Therefore, when film F especially photo-sensitive resin is applied rapid power, aggegation takes place on this photo-sensitive resin easily destroy.And, breakage that might photo-sensitive resin part become dust attached on substrate etc.
In addition, to film F, be applied with according to the peeling rate pattern of linearity and peel off action with curve.Therefore, in the overburden operation of film F, corresponding speed change point P1 jumpy, P2 and the P3 of having with curve.Thereby at these change points P1, P2 and P3, the state of peeling off of film F sharply changes, and on the surface of photo-sensitive resin striped takes place.This problem takes place when keeping acceleration/accel or deceleration/decel for certain stripping film F too.
Summary of the invention
The present invention is the invention that addresses this is that; Its purpose is, a kind of stripping means and stripping off device of outer layer body is provided, and the stripping means of this outer layer body can be with simple operation and formation; Outer layer body is separated from substrate well, and obtain high-quality release surface reliably.
The present invention relates to the stripping means and the stripping off device of outer layer body, the stripping means of this outer layer body will be pasted on the outer layer body of multilayer film of substrate from said strippable substrate.
This stripping means has: peel off the beginning operation, control outer layer body through handle sturcture, said handle sturcture is moved according to the velocity mode or the acceleration model of S word curve; Stripping process; Said peel off the beginning operation after, to from strippable substrate before the said outer layer body integral body during; The region of variation that setting speed, acceleration/accel or deceleration/decel change; In said region of variation, said handle sturcture is moved according to velocity mode, acceleration model or the deceleration/decel pattern of bending.
At this, so-called " crooked velocity mode " is meant the steep variation point that does not have speed, promptly do not have the velocity mode of curve.In addition, the deceleration/decel pattern of the acceleration model of bending and bending too.
In addition, stripping off device possesses: substrate holding mechanism, and it remains flat-hand position with said substrate; Handle sturcture, it controls outer layer body, and with said outer layer body from said strippable substrate; Move control mechanism; It makes said handle sturcture move according to the velocity mode or the acceleration model of S word curve, on the other hand when peeling off beginning; Said peel off the beginning operation after, to from said strippable substrate before the said outer layer body integral body during; The region of variation that setting speed, acceleration/accel or deceleration/decel change in said region of variation, makes said handle sturcture move according to velocity mode, acceleration model or the deceleration/decel pattern of bending.
Among the present invention, when peeling off of outer layer body begins, handle sturcture is moved according to the velocity mode or the acceleration model of S word curve.Therefore, can be not at the very start rapid peeling outer layer body, for example can stop the aggegation of photo-sensitive resin to destroy well, and stop the damaged dust that causes to take place as much as possible.On the other hand, behind beginning peeling outer layer body, speed or acceleration/accel rise along S word curve rapidly, except that accomplishing good overburden operation, also realize the efficient activity of this overburden operation.Therefore,, photo-sensitive resin generation aggegation is destroyed through simple operation and formation, and can effective peeling outer layer body and, realize the efficient activity of overburden operation easily.
In addition; After peeling off the beginning operation, during before the strippable substrate outer layer body integral body; The region of variation that setting speed, acceleration/accel or deceleration/decel change in said region of variation, makes said handle sturcture move according to velocity mode, acceleration model or the deceleration/decel pattern of bending.Thus,, peel off state and can not change sharp, for example can prevent well striped etc. to take place, and can obtain high-quality release surface (photo-sensitive resin) reliably on the surface of photo-sensitive resin peeling off in the action of outer layer body.
Through the explanation of accompanying drawing with the following illustrated embodiments of working in coordination with, will further clear and definite said purpose and other purpose, characteristic and advantage.
Description of drawings
Fig. 1 is the summary pie graph of manufacturing installation that is assembled with the supporting mass stripping off device of first embodiment of the present invention;
Fig. 2 is the section-drawing of the strip photo sensitivity fabric (photo sensitivity ウ エ Block) that uses in the said manufacturing installation;
Fig. 3 is the instruction diagram of the state of bonding bonding mark on said strip photo sensitivity fabric;
Fig. 4 is the summary perspective illustration of said supporting mass stripping off device;
Fig. 5 is the main portion perspective illustration of said supporting mass stripping off device;
Fig. 6 is the action specification figure of said supporting mass stripping off device;
Fig. 7 is the action specification figure when between rubber rollers, disposing glass substrate;
Fig. 8 is the action specification figure of the rear end of said glass substrate when between said rubber rollers, leaving;
Fig. 9 is the instruction diagram of the peeling rate pattern of first embodiment;
Figure 10 is the quality evaluation instruction diagram of the present method and first embodiment;
Figure 11 is the instruction diagram of peeling rate pattern of stripping means that is applicable to the outer layer body of second embodiment of the present invention;
Figure 12 is the instruction diagram of peeling rate pattern of stripping means that is applicable to the outer layer body of the 3rd embodiment of the present invention;
Figure 13 is the summary perspective illustration of the supporting mass stripping off device of the 4th embodiment of the present invention;
Figure 14 is the summary perspective illustration of the supporting mass stripping off device of the 5th embodiment of the present invention;
Figure 15 is the stripping means of disclosed film in the present technology and the instruction diagram of stripping off device;
Figure 16 is the instruction diagram of the velocity mode of said present technology.
The specific embodiment
Fig. 1 is the summary pie graph of manufacturing installation 20 of stripping off device that is assembled with the outer layer body of first embodiment of the invention.This manufacturing installation 20 liquid crystal or organic EL with production process such as chromatic filters in, carry out the operation of the hot transfer printing of photo-sensitive resin (afterwards stating) on glass substrate 24 with strip photo sensitivity fabric (strip fabric) 22.
Fig. 2 is the section-drawing of the photo sensitivity fabric 22 of use in the manufacturing installation 20.This photo sensitivity fabric 22, range upon range of and constitute by elasticity matrix film (outer layer body) 26, cushion layer (thermoplastic resin layer) 27, interlayer (oxygen barrier film) 28, photo-sensitive resin 29 and protective film 30.In addition, photo sensitivity fabric 22 also can be made up of matrix film 26, photo-sensitive resin 29 and protective film 30.
Matrix film 26 is formed by polyphenyl dioctyl phthalate glycol ester (PET); Cushion layer 27 is formed by ethene and ethylene oxide co-polymer; Interlayer is formed by polyvinyl alcohol; Photo-sensitive resin 29 forms by containing the colored photosensitive polymer combination that alkali-soluble adhesives, monomer, photopolymerization begin material, colorant, and protective film 30 is formed by poly-vinyl or polypropylene etc.
As shown in Figure 1, manufacturing installation 20 possesses: fabric conveying mechanism 32, and it accommodates the photo sensitivity fabric roll 22a that photo sensitivity fabric 22 is wound into the roller shape, and exports above-mentioned photo sensitivity fabric 22 from this photo sensitivity fabric roll 22a; Half-cutting mechanism 36, but it forms the half cut off position 34 that broad ways is cut off on the protective film 30 of the above-mentioned photo sensitivity fabric of being exported 22; Mark bonding agency 40, its bonding mark 38 (with reference to Fig. 3) that makes the part have a non-bonded part 38a is bonding with protective film 30.In addition, half-cutting mechanism 36 also can leave regulation on the arrow A direction interval sets two covers, and at two local half cut off positions 34 that form.
Downstream at mark bonding agency 40 are equipped with: be used for photo sensitivity fabric 22 is changed to the stocking mechanism 42 that roughly transports continuously from intermittently transporting; The protective film mechanism for stripping 44 that protective film 30 is peeled off from above-mentioned photo sensitivity fabric 22 with the intervals of lengths of regulation; Glass substrate 24 is being heated to the state of set point of temperature and is being transported to the heating arrangements 45 of paste position; To be pasted on the labelling machine 46 of above-mentioned glass substrate 24 because of the photo-sensitive resin 29 that peeling off of above-mentioned protective film 30 exposed.In addition, below will photo sensitivity fabric 22 be sticked on the duplexer that forms on the substrate 24, be referred to as " adhesive substrate 24a " through labelling machine 46.
Near the upper reaches of the paste position of labelling machine 46; The position, boundary that sets direct detection photo sensitivity fabric 22 is the testing agency 47 at half cut off position 34; And, dispose fabric shoutoff mechanism 48 between the substrate that cuts off the above-mentioned photo sensitivity fabric 22 between each glass substrate 24 in the downstream of above-mentioned labelling machine 46.The provided upstream of fabric shoutoff mechanism 48 is equipped with when turning round beginning and the fabric shoutoff mechanism 48a that turns round and use when finishing between this substrate.
Near the downstream of fabric conveying mechanism 32, be equipped with the bond pad 49 of the front end joint of rear end that makes the photo sensitivity fabric 22 that roughly uses and the photo sensitivity fabric 22 that newly uses.Be equipped with film end position detector 51 in the downstream of this bond pad 49, so that the departing from of the Width that control causes because of the coiling of photo sensitivity fabric roll 22a departs from.
Half-cutting mechanism 36 is provided in and is used to calculate the downstream of pair of rolls 50 in roller footpath of being accommodated the photo sensitivity fabric roll 22a of coiling by fabric conveying mechanism 32.Half-cutting mechanism 36 possesses the direction sliding stand 52 free to advance or retreat of edge and carrying direction (arrow A direction) quadrature of photo sensitivity fabric 22.On this sliding stand 52, be connected with rotation dise knife (cutter) 54, and accept platform 56 being equipped with to clamp photo sensitivity fabric 22 to cut off with above-mentioned rotation dise knife 54 opposed position.
As shown in Figure 2, need tripping protection film 30 at least at half cut off position 34, in fact in order to cut off this protective film 30 reliably, set the penetraction depth of rotation dise knife 54 so that be cut into photo-sensitive resin 29~interlayer 28.Half cut off position 34 also can adopt through replace for example removing of rotation dise knife 54 use scraper fixing dise knife or the hypracoustic cut-out mode, after the band shape stated push the mode of formation such as cutter (thomson cutter).In addition, the extruding cutter is except the extruding formation of vertical direction, and the extruding that also comprises tilted direction constitutes.
Half cut off position 34 for example is set in the position that respectively gets into 10mm respectively for setting glass substrate 24 position at interval on the above-mentioned glass substrate 24 of both sides.The part that clips by the half cut off position 34 between the glass substrate 24, after have on the labelling machine 46 stated as function at the mask that photo-sensitive resin 29 frame-like is pasted on 24 last times of above-mentioned glass substrate.
Concerning mark bonding agency 40 and since with glass substrate 24 between the remnant 30b of corresponding and residual protective film 30, link released part 30aa that peels off side the place ahead and the bonding mark 38 of peeling off the released part 30ab of proceeds posterolateral so supply with.As shown in Figure 2, protective film 30 clips remnant 30b, and setting the part of being stripped from earlier is the released part 30aa in the place ahead, and on the other hand, the part of being stripped from after the setting is the released part 30ab at rear.
As shown in Figure 3, bonding mark 38 shape that is rectangle constitutes, for example by forming with protective film 30 identical resin materials.Bonding mark 38 has non-bonded part (the comprising little bonding) 38a that does not have adhesive-applying at central portion; And in the both sides of this non-bonded part 38a, the length direction both ends of promptly above-mentioned bonding mark 38 have and bonding first adhesive portion 38b of the released part 30aa in the place ahead and the second adhesive portion 38c bonding with the released part 30ab at rear.
As shown in Figure 1; Mark bonding agency 40 possesses and can maximum five bonding marks 38 be separated absorption layer 58a~58e that predetermined distance is pasted, and go up and down to dispose freely on the sticker of the above-mentioned bonding mark 38 of above-mentioned absorption layer 58a~58e be used for from below keep photo sensitivity fabric 22 accept platform 59.
The velocity contrast of the continuous carrying of the carrying at intermittence of the photo sensitivity fabric 22 of stocking mechanism 42 absorption upstream sides and the above-mentioned photo sensitivity fabric 22 in downstream; And; In order to prevent tension change, preferably possesses the storage line device (dancer) 61 that constitutes by two rollers 60 that shake freely.In addition, roller 60 can be more than a cover or three overlaps according to scheduled volume also.
Protective film mechanism for stripping 44 is configured in the downstream of stocking mechanism 42, and possesses suction tube 62 and clamp the stripper roll 64 that photo sensitivity fabric 22 contacts with this suction tube 62.The protective film 30 of being stripped from the peel angle of acute angle from photo sensitivity fabric 22 via stripper roll 64 is all batched on the protective film winding off spindle 66 except that remnant 30.The tension force of protective film winding off spindle 66 in order to apply regulation for protective film 30 for example links with torque motor 68.
Be equipped with the tension control mechanism 76 that can apply tension force to photo sensitivity fabric 22 in the downstream of protective film mechanism for stripping 44.Tension control mechanism 76 possesses cylinder 78, and under the driving action of this cylinder 78, tension force pick-up roller (tension pick-up roller) 80 shakes displacement, can adjust the tension force of the photo sensitivity fabric 22 that this tension force pick-up roller 80 slips thus.In addition, tension control mechanism 76 can use as required, also can remove.
Testing agency 47 possesses opto-electronic pickups 82 such as laser sensor or photosensor; Above-mentioned opto-electronic pickup 82 directly detects the step that the thickness of groove shape portion or protective film 30 of the wedge-like at half cut off position 34 produces or the variation of their combination, and setting this detection signal is the boundary position signal.Opto-electronic pickup 82 and backing roll (backup roller) 83 arranged opposite.In addition, also can instead of optical electric transducer 82 and use image inspection bodies such as noncontact extensometer or CCD camera etc.
Heating arrangements 45 possesses and is used for the carrying mechanism 84 of glass substrate 24 along arrow C direction carrying, and this carrying mechanism 84 has the tabular carrying roller of arranging along the arrow C direction 86 of a plurality of resin roundings.The upstream side along the arrow C direction at carrying mechanism 84 is provided with the portion that accepts 88 that accepts glass substrate 24.Be arranged with a plurality of heating furnaces 90 in the downstream of accepting portion 88.
Provided upstream at heating arrangements 45 is equipped with the substrate accumulator 100 of accommodating a plurality of glass substrates 24.On three sides beyond the input of accumulator 100 and the conveying end, pay and establish dedusting with fan component (or channel components) 102.Fan component 102 blows out except that the electrodecontamination air in accumulator 100.Each glass substrate 24 that is contained in substrate accumulator 100 is attracted to the absorption layer 106 of the hand 104a that is located at robot 104 and takes out, and is moved into the portion of acceptance 88.
Labelling machine 46 possess set and be heated to set point of temperature up and down lamination with rubber rollers 110a, 110b.Backing roll 112a, 112b and rubber rollers 110a, 110b slip, and above-mentioned backing roll 112b pushes to rubber rollers 110b side via roller clamping section 114.
Near rubber rollers 110a, be equipped with and be used to the contact preventing roller 116 that prevents that photo sensitivity fabric 22 from contacting with above-mentioned rubber rollers 110a.This contact preventing roller 116 can move via not shown actuator.
Be equipped with film delivery roller 118a and board carrying roller 118b between labelling machine 46 and substrate between the fabric shoutoff mechanism 48.The downstream of fabric shoutoff mechanism 48 between substrate disposes cooling bodies 120 along the handling system of arranging a plurality of roller 119a 119, and disposes the supporting mass stripping off device 122 of first embodiment in the downstream of this cooling body 120.
Behind the cooling body 120 photo sensitivity fabric 22 that fabric shoutoff mechanism 48 cuts off between adhesive substrate 24a between via substrate, this is cut off adhesive substrate 24a supply with cold wind and implement cooling processing.Specifically, be under 10 ℃ in the cold wind temperature, wind speed setting is 1.0~2.0m/min.In addition, also can not use cooling body 120, and through after the photosensitive laminate accumulator 156 stated carry out natural cooling.
As shown in Figure 4; Supporting mass stripping off device 122 possesses frame member 124; On this frame member 124, the interval that upper rall 126a~126b that the arrow D direction of edge and carrying direction (arrow C direction) quadrature of adhesive substrate 24a is extended stipulates away from each other and extending in parallel.Below upper rall 126a, 126b, extend and parallel setting along arrow D direction equally than its short lower guide 128a, 128b.Last at upper rall 126a, 126b, be supported with self acting movable link 132a, the 132b that can advance and retreat along arrow D direction via electrical motor 130a, 130b.
Like Fig. 4~shown in Figure 6, movable link 132a, 132b vertically (arrow E direction) extend, and side opposite each other is provided with guide rail 134a, the 134b that vertically extends.At guide rail 134a, 134b upper support bay- lift 136a, 136b are arranged, and above-mentioned bay- lift 136a, 136b can go up and down via electrical motor 138a, 138b.
Bay- lift 136a, 136b last towards horizontal direction electrical motor 140a, 140b are installed, on the S. A. (not shown) of above-mentioned electrical motor 140a, 140b, be connected with chuck (handle sturcture) 142a, 142b.Chuck 142a, 142b rotation constitute freely; And the matrix film at adhesive substrate 24a is peeled off the position, can with from the carrying direction two ends of the glass substrate 24 that constitutes above-mentioned adhesive substrate 24a to adjustment position, the both sides of the outstanding matrix film 26 in outside for controlling position freely.
Electrical motor 130a, 130b, 138a, 138b, 140a and 140b use the various rotary driving sources of controllable speed or acceleration/accel.For example, except that servomotor torque constant or straight moving-wire property electrical motor, can also adopt straight moving robot etc.
As shown in Figure 4, be supported with slip matrix 144a, 144b at lower guide 128a, 128b, and at above-mentioned slip matrix 144a, the last two ends that liftably are supported with profiling roller 146 of 144b.Slip matrix 144a, 144b and movable link 132a, 132b can advance and retreat between the assigned position of arrow D direction the ground one constitute.In addition, profiling roller 146 can be provided with as required, also can not need.
As shown in Figure 1, supporting mass stripping off device 122 possesses substrate holding mechanism 149, and this substrate holding mechanism 149 is provided with from adhesive substrate 24a stripping group body thin film 26 time, keeps a plurality of absorption layers 148 of above-mentioned adhesive substrate 24a with flat-hand position absorption.Near this supporting mass stripping off device 122, be equipped with matrix film 26 that is used to control after peeling off from glass substrate 24 and the robot (not shown) of discharging to (not shown) such as discharge orifices of regulation.
In the downstream of supporting mass stripping off device 122, be provided with the photosensitive laminate accumulator 156 of accommodating a plurality of duplexer substrates 150.The duplexer substrate 150 of having peeled off matrix film 26 and remnant 36b from adhesive substrate 24a through supporting mass stripping off device 122 is attracted to the absorption layer 154 of being located at robot 152 hand 152a and takes out, and is accommodated in photosensitive laminate accumulator 156.
On the input of photosensitive laminate accumulator 156 and three sides outside the conveying end, pay and establish dedusting with fan component (or channel components) 102.Fan component 102 blows out except that the electrodecontamination air in photosensitive laminate accumulator 156.
In the manufacturing installation 20, above labelling machine 46, dispose fabric conveying mechanism 32, half-cutting mechanism 36, mark bonding agency 40, stocking mechanism 42, protective film mechanism for stripping 44, tension control mechanism 76 and testing agency 47.In contrast; Also can below above-mentioned labelling machine 46, dispose from above-mentioned fabrics conveying mechanism 32 to above-mentioned testing agency 47, and photo sensitivity fabric 22 turned upside down, photo-sensitive resin 29 is pasted on the downside of glass substrate 24; In addition, also can on straight line, constitute above-mentioned manufacturing installation 20.
Manufacturing installation 20 is controlled by whole via lamination control part 160; Each function portion at this manufacturing installation 20; For example be provided with lamination control part 162, substrate heating control section 164 and matrix and peel off control part 166 etc., these mechanisms link to each other through the in-process network.
Lamination control part 160 links to each other with plant network, according to from the production control of the indication information (condition enactment or production information) of the not shown CPU of factory or running management etc., the information processing that is used to produce.
Lamination control part 162 is controlled each function portion as the overhead control of operation single-piece, based on the location information at the half cut off position 34 of passing through testing agency's 47 detected photo sensitivity fabrics 22, for example constitutes the control mechanism of control heating arrangements 45.
Matrix is peeled off 166 pairs of control parts and is controlled from adhesive substrate 24a stripping group body thin film of being supplied with by labelling machine 46 26 and the action of lower procedure, discharging duplexer substrate 150, and the information of above-mentioned adhesive substrate 24a of processing controls and above-mentioned duplexer substrate 150.
Of the back; Matrix is peeled off control part 166 and is constituted mobile control mechanism; Should move control mechanism when matrix film 26 is peeled off beginning, and chuck 142a, 142b moved, on the other hand according to the velocity mode or the acceleration model of S word curve; Above-mentioned peel off the beginning operation after, to above-mentioned matrix film 26 integral body are peeled off from adhesive substrate 24a before during; The region of variation that setting speed, acceleration/accel or deceleration/decel change, and in above-mentioned region of variation, above-mentioned chuck 142a, 142b are moved according to velocity mode, acceleration model or the deceleration/decel pattern of bending.
In addition, below so-called matrix film 26 peeling rate, peel off acceleration/accel and peel off deceleration/decel in fact, be meant speed, acceleration/accel and deceleration/decel that chuck 142a, 142b move.
In manufacturing installation 20, separate into first 172a of clean room and second 172b of clean room through next door 170.In first 172a of clean room, accommodate from fabric conveying mechanism 32 to tension control mechanism 76, and in second 172b of clean room, accommodate the mechanism after the testing agency 47.First 172a of clean room and second 172b of clean room are communicated with via breakthrough part 174.
The action of relevant this manufacturing installation 20, because of relevant with the stripping means of first embodiment, so below describe.
At first, as shown in Figure 1, extract photo sensitivity fabric 22 out from the photo sensitivity fabric roll 22a that is installed on fabric conveying mechanism 32, this is sent to half-cutting mechanism 36 photo sensitivity fabric 22.
On half-cutting mechanism 36, sliding stand 52 moves along the Width (with the direction of carrying direction quadrature) of photo sensitivity fabric 22.Therefore, rotation dise knife 54 is cut under the state of the desirable degree of depth at the half cut off position 34 to photo sensitivity fabric 22, rotates while move.Thus, on photo sensitivity fabric 22, be formed with from protective film 30 be cut into hope the half cut off position 34 (with reference to Fig. 2) of the degree of depth.
As shown in Figure 1, the photo sensitivity fabric 22 after handling through half cut off temporarily stops after the size according to the remnant 30b of protective film 30 is handled upside down along the arrow A direction, under the walking effect of rotation dise knife 54, forms Next half cut off position 34.Therefore, on photo sensitivity fabric 22, clip remnant 30b and be provided with the place ahead released part 30aa and rear released part 30ab (with reference to Fig. 2).
And then photo sensitivity fabric 22 is moved to mark bonding agency 40, and the stickup position of the regulation of protective film 30 is configured in to be accepted on the platform 59.In the mark bonding agency 40; Adsorb the bonding mark 38 that keeps specified quantity through absorption layer 58a~58e; Each bonding mark 38 strides across the remnant 30b of protective film 30, with the place ahead released part 30aa and rear released part 30ab one bonding (with reference to Fig. 3).
For example, the bonding photo sensitivity fabric 22 of five bonding marks 38, as shown in Figure 1, prevent the tension change of outgoing side via stocking mechanism 42 after, be transported to protective film mechanism for stripping 44 continuously.
In protective film mechanism for stripping 44, photo sensitivity fabric 22 is inhaled into tube 62 and stripper roll 64 clampings, and the matrix film 26 of above-mentioned photo sensitivity fabric 22 is adsorbed and remains in above-mentioned suction tube 62.Under this state, when rotation sucks tube 62, apply the torque of regulation via 68 pairs of protective films 30 of torque motor.
Therefore, protective film 30 residual remnant 30b are peeled off from photo sensitivity fabric 22, are wound on the protective film wireline reel 66 via stripper roll 64.In addition, preferably blow to attach and remove electric air to peeling off the position.
Under the effect of protective film mechanism for stripping 44; Protective film 30 residual remnant 30b and after being peeled off from matrix film 26; Photo sensitivity fabric 22 is adjusted by 76 pairs of tension force of tension control mechanism, and then half cut off position 34 is detected through opto-electronic pickup 82 by testing agency 47.
Photo sensitivity fabric 22 is based on the detection information at half cut off position 34, during the running beginning, under the turning effort of film delivery roller 118a, under the turning effort of the board carrying roller 118b of clamping adhesive substrate 24a, quantitatively is transported to labelling machine 46 thereafter.At this moment, contact preventing roller 116 standby up, and rubber rollers 110b is configured in the below.
On the other hand, in the heating arrangements 45, set the heating-up temperature in each heating furnace 90 according to the laminating temperature of labelling machine 46.So robot 104 is controlled the glass substrate 24 that is accommodated in substrate accumulator 100, and this glass substrate 24 is moved into the portion of acceptance 88.Glass substrate 24 is transported to each heating furnace 90 from accepting portion 88 successively off and under the turning effort of the carrying roller 86 that constitutes carrying mechanism 84.
In the heating furnace 90 of arrow C direction backend configuration; Glass substrate 24 stops at the stop position of regulation exactly; And this glass substrate 24 is corresponding with the adhesive portion of the photo-sensitive resin 29 of photo sensitivity fabric 22, temporarily is disposed at (with reference to Fig. 7) between rubber rollers 110a, the 110b.
Under this state, via roller clamping section 114 backing roll 112b and rubber rollers 110b are risen, between roller 110a, 110b, clamp glass substrate 24 thus with the squeeze pressure of regulation.And then, under the turning effort of roller 110a, heating and melting transcription (lamination) photo-sensitive resin 29 on this glass substrate 24.
At this; As lamination, speed is 1.0m/min~10.0m/min, and the temperature of rubber rollers 110a, 110b is 80 ℃~140 ℃; The rubber hardness of above-mentioned rubber rollers 110a, 110b is 40 degree~90 degree, and the squeeze pressure (line pressure) of this rubber rollers 110a, 110b is 50N/cm~400N/cm.
As shown in Figure 8, when finishing at photo sensitivity fabric of glass substrate 24 laminated 22 via rubber rollers 110a, 110b, the rotation of above-mentioned rubber rollers 110a stops.On the other hand, in glass substrate 24 laminated the adhesive substrate 24a of photo sensitivity fabric 22 clamp by board carrying roller 118b.And rubber rollers 110b keeps out of the way to the direction of leaving from rubber rollers 110a and removes clamping.
Thus; Finish one lamination treatment; In the middle of the beginning lamination treatment next time time before; Through heating arrangements 45 be heated to set point of temperature glass substrate 24 be moved between rubber rollers 110a, 110b the ground configuration, and the photo sensitivity fabric 22 that slips with above-mentioned rubber rollers 110a is transported in fine motion.
As shown in Figure 1, the adhesive substrate 24a that on glass substrate 24, has pasted photo sensitivity fabric 22 quantitatively carries along the arrow C direction.And the adhesive substrate 24a via behind the photo sensitivity fabric 22 of 24 of 48 each glass substrates of cut-out of fabric shoutoff mechanism between substrate after through cooling body 20 coolings, is shifted into supporting mass stripping off device 122.
Through supporting mass stripping off device 122; Glass substrate 24 sides of adhesive substrate 24a are held under the sucking action of absorption layer 148; On the other hand, each chuck 142a, 142b are configured in one distolateral (with reference to Fig. 6) of the arrow D direction of outstanding matrix film 26 from the carrying direction inward at both ends side of glass substrate 24.
So movable link 132a, 132b are moved to adhesive substrate 24a side in the effect of electrical motor 130a, 130b, and each chuck 142a, 142b open and close and control the carrying direction both ends of matrix film 26.And then chuck 142a, 142b rotate under the effect of electrical motor 140a, 140b, on the other hand, bay- lift 136a, 136b and movable link 132a, 132b along prescribed direction by drive controlling.
Therefore, like Fig. 5 and shown in Figure 6, chuck 142a, 142b move along the track of peeling off of regulation, and the matrix film 26 of being controlled by above-mentioned chuck 142a, 142b separates from cushion layer 27, and peels off from adhesive substrate 24a.At this moment, profiling roller 146 moves to the position of regulation along arrow D direction integratedly with movable link 132a, 132b, thereby makes matrix film 26 slick and sly and peel off well.Through from adhesive substrate 24a stripping group body thin film 26, and obtain duplexer substrate 150.
Under this situation, in the first embodiment, control matrix film 26 through chuck 142a, 142b after, the peeling rate when adhesive substrate 24a peels off this matrix film 26 is controlled according to being described below according to velocity mode shown in Figure 9.
At first, in when beginning of peeling off of matrix film 26, chuck 142a, 142b be from the time 0 to the time the T1, moves according to the velocity mode of S word curve 180a.Then, after this is peeled off the beginning operation and finishes, from time T 1 to time T2 during; The region of variation that the direction that setting is risen to speed continuously changes; In this region of variation, chuck 142a, 142b move according to the velocity mode of bending (below, be called the rate of bending pattern) 180b.
In addition, from time T 2 to the time T3, set the region of variation of the direction change that reduces continuously to speed, in this region of variation, chuck 142a, 142b are moved control according to rate of bending pattern 180c.In addition, the time T 3 in the mobile way of rate of bending pattern 180c, base sheet 26 integral body are peeled off from adhesive substrate 24a.In addition, from time T 4 to the time T5, promptly in peeling off the release operation, chuck 142a, 142b move, stop afterwards according to the velocity mode of S word curve 180d.
So, carried out following experiment: to the situation (first embodiment) of carrying out speed control shown in Figure 9 with carry out the quality of situation that the spy opens the speed control of 2002~No. 234667 communiques (at present) and estimate, obtained result shown in Figure 10.
That is in the first embodiment, when peeling off of matrix film 26 begins, be the moving velocity of chuck 142a, 142b, according to S word curve 180a control peeling rate.Therefore, can not go up rapid stripping group body thin film 26 from adhesive substrate 24a at the very start, nor can apply power sharp photo-sensitive resin 29.Therefore, can stop photo-sensitive resin 29 especially from the fragile place of end face portion that is provided with half cut off position 34 aggegation to take place as much as possible destroys.
In contrast, in the method, when peeling off of matrix film 26 begins, set rapid peeling rate pattern at present.So aggegation destruction has taken place from the end face portion that is provided with half cut off position 34 in photo-sensitive resin 29.And because of dust takes place the destruction of photo-sensitive resin 29, this dust is for example attached on the adhesive substrate 24a.
And then in the first embodiment, after peeling off of S word curve 180a began operation, chuck 142a, 142b can move according to rate of bending pattern 180b, the 180c of continuous change, thus matrix film 26 are peeled off from adhesive substrate 24a fully.
Therefore, in the middle of the overburden operation of matrix film 26, rapid variation can not take place in peeling rate, thereby can unify to keep the state of peeling off of above-mentioned matrix film 26.Thus, for example can striped etc. not take place on the surface of photo-sensitive resin 29, and the surface that can keep this photo-sensitive resin 29 high-qualityly.
On the other hand; At present in the method; Because chuck 142a, 142b move according to the linearity velocity mode with curve; So, produced and the cooresponding rapid velocity variations point of above-mentioned curve (with reference to change point P1, P2 and the P3 among Figure 16), thereby striped taken place on the surface of photo-sensitive resin 29 peeling off in the way of matrix film 26.
In addition, in the first embodiment, adhesive substrate 24a is held in flat-hand position via substrate holding mechanism 149.Therefore, using more large-scalely, for example during the glass substrate 24 of 1100mm * 1350mm (thickness 0.7mm), can keep planarity and keep above-mentioned glass substrate 24 accurately and reliably.
In addition, in the first embodiment, the peeling rate of the matrix film 26 of chuck 142a, 142b is illustrated, but can sets peeling off acceleration/accel or peeling off deceleration/decel of above-mentioned matrix film 26 equally.
Figure 11 is the instruction diagram of velocity mode (or acceleration model or deceleration/decel pattern) of stripping means that is applicable to the outer layer body of second embodiment of the present invention.
In this second embodiment, when peeling off of matrix film 26 begins, after making chuck 142a, 142b move to time T 1,, and move to time T 2 according to the rate of bending pattern 182b of the direction change of rising continuously to speed according to S word curve 182a.
In addition, from the time T 3 of time T 2 when peeling off release, chuck 142a, 142b move according to the rate of bending pattern 182c of the direction change that descends continuously to speed.
In addition, Figure 12 is the instruction diagram of peeling rate pattern (or acceleration model or deceleration/decel pattern) of stripping means that is applicable to the outer layer body of the 3rd embodiment of the present invention.
In the 3rd embodiment; When peeling off of matrix film 26 begins; After the velocity mode that makes chuck 142a, 142b according to S word curve 184a moves, from time T 1 in the velocity variations zone of setting the time T2, chuck 142a, 142b move according to rate of bending pattern 184b.
Then, from time T 2 to the time T3, after peeling rate is maintained in certain speed V2 according to constant speedpump pattern 184c, from time T 3 in the velocity variations zone of setting the time T4, chuck 142a, 142b move according to rate of bending pattern 184d.That is, during from time T 2 to time T4, peeling rate is configured to have the linearity velocity mode of curve.And chuck 142a, 142b be according to S word curve 184e, moves to time T 5 and stop from time T 4.
Like this, in second and third embodiment, begin stripping group body thin film 26, and during before all peel off this matrix film 26, rapid variation can not take place in speed (or acceleration/accel or deceleration/decel) according to S word curve 182a, 184a.Thus, stop the aggegation destruction of photo-sensitive resin 29 or the generation of dust and the striped on above-mentioned photo-sensitive resin 29 surfaces etc. bad as much as possible, and obtain and the same effect of above-mentioned first embodiment.
In addition, in the 3rd embodiment, when peeling off of matrix film 26 finished, be set with S word curve 184e, but also can not utilize this S word curve 184e, and the mobile of chuck 142a, 142b stopped with rate of bending pattern 184d.
In addition; Supporting mass stripping off device 22 constitutes the edge and promptly carries the arrow D direction stripping group body thin film 26 that direction (arrow C direction) is intersected with the stickup direction that adhesive substrate 24a pastes, but also can the direction of delaminate of above-mentioned matrix film 26 be set at the arrow C direction parallel with the carrying direction of above-mentioned adhesive substrate 24a.
Figure 13 is the summary perspective illustration of the supporting mass stripping off device 190 of the 4th embodiment of the present invention.In addition, to using identical reference marks, and omit its detailed explanation with the supporting mass stripping off device of first embodiment 122 identical inscapes.In addition, below the 5th embodiment of explanation too, its detailed explanation is omitted.
Supporting mass stripping off device 190 possesses tension force and applies structure 192, this tension force apply structure 192 with matrix film 26 when adhesive substrate 24a peels off, the edge applies tension force with the stickup direction (arrow C direction) that glass substrate 24 is pasted to above-mentioned matrix film 26.
Tension force applies structure 192 to be possessed: control freely from the carrying direction front of adhesive substrate 24a movable chuck members 194a, 196a, 198a and the 200a to the leading section 26a of the outstanding matrix film 26 in outside; Control movable chuck members 194b, 196b, 198b and 200b freely to the rearward end 26b of the outstanding above-mentioned matrix film 26 of the carrying direction rear side of above-mentioned adhesive substrate 24a.
Chuck members 194a, 194b are opposed on the arrow C direction each other, and other chuck members 196a, 196b, 198a, 198b and 200a, 200b be arranged opposite on the arrow C direction each other separately.Chuck members 194a~200a and 196b~200b open and close freely separately and relative matrix film 26 can constitute with advancing and retreat.In addition, in the 4th embodiment, also can not use profiling roller 146.
In the 4th embodiment; When adhesive substrate 24a is configured in matrix when peeling off the position, constitute chuck members 194a~200a that tension force applies structure 192, control the leading section 26a of matrix film 26; And chuck members 196b~200b controls the rearward end 26b of above-mentioned matrix film 26.Under this state,, thus matrix film 26 is applied the tension force of regulation along the arrow C direction to direction torque control chuck members 194a~200a and chuck members 196b~200b away from each other.
So chuck 142a, 142b control the end of the leading section 26a and the rearward end 26b of matrix film 26, move to arrow D1 direction along the peeling off track of regulation.At this moment, matrix film 26 is applied with the tension force of regulation along the arrow C direction, thereby can and peels off from glass substrate 24 reliably matrix film 26 slynesses.
Figure 14 is the summary perspective illustration of supporting mass stripping off device 210 that constitutes the manufacturing installation of the 5th embodiment of the present invention.
Supporting mass stripping off device 210 possesses tension force and applies structure 212, and this tension force applies structure 212 from adhesive substrate 24a stripping group body thin film 26 time, and the edge applies tension force with the stickup direction that above-mentioned adhesive substrate 24a pastes to above-mentioned matrix film 26.
Tension force applies structure 212 to be possessed: can control the front end chuck 214 to the leading section 26a of the outstanding matrix film 26 of the carrying direction front of adhesive substrate 24a; Can control rear end chuck 216 to the rearward end 26b of the outstanding above-mentioned matrix film 26 in the carrying direction rear of above-mentioned adhesive substrate 24a.Front end chuck 214 and rear end chuck 216 constitute along arrow D direction wide cut, and can on the general width direction is comprehensive, control the leading section 26a and the rearward end 26b of matrix film 26 respectively.
Front end chuck 214 is installed in electrical motor 140a, 140b is last, and the moving direction of front end chuck 214 is set at the arrow C direction with moving direction (the arrow D direction) quadrature of chuck 142a, 142b.In addition, in the 5th embodiment, use profiling roller 146.
In the 5th embodiment, when adhesive substrate 24a is transported to matrix and peels off the position, controlled by front end chuck 214 to the leading section 26a of the outstanding matrix film 26 of the front of this adhesive substrate 24a.On the other hand, the rearward end 26b to the outstanding matrix film 26 of the rear end side of adhesive substrate 24a is controlled by rear end chuck 216.
Then, torque control rear end chuck 216 or above-mentioned rear end chuck 216 and front end chuck 214 are to being applied tension force by the matrix film 26 of these clampings along the arrow C direction.Under this state, front end chuck 214 moves along the track of peeling off of regulation, and thus, the matrix film 26 of tension force that is applied with regulation is by slick and sly from glass substrate 24 and peel off reliably.

Claims (10)

1. the stripping off device of an outer layer body, its outer layer body (26) that will be pasted on the multilayer film of substrate (24) is peeled off from said substrate (24),
The stripping off device of said outer layer body is characterised in that to possess:
Substrate holding mechanism (149), it remains flat-hand position with said substrate (24);
Handle sturcture (142a), it controls said outer layer body (26), and said outer layer body (26) is peeled off from said substrate (24);
Move control mechanism (166); It makes said handle sturcture (142a) move according to the velocity mode or the acceleration model of S word curve, on the other hand when peeling off beginning; Said peel off the beginning operation after, to peel off from said substrate (24) said outer layer body (26) whole before during; The region of variation that setting speed, acceleration/accel or deceleration/decel change, and in said region of variation, said handle sturcture (142a) is moved according to velocity mode, acceleration model or the deceleration/decel pattern of bending;
Tension force applies structure (192); The stickup direction of pasting with said substrate (24) that this tension force applies that the direction of delaminate of structure (192) edge and said outer layer body (26) intersects; Said outer layer body (26) is applied tension force; Wherein, said tension force applies structure (192) and possesses and control respectively from the carrying direction front of said substrate (24) and carrying direction the rear end side leading section of outstanding said outer layer body (26) and a plurality of movable chuck members (194a, 194b) of rearward end laterally.
2. the stripping off device of an outer layer body, its outer layer body (26) that will be pasted on the multilayer film of substrate (24) is peeled off from said substrate (24),
The stripping off device of said outer layer body is characterised in that to possess:
Substrate holding mechanism (149), it remains flat-hand position with said substrate (24);
Handle sturcture (142a), it controls said outer layer body (26), and said outer layer body (26) is peeled off from said substrate (24);
Move control mechanism (166); It makes said handle sturcture (142a) move according to the velocity mode or the acceleration model of S word curve, on the other hand when peeling off beginning; Said peel off the beginning operation after, to peel off from said substrate (24) said outer layer body (26) whole before during; The region of variation that setting speed, acceleration/accel or deceleration/decel change, and in said region of variation, said handle sturcture (142a) is moved according to velocity mode, acceleration model or the deceleration/decel pattern of bending;
Tension force applies structure (212); This tension force applies the stickup direction that structure (212) is promptly pasted with said substrate (24) along the direction of delaminate of said outer layer body (26); Said outer layer body (26) is applied tension force; Wherein, said tension force applies structure (212) and possesses and control from the carrying direction front of said substrate (24) and carrying direction the rear end side leading section of outstanding said outer layer body (26) and the front end chuck (214) and the rear end chuck (216) of rearward end laterally.
3. according to claim 1 or claim 2 the stripping off device of outer layer body is characterized in that,
Said multilayer film have the photo-sensitive resin (29) that is pasted on said substrate and at least as the matrix film of said outer layer body (26),
Peel off said matrix film (26) from said substrate (24).
4. the stripping means of an outer layer body, this method is the stripping means of the outer layer body of the stripping off device that uses the described outer layer body of claim 1, the outer layer body (26) that will be pasted on the multilayer film of substrate (24) is peeled off from said substrate (24),
The stripping means of said outer layer body is characterised in that to have:
Peel off the beginning operation, control said outer layer body (26), said handle sturcture (142a) is moved according to the velocity mode or the acceleration model of S word curve through handle sturcture (142a);
Stripping process; Said peel off the beginning operation after, to peel off from said substrate (24) said outer layer body (26) whole before during; The region of variation that setting speed, acceleration/accel or deceleration/decel change; And in said region of variation, said handle sturcture is moved according to velocity mode, acceleration model or the deceleration/decel pattern of bending;
Tension force applies operation; Apply structure (192) through tension force; The stickup direction of pasting with said substrate (24) that the direction of delaminate of edge and said outer layer body (26) intersects; Said outer layer body (26) is applied tension force, and wherein, said tension force applies structure (192) and controls respectively from the carrying direction front of said substrate (24) and carrying direction the rear end side leading section and the rearward end of outstanding said outer layer body (26) laterally through a plurality of movable chuck members (194a, 194b).
5. the stripping means of an outer layer body, this method is the stripping means of the outer layer body of the stripping off device that uses the described outer layer body of claim 2, the outer layer body (26) that will be pasted on the multilayer film of substrate (24) is peeled off from said substrate (24),
The stripping means of said outer layer body is characterised in that to have:
Peel off the beginning operation, control said outer layer body (26), said handle sturcture (142a) is moved according to the velocity mode or the acceleration model of S word curve through handle sturcture (142a);
Stripping process; Said peel off the beginning operation after, to peel off from said substrate (24) said outer layer body (26) whole before during; The region of variation that setting speed, acceleration/accel or deceleration/decel change; And in said region of variation, said handle sturcture is moved according to velocity mode, acceleration model or the deceleration/decel pattern of bending;
Tension force applies operation; Apply structure (212) through tension force; The stickup direction of promptly pasting with said substrate (24) along the direction of delaminate of said outer layer body (26); Said outer layer body (26) is applied tension force, and wherein, said tension force applies structure (212) and controls from the carrying direction front of said substrate (24) and carrying direction the rear end side leading section and the rearward end of outstanding said outer layer body (26) laterally through front end chuck (214) and rear end chuck (216).
6. like the stripping means of claim 4 or 5 described outer layer bodies, it is characterized in that,
Said peel off the beginning operation after, to peel off from said substrate (24) said outer layer body (26) whole before during, speed, acceleration/accel or the deceleration/decel of said handle sturcture (142a) are changed continuously.
7. like the stripping means of claim 4 or 5 described outer layer bodies, it is characterized in that,
Be retained under the state of flat-hand position at said substrate (24), said outer layer body (26) is peeled off from said substrate (24).
8. like the stripping means of claim 4 or 5 described outer layer bodies, it is characterized in that,
Stickup direction in that said outer layer body (26) edge and said substrate (24) are pasted has applied under the state of tension force, and said outer layer body (26) edge and the direction that said stickup direction is intersected are peeled off.
9. like the stripping means of claim 4 or 5 described outer layer bodies, it is characterized in that,
Stickup direction in that said outer layer body (26) edge and said substrate (24) are pasted has applied under the state of tension force, and said outer layer body (26) is peeled off along said stickup direction.
10. like the stripping means of claim 4 or 5 described outer layer bodies, it is characterized in that,
Said multilayer film have the photo-sensitive resin (29) that is pasted on said substrate and at least as the matrix film (26) of said outer layer body (26),
Peel off said matrix film (26) from said substrate (24).
CN2007800201102A 2006-05-30 2007-05-29 Stripping method and stripper of outer layer body Expired - Fee Related CN101460382B (en)

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JP2006150082A JP2007320678A (en) 2006-05-30 2006-05-30 Method and device for peeling outer layer body
PCT/JP2007/060867 WO2007139090A1 (en) 2006-05-30 2007-05-29 Stripping method and stripper of outer layer body

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