TWI288426B - Substrate-transporting device and method - Google Patents

Substrate-transporting device and method Download PDF

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Publication number
TWI288426B
TWI288426B TW90129944A TW90129944A TWI288426B TW I288426 B TWI288426 B TW I288426B TW 90129944 A TW90129944 A TW 90129944A TW 90129944 A TW90129944 A TW 90129944A TW I288426 B TWI288426 B TW I288426B
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TW
Taiwan
Prior art keywords
substrate
transport
unit
transfer
storage
Prior art date
Application number
TW90129944A
Other languages
Chinese (zh)
Inventor
Kazuyoshi Suehara
Hirosei Nagate
Katsuhiko Nureda
Katsuyoshi Watanabe
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Fujifilm Corp
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Publication date
Priority to JP2000373954A priority Critical patent/JP3756402B2/en
Application filed by Fujifilm Corp filed Critical Fujifilm Corp
Application granted granted Critical
Publication of TWI288426B publication Critical patent/TWI288426B/en

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Abstract

When the glass-substrates are moved out with a definite distance, they are intermittently transported efficiently. The glass-substrate 18 is floated up by means of clean air blown on the upper side from a table 30 floated by air, the transportation is carried out with the two-side edges of the substrate being supported in each roller 31, 32. The glass-substrates 18 are moved out from the transportation out section 28 with a transportation speed V1. When the rear-ends of the glass-substrate 18 pass through the starting-sensor 35d, the glass-substrates 18 in each transportation section 35-27 begin to be transported with a running speed V2 which is faster than the transportation speed V1. By means of such a running transportation, the distance of each glass-substrate 18 in the transportation-out section 28 and the second stock-transportation 27 becomes a determined distance L2. Each glass-substrate 18 will be in said transportation speed V1 again, and the determined distance L2 is kept. The glass-substrates 18 are sequentially moved out with a definite distance (L2) from the transportation-out section 28.

Description

[Technical Field] The present invention relates to a substrate transfer method and apparatus thereof, and more particularly to a glass substrate suitable for a large liquid crystal display panel or a plasma display panel. A substrate transfer device for manufacturing engineering. [Prior Art] A color filter used for a liquid crystal display panel (LCD) or a plasma display panel (PDP () is formed by forming a red (R) green (G), blue on a transparent glass substrate. (B) each color elemental pattern and black (K) black matrix. In recent years, with the enlargement of LCD or PDP, the thickness of the glass substrate used for the color filter is also Απτ The size is increased to a thickness of 1 mm to 10 mm, and the width or length is increased to 1 m or more. The method of manufacturing a color filter is conventionally a film transfer method called a film transfer. The method is to transfer a photosensitive layer formed on a film by a photosensitive layer transfer machine (hereinafter referred to as a laminator) (hereinafter referred to as lamination) on a transparent glass substrate. The second, the glass base after exposure and exposure of the photosensitive layer by a predetermined pattern formed by the exposure device and irradiated with light The desired pixel pattern and the black matrix are formed by the development process by the development processor. The glass substrate is supplied to the laminator in a horizontal state at regular intervals, and the peripheral portion of the width defined below is removed. The transfer surface is transferred to the glass substrate transfer apparatus of the laminating machine, and is described in Japanese Laid-Open Patent Publication No. Hei 5-883-3, using a 3--3-pair: working rod (1288426 • V. Inventive Note (2: ) wo rk in g be am ) to move it up and down and reciprocate in the direction of conveyance for use as a glass substrate, or as described in Japanese Patent Laid-Open Publication No. 2000-264418 The use of a plurality of pallets provided with a movable mechanism for transferring the glass substrate between the pallets 5 or as described in Japanese Patent Laid-Open Publication No. 2000-277587 Wi, The robot arm holds the glass substrate for transport [Problems to be Solved by the Invention] However, in the above-described substrate transfer apparatuses, when the glass substrates are fed at regular intervals, the mechanical structure or control system is complicated to perform the idle transport. The glass substrate of various sizes, the condition of the glass substrate J is changed or the control system is difficult. The present invention is to solve the above problems, and has a simple mechanism 5 to send the glass substrate at a certain interval, and more The purpose of the present invention is to provide a substrate transfer apparatus that can easily correspond to a plurality of sizes of glass substrates. [Means for Solving the Problem] In order to achieve the above-described g, the substrate transfer apparatus of the present invention is used for transporting substrates. 5 of the substrate transfer apparatus to the stacking drum is provided with > receiving and transporting section 5 The storage and transport unit is configured to store the substrate of the white receiving and transporting unit, and the transporting and transporting unit receives the substrate 5 of the white storage and transport unit to match the substrate transport speed of the laminated roller. The substrate is fed at a speed and the substrate is sent out. » The substrate detecting unit detects the position of the substrate at each of the conveying units. The control unit -4- is detected by the substrate detecting unit.

1288426 V. EMBODIMENT OF THE INVENTION (3: ) The substrate of the transport unit is delivered, and the white storage transport unit and the subsequent white transport unit transport the substrate to transport the substrate so that the distance between the substrate and the substrate being delivered is the same. The conveyance speed is in the stacking drum. The substrate and the photosensitive layer film are conveyed, and the photosensitive layer film is conveyed to the laminating roller 1 in a state in which the surface layer film is peeled off from the transfer portion of the white substrate. In the case where the front end position of the peeling portion of the surface film is aligned with the transfer start position of the substrate, the base: plate: delivery: Each of the transfer portions has a function to stop the substrate from being stopped at each of the transfer portions. Preferably, the substrate is detected on the substrate of each transport unit based on the substrate detection signal Ptfe of the stop sensor. Further, in the delivery and transport unit, a tracking start sensor for checking the delivery substrate is provided, and after the delivery start sensor detects the substrate, the substrate is transported at a speed exceeding the substrate feed speed. It is preferable that the transfer and control of each of the substrate transfer portions is such that the distance from the precursor substrate is a predetermined value and the substrate transfer speed is further. Further, the upstream transfer substrate is disposed at a predetermined interval in the substrate transfer direction. Detecting the sensor and the downstream substrate sensor to form a collision avoidance sensor. When the upstream substrate detection sensor changes from no substrate to a substrate and the downstream substrate sensor has a substrate, it is determined that there is a possibility of collision. It is preferable to stop the determination that the substrate on the upstream side of the possibility of collision is transported to the substrate. The inventory sensor 1 that is used to detect the presence or absence of the substrate is optimally received by the inventory sensor \\ the substrate signal Ο J J 作业 作业 作业 作业 \ J Ο Ο Ο Ο Ο Ο 884 884 884 884 884 884 884 884 884 884 884 884 884 884 884 884 884 884 884 884 884 884 884 884 884 884 Further, each of the transporting portions is a transporting member that is rotated by the both side edges of the supporting substrate, and a transporting member that is raised by the substrate floating portion of the substrate supported by the transporting member by blowing the gas. It is movable in the width direction of the substrate and the width dimension of the substrate. Further, each of the transporting portions is constituted by a transporting member that supports a portion that avoids both sides of the substrate and the transfer region of the photosensitive layer film, and the transporting member is in the direction of the substrate of the substrate to avoid the transfer. The position of the portion of the region is movable, and the respective transporting portions are preferably sandwiching members that are provided with a sandwiching substrate between the transporting members for transporting. > The feeding and unloading portions are provided in the vicinity of the clamping members. When the holding member is in the unclamped state, the substrate is optimally placed on the substrate. A plurality of storage and transport units are provided, and a heater is provided in each of the transport units to preheat each substrate to the substrate. The maximum temperature of the giant standard is > The temperature at which the receiving and conveying unit is set to be lower than the standard temperature is set to be used for the storage and transportation unit. The temperature of the giant standard is the local temperature, and the delivery and delivery unit is set to a temperature slightly higher than the standard temperature, and it is optimal that J is divided into small blocks for each of the conveyors, and each is In the case of the substrate transfer method of the present invention, the substrate transfer method of the present invention is used in the substrate transfer method for transporting the substrate to the stacking roll. 5 is used to receive the transfer unit> to receive the substrate 9 for storage. The transport unit is configured to store the substrate on which the WL M1 feed unit is to be taken, and to transport the substrate y. The transfer unit is configured to receive the substrate y of the white support transport unit to feed the substrate at the base-6-plate transport speed of the stacking drum. Speed 1288426 V. The invention (5) sends out the substrate; the substrate detecting unit detects the position j of the substrate of each of the transport units and the control unit, and corresponds to the substrate detected by the substrate detecting unit. The substrate detecting unit detects the substrate feeding in the feeding and conveying unit, and the substrate is fed and transported from the storage and transport unit and then from the receiving and transporting unit, so that the interval between the substrate and the substrate being fed is determined. And it becomes the same substrate delivery speed. [Detailed Description of Preferred Embodiments of the Present Invention] The first circle is a schematic configuration of a stacking mechanism provided with the substrate transfer apparatus of the present invention. The lamination mechanism 10 is a hot-pressing portion 12, a base film supply portion 13, a cooling portion 14, a peeling portion 15, a substrate take-out portion 16, and a controller (to be described later) 17 to be prepared by the preliminary heating portion 11. As shown in Fig. 2, the photosensitive layer is transferred to a transparent glass base; a transfer region TA other than the peripheral portion of the t-18. The glass substrate 18 is supplied to the preheating portion 1 1 by means of a robot arm as shown. An arm pad is disposed on the arm body of the robot arm. The robot arm is configured to hold the back surface of the glass substrate 18 (non-transfer surface of the photosensitive layer) by the suction pad. Thereafter, the mechanical arm flips the surface (the transfer surface of the photosensitive layer) downward, and the glass substrate 18 is supplied to the preliminary heating unit 1 1 . The preheating unit 1 1 is composed of the substrate transfer device 20 and the heater 2 1 22 and is divided into a receiving and transporting unit 25, first and second storage and transport units 26 > 27, and a delivery and transport unit 28. The receiving and conveying unit 25 transports the glass substrate 18 that receives the white robot arm to the downstream side. Glass substrate -7- 18 1288426 V. The invention (6) is transported to the delivery transport unit 28 via the first and second storage transport units 26 and 27. The glass substrate 18 is waited by the feeding and conveying unit 28, and is sent to the stacking roller pair of the hot pressing portion 12, which will be described later, in accordance with the instruction of the hot pressing portion. The heaters 21 and 22 are arranged in the vertical direction so as to sandwich the glass substrate 18 t of the substrate transfer device 20, and heat the conveyed glass substrate 18 to a predetermined temperature. Here, the heater can utilize a far-infrared heater, a nickel-aluminum alloy line heater, and a hot air heater. In the receiving and conveying unit 25, the heaters 21 and 22 are configured to suppress the thermal deformation and lower the set temperature, and in the first and second storage and transport units 26 and 27, the glass substrate can be used in a short time. When the temperature is set to a predetermined temperature and the set temperature is raised, in the delivery and transport unit 28, the temperature of the glass substrate 18 that is waiting is not lowered, and only the set temperature is raised. For example, the glass substrate 18 is heated to 1 1 (the respective set temperatures at the time of TC, the heaters 21a, 22a are 100 ° C, the heaters 21b, 22b, 21c, 22c are 180 ° C, the heater 21d and 22d are 120 ° C. Thereby, the glass substrate 18 is heated to a predetermined temperature without causing thermal deformation for a short period of time, and it is not necessary to lower the temperature while waiting. The set temperatures of 2 1 and 22 are not limited thereto, and are appropriately determined depending on the substrate size or the required temperature. The heaters 2 1 and 22 are formed by juxtaposing small-sized surface heating elements. In addition, an individual controller (not shown) is provided. Therefore, in order to uniformize the temperature distribution of the glass substrate 18, it is possible to individually change the set temperature. For example, it is possible to fully accommodate 1288426. The two sides of the glass substrate 18 which are easy to cool are set to a relatively high temperature. Further, each of the conveying portions 25 to 28 is set to the minimum stop time, and the temperature can be surely raised to a predetermined temperature. The substrate transfer device 20 is the third. As shown in the figure It is composed of an air floating seat 30, a conveying roller 3 1 , a rim conveying roller 3 2, a side roller 3 3, a clamping roller 34, a sensor 3 5 to 39, etc. The glass substrate 18 is composed of The conveying roller 3 1 and the edge conveying roller 32 are supported by the both side edges and are conveyed. The air floating seat 30 is configured to face the lower surface of the glass substrate 18 and has a large number of air blows formed on the surface thereof. The outlet 30a is configured such that the clean air is blown toward the glass substrate 18 by the air outlet 30a, and the central portion of the glass substrate 18 that is deflected by its own weight is lifted upward. The transport roller 3 1 and the attached transport roller 32 are attached. The glass substrate is fitted in a direction perpendicular to the transport direction of the glass substrate 18 while being disposed in the cut-away portion 30b formed at both side portions of the air floating mount 30 while being supported in a freely rotatable state. The width of the width of 18 forms a movable state. The respective conveying rollers 3 1 and 32 are rotationally driven by a pulse motor (ριι 1 se mo t 〇r ) 40 , corresponding to each of the sensors 3 5 to 5 described later. 3 9 generated substrate detection signals, The drive of the pulse motor 40 is controlled by the motor drive unit 4 1 by the controller 17. Further, each of the transport rollers 3 1 and 32 is moved along the cut-away portion 30b to match the width dimension of the glass substrate 18, and is compatible with The glass substrate of a plurality of sizes is transported. The transport roller 3 1 and the edge transfer roller ♦ 32 transport the glass substrate 18 while rotating on both sides of the lower side of the contact glass substrate 18. At this time, 1288426 In the description (8), although the surface of the glass substrate 18 (the transferred surface of the photosensitive layer) is formed on the lower side, the periphery of the glass substrate 18 to which the photosensitive layer is not transferred is contacted by the respective transfer rollers 31, 32. Therefore, it does not cause damage to the transfer area TA of the photosensitive layer, or adhesion of the enamel. Further, the edge 32a of the edge transfer roller 32 serves as a function for guiding the glass substrate 18, and controls the position of the glass substrate 18 in the width direction. A backing mechanism 42 is provided on the side roller 33. The controller 17 is selectively set between the corrected position where the side roller 33 is joined to the side surface of the glass substrate 18 and the retracted position separated from the glass substrate 18 via the edge-receiving mechanism 42. After the trailing roller 33 is placed at the correcting position, the position of the glass substrate 18 in the width direction and the inclination are corrected to improve the straightness accuracy of the glass substrate 18. Further, in order to prevent the glass substrate 18 from being damaged, the controller 17 performs the step of attaching the grip roller 34 to the retracted position when the side roller 33 is equipped at the correction position, when the grip roller 34 is mounted. When the transport position is set, the side roller 33 is mounted to the retracted position control. The grip roller 34 is formed of Teflon and is provided with a gripping mechanism 43. The controller 17 is a selective retracting position for holding the holding position of the glass substrate 18 between the holding roller 34 and the conveying roller 31 via the clamping mechanism 43 and separating from the glass substrate 18. Set between. Both side edges of the glass substrate 18 are sandwiched between the grip roller 34 and the transport roller 31 to prevent the glass substrate 18 from slipping during transport. In addition, in order to prevent breakage of the glass substrate 18, when the holding roller -10- 1288426 5 and the invention description (9) 34 are set to the transport position, the grip roller 3 is slowly moved immediately before the glass substrate is contacted. 4 Move. Further, after the glass substrate 18 is held by the stack of the laminated rolls, the holding roller 34 is set to the retracted position. Further, in the present embodiment, although the pinch roller is formed of Teflon, if there is no problem in function, other materials or more elastic rubber-based materials such as fluorine may be used. Rubber, silicone resin, etc. Sensors 35 to 39 formed of a heat-resistant reflective optical fiber sensor are disposed on the cut-away portion 30c formed at the center of the air floating seat 30. Each of the sensors 35 to 39 is disposed along the transport direction of the glass substrate 18, and is connected to a controller 17 (not shown). Further, after the glass substrate 18 is detected, the substrate detection signal is sent to the controller 17 respectively. The controller 17 controls the position of the glass substrate 18 to be specifically transported based on the substrate detection signals emitted from the respective sensors 35 to 39. Fig. 4 is a view showing the arrangement positions of the respective rollers 31 to 34 and the respective sensors 35 to 39 displayed in the respective conveying portions 25 to 28. The stock sensors 35a to 35d are used to detect the presence or absence of the glass substrate 18 of each of the transport units 25 to 28. When the stock sensor 35a of the delivery conveyance unit 28 is switched ON, the hot press portion 1 is prepared to transfer the photosensitive layer. Then, after the feeding start signal is sent out by the hot pressing portion 12, the glass substrate 18 is fed at a feeding speed VI of the joining speed of the stacking roller to be described later. In addition, when either one of the stock sensors 35c and 35d of the receiving and conveying unit 25 is turned ON, the robot does not supply the glass substrate 18 to the receiving and transporting -11-1286426, and the invention description (1) section 25, and It is not necessary to double-place the glass substrate 18. When both the inventory sensors 35c, 35d are formed to be OFF, the next glass substrate 18 is supplied by the robot arm. The stop sensors 36a to 36d are provided at the downstream end portions of the respective transport portions 25 to 28, and when the glass substrate 18 reaches the position and is turned ON, the transport of the glass substrate 18 is stopped. In the delivery conveyance unit 28, when the front end of the glass substrate 18 reaches the position where the sensor 35a is stopped, the conveyance is stopped. In the case where the glass substrate 18 is provided in the transport portion on the downstream side by the transport portion, the front end of the glass substrate 18 reaches the position of each of the stop sensors 35b to 35d. The conveyance of the glass substrate 18 of the conveyance unit is stopped. The gripper sensors 3 7 a to 3 7 h are provided in the vicinity of the respective grip rollers 34, and when the glass substrate 18 reaches the position, the respective grip rollers 34 are set to the transport position. Further, when the rear end of the glass substrate 18 passes through the grip roller 34, the respective grip rollers 34 are set at the retracted position before the rear end passes. The chase start sensor 38 is disposed at a distance L1 from the stop sensor 36b of the second storage transport unit 28. When the glass substrate 18 is sent to the hot-pressing portion 1 2 ' by the delivery/transport unit 28, the trailing start sensor 38 is turned OFF after the trailing end passes the chase start sensor 38. When the tracking start sensor 38 is turned OFF, the glass substrate 18 located in the receiving and transporting unit 25 and the first and second storage and transport units 26 and 27 will have a faster chasing speed V2 than the sending speed V1. Start chasing and transporting separately. -12- 1288426 V. Description of the Invention (11) The chasing and transporting is performed only at the chase time T. The chase speed V2 and the chase time T are set in accordance with the respective substrate sizes, and the interval between the glass substrates 18 in the hot stamping portion 1 is appropriately set to a predetermined distance L2 (see FIG. 3). The glass substrate 18 is supplied. As a result, after the elapse of the tracking time T, the interval between the glass substrate 18 fed from the delivery conveyance unit 28 and the glass substrate 18 located in the second support conveyance unit 28 is set to a predetermined distance L2. Then, after the elapse of the tracking time T, the glass substrate 18 that has been transported and transported also becomes the feed speed V1, and is held at the predetermined distance L2 and conveyed toward the hot press portion 12. In this manner, the interval between the glass substrates 18 placed on the transport portion 28 before the hot stamping portion 12 can be adjusted to a predetermined distance L2. Therefore, the hot stamping portion 12 can be accurately and at regular intervals. The glass substrate 18 is supplied. Further, since the interval between the glass substrates located in front of the hot-pressing portion 1 2 is adjusted, there is no problem even if the sliding occurs after the conveyance to the delivery/transport unit 28 is reached. Further, since the position of each of the transport units 25 to 28 is stopped, there is no difference in the time interval between the input of the glass substrate 18 to the transport unit 25 or the size of the substrate, and the hot stamping portion 1 can be used. 2 The glass substrate 18 is supplied in order with high precision and at regular intervals. In addition, by increasing the tracking speed V2, the transport distance of the chase can be shortened, and the object of miniaturizing the entire substrate transport apparatus can be achieved. The collision avoidance sensors 39a to 39f and the stop sensors 36b and 36c prevent the glass substrate 18 on the upstream side from colliding with the glass substrate 18 on the downstream side, and detect whether the interval between the front and rear glass substrates 18 is different. The fixed distance -13 - 1288426 V, invention description (12) from L2. Each of the sensors 39a and 39b, 39c and 39d, 36b and 39e, 3 6 c and 3 9 f are formed as a pair, respectively, and are set at a predetermined distance L2. In the case of the sensor on the upstream side, when the sensor on the upstream side is changed to a glass substrate by the glass-free substrate, and the sensor on the downstream side has the glass substrate, the interval between the front and rear glass substrates 18 is displayed. The distance L2 is equal to or less than the predetermined distance, and the conveyance of the glass substrate 8 that is being transported is stopped. The substrate 1 on the downstream side of the front side is transported, and the distance between the front and rear glass substrates 18 is set to a predetermined distance L2, and the transport of the glass substrate 18 that has been transported and transported is resumed. The conveyance speed at this time is the delivery speed VI of the engagement speed of the stacking drum pair. In Fig. 1, the hot-pressed portion 12 is composed of a stacking roller pair group 50 and a supporting roller 51. The stacking roller pair group 50 is composed of laminating rolls 50a and 50b arranged in the upper and lower directions, and a heater is housed in the stacking rolls 50a and 50b. The stacking roller pair group 50 is formed by sandwiching the glass substrate 18 and the laminated body film 52, and the laminated film 52 is adhered to the glass substrate 18 by heat pressing. The support roller 5 1 is configured to be driven to rotate in contact with the lamination rolls 50a and 50b to suppress the deflection of the lamination rolls 50a and 50b, and can be heat-pressed by uniform force. Further, between the substrate transfer device 20 and the hot-pressing portion 12, an air floating seat table 53 having the same configuration as the air floating seat 30 is also provided. Thereby, the glass substrate 18 can be held horizontally, and when the glass substrate 18 is placed on the stacking roller pair group 50, the deflection of the central portion of the glass substrate 18 can be prevented and the laminated roller 50a of the lower side can be prevented. There is a conflict. -14- 1288426 V. SUMMARY OF THE INVENTION (13) The laminated film supply unit 13 is provided with a shaft 5 4 a, a half cutoff device (ha 1 fcutter ) 5 5 , a surface film The peeling portion 56, the back tension roller 57, and the like are formed. In the laminated film supply unit 13, the surface film 52c is peeled off from the laminated film roll 54, and the base film 52b is supplied to the stacking roller pair 50 with the photosensitive layer facing upward. The laminated film 52 is provided with a layer of the photosensitive layer 52a on the base film 52b via a supplementary layer, an intermediate layer or the like which is not shown, and a surface layer 52c is provided on the layer above the photosensitive layer 52a. The other aspect of the base film 52b is a charging prevention layer or the like. The half cutoff 55 is a half-cut cut of the laminated film 52 in accordance with the length of the glass substrate 18. The half cut cut means that the surface film 52c and the photosensitive layer 52a are cut without cutting the base film 52b. The surface film peeling portion 56 peels off the surface film 52c which is formed by the half cut-off portion which is formed on the surface of the glass substrate 18 from the laminated film 52. The peeling layer is an adhesive tape 56c that is pulled out from the adhesive tape roll 56a, and is attached to the surface film 52c by pressing the roller 56b, and the adhesive tape 56c attached to the surface film 52c is taken up to the tape roll. The shaft 56d is taken for recycling. Further, the surface film thin film 52c is formed so as not to peel off and remains on the laminated thin film 52 formed between the glass substrate 18 and the glass substrate 18. After the half cut-off line passes through the predetermined position on the hot-pressing portion 12, the feed start signal is sent to the substrate transfer device 20. By this, the photosensitive layer 52a of the laminated film 52 is attached to the glass substrate 18 in a state where the position of the glass substrate 18 and the half cut line is aligned in the state of -15-1286426. Further, the base film 52b is also conveyed toward the downstream side in the conveying direction of the stacking drum pair group 50 in accordance with the movement of the glass substrate 18. The cooling unit 14 is composed of a cooling air blowing plate 60 and a conveying roller 61. The cooling air blowing plate 60 is blown out from the clean cooling air toward the glass substrate 18 by the HEPA filter, and the temperature of the glass substrate 18 conveyed by the conveying roller 61 is cooled to about room temperature (30 ° C). the following). The peeling portion 15 is composed of a peeling roller 62 and a base film take-up mechanism 63, and is used to peel the base film 52b from the glass substrate 18, and the base film 62b is wound into a roll shape on the recovery shaft 63a. The recovery shaft 63a is rotationally driven by a take-up motor (not shown). The take-up motor is controlled by the torque, and the tension of the base film 52b after the stacking drum pair 50 is kept constant to avoid slack in the base film 52b. On the downstream side of the peeling portion 15 is provided a substrate take-out portion 16 formed by the air floating seat 65. The air floating seat 65 is configured in the same manner as the air floating seat 30 of the preliminary heating unit 11. The glass substrate 18, which is sent out by the peeling portion 15, is sucked by the robot arm (not shown) for taking out. Next, the action of the above configuration will be described. When the first glass substrate 18 is placed in the receiving and transporting unit 25 by the robot arm, the glass substrate 18 is transported in the order of the first storage transport unit 26, the second storage transport unit 27, and the delivery transport unit 28. And by the heater, 22 heated to -16 - 1288426 five, the temperature specified in the description (15). When the front end of the glass substrate 18 reaches the stop sensor 36a of the delivery conveyance unit, the conveyance is stopped. Then, the glass sheets 18 of the second, third, and fourth sheets are sequentially loaded and transported, and are stopped at the positions of the stop sensors 36b to 36d of the respective transport units 25 to 27, respectively. In the hot-pressing portion 12, the stacking roller rotates the group 50 to transport the laminated body film 52, and when the half cut-off line of the laminated film 52 comes to a predetermined position, the feed start signal is directed to the substrate transfer device. 20 sent out. The substrate transfer device 20 feeds the first glass substrate 18 from the delivery conveyance unit 28 by the input of the feed start signal to match the feed speed VI of the stacking speed of the stacking roller pair group 50. When the rear end of the glass substrate 18 passes through the tracking start sensor 38, the second glass substrate 18 starts chasing and transporting at a faster tracking speed V2 than the delivery speed VI. After the elapsed time T, the second glass substrate 18 is also conveyed at the feed speed VI. At this time, the interval between the first glass substrate 18 and the second glass substrate 18 is a predetermined distance L2. In the same manner, the third and fourth glass substrates 18 are similarly chased by the chasing speed V2 which is sent to the feeding speed V1 of the glass substrate 18 of the stacking roller pair 50, and is chased. The interval between the glass substrates 18 fed to the stacking roller pair group 50 is set to a predetermined distance L2, and then fed to the stacking roller pair group 50. Further, the glass substrate 18 stopped at the receiving and conveying unit 25 is transported to the downstream side, and when both of the stock sensors 35c and 35d are turned OFF, the robot arm is put into the next glass substrate 1 and repeats the same as described above. The glass substrate 18 is transported. -17- 1288426 V. INSTRUCTION OF THE INVENTION (16) The laminated roller pair group 50 is hot-pressed on the glass substrate 18 in a state in which the position between the glass substrate 18 and the half cut-off line is aligned. The photosensitive layer 52a of the laminated film 52 is attached. The glass substrate 18 is peeled off by the peeling portion 15 after the cooling portion 18 is cooled to about room temperature. Thus, the photosensitive layer is transferred onto the transfer area TA of the lower surface (surface) of the transparent glass substrate 18. Thereafter, the glass substrate 18 is sent out to the substrate take-out portion 18, and the upper surface (back surface) is sucked by the robot arm for taking out. Further, in the above-described embodiment, all of the transport rollers are rotationally driven by being connected to the pulse motor. However, it is also necessary to arrange the motor in each of the blocks, and to drive the roller by the belt, or The freewheel, the trending drive roller, or the torque motor drive roller that are freely rotatable by the drive source are arranged in combination, and the installation interval of the transfer roller or the like is preferably to stably transport the multi-size glass substrate. . Moreover, the friction between the transport roller and the peeling substrate is sufficiently ensured, and there is no need to provide a grip roller when the glass substrate is slipped during transport, and in this case, while forming a transport series that is easy to control, It can reduce the concern of dust. Further, although the edge transfer roller is used in the receiving and transporting unit and the first and second storage and transport units, as shown in Fig. 5, the same transport roller 7 1 and the restricting glass substrate 18 as the delivery and transport unit can be used. The guide roller 72 at the position in the width direction carries and guides the glass substrate 18. In the above-described embodiment, the interval between the glass substrates of the delivery and transport unit is adjusted to a predetermined distance L2. However, as shown in Fig. -18 to 1288426, the invention (17) can also be sent out. The downstream end portion of the transport unit is provided with a freely movable abutting portion 85 between a stop position at which the glass substrate 18 is prohibited from being transported and a retracted position at which the transfer is prohibited, and the substrate is adjusted by the movement of the abutting portion 85. At the time of the conveyance, the interval between the respective glass substrates 18 supplied to the hot-pressing portion 12 is a predetermined distance L2. In this case, the distance between each of the glass substrates 18 after the chasing and transporting is a shorter distance L3 than the predetermined distance L2. In the above embodiment, the two sides of the glass substrate are supported by the transport rollers. In the case where the plurality of glass substrates 18 are spaced apart at a constant interval to form the plurality of transfer surfaces TA, or the back surface of the non-transfer surface is directed to the lower side, In the case of support, a plurality of transport rollers 9 1 may be disposed on the support shaft 90 for supporting the glass substrate 18. Further, the interval and number of the transport rollers 9 1 can be arbitrarily set, and the glass substrates of various sizes can be used. Further, although the transport substrate is a glass substrate, the present invention is not limited thereto, and may be formed of other materials such as metal or resin. [Effect of the Invention] As described above, the substrate transfer apparatus according to the present invention is provided with a receiving and transporting unit for receiving a substrate, and the storage and transporting unit is configured to store a substrate from the transporting and transporting unit, and to carry out the transport; And receiving the substrate from the storage and transport unit to deliver the substrate at a speed at which the stacking roller is fed, and the substrate detecting unit is configured to detect the position of the substrate for each of the conveying portions; and the control unit The substrate detecting unit detects the position of the -19- 1288426. The invention (18) sends the substrate to the delivery and transport unit, and the substrate is sent from the storage and transport unit and then the substrate is transported and picked up and transported. Since the interval between the substrates in the middle is constant and the substrate transfer speed is the same, the glass substrate can be efficiently transported at a constant interval by a simple mechanism. Further, it is easy to correspond to a multi-size glass substrate. Further, according to the substrate transfer method of the present invention, the substrate detecting unit detects the substrate transported by the transport and transport, and the substrate is transported from the storage transport unit and the subsequent transport unit to perform the transport and delivery. Since the interval between the substrates is constant and the substrate transfer speed is the same, the glass substrate can be efficiently transported at a constant interval in a similarly simple mechanism. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing the transfer of a photosensitive layer carried out by the present invention. Fig. 2 is a plan view showing a transfer surface of a photosensitive layer of a glass substrate. Fig. 3 is a schematic perspective view of the substrate transfer device. Fig. 4 is a plan view showing the position at which the sensor is mounted on the substrate transfer device. Fig. 5 is a schematic perspective view showing the substrate transfer apparatus of the second embodiment. Fig. 6 is a schematic perspective view showing the substrate transfer apparatus of the third embodiment. Fig. 7 is a schematic perspective view showing the substrate transfer apparatus of the fourth embodiment. [Description of Symbols] 10 ·· Lamination mechanism 17 ·· Controller 18, 98 : Glass substrate -20- 1288426 V. Invention description (19) 20, 70, 80: Substrate conveying device 25: Receiving and conveying unit 26: The first storage conveyance unit 27: the second storage conveyance unit 28: the delivery conveyance unit 30, 53, 65: the air floating seat 31, 71, 81, 91: the conveyance roller 32: the attachment conveyance roller 33, 83: the side roller 34,84 : 35 : 36 : 3 7 ·· 38 : 39 : 40 : 41 : 42 : 43 : 5 0 ·· Clamping wheel inventory sensor stop sensor gripper sensor chasing start sensor to prevent collision perception Pulse motor motor drive section edge mechanism clamping mechanism stacking roller pair 52: laminated film • 21 -

Claims (1)

1288426
Patent Application No. 90 1 29944 "Substrate Transfer Device and Method" Patent (Revised on March 15, 2007), Patent Application Range: 1. A substrate transfer device for feeding a substrate to a laminate In the substrate transfer apparatus of the drum, the receiving and conveying unit is configured to receive the substrate; the storage and transport unit is configured to store the substrate from the receiving and transporting unit, and the transporting unit is configured to receive the transporting unit. The substrate of the storage and transport unit is configured to send the substrate to the f-substrate detecting portion to detect the position of the substrate for each of the transport portions, and to control the substrate, by the substrate The detecting unit detects that the substrate is transported by the transporting and transporting unit, and the self-storing and transporting unit and the subsequent transporting from the receiving and transporting unit substrate to perform the chasing and transporting so that the distance from the substrate being fed is determined, and the same substrate feeding speed is obtained. Providing, in the delivery and delivery unit, a tracking start sensing for detecting the delivery of the substrate When the tracking start sensor detects the delivery of the substrate, the substrate transporting the transport unit and the transport unit is sent out and transported, and the substrate transport unit is controlled so as to be spaced apart from the previous substrate. It becomes the predetermined crucible and becomes the substrate delivery speed. 1288426 VI. Application for Patent Range 2. For example, the basis of the first item of the patent scope: board: moving: sending: device> wherein the substrate and the photosensitive layer film are sent to the aforementioned laminating roller J /·· The film j is conveyed to the lamination roller in a state in which the surface film of the transfer portion of the substrate is peeled off, and the transfer conveyance portion is aligned with the front end of the peeled portion of the surface film. In the substrate transfer device of the first aspect of the invention, the substrate transfer device of the first aspect of the present invention includes a stop sensor that stops the substrate from being stopped by each of the transfer units. The substrate detection signal of the sensor is used to determine the substrate position of each of the transport sections. 4. The substrate transport apparatus of the first aspect of the patent range is described in the above description. An upstream side substrate detecting sensor and a downstream side substrate sensor are provided at predetermined intervals in the substrate transport direction to constitute a collision avoidance sensor, and the upstream substrate detecting sensor is changed by 々1"' ιΠΓ J\\\ substrate When there is a substrate and the downstream substrate sensor is a substrate, it is determined that there is a possibility of collision y. Then, the substrate transporting 判定 on the upstream side of the possibility of collision is stopped. In the substrate transfer device, the substrate receiving portion is provided to detect whether or not the substrate is present, and the inventory sensor is used to receive the substrate by the inventory sensor. In the substrate transfer apparatus according to any one of the first to fourth aspects of the invention, the description of each of the transfer parts is performed by the side of the substrate, and the two sides of the substrate are 1288426. a rotating transfer element and a substrate floating panel that floats a central portion of the substrate supported by the transfer element by blowing a gas, wherein the transfer element is movable in a width direction of the substrate and a width dimension of the substrate . The substrate transfer device according to any one of claims 1 to 4, wherein each of the transfer portions is rotated by supporting a portion of the transfer region of the photosensitive layer film while avoiding both side edges of the substrate The transport element is configured such that the transport element is movable in a position in which the width of the substrate is offset from the portion of the transfer region. 8. The substrate transfer device according to claim 6, wherein each of the transfer portions is provided with a sandwiching member that sandwiches the substrate and transports the transfer member. 9. The substrate transfer apparatus according to claim 8, wherein a side edge member is provided in the feeding/unloading portion in the vicinity of the holding member, and the holding member is brought into a grip release state to perform a side edge of the substrate. The substrate transfer apparatus according to any one of the preceding claims, wherein the plurality of storage and transport units are provided, and a heater is provided in each of the transport units to preheat each substrate to a substrate. The target temperature is set to a temperature lower than the target temperature, and the storage and transport unit is set to a temperature at which the target temperature is high, and the delivery/transport unit is Set to a temperature slightly higher than the aforementioned target temperature. The substrate transfer device of claim 6, wherein a plurality of the storage and transport units are provided, and a heater is provided in each of the transport units to preheat each substrate to a target temperature at which the substrate is sent out. In the storage and conveyance unit, the temperature is set to be lower than the target temperature, and the storage and conveyance unit is set to a temperature higher than the target temperature, and is set to be slightly higher in the delivery and conveyance unit. A temperature higher than the aforementioned target temperature. The substrate transfer device according to claim 7, wherein a plurality of the storage and transport units are provided, and a heater is provided in each of the transport units, and each of the substrates is preheated to a target temperature at the time of substrate transfer, and the above-mentioned acquisition is performed. The transport unit is set to a temperature lower than the target temperature, and the storage transport unit is set to a temperature higher than the target temperature, and the delivery transport unit is set to be slightly higher than the target temperature. High temperature. 1 . The substrate transfer apparatus of claim 10, wherein the heaters disposed in the respective transport sections are divided into small blocks, and the temperature setting is performed in each of the blocks. The substrate transfer apparatus of claim 11, wherein the heaters provided in the respective transport sections are divided into small blocks, and the temperature setting is performed in each of the blocks. The substrate transfer apparatus of claim 12, wherein the heaters disposed in the respective transport sections are divided into small blocks, and the temperature setting is performed in each of the blocks. 1288426 - s. Patent Application No. 16. The substrate transfer method is a substrate transfer method for feeding a substrate to a stacking drum, which is characterized in that it is used, and the receiving and transporting portion is for receiving the substrate; The conveying unit is configured to store the substrate from the receiving and conveying unit, and the conveying unit is configured to receive the substrate from the supporting and conveying unit and to feed the substrate at a substrate feeding speed of the substrate transfer speed of the stacking roller. The substrate detecting unit is configured to detect the position of the substrate in each of the conveying units, and the control unit controls each of the conveying units in accordance with the substrate position detected by the substrate detecting unit; and the substrate detecting unit detects The substrate is sent out from the storage and transport unit, and the substrate is fed and transported from the storage and transport unit from the storage and transport unit, so that the substrate is separated from the storage and the substrate is delivered. The speed is provided in the delivery and transport unit to detect the delivery of the substrate When the tracking start sensor detects the delivery of the substrate, the substrate is sent out of the substrate of the storage and transport unit and the transport unit to be transported, and the substrate transport unit is controlled to advance the substrate transfer speed. The interval between the substrates becomes a predetermined enthalpy and becomes a substrate delivery speed.
TW90129944A 2000-12-08 2001-12-04 Substrate-transporting device and method TWI288426B (en)

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