JP2015069997A - Sheet sticking device and sheet sticking method - Google Patents

Sheet sticking device and sheet sticking method Download PDF

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JP2015069997A
JP2015069997A JP2013200302A JP2013200302A JP2015069997A JP 2015069997 A JP2015069997 A JP 2015069997A JP 2013200302 A JP2013200302 A JP 2013200302A JP 2013200302 A JP2013200302 A JP 2013200302A JP 2015069997 A JP2015069997 A JP 2015069997A
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holding
sheet
peeling
adhesive sheet
sticking
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JP6134625B2 (en
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木村 浩二
Koji Kimura
浩二 木村
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リンテック株式会社
Lintec Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a sheet sticking device and a sheet sticking method, capable of preventing a peeling failure of an adhesive sheet.SOLUTION: A sheet sticking device 1 comprises: delivery means 2 for delivering a raw fabric RS in which an adhesive sheet AS is temporarily stuck to a peeling sheet RL; holding means 3 for holding the adhesive sheet AS on a holding surface 31A; peeling means 4 for peeling the adhesive sheet A held by the holding means 3 from the peeling sheet RL; moving means 5 for relatively moving the peeling means 4 and the holding means 3; heating means 6 for heating an adherend WF; and pressing means 7 for pressing and sticking the adhesive sheet AS held by the holding means 3 to the adherend WF. The peeling means 4 is provided to so as to be able to face a holding surface 31A, and includes a support surface 41A supporting the raw fabric RS delivered by the delivery means 2 from the peeling sheet RL side. The holding means 3 is provided so as to be able to be cooled on the support surface 41A.

Description

本発明は、被着体に接着シートを貼付するシート貼付装置および貼付方法に関する。   The present invention relates to a sheet sticking apparatus and a sticking method for sticking an adhesive sheet to an adherend.
従来、半導体製造工程において、半導体ウエハ(以下、単に「ウエハ」という場合がある)に接着シートを貼付するシート貼付装置が知られている(例えば、特許文献1参照)。
特許文献1に記載のシート貼付装置は、剥離シートに接着シートが仮着された原反を繰り出す繰出手段と、剥離シートを折り返して当該剥離シートから接着シートを剥離するピールプレートと、剥離された接着シートを保持可能な保持手段とを備え、保持手段で保持した接着シートをウエハ(被着体)に押圧して貼付するように構成されている。
2. Description of the Related Art Conventionally, a sheet sticking apparatus for sticking an adhesive sheet to a semiconductor wafer (hereinafter sometimes simply referred to as “wafer”) in a semiconductor manufacturing process is known (see, for example, Patent Document 1).
The sheet sticking device described in Patent Document 1 is peeled off by a feeding means for feeding out a raw material in which an adhesive sheet is temporarily attached to a release sheet, a peel plate that folds the release sheet and peels the adhesive sheet from the release sheet. Holding means capable of holding the adhesive sheet, and configured to press and adhere the adhesive sheet held by the holding means to a wafer (adhered body).
特開2010−195409号公報JP 2010-195409 A
しかしながら、特許文献1に記載されたような従来のシート貼付装置では、加熱された被着体に保持手段で保持した接着シートを貼付する際、被着体の熱が接着シートを介して保持手段に伝わり、保持手段が加熱されることになる。加熱された状態の保持手段が次の接着シートに接触すると、保持手段の熱により接着シートが加熱され、当該接着シートが剥離シートから剥離しにくくなり、接着シートの剥離不良を招来してしまうという不都合がある。   However, in the conventional sheet sticking apparatus as described in Patent Document 1, when sticking the adhesive sheet held by the holding means on the heated adherend, the heat of the adherend is held by the holding sheet via the adhesive sheet. The holding means is heated. When the holding means in a heated state comes into contact with the next adhesive sheet, the adhesive sheet is heated by the heat of the holding means, and the adhesive sheet becomes difficult to peel from the release sheet, resulting in poor release of the adhesive sheet. There is an inconvenience.
本発明の目的は、接着シートの剥離不良を防止することができるシート貼付装置および貼付方法を提供することにある。   The objective of this invention is providing the sheet sticking apparatus and sticking method which can prevent the peeling defect of an adhesive sheet.
本発明のシート貼付装置は、剥離シートに接着シートが仮着された原反を繰り出す繰出手段と、前記接着シートを保持面で保持する保持手段と、前記保持手段で保持された接着シートを前記剥離シートから剥離する剥離手段と、前記剥離手段と前記保持手段とを相対移動させる移動手段と、被着体を加熱する加熱手段と、前記保持手段で保持した接着シートを前記被着体に押圧して貼付する押圧手段とを備え、前記剥離手段は、前記保持面に対向可能に設けられ、前記繰出手段で繰り出された原反を前記剥離シート側から支持する支持面を有し、当該支持面で前記保持手段を冷却可能に設けられていることを特徴とする。   The sheet sticking apparatus according to the present invention includes: a feeding unit that feeds out a raw material in which an adhesive sheet is temporarily attached to a release sheet; a holding unit that holds the adhesive sheet on a holding surface; and an adhesive sheet that is held by the holding unit. A peeling means for peeling from the release sheet, a moving means for relatively moving the peeling means and the holding means, a heating means for heating the adherend, and an adhesive sheet held by the holding means are pressed against the adherend. And a pressing means for sticking, and the peeling means is provided so as to be able to face the holding surface, and has a support surface for supporting the original fabric fed by the feeding means from the release sheet side, and the support The holding means is provided so that it can be cooled on the surface.
本発明のシート貼付装置は、前記保持面の温度を検知する保持面温度検知手段を備えていることが好ましい。
本発明のシート貼付装置は、前記保持手段に気体を吹き付けて当該保持手段を冷却する外部冷却手段を備えていることが好ましい。
The sheet sticking device of the present invention preferably includes holding surface temperature detecting means for detecting the temperature of the holding surface.
The sheet sticking apparatus of the present invention preferably includes an external cooling unit that blows gas onto the holding unit to cool the holding unit.
本発明のシート貼付方法は、剥離シートに接着シートが仮着された原反を繰り出す工程と、前記接着シートを保持手段の保持面で保持する工程と、前記保持面に対向可能に設けられ、繰り出された原反を前記剥離シート側から支持する支持面を有する剥離手段において当該支持面で前記保持手段を冷却する工程と、前記剥離手段と前記保持手段とを相対移動させ、前記保持手段で保持された前記接着シートを前記剥離手段で前記剥離シートから剥離する工程と、加熱された被着体に前記保持手段で保持した接着シートを押圧して貼付する工程とを実施することを特徴とする。   The sheet sticking method of the present invention is provided so as to be able to face the holding surface, a step of unwinding the original fabric with the adhesive sheet temporarily attached to the release sheet, a step of holding the adhesive sheet on the holding surface of the holding means, In the peeling means having a support surface for supporting the unrolled original fabric from the release sheet side, the holding means is cooled by the support surface, the peeling means and the holding means are relatively moved, and the holding means Performing the steps of peeling the held adhesive sheet from the release sheet by the peeling means, and pressing and sticking the adhesive sheet held by the holding means to a heated adherend. To do.
以上のような本発明によれば、原反を支持する支持面で保持手段を冷却するため、保持手段の熱により接着シートが加熱されることを防止し、接着シートの剥離不良を防止することができる。   According to the present invention as described above, since the holding means is cooled by the support surface that supports the original fabric, it is possible to prevent the adhesive sheet from being heated by the heat of the holding means, and to prevent defective peeling of the adhesive sheet. Can do.
本発明の一実施形態に係るシート貼付装置の側面図。The side view of the sheet sticking apparatus which concerns on one Embodiment of this invention.
以下、本発明の一実施形態を図面に基づいて説明する。
なお、本実施形態において、基準となる図を挙げることなく、例えば、上、下、左、右、または、手前、奥といった方向を示した場合は、全て図1を正規の方向(付した番号が適切な向きとなる方向)から観た場合を基準とし、上、下、左、右方向が紙面に平行な方向であり、前が紙面に直交する手前方向、後が紙面に直交する奥側方向とする。
Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
In the present embodiment, for example, when a direction such as up, down, left, right, front, or back is shown without giving a reference figure, all of FIG. The direction from which the image is viewed in the appropriate direction) is the direction in which the top, bottom, left, and right directions are parallel to the page, the front is the front direction perpendicular to the page, and the back is the back side orthogonal to the page. The direction.
図1において、シート貼付装置1は、剥離シートRLに接着シートASが仮着された原反RSを繰り出す繰出手段2と、接着シートASを保持面31Aで保持する保持手段3と、保持手段3で保持された接着シートASを剥離シートRLから剥離する剥離手段4と、剥離手段4と保持手段3とを相対移動させる移動手段5と、被着体としてのウエハWFを加熱する加熱手段としてのコイルヒータや赤外線ヒータ等のヒータ6と、保持手段3で保持した接着シートASをウエハWFに押圧して貼付する押圧手段であって駆動機器としての直動モータ7と、保持面31Aの温度を検知する保持面温度検知手段としての温度計8と、ウエハWFを支持する支持手段9とを備えている。なお、接着シートASは、剥離シートRLに所定間隔で複数仮着されている。   In FIG. 1, a sheet sticking device 1 includes a feeding unit 2 that feeds out a raw fabric RS in which an adhesive sheet AS is temporarily attached to a release sheet RL, a holding unit 3 that holds the adhesive sheet AS on a holding surface 31A, and a holding unit 3. The peeling means 4 for peeling the adhesive sheet AS held by the peeling sheet RL, the moving means 5 for moving the peeling means 4 and the holding means 3 relative to each other, and the heating means for heating the wafer WF as the adherend A heater 6 such as a coil heater or an infrared heater, and a pressing means for pressing and adhering the adhesive sheet AS held by the holding means 3 to the wafer WF, and the temperature of the linear motion motor 7 as a driving device and the holding surface 31A A thermometer 8 as a holding surface temperature detecting means for detecting and a supporting means 9 for supporting the wafer WF are provided. A plurality of adhesive sheets AS are temporarily attached to the release sheet RL at a predetermined interval.
繰出手段2は、原反RSを支持する支持ローラ20と、原反RSを案内する複数のガイドローラ21と、駆動機器としての回動モータ22Aによって駆動される駆動ローラ22との間に剥離シートRLを挟み込むピンチローラ23と、図示しない駆動機器によって駆動され、剥離シートRLを回収する回収ローラ24とを備えている。   The feeding means 2 includes a release sheet between a support roller 20 that supports the original fabric RS, a plurality of guide rollers 21 that guide the original fabric RS, and a driving roller 22 that is driven by a rotation motor 22A as a driving device. A pinch roller 23 that sandwiches the RL and a collection roller 24 that is driven by a driving device (not shown) and collects the release sheet RL are provided.
保持手段3は、直動モータ7の出力軸7Aに支持され、接着シートASを保持する保持面31Aを有する保持プレート31と、保持プレート31内に設けられ、保持面31Aに接着シートASを保持させる図示しない静電チャックとを備えている。なお、ヒータ6および温度計8は、保持プレート31内に設けられている。   The holding means 3 is supported by the output shaft 7A of the linear motor 7 and has a holding plate 31A having a holding surface 31A for holding the adhesive sheet AS, and is provided in the holding plate 31, and holds the adhesive sheet AS on the holding surface 31A. And an electrostatic chuck (not shown). The heater 6 and the thermometer 8 are provided in the holding plate 31.
剥離手段4は、保持面31Aに対向可能に設けられ、繰出手段2で繰り出された原反RSを剥離シートRL側から支持する支持面41Aを有する剥離板41と、剥離板41内に設けられ、支持面41Aで保持手段3を冷却するヒートパイプやペルチェ素子等の冷却手段42とを備えている。   The peeling means 4 is provided so as to be able to face the holding surface 31 </ b> A, and is provided in the peeling plate 41 with a peeling plate 41 having a support surface 41 </ b> A that supports the raw fabric RS fed by the feeding means 2 from the peeling sheet RL side. And a cooling means 42 such as a heat pipe or a Peltier element for cooling the holding means 3 with the support surface 41A.
移動手段5は、直動モータ7を支持するスライダ51Aを有する駆動機器としてのリニアモータ51を備えている。   The moving means 5 includes a linear motor 51 as a drive device having a slider 51 </ b> A that supports the linear motion motor 7.
支持手段9は、図示しない減圧ポンプや真空エジェクタ等の減圧手段によってウエハWFを支持する支持面91Aを有するテーブル91を備えている。   The support unit 9 includes a table 91 having a support surface 91A that supports the wafer WF by a decompression unit such as a decompression pump or a vacuum ejector (not shown).
以上のシート貼付装置1において、ウエハWFに接着シートASを貼付する手順を説明する。
先ず、原反RSを図1に示すようにセットする。そして、図示しない操作パネルやパーソナルコンピュータ等の入力手段を介して運転開始の信号を入力すると、繰出手段2が回動モータ22Aおよび図示しない駆動機器を駆動し、原反RSを繰り出す。そして、剥離板41の上部に位置する接着シートASが所定位置に到達したことを光学センサや撮像手段等の図示しない検知手段が検知すると、繰出手段2が回動モータ22Aおよび図示しない駆動機器の駆動を停止し、スタンバイ状態となる。
In the sheet sticking apparatus 1 described above, a procedure for sticking the adhesive sheet AS to the wafer WF will be described.
First, the raw fabric RS is set as shown in FIG. When an operation start signal is input via an input means such as an operation panel (not shown) or a personal computer, the feeding means 2 drives the rotation motor 22A and a driving device (not shown) to feed the original fabric RS. Then, when a detection means (not shown) such as an optical sensor or an imaging means detects that the adhesive sheet AS positioned on the upper part of the peeling plate 41 has reached a predetermined position, the feeding means 2 is connected to the rotation motor 22A and a drive device (not shown) The drive is stopped and a standby state is entered.
そして、人手または多関節ロボットやベルトコンベア等の図示しない搬送手段がテーブル91の支持面91A上にウエハWFを載置すると、支持手段9が図示しない減圧手段を駆動し、支持面91AでウエハWFを支持する。次に、押圧手段が直動モータ7を駆動し、図1中右側の二点鎖線で示すように、保持プレート31を下降させ、支持面41A上の接着シートASに保持面31Aを当接させる。その後、保持手段3が図示しない静電チャックを駆動し、保持面31Aで接着シートASを保持する(以下、「保持工程」という)。   Then, when a transfer means (not shown) such as a human hand or an articulated robot or a belt conveyor places the wafer WF on the support surface 91A of the table 91, the support means 9 drives a decompression means (not shown), and the wafer WF is driven by the support surface 91A. Support. Next, the pressing means drives the linear motion motor 7 to lower the holding plate 31 and bring the holding surface 31A into contact with the adhesive sheet AS on the support surface 41A as shown by the two-dot chain line on the right side in FIG. . Thereafter, the holding means 3 drives an electrostatic chuck (not shown) to hold the adhesive sheet AS on the holding surface 31A (hereinafter referred to as “holding step”).
次に、繰出手段2および移動手段5が回動モータ22A、図示しない駆動機器、およびリニアモータ51を同期させて駆動し、接着シートASを保持した保持プレート31を左方向に移動させながら原反RSを繰り出すことにより、保持面31Aで接着シートASを保持したまま、当該接着シートASを剥離シートRLから剥離する(以下、「剥離工程」という)。   Next, the feeding means 2 and the moving means 5 drive the rotating motor 22A, a driving device (not shown), and the linear motor 51 in synchronism, and move the holding plate 31 holding the adhesive sheet AS in the left direction while moving the original fabric. By feeding out RS, the adhesive sheet AS is peeled from the release sheet RL while holding the adhesive sheet AS on the holding surface 31A (hereinafter referred to as “peeling step”).
その後、直動モータ7が図1中二点鎖線で示す位置に移動すると、移動手段5がリニアモータ51の駆動を停止する。そして、押圧手段が直動モータ7を駆動し、保持プレート31を下降させ、当該保持プレート31で接着シートASをウエハWFに押圧するとともに、加熱手段がヒータ6を駆動し、接着シートASおよびウエハWFを加熱して当該ウエハWFに接着シートASを貼付する(以下、「貼付工程」という)。   Thereafter, when the linear motor 7 moves to a position indicated by a two-dot chain line in FIG. 1, the moving means 5 stops driving the linear motor 51. Then, the pressing means drives the linear motion motor 7 to lower the holding plate 31 and presses the adhesive sheet AS against the wafer WF with the holding plate 31, and the heating means drives the heater 6, and the adhesive sheet AS and wafer The WF is heated and the adhesive sheet AS is attached to the wafer WF (hereinafter referred to as “attachment process”).
次に、保持手段3が図示しない静電チャックの駆動を停止し、また、加熱手段がヒータ6の駆動を停止した後、移動手段5および押圧手段がリニアモータ51および直動モータ7を駆動し、保持プレート31を図1中実線で示す位置に復帰させる。その後、図示しない搬送手段がウエハWFを次工程に搬送し、以降上記同様の動作が繰り返される。   Next, after the holding means 3 stops driving the electrostatic chuck (not shown) and the heating means stops driving the heater 6, the moving means 5 and the pressing means drive the linear motor 51 and the linear motor 7. The holding plate 31 is returned to the position indicated by the solid line in FIG. Thereafter, a transfer means (not shown) transfers the wafer WF to the next process, and thereafter the same operation is repeated.
ここで、1回目の貼付工程において、保持プレート31が加熱されているので、2回目以降の保持工程において、保持プレート31で接着シートASを保持したときに、当該接着シートASが加熱されて剥離シートRLから剥離しにくくなり、接着シートASの剥離不良が発生する場合がある。そこで、保持工程の前に剥離手段4が冷却手段42を駆動し、支持面41Aを冷却することで、保持工程の際に保持プレート31の熱が原反RSを介して保持プレート31に伝達され、当該保持プレート31が冷却される。そして、保持面温度検知手段が温度計8を駆動し、保持面31Aが所定温度以下であることを検知したら剥離工程を開始し、以降上記同様の動作が行われる。なお、保持面31Aが所定温度よりも高いことを温度計8が検知した場合、保持手段3の冷却温度を低くするように冷却手段42を制御する。   Here, since the holding plate 31 is heated in the first attaching step, when the adhesive sheet AS is held by the holding plate 31 in the second and subsequent holding steps, the adhesive sheet AS is heated and peeled off. It may become difficult to peel from the sheet RL, and a peeling failure of the adhesive sheet AS may occur. Therefore, before the holding step, the peeling unit 4 drives the cooling unit 42 to cool the support surface 41A, so that the heat of the holding plate 31 is transmitted to the holding plate 31 via the raw fabric RS during the holding step. The holding plate 31 is cooled. Then, when the holding surface temperature detecting means drives the thermometer 8 and detects that the holding surface 31A is equal to or lower than the predetermined temperature, the peeling process is started, and thereafter the same operation as described above is performed. When the thermometer 8 detects that the holding surface 31A is higher than the predetermined temperature, the cooling unit 42 is controlled so as to lower the cooling temperature of the holding unit 3.
以上のような本実施形態によれば、原反RSを支持する支持面41Aで保持手段3を冷却するため、保持手段3の熱により接着シートASが加熱されることを防止し、接着シートASの剥離不良を防止することができる。   According to the present embodiment as described above, since the holding unit 3 is cooled by the support surface 41A that supports the raw fabric RS, the adhesive sheet AS is prevented from being heated by the heat of the holding unit 3, and the adhesive sheet AS. It is possible to prevent the peeling failure.
以上のように、本発明を実施するための最良の構成、方法等は、前記記載で開示されているが、本発明は、これに限定されるものではない。すなわち、本発明は、主に特定の実施形態に関して特に図示され、かつ説明されているが、本発明の技術的思想および目的の範囲から逸脱することなく、以上述べた実施形態に対し、形状、材質、数量、その他の詳細な構成において、当業者が様々な変形を加えることができるものである。また、上記に開示した形状、材質などを限定した記載は、本発明の理解を容易にするために例示的に記載したものであり、本発明を限定するものではないから、それらの形状、材質などの限定の一部もしくは全部の限定を外した部材の名称での記載は、本発明に含まれるものである。   As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. In addition, the description of the shape, material, and the like disclosed above is exemplary for ease of understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of one part or all of such restrictions is included in this invention.
例えば、保持手段3に気体を吹き付けて当該保持手段3を冷却する外部冷却手段10を備えていてもよい。外部冷却手段10は、図1中二点鎖線で示すように、送風機や加圧ポンプ等の気体供給手段101と、前後方向に進退可能に設けられ、気体供給手段101に連通するノズル102とを備え、保持工程前および/または剥離工程前に保持手段3に向けて気体を吹き付ける。
さらに、保持面温度検知手段は、保持工程前に温度計8の駆動を開始してもよい。また、検知した結果に基づいて外部冷却手段10の駆動を制御してもよい。
また、保持面温度検知手段は、剥離板41内に設けてもよいし、保持手段3の移動経路上に設けてもよい。
さらに、加熱手段は、テーブル91内に設けてもよいし、保持手段3の移動経路上に設けてもよい。
For example, you may provide the external cooling means 10 which sprays gas on the holding means 3 and cools the said holding means 3. As shown by a two-dot chain line in FIG. 1, the external cooling means 10 includes a gas supply means 101 such as a blower or a pressure pump, and a nozzle 102 that is provided so as to be movable forward and backward and communicates with the gas supply means 101. And gas is blown toward the holding means 3 before the holding step and / or before the peeling step.
Further, the holding surface temperature detecting means may start driving the thermometer 8 before the holding process. Moreover, you may control the drive of the external cooling means 10 based on the detected result.
Further, the holding surface temperature detecting means may be provided in the peeling plate 41 or may be provided on the moving path of the holding means 3.
Furthermore, the heating means may be provided in the table 91 or may be provided on the moving path of the holding means 3.
また、保持手段3は、静電チャックにかえて、減圧ポンプや真空エジェクタ等の減圧手段を採用してもよい。
さらに、移動手段5は、接着シートASを剥離シートRLから剥離する動作に合わせて剥離手段4を右方向に移動させてもよいし、保持手段3と剥離手段4との両方を移動させてもよい。
The holding means 3 may employ a pressure reducing means such as a pressure reducing pump or a vacuum ejector instead of the electrostatic chuck.
Further, the moving means 5 may move the peeling means 4 in the right direction in accordance with the operation of peeling the adhesive sheet AS from the peeling sheet RL, or may move both the holding means 3 and the peeling means 4. Good.
また、接着シートASおよび被着体の材質、種別、形状等は、特に限定されることはない。例えば、接着シートASは、接着剤層だけの単層のもの、基材シートと接着剤層との間に中間層を有するもの、基材シートの上面にカバー層を有する等3層以上のもの、更には、基材シートを接着剤層から剥離することのできる所謂両面接着シートのようなものであってもよく、両面接着シートは、単層又は複層の中間層を有するものや、中間層のない単層又は複層のものであってよい。また、被着体としては、例えば、食品、樹脂容器、シリコン半導体ウエハや化合物半導体ウエハ等の半導体ウエハ、回路基板、光ディスク等の情報記録基板、ガラス板、鋼板、陶器、木板または樹脂板等、任意の形態の部材や物品なども対象とすることができる。なお、接着シートASを機能的、用途的な読み方に換え、例えば、情報記載用ラベル、装飾用ラベル、保護シート、ダイシングテープ、ダイアタッチフィルム、ダイボンディングテープ、記録層形成樹脂シート等の任意の形状の任意のシート、フィルム、テープ等を前述のような任意の被着体に貼付することができる。   Further, the material, type, shape and the like of the adhesive sheet AS and the adherend are not particularly limited. For example, the adhesive sheet AS is a single layer having only an adhesive layer, having an intermediate layer between the base sheet and the adhesive layer, or having a cover layer on the upper surface of the base sheet, or more. Further, it may be a so-called double-sided adhesive sheet that can peel the substrate sheet from the adhesive layer, and the double-sided adhesive sheet has a single-layer or multi-layer intermediate layer, It may be a single layer or multiple layers without a layer. Examples of the adherend include, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit board, information recording substrates such as optical disks, glass plates, steel plates, ceramics, wood plates or resin plates, Arbitrary forms of members and articles can also be targeted. In addition, the adhesive sheet AS is replaced with a functional and intended reading, for example, any information label, decorative label, protective sheet, dicing tape, die attach film, die bonding tape, recording layer forming resin sheet, etc. Arbitrary sheets, films, tapes and the like can be attached to any adherend as described above.
本発明における手段および工程は、それら手段および工程について説明した動作、機能または工程を果たすことができる限りなんら限定されることはなく、まして、前記実施形態で示した単なる一実施形態の構成物や工程に全く限定されることはない。例えば、剥離手段は、保持面に対向可能に設けられ、繰出手段で繰り出された原反を剥離シート側から支持する支持面を有し、支持面で保持手段を冷却可能なものであれば、出願当初の技術常識に照らし合わせ、その技術範囲内のものであればなんら限定されることはない(他の手段および工程についての説明は省略する)。
また、前記実施形態における駆動機器は、回動モータ、直動モータ、リニアモータ、単軸ロボット、多関節ロボット等の電動機器、エアシリンダ、油圧シリンダ、ロッドレスシリンダおよびロータリシリンダ等のアクチュエータ等を採用することができる上、それらを直接的又は間接的に組み合せたものを採用することもできる(実施形態で例示したものと重複するものもある)。
The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described with respect to those means and steps. The process is not limited at all. For example, the peeling means is provided so as to be able to face the holding surface, and has a support surface that supports the raw material fed by the feeding means from the peeling sheet side, and the holding means can cool the holding means, There is no limitation as long as it is within the technical scope in light of the technical common sense at the beginning of the application (the description of other means and processes is omitted).
The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single axis robot, an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).
1 シート貼付装置
2 繰出手段
3 保持手段
4 剥離手段
5 移動手段
6 ヒータ(加熱手段)
7 直動モータ(押圧手段)
8 温度計(保持面温度検知手段)
10 外部冷却手段
31A 保持面
41A 支持面
AS 接着シート
RL 剥離シート
RS 原反
DESCRIPTION OF SYMBOLS 1 Sheet sticking apparatus 2 Feeding means 3 Holding means 4 Peeling means 5 Moving means 6 Heater (heating means)
7 Linear motor (pressing means)
8 Thermometer (holding surface temperature detection means)
10 External cooling means 31A Holding surface 41A Support surface AS Adhesive sheet RL Release sheet RS Original fabric

Claims (4)

  1. 剥離シートに接着シートが仮着された原反を繰り出す繰出手段と、
    前記接着シートを保持面で保持する保持手段と、
    前記保持手段で保持された接着シートを前記剥離シートから剥離する剥離手段と、
    前記剥離手段と前記保持手段とを相対移動させる移動手段と、
    被着体を加熱する加熱手段と、
    前記保持手段で保持した接着シートを前記被着体に押圧して貼付する押圧手段とを備え、
    前記剥離手段は、前記保持面に対向可能に設けられ、前記繰出手段で繰り出された原反を前記剥離シート側から支持する支持面を有し、当該支持面で前記保持手段を冷却可能に設けられていることを特徴とするシート貼付装置。
    A feeding means for feeding out the original fabric in which the adhesive sheet is temporarily attached to the release sheet;
    Holding means for holding the adhesive sheet on a holding surface;
    A peeling means for peeling the adhesive sheet held by the holding means from the release sheet;
    Moving means for relatively moving the peeling means and the holding means;
    Heating means for heating the adherend;
    A pressing unit that presses and adheres the adhesive sheet held by the holding unit to the adherend,
    The peeling means is provided so as to be able to face the holding surface, and has a support surface for supporting the raw material fed by the feeding means from the peeling sheet side, and the holding means is provided so as to be cooled by the support surface. The sheet sticking apparatus characterized by the above-mentioned.
  2. 前記保持面の温度を検知する保持面温度検知手段を備えていることを特徴とする請求項1に記載のシート貼付装置。   The sheet sticking device according to claim 1, further comprising holding surface temperature detecting means for detecting a temperature of the holding surface.
  3. 前記保持手段に気体を吹き付けて当該保持手段を冷却する外部冷却手段を備えていることを特徴とする請求項1または請求項2に記載のシート貼付装置。   The sheet sticking apparatus according to claim 1, further comprising an external cooling unit that blows gas to the holding unit to cool the holding unit.
  4. 剥離シートに接着シートが仮着された原反を繰り出す工程と、
    前記接着シートを保持手段の保持面で保持する工程と、
    前記保持面に対向可能に設けられ、繰り出された原反を前記剥離シート側から支持する支持面を有する剥離手段において当該支持面で前記保持手段を冷却する工程と、
    前記剥離手段と前記保持手段とを相対移動させ、前記保持手段で保持された前記接着シートを前記剥離手段で前記剥離シートから剥離する工程と、
    加熱された被着体に前記保持手段で保持した接着シートを押圧して貼付する工程とを実施することを特徴とするシート貼付方法。
    A step of feeding out a raw material in which an adhesive sheet is temporarily attached to a release sheet;
    Holding the adhesive sheet on a holding surface of a holding means;
    A step of cooling the holding means at the support surface in the peeling means provided to be opposed to the holding surface and having a support surface for supporting the unrolled original fabric from the release sheet side;
    Relatively moving the peeling means and the holding means, and peeling the adhesive sheet held by the holding means from the release sheet by the peeling means;
    And a step of pressing and adhering the adhesive sheet held by the holding means to the heated adherend.
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JPH06199329A (en) * 1992-12-28 1994-07-19 Sato:Kk Method and device for pasting heat seal label
JPH09124020A (en) * 1995-11-01 1997-05-13 Sony Chem Corp Apparatus and method for sticking sheetlike adhesive
JP2000142651A (en) * 1998-10-30 2000-05-23 Sony Chem Corp Mount head device, and mounting method
JP2004186482A (en) * 2002-12-04 2004-07-02 Nitto Denko Corp Method and apparatus for pasting heat adhesive film

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Publication number Priority date Publication date Assignee Title
JPH06199329A (en) * 1992-12-28 1994-07-19 Sato:Kk Method and device for pasting heat seal label
JPH09124020A (en) * 1995-11-01 1997-05-13 Sony Chem Corp Apparatus and method for sticking sheetlike adhesive
JP2000142651A (en) * 1998-10-30 2000-05-23 Sony Chem Corp Mount head device, and mounting method
JP2004186482A (en) * 2002-12-04 2004-07-02 Nitto Denko Corp Method and apparatus for pasting heat adhesive film

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102019202547A1 (en) * 2019-02-26 2020-08-27 Krones Ag Method for labeling containers and labeling machine

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