CN102216815B - Color filter production line, line control system, and line control method - Google Patents

Color filter production line, line control system, and line control method Download PDF

Info

Publication number
CN102216815B
CN102216815B CN201080003197.4A CN201080003197A CN102216815B CN 102216815 B CN102216815 B CN 102216815B CN 201080003197 A CN201080003197 A CN 201080003197A CN 102216815 B CN102216815 B CN 102216815B
Authority
CN
China
Prior art keywords
substrate
colored pattern
production line
treating apparatus
color
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201080003197.4A
Other languages
Chinese (zh)
Other versions
CN102216815A (en
Inventor
小河洋平
三山晃
畠康高
桑村健介
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toppan Inc
Original Assignee
Toppan Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Printing Co Ltd filed Critical Toppan Printing Co Ltd
Publication of CN102216815A publication Critical patent/CN102216815A/en
Application granted granted Critical
Publication of CN102216815B publication Critical patent/CN102216815B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/001—Axicons, waxicons, reflaxicons

Abstract

Provided is a color filter production line which can reduce a required accommodation space and the number of required devices. A color pattern formation line (121) which constitutes the color filter production line comprises a plurality of processing devices (washing device (110a) to baking device (114b)), which are arranged side by side in each step of photolithography, and a plurality of conveyance devices (101a to 108b) which connect each processing device. In each processing device, pattern formations of two predetermined colors can be changed. In the color pattern formation line (121), a substrate is repeatedly circulated by controlling the destinations determined by the respective conveyance devices until the color patterns of all four colors are formed on a substrate loaded from a loading device (LD) and the substrate on which the color patterns of all four colors have been formed is discharged to an unloading device (ULD). Each processing device is commonly used for the formation of two color patterns, and thus, the number of necessary devices and the accommodation space can be reduced.

Description

Colorized optical filtering slice assembly line, production line control system, production line control method
Technical field
The present invention relates to for the manufacture of the colorized optical filtering slice assembly line of the colored filter using in liquid crystal indicator etc., for controlling production line control system and the production line control method of this production line.
Background technology
As the manufacture method of the colored filter using in liquid crystal indicator, general using photoetching process forms the method for the colored pattern of multiple color on glass substrate.For example, in manufacture, be provided with black matrix" (black) and red, green, blue during the colored filter of the colored pattern of totally 4 kinds of colors, black, red, green, blue shades of colour are repeated to a series of colored pattern formation processing, its cleaning that comprises substrate, exposure, video picture, each manufacturing process of rear baking to colored coating material, use light shield on substrate.And, when manufacture is provided with the colored filter of black matrix" (black) and red, green, blue, the yellow colored pattern of totally 5 kinds of colors, black, red, green, blue, yellow shades of colour are repeated to above-mentioned colored pattern formation processing.
Figure 10 is for representing the schematic diagram of existing colorized optical filtering slice assembly line, and Figure 11 is for representing the calcspar of a part for the colorized optical filtering slice assembly line shown in Figure 10.
In order to carry out above-mentioned versicolor colored pattern formation processing, at the existing colorized optical filtering slice assembly line shown in Figure 10, be in series provided for forming 4 process for producing line 92a～92d of the colored pattern of black, these 4 kinds of colors of red, green, blue.
Process for producing line 92a is for example the pattern for generation of black matrix", possesses moving into device LD, cleaning device 93, applying device 94, exposure device 95, display 96, apparatus for baking 97 and substrate being taken out of to the conveyance device ULD of memory storage 91 of the substrate that provided by memory storage 91 is provided.Handling device 81～86 by carrying substrate between these each devices connects.And, in the downstream of applying device 94, arrange and check thickness or apply testing fixture 98 on uneven line, and in the downstream of display 96, testing fixture 99 on the line that checks formed pattern is set.And, on Handling device 6, be connected with for carrying out the extraction of substrate the extraction testing fixture 70 checking and the repair apparatus 71 of repairing substrate.
In the inside of memory storage 91, substrate is stored to be accommodated in the state of material casket (cassette).Move into device LD and take out substrate from the material casket of receiving from memory storage 91, and offer Handling device 81.The substrate providing after cleaning device 93 carryings, cleaning, to applying device 94 carryings, is included the photoresist of the coloured material of black by Handling device 82 by Handling device 81 by applying device 94 coatings.The substrate of coated photoresist, after being checked, is transported to exposure device 95 by Handling device 83 by testing fixture 98, by exposure device 95, uses light shield to carry out exposure-processed.Substrate after exposure is carried and carries out after video picture to display 96 by Handling device 84, in the handling process of being undertaken by Handling device 85, by testing fixture 99, is checked.To checking N/R substrate, by apparatus for baking 97, carry out rear baking processing, by Handling device 86, to conveyance device ULD, carried.Conveyance device ULD in material casket, and takes out of memory storage 91 by this material casket by received substrate reception.
Although each device cycle of observing under to a certain degree moves, and due to the fault of installing or the increase in caused processing time of abnormality processing etc., the phenomenon that substrate is detained occurs in production line sometimes.Therefore, the Handling device in the position of predicted delay is in advance provided for the snubber assembly (not shown) that substrate is detained in temporary transient storage.Snubber assembly generally has multistage scaffolding structure, and possesses the with good grounds control of being undertaken by control device, stores a plurality of substrates, and to carrying the function of discharging stored substrate on path.By snubber assembly is suitably disposed in production line, the delay of available buffer substrate, and improve the operational efficiency of each treating apparatus.
And other process for producing line 92b～92d is also consisted of the same treating apparatus, Handling device and the testing fixture that comprise with process for producing line 92a.
Utilize process for producing line 92a to produce the substrate of black matrix pattern, be incorporated under the state of material casket, be provided to the process for producing line 92b in downstream, utilized process for producing line 92b to form red colored pattern.After, equally via the processing of process for producing line 92c and 92d, on substrate, form the colored pattern of 4 kinds of colors.
[patent documentation 1] TOHKEMY 2004-109968 communique
[patent documentation 2] TOHKEMY 2008-108878 communique
[patent documentation 3] TOHKEMY 2004-103947 communique
Summary of the invention
At above-mentioned existing colorized optical filtering slice assembly line, due to the process for producing line of the number of colors of the formed colored pattern of needs, therefore having the required space of arranging of production line becomes large problem.In recent years, due to the size maximization of glass substrate, therefore the required space that arranges of above-mentioned manufacture line also increases along with the maximization of substrate size, thereby causes the required cost of manufacturing equipment to increase.
And, at this colorized optical filtering slice assembly line, form each treating apparatus (each device of cleaning, coating, exposure, video picture and baking) and the testing fixture of process for producing line and connect the Handling device of these devices need to be with the chromatic number of colored pattern corresponding number of units.Therefore, required device number of units change is many has also caused the required cost of manufacturing equipment to increase simultaneously.
Except this problem, when snubber assembly is set, also there is following problem.
Have in the colorized optical filtering of snubber assembly slice assembly line possessing, likely produce longer-term storage and can not take in any more and be trapped in the substrate on carrying path at the substrate of snubber assembly or snubber assembly.But, from the formation of colored pattern, start till the elongated meeting of processing time finishing impairs quality.
Replacing that shades of colour is arranged to colored pattern formation production line, and in a production line, when forming two kinds of more than color colored patterns, share treating apparatus and the Handling device of the processing of carrying out each manufacturing process, and the manufacturing line of the mode that has Duo Tiao branch and conflux on carrying path (for example, with reference to patent documentation 3) in, have the very difficult problem of buffering (buffering) itself.; when the different a plurality of substrates of machining state share 1 treating apparatus and 1 Handling device; because the substrate delay that the fault occurring in the colored pattern formation processing in certain color causes also can be influential to the colored pattern formation processing of other color, be therefore difficult to merely only depend on snubber assembly to carry out the delay of absorptive substrate.
The object of the invention is to: a kind of colorized optical filtering slice assembly line that space and required device number of units are set that reduces is provided.
And, other object of the present invention is: a kind of production line control system and production line control method are provided, the colorized optical filtering slice assembly line of the mode of shared processor and Handling device during its colored pattern at formation multiple color, even if form at the colored pattern of certain color the situation that the device of use breaks down, also can make the colored pattern formation processing of other color be continued.
And, other object of the present invention is: a kind of colorized optical filtering slice assembly line is provided, it is when forming colored pattern of multiple color in shared processor and Handling device, even if form at the colored pattern of certain color the situation that the device of use breaks down, also can make the colored pattern formation processing of other color be continued.
The colorized optical filtering slice assembly line that the present invention relates to sequentially form the colored pattern of at least 4 kinds of colors on substrate, it possesses: the memory storage of memory substrate; Colored pattern forms production line, comprise: many treating apparatus, in order to carry out the processing of photolithographic each manufacturing process, arrange side by side, and many Handling devices, connect between treating apparatus, according to formed colored pattern on substrate, to set treating apparatus carrying substrate, and in photolithographic each manufacturing process, when forming the colored pattern of two kinds of colors at least one of shared processor; Move into device, the substrate being provided is moved into colored pattern form production line by memory storage; And conveyance device, by form the substrate that production line discharges from colored pattern, towards memory storage, take out of.Colored pattern forms production line and makes substrate repetitive cycling till form required colored pattern on substrate, and the substrate that forms required colored pattern is discharged to conveyance device.
Production line control system of the present invention is used for controlling colorized optical filtering slice assembly line, the snubber assembly that it comprises many treating apparatus, connects many Handling devices for the treatment of apparatus and temporarily store a plurality of substrates, and when forming the colored pattern of multiple color shared processor and Handling device, this production line control system possesses: monitor message is obtained means, obtain monitor message, this monitor message display processing unit, Handling device and snubber assembly operation conditions separately; Action control means, control the action for the treatment of apparatus, Handling device and snubber assembly; And supervision means, according to obtain the obtained monitor message of means from monitor message, monitor the operation conditions of monitored object device, and action control means are indicated: stop stopping from being positioned at least one table apparatus discharge substrate and the releasing of the upstream side of monitored object device.
Production line control method of the present invention is controlled colorized optical filtering slice assembly line, this colorized optical filtering slice assembly line comprises: many treating apparatus, many Handling devices that connect this treating apparatus and the snubber assemblys of temporarily storing a plurality of substrates, and when forming the colored pattern of multiple color, share this treating apparatus and this Handling device.This production line control method obtains treating apparatus, Handling device and snubber assembly operation conditions separately, monitor the operation conditions of each obtained device, restriction providing the substrate of monitored object device is provided, and according to result of determination, make at least one table apparatus of the upstream side of this monitored object device stop discharging substrate and releasing stops.
Colorized optical filtering slice assembly line of the present invention for forming the colored pattern of multiple color on substrate, and this colorized optical filtering slice assembly line possesses: treating apparatus, carries out the processing of photolithographic each manufacturing process, and is common to the colored pattern that forms multiple color; Many Handling devices, connect treating apparatus, and are common to the colored pattern that forms multiple color; Snubber assembly, temporarily stores a plurality of substrates; And control device, control each treating apparatus, Handling device and snubber assembly.Each treating apparatus, Handling device and snubber assembly comprise: monitor message obtaining section, obtains the monitor message that represents operation conditions; And operation control part, according to the indication that carrys out self-control device, control action.Control device, according to the monitor message sending from monitor message obtaining section, monitors the operation conditions of monitored object device, and indicates the discharge and the releasing that stop substrate to stop to the operation control part of at least one table apparatus of monitored object upstream side.
At colorized optical filtering slice assembly line of the present invention, due in each manufacturing process, in the processing that forms the colored pattern of two kinds of colors, share a treating apparatus, therefore with the situation of shades of colour set handling production line is compared, can greatly reduce the required space of arranging of colorized optical filtering slice assembly line.And, owing to can reducing required device number of units, therefore can reduce and form the required cost of colorized optical filtering slice assembly line.
Use the present invention, can realize a kind of production line control system and production line control method, the colorized optical filtering slice assembly line of the mode of shared processor and Handling device during its colored pattern at formation multiple color, discharge by control from the substrate of the device of monitored object upstream side, even if break down in the situation that the colored pattern of certain color forms the device of use, also can make the colored pattern formation processing of other color be continued.
And, can realize a kind of colorized optical filtering slice assembly line, it is when forming colored pattern of multiple color in shared processor and Handling device, even if break down in the situation that the colored pattern of certain color forms the device of use, also can make the colored pattern formation processing of other color be continued.
The simple declaration of accompanying drawing
Fig. 1 is the schematic diagram of a part for the colorized optical filtering slice assembly line of expression the first embodiment of the present invention.
Fig. 2 is the schematic diagram of the snubber assembly shown in Fig. 1.
Fig. 3 is the process flow diagram that the control of the snubber assembly shown in presentation graphs 2 is processed.
Fig. 4 is the schematic diagram of a part for the colorized optical filtering slice assembly line of expression the second embodiment of the present invention.
Fig. 5 is the calcspar of a part for the colorized optical filtering slice assembly line of expression the 3rd embodiment of the present invention.
Fig. 6 is the calcspar of the structure of the production line control system of expression the 3rd embodiment of the present invention.
Fig. 7 is the functional block diagram of the details of the production line control system shown in presentation graphs 6.
Fig. 8 is the schematic diagram of a part for the production line shown in presentation graphs 5.
Fig. 9 is the process flow diagram that the control carried out of the monitoring unit shown in presentation graphs 6 is processed.
Figure 10 is for representing the schematic diagram of existing colorized optical filtering slice assembly line.
Figure 11 is for representing the calcspar of a part for the colorized optical filtering slice assembly line shown in Figure 10.
(explanation of symbol)
101～108-Handling device; 109-memory storage; 110-cleaning device; 111-applying device; 112-exposure device; 113-display; 114-apparatus for baking; 121-colored pattern forms production line; 122-snubber assembly; LD-moves into device; ULD-conveyance device; 201-colorized optical filtering slice assembly line; 204-cleaning device; 205-applying device; 206-exposure device; 207-display; 208-apparatus for baking; 211～216-Handling device; 221～224-snubber assembly; 230-production line control system; 231-control device.
Embodiment
(the first embodiment)
Fig. 1 is the schematic diagram of a part for the colorized optical filtering slice assembly line of expression the first embodiment of the present invention.Fig. 1 only represents in colored filter manufacture process for utilizing photoetching process to form the processing line of the colored pattern of 4 kinds of colors.And, the flechette-type symbol in Fig. 1 represent each device between annexation and the carrying direction of substrate.
The colorized optical filtering slice assembly line of present embodiment possesses: memory storage 109, move into device LD, conveyance device ULD, the colored pattern that carries out concurrently two kinds of colored pattern formation processings more than color forms production line 121 and snubber assembly 122a and 122b.
Memory storage 109 is that a plurality of material caskets of glass substrate and the device of a plurality of empty material caskets are taken in storage, for example, be equivalent to automated warehouse.Memory storage 109 possesses to be useful on transfers the transfer device of expecting casket, the material casket of having taken in glass substrate is offered and moves into device LD, and reclaim empty material casket from moving into device LD.Memory storage 109 expects that by sky casket offers conveyance device ULD, and from conveyance device ULD, has taken in the material casket of glass substrate.
Move into device LD and take out untreated substrate from the material casket being provided by memory storage 109, taken out substrate is offered to Handling device 101a or the 101b that colored pattern forms production line 121.
Conveyance device ULD, by forming substrate reception that production line 121 discharges from colored pattern in material casket, takes out of memory storage 109 by the material casket of having taken in substrate.
Colored pattern forms production line 121 to be possessed: at each of photolithographic each manufacturing process, process many treating apparatus and many Handling device 101a～108b that arrange side by side.In present embodiment, in order to carry out the processing of photolithographic main production process (cleaning, coating, exposure, video picture and baking), two treating apparatus are respectively set in each manufacturing process, i.e. cleaning device 110a and 110b, applying device 111a and 111b, exposure device 112a and 112b, display 113a and 113b and apparatus for baking 114a and 114b.
Each treating apparatus is the device that can suitably switch and carry out two kinds of colored pattern formation processings more than color.For example, each applying device 111a and 111b at least possess two applying mechanisms to the agent of substrate surface coating photoresistance, can be formed at the color of colored pattern substantially, switches the applying mechanism using, and separately applies the photoresist that color is different.And exposure device 112a and 112b possess and have switching mechanism, the color of the colored pattern that it should form, and the configuration of switching light shield itself or light shield.
Handling device 101～108b connects between each treating apparatus, and will utilize each treating apparatus and the substrate that applies processing to ensuing treating apparatus or testing fixture, conveyance device ULD carrying.The carrying destination of substrate is by each Handling device, according to the colored pattern on substrate, to differentiate the processing that next should carry out to determine.In Fig. 1, for example, although (show distinctively the Handling device that arranges corresponding to each treating apparatus, Handling device 101a, 101b) and to the shared Handling device of the treating apparatus of same manufacturing process (for example, Handling device 103), but the mode to Handling device 101～108b is not particularly limited, can arbitrary decision whether by commonization of Handling device.
In addition, in the present invention, although the formation order to versicolor colored pattern is not particularly limited, but for the purpose of simplifying the description, in following illustrated example, the formation of its colored pattern is sequentially according to black, red, green and blue order, use again cleaning device 110a, applying device 111a, exposure device 112a, display 113a and apparatus for baking 114a (device of the additional oblique line towards bottom right) carry out the colored pattern formation processing of black and red these two kinds of colors, use cleaning device 110b, applying device 111b, exposure device 112b, display 113b and apparatus for baking 114b (device of the additional oblique line towards upper right) carry out green and blue colored pattern formation processing.
Snubber assembly 122a and 122b are connected with Handling device 108a, are the devices that is temporarily stored in the substrate of bringing on the carrying path of Handling device 108a.Snubber assembly 122a and 122b are used in to be adjusted at buffering that colored pattern forms the order of the interior mobile substrate of production line 121 or number etc., arrange and process, and its details is by aftermentioned.
Except each above-mentioned device, on the carrying path between applying device 111a and 111b and exposure device 112a and 112b, also arrange to check film or apply testing fixture 115a and 115b on uneven line.And, on the carrying path between apparatus for baking 114a and 114b and conveyance device ULD, testing fixture 116 on the line that checks formed colored pattern is set.
And, at Handling device 103, connecting and extract testing fixture 117, a part of substrate of its extraction the coated photoresist of inspection, sends the substrate after checking back to Handling device 103.Similarly, at Handling device 106, connect and extract testing fixture 118, its extraction also checks a part of substrate after video picture is processed, send the substrate after checking back to Handling device 106, and at Handling device 108b, connect and extract testing fixture 119 and 120, its extraction inspection have formed a part of substrate of the colored pattern of whole colors, send the substrate after checking back to Handling device 108b.In addition the configurable optional position on production line of these testing fixtures, also configurable position beyond shown in Fig. 1.
At this, illustrate by colored pattern form the colored pattern formation processing that production line 121 carries out and use snubber assembly 122a and 122b buffering, arrange processing.
It is that substrate in processing is recycled to by till moving into and forming the colored pattern of whole 4 kinds of colors on the input substrate of device LD that colored pattern forms production line 121, and the substrate that forms the colored pattern of whole 4 kinds of colors is discharged to conveyance device ULD.
In the present embodiment, by Handling device 107, Handling device 108a and 108b, control whether to treating apparatus, provide the substrate of having been processed by apparatus for baking 114a and 114b again.More particularly, Handling device 107 by the board carrying that has toasted by apparatus for baking 114a and 114b the colored pattern that has formed two kinds of colors or 3 kinds of colors in the substrate of processing to Handling device 108a, via testing fixture 116 by the board carrying of colored pattern that forms a kind of color or whole 4 kinds of colors to Handling device 108b.Handling device 108a by the board carrying of bringing from Handling device 107 to Handling device 101b.On the other hand, Handling device 108b by the board carrying of colored pattern that forms a kind of color to Handling device 101a, by the board carrying of colored pattern that forms whole 4 kinds of colors to conveyance device ULD.And, Handling device 108a and 108b also by the board carrying that is judged as defective products at arbitrary testing fixture to conveyance device ULD.
Till by moving into the input substrate of device LD, to form the concrete carrying path of colored pattern of the 1st kind of color～4th kind of color as follows.
(the colored pattern formation processing of the first color (black))
As follows to the carrying path of the input substrate of Handling device 101a by moving into device LD.
Carrying path 1
Move into device LD-Handling device 101a-cleaning device 110a-Handling device 102a-applying device 111a-Handling device 103-, (extracting testing fixture 117-Handling device 103)-testing fixture 115a-Handling device 104-exposure device 112a-Handling device 105-display 113a-Handling device 106-, (extracting testing fixture 118-Handling device 106)-apparatus for baking 114a-Handling device 107-testing fixture 116-Handling device 108b-, (extract testing fixture 119 or extract testing fixture 120-Handling device 108b)-Handling device 101a
Process at this carrying path 1 carrying substrate, applies processing by each treating apparatus to substrate, and on the surface of substrate, forms the colored pattern (black matrix") of the first color.Via Handling device 107 and Handling device 108b and the substrate that normally forms the colored pattern of the first color is transported to Handling device 101 again.
(the colored pattern formation processing of the second color (red))
As follows to the carrying path of the input substrate of Handling device 101a by Handling device 108b.
Carrying path 2
Handling device 101a-cleaning device 110a-Handling device 102a-applying device 111a-Handling device 103-(extracting testing fixture 117-Handling device 103)-testing fixture 115a-Handling device 104-exposure device 112a-Handling device 105-display 113a-Handling device 106-(extracting testing fixture 118-Handling device 106)-apparatus for baking 114a-Handling device 107-testing fixture 116-Handling device 108a-Handling device 101b.
Substrate, in the process in carrying above-mentioned carrying path 2, is implemented the processing that utilizes the device in each processing procedure to carry out to substrate, form the colored pattern of the second color (red) with the surface at substrate.Normally be formed with the substrate of colored pattern of the second color via Handling device 107, Handling device 108a, and be moved to Handling device 101b.
(the colored pattern formation processing of the third color (green))
As follows to the carrying path of the input substrate of Handling device 101b by Handling device 108a.
Carrying path 3
Handling device 101b-cleaning device 110b-Handling device 102b-applying device 111b-Handling device 103-(extracting testing fixture 117-Handling device 103)-testing fixture 115b-Handling device 104-exposure device 112b-Handling device 105-display 113b-Handling device 106-(extracting testing fixture 118-Handling device 106)-apparatus for baking 114b-Handling device 107-Handling device 108a-Handling device 101b.
In the process of these carrying path 3 carrying substrates, by each treating apparatus, substrate is applied to processing, and on the surface of substrate, form the colored pattern of the third color (green).Via Handling device 107, Handling device 108a and the substrate that normally forms the colored pattern of the third color is transported to Handling device 101b again.
(the colored pattern formation processing of the 4th kind of color (indigo plant))
As follows to the carrying path of the input substrate of Handling device 101b by Handling device 108a.
Carrying path 4
Handling device 101b-cleaning device 110b-Handling device 102b-applying device 111b-Handling device 103-, (extracting testing fixture 117-Handling device 103)-testing fixture 115b-Handling device 104-exposure device 112b-Handling device 105-display 113b-Handling device 106-, (extracting testing fixture 118-Handling device 106)-apparatus for baking 114b-Handling device 107-testing fixture 116-Handling device 108b, (extract testing fixture 119 or extract testing fixture 120-Handling device 108b)-conveyance device ULD.
In the process of these carrying path 4 carrying substrates, by each treating apparatus, substrate is applied to processing, and on the surface of substrate, form the colored pattern of the 4th kind of color (indigo plant).Via Handling device 107, testing fixture 116 and Handling device 108b by the board carrying of colored pattern that normally forms the 4th kind of color to conveyance device ULD.
Secondly, " buffering, arrangement are processed " of using snubber assembly 122a and 122b to carry out is described.
As above-mentionedly with carrying path 1～4, make continuously substrate circulation in the situation that, because the substrate under various machining states is present in production line, therefore preferably suitably control the carrying state of substrate.So, at the colorized optical filtering slice assembly line of present embodiment, snubber assembly 122a and the 122b of temporary transient memory substrate is set along the carrying path of Handling device 108a.
Fig. 2 is the snubber assembly 122a shown in Fig. 1 and the schematic diagram of 122b.
Snubber assembly 122a and 122b are set to the carrying path 123 along Handling device 108a, and control each action by not shown control device.In the substrate (dotted line) that a plurality of devices by upstream of snubber assembly 122a storage are brought on carrying path 123, formed the substrate of the colored pattern of the first color and the second color, and, take out substrate the device downstream stored and discharge.Snubber assembly 122b stores the substrate that has formed the colored pattern of the first color～the third color in a plurality of substrates of being brought in carrying path 123 similarly, takes out substrate the device downstream stored and discharges.
Colored pattern forms production line 121 by snubber assembly 122a and 122b memory substrate and discharge substrate from snubber assembly 122a and 122b and (below these are generically and collectively referred to as to " cushioning (buffering) ", and the substrate of the substrate of the processing that needs the third color and the processing of the 4th kind of color of needs is alternately provided to Handling device 101b.And, colored pattern forms production line 121 by cushioning, and the interval that provides to Handling device 101b to the substrate of the processing that interval and the 4th kind of color of needs are provided of Handling device 101b of the substrate of the processing of the third color of needs is controlled separately as more than the set time.In addition, colored pattern forms production line 121 in the situation that not needing buffering, and the substrate of being carried by Handling device 107 is directly passed through towards the device in downstream.
Fig. 3 is the process flow diagram that the control of the snubber assembly 122a shown in presentation graphs 2 is processed.In addition, snubber assembly 122a is the special purpose device of substrate that has formed the colored pattern of the second color or the third color.
Below, for convenience of explanation, the substrate that forms the colored pattern of the first color and the second color is called " two kinds colors form substrate ", and the substrate that forms the colored pattern of the first color～the third color is called to " three kinds of colors form substrate ".
In step S101, determine whether and bring substrate by the device of upstream.In the situation that bring substrate (being Yes at step S101) by the device of upstream, the controls metastasis of snubber assembly 122a is to step 8102, and in addition in the situation that, (at step S101, being No), transfers to step S112.
In step S102, judge whether the substrate of bringing is that three kinds of colors form substrate.In the situation that brought substrate is three kinds of colors, form substrate (being Yes at step S102), controls metastasis is to step S103, and in addition in the situation that, (in step S102, being No), transfers to step S109.
In step S103, whether the substrate (making by the substrate of snubber assembly 122a or the substrate of discharging from snubber assembly 122a) that differentiation was transported to the device in downstream last time is that two kinds of colors form substrates.In the situation that be transported to the substrate of the device in downstream last time, be that two kinds of colors form substrate (being Yes at step S103), controls metastasis is to step S104, and in addition in the situation that, (at step S103, being Yes), transfers to step S106.
Carry out step S104 processing for being transported to the substrate of the device in downstream last time, be that two kinds of colors form substrates, from the device of upstream, bring the situation that three kinds of colors form substrates.In step S104, snubber assembly 122a directly passes through brought substrate, and controls metastasis is to step S105.
In step S105, in the situation that continue to monitor the substrate (being No at step S105) of bringing from the device of upstream, turn back to step S101, in addition in the situation that (being Yes at step S105), finishing control is processed.
Carry out step S106 control for being transported to recently the substrate of the device in downstream, be that three kinds of colors form substrates, from the device of upstream, bring the situation that three kinds of colors form substrates.In step S106, judge that at snubber assembly 122a, whether storing two kinds of colors forms substrate.The situation (being Yes at step S106) that forms substrate in two kinds of colors of snubber assembly 122a storage, controls metastasis is to step S107, and in addition in the situation that, (at step S106, being No), transfers to step S108.
In step S107, snubber assembly 122a forms substrate by two kinds of stored colors and forms the more Zao device discharge downstream of substrate than three kinds of colors bringing from upstream.As a result, two kinds of colors of discharging form that three kinds of colors that substrates are inserted in already carrying form substrates and three kinds of colors bringing from upstream form between substrates, two kinds of colors are formed to substrates and three kinds of colors form the device that substrate alternately offers downstream.Then, controls metastasis is to step S105.
In step S108, snubber assembly 122a directly passes through brought substrate, and transfers to step S105.
Carry out step S109 control for bring the situation that two kinds of colors form substrates from the device of upstream.In step S109, determine whether that discharging two kinds of colors last time forms the set time of having passed through defined after substrate.In the situation that passing through the set time (being Yes at step S109), controls metastasis is to step S110, and in addition in the situation that, (at step S109, being No), transfers to step S111.
In step S110, snubber assembly 122a directly passes through brought substrate, and transfers to step S105.
In step S111, two kinds of colors that snubber assembly 122a storage is brought from upstream form substrate, and transfer to step S105.
The control of step S112 is during the device carrying substrate of upstream, not carry out.In step S112, judge that at snubber assembly 122a, whether storing two kinds of colors forms substrate.In the situation that snubber assembly 122a stores two kinds of colors formation substrates (being Yes at step S112), controls metastasis is to step S113, and in addition in the situation that, (at step S112, being No), turns back to step S101.
In step S113, determine whether that discharging two kinds of colors last time forms the set time of having passed through defined after substrate.In the situation that passing through the stipulated time (being Yes at step S113), controls metastasis is to step S114, and in addition in the situation that, (at step S113, being No), turns back to step S101.
In step S114, snubber assembly 122a device is downstream discharged two kinds of colors of storing and is formed substrate.Then, controls metastasis is to step S105.
In addition, the control flow of the snubber assembly 122b shown in Fig. 2 (three kinds of colors form the snubber assembly that substrate is used) is equivalent to that two kinds of colors in the control flow of Fig. 3 form substrates and three kinds of colors form substrate swappers.At this, description thereof is omitted.
Colored pattern forms production line 121 according to above-mentioned control, to Handling device 101b, alternately provides two kinds of colors to form substrate and three kinds of colors formation substrates, and, more than the input interval of the substrate of one species is made as to the set time.As a result, can not can destroy the flow equilibrium of the various substrates in production line, and the balance of the number of substrate in the different processing of the state in processing of can not destroying, substrate is circulated.And, in treating apparatus, when the colored pattern of same color forms manufacturing process's continuation, have the slack-off device for the treatment of cycle.For example, because applying device 111a and 111b need warming-up exercise to a coating of substrates photoresist at every turn, therefore, the in the situation that of the same color of light resist of Yi Yitai applying device continuously coating, the cycle only increases the required time of preparation work.So, as present embodiment, by two kinds of colors formation substrates and three kinds of colors formation substrates are alternately offered to applying device 111b, can avoid the processing of same color continuous, thereby can prevent the delay of processing.
And, the treating apparatus shared to the processing of the first color and the second color (cleaning device 110a, applying device 111a, exposure device 112a, display 113a and apparatus for baking 114a), move into device LD and provide untreated substrate according to the fixing cycle, the substrate that Handling device 108b makes to form the colored pattern of the first color is inserted between continuous untreatment base.By carrying out this carrying control, the same with the situation of using snubber assembly 122a to process with the arrangement of 122b, due to each treating apparatus is alternately provided the substrate of the processing that needs the first color and needs the substrate of the processing of the second color according to fixed intervals, therefore can prevent that the processing of same color from carrying out the increase of caused treatment cycle continuously.
As described in as shown in explanation, at the colorized optical filtering slice assembly line of present embodiment, with the treating apparatus of two systems of moving side by side, form colored pattern and form production line 121, substrate is circulated in production line, form thus the colored pattern of 4 kinds of colors.According to the structure of this production line and carrying, control, and compare for the situation of shades of colour set handling production line, can greatly reduce the required space of colored filter line configuration.Although in a part of devices such as applying device or exposure device, the light shields that must switch accordingly use material or use etc. are with dual-purpose when forming the colored pattern of two kinds of colors, but owing to can reducing required device number itself, therefore can reduce and form the required expense of colorized optical filtering slice assembly line.
In addition, although in the present embodiment, explanation is in each manufacturing process, the colored pattern that carries out the first color and the second color at a treating apparatus (device of the additional oblique line towards bottom right) forms, and the example that carries out the colored pattern formation of the third color and the 4th kind of color at another treating apparatus (device of the additional oblique line towards upper right), but the appointment to the color of each treating apparatus, is not limited thereto example.For example, the colored pattern that also can carry out at the treating apparatus of the additional oblique line towards bottom right the first color and the third color forms, and at treating apparatus formation the second color of the additional oblique line towards upper right and the colored pattern of the 4th kind of color etc., a treating apparatus in each manufacturing process is specified to any two kinds of colors, and another treating apparatus is specified to two kinds of remaining colors.In the case, also no matter the versicolor appointment to treating apparatus, for the order according to the first color～four kind of color forms colored pattern, each Handling device distributes the carrying destination of substrate, thereby, can there is the effect same with illustrated in the above-described embodiment colorized optical filtering slice assembly line.
(the second embodiment)
Fig. 4 represents the schematic diagram of a part of the colorized optical filtering slice assembly line of the second embodiment of the present invention.
The colorized optical filtering slice assembly line of present embodiment and the difference of the first embodiment are: 3 exposure device 112a～112c of the treating apparatus of the processing as the manufacturing process that exposes are arranged to colored pattern and form production line 121.
In the case, the processing by each indication different colours of 3 exposure device 112a～112c, concurrently the photoresist of 3 kinds of colors exposes, and seeks to improve the manufacture efficiency of colored filter.For example, can be with exposure device 112a to applying the base board to explosure of the photoresist of the first color (black matrix"), with exposure device 112b to applying the base board to explosure of the photoresist of the second color and the third color (red and green), with exposure device 112c to applying the base board to explosure of the photoresist of the 4th kind of color (blueness).Or, also can be using any device as preparation of exposure device 112a～112c kind.The substrate of discharging from testing fixture 115a and 115b to which platform exposure device carrying Handling device 104 is determined corresponding to the colored pattern the substrate of carrying.
Although in the example of Fig. 4, the colored pattern that represents only to arrange 3 exposure devices forms the structure example of production line 121, also can cleaning, coating, video picture and toast in the number of units for the treatment of apparatus of part or all manufacturing process be set to 3.But, due to the number of units increase of each treating apparatus, cause the occupied area of colorized optical filtering slice assembly line and cost to increase, therefore preferably make the treating apparatus of longer manufacturing process of cycle increase, and the treating apparatus of relatively short manufacturing process of cycle is reduced.
In the present embodiment, because colored pattern forms production line 121, make substrate circulation until the colored pattern of whole 4 kinds of colors forms, therefore with the production line in the past of shades of colour set handling device is compared, can reduce the number of units of required treating apparatus.So, the colorized optical filtering slice assembly line of present embodiment is also the same with the first embodiment, with the situation of shades of colour set handling production line is compared, can greatly reduce the required space of configuration of colorized optical filtering slice assembly line, can reduce simultaneously and form the required expense of colorized optical filtering slice assembly line.
In addition,, in above-mentioned each embodiment, colored pattern is defined as according to example black, that the order of red, green, blue forms and is described, but the formation of these colors sequentially can be random order.
And, although in above-mentioned each embodiment, snubber assembly 122a and 122b are arranged to Handling device 108a, also snubber assembly can be arranged to other any Handling device.
In addition,, although in above-mentioned each embodiment, illustrate in photolithographic each manufacturing process and possess and have the colorized optical filtering of two or 3 treating apparatus slice assembly line, the treating apparatus of preparation also can be further set.Replacing original treating apparatus, and making in the situation for the treatment of apparatus operation of preparation, as long as the carrying path of suitably switching each Handling device.
In addition, although in above-mentioned each embodiment, to being manufactured on the example of the colored filter of the colored pattern on substrate with black, red, green and blue these 4 kinds of colors, describe, but the colorized optical filtering slice assembly line of this each embodiment also can be applicable to have the manufacture of the colored filter of 5 kinds of colored patterns more than color on substrate.In the case, also make and can form two kinds of colored patterns more than color by least one treating apparatus in colored pattern forms production line, till be formed at the colored pattern of needed chromatic number on substrate, substrate is circulated in colored pattern forms production line, to conveyance device, discharge the substrate that has formed required colored pattern.
And, in the situation that form the colored pattern of black matrix" (black), red, green, blue and yellow these 5 kinds of colors on substrate, also can only form black matrix" at other device, and at the colorized optical filtering slice assembly line of above-mentioned each embodiment, form the colored pattern of red, green, blue and yellow these 4 kinds of colors.
(the 3rd embodiment)
Fig. 5 represents the schematic diagram of a part of the colorized optical filtering slice assembly line of the 3rd embodiment of the present invention.In Fig. 5, only represent in colored filter manufacturing process for utilizing photoetching process to form the process for producing line of the colored pattern of 4 kinds of colors.And, the arrow of Fig. 5 represent each device between annexation and the carrying direction of substrate.
The colorized optical filtering slice assembly line 201 of present embodiment is to utilize photoetching process on substrate, to form the colored pattern of multiple color, in order to carry out concurrently two kinds of colored patterns more than color, form, two or 3 treating apparatus are set side by side in each manufacturing process.
In more detail, colorized optical filtering slice assembly line 201 possesses memory storage 202, moves into device 203a and 203b, cleaning device 204a and 204b, applying device 205a and 205b, exposure device 206a～206c, display 207a～207c, apparatus for baking 208a～208c, conveyance device 209a～209c, the Handling device 211～216 that connects each device and snubber assembly 221～224.And, at the back segment of applying device 205a and 205c and the back segment of display 207a～207c, testing fixture 217 and 218 on line is set.And, at Handling device 206, connect testing fixture 218 and repair apparatus 220.
Memory storage 202 is that a plurality of material caskets of glass substrate and the device of a plurality of empty material caskets have been taken in storage, for example, be equivalent to automated warehouse.Memory storage 202 possesses to be useful on transfers the transfer device of expecting casket, the material casket of having taken in glass substrate is provided to and moves into device 203a and 203b, and reclaim empty material casket from moving into device 203a and 203b.And memory storage 202 expects that by sky casket is provided to conveyance device 209a～209c, has taken in the material casket of glass substrate from conveyance device 209a～209c.
Move into device 203a and 203b and take out untreated substrate from the material casket being provided by memory storage 202, taken out substrate is provided to Handling device 211.
Cleaning device 204a and 204b, applying device 205a and 205b, exposure device 206a～206c, display 207a～207c, apparatus for baking 208a～208c and conveyance device 209a～209c are the devices (each device is not distinguished, be referred to as " treating apparatus ") of processing that carries out each manufacturing process of photolithographic cleaning, coating, exposure, video picture and rear baking.Each treating apparatus is the device that can suitably switch and carry out two kinds of colored pattern formation processings more than color.For example, each applying device 205a and 205b at least possess to have two applying mechanisms to the agent of substrate surface coating photoresistance, can, corresponding to the color that is formed on the colored pattern on substrate, switch the applying mechanism using, and separately apply the photoresist that color is different.And exposure device 206a～206c possesses and has switching mechanism, it is corresponding to the color of the colored pattern forming, the configuration of switching light shield itself or light shield.
To each treating apparatus, can specify the colored pattern formation processing of random color.As an example, also can, at cleaning device 204a and applying device 205a, carry out black (black matrix") and red colored pattern formation processing, and at cleaning device 204b and applying device 205b, carry out green and blue colored pattern formation processing.And, Yi Ge manufacturing process (for example arranges 3 treating apparatus, exposure device 206a～206c) in situation, also can be using 1 as preparation, also can make exposure device 206a carry out black colored pattern formation processing, with exposure device 206b, carry out red and green colored pattern formation processing, with exposure device 206c, carry out blue colored pattern formation processing etc., and the processing of 4 kinds of colors is suitably distributed to 3 treating apparatus.
Handling device 211～216 connects between each treating apparatus, and utilizes each treating apparatus by each treating apparatus, to be applied the substrate of processing to ensuing treating apparatus or testing fixture, conveyance device 209a～209c carrying.The carrying destination of substrate is by each Handling device, according to the colored pattern on substrate, to differentiate the processing that next should carry out to determine.Handling device 216 is transported to conveyance device 209a～209c by the substrate and the defective products that have formed the colored pattern of whole 4 kinds of colors in the substrate of being discharged by apparatus for baking 208a～208c, and to Handling device 201 other substrates of carrying.By carrying out this carrying control, till on substrate, formed the colored pattern of whole 4 kinds of colors, Yi Bian substrate is circulated in production line, Yi Bian carry out in order versicolor colored pattern formation.
Conveyance device 209a～209c in material casket, takes out of memory storage 202 by the material casket of having taken in substrate by the substrate reception of being discharged by Handling device 216.
Snubber assembly 221,222,223 and 224 is connected with Handling device 212,213,215 and 216 respectively, is the device that is temporarily stored in the substrate of bringing on carrying path.Snubber assembly 221～224th, in order to absorb deviation or the delay of mobile substrate in production line of the treatment cycle of each treating apparatus, the operational efficiency that improves whole production line arranges.
Fig. 6 represents the calcspar of structure of the production line control system of the 3rd embodiment of the present invention.
Production line control system 230 by control device 231 and via networking connect into can and many production lines of control device 231 two-way communications in install 232a～232n and formed.Device 232a～232n is the device of each device of not distinguishing the colorized optical filtering slice assembly line 201 being equivalent to shown in pie graph 5 (treating apparatus, Handling device, move into device, conveyance device, snubber assembly, testing fixture and repair apparatus) in production line, is used as the client terminal machine (client terminal) that production line control system 230 comprises.In addition, in Fig. 6, for the ease of diagram, only represent the part of device for the colorized optical filtering slice assembly line 201 of pie graph 5, and the record of omitting remaining device.
The functional block diagram of the details of the production line control system shown in Fig. 7 presentation graphs 6.In Fig. 7, for the purpose of simplifying the description, only represent device 232a in 1 production line.
In production line, device 232a comprises monitor message obtaining section 233, operation control part 234, is equivalent to operating member 235 and the network interface (hereinafter referred to as " networking I/F ") 236 partly of the mechanism in device 232a in production line.
Monitor message obtaining section 233 obtains the monitor message Imon that represents the operation conditions of device 232a in production line, via networking I/F236, to control device 231, sends obtained monitor message Imon.Monitor message Imon comprises and is illustrated in having or not or the more than a kind information of the running status of device 232a itself in hold-up time, production line of the substrate in device 232a in production line.The kind of the information that monitor message Imon is contained is different because installing the kind (treating apparatus, Handling device, snubber assembly etc.) of 232a in production line.In addition, in detail, the details of monitor message Imon will be described.
Operation control part 234 is control action portion 235 according to carrying out the indication of self-control device 231, thus the action of device 232a itself in production control line.More particularly, the substrate that operation control part 234 accepts to be issued by control device 231 stops discharging indication Csus and releasing stops indicating Cres, to operating member 235, give the control indication Cxtrl corresponding to received indication, control from the discharge of installing the substrate of 232a in production line.
And, the in the situation that of installing 232a be snubber assembly in production line, accept the buffering indication Cbuf that issued by control device 231, start the storage action (action of giving) of indicated substrate.
In addition, in other production line, device 232b～232n is the same with the structure of device 232a in production line.
On the other hand, control device 231 comprises storage part 237, configuration part 238, monitoring unit 239 and networking I/F240.
Storage part 237 is realized by mediums such as hard disc or non-volatility memorizers, and the discharge condition that stops of the defined substrate of each kind of storage information that monitor message Imon is comprised and remove the device information of (below device in the production line of monitored object being called to " monitored object device ") and the information of the device (hereinafter referred to as " control object device ") that the specific device that is arranged in the upstream side of monitored object device should be controlled the discharge of substrate in stop condition, specific at least one the production line that becomes monitored object.Stopping discharge condition means in the time of will making to stop discharging from the substrate of control object device that is positioned at the upstream of monitored object device, monitored object device should be satisfied the information of operation conditions, remove the information that stop condition means the operation conditions that when the control object device that will make to stop discharging in substrate starts to discharge substrate again, monitored object device should be satisfied.
Each information that store for setting storage part 237 configuration part 238.Configuration part 238 is stored in the set information Iset inputting from user interfaces such as keyboard or mouses storage part 237.
Monitoring unit 239, according to the monitor message Imon being notified by the monitor message obtaining section 233 of installing 232a～232n in production line, monitors the operation conditions of monitored object device.More particularly, monitoring unit 239 obtains the set information Iset that storage part 238 is stored, and particular monitored object apparatus and control object device are obtained the discharge condition that stops that this monitored object device is set simultaneously and remove stop condition.Defined discharge condition and the releasing stop condition of stopping of set information Iset that each monitored item object information that the more notified monitor message Imon of monitoring unit 239 comprises and storage part 237 are stored.At monitor message Imon, meet stop discharging condition in the situation that, monitoring unit 239 via networking I/F240 and 236 and the operation control part 234 of control object device is sent to substrates stop discharging indication Csus.On the other hand, in the situation that monitor message Imon meet to remove stop condition, monitoring unit 239 is via networking I/F240 and 236 and releasing that the operation control part 234 of control object device is sent to substrates stops indicating Cres.
And monitoring unit 239 also can be together with propose discharging the distribution of indication Csus and be positioned at the buffering indication Cbus of the substrate under specific machining state to being positioned at the snubber assembly distribution storage of the upstream side of monitored object device.This buffering indication Cbuf is for example in the situation that a treating apparatus of manufacturing process breaks down, and for substrate in the processing that prevents from should processing at the treating apparatus of this fault is trapped on production line, sends.Monitoring unit 239 also can be according to buffering indication Cbuf, the specific substrate that should be stored in snubber assembly.The situation that stops at the recovery of monitored object device of buffering is inferior, makes suitable indication.
And, dead band number in the snubber assembly of giving buffering indication Cbuf is few (for example, the situation that dead band number is less than set threshold value), and monitoring unit 239 judgement only this snubber assembly cannot store the situations of being detained substrate completely, monitoring unit 239 can be to the snubber assembly distribution buffering indication Cbuf of upstream side more.
Below, the details of the monitor message Imon of 231 references of control device of present embodiment, supervision project that control device 231 monitors and each monitored item object are stopped discharge condition and remove stop condition describe.
<1, substrate hold-up time >
The substrate hold-up time refers to that same substrate is present in the time of the ad-hoc location in monitored object device.In order to monitor the substrate hold-up time, the production line control system 230 of present embodiment is used the substrate position information that is illustrated in the substrate position in monitored object device.Substrate position information table is shown in the information whether set position (more than being set up a place) of predetermining in monitored object device has substrate.Monitoring unit 239, according to the substrate position information of being notified by monitor message obtaining section 233, according to having or not substrate on each position, is calculated substrate sustainable existence in each locational time (substrate hold-up time).
Using the substrate hold-up time in monitored item object situation, set the threshold value of hold-up time as stopping discharge condition, set from stop discharging start through given time as removing stop condition.
Therefore, monitoring unit 239 in the situation that the substrate hold-up time that certain monitored object device is calculated surpass the threshold value set, to control object device, distribution stops discharging indication Csus, then, from stop discharging the distribution of indication Csus start through during given time distribution remove and stop indicating Cres.
By the substrate hold-up time on supervision ad-hoc location like this, can grasp the initial stage that delay occurs.Therefore, can be by making the device of the upstream side of this ad-hoc location stop discharging the substrate set time, and eliminate and be detained in the early stage.
The dead band of <2, snubber assembly is counted >
The information that the dead band number of snubber assembly is used in the situation that setting snubber assembly as monitored object device.The monitor message obtaining section 233 that is arranged at snubber assembly just can be upgraded dead band number when storage and discharge substrate, and counts information to the dead band of monitoring unit 239 notice expression dead band numbers.
Using dead band number as supervision number in the situation that, set the lower limit of dead band number as stopping discharge condition, and the higher limit of setting dead band number is as removing stop condition.
Therefore, monitoring unit 239 is in the situation that the dead band number of certain monitored object snubber assembly becomes below the lower limit setting, and to control object device, distribution stops discharging indication Csus, then, in the situation that dead band number surpasses the higher limit setting, distribution is removed and is stopped indicating Cres.
If according to the dead band number of snubber assembly, the absorption remaining sum of being detained is controlled the discharge of the substrate of control object device, can eliminate by compulsion the delay of substrate.If with together with the control of the substrate hold-up time of this project 1, carry out this control, cannot be by stopping discharging the delay of the degree that the substrate set time eliminates owing to also can eliminating, therefore more effective.
Substrate number > in <3, supervision district
As mentioned above, in each device, predetermine and can detect a plurality of positions that have or not substrate.Each position can be set in any part of taking out of, move into treating apparatus or snubber assembly on the carrying path of the part of substrate or the part of processing in treating apparatus, snubber assembly inside and Handling device etc.Monitor that district refers to the scope of stipulating according to the combination of optional a plurality of positions, position of predetermining from these.
For example, in Fig. 5, can be by being chosen in all positions of Handling device 212, snubber assembly 221, applying device 205a and 205b, testing fixture 217, Handling device 213 and snubber assembly 222 interior defineds, by the Z being surrounded by 2 lines 1part is set as monitoring district.In addition, although the combination of all positions of defined defines the example that monitors district in this illustrates with the device in configuration continuously, the system of selection of position is not particularly limited, can selects arbitrarily.For example, also can only be chosen in a part for the position of defined in each device, or select the not position of direct-connected device simultaneously, define and monitor district.
In the present embodiment, by supervision, be present in the substrate number in the supervision district setting, can realize the mobile control of elastic base plate.Monitor that district can define according to the set information of inputting via configuration part 238, and be stored in storage part 237.
Monitor that in district, substrate number is that monitoring unit 239 is calculated according to the substrate position information of being notified by each monitored object device that is contained in supervision district.
Under monitoring in district that substrate number is as monitored item object situation, the higher limit of setting substrate number is as stopping discharge condition, and the lower limit of setting substrate number is as removing stop condition.
Therefore, monitoring unit 239 is in the situation that more than in the supervision district that certain supervision district is calculated, substrate number becomes the higher limit setting, to control object device, distribution stops discharging indication Csus, then, in the situation that substrate number is less than the lower limit setting in calculated supervision district, distribution is removed and is stopped indicating Cres.
If according to mobile substrate number in monitoring district, control the discharge of the substrate of control object device, can eliminate by compulsion the delay of substrate.If with together with the control of the substrate hold-up time of this project 1, carry out this control, cannot be by stopping discharging the delay of the degree that the substrate set time eliminates owing to also can eliminating, therefore more effective.
Substrate hold-up time > in <4, snubber assembly
The information that in snubber assembly, the substrate hold-up time is used as the situation of monitored object device at setting snubber assembly, represents to be stored in from substrate the elapsed time that snubber assembly starts.Be arranged at each substrate that 233 pairs of the monitor message obtaining sections of snubber assembly store and measure hold-up time, and using substrate hold-up time information and notify monitoring unit 239 in snubber assembly of measured time.
In the substrate hold-up time in snubber assembly in monitored item object situation, set the higher limit of hold-up time as stopping discharge condition, monitoring unit 239 is in the situation that more than the substrate hold-up time in monitored object snubber assembly becomes the higher limit setting, to control object device, distribution stops discharging indication Csus.But, as removing stop condition, use the substrate number in the set district that includes snubber assembly.Below, this point is elaborated.
The schematic diagram of a part for production line shown in Fig. 8 presentation graphs 5.In Fig. 8, with triangle mark, be illustrated in the position of defined on the carrying path of Handling device 212.And in the example of Fig. 8, imagination monitored object device is snubber assembly 221, control object device is the situation of cleaning device 204a.
With reference to Fig. 8 (a), snubber assembly 221 is to be arranged on the carrying path of Handling device 212 in the mode on line (In-Line), and substrate is discharged in substrate, the carrying path of in the mode of FILO (First In Last Out), storing on the carrying path of Handling device 212.Therefore, snubber assembly 221 initial stored substrate 226 under empty state, till other memory substrate is discharged from, is trapped in snubber assembly 221.
Monitoring unit 239 in the situation that in the snubber assembly of substrate 226 hold-up time surpass the higher limit set, to cleaning device 204a, distribution stops discharging indication Csus.As stop discharging the control method that makes to start again to discharge from cleaning device 204a substrate after indication Csus in distribution, for example, can consider moment of being all discharged from interior the stored substrate of snubber assembly 221, to cleaning device 204a, distribution is removed and is stopped indication.
But, as shown in Fig. 8 (b), while starting to discharge substrate again after snubber assembly 221 becomes sky, owing to just receiving that removing the applying device 205a time of origin that arrives back segments to the substrate 227 of discharging from cleaning device 204a after stopping indicating Cres postpones (time lag), therefore causes the operational efficiency reduction of production line.
So, in the present embodiment, consider that the substrate of discharging from the cleaning device 204a of control object, to the time of the snubber assembly 221 of back segment, controls and remove the distribution sequential (timing) that stops indicating Cres.Particularly, in Fig. 8 (c), by according to n position P of snubber assembly 221 and its upstream side 1～P nthe scope (scope of being surrounded by 2 lines) of combination defined be defined as Yi Ge district Z 2, when being present in this district Z 2in substrate number become set threshold value when following, 239 pairs of cleaning device 204a distribution releasings of control part stop indicating Cres.In addition ，Ci district Z 2with monitor that district similarly, can define according to the set information of inputting via configuration part 238, be stored in storage part 237.
For example, stop discharging the threshold value Th of use (Th is at district Z than configurable set removing 2the little value of maximum number M of interior substrate) situation Xia， district Z 2the moment control part 239 distribution releasings that interior substrate number becomes below Th stop indicating Cres.Response is removed and is stopped indicating Cres, and cleaning device 4a starts to discharge substrate again, and substrate is discharged to Handling device 212.
If preset the value of threshold value Th, make to be handled upside down and to be about to in-position P at the substrate 228 that the moment of Fig. 8 (c) discharges 1before, the hold-up time, the longest substrate 226 was discharged from from snubber assembly 221, as shown in Fig. 8 (d), can be not carrying substrate interruptedly, also can improve the operational efficiency of production line.
If the substrate hold-up time of such supervision in snubber assembly, owing to can preventing that the substrate in processing is stored in snubber assembly more than given time, therefore can suppress the change in required processing time of each substrate, and improve quality.
<5, device operating condition >
Device operating condition represents whether monitored object device is the information in running well.Monitor message obtaining section 233 is for example regularly situation in running well and the normal operation information of situation in addition with two-value performance operating member 235 to monitoring unit 239 notices.
Will install operating condition as monitored item object situation under, set normal operation information from the value that represents normal condition toward the variation of value that represents abnomal condition as stopping discharge condition, and set normal operation information from the value that represents abnomal condition toward the variation of value that represents normal condition as removing stop condition.
Therefore, monitoring unit 239 is in the situation that certain monitored object device changes toward up-set condition, and to control object device, distribution stops discharging indication Csus, then, in the situation that monitored object device recovers normal condition, to control object device, distribution is removed and is stopped indicating Cres.
Due to by the operating condition of such monitoring arrangement, can stop discharging the substrate that should process becoming abnormal device, therefore can prevent from production line, circulating by processed substrate.
In addition any supervision control combination that, the above-mentioned buffering of being issued by monitoring unit 239 indication Cbuf also can and record in this project 1～5.By with the stopping discharging together with indication Csus and issue buffering indication Cbuf of substrate, can guarantee not occur to be detained or the abnormal carrying path of device, and proceed by the performed processing of a part of device.
Fig. 9 represents the process flow diagram of the control processing that monitoring unit is as shown in Figure 6 carried out.
In step S201～S205, monitoring unit 239, according to the monitor message of notifying from monitored object device, determines whether to meet at the defined substrate of each supervision project to stop discharge condition.In addition, the processing of these steps S201～S205 can be according to sequentially carrying out arbitrarily.239 pairs of monitoring units meet the supervision project that substrate stops the condition of discharging, and are set in flag (flg1～flg5) by 1, supervision project is in addition set in to flag by 0, and transfers to step S206.
In step S206, monitoring unit 239 is tried to achieve the logical OR of the flag flg1～flg5 setting at step S201～S205, and transfers to step S207.
In step S207, whether monitoring unit 239 is judged the logic of trying to achieve and is 1.In the situation that tried to achieve logic and be 1 (being Yes) in step S207 is transferred to step S208, and in addition in the situation that (being No), turn back to step S201～S205 in step S207.
In step S208, the operation control part 234 distribution substrates of the control object device that 239 pairs of monitoring units set with regard to monitored object device stop discharging indication, and transfer to step S209～S213.
In step S209～S213, monitoring unit 239, according to the monitor message of notifying from monitored object device, determines whether and meets at the defined releasing stop condition of each supervision project.In addition, the processing of these steps S209～S213 can be carried out according to random order.239 pairs of monitoring units meet the supervision projects of removing stop conditions, are set in flag (flg6～flg10) by 1, and supervision project is in addition set in to flag by 0, transfer to step S214.
In step S214, monitoring unit 239 is tried to achieve the logical and of the flag flg6～flg10 setting at step S209～S213, transfers to step S215.
In step S215, monitoring unit 239 judges whether the logic product of trying to achieve is 1.In the situation that tried to achieve logic product is 1 (being Yes in step S215), transfers to step S216, and in addition in the situation that (being No), turn back to step S209～S213 in step S215.
In step S216, operation control part 234 distribution of the control object device that 239 pairs of monitoring units set with regard to monitored object device are removed and are stopped indication, and transfer to step S217.
In step S217, monitoring unit 239 is (being Yes) in the situation that stopping monitoring in step S217, and finishing control is processed, and in addition in the situation that (being No in step S217), turns back to step S201～S205.
By controlling like this, to a plurality of monitored item objects, any one meets while taking out of stop condition, stop discharging substrate from being positioned at the control object device of the upstream side of monitored object device, and when the supervision project to all meets releasing stop condition, then start to discharge substrate from control object device.
At this, the object lesson that above-mentioned control is processed describes.
In Fig. 5, in order to carry out the colored pattern formation processing of the first color, imagination is according to the situation of the order carrying untreatment base of " moving into device 201a and 201b-cleaning device 204a-Handling device 202-applying device 205a ".For example, at applying device 205a (monitored object device), occur to be detained or to install abnormal in the situation that, control device 231 (Fig. 6) makes move into the device 201a and 201b and cleaning device 205a (control object device) of the upstream side of applying device 205a stop discharging substrate, snubber assembly 221 indications is stored in to snubber assembly 221 by the substrate that should process at applying device 205a (discharging and be handled upside down the substrate of device 212 carryings from cleaning device 205a) simultaneously.If carry out this control, due to normal operating applying device 205b is guaranteed to carry path, therefore can proceed the colored pattern formation processing of other color.And, can prevent that the substrate (substrate in the processing that should process at applying device 205a) that cannot process from continuing to flow in production line.
Then, when the delay at applying device 205a or the elimination such as device is abnormal, while meeting whole monitored item object releasing stop conditions, control device 231 (Fig. 6) stops moving into the device 201a and 201b and cleaning device 205a (control object device) indication releasing of the upstream side of applying device 205a, starts to discharge substrate again.
Although in this object lesson, to occurring to be detained or to install abnormal example to describe at specific treating apparatus, but in the situation that monitored object device is other device, or in other supervision project, meet stop discharging condition in the situation that the also similarly discharge of the substrate of control object device.
As mentioned above, in the performed control method of the production line control system of present embodiment, control part 239 is obtained the operation conditions of device in each production line, monitor the operation conditions of device in each obtained production line, providing monitored object device restricting substrate is provided, again according to result of determination, carry out at least one control object device substrate stop discharging and removing stop.The discharge of the substrate of a part of device of the upstream side by such control monitored object device, even if the different substrate of work in-process state installs in sharing production line on one side, on one side in the production line of mobile mode, also can suppress the delay of substrate, and increase productivity (throughput).And due to by suppressing the delay of substrate, the colored pattern that can prevent certain color, from starting to be formed into the increase in the processing time till end, therefore can improve the quality of colored filter.
And, as shown in the embodiment, if discharged together with indication with the substrate that stops of control object device, the substrate that should be processed by monitored object device the snubber assembly indication storage of monitored object upstream side, can continue the processing of the normal operating device beyond monitored object device.
In addition, although in the present embodiment, utilize the computer that device possesses in production line, realize the example of monitor message obtaining section and operation control part, but also can use, can control other computer terminals of production line inner controller and form monitor message obtaining section and operation control part.
(industrial utilize possibility)
The production line of the colored filter that the inventive example is manufactured in liquid crystal indicator as being used in to be used.

Claims (12)

1. a colorized optical filtering slice assembly line, it sequentially forms the colored pattern of at least 4 kinds of colors on substrate, it is characterized in that:
This colorized optical filtering slice assembly line possesses:
The memory storage of memory substrate,
Colored pattern forms production line, comprises: many treating apparatus, arrange side by side in order to carry out the processing of photolithographic each manufacturing process; And many Handling devices, connect between this treating apparatus, and according to formed colored pattern on substrate, to set treating apparatus carrying substrate; And in photolithographic each manufacturing process, when forming the colored pattern of two kinds of colors in shared processor at least one,
Move into device, the substrate being provided moved into this colored pattern form production line by this memory storage,
Conveyance device, takes out of this memory storage by the substrate of discharging from this colored pattern formation production line, and
Snubber assembly, is temporarily stored in the substrate that this colored pattern forms circulation in production line;
This colored pattern forms production line and makes substrate repetitive cycling till form required colored pattern on substrate, and to this conveyance device, discharge the substrate that has formed required colored pattern, this colored pattern forms production line by discharging substrate to this buffer means stores substrate and from this snubber assembly, shared treating apparatus when forming the colored pattern of these two kinds of colors is alternately provided to the substrate and the substrate that should form the colored pattern of the another kind of color in these two kinds of colors of the colored pattern that should form a kind of color in these two kinds of colors.
2. a production line control system, it controls colorized optical filtering slice assembly line, and this colorized optical filtering slice assembly line comprises: many treating apparatus, many Handling devices that connect this treating apparatus and the snubber assemblys of temporarily storing a plurality of substrates, and when forming the colored pattern of multiple color, share this treating apparatus and this Handling device, it is characterized in that:
This production line control system possesses:
Monitor message obtaining section, obtains monitor message, and this monitor message represents this treating apparatus, this Handling device and this snubber assembly operation conditions separately;
Operation control part, controls the action of this treating apparatus, this Handling device and this snubber assembly; And
Monitoring unit, according to the monitor message of being notified by this monitor message obtaining section, monitor the operation conditions of monitored object device, and this operation control part is indicated: stop stopping from being positioned at least one table apparatus discharge substrate and the releasing of the upstream side of monitored object device
Colorized optical filtering slice assembly line alternately provides the substrate of the colored pattern that should form two kinds of a kind of colors in color to shared treating apparatus when forming described colored pattern and should form the substrate of the colored pattern of the another kind of color in these two kinds of colors.
3. production line control system according to claim 2, is characterized in that:
This monitor message includes the substrate position information that is illustrated in the substrate position in each device;
This monitoring unit is calculated the hold-up time of the substrate in monitored object device according to notified substrate position information, and indicate this to stop discharging in the situation that the hold-up time that judgement is calculated becomes more than set threshold value, in the indication that stops from this discharging, after given time, indicate this releasing to stop.
4. production line control system according to claim 2, is characterized in that:
This monitor message includes the dead band of the dead band number that represents this snubber assembly and counts information;
This monitoring unit is counted information according to notified dead band, indicates this to stop discharging, and indicate this releasing to stop in the situation that dead band number surpasses set higher limit in the situation that the dead band number of the snubber assembly that should monitor becomes below set lower limit.
5. production line control system according to claim 2, is characterized in that:
This monitor message includes the substrate position information that is illustrated in the substrate position in each device;
This monitoring unit is defined as the combination of the selected a plurality of positions, a plurality of position from predetermining in this colorized optical filtering slice assembly line to monitor district, and calculate the substrate number in this supervision district according to notified substrate position information, in the situation that calculated substrate number becomes more than set higher limit, indicate this to stop discharging, and indicate this releasing to stop in the situation that calculated substrate number becomes less than set lower limit.
6. production line control system according to claim 2, is characterized in that:
This monitor message includes hold-up time information in snubber assembly, and it represents the interior hold-up time of snubber assembly of interior each substrate stored of snubber assembly;
This monitoring unit is according to hold-up time information in notified snubber assembly, in the situation that becoming, the hold-up time of the substrate in the snubber assembly that should monitor more than set higher limit indicate this to stop discharging, and in the situation that become below set threshold value and indicate this releasing to stop by the substrate number in the district of a plurality of positions defined of the snubber assembly that should monitor and upstream side thereof.
7. production line control system according to claim 2, is characterized in that:
This monitor message includes and represents whether each device is normal operating normal operation information;
This monitoring unit is according to notified normal operation information, in the situation that the running status of monitored object device indicates this to stop discharging from normally becoming extremely, and in this running status, from abnormal restoring, normal situation, indicates this releasing to stop.
8. according to the production line control system described in any one in claim 2 to 7, it is characterized in that:
This monitoring unit, in the situation that indicating this to stop discharging, further stores to the snubber assembly indication of monitored object upstream side the substrate that should be processed by monitored object device.
9. according to the production line control system described in any one in claim 2 to 7, it is characterized in that:
Also possess:
Storage part, storage: be contained in defined substrate in the information of this monitor message at each and stop discharge condition and remove stop condition, the information of specific at least one monitored object device and the specific upstream side that is positioned at this monitored object device also should be controlled the information of device of the discharge of substrate, and
Configuration part, for setting this storage part institute canned data;
This comparative result that stops discharge condition and remove stop condition that this monitoring unit is stored according to this notified monitor message and this storage part, determines that this stops discharging and this releasing stops.
10. production line control system according to claim 8, is characterized in that:
Also possess:
Storage part, storage: be contained in defined substrate in the information of this monitor message at each and stop discharge condition and remove stop condition, the information of specific at least one monitored object device and the specific upstream side that is positioned at this monitored object device also should be controlled the information of device of the discharge of substrate, and
Configuration part, for setting this storage part institute canned data;
This comparative result that stops discharge condition and remove stop condition that this monitoring unit is stored according to this notified monitor message and this storage part, determines that this stops discharging and this releasing stops.
11. 1 kinds of production line control methods, it controls colorized optical filtering slice assembly line, this colorized optical filtering slice assembly line comprises: many treating apparatus, many Handling devices that connect this treating apparatus and the snubber assemblys of temporarily storing a plurality of substrates, and when forming the colored pattern of multiple color, share this treating apparatus and this Handling device, it is characterized in that:
This production line control method comprises following steps:
Obtain this treating apparatus, this Handling device and this snubber assembly operation conditions separately;
Monitor the operation conditions of each obtained device, and restriction providing the substrate of monitored object device is provided;
According to result of determination, make at least one table apparatus of the upstream side of this monitored object device stop discharging substrate and releasing stops,
Shared treating apparatus when forming described colored pattern is alternately provided to the substrate and the substrate that should form the colored pattern of the another kind of color in these two kinds of colors of the colored pattern that should form two kinds of a kind of colors in color.
12. 1 kinds of colorized optical filtering slice assembly lines form the colored pattern of multiple color on substrate, it is characterized in that:
This colorized optical filtering slice assembly line possesses:
Treating apparatus, carries out the processing of photolithographic each manufacturing process, and is common to the colored pattern that forms multiple color,
Many Handling devices, connect this treating apparatus, and are common to the colored pattern that forms multiple color,
The snubber assembly of a plurality of substrates of temporary transient storage, and
Control device, controls each this treating apparatus, this Handling device and this snubber assembly;
Each this treating apparatus, this Handling device and this snubber assembly comprise:
Monitor message obtaining section, obtains the monitor message that represents operation conditions, and
Operation control part, according to the indication from this control device, control action;
This control device, according to the monitor message sending from this monitor message obtaining section, monitors the operation conditions of monitored object device, and indicates the discharge and the releasing that stop substrate to stop to the operation control part of at least one table apparatus of monitored object upstream side,
Shared treating apparatus when forming described colored pattern is alternately provided to the substrate and the substrate that should form the colored pattern of the another kind of color in these two kinds of colors of the colored pattern that should form two kinds of a kind of colors in color.
CN201080003197.4A 2009-01-16 2010-01-15 Color filter production line, line control system, and line control method Expired - Fee Related CN102216815B (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2009-007331 2009-01-16
JP2009007331 2009-01-16
JP2009-035498 2009-02-18
JP2009035498 2009-02-18
PCT/JP2010/000195 WO2010082495A1 (en) 2009-01-16 2010-01-15 Color filter production line, line control system, and line control method

Publications (2)

Publication Number Publication Date
CN102216815A CN102216815A (en) 2011-10-12
CN102216815B true CN102216815B (en) 2014-02-05

Family

ID=42339747

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201080003197.4A Expired - Fee Related CN102216815B (en) 2009-01-16 2010-01-15 Color filter production line, line control system, and line control method

Country Status (5)

Country Link
JP (1) JP5569809B2 (en)
KR (1) KR101215792B1 (en)
CN (1) CN102216815B (en)
TW (1) TWI480601B (en)
WO (1) WO2010082495A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106249452A (en) * 2016-10-11 2016-12-21 武汉华星光电技术有限公司 The manufacture method of a kind of CF substrate and UV solidification equipment, CF substrate production line

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3174409B2 (en) * 1992-09-08 2001-06-11 株式会社日立国際電気 Semiconductor manufacturing apparatus and substrate processing method in semiconductor manufacturing apparatus
JP4266045B2 (en) * 1998-07-02 2009-05-20 東芝電子エンジニアリング株式会社 Color filter panel manufacturing equipment
JP2001206543A (en) * 2000-01-31 2001-07-31 Mitsubishi Electric Corp Automatic sheet processing line
JP3756402B2 (en) * 2000-12-08 2006-03-15 富士写真フイルム株式会社 Substrate transfer apparatus and method
JP4153812B2 (en) * 2002-07-22 2008-09-24 大日本印刷株式会社 Color filter production line system
JP4334190B2 (en) * 2002-08-09 2009-09-30 大日本印刷株式会社 Buffer device and color filter production line
JP2006019622A (en) * 2004-07-05 2006-01-19 Dainippon Screen Mfg Co Ltd Substrate processing apparatus

Also Published As

Publication number Publication date
JP5569809B2 (en) 2014-08-13
KR20110065557A (en) 2011-06-15
JPWO2010082495A1 (en) 2012-07-05
WO2010082495A1 (en) 2010-07-22
CN102216815A (en) 2011-10-12
TWI480601B (en) 2015-04-11
KR101215792B1 (en) 2012-12-26
TW201033655A (en) 2010-09-16

Similar Documents

Publication Publication Date Title
EP2405478B1 (en) Coating and developing apparatus
US6962471B2 (en) Substrate conveying module and system made up of substrate conveying module and workstation
US9417529B2 (en) Coating and developing apparatus and method
US8888387B2 (en) Coating and developing apparatus and method
KR20010110116A (en) Substrate processing system and substrate processing method
US20060201423A1 (en) Coating/developing device and method
KR100919084B1 (en) Substrate processing apparatus and substrate transferring method
US20100203434A1 (en) Substrate treatment method and substrate treatment system
CN102216815B (en) Color filter production line, line control system, and line control method
US8306646B2 (en) Coating and developing apparatus, coating and developing method, and storage medium
US6239859B1 (en) Photolithographic apparatus composed of coater/developer and a plurality of steppers in parallel connected thereto
JP2004319767A (en) Substrate processing equipment
WO2008042572A2 (en) Method and system for facilitating preventive maintenance of an optical inspection tool
KR100762030B1 (en) A resin composition for color filter
JP4322086B2 (en) Substrate processing apparatus and method
KR101187844B1 (en) Small lot size lithography bays
JP2006019622A (en) Substrate processing apparatus
JP2004109968A (en) Color filter manufacturing line system
JP4266045B2 (en) Color filter panel manufacturing equipment
JP4406463B2 (en) Color filter panel manufacturing equipment
JPH08194112A (en) Apparatus for producing color sample
JP5135988B2 (en) Line availability monitoring method
JP2013021055A (en) Manufacturing line setting change system
KR20180014518A (en) Substrate treating apparatus, method of controlling the same, and semiconductor manufacturing equipment
KR20170020033A (en) Substrate treating apparatus, method of controlling the same, and semiconductor manufacturing equipment

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20140205

Termination date: 20170115

CF01 Termination of patent right due to non-payment of annual fee