CN106249452A - The manufacture method of a kind of CF substrate and UV solidification equipment, CF substrate production line - Google Patents
The manufacture method of a kind of CF substrate and UV solidification equipment, CF substrate production line Download PDFInfo
- Publication number
- CN106249452A CN106249452A CN201610887227.1A CN201610887227A CN106249452A CN 106249452 A CN106249452 A CN 106249452A CN 201610887227 A CN201610887227 A CN 201610887227A CN 106249452 A CN106249452 A CN 106249452A
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- China
- Prior art keywords
- substrate
- lamp
- solidification equipment
- manufacture method
- processing procedure
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
- G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mathematical Physics (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Abstract
The invention discloses the manufacture method of a kind of CF substrate, including CF processing procedure, after CF processing procedure terminates, CF substrate carries out one UV hardening process, described UV hardening process is to be irradiated by UV lamp at the back side of CF substrate.Another aspect of the present invention additionally provides a kind of UV solidification equipment and CF substrate production line.Compared with prior art, by increasing by one UV hardening process after CF basal plate making process, by the back side of CF substrate is carried out UV illumination hardening, making film layer bottom more bond, cone angle is more preferable, i.e. figure can be made thinner live width.
Description
Technical field
The present invention relates to a kind of liquid crystal panel making apparatus, the manufacture method of a kind of CF substrate and UV solidification dress
Put, CF substrate production line.
Background technology
Current existing CF (colored filter) processing procedure is the most changeable in response to mobile device product and resolution PPI increases therewith
Adding, for meeting high-resolution demand, corresponding the used technology of CF processing procedure also has corresponding technical difficulty, at black square
Battle array (BM) processing procedure, rgb pixel processing procedure, the live width (CD) of PS (making of photo spacer: pillar) partial pattern have different journey
Reducing of degree, technical difficulty part also has rising in various degree, particularly BM processing procedure, and fine rule width performs needs baking, baking
After still keep steeper tapering, under this situation, need photoresistance to coordinate less mobility (melt flow), the structure of carbon element is big
Little directly affecting this characteristic, structure is the biggest, and mobility is the least, but impedance part branch reduces because structure becomes big simultaneously, and this is
We are not wanted to see that.Mobility part and the internal bonding conditions of photoresistance also have certain impact, during exposure, by penetration shadow
Ringing, photoresistive surface part light is naturally larger than inside photoresistance, and the internal macromolecule of chemicals photoresistance is polymerized, after baking, and light
Resistance can be flowed again, thus tapering declines, and live width becomes big.
Summary of the invention
For overcoming the deficiencies in the prior art, the present invention provides manufacture method and UV solidification equipment, the CF base of a kind of CF substrate
Board assembly line, so that it is guaranteed that the more polyaddition of the macromolecule within photoresistance.
The invention provides the manufacture method of a kind of CF substrate, including CF processing procedure, after CF processing procedure terminates, CF substrate is entered
One UV hardening process of row, described UV hardening process is to be irradiated by UV lamp at the back side of CF substrate.
Further, the wavelength of described UV lamp is 300-450nm.
Further, the wavelength of described UV lamp is 450nm.
Present invention also offers a kind of UV solidification equipment, the entrance of including shell and being located at shell opposite sides and going out
Mouthful, it being provided with roller conveyer device in the enclosure, roller conveyer device is arranged between inlet and outlet, at roller conveyer device
Lower section is provided with spaced UV lamp, and described UV lamp is arranged on the gap between adjacent two roll shafts of roller conveyer device,
Each UV lamp is respectively equipped with a ballast, and each ballast is all connected with power supply.
Further, being equipped with a reflector on each UV lamp, the reflecting surface of reflector is upward.
Further, each two reflector is interconnected and fixed into one group of reflector group.
Further, the wavelength of described UV lamp is 300-450nm.
Further, the wavelength of described UV lamp is 450nm.
Not entering one not, the transporting velocity of described roller conveyer device is 4000mm/min.
The present invention provides a kind of CF substrate production line, also includes described UV solidification equipment.
The present invention compared with prior art, by increasing by one UV hardening process after CF basal plate making process, by CF
The back side of substrate carries out UV illumination hardening, makes film layer bottom (high molecular polymerization part) more polyaddition, and cone angle is more preferable, i.e. figure can
To be made thinner live width.
Accompanying drawing explanation
Fig. 1 is the flow chart of the manufacture method of the CF substrate of the present invention.
Fig. 2 is the internal structure schematic diagram of the UV curing of the present invention.
Fig. 3 is the structural representation of CF substrate production line of the present invention.
Detailed description of the invention
With embodiment, the present invention is described in further detail below in conjunction with the accompanying drawings.
As it is shown in figure 1, the manufacture method of the CF substrate of the present invention, including the CF processing procedure of prior art, terminate at CF processing procedure
After, after i.e. completing baking, CF substrate (colored filter substrate) being carried out one UV hardening process (S108), described UV hardens work
Sequence is to be irradiated by UV lamp at the back side of CF substrate, so that it is guaranteed that the bond situation within photoresistance, produces line processing procedure to improve
Scope.
The wavelength of UV lamp is 300-450nm, preferably 450nm.
Described CF processing procedure generally comprises following steps:
Step one S101, cleaning, be carried out by decontaminating apparatus substrate, removes the granule of substrate surface；
Step 2 S102, coating, be coated with photoresist by CF coating machine, forms coating；
Step 3 S103, be dried, utilize Minton dryer to have cated substrate be dried, utilize vacuum drying
Pressure is dropped to 30pa by equipment, allows solvent reach boiling point, dries；
Step 4 S104, prebake conditions, dried residual solvent on substrate by prebake conditions device i.e. hot plate；
Step 5 S105, exposure, carry out ultraviolet irradiation by exposure device, react photoresistance；
Step 6 S106, development, use developing unit to utilize the KOH of alkalescence, is removed by the material not shining light；
Step 7 S107, baking, carry out being gone by residual solvent on substrate after baking temperature is 230 DEG C by CF baking machine
Fall, make CF substrate.
After having carried out above-mentioned CF processing procedure, carrying out step 8 S108, UV hardens.
Owing to the claimed purport of the present invention is for carry out one UV hardening process after making CF substrate, therefore, make
CF substrate can be carried out according to the CF processing procedure of prior art, does not repeats them here.
As in figure 2 it is shown, the UV solidification equipment of the present invention includes shell 4, it is respectively equipped with entrance 5 in the relative phase side of shell 4
With outlet 6, being provided with roller conveyer device 1 in shell 4, roller conveyer device 1 is arranged between entrance 5 and outlet 6, so that
CF substrate can carry through roller conveyer device 1 after entrance 5 enters and send from outlet 6, sets in the lower section of roller conveyer device 1
There is the gap that spaced UV lamp 2, described UV lamp 2 are arranged between adjacent two roll shafts of roller conveyer device 1, often
Being equipped with a reflector 3 on individual UV lamp 2, upward, each UV lamp 2 is respectively equipped with a ballast 7 to the reflecting surface of reflector 3,
Each ballast 7 is all connected with power supply 8, so can be irradiated from the back side to CF substrate divided.
As the present embodiment wherein one preferably, each two reflector 3 is interconnected and fixed into one group of reflector group.
The wavelength of described UV lamp is 300-450nm, preferably 450nm.
Described roller conveyer device 1 can use the roller conveyer device of prior art, does not repeats them here, and described roller is defeated
The transporting velocity sending device 1 is 4000mm/min.
As it is shown on figure 3, the CF substrate production line of the present invention includes, including being arranged in order and connecting each other by conveyer device
Decontaminating apparatus 10, apparatus for coating 20, Minton dryer 30, prebake conditions device 40, exposure device 50, developing unit 60, dry
The UV curing 80 of roasting device 70 and the present invention.
The UV solidification equipment of the present invention can also use the UV curing of prior art.
Although illustrate and describing the present invention with reference to specific embodiment, but it should be appreciated by those skilled in the art that:
In the case of without departing from the spirit and scope of the present invention limited by claim and equivalent thereof, can carry out at this form and
Various changes in details.
Claims (10)
1. a manufacture method for CF substrate, including CF processing procedure, it is characterised in that: after CF processing procedure terminates, CF substrate is carried out
One UV hardening process, described UV hardening process is to be irradiated by UV lamp at the back side of CF substrate.
The manufacture method of CF substrate the most according to claim 1, it is characterised in that: the wavelength of described UV lamp is 300-
450nm。
The manufacture method of CF substrate the most according to claim 2, it is characterised in that: the wavelength of described UV lamp is 450nm.
4. a UV solidification equipment, the entrance (5) including shell (4) and being located at shell (4) opposite sides and outlet (6), its
Being characterised by: be provided with roller conveyer device (1) in shell (4), roller conveyer device (1) is arranged on entrance (5) and outlet (6)
Between, spaced UV lamp (2) it is provided with in the lower section of roller conveyer device (1), described UV lamp (2) is arranged on roller conveying dress
Putting the gap between adjacent two roll shafts of (1), each UV lamp (2) is respectively equipped with a ballast (7), each ballast
(7) all it is connected with power supply (8).
UV solidification equipment the most according to claim 4, it is characterised in that: on each UV lamp (2), it is equipped with a reflection
Cover (3), the reflecting surface of reflector (3) is upward.
UV solidification equipment the most according to claim 5, it is characterised in that: each two reflector (3) is interconnected and fixed into
One group of reflector group.
7. according to the UV solidification equipment described in any one of claim 4 to 6, it is characterised in that: the wavelength of described UV lamp (2) is
300-450nm。
UV solidification equipment the most according to claim 7, it is characterised in that: the wavelength of described UV lamp (2) is 450nm.
UV solidification equipment the most according to claim 4, it is characterised in that: the transporting velocity of described roller conveyer device (1)
For 4000mm/min.
10. a CF substrate production line, it is characterised in that: also include the UV solidification dress as described in any one of claim 4 to 9
Put.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610887227.1A CN106249452A (en) | 2016-10-11 | 2016-10-11 | The manufacture method of a kind of CF substrate and UV solidification equipment, CF substrate production line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610887227.1A CN106249452A (en) | 2016-10-11 | 2016-10-11 | The manufacture method of a kind of CF substrate and UV solidification equipment, CF substrate production line |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106249452A true CN106249452A (en) | 2016-12-21 |
Family
ID=57612361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610887227.1A Pending CN106249452A (en) | 2016-10-11 | 2016-10-11 | The manufacture method of a kind of CF substrate and UV solidification equipment, CF substrate production line |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106249452A (en) |
Citations (10)
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|---|---|---|---|---|
| CN1506735A (en) * | 2002-12-04 | 2004-06-23 | ���ǵ�����ʽ���� | Method for producing liquid crystal display |
| CN101208570A (en) * | 2005-06-28 | 2008-06-25 | 伊斯曼柯达公司 | UV cure equipment with combined light path |
| CN102216815A (en) * | 2009-01-16 | 2011-10-12 | 凸版印刷株式会社 | Color filter production line, line control system, and line control method |
| CN102636916A (en) * | 2012-04-26 | 2012-08-15 | 深圳市华星光电技术有限公司 | Manufacturing device and method of liquid crystal panel |
| CN103135334A (en) * | 2013-03-06 | 2013-06-05 | 京东方科技集团股份有限公司 | Color film layer mask plate, color filter manufacturing method and color filter |
| CN103760715A (en) * | 2013-12-31 | 2014-04-30 | 深圳市华星光电技术有限公司 | Liquid crystal display panel and manufacturing method thereof |
| US20140146280A1 (en) * | 2012-11-28 | 2014-05-29 | Chunghwa Picture Tubes, Ltd. | Method for manufacturing alignment layer |
| CN104423088A (en) * | 2013-09-10 | 2015-03-18 | 京东方科技集团股份有限公司 | Manufacturing method of color film substrate |
| CN105116627A (en) * | 2015-07-27 | 2015-12-02 | 深圳市华星光电技术有限公司 | Frame sealing adhesive and narrow-frame display device |
| CN105372867A (en) * | 2015-12-02 | 2016-03-02 | 深圳市华星光电技术有限公司 | Quantum dot color film substrate manufacturing method |
-
2016
- 2016-10-11 CN CN201610887227.1A patent/CN106249452A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1506735A (en) * | 2002-12-04 | 2004-06-23 | ���ǵ�����ʽ���� | Method for producing liquid crystal display |
| CN101208570A (en) * | 2005-06-28 | 2008-06-25 | 伊斯曼柯达公司 | UV cure equipment with combined light path |
| CN102216815A (en) * | 2009-01-16 | 2011-10-12 | 凸版印刷株式会社 | Color filter production line, line control system, and line control method |
| CN102636916A (en) * | 2012-04-26 | 2012-08-15 | 深圳市华星光电技术有限公司 | Manufacturing device and method of liquid crystal panel |
| US20140146280A1 (en) * | 2012-11-28 | 2014-05-29 | Chunghwa Picture Tubes, Ltd. | Method for manufacturing alignment layer |
| CN103135334A (en) * | 2013-03-06 | 2013-06-05 | 京东方科技集团股份有限公司 | Color film layer mask plate, color filter manufacturing method and color filter |
| CN104423088A (en) * | 2013-09-10 | 2015-03-18 | 京东方科技集团股份有限公司 | Manufacturing method of color film substrate |
| CN103760715A (en) * | 2013-12-31 | 2014-04-30 | 深圳市华星光电技术有限公司 | Liquid crystal display panel and manufacturing method thereof |
| CN105116627A (en) * | 2015-07-27 | 2015-12-02 | 深圳市华星光电技术有限公司 | Frame sealing adhesive and narrow-frame display device |
| CN105372867A (en) * | 2015-12-02 | 2016-03-02 | 深圳市华星光电技术有限公司 | Quantum dot color film substrate manufacturing method |
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| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20161221 |
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| RJ01 | Rejection of invention patent application after publication |