CN102216815A - Color filter production line, line control system, and line control method - Google Patents

Color filter production line, line control system, and line control method Download PDF

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Publication number
CN102216815A
CN102216815A CN2010800031974A CN201080003197A CN102216815A CN 102216815 A CN102216815 A CN 102216815A CN 2010800031974 A CN2010800031974 A CN 2010800031974A CN 201080003197 A CN201080003197 A CN 201080003197A CN 102216815 A CN102216815 A CN 102216815A
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China
Prior art keywords
substrate
colored pattern
production line
treating apparatus
snubber assembly
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Granted
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CN2010800031974A
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Chinese (zh)
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CN102216815B (en
Inventor
小河洋平
三山晃
畠康高
桑村健介
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Toppan Inc
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Toppan Printing Co Ltd
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/001—Axicons, waxicons, reflaxicons

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optical Filters (AREA)

Abstract

Provided is a color filter production line which can reduce a required accommodation space and the number of required devices. A color pattern formation line (121) which constitutes the color filter production line comprises a plurality of processing devices (washing device (110a) to baking device (114b)), which are arranged side by side in each step of photolithography, and a plurality of conveyance devices (101a to 108b) which connect each processing device. In each processing device, pattern formations of two predetermined colors can be changed. In the color pattern formation line (121), a substrate is repeatedly circulated by controlling the destinations determined by the respective conveyance devices until the color patterns of all four colors are formed on a substrate loaded from a loading device (LD) and the substrate on which the color patterns of all four colors have been formed is discharged to an unloading device (ULD). Each processing device is commonly used for the formation of two color patterns, and thus, the number of necessary devices and the accommodation space can be reduced.

Description

Colorized optical filtering slice assembly line, production line control system, production line control method
Technical field
The present invention relates to be used for being manufactured on employed colored filters such as liquid crystal indicator the colorized optical filtering slice assembly line, be used to control this Production Line line traffic control system and production line control method.
Background technology
As employed manufacturing method of color filters in liquid crystal indicator, the general using photoetching process forms the method for the colored pattern of multiple color on glass substrate.For example, be provided with black matrix" (deceiving) and red, green, blue during the colored filter of the colored pattern of totally 4 kinds of colors in manufacturing, black, red, green, blue shades of colour are repeated a series of colored pattern form processing, it comprises cleaning, the exposure to colored coating material, use light shield on the substrate, video picture, each manufacturing process of back baking of substrate.And, when manufacturing is provided with the colored filter of black matrix" (deceiving) and red, green, blue, the yellow colored pattern of totally 5 kinds of colors, black, red, green, blue, yellow shades of colour is repeated above-mentioned colored pattern form and handle.
Figure 10 is the synoptic diagram of the existing colorized optical filtering slice assembly line of expression, and Figure 11 is the calcspar of the part of expression colorized optical filtering slice assembly line shown in Figure 10.
Form and handle in order to carry out above-mentioned versicolor colored pattern,, in series be provided for forming 4 process for producing line 92a～92d of the colored pattern of black, these 4 kinds of colors of red, green, blue at existing colorized optical filtering slice assembly line shown in Figure 10.
Process for producing line 92a for example moves into moving into device LD, cleaning device 93, applying device 94, exposure device 95, display 96, apparatus for baking 97 and substrate being taken out of the conveyance device ULD of memory storage 91 of the substrate that provided by memory storage 91 for being used to produce the pattern of black matrix", possessing.Handling device 81～86 by carrying substrate between these each devices connects.And, testing fixture 98 on the line of checking thickness or coating inequality is set in the downstream of applying device 94, and testing fixture 99 on the line of checking formed pattern is set in the downstream of display 96.And, on Handling device 6, be connected with the extraction extraction testing fixture of checking 70 and the repair apparatus 71 of repairing substrate that are used to carry out substrate.
In the inside of memory storage 91, substrate is stored with the state that is accommodated in material casket (cassette).Move into device LD and take out substrate, and offer Handling device 81 from the material casket of being received from memory storage 91.The substrate that is provided after cleaning device 93 carryings, cleaning, to applying device 94 carryings, is included the photoresist of the coloured material of black by Handling device 82 by Handling device 81 by applying device 94 coatings.The substrate of coated photoresist after testing fixture 98 inspections, is transported to exposure device 95 by Handling device 83, uses light shields to carry out exposure-processed by exposure device 95.Substrate after the exposure, is checked by testing fixture 99 in the handling process of being undertaken by Handling device 85 after display 96 carryings and carrying out video picture by Handling device 84.To checking N/R substrate, carry out the back baking processing by apparatus for baking 97, carry to conveyance device ULD by Handling device 86.Conveyance device ULD in the material casket, and should expect that casket took out of memory storage 91 with the substrate reception received.
Though each device is moving in accordance with the cycle down to a certain degree, because the phenomenon that substrate is detained takes place in production line sometimes for the fault of device or the increase in caused processing time of abnormality processing etc.Therefore, the Handling device in the position of predicted delay in advance is provided for the snubber assembly (not shown) that substrate is detained in temporary transient storage.Snubber assembly generally has the multistage scaffolding structure, and possesses with good groundsly by the control that control device carried out, and stores a plurality of substrates, and discharges the function of the substrate of being stored on the carrying path.By snubber assembly suitably is disposed in the production line, the delay of available buffer substrate, and improve the operational efficiency of each treating apparatus.
And other process for producing line 92b～92d is also by being constituted with the same treating apparatus, Handling device and testing fixture that process for producing line 92a is comprised.
Utilize process for producing line 92a to produce the substrate of black matrix pattern, under the state that is incorporated in the material casket, be provided to the process for producing line 92b in downstream, utilized process for producing line 92b to form red colored pattern.After, equally via the processing of process for producing line 92c and 92d, on substrate, form the colored pattern of 4 kinds of colors.
[patent documentation 1] TOHKEMY 2004-109968 communique
[patent documentation 2] TOHKEMY 2008-108878 communique
[patent documentation 3] TOHKEMY 2004-103947 communique
Summary of the invention
At above-mentioned existing colorized optical filtering slice assembly line,, therefore have the required space of being provided with of production line and become big problem owing to need the process for producing line of the number of colors of formed colored pattern.In recent years, because the size of glass substrate maximizes, therefore the required space that is provided with of above-mentioned manufacturing line also increases along with the maximization of substrate size, thereby causes the required cost of manufacturing equipment to increase.
And, at this colorized optical filtering slice assembly line, constitute each treating apparatus (each device of cleaning, coating, exposure, video picture and baking) and the testing fixture of process for producing line and connect these devices Handling device need with the corresponding platform number of the chromatic number of colored pattern.Therefore, how required charging floor number change has also caused the required cost of manufacturing equipment to increase simultaneously.
Except this problem, when snubber assembly is set, following problem is arranged also.
Have in the colorized optical filtering of the snubber assembly slice assembly line possessing, might produce longer-term storage and can not take in any more and be trapped in substrate on the carrying path at the substrate of snubber assembly or snubber assembly.But the elongated meeting of processing time that begins till finish from the formation of colored pattern impairs quality.
Replacing that shades of colour is provided with colored pattern formation production line, and in a production line, shared treating apparatus and the Handling device that carries out the processing of each manufacturing process when forming two kinds of colored patterns more than the color, and the manufacturing line of the mode that has many branches and conflux on the carrying path (for example, with reference to patent documentation 3) in, have the very difficult problem of buffering (buffering) itself.Promptly, when shared 1 treating apparatus of the different a plurality of substrates of machining state and 1 Handling device, because it is influential that the substrate that fault the caused delay that takes place in the colored pattern formation of certain color is handled also can form processing to the colored pattern of other color, therefore is difficult to merely only depend on snubber assembly to come the delay of absorptive substrate.
The objective of the invention is to: a kind of colorized optical filtering slice assembly line that space and required charging floor number are set that reduces is provided.
And, other purpose of the present invention is: a kind of production line control system and production line control method are provided, the colorized optical filtering slice assembly line of its mode of shared processor and Handling device when forming the colored pattern of multiple color, even form the situation that the device of usefulness breaks down, also can make the colored pattern of other color form to handle and be continued at the colored pattern of certain color.
And, other purpose of the present invention is: a kind of colorized optical filtering slice assembly line is provided, it is when forming the colored pattern of multiple color in shared processor and the Handling device, even form the situation that the device of usefulness breaks down, also can make the colored pattern of other color form to handle and be continued at the colored pattern of certain color.
The present invention relates to form in regular turn on substrate the colorized optical filtering slice assembly line of the colored pattern of at least 4 kinds of colors, it possesses: the memory storage of memory substrate; Colored pattern forms production line, comprise: many treating apparatus, be provided with side by side for the processing of carrying out photolithographic each manufacturing process, and many Handling devices, between the connection processing device, according to formed colored pattern on substrate, to set treating apparatus carrying substrate, and in photolithographic each manufacturing process, when forming the colored pattern of two kinds of colors at least one of shared processor; Move into device, will move into colored pattern by the substrate that memory storage provided and form production line; And conveyance device, will form the substrate that production line discharges from colored pattern and take out of towards memory storage.Colored pattern forms production line makes the substrate repetitive cycling to till forming required colored pattern on the substrate, and the substrate that will form required colored pattern is discharged to conveyance device.
Production line control system of the present invention is used to control the colorized optical filtering slice assembly line, it comprises many Handling devices of many treating apparatus, connection processing device and the snubber assembly of a plurality of substrates of temporary transient storage, and when forming the colored pattern of multiple color shared processor and Handling device, this production line control system possesses: monitor message is obtained means, obtain monitor message, this monitor message display processing unit, Handling device and snubber assembly operation conditions separately; The action control device, the action of control and treatment device, Handling device and snubber assembly; And supervision means, according to obtain the obtained monitor message of means from monitor message, the operation conditions of monitor monitors object apparatus, and to action control device indication: stop to discharge substrate and releasing stops from least one table apparatus of the upstream side that is positioned at the monitored object device.
Production line control method control colorized optical filtering slice assembly line of the present invention, this colorized optical filtering slice assembly line comprises: many treating apparatus, many Handling devices that connect this treating apparatus and the snubber assemblys of temporarily storing a plurality of substrates, and when forming the colored pattern of multiple color shared this treating apparatus and this Handling device.This production line control method obtains treating apparatus, Handling device and snubber assembly operation conditions separately, monitor the operation conditions of each obtained device, whether judgement providing the substrate of monitored object device is provided, and, make at least one table apparatus of the upstream side of this monitored object device stop to discharge substrate and releasing stops according to result of determination.
Colorized optical filtering slice assembly line of the present invention is used for forming the colored pattern of multiple color on substrate, this colorized optical filtering slice assembly line possesses: treating apparatus, carry out the processing of photolithographic each manufacturing process, and be common to the colored pattern that forms multiple color; Many Handling devices, the connection processing device, and be common to the colored pattern that forms multiple color; Snubber assembly is temporarily stored a plurality of substrates; And control device, control each treating apparatus, Handling device and snubber assembly.Each treating apparatus, Handling device and snubber assembly comprise: the monitor message obtaining section, obtain the monitor message of representing operation conditions; And operation control part, according to the indication from control device, control action.Control device is according to the monitor message that is sent from the monitor message obtaining section, the operation conditions of monitor monitors object apparatus, and discharge and the releasing that the operation control part indication of at least one table apparatus of monitored object upstream side stops substrate being stopped.
At colorized optical filtering slice assembly line of the present invention, because in each manufacturing process, at the shared treating apparatus of processing of the colored pattern that forms two kinds of colors, therefore with the situation of shades of colour set handling production line is compared, can significantly reduce the required space of being provided with of colorized optical filtering slice assembly line.And,, therefore can reduce the required cost of formation colorized optical filtering slice assembly line owing to can reduce required charging floor number.
Use the present invention, can realize a kind of production line control system and production line control method, the colorized optical filtering slice assembly line of its mode of shared processor and Handling device when forming the colored pattern of multiple color, by the discharge of control from the substrate of the device of monitored object upstream side, even form under the situation that the device of usefulness breaks down, also can make the colored pattern of other color form to handle and be continued at the colored pattern of certain color.
And, can realize a kind of colorized optical filtering slice assembly line, it is when forming the colored pattern of multiple color in shared processor and the Handling device, even form under the situation that the device of usefulness breaks down, also can make the colored pattern of other color form to handle and be continued at the colored pattern of certain color.
The simple declaration of accompanying drawing
Fig. 1 is the synoptic diagram of the part of the colorized optical filtering slice assembly line of expression first embodiment of the present invention.
Fig. 2 is the synoptic diagram of snubber assembly shown in Figure 1.
Fig. 3 is the process flow diagram of the control and treatment of expression snubber assembly shown in Figure 2.
Fig. 4 is the synoptic diagram of the part of the colorized optical filtering slice assembly line of expression second embodiment of the present invention.
Fig. 5 is the calcspar of the part of the colorized optical filtering slice assembly line of expression the 3rd embodiment of the present invention.
Fig. 6 is the calcspar of the structure of the production line control system of expression the 3rd embodiment of the present invention.
Fig. 7 is the functional block diagram of the details of expression production line control system shown in Figure 6.
Fig. 8 is the synoptic diagram of the part of expression production line shown in Figure 5.
The process flow diagram of the control and treatment that Fig. 9 carries out for expression monitoring unit shown in Figure 6.
Figure 10 is the synoptic diagram of the existing colorized optical filtering slice assembly line of expression.
Figure 11 is the calcspar of the part of expression colorized optical filtering slice assembly line shown in Figure 10.
(explanation of symbol)
101～108-Handling device; The 109-memory storage; The 110-cleaning device; The 111-applying device; The 112-exposure device; The 113-display; The 114-apparatus for baking; The 121-colored pattern forms production line; The 122-snubber assembly; LD-moves into device; The ULD-conveyance device; 201-colorized optical filtering slice assembly line; The 204-cleaning device; The 205-applying device; The 206-exposure device; The 207-display; The 208-apparatus for baking; 211～216-Handling device; 221～224-snubber assembly; The 230-production line control system; The 231-control device.
Embodiment
(first embodiment)
Fig. 1 is the synoptic diagram of the part of the colorized optical filtering slice assembly line of expression first embodiment of the present invention.Fig. 1 only represents to be used to utilize photoetching process to form the processing line of the colored pattern of 4 kinds of colors in the colored filter manufacture process.And, the annexation between each device of the flechette-type symbolic representation among Fig. 1 and the carrying direction of substrate.
The colorized optical filtering slice assembly line of present embodiment possesses: memory storage 109, move into device LD, conveyance device ULD, carry out the above colored pattern of two kinds of colors concurrently and form the colored pattern of handling and form production line 121 and snubber assembly 122a and 122b.
Memory storage 109 is that a plurality of material caskets of glass substrate and the device of a plurality of empty material caskets are taken in storage, for example is equivalent to automated warehouse.Memory storage 109 possesses to be useful on transfers the transfer device of expecting casket, the material casket of having taken in glass substrate is offered move into device LD, and reclaim empty material casket from moving into device LD.Memory storage 109 expects that with sky casket offers conveyance device ULD, and has taken in the material casket of glass substrate from conveyance device ULD.
Move into device LD and take out untreated substrate, the substrate that is taken out is offered Handling device 101a or the 101b that colored pattern forms production line 121 from the material casket that is provided by memory storage 109.
Conveyance device ULD will form substrate reception that production line 121 discharged in the material casket from colored pattern, and the material casket of having taken in substrate is taken out of memory storage 109.
Colored pattern forms production line 121 to be possessed: handle many treating apparatus being provided with side by side, and many Handling device 101a～108b at each of photolithographic each manufacturing process.In present embodiment, in order to carry out the processing of photolithographic main production process (cleaning, coating, exposure, video picture and baking), two treating apparatus respectively are set, i.e. cleaning device 110a and 110b, applying device 111a and 111b, exposure device 112a and 112b, display 113a and 113b and apparatus for baking 114a and 114b in each manufacturing process.
Each treating apparatus is can suitably switch and carry out the above colored pattern of two kinds of colors to form the device of handling.For example, each applying device 111a and 111b possess at least two applying mechanisms to the agent of substrate surface coating photoresistance are arranged, and can be formed at the color of colored pattern basically, switch employed applying mechanism, and separately apply the different photoresist of color.And exposure device 112a and 112b possess switching mechanism are arranged, the color of the colored pattern that it should form, and the configuration of switching light shield itself or light shield.
Handling device 101～108b connects between each treating apparatus, and will utilize each treating apparatus and the substrate that applies processing to ensuing treating apparatus or testing fixture, conveyance device ULD carrying.The carrying destination of substrate is to differentiate the processing that next should carry out by each Handling device according to the colored pattern on the substrate to determine.In Fig. 1, though (for example show the Handling device that is provided with corresponding to each treating apparatus distinctively, Handling device 101a, 101b) and to the shared Handling device of the treating apparatus of same manufacturing process (for example, Handling device 103), but the mode to Handling device 101～108b does not limit especially, but whether arbitrary decision is with commonization of Handling device.
In addition, in the present invention, though the formation order to versicolor colored pattern does not limit especially, but for the purpose of simplifying the description, in following illustrated example, the formation of its colored pattern is according to black in proper order, red, green and blue order, use cleaning device 110a again, applying device 111a, exposure device 112a, display 113a and apparatus for baking 114a (adding towards the device of the oblique line of bottom right) deceive and the colored pattern of red these two kinds of colors forms processing, use cleaning device 110b, applying device 111b, exposure device 112b, display 113b and apparatus for baking 114b (additional device towards upper right oblique line) carry out green and blue colored pattern and form processing.
Snubber assembly 122a and 122b are connected with Handling device 108a, are the devices that temporarily is stored in the substrate of being brought on the carrying path of Handling device 108a.Snubber assembly 122a and 122b are to use in order to be adjusted at buffering that colored pattern forms the order of the substrate that flows in the production line 121 or number etc., to arrange processing, and its details is with aftermentioned.
Except each above-mentioned device, on the carrying path between applying device 111a and 111b and exposure device 112a and the 112b, also be provided with in order to check testing fixture 115a and 115b on the uneven line of film or coating.And, on the carrying path between apparatus for baking 114a and 114b and the conveyance device ULD, testing fixture 116 on the line of checking formed colored pattern is set.
And, at Handling device 103, connecting and extract testing fixture 117, a part of substrate of its extraction and the coated photoresist of inspection is sent the substrate after checking back to Handling device 103.Similarly, at Handling device 106, connect and extract testing fixture 118, a part of substrate after its extraction and inspection video picture are handled, send the substrate after checking back to Handling device 106, and, connect and extract testing fixture 119 and 120 at Handling device 108b, its extraction and inspection have formed a part of substrate of the colored pattern of whole colors, send the substrate after checking back to Handling device 108b.In addition, the configurable optional position on production line of these testing fixtures, also configurable in position in addition shown in Figure 1.
At this, illustrate that the colored pattern that is undertaken by colored pattern formation production line 121 forms buffering, the arrangement processing of handling and using snubber assembly 122a and 122b.
Colored pattern form production line 121 be make substrate in the processing be recycled to by move into form the colored pattern of whole 4 kinds of colors on the input substrate of device LD till, the substrate that forms the colored pattern of whole 4 kinds of colors is discharged to conveyance device ULD.
In the present embodiment, whether provide the substrate of having handled by apparatus for baking 114a and 114b to treating apparatus again by Handling device 107, Handling device 108a and 108b control.More particularly, the board carrying of colored pattern that Handling device 107 will be carries out having formed in the substrate of baking processing two kinds of colors or 3 kinds of colors by apparatus for baking 114a and 114b is to Handling device 108a, and the board carrying of colored pattern that will form a kind of color or whole 4 kinds of colors via testing fixture 116 is to Handling device 108b.The board carrying that Handling device 108a will be brought from Handling device 107 is to Handling device 101b.On the other hand, Handling device 108b will form the board carrying of colored pattern of a kind of color to Handling device 101a, and the board carrying of colored pattern that will form whole 4 kinds of colors is to conveyance device ULD.And Handling device 108a and 108b also will be judged as the board carrying of defective products to conveyance device ULD at arbitrary testing fixture.
To as follows by the concrete carrying path till moving into the colored pattern that the input substrate of device LD forms the 1st kind of color～4th kind of color.
(colored pattern of first kind of color (deceiving) forms and handles)
As follows by moving into device LD to the carrying path of the input substrate of Handling device 101a.
Carrying path 1
Move into device LD-Handling device 101a-cleaning device 110a-Handling device 102a-applying device 111a-Handling device 103-, (extracting testing fixture 117-Handling device 103)-testing fixture 115a-Handling device 104-exposure device 112a-Handling device 105-display 113a-Handling device 106-, (extracting testing fixture 118-Handling device 106)-apparatus for baking 114a-Handling device 107-testing fixture 116-Handling device 108b-, (extract testing fixture 119 or extract testing fixture 120-Handling device 108b)-Handling device 101a
Process at this carrying path 1 carrying substrate applies processing by each treating apparatus to substrate, and forms the colored pattern (black matrix") of first kind of color on the surface of substrate.The substrate that will normally form the colored pattern of first kind of color via Handling device 107 and Handling device 108b is transported to Handling device 101 once more.
(colored pattern of second kind of color (red) forms and handles)
As follows by Handling device 108b to the carrying path of the input substrate of Handling device 101a.
Carrying path 2
Handling device 101a-cleaning device 110a-Handling device 102a-applying device 111a-Handling device 103-(extracting testing fixture 117-Handling device 103)-testing fixture 115a-Handling device 104-exposure device 112a-Handling device 105-display 113a-Handling device 106-(extracting testing fixture 118-Handling device 106)-apparatus for baking 114a-Handling device 107-testing fixture 116-Handling device 108a-Handling device 101b.
Substrate is implemented the processing that device carried out that utilizes in each processing procedure to substrate in the process in the above-mentioned carrying of carrying path 2, to form the colored pattern of second kind of color (red) on the surface of substrate.The substrate of colored pattern that normally is formed with second kind of color is via Handling device 107, Handling device 108a, and is moved to Handling device 101b.
(colored pattern of the third color (green) forms and handles)
As follows by Handling device 108a to the carrying path of the input substrate of Handling device 101b.
Carrying path 3
Handling device 101b-cleaning device 110b-Handling device 102b-applying device 111b-Handling device 103-(extracting testing fixture 117-Handling device 103)-testing fixture 115b-Handling device 104-exposure device 112b-Handling device 105-display 113b-Handling device 106-(extracting testing fixture 118-Handling device 106)-apparatus for baking 114b-Handling device 107-Handling device 108a-Handling device 101b.
In the process of these carrying path 3 carrying substrates, by each treating apparatus substrate is applied processing, and form the colored pattern of the third color (green) on the surface of substrate.The substrate that will normally form the colored pattern of the third color via Handling device 107, Handling device 108a is transported to Handling device 101b once more.
(colored pattern of the 4th kind of color (indigo plant) forms and handles)
As follows by Handling device 108a to the carrying path of the input substrate of Handling device 101b.
Carrying path 4
Handling device 101b-cleaning device 110b-Handling device 102b-applying device 111b-Handling device 103-, (extracting testing fixture 117-Handling device 103)-testing fixture 115b-Handling device 104-exposure device 112b-Handling device 105-display 113b-Handling device 106-, (extracting testing fixture 118-Handling device 106)-apparatus for baking 114b-Handling device 107-testing fixture 116-Handling device 108b, (extract testing fixture 119 or extract testing fixture 120-Handling device 108b)-conveyance device ULD.
In the process of these carrying path 4 carrying substrates, by each treating apparatus substrate is applied processing, and form the colored pattern of the 4th kind of color (indigo plant) on the surface of substrate.To the board carrying of the colored pattern that normally form the 4th kind of color to conveyance device ULD via Handling device 107, testing fixture 116 and Handling device 108b.
Secondly, " buffering, arrangement are handled " of using snubber assembly 122a and 122b to carry out is described.
As above-mentionedly make continuously under the substrate round-robin situation with carrying path 1～4 because various machining states substrate down is present in the production line, so the best carrying state of control basal plate suitably.So,, the snubber assembly 122a and the 122b of temporary transient memory substrate is set along the carrying path of Handling device 108a at the colorized optical filtering slice assembly line of present embodiment.
Fig. 2 is snubber assembly 122a shown in Figure 1 and the synoptic diagram of 122b.
Snubber assembly 122a and 122b are set to the carrying path 123 along Handling device 108a, and control each action by not shown control device.Snubber assembly 122a storage is a plurality of have been formed the substrate of the colored pattern of first kind of color and second kind of color by the device of upstream in the substrate of bringing (dotted line) on carrying path 123, and, take out substrate and the device downstream stored and discharge.Snubber assembly 122b stores a plurality of substrates that formed the colored pattern of first kind of color～the third color in carrying path 123 in the substrate of bringing similarly, takes out substrate and the device downstream stored and discharges.
Colored pattern forms production line 121 by discharging substrate (following these are generically and collectively referred to as " buffering (buffering) ", and the substrate of the processing of the substrate of the processing that needs the third color and the 4th kind of color of needs alternately is provided to Handling device 101b to snubber assembly 122a and 122b memory substrate and from snubber assembly 122a and 122b.And, colored pattern forms production line 121 by cushioning, and will need the third color processing substrate to Handling device 101b provide at interval and the interval that provides to Handling device 101b of the substrate of the processing of the 4th kind of color of needs is controlled to be more than the set time separately.In addition, colored pattern forms production line 121 under the situation that does not need to cushion, and the substrate of being carried by Handling device 107 is directly passed through towards the device in downstream.
Fig. 3 is the process flow diagram of the control and treatment of expression snubber assembly 122a shown in Figure 2.In addition, snubber assembly 122a is the isolated plant of substrate that has formed the colored pattern of second kind of color or the third color.
Below, for convenience of explanation, the substrate that forms the colored pattern of first kind of color and second kind of color is called " two kinds colors form substrate ", and the substrate that will form the colored pattern of first kind of color～the third color is called " three kinds of colors form substrate ".
In step S101, judge whether bring substrate by the device of upstream.Under the situation of being brought substrate by the device of upstream (is Yes at step S101), step 8102 is transferred in the control of snubber assembly 122a, and (is No at step S101) transfers to step S112 under situation in addition.
In step S102, judge whether the substrate of being brought is that three kinds of colors form substrate.At the substrate of being brought is that three kinds of colors form under the situation of substrates (is Yes at step S102), and step S103 is transferred in control, (being No in step S102) under the situation in addition, transfers to step S109.
In step S103, differentiate whether the substrate (making by the substrate of snubber assembly 122a or the substrate of being discharged from snubber assembly 122a) that was transported to the device in downstream last time is that two kinds of colors form substrate.The substrate that was transported to the device in downstream in last time is that two kinds of colors form under the situation of substrates (is Yes at step S103), and step S104 is transferred in control, and (is Yes at step S103) transfers to step S106 under situation in addition.
The substrate for the device that was transported to the downstream last time that carries out the processing of step S104 is that two kinds of colors form substrates, brings the situation that three kinds of colors form substrates from the device of upstream.In step S104, snubber assembly 122a directly passes through the substrate of being brought, and step S105 is transferred in control.
In step S105, under the situation of the substrate that the continuation supervision is brought from the device of upstream (is No at step S105), turn back to step S101, under situation in addition (is Yes at step S105), finishing control is handled.
The substrate for being transported to the device in downstream recently that carries out the control of step S106 is that three kinds of colors form substrate, brings the situation that three kinds of colors form substrate from the device of upstream.In step S106, judge that whether storing two kinds of colors at snubber assembly 122a forms substrate.In the situation (is Yes at step S106) of two kinds of colors formation of snubber assembly 122a storage substrate, step S107 is transferred in control, and (is No at step S106) transfers to step S108 under situation in addition.
In step S107, snubber assembly 122a forms substrate with two kinds of colors of being stored and forms the more Zao device discharge downstream of substrate than three kinds of colors bringing from the upstream.As a result, two kinds of colors of being discharged form that three kinds of colors that substrates are inserted in already carrying form substrates and three kinds of colors bringing from the upstream form between the substrates, two kinds of colors are formed substrates and three kinds of colors form the device that substrate alternately offers the downstream.Then, step S105 is transferred in control.
In step S108, snubber assembly 122a directly passes through the substrate of being brought, and transfers to step S105.
Carry out step S109 control for bring the situation that two kinds of colors form substrates from the device of upstream.In step S109, judge whether discharged the set time of having passed through defined behind two kinds of colors formation substrates last time.Under the situation of passing through the set time (is Yes at step S109), step S110 is transferred in control, and (is No at step S109) transfers to step S111 under situation in addition.
In step S110, snubber assembly 122a directly passes through the substrate of being brought, and transfers to step S105.
In step S111, two kinds of colors that snubber assembly 122a storage is brought from the upstream form substrate, and transfer to step S105.
The control of step S112 is not carry out during the device carrying substrate of upstream.In step S112, judge that whether storing two kinds of colors at snubber assembly 122a forms substrate.Store two kinds of colors at snubber assembly 122a and form under the situation of substrates (is Yes at step S112), step S113 is transferred in control, and (is No at step S112) turns back to step S101 under situation in addition.
In step S113, judge whether discharged the set time of having passed through defined behind two kinds of colors formation substrates last time.Under the situation of passing through the stipulated time (is Yes at step S113), step S114 is transferred in control, and (is No at step S113) turns back to step S101 under situation in addition.
In step S114, snubber assembly 122a device is downstream discharged two kinds of colors of being stored and is formed substrate.Then, step S105 is transferred in control.
In addition, the control flow of snubber assembly 122b shown in Figure 2 (three kinds of colors form the snubber assembly that substrate is used) is equivalent to that two kinds of colors in the control flow of Fig. 3 form substrates and three kinds of colors form the substrate swappers.At this, omit explanation.
Colored pattern forms production line 121 according to above-mentioned control, alternately provides two kinds of colors to form substrates and three kinds of colors form substrates to Handling device 101b, and, the input of the substrate of same kind is made as more than the set time at interval.As a result, can not can destroy the flow equilibrium of the various substrates in the production line, and the balance of the number of substrate in the different processing of the state in the processing of can not destroying, substrate is circulated.And, in treating apparatus, when the colored pattern of same color forms manufacturing process's continuation, have slack-off device of processing cycle.For example, because applying device 111a and 111b need warming-up exercise to a coating of substrates photoresist at every turn, therefore under the situation of the same color photoresist of Yi Yitai applying device continuously coating, the cycle only increases the required time of preparation work.So, as present embodiment, form substrates and alternately offer applying device 111b by two kinds of colors being formed substrates and three kinds of colors, can avoid the processing of same color continuous, thereby can prevent the delay handled.
And, to the processing of first kind of color and second kind of color shared treating apparatus (cleaning device 110a, applying device 111a, exposure device 112a, display 113a and apparatus for baking 114a), move into device LD and provide untreated substrate according to the fixing cycle, Handling device 108b is inserted between the continuous untreatment base substrate of the colored pattern that forms first kind of color.By carrying out this carrying control, the same with the situation of using snubber assembly 122a and the arrangement of 122b to handle, owing to alternately provide the substrate of the processing that needs first kind of color and the substrate of the processing that needs second kind of color according to fixed intervals to each treating apparatus, therefore can prevent to carry out continuously the increase in caused processing cycle with a kind of processing of color.
As described shown in the explanation,, constitute colored pattern with the treating apparatus of two systems of action arranged side by side and form production line 121, substrate is circulated in production line, form the colored pattern of 4 kinds of colors thus at the colorized optical filtering slice assembly line of present embodiment.According to the structure of this production line and carrying control, and compare at the situation of shades of colour set handling production line, can significantly reduce the required space of colored filter line configuration.Though in a part of devices such as applying device or exposure device, must switch materials used or employed light shield etc. accordingly with dual-purpose when forming the colored pattern of two kinds of colors, but, therefore can reduce the required expense of formation colorized optical filtering slice assembly line owing to can reduce required device number itself.
In addition, though in the present embodiment, explanation is in each manufacturing process, the colored pattern that carries out first kind of color and second kind of color at a treating apparatus (adding towards the device of the oblique line of bottom right) forms, and the example that carries out the colored pattern formation of the third color and the 4th kind of color at another treating apparatus (adding the device towards upper right oblique line), but the appointment to the color of each treating apparatus is not limited thereto example.For example, the colored pattern that also can carry out first kind of color and the third color at the treating apparatus of additional oblique line towards the bottom right forms, and adding towards the treating apparatus second kind of color of formation of upper right oblique line and the colored pattern of the 4th kind of color etc., a treating apparatus in each manufacturing process is specified any two kinds of colors, and another treating apparatus is specified two kinds of remaining colors.In the case, also regardless of versicolor appointment to treating apparatus, for the order according to first kind of color～4th kind of color forms colored pattern, each Handling device distributes the carrying destination of substrate, thereby, can have and the illustrated in the above-described embodiment same effect of colorized optical filtering slice assembly line.
(second embodiment)
Fig. 4 represents the synoptic diagram of a part of the colorized optical filtering slice assembly line of second embodiment of the present invention.
The colorized optical filtering slice assembly line of present embodiment and the difference of first embodiment are: will be arranged at colored pattern as 3 exposure device 112a～112c of the treating apparatus of the processing of the manufacturing process that exposes and form production line 121.
In the case, the processing by to each indication different colours of 3 exposure device 112a～112c comes concurrently the photoresist of 3 kinds of colors is exposed, and seeks to improve the manufacturing efficient of colored filter.For example, can expose to the substrate of the photoresist that applies first kind of color (black matrix") with exposure device 112a, with exposure device 112b the substrate of the photoresist that applies second kind of color and the third color (red and green) is exposed, the substrate of the photoresist that applies the 4th kind of color (blueness) is exposed with exposure device 112c.Perhaps, also can be with any device of exposure device 112a～112c kind as preparation.Which will to platform exposure device carrying Handling device 104 determine from the substrate that testing fixture 115a and 115b are discharged corresponding to the colored pattern on the substrate of carrying.
Though in the example of Fig. 4, the colored pattern that expression only is provided with 3 exposure devices forms the structure example of production line 121, also can cleaning, coating, video picture and toast in the platform number for the treatment of apparatus of part or all manufacturing process be set to 3.But,, cause the occupied area of colorized optical filtering slice assembly line and cost to increase because the platform number of each treating apparatus increases, therefore preferably make the cycle the treating apparatus of long manufacturing process increase, and make the cycle relatively the treating apparatus of short manufacturing process reduce.
In the present embodiment, make the substrate circulation till the colored pattern of whole 4 kinds of colors forms because colored pattern forms production line 121, therefore with the production line in the past of shades of colour set handling device is compared, can reduce the platform number of required treating apparatus.So, the colorized optical filtering slice assembly line of present embodiment is also the same with first embodiment, with the situation of shades of colour set handling production line is compared, can significantly reduce the required space of configuration of colorized optical filtering slice assembly line, can reduce simultaneously and constitute the required expense of colorized optical filtering slice assembly line.
In addition, in above-mentioned each embodiment, colored pattern is defined as according to example black, that the order of red, green, blue forms describes, but the formation of these colors can be random order in proper order.
And,, also snubber assembly can be arranged at other any Handling device though in above-mentioned each embodiment, snubber assembly 122a and 122b are arranged at Handling device 108a.
In addition, though in above-mentioned each embodiment, illustrating to possess in photolithographic each manufacturing process has the colorized optical filtering of two or 3 treating apparatus slice assembly line, and the treating apparatus of preparation also can further be set.Replacing original treating apparatus, and making under the situation for the treatment of apparatus operation of preparation, as long as the carrying path of suitably switching each Handling device.
In addition, though in above-mentioned each embodiment, example to the colored filter that is manufactured on the colored pattern that has black, red, green and blue these 4 kinds of colors on the substrate describes, but the colorized optical filtering slice assembly line of this each embodiment also can be applicable to the manufacturing at the colored filter that has 5 kinds of colored patterns more than the color on the substrate.In the case, also make and to form two kinds of colored patterns more than the color by at least one treating apparatus in colored pattern forms production line, to till the colored pattern that is formed at needed chromatic number on the substrate, substrate is circulated in colored pattern forms production line, discharge the substrate that has formed required colored pattern to conveyance device and get final product.
And, under the situation of the colored pattern that forms black matrix" (deceiving), red, green, blue and yellow these 5 kinds of colors on the substrate, also can only form black matrix", and form the colored pattern of red, green, blue and yellow these 4 kinds of colors at the colorized optical filtering slice assembly line of above-mentioned each embodiment at other device.
(the 3rd embodiment)
Fig. 5 represents the synoptic diagram of a part of the colorized optical filtering slice assembly line of the 3rd embodiment of the present invention.In Fig. 5, only represent to be used to utilize photoetching process to form the process for producing line of the colored pattern of 4 kinds of colors in the colored filter manufacturing process.And, the arrow of Fig. 5 represent each the device between annexation and the carrying direction of substrate.
The colorized optical filtering slice assembly line 201 of present embodiment is to utilize photoetching process to form the colored pattern of multiple color on substrate, form in order to carry out two kinds of colored patterns more than the color concurrently, two or 3 treating apparatus are set in each manufacturing process side by side.
In more detail, colorized optical filtering slice assembly line 201 possesses memory storage 202, moves into device 203a and 203b, cleaning device 204a and 204b, applying device 205a and 205b, exposure device 206a～206c, display 207a～207c, apparatus for baking 208a～208c, conveyance device 209a～209c, the Handling device 211～216 that connects each device and snubber assembly 221～224.And,, testing fixture 217 and 218 on the line is set at the back segment of applying device 205a and 205c and the back segment of display 207a～207c.And, connect testing fixture 218 and repair apparatus 220 at Handling device 206.
Memory storage 202 is that a plurality of material caskets of glass substrate and the device of a plurality of empty material caskets have been taken in storage, for example is equivalent to automated warehouse.Memory storage 202 possesses to be useful on transfers the transfer device of expecting casket, the material casket of having taken in glass substrate is provided to moves into device 203a and 203b, and reclaim empty material casket from moving into device 203a and 203b.And memory storage 202 expects that with sky casket is provided to conveyance device 209a～209c, has taken in the material casket of glass substrate from conveyance device 209a～209c.
Move into device 203a and 203b and take out untreated substrate, the substrate that is taken out is provided to Handling device 211 from the material casket that is provided by memory storage 202.
Cleaning device 204a and 204b, applying device 205a and 205b, exposure device 206a～206c, display 207a～207c, apparatus for baking 208a～208c and conveyance device 209a～209c are the devices (each device is not distinguished, be referred to as " treating apparatus ") that carries out the processing of photolithographic cleaning, coating, exposure, video picture and back each manufacturing process of toasting.Each treating apparatus is can suitably switch and carry out the above colored pattern of two kinds of colors to form the device of handling.For example, each applying device 205a and 205b possess two applying mechanisms to the agent of substrate surface coating photoresistance are arranged at least, can switch employed applying mechanism corresponding to the color that is formed on the colored pattern on the substrate, and separately apply the different photoresist of color.And exposure device 206a～206c possesses switching mechanism is arranged, and it is corresponding to the color of the colored pattern that forms, the configuration of switching light shield itself or light shield.
To each treating apparatus, can specify the colored pattern of random color to form processing.As an example, also can deceive (black matrix") and red colored pattern formation processing, and, carry out green and blue colored pattern and form processing at cleaning device 204a and applying device 205a at cleaning device 204b and applying device 205b.And, 3 treating apparatus are set (for example a manufacturing process, under the situation of exposure device 206a～206c), also can be with 1 as preparation, the colored pattern that exposure device 206a is deceived forms to be handled, carry out red and green colored pattern with exposure device 206b and form processing, carry out blue colored pattern with exposure device 206c and form processing etc., and 3 treating apparatus are suitably distributed in the processing of 4 kinds of colors.
Handling device 211～216 connects between each treating apparatus, and utilizes each treating apparatus to be applied the substrate of processing by each treating apparatus to ensuing treating apparatus or testing fixture, conveyance device 209a～209c carrying.The carrying destination of substrate is to differentiate the processing that next should carry out by each Handling device according to the colored pattern on the substrate to determine.The substrate and the defective products that have formed the colored pattern of whole 4 kinds of colors in the substrate that Handling device 216 will be discharged by apparatus for baking 208a～208c are transported to conveyance device 209a～209c, and to Handling device 201 other substrates of carrying.By carrying out this carrying control,,, form Yi Bian carry out versicolor colored pattern in order Yi Bian substrate is circulated in production line to till having formed the colored pattern of whole 4 kinds of colors on the substrate.
The substrate reception that conveyance device 209a～209c will be discharged by Handling device 216 is taken out of memory storage 202 in the material casket with the material casket of having taken in substrate.
Snubber assembly 221,222,223 and 224 is connected with Handling device 212,213,215 and 216 respectively, is the device that temporarily is stored in the substrate of being brought on the carrying path.Snubber assembly 221～224th, for the delay of the deviation in processing cycle of absorbing each treating apparatus or the substrate that flows in production line, the operational efficiency that improves whole production line is provided with.
Fig. 6 represents the calcspar of structure of the production line control system of the 3rd embodiment of the present invention.
Production line control system 230 by control device 231, and via the networking connect into can and many production lines of control device 231 two-way communications in install 232a～232n and constituted.Device 232a～232n is a device of not distinguishing each device of being equivalent to constitute colorized optical filtering slice assembly line 201 shown in Figure 5 (treating apparatus, Handling device, move into device, conveyance device, snubber assembly, testing fixture and repair apparatus) in the production line, is used as the client terminal machine (client terminal) that production line control system 230 is comprised.In addition, in Fig. 6,, only represent the part of device of the colorized optical filtering slice assembly line 201 of pie graph 5, and omit the record of remaining device for the ease of diagram.
Fig. 7 represents the functional block diagram of the details of production line control system shown in Figure 6.In Fig. 7, for the purpose of simplifying the description, only represent device 232a in 1 production line.
Device 232a comprises monitor message obtaining section 233, operation control part 234, is equivalent to install in the production line operating member 235 and the network interface (hereinafter referred to as " networking I/F ") 236 of the mechanism's part in the 232a in the production line.
Monitor message obtaining section 233 obtains the monitor message Imon of the operation conditions of device 232a in the expression production line, sends obtained monitor message Imon via networking I/F236 to control device 231.Monitor message Imon comprises and is illustrated in having or not or the information more than a kind of the running status of device 232a itself in hold-up time, production line of the substrate in the device 232a in the production line.The kind of the information that monitor message Imon is contained is different because of the kind (treating apparatus, Handling device, snubber assembly etc.) of device 232a in the production line.In addition, the back will describe the details of monitor message Imon in detail.
Operation control part 234 is according to from the indication of control device 231 and control action portion 235, thus the action of device 232a itself in the control production line.More particularly, operation control part 234 is accepted to stop discharge by the substrate that control device 231 is issued and is indicated Csus and releasing to stop to indicate Cres, give corresponding to the control of the indication of being received indication Cxtrl to operating member 235, control is from the discharge of the substrate of device 232a in the production line.
And device 232a is under the situation of snubber assembly in production line, and the buffering of accepting to be issued by control device 231 is indicated Cbuf, begins the storage action (action of giving) of indicated substrate.
In addition, device 232b～232n is the same with the structure of device 232a in the production line in other the production line.
On the other hand, control device 231 comprises storage part 237, configuration part 238, monitoring unit 239 and networking I/F240.
Storage part 237 realized by mediums such as hard disc or non-volatility memorizers, and the discharge condition that stops of the defined substrate of each kind of storage information that monitor message Imon is comprised and remove the information of device in stop condition, specific at least one the production line that becomes monitored object (following device in the production line of monitored object is called " monitored object device ") and the information of the device (hereinafter referred to as " control object apparatus ") that the specific device that is arranged in the upstream side of monitored object device is answered the discharge of control basal plate.When stopping the discharge condition and be indicating making substrate from the control object apparatus of the upstream that is positioned at the monitored object device to stop to discharge, the information of the operation conditions that the monitored object device should satisfy, removing stop condition is the information of the operation conditions that the monitored object device should satisfy when indicating to make the control object apparatus that stops to discharge in the substrate to begin to discharge substrate again.
Configuration part 238 is used to set each information that storage part 237 is stored.Configuration part 238 will be stored in the storage part 237 from the set information Iset that user interfaces such as keyboard or mouse are imported.
Monitoring unit 239 is according to the monitor message Imon that is notified by the monitor message obtaining section 233 of installing 232a～232n in the production line, the operation conditions of monitor monitors object apparatus.More particularly, monitoring unit 239 obtains 238 stored setting information Iset of storage part, and particular monitored object apparatus and control object apparatus obtain the discharge condition that stops that this monitored object device is set simultaneously and remove stop condition.The information of each monitor item that monitoring unit 239 more notified monitor message Imon are comprised and 237 stored setting information Iset of storage part are defined to be stopped the discharge condition and removes stop condition.Satisfy at monitor message Imon and to stop under the situation of the condition of discharging, monitoring unit 239 is via networking I/F240 and 236 and stop to discharge indication Csus to what the operation control part 234 of control object apparatus sent substrates.On the other hand, satisfy to remove at monitor message Imon under the situation of stop condition, monitoring unit 239 is via networking I/F240 and 236 and the releasing that the operation control part 234 of control object apparatus sends substrates is stopped to indicate Cres.
And monitoring unit 239 also can be indicated Cbus to the buffering that the snubber assembly distribution storage of the upstream side that is positioned at the monitored object device is positioned at the substrate specific machining state under together with the distribution of propose discharging indication Csus.This buffering indication Cbuf is for example under the situation that a treating apparatus of manufacturing process breaks down, and sends in order to prevent that substrate is trapped on the production line in the processing that the treating apparatus of this fault should be handled.Monitoring unit 239 also can be according to buffering indication Cbuf, the specific substrate that should be stored in snubber assembly.The situation that stops at the recovery of monitored object device of buffering is inferior, makes suitable indication and gets final product.
And, dead band number in the snubber assembly of giving buffering indication Cbuf is few (for example, the situation that the dead band number is littler than set threshold value), and monitoring unit 239 judges that only this snubber assembly can't be stored the situation of being detained substrate fully, and monitoring unit 239 can be to the snubber assembly distribution buffering indication Cbuf of upstream side more.
Below, to the discharge condition that stops of the details of the monitor message Imon of 231 references of control device of present embodiment, monitor item that control device 231 is monitored and each monitor item and remove stop condition and describe.
＜1, the substrate hold-up time 〉
The substrate hold-up time is meant that same substrate is present in the time of the ad-hoc location in the monitored object device.In order to monitor the substrate hold-up time, the production line control system 230 of present embodiment uses the substrate position information that is illustrated in the substrate position in the monitored object device.Whether the set position that the substrate position information representation is predesignated in the monitored object device (being set up more than the place) has the information of substrate.Monitoring unit 239, is calculated substrate and is continued to be present in each locational time (substrate hold-up time) according to having or not substrate on each position according to the substrate position information of being notified by monitor message obtaining section 233.
Under with the situation of substrate hold-up time as monitor item, the threshold value of setting the hold-up time is as stopping the discharge condition, set from stop to discharge begin process given time as removing stop condition.
Therefore, monitoring unit 239 surpasses under the situation of the threshold value that sets in the substrate hold-up time that certain monitored object device is calculated, distribution stops to discharge indication Csus to control object apparatus, then, stopping to indicate Cres from stopping to discharge issuing to remove when the distribution of indicating Csus begins to have passed through given time.
By the substrate hold-up time on the supervision ad-hoc location like this, can grasp the initial stage that delay takes place.Therefore, the device of upstream side that can be by making this ad-hoc location stops to discharge the substrate set time, is detained and eliminate in the early stage.
＜2, the dead band number of snubber assembly 〉
The dead band number of snubber assembly is being set employed information under the situation of snubber assembly as the monitored object device.The monitor message obtaining section 233 that is arranged at snubber assembly just can be upgraded the dead band number when storage and discharge substrate, and counts information to the dead band of monitoring unit 239 notice expression dead band numbers.
Under with the situation of dead band number as the supervision number, the lower limit conduct of setting the dead band number stops the discharge condition, and the higher limit of setting dead band number is as removing stop condition.
Therefore, monitoring unit 239 is under the dead band number of certain monitored object snubber assembly becomes situation below the lower limit that sets, and distribution stops to discharge indication Csus to control object apparatus, then, surpass at the dead band number under the situation of the higher limit that sets, distribution is removed and is stopped to indicate Cres.
If according to the dead band number of snubber assembly, promptly the absorption remaining sum of Zhi Liuing is controlled the discharge of the substrate of control object apparatus, can eliminate the delay of substrate by compulsion.If it is carry out this control, then, therefore more effective because also can eliminate can't be by stopping to discharge the delay of the degree that the substrate set time eliminates with control according to substrate hold-up time of this project 1.
＜3, substrate number in the surveillance zone 〉
As mentioned above, in each device, predesignate and to detect a plurality of positions that have or not substrate.Each position can be set in any part of taking out of, move into to treating apparatus or snubber assembly on the carrying path of the part of substrate or the part of handling, snubber assembly inside and Handling device etc. in treating apparatus.Surveillance zone is meant the scope of stipulating according to from the combination of optional a plurality of positions, position that these are predesignated.
For example, in Fig. 5, can be by being chosen in all positions of defineds in Handling device 212, snubber assembly 221, applying device 205a and 205b, testing fixture 217, Handling device 213 and the snubber assembly 222, will be by 2 Z that line surrounded 1Part is set at surveillance zone.In addition, though, the system of selection of position is not particularly limited, can select arbitrarily at the example of this explanation with the combination definition surveillance zone of all positions of defined in the device of configuration continuously.For example, also can only be chosen in the part of the position of defined in each device, or select the not position of direct-connected device simultaneously, define surveillance zone.
In the present embodiment, be present in the substrate number in the surveillance zone that sets by supervision, can realize the FLOW CONTROL of elastic base plate.Surveillance zone can define according to the set information of being imported via configuration part 238, and is stored in storage part 237.
The substrate number is that monitoring unit 239 is calculated according to the substrate position information of being notified by each monitored object device that is contained in surveillance zone in the surveillance zone.
Under the situation of substrate number as monitor item, the conduct of the higher limit of setting substrate number stops the discharge condition in surveillance zone, and the lower limit of setting substrate number is as removing stop condition.
Therefore, monitoring unit 239 substrate number in the surveillance zone that certain surveillance zone is calculated becomes under the situation more than the higher limit that sets, distribution stops to discharge indication Csus to control object apparatus, then, under the situation of substrate number less than the lower limit that sets, distribution is removed and is stopped to indicate Cres in the surveillance zone of being calculated.
If according to the substrate number that flows in surveillance zone, the discharge of the substrate of control control object apparatus then can be eliminated the delay of substrate by compulsion.If it is carry out this control, then, therefore more effective because also can eliminate can't be by stopping to discharge the delay of the degree that the substrate set time eliminates with control according to substrate hold-up time of this project 1.
＜4, the substrate hold-up time in the snubber assembly 〉
The substrate hold-up time is being set snubber assembly as the employed information of the situation of monitored object device in the snubber assembly, and expression is stored in the elapsed time that snubber assembly begins from substrate.Be arranged at each substrate that 233 pairs of the monitor message obtaining sections of snubber assembly are stored and measure hold-up time, and notify monitoring unit 239 as substrate hold-up time information in the snubber assembly the measured time.
In with snubber assembly under the situation of substrate hold-up time as monitor item, the higher limit of setting the hold-up time is as stopping the discharge condition, the substrate hold-up time of monitoring unit 239 in the monitored object snubber assembly becomes under the situation more than the higher limit that sets, and distribution stops to discharge indication Csus to control object apparatus.But,, use the substrate number in the set district that includes snubber assembly as removing stop condition.Below, this point is elaborated.
Fig. 8 represents the synoptic diagram of the part of production line shown in Figure 5.In Fig. 8, be illustrated in the position of defined on the carrying path of Handling device 212 with the triangle mark.And in the example of Fig. 8, imagination monitored object device is a snubber assembly 221, and control object apparatus is the situation of cleaning device 204a.
With reference to Fig. 8 (a), snubber assembly 221 is to be arranged on the carrying path of Handling device 212 in the mode on the line (In-Line), and substrate is discharged in substrate, the carrying path of storing in the mode of FILO (First In Last Out) on the carrying path of Handling device 212.Therefore, snubber assembly 221 is trapped in the snubber assembly 221 till the initial substrate of storing 226 under the state of sky is discharged to other memory substrate.
Monitoring unit 239 hold-up time in the snubber assembly of substrate 226 surpasses under the situation of the higher limit that sets, and distribution stops to discharge indication Csus to cleaning device 204a.Make the control method that begins to discharge from cleaning device 204a substrate again as stop to discharge indication Csus in distribution after, for example, in the moment that the substrate that can consider to be stored snubber assembly 221 in all is discharged from, distribution is removed and is stopped to indicate to cleaning device 204a.
But, shown in Fig. 8 (b), when after snubber assembly 221 becomes sky, beginning to discharge substrate again, since just receive remove the applying device 205a that arrives back segments after stopping to indicate Cres to the substrate 227 of being discharged from cleaning device 204a till time of origin postpone (time lag), therefore cause the operational efficiency reduction of production line.
So, in the present embodiment, consider the substrate of being discharged from the cleaning device 204a of controlling object time to the snubber assembly 221 of back segment, the distribution sequential (timing) that stops to indicate Cres is removed in control.Particularly, in Fig. 8 (c), will be according to n position P of snubber assembly 221 and its upstream side 1～P nThe scope (by 2 scopes that line surrounded) of combination defined be defined as a district Z 2, when being present in this district Z 2In the substrate number become set threshold value when following, 239 pairs of cleaning device 204a distribution of control part releasing stops to indicate Cres.In addition, this district Z 2With surveillance zone similarly, can define according to the set information of being imported via configuration part 238, be stored in the storage part 237.
For example, (Th is at district Z than configurable to remove the threshold value Th that stops to discharge usefulness in setting 2The little value of maximum number M of interior substrate) under the situation, at district Z 2Interior substrate number becomes the 239 distribution releasings of the following moment control part of Th and stops to indicate Cres.Response is removed and is stopped to indicate Cres, and cleaning device 4a begins to discharge substrate again, and substrate is discharged to Handling device 212.
If preestablish the value of threshold value Th, make the substrate 228 of discharging be handled upside down and be about to in-position P in the moment of Fig. 8 (c) 1Before, the hold-up time, the longest substrate 226 was discharged from from snubber assembly 221, shown in Fig. 8 (d), can be not carrying substrate interruptedly, also can improve the operational efficiency of production line.
If the substrate hold-up time of such supervision in snubber assembly, then, therefore can suppress the change in required processing time of each substrate, and improve the quality because the substrate in can preventing to process is stored in more than the interior given time of snubber assembly.
＜5, device operating condition 〉
The device operating condition represents that whether the monitored object device is the information in running well.Monitor message obtaining section 233 for example is the situation in running well and the normal operation information of situation in addition with two-value performance operating member 235 to monitoring unit 239 notices regularly.
To install under the situation of operating condition as monitor item, set of the variation of normal operation information as stopping the discharge condition, and set of the variation of normal operation information as removing stop condition from the value of expression abnomal condition toward the value of expression normal condition from the value of expression normal condition toward the value of expression abnomal condition.
Therefore, monitoring unit 239 is under the situation that certain monitored object device changes toward up-set condition, and distribution stops to discharge indication Csus to control object apparatus, then, recover at the monitored object device under the situation of normal condition, distribution is removed and is stopped to indicate Cres to control object apparatus.
Because the operating condition by such monitoring arrangement, can stop to discharge and becoming the substrate that unusual device should be handled, therefore can prevent and can't in production line, circulate by processed substrate.
In addition, the above-mentioned buffering indication Cbuf that is issued by monitoring unit 239 also can and be put down in writing in this project 1～5 any monitor control combination.By with substrate stop to discharge indication Csus and issue buffering indication Cbuf together, can guarantee the unusual carrying path being detained or installing, and proceed by the performed processing of the device of a part.
Fig. 9 represents the process flow diagram of the control and treatment of being undertaken by monitoring unit shown in Figure 6.
In step S201～S205, whether monitoring unit 239 is judged to satisfy at the defined substrate of each monitor item to stop the discharge condition according to the monitor message of being notified from the monitored object device.In addition, the processing of these steps S201～S205 can be according to carrying out in proper order arbitrarily.239 pairs of monitoring units satisfy the monitor item that substrate stops the condition of discharging, and (flg1～flg5) is set in flag in addition monitor item with 0, and transfers to step S206 to be set in flag with 1.
In step S206, monitoring unit 239 is tried to achieve the logical OR of the flag flg1～flg5 that sets at step S201～S205, and transfers to step S207.
In step S207, whether monitoring unit 239 is judged the logic of being tried to achieve and is 1.In the logic of being tried to achieve be (in step S207, to be Yes) under 1 the situation, transfer to step S208, and, turn back to step S201～S205 in step S207 (being No) under the situation in addition.
In step S208,239 pairs of monitoring units stop to discharge indication with regard to the operation control part 234 distribution substrates of the control object apparatus that the monitored object device sets, and transfer to step S209～S213.
In step S209～S213, whether monitoring unit 239 is judged and is satisfied at the defined releasing stop condition of each monitor item according to the monitor message of being notified from the monitored object device.In addition, the processing of these steps S209～S213 can be carried out according to random order.239 pairs of monitoring units satisfy the monitor item of removing stop conditions, and (flg6～flg10) is set in flag in addition monitor item with 0, transfers to step S214 to be set in flag with 1.
In step S214, monitoring unit 239 is tried to achieve the logical and of the flag flg6～flg10 that sets at step S209～S213, transfers to step S215.
In step S215, monitoring unit 239 judges whether the logic product of being tried to achieve is 1.Be (in step S215, being Yes) under 1 the situation in the logic product of being tried to achieve, transfer to step S216, and, turn back to step S209～S213 in step S215 (being No) under the situation in addition.
In step S216, operation control part 234 distribution of the control object apparatus that 239 pairs of monitoring units set with regard to the monitored object device are removed and are stopped indication, and transfer to step S217.
In step S217, monitoring unit 239 (is being Yes) under the situation that stops to monitor in step S217, and finishing control is handled, and (being No in step S217) under the situation in addition, turns back to step S201～S205.
By controlling like this, any one of a plurality of monitor item satisfied when taking out of stop condition, stop from the control object apparatus discharge substrate of the upstream side that is positioned at the monitored object device, and when all monitor item are satisfied the releasing stop condition, begin again to discharge substrate from control object apparatus.
At this, the object lesson of above-mentioned control and treatment is described.
In Fig. 5, for forming, handles the colored pattern that carries out first kind of color, and imagination is according to the situation of the order carrying untreatment base of " moving into device 201a and 201b-cleaning device 204a-Handling device 202-applying device 205a ".For example, take place to be detained or to install under the unusual situation at applying device 205a (monitored object device), control device 231 (Fig. 6) makes move into the device 201a and 201b and cleaning device 205a (control object apparatus) of the upstream side of applying device 205a stop to discharge substrate, will be stored in snubber assembly 221 at the substrate (discharging and be handled upside down the substrate of device 212 carryings from cleaning device 205a) that applying device 205a should handle to snubber assembly 221 indications simultaneously.If carry out this control, because normal operating applying device 205b is guaranteed to carry the path, the colored pattern that therefore can proceed other color forms to be handled.And, can prevent that the substrate (substrate in the processing that applying device 205a should handle) that can't handle from continuing to flow in production line.
Then, when in eliminations such as the delay of applying device 205a or device are unusual, when satisfying the releasing stop condition of whole monitor item, control device 231 (Fig. 6) stops moving into the device 201a and 201b and cleaning device 205a (control object apparatus) indication releasing of the upstream side of applying device 205a, promptly begins to discharge substrate again.
Though in this object lesson, describe taking place to be detained or to install unusual example at specific treating apparatus, but at the monitored object device is under the situation of other device, or satisfy in other monitor item and to stop under the situation of the condition of discharging the also discharge of the substrate of control object apparatus similarly.
As mentioned above, in the performed control method of the production line control system of present embodiment, control part 239 is obtained the operation conditions of device in each production line, monitor the operation conditions of device in each obtained production line, whether providing monitored object device restricting substrate be provided, again according to result of determination, carry out at least one control object apparatus substrate stop to discharge and removing stop.The discharge of the substrate of a part of device of the upstream side by such control monitored object device, even the different substrate of work in-process state installs in the shared production line on one side, in the production line of the mode that flows, also can suppress the delay of substrate on one side, and increase productivity (throughput).And because by suppressing the delay of substrate, therefore the colored pattern that can prevent certain color can improve the quality of colored filter from beginning to be formed into the increase in the processing time till the end.
And, shown in present embodiment, if the substrate discharge that stops with control object apparatus is indicated, the snubber assembly indication of monitored object upstream side is stored and should then can be continued the processing of monitored object device normal operating device in addition by the substrate of monitored object device processing.
In addition, though in the present embodiment, utilize the computer that device is possessed in the production line, realize the example of monitor message obtaining section and operation control part, but also can use other computer terminals of may command production line inner controller and constitute monitor message obtaining section and operation control part.
(industrial utilize possibility)
The inventive example is as being used in to be manufactured on the production line of employed colored filter in the liquid crystal indicator.

Claims (12)

1. colorized optical filtering slice assembly line, it forms at least 4 kinds of colors in regular turn on substrate colored pattern is characterized in that:
This colorized optical filtering slice assembly line possesses:
The memory storage of memory substrate,
Colored pattern forms production line, comprises: many treating apparatus are provided with side by side for the processing of carrying out photolithographic each manufacturing process; And many Handling devices, connect between this treating apparatus, and according to formed colored pattern on substrate, to set treating apparatus carrying substrate; And in photolithographic each manufacturing process, when forming the colored pattern of two kinds of colors in the shared processor at least one,
Move into device, will move into this colored pattern by the substrate that this memory storage provided and form production line, and
Conveyance device will be taken out of this memory storage from the substrate that this colored pattern formation production line is discharged;
This colored pattern forms production line makes the substrate repetitive cycling to till forming required colored pattern on the substrate, and discharges the substrate that has formed required colored pattern to this conveyance device.
2. colorized optical filtering slice assembly line according to claim 1 is characterized in that:
Also possessing has snubber assembly, temporarily is stored in this colored pattern and forms round-robin substrate in the production line;
This colored pattern forms production line by discharging substrate to this buffer means stores substrate and from this snubber assembly, and to when forming the colored pattern of these two kinds of colors shared treating apparatus the substrate of the colored pattern that should form a kind of color in these two kinds of colors alternately is provided and should forms the substrate of the colored pattern of the another kind of color in these two kinds of colors.
3. production line control system, its control colorized optical filtering slice assembly line, and this colorized optical filtering slice assembly line comprises: many treating apparatus, many Handling devices that connect this treating apparatus and the snubber assemblys of temporarily storing a plurality of substrates, and when forming the colored pattern of multiple color shared this treating apparatus and this Handling device, it is characterized in that:
This production line control system possesses:
The monitor message obtaining section obtains monitor message, and this monitor message is represented this treating apparatus, this Handling device and this snubber assembly operation conditions separately;
Operation control part is controlled the action of this treating apparatus, this Handling device and this snubber assembly; And
Monitoring unit, according to the monitor message of being notified by this monitor message obtaining section, the operation conditions of monitor monitors object apparatus, and this operation control part indicated: stop to discharge substrate and releasing stops from least one table apparatus of the upstream side that is positioned at the monitored object device.
4. production line control system according to claim 3 is characterized in that:
This monitor message includes the substrate position information that is illustrated in the substrate position in each device;
This monitoring unit is according to the hold-up time of the substrate in the substrate position information calculations monitored object device of being notified, and the hold-up time calculated become under the situation more than the set threshold value indication this stops to discharge judging, stop through this releasing of indication behind the given time in the indication that stops to discharge from this.
5. production line control system according to claim 3 is characterized in that:
This monitor message includes the dead band of the dead band number of representing this snubber assembly and counts information;
This monitoring unit is counted information according to the dead band of being notified, and this stops to discharge to become under the situation below the set lower limit indication at the dead band number of the snubber assembly that should monitor, this releasing of indication stops under the situation of set higher limit and surpass at the dead band number.
6. production line control system according to claim 3 is characterized in that:
This monitor message includes the substrate position information that is illustrated in the substrate position in each device;
This monitoring unit will be defined as surveillance zone from the combination of selected a plurality of positions, a plurality of position of being predesignated in this colorized optical filtering slice assembly line, and calculate substrate number in this surveillance zone according to the substrate position information of being notified, this stops to discharge to become under the situation more than the set higher limit indication in the substrate number of being calculated, and this releasing of indication stops under the substrate number of being calculated becomes less than the situation of set lower limit.
7. production line control system according to claim 3 is characterized in that:
This monitor message includes hold-up time information in the snubber assembly, the hold-up time in the snubber assembly of each substrate of being stored in its expression snubber assembly;
This monitoring unit is according to hold-up time information in the snubber assembly of being notified, the hold-up time of the substrate in the snubber assembly that should monitor becomes under the situation more than the set higher limit indication, and this stops to discharge, and this releasing of indication stops under situation about being become by the substrate number in the district of a plurality of positions defined of snubber assembly that should monitor and upstream side thereof below the set threshold value.
8. production line control system according to claim 3 is characterized in that:
Whether this monitor message includes each device of expression is normal operating normal operation information;
This monitoring unit is indicated this to stop to discharge in the running status of monitored object device from normally becoming, and is indicated this releasing to stop under the normal situation from abnormal restoring in this running status according to the normal operation information of being notified under the unusual situation.
9. according to any described production line control system in the claim 3 to 8, it is characterized in that:
This monitoring unit further should be by the substrate of monitored object device processing to the snubber assembly indication storage of monitored object upstream side under this situation that stops to discharge of indication.
10. according to any described production line control system in the claim 3 to 9, it is characterized in that:
Also possess:
Storage part, storage: be contained at each that defined substrate stops the discharge condition and removes stop condition in the information of this monitor message, the information of specific at least one monitored object device and the specific information of device that is positioned at the upstream side of this monitored object device and answers the discharge of control basal plate, and
The configuration part is used to set this storage part institute canned data;
This comparative result that stops the discharge condition and remove stop condition that this monitoring unit is stored according to this monitor message of being notified and this storage part determines that this stops to discharge and this releasing stops.
11. production line control method, its control colorized optical filtering slice assembly line, this colorized optical filtering slice assembly line comprises: many treating apparatus, many Handling devices that connect this treating apparatus and the snubber assemblys of temporarily storing a plurality of substrates, and when forming the colored pattern of multiple color shared this treating apparatus and this Handling device, it is characterized in that:
This production line control method comprises following steps:
Obtain this treating apparatus, this Handling device and this snubber assembly operation conditions separately;
Monitor the operation conditions of each obtained device, and judge whether to limit providing the substrate of monitored object device;
According to result of determination, make at least one table apparatus of the upstream side of this monitored object device stop to discharge substrate and releasing stops.
12. a colorized optical filtering slice assembly line, the colored pattern of the multiple color of formation on substrate is characterized in that:
This colorized optical filtering slice assembly line possesses:
Treating apparatus carries out the processing of photolithographic each manufacturing process, and is common to the colored pattern that forms multiple color,
Many Handling devices connect this treating apparatus, and are common to the colored pattern that forms multiple color,
The snubber assembly of a plurality of substrates of temporary transient storage, and
Control device is controlled each this treating apparatus, this Handling device and this snubber assembly;
Each this treating apparatus, this Handling device and this snubber assembly comprise:
The monitor message obtaining section obtains the monitor message of representing operation conditions, and
Operation control part is according to the indication from this control device, control action;
This control device is according to the monitor message that is sent from this monitor message obtaining section, the operation conditions of monitor monitors object apparatus, and discharge and the releasing that the operation control part indication of at least one table apparatus of monitored object upstream side stops substrate being stopped.
CN201080003197.4A 2009-01-16 2010-01-15 Color filter production line, line control system, and line control method Expired - Fee Related CN102216815B (en)

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CN106249452A (en) * 2016-10-11 2016-12-21 武汉华星光电技术有限公司 The manufacture method of a kind of CF substrate and UV solidification equipment, CF substrate production line

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JP2001206543A (en) * 2000-01-31 2001-07-31 Mitsubishi Electric Corp Automatic sheet processing line
JP3756402B2 (en) * 2000-12-08 2006-03-15 富士写真フイルム株式会社 Substrate transfer apparatus and method
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CN106249452A (en) * 2016-10-11 2016-12-21 武汉华星光电技术有限公司 The manufacture method of a kind of CF substrate and UV solidification equipment, CF substrate production line

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