KR100362701B1 - automated remote process control system for step control and control method thereof - Google Patents

Abstract

The host of the automated remote process control system disclosed has changeable step control information. Prior to each step of the process, the online server receives the step control information from the host to set the process conditions of the process equipment. When the process equipment completes the process according to the set process condition, the online server reflects the current process progress result and changes the process condition information of the previous step or the later step as necessary. The operator can remotely control step-by-step process progress by changing the host's step control information using the user interface.

Description

Automated remote process control system for step control and control method

The present invention relates to a process control system for controlling a manufacturing process, and in particular, each step process in a manufacturing process in which a plurality of manufacturing processes are performed step by step, such as a manufacturing process of a semiconductor device or a manufacturing process of a liquid crystal display device. The present invention relates to an automated remote process control system and a method of controlling the same, which can be controlled to promote product production efficiency.

The manufacturing process for producing semiconductor devices or liquid crystal display devices consists of many different processes. For example, various processes such as doping, diffusion, thermal oxidation, chemical vapor deposition, dry / wet etching, exposure, etc. have. These various processes take place on wafers or glass and are stepped in process equipment located along the manufacturing line.

As related technologies for more effectively controlling the manufacturing process of semiconductor devices or liquid crystal display devices, U.S. Patent No. 5,845,105 issued to Kunikiyo, et al. Method of simulating semiconductor manufacture with process functions according to user application, "US Patent 5,375,061" Manufacturing for semiconductor devices, issued to Hara, etal., December 20, 1994. management and apparatus for a semiconductor device ", US Patent 5,828,989 issued to Zvonar, et al, October 27, 1998" Semiconductor manufacturing system having a bar-code interface) ".

Kunikiyo '105 discloses a technique for manufacturing semiconductor devices according to optimized process parameters. Hara '061 discloses a technique using production process progress information in a production system using a plurality of process equipment for producing a semiconductor device. Zvona '989 discloses a technique for minimizing or reducing problems associated with reprogramming of various lots using a barcode interface.

In general, the product (wafer, glass) that is put into the manufacturing line is contained in a cassette in a lot (lot) to move the manufacturing line according to a predetermined process sequence. There are cases where special products with non-normal processes are introduced between products with regular processes. This particular product will, for example, monitor the operational status of new product development or process equipment. Non-normal processes for special products may need to be set differently for process equipment, unlike regular processes. Therefore, in the non-normal process for a particular product, the engineer moves with the cassette containing the special product, and manually adjusts the process condition settings of the process equipment as needed before proceeding.

If a cassette containing a product undergoing an irregular process is included in the manufacturing line where the cassettes containing a product undergoing a normal process are processed, the process may be delayed because the setup of each equipment must be performed manually during the process of the irregular process. have. In addition, according to the process progress result generated in each manufacturing process, various tasks such as changing the pre / post process conditions, holding the process progress or reworking the product in which an abnormality has occurred This can be very cumbersome because the engineers or the equipment operator have to deal with it manually. In addition, there is a case where the process conditions of the pre / post process steps need to be changed according to the process progress of one step, in which case the process conditions of the process equipment are manually changed.

Accordingly, an object of the present invention has been proposed to solve the above-mentioned problems, and to provide an automated process control system capable of remote step-by-step control of the process.

Another object of the present invention is to provide an automated process control system capable of remotely controlling a regular process and a non-normal process, respectively.

Another object of the present invention is to provide an automated remote process control system that can automatically set and change the process conditions of the pre / post process step according to the step-by-step process progress results.

1 shows an overall configuration of an automated remote process control system according to a preferred embodiment of the present invention;

FIG. 2 is a diagram illustrating an example of a step control table setting window for setting a step control table stored in the host of FIG. 1; FIG.

3 is a flow chart showing the overall control flow of the automated remote process control system of FIG.

4A-4C are flowcharts illustrating the control flow of the on-line servers of FIG. 1; And

FIG. 5 is a flowchart showing a control flow of the process equipment of FIG. 1.

* Description of the symbols for the main parts of the drawings *

10: host 20, 22, 24: process equipment

30, 32, 34: Online server 40: Communication network

50: file server 60: engineer monitoring system

70, 72: operator interface

According to one aspect of the present invention for achieving the object of the present invention as described above, an automated remote process control system for remotely controlling a plurality of sequential process steps: a step-by-step process condition setting for individual products A host for storing step control information for and controlling the overall operation of the automated remote process control system; A plurality of process equipments for performing a plurality of manufacturing processes for the unit product respectively according to the plurality of process steps; A plurality of online servers connected to the host through a communication network and respectively connected to the process equipment, each of which sets process conditions of the process equipment in accordance with the step control information provided from the host; And an operator interface connected to the host through the communication network, and an operator may remotely control the plurality of process equipments in a process step by using step control information of the host using the operator interface.

In a preferred embodiment of this aspect, the step control information includes a start mode item for setting one of an auto start mode and a manual start mode, wherein the start mode item is selected as an auto start mode among the plurality of process steps. In the set process step, the process starts automatically after setting process conditions of the process equipment by the online server, and in the process step in which the start mode item is set to the manual start mode among the plurality of process steps, After the process condition is set, the process equipment starts the process in response to a process start instruction input which is manually input. In the process step set to the manual start mode, the process condition set in the process equipment may be changed before the process starts. The step control information further includes a hold flag item for holding the product in any one of the plurality of processing steps that the products reach and a rework flag item for indicating a reworkable step of the plurality of processing steps. Include.

The step control information includes a part ID item for distinguishing the individual products, a step ID item for designating any one of the plurality of process steps, and a lot ID item for distinguishing and displaying the products in units of lots; And the step ID information, the step ID item, and the part ID item are identically set and changed in the step control information of the same lot. The lot ID item is divided into a representative lot ID for referring to a lot undergoing a regular process and a specific lot ID for a lot performing a non-normal process. The step control information further includes a user ID item for identifying a person having information changing authority.

The automated remote process control system further includes a file server connected to the communication network, the file server stores process progress result data, and the online server collects, processes and processes the process progress result data of the file server. To store the process progress monitoring information in the host. The automated remote process control system further includes a monitoring system connected to a host via the communication network and for querying process progress monitoring information of the host.

According to another feature of the invention, an automated remote process control system for remotely controlling a plurality of sequential process steps comprises: storing step control information for setting step by step process conditions for individual products and process condition change information And a host controlling overall operation of the automated remote process control system; A plurality of process equipments for performing a plurality of manufacturing processes for the unit product according to the plurality of process steps, respectively; A plurality of online servers connected to the host through a communication network and respectively connected to the process equipment, each of which sets process conditions of the process equipment according to the step control information provided from the host; When the equipment completes the process according to the set process condition, either the host or the online server may use the process progress result data and the process condition change information to provide step control information for the pre / post process step of the current step. Set it.

In a preferred embodiment of this aspect, the online server changes the step control information for the pre / post process steps so that the result of the process proceeds within the reference range if the process progress result is out of the reference range. .

According to yet another aspect of the present invention, a method of controlling an automated remote process control system for remotely controlling a plurality of sequential process steps includes: loading a cassette containing lots of products into process equipment; Providing step control information from a host to an on-line server connected to the process equipment via a communication network; Setting, by the online server, process conditions of the process equipment according to the step control information; Starting the process by the process equipment according to a set process condition; Setting the step control information of the pre / post process step according to the process progress result when the process equipment completes the process progress; Unloading the cassette from the process equipment.

In a preferred embodiment of this aspect, the setting of the step control information of the pre / post process step is performed by using the process condition change information provided from the host before / after the current step if the process progress result is out of the reference range. The step control information for the post process step is changed so that the result of the process progress of the subsequent product is within the reference range.

In a preferred embodiment of this aspect, the control method includes: determining a setting state of a process progress hold flag item included in the step control information; If the process progress hold flag item included in the step control information is set to hold, the method may further include holding a process progress on a cassette loaded in the process equipment. The control method may include determining a setting state of a start mode flag item included in the step control information; When the start mode setting flag is set to auto start, automatically starting a process after setting process conditions of the process equipment by the online server; If the start mode setting flag is set to manual start, after the process conditions of the process equipment is set by the online server, the process equipment further comprises the step of starting a process in response to a process start instruction input manually input, the manual In the process step set to the start mode, the process conditions set in the process equipment can be changed before the process starts. The control method may further include storing process progress result data in a file server after the step-by-step process is completed, and processing the process progress result data by processing the process progress monitoring information. The control method further includes the step of inspecting the occurrence of abnormality after the step-by-step process is completed, and the step of reworking the product reworkable when the abnormality occurs.

(Example)

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. In a preferred embodiment of the present invention, an automated remote process control system for manufacturing a liquid crystal display device is described as an example.

The novel automated remote process control system of the present invention has a unit configuration in units of lots and has step control information for setting step by step process conditions for products contained in each cassette. The step control information includes various kinds of information for setting process conditions of each process equipment. This step control information can be changed according to the process result of each step, and also can be changed remotely by an authorized person.

1 is a view showing the overall configuration of an automated remote process control system according to a preferred embodiment of the present invention. Referring to FIG. 1, the host 10 of the automated remote process control system of the present invention comprises process control and step control information 12 consisting of at least one or more step control tables 12a and 12b. With monitoring information 14 and process condition change information 16, overall management of the remote process control system is performed. The step control tables 12a and 12b include control information for controlling the process progress for products moving on the manufacturing line in units of lots. Process progress monitoring information 14 is information for monitoring the process progress of each step. The process condition change information 16 includes reference data for comparing process results of each step and process condition data for changing process conditions of a related process step according to the comparison result.

The plurality of process equipments 20, 22, 24 and the corresponding online servers 30, 32, 34 are connected by RS232C serial communication. The plurality of process equipment 20, 22, 24 and the plurality of online servers 30, 32, 34 may be connected using various communication methods in addition to the RS232C serial communication method. The plurality of online servers 30, 32, 34 and the host 10 are connected through a communication network 20. In this embodiment, a Transmission Control Protocol / Internet Protocol (TCP / IP) communication protocol is used. It consists of Ethernet. The online servers 30, 32, 34 are provided with step control information 12 from the host 10 prior to the process proceeding, and accordingly process conditions of the process equipment 20, 22, 24 connected to them. Set it.

The process equipment 20, 22, 24 stores the process progress result data 52, 54, 56 in a designated area of the file server 50 through the communication network 20. . The online servers 30, 32, and 34 collect and process the process progress result data 52, 54, and 56 stored in the file server 50 and store the process progress monitoring information 14 in the host 10. . Engineers can query the process progress monitoring information 14 through the Engineer Monitoring System (60) connected to the communication network (20).

The plurality of process equipments 20, 22, and 24 are equipment for manufacturing a liquid crystal display device, for example, equipment for performing coating, development, exposure, etc. on a glass. And inspection / measuring equipment for inspecting the abnormality of the glass in which the manufacturing process was performed. The cassette 80 contains glass 82 in a lot unit and moves between the process equipment 20, 22, and 24 along a manufacturing line. A plurality of unit cells exist in one glass, and each unit cell is manufactured as one liquid crystal display device while performing a plurality of processes. The cassette 80 is loaded into and unloaded from the process equipment 20, 22, 24 by an automatic guided vehicle 84.

The automated remote process control system of the present invention includes at least one operator interface 70, 72 that is connected to the host 10 via a communication network 40. A person having access authority can remotely control the manufacturing process by accessing the host 10 from a remote location using the operator interfaces 70 and 72 and changing the step control information 12.

The automated remote process control system of the present invention has two start modes, one is auto start mode and the other is manual start mode. When the automatic start mode is set, the process equipments 20, 22, and 24 automatically start the process when the process condition is set according to the process control information 12. However, when the manual start mode is set, the process equipments 20, 22, and 24 wait for the start of the process when the process condition is set according to the process control information 12, and start the process by receiving the start command of the operator. Therefore, when set to the manual start mode, the engineer or operator can reset the process conditions of the process equipment 20, 22, 24 as needed prior to the start of the process.

FIG. 2 is a diagram illustrating an example of a step control table setting window for setting a step control table stored in the host of FIG. 1. Referring to FIG. 2, the step control table 90 includes a plurality of ID registration items 91, slot setting items 92, all slot selection buttons 93, process condition setting items 94, and registration buttons 95. ), A delete button 96, and a clear button 97.

The plurality of ID registration items 91 includes a 'USERID' item 91a, a 'PARTID' item 91b, a 'STEPID' item 91c, and a 'LOTID' item 91d. The 'USERID' item 91a is for distinguishing a person having authority to access the step control information 12. A person having access authority can add, change, and delete the step control table 90. The 'PARTID' item 91b is for identifying a product. 'STEPID' item 91c is an item for indicating a step of each process. The 'LOTID' item 91d is an item for distinguishing a lot through which a normal process proceeds and a lot through a specified process. An ID for displaying a lot in which a regular process is performed is referred to as a representative lot ID, and an ID for displaying a lot in which a specific process is performed is a specific lot ID.

If the process conditions of the step control tables 12a and 12b having the representative lot ID are changed, the step control tables 12a and 12b for all lots whose 'PARTID' item 91b and the 'STEPID' item 91c are the same ) Applies equally to modified process conditions. That is, each of the step control tables 12a and 12b of the lots having the 'LOTID' item as the representative lot ID and the 'PARTID' item 91b and the 'STEPID' item 91c having the same process condition are set to the same process condition. Also in this case, the respective step control tables 12a and 12b are reset again under the same changed conditions. In other words, the 'LOTID' item 91d, the 'STEPID' item 91c, and the 'PARTID' item 91b are set and changed under the same process conditions in the step control tables 12a and 12b of the lots. . However, if the 'LOTID' item 91d is assigned to a specific lot ID, then the specified lot with that specific lot ID is assigned to the 'PARTID' item 91b and the 'STEPID' item (s) in its step control tables 12a and 12b. In accordance with 91c), the process conditions for each stage are set, and even if the process conditions are changed, they are changed only for themselves.

The slot setting item 92 is an item for designating a slot of a cassette to be processed in each step process. The glass contained in the selected slot is processed in the corresponding process step. When the process of one step is completed, the corresponding online server 30, 32, 34 designates a slot for the next process. The all slot select button 93 is a button for selecting all slots of the cassette.

The process condition setting item 94 includes a 'STEP HOLD FLAG' item 94a, a 'START MODE' item 94b, a 'REWORK FLAG' item 94c, and a 'RECIPE' item 94d. In addition, items for setting process conditions necessary for each process may be added. The 'STEP HOLD FLAG' item 94a is a flag for holding a lot unit process progress as a hold flag. For example, all lots that have the 'LOTID' item 91d of 'PROD' and the 'PARTID' item 91b of the same are held in the process where the 'STEP HOLD FLAG' item 94a is set to 'Y'. . However, when the 'LOTID' item 91d is set to a specific lot ID, the process is held only for that lot. The 'START MODE' item 94b is for setting to start the process start automatically or manually. The 'REWORK FLAG' item 94c is a rework flag that indicates whether rework is possible when a problem occurs in the product. During the process, the inspection / measurement equipment detects an abnormal occurrence after the inspection of the product. At this time, if the 'REWORK FLAG' item 94c is set to 'Y', the lot is reworked. However, even if an abnormality occurs, if the 'REWORK FLAG' item 94c is not set, the corresponding lot is rejected.

The 'RECIPE' item 94d is an item for setting process conditions of process equipment at each process. For example, exposure time is one in exposure equipment. The online server 30, 32, or 34 considers the difference between the process progress result data 52, 54, 56 and the reference data stored in the host 10 after the process proceeds in one step. The process conditions of the post process step are changed. For example, after the process of forming a film on glass, the online server 30, 32, 34 determines how far the film thickness formed on the glass of the lot currently deviated from the reference value. do. Then change the process conditions of the preceding process steps according to the deviation from the reference values. Therefore, from the next lot, the thickness of the film in the process step of forming the film to reach the reference range. It also changes the process conditions of subsequent process steps. In this way, the process conditions of the pre- and post-processes thereof are affected by the result of each step process. The online server 30, 32, 34 adjusts the process conditions of at least one or more preceding process steps and / or at least one or more later processes associated therewith according to the results of one process progression. In this embodiment, it is assumed that the online server changes the process conditions of the pre / post process steps, but it can also be performed by the host.

Next, the control steps of the automated remote process control system of the present invention having the above configuration will be described in detail with reference to FIGS. 3 to 5. 3 is a flowchart showing the overall control flow of the automated remote process control system of FIG.

Referring to FIG. 3, when the cassette 80 is loaded into the process equipment 20, 22, and 24 in step S10, the online connected to the process equipment 20, 22, and 24 in which the cassette 80 is loaded in step S11. The servers 30, 32, and 34 query the step control information 12 for the loaded cassette 80 from the host. In step S12, the online server 30, 32, 34 sets the process conditions of the process equipment 20, 22, 24 according to the step control information 12 provided from the host 10. FIG. In step S13, the process equipment 20, 22, 24 proceeds with the manufacturing process for the glasses 82 contained in the cassette 80 according to the set conditions. When the manufacturing process is completed, the process progress result data 52, 54, 56 is stored in the designated area of the file server 50 in step S14.

Subsequently, in step S15, the online server 30, 32, 34 collects and processes the process progress result data 52, 54, 56 stored in the file server 50 and processes the process progress monitoring information 14 to the host 10. Save as) If an abnormality occurs in the result of the process in step S16, as described above, the online server 30, 32, 34 performs rework processing if it is possible to recover by rework, and otherwise rejects it. ) Process. In step S17, the online server 30, 32, 34 sets the step control information of the previous / next process by reflecting the process progress result data as described above. In step S18, the cassette 80 is unloaded from the process equipment 20, 22, and 24.

More specifically, the control operation of the online servers 30, 32, and 34 will be described with reference to FIGS. 4A and 4B. 4A and 4B are flowcharts showing the control flow of the on-line servers 30, 32, 34 of FIG. 1.

4A and 4B, when the cassette load is reported from the process equipment 20, 22, 24 in step S20, control proceeds to step S21. In step S21, the cassette information of the loaded cassette 80 and the step control information corresponding thereto are inquired from the host 10. The cassette information is information about the cassette 80 currently loaded in the process equipment 20, 22, 24, and the step control information is as described above. In step S22, it is determined whether the hold flag 94a included in the step control table is set. If the hold flag 94a is set, then control proceeds to step S23 to undergo lot hold processing. In the lot hold process, the online server 30, 32, 34 requests the lot hold process to the host 10, and when the lot hold process is performed on the computer 10 in the host 10, the control proceeds to step S47 where the cassette 80 Is unloaded from the process equipment 20, 22, 24 and the lot is held in process.

If the hold flag 94a is not set in step S22, the flow advances to step S24 to set process conditions of the process equipment 20, 22, 24 in accordance with the step control information 12. FIG. In this step, the start mode of the process equipment 20, 22, 24 is set to the auto start mode or the manual start mode according to the setting state of the 'START MODE' item 94b of the step control table 90. In step S25, the track-in process is requested to the host 10. In response, the host 10 notifies the online server 30, 32, 34 of the track-in processing response. Track-in treatment means that the process progress of the process equipment 20, 22, 24 in the host 10 has been processed in a computerized manner. In step S26, it is determined whether a track-in processing response has been received from the host 10. If there is no track-in process response, the flow advances to step S27 to generate an alarm. If there is no track-in process response, the cassette 80 is queued at the input ports of the process equipment 20, 22, 24. In step S28, the operator who has detected an alarm takes appropriate measures according to the occurrence of an error. In step S26, upon receiving the track-in processing response, the control proceeds to step S29 to send a process start command to the process equipment 20, 22, 24, and in step S30 from the process equipment 20, 22, 24 Receive the process start response.

In step S31, it is determined whether the manufacturing process is completed. When the process is completed, in step S32, the process equipment 20, 22, 24 collects, processes and processes the process progress result data stored in the file server 50 and stores the process progress monitoring information 14 in the host 10. do. In step S33, the track-out process is requested to the host 10. In response, the host 10 notifies the online server 30, 32, 34 of the track-out processing response. Track-out processing means that the process progress completion of the process equipment 20, 22, 24 in the host 10 is processed in a computerized state. In step S34, it is determined whether a track-out processing response has been received from the host 10. If there is no track-out processing response, the flow advances to step S35 to generate an alarm. If there is no track-out process response, the cassette 80 is queued at the output ports of the process equipment 20, 22, 24. In step S36, the operator who has detected an alarm takes appropriate measures according to the occurrence of the abnormality.

If the track-out is normally processed in step S34, then control proceeds to step S37 to check for abnormal lot, glass and cell abnormalities as a result of the process. Lot abnormal refers to a case where an abnormality occurs with respect to the entire lot composed of a plurality of glasses. Glass abnormality means the case where abnormality generate | occur | produces with respect to a specific glass. The cell abnormality refers to a case in which an abnormality occurs in a specific cell among a plurality of unit cells configured in the glass. If it is determined that an abnormality has occurred in step 38, first proceeds to step S39 to determine whether or not the lot. If a lot abnormality has occurred, the process proceeds to step S40 and the lot abnormality processing is performed. Lot abnormality treatment stops the process of the lot. If it is not the lot, it is determined whether the rework flag 94c is set in step S41. If the rework flag 94c is not set, the flow advances to step S42 to perform a reject process. If the rework flag 94c is set in step S41, the flow advances to step S43 to proceed to the rework processing process.

Subsequently, in step S44, the process condition information 16 is received from the host 10, and in step S45, the reference data of the process condition information 16 and the process progress result data 52, 54, 56 are compared. In step S46, according to the comparison result, before / after process conditions are set as described above. In step S45, the cassette 80 is unloaded from the process equipment 20, 22, 24.

The following describes the operation of each of the process equipment 20, 22, 24 in detail. FIG. 5 is a flowchart showing the control flow of the process equipment 20, 22, 24 of FIG. 1. In step S50, it is determined whether the cassette 80 is loaded. When the cassette 80 is loaded, the cassette load report is made to the online server 30, 32, 34 connected to itself in step S51. In step S52, it is determined whether there is a hold instruction from the online server 30, 32, or 34. If there is a hold instruction, the flow advances to step S61 to unload the cassette 80 so that the process proceeds to be held. If there is no hold instruction, control proceeds to step S53.

In step S53, the process conditions are set by the online servers 30, 32, and 34. In step S54, a process start command is received from the online servers 30, 32, and 34. In step S55, the start mode is determined. When the start mode is the auto start mode, the process proceeds to step S56 to start the process. If the start mode is the manual start mode, the flow advances to step S57 to wait for input of a process start instruction. At this time, the operator can change the set process conditions as needed. If a process start instruction is input in step S58, the flow advances to step S56 to start the process. When the process is started in step S56, the process start response is transmitted to the online server (30, 32, 34). If it is determined in step S59 that the process has been completed, the control proceeds to step S60 to report the process completion to the online server 30, 32, 34 and stores the process progress result data in the file server 50. Thereafter, under the control of the online servers 30, 32, and 34, the cassette 80 is unloaded in step S61.

In the above, the configuration and operation of the automated remote process control system according to a preferred embodiment of the present invention has been shown in accordance with the above description and drawings, but this is only an example and is within the scope without departing from the spirit of the present invention. Of course, various changes and modifications are possible. In addition, although the manufacturing process of the liquid crystal display device is described as an example as an embodiment, it can be applied to various manufacturing processes having a plurality of stepwise manufacturing processes similar to the manufacturing process for manufacturing a semiconductor manufacturing apparatus. Technicians will be well understood.

According to the present invention as described above, by controlling the step control information at a remote location, it becomes easy to control the step by step for both the normal process and the non-normal process. As each step progresses automatically, the pre and post process conditions are automatically changed so that the process results for the product are automatically controlled to reach the target. In this way, the process control of each step becomes very flexible, thereby improving the process progress efficiency. In addition, the step-by-step control of each process in a lot unit can be particularly useful in the process for the production of small quantities of various varieties.

Claims (26)

In an automated remote process control system for remotely controlling a plurality of sequential process steps: A plurality of process equipments for respectively performing a manufacturing process for the unit product according to the plurality of process steps; A host for storing step control information for setting step-by-step process conditions for individual products and for controlling the overall operation of the automated remote process control system; A plurality of online servers connected to the host through a communication network and respectively connected to the process equipment, each of which sets process conditions of the process equipment according to the step control information provided from the host, The process equipment is set in the process conditions according to the step control information prior to the process, the process proceeds according to the set process conditions, The step control information may be remotely reset and includes a start mode item for setting one of an automatic start mode and a manual start mode, In a process step in which the start mode item is set to an auto start mode among the plurality of process steps, the process is automatically started after setting process conditions of the process equipment by the online server. In the process step in which the start mode item is set to the manual start mode among the plurality of process steps, after setting process conditions of the process equipment by the online server, the process equipment starts the process in response to a process start instruction input manually inputted. The process step set to the manual start mode automated remote process control system, characterized in that to change the process conditions set in the process equipment prior to the start of the process. delete The method of claim 1, The remote process control system further comprises an operator interface connected with the host via the communication network, And an operator can remotely reset the step control information of the host using the operator interface. delete The method of claim 1, The step control information includes a hold flag item for holding at any one of the plurality of processing steps that the products reach and a rework flag item for indicating a reworkable step among the plurality of processing steps. Further comprising an automated remote process control system. The method of claim 5, The step control information includes a part ID item for distinguishing the individual products, a step ID item for designating any one of the plurality of process steps, and a lot ID item for distinguishing and displaying the products in units of lots; , And the step ID information, the step ID item, and the part ID item are identically set and changed. The method of claim 6, The lot ID item is an automated remote process control system, characterized in that the display is divided into a representative lot ID for referring to the lot proceeding the regular process, and a specific lot ID refers to the lot undergoing the irregular process. The method of claim 7, wherein The step control information further comprises a user ID item for identifying the person having the authority to change information automated remote process control system. The method of claim 1, The automated remote process control system further comprises a file server connected to the communication network, The file server stores process progress result data, and the online server collects, processes and processes the process progress result data of the file server and stores the process progress monitoring information in the host as an automated remote process control system. . The method of claim 9, The automated remote process control system further comprises a monitoring system connected to the host via the communication network and for querying the process progress monitoring information of the host. In an automated remote process control system for remotely controlling a plurality of sequential process steps: A plurality of process equipments for respectively performing a manufacturing process for the unit product according to the plurality of process steps; Step control information for setting step-by-step process conditions for the individual products; Including process condition change information for changing process conditions according to the results of each process, Before the process is performed, the plurality of process equipments may be configured with process conditions according to the step control information, perform a predetermined process according to the set process conditions, and if the process progress result data is out of a predetermined reference range, the step control. Information is adjusted based on the process progress result data and the process condition change information, The step control information includes a start mode item for setting any one of an automatic start mode or a manual start mode, In a process step in which the start mode item is set to an auto start mode among the plurality of process steps, the process is automatically started after setting process conditions of the process equipment by the online server. In the process step in which the start mode item is set to the manual start mode among the plurality of process steps, after setting process conditions of the process equipment by the online server, the process equipment starts the process in response to a process start instruction input manually inputted. The process step set to the manual start mode automated remote control system, characterized in that for changing the process conditions set in the process equipment prior to the start of the process. The method of claim 11, The remote process control system is: A host that stores the step control information and the process condition change information and controls the overall operation of the automated remote process control system; A plurality of online servers connected to the host through a communication network and respectively connected to the process equipment, each of which sets process conditions of the process equipment according to the step control information provided from the host, When the process equipment completes the process according to the set process condition, either the host or the online server controls the stage for the pre / post process step of the current step by using the process progress result data and the process condition change information. Automated remote control system, characterized in that to set the information. The method of claim 12, The remote process control system further comprises an operator interface connected with the host via the communication network, And an operator can remotely reset the step control information of the host using the operator interface. delete The method of claim 11, The step control information includes a hold flag item for holding at any one of the plurality of processing steps that the products reach and a rework flag item for indicating a reworkable step among the plurality of processing steps. Further comprising an automated remote process control system. The method of claim 15, The step control information includes a part ID item for distinguishing the individual products, a step ID item for designating any one of the plurality of process steps, and a lot ID item for distinguishing and displaying the products in units of lots; , And the step ID information, the step ID item, and the part ID item are identically set and changed. The method of claim 16, The lot ID item is an automated remote process control system, characterized in that the display is divided into a representative lot ID for referring to the lot proceeding the regular process, and a specific lot ID refers to the lot undergoing the irregular process. The method of claim 12, The automated remote process control system further comprises a file server connected to the communication network, The file server stores process progress result data, and the online server collects, processes and processes the process progress result data of the file server and stores the process progress monitoring information in the host as an automated remote process control system. . The method of claim 18, The automated remote process control system further comprises a monitoring system connected to the host via the communication network and for querying the process progress monitoring information of the host. A method of controlling an automated remote process control system for remotely controlling a plurality of sequential process steps: Loading a cassette containing lots of products into process equipment; Providing step control information from a host to an on-line server connected to the process equipment via a communication network; Setting, by the online server, process conditions of the process equipment according to the step control information; Starting the process by the process equipment according to a set process condition; Setting the step control information of the pre / post process step according to the process progress result when the process equipment completes the process progress; Unloading the cassette from the process equipment, In the step of the on-line server to set the process conditions of the process equipment according to the step control information, Determining a setting state of a start mode flag item included in the step control information; When the start mode setting flag is set to automatic start, the process is automatically started after setting process conditions of the process equipment by the online server, and when the start mode setting flag is set to manual start, the process by the online server After setting the process conditions of the equipment, the process equipment further comprises the step of starting the process in response to the manually input process start instruction input, The control step of the automated remote process control system, characterized in that in the process step set to the manual start mode it is possible to change the process conditions set in the corresponding process equipment prior to the start of the process. The method of claim 20, Determining a setting state of a process progress hold flag item included in the step control information; If the process progress hold flag item included in the step control information is set to hold, further comprising the step of holding the process progress for the cassette loaded in the process equipment of the automated remote process control system Control method. delete The method of claim 21, After the step-by-step process is completed, storing the process result data in a file server; And collecting the process progress result data of the file server and processing the process into process progress monitoring information. The method of claim 23, After the completion of the step-by-step process, the step of examining the occurrence of abnormalities, and A method of controlling an automated remote process control system further comprising reworking a reworkable product in the event of an error. The method of claim 24, Setting the step control information of the before / after process step, If the process progress result is out of the standard range, the process condition change information provided from the host is used to change the step control information for the pre / post process step of the current step so that the subsequent process progress result of the product is within the standard range. Control method of an automated remote process control system, characterized in that. In an automated remote process control system for remotely controlling a plurality of sequential process steps: A plurality of process equipments for respectively performing a manufacturing process for the unit product according to the plurality of process steps; A host for storing step control information for setting step-by-step process conditions for individual products and for controlling the overall operation of the automated remote process control system; A plurality of online servers connected to the host through a communication network and respectively connected to the process equipment, each of which sets process conditions of the process equipment in accordance with the step control information provided from the host; A file server connected to the communication network and storing process result data; The process equipment is set in the process conditions according to the step control information prior to the process, the process proceeds according to the set process conditions, The online server collects, processes and processes the process progress result data of the file server and stores the process progress monitoring information in the host. And said step control information is remotely resettable.