JP2015058936A - Apparatus and method for supplying sheet and apparatus and method for pasting sheet - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an apparatus and a method for supplying a sheet and an apparatus and a method for pasting a sheet which can prevent occurrence of pressing indentations in an adhesive sheet and supply an adhesive sheet reliably.SOLUTION: A sheet supply apparatus 1A includes delivery means 2 of delivering an original sheet RS consisting of a release sheet RL adhered temporarily with an adhesive sheet AS, and release means 4 of peeling the adhesive sheet AS from the release sheet RL. The adhesive sheet AS is formed so as to be smaller than the size of the original sheet RS in the width direction orthogonal to the delivery direction, and the delivery means 2 is provided with holding means 2A of holding regions other than the adhesive sheet AS at both width-direction ends of the original sheet RS and so configured as to deliver the original sheet RS in a state where the original sheet RS is held by the holding means 2A.

Description

  The present invention relates to a sheet feeding apparatus and a feeding method for feeding an adhesive sheet, and a sheet sticking apparatus and a sticking method for sticking an adhesive sheet to an adherend.

2. Description of the Related Art Conventionally, in a semiconductor manufacturing process, a sheet supply apparatus that supplies an adhesive sheet to be attached to a semiconductor wafer (hereinafter sometimes simply referred to as “wafer”) is known (for example, see Patent Document 1).
The sheet supply apparatus described in Patent Document 1 includes a film supply tape that includes one supply roller that is rotationally driven by a motor and the other supply roller that sandwiches the film supply tape (raw material) between the one supply roller. The film supply tape is fed out while applying tension to the sheet, and the base tape (release sheet) is folded back by a guide member (peeling means), and the adhesive film (adhesive sheet) is peeled from the base tape to supply the adhesive film. It is configured as follows.

JP 2006-44152 A

  However, in the conventional sheet feeding apparatus as described in Patent Document 1, since the original fabric is sandwiched between the pair of feeding rollers, when the feeding operation of the adhesive sheet is stopped, a pressing mark is generated in the clamping portion of the feeding roller in the adhesive sheet. There is an inconvenience that it occurs. In order to avoid such an inconvenience, if a configuration in which the original fabric is sandwiched is excluded, tension cannot be applied to the original fabric, and the adhesive sheet is not peeled off from the release sheet by the peeling means, and the adhesive sheet is supplied. Inconvenience that it becomes impossible to.

  An object of the present invention is to provide a sheet feeding device and a feeding method, a sheet sticking device and a sticking method that can prevent a pressing mark from being generated on an adhesive sheet and can reliably feed the adhesive sheet.

  The sheet supply apparatus of the present invention includes a feeding unit that feeds out an original fabric in which an adhesive sheet is temporarily attached to a release sheet, and a release unit that releases the adhesive sheet from the release sheet. The feeding means includes a sandwiching means for sandwiching regions other than the adhesive sheet at both ends in the width direction of the original fabric, and the sandwiching means includes the original It is characterized in that it is provided so that the original fabric can be fed out in a state in which it is sandwiched.

  The sheet supply method of the present invention includes a step of feeding out the original fabric in a state where regions other than the adhesive sheet are sandwiched at both ends in the width direction of the original fabric in which the adhesive sheet is temporarily attached to the release sheet; And a step of peeling the adhesive sheet.

  The sheet sticking device of the present invention is a feeding means for feeding out the original fabric temporarily attached to the release sheet, a release means for peeling the adhesive sheet from the release sheet, a holding means for holding the adhesive sheet, Pressing means for pressing and adhering the adhesive sheet to the adherend, and the adhesive sheet is formed smaller than the size in the width direction perpendicular to the feeding direction of the original fabric, and the feeding means is the original feeding means. It is provided with the clamping means which pinches | interposes area | regions other than the said adhesive sheet in the opposite width direction both ends, It is provided so that the said original fabric can be drawn out in the state by which the said original fabric was clamped by the said clamping means. .

  The sheet sticking method of the present invention includes a step of feeding the original fabric in a state where regions other than the adhesive sheet are sandwiched between both ends in the width direction of the original fabric in which the adhesive sheet is temporarily attached to the release sheet; The step of peeling the adhesive sheet, the step of holding the adhesive sheet, and the step of pressing and sticking the adhesive sheet to the adherend are performed.

  According to the present invention as described above, since the region other than the adhesive sheet in the original fabric is sandwiched, it is possible to prevent a pressing mark from being generated in the adhesive sheet, and it is possible to reliably supply the adhesive sheet.

The side view of the sheet sticking apparatus which concerns on one Embodiment of this invention. The partial top view of a sheet supply apparatus.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
In this embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis that is orthogonal to the predetermined plane. To do. Furthermore, in the present embodiment, when viewed from the near side of FIG. 1 parallel to the Y axis, when indicating the direction, “up” is the arrow direction of the Z axis, “down” is the opposite direction, “ “Left” is the X-axis arrow direction, “Right” is the opposite direction, “Front” is the front direction orthogonal to the Y-axis paper surface, and “Back” is the opposite direction.

  1 and 2, the sheet sticking apparatus 1 is a sheet feeding apparatus 1A that supplies the adhesive sheet AS, a holding unit 5 that holds the adhesive sheet AS, and a movement that relatively moves the sheet feeding apparatus 1A and the holding means 5. Means 6; support means 7 having a support surface 71A for supporting a wafer WF as an adherend by a decompression means (not shown) such as a vacuum pump or a vacuum ejector; and pressing means for pressing and adhering the adhesive sheet AS to the wafer WF. And a linear motion motor 8 as a drive device.

  The sheet supply apparatus 1A includes a feeding unit 2 that feeds out a raw fabric RS in which an adhesive sheet AS is temporarily attached to a release sheet RL, and a release plate 4 as a release unit that peels the adhesive sheet AS from the release sheet RL. . The adhesive sheet AS is formed in a circular shape having a diameter smaller than the size in the width direction (front-rear direction) (hereinafter simply referred to as “width direction”) orthogonal to the feeding direction (left-right direction) of the original fabric RS, The release sheet RL is temporarily attached to the central portion in the width direction at a predetermined interval.

The feeding means 2 includes a support roller 20 that supports the original fabric RS, a sandwiching means 2A that sandwiches an area other than the adhesive sheet AS at both ends in the width direction of the original fabric RS, a guide roller 26 that guides the original fabric RS, and a drive A pinch roller 28 that sandwiches the release sheet RL between a drive roller 27 that is driven by a rotation motor 27A as a device, and a collection roller 29 that is driven by a drive device (not shown) and collects the release sheet RL. .
The sandwiching means 2A extends across both ends of the original fabric RS in the width direction, and is supported by a drive roller 21 driven by a rotation motor 21A as a drive device and an output shaft 22A of a linear motor 22 as a drive device. And a pinch roller 25A that is supported by sliders 23A and 23B of the linear motor 23 via brackets 24A and 24B and sandwiches the original fabric RS with the drive roller 21. , 25B.

  The holding means 5 is supported by the output shaft 8A of the linear motion motor 8 and has a holding plate 51 having a holding surface 51A for holding the adhesive sheet AS, and is provided on the holding plate 51, and holds the adhesive sheet AS on the holding surface 51A. And an electrostatic chuck 52.

  The moving means 6 includes a linear motor 61 as a driving device having a slider 61 </ b> A that supports the linear motion motor 8.

In the sheet sticking apparatus 1 described above, a procedure for sticking the adhesive sheet AS to the wafer WF will be described.
First, in a state where the plurality of pinch rollers 25A and 25B are separated from the driving roller 21, the operator sets the original fabric RS as shown in FIG. Then, when the size in the width direction of the adhesive sheet AS and an operation start signal are input via operation means such as an operation panel (not shown) or a personal computer, the sandwiching means 2A drives the linear motor 23 and inputs it. The pinch rollers 25A and 25B are moved in the front-rear direction based on the size of the adhesive sheet AS in the width direction. Thereafter, the sandwiching means 2A drives the linear motor 22 to move the pinch rollers 25A and 25B to the right, and as shown in FIG. 2, the adhesive sheet AS at both ends in the width direction of the original fabric RS with the drive roller 21. The area | region other than, ie, release sheet RL, is inserted | pinched. Next, the feeding means 2 and the sandwiching means 2A drive the rotation motors 21A and 27A and a driving device (not shown) to feed out the original fabric RS. Then, when a detection means (not shown) such as an optical sensor or an imaging means detects that the adhesive sheet AS positioned on the upper part of the peeling plate 4 has reached a predetermined position, the feeding means 2 and the sandwiching means 2A are turned to the rotation motor 21A, The drive of the drive device 27A and a drive device (not shown) is stopped, and a standby state is set. At this time, the drive roller 21 and the pinch rollers 25A and 25B are temporarily stopped in a state where the original fabric RS is sandwiched, but the release roller RL is sandwiched between the drive roller 21 and the plurality of pinch rollers 25A and 25B. It is possible to prevent a pressing mark from being generated on the sheet AS.

  Next, when a transport unit (not shown) such as a human hand or an articulated robot or a belt conveyor places the wafer WF on the support surface 71A, the support unit 7 drives the decompression unit (not shown) to support the wafer WF. Thereafter, the pressing means drives the linear motor 8 to lower the holding plate 51 and bring the holding surface 51A into contact with the adhesive sheet AS as indicated by the two-dot chain line on the right side in FIG. In this state, the holding unit 5 drives the electrostatic chuck 52 to hold the adhesive sheet AS on the holding surface 51A.

  Next, the feeding means 2, the sandwiching means 2A, and the moving means 6 are driven by synchronizing the rotation motors 21A, 27A, the driving device (not shown), and the linear motor 61, and the holding plate 51 that holds the adhesive sheet AS. By feeding out the raw fabric RS while moving in the left direction, the adhesive sheet AS is peeled from the release sheet RL while the adhesive sheet AS is held by the holding surface 51A. After that, when the linear motion motor 8 moves to the position indicated by the two-dot chain line on the left side in FIG. 1, the pressing means drives the linear motion motor 8, and as shown by the two-dot chain line on the left side in FIG. Then, the adhesive sheet AS is pressed against the wafer WF with the holding plate 51 and attached.

  Next, after the holding means 5 stops driving the electrostatic chuck 52, the moving means 6 and the pressing means drive the linear motor 61 and the linear motor 8, and the holding plate 51 is returned to the position indicated by the solid line in FIG. Let Thereafter, a person or a transfer means (not shown) transfers the wafer WF to the next process, and thereafter the same operation as described above is repeated.

  According to the present embodiment as described above, since a region other than the adhesive sheet AS in the raw fabric RS is sandwiched, it is possible to prevent a pressing mark from being generated in the adhesive sheet AS, and to reliably supply the adhesive sheet AS. Can do.

  As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. In addition, the description of the shape, material, and the like disclosed above is exemplary for ease of understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of one part or all of such restrictions is included in this invention.

For example, the raw fabric RS may be a belt-shaped original adhesive sheet in which an adhesive sheet AS is formed inside a closed loop-shaped cut, and is temporarily attached to the strip-shaped release sheet RL. The unnecessary sheet and the release sheet RL positioned outside the closed-loop cut in FIG. 5 are sandwiched between the drive roller 21 and the pinch rollers 25A and 25B as an area other than the adhesive sheet.
Furthermore, the guide roller 26 may be in contact with regions other than the adhesive sheet AS at both ends in the width direction of the original fabric RS to guide the original fabric RS.

Further, the holding means 5 may be configured to hold the adhesive sheet AS by a pressure reducing means such as a vacuum pump or a vacuum ejector, an adhesive, or the like.
Further, the holding means 5 may be arranged on the left side of the release plate 4 and hold the adhesive sheet AS supplied from the sheet supply apparatus 1A on the left side of the release plate 4. In this case, the moving means 6 Can be omitted.

The moving means 6 may move the peeling means to the right in accordance with the operation of peeling the adhesive sheet AS from the peeling sheet RL. In this case, only the peeling means may be moved, or the holding means 5 and Both the peeling means and the peeling means may be moved.
Further, the pressing means and the holding means 5 may be arranged on the left side of the peeling plate 4, and may be configured to hold the adhesive sheet AS supplied from the sheet supply apparatus 1A on the left side of the peeling plate 4, in this case, The moving means 6 may be omitted.

Further, the pressing means may be of a so-called air jet type in which the adhesive sheet AS held by the holding plate 51 is blown off with compressed air and attached to the adherend.
Further, the pressing means does not hold the adhesive sheet AS peeled from the release sheet RL by the holding plate 51, but presses and sticks it to the wafer WF with a pressing member such as a pressure roller, a blade material, rubber, resin, sponge, or the like. It may be configured to. In this case, the holding means 5 and the moving means 6 can be omitted.

  Further, the material, type, shape and the like of the adhesive sheet AS and the adherend are not particularly limited. For example, the shape of the adhesive sheet AS may be a triangular shape, a quadrangular shape, a polygonal shape higher than that, or an elliptical shape. Further, the adhesive sheet AS is not limited to the adhesive form such as pressure-sensitive adhesiveness and heat-sensitive adhesiveness. When the heat-sensitive adhesive sheet AS is adopted, the adhesive sheet AS is appropriately heated. What is necessary is just to provide a heating means. Furthermore, such an adhesive sheet AS is, for example, a single layer having only an adhesive layer, an intermediate layer between the base sheet and the adhesive layer, a cover layer on the upper surface of the base sheet, etc. Three or more layers, or a so-called double-sided adhesive sheet that can peel the base sheet from the adhesive layer may be used. The double-sided adhesive sheet comprises a single-layer or multi-layer intermediate layer. It may be a single layer or a multilayer having no intermediate layer. Examples of the adherend include, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit board, information recording substrates such as optical disks, glass plates, steel plates, ceramics, wood plates or resin plates, Arbitrary forms of members and articles can also be targeted. In addition, the adhesive sheet AS is replaced with a functional and intended reading, for example, any information label, decorative label, protective sheet, dicing tape, die attach film, die bonding tape, recording layer forming resin sheet, etc. Arbitrary sheets, films, tapes and the like can be attached to any adherend as described above.

The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described with respect to those means and steps. The process is not limited at all. For example, the feeding means includes a sandwiching means for sandwiching a region other than the adhesive sheet at both ends in the width direction of the original fabric, and can feed the original fabric in a state where the original fabric is sandwiched by the sandwiching means. There is no limitation as long as it is within the technical scope in light of the technical common sense at the beginning of the application (the description of other means and processes is omitted).
The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single axis robot, an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

DESCRIPTION OF SYMBOLS 1A Sheet supply apparatus 2 Feeding means 2A Clamping means 4 Peeling means AS Adhesive sheet RL Peeling sheet RS Original fabric WF Wafer (Substrate)

Claims (4)

A feeding means for feeding out the original fabric in which the adhesive sheet is temporarily attached to the release sheet;
A peeling means for peeling the adhesive sheet from the release sheet,
The adhesive sheet is formed smaller than the size in the width direction perpendicular to the feeding direction in the original fabric,
The feeding means includes clamping means for sandwiching a region other than the adhesive sheet at both ends in the width direction of the original fabric, and is provided so that the original fabric can be fed out in a state where the original fabric is sandwiched by the clamping means. A sheet feeding apparatus characterized by comprising: Extending the original fabric in a state where the region other than the adhesive sheet at both ends in the width direction of the original fabric in which the adhesive sheet is temporarily attached to the release sheet; and
And a step of peeling the adhesive sheet from the release sheet. A feeding means for feeding out the original fabric in which the adhesive sheet is temporarily attached to the release sheet;
Peeling means for peeling the adhesive sheet from the release sheet;
Holding means for holding the adhesive sheet;
A pressing means for pressing and adhering the adhesive sheet to the adherend,
The adhesive sheet is formed smaller than the size in the width direction perpendicular to the feeding direction in the original fabric,
The feeding means includes a sandwiching means for sandwiching a region other than the adhesive sheet at both ends in the width direction of the original fabric, and is provided so that the original fabric can be fed out in a state where the original fabric is sandwiched by the sandwiching means. The sheet sticking apparatus characterized by the above-mentioned. Extending the original fabric in a state where the region other than the adhesive sheet at both ends in the width direction of the original fabric in which the adhesive sheet is temporarily attached to the release sheet; and
Peeling the adhesive sheet from the release sheet;
Holding the adhesive sheet;
And a step of pressing and adhering the adhesive sheet to an adherend.

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