JP6401447B2 - Sheet feeding apparatus and feeding method, and sheet pasting apparatus and pasting method - Google Patents

Description

  The present invention relates to a sheet feeding device and a feeding method, and a sheet pasting device and a pasting method.

2. Description of the Related Art Conventionally, a sheet supply apparatus that supplies an adhesive sheet to a semiconductor wafer (hereinafter sometimes simply referred to as “wafer”) (an adherend) in a semiconductor manufacturing process is known (for example, Patent Document 1).
The sheet supply device described in Patent Document 1 includes a holding roller that holds an original fabric in which an adhesive sheet and a strip-shaped spacer sheet (peripheral sheet) are temporarily attached to a release material (release sheet), and an original that is fed from the holding roller. A peel plate (peeling means) that peels the adhesive sheet from the opposite release material and a spacer take-up roller that peels the spacer sheet from the release material, and the spacer sheet is taken up by the spacer take-up roller before the peel plate. Thus, the peeling of the spacer sheet from the release material due to the difference in elasticity between the release material and the spacer sheet is suppressed, and the peeled spacer sheet is prevented from entering between the wafer and the press roller (pressing means), The adhesive sheet is not stuck and the wafer is not damaged.

JP 2007-158037 A

  However, in the conventional sheet feeding device described in Patent Document 1, there is a peripheral sheet winding roller that winds up the peripheral sheet in addition to the winding roller that winds up the release sheet. In addition to removing the wound release sheet from the take-up roller and replacing the new peel-off sheet with the take-up roller, the wound peripheral sheet is removed from the peripheral sheet take-up roller. There is an inconvenience that an operation such as removing and connecting a peripheral sheet of a new original fabric to the peripheral sheet winding roller increases.

  An object of the present invention is to provide a sheet feeding apparatus and a feeding method, and a sheet pasting apparatus and a pasting method that can prevent an increase in the size of the apparatus and suppress an increase in the amount of work during the replacement of the original fabric. .

  The sheet supply apparatus according to the present invention includes a feeding unit that feeds an original fabric in which a plurality of adhesive sheets and one or more peripheral sheets are temporarily attached to one surface of a strip-shaped release sheet, and an original fabric fed by the feeding unit. And peeling means having a peeling portion for peeling the adhesive sheet from the peeling sheet, and sandwiching at least a part of the peripheral sheet in the raw material fed by the feeding means with the peeling means, Has peripheral sheet pressing means for maintaining the state temporarily attached to the release sheet and allowing the release portion to pass therethrough.

  The sheet supply method of the present invention includes a step of feeding a raw material in which a plurality of adhesive sheets and one or a plurality of peripheral sheets are temporarily attached to one surface of a strip-shaped release sheet; A step of peeling the adhesive sheet from the release sheet by folding back at a portion, and sandwiching at least a part of the peripheral sheet in the unrolled raw fabric between the peripheral sheet pressing means and the release means, and the peripheral sheet is the release sheet And a step of passing the peeled portion while maintaining the state temporarily attached to the substrate.

  The sheet sticking apparatus of the present invention includes a feeding means for feeding a raw material in which a plurality of adhesive sheets and one or a plurality of peripheral sheets are temporarily attached to one surface of a strip-shaped release sheet, and a raw material fed by the feeding means And the pressing means for pressing and sticking the adhesive sheet peeled off by the peeling means, and the raw material fed out by the feeding means At least a part of the peripheral sheet on the opposite side is sandwiched between the peeling means, and the peripheral sheet pressing means is configured to pass the peeling portion while maintaining the peripheral sheet temporarily attached to the peeling sheet.

  In this case, in the sheet sticking device of the present invention, the peripheral sheet pressing unit includes a contact unit that contacts the peripheral sheet, and a biasing unit that biases the contact unit toward the release sheet. The urging means is controlled so that, in the initial stage of the feeding operation of the feeding means, the abutting means is once separated from the peripheral sheet, and then the peripheral sheet is sandwiched again between the abutting means and the peeling means. It is preferred that

  Further, in the sheet sticking device of the present invention, the contact means includes a contact member, and a drive means for sending a peripheral sheet portion contacted by the contact member in the feed direction of the original fabric, It is preferable to feed the peripheral sheet at a speed higher than the feeding speed of the original fabric by the means.

  The sheet sticking method of the present invention includes a step of feeding an original fabric in which a plurality of adhesive sheets and one or a plurality of peripheral sheets are temporarily attached to one surface of a strip-shaped release sheet; A step of peeling the adhesive sheet from the release sheet by folding back at a portion, and sandwiching at least a part of the peripheral sheet in the unrolled raw fabric between the peripheral sheet pressing means and the release means, and the peripheral sheet is the release sheet The step of maintaining the state temporarily attached to the substrate and passing the separation part, and the step of pressing and attaching the peeled adhesive sheet to the adherend are performed.

  According to the present invention as described above, in order to prevent the peripheral sheet from peeling off from the release sheet, the peripheral sheet is fed out while being sandwiched between the peripheral sheet pressing means and the release means. No take-up roller for winding up is required, preventing the apparatus from becoming large, and suppressing an increase in the amount of work when replacing the original fabric.

  At this time, the peripheral sheet pressing means is constituted by the contact means and the biasing means, and in the initial stage of the feeding operation, the contact means is once separated from the peripheral sheet, and then the peripheral sheet is again attached to the contact means and the peeling means. If the peripheral sheet is peeled off from the release sheet and a peeled portion is formed before the contact means, the peeled portion is sandwiched between the contact means and the release sheet. Since the peripheral sheet can be temporarily attached to the release sheet and can pass through the release portion, it is possible to prevent the inconvenience that the adhesive portion is attached to the adhesive sheet by the release portion.

  Further, if the contact means is composed of the contact member and the drive means, and the peripheral sheet is fed in the feed direction at a speed faster than the feed speed of the original fabric by the drive device, it tends to peel off from the release sheet. It is possible to prevent the peripheral sheet portion from being separated from the release sheet, and it is possible to more reliably prevent the peripheral sheet from peeling from the release sheet.

The side view which shows the sheet sticking apparatus which concerns on one Embodiment of this invention. (A)-(C) are principal part operation | movement explanatory drawings of a sheet sticking apparatus. The side view which shows the modification of this invention.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
In this embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis that is orthogonal to the predetermined plane. To do. Furthermore, in the present embodiment, when viewed from the near side of FIG. 1 parallel to the Y axis, when indicating the direction, “up” is the arrow direction of the Z axis, “down” is the opposite direction, “ “Left” is the X-axis arrow direction, “Right” is the opposite direction, “Front” is the front direction orthogonal to the Y-axis paper surface, and “Back” is the opposite direction.

  In FIG. 1, the sheet sticking device 1 includes a feeding unit 2 that feeds out an original fabric RS in which a plurality of adhesive sheets AS and a plurality of peripheral sheets US are temporarily attached to one surface of a strip-shaped release sheet RL, and a feeding unit 2. A peeling plate 3 as a peeling means having a peeling portion 31 that folds the unrolled raw material RS and peels the adhesive sheet AS from the peeling sheet RL, and a wafer using the adhesive sheet AS peeled by the peeling plate 3 as an adherend. A part of the peripheral sheet US in the original roll RS fed by the feeding means 2 and the pressing roller 4 that presses and sticks to the WF is sandwiched between the release plates 3, and the peripheral sheet US is temporarily attached to the release sheet RL. Peripheral sheet pressing means 5 that maintains the attached state and allows the peeling portion 31 to pass through, and support means 6 that supports the wafer WF and moves the wafer WF and the pressing roller 4 relative to each other. It is provided. Note that the sheet supply apparatus includes the feeding means 2, the peeling plate 3, and the peripheral sheet pressing means 5.

  The adhesive sheet AS is formed in a circular shape having a diameter smaller than the size in the short width direction (front-rear direction) of the original fabric RS (hereinafter simply referred to as “width direction”), and is formed at the center in the width direction of the release sheet RL. It is temporarily attached at a predetermined interval. The peripheral sheet US is provided on two sides on the front and rear sides of the adhesive sheet AS and on both sides along the feeding direction of the release sheet RL. In the present embodiment, the peripheral sheet US has a belt-like shape having the same length as the release sheet RL. It has been adopted.

  The feeding means 2 includes a release sheet between a support roller 21 that supports the original fabric RS, guide rollers 22 and 23 that guide the original fabric RS, and a driving roller 24 that is driven by a rotation motor 24A as a driving device. A pinch roller 25 that sandwiches the RL and a collection roller 26 that is driven by a driving device (not shown) and collects the release sheet RL are provided.

  The peripheral sheet pressing means 5 is provided in a pair in front and rear corresponding to the peripheral sheets US on both sides, and is supported by the contact means 51 that contacts the peripheral sheet US and the side surface of the release plate 3, and the contact means 51 is separated from the release sheet 3. The urging means for urging toward the RL, which is a linear motion motor 52 as a drive device, and the peripheral sheet US is located on the upstream side in the feed direction of the original fabric RS with respect to the contact means 51 from the release sheet RL. A non-contact type sensor such as an optical sensor that detects the peeled off portion US1 (see FIG. 2A), a contact type sensor such as a limit switch, and a detection unit 53 configured by an imaging unit such as a camera. ing.

  Each abutment means 51 is supported by a support frame 54 extending in the feed direction of the original fabric RS, and is supported by one end of the support frame 54, and is driven by a rotation motor 55A as a drive means and a drive device. A driving pulley 55, a driven pulley 56 supported on the other end of the support frame 54, and a belt 57 such as a round belt or a flat belt as a contact member wound around the driving pulley 55 and the driven pulley 56, respectively. I have.

  The support means 6 includes a table 61 having a support surface 61A capable of attracting and holding the wafer WF by suction means such as a decompression pump and a vacuum ejector (not shown), and a linear motor 63 as a driving device for supporting the table 61 with a slider 62. I have.

In the sheet sticking apparatus 1 described above, a procedure for sticking the adhesive sheet AS to the wafer WF will be described.
First, after the operator sets the original fabric RS as shown in FIG. 1 in a state where the abutting means 51 is separated from the peeling plate 3, the operation is started via an operating means such as an operation panel or a personal computer (not shown). When the signal is input, the peripheral sheet pressing unit 5 drives the linear motion motor 52 and sandwiches the original fabric RS between the contact unit 51 and the peeling plate 3.

  Next, the feeding means 2 and the peripheral sheet pressing means 5 drive the rotation motor 24A, a driving device (not shown) and the rotation motor 55A, and a part of the peripheral sheet US in the raw fabric RS is transferred to the peripheral sheet pressing means 5 and the peeling plate 3. Feed out the raw fabric RS while sandwiching between. As a result, the peripheral sheet US is temporarily attached to the release sheet RL, can pass through the release portion 31, and can be recovered by the recovery roller 26. Then, as shown in FIG. 1, a detection means (not shown) such as an optical sensor or an imaging means indicates that a predetermined amount of the leading adhesive sheet AS has been peeled off from the peeling sheet RL in the original fabric RS folded back at the peeling portion 31. When detected, the feeding means 2 and the peripheral sheet pressing means 5 stop driving the rotation motor 24A, the driving device (not shown) and the rotation motor 55A, and enter a standby state.

Next, when a transfer means (not shown) such as a manual or multi-joint robot or a belt conveyor places the wafer WF on the support surface 61A of the table 61, the support means 6 drives a decompression means (not shown) to hold the wafer WF by suction. After that, the linear motor 63 is driven and the table 61 is conveyed in the left direction. Subsequently, when detection means (not shown) detects that the table 61 has reached a predetermined position, the feeding means 2 and the peripheral sheet pressing means 5 drive the rotation motor 24A, the drive device (not shown) and the rotation motor 55A, In synchronism with the conveyance of the table 61, the raw fabric RS is fed out in the same manner as described above, and when a detection means (not shown) detects that the next adhesive sheet AS has been peeled from the release sheet RL by a predetermined amount, the feed means 2 and the peripheral sheets The holding means 5 stops the driving of the rotation motor 24A, the driving device (not shown) and the rotation motor 55A. As a result, the leading adhesive sheet AS is pressed against the wafer WF by the pressing roller 4 while being peeled off from the release sheet RL by the release plate 3. At this time as well, as described above, since the raw fabric RS is fed out while sandwiching a part of the peripheral sheet US between the peripheral sheet pressing means 5 and the release plate 3, the peripheral sheet US is not peeled off from the release sheet RL. When detecting means (not shown) detects that the table 61 supporting the wafer WF to which the adhesive sheet AS is attached has reached a predetermined position, the supporting means 6 stops driving the linear motor 63 and the decompressing means (not shown). Alternatively, a transfer means (not shown) supports the wafer WF on the table 61 and transfers it to the next process, storage means or the like. Thereafter, the support means 6 drives the linear motor 63 to move the table 61 to the position shown in FIG. 1, and thereafter the same operation as described above is repeated.
When the original fabric RS is switched to a different original fabric, the original fabric RS is removed from the support roller 21 and the release sheet RL is removed from the collection roller 26 together with the peripheral sheet US. Then, the different original fabric is hung as shown in FIG. 1 and its lead end is fixed to the collecting roller 26.

  According to the embodiment as described above, in order to prevent the peeling of the peripheral sheet US from the release sheet RL, the raw sheet RS is fed out while sandwiching the peripheral sheet US between the peripheral sheet pressing means 5 and the release plate 3. A conventional take-up roller for winding up the peripheral sheet US is no longer necessary, preventing an increase in the size of the apparatus and suppressing an increase in the amount of work when replacing the original RS.

  As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. In addition, the description of the shape, material, and the like disclosed above is exemplary for ease of understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of one part or all of such restrictions is included in this invention.

  For example, when the adhesive sheet AS is repeatedly applied, as shown in FIG. 2A, the peeled portion US1 is formed due to a difference in stretchability between the release sheet RL and the peripheral sheet US. The detecting means 53 detects the peeling portion US1. Then, the peripheral sheet pressing means 5 immediately after or immediately before the feeding means 2 and the peripheral sheet pressing means 5 drive the rotation motor 24A, the driving device (not shown) and the rotation motor 55A. Drives the linear motion motor 52 to temporarily separate the contact means 51 from the peripheral sheet US. As shown in FIG. 2 (B), when the peeled portion US1 is fed a predetermined distance in the original fabric feeding direction, the peripheral sheet pressing means 5 drives the linear motion motor 52 as shown in FIG. 2 (C). Then, the peripheral sheet US is again sandwiched between the contact means 51 and the release plate 3, and the peel portion US1 is pressed against the release plate 3 to crush the peel portion US1, and the peripheral sheet US is temporarily attached to the release sheet RL. The peeling part 31 can be allowed to pass while maintaining the worn state. Thus, the peeling portion US1 can be directed toward the collection roller 26 so as not to enter between the pressing roller 4 and the wafer WF. In addition, since it is comprised so that the edge part of the periphery sheet | seat US folded in the peeling part 31 may be pinched | interposed with the belt 57 and the peeling board 3, peeling part US1 is not formed in the peeling part 31 vicinity.

Further, as shown in FIG. 3A, instead of the peripheral sheet pressing means 5, a pair of front and rear abutting means 71 corresponding to the peripheral sheets US on both sides and abutting means are provided. Peripheral sheet pressing means 7 constituted by urging means 72 that urges 71 toward the release sheet RL may be used.
Each contact means 71 includes a support frame 71A that extends in the left-right direction, a drive pulley 71B that is supported on the right end side of the support frame 71A and is driven by a drive device that is a drive means (not shown), and a support frame 71A. A first driven pulley 71C supported on the left end side, a swing frame 71E rotatably supported on a support shaft 71D of the first driven pulley 71C, and a second supported on the swing end side of the swing frame 71E. A driven pulley 71F and a belt 71G such as a round belt or a flat belt as a contact member wound around the drive pulley 71B, the first driven pulley 71C, and the second driven pulley 71F are provided.
Each urging means 72 is supported on the side surface of the peeling plate 3, and is supported by a linear motion motor 72B as a driving device that supports the support frame 71A by its output shaft 72A, and supported by the support frame 71A, and is oscillated by its output shaft 72C. A linear motion motor 72D as a drive device that supports the moving frame 71E is provided.

  Even in such a peripheral sheet pressing means 7, the same effect as in the above embodiment can be obtained. Further, if the peeling portion US1 is formed as shown in FIG. 3 (A) while the adhesive sheet AS is repeatedly applied, if the detecting means 53 detects the peeling portion US1, the feeding is performed. In the initial stage of the feeding operation of the means 2, the peripheral sheet pressing means 7 drives the linear motion motors 72B and 72D, and as shown by the two-dot chain line in FIG. Then, the peripheral sheet US is again sandwiched between the contact means 71 and the release plate 3, and the peeled portion US1 is crushed in the same manner as described above, and the state in which the peripheral sheet US is temporarily attached to the release sheet RL is maintained. Can be passed. The direct acting motor 72B may be omitted. In this case, since the peripheral sheet US is sandwiched between the belt 71 </ b> G and the peeling plate 3 from the previous stage passing through the peeling portion 31 to the region passing through the peeling portion 31, the peeling portion US <b> 1 is surely separated from the peeling portion 31. It can prevent being formed in the vicinity.

Further, as shown in FIG. 3B, instead of the peripheral sheet pressing means 5, a pair of front and rear abutting means 81 corresponding to the peripheral sheets US on both sides and abutting means are provided. Peripheral sheet pressing means 8 configured by urging means 82 for urging 81 to the release sheet RL may be used.
Each abutment means 81 is supported by the support frame 81A, the left end side of the support frame 81A, and driven by a drive pulley 81B driven by a drive device (not shown) and a support shaft 81C of the drive pulley 81B. A supported swing frame 81D, a driven pulley 81E supported on the upper end side of the swing frame 81D, a belt such as a round belt or a flat belt as a contact member wound around the drive pulley 81B and the driven pulley 81E 81F.
Each urging means 82 is supported on the side surface of the peeling plate 3, and is supported by the linear motion motor 82B as a driving device for supporting the support frame 81A by its output shaft 82A, and by the support frame 81A, and is oscillated by its output shaft 82C. A linear motion motor 82D as a drive device that supports the moving frame 81D is provided.

  Even in such a peripheral sheet pressing means 8, the same effect as in the above embodiment can be obtained. In addition, if the peeling portion US1 is formed as shown in FIG. 3 (B) while the adhesive sheet AS is repeatedly applied, if the detecting means 53 detects the peeling portion US1, the feeding is performed. At the initial stage of the feeding operation of the means 2, the peripheral sheet pressing means 8 drives the linear motors 82B and 82D, and after the contact means 81 is once separated from the peripheral sheet US as shown by the two-dot chain line in FIG. Then, the peripheral sheet US is sandwiched again between the contact means 81 and the peeling plate 3, and the peeled portion US1 is crushed in the same manner as described above, and the state in which the peripheral sheet US is temporarily attached to the release sheet RL is maintained. Can be passed. The direct acting motor 82B may be omitted. In this case, since the peripheral sheet US is sandwiched between the belt 81F and the peeling plate 3 from the previous stage passing through the peeling portion 31 to the area passing through the peeling portion 31, the peeling portion US1 is surely separated from the peeling portion 31. It can prevent being formed in the vicinity.

The peripheral sheet pressing means 5, 7, and 8 may cause the belts 57, 71G, and 81F to rotate at a speed slightly higher than the feed speed of the original fabric RS, whereby the peripheral sheet US is peeled from the release sheet RL. In other words, the belts 57, 71G and 81F send the peripheral sheet US in the feeding direction before the peripheral sheet US is about to be peeled off from the release sheet RL. The peripheral sheet US can be more reliably prevented from peeling off.
The detection means 53 may be omitted. In this case, regardless of whether or not the peripheral sheet US is lifted, every time the feeding operation in the intermittent operation of the adhesive sheet AS is started, every predetermined number of the intermittent operations, or After the contact means 51, 71 and 81 are once separated from the peripheral sheet US at a predetermined timing such as every predetermined time, the peripheral sheet US is sandwiched between the contact means 51, 71 and 81 and the peeling plate 3 again. It may be.
While moving the wafer WF, the sheet supply apparatus may be moved in the direction opposite to the movement of the wafer WF, or the support means 6 may be omitted, the wafer WF may be stopped and the sheet supply apparatus may be moved. In addition, when the wafer WF is transferred by another apparatus, the support means 6 can be omitted in the present invention.
The peripheral sheet US may be provided at one place along the feeding direction of the raw fabric RS, or may be provided at three or more places, and the number of the peripheral sheet pressing means 5, 7 and 8 is One or three or more peripheral sheets US may be provided according to the position and number of the peripheral sheets US.
The peripheral sheet US may be shorter than the length of the release sheet RL and may be a strip or a sheet having a predetermined interval, a straight line, a circle, an ellipse, a polygon such as a triangle or a rectangle, and the like. The shape may also be When the peripheral sheet US has a strip shape or a sheet-like shape, the peripheral sheet pressing means 5, 7, and 8 may be configured to sandwich part or all of the peripheral sheet US with the release plate 3.
The abutting means 51, 71, 81 and the pressing means adopt a configuration in which a pressing member such as a blade material, rubber, resin, sponge, roller, or the like is used, or the peripheral sheet US or the adhesive sheet AS is pressed by air blowing. Can be adopted.
The peripheral sheet pressing means 5, 7, and 8 may omit the rotation motor 55A that drives the drive pulleys 55, 71B and the drive pulley 81B and a drive device (not shown).
The peripheral sheet pressing means 5, 7, and 8 may omit the urging means 52, 72, and 82. In this case, the contact means 51, 71, 81 contact the release plate 3, or the release plate 3 As long as it is fixed with a small gap.
The urging means may be composed of rubber, resin, damper (shock absorber), spring or the like.

  Further, the material, type, shape and the like of the adhesive sheet AS and the adherend in the present invention are not particularly limited. For example, the adhesive sheet AS may be a circle, an ellipse, a polygon such as a triangle or a quadrangle, or other shapes, or may be of an adhesive form such as pressure sensitive adhesive or heat sensitive adhesive, When the heat-sensitive adhesive sheet AS is employed, it may be bonded by an appropriate method such as providing a heating means such as an appropriate coil heater or heat pipe for heating the adhesive sheet. Moreover, such an adhesive sheet is, for example, a single layer having only an adhesive layer AD, an intermediate layer between the base sheet BS and the adhesive layer AD, and a cover layer on the upper surface of the base sheet BS. Further, it may be a three-layer or more layer such as a so-called double-sided adhesive sheet that can peel the base sheet BS from the adhesive layer AD. It may be a layer having an intermediate layer or a single layer or a multilayer having no intermediate layer. Examples of the adherend include, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit board, information recording substrates such as optical disks, glass plates, steel plates, ceramics, wood plates or resin plates, Arbitrary forms of members and articles can also be targeted. In addition, the adhesive sheet AS is replaced with a functional and intended reading, for example, any information label, decorative label, protective sheet, dicing tape, die attach film, die bonding tape, recording layer forming resin sheet, etc. Arbitrary sheets, films, tapes, and the like can be attached to any adherend as described above.

The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described with respect to those means and steps. The process is not limited at all. For example, the peripheral sheet pressing means sandwiches at least a part of the peripheral sheet in the raw material fed by the feeding means with the peeling means, and maintains the state where the peripheral sheet is temporarily attached to the peeling sheet and passes the peeling portion. However, there is no limitation as long as it is within the technical scope in light of the common general technical knowledge at the time of filing (explanation of other means and processes is omitted).
The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single axis robot, an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to the above, it is possible to adopt a combination of them directly or indirectly (some of them overlap with those exemplified in the embodiment).

DESCRIPTION OF SYMBOLS 1 ... Sheet sticking apparatus 2 ... Feeding means 3 ... Release plate (peeling means)
31 ... peeling part 4 ... pressure roller (pressing means)
5, 7, 8 ... Peripheral sheet pressing means 51, 71, 81 ... Abutting means 52 ... Linear motion motor (biasing means)
55A ... Rotating motor (driving means)
57, 71G, 81F ... belt (contact member)
72, 82 ... biasing means AS ... adhesive sheet RL ... release sheet RS ... original fabric US ... peripheral sheet WF ... wafer (adhered body)

Claims (6)

A plurality of adhesive sheets and a feeding means for feeding out the original fabric temporarily attached to one surface of the strip-shaped release sheet with one or more peripheral sheets;
A peeling means having a peeling portion that folds the raw material fed by the feeding means and peels the adhesive sheet from the peeling sheet;
Peripheral sheet pressing means for sandwiching at least a part of the peripheral sheet in the raw material fed by the feeding means with the peeling means, and allowing the peripheral sheet to be temporarily attached to the peeling sheet and passing the peeling portion. A sheet supply apparatus comprising: A step of feeding out an original fabric temporarily attached to one surface of a strip-shaped release sheet, and a plurality of adhesive sheets and one or more peripheral sheets;
Folding the unrolled original fabric at the peeling portion of the peeling means and peeling the adhesive sheet from the release sheet;
Sandwiching at least a part of the peripheral sheet in the unrolled web between the peripheral sheet pressing means and the peeling means, and maintaining the state where the peripheral sheet is temporarily attached to the release sheet and passing the peeling portion; The sheet supply method characterized by implementing. A plurality of adhesive sheets and a feeding means for feeding out the original fabric temporarily attached to one surface of the strip-shaped release sheet with one or more peripheral sheets;
A peeling means having a peeling portion for turning back the original fabric fed by the feeding means and peeling the adhesive sheet from the peeling sheet;
A pressing means for pressing and adhering the adhesive sheet peeled off by the peeling means to the adherend,
Peripheral sheet pressing means for sandwiching at least a part of the peripheral sheet in the raw material fed by the feeding means with the peeling means, and allowing the peripheral sheet to be temporarily attached to the peeling sheet and passing the peeling portion. A sheet sticking device comprising: The peripheral sheet pressing unit includes a contact unit that contacts the peripheral sheet, and a biasing unit that biases the contact unit toward the release sheet,
The biasing means is controlled such that, in the initial stage of the feeding operation of the feeding means, the contact means is once separated from the peripheral sheet, and then the peripheral sheet is sandwiched again by the contact means and the peeling means. The sheet sticking apparatus according to claim 3.   The abutting means includes an abutting member and a driving means for sending the peripheral sheet portion abutted by the abutting member in the feed direction of the original fabric, and is faster than the feed speed of the original fabric by the feeding means. The sheet sticking apparatus according to claim 3 or 4, wherein the peripheral sheet is fed at a speed. A step of feeding out an original fabric temporarily attached to one surface of a strip-shaped release sheet, and a plurality of adhesive sheets and one or more peripheral sheets;
Folding the unrolled original fabric at the peeling portion of the peeling means and peeling the adhesive sheet from the release sheet;
Sandwiching at least a part of the peripheral sheet in the unrolled web between the peripheral sheet pressing means and the peeling means, and maintaining the state where the peripheral sheet is temporarily attached to the release sheet and passing the peeling portion; ,
And a step of affixing the peeled adhesive sheet against an adherend by applying it to the adherend.

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