JP6539523B2 - Sheet feeding apparatus and feeding method - Google Patents

Sheet feeding apparatus and feeding method Download PDF

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JP6539523B2
JP6539523B2 JP2015136451A JP2015136451A JP6539523B2 JP 6539523 B2 JP6539523 B2 JP 6539523B2 JP 2015136451 A JP2015136451 A JP 2015136451A JP 2015136451 A JP2015136451 A JP 2015136451A JP 6539523 B2 JP6539523 B2 JP 6539523B2
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sheet
feeding
adhesive sheet
peeling
raw fabric
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JP2017022180A (en
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芳昭 杉下
芳昭 杉下
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Lintec Corp
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本発明は、シート供給装置および供給方法に関する。   The present invention relates to a sheet feeding apparatus and a feeding method.

従来、剥離手段の折曲部に対して原反の繰出方向上流側に配置された原反挟込手段を備え、接着シートを所定の位置に供給するシート供給装置が知られている(例えば、特許文献1参照)。   Conventionally, there is known a sheet feeding apparatus which includes an original sheet sandwiching means disposed on the upstream side in the feeding direction of the original sheet with respect to the bending part of the peeling section, and supplies the adhesive sheet to a predetermined position (for example Patent Document 1).

特開平6−216242号公報Japanese Patent Laid-Open No. 6-216242

しかしながら、特許文献1に記載されたような従来のシート供給装置では、原反の繰り出しが行われないとき、接着シートが原反挟込手段である張力付与ローラとピンチローラとで挟み込まれた状態で待機する場合があり、このような待機状態が続くと、それらローラの挟込力が1箇所に集中し、接着シートに筋状の挟込跡を形成してしまうという不都合を発生する。このような挟込跡ができると、例えば、被着体との間に気泡が介在した状態で接着シートが貼付されるといった不都合を発生したり、例えば、被着体が半導体ウエハ(以下、単に「ウエハ」という場合がある)の場合、接着シートでウエハの回路面を保護した状態で、当該回路面の反対側面から5〜30μm前後の厚さまでウエハを研削すると、挟込跡が形成された領域のウエハの厚みが他の領域に比べて厚くなり、半導体装置の厚みが不均一となって品質が低下するという不都合を招来したりする。   However, in the conventional sheet feeding apparatus as described in Patent Document 1, when the feeding of the raw fabric is not performed, the adhesive sheet is sandwiched between the tension applying roller and the pinch roller which are the raw fabric pinching means. When such a standby state continues, the pinching force of the rollers is concentrated at one place, which causes a disadvantage that streak-like pinching marks are formed on the adhesive sheet. If such a pinching mark is formed, for example, the adhesive sheet may be stuck in a state where air bubbles intervene with the adherend, or, for example, the adherend may be a semiconductor wafer (hereinafter referred to simply as “semiconductor wafer”). In the case of “wafer”, when the wafer is protected to a thickness of 5 to 30 μm from the opposite side of the circuit surface with the adhesive sheet protecting the circuit surface of the wafer, pinch marks are formed The thickness of the wafer in the region is thicker than that in the other regions, which leads to the disadvantage that the thickness of the semiconductor device becomes uneven and the quality is lowered.

本発明の目的は、剥離手段の折曲部に対して原反の繰出方向上流側で当該原反を挟み込んで接着シートを供給しつつも、挟込力が1箇所に集中することによって当該接着シートに挟込跡を形成することを防止することができるシート供給装置および供給方法を提供することにある。   An object of the present invention is to provide an adhesive sheet by sandwiching the raw fabric on the upstream side of the bending direction of the raw fabric with respect to the bending portion of the peeling means and supplying the adhesive sheet, but the bonding force is concentrated at one place It is an object of the present invention to provide a sheet feeding apparatus and a feeding method which can prevent formation of pinch marks on a sheet.

本発明のシート供給装置は、接着シートを所定の位置に供給するシート供給装置であって、帯状の剥離シートの一方の面に前記接着シートが仮着された原反に繰出力を付与し、当該原反を所定の繰出方向に繰り出す繰出手段と、前記繰出手段で繰り出される原反をその折曲部で折り曲げて前記剥離シートから前記接着シートを剥離する剥離手段とを備え、前記繰出手段は、前記折曲部に対して前記繰出方向上流側に配置され、前記原反を挟み込む原反挟込手段を備え、前記剥離手段で前記接着シートの繰出方向先端部を前記剥離シートから剥離するときにのみ、前記原反挟込手段で前記原反を挟みこむことを特徴とする。   The sheet feeding apparatus according to the present invention is a sheet feeding apparatus for feeding an adhesive sheet to a predetermined position, and applies a cyclic output to a raw fabric on which the adhesive sheet is temporarily attached to one surface of a strip-shaped release sheet. The sheet feeding apparatus further comprises: a feeding means for feeding the raw fabric in a predetermined feeding direction; and a peeling means for bending the raw fabric fed by the feeding means at its bending portion to peel the adhesive sheet from the peeling sheet The sheet feeding apparatus further includes an original sheet sandwiching means disposed on the upstream side in the delivery direction with respect to the bent portion and sandwiching the raw fabric, and the exfoliation sheet exfoliates the leading edge of the adhesive sheet in the delivery direction from the release sheet. In the above, it is characterized in that the original fabric is sandwiched by the original fabric sandwiching means.

本発明のシート供給装置において、前記繰出手段は、前記原反挟込手段による挟込位置を変更可能な挟込位置変更手段を備えていることが好ましい。
本発明のシート供給装置において、前記原反は、前記剥離シートの一方の面に接着シート間領域を隔てて複数の接着シートが仮着され、前記接着シート間領域を検知可能なシート間領域検知手段を備え、前記挟込位置変更手段は、前記シート間領域検知手段の検知結果を基に、前記原反挟込手段によって前記原反を挟み込んだ瞬間の位置を前記接着シート間領域とすることが好ましい。
本発明のシート供給装置において、前記挟込位置変更手段は、前記剥離手段で前記接着シートの繰出方向先端部を前記剥離シートから剥離する間、前記原反挟込手段で前記接着シート間領域を挟み込んだ状態のまま当該原反挟込手段を前記繰出方向に移動可能に設けられていることが好ましい。
In the sheet feeding apparatus according to the present invention, preferably, the feeding means includes a pinching position changing means capable of changing a pinching position by the original roll pinching means.
In the sheet feeding apparatus according to the present invention, a plurality of adhesive sheets are temporarily attached to one surface of the release sheet with an adhesive sheet area separated, and the sheet material can detect the sheet area. Means for the pinching position changing means, based on the detection result of the inter-sheet area detecting means, to set the position at the moment when the original fabric is pinched by the original fabric pinching means as the adhesive sheet area Is preferred.
In the sheet feeding apparatus according to the present invention, the pinching position changing unit is configured to peel off the region between the adhesive sheets by the original roll pinching unit while peeling the leading end of the adhesive sheet in the feeding direction from the peeling sheet It is preferable that the raw fabric pinching means be provided so as to be movable in the feeding direction while being pinched.

本発明のシート供給方法は、接着シートを所定の位置に供給するシート供給方法であって、帯状の剥離シートの一方の面に前記接着シートが仮着された原反を所定の繰出方向に繰り出す工程と、前記繰り出される原反を剥離手段の折曲部で折り曲げて前記剥離シートから前記接着シートを剥離する工程と、前記剥離手段で前記接着シートの繰出方向先端部を前記剥離シートから剥離するときにのみ、前記折曲部に対して前記繰出方向上流側に配置された原反挟込手段で前記原反を挟みこむ工程とを備えていることを特徴とする。   The sheet feeding method of the present invention is a sheet feeding method of feeding an adhesive sheet to a predetermined position, and unwinds in a predetermined feeding direction a raw fabric on which the adhesive sheet is temporarily attached to one surface of a strip-shaped release sheet. Peeling off the adhesive sheet from the release sheet by bending the unrolled raw fabric at the bending portion of the peeling means, and peeling the leading end of the adhesive sheet in the delivery direction from the release sheet by the peeling means And a step of sandwiching the raw fabric with the raw fabric sandwiching means disposed on the upstream side in the feeding direction with respect to the bending portion.

以上のような本発明によれば、原反が繰り出されていないときに、当該原反上の接着シートの一部分を挟み込み続けることがないので、剥離手段の折曲部に対して原反の繰出方向上流側で当該原反を挟み込んで接着シートを供給しつつも、挟込力が1箇所に集中することによって当該接着シートに挟込跡を形成することを防止することができる。   According to the present invention as described above, since the part of the adhesive sheet on the original fabric is not kept pinched when the original fabric is not drawn out, the original fabric is delivered to the bending portion of the peeling means. While feeding the adhesive sheet by sandwiching the raw fabric on the upstream side in the direction, it is possible to prevent formation of a pinching mark in the adhesive sheet by concentrating the pinching force in one place.

また、原反挟込手段による挟込位置を変更可能にすれば、原反における所望の位置を当該原反挟込手段で挟み込むことができる。
さらに、原反挟込手段によって原反を挟み込んだ瞬間の位置を接着シート間領域とすれば、原反挟込手段による打撃によって接着シートに挟込跡が形成されることも防止することができる。
また、原反挟込手段で接着シート間領域を挟み込んだ状態のまま、当該原反挟込手段を繰出方向に移動可能にすれば、接着シートの繰出方向先端部を剥離シートから剥離する供給動作中に、何らかの要因でこの供給動作が停止したとしても、挟込力が1箇所に集中することによって接着シートに挟込跡が形成されることを確実に防止することができる。
In addition, if it is possible to change the sandwiching position by the original fabric sandwiching means, it is possible to sandwich a desired position on the original fabric with the original fabric sandwiching means.
Furthermore, if the position at the moment of sandwiching the raw fabric by the raw fabric sandwiching means is made to be the area between the adhesive sheets, it is possible to prevent the formation of pinching marks in the adhesive sheet by the impact by the raw fabric sandwiching means. .
In addition, the feeding operation for peeling the leading end portion in the delivery direction of the adhesive sheet from the release sheet if the original sandwiching means is movable in the delivery direction with the original sheet sandwiching means sandwiching the region between the adhesive sheets. During this operation, even if the supply operation is stopped for some reason, it is possible to reliably prevent the formation of the pinching mark on the adhesive sheet by the pinching force being concentrated at one place.

本発明の一実施形態に係るシート供給装置の側面図。FIG. 1 is a side view of a sheet feeding apparatus according to an embodiment of the present invention.

以下、本発明の一実施形態を図面に基づいて説明する。
なお、本実施形態におけるX軸、Y軸、Z軸は、それぞれが直交する関係にあり、X軸およびY軸は、所定平面内の軸とし、Z軸は、前記所定平面に直交する軸とする。さらに、本実施形態では、Y軸と平行な図1中手前方向から観た場合を基準とし、方向を示した場合、「上」がZ軸の矢印方向で「下」がその逆方向、「左」がX軸の矢印方向で「右」がその逆方向、「前」がY軸と平行な図1中手前方向で「後」がその逆方向とする。
Hereinafter, an embodiment of the present invention will be described based on the drawings.
In the present embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis orthogonal to the predetermined plane. Do. Furthermore, in the present embodiment, when the direction is indicated on the basis of a front direction in FIG. 1 parallel to the Y axis, “upper” is the arrow direction of the Z axis, “lower” is the opposite direction, “Left” is the arrow direction of the X axis, “right” is the opposite direction, and “front” is the front direction in FIG. 1 parallel to the Y axis, “rear” is the opposite direction.

図1において、シート供給装置10は、接着シートASを所定の位置に供給する装置であって、帯状の剥離シートRLの一方の面に接着シート間領域SDを隔てて複数の接着シートASが仮着された原反RSに繰出力を付与し、当該原反RSを所定の繰出方向に繰り出す繰出手段20と、繰出手段20で繰り出される原反RSをその折曲部30Aで折り曲げて剥離シートRLから接着シートASを剥離する剥離手段としての剥離板30と、光学センサや撮像手段等で構成され、接着シート間領域SDを検知可能なシート間領域検知手段40と、光学センサや撮像手段等で構成され、剥離板30上の所定位置で接着シートASの繰出方向先端部AS1を検知可能な先端検知手段40Aとを備え、接着シートASを被着体としてのウエハWFに押圧する押圧手段としての押圧ローラ50の近傍であって、ウエハWFを相対移動させる移送手段60の上方に配置されている。   In FIG. 1, the sheet feeding apparatus 10 is an apparatus for feeding the adhesive sheet AS to a predetermined position, and a plurality of adhesive sheets AS are temporarily separated on one surface of the strip-like release sheet RL with the adhesive sheet area SD separated. A feeding means 20 for giving a feeding output to the coated raw fabric RS and feeding out the raw fabric RS in a predetermined feeding direction, and bending the raw fabric RS fed by the feeding means 20 at its bending portion 30A to release sheet RL Between the inter-sheet area detection means 40 which is comprised of a peeling plate 30 as a peeling means for peeling the adhesive sheet AS from the above, an optical sensor, an imaging means, etc., and an optical sensor or an imaging means The apparatus comprises: a tip detection means 40A configured and capable of detecting the delivery direction tip AS1 of the adhesive sheet AS at a predetermined position on the peeling plate 30, and pressing the adhesive sheet AS against the wafer WF as an adherend A vicinity of the pressing roller 50 as a pressing means for being disposed wafer WF above the transfer means 60 for relatively moving.

繰出手段20は、原反RSを支持する支持ローラ21と、原反RSを案内する複数のガイドローラ22と、折曲部30Aに対して繰出方向上流側に配置され、原反RSを挟み込む原反挟込手段23と、原反挟込手段23による挟込位置を変更可能な挟込位置変更手段24と、剥離シートRLを回収する回収手段25とを備え、その全体がフレーム26に支持されている。なお、原反RSの繰出方向(以下、単に「繰出方向」という場合がある)とは、当該原反RSが支持ローラ21から回収手段25に向かって繰り出される方向である。
原反挟込手段23は、基台23Aに支持された駆動機器としての回動モータ23Bによって駆動される駆動ローラ23Cと、基台23Aに回転可能に支持されたアーム23Dと、基台23Aに支持され、その出力軸でアーム23Dを回転可能に支持する駆動機器としての直動モータ23Eと、アーム23Dに回転可能に支持されたピンチローラ23Fとを備えている。なお、シート間領域検知手段40は、図示しないアームを介して基台23Aに支持されている。
挟込位置変更手段24は、そのスライダ24Bによって基台23Aを支持する駆動機器としてのリニアモータ24Aを備え、シート間領域検知手段40の検知結果を基に、原反挟込手段23による挟込位置を変更可能に設けられている。
回収手段25は、駆動機器としての回動モータ25Aによって駆動される駆動ローラ25Bと、駆動ローラ25Bとの間に剥離シートRLを挟み込むピンチローラ25Cと、剥離シートRLを巻回する巻回ローラ25Dとを備えている。
The feeding means 20 is disposed upstream of the support roller 21 for supporting the raw fabric RS, a plurality of guide rollers 22 for guiding the raw fabric RS, and the bending portion 30A, and holds the raw fabric RS. An anti-sandwich means 23, a pinching position changing means 24 capable of changing the pinching position by the raw fabric pinching means 23, and a recovery means 25 for recovering the release sheet RL, the whole of which is supported by the frame 26 ing. In addition, the delivery direction of the raw fabric RS (hereinafter, may be simply referred to as the “delivery direction”) is a direction in which the raw fabric RS is fed toward the collection means 25 from the support roller 21.
The raw material nipping means 23 includes a drive roller 23C driven by a rotation motor 23B as a drive device supported by the base 23A, an arm 23D rotatably supported by the base 23A, and a base 23A. A linear motion motor 23E is supported as a driving device that rotatably supports the arm 23D with its output shaft, and a pinch roller 23F rotatably supported by the arm 23D. The inter-sheet area detection means 40 is supported by the base 23A via an arm (not shown).
The pinching position changing means 24 includes a linear motor 24A as a driving device for supporting the base 23A by the slider 24B, and pinching by the original pinching means 23 based on the detection result of the inter-sheet area detecting means 40. The position can be changed.
The recovery unit 25 includes a drive roller 25B driven by a rotation motor 25A as a drive device, a pinch roller 25C sandwiching the release sheet RL between the drive roller 25B, and a winding roller 25D winding the release sheet RL. And have.

移送手段60は、駆動機器としてのリニアモータ61のスライダ61Aに支持され、減圧ポンプや真空エジェクタ等の図示しない減圧手段によってウエハWFを吸着保持可能な支持面62Aを有するテーブル62を備えている。   The transfer means 60 is supported by a slider 61A of a linear motor 61 as a drive device, and is provided with a table 62 having a support surface 62A capable of attracting and holding the wafer WF by pressure reducing means (not shown) such as a pressure reducing pump and a vacuum ejector.

以上のシート供給装置10において、ウエハWFに接着シートASを貼付する手順を説明する。
先ず、駆動ローラ23Cとピンチローラ23Fとで原反RSを挟み込んでいない状態のシート供給装置10に対し、作業者が原反RSを図1に示すようにセットした後、操作パネルやパーソナルコンピュータ等の図示しない入力手段を介して自動運転開始の信号を入力する。すると、繰出手段20が回動モータ25Aを駆動し、原反RSを繰り出し、接着シートASの繰出方向先端部AS1が先端検知手段40Aに検知されると、直動モータ23Eを駆動し、図1中二点鎖線で示すように、駆動ローラ23Cとピンチローラ23Fとで原反RSを挟み込むとともに、回動モータ23Bを駆動する。そして、図1に示すように、剥離板30上に位置する先頭の接着シートASの繰出方向先端部AS1が折曲部30Aで所定長さ剥離されたことが光学センサや撮像手段等の図示しない検知手段に検知されると、繰出手段20が回動モータ23B、25Aの駆動を停止するとともに、直動モータ23Eを駆動し、駆動ローラ23Cとピンチローラ23Fとでの原反RSの挟み込みを解除して当該繰出手段20が待機状態となる。これにより、繰出手段20は、剥離板30で接着シートASの繰出方向先端部AS1を剥離シートRLから剥離するときにのみ、原反挟込手段23で原反RSを挟み込むこととなる。これにより、接着シートASの繰出方向先端部AS1が折曲部30Aで剥離され易くなる。
ここで、接着シートASの繰出方向先端部AS1を剥離シートRLから剥離する供給動作中に、何らかの要因でこの供給動作が停止した場合、駆動ローラ23Cとピンチローラ23Fとでの原反RSの挟み込みを解除する構成としておけば、このように供給動作が停止したときにでも、挟込力が1箇所に集中することによって接着シートに挟込跡が形成されることを確実に防止することができる。
A procedure for sticking the adhesive sheet AS to the wafer WF in the above-described sheet supply apparatus 10 will be described.
First, the operator sets the original sheet RS as shown in FIG. 1 with respect to the sheet feeding device 10 in a state in which the original sheet RS is not sandwiched by the drive roller 23C and the pinch roller 23F, and then the operation panel, personal computer, etc. A signal for starting the automatic operation is input through an input means (not shown) of FIG. Then, the feeding means 20 drives the rotation motor 25A to feed the original sheet RS, and when the leading end portion AS1 in the feeding direction of the adhesive sheet AS is detected by the leading end detection means 40A, the linear motion motor 23E is driven. As indicated by the middle two-dot chain line, the original roll RS is sandwiched between the drive roller 23C and the pinch roller 23F, and the rotation motor 23B is driven. Then, as shown in FIG. 1, the delivery direction tip end portion AS1 of the leading adhesive sheet AS located on the release plate 30 is peeled off for a predetermined length by the bending portion 30A, but the optical sensor, imaging means, etc. are not shown. When detected by the detection means, the feeding means 20 stops the drive of the rotation motors 23B and 25A and drives the linear motion motor 23E to release the pinching of the original fabric RS between the drive roller 23C and the pinch roller 23F. Then, the feeding means 20 is in a standby state. As a result, the feeding means 20 sandwiches the raw fabric RS with the raw fabric sandwiching means 23 only when peeling the leading end portion AS1 of the adhesive sheet AS in the feeding direction with the peeling plate 30 from the peeling sheet RL. Thereby, the delivery direction tip end portion AS1 of the adhesive sheet AS is easily peeled off at the bending portion 30A.
Here, when the supply operation is stopped for some reason during the supply operation of peeling the leading end portion AS1 of the adhesive sheet AS in the delivery direction from the release sheet RL, pinching of the original sheet RS by the drive roller 23C and the pinch roller 23F. If the feeding operation is stopped in this way, it is possible to reliably prevent formation of a pinching mark in the adhesive sheet by concentrating the pinching force in one place. .

その後、人手または多関節ロボットやベルトコンベア等の図示しない搬送手段により、図1中実線で示す初期位置にあるテーブル62の支持面62A上にウエハWFを載置すると、移送手段60が図示しない減圧手段を駆動し、ウエハWFを吸着保持した後、リニアモータ61を駆動し、テーブル62を左方向に移動させる。次いで、ウエハWFが所定位置に到達したことが光学センサや撮像手段等の図示しない検知手段に検知されると、繰出手段20が回動モータ25Aを駆動し、テーブル62の移動速度に合わせて原反RSを繰り出す。これにより、先頭の接着シートASが剥離板30の折曲部30Aの位置で剥離シートRLから剥離され、押圧ローラ50によってウエハWFに押圧されて貼付される。なお、先頭の接着シートASを繰出中に、次回貼付予定の接着シートASの繰出方向先端部AS1が先端検知手段40Aに検知されると、上記と同様にして繰出手段20が駆動ローラ23Cとピンチローラ23Fとで原反RSを挟み込み、当該次回貼付予定の接着シートASの繰出方向先端部AS1が折曲部30Aで所定長さ剥離されたことが図示しない検知手段に検知されると、上記と同様にして当該繰出手段20が再び待機状態となる。   Thereafter, when the wafer WF is placed on the support surface 62A of the table 62 at the initial position shown by the solid line in FIG. 1 by a transfer means such as a hand or an articulated robot or a belt conveyor, the pressure reduction not shown by the transfer means 60. After driving the means to suction and hold the wafer WF, the linear motor 61 is driven to move the table 62 in the left direction. Next, when it is detected by the detection means (not shown) such as an optical sensor or an imaging means that the wafer WF has reached a predetermined position, the delivery means 20 drives the rotation motor 25A to match the moving speed of the table 62 to the original. Pay out anti-RS. As a result, the first adhesive sheet AS is peeled off from the peeling sheet RL at the position of the bending portion 30A of the peeling plate 30, and is pressed against the wafer WF by the pressing roller 50 and stuck. When the leading end AS1 of the adhesive sheet AS scheduled to be attached next is detected by the leading end detection means 40A during the delivery of the leading adhesive sheet AS, the delivery means 20 pinches the drive roller 23C and pinch in the same manner as described above. When it is detected by detection means (not shown) that the original sheet RS is sandwiched with the roller 23F and the delivery direction leading end AS1 of the adhesive sheet AS to be attached next time is peeled off by the bending part 30A by a predetermined length. Similarly, the feeding means 20 is again in the standby state.

ウエハWFに接着シートASの貼付が完了すると、移送手段60がリニアモータ61および図示しない減圧手段の駆動を停止した後、図示しない搬送手段がウエハWFを次工程に搬送する。そして、移送手段60がリニアモータ61を駆動し、テーブル62を初期位置に復帰させ、以降上記同様の動作が繰り返される。   When the adhesion of the adhesive sheet AS to the wafer WF is completed, the transfer means 60 stops the driving of the linear motor 61 and the decompression means (not shown), and the transfer means (not shown) transports the wafer WF to the next process. Then, the transfer means 60 drives the linear motor 61 to return the table 62 to the initial position, and thereafter the same operation as described above is repeated.

以上のような実施形態によれば、原反RSが繰り出されていないときに、当該原反RS上の接着シートASの一部分を挟み込み続けることがないので、剥離板30の折曲部30Aに対して原反RSの繰出方向上流側で当該原反RSを挟み込んで接着シートASを供給しつつも、挟込力が1箇所に集中することによって当該接着シートASに挟込跡を形成することを防止することができる。   According to the embodiment as described above, when the raw fabric RS is not fed out, since it is not continued to sandwich a part of the adhesive sheet AS on the raw fabric RS, the bending portion 30A of the peeling plate 30 is While sandwiching the raw fabric RS on the upstream side in the feeding direction of the raw fabric RS and supplying the adhesive sheet AS, forming a pinching mark in the adhesive sheet AS by concentrating the pinching force at one place It can be prevented.

以上のように、本発明を実施するための最良の構成、方法等は、前記記載で開示されているが、本発明は、これに限定されるものではない。すなわち、本発明は、主に特定の実施形態に関して特に図示され、かつ説明されているが、本発明の技術的思想および目的の範囲から逸脱することなく、以上述べた実施形態に対し、形状、材質、数量、その他の詳細な構成において、当業者が様々な変形を加えることができるものである。また、上記に開示した形状、材質などを限定した記載は、本発明の理解を容易にするために例示的に記載したものであり、本発明を限定するものではないから、それらの形状、材質などの限定の一部もしくは全部の限定を外した部材の名称での記載は、本発明に含まれる。   As described above, the best configuration, method and the like for carrying out the present invention are disclosed in the above description, but the present invention is not limited to this. That is, although the present invention has been particularly illustrated and described primarily with respect to particular embodiments, it is to be understood that shapes relative to the above-described embodiments can be made without departing from the spirit and scope of the invention. A person skilled in the art can make various modifications in material, quantity, and other detailed configurations. Moreover, the description which limited the shape, the material, etc. which were disclosed above is described in an exemplification for facilitating the understanding of the present invention, and the present invention is not limited. The description in the name of the member from which the limitation of some or all of the limitations such as is removed is included in the invention.

例えば、繰出手段20は、帯状の接着シート基材に閉ループ状の切込が形成されることで、その内側が接着シートAS、外側が不要シートとされ、接着シート間領域SDを隔てて複数の接着シートASが帯状の剥離シートRLに仮着された原反を繰り出してもよい。また、帯状の接着シート基材が帯状の剥離シートRLに仮着された原反が採用された場合、図1中二点鎖線で示すように、プラテンローラ71と、閉ループ状の切断刃72Aを有するカッターローラ72とで構成された切断手段により接着シート基材を所定形状に切断し、接着シート間領域SDを隔てて複数の接着シートASが帯状の剥離シートRLに仮着された原反を形成してもよい。なお、切断手段は、レーザカッター、熱カッター、エアカッター、圧縮水カッター等の他のもので構成してもよい。
繰出手段20は、原反挟込手段23のみまたは、回収手段25のみを駆動して原反RSに繰出力を付与してもよい。
繰出手段20は、回収手段25を備えなくてもよい。
繰出手段20は、図1中二点鎖線で示すように、圧力センサやロードセル等の張力検知手段22Aを介して下方に位置するガイドローラ22を回転可能に支持し、当該張力検知手段22Aの検知結果を基に、トルク制御と速度制御との少なくとも一方を行い、剥離シートRLに張力を付与したり、ウエハWFに押圧されている接着シートASに所定の張力を付与したりしてもよいし、トルク制御と速度制御との両方を同時に行ってもよい。
For example, the feeding means 20 has a cut in the form of a closed loop formed in a band-like adhesive sheet substrate, so that the adhesive sheet AS is on the inside and the unnecessary sheet is on the outside. The adhesive sheet AS may draw out the raw fabric temporarily attached to the strip-shaped release sheet RL. In addition, when a raw material in which a band-like adhesive sheet substrate is temporarily attached to a band-like release sheet RL is employed, as shown by a two-dot chain line in FIG. 1, a platen roller 71 and a cutting blade 72A in a closed loop shape are used. The adhesive sheet substrate is cut into a predetermined shape by a cutting means constituted by the cutter roller 72 and the original sheet on which a plurality of adhesive sheets AS are temporarily attached to the strip-shaped release sheet RL across the adhesive sheet area SD. You may form. In addition, you may comprise the cutting means by other things, such as a laser cutter, a heat cutter, an air cutter, and a compression water cutter.
The feeding means 20 may drive only the raw fabric pinching means 23 or only the recovery means 25 to give a rolling output to the raw fabric RS.
The feeding means 20 may not have the collecting means 25.
The feeding means 20 rotatably supports the guide roller 22 positioned below via a tension sensor 22A such as a pressure sensor or a load cell as indicated by a two-dot chain line in FIG. 1, and detects the tension sensor 22A. Based on the result, at least one of torque control and speed control may be performed to apply tension to the release sheet RL or apply predetermined tension to the adhesive sheet AS pressed against the wafer WF. , Both torque control and speed control may be performed simultaneously.

原反挟込手段23は、メカチャックやチャックシリンダ等のチャック手段、丸棒やブレード材等で原反RSを挟み込んでもよい。
原反挟込手段23は、回動モータ23Bのトルク制御を行い、駆動ローラ23Cを介して原反RSから受けるトルクが所定値となるように維持しながら当該駆動ローラ23Cを回転させたり、回動モータ23Bの速度制御を行い、回動モータ25Aがテーブル62の移動速度に合わせて原反RSを繰り出す速度よりも遅い速度で駆動ローラ23Cを駆動させたり、原反RSの繰出方向の反対方向(図1の場合、時計回転方向)に駆動ローラ23Cを駆動させたりすることで、剥離シートRLに所定の張力を付与し、当該剥離シートRLからの接着シートASの剥離を容易に行えるようにしたり、ウエハWFに押圧されている接着シートASに所定の張力を付与したりしてもよいし、トルク制御と速度制御との両方を同時に行ってもよい。
原反挟込手段23は、駆動ローラ23Cを回転させる駆動機器を設けなくてもよい。
The raw fabric sandwiching means 23 may sandwich the raw fabric RS with chuck means such as a mechanical chuck or a chuck cylinder, a round bar, a blade material or the like.
The original roll pinching unit 23 controls the torque of the rotation motor 23B, rotates the drive roller 23C while maintaining the torque received from the original roll RS via the drive roller 23C to a predetermined value, The speed control of the motion motor 23B is performed, and the drive roller 23C is driven at a speed slower than the speed at which the rotation motor 25A moves the raw fabric RS according to the movement speed of the table 62 By driving the drive roller 23C in the clockwise direction (in the case of FIG. 1), a predetermined tension is applied to the release sheet RL so that the adhesive sheet AS can be easily released from the release sheet RL. Alternatively, a predetermined tension may be applied to the adhesive sheet AS pressed against the wafer WF, or both torque control and speed control may be performed simultaneously.
It is not necessary to provide the driving device for rotating the drive roller 23C for the original roll pinching means 23.

挟込位置変更手段24は、シート間領域検知手段40の検知結果を基に、原反挟込手段23によって原反RSを挟み込んだ瞬間の位置を接着シート間領域SDとなるように構成してもよい。
挟込位置変更手段24は、剥離板30で接着シートASの繰出方向先端部AS1を剥離シートRLから剥離する間、原反挟込手段23で接着シート間領域SDを挟み込んだ状態のまま当該原反挟込手段23を繰出方向に移動させてもよい。この場合、挟込位置変更手段24によって、図1中二点鎖線で示すように、駆動ローラ23Cとピンチローラ23Fとで原反RSを挟み込んだ瞬間の位置を接着シート間領域SDとしておく。そして、上記と同様にして駆動ローラ23Cとピンチローラ23Fとで原反RSを挟み込んだ後は、回動モータ23Bの回転をロックした状態で、リニアモータ24Aを駆動し、原反RSの繰出に合わせて原反挟込手段23を移動させる。そして、接着シートASの繰出方向先端部AS1が折曲部30Aで所定長さ剥離されたことが図示しない検知手段に検知されると、駆動ローラ23Cとピンチローラ23Fとによる原反RSの挟込を解除した後、それらを、原反RSを挟み込んだ位置に復帰させればよい。
挟込位置変更手段24は、シート間領域検知手段40の検知結果を基に、原反挟込手段23によって原反RSを挟み込んだ瞬間の位置を接着シート間領域SDとなるように構成してもよい。
挟込位置変更手段24は、リニアモータ24Aのトルク制御を行い、駆動ローラ23Cを介して原反RSから受けるトルクが所定値となるように維持しながらスライダ24Bを原反繰出方向に移動させたり、リニアモータ24Aの速度制御を行い、回動モータ25Aがテーブル62の移動速度に合わせて原反RSを繰り出す速度よりも遅い速度でスライダ24Bを原反繰出方向に移動させたりすることで、剥離シートRLに所定の張力を付与し、当該剥離シートRLからの接着シートASの剥離を容易に行えるようにしたり、ウエハWFに押圧されている接着シートASに所定の張力を付与したりしてもよいし、トルク制御と速度制御との両方を同時に行ってもよい。
挟込位置変更手段24はなくてもよい。
挟込位置変更手段24は、原反挟込手段23による挟込位置を手動で変更する構成としてもよく、この場合、シート間領域検知手段40は、あってもよいしなくてもよい。
Based on the detection result of the inter-sheet area detection means 40, the interposing position changing means 24 configures the position at the moment when the original web RS is intervened by the original interposing means 23 as the inter-adhesive sheet area SD. It is also good.
While the pinching position changing means 24 peels the leading edge portion AS1 of the adhesive sheet AS in the delivery direction with the peeling plate 30 from the peeling sheet RL, the raw sheet pinching means 23 holds the adhesive sheet area SD in a state of being sandwiched. The anti-sandwich means 23 may be moved in the delivery direction. In this case, as shown by a two-dot chain line in FIG. 1, the position at which the original sheet RS is sandwiched by the drive roller 23C and the pinch roller 23F is set as the inter-adhesion sheet area SD. Then, after the original roll RS is sandwiched between the drive roller 23C and the pinch roller 23F in the same manner as described above, the linear motor 24A is driven in a state where the rotation of the rotation motor 23B is locked, and the raw roll RS is fed out. At the same time, the original roll nipping means 23 is moved. Then, when it is detected by detection means (not shown) that the adhesive sheet AS in the delivery direction leading end AS1 has been peeled off by a predetermined length at the bending portion 30A, the original sheet RS is pinched by the drive roller 23C and the pinch roller 23F. Then, they should be returned to the position where the original fabric RS is sandwiched.
Based on the detection result of the inter-sheet area detection means 40, the interposing position changing means 24 configures the position at the moment when the original web RS is intervened by the original interposing means 23 as the inter-adhesive sheet area SD. It is also good.
The pinching position changing means 24 performs torque control of the linear motor 24A, and moves the slider 24B in the original unwinding direction while maintaining the torque received from the original RS via the drive roller 23C to be a predetermined value. , Peeling by moving the slider 24B in the original feeding direction at a speed slower than the speed at which the rotary motor 25A feeds the raw RS according to the speed control of the linear motor 24A. Even if a predetermined tension is applied to the sheet RL to facilitate peeling of the adhesive sheet AS from the release sheet RL, or even if a predetermined tension is applied to the adhesive sheet AS pressed against the wafer WF. Both torque control and speed control may be performed simultaneously.
The sandwiching position changing means 24 may be omitted.
The pinching position changing means 24 may be configured to manually change the pinching position by the original roll pinching means 23. In this case, the inter-sheet area detecting means 40 may or may not be present.

剥離手段は、丸棒やローラ等で構成してもよい。
シート間領域検知手段40は、リミットスイッチ等の接触型のセンサでもよい。
シート間領域検知手段40は、基台23Aに支持されることなく、例えば、原反挟込手段23に対して繰出方向上流側または繰出方向下流側に配置されてもよい。
押圧手段は、丸棒、ブレード材、ゴム、樹脂、スポンジ等で押圧部材を採用してもよいし、エア噴き付けにより接着シートASを被着体に押圧する構成としてもよい。
The peeling means may be constituted by a round bar, a roller or the like.
The inter-sheet area detection means 40 may be a contact type sensor such as a limit switch.
The inter-sheet region detection means 40 may be disposed, for example, on the upstream side in the delivery direction or on the downstream side in the delivery direction with respect to the raw material nipping means 23 without being supported by the base 23A.
The pressing means may employ a pressing member such as a round bar, a blade, rubber, resin, sponge or the like, or may be configured to press the adhesive sheet AS against the adherend by air spraying.

移送手段60は、メカチャックやチャックシリンダ等のチャック手段、クーロン力、接着剤、粘着剤、磁力、ベルヌーイ吸着等で被着体を支持する構成でもよい。
移送手段60は、テーブル62の位置を固定しておきシート供給装置10等を移動させてもよいし、テーブル62およびシート供給装置10等の両方を移動させてもよい。
シート供給装置10等に対し、他の装置でウエハWFを相対移動させる場合、移送手段60はなくてもよい。
The transfer means 60 may be configured to support the adherend by chuck means such as a mechanical chuck or chuck cylinder, Coulomb force, adhesive, adhesive, magnetic force, Bernoulli adsorption or the like.
The transfer means 60 may move the sheet supply device 10 or the like while fixing the position of the table 62 or may move both the table 62 and the sheet supply device 10 or the like.
When the wafer WF is to be moved relative to the sheet feeding device 10 or the like by another device, the transfer means 60 may be omitted.

シート供給装置10は、帯状の接着シート基材をウエハWFに貼付した後、当該接着シート基材を切断刃、レーザカッター、熱カッター、エアカッター、圧縮水カッター等の切断手段で所定形状の接着シートASに切断してもよい。この場合、挟込位置変更手段24は、後に切断手段で切断される接着シートASの大きさと、切断後の接着シート間領域SDとを考慮して、接着シート基材における挟込位置を変更することができる。   The sheet supply apparatus 10 adheres a band-like adhesive sheet substrate to the wafer WF, and then adheres the adhesive sheet substrate to a predetermined shape by cutting means such as a cutting blade, a laser cutter, a heat cutter, an air cutter, or a compressed water cutter. It may be cut into sheets AS. In this case, the pinching position changing means 24 changes the pinching position in the adhesive sheet base material in consideration of the size of the adhesive sheet AS to be cut later by the cutting means and the inter-adhesive sheet area SD after cutting. be able to.

また、本発明における接着シートASおよび被着体の材質、種別、形状等は、特に限定されることはない。例えば、接着シートASは、円形、楕円形、三角形や四角形等の多角形、その他の形状であってもよいし、感圧接着性、感熱接着性等の接着形態のものであってもよく、感熱接着性の接着シートASが採用された場合は、当該接着シートを加熱する適宜なコイルヒータやヒートパイプ等の加熱側等の加熱手段を設けるといった適宜な方法で接着されればよい。また、このような接着シートASは、例えば、接着剤層だけの単層のもの、基材シートと接着剤層との間に中間層を有するもの、基材シートの上面にカバー層を有する等3層以上のもの、更には、基材シートを接着剤層から剥離することのできる所謂両面接着シートのようなものであってもよく、両面接着シートは、単層又は複層の中間層を有するものや、中間層のない単層又は複層のものであってよい。また、被着体としては、例えば、食品、樹脂容器、シリコン半導体ウエハや化合物半導体ウエハ等の半導体ウエハ、回路基板、光ディスク等の情報記録基板、ガラス板、鋼板、陶器、木板または樹脂板等、任意の形態の部材や物品なども対象とすることができる。なお、接着シートASを機能的、用途的な読み方に換え、例えば、情報記載用ラベル、装飾用ラベル、保護シート、ダイシングテープ、ダイアタッチフィルム、ダイボンディングテープ、記録層形成樹脂シート等の任意の形状の任意のシート、フィルム、テープ等を前述のような任意の被着体に貼付することができる。   Further, the material, type, shape and the like of the adhesive sheet AS and the adherend in the present invention are not particularly limited. For example, the adhesive sheet AS may have a circular shape, an elliptical shape, a polygonal shape such as a triangle or a quadrangle, or any other shape, or may have an adhesive form such as pressure-sensitive adhesiveness or heat-sensitive adhesiveness. When the heat-sensitive adhesive adhesive sheet AS is employed, it may be adhered by an appropriate method such as providing a heating means such as an appropriate coil heater for heating the adhesive sheet or a heating side such as a heat pipe. In addition, such an adhesive sheet AS is, for example, a single-layer adhesive sheet only, an intermediate layer between the base sheet and the adhesive layer, a cover layer on the upper surface of the base sheet, etc. Three or more layers, or so-called double-sided adhesive sheet capable of peeling the substrate sheet from the adhesive layer may be used, and the double-sided adhesive sheet may be a single layer or a multilayer intermediate layer. It may be one having one or more layers without an intermediate layer. The adherend may be, for example, food, resin container, semiconductor wafer such as silicon semiconductor wafer or compound semiconductor wafer, circuit substrate, information recording substrate such as optical disk, glass plate, steel plate, pottery, wood plate or resin plate, etc. Any form of member, article or the like can also be targeted. In addition, the adhesive sheet AS is changed to a functional and practical reading, for example, an arbitrary label for information description, a label for decoration, a protective sheet, a dicing tape, a die attach film, a die bonding tape, a recording layer forming resin sheet, etc. Any sheet, film, tape or the like of any shape may be affixed to any adherend as described above.

本発明における手段および工程は、それら手段および工程について説明した動作、機能または工程を果たすことができる限りなんら限定されることはなく、まして、前記実施形態で示した単なる一実施形態の構成物や工程に全く限定されることはない。例えば、剥離手段は、繰出手段で繰り出される原反をその折曲部で折り曲げて剥離シートから接着シートを剥離可能なものであれば、出願当初の技術常識に照らし合わせ、その技術範囲内のものであればなんら限定されることはない(他の手段および工程についての説明は省略する)。
また、前記実施形態における駆動機器は、回動モータ、直動モータ、リニアモータ、単軸ロボット、多関節ロボット等の電動機器、エアシリンダ、油圧シリンダ、ロッドレスシリンダおよびロータリシリンダ等のアクチュエータ等を採用することができる上、それらを直接的又は間接的に組み合せたものを採用することもできる(実施形態で例示したものと重複するものもある)。
The means and steps in the present invention are not limited in any way as long as the operations, functions or steps described in the means and steps can be performed, and it is needless to say that the constitutions of only one embodiment shown in the above embodiment or There is no limitation to the process. For example, as long as the peeling means is capable of bending an original sheet fed out by the feeding means at its bending portion and peeling the adhesive sheet from the peeling sheet, it is in light of technical common sense at the time of filing There is no limitation on the above (the descriptions of other means and steps are omitted).
Further, the drive device in the above-described embodiment includes a rotary motor, a linear motion motor, a linear motor, an electric device such as a single-axis robot and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder and a rotary cylinder. Besides being adoptable, it is also possible to adopt a combination of them directly or indirectly (some overlap with those exemplified in the embodiment).

10 シート供給装置
20 繰出手段
23 原反挟込手段
24 挟込位置変更手段
30 剥離板(剥離手段)
30A 折曲部
40 シート間領域検知手段
AS 接着シート
AS1 繰出方向先端部
RL 剥離シート
RS 原反
SD 接着シート間領域
DESCRIPTION OF SYMBOLS 10 Sheet supply apparatus 20 Delivery means 23 Raw material pinching means 24 Sandwiching position change means 30 Peeling plate (peeling means)
30A bent portion 40 inter-sheet area detection means AS adhesive sheet AS1 delivery direction leading end portion RL release sheet RS original sheet SD adhesive sheet inter-area

Claims (2)

接着シートを所定の位置に供給するシート供給装置であって、
帯状の剥離シートの一方の面に前記接着シートが仮着された原反に繰出力を付与し、当該原反を所定の繰出方向に繰り出す繰出手段と、
前記繰出手段で繰り出される原反をその折曲部で折り曲げて前記剥離シートから前記接着シートを剥離する剥離手段とを備え、
前記繰出手段は、前記折曲部に対して前記繰出方向上流側に配置され、前記原反を挟み込む原反挟込手段を備え、前記剥離手段で前記接着シートの繰出方向先端部を前記剥離シートから剥離するときにのみ、前記原反挟込手段で前記原反を挟みこむことを特徴とするシート供給装置。
A sheet feeding apparatus for feeding an adhesive sheet to a predetermined position, the sheet feeding apparatus comprising:
Feeding means for applying a feeding power to a raw fabric on which the adhesive sheet is temporarily attached to one surface of a strip-like release sheet, and feeding out the raw fabric in a predetermined feeding direction;
And a peeling means for bending the raw sheet fed out by the feeding means at a bending portion thereof to peel the adhesive sheet from the release sheet.
The feeding means is provided on the upstream side in the feeding direction with respect to the bending portion, and includes an original cloth pinching means for holding the raw fabric, and the peeling direction tip end of the adhesive sheet is the release sheet by the peeling means. A sheet feeding apparatus characterized in that the raw fabric is sandwiched by the raw fabric sandwiching means only when peeling from the sheet.
接着シートを所定の位置に供給するシート供給方法であって、
帯状の剥離シートの一方の面に前記接着シートが仮着された原反を所定の繰出方向に繰り出す工程と、
前記繰り出される原反を剥離手段の折曲部で折り曲げて前記剥離シートから前記接着シートを剥離する工程と、
前記剥離手段で前記接着シートの繰出方向先端部を前記剥離シートから剥離するときにのみ、前記折曲部に対して前記繰出方向上流側に配置された原反挟込手段で前記原反を挟みこむ工程とを備えていることを特徴とするシート供給方法。
A sheet feeding method for feeding an adhesive sheet to a predetermined position, comprising:
A step of feeding out the raw fabric, to which the adhesive sheet is temporarily attached to one surface of the strip-like release sheet, in a predetermined feeding direction;
Bending the unrolled raw fabric at a bending portion of peeling means to peel the adhesive sheet from the peeling sheet;
Only when the leading end of the adhesive sheet in the delivery direction is separated from the release sheet by the peeling means, the original sheet is sandwiched by the original sheet sandwiching means disposed on the upstream side in the delivery direction with respect to the bent portion. And a sheet feeding method.
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