JP6539523B2 - Sheet feeding apparatus and feeding method - Google Patents

Description

  The present invention relates to a sheet feeding apparatus and a feeding method.

  Conventionally, there is known a sheet feeding apparatus which includes an original sheet sandwiching means disposed on the upstream side in the feeding direction of the original sheet with respect to the bending part of the peeling section, and supplies the adhesive sheet to a predetermined position (for example Patent Document 1).

Japanese Patent Laid-Open No. 6-216242

  However, in the conventional sheet feeding apparatus as described in Patent Document 1, when the feeding of the raw fabric is not performed, the adhesive sheet is sandwiched between the tension applying roller and the pinch roller which are the raw fabric pinching means. When such a standby state continues, the pinching force of the rollers is concentrated at one place, which causes a disadvantage that streak-like pinching marks are formed on the adhesive sheet. If such a pinching mark is formed, for example, the adhesive sheet may be stuck in a state where air bubbles intervene with the adherend, or, for example, the adherend may be a semiconductor wafer (hereinafter referred to simply as “semiconductor wafer”). In the case of “wafer”, when the wafer is protected to a thickness of 5 to 30 μm from the opposite side of the circuit surface with the adhesive sheet protecting the circuit surface of the wafer, pinch marks are formed The thickness of the wafer in the region is thicker than that in the other regions, which leads to the disadvantage that the thickness of the semiconductor device becomes uneven and the quality is lowered.

  An object of the present invention is to provide an adhesive sheet by sandwiching the raw fabric on the upstream side of the bending direction of the raw fabric with respect to the bending portion of the peeling means and supplying the adhesive sheet, but the bonding force is concentrated at one place It is an object of the present invention to provide a sheet feeding apparatus and a feeding method which can prevent formation of pinch marks on a sheet.

  The sheet feeding apparatus according to the present invention is a sheet feeding apparatus for feeding an adhesive sheet to a predetermined position, and applies a cyclic output to a raw fabric on which the adhesive sheet is temporarily attached to one surface of a strip-shaped release sheet. The sheet feeding apparatus further comprises: a feeding means for feeding the raw fabric in a predetermined feeding direction; and a peeling means for bending the raw fabric fed by the feeding means at its bending portion to peel the adhesive sheet from the peeling sheet The sheet feeding apparatus further includes an original sheet sandwiching means disposed on the upstream side in the delivery direction with respect to the bent portion and sandwiching the raw fabric, and the exfoliation sheet exfoliates the leading edge of the adhesive sheet in the delivery direction from the release sheet. In the above, it is characterized in that the original fabric is sandwiched by the original fabric sandwiching means.

In the sheet feeding apparatus according to the present invention, preferably, the feeding means includes a pinching position changing means capable of changing a pinching position by the original roll pinching means.
In the sheet feeding apparatus according to the present invention, a plurality of adhesive sheets are temporarily attached to one surface of the release sheet with an adhesive sheet area separated, and the sheet material can detect the sheet area. Means for the pinching position changing means, based on the detection result of the inter-sheet area detecting means, to set the position at the moment when the original fabric is pinched by the original fabric pinching means as the adhesive sheet area Is preferred.
In the sheet feeding apparatus according to the present invention, the pinching position changing unit is configured to peel off the region between the adhesive sheets by the original roll pinching unit while peeling the leading end of the adhesive sheet in the feeding direction from the peeling sheet It is preferable that the raw fabric pinching means be provided so as to be movable in the feeding direction while being pinched.

  The sheet feeding method of the present invention is a sheet feeding method of feeding an adhesive sheet to a predetermined position, and unwinds in a predetermined feeding direction a raw fabric on which the adhesive sheet is temporarily attached to one surface of a strip-shaped release sheet. Peeling off the adhesive sheet from the release sheet by bending the unrolled raw fabric at the bending portion of the peeling means, and peeling the leading end of the adhesive sheet in the delivery direction from the release sheet by the peeling means And a step of sandwiching the raw fabric with the raw fabric sandwiching means disposed on the upstream side in the feeding direction with respect to the bending portion.

  According to the present invention as described above, since the part of the adhesive sheet on the original fabric is not kept pinched when the original fabric is not drawn out, the original fabric is delivered to the bending portion of the peeling means. While feeding the adhesive sheet by sandwiching the raw fabric on the upstream side in the direction, it is possible to prevent formation of a pinching mark in the adhesive sheet by concentrating the pinching force in one place.

In addition, if it is possible to change the sandwiching position by the original fabric sandwiching means, it is possible to sandwich a desired position on the original fabric with the original fabric sandwiching means.
Furthermore, if the position at the moment of sandwiching the raw fabric by the raw fabric sandwiching means is made to be the area between the adhesive sheets, it is possible to prevent the formation of pinching marks in the adhesive sheet by the impact by the raw fabric sandwiching means. .
In addition, the feeding operation for peeling the leading end portion in the delivery direction of the adhesive sheet from the release sheet if the original sandwiching means is movable in the delivery direction with the original sheet sandwiching means sandwiching the region between the adhesive sheets. During this operation, even if the supply operation is stopped for some reason, it is possible to reliably prevent the formation of the pinching mark on the adhesive sheet by the pinching force being concentrated at one place.

FIG. 1 is a side view of a sheet feeding apparatus according to an embodiment of the present invention.

Hereinafter, an embodiment of the present invention will be described based on the drawings.
In the present embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis orthogonal to the predetermined plane. Do. Furthermore, in the present embodiment, when the direction is indicated on the basis of a front direction in FIG. 1 parallel to the Y axis, “upper” is the arrow direction of the Z axis, “lower” is the opposite direction, “Left” is the arrow direction of the X axis, “right” is the opposite direction, and “front” is the front direction in FIG. 1 parallel to the Y axis, “rear” is the opposite direction.

  In FIG. 1, the sheet feeding apparatus 10 is an apparatus for feeding the adhesive sheet AS to a predetermined position, and a plurality of adhesive sheets AS are temporarily separated on one surface of the strip-like release sheet RL with the adhesive sheet area SD separated. A feeding means 20 for giving a feeding output to the coated raw fabric RS and feeding out the raw fabric RS in a predetermined feeding direction, and bending the raw fabric RS fed by the feeding means 20 at its bending portion 30A to release sheet RL Between the inter-sheet area detection means 40 which is comprised of a peeling plate 30 as a peeling means for peeling the adhesive sheet AS from the above, an optical sensor, an imaging means, etc., and an optical sensor or an imaging means The apparatus comprises: a tip detection means 40A configured and capable of detecting the delivery direction tip AS1 of the adhesive sheet AS at a predetermined position on the peeling plate 30, and pressing the adhesive sheet AS against the wafer WF as an adherend A vicinity of the pressing roller 50 as a pressing means for being disposed wafer WF above the transfer means 60 for relatively moving.

The feeding means 20 is disposed upstream of the support roller 21 for supporting the raw fabric RS, a plurality of guide rollers 22 for guiding the raw fabric RS, and the bending portion 30A, and holds the raw fabric RS. An anti-sandwich means 23, a pinching position changing means 24 capable of changing the pinching position by the raw fabric pinching means 23, and a recovery means 25 for recovering the release sheet RL, the whole of which is supported by the frame 26 ing. In addition, the delivery direction of the raw fabric RS (hereinafter, may be simply referred to as the “delivery direction”) is a direction in which the raw fabric RS is fed toward the collection means 25 from the support roller 21.
The raw material nipping means 23 includes a drive roller 23C driven by a rotation motor 23B as a drive device supported by the base 23A, an arm 23D rotatably supported by the base 23A, and a base 23A. A linear motion motor 23E is supported as a driving device that rotatably supports the arm 23D with its output shaft, and a pinch roller 23F rotatably supported by the arm 23D. The inter-sheet area detection means 40 is supported by the base 23A via an arm (not shown).
The pinching position changing means 24 includes a linear motor 24A as a driving device for supporting the base 23A by the slider 24B, and pinching by the original pinching means 23 based on the detection result of the inter-sheet area detecting means 40. The position can be changed.
The recovery unit 25 includes a drive roller 25B driven by a rotation motor 25A as a drive device, a pinch roller 25C sandwiching the release sheet RL between the drive roller 25B, and a winding roller 25D winding the release sheet RL. And have.

  The transfer means 60 is supported by a slider 61A of a linear motor 61 as a drive device, and is provided with a table 62 having a support surface 62A capable of attracting and holding the wafer WF by pressure reducing means (not shown) such as a pressure reducing pump and a vacuum ejector.

A procedure for sticking the adhesive sheet AS to the wafer WF in the above-described sheet supply apparatus 10 will be described.
First, the operator sets the original sheet RS as shown in FIG. 1 with respect to the sheet feeding device 10 in a state in which the original sheet RS is not sandwiched by the drive roller 23C and the pinch roller 23F, and then the operation panel, personal computer, etc. A signal for starting the automatic operation is input through an input means (not shown) of FIG. Then, the feeding means 20 drives the rotation motor 25A to feed the original sheet RS, and when the leading end portion AS1 in the feeding direction of the adhesive sheet AS is detected by the leading end detection means 40A, the linear motion motor 23E is driven. As indicated by the middle two-dot chain line, the original roll RS is sandwiched between the drive roller 23C and the pinch roller 23F, and the rotation motor 23B is driven. Then, as shown in FIG. 1, the delivery direction tip end portion AS1 of the leading adhesive sheet AS located on the release plate 30 is peeled off for a predetermined length by the bending portion 30A, but the optical sensor, imaging means, etc. are not shown. When detected by the detection means, the feeding means 20 stops the drive of the rotation motors 23B and 25A and drives the linear motion motor 23E to release the pinching of the original fabric RS between the drive roller 23C and the pinch roller 23F. Then, the feeding means 20 is in a standby state. As a result, the feeding means 20 sandwiches the raw fabric RS with the raw fabric sandwiching means 23 only when peeling the leading end portion AS1 of the adhesive sheet AS in the feeding direction with the peeling plate 30 from the peeling sheet RL. Thereby, the delivery direction tip end portion AS1 of the adhesive sheet AS is easily peeled off at the bending portion 30A.
Here, when the supply operation is stopped for some reason during the supply operation of peeling the leading end portion AS1 of the adhesive sheet AS in the delivery direction from the release sheet RL, pinching of the original sheet RS by the drive roller 23C and the pinch roller 23F. If the feeding operation is stopped in this way, it is possible to reliably prevent formation of a pinching mark in the adhesive sheet by concentrating the pinching force in one place. .

  Thereafter, when the wafer WF is placed on the support surface 62A of the table 62 at the initial position shown by the solid line in FIG. 1 by a transfer means such as a hand or an articulated robot or a belt conveyor, the pressure reduction not shown by the transfer means 60. After driving the means to suction and hold the wafer WF, the linear motor 61 is driven to move the table 62 in the left direction. Next, when it is detected by the detection means (not shown) such as an optical sensor or an imaging means that the wafer WF has reached a predetermined position, the delivery means 20 drives the rotation motor 25A to match the moving speed of the table 62 to the original. Pay out anti-RS. As a result, the first adhesive sheet AS is peeled off from the peeling sheet RL at the position of the bending portion 30A of the peeling plate 30, and is pressed against the wafer WF by the pressing roller 50 and stuck. When the leading end AS1 of the adhesive sheet AS scheduled to be attached next is detected by the leading end detection means 40A during the delivery of the leading adhesive sheet AS, the delivery means 20 pinches the drive roller 23C and pinch in the same manner as described above. When it is detected by detection means (not shown) that the original sheet RS is sandwiched with the roller 23F and the delivery direction leading end AS1 of the adhesive sheet AS to be attached next time is peeled off by the bending part 30A by a predetermined length. Similarly, the feeding means 20 is again in the standby state.

  When the adhesion of the adhesive sheet AS to the wafer WF is completed, the transfer means 60 stops the driving of the linear motor 61 and the decompression means (not shown), and the transfer means (not shown) transports the wafer WF to the next process. Then, the transfer means 60 drives the linear motor 61 to return the table 62 to the initial position, and thereafter the same operation as described above is repeated.

  According to the embodiment as described above, when the raw fabric RS is not fed out, since it is not continued to sandwich a part of the adhesive sheet AS on the raw fabric RS, the bending portion 30A of the peeling plate 30 is While sandwiching the raw fabric RS on the upstream side in the feeding direction of the raw fabric RS and supplying the adhesive sheet AS, forming a pinching mark in the adhesive sheet AS by concentrating the pinching force at one place It can be prevented.

  As described above, the best configuration, method and the like for carrying out the present invention are disclosed in the above description, but the present invention is not limited to this. That is, although the present invention has been particularly illustrated and described primarily with respect to particular embodiments, it is to be understood that shapes relative to the above-described embodiments can be made without departing from the spirit and scope of the invention. A person skilled in the art can make various modifications in material, quantity, and other detailed configurations. Moreover, the description which limited the shape, the material, etc. which were disclosed above is described in an exemplification for facilitating the understanding of the present invention, and the present invention is not limited. The description in the name of the member from which the limitation of some or all of the limitations such as is removed is included in the invention.

For example, the feeding means 20 has a cut in the form of a closed loop formed in a band-like adhesive sheet substrate, so that the adhesive sheet AS is on the inside and the unnecessary sheet is on the outside. The adhesive sheet AS may draw out the raw fabric temporarily attached to the strip-shaped release sheet RL. In addition, when a raw material in which a band-like adhesive sheet substrate is temporarily attached to a band-like release sheet RL is employed, as shown by a two-dot chain line in FIG. 1, a platen roller 71 and a cutting blade 72A in a closed loop shape are used. The adhesive sheet substrate is cut into a predetermined shape by a cutting means constituted by the cutter roller 72 and the original sheet on which a plurality of adhesive sheets AS are temporarily attached to the strip-shaped release sheet RL across the adhesive sheet area SD. You may form. In addition, you may comprise the cutting means by other things, such as a laser cutter, a heat cutter, an air cutter, and a compression water cutter.
The feeding means 20 may drive only the raw fabric pinching means 23 or only the recovery means 25 to give a rolling output to the raw fabric RS.
The feeding means 20 may not have the collecting means 25.
The feeding means 20 rotatably supports the guide roller 22 positioned below via a tension sensor 22A such as a pressure sensor or a load cell as indicated by a two-dot chain line in FIG. 1, and detects the tension sensor 22A. Based on the result, at least one of torque control and speed control may be performed to apply tension to the release sheet RL or apply predetermined tension to the adhesive sheet AS pressed against the wafer WF. , Both torque control and speed control may be performed simultaneously.

The raw fabric sandwiching means 23 may sandwich the raw fabric RS with chuck means such as a mechanical chuck or a chuck cylinder, a round bar, a blade material or the like.
The original roll pinching unit 23 controls the torque of the rotation motor 23B, rotates the drive roller 23C while maintaining the torque received from the original roll RS via the drive roller 23C to a predetermined value, The speed control of the motion motor 23B is performed, and the drive roller 23C is driven at a speed slower than the speed at which the rotation motor 25A moves the raw fabric RS according to the movement speed of the table 62 By driving the drive roller 23C in the clockwise direction (in the case of FIG. 1), a predetermined tension is applied to the release sheet RL so that the adhesive sheet AS can be easily released from the release sheet RL. Alternatively, a predetermined tension may be applied to the adhesive sheet AS pressed against the wafer WF, or both torque control and speed control may be performed simultaneously.
It is not necessary to provide the driving device for rotating the drive roller 23C for the original roll pinching means 23.

Based on the detection result of the inter-sheet area detection means 40, the interposing position changing means 24 configures the position at the moment when the original web RS is intervened by the original interposing means 23 as the inter-adhesive sheet area SD. It is also good.
While the pinching position changing means 24 peels the leading edge portion AS1 of the adhesive sheet AS in the delivery direction with the peeling plate 30 from the peeling sheet RL, the raw sheet pinching means 23 holds the adhesive sheet area SD in a state of being sandwiched. The anti-sandwich means 23 may be moved in the delivery direction. In this case, as shown by a two-dot chain line in FIG. 1, the position at which the original sheet RS is sandwiched by the drive roller 23C and the pinch roller 23F is set as the inter-adhesion sheet area SD. Then, after the original roll RS is sandwiched between the drive roller 23C and the pinch roller 23F in the same manner as described above, the linear motor 24A is driven in a state where the rotation of the rotation motor 23B is locked, and the raw roll RS is fed out. At the same time, the original roll nipping means 23 is moved. Then, when it is detected by detection means (not shown) that the adhesive sheet AS in the delivery direction leading end AS1 has been peeled off by a predetermined length at the bending portion 30A, the original sheet RS is pinched by the drive roller 23C and the pinch roller 23F. Then, they should be returned to the position where the original fabric RS is sandwiched.
Based on the detection result of the inter-sheet area detection means 40, the interposing position changing means 24 configures the position at the moment when the original web RS is intervened by the original interposing means 23 as the inter-adhesive sheet area SD. It is also good.
The pinching position changing means 24 performs torque control of the linear motor 24A, and moves the slider 24B in the original unwinding direction while maintaining the torque received from the original RS via the drive roller 23C to be a predetermined value. , Peeling by moving the slider 24B in the original feeding direction at a speed slower than the speed at which the rotary motor 25A feeds the raw RS according to the speed control of the linear motor 24A. Even if a predetermined tension is applied to the sheet RL to facilitate peeling of the adhesive sheet AS from the release sheet RL, or even if a predetermined tension is applied to the adhesive sheet AS pressed against the wafer WF. Both torque control and speed control may be performed simultaneously.
The sandwiching position changing means 24 may be omitted.
The pinching position changing means 24 may be configured to manually change the pinching position by the original roll pinching means 23. In this case, the inter-sheet area detecting means 40 may or may not be present.

The peeling means may be constituted by a round bar, a roller or the like.
The inter-sheet area detection means 40 may be a contact type sensor such as a limit switch.
The inter-sheet region detection means 40 may be disposed, for example, on the upstream side in the delivery direction or on the downstream side in the delivery direction with respect to the raw material nipping means 23 without being supported by the base 23A.
The pressing means may employ a pressing member such as a round bar, a blade, rubber, resin, sponge or the like, or may be configured to press the adhesive sheet AS against the adherend by air spraying.

The transfer means 60 may be configured to support the adherend by chuck means such as a mechanical chuck or chuck cylinder, Coulomb force, adhesive, adhesive, magnetic force, Bernoulli adsorption or the like.
The transfer means 60 may move the sheet supply device 10 or the like while fixing the position of the table 62 or may move both the table 62 and the sheet supply device 10 or the like.
When the wafer WF is to be moved relative to the sheet feeding device 10 or the like by another device, the transfer means 60 may be omitted.

  The sheet supply apparatus 10 adheres a band-like adhesive sheet substrate to the wafer WF, and then adheres the adhesive sheet substrate to a predetermined shape by cutting means such as a cutting blade, a laser cutter, a heat cutter, an air cutter, or a compressed water cutter. It may be cut into sheets AS. In this case, the pinching position changing means 24 changes the pinching position in the adhesive sheet base material in consideration of the size of the adhesive sheet AS to be cut later by the cutting means and the inter-adhesive sheet area SD after cutting. be able to.

  Further, the material, type, shape and the like of the adhesive sheet AS and the adherend in the present invention are not particularly limited. For example, the adhesive sheet AS may have a circular shape, an elliptical shape, a polygonal shape such as a triangle or a quadrangle, or any other shape, or may have an adhesive form such as pressure-sensitive adhesiveness or heat-sensitive adhesiveness. When the heat-sensitive adhesive adhesive sheet AS is employed, it may be adhered by an appropriate method such as providing a heating means such as an appropriate coil heater for heating the adhesive sheet or a heating side such as a heat pipe. In addition, such an adhesive sheet AS is, for example, a single-layer adhesive sheet only, an intermediate layer between the base sheet and the adhesive layer, a cover layer on the upper surface of the base sheet, etc. Three or more layers, or so-called double-sided adhesive sheet capable of peeling the substrate sheet from the adhesive layer may be used, and the double-sided adhesive sheet may be a single layer or a multilayer intermediate layer. It may be one having one or more layers without an intermediate layer. The adherend may be, for example, food, resin container, semiconductor wafer such as silicon semiconductor wafer or compound semiconductor wafer, circuit substrate, information recording substrate such as optical disk, glass plate, steel plate, pottery, wood plate or resin plate, etc. Any form of member, article or the like can also be targeted. In addition, the adhesive sheet AS is changed to a functional and practical reading, for example, an arbitrary label for information description, a label for decoration, a protective sheet, a dicing tape, a die attach film, a die bonding tape, a recording layer forming resin sheet, etc. Any sheet, film, tape or the like of any shape may be affixed to any adherend as described above.

The means and steps in the present invention are not limited in any way as long as the operations, functions or steps described in the means and steps can be performed, and it is needless to say that the constitutions of only one embodiment shown in the above embodiment or There is no limitation to the process. For example, as long as the peeling means is capable of bending an original sheet fed out by the feeding means at its bending portion and peeling the adhesive sheet from the peeling sheet, it is in light of technical common sense at the time of filing There is no limitation on the above (the descriptions of other means and steps are omitted).
Further, the drive device in the above-described embodiment includes a rotary motor, a linear motion motor, a linear motor, an electric device such as a single-axis robot and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder and a rotary cylinder. Besides being adoptable, it is also possible to adopt a combination of them directly or indirectly (some overlap with those exemplified in the embodiment).

DESCRIPTION OF SYMBOLS 10 Sheet supply apparatus 20 Delivery means 23 Raw material pinching means 24 Sandwiching position change means 30 Peeling plate (peeling means)
30A bent portion 40 inter-sheet area detection means AS adhesive sheet AS1 delivery direction leading end portion RL release sheet RS original sheet SD adhesive sheet inter-area

Claims (2)

A sheet feeding apparatus for feeding an adhesive sheet to a predetermined position, the sheet feeding apparatus comprising:
Feeding means for applying a feeding power to a raw fabric on which the adhesive sheet is temporarily attached to one surface of a strip-like release sheet, and feeding out the raw fabric in a predetermined feeding direction;
And a peeling means for bending the raw sheet fed out by the feeding means at a bending portion thereof to peel the adhesive sheet from the release sheet.
The feeding means is provided on the upstream side in the feeding direction with respect to the bending portion, and includes an original cloth pinching means for holding the raw fabric, and the peeling direction tip end of the adhesive sheet is the release sheet by the peeling means. A sheet feeding apparatus characterized in that the raw fabric is sandwiched by the raw fabric sandwiching means only when peeling from the sheet. A sheet feeding method for feeding an adhesive sheet to a predetermined position, comprising:
A step of feeding out the raw fabric, to which the adhesive sheet is temporarily attached to one surface of the strip-like release sheet, in a predetermined feeding direction;
Bending the unrolled raw fabric at a bending portion of peeling means to peel the adhesive sheet from the peeling sheet;
Only when the leading end of the adhesive sheet in the delivery direction is separated from the release sheet by the peeling means, the original sheet is sandwiched by the original sheet sandwiching means disposed on the upstream side in the delivery direction with respect to the bent portion. And a sheet feeding method.

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