JP6501682B2 - Sheet sticking apparatus and sheet sticking method - Google Patents

Description

  The present invention relates to a sheet sticking apparatus and a sheet sticking method.

  2. Description of the Related Art Conventionally, there has been known an apparatus for temporarily holding an adhesive sheet by a holding roller and sticking it to a wafer (for example, Patent Document 1).

JP, 2006-339607, A

  However, in the device described in Patent Document 1, although the adhesion accuracy of the adhesive sheet is improved, the entire adhesive sheet is once held by the holding roller and then adhered to the wafer W, so it is synchronized with the relative movement with the adherend. Compared to a device that presses and adheres to the adherend while peeling off the adhesive sheet temporarily attached to the release sheet from the release sheet, the processing ability to attach the adhesive sheet per unit time is disadvantageously reduced .

  An object of the present invention is to provide a sheet sticking apparatus and a sheet sticking method capable of preventing the processing ability to stick an adhesive sheet per unit time as much as possible while improving the sticking accuracy of the adhesive sheet. It is in.

  In order to solve the problems described above, according to the present invention, a feeding means for feeding a raw fabric on which a plurality of adhesive sheets are temporarily attached to a strip-like release sheet at a predetermined interval, and the raw fabric fed by the feeding means And a pressing means for pressing and sticking the adhesive sheet to an adherend by peeling back the release sheet and peeling the adhesive sheet from the release sheet, wherein the pressing means is provided in the delivery direction of the adhesive sheet. In a state where the rear end portion is temporarily attached to the release sheet, the initial sticking area from the front end portion in the delivery direction of the adhesive sheet to the intermediate portion in the delivery direction of the adhesive sheet is held and moved relative to the adherend The initial application area is gradually applied to the adherend from the middle part in the delivery direction toward the front end in the delivery direction, and further synchronized with the relative movement with the adherend to the release sheet. Affixing to the adherend gradually a late sticking area from at least the feeding direction middle portion to the feeding direction rear end while peeling the adhered adhesive sheet portion from the peeling sheet by the peeling means. It is a sheet sticking apparatus characterized by the above.

  The adherend comprises a first adherend and a second adherend surrounding the periphery of the first adherend, and the adhesive sheet includes the first adherend and the second adherend. The pressing means holding distance from the feeding direction front end portion to the feeding direction intermediate portion is a size from the sticking start position of the second adherend to the sticking start position of the first adherend. (1) It may be characterized in that it is longer than the adherend unpasted distance.

  An adherend detection unit capable of measuring the first adherend non-pasted distance may be provided.

  Another aspect of the present invention is a feeding step in which a plurality of adhesive sheets are fed on a strip-like release sheet at a predetermined interval and feeding out a raw fabric temporarily attached, and the release sheet in the raw fabric fed in the feeding step is folded back Peeling step of peeling the adhesive sheet from the peeling sheet, and a pressing step of pressing and sticking the adhesive sheet to an adherend, and in the pressing step, the delivery direction rear end portion of the adhesive sheet is In the state of being temporarily attached to the release sheet, the initial sticking area from the front end portion in the delivery direction of the adhesive sheet to the intermediate portion in the delivery direction of the adhesive sheet is held, and the delivery is performed by moving relative to the adherend. The initial application area is gradually attached to the adherend from the direction middle to the delivery direction front end, and is temporarily attached to the release sheet in synchronization with relative movement with the adherend. Said A sheet sticking method comprising: gradually sticking a late sticking area from at least the feeding direction intermediate portion to the feeding direction rear end to the adherend while peeling the sticking sheet portion from the peeling sheet. .

According to the present invention, instead of holding and sticking the entire adhesive sheet, the initial sticking area of the adhesive sheet is once held and then affixed to the adherend, and the subsequent sticking area of the adhesive sheet is the adherend The adhesive sheet is attached to the adherend while being separated from the release sheet in synchronization with relative movement with the adhesive sheet. Therefore, while improving the attachment accuracy of the adhesive sheet, the processing ability to attach the adhesive sheet per unit time decreases as much as possible. It can be prevented.
In addition, by setting the pressing means holding distance of the adhesive sheet longer than the first adherend non-sticking distance, the adhesive sheet can be reliably adhered to the adhesion start position of the second adherend and the first adherend. Once done, adhesive sheets can be affixed to their exact locations.
Furthermore, if the first adherend non-sticking distance is measured, the pressing means holding distance can be shortened as much as possible, and the processing capacity for sticking the adhesive sheet per unit time can be prevented as much as possible. be able to.

The side view of a sheet sticking device. Explanatory drawing of a to-be-adhered body and an adhesive sheet. Operation explanatory drawing.

Hereinafter, a sheet sticking apparatus 10 according to an embodiment of the present invention will be described based on the drawings.
In the embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis orthogonal to the predetermined plane. . Furthermore, in the embodiment, when the direction is indicated based on the front direction of FIG. 1 parallel to the Y axis, “upper” is the arrow direction of the Z axis, “lower” is the opposite direction, “left” “Right” is the opposite direction in the arrow direction of the X axis, “front” is the near direction orthogonal to the paper surface, and “rear” is the opposite direction in the arrow direction of the Y axis.

In FIGS. 1 and 2, the sheet sticking apparatus 10 is fed out by the feeding means 20 for feeding out the raw sheet RS temporarily attached with a plurality of adhesive sheets AS at predetermined intervals on the strip-like release sheet RL, and the feeding means 20. A peeling plate 30 as peeling means for peeling back the peeling sheet RL in the raw sheet RS and peeling the adhesive sheet AS from the peeling sheet RL, and a semiconductor wafer as the first adherend (hereinafter simply referred to as "wafer") And WF and a pressing means 40 for pressing and sticking to an adherend WK comprising a ring frame RF as a second adherend surrounding the periphery of the wafer WF, and sticking of the adhesive sheet AS in the ring frame RF A camera or the like capable of measuring the first adherend non-pasted distance WD from the start position RF1 to the application start position WF1 of the adhesive sheet AS on the wafer WF And a adherend detecting means 50 such as an imaging device, an optical sensor, is disposed above the conveying means 60 for supporting and transferring the adherend WK.
The adhesive sheet AS has a size that can be attached to the wafer WF and the ring frame RF, and has a planar shape that can close the opening RF2 of the ring frame RF.

  The feeding means 20 is driven by a support roller 21 for supporting the original fabric RS, a guide roller 22 for guiding the original fabric RS, and a rotation motor 23A as a driving device, and a drive for sandwiching the release sheet RL with the pinch roller 24 A roller 23 and a recovery roller 25 driven by a drive device (not shown) and recovering the release sheet RL are provided.

  The pressing means 40 is supported by a linear motion motor 42 as a driving device supported by a slider 41A of the linear motor 41 as a driving device, a bracket 43 supported by an output shaft 42A of the linear motion motor 42, and the bracket 43 A pressing roller 44 having a holding surface 44B driven by a rotation motor 44A as a driving device, and a pressure reducing unit (not shown) such as a pressure reducing pump or a vacuum ejector which applies holding power to the holding surface 44B. With such a configuration, the pressing means 40 delivers the adhesive sheet AS from the delivery direction front end AS1 of the adhesive sheet AS in a state where the delivery direction rear end AS3 of the adhesive sheet AS is temporarily attached to the release sheet RL. By holding the initial application area ASF up to the direction intermediate part AS2 and moving relative to the adherend WK, the initial application area ASF is gradually moved from the delivery direction intermediate part AS2 toward the delivery direction front end AS1 as the adherend WK The adhesive sheet AS portion temporarily attached to the release sheet RL is peeled off from the release sheet RL by the release plate 30 in synchronization with relative movement with the adherend WK, and at least the intermediate portion in the feeding direction The late attachment area ASR from AS2 to the delivery direction rear end AS3 can be gradually attached to the adherend WK.

  The transport means 60 is supported by a slider 61A of a linear motor 61 as a drive device, and comprises a transport table 62 having a support surface 62A capable of holding the adherend WK by decompression means (not shown) such as a decompression pump or vacuum ejector. There is.

Next, the operation of the sheet sticking apparatus 10 in the present embodiment will be described.
First, the operator sets the original fabric RS as shown in the figure with respect to the sheet sticking apparatus 10 shown by the solid line in FIG. 1 where each member stands by at the initial position. Next, a frame width RFD from the left end to the right end of the ring frame RF (see FIG. 2) or an adhesive sheet AS when attached to the ring frame RF via input means such as an operation panel and a personal computer not shown. Data such as the sheet width ASD (see FIG. 2) from the left end to the right end of the image is input to control means (not shown). Thereafter, when a signal for starting automatic operation is input through the input means, the delivery means 20 drives the rotation motor 23A to deliver the original sheet RS, and as shown in FIG. 1, the delivery direction front end of the leading adhesive sheet AS. When it is detected by a detection means (not shown) such as an imaging means such as a camera or an optical sensor that the portion AS1 is peeled off by a predetermined length by the peeling plate 30, the driving of the rotation motor 23A is stopped, and the feeding means 20 It will be in standby mode. Next, when the transfer means (not shown) such as a human hand or articulated robot or a belt conveyor places the wafer WF and the ring frame RF on the support surface 62A, the transfer means 60 drives the pressure reducing means (not shown) to adsorb and hold them. Thereafter, the linear motor 61 is driven to move the transport table 62 to the left.

  Then, when the adherend WK passes immediately below the adherend detection means 50, the adherend distance WKD from the left end position of the ring frame RF to the left end position of the wafer WF when the adherend detection means 50 is 2) and outputs the measurement result to control means (not shown). Here, since the frame width RFD and the sheet width ASD are input in advance to the control means (not shown), the first non-adhered distance WD can be calculated if the inter-adherent distance WKD is known. The distance from the left end of the ring frame RF to the adhesion start position RF1 of the adhesive sheet AS may be input in advance to the control means (not shown), or the adherend detection means 50 for the frame width RFD or the opening RF2. The inner diameter may be measured to be a half distance of the difference between them and the sheet width ASD, and may be any distance as long as the delivery direction front end portion AS1 of the adhesive sheet AS can be attached within the frame of the ring frame RF.

  When the adherend detection means 50 outputs the measurement result to the control means (not shown), the control means calculates the pressing means holding distance ASH from the delivery direction front end portion AS1 to the delivery direction intermediate portion AS2 based on the main measurement result. Do. In the case of the present embodiment, the pressing means holding distance ASH is set to be longer by the predetermined distance MD than the first adherend non-pasted distance WD, as shown in FIG. Then, based on the calculation result of the control means (not shown), the feeding means 20 and the pressing means 40 drive the pivoting motors 23A and 44A and the pressure reducing means (not shown), as shown by the two-dot chain line in FIG. The original fabric RS is fed out so that the initial application area ASF of the second sheet is attracted and held by the holding surface 44B of the pressing roller 44. At this time, the feeding direction intermediate portion AS2 is in the state of being positioned at the pressing position which is the lowermost portion of the pressing roller 44.

  Then, the left end of the ring frame RF advances to the left by the total distance between the adherend distance WKD and the predetermined distance MD from the lowermost position of the pressing roller 44, and the imaging means such as a camera etc. When detected by a detection means (not shown) such as a sensor, the conveyance means 60 stops the drive of the linear motor 61. Then, the linear motion motor 42 is driven with the pressing means 40 locking the rotation of the rotation motor 44A, and as shown in FIG. 3A, the pressing roller 44 is lowered to feed the intermediate portion AS2 in the delivery direction to the wafer WF. And press on the ring frame RF. At this time, the feeding means 20 drives the rotation motor 23A so that the initial bonding area ASF held by suction on the holding surface 44B of the pressing roller 44 does not shift within the holding surface 44B, and the original fabric RS is reduced by a predetermined amount. You may extend it. Thereafter, the pressing means 40 drives the linear motor 41, and as shown in FIG. 3B, the pressing roller 44 is moved leftward to press the initial attachment area ASF against the ring frame RF and the wafer WF for attachment After that, the pressing means 40 stops driving the pressure reducing means (not shown).

  Next, after the pressing means 40 drives the linear motor 41 to move the pressing roller 44 to the intermediate pressing position WF2, the feeding means 20 and the conveying means 60 drive the rotation motor 23A and the linear motor 61, as shown in FIG. As shown in C), the transport table 62 is moved to the left, and the original sheet RS is fed out so that the moving speed of the transport table 62 and the delivery speed of the adhesive sheet AS become the same. As a result, while the adhesive sheet AS portion temporarily attached to the release sheet RL is released from the release sheet RL by the release plate 30, the late attachment area ASR is gradually pressed by the pressing roller 44 against the wafer WF and the ring frame RF It is stuck, and one-piece thing WK1 is formed. Thereafter, when it is detected by detection means (not shown) that the next adhesive sheet AS in the delivery direction front end AS1 has been peeled off by the peeling plate 30 for a predetermined length, the delivery means 20 stops the driving of the rotation motor 23A, The feeding means 20 is in the standby state again. When the integral object WK1 is formed, the conveyance means 60 stops the driving of the linear motor 61, and after stopping the conveyance table 62 at a predetermined position, the driving of the pressure reducing means (not shown) is stopped. The transfer means transports the integrated product WK1 to the next process. Then, after the pressing means 40 and the conveyance means 60 drive the linear motor 41, the linear motion motor 42 and the linear motor 61 to return the pressure roller 44 and the conveyance table 62 to their initial positions, the same operation as described above is repeated thereafter. .

  According to the present embodiment as described above, instead of holding and sticking the entire adhesive sheet AS, the initial bonding area ASF of the adhesive sheet AS is once held and then affixed to the adherend WK, and the adhesion is performed. The adhesive sheet W is adhered to the adherend WK while being peeled off from the release sheet RL in synchronization with the relative movement with the adherend WK in synchronization with the late application area ASR of the sheet AS, so that the unit time can be improved while improving the adhesion accuracy of the adhesive sheet AS. It is possible to prevent, as much as possible, the decrease in the processing capacity of attaching the adhesive sheet AS to the touch.

  The means and steps in the present invention are not limited in any way as long as the operations, functions or steps described in the means and steps can be performed, and it is needless to say that the constitutions of only one embodiment shown in the above embodiment or There is no limitation to the process. For example, if the feeding means feeds a raw fabric on which a plurality of adhesive sheets are temporarily attached to a strip-like release sheet at a predetermined interval, it is within the range in light of the technical common sense at the beginning of the application. There is no limitation (the explanation of other means and steps is omitted).

The feeding means 20 may include a drive device for driving the support roller 21 to rotate, and such a drive device may function as a tension applying means for applying a predetermined tension to the raw fabric RS.
The feeding means 20 may feed the raw fabric RS on which a band-like adhesive sheet base material is temporarily attached to one surface of the release sheet RL. In this case, the feeding means 20 forms a cut in the form of a closed loop in the adhesive sheet base on the upstream side of the release plate 30 in the feeding direction of the raw sheet RS, and forms the adhesive sheet AS inside the cut. May be provided. Such cutting means may be constituted by a cutting blade, a cutter roller, a laser cutter, an ion beam, a thermal power, heat, water pressure, heating wire, a spraying member of gas or liquid, etc. The cutting member may be moved and cut with a combination of appropriate driving devices.

  The peeling means may employ a round bar or a rotatable or non-rotatable peeling roller instead of the peeling plate 30.

When the initial attachment area ASF of the adhesive sheet AS is attached to the adherend WK, the pressing unit 40 may weaken the holding force of the decompression unit (not shown) with respect to the adhesive sheet AS.
The pressing means 40 may raise or lower the pressing roller 44 when moving the pressing roller 44 to the intermediate pressing position WF2 after the initial bonding area ASF is attached to the adherend WK by the pressing roller 44. It may not be necessary, and the pressing force of the pressing roller 44 on the adhesive sheet AS may be reduced.
After the initial bonding area ASF is attached to the adherend WK by the pressing roller 44, the pressing means 40 has the same moving speed to the left of the transport table 62 without moving the pressing roller 44 to the intermediate pressing position WF2. The adhesive sheet AS which is drawn out so as to be fast may be attached to the adherend WK, as long as at least the late attachment area ASR of the adhesive sheet AS can be attached to the adherend WK.
The pressing means 40 may drive the rotation motor 44A to rotate the pressing roller 44 in the direction of sticking the adhesive sheet AS when the adhesive sheet AS is pressed and adhered by the pressure roller 44, or the rotation motor The pressure roller 44 may freely rotate with little or no influence of 44A.
The pressing means 40 urges the adhesive sheet AS in the direction of the holding surface 44B when the initial sticking area ASF of the adhesive sheet AS is adsorbed and held by the holding surface 44B, such as air spouting of air, gas, etc. It may have biasing means.
The pressure roller 44 may hold the adhesive sheet AS by chuck means such as a mechanical chuck or a chuck cylinder, coulomb force, adhesive, adhesive, magnetic force, Bernoulli adsorption, drive device or the like.
The pressure roller 44 may be moved by an appropriate drive device other than the pressure means 40.
The pressing means 40 may employ a pressing member made of a blade material, rubber, resin, sponge or the like.
The pressing means 40 may move the adherend WK toward the pressure roller 44 without moving the pressure roller 44 and press the object WK, or move both the pressure roller 44 and the adherend WK with each other. You may press it.

  The to-be-adhered body detection means 50 (control means not shown) may calculate 1st to-be-adhered body unpasted distance WD by calculation methods other than the above.

The conveyance means 60 may move the conveyance table 62 to the right as shown in FIG. 3 (B ') from the state shown in FIG. 3 (A). In this case, the pressing means 40 is a linear motor 41, The linear motion motor 42 and the rotation motor 44A may or may not be provided.
The conveying means 60 moves other means such as the feeding means 20, the peeling plate 30, and the pressing means 40 in an appropriate direction without moving the adherend WK or while moving the adherend WK. You may perform the sticking operation similar to the above.
The transport means 60 may be configured to hold the adherend WK by chuck means such as a mechanical chuck or chuck cylinder, Coulomb force, adhesive, adhesive, magnetic force, Bernoulli adsorption, drive device or the like.
In the case where the adherend WK is conveyed by another device, the conveying means 60 may or may not be provided in the sheet sticking apparatus 10, and the other adherend detection means 50 and the like are not described in the present invention. Each thing may be adopted as necessary, may be present, or may not be present.

The feeding direction intermediate portion AS2 in the adhesive sheet AS can be any place, and the pressing means holding distance ASH may be shorter than the first adherend non-pasted distance WD or may be the same distance.
The sheet sticking apparatus 10 may be configured to stick the adhesive sheet AS to the lower surface, the side surface, or the like of the adherend WK by being placed upside down or placed horizontally.
Furthermore, the material, type, shape and the like of the adhesive sheet AS and the adherend WK in the present invention are not particularly limited. For example, adhesive sheet AS is not limited to adhesion forms, such as pressure-sensitive adhesiveness and heat-sensitive adhesiveness. When a heat-sensitive adhesive is employed, an appropriate coil heater for heating the adhesive sheet AS or a heating means such as the heating side of a heat pipe may be provided. In addition, such an adhesive sheet AS is, for example, a single-layer adhesive sheet only, an adhesive sheet layer consisting of a base sheet and an adhesive layer, an intermediate layer therebetween, an upper surface of a base sheet Three or more layers having a cover layer, or a so-called double-sided adhesive sheet capable of peeling the substrate sheet from the adhesive layer may be used, and the double-sided adhesive sheet may be a single layer or a plurality of layers. It may be one having an intermediate layer, or a single layer or multiple layers without an intermediate layer. In addition, as the adherend WK, for example, only the wafer WF or only the ring frame RF may be used, and food, resin container, semiconductor wafer such as silicon semiconductor wafer or compound semiconductor wafer, circuit substrate, electrode substrate, optical disk, etc. An information recording substrate of the present invention, a glass plate, a steel plate, a ceramic, a wood plate, a resin plate or the like, members or articles of any form, etc. can also be targets. The adhesive sheet AS is changed to a functional and practical reading, for example, an information description label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, a recording layer forming resin sheet, etc. Sheets, films, tapes and the like.

  Further, the drive device in the above-described embodiment includes a rotary motor, a linear motion motor, a linear motor, an electric device such as a single-axis robot and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder and a rotary cylinder. Besides being adoptable, it is also possible to adopt a combination of them directly or indirectly (some overlap with those exemplified in the embodiment).

10: Sheet sticking device 20: Delivery means 30: Peeling plate (peeling means)
40: pressing means 50: adherend detection means AS: adhesive sheet AS1: delivery direction front end AS2: delivery direction intermediate part AS3: delivery direction rear end ASF ... Initial sticking area ASH ... pressing means holding distance ASR ... late sticking area RF ... ring frame (second adherend)
RF1 ··· Second adhesion starting position RL · ·· Peeling sheet RS ··· Raw material WD ··· First adhesion not yet attached distance WF ···· Wafer (first adherend)
WF1 ··· First attachment position of first adherend WK · · · adherend

Claims (4)

Feeding means for feeding a raw fabric temporarily attached with a plurality of adhesive sheets at predetermined intervals on a strip-like release sheet;
A peeling means for turning back a release sheet of the raw fabric fed by the feeding means and peeling the adhesive sheet from the release sheet;
And pressing means for pressing and sticking the adhesive sheet to an adherend,
The pressing unit holds an initial sticking area from the front end of the adhesive sheet in the delivery direction to the intermediate part of the adhesive sheet in the delivery direction in a state in which the rear end of the adhesive sheet in the delivery direction is temporarily attached to the release sheet. And by moving relative to the adherend, the initial sticking area is gradually adhered to the adherend from the intermediate part in the delivery direction toward the front end in the delivery direction, and further, with the adherend The late sticking area from at least the middle part in the feeding direction to the rear end in the feeding direction while peeling the adhesive sheet part temporarily attached to the peeling sheet from the peeling sheet by the peeling means in synchronization with the relative movement The sheet sticking apparatus characterized in that the sheet is gradually stuck to the adherend.   The adherend comprises a first adherend and a second adherend surrounding the periphery of the first adherend, and the adhesive sheet comprises the first adherend and the second adherend. The pressing means holding distance from the feeding direction front end portion to the feeding direction intermediate portion is a size from the sticking start position of the second adherend to the sticking start position of the first adherend. The sheet sticking apparatus according to claim 1, wherein the sheet sticking apparatus is longer than the adherend non-sticking distance.   The sheet sticking apparatus according to claim 2, further comprising an adherend detection unit capable of measuring the first adherend non-pasted distance. A feeding step of feeding a plurality of adhesive sheets temporarily attached to the strip-shaped release sheet at a predetermined interval;
A peeling step of turning back a release sheet of the raw fabric fed out in the feeding step and peeling the adhesive sheet from the release sheet;
And pressing the adhesive sheet against an adherend.
In the pressing step, in a state where the delivery direction rear end of the adhesive sheet is temporarily attached to the release sheet, the initial adhesion region from the delivery direction front end of the adhesive sheet to the delivery direction intermediate part of the adhesive sheet is held And by moving relative to the adherend, the initial sticking area is gradually adhered to the adherend from the intermediate part in the delivery direction toward the front end in the delivery direction, and further, with the adherend While peeling off the adhesive sheet portion temporarily attached to the release sheet from the release sheet in synchronization with the relative movement, at least the late application area from the intermediate portion in the delivery direction to the rear end in the delivery direction is gradually removed The sheet sticking method characterized by sticking on a to-be-adhered body.

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