JP2003124153A - Dicer sheet sticking method - Google Patents

Dicer sheet sticking method

Info

Publication number
JP2003124153A
JP2003124153A JP2001321833A JP2001321833A JP2003124153A JP 2003124153 A JP2003124153 A JP 2003124153A JP 2001321833 A JP2001321833 A JP 2001321833A JP 2001321833 A JP2001321833 A JP 2001321833A JP 2003124153 A JP2003124153 A JP 2003124153A
Authority
JP
Japan
Prior art keywords
sheet
work
dicer
head
adhesive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001321833A
Other languages
Japanese (ja)
Inventor
Yasushi Inagaki
靖志 稲垣
Original Assignee
Murata Mfg Co Ltd
株式会社村田製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Mfg Co Ltd, 株式会社村田製作所 filed Critical Murata Mfg Co Ltd
Priority to JP2001321833A priority Critical patent/JP2003124153A/en
Publication of JP2003124153A publication Critical patent/JP2003124153A/en
Pending legal-status Critical Current

Links

Abstract

(57) [Summary] [Problem] To provide a dicer sheet sticking method that can be stuck to a dicer sheet without applying local force to a work, with a simple device, and at low cost without generating bubbles. Kind Code: A1 A method of attaching a work W to be cut with a dicer and a dicer sheet 4, wherein the head 1 is made of an elastic body having a convex R surface 1a and having a vacuum suction hole 1b in the R surface. A step of adsorbing and holding the work W along the R surface 1a, and a step of holding the center portion of the work W held at the vertex of the R surface 1a of the head 1 on the dicer sheet 4 supported by the flat sheet holding table 3. Pressing on the adhesive surface,
A step of pressing the R surface 1a of the head 1 against the dicer sheet 4 while bending the same, and pressing the work W from the central portion to the peripheral portion of the work W onto the adhesive surface of the dicer sheet 4, and a step of releasing the suction and holding of the head 1 And the head 1 with the work W attached to the adhesive surface of the dicer sheet 4
Is separated from the work W.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for attaching a dicer sheet, and more particularly to a method for attaching a work such as a ceramic wafer or a silicon wafer to be dicer cut to a dicer sheet.

[0002]

2. Description of the Related Art Conventionally, dicer cutting is performed when cutting a large number of chips from a ceramics wafer or a silicon wafer. In the dicer cut, as shown in FIG.
The work W, which is a workpiece, is attached to the adhesive surface of the dicer sheet 10, and the back surface of the dicer sheet 10 is adsorbed and held on the air chuck table 11, and the blade 12 having the outer peripheral blade grindstone is rotated at a fixed position, and the table 11 is rotated. Is moved in the horizontal direction to cut and cut the work W. The dicer sheet 10 prevents the blade 12 from damaging the table 11 when cutting the work W, and prevents the cut work W from scattering.

[0003]

When air bubbles enter between the work W and the dicer sheet 10, the work W is not stably held on the dicer sheet 10 and problems such as chipping occur during cutting. Therefore, a method of adhering the work W and the sheet 10 without generating bubbles has been proposed.

FIG. 7 shows a sticking method using a roller 20, in which a work W is placed on a holding table 21, and a dicer sheet 10 is placed on the holding table 21 with its adhesive surface facing downward. This is a method in which the air bubbles inside are pushed out by pressing with the roller 20 and then pasted. However, in the sticking method using the roller 20, a local force is applied to a portion where the roller 20 comes into contact, and a great stress is applied to the work W. Therefore, the work W is easily cracked or chipped.

As a solution to this problem, a sheet attaching method using reduced pressure as shown in FIG. 8 has been proposed. This method
By depressurizing the inside of the chamber 22, the sheet 10 is drawn in and attached to the work W (JP-A-9-1).
No. 29576). However, the chamber 22 for flexing the sheet 10 is required, and the amount of reducing the pressure inside the chamber 22 must be controlled,
There was a problem that the device became complicated. In addition, since the depressurization is performed in a plurality of steps, it takes a long time to paste.

Further, a method of using a special sheet 10 having air permeability as shown in FIG. 9 has also been proposed (Japanese Patent Laid-Open No. 8-
55824). In this method, the bubbles 23 spontaneously disappear through the sheet 10, but there are drawbacks that the base material and the adhesive material of the sheet 10 are limited and the cost is increased.

[0007] Therefore, an object of the present invention is to provide a dicer sheet sticking method capable of sticking to a dicer sheet without applying a local force to a work, with a simple device and at low cost without generating bubbles. To do.

[0008]

The above-mentioned objects are defined in claims 1 to 3.
It is achieved by the invention described in. That is, claim 1
The invention according to claim 1 is a method for attaching a work to be dicer cut and a dicer sheet, wherein a head made of an elastic body having a convex R surface and a vacuum suction hole provided on the R surface is provided.
Step of adsorbing and holding the work along the R surface, and pressing the central portion of the work held at the apex portion of the R surface of the head against the adhesive surface of the dicer sheet supported by the flat sheet holding table. Process and pressing against the dicer sheet while bending the R surface part of the head,
A step of pressing the adhesive surface of the dicer sheet from the central portion of the work toward the peripheral portion, a step of releasing the suction holding of the head, and the head from the work with the work attached to the adhesive surface of the dicer sheet. And a step of releasing the dicer sheet. The invention according to claim 2 is a method of attaching a work to be dicer cut and a dicer sheet, wherein the convex R
A step of holding the dicer sheet by suction on a sheet holder made of an elastic material having a surface and having a vacuum suction hole on the R surface so that the dicer sheet is along the R surface and the adhesive surface is exposed on the surface. Pressing the central portion of the work held by a flat head against the adhesive surface portion of the dicer sheet suction-held on the apex portion of the R surface of the sheet holding table,
The step of pressing the work against the dicer sheet while bending the R surface portion of the sheet holding base, and pressing the work from the central portion of the work toward the peripheral portion to the adhesive surface of the dicer sheet, and the suction holding of the sheet holding base. It is a method of attaching a dicer sheet, which includes a step of releasing the head and a step of separating the head from the work while the work is attached to the adhesive surface of the dicer sheet. Further, the invention according to claim 3 is a method of attaching a work to be dicer cut and a dicer sheet, wherein the adhesive surface of the dicer sheet is exposed on the surface of a sheet holding table provided with a plurality of air blowing holes. So as to blow air from the air blowing hole to inflate the central portion of the dicer sheet into a dome shape, and the apex portion of the dome-shaped adhesive surface of the dicer sheet, to a flat head. The step of pressing the central part of the held work and pressing the work against the dicer sheet while bending the dome-shaped part of the dicer sheet, and pressing it from the central part of the work toward the peripheral part to the adhesive surface of the dicer sheet Process, stopping the air blowing from the air blowing hole, and dicing the workpiece. A step of separating the head from the workpiece in a state of being attached to the adhesive surface of the sheet, a dicer sheet paste method with.

The procedure of the method for attaching a dicer sheet according to claim 1 will be described. First, having a convex R surface,
An elastic head having a vacuum suction hole on the R surface is prepared. The radius of curvature of the R surface can be changed depending on the material of the work to be attracted, but in the case of a fragile work such as a ceramic wafer, it is preferable to make the radius of curvature of the R surface as large as possible. By sucking and holding the work on the R surface of the head, the work bends along the R surface. Next, the central portion of the work held at the apex of the R surface of the head is pressed against the adhesive surface of the dicer sheet supported by the flat sheet holding table. Since the work is curved along the R surface, it is pressed against the adhesive surface of the dicer sheet starting from the center thereof. As the work is pressed against the dicer sheet, the head is pushed and bent from the apex portion to the R surface by the reaction force from the sheet holding table that supports the dicer sheet. Then, the work is not attached to the dicer sheet all at once, but is gradually attached from the central portion to the peripheral portion, so that the air between the work and the dicer sheet is pushed out, and the work and the dicer sheet are separated. No bubbles are generated in After adhering the entire surface of the work to the dicer sheet, the suction holding of the head is released. This allows the work to be separated from the head.
When the head is separated from the work in a state where the work is attached to the adhesive surface of the dicer sheet, the work remains in the state where the work is attached to the dicer sheet as described above, and the attachment work is completed.

As described above, the R-shaped work is attached to the dicer sheet so that the adhesion surface is expanded from the central portion to the peripheral portion, so that no bubbles are generated between the work and the dicer sheet. Further, unlike the method using a roller, it is not necessary to apply a local force to the work, and since only the head made of an elastic body and the sheet support are used, the dicer sheet is a simple device and can be manufactured at low cost. Can be pasted on.

The second aspect differs from the first aspect in that the work is not curved in an R shape, but the dicer sheet is curved in an R shape and held. That is, the dicer sheet is adsorbed and held on a sheet holder made of an elastic body having a convex R surface and a vacuum suction hole provided on the R surface so that the dicer sheet is along the R surface and the adhesive surface is exposed on the surface. To do. Next, the central portion of the work held by the flat head is pressed against the adhesive surface portion of the dicer sheet sucked and held on the apex portion of the R surface of the sheet holding table. And R of the sheet holding table
The work is pressed against the dicer sheet while bending the surface portion, and pressed against the adhesive surface of the dicer sheet from the center portion of the work toward the peripheral portion. Thereby, the work can be attached to the dicer sheet without enclosing air bubbles between the work and the dicer sheet. Then, the suction holding of the sheet holding table is released, and the head is separated from the work while the work is attached to the adhesive surface of the dicer sheet.

The third aspect is the same as the second aspect in that the work is not curved in an R shape but the dicer sheet is curved in an R shape, but the dicer sheet is inflated with air. Different from item 2. That is, a dicer sheet is arranged on a sheet holding table provided with a plurality of air blowing holes so that the adhesive surface is exposed on the surface, and air is blown from the air blowing holes to inflate the central portion of the dicer sheet into a dome shape. Next, the central portion of the work held by the flat head is pressed against the apex portion of the dome-shaped adhesive surface of the dicer sheet. Then, the work is pressed against the dicer sheet while bending the dome-shaped portion of the dicer sheet, and pressed against the adhesive surface of the dicer sheet from the central portion of the work toward the peripheral portion.
Thereby, the work can be attached to the dicer sheet without enclosing air bubbles between the work and the dicer sheet. Then, the air blowing from the air blowing hole is stopped, and the head is separated from the work while the work is attached to the adhesive surface of the dicer sheet. In this case,
Since the work is held by the flat head without being bent, an unnecessary load is not applied to the work.

The R surface of the present invention may be a spherical R surface as well as a cylindrical R surface. Further, the R surface does not have to be a perfect circular arc surface, but includes a quadratic curved deformed arc surface. Even such a deformed arc surface has the same effect.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows a first embodiment of a dicer sheet sticking apparatus according to the present invention. W is a work, and a thin ceramic substrate was used here. Reference numeral 1 is a head having a convex R surface 1a on its lower surface, and this head 1 is fixed to at least the lower surface of a drive device 2 which can be moved up and down. The head 1 is made of, for example, an elastic body having soft rubber elasticity. The head 1 is provided with a large number of suction holes 1b that open to the R surface 1a, and these suction holes 1b are connected to a vacuum suction device (not shown). The work W is adsorbed and held on the R surface 1a of the head 1,
It is curved so as to follow the surface 1a.

The sheet holding base 3 is made of a rigid body having a flat upper surface or a material having a hardness higher than that of the head 1, and a plurality of suction holes 3a are opened in the upper surface. A dicer sheet 4 having an adhesive surface on the upper side is held on the sheet holding table 3 by vacuum suction. The sheet holding table 3 may also be used as an air chuck table, for example. Dicer sheet 4
As is well known, a pressure-sensitive adhesive layer, for example, is provided on one surface of a resin base material sheet such as PET.

In FIG. 2, the work W is, for example, 50.
When a square piezoelectric ceramic substrate having a thickness of μm and a side of 30 mm is used, the R surface 1a of the head 1 is, for example, R1.
It is preferable that the curved surface has a large radius of curvature of 30 or more and the rubber hardness of the head 1 is 30 degrees or less. While the work W is attracted to the R surface 1a, the central portion of the work W bends downward, but the height difference between the central portion and the peripheral portion is about 0.9 m.
It is about m. Therefore, excessive bending stress is not applied to the work W, and the work W can be prevented from cracking.

Here, a method for attaching the dicer sheet will be described with reference to FIGS. First, as shown in FIG. 1A, with the work W sucked and held on the R surface 1a of the head 1, the sheet holding table 3 holding the dicer sheet 4 is moved below the head 1. Next, as shown in FIG. 1B, the head 1 is lowered by the driving device 2, and the central portion of the work W held at the apex portion of the R surface 1 a of the head 1 is held by the sheet holding table 3. Press on the adhesive surface of the dicer sheet 4. Since the head 1 is made of an elastic body and the sheet holding base 3 is made of a rigid body, the R surface 1a of the head 1 is pushed and bent in order from the central portion, and the work W is also pressed against the dicer sheet 4 from the central portion accordingly. As shown in FIG. 1C, when the head 1 is further lowered and pressed against the sheet holding table 3, the work W is pressed against the adhesive surface of the dicer sheet 4 from the central portion to the peripheral portion. At the stage where the work W and the dicer sheet 4 are pressurized, the work W is not attached to the dicer sheet 4 at once, but as shown in FIG. 3, due to the elasticity of the head 1, the work W gradually moves from the central portion to the peripheral portion. Pasted on. Therefore, the air between the work W and the dicer sheet 4 is pushed out to the outer peripheral portion, and air bubbles are not enclosed between the work W and the dicer sheet 4. In this way, the work W is attached to the dicer sheet 4 over its entire surface. At this stage, vacuum suction from the suction hole 1b of the head 1 is stopped. Next, when the head 1 is lifted as shown in FIG. 1D, the head 1 has no suction force and the work W is attached to the entire surface of the dicer sheet 4. 4 remains and only head 1 rises. Thus, the pasting work is completed.

FIG. 4 shows a second embodiment of the dicer sheet sticking apparatus according to the present invention. The same parts as those in FIG. As shown in (a), a flat surface 1c is formed on the lower surface of the head 1, and the flat surface 1c is formed.
The work W is adsorbed and held by the suction hole 1b which is opened in the. The head 1 is formed of a rigid body or a material having a hardness higher than that of the sheet holding table 3. On the other hand, the sheet holding base 3 is made of a soft elastic body, and a convex R surface 3b is provided on the upper surface of the central portion thereof. The R surface 3b is preferably formed to have the same curvature as the R surface 1a of the head 1 in the first embodiment. The dicer sheet 4 is arranged on the sheet holding table 3 with the adhesive surface facing upward, and is sucked and held by the suction holes 3a. Therefore, the dicer sheet 4 has an R side 3
Curved upward along b. As shown in (b), the head 1 is lowered by the drive device 2. At this time, the central portion of the lower surface of the work W held flatly first comes into contact with the apex portion of the dicer sheet 4 curved upward. When the head 1 is further lowered as shown in (c), the sheet holding table 3
The work W is gradually attached to the adhesive surface of the dicer sheet 4 from the central portion to the peripheral portion while pressing and bending the R surface 3b portion. Therefore, work W and dicer sheet 4
The air between and is pushed out to the outer peripheral portion, so that it can be attached between the work W and the dicer sheet 4 without enclosing air bubbles. At the stage of pressing the head 1 in a plane, the vacuum suction from the suction hole 1b of the head 1 is stopped.
Next, as shown in (d), when the head 1 is raised, the suction force by the head 1 does not work, so that the work W remains attached to the dicer sheet 4. The R surface 3b of the sheet holding table 3 is raised by its own elasticity, and the dicer sheet 4 and the work W are also curved along the R surface 3b. However, since the radius of curvature of the R surface 3b is large, the work W is broken. Don't worry.

FIG. 5 shows a third embodiment of the dicer sheet sticking apparatus according to the present invention. The same parts as those in FIG. As shown in (a), a flat surface 1c is formed on the lower surface of the head 1, and the flat surface 1c is formed.
The work W is adsorbed and held by the suction hole 1b which is opened in the. On the other hand, the sheet holding base 3 also has a flat surface, and a large number of air holes 3a are opened on the surface. The dicer sheet 4 is arranged on the sheet holding table 3 with the adhesive surface facing upward, and the peripheral portion of the dicer sheet 4 is sucked and held by sucking from the peripheral air holes 3a 1 and the central air holes 3a. By blowing air out of 2 ,
The central portion 4a of the dicer sheet 4 bulges like a dome. An air chamber 5 is formed between the sheet holder 3 and the dicer sheet 4. Next, as shown in FIG.
To lower the head 1. At this time, the central portion of the lower surface of the work W held flat is first contacted with the apex portion 4a of the dicer sheet 4 which bulges upward. Next, as shown in (c), when the head 1 is further lowered, the work W adheres to the dicer sheet 4 from the central portion to the peripheral portion while pushing and bending the central portion 4a of the dome-shaped dicer sheet 4. It is gradually attached to the surface. Therefore, the air between the work W and the dicer sheet 4 is pushed out to the outer peripheral portion, and the air can be stuck between the work W and the dicer sheet 4 without enclosing the air bubbles. At the stage of pressing the head 1 in a plane, the vacuum suction from the suction hole 1b of the head 1 is stopped. Next, as shown in (d), when the air blowing from the air hole 3a 2 in the central portion of the sheet holding table 3 is stopped and sucked to raise the head 1, the suction force by the head 1 does not work, The work W remains attached to the dicer sheet 4. Since the dicer sheet 4 and the work W are held on the flat surface of the sheet holding table 3,
The dicer sheet 4 and the work W do not bend, and the work W
Can be prevented from cracking.

The present invention is not limited to the above embodiment. For example, although the head and the sheet holding table are provided with a plurality of suction holes, the head and the sheet holding table itself may be made of a porous material instead of these suction holes.
The work to which the pasting method according to the present invention is applied is not limited to the ceramic substrate as in the embodiment, but may be a material such as a silicon wafer which is hard to bend.

[0021]

As is apparent from the above description, claim 1
According to the invention according to, since it is gradually attached to the dicer sheet so as to spread from the central portion of the work bent in an R shape to the peripheral portion, air between the work and the dicer sheet is pushed out to the outside, Do not wrap air bubbles between the work and the dicer sheet. Also, unlike the method using a roller, the pressing force during attachment does not concentrate on a part of the work,
Since it can be received by the surface, there is no local stress on the work and cracks and chips can be prevented from occurring. further,
Since only the elastic head and sheet support are used, there is no need for a chamber for bending the sheet or a decompression control device, which simplifies the device and simplifies the attaching process. The attaching time can be shortened.

Further, according to the second aspect of the invention, the dicer sheet is not bent but the R-shaped dicer sheet is bent, and the R-shaped dicer sheet is gradually bent from the central portion to the peripheral portion of the workpiece. Since it is affixed to the substrate, air bubbles are not wrapped between the work and the dicer sheet as in claim 1, and there is no local stress on the work. Also, the device can be simplified and the attachment time can be shortened.

Further, according to the invention of claim 3, the dicer sheet is inflated in an R shape, and the work is gradually attached to the inflated dicer sheet from the central portion to the peripheral portion. In addition, it does not enclose air bubbles between the work and the dicer sheet, and there is no local stress on the work. Also, the device can be simplified and the attachment time can be shortened.

[Brief description of drawings]

FIG. 1 is a process chart showing the operation of a first embodiment of a dicer sheet sticking apparatus according to the present invention.

FIG. 2 is an enlarged view of a work curved in an R shape.

FIG. 3 is an enlarged view of a part of FIG.

FIG. 4 is a process chart showing the operation of the second embodiment of the dicer sheet sticking apparatus according to the present invention.

FIG. 5 is a process drawing showing the operation of the third embodiment of the dicer sheet sticking apparatus according to the present invention.

FIG. 6 is a schematic view of an example of a dicer cutting device.

FIG. 7 is a diagram showing an example of a conventional dicer sheet attaching method.

FIG. 8 is a diagram of another example of a conventional dicer sheet attaching method.

FIG. 9 is a view of still another example of the conventional dicer sheet attaching method.

[Explanation of symbols] W work 1 head 1a R side 1b Suction hole 3 sheet holder 4 dicer sheet

Claims (3)

[Claims]
1. A method for attaching a work to be dicer cut and a dicer sheet, wherein the work is attached to a head made of an elastic body having a convex R surface and a vacuum suction hole provided on the R surface. A step of adsorbing and holding along the R surface,
The step of pressing the central portion of the work held on the apex portion of the R surface of the head against the adhesive surface of the dicer sheet supported by the flat sheet holding base, and the dicer sheet while bending the R surface portion of the head. Pressing against, pressing the adhesive surface of the dicer sheet from the central part of the work toward the peripheral part, releasing the suction holding of the head, in a state where the work is attached to the adhesive surface of the dicer sheet. The process of separating the head from the work,
A method for attaching a dicer sheet having a.
2. A method of attaching a work to be cut by a dicer and a dicer sheet, wherein the dicer is attached to a sheet holding base made of an elastic body having a convex R surface and a vacuum suction hole provided on the R surface. The step of adsorbing and holding the sheet along the R surface and so that the adhesive surface is exposed on the surface, and the adhesive surface portion of the dicer sheet adsorbed and held at the apex portion of the R surface of the sheet holding base are flattened. A step of pressing the central part of the work held by a different head, and pressing the work against the dicer sheet while bending the R surface part of the sheet holding table, and moving the dicer sheet from the central part of the work toward the peripheral part. The process of pressing it on the adhesive surface,
A dicer sheet sticking method comprising: a step of releasing the suction holding of the sheet holding base; and a step of separating the head from the work in a state where the work is stuck to the adhesive surface of the dicer sheet.
3. A method of attaching a work to be cut by a dicer and a dicer sheet, wherein the step of disposing the dicer sheet on a sheet holding table provided with a plurality of air blowing holes so that the adhesive surface is exposed on the surface. And a step of blowing air from the air blowing hole to inflate the central portion of the dicer sheet in a dome shape, and the apex portion of the dome-shaped inflated adhesive surface of the dicer sheet, of the work held by a flat head. The step of pressing the central part, pressing the work against the dicer sheet while bending the dome-shaped part of the dicer sheet, pressing the work from the central part of the work toward the peripheral part to the adhesive surface of the dicer sheet, and the air The process of stopping the air blow from the blow hole and the above work on the adhesive surface of the dicer sheet. Dicer sheet pasting method having the steps of separating the head from the workpiece in a state in which Ri attached has.
JP2001321833A 2001-10-19 2001-10-19 Dicer sheet sticking method Pending JP2003124153A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001321833A JP2003124153A (en) 2001-10-19 2001-10-19 Dicer sheet sticking method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001321833A JP2003124153A (en) 2001-10-19 2001-10-19 Dicer sheet sticking method

Publications (1)

Publication Number Publication Date
JP2003124153A true JP2003124153A (en) 2003-04-25

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011040744A (en) * 2009-08-11 2011-02-24 Samsung Electronics Co Ltd Semiconductor chip attaching apparatus and method of the same
JP2011199159A (en) * 2010-03-23 2011-10-06 Nitto Denko Corp Semiconductor wafer mounting method and semiconductor wafer mounting device
JP2017059581A (en) * 2015-09-14 2017-03-23 リンテック株式会社 Sheet sticking device and sheet sticking method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011040744A (en) * 2009-08-11 2011-02-24 Samsung Electronics Co Ltd Semiconductor chip attaching apparatus and method of the same
JP2011199159A (en) * 2010-03-23 2011-10-06 Nitto Denko Corp Semiconductor wafer mounting method and semiconductor wafer mounting device
JP2017059581A (en) * 2015-09-14 2017-03-23 リンテック株式会社 Sheet sticking device and sheet sticking method

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