JP6573802B2 - Sheet sticking device and sheet sticking method - Google Patents

Sheet sticking device and sheet sticking method Download PDF

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JP6573802B2
JP6573802B2 JP2015163745A JP2015163745A JP6573802B2 JP 6573802 B2 JP6573802 B2 JP 6573802B2 JP 2015163745 A JP2015163745 A JP 2015163745A JP 2015163745 A JP2015163745 A JP 2015163745A JP 6573802 B2 JP6573802 B2 JP 6573802B2
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adhesive sheet
sheet
pressing
peeling
tension
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JP2017041595A (en
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秀昭 加藤
秀昭 加藤
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Lintec Corp
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本発明は、シート貼付装置およびシート貼付方法に関する。   The present invention relates to a sheet sticking apparatus and a sheet sticking method.

従来から、剥離板で剥離した接着シートを被着体に押圧して貼付する装置が知られている(例えば、特許文献1)。   2. Description of the Related Art Conventionally, there is known an apparatus that presses and adheres an adhesive sheet peeled off by a release plate to an adherend (for example, Patent Document 1).

特開2011−14778号公報JP 2011-14778 A

しかしながら、特許文献1に記載の装置では、ピールプレート4で剥離されたマウント用シートMSは、図4に示すように、繰出方向AAへの張力が付与された状態で押圧ローラ51によってリングフレームRFに貼付されるので、当該繰出方向AAに交差する幅方向に縮もうとする力が働き、その結果、当該マウント用シートMSは、皺WRが発生した状態でリングフレームRFに貼付されるという不都合を発生する。   However, in the apparatus described in Patent Document 1, the mounting sheet MS peeled off by the peel plate 4 is subjected to the ring frame RF by the pressing roller 51 in a state where tension in the feeding direction AA is applied as shown in FIG. Therefore, a force to shrink in the width direction intersecting with the feeding direction AA acts, and as a result, the mounting sheet MS is stuck to the ring frame RF in a state where wrinkles WR are generated. Is generated.

本発明の目的は、接着シートに皺が発生した状態で被着体に貼付されることを極力防止することができるシート貼付装置およびシート貼付方法を提供することにある。   The objective of this invention is providing the sheet sticking apparatus and sheet sticking method which can prevent sticking to a to-be-adhered body in the state in which wrinkles generate | occur | produced in the adhesive sheet as much as possible.

上述した課題を解決するために、本発明は、複数の接着シートが帯状の剥離シートに所定の間隔をあけて仮着された原反を繰り出す繰出手段と、前記繰出手段で繰り出される前記原反を折り返して前記剥離シートから前記接着シートを剥離する剥離手段と、前記剥離手段で剥離された前記接着シートを被着体に押圧して貼付する押圧手段とを備え、前記剥離手段で剥離され、先端部が前記押圧手段で前記被着体に貼付された前記接着シートにおける未貼付部に、当該接着シートの繰出方向に交差する幅方向への張力を付与する張力付与手段を備え、前記剥離手段で剥離され、かつ前記張力付与手段で幅方向への張力が付与されていない前記接着シートにおける先端部を前記押圧手段で前記被着体に押圧した後、前記接着シートにおける未貼付部に前記張力付与手段で幅方向への張力を付与することを特徴とするシート貼付装置である。 In order to solve the above-described problems, the present invention provides a feeding unit that feeds a raw material in which a plurality of adhesive sheets are temporarily attached to a strip-shaped release sheet at a predetermined interval, and the raw material that is fed by the feeding unit. And peeling means for peeling off the adhesive sheet from the release sheet, and pressing means for pressing the adhesive sheet peeled off by the peeling means against an adherend, and peeling off by the peeling means, the non-sticking portion of the adhesive sheet tip is stuck to the adherend with the pressing means comprises a tensioning means for applying a tensile force in the width direction intersecting the feeding direction of the adhesive sheet, the release means And the tip of the adhesive sheet that has not been applied with the tension in the width direction by the tension applying means is pressed against the adherend by the pressing means, and then not adhered to the adhesive sheet. A sheet sticking apparatus characterized by applying tension in the width direction by the tensioning means.

前記剥離手段を前記押圧手段に対して進退させる進退手段を備え、当該進退手段は、前記剥離手段を前記押圧手段に接近させた状態で、前記接着シートの先端部を前記押圧手段で前記被着体に貼付した後、前記剥離手段を前記押圧手段から離間させることを特徴としてもよい。   The advancing / retreating means for advancing / retreating the peeling means with respect to the pressing means, the advancing / retreating means attaching the tip of the adhesive sheet with the pressing means with the peeling means approaching the pressing means. After being attached to the body, the peeling means may be separated from the pressing means.

前記張力付与手段と接着シートとを相対接離させる接離手段を備え、当該接離手段は、前記進退手段が前記剥離手段を前記押圧手段から離間させた後、前記先端部が被着体に貼付された接着シートにおける未貼付部と前記張力付与手段とを相対接近させることを特徴としてもよい。   A contact / separation means for relatively contacting / separating the tension applying means and the adhesive sheet is provided, and the contact / separation means is configured such that after the advancing / retracting means separates the peeling means from the pressing means, the tip portion is attached to the adherend. The non-sticking part in the stuck adhesive sheet and the tension applying means may be relatively approached.

前記張力付与手段は、回転軸方向における中央部の直径が同方向における両端部の直径に比して大きい形状のクラウンローラからなることを特徴としてもよい。   The tension applying means may be constituted by a crown roller having a shape in which the diameter of the central portion in the rotation axis direction is larger than the diameters of both end portions in the same direction.

本発明の他の態様は、複数の接着シートが帯状の剥離シートに所定の間隔をあけて仮着された原反を繰り出す繰出工程と、前記繰出工程で繰り出される前記原反を折り返して前記剥離シートから前記接着シートを剥離する剥離工程と、前記剥離工程で剥離された前記接着シートを被着体に押圧して貼付する押圧工程とを有し、前記剥離工程で剥離され、先端部が前記押圧工程で前記被着体に貼付された前記接着シートにおける未貼付部に、当該接着シートの繰出方向に交差する幅方向への張力を付与する張力付与工程を有し、前記剥離工程で剥離され、かつ前記張力付与工程で幅方向への張力が付与されていない前記接着シートにおける先端部を前記押圧工程で前記被着体に押圧した後、前記接着シートにおける未貼付部に前記張力付与工程で幅方向への張力を付与することを特徴とするシート貼付方法である。 According to another aspect of the present invention, a plurality of adhesive sheets are fed out to a strip-shaped release sheet at a predetermined interval to feed out the original fabric, and the original fabric fed out in the delivery step is folded back to release the strip A peeling step of peeling off the adhesive sheet from the sheet; and a pressing step of pressing and sticking the adhesive sheet peeled off in the peeling step to an adherend. It has a tension applying step for applying a tension in the width direction intersecting the feeding direction of the adhesive sheet to the non-adhered portion of the adhesive sheet applied to the adherend in the pressing step, and is peeled off in the peeling step. And after the front-end | tip part in the said adhesive sheet to which the tension | tensile_strength in the width direction is not provided by the said tension | tensile_strength provision process is pressed to the said adherend by the said press process, the said tension | tensile_strength provision process is performed on the non-sticking part in the said adhesive sheet. A sheet sticking method characterized by applying tension in the width direction.

本発明によれば、先端部が被着体に貼付された接着シートにおける未貼付部に、当該接着シートの繰出方向に交差する幅方向への張力を付与するので、接着シートに皺が発生した状態で被着体に貼付されることを極力防止することができる。
また、剥離手段を押圧手段に対して進退させることで、剥離手段と押圧手段との間に張力付与手段が入り込むスペースを形成することができる。
さらに、張力付与手段と接着シートとを相対接離させることで、接着シートの幅方向への張力を付与するタイミングを調整することができる。
また、張力付与手段をクラウンローラで構成することにより、接着シートの幅方向への張力を確実に付与することができる。
According to the present invention, the adhesive sheet is wrinkled because the tension in the width direction intersecting with the feeding direction of the adhesive sheet is applied to the non-adhered portion of the adhesive sheet with the tip part adhered to the adherend. It can prevent sticking to a to-be-adhered body in a state as much as possible.
Further, by moving the peeling means back and forth with respect to the pressing means, it is possible to form a space for the tension applying means to enter between the peeling means and the pressing means.
Furthermore, the timing which provides the tension | tensile_strength to the width direction of an adhesive sheet can be adjusted by making a tension | tensile_strength provision means and an adhesive sheet approach / separate relatively.
Moreover, the tension | tensile_strength provision means is comprised with a crown roller, and the tension | tensile_strength to the width direction of an adhesive sheet can be reliably provided.

シート貼付装置の側面図。The side view of a sheet sticking apparatus. 動作説明図。FIG. 動作説明図。FIG. 従来技術の説明図。Explanatory drawing of a prior art.

以下、本発明の実施形態に係るシート貼付装置10を図面に基づいて説明する。
なお、実施形態におけるX軸、Y軸、Z軸は、それぞれが直交する関係にあり、X軸およびY軸は、所定平面内の軸とし、Z軸は、当該所定平面に直交する軸とする。さらに、実施形態では、Y軸と平行な図1の手前方向から観た場合を基準とし、方向を示した場合、「上」がZ軸の矢印方向で「下」がその逆方向、「左」がX軸の矢印方向で「右」がその逆方向、「前」が紙面に直交する手前方向であってY軸の矢印方向で「後」がその逆方向とする。
Hereinafter, sheet sticking device 10 concerning an embodiment of the present invention is explained based on a drawing.
In the embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis that is orthogonal to the predetermined plane. . Furthermore, in the embodiment, when viewed from the near side of FIG. 1 parallel to the Y axis, when the direction is indicated, “up” is the arrow direction of the Z axis, “down” is the opposite direction, “left” “Right” is the direction of the arrow on the X axis, “Right” is the reverse direction, “Front” is the front direction orthogonal to the page, and “Rear” is the reverse direction of the Y axis arrow direction.

図1において、シート貼付装置10は、複数の接着シートASが帯状の剥離シートRLに所定の間隔をあけて仮着された原反RSを繰り出す繰出手段20と、繰出手段20で繰り出される原反RSを折り返して剥離シートRLから接着シートASを剥離する剥離手段としての剥離板30と、剥離板30で剥離された接着シートASを被着体WKとしてのリングフレームRFおよび半導体ウエハ(以下単に「ウエハ」という場合がある)WFに押圧して貼付する押圧手段としての押圧ローラ40と、剥離板30を押圧ローラ40に対して進退させる進退手段50と、剥離板30で剥離され、先端部が押圧ローラ40で被着体WKに貼付された接着シートASにおける未貼付部に、当該接着シートASの繰出方向BBに交差する幅方向CC(図3参照)への張力を付与する張力付与手段であって、回転軸方向における中央部の直径が同方向における両端部の直径に比して大きい形状のクラウンローラ60と、クラウンローラ60と接着シートASとを相対接離させる接離手段70とを備え、被着体WKを支持して搬送する移動手段80の上方に配置されている。   In FIG. 1, the sheet sticking apparatus 10 includes a feeding unit 20 that feeds a raw fabric RS on which a plurality of adhesive sheets AS are temporarily attached to a strip-like release sheet RL at a predetermined interval, and a raw fabric fed by the feeding unit 20. A peeling plate 30 as a peeling means for turning back RS and peeling the adhesive sheet AS from the peeling sheet RL, and a ring frame RF and a semiconductor wafer (hereinafter simply referred to as “a”) to which the adhesive sheet AS peeled by the peeling plate 30 is peeled off. The wafer is sometimes referred to as a “wafer”. The pressing roller 40 serves as a pressing unit that presses and adheres to the WF, the advancing / retreating unit 50 that advances and retracts the peeling plate 30 with respect to the pressing roller 40, and the tip is peeled off by the peeling plate 30. A width direction CC (FIG. 3) intersecting the feeding direction BB of the adhesive sheet AS on an unattached portion of the adhesive sheet AS attached to the adherend WK by the pressing roller 40. And a crown roller 60 having a shape in which the diameter of the central portion in the rotation axis direction is larger than the diameters of both end portions in the same direction, and the crown roller 60 and the adhesive sheet AS. Is disposed above the moving means 80 that supports and conveys the adherend WK.

繰出手段20は、原反RSを支持する支持ローラ21と、原反RSを案内するガイドローラ22と、駆動機器としての回動モータ23Aによって駆動される駆動ローラ23と、剥離シートRLを駆動ローラ23との間に挟み込むピンチローラ24と、図示しない駆動機器によって駆動され、剥離シートRLを回収する回収ローラ25とを備え、これらの構成が、直接的または図示しない接続部材を介してフレーム26に支持されている。   The feeding means 20 includes a support roller 21 that supports the original fabric RS, a guide roller 22 that guides the original fabric RS, a drive roller 23 that is driven by a rotation motor 23A as a drive device, and a release roller RL that drives the release sheet RL. 23, and a recovery roller 25 that is driven by a driving device (not shown) and recovers the release sheet RL. These structures are attached to the frame 26 directly or via a connection member (not shown). It is supported.

進退手段50は、フレーム26に支持されるとともに、その出力軸51Aで剥離板30を支持する駆動機器としての直動モータ51を備え、剥離板30を押圧ローラ40に接近させた状態で、接着シートASの先端部を押圧ローラ40で被着体WKに貼付した後、剥離板30を押圧ローラ40から離間可能に構成されている。   The advancing / retracting means 50 includes a linear motion motor 51 as a driving device that is supported by the frame 26 and supports the peeling plate 30 by its output shaft 51A, and is bonded in a state where the peeling plate 30 is brought close to the pressing roller 40. After the front end portion of the sheet AS is attached to the adherend WK by the pressing roller 40, the peeling plate 30 can be separated from the pressing roller 40.

接離手段70は、駆動機器としての直動モータ71と、直動モータ71の出力軸71Aに支持され、クラウンローラ60が回転可能に支持されたブラケット72とを備え、進退手段50が剥離板30を押圧ローラ40から離間させた後、先端部が被着体WKに貼付された接着シートASにおける未貼付部とクラウンローラ60とを相対接近可能に構成されている。   The contact / separation means 70 includes a linear motion motor 71 as a driving device, and a bracket 72 supported by an output shaft 71A of the linear motion motor 71 and a crown roller 60 rotatably supported. After separating 30 from the pressing roller 40, the unattached portion and the crown roller 60 of the adhesive sheet AS, the tip of which is attached to the adherend WK, are configured to be relatively close to each other.

移動手段80は、駆動機器としてのリニアモータ81のスライダ81Aに支持され、減圧ポンプや真空エジェクタ等の図示しない減圧手段によって被着体WKを保持可能な支持面82Aを有する搬送テーブル82を備えている。   The moving means 80 is supported by a slider 81A of a linear motor 81 as a driving device, and includes a transport table 82 having a support surface 82A that can hold the adherend WK by a decompression means (not shown) such as a decompression pump or a vacuum ejector. Yes.

次に、本実施形態におけるシート貼付装置10の動作について説明する。
先ず、各部材が初期位置で待機する図1中実線で示すシート貼付装置10に対し、作業者が原反RSを同図のようにセットした後、図示しない操作パネルやパーソナルコンピュータ等の入力手段を介して自動運転開始の信号を入力すると、繰出手段20が回動モータ23Aを駆動し、原反RSを繰り出す。そして、図1に示すように、先頭の接着シートASの繰出方向先端部が剥離板30で剥離シートRLから所定長さ剥離したことがカメラ等の撮像手段や光学センサ等の図示しない検出手段に検出されると、繰出手段20が回動モータ23Aの駆動を停止し、スタンバイ状態となる。
Next, operation | movement of the sheet sticking apparatus 10 in this embodiment is demonstrated.
First, after the members set the original fabric RS as shown in the figure with respect to the sheet sticking device 10 indicated by the solid line in FIG. 1 in which each member stands by at the initial position, input means such as an operation panel or a personal computer (not shown) When the automatic operation start signal is input via, the feeding means 20 drives the rotation motor 23A and feeds the original fabric RS. Then, as shown in FIG. 1, the leading end of the adhesive sheet AS in the feeding direction is peeled from the release sheet RL by a predetermined length by the release plate 30 to an imaging means such as a camera or a detection means not shown such as an optical sensor. When detected, the feeding means 20 stops the rotation motor 23A and enters a standby state.

次いで、人手または多関節ロボットやベルトコンベア等の図示しない移送手段が被着体WKを支持面82A上に載置すると、移動手段80が図示しない減圧手段を駆動し、支持面82Aで被着体WKを吸着保持した後、リニアモータ81を駆動し、搬送テーブル82を左方に移動させる。そして、被着体WKが所定位置に到達したことがカメラ等の撮像手段や光学センサ等の図示しない検知手段に検知されると、繰出手段20が回動モータ23Aを駆動し、被着体WKの搬送速度に合わせて原反RSを繰り出す。   Next, when a transfer means (not shown) such as a human hand or an articulated robot or a belt conveyor places the adherend WK on the support surface 82A, the moving means 80 drives a decompression means (not shown), and the adherend is supported by the support surface 82A. After attracting and holding the WK, the linear motor 81 is driven to move the transport table 82 to the left. Then, when it is detected by an imaging means such as a camera or a detection means (not shown) such as an optical sensor that the adherend WK has reached a predetermined position, the feeding means 20 drives the rotation motor 23A, and the adherend WK. The raw fabric RS is fed out in accordance with the transport speed.

続いて、図2(A)に示すように、接着シートASの繰出方向先端部が押圧ローラ40によりリングフレームRFに貼付されたことが図示しない検知手段により検知されると、繰出手段20および移動手段80が回動モータ23Aおよびリニアモータ81の駆動を停止する。次に、進退手段50が直動モータ51を駆動し、図2(B)に示すように、剥離板30を押圧ローラ40から離間させた後、接離手段70が直動モータ71を駆動し、図2(C)に示すように、クラウンローラ60を下降させ、当該クラウンローラ60を剥離板30で剥離された接着シートASの未貼付部に押し当てる。これにより、接着シートASの中央部が押し下げられ、図3に示すように、接着シートASの幅方向CCに張力が付与されて、当該接着シートASが幅方向に縮もうとすることを抑制する。そして、繰出手段20および移動手段80が回動モータ23Aおよびリニアモータ81を駆動し、図2(D)に示すように、再度原反RSを繰り出しつつ、搬送テーブル82を左方に移動させる。これにより、先頭の接着シートASが剥離シートRLから剥離されて被着体WKに貼付され、一体物WK1が形成される。なお、次の接着シートASの繰出方向先端部が剥離板30で剥離シートRLから所定長さ剥離したことが図示しない検出手段に検出されると、繰出手段20が回動モータ23Aの駆動を停止し、再びスタンバイ状態となる。   Subsequently, as shown in FIG. 2 (A), when it is detected by a detection means (not shown) that the leading end portion of the adhesive sheet AS is stuck to the ring frame RF by the pressing roller 40, the supply means 20 and the movement The means 80 stops the driving of the rotation motor 23A and the linear motor 81. Next, the advancing / retracting means 50 drives the linear motion motor 51, and as shown in FIG. 2 (B), after the separation plate 30 is separated from the pressing roller 40, the contact / separation means 70 drives the linear motion motor 71. As shown in FIG. 2C, the crown roller 60 is lowered, and the crown roller 60 is pressed against the unattached portion of the adhesive sheet AS peeled by the peeling plate 30. As a result, the center portion of the adhesive sheet AS is pushed down, and as shown in FIG. 3, tension is applied in the width direction CC of the adhesive sheet AS, and the adhesive sheet AS is prevented from shrinking in the width direction. . Then, the feeding means 20 and the moving means 80 drive the rotation motor 23A and the linear motor 81, and move the conveyance table 82 to the left while feeding the original fabric RS again as shown in FIG. 2 (D). As a result, the leading adhesive sheet AS is peeled off from the release sheet RL and attached to the adherend WK to form an integrated object WK1. When the detection means (not shown) detects that the leading edge of the next adhesive sheet AS is peeled from the release sheet RL by the release plate 30 for a predetermined length, the supply means 20 stops driving the rotation motor 23A. Then, it enters the standby state again.

一体物WK1が形成されると、移動手段80がリニアモータ81の駆動を停止し、搬送テーブル82を所定の位置で停止させた後、図示しない減圧手段の駆動を停止するので、人手または図示しない移送手段が、一体物WK1を次工程に搬送する。そして、移動手段80がリニアモータ81を駆動し、搬送テーブル82を初期位置に復帰させた後、上記同様の動作が繰り返される。   When the one-piece WK1 is formed, the moving unit 80 stops driving the linear motor 81, stops the conveyance table 82 at a predetermined position, and then stops driving the decompression unit (not shown). The transfer means conveys the integrated object WK1 to the next process. Then, after the moving unit 80 drives the linear motor 81 and returns the conveyance table 82 to the initial position, the same operation as described above is repeated.

以上のような本実施形態によれば、先端部が被着体WKに貼付された接着シートASにおける未貼付部に、当該接着シートASの繰出方向BBに交差する幅方向CCへの張力を付与するので、接着シートASに皺が発生した状態で被着体WKに貼付されることを極力防止することができる。   According to the present embodiment as described above, the tension in the width direction CC that intersects the feeding direction BB of the adhesive sheet AS is applied to the unattached portion of the adhesive sheet AS with the tip portion attached to the adherend WK. Therefore, it is possible to prevent the adhesive sheet AS from being attached to the adherend WK in a state where wrinkles are generated.

本発明における手段および工程は、それら手段および工程について説明した動作、機能または工程を果たすことができる限りなんら限定されることはなく、まして、前記実施形態で示した単なる一実施形態の構成物や工程に全く限定されることはない。例えば、繰出手段は、複数の接着シートが帯状の剥離シートに所定の間隔をあけて仮着された原反を繰り出すものであれば、出願当初の技術常識に照らし合わせてその範囲内であればなんら限定されることはない(他の手段および工程についての説明は省略する)。   The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described with respect to those means and steps. The process is not limited at all. For example, if the feeding means feeds the original fabric temporarily attached to the strip-shaped release sheet with a predetermined interval, the feeding means is within the range in light of the common general technical knowledge at the beginning of the application. There is no limitation at all (the description of other means and steps is omitted).

繰出手段20は、帯状の剥離シートRLに仮着された帯状の接着シート基材に閉ループ状の切込が形成されることで、当該切込の内側が接着シートAS、外側が不要シートとされた原反RSを繰り出してもよい。
繰出手段20は、剥離シートRLの一方の面に帯状の接着シート基材が仮着された原反RSを繰り出し、剥離板30に対して原反RSの繰出方向上流側に、接着シート基材に閉ループ状の切り込みを形成し、当該切り込みの内側に接着シートASを形成する切断手段を備えていてもよい。このような切断手段は、カッター刃、カッターローラ、レーザカッタ、電熱線、気体や液体等の吹付け等を採用することができる。
The feeding means 20 has a closed loop-shaped cut formed in the belt-like adhesive sheet base material temporarily attached to the belt-like release sheet RL, so that the inside of the cut is an adhesive sheet AS and the outside is an unnecessary sheet. The raw fabric RS may be paid out.
The feeding means 20 feeds the original fabric RS having a belt-like adhesive sheet base material temporarily attached to one surface of the release sheet RL, and the adhesive sheet base material upstream of the release plate 30 in the feed direction of the original fabric RS. It is also possible to provide a cutting means for forming a closed loop-shaped cut in the cut and forming the adhesive sheet AS inside the cut. As such a cutting means, a cutter blade, a cutter roller, a laser cutter, a heating wire, a spray of gas or liquid, or the like can be adopted.

剥離板30は、図3中二点鎖線で示すように、原反RSの繰出方向前端部の中央部が当該繰出方向上流側に凹となる凹部31を備えていてもよいし、当該中央部が接着シートASの非接着面側から接着面側に凹んだ形状でもよい。このように凹部31や凹んだ形状を形成することで、クラウンローラ60の中央部が入り込むスペースを大きくすることができる上、クラウンローラ60の中央部で押し下げられる接着シートASの中央部を折り曲げ易くすることができる。
剥離手段は、剥離板30の代わりに、丸棒や回転可能な剥離用ローラを採用してもよい。
As shown by a two-dot chain line in FIG. 3, the peeling plate 30 may include a concave portion 31 in which a central portion of the front end portion of the raw fabric RS is recessed on the upstream side in the feeding direction. However, the shape of the adhesive sheet AS may be recessed from the non-adhesive surface side to the adhesive surface side. By forming the concave portion 31 or the concave shape in this way, a space for the central portion of the crown roller 60 to enter can be increased, and the central portion of the adhesive sheet AS that is pushed down by the central portion of the crown roller 60 can be easily bent. can do.
As the peeling means, a round bar or a rotatable peeling roller may be employed instead of the peeling plate 30.

押圧手段は、ブレード材、ゴム、樹脂、スポンジ等による押圧部材を採用してもよいし、大気やガス等のエアの噴き付けにより押圧する構成を採用してもよい。
押圧手段は、押圧部材を移動させずに被着体WKを押圧部材に向けて移動させて押圧してもよいし、被着体WKを移動させずに押圧部材を被着体WKに向けて移動させて押圧してもよいし、押圧部材と被着体WKとの両方を互いに移動させて押圧してもよい。
As the pressing means, a pressing member made of a blade material, rubber, resin, sponge, or the like may be employed, or a structure of pressing by blowing air such as air or gas may be employed.
The pressing means may move and press the adherend WK toward the pressing member without moving the pressing member, or direct the pressing member toward the adherend WK without moving the adherend WK. It may be moved and pressed, or both the pressing member and the adherend WK may be moved and pressed together.

進退手段50は、繰出手段20を移動させて剥離板30を押圧ローラ40に対して進退させる構成を採用してもよく、この場合、直動モータ51はあってもよいし、なくてもよい。
進退手段50は、多関節ロボットや適宜な駆動機器を組み合わせたものでもよい。
クラウンローラ60が接着シートASの幅方向CCに張力を付与できれば、進退手段50は、あってもよいし、なくてもよい。
進退手段50が剥離板30を押圧ローラ40から離間させ、接離手段70がクラウンローラ60を下降させるとき、繰出手段20および移動手段80は、回動モータ23Aおよびリニアモータ81の駆動を停止させなくてもよい。この場合、単位時間あたりにシート貼付装置10が被着体WKに接着シートASを貼付する能力が低下することを防止することができる。
The advancing / retracting means 50 may adopt a configuration in which the feeding means 20 is moved to move the peeling plate 30 forward / backward with respect to the pressing roller 40. In this case, the linear motion motor 51 may or may not be provided. .
The advancing / retreating means 50 may be a combination of an articulated robot and an appropriate drive device.
As long as the crown roller 60 can apply tension in the width direction CC of the adhesive sheet AS, the advance / retreat means 50 may or may not be provided.
When the advancing / retracting means 50 separates the peeling plate 30 from the pressing roller 40 and the contacting / separating means 70 lowers the crown roller 60, the feeding means 20 and the moving means 80 stop driving the rotation motor 23A and the linear motor 81. It does not have to be. In this case, it is possible to prevent the ability of the sheet sticking apparatus 10 to stick the adhesive sheet AS to the adherend WK per unit time.

張力付与手段は、中央部が接着シートASの非接着面側から接着面側に膨出した回転しない部材でもよいし、ゴムや樹脂、スポンジ、シャフト等の部材でもよいし、エアの吹き付けや、減圧ポンプや真空エジェクタ等の減圧手段でもよく、接着シートASの繰出方向BBに交差する幅方向CCへの張力を付与できるものであれば寸法、形状、材質等は任意に決定することができる。
張力付与手段は、接着シートASの繰出方向BBに直交する方向に張力を付与するものでもよいし、接着シートASの繰出方向BBに直交する方向とは異なる方向に張力を付与するものでもよい。
張力付与手段は、2体以上あってもよい。
The tension applying means may be a non-rotating member whose central portion bulges from the non-adhesive surface side of the adhesive sheet AS to the adhesive surface side, or may be a member such as rubber, resin, sponge, shaft, air blowing, A pressure reducing means such as a pressure reducing pump or a vacuum ejector may be used, and dimensions, shapes, materials, etc. can be arbitrarily determined as long as tension can be applied in the width direction CC intersecting the feeding direction BB of the adhesive sheet AS.
The tension applying means may apply tension in a direction orthogonal to the feeding direction BB of the adhesive sheet AS, or may apply tension in a direction different from the direction orthogonal to the feeding direction BB of the adhesive sheet AS.
There may be two or more tension applying means.

接離手段70は、接着シートASに対してエアを吹き付けたり、減圧ポンプや真空エジェクタ等の減圧手段で接着シートASを吸引したりすることで、当該接着シートASをクラウンローラ60に相対接離させてもよいし、クラウンローラ60および接着シートASの両方を移動させて両者を相対接離させてもよい。
接離手段70は、被着体WKへの接着シートASの貼付途中、例えば、ウエハWFに接着シートASを貼付するときに、クラウンローラ60を初期位置に復帰させてもよいし、ウエハWFへの接着シートASの貼付が完了した時点で、クラウンローラ60を初期位置に復帰させてもよい。接離手段70がクラウンローラ60を初期位置に復帰させた後、進退手段50が直動モータ51を駆動し、剥離板30を押圧ローラ40に接近させてもよい。
接離手段70は、多関節ロボットや適宜な駆動機器を組み合わせたものでもよいし、張力付与手段を幅方向CCに移動可能な構成のものでもよい。
クラウンローラ60が接着シートASの幅方向CCに張力を付与できれば、接離手段70は、あってもよいし、なくてもよい。
The contact / separation means 70 relatively contacts and separates the adhesive sheet AS from the crown roller 60 by blowing air to the adhesive sheet AS or sucking the adhesive sheet AS by a decompression means such as a decompression pump or a vacuum ejector. Alternatively, both the crown roller 60 and the adhesive sheet AS may be moved so that they are relatively close to each other.
The contact / separation means 70 may return the crown roller 60 to the initial position during application of the adhesive sheet AS to the adherend WK, for example, when the adhesive sheet AS is applied to the wafer WF, or to the wafer WF. When the application of the adhesive sheet AS is completed, the crown roller 60 may be returned to the initial position. After the contact / separation means 70 returns the crown roller 60 to the initial position, the advancing / retreating means 50 may drive the linear motion motor 51 to bring the peeling plate 30 closer to the pressing roller 40.
The contact / separation means 70 may be a combination of an articulated robot or an appropriate drive device, or may be configured to move the tension applying means in the width direction CC.
As long as the crown roller 60 can apply tension in the width direction CC of the adhesive sheet AS, the contact / separation means 70 may or may not be provided.

移動手段80は、被着体WKを移動させずに、または、被着体WKを移動させつつ、繰出手段20、剥離板30および押圧ローラ40等の他の手段を適宜な方向に移動させて上記と同様の貼付動作を行ってもよい。
移動手段80は、メカチャックやチャックシリンダ等のチャック手段、クーロン力、接着剤、粘着剤、磁力、ベルヌーイ吸着等で被着体WKを保持する構成でもよい。
移動手段80は、搬送テーブル82を昇降可能な構成としてもよく、搬送テーブル82を上昇させて、クラウンローラ60と接着シートASとを接近させてもよい。
被着体WKを他の装置で搬送する場合、シート貼付装置10において移動手段80はあってもよいし、なくてもよく、その他接離手段70等の本願請求項1に記載のないものは、それぞれ必要に応じて採用すればよく、あってもよいし、なくてもよい。
The moving means 80 moves other means such as the feeding means 20, the peeling plate 30, and the pressing roller 40 in an appropriate direction without moving the adherend WK or while moving the adherend WK. A pasting operation similar to the above may be performed.
The moving means 80 may be configured to hold the adherend WK by chuck means such as a mechanical chuck or a chuck cylinder, Coulomb force, adhesive, adhesive, magnetic force, Bernoulli adsorption, or the like.
The moving means 80 may be configured such that the transport table 82 can be moved up and down, or the transport table 82 may be raised to bring the crown roller 60 and the adhesive sheet AS closer to each other.
In the case where the adherend WK is transported by another apparatus, the sheet sticking apparatus 10 may or may not have the moving means 80, and other things not described in claim 1 such as the contacting / separating means 70, etc. These may be employed as necessary, and may or may not be employed.

さらに、本発明における接着シートAS、被着体WKの材質、種別、形状等は、特に限定されることはない。例えば、接着シートASは、感圧接着性、感熱接着性等の接着形態に限定されることはない。感熱接着性のものが採用された場合は、当該接着シートASを加熱する適宜なコイルヒータやヒートパイプの加熱側等の加熱手段を設ければよい。また、このような接着シートASは、例えば、接着剤層だけの単層のもの、基材シートと接着剤層とからなるもの、それらの間に中間層を有するもの、基材シートの上面にカバー層を有する3層以上のもの、更には、基材シートを接着剤層から剥離することのできる所謂両面接着シートのようなものであってもよいし、両面接着シートは、単層又は複層の中間層を有するものや、中間層のない単層又は複層のものであってよい。また、被着体WKとしては、例えば、ウエハWFだけでもよいしリングフレームRFだけでもよいし、食品、樹脂容器、シリコン半導体ウエハや化合物半導体ウエハ等の半導体ウエハ、回路基板、電極基板、光ディスク等の情報記録基板、ガラス板、鋼板、陶器、木板または樹脂板等、任意の形態の部材や物品なども対象とすることができる。なお、接着シートASは、機能的、用途的な読み方に換え、例えば、情報記載用ラベル、装飾用ラベル、保護シート、ダイシングテープ、ダイアタッチフィルム、ダイボンディングテープ、記録層形成樹脂シート等の任意のシート、フィルム、テープ等でもよい。   Further, the material, type, shape, etc. of the adhesive sheet AS and the adherend WK in the present invention are not particularly limited. For example, the adhesive sheet AS is not limited to adhesive forms such as pressure-sensitive adhesiveness and heat-sensitive adhesiveness. When a heat-sensitive adhesive is used, a heating means such as an appropriate coil heater for heating the adhesive sheet AS or a heating side of the heat pipe may be provided. Moreover, such an adhesive sheet AS is, for example, a single layer having only an adhesive layer, a base sheet and an adhesive layer, an intermediate layer between them, and an upper surface of the base sheet. Three or more layers having a cover layer, or a so-called double-sided adhesive sheet capable of peeling the base sheet from the adhesive layer may be used. It may be a layer having an intermediate layer or a single layer or a multilayer having no intermediate layer. Further, as the adherend WK, for example, only the wafer WF or the ring frame RF may be used, a food wafer, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit board, an electrode substrate, an optical disk, etc. The information recording substrate, the glass plate, the steel plate, the pottery, the wooden plate, the resin plate, or any other member or article can be targeted. Note that the adhesive sheet AS can be read in a functional or application manner, and can be any information such as an information description label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, and a recording layer forming resin sheet. Sheets, films, tapes, etc. may be used.

また、前記実施形態における駆動機器は、回動モータ、直動モータ、リニアモータ、単軸ロボット、多関節ロボット等の電動機器、エアシリンダ、油圧シリンダ、ロッドレスシリンダ及びロータリシリンダ等のアクチュエータ等を採用することができる上、それらを直接的又は間接的に組み合せたものを採用することもできる(実施形態で例示したものと重複するものもある)。   The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single-axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

10・・・シート貼付装置
20・・・繰出手段
30・・・剥離板(剥離手段)
40・・・押圧ローラ(押圧手段)
50・・・進退手段
60・・・クラウンローラ(張力付与手段)
70・・・接離手段
AS・・・接着シート
BB・・・繰出方向
CC・・・幅方向
RL・・・剥離シート
RS・・・原反
WK・・・被着体
DESCRIPTION OF SYMBOLS 10 ... Sheet sticking apparatus 20 ... Feeding means 30 ... Release plate (peeling means)
40 ... Pressing roller (pressing means)
50 ... Advance / retreat means 60 ... Crown roller (tension applying means)
70 ... contact / separation means AS ... adhesive sheet BB ... feeding direction CC ... width direction RL ... release sheet RS ... original fabric WK ... adherend

Claims (5)

複数の接着シートが帯状の剥離シートに所定の間隔をあけて仮着された原反を繰り出す繰出手段と、
前記繰出手段で繰り出される前記原反を折り返して前記剥離シートから前記接着シートを剥離する剥離手段と、
前記剥離手段で剥離された前記接着シートを被着体に押圧して貼付する押圧手段とを備え、
前記剥離手段で剥離され、先端部が前記押圧手段で前記被着体に貼付された前記接着シートにおける未貼付部に、当該接着シートの繰出方向に交差する幅方向への張力を付与する張力付与手段を備え
前記剥離手段で剥離され、かつ前記張力付与手段で幅方向への張力が付与されていない前記接着シートにおける先端部を前記押圧手段で前記被着体に押圧した後、前記接着シートにおける未貼付部に前記張力付与手段で幅方向への張力を付与することを特徴とするシート貼付装置。
A feeding means for feeding out the original fabric temporarily attached to the strip-shaped release sheet with a predetermined interval between the plurality of adhesive sheets;
Peeling means for turning back the original fabric fed by the feeding means and peeling the adhesive sheet from the release sheet;
A pressing means for pressing and adhering the adhesive sheet peeled off by the peeling means to an adherend,
Applying tension to apply tension in the width direction intersecting the feeding direction of the adhesive sheet to the non-attached portion of the adhesive sheet, which is peeled off by the peeling means and the tip portion is attached to the adherend by the pressing means. With means ,
After the leading end of the adhesive sheet that has been peeled off by the peeling means and is not applied with a tension in the width direction by the tension applying means is pressed against the adherend by the pressing means, an unattached portion on the adhesive sheet A sheet sticking apparatus , wherein a tension in a width direction is applied to the sheet by the tension applying means .
前記剥離手段を前記押圧手段に対して進退させる進退手段を備え、当該進退手段は、前記剥離手段を前記押圧手段に接近させた状態で、前記接着シートの先端部を前記押圧手段で前記被着体に貼付した後、前記剥離手段を前記押圧手段から離間させることを特徴とする請求項1に記載のシート貼付装置。   The advancing / retreating means for advancing / retreating the peeling means with respect to the pressing means, the advancing / retreating means attaching the tip of the adhesive sheet with the pressing means with the peeling means approaching the pressing means. The sheet sticking apparatus according to claim 1, wherein after the sticking to the body, the peeling means is separated from the pressing means. 前記張力付与手段と接着シートとを相対接離させる接離手段を備え、当該接離手段は、前記進退手段が前記剥離手段を前記押圧手段から離間させた後、前記先端部が被着体に貼付された接着シートにおける未貼付部と前記張力付与手段とを相対接近させることを特徴とする請求項2に記載のシート貼付装置。   A contact / separation means for relatively contacting / separating the tension applying means and the adhesive sheet is provided, and the contact / separation means is configured such that after the advancing / retracting means separates the peeling means from the pressing means, the tip portion is attached to the adherend. The sheet sticking apparatus according to claim 2, wherein the non-sticking portion of the stuck adhesive sheet and the tension applying unit are relatively approached. 前記張力付与手段は、回転軸方向における中央部の直径が同方向における両端部の直径に比して大きい形状のクラウンローラからなることを特徴とする請求項1乃至3の何れかに記載のシート貼付装置。   The sheet according to any one of claims 1 to 3, wherein the tension applying means includes a crown roller having a shape in which a diameter of a central portion in a rotation axis direction is larger than a diameter of both end portions in the same direction. Pasting device. 複数の接着シートが帯状の剥離シートに所定の間隔をあけて仮着された原反を繰り出す繰出工程と、
前記繰出工程で繰り出される前記原反を折り返して前記剥離シートから前記接着シートを剥離する剥離工程と、
前記剥離工程で剥離された前記接着シートを被着体に押圧して貼付する押圧工程とを有し、
前記剥離工程で剥離され、先端部が前記押圧工程で前記被着体に貼付された前記接着シートにおける未貼付部に、当該接着シートの繰出方向に交差する幅方向への張力を付与する張力付与工程を有し
前記剥離工程で剥離され、かつ前記張力付与工程で幅方向への張力が付与されていない前記接着シートにおける先端部を前記押圧工程で前記被着体に押圧した後、前記接着シートにおける未貼付部に前記張力付与工程で幅方向への張力を付与することを特徴とするシート貼付方法。
A feeding step of feeding out the original fabric temporarily attached to the strip-shaped release sheet with a predetermined interval between the plurality of adhesive sheets;
A peeling step in which the adhesive sheet is peeled off from the release sheet by folding back the original fabric fed in the feeding step;
A pressing step for pressing and adhering the adhesive sheet peeled in the peeling step to an adherend,
Tensioning that applies tension in the width direction intersecting the feeding direction of the adhesive sheet to the non-adhered portion of the adhesive sheet that has been peeled off in the peeling step and the tip portion stuck on the adherend in the pressing step. Having a process ,
After pressing the tip of the adhesive sheet, which has been peeled off in the peeling step and not applied with the tension in the width direction in the tension applying step, to the adherend in the pressing step, the unattached portion in the adhesive sheet A sheet sticking method , wherein tension is applied in the width direction in the tension applying step .
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