JP4616160B2 - Sheet sticking device and sheet sticking method - Google Patents

Sheet sticking device and sheet sticking method Download PDF

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JP4616160B2
JP4616160B2 JP2005351539A JP2005351539A JP4616160B2 JP 4616160 B2 JP4616160 B2 JP 4616160B2 JP 2005351539 A JP2005351539 A JP 2005351539A JP 2005351539 A JP2005351539 A JP 2005351539A JP 4616160 B2 JP4616160 B2 JP 4616160B2
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sheet
original fabric
adhesive sheet
spacer
means
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JP2007158037A (en
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芳昭 杉下
威洋 齋藤
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リンテック株式会社
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Description

  The present invention relates to a sheet sticking apparatus and a sheet sticking method for sticking an adhesive sheet to a plate-like member (adhered body) such as a semiconductor wafer.

  Conventionally, this type of adhesive sheet includes, for example, an original fabric 2 having a configuration as shown in FIG. 5, and the original fabric 2 is set in a sheet sticking apparatus in a state of being wound in a roll shape. The original fabric 2 in the figure has an adhesive sheet 6 temporarily attached to a release material 5 and cut into a predetermined shape, and a spacer sheet 7 formed around the adhesive sheet 6. 2. It has a structure that prevents problems due to deformation of the adhesive sheet 6 at the time of storage and protrusion of the adhesive layer on the back surface of the adhesive sheet 6. (For example, see Patent Document 1 for the structure of the raw fabric 2)

  As a sheet sticking apparatus for peeling the adhesive sheet 6 from the raw fabric 2 having the above structure and sticking it to a plate-like member (adhered body) such as a semiconductor wafer, for example, the one having the structure shown in FIG. When the driving roller 9 is driven to rotate, the sheet sticking apparatus shown in FIG. 2 feeds the original fabric 2 from the holding roller 4 in the direction indicated by the arrow A in the figure, and the fed original fabric 2 is conveyed toward the peel plate 14. The adhesive sheet 6 is peeled off from the release material 5 constituting the raw fabric 2 by being folded back at the tip of the peel plate 14 in the direction opposite to the conveying direction, and the peeled adhesive sheet 6 is fed forward of the peel plate 14. It is. The adhesive sheet 6 drawn out in this way is pressed by the press roller 22 and stuck on the surface of the adherend. On the other hand, the release material 5 from which the adhesive sheet 6 has been peeled passes between the drive roller 9 and the pinch roller 10 and is finally taken up by the take-up roller 12. (See, for example, Patent Document 2 for the structure of the sheet sticking device)

  However, in the conventional sheet sticking apparatus as described above, since the original fabric 2 is folded back in the direction opposite to the conveying direction at the front end of the peel plate 14 when the adhesive sheet 6 is fed out, the difference in stretchability is At the tip of the peel plate 14, the spacer sheet 7 may be extended and peeled off from the release material 5 (see the portion indicated by arrow A in FIG. 6). In such a case, the extended and peeled spacer sheet 7 enters between the press roller 22 and a plate-like member (adhered body) such as the semiconductor wafer W, and the adhesive sheet 6 is stuck poorly or the adherend is not adhered. There is a problem of incurring damage.

Japanese Utility Model Publication No. 6-18383

JP-A-6-216242

  The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a sheet sticking apparatus and a sheet sticking method suitable for preventing an adhesive sheet sticking failure and an adherend damage. It is to provide.

In order to achieve the above object, the sheet sticking device of the present invention is an adhesive sheet temporarily attached onto a release material and cut into a predetermined shape, and a spacer sheet formed on the periphery of the adhesive sheet. In the sheet sticking apparatus for feeding the adhesive sheet and sticking the adhesive sheet to the adherend, the holding means for holding the original fabric, the peeling means for peeling the release material and the adhesive sheet, and the raw material are fed. driving means for imparting a driving force, and a winding means for winding the release liner wherein the seat portion is peeled, provided before the peeling means, and removing means from said raw removing the spacer sheet, the And the spacer sheet is provided continuously and independently on both sides of the width direction of the original sheet orthogonal to the feed direction of the original sheet, and the removing means includes the independent spacer sheet, respectively. And removing by standing.

Further, the sheet sticking apparatus of the present invention feeds out the adhesive sheet from an original fabric having an adhesive sheet temporarily attached on a release material and cut into a predetermined shape, and a spacer sheet formed around the adhesive sheet. In a sheet sticking apparatus for sticking an adhesive sheet to an adherend, a holding means for holding the original fabric, a peeling means for peeling the release material and the adhesive sheet, and a driving force for feeding are applied to the original fabric. A driving unit; a winding unit that winds the release material from which the sheet portion has been peeled; and a removing unit that is provided in a preceding stage of the peeling unit and removes the spacer sheet from the original fabric. , the original counter-reaction both widthwise sides original orthogonal to the feeding direction of the arranged intermittently and independently, said removal means to remove the separate spacer sheet independently And features.

In the sheet sticking method of the present invention , the adhesive sheet is fed out from an original fabric having an adhesive sheet temporarily attached on a release material and cut into a predetermined shape, and a spacer sheet formed around the adhesive sheet. In the sheet sticking method for sticking to the adherend, the spacer sheet is provided continuously and independently on both sides of the width direction of the original fabric orthogonal to the feed direction of the original fabric, Holding the original fabric, applying a driving force for feeding the held original fabric, and separating the adhesive sheet from the original fabric fed by applying the driving force in advance from the original fabric . The spacer sheet is independently removed .

The sheet sticking method of the present invention is a method of paying out the adhesive sheet from an original fabric having an adhesive sheet temporarily attached on a release material and cut into a predetermined shape, and a spacer sheet formed around the adhesive sheet, In the sheet affixing method for affixing an adhesive sheet to an adherend, the spacer sheet is intermittently and independently provided on both sides of the original width direction perpendicular to the feed direction of the original , , Holding the original fabric, applying a driving force for feeding the held original fabric, and separating the adhesive sheet from the original fabric fed by applying the driving force in advance from the original fabric. and removing separate spacer sheet independently.

  In the sheet sticking apparatus and the sheet sticking method of the present invention, as described above, since the configuration in which the spacer sheet is removed from the original fabric in the previous stage of peeling with the peel plate, the spacer sheet extends and peels at the tip of the peel plate. Therefore, it does not enter between the adherend and the press roller, and it is possible to effectively prevent adhesion failure of the adhesive sheet or damage to the adherend due to such insertion of the spacer sheet.

  Hereinafter, the best mode for carrying out the present invention will be described in detail with reference to the accompanying drawings.

  FIG. 1 is a perspective view of a sheet sticking apparatus according to a first embodiment of the present invention, and FIG. 2 is a side view of the sheet sticking apparatus.

  The sheet sticking apparatus 1 shown in FIG. 1 is provided with a holding roller 4 as a holding means 3 for the original fabric 2, and the holding roller 4 holds the original fabric 2 in a roll shape. As shown in FIG. 5, the original fabric 2 to be held includes a strip-shaped release material 5, an adhesive sheet 6 temporarily attached to one surface of the release material 5 via an adhesive layer (not shown), The spacer sheet 7 is formed around the adhesive sheet 6.

  In the present embodiment, the adhesive sheet 6 is attached as a protective sheet to the surface of a semiconductor wafer (hereinafter abbreviated as “wafer W”). And cut in advance into a predetermined shape. Further, the spacer sheet 7 is provided continuously and independently on both sides of the width direction of the original web 2 orthogonal to the feed direction of the original web 2 (the direction indicated by the arrow A in the figure). It is temporarily attached to one surface of the release material 5 via an adhesive layer that does not.

  Below the holding roller 4, a driving means 8 that applies driving force to the original fabric 2 is provided between the driving roller 9 and a driving roller 9 that is configured to be rotatable by a motor 27 shown in FIG. A pinch roller 10 that sandwiches the opposite side 2 is provided. A release material take-up roller 12 is provided as a take-up means 11 for taking up the release material 5 from which the adhesive sheet 6 has been released, on the downstream side of the driving means 8 in the feeding direction. Between the holding means 3 and the driving means 8, a peel plate 14 as a peeling means 13 for peeling the release material 5 and the adhesive sheet 6 is provided. Further, the peel plate 14 and the holding roller 4 A guide roller 15 is provided between them.

  A spacer take-up roller 17 is provided as a removing means 16 for removing the spacer sheet 7 from the original fabric 2 in the previous stage of the peel plate 14. In the case of this embodiment, in order to remove the two independent spacer sheets 7 provided on both sides of the original sheet width direction, the spacer take-up rollers 17 corresponding to the respective spacer sheets 7 are guided on the both sides of the original sheet width direction. One spacer is provided above each of the two spacer sheets, and the two spacer sheets 7 are independently wound up and removed by the respective spacer take-up rollers 17. By adopting such a configuration, a winding failure that occurs when winding with one winding roller, that is, one spacer sheet 7 is loosened and adhered to the other part, or is wound into the apparatus. It is possible to prevent the inconvenience of being stuck.

  The spacer take-up roller 17 is independently driven to rotate by a servo motor 18. These servo motors 18 are each a current torque detection signal detected by a built-in torque detection means (not shown) and a current output from a sensor 19 that detects the winding diameter of the spacer winding roller 17. Based on the detection signal of the winding diameter, a control (constant torque control) is performed so that the winding torque of the spacer winding roller 17 is always a desired value. It is wound up with a predetermined tension.

  Here, the initial set state of the original fabric 2 in the sheet sticking apparatus 1 of FIG. 1 will be described. The original fabric 2 mounted on the holding roller 4 passes under the guide roller 15 and hangs around the tip of the peel plate 14, and is then sandwiched between the driving roller 9 and the pinch roller 10, and finally the winding roller. 12 is wound around. Further, the spacer sheet 7 constituting the original fabric 2 is wound around the guide roller 15 and wound around the upper spacer winding roller 17.

  When the driving roller 9 is rotationally driven in the set state, the original fabric 2 is fed out from the holding roller 4 in the direction indicated by the arrow a in the figure, and the fed original fabric 2 is being conveyed to the peel plate 14, that is, In this embodiment, immediately after the original fabric 2 passes under the guide roller 15, the spacer sheet 7 constituting the original fabric 2 is taken up by the spacer take-up roller 17 and removed from the original fabric 2.

  And the peeling material 5 and the adhesive sheet 6 peel by the original fabric 2 which removed the spacer sheet | seat 7 as mentioned above being folded in the direction opposite to an original fabric conveyance direction at the front-end | tip part of the peel plate 14, The peeled adhesive sheet 6 is fed out in front of the peel plate 14. Then, the release material 5 from which the adhesive sheet 6 has been peeled passes between the drive roller 9 and the pinch roller 10 and is finally taken up by the take-up roller 12.

  A holding table 21 is movably provided below the peel plate 14. The holding table 21 can be held by adsorbing a wafer W as an adherend on the upper surface thereof. It is configured via a motor (not shown) or the like so that it can move in the same direction as the feeding direction of the adhesive sheet 6 that is fed from the tip of the peel plate 14. Therefore, the adhesive sheet 6 is fed out from the tip of the peel plate 14 in synchronization with the movement of the holding table 21 and is pressed by the press roller 22, thereby completing the attaching operation of the adhesive sheet 6.

  As described above, according to the sheet sticking apparatus and the sheet sticking method of the present embodiment, the spacer sheet 7 is removed from the original fabric 2 before the peeling with the peel plate 14. Therefore, the spacer sheet 7 does not enter between the adherend wafer W and the press roller 22 as in the prior art, and the adhesive sheet 6 by such entry of the spacer sheet 7 is not transferred. Can be prevented effectively.

  FIG. 3 is a perspective view of a sheet sticking apparatus according to a second embodiment of the present invention, and FIG. 4 is a side view of the sheet sticking apparatus.

  In the case where the spacer sheet 7 of the original fabric 2 is intermittently and independently provided on both sides of the original fabric width direction as shown in FIG. 3, the sheet sticking device 1 of FIG. 3 which is the second embodiment is applied. Similarly to the sheet sticking device 1 of FIG. 1, the sheet sticking device 1 of FIG. 1 is also a means for removing the spacer sheet 7 from the original fabric 2 before peeling the release material 5 and the adhesive sheet 6 with the peel plate 14. Although the removing means 16 is provided, the specific structure of the removing means 16 is different from that shown in FIG. Since the remaining configuration is the same as that of FIG. 1, the same reference numerals are given to the same members, and detailed descriptions thereof are omitted.

  The removal means 16 in the sheet sticking apparatus 1 in FIG. 3 is provided with arms 23 that can rotate around the swing shaft 26 on both sides in the width direction of the original fabric as members corresponding to the spacer take-up roller 17 in FIG. One rotating roller 24 is installed at the tip of each arm 23. The removing means rotates each roller 24 by a frictional force with the original fabric 1 while pressing the spacer sheets 7 on both sides in the original fabric width direction by the force of each spring 25. The following spacer sheet 7B (7) is peeled off by the adhesive force of the preceding spacer sheet 7A (7) that has already been wound and adhered to the outer peripheral surface of the sheet. Also in this structure, the spacer sheets 7 on both sides in the original fabric width direction are independently removed by the corresponding rotating rollers 24.

  As mentioned above, although embodiment of this invention was disclosed, this invention is not limited to this. For example, in the above-described embodiment, the protective sheet is exemplified as the adhesive sheet. However, instead of this, a heat-sensitive adhesive sheet such as a die bonding sheet can be attached. In this case, the holding table 21 and the press roller 22 may be heated with a heater or the like. Further, it may be a heat-sensitive adhesive protective sheet for protecting the surface of the adherend. Furthermore, the protective film forming sheet disclosed in JP-A No. 2002-280329 and a dry resist film can also be used.

  Further, although the wafer W is targeted as a plate-shaped member, other plate-shaped members such as glass, a steel plate, or a resin plate can be used instead, and the semiconductor wafer can be a silicon wafer or a compound. It may be a wafer. Further, the plate-like member is not limited to a circular shape, and may be a polygonal shape.

The perspective view of the sheet sticking apparatus which is 1st Embodiment of this invention. The side view of the sheet sticking apparatus of FIG. The perspective view of the sheet sticking apparatus which is 2nd Embodiment of this invention. The side view of the sheet sticking apparatus of FIG. FIG. 5 is an explanatory diagram of the original fabric, in which (a) is a plan view of the original fabric before being wound into a roll, and (b) is a cross-sectional view taken along line AA in (a). The perspective view of the conventional sheet sticking apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Sheet sticking apparatus 2 Original fabric 3 Holding means 4 Holding roller 5 Peeling material 6 Adhesive sheet 7 Spacer sheet 8 Driving means 11 Winding means 12 Peeling material winding roller 13 Peeling means 16 Removing means W Semiconductor wafer (adhering body)

Claims (4)

  1. A sheet on which the adhesive sheet is fed out from an original fabric having an adhesive sheet temporarily attached on a release material and cut into a predetermined shape, and a spacer sheet formed around the adhesive sheet, and the adhesive sheet is adhered to an adherend In the pasting device,
    Holding means for holding the original fabric;
    Peeling means for peeling the release material and the adhesive sheet;
    Driving means for applying a driving force for feeding to the original fabric;
    Winding means for winding the release material from which the sheet portion has been peeled;
    A removing means provided in a preceding stage of the peeling means, and removing the spacer sheet from the original fabric,
    The spacer sheet is provided continuously and independently on both sides of the width direction of the original material orthogonal to the feed direction of the original material, and the removing means removes the independent spacer sheets independently of each other. Sheet sticking device.
  2. A sheet on which the adhesive sheet is fed out from an original fabric having an adhesive sheet temporarily attached on a release material and cut into a predetermined shape, and a spacer sheet formed around the adhesive sheet, and the adhesive sheet is adhered to an adherend In the pasting device,
    Holding means for holding the original fabric;
    Peeling means for peeling the release material and the adhesive sheet;
    Driving means for applying a driving force for feeding to the original fabric;
    Winding means for winding the release material from which the sheet portion has been peeled;
    A removing means provided in a preceding stage of the peeling means, and removing the spacer sheet from the original fabric,
    The spacer sheet is intermittently and independently provided on both sides of the original width direction perpendicular to the feed direction of the original, and the removing means removes the independent spacer sheets independently. Sheet sticking device.
  3. A sheet for feeding out the adhesive sheet from an original fabric having an adhesive sheet temporarily attached onto a release material and cut into a predetermined shape and a spacer sheet formed around the adhesive sheet, and affixing the adhesive sheet to an adherend In the pasting method,
    The spacer sheet is provided continuously and independently on both sides of the width direction of the raw material perpendicular to the feeding direction of the raw material ,
    The sheet sticking method is:
    Hold the original fabric,
    A driving force for feeding is applied to the held original fabric,
    The sheet sticking method, wherein the independent spacer sheet is independently removed from the original fabric in advance before peeling the adhesive sheet from the original fabric fed out by applying the driving force .
  4. A sheet for feeding out the adhesive sheet from an original fabric having an adhesive sheet temporarily attached onto a release material and cut into a predetermined shape and a spacer sheet formed around the adhesive sheet, and affixing the adhesive sheet to an adherend In the pasting method,
    Said spacer sheet, the are intermittent and independently provided for anti widthwise sides original orthogonal to the feeding direction of the raw,
    The sheet sticking method is:
    Hold the original fabric,
    A driving force for feeding is applied to the held original fabric,
    The sheet sticking method, wherein the independent spacer sheet is independently removed from the original fabric in advance before peeling the adhesive sheet from the original fabric fed out by applying the driving force .
JP2005351539A 2005-12-06 2005-12-06 Sheet sticking device and sheet sticking method Active JP4616160B2 (en)

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Families Citing this family (17)

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JP4988453B2 (en) * 2007-06-28 2012-08-01 リンテック株式会社 Sheet sticking device and sticking method
JP5113600B2 (en) * 2008-04-08 2013-01-09 リンテック株式会社 Sheet sticking device and sticking method
JP5430087B2 (en) * 2008-06-26 2014-02-26 リンテック株式会社 Sheet sticking device and sticking method
JP5324399B2 (en) * 2009-11-10 2013-10-23 リンテック株式会社 Sheet sticking device and sticking method
JP5680870B2 (en) * 2010-04-09 2015-03-04 株式会社ディスコ Tape sticking device
JP2011238873A (en) * 2010-05-13 2011-11-24 Disco Abrasive Syst Ltd Movable device
JP5497534B2 (en) * 2010-05-21 2014-05-21 株式会社ディスコ Tape sticking device
WO2011150178A1 (en) * 2010-05-27 2011-12-01 Alion, Inc. Photovoltaic modules with improved electrical characteristics and methods thereof
US8574398B2 (en) 2010-05-27 2013-11-05 Suss Microtec Lithography, Gmbh Apparatus and method for detaping an adhesive layer from the surface of ultra thin wafers
JP2012084688A (en) * 2010-10-12 2012-04-26 Nitto Denko Corp Method of pasting double-sided adhesive tape, and device of pasting double-sided adhesive tape
JP5992670B2 (en) * 2011-08-10 2016-09-14 リンテック株式会社 Sheet sticking device and sticking method
JP2013235998A (en) * 2012-05-10 2013-11-21 Disco Abrasive Syst Ltd Protective member and protective tape sticking method
JP2013239518A (en) * 2012-05-14 2013-11-28 Disco Abrasive Syst Ltd Protective member and protective tape sticking method
TWI628080B (en) * 2013-05-31 2018-07-01 東京應化工業股份有限公司 Adhesion apparatus
JP6155097B2 (en) * 2013-05-31 2017-06-28 東京応化工業株式会社 Pasting device
JP6234161B2 (en) * 2013-10-24 2017-11-22 株式会社ディスコ Adhesive tape sticking device
JP6573802B2 (en) * 2015-08-21 2019-09-11 リンテック株式会社 Sheet sticking device and sheet sticking method

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JPS5036954Y2 (en) * 1971-07-29 1975-10-27
JPH06216242A (en) * 1993-01-12 1994-08-05 Lintec Corp Adhesion of adhesive tape to be attached to semiconductor wafer
JP2002284128A (en) * 2001-03-26 2002-10-03 Oki Electric Ind Co Ltd Label peel-off method, label peel-off equipment and label sheet
JP2004331869A (en) * 2003-05-09 2004-11-25 Lintec Corp Laminated sheet roll-up and method for manufacturing the same
JP2005136305A (en) * 2003-10-31 2005-05-26 Lintec Corp Table for sticking device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5036954Y2 (en) * 1971-07-29 1975-10-27
JPH06216242A (en) * 1993-01-12 1994-08-05 Lintec Corp Adhesion of adhesive tape to be attached to semiconductor wafer
JP2002284128A (en) * 2001-03-26 2002-10-03 Oki Electric Ind Co Ltd Label peel-off method, label peel-off equipment and label sheet
JP2004331869A (en) * 2003-05-09 2004-11-25 Lintec Corp Laminated sheet roll-up and method for manufacturing the same
JP2005136305A (en) * 2003-10-31 2005-05-26 Lintec Corp Table for sticking device

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