JP6243144B2 - Sheet sticking device and sticking method - Google Patents

Description

  The present invention relates to a sheet sticking apparatus and a sticking method.

2. Description of the Related Art Conventionally, in a semiconductor manufacturing process, a sheet sticking apparatus for sticking an adhesive sheet to a semiconductor wafer (adhered body) (hereinafter sometimes simply referred to as “wafer”) is known (for example, see Patent Document 1).
The sheet sticking device described in Patent Document 1 includes a turning arm that turns with respect to a peel plate (peeling means), and a detour means having a guide roller that is pivotally mounted on the tip of the turning arm, and the guide roller is peeled off. It is configured to move between a detour position where the peeling sheet of the original fabric is not suddenly folded back by the peeling means and a standby position located below the peeling means. Yes.

JP 2010-40874 A

  However, in the conventional sheet sticking apparatus as described in Patent Document 1, the folding angle of the release sheet is changed by turning the swivel arm. Therefore, the folding angle of the release sheet is changed during the adhesive sheet sticking operation. There is an inconvenience that cannot be done.

  It is an object of the present invention to provide a sheet sticking apparatus and a sticking method capable of changing the bending angle of a release sheet even during the adhesive sheet sticking operation, as well as during the adhesive sheet sticking action.

In order to achieve the above object, the sheet sticking apparatus of the present invention comprises a feeding means for feeding out an original fabric in which an adhesive sheet is temporarily attached to one surface of a strip-like release sheet, and peeling of the original fabric fed out by the feeding means. It has a peeling means for peeling the adhesive sheet from the release sheet by bending the sheet, and a pressing means for affixing to press the adhesive sheet peeled by the peeling means to an adherend, the peeling means, is fixed in position, by changing the raw path toward the peeling means, and the bending angle capable of changing the angle changing hands stage of the release sheet in the separating means, the configuration of Adopted.

  Further, in the sheet sticking device of the present invention, the feeding means feeds the wound raw material, the pressing means is a pressing roller, and the angle changing means is in contact with the pressing roller by the contact with the pressing roller. It is preferable to warp the adhesive sheet in a direction to eliminate bending wrinkles due to the winding of the original fabric.

On the other hand, the sheet sticking method of the present invention includes a step of feeding an original fabric in which an adhesive sheet is temporarily attached to one surface of a strip-like release sheet, and the release by folding the delivered original release sheet with a release means. A step of peeling the adhesive sheet from the sheet, and a step of pressing the adhesive sheet peeled off by the peeling means against an adherend, and fixing the peeling means at a predetermined position, A configuration is adopted in which a step of changing the folding angle of the release sheet at the peeling means is provided by changing the path of the original fabric toward the peeling means .

  According to the present invention as described above, since the bending angle of the release sheet can be changed by changing the path of the original fabric toward the release means, the adhesive sheet is applied not only during the application operation of the adhesive sheet. Even inside, the folding angle of the release sheet can be changed.

  In addition, if the adhesive sheet is bent in the direction to eliminate the bending wrinkles by contact with the pressing roller, the adhesive sheet with the bent wrinkles is affixed to the adherend, for example, is extremely thinly ground. It is possible to prevent the adherend such as a wafer from warping due to bending of the adhesive sheet.

The side view of the sheet sticking apparatus which concerns on one Embodiment of this invention. (A)-(C) are operation | movement explanatory drawings when an adhesive sheet is not peeled.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
In this embodiment, for example, when directions such as up, down, left, right, front, back, etc. are shown, all of FIG. The direction from the appropriate direction) is the reference, and the top, bottom, left, and right directions are parallel to the page, the front is the front direction perpendicular to the page, and the back is the back direction perpendicular to the page. And

  In FIG. 1, a sheet sticking device 1 is a device for sticking an adhesive sheet AS provided with an adhesive AD layer on one surface of a base sheet BS to a wafer WF as an adherend, and is a strip-shaped release sheet From the release sheet RL, the feeding means 2 for feeding the original fabric RS with the adhesive AD layer of the adhesive sheet AS temporarily attached to one surface of the RL, and the release sheet RL of the original fabric RS fed by the feeding means 2 are folded. A peeling plate 3 as a peeling means for peeling the adhesive sheet AS, a pressing roller 4 as a pressing means for pressing and sticking the adhesive sheet AS peeled by the peeling plate 3 to the wafer WF, and a raw material heading to the peeling plate 3 By changing the RS path, the angle changing means 5 that can change the bending angle of the release sheet RL on the release plate 3, the detection means 6 that can detect the adhesive sheet AS, and the wafer WF are supported. And a supporting means 7 for relatively moving the said wafer WF and the pressing roller 4.

  The feeding means 2 is driven by a rotation motor 21 as a drive device, and is driven by a support roller 22 that supports the original fabric RS, a guide roller 23 that guides the original fabric RS, and a rotation motor 24 as a drive device. A pinch roller 26 that sandwiches the release sheet RL between the drive roller 25 and a collection roller 28 that is driven by a rotation motor 27 as a drive device and collects the release sheet RL, and is entirely supported by a frame 29. ing.

  The angle changing means 5 includes an adjusting roller 53 supported by a slider 52 of a linear motor 51 as a driving device. In addition, the angle changing means 5 is configured to be able to form the peeling sheet of the adhesive sheet AS in cooperation with the feeding means 2.

  The detection unit 6 includes a first detection unit 61 configured by an optical sensor, an imaging device, or the like that can detect the tip portion AST of the adhesive sheet AS, and a length in the feeding direction of the adhesive sheet AS from the first detection unit 61. The second detection means 62 is provided with a function equivalent to that of the first detection means 61 that is arranged at a slightly short interval and can detect the rear end portion ASB of the adhesive sheet AS. In addition, the 2nd detection means 62 is arrange | positioned inside the peeling plate 3, and is provided so that the inside of the peeling plate 3 can be moved according to the length of the feeding direction of adhesive sheet AS.

  The support means 7 includes a table 72 having a support surface 71 capable of attracting and holding the wafer WF by suction means such as a decompression pump and a vacuum ejector (not shown), and a linear motor 74 as a drive device for supporting the table 72 with a slider 73. I have.

In the sheet sticking apparatus 1 described above, a procedure for sticking the adhesive sheet AS to the wafer WF will be described.
First, after the operator sets the original fabric RS so that the first path CS1 indicated by the solid line in FIG. 1 is set, when an operation start signal is input via an operation panel (not shown), the feeding means 2 is turned into a rotation motor. 21, 24, 27 are driven, the original fabric RS is fed in the feeding direction LA, and when the rear end portion ASB of the adhesive sheet AS is detected by the second detection means 62, the rotation motors 21, 24, 27 are driven. Stop. At this time, the bending angle of the release sheet RL is the angle θ1, and the adhesive sheet AS is peeled off by a predetermined length by the release plate 3 to form a peeling stake, and the leading end portion AST is the first detecting means 61. Detected by.

  Here, when the first detection unit 61 does not detect the front end portion AST when the second detection unit 62 detects the rear end portion ASB, the adhesive sheet AS is as shown in FIG. It can be judged that it was folded together with the release sheet RL, and no release hook was formed. In this case, the angle changing unit 5 cooperates with the feeding unit 2 to perform a peeling slash forming operation for forming a peeling slash of the adhesive sheet AS. That is, the angle changing means 5 drives the linear motor 51 from the state of FIG. 2A to move the adjustment roller 53 in the right direction, and the feeding means 2 drives the rotation motors 24 and 27 to drive the driving roller 25. Rotate clockwise. As a result, the original fabric RS moves in the return direction LB as shown in FIG. 5B, and the leading end AST is positioned closer to the adjustment roller 53 than the peeling edge 31 of the peeling plate 3. Next, the angle changing means 5 drives the linear motor 51 to move the adjustment roller 53 in the left direction, and the feeding means 2 drives the rotating motors 24 and 27 to rotate the driving roller 25 in the counterclockwise direction. . As a result, the raw fabric RS moves in the feeding direction LA, and the chance of bending the release sheet RL portion temporarily attached to the tip portion AST increases, so that a peeling hook is easily formed, as shown in FIG. Furthermore, when the rear end portion ASB is detected by the second detection means 62 and the driving of the linear motor 51 and the rotation motors 24 and 27 is stopped, the front end portion AST is detected by the first detection means 61.

  This peeling staking formation operation may be performed any number of times until the tip end AST is detected by the first detection unit 61, or when the tip end AST is not detected by the first detection unit 61 even after a predetermined number of times. The operator may be informed by sounding a warning sound or turning on a light. Further, when performing the peeling staking formation operation, at least one of the movement (rotation) speed, the movement (rotation) acceleration, and the movement (rotation) amount of the linear motor 51 and the rotation motors 24 and 27 is increased or decreased. By doing so, you may perform the tension fluctuation | variation operation | movement which enlarges the tension | tensile_strength provided to peeling sheet RL. By performing the tension fluctuation operation in this way, it becomes easy to form a peeling notch. Note that the magnitude of the tension applied to the release sheet RL by the tension fluctuation operation can be gradually increased every time the peeling slash forming operation is performed, and when the magnitude of the tension reaches a predetermined value, Similarly, the operator may be notified by a warning sound, a light, or the like.

  When the transfer means (not shown) places the wafer WF on the support surface 71 of the table 72, the support means 7 drives the suction means (not shown) to suck and hold the wafer WF, and then drives the linear motor 74 to drive the table. 72 is conveyed in the left direction. When it is detected by a sensor (not shown) that the table 72 has reached a predetermined position, the feeding means 2 drives the rotation motors 21, 24, 27 to synchronize with the conveyance of the table 72, and the original fabric RS is removed. The tip AST is pressed against the wafer WF with the pressing roller 4 and pasted.

  Next, as shown in FIG. 1, the angle changing means 5 drives the linear motor 51 to move the adjustment roller 53 to the position indicated by the two-dot chain line on the right side of the figure, and the feeding means 2 drives the rotating motor 21. And rewind the original fabric RS. Thereby, the route of the original fabric RS is changed to the second route CS2, and the folding angle of the release sheet RL becomes an angle θ2 larger than the angle θ1. In addition, when changing the path | route of original fabric RS to 2nd path | route CS2, the movement of the table 72 may be stopped and does not need to be stopped. As described above, by bending the release sheet RL at an angle θ2 other than the peeling slash forming operation, it is possible to suppress poor pasting due to the release sheet RL being rubbed and cut off by the release edge of the release plate 3. Thereafter, the wafer WF to which the adhesive sheet AS is attached is transferred to the next process by a transfer means (not shown), the table 72 is returned to the position shown in FIG. 1, and thereafter the same operation as described above is repeated.

  According to the embodiment as described above, since the folding angle of the release sheet RL can be changed by changing the path of the raw fabric RS toward the release plate 3, the adhesive sheet AS is of course bonded except during the adhesive sheet AS operation. Even during the sticking operation of the sheet AS, the bending angle of the release sheet RL can be changed.

  As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. In addition, the description of the shape, material, and the like disclosed above is exemplary for ease of understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of one part or all of such restrictions is included in this invention.

  For example, instead of the angle changing means 5, an angle changing means 5A as shown by a two-dot chain line in FIG. This angle changing means 5A is supported by a slider 52A of a linear motor 51A as a drive device that extends the stroke to the left of the linear motor 51 of the above embodiment, and a pair of adjustment rollers 53A that pass the original fabric RS therebetween. Provided and configured to be capable of forming a peeling stake of the adhesive sheet AS in cooperation with the feeding means 2. In addition, when the feeding means 2 is configured to feed out the original fabric RS, the angle changing means 5A is bonded to the pressure roller 4 so as to eliminate the bending wrinkles due to the winding of the original fabric RS. Is designed to warp. That is, as indicated by reference numeral AA in FIG. 1, when the adhesive sheet AS is bent with the adhesive AD layer inside, the angle changing means 5A drives the linear motor 51A, and the left two in FIG. As indicated by the dotted line, the pair of adjusting rollers 53A is moved to the left, and the adhesive sheet AS is warped with the adhesive sheet AS warped with the base sheet BS inward as indicated by reference numeral AB in FIG. Is pressed and stuck to the wafer WF. At this time, the bending angle of the release sheet RL is the angle θ3. As a result, it is possible to prevent the wafer WF, which has been ground extremely thin, from being warped by the bending of the adhesive sheet AS. The angle θ3 can be changed depending on the degree (degree) of bending of the adhesive sheet AS. In addition, since the degree of the bending wrinkles of the adhesive sheet AS is different between the outer side and the inner side of the wound raw fabric RS, the angle θ3 may be changed according to the change in the degree of the bending wrinkles. . In this case, it is preferable to provide a bent wrinkle detecting means composed of an optical sensor, an imaging device or the like that can detect the degree of bent wrinkles of the adhesive sheet AS. Further, when the adhesive sheet AS is bent with the base sheet BS inward, the angle changing means 5A drives the linear motor 51A and moves the pair of adjustment rollers 53A to the right, for example, FIG. B), once the adhesive sheet AS is warped with the adhesive AD layer inside, using the rear end portion 32 of the release plate 3, the adhesive sheet AS is pressed against the wafer WF. It can also be affixed. In this case, a round bar, a roller, or the like may be employed instead of the rear end portion 32 of the peeling plate 3.

  Further, the adhesive sheet AS may be attached to the wafer WF while fixing or changing the bending angle of the release sheet RL to an angle θ1, θ2, θ3, or any angle between θ1 and θ3, For example, after the peeling sheet RL is formed with the folding angle of the release sheet RL set to the angle θ2, the folding angle is fixed or changed to any angle between the angles θ1, θ3, and θ1 to θ3. However, the adhesive sheet AS may be attached to the wafer WF. The angle θ1 may be 0 ° or more, and the angle θ3 may be 180 ° or less or 180 ° or more as long as the operation of attaching the adhesive sheet AS to the wafer WF is not hindered. The angle θ1 may be greater than or equal to the angle θ3.

Furthermore, instead of driving the linear motor 51 in the peeling slash forming operation, the rotation motor 21 may be driven.
Further, when the peeling staking formation operation is not performed, the detection means 6 can be omitted.
Furthermore, you may comprise a peeling means with a round bar, a roller, etc.
The pressing means may be a pressing member made of blade material, rubber, resin, sponge, or the like, and may be configured to be pressed by air blasting.
Further, the support means 7 may stop the wafer WF and move the feeding means 2, the pressing roller 4 and the angle changing means 5, or move the wafer WF and move the feeding means 2, the pressing roller 4 and The angle changing means 5 may be moved in the direction opposite to the movement of the wafer WF.

  Further, the material, type, shape and the like of the adhesive sheet AS and the adherend in the present invention are not particularly limited. For example, the adhesive sheet AS is not limited to adhesive forms such as pressure-sensitive adhesiveness and heat-sensitive adhesiveness. When a heat-sensitive adhesive is used, an appropriate heating means for heating the adhesive sheet AS. May be provided. Such an adhesive sheet AS is, for example, a single layer having only an adhesive layer, an intermediate layer between the base sheet and the adhesive layer, a cover layer on the upper surface of the base sheet, etc. Three or more layers, or a so-called double-sided adhesive sheet that can peel the base sheet from the adhesive layer may be used. The double-sided adhesive sheet comprises a single-layer or multi-layer intermediate layer. It may be a single layer or a multilayer having no intermediate layer. Examples of the adherend include, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit board, information recording substrates such as optical disks, glass plates, steel plates, ceramics, wood plates or resin plates, Arbitrary forms of members and articles can also be targeted. In addition, the adhesive sheet AS is replaced with a functional and intended reading, for example, any information label, decorative label, protective sheet, dicing tape, die attach film, die bonding tape, recording layer forming resin sheet, etc. Arbitrary sheets, films, tapes and the like can be attached to any adherend as described above.

The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described with respect to those means and steps. The process is not limited at all. For example, as long as the feeding means feeds the original fabric with the adhesive sheet temporarily attached to one side of the strip-shaped release sheet, it is in the technical scope in light of the technical common sense at the time of filing. There is no limitation (the description of other means and steps is omitted).
Further, the drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single axis robot, an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

DESCRIPTION OF SYMBOLS 1 ... Sheet sticking apparatus 2 ... Feeding means 3 ... Release plate (peeling means)
4 ... Pressing roller (pressing means)
5, 5A ... Angle changing means AS ... Adhesive sheet RL ... Release sheet RS ... Original fabric WF ... Wafer (Substrate)

Claims (3)

A feeding means for feeding out the original fabric in which the adhesive sheet is temporarily attached to one surface of the strip-shaped release sheet;
A peeling means for peeling the adhesive sheet from the release sheet by bending the original release sheet fed by the feeding means;
And a pressing means for affixing to press the adhesive sheet peeled by the peeling means to an adherend,
The peeling means is fixed at a predetermined position,
Wherein toward the separating means by changing the raw path, the sheet attachment device, characterized in that it comprises the bending angle capable of changing the angle changing hands stage of the release sheet in the stripping means. The unwinding means unwinds the wound raw material,
The pressing means is a pressing roller,
2. The sheet sticking apparatus according to claim 1, wherein the angle changing unit warps the adhesive sheet in a direction in which a bending wrinkle due to the winding of the original fabric is eliminated by contact with the pressing roller. A step of feeding out the raw material in which the adhesive sheet is temporarily attached to one surface of the strip-shaped release sheet;
A step of peeling the adhesive sheet from the release sheet by folding the unfolded release sheet of the raw fabric with a release means ;
A step of pressing and adhering the adhesive sheet peeled off by the peeling means to the adherend ,
The step of fixing the peeling means at a predetermined position, and changing the folding path of the release sheet at the peeling means by changing the path of the original fabric toward the peeling means, Characteristic sheet sticking method.

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