JP5943573B2 - Sheet manufacturing apparatus and manufacturing method - Google Patents

Description

The present invention relates to a sheet manufacturing device and a manufacturing method and, more particularly, to Resid over preparative manufacturing apparatus and manufacturing method can be a belt-like sheet by forming a notch to form an adhesive sheet.

  Conventionally, a sheet sticking apparatus for sticking an adhesive sheet to an adherend such as a semiconductor wafer (hereinafter sometimes simply referred to as “wafer”) has been widely used. As such a sheet sticking apparatus, for example, It is disclosed in Patent Document 1. The sheet sticking device of Patent Document 1 includes a feeding unit that feeds an original fabric in which a belt-like sheet is temporarily attached to a release sheet, a cutting blade that forms a closed-loop cut in the course of feeding the original fabric, A peel plate for peeling the adhesive sheet formed on the inside from the release sheet, and a press roller capable of pressing the peeled adhesive sheet against the wafer and the ring frame for pasting. In such a sheet affixing device, after the notch formation, and before the adhesive sheet is peeled from the release sheet, a winding means for peeling off the unnecessary sheet formed outside the notch from the release sheet and winding it up. What you have is known. According to such an apparatus, the adhesive sheet can be peeled off and pasted by unwinding the original fabric in which only the adhesive sheet is temporarily attached to the release sheet to the peel plate through the winding means.

JP-A-2005-116929

  By the way, recently, there is a tendency that the diameter of the wafer is increased, and the diameter of the adhesive sheet is increased accordingly. Accordingly, as shown in FIG. 2, the adhesive sheet AS has a vertical tip end with respect to a certain interval along the feeding direction of the adhesive sheet AS at the leading end portion in the feeding direction (hereinafter referred to as “tip vertical gap Sx”). The ratio of the distance (hereinafter referred to as “tip lateral distance Sy”) along the direction orthogonal to the feeding direction of the adhesive sheet AS at the position advanced by the distance Sx increases (hereinafter referred to as “tip vertical / horizontal ratio Sxy”). If you look at it, the bag will be in a straight line. When the leading end aspect ratio Sxy is increased, when the unnecessary sheet at the leading end in the feeding direction of the adhesive sheet AS is separated from the adhesive sheet AS by the winding means, the separation is performed at once in a wide range. In such a case, the cutting formed by the cutting means is insufficient, for example, the adhesive sheet AS and the unnecessary sheet are not completely separated, or the adhesive between the adhesive sheet AS and the unnecessary sheet is reattached. In some cases, the force required to separate the adhesive sheet AS and the unnecessary sheet may exceed the force required to separate the adhesive sheet AS and the release sheet, and the adhesive sheet AS may be wound together with the unnecessary sheet. There arises a disadvantage that the adhesive sheet AS cannot be pasted by being taken up by the take-up means. This inconvenience also occurs when the adhesive sheet is formed in a square or the like and the front end in the feeding direction is formed in a straight line and becomes longer in the width direction of the original fabric.

[Object of invention]
An object of the present invention is, regardless of the shape of the adhesive sheet, the release of unnecessary sheet, thus, is to provide a Cie over preparative manufacturing apparatus and manufacturing method can be performed well sticking the adhesive sheet.

In order to achieve the above object, the present invention provides a sheet manufacturing apparatus according to the present invention, wherein a belt-like sheet having an adhesive layer on one surface of a belt-like base material sheet is temporarily attached to a belt-like release sheet via the adhesive layer. A feeding means for feeding the worn fabric;
A cutting means for forming a cut in a predetermined shape in the belt-like sheet to form an adhesive sheet inside the cut, and forming an unnecessary sheet outside the cut,
An unnecessary sheet winding means for peeling the unnecessary sheet from the release sheet at a predetermined peeling position and winding the unnecessary sheet,
The unnecessary sheet winding means holds the leading end of the adhesive sheet in the feeding direction upstream of the position where the looseness of the unnecessary sheet is detected by the detecting means, and holds the leading end of the adhesive sheet in the feeding sheet side by the pressing means. from attached state, the position of removing the unnecessary sheet from the release sheet, to move the feeding direction upstream side of the raw sheet than the position of the feeding direction front end portion of the adhesive sheet was pressed by the pressing means Therefore, at least the leading end portion in the feeding direction of the adhesive sheet and the unnecessary sheet are separated from each other.
In addition, the present invention provides a feeding means for feeding out the original fabric temporarily attached to the strip-shaped release sheet by the strip-shaped sheet having the adhesive layer on one surface of the strip-shaped base sheet;
A cutting means for forming a cut in a predetermined shape in the belt-like sheet to form an adhesive sheet inside the cut, and forming an unnecessary sheet outside the cut,
A sheet manufacturing apparatus including an unnecessary sheet winding means for winding the unnecessary sheet,
The unnecessary sheet winding means includes a pressing means capable of pressing the adhesive sheet against the release sheet side, and at least by applying tension to the unnecessary sheet in a state where the adhesive sheet is pressed by the pressing means. Provided in such a manner that the leading end of the adhesive sheet in the feeding direction and the unnecessary sheet can be separated,
The pressing means has a configuration in which it has a preliminary peeling means that holds the leading end portion in the feeding direction of the adhesive sheet and can peel the leading end portion in the feeding direction of the adhesive sheet from the peeling sheet.

Furthermore, the sheet manufacturing method of the present invention is a feeding step in which a belt-like sheet having an adhesive layer on one side of a belt-like base material sheet is fed out from the original fabric temporarily attached to the belt-like release sheet via the adhesive layer. When,
A cutting step of forming an incision of a predetermined shape in the belt-like sheet to form an adhesive sheet inside the notch, and forming an unnecessary sheet outside the notch,
An unnecessary sheet winding step of peeling the unnecessary sheet from the release sheet and winding the unnecessary sheet at a predetermined peeling position,
The unnecessary sheet winding process, the in feeding direction upstream side of the raw sheet from the position loosening is detected unnecessary sheet by the detection means, pressing the feeding direction front end portion of the adhesive sheet in the release sheet side by pressing means from attached state, the position of removing the unnecessary sheet from the release sheet, to move the feeding direction upstream side of the raw sheet than the position of the feeding direction front end portion of the adhesive sheet was pressed by the pressing means Thus, the method of separating at least the leading end portion in the feeding direction of the adhesive sheet and the unnecessary sheet is employed.

According to the present invention, since at least the leading end of the adhesive sheet in the feeding direction and the unnecessary sheet are separated while pressing the adhesive sheet, only the unnecessary sheet can be reliably peeled from the release sheet. This ensures that the adhesive sheet is wound together with the unnecessary sheet even when the cutting formed by the cutting means is insufficient or the adhesive between the adhesive sheet and the unnecessary sheet is re-adhered to each other. Thus, it is possible to eliminate the inconvenience that the adhesive sheet cannot be pasted as in the prior art.
In addition, according to the said sheet manufacturing apparatus and manufacturing method, it can prevent that an adhesive sheet is wound up with an unnecessary sheet | seat, and the raw material by which the adhesive sheet is not temporarily attached is produced partially. When the original fabric is employed in an adhesive sheet sticking apparatus such as Patent Document 1 having no cutting blade, it is possible to eliminate the inconvenience that the adhesive sheet cannot be stuck.

  Further, when the holding member and the receiving member have moving means capable of moving in the feeding direction of the original fabric, the original fabric can be fed out while the original fabric is sandwiched between the pressing member and the receiving member. The adhesive sheet and the unnecessary sheet can be separated without being stopped, and it is possible to prevent the processing capacity from being lowered. In addition, the pressing member and the receiving member can be moved in accordance with the original sheet-specific adhesive sheet interval, so that versatility with respect to the original fabric can be satisfactorily exhibited.

  Also, if you have a pre-peeling means that holds the tip of the adhesive sheet in the feeding direction and can be peeled off from the release sheet, the tip of the adhesive sheet in the feeding direction is temporarily peeled off before peeling the adhesive sheet with the peeling means. can do. As a result, when the release sheet is folded by the peeling means, the adhesive sheet is also folded in the same manner, and it is possible to prevent the adhesive sheet from being peeled off from the release sheet, and this also makes it impossible to attach the adhesive sheet. Can be avoided.

The schematic front view of the sheet sticking apparatus which concerns on embodiment. The schematic perspective view of an unnecessary sheet winding means. The schematic perspective view of a pressing member.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
In this specification, “left”, “right”, “upper”, and “lower” are used with reference to FIG. 1 unless otherwise specified.

  1 and 2, a sheet sticking apparatus 10 includes a table 11 that sucks and supports a wafer WF and a ring frame RF as adherends, and a linear motion motor 12 as a drive device that can move the table 11 in the left-right direction. A stripping sheet RL and a strip-shaped sheet WS temporarily attached to one surface of the strip-shaped sheet WS. The cut sheet CU is formed in the belt-like sheet WS, the adhesive sheet AS is formed inside the cut CU, and the unnecessary sheet US is formed outside the cut CU, and the unnecessary sheet US is wound up. The unnecessary unnecessary sheet winding means 16, the peeling plate 18 as a peeling means for folding the peeling sheet RL and peeling the adhesive sheet AS from the peeling sheet RL, and this peeling It is constituted by a pressing roller 19 of the peeled adhesive sheet AS as a pressing means for affixing is pressed against the ring frame RF and the wafer WF in 18. The belt-like sheet WS includes a base sheet BS and an adhesive layer AD laminated on one surface of the base sheet BS, and is temporarily attached to the release sheet RL via the adhesive layer AD. A protective sheet PS is stuck on the lower surface of the wafer WF.

  The feeding means 14 includes a support shaft 25 that supports the original fabric RS, and a first drive roller 27 and a first pinch roller 28 that sandwich the original fabric RS that is fed from the support shaft 25 and passes through the cutting means 15. The second drive roller 31 and the second pinch roller 32 that sandwich the release sheet RL after passing through the release plate 18, and the winding shaft that winds the release sheet RL after passing through the release sheet RL with a predetermined torque by a drive device (not shown). 34. The drive rollers 27 and 31 are rotatably provided via rotation motors DM1 and DM2 as drive devices.

  The cutting means 15 is disposed on the side of the strip-shaped sheet WS of the unstretched fabric RS that is rotatable, and is disposed on the release sheet RL side of the unfolded fabric RS. A platen roller 37 that is rotatably provided, a rotation motor DM3 as a driving device for rotating the die cut roller 36, and a distance adjusting means for adjusting a relative distance between the die cut roller 36 and the platen roller 37, not shown. And a drive device such as a linear motor.

  The die cut roller 36 includes a closed-loop cutting blade 40 protruding from the outer peripheral surface, and can form a substantially circular cut CU that is larger than the inner diameter dimension of the ring frame RF and smaller than the outer dimension on the belt-like sheet WS. Is provided. The adhesive sheet AS formed by the cutting blade 40 is first peeled off from the release sheet RL by the release plate 18 at the leading end region of the belt-like sheet WS (the direction in which the original fabric RS is directed from the support shaft 25 toward the take-up shaft 34). This is an initial peeling region Sa (see FIG. 2) as a leading end portion in the feeding direction of the adhesive sheet.

  Here, the cutting means 15 is provided with energy applying means (not shown), and the cutting CU can be formed while applying energy to the raw fabric RS by the energy applying means. Examples of the energy applying means include a coil heater built in at least one of the die-cut roller 36 and the platen roller 37, and a blower that blows hot air from a position away from the rollers 36 and 37 to the formation position of the cut CU. An irradiation device that irradiates energy rays such as a vessel, ultraviolet rays, infrared rays, and microwaves.

  The unnecessary sheet winding means 16 is located on the belt-like sheet WS side after the cut CU is formed by the cutting means 15, and the pressing means 42 capable of pressing the adhesive sheet AS to the release sheet RL side. The third driving roller 43 and the third pinch roller 44 that sandwich the unnecessary sheet US after passing through the means 42, and winding that winds the unnecessary sheet US after passing through these at a predetermined torque by the rotation motor DM4 as a driving device. And a shaft 46. The third drive roller 43 is rotatably provided via a rotation motor DM5 as tension adjusting means serving as a drive device. The rotation motor DM5 is provided so as to be capable of rotating in the forward and reverse directions and capable of adjusting the torque. By this adjustment, the rotation motor DM5 is provided so that tension can be applied to the unnecessary sheet US between the presser means 42 and the third drive roller 43. Yes.

  As shown in FIG. 3, the pressing means 42 is provided in the same shape as the planar shape of the initial peeling area Sa of the adhesive sheet AS in a plan view, and has a convex shape that is gradually pointed toward the lower end in a front view. The pressing member 50 including the portion 50A and the shoulder portion 50B that supports the convex portion 50A, and the lower end side of the convex portion 50A and disposed on the release sheet RL side, and the raw fabric RS can be sandwiched between the convex portion 50A. A receiving member 51 made of a roller, a distance adjusting means 53 consisting of a linear motion motor as a driving device that supports the pressing member 50 so as to be movable in the left-right direction, and a support frame 54 for supporting the distance adjusting means 53 and the receiving member 51. Further, the support frame 54 can be reciprocated along the feed direction of the original fabric RS, that is, the moving means 55 including a linear motion motor as a drive device that can move in the vertical direction is unnecessary. And a detection means 56 of the image pickup means and the optical sensor or the like capable of detecting the sag of over preparative US. The pressing member 50 is provided so that the unnecessary sheet US can be folded at the lower end of the shoulder portion 50B while pressing the adhesive sheet AS with the convex portion 50A. The pressing member 50 and the receiving member 51 are provided so as to be able to be separated and approached by operating the distance adjusting means 53, and the distance between them can be adjusted according to the thickness of the original fabric RS. A surface on the lower right surface side of the convex portion 50A is an adsorption surface that can adsorb the surface of the base sheet BS. As a result, as shown in FIG. 1B, the holding member 50 is moved to the left by operating the interval adjusting means 53 while the holding member 50 sucks and holds the initial peeling area Sa of the adhesive sheet AS. Thus, the initial peeling region Sa can be temporarily peeled from the peeling sheet RL. The pressing member 50 and the interval adjusting means 53 constitute a preliminary peeling means.

  Next, a method for applying the adhesive sheet AS in the present embodiment will be described.

  First, the raw fabric RS supported by the support shaft 25 is moved between the first drive roller 27 and the first pinch roller 28, between the die cut roller 36 and the platen roller 37, and between the pressing member 50 and the receiving member 51. Pass between. Then, the strip sheet WS is peeled from the release sheet RL, and the lead end of the strip sheet WS is fixed to the winding shaft 46. Further, the release sheet RL is folded at the tip of the release plate 18 to pass between the second drive roller 31 and the second pinch roller 32, and its lead end is fixed to the winding shaft 34. Further, the thickness of the raw fabric RS is input to a control means such as a computer or a sequencer (not shown). The presser member 50 is controlled to be separated from the receiving member 51 with an interval of 1 mm further than the thickness of the original fabric RS based on the thickness of the original fabric RS input to the control means. In the present embodiment, as shown in FIG. 1, the center of the area where the cutting blade 40 is not formed in the rotation direction of the die cut roller 36 is set as the start position St of the die cut roller 36, and the start position St is set to the platen roller 37. The rotation of the die cut roller 36 is stopped in the state of approaching again.

  Then, when the original fabric RS is fed out by interlocking the rotation motors DM1 to DM5, the cutting blade 40 forms a cut CU from the base sheet BS side to the release sheet RL side, and the strip sheet WS is cut. It is divided into an adhesive sheet AS inside the CU and an unnecessary sheet US outside the cut CU. Next, the lower end of the initial peeling region Sa in the adhesive sheet AS formed by the cutting blade 40 coincides with the lower end of the convex portion 50A of the pressing member 50 indicated by the two-dot chain line in FIG. When detected by a detection means such as an imaging means or an optical sensor (not shown), the moving means 55 moves the presser member 50 in the feed direction at the same speed as the original feed speed, while the interval adjusting means 53 moves the presser member 50. It moves to the receiving member 51 side, and the initial peeling area Sa is sandwiched between the pressing member 50 and the receiving member 51. The unnecessary sheet US peeled from the release sheet RL is formed by the unnecessary sheet winding means 16 while a predetermined slack is formed by detection by the detection means 56, as indicated by a two-dot chain line in FIG. It is designed to be wound up.

  When the detection means (not shown) detects that the presser member 50 has reached a predetermined position, the torque of the rotation motor DM5 is adjusted to apply tension to the loosened unnecessary sheet US, and FIG. A) As shown by a solid line, the adhesive sheet AS and the unnecessary sheet US are forcibly separated. The unnecessary sheet US peeled from the release sheet RL is taken up by the take-up shaft 46 that rotates in synchronization with the third drive roller 43 via the third drive roller 43. As a result, the adhesive sheet AS does not rise together with the unnecessary sheet US in the direction of the winding shaft 46.

  Thereafter, the initial peeling region Sa is sucked by the suction surface on the lower end side of the convex portion 50A, and the distance adjusting means 53 is operated to move the presser member 50 away from the receiving member 51 as shown in FIG. After moving and forcibly separating the initial peeling area Sa of the adhesive sheet AS held by the holding member 50 from the peeling sheet RL, the holding of the holding member 50 is stopped. Thereby, even if the adhesive layer AD reaches the inside where the release treatment of the release sheet RL has not been performed, it can be cut off, and the adhesive sheet AS is peeled off without being peeled off by the release plate 18. It is possible to prevent the sheet RL from being fed out in the direction of the winding shaft 34. The holding member 50 is returned to the initial position indicated by the two-dot chain line in FIG.

  Next, when the adhesive sheet AS of the original fabric RS after passing through the pressing means 42 is peeled off by a predetermined amount from the front end of the release plate 18, the front end of the adhesive sheet AS is detected by a sensor (not shown) and stopped, and is in a standby state. It becomes. In the standby state, as shown in FIG. 1, the die cut roller 36 has the start position St opposed to the platen roller 37, and the die cut roller 36 and The position of the platen roller 37 can be displaced in the vertical direction. According to this, the intervals between the adhesive sheets AS can be arbitrarily adjusted, and the positions thereof can be changed in the vertical direction according to the length in the feeding direction of the adhesive sheet AS. Thereafter, the ring complaint RF and the wafer WF are placed on the table 11 via a transfer means (not shown) and are sucked and held. Next, the table 11 is conveyed below the peeling plate 18 from the right side to the left side via the linear motor 12. When the table 11 is detected at a predetermined position by a sensor (not shown), the first and second drive rollers 27 and 31 are rotated in synchronism with the conveyance of the table 11 to feed out the original fabric RS, and the leading edge of the peeling plate 18 The adhesive sheet AS is peeled off. Then, the peeled adhesive sheet AS receives a pressing force by the pressing roller 19 and is attached to each upper surface of the ring claim RF and the wafer WF, and the wafer WF and the ring claim RF are integrated through the adhesive sheet AS.

Therefore, according to such an embodiment, the adhesive sheet AS and the unnecessary sheet US can be separated by increasing the tension of the unnecessary sheet US while pressing the adhesive sheet AS with the pressing means 42. Thereby, regardless of the shape and size of the adhesive sheet AS, such as the curvature of the outer edge of the adhesive sheet AS, the certainty of separation is improved and the adhesive sheet AS is prevented from co-raising along with the unnecessary sheet US in the direction of the take-up shaft 51. Can do.
In addition, since the initial peeling area Sa of the adhesive sheet AS is temporarily peeled before peeling with the peeling plate 18, it is possible to reliably remove the peeling failure of the adhesive sheet AS from the peeling sheet and the sticking failure to the adherend. Can be prevented. As a result, even when the diameter of the adhesive sheet AS is increased, the adhesive sheet AS can be favorably peeled off and pasted.

As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this.
In other words, the present invention has been illustrated and described mainly with respect to specific embodiments, but without departing from the scope of the technical idea and object of the present invention, the shape, position, or With respect to the arrangement and the like, those skilled in the art can make various changes as necessary.
Therefore, the description limited to the shape disclosed above is an example for easy understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded one part or all part is included in this invention.

For example, the presser member 50 may be configured by using a rod-like or shaft-like member or a roller as long as it can function in the same manner as in the above embodiment.
Further, the entire adhesive sheet AS may be separated from the unnecessary sheet US in a state where the adhesive sheet AS is pressed by the pressing member 50. At this time, it is preferable that the pressing member 50 has a shape capable of pressing the entire adhesive sheet AS or substantially the entire pressing sheet RL to the release sheet RL side.

  Further, the moving means 55 is omitted, and the tension of the loosened unnecessary sheet US is increased after the feeding of the raw material RS is stopped when the initial peeling area Sa of the adhesive sheet AS reaches the lower end side of the pressing member 50. It may be made to separate from adhesive sheet AS. However, if the moving means 55 is used as in the above embodiment, it is possible to perform the separation while maintaining the relative position between the pressing member 50 and the adhesive sheet AS without stopping the feeding of the raw material RS, It is possible to prevent the processing capacity from being lowered.

  Furthermore, you may comprise a sheet manufacturing apparatus by abbreviate | omitting the peeling plate 18 and the press roller 19 of the said sheet sticking apparatus 10. FIG. According to the apparatus, after the adhesive sheet AS is formed by the cutting means 15 as in the above-described embodiment, the original fabric RS on which the adhesive sheet AS is temporarily attached to the release sheet RL is wound around the winding shaft 34. The raw fabric RS wound on the winding shaft 34 can be separately conveyed and stored, or used in a sheet sticking apparatus or the like that does not have a cutting means.

  In addition, the band-shaped sheet WS in the raw fabric RS is formed in advance with a predetermined interval at a predetermined interval by another device or the like, whereby the adhesive sheet AS is formed inside the cut CU. In the case where the unnecessary sheet US is formed outside the cut CU, the cutting means 15 of the sheet sticking device 10 can be omitted. Even in such a case, the same effect as that of the above embodiment can be obtained.

  Further, the planar shape of the cutting blade 40 can be variously changed such as a polygonal shape, an ellipse, an ellipse, a rhombus, and a shape combining a straight line and a curve.

  Further, the tension adjusting means can be variously modified as long as the tension of the unnecessary sheet US can be increased similarly to the above-described embodiment. For example, the third driving roller 43 and the third pinch roller 44 are provided so as to be movable relative to the pressing means 42 by a driving device, or the unnecessary sheet US is provided so as to be pressed by an output shaft that can advance and retreat in the thickness direction of the unnecessary sheet US. By doing so, the tension of the raw fabric RS may be increased.

The cutting means 15 may use other cutting means such as a laser beam as long as the cut CU can be formed.
Further, the cutting blade 40 is not only formed by etching, but also a sculpting blade formed by machining, a rotary die, a flat blade having a blade formed on a flat plate, a Thomson blade, etc. May be used.

Furthermore, the design of the feeding means 14, the peeling plate 18, and the pressing roller 19 can be changed in various ways as long as the same function as that of the above embodiment is exhibited.
Further, the interval adjusting means for adjusting the relative interval between the die cut roller 36 and the platen roller 37 may be a so-called bearer, and the relative interval between the cutting blade 40 and the platen roller 37 depends on the thickness and properties of the original fabric RS, In particular, the thickness and properties of the release sheet RS can be changed as appropriate.
Further, a driving device for moving the sheet sticking apparatus 10 is provided, and the sheet sticking apparatus 10 is moved rightward in FIG. 1 or the table 11 is moved leftward while the table 11 is stopped. The apparatus 10 may be configured to stick the adhesive sheet AS to the adherend by moving the apparatus 10 in the right direction,

  The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single-axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

  Further, the adherend may be a glass plate, a steel plate, or a resin plate instead of the wafer WF or the ring frame RF, and the semiconductor wafer may be a silicon semiconductor wafer or a compound semiconductor wafer. It may be. Further, instead of the ring frame RF, a frame having a different shape such as a C-shape or U-shape may be used, or a single adherend may be used as an attachment target of the adhesive sheet AS without the ring frame RF.

DESCRIPTION OF SYMBOLS 10 Sheet sticking apparatus 14 Feeding means 15 Cutting means 16 Unnecessary sheet winding means 18 Peeling plate (peeling means)
19 Pressing roller (pressing means)
42 Holding means 50 Holding member 51 Receiving member 53 Space adjusting means 55 Moving means AD Adhesive layer AS Adhesive sheet BS Base sheet CU Cutting DM5 Rotating motor (Tension adjusting means)
RF ring frame (adherence)
RL Release sheet RS Original Sa Initial release area (adhesive sheet feed direction tip)
US Unnecessary sheet WF Semiconductor wafer (adherent)
WS Strip sheet

Claims (3)

A feeding means for feeding out the original fabric temporarily attached to the strip-shaped release sheet by the strip-shaped sheet having the adhesive layer on one surface of the strip-shaped base sheet;
A cutting means for forming a cut in a predetermined shape in the belt-like sheet to form an adhesive sheet inside the cut, and forming an unnecessary sheet outside the cut,
An unnecessary sheet winding means for peeling the unnecessary sheet from the release sheet at a predetermined peeling position and winding the unnecessary sheet,
The unnecessary sheet winding means holds the leading end of the adhesive sheet in the feeding direction upstream of the position where the looseness of the unnecessary sheet is detected by the detecting means, and holds the leading end of the adhesive sheet in the feeding sheet side by the pressing means. from attached state, the position of removing the unnecessary sheet from the release sheet, to move the feeding direction upstream side of the raw sheet than the position of the feeding direction front end portion of the adhesive sheet was pressed by the pressing means Thus, at least the leading end portion in the feeding direction of the adhesive sheet and the unnecessary sheet are separated from each other. A feeding means for feeding out the original fabric temporarily attached to the strip-shaped release sheet by the strip-shaped sheet having the adhesive layer on one surface of the strip-shaped base sheet;
A cutting means for forming a cut in a predetermined shape in the belt-like sheet to form an adhesive sheet inside the cut, and forming an unnecessary sheet outside the cut,
A sheet manufacturing apparatus including an unnecessary sheet winding means for winding the unnecessary sheet,
The unnecessary sheet winding means includes a pressing means capable of pressing the adhesive sheet against the release sheet side, and at least by applying tension to the unnecessary sheet in a state where the adhesive sheet is pressed by the pressing means. Provided in such a manner that the leading end of the adhesive sheet in the feeding direction and the unnecessary sheet can be separated,
The sheet pressing apparatus according to claim 1, wherein the pressing unit includes a preliminary peeling unit that holds a leading end portion in the feeding direction of the adhesive sheet and can peel the leading end portion in the feeding direction of the adhesive sheet from the release sheet. A feeding step of feeding out the original fabric temporarily attached to the strip-shaped release sheet via the adhesive layer by the strip-shaped sheet having the adhesive layer on one surface of the strip-shaped base sheet;
A cutting step of forming an incision of a predetermined shape in the belt-like sheet to form an adhesive sheet inside the notch, and forming an unnecessary sheet outside the notch,
An unnecessary sheet winding step of peeling the unnecessary sheet from the release sheet and winding the unnecessary sheet at a predetermined peeling position,
The unnecessary sheet winding process, the in feeding direction upstream side of the raw sheet from the position loosening is detected unnecessary sheet by the detection means, pressing the feeding direction front end portion of the adhesive sheet in the release sheet side by pressing means from attached state, the position of removing the unnecessary sheet from the release sheet, to move the feeding direction upstream side of the raw sheet than the position of the feeding direction front end portion of the adhesive sheet was pressed by the pressing means The sheet manufacturing method characterized by separating at least the leading end portion in the feeding direction of the adhesive sheet and the unnecessary sheet.

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