JP7364327B2 - Unnecessary sheet removal device and unnecessary sheet removal method - Google Patents

Unnecessary sheet removal device and unnecessary sheet removal method Download PDF

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JP7364327B2
JP7364327B2 JP2018177229A JP2018177229A JP7364327B2 JP 7364327 B2 JP7364327 B2 JP 7364327B2 JP 2018177229 A JP2018177229 A JP 2018177229A JP 2018177229 A JP2018177229 A JP 2018177229A JP 7364327 B2 JP7364327 B2 JP 7364327B2
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JP2020047881A (en
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祐太 黒澤
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Lintec Corp
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本発明は、不要シート除去装置および不要シート除去方法に関する。 The present invention relates to an unnecessary sheet removing device and an unnecessary sheet removing method.

従来、複数の接着シートと帯状の不要シートとが帯状の剥離シートに仮着された原反から、当該不要シートを剥離して回収する装置が知られている(例えば、特許文献1参照)。 BACKGROUND ART Conventionally, there has been known an apparatus that peels off and collects a plurality of adhesive sheets and a band-shaped unnecessary sheet from an original fabric temporarily attached to a band-shaped release sheet (for example, see Patent Document 1).

特開2008-55661号公報Japanese Patent Application Publication No. 2008-55661

しかしながら、特許文献1に記載された連続ラベル製造装置11(不要シート除去装置)では、ラベル連続体12(原反)から剥離したラベルカス21A(不要シート)をカス巻取ローラ18(回収手段)で引っ張りながら回収するため、剥離紙23(剥離シート)から不要シートが剥離される剥離開始部と、回収手段で不要シートが回収される回収開始部との間に位置する支持なし不要シート部分が回収手段の張力によって切断され、不要シートの回収不良が生じるという不都合がある。このような不都合は、不要シートが軟弱または脆弱であったり、幅が細かったりした場合等において顕著化する。 However, in the continuous label manufacturing device 11 (unnecessary sheet removing device) described in Patent Document 1, label waste 21A (unnecessary sheet) peeled from the continuous label body 12 (original fabric) is collected by the waste take-up roller 18 (recovery means). Since the unnecessary sheets are collected while being pulled, the unsupported unnecessary sheet portion located between the peeling start part where the unnecessary sheets are peeled off from the release paper 23 (release sheet) and the collection start part where the unnecessary sheets are collected by the collection means is collected. There is an inconvenience that the sheet is cut due to the tension of the means, resulting in failure to collect the unnecessary sheet. Such inconvenience becomes noticeable when the unnecessary sheet is soft or brittle, or has a narrow width.

本発明の目的は、不要シートの回収不良を極力防止することができる不要シート除去装置および不要シート除去方法を提供することにある。 SUMMARY OF THE INVENTION An object of the present invention is to provide an unnecessary sheet removing device and an unnecessary sheet removing method that can prevent failure to collect unnecessary sheets as much as possible.

本発明は、請求項に記載した構成を採用した。 The present invention employs the configuration described in the claims.

本発明によれば、回収手段の回収動作に同期して不要シートを回収手段方向に送るので、剥離開始部と回収開始部との間に位置する支持なし不要シート部分が回収手段の張力によって切断されることが極力抑制され、不要シートの回収不良を極力防止することができる。
また、不要シートを挟み込んで湾曲させる複数のローラ部材や、プーリに掛け回されたベルト部材によって不要シートを回収手段方向に送るようにすれば、支持なし不要シート部分に接触する領域を多くして、当該支持なし不要シート部分を回収手段方向に送ることができる。
According to the present invention, since the unnecessary sheet is sent in the direction of the collecting means in synchronization with the collecting operation of the collecting means, the unsupported unnecessary sheet portion located between the peeling start part and the collecting start part is cut by the tension of the collecting means. Therefore, it is possible to prevent as much as possible the failure to collect unnecessary sheets.
In addition, if the unnecessary sheets are sent toward the collecting means using a plurality of roller members that sandwich and curve the unnecessary sheets or a belt member wrapped around a pulley, the area that comes into contact with the unsupported unnecessary sheet portion can be increased. , the unsupported unnecessary sheet portion can be sent toward the collection means.

本発明の一実施形態に係る不要シート除去装置の説明図。FIG. 1 is an explanatory diagram of an unnecessary sheet removing device according to an embodiment of the present invention.

以下、本発明の一実施形態を図面に基づいて説明する。
なお、本実施形態におけるX軸、Y軸、Z軸は、それぞれが直交する関係にあり、X軸およびY軸は、所定平面内の軸とし、Z軸は、前記所定平面に直交する軸とする。さらに、本実施形態では、Y軸と平行な図1の手前方向から観た場合を基準とし、方向を示した場合、「上」がZ軸の矢印方向で「下」がその逆方向、「左」がX軸の矢印方向で「右」がその逆方向、「前」がY軸と平行な図1中手前方向で「後」がその逆方向とする。
Hereinafter, one embodiment of the present invention will be described based on the drawings.
Note that the X-axis, Y-axis, and Z-axis in this embodiment are orthogonal to each other, and the X-axis and Y-axis are axes within a predetermined plane, and the Z-axis is an axis perpendicular to the predetermined plane. do. Furthermore, in this embodiment, when directions are shown based on the view from the front side of FIG. ``Left'' is the direction of the arrow on the X-axis, ``Right'' is the opposite direction, ``Front'' is the front direction in FIG. 1 parallel to the Y-axis, and ``Rear'' is the opposite direction.

図1において、不要シート除去装置EAは、複数の接着シートASと帯状の不要シートUSとが帯状の剥離シートRLに仮着された原反RSを繰り出す繰出手段10と、剥離シートRLから不要シートUSを剥離し、所定の回収動作を行って当該不要シートUSを回収する回収手段20と、剥離シートRLから不要シートUSが剥離される剥離開始部PT1と、回収手段20で不要シートUSが回収される回収開始部PT2との間で、回収手段20の回収動作に同期して不要シートUSを回収手段20方向に送る不要シート送り手段30とを備え、被着体としての半導体ウエハ(以下、単に「ウエハ」ともいう)WFに接着シートASを押圧して貼付する押圧手段40と、ウエハWFを支持する支持手段50とでシート貼付装置EA1を形成している。 In FIG. 1, the unnecessary sheet removal device EA includes a feeding means 10 that feeds out a raw fabric RS in which a plurality of adhesive sheets AS and a band-shaped unnecessary sheet US are temporarily attached to a band-shaped release sheet RL, and an unnecessary sheet from the release sheet RL. A collection means 20 that peels off the US and performs a predetermined collection operation to collect the unnecessary sheet US, a peeling start part PT1 where the unnecessary sheet US is peeled off from the release sheet RL, and a collection means 20 that collects the unnecessary sheet US. A semiconductor wafer (hereinafter referred to as a A sheet sticking device EA1 is formed by a pressing means 40 that presses and sticks an adhesive sheet AS onto a wafer (also simply referred to as a "wafer"), and a supporting means 50 that supports the wafer WF.

繰出手段10は、剥離シートRLに帯状の接着シート基材BSが仮着され、当該接着シート基材BS上にカバーシートCSが仮着された接着シート積層体RS1を支持する支持ローラ11と、接着シート積層体RS1等を案内する第1~第4ガイドローラ12A~12Dと、第2ガイドローラ12Bに掛け回されて接着シート基材BSから剥離されたカバーシートCSに、常に所定の張力を付与して当該カバーシートCSを巻回して回収するカバーシート回収ローラ13と、接着シート基材BSに閉ループ状の切込CUを形成し、当該切込CUの内側に位置する接着シートASと、当該切込CUの外側に位置する不要シートUSとを形成する切断手段14と、原反RSに繰出力を付与する繰出力付与手段15とを備え、原反RSを繰り出す構成となっている。
切断手段14は、駆動機器としての回動モータ14Aの出力軸14Bに支持され、円周面に平ループ状の切断部材としての切断刃14Cが設けられたダイカットローラ14Dと、ダイカットローラ14Dと同期回転するアンビルローラ14Eとを備えている。
繰出力付与手段15は、駆動機器としてのリニアモータ15Aのスライダ15Bに支持された支持プレート15Cと、支持プレート15Cに支持された駆動機器としての回動モータ15Dと、回動モータ15Dの図示しない出力軸に支持され、ピンチローラ15Eとで剥離シートRLを挟み込む駆動ローラ15Fと、ピンチローラ15Eとの間に存在する剥離シートRLに、常に所定の張力を付与して当該剥離シートRLを巻回して回収する剥離シート回収ローラ15Gとを備えている。
The feeding means 10 includes a support roller 11 that supports an adhesive sheet laminate RS1 in which a strip-shaped adhesive sheet base material BS is temporarily attached to a release sheet RL and a cover sheet CS is temporarily attached to the adhesive sheet base material BS; A predetermined tension is always applied to the first to fourth guide rollers 12A to 12D that guide the adhesive sheet laminate RS1 and the like, and to the cover sheet CS that is wrapped around the second guide roller 12B and peeled from the adhesive sheet base material BS. a cover sheet collection roller 13 that applies and winds and collects the cover sheet CS; an adhesive sheet AS that forms a closed loop cut CU in the adhesive sheet base material BS and is located inside the cut CU; It is configured to feed out the original fabric RS, including a cutting means 14 that forms unnecessary sheets US located outside the cut CU, and a feeding force applying unit 15 that applies a feeding force to the original fabric RS.
The cutting means 14 is supported by an output shaft 14B of a rotation motor 14A as a driving device, and has a die-cut roller 14D provided with a cutting blade 14C as a flat loop-shaped cutting member on its circumferential surface, and is synchronized with the die-cut roller 14D. It also includes a rotating anvil roller 14E.
The force applying means 15 includes a support plate 15C supported by a slider 15B of a linear motor 15A as a driving device, a rotary motor 15D as a driving device supported by the support plate 15C, and a rotary motor 15D (not shown) as a driving device. The release sheet RL is wound while always applying a predetermined tension to the release sheet RL, which exists between the drive roller 15F supported by the output shaft and sandwiching the release sheet RL with the pinch roller 15E, and the pinch roller 15E. A release sheet collecting roller 15G is provided.

回収手段20は、第4ガイドローラ12Dに掛け回されて剥離シートRLから剥離された不要シートUSを巻回して回収する不要シート回収ローラ21と、駆動機器としての回動モータ22によって駆動される駆動ローラ23と、不要シートUSを間に挟んで不要シート回収ローラ21を駆動ローラ23方向に付勢し、当該不要シート回収ローラ21に不要シートUSを巻回させる付勢手段24とを備えている。
付勢手段24は、支点軸24Aに回転自在に支持され、当該支点軸24Aの反対側で不要シート回収ローラ21を回転自在に支持する回動アーム24Bと、回動アーム24Bを駆動ローラ23方向に付勢するばね24Cとを備えている。
The collecting means 20 is driven by an unnecessary sheet collecting roller 21 that is wound around a fourth guide roller 12D and winds and collects the unnecessary sheet US peeled from the release sheet RL, and a rotation motor 22 as a driving device. It includes a drive roller 23 and a biasing means 24 that biases the unnecessary sheet collection roller 21 in the direction of the drive roller 23 with the unnecessary sheet US interposed therebetween and causes the unnecessary sheet collection roller 21 to wind the unnecessary sheet US. There is.
The urging means 24 includes a rotating arm 24B that is rotatably supported by a fulcrum shaft 24A, rotatably supports the unnecessary sheet collecting roller 21 on the opposite side of the fulcrum shaft 24A, and a rotating arm 24B that rotates the rotating arm 24B in the direction of the drive roller 23. The spring 24C is provided with a spring 24C.

不要シート送り手段30は、不要シートUSを挟み込んで当該不要シートUSを湾曲させる複数のローラ部材31と、複数のローラ部材31に回転力を付与する回転力付与手段であって駆動機器としての回動モータ32とを備え、剥離開始部PT1と回収開始部PT2との間に位置する支持なし不要シート部分US1を支持して不要シートUSを回収手段20方向に送るようになっている。なお、各ローラ部材31は、それぞれに取り付けられた図示しないプーリと、それら各プーリに掛け回された駆動力伝達手段としてのベルト33とを介して回動モータ32によって回転駆動される構成となっている。 The unnecessary sheet feeding means 30 includes a plurality of roller members 31 that sandwich the unnecessary sheet US and curve the unnecessary sheet US, and a rotational force applying means that applies rotational force to the plurality of roller members 31, and serves as a driving device. The moving motor 32 supports the unsupported unnecessary sheet portion US1 located between the peeling start part PT1 and the collection start part PT2, and sends the unnecessary sheet US toward the collection means 20. Note that each roller member 31 is configured to be rotationally driven by a rotary motor 32 via a pulley (not shown) attached to each roller member and a belt 33 as a driving force transmission means that is passed around each pulley. ing.

押圧手段40は、全部が繰出手段10と共用されており、リニアモータ15A、スライダ15B、支持プレート15C、回動モータ15D、ピンチローラ15E、駆動ローラ15Fおよび剥離シート回収ローラ15Gを備えている。 The pressing means 40 is all shared with the feeding means 10, and includes a linear motor 15A, a slider 15B, a support plate 15C, a rotation motor 15D, a pinch roller 15E, a drive roller 15F, and a release sheet collection roller 15G.

支持手段50は、駆動機器としての直動モータ51と、直動モータ51の出力軸51Aに支持され、減圧ポンプや真空エジェクタ等の図示しない減圧手段(保持手段)によって吸着保持が可能な保持面52Aを有するテーブル52とを備えている。 The support means 50 is supported by a direct-acting motor 51 as a driving device and an output shaft 51A of the direct-acting motor 51, and is a holding surface that can be held by suction by a decompression means (holding means) not shown, such as a decompression pump or a vacuum ejector. 52A.

以上の不要シート除去装置EAを備えたシート貼付装置EA1の動作を説明する。
先ず、図1中実線で示す初期位置に各部材が配置されたシート貼付装置EA1に対し、当該シート貼付装置EA1の使用者(以下、単に「使用者」という)が接着シート積層体RS1を同図に示すようにセットし、操作パネルやパーソナルコンピュータ等の図示しない操作手段を介して自動運転開始の信号を入力する。すると、繰出手段10、回収手段20および不要シート送り手段30が回動モータ14A、15D、22、32を駆動し、接着シート積層体RS1を繰り出しつつ、ダイカットローラ14Dを回転させて接着シート基材BSに閉ループ状の切込CUを形成することにより、剥離シートRLに接着シートASと不要シートUSとが仮着された原反RSを形成し、当該原反RSを繰り出す。
The operation of the sheet pasting device EA1 equipped with the unnecessary sheet removing device EA described above will be explained.
First, a user of the sheet applicator EA1 (hereinafter simply referred to as "user") attaches the adhesive sheet laminate RS1 to the sheet applicator EA1 in which each member is placed at the initial position shown by the solid line in FIG. It is set as shown in the figure, and a signal to start automatic operation is inputted via an operation means (not shown) such as an operation panel or a personal computer. Then, the feeding means 10, the collecting means 20, and the unnecessary sheet feeding means 30 drive the rotation motors 14A, 15D, 22, and 32, and while feeding out the adhesive sheet laminate RS1, rotate the die-cut roller 14D to cut the adhesive sheet base material. By forming a closed-loop cut CU in BS, a raw fabric RS in which the adhesive sheet AS and the unnecessary sheet US are temporarily attached to the release sheet RL is formed, and the raw fabric RS is fed out.

次いで、図1に示すように、剥離シートRLに仮着された先頭の接着シートASの繰出方向先端部が第3ガイドローラ12Cの下方所定位置に到達したことを、カメラや投影機等の撮像手段や、光学センサや超音波センサ等の各種センサ等からなる図示しないシート先端検知機器が検知すると、繰出手段10、回収手段20および不要シート送り手段30が回動モータ14A、15D、22、32の駆動を停止する。
なお、上記のようにして原反RSが繰り出されると、カバーシートCSは、第2ガイドローラ12Bで接着シート基材BSから剥離され、カバーシート回収ローラ13に巻回されて回収されるとともに、不要シートUSは、第4ガイドローラ12Dで剥離シートRLから剥離され、不要シート回収ローラ21に巻回されて回収される。
ここで、剥離シートRLから剥離された不要シートUSは、回収手段20の回収動作すなわち、不要シート回収ローラ21の回転動作に同期して回転駆動されるローラ部材31によって回収手段20方向に送られ、不要シート回収ローラ21に巻き取られる。
Next, as shown in FIG. 1, a camera, a projector, etc. is used to detect that the leading end in the feeding direction of the first adhesive sheet AS temporarily attached to the release sheet RL has reached a predetermined position below the third guide roller 12C. When a sheet leading edge detection device (not shown) consisting of various sensors such as an optical sensor and an ultrasonic sensor detects the detection, the feeding means 10, the collecting means 20, and the unnecessary sheet feeding means 30 are activated by the rotating motors 14A, 15D, 22, 32. Stops driving.
Note that when the original fabric RS is fed out as described above, the cover sheet CS is peeled off from the adhesive sheet base material BS by the second guide roller 12B, and is collected by being wound around the cover sheet collection roller 13. The unnecessary sheet US is peeled off from the release sheet RL by the fourth guide roller 12D, wound around the unnecessary sheet collection roller 21, and collected.
Here, the unnecessary sheets US peeled off from the release sheet RL are sent toward the collection means 20 by a roller member 31 that is rotationally driven in synchronization with the collection operation of the collection means 20, that is, the rotational operation of the unnecessary sheet collection roller 21. , the unnecessary sheet is taken up by the unnecessary sheet collection roller 21.

その後、使用者または、ベルトコンベアや多関節ロボット等の図示しない搬送手段が、図1に示すように、保持面52A上にウエハWFを載置すると、支持手段50が図示しない減圧手段を駆動し、保持面52AでのウエハWFの吸着保持を開始する。次に、繰出手段10が回動モータ15Dの駆動をロックした状態でリニアモータ15Aを駆動し、図1中二点鎖線で示すように、支持プレート15Cを右方へ移動させて原反RSを繰り出す。この際も、繰出手段10、回収手段20および不要シート送り手段30が回動モータ14A、22、32を駆動し、カバーシート回収ローラ13でカバーシートCSを回収し、接着シート基材BSに切込CUを形成して原反RSを形成するとともに、ローラ部材31によって送られてくる不要シートUSを不要シート回収ローラ21で回収する。そして、先頭の接着シートASに次ぐ次の接着シートASの繰出方向先端部が第3ガイドローラ12Cの下方所定位置に到達したことを、図示しないシート先端検知機器が検知すると、繰出手段10、回収手段20および不要シート送り手段30がリニアモータ15A、回動モータ14A、22、32の駆動を停止する。 Thereafter, when the user or a conveyance means (not shown) such as a belt conveyor or an articulated robot places the wafer WF on the holding surface 52A as shown in FIG. 1, the support means 50 drives the decompression means (not shown). , starts sucking and holding the wafer WF on the holding surface 52A. Next, the feeding means 10 drives the linear motor 15A with the rotary motor 15D locked, moves the support plate 15C to the right as shown by the two-dot chain line in FIG. Let out. At this time, the feeding means 10, the collecting means 20, and the unnecessary sheet feeding means 30 drive the rotation motors 14A, 22, and 32, and the cover sheet collecting roller 13 collects the cover sheet CS and cuts it into the adhesive sheet base material BS. At the same time, the unnecessary sheets US sent by the roller member 31 are collected by the unnecessary sheet collecting roller 21. When a sheet leading edge detection device (not shown) detects that the leading end in the feeding direction of the next adhesive sheet AS following the first adhesive sheet AS has reached a predetermined position below the third guide roller 12C, the feeding means 10, the collecting unit 10, The means 20 and the unnecessary sheet feeding means 30 stop driving the linear motor 15A and rotation motors 14A, 22, and 32.

次いで、支持手段50が直動モータ51を駆動し、図1中二点鎖線で示すように、テーブル52を上昇させた後、押圧手段40がリニアモータ15Aおよび回動モータ15Dを駆動し、駆動ローラ15Fを転動させて原反RSをウエハWFに押圧しながら支持プレート15Cを左方に移動させる。これにより、ウエハWFの上面に接着シートASが貼付されるとともに、当該接着シートASから剥離シートRLが剥離され、剥離された剥離シートRLが剥離シート回収ローラ15Gに回収される。その後、接着シートASから剥離シートRLが完全に剥離され、支持プレート15Cが初期位置に復帰すると、押圧手段40がリニアモータ15Aおよび回動モータ15Dの駆動を停止する。 Next, the support means 50 drives the linear motor 51 to raise the table 52 as shown by the two-dot chain line in FIG. The support plate 15C is moved to the left while rolling the roller 15F to press the original fabric RS against the wafer WF. As a result, the adhesive sheet AS is attached to the upper surface of the wafer WF, and the release sheet RL is peeled off from the adhesive sheet AS, and the peeled release sheet RL is collected by the release sheet collection roller 15G. Thereafter, when the release sheet RL is completely peeled off from the adhesive sheet AS and the support plate 15C returns to its initial position, the pressing means 40 stops driving the linear motor 15A and rotation motor 15D.

次に、支持手段50が直動モータ51を駆動し、テーブル52を初期位置に復帰させた後、図示しない減圧手段の駆動を停止し、保持面52AでのウエハWFの吸着保持を解除する。そして、使用者または図示しない搬送手段が、保持面52A上のウエハWFを次の工程に搬送し、以降上記同様の動作が繰り返される。 Next, the supporting means 50 drives the linear motor 51 to return the table 52 to its initial position, and then stops driving the pressure reducing means (not shown) to release the suction and holding of the wafer WF on the holding surface 52A. Then, the user or a transport means (not shown) transports the wafer WF on the holding surface 52A to the next step, and the same operations as described above are repeated thereafter.

以上のような実施形態によれば、回収手段20の回収動作に同期して不要シートUSを回収手段20方向に送るので、剥離開始部PT1と回収開始部PT2との間に位置する支持なし不要シート部分US1が回収手段20の張力によって切断されることが極力抑制され、不要シートUSの回収不良を極力防止することができる。 According to the embodiment described above, since the unnecessary sheets US are sent in the direction of the collecting means 20 in synchronization with the collecting operation of the collecting means 20, there is no need for support located between the peeling start part PT1 and the collecting start part PT2. The sheet portion US1 is prevented from being cut by the tension of the collecting means 20, and failure to collect the unnecessary sheets US can be prevented as much as possible.

以上のように、本発明を実施するための最良の構成、方法等は、前記記載で開示されているが、本発明は、これに限定されるものではない。すなわち、本発明は、主に特定の実施形態に関して特に図示され、かつ説明されているが、本発明の技術的思想および目的の範囲から逸脱することなく、以上述べた実施形態に対し、形状、材質、数量、その他の詳細な構成において、当業者が様々な変形を加えることができるものである。また、上記に開示した形状、材質などを限定した記載は、本発明の理解を容易にするために例示的に記載したものであり、本発明を限定するものではないから、それらの形状、材質などの限定の一部もしくは全部の限定を外した部材の名称での記載は、本発明に含まれる。 As mentioned above, although the best configuration, method, etc. for carrying out the present invention are disclosed in the above description, the present invention is not limited thereto. That is, although the present invention has been particularly illustrated and described primarily with respect to particular embodiments, there are modifications in shape, shape, and shape to the embodiments described above without departing from the spirit and scope of the invention. Those skilled in the art can make various modifications in materials, quantities, and other detailed configurations. In addition, the descriptions that limit the shape, material, etc. disclosed above are described as examples to facilitate understanding of the present invention, and do not limit the present invention. Descriptions of names of members that exclude some or all of the limitations such as these are included in the present invention.

例えば、繰出手段10は、接着シート基材BSに予め切込CUが形成されることで剥離シートRLに接着シートASと不要シートUSとが仮着された原反RSを支持ローラ11で支持し、当該原反RSを繰り出してもよく、この場合、当該繰出手段10に切断手段14が備わっていてもよいし、備わっていなくてもよい。
繰出手段10は、支持プレート15Cを移動させずにまたは移動させつつ、支持ローラ11、第1~第4ガイドローラ12A~12D、カバーシート回収ローラ13、切断手段14等を移動させ、原反RSを繰り出してもよいし、チャックシリンダや吸着パッド等の保持手段で原反RSを保持して繰り出してもよいし、巻回することなく例えばファンフォールド折りにして支持した接着シート積層体RS1や原反RSを繰り出してもよいし、カバーシートCSや剥離シートRLを巻回することなく例えばファンフォールド折りにしたり、シュレッダ等で切り刻んだりして回収してもよいし、カバーシートCSや剥離シートRLを巻回したりファンフォールド折りにしたりすることなく単に集積して回収してもよい。
切断手段14は、接着シート積層体RS1を移動させずにまたは移動させつつ切断部材を移動させ、接着シート基材BSに切込CUを形成して原反RSを形成してもよいし、接着シート基材BSからカバーシートCSを剥離する前に当該カバーシートCSを貫通し、接着シート基材BSに切込CUを形成して原反RSを形成してもよいし、切断部材として、例えば、接着シート基材BSに離間接近することで、当該接着シート基材BSに所定形状の切込CUを形成する所謂平刃を採用してもよいし、切断刃14Cがダイカットローラ14Dに対して着脱可能でもよいし、着脱不能でもよい。
For example, the feeding means 10 supports, with the support roller 11, the raw fabric RS on which the adhesive sheet AS and the unnecessary sheet US are temporarily attached to the release sheet RL by forming cuts CU in advance in the adhesive sheet base material BS. , the raw fabric RS may be fed out, and in this case, the feeding means 10 may or may not be equipped with the cutting means 14.
The feeding means 10 moves the support roller 11, the first to fourth guide rollers 12A to 12D, the cover sheet collection roller 13, the cutting means 14, etc. without moving the support plate 15C or while moving the support plate 15C, and moves the original fabric RS. Alternatively, the original web RS may be held by a holding means such as a chuck cylinder or a suction pad and then unwound, or the adhesive sheet laminate RS1 or original web RS may be supported by fan-folding without winding. The anti-RS may be fed out, or the cover sheet CS and release sheet RL may be fan-folded without being wound, for example, or cut into pieces with a shredder, etc., and collected. They may simply be collected and collected without being rolled or fan-folded.
The cutting means 14 may move the cutting member without or while moving the adhesive sheet laminate RS1 to form cuts CU in the adhesive sheet base material BS to form the original fabric RS, or Before peeling the cover sheet CS from the sheet base material BS, the raw fabric RS may be formed by penetrating the cover sheet CS and forming cuts CU in the adhesive sheet base material BS, or as a cutting member, for example, , a so-called flat blade may be employed that forms a predetermined-shaped cut CU in the adhesive sheet base material BS by moving away from and approaching the adhesive sheet base material BS, or the cutting blade 14C may be moved toward the die-cut roller 14D. It may be removable or non-removable.

回収手段20は、第4ガイドローラ12Dに掛け回されることなく剥離シートRLから剥離された不要シートUSを回収してもよいし、例えば、ファンフォールド折りにしたり、シュレッダ等で切り刻んだりして不要シートUSを回収してもよく、これらの場合、不要シート送り手段30は、ファンフォールド折りにしたり、シュレッダ等で切り刻んだりする回収手段20の回収動作に同期して、不要シートUSを回収手段20方向に送る動作を行うように構成すればよい。
回収手段20は、駆動機器としての回動モータで不要シート回収ローラ21を駆動してもよく、この場合、回動モータ22、駆動ローラ23および付勢手段24はなくてもよい。
付勢手段24は、駆動機器としての直動モータや、駆動機器としてのリニアモータによって、不要シート回収ローラ21を駆動ローラ23方向に付勢してもよいし、不要シート回収ローラ21を上下方向に自由移動可能に構成し、不要シート回収ローラ21の自重で当該不要シート回収ローラ21を駆動ローラ23方向に付勢してもよい。
The collecting means 20 may collect the unnecessary sheet US peeled off from the release sheet RL without being passed around the fourth guide roller 12D, or may collect the unnecessary sheet US by folding it in a fan fold or by cutting it into pieces with a shredder or the like, for example. The unnecessary sheets US may be collected, and in these cases, the unnecessary sheet feeding means 30 sends the unnecessary sheets US to the collecting means in synchronization with the collecting operation of the collecting means 20, which fan-folds or shreds them with a shredder or the like. It may be configured to perform a sending operation in 20 directions.
The collecting means 20 may drive the unnecessary sheet collecting roller 21 using a rotating motor as a driving device, and in this case, the rotating motor 22, the driving roller 23, and the urging means 24 may be omitted.
The biasing means 24 may bias the unnecessary sheet collecting roller 21 in the direction of the driving roller 23 using a direct-acting motor as a driving device or a linear motor as a driving device, or may bias the unnecessary sheet collecting roller 21 in the vertical direction. The unnecessary sheet collecting roller 21 may be configured to be freely movable, and the unnecessary sheet collecting roller 21 may be urged in the direction of the drive roller 23 by its own weight.

不要シート送り手段30は、ローラ部材31を不要シートUSから離間接近させる駆動機器を備えていてもよいし、不要シートUSにおける剥離シートRLに仮着していた面のみに当接し、回収手段20の回収動作に同期して不要シートUSを回収手段20方向に送る構成でもよいし、不要シートUSにおける剥離シートRLに仮着していなかった面のみに当接し、回収手段20の回収動作に同期して不要シートUSを回収手段20方向に送る構成でもよい。
不要シート送り手段30は、例えば、図1中左上に示した符号AAの図のように、駆動機器としての回動モータ34Aによって駆動される第1プーリ34と、自由回転可能な第2プーリ35と、第1プーリ34および第2プーリ35に掛け回されたベルト部材36とを備えていてもよい。この場合も前記実施形態と同様に、ベルト部材36で不要シートUSを挟み込んで当該不要シートUSを回収手段20方向に送るように構成してもよいし、不要シートUSにおける剥離シートRLに仮着していなかった面のみに当接し、回収手段20の回収動作に同期して不要シートUSを当該回収手段20方向に送る構成としてもよいし、図1中符号AAの図に二点鎖線で示すように、ベルト部材36を多孔質部材で構成し、減圧ポンプや真空エジェクタ等の図示しない減圧手段によって吸引が可能な吸引面37Aを有する吸引チャンバ37を採用し、ベルト部材36で不要シートUSを吸着保持しながら、当該不要シートUSを回収手段20方向に送るように構成してもよいし、前記実施形態で示した不要シート送り手段30と、図1中符号AAの図に示した不要シート送り手段30とを併用してもよい。
ローラ部材31は、不要シートUSの幅と同じ長さであってもよいし、不要シートUSの幅の長さよりも長くてもよいし、短くてもよい。
回転力付与手段は、全てのローラ部材31を個別に回転駆動させる駆動機器としての回動モータを採用してもよいし、前記実施形態の態様において、不要シートUSにおける剥離シートRLに仮着していた面側に当接するローラ部材31のみに回転力を付与してもよいし、不要シートUSにおける剥離シートRLに仮着していなかった面側に当接するローラ部材31のみに回転力を付与してもよい。
駆動力伝達手段は、ギヤやチェーン等で構成してもよい。
The unnecessary sheet feeding means 30 may include a driving device that moves the roller member 31 away from and approaching the unnecessary sheet US, or the unnecessary sheet feeding means 30 may contact only the surface of the unnecessary sheet US that was temporarily attached to the release sheet RL, and return the roller member 31 to the collecting means 20. The unnecessary sheet US may be sent in the direction of the collecting means 20 in synchronization with the collecting operation of A configuration may also be adopted in which the unnecessary sheets US are sent in the direction of the collection means 20.
The unnecessary sheet feeding means 30 includes, for example, a first pulley 34 driven by a rotary motor 34A as a driving device, and a second pulley 35 that is freely rotatable, as shown in the diagram AA shown in the upper left of FIG. and a belt member 36 that is passed around the first pulley 34 and the second pulley 35. In this case as well, similarly to the embodiment described above, the unnecessary sheet US may be configured to be sandwiched between the belt members 36 and sent to the collection means 20 direction, or the unnecessary sheet US may be temporarily attached to the release sheet RL of the unnecessary sheet US. It may be configured such that the unnecessary sheet US is brought into contact with only the previously unused surface, and the unnecessary sheet US is sent in the direction of the collecting means 20 in synchronization with the collecting operation of the collecting means 20, as shown by the two-dot chain line in the figure AA in FIG. In this way, the belt member 36 is made of a porous material, and a suction chamber 37 having a suction surface 37A that can be suctioned by a decompression means (not shown) such as a decompression pump or a vacuum ejector is adopted, and the belt member 36 removes unnecessary sheets US. It may be configured such that the unnecessary sheet US is fed in the direction of the collection means 20 while being sucked and held, or the unnecessary sheet US shown in the figure AA in FIG. It may be used together with the feeding means 30.
The roller member 31 may have the same length as the width of the unnecessary sheet US, may be longer than the width of the unnecessary sheet US, or may be shorter than the width of the unnecessary sheet US.
The rotational force applying means may employ a rotational motor as a driving device that rotationally drives all the roller members 31 individually, or in the aspect of the embodiment described above, the rotational force applying means may temporarily attach to the release sheet RL in the unnecessary sheet US. The rotational force may be applied only to the roller member 31 that comes into contact with the side that was previously attached, or the rotational force may be applied only to the roller member 31 that comes into contact with the side that was not temporarily attached to the release sheet RL in the unnecessary sheet US. You may.
The driving force transmission means may be composed of gears, chains, or the like.

押圧手段40は、リニアモータ15A、スライダ15B、支持プレート15C、回動モータ15D、ピンチローラ15E、駆動ローラ15Fおよび剥離シート回収ローラ15Gの一部または全部に代えて、繰出手段10と共用することのない部材を採用してもよいし、駆動機器としての直動モータの出力軸に支持された押圧部材で剥離シートRL上から原反RSをウエハWFに押圧し、接着シートASを当該ウエハWFに貼付してもよいし、駆動機器としての直動モータの出力軸に支持され、減圧ポンプや真空エジェクタ等の減圧手段によって吸着保持が可能な保持部材で剥離シートRLを保持し、当該保持部材で保持した剥離シートRLを接着シートASから離間させて剥離する構成を採用してもよい。 The pressing means 40 is used in common with the feeding means 10 instead of part or all of the linear motor 15A, slider 15B, support plate 15C, rotating motor 15D, pinch roller 15E, drive roller 15F, and release sheet collection roller 15G. Alternatively, a pressing member supported by the output shaft of a direct-acting motor serving as a driving device may press the original fabric RS onto the wafer WF from above the release sheet RL, and then apply the adhesive sheet AS to the wafer WF. Alternatively, the release sheet RL may be held by a holding member that is supported by the output shaft of a direct-acting motor as a driving device and can be held by suction by a pressure reducing means such as a pressure reducing pump or a vacuum ejector. A configuration may be adopted in which the release sheet RL held by the adhesive sheet AS is separated from the adhesive sheet AS and then peeled off.

支持手段50は、保持手段がなくてもよいし、テーブル52を上昇させた際、ウエハWFを接着シートASに当接させてもよいし、当接させなくてもよいし、他の装置でウエハWFを支持する場合、シート貼付装置EA1に備わっていなくてもよい。 The support means 50 may not have a holding means, may or may not bring the wafer WF into contact with the adhesive sheet AS when the table 52 is raised, or may be provided with other equipment. When supporting the wafer WF, the sheet pasting device EA1 does not need to be equipped with it.

不要シート除去装置EAは、シート貼付装置EA1以外に、例えば、帯状の剥離シートRLに所定の間隔を隔てて複数の接着シートASが仮着された原反RSであって、不要シートUSのない原反RSを形成する原反製造装置や、接着シートASに所定の印刷や印字を行う印刷機械やプリンタ等、どのようなものに採用されてもよい。
不要シートUSは、剥離シートRLにおける接着シートASが仮着された面に仮着されていてもよいし、剥離シートRLにおける接着シートASが仮着されていない面に仮着されていてもよいし、剥離シートRLにおける接着シートASが仮着された面に仮着されている場合、接着シートASと重ならないように当該接着シートASに隣接して仮着されていてもよいし、接着シートASと重ならないように当該接着シートASから離れるようにして仮着されていてもよいし、接着シートASと重なるように仮着されていてもよい。
In addition to the sheet pasting device EA1, the unnecessary sheet removing device EA is, for example, a raw material RS in which a plurality of adhesive sheets AS are temporarily attached to a strip-shaped release sheet RL at predetermined intervals, and there is no unnecessary sheet US. The present invention may be employed in any device such as a fabric manufacturing device that forms the fabric RS, a printing machine or printer that performs predetermined printing or printing on the adhesive sheet AS.
The unnecessary sheet US may be temporarily attached to the surface of the release sheet RL to which the adhesive sheet AS is temporarily attached, or may be temporarily attached to the surface of the release sheet RL to which the adhesive sheet AS is not temporarily attached. However, when the adhesive sheet AS of the release sheet RL is temporarily attached to the temporarily attached surface, it may be temporarily attached adjacent to the adhesive sheet AS so as not to overlap with the adhesive sheet AS, or the adhesive sheet AS may be temporarily attached to the adhesive sheet AS. It may be temporarily attached so as to be separated from the adhesive sheet AS so as not to overlap with AS, or it may be temporarily attached so as to overlap with adhesive sheet AS.

本発明における接着シートAS、不要シートUSおよび被着体の材質、種別、形状等は、特に限定されることはない。例えば、接着シートASは、円形、楕円形、三角形や四角形等の多角形、その他の形状であってもよいし、感圧接着性、感熱接着性等の接着形態のものであってもよく、感熱接着性の接着シートASが採用された場合は、当該接着シートASを加熱する適宜なコイルヒータやヒートパイプ等の加熱側等の加熱手段を設けるといった適宜な方法で接着されればよい。また、このような接着シートASは、例えば、接着剤層だけの単層のもの、基材と接着剤層とを有するもの、基材と接着剤層との間に中間層を有するもの等1層または2層以上のもの、更には、基材を接着剤層から剥離することのできる所謂両面接着シートのようなものであってもよく、両面接着シートは、単層又は複層の中間層を有するものや、中間層のない単層又は複層のものであってよい。また、被着体としては、例えば、食品、樹脂容器、シリコン半導体ウエハや化合物半導体ウエハ等の半導体ウエハ、回路基板、光ディスク等の情報記録基板、ガラス板、鋼板、陶器、木板または樹脂板等の単体物であってもよいし、それら2つ以上で形成された複合物であってもよく、任意の形態の部材や物品なども対象とすることができる。なお、接着シートASは、機能的、用途的な読み方に換え、例えば、情報記載用ラベル、装飾用ラベル、保護シート、ダイシングテープ、ダイアタッチフィルム、ダイボンディングテープ、記録層形成樹脂シート等の任意の形状の任意のシート、フィルム、テープ等でもよい。 The materials, types, shapes, etc. of the adhesive sheet AS, unnecessary sheet US, and adherend in the present invention are not particularly limited. For example, the adhesive sheet AS may have a circular shape, an oval shape, a polygonal shape such as a triangle or a square shape, or other shapes, or may have an adhesive form such as pressure-sensitive adhesiveness or heat-sensitive adhesiveness. When a heat-sensitive adhesive sheet AS is used, the adhesive sheet AS may be bonded by an appropriate method such as providing a heating means such as an appropriate coil heater or heat pipe on the heating side to heat the adhesive sheet AS. In addition, such adhesive sheets AS include, for example, a single-layer adhesive sheet, one having a base material and an adhesive layer, one having an intermediate layer between the base material and the adhesive layer, etc. It may be a layer or two or more layers, or even a so-called double-sided adhesive sheet that allows the base material to be peeled off from the adhesive layer. It may be a single-layer or multi-layer without an intermediate layer. Examples of adherends include foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit boards, information recording substrates such as optical disks, glass plates, steel plates, ceramics, wood plates, and resin plates. The object may be a single object or a composite formed of two or more of them, and members or articles of any form can also be targeted. Note that the adhesive sheet AS can be used for any purpose such as an information label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, a recording layer forming resin sheet, etc. It may be any sheet, film, tape, etc. in any shape.

本発明における手段および工程は、それら手段および工程について説明した動作、機能または工程を果たすことができる限りなんら限定されることはなく、まして、前記実施形態で示した単なる一実施形態の構成物や工程に全く限定されることはない。例えば、繰出手段は、複数の接着シートと帯状の不要シートとが帯状の剥離シートに仮着された原反を繰り出すことが可能なものであれば、出願当初の技術常識に照らし合わせ、その技術範囲内のものであればなんら限定されることはない(他の手段および工程についての説明は省略する)。
前記実施形態における駆動機器は、回動モータ、直動モータ、リニアモータ、単軸ロボット、2軸または3軸以上の関節を備えた多関節ロボット等の電動機器、エアシリンダ、油圧シリンダ、ロッドレスシリンダ及びロータリシリンダ等のアクチュエータ等を採用することができる上、それらを直接的又は間接的に組み合せたものを採用することもできる。
前記実施形態において、ローラ等の回転部材が採用されている場合、当該回転部材を回転駆動させる駆動機器を備えてもよいし、回転部材の表面や回転部材自体をゴムや樹脂等の変形可能な部材で構成してもよいし、回転部材の表面や回転部材自体を変形しない部材で構成してもよいし、押圧ローラや押圧ヘッド等の押圧手段や押圧部材といった被押圧物を押圧するものが採用されている場合、上記で例示したものに代えてまたは併用して、ローラ、丸棒、ブレード材、ゴム、樹脂、スポンジ等の部材を採用したり、大気やガス等の気体の吹き付けにより押圧する構成を採用したりしてもよいし、押圧するものをゴムや樹脂等の変形可能な部材で構成してもよいし、変形しない部材で構成してもよいし、剥離板や剥離ローラ等の剥離手段や剥離部材といった被剥離物を剥離するものが採用されている場合、上記で例示したものに代えてまたは併用して、板状部材、丸棒、ローラ等の部材を採用してもよいし、剥離するものをゴムや樹脂等の変形可能な部材で構成してもよいし、変形しない部材で構成してもよいし、支持(保持)手段や支持(保持)部材等の被支持部材を支持または保持するものが採用されている場合、メカチャックやチャックシリンダ等の把持手段、クーロン力、接着剤(接着シート、接着テープ)、粘着剤(粘着シート、粘着テープ)、磁力、ベルヌーイ吸着、吸引吸着、駆動機器等で被支持部材を支持(保持)する構成を採用してもよいし、切断手段や切断部材等の被切断部材を切断または、被切断部材に切込や切断線を形成するものが採用されている場合、上記で例示したものに代えてまたは併用して、カッター刃、レーザカッタ、イオンビーム、火力、熱、水圧、電熱線、気体や液体等の吹付け等で切断するものを採用したり、適宜な駆動機器を組み合わせたもので切断するものを移動させて切断するようにしたりしてもよいし、付勢手段が採用されている場合、ばね、ゴム、樹脂等で構成してもよい。
The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described with respect to the means and steps; It is not limited at all to the process. For example, if the feeding means is capable of feeding out a raw fabric in which a plurality of adhesive sheets and a belt-shaped unnecessary sheet are temporarily attached to a belt-shaped release sheet, then the technology should be There is no limitation as long as it falls within the range (descriptions of other means and steps will be omitted).
The driving equipment in the above embodiment includes a rotary motor, a direct-acting motor, a linear motor, a single-axis robot, an electric equipment such as an articulated robot with joints of two or three or more axes, an air cylinder, a hydraulic cylinder, and a rodless cylinder. Actuators such as cylinders and rotary cylinders can be used, and a direct or indirect combination of these can also be used.
In the above embodiment, when a rotating member such as a roller is employed, a driving device for rotationally driving the rotating member may be provided, or the surface of the rotating member or the rotating member itself may be made of deformable material such as rubber or resin. The surface of the rotating member or the rotating member itself may be made of a member that does not deform, or the pressing means such as a pressing roller or a pressing head or a pressing member that presses the object to be pressed may be used. If so, instead of or in combination with the examples listed above, members such as rollers, round bars, blade materials, rubber, resin, sponge, etc. may be used, or pressure may be applied by blowing air, gas, or other gases. The pressing member may be made of a deformable member such as rubber or resin, or may be made of a non-deformable member, or a release plate, a release roller, etc. If a peeling means or a peeling member is used to peel off the object to be peeled, members such as a plate-shaped member, a round bar, a roller, etc. may be used in place of or in combination with those exemplified above. Alternatively, the thing to be peeled off may be made of a deformable member such as rubber or resin, or it may be made of a non-deformable member, and the part to be peeled may be made of a deformable member such as a supporting (holding) means or a supported (holding) member. If something is used to support or hold the component, gripping means such as a mechanical chuck or chuck cylinder, Coulomb force, adhesive (adhesive sheet, adhesive tape), adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli A configuration may be adopted in which the supported member is supported (held) by suction, suction suction, a driving device, etc., or the member to be cut is cut by a cutting means or a cutting member, or a cut or cutting line is formed in the member to be cut. If a device that forms a It is also possible to use a device that cuts the object with a spring, or to move the object to cut using a combination of appropriate drive equipment.If a biasing means is used, it may be possible to cut the object by moving it using a combination of appropriate drive equipment. It may also be made of resin or the like.

EA…不要シート除去装置
10…繰出手段
20…回収手段
30…不要シート送り手段
31…ローラ部材
32…回動モータ(回転力付与手段)
34…第1プーリ
35…第2プーリ
36…ベルト部材
AS…接着シート
PT1…剥離開始部
PT2…回収開始部
RL…剥離シート
RS…原反
US…不要シート
EA...Unnecessary sheet removing device 10...Feeding means 20...Collecting means 30...Unnecessary sheet feeding means 31...Roller member 32...Rotating motor (rotational force applying means)
34...First pulley 35...Second pulley 36...Belt member AS...Adhesive sheet PT1...Peeling start part PT2...Recovery start part RL...Peeling sheet RS...Original fabric US...Unnecessary sheet

Claims (2)

複数の接着シートと帯状の不要シートとが帯状の剥離シートに仮着された原反を繰り出す繰出手段と、
前記剥離シートから前記不要シートを剥離し、所定の回収動作を行って当該不要シートを回収する回収手段と、
前記剥離シートから前記不要シートが剥離される剥離開始部と、前記回収手段で前記不要シートが回収される回収開始部との間で、前記回収手段の回収動作に同期して前記不要シートを回収手段方向に送る不要シート送り手段とを備え、
前記不要シート送り手段は、前記不要シートを挟み込んで当該不要シートを湾曲させる複数のローラ部材と、前記複数のローラ部材に回転力を付与する回転力付与手段とを備え、前記複数のローラ部材は、前記不要シートの一方の面側と他方の面側とで互い違いに位置するように千鳥配置されていることを特徴とする不要シート除去装置。
a feeding means for feeding out a raw fabric in which a plurality of adhesive sheets and a band-shaped unnecessary sheet are temporarily attached to a band-shaped release sheet;
a collection means for peeling off the unnecessary sheet from the release sheet and performing a predetermined collection operation to collect the unnecessary sheet;
Collecting the unnecessary sheets in synchronization with the collecting operation of the collecting means between a peeling start part where the unnecessary sheets are peeled from the release sheet and a collection start part where the unnecessary sheets are collected by the collecting means. Equipped with unnecessary sheet feeding means for feeding in the direction of the means,
The unnecessary sheet feeding means includes a plurality of roller members that sandwich the unnecessary sheet and curve the unnecessary sheet, and a rotational force applying means that applies rotational force to the plurality of roller members, and the plurality of roller members , an unnecessary sheet removing device characterized in that the unnecessary sheets are arranged in a staggered manner so as to be alternately positioned on one side and the other side of the unnecessary sheets.
複数の接着シートと帯状の不要シートとが帯状の剥離シートに仮着された原反を繰り出す繰出工程と、
前記剥離シートから前記不要シートを剥離し、回収手段で所定の回収動作を行って当該不要シートを回収する回収工程と、
前記剥離シートから前記不要シートが剥離される剥離開始部と、前記回収手段で前記不要シートが回収される回収開始部との間で、前記回収手段の回収動作に同期して前記不要シートを回収手段方向に送る不要シート送り工程とを実施し、
前記不要シート送り工程では、前記不要シートの一方の面側と他方の面側とで互い違いに位置するように千鳥配置された複数のローラ部材で当該不要シートを挟み込んで当該不要シートを湾曲させた状態で、前記複数のローラ部材に回転力を付与することを特徴とする不要シート除去方法。
a feeding step of feeding out a raw fabric in which a plurality of adhesive sheets and a band-shaped unnecessary sheet are temporarily attached to a band-shaped release sheet;
a collection step of peeling off the unnecessary sheet from the release sheet and performing a predetermined collection operation with a collection means to collect the unnecessary sheet;
Collecting the unnecessary sheets in synchronization with the collecting operation of the collecting means between a peeling start part where the unnecessary sheets are peeled from the release sheet and a collection start part where the unnecessary sheets are collected by the collecting means. The unnecessary sheet feeding process is carried out in the direction of the means,
In the unnecessary sheet feeding step, the unnecessary sheet is sandwiched between a plurality of roller members arranged in a staggered manner so as to be alternately positioned on one side and the other side of the unnecessary sheet, thereby bending the unnecessary sheet. A method for removing unnecessary sheets, the method comprising: applying rotational force to the plurality of roller members while
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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012084688A (en) 2010-10-12 2012-04-26 Nitto Denko Corp Method of pasting double-sided adhesive tape, and device of pasting double-sided adhesive tape
JP2013074102A (en) 2011-09-28 2013-04-22 Lintec Corp Sheet sticking apparatus and sticking method, and sheet manufacturing apparatus and manufacturing method
JP2015056613A (en) 2013-09-13 2015-03-23 リンテック株式会社 Sheet sticking device and sticking method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012084688A (en) 2010-10-12 2012-04-26 Nitto Denko Corp Method of pasting double-sided adhesive tape, and device of pasting double-sided adhesive tape
JP2013074102A (en) 2011-09-28 2013-04-22 Lintec Corp Sheet sticking apparatus and sticking method, and sheet manufacturing apparatus and manufacturing method
JP2015056613A (en) 2013-09-13 2015-03-23 リンテック株式会社 Sheet sticking device and sticking method

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