JP2017022178A - Sheet sticking device and sticking method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sheet sticking device capable of preventing a holding mark from being formed on an adhesive sheet by concentrating a holding force in one place even while actively applying a tensile force to the adhesive sheet and sticking the adhesive sheet to a stuck body, and a sticking method.SOLUTION: A sheet sticking device 10 comprises: feed-out means 20 for feeding out a raw sheet RS by applying a feed-out force from feed-out force application means 24 to the raw sheet RS with which an adhesive sheet AS is temporarily stuck onto one face of a belt-like release sheet RL; release means 30 which is provided at an upstream side of the feed-out force application means 24 in a feed-out direction and by which the raw sheet RS is folded at a folding part 30A and the adhesive sheet AS is released from the release sheet RL; press means 40 which presses the released adhesive sheet AS to a stuck body WF; and tensile force application means 50 which is provided at an upstream side of the folding part 30A of the release means 30 in the feed-out direction and applies a predetermined tensile force to the adhesive sheet AS being pressed to the stuck body WF by the press means 40 without holding the raw sheet RS therebetween.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a sheet sticking apparatus and a sticking method.

  2. Description of the Related Art Conventionally, a sheet sticking apparatus that positively applies tension to an adhesive sheet and sticks the adhesive sheet to an adherend is known (see, for example, Patent Document 1).

JP-A-6-216242

  However, in the conventional sheet sticking apparatus as described in Patent Document 1, when the original fabric is not fed out, the adhesive sheet may wait in a state of being sandwiched between the tension applying roller and the pinch roller, If such a standby state continues, the pinching force of these rollers concentrates in one place, and the problem that a streak-like pinch trace will be formed in an adhesive sheet will generate | occur | produce. If such a pinch mark is made, for example, an inconvenience that an adhesive sheet is stuck in a state where air bubbles are interposed between the adherend and the adherend is, for example, a semiconductor wafer (hereinafter simply referred to as a semiconductor wafer). In the case of "wafer"), when the wafer is ground to a thickness of about 5 to 30 [mu] m from the opposite side of the circuit surface with the adhesive sheet protecting the circuit surface of the wafer, a pinch trace is formed. The thickness of the wafer in the region becomes thicker than that in other regions, and the thickness of the semiconductor device becomes non-uniform so that the quality deteriorates.

  The object of the present invention is to form a pinch mark on the adhesive sheet by positively applying tension to the adhesive sheet and sticking the adhesive sheet to an adherend while the pinching force is concentrated in one place. It is in providing the sheet sticking apparatus and sticking method which can prevent doing.

  The sheet sticking apparatus of the present invention is a sheet sticking apparatus for sticking an adhesive sheet to an adherend, and is repeated by a feed output applying means on the original fabric in which the adhesive sheet is temporarily attached to one surface of a strip-shaped release sheet. An output is provided, the feeding means for feeding the original fabric in a predetermined feeding direction, and provided on the upstream side in the feeding direction with respect to the feeding output giving means, and the original fabric is folded at the bent portion from the release sheet. A peeling means for peeling the adhesive sheet; a pressing means for pressing the adhesive sheet peeled by the peeling means against the adherend; and provided on the upstream side in the feeding direction from the bent portion of the peeling means, Tension applying means for applying a predetermined tension to the adhesive sheet pressed against the adherend by the pressing means without sandwiching the original fabric is provided.

In the sheet sticking device of the present invention, the tension applying unit abuts on one of the one side and the other side of the original fabric, and applies the predetermined tension to the adhesive sheet by a resistance applying unit. It is preferable that a tension applying member and a winding member that winds the original fabric around the tension applying member are provided.
In the sheet sticking device of the present invention, the tension applying means is provided so as to be able to change a relative position between the tension applying member and the winding member, and adjusts a winding length of the original fabric around the tension applying member. It is preferable that a winding length adjusting means is provided.

  The sheet sticking method of the present invention is a sheet sticking method for sticking an adhesive sheet to an adherend, and feeds out an original fabric in which the adhesive sheet is temporarily attached to one surface of a strip-shaped release sheet in a predetermined feeding direction. A step, a step of bending the unrolled original fabric to peel the adhesive sheet from the release sheet, a pressing step of pressing the peeled adhesive sheet against the adherend, and the sandwich without sandwiching the original fabric And a step of applying a predetermined tension to the adhesive sheet pressed against the adherend in the pressing step.

  According to the present invention as described above, since it does not continue to sandwich a part of the adhesive sheet on the original fabric, while actively applying tension to the adhesive sheet and sticking the adhesive sheet to the adherend, It is possible to prevent a pinch trace from being formed on the adhesive sheet by concentrating the pinching force at one place.

Also, if a tension applying member and a winding member are provided, the original fabric is wound around the tension applying member, and the adhesive force is applied to the adherend by reliably applying the resistance of the resistance applying means to the original fabric. Can do.
Further, if the winding length adjusting means is provided, the winding length of the raw material on the tension applying member can be easily adjusted, and an appropriate tension is applied to the adhesive sheet to attach the adhesive sheet to the adherend. Can be affixed to.

The side view of the sheet sticking apparatus which concerns on one Embodiment of this invention.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
In this embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis that is orthogonal to the predetermined plane. To do. Furthermore, in the present embodiment, when viewed from the front side in FIG. 1 parallel to the Y axis, when indicating the direction, “up” is the arrow direction of the Z axis and “down” is the opposite direction, “ The “left” is the arrow direction of the X axis, “right” is the opposite direction, “front” is the front direction in FIG. 1 parallel to the Y axis, and “rear” is the opposite direction.

  In FIG. 1, a sheet sticking device 10 is a device for sticking an adhesive sheet AS to a wafer WF as an adherend, and an original fabric RS in which the adhesive sheet AS is temporarily attached to one surface of a strip-like release sheet RL. The feed roller 24 as a feed output applying means is provided with a feed output, the feed means 20 for feeding out the original fabric RS in a predetermined feed direction, and provided upstream of the drive roller 24 in the feed direction. A peeling plate 30 as a peeling means for peeling the adhesive sheet AS from the peeling sheet RL by bending at the bent portion 30A, and a pressing roller 40 as a pressing means for pressing the adhesive sheet AS peeled by the peeling plate 30 against the wafer WF. And an adhesive sheet AS provided on the upstream side in the feeding direction from the bent portion 30A of the peeling plate 30 and pressed against the wafer WF by the pressing roller 40 without sandwiching the original fabric RS. And a tensioning means 50 for imparting tension, is disposed above the transport means 60 for relatively moving the wafer WF against the pressing roller 40.

  The feeding means 20 includes a support roller 21 that supports the original fabric RS, a guide roller 22 that guides the original fabric RS, a drive roller 24 that is driven by a rotation motor 23 as a drive device, and a drive roller 24. Are provided with a pinch roller 25 for sandwiching the release sheet RL and a recovery roller 26 for recovering the release sheet RL. The feed direction of the original fabric RS (hereinafter sometimes simply referred to as “feeding direction”) is a direction in which the original fabric RS is fed from the support roller 21 toward the collection roller 26.

The tension applying means 50 abuts on the surface on which the adhesive sheet AS, which is one surface of the original fabric RS, is temporarily attached, and is driven by a rotation motor 51 as a driving device as a resistance applying means. A tension applying roller 52 as a tension applying member for applying a predetermined tension to the sheet AS, a driven roller 53 as a winding member for winding the original fabric RS around the tension applying roller 52, a tension applying roller 52 and a driven roller 53 And a winding length adjusting means 54 that adjusts the winding length of the raw material RS around the tension applying roller 52. The rotation motor 51 is configured to be capable of at least one of torque control and speed control.
The winding length adjusting means 54 is supported by a rotating motor 54A as a driving device and an output shaft 54B of the rotating motor 54A, and a shaft 54C inserted into an arcuate insertion groove 27A formed in the frame 27. And an arm 54D that rotatably supports the driven roller 53.

  The transfer means 60 is supported by a slider 61A of a linear motor 61 as a drive device, and includes a table 62 having a support surface 62A capable of attracting and holding the wafer WF by a decompression means (not shown) such as a decompression pump or a vacuum ejector.

In the sheet sticking apparatus 10 described above, a procedure for sticking the adhesive sheet AS to the wafer WF will be described.
First, after the operator sets the original fabric RS as indicated by the solid line in FIG. 1 to the sheet sticking apparatus 10 in the state indicated by the solid line in FIG. A signal for starting automatic operation is input via an input means (not shown). Then, the tension applying means 50 drives the rotation motor 54A, rotates the output shaft 54B by a predetermined angle θ in the counterclockwise rotation direction, and changes the position of the driven roller 53 as indicated by a two-dot chain line in FIG. Thereby, the winding length of the raw fabric RS around the tension applying roller 52 is adjusted. Here, when the winding length of the original fabric RS around the tension applying roller 52 is increased, the frictional force of the original fabric RS with respect to the tension applying roller 52 increases, and tension is applied to the adhesive sheet AS pressed against the wafer WF. On the contrary, if the winding length is reduced, the frictional force of the raw material RS against the tension applying roller 52 is reduced, and it is difficult to apply tension to the adhesive sheet AS pressed against the wafer WF. . Note that the predetermined angle θ for rotating the output shaft 54B and the winding length of the raw material RS wound around the tension applying roller 52 can be arbitrarily determined by the operator, and the operator uses input means (not shown). To the sheet pasting apparatus 10. Next, the feeding means 20 and the tension applying means 50 drive the rotation motors 23 and 51, and the leading end portion AS1 of the leading adhesive sheet AS located on the peeling plate 30 is peeled by a predetermined length at the bent portion 30A. When this is detected by a detection means (not shown) such as an optical sensor or an imaging means, the feeding means 20 and the tension applying means 50 stop driving the rotation motors 23 and 51 and enter a standby state.

  Thereafter, when the wafer WF is placed on the support surface 62A of the table 62 at the initial position by a transfer means such as a manual or multi-joint robot or a belt conveyor, the transfer means 60 drives a decompression means (not shown) After attracting and holding the WF, the linear motor 61 is driven to move the table 62 in the left direction. Next, when detection means (not shown) such as an optical sensor or an imaging means detects that the wafer WF has reached a predetermined position, the feeding means 20 and the tension applying means 50 drive the rotation motors 23 and 51, and the table 62. The raw fabric RS is fed out in accordance with the moving speed. Then, when detecting that a leading end portion AS1 of the leading adhesive sheet AS is pressed and stuck to the wafer WF by the pressing roller 40 is detected by a detection unit (not shown) such as an optical sensor or an imaging unit, the feeding unit 20 The tension applying means 50 controls the torque of the rotating motor 51 and drives the original RS via the tension applying roller 52 while driving the rotating motor 23 so as to feed out the original RS according to the moving speed of the table 62. The tension applying roller 52 is rotated while maintaining the torque received from the pressure at a predetermined value. Thereby, a predetermined tension is applied to the adhesive sheet AS pressed against the wafer WF, and the adhesive sheet AS is attached to the wafer WF. Thereafter, when the detecting means (not shown) detects that the leading end AS1 of the adhesive sheet AS to be attached next time has been peeled off by the bent portion 30A for a predetermined length, the feeding means 20 and the tension applying means 50 rotate. The driving of the motors 23 and 51 is stopped, and the standby state is resumed.

  When the attachment of the adhesive sheet AS to the wafer WF is completed, the transfer unit 60 stops driving the linear motor 61 and the decompression unit (not shown), and then the transfer unit (not shown) transfers the wafer WF to the next process. Then, the transfer means 60 drives the linear motor 61 to return the table 62 to the initial position, and thereafter the same operation as described above is repeated.

  According to the embodiment as described above, since a part of the adhesive sheet AS on the raw fabric RS is not continuously sandwiched, tension is positively applied to the adhesive sheet AS and the adhesive sheet AS is attached to the wafer WF. However, it is possible to prevent a pinch mark from being formed on the adhesive sheet AS by concentrating the pinching force at one location.

  As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. In addition, the description of the shape, material, and the like disclosed above is exemplary for ease of understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of some or all of such restrictions is included in this invention.

  For example, the feeding means 20 may feed out the raw fabric RS temporarily attached on the release sheet RL with a predetermined interval between the adhesive sheets AS, or a closed loop cut is formed in the belt-like adhesive sheet base material. By doing so, the inner side may be an adhesive sheet AS, and the outer side may be an unnecessary sheet, and a plurality of adhesive sheets AS may be unrolled to a strip-shaped release sheet RL across an area between the adhesive sheets. In addition, when a raw material in which a belt-like adhesive sheet base material is temporarily attached to a belt-like release sheet RL is used, the adhesive sheet is cut by a cutting means such as a cutting blade, a laser cutter, a heat cutter, an air cutter, or a compressed water cutter. The base material may be cut into a predetermined shape, and a raw material may be formed in which a plurality of adhesive sheets AS are temporarily attached to the strip-shaped release sheet RL at a predetermined interval.

The peeling means may be composed of a round bar or a roller.
The pressing means may be a pressing member such as a round bar, blade material, rubber, resin, sponge, or the like, or may be configured to press the adhesive sheet AS against the adherend by air spraying.

The tension applying means 50 controls the speed of the rotating motor 51, and drives the tension applying roller 52 at a speed slower than the speed at which the feeding means 20 feeds the original fabric RS in accordance with the moving speed of the table 62, or the original fabric. Even if a predetermined tension is applied to the adhesive sheet AS pressed against the wafer WF by driving the tension applying roller 52 in a direction opposite to the RS feeding direction (in the case of FIG. 1, a counterclockwise rotation direction). Alternatively, a predetermined tension may be applied to the adhesive sheet AS pressed against the wafer WF by both torque control and speed control.
The tension applying means 50 makes the tension applying roller 52 come into contact with the surface on which the adhesive sheet AS that is the other surface of the original RS is not temporarily attached, or one surface of the original RS and the other surface. The tension applying roller 52 may be brought into contact with both surfaces to apply a predetermined tension to the adhesive sheet AS pressed against the wafer WF.
The tension applying means 50 is provided with a braking means such as a sliding resistor or a powder brake that applies resistance to the rotation of the tension applying roller 52 as the resistance applying means, or at least one of the one surface and the other surface of the original fabric RS. It is good also as a structure which gives predetermined | prescribed tension | tensile_strength to the adhesive sheet AS currently pressed by the wafer WF by spraying gas on one surface.
The tension applying means 50 forms a pass line of the original fabric RS indicated by a two-dot chain line in FIG. 1 by blowing gas on one surface of the original fabric RS and also blowing gas on the other surface of the original fabric RS. Then, a predetermined tension may be applied to the adhesive sheet AS pressed against the wafer WF.
The tension applying unit 50 may apply resistance to the rotation of the driven roller 53 by the resistance applying unit.
The tension applying means 50 is provided with a tension detecting means such as a pressure sensor or a load cell that detects the tension of the adhesive sheet AS pressed against the wafer WF, and performs torque control and speed control based on the detection result of the tension detecting means. Or the winding length adjusting means 54 may adjust the winding length of the raw material RS on the tension applying roller 52 to adjust the tension in real time.
The tension applying unit 50 may apply tension to the release sheet RL with the tension applying roller 52 without providing the winding length adjusting unit 54. In this case, for example, the driven roller 53 may be arranged at a position indicated by a two-dot chain line in FIG. 1, or the driven roller 53 may not be employed.
The tension applying means 50 may constitute a tension applying member or a winding member with a round bar or a blade material.
The tension applying roller 52 may be provided with a resistance increasing means such as a concavo-convex member, an adhesive, a pressure-sensitive adhesive, and suction on the surface thereof to increase the resistance to the original fabric RS.

The winding length adjusting means 54, for example, supports the driven roller 53 with a slider of a linear motor as a driving device, and moves the driven roller 53 in a direction crossing the feeding direction of the original fabric RS, or guides it with an arm 54D. The roller 22 may be supported and the guide roller 22 may be rotated with respect to the tension applying roller 52, or the positions of the driven roller 53 and the guide roller 22 may be changed manually to It is good also as a structure which adjusts the winding length of anti- RS.
The winding length adjusting means 54 keeps the driven roller 53 incapable of moving, and moves the tension applying roller 52 or moves both the tension applying roller 52 and the driven roller 53 to move the original material to the tension applying roller 52. The winding length of the RS may be adjusted.
The winding length adjusting means 54 may be configured to adjust the winding length of the original fabric RS on the tension applying roller 52 by blowing gas to the original fabric RS instead of the driven roller 53.

The transfer means 60 may be configured to support the adherend by chuck means such as a mechanical chuck or a chuck cylinder, coulomb force, adhesive, adhesive, magnetic force, Bernoulli adsorption, or the like.
The transfer means 60 may move the sheet sticking apparatus 10 while fixing the position of the table 62, or may move both the table 62 and the sheet sticking apparatus 10.
When the wafer WF is moved relative to the sheet pasting apparatus 10 by another apparatus, the transfer means 60 may not be provided.

  The sheet affixing device 10 affixes a band-shaped adhesive sheet base material to the wafer WF, and then adheres the adhesive sheet base material to a predetermined shape by a cutting means such as a cutting blade, a laser cutter, a heat cutter, an air cutter, or a compressed water cutter. The sheet AS may be cut.

  Further, the material, type, shape and the like of the adhesive sheet AS and the adherend in the present invention are not particularly limited. For example, the adhesive sheet AS may be a circle, an ellipse, a polygon such as a triangle or a quadrangle, or other shapes, or may be of an adhesive form such as pressure sensitive adhesive or heat sensitive adhesive, When the heat-sensitive adhesive sheet AS is employed, it may be bonded by an appropriate method such as providing an appropriate coil heater for heating the adhesive sheet or a heating means such as a heat pipe. Such an adhesive sheet AS is, for example, a single layer having only an adhesive layer, an intermediate layer between the base sheet and the adhesive layer, a cover layer on the upper surface of the base sheet, etc. Three or more layers, or a so-called double-sided adhesive sheet that can peel the base sheet from the adhesive layer may be used. The double-sided adhesive sheet comprises a single-layer or multi-layer intermediate layer. It may be a single layer or a multilayer having no intermediate layer. Examples of the adherend include, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit board, information recording substrates such as optical disks, glass plates, steel plates, ceramics, wood plates or resin plates, Arbitrary forms of members and articles can also be targeted. In addition, the adhesive sheet AS is replaced with a functional and intended reading, for example, any information label, decorative label, protective sheet, dicing tape, die attach film, die bonding tape, recording layer forming resin sheet, etc. Arbitrary sheets, films, tapes and the like can be attached to any adherend as described above.

The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described with respect to those means and steps. The process is not limited at all. For example, as long as the feeding means applies a feeding force by the feeding output imparting means to the original fabric in which the adhesive sheet is temporarily attached to one surface of the strip-shaped release sheet, and feeds the original fabric in a predetermined feeding direction. There is no limitation as long as it is within the technical scope in light of the common general technical knowledge at the time of filing (explanation of other means and steps is omitted).
The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single axis robot, an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

DESCRIPTION OF SYMBOLS 10 Sheet sticking apparatus 20 Feeding means 24 Drive roller (Feeding output provision means)
30 Peeling plate (peeling means)
30A bent part 40 pressure roller (pressing means)
50 Tension applying means 51 Rotating motor (resistance applying means)
52 Tension applying roller (tension applying member)
53 Followed roller (winding member)
54 Winding Length Adjustment Means AS Adhesive Sheet RL Release Sheet RS Original WF Wafer (Substrate)

Claims (4)

A sheet sticking device for sticking an adhesive sheet to an adherend,
A feeding means that feeds the original fabric with the adhesive sheet temporarily attached to one surface of the strip-shaped release sheet by the feeding output imparting means, and feeds the original fabric in a predetermined feeding direction;
A peeling means provided on the upstream side in the feeding direction from the feeding output giving means, and bending the original fabric at its bent portion to peel the adhesive sheet from the peeling sheet;
A pressing means for pressing the adhesive sheet peeled off by the peeling means against the adherend;
Tension application that provides a predetermined tension to the adhesive sheet that is provided on the upstream side in the feeding direction from the bent portion of the peeling unit and is pressed against the adherend by the pressing unit without sandwiching the original fabric. Means for attaching a sheet. The tension applying means includes
A tension applying member that abuts on one of the one side and the other side of the original fabric and applies the predetermined tension to the adhesive sheet by a resistance applying unit;
The sheet sticking apparatus according to claim 1, further comprising a winding member that winds the original fabric around the tension applying member.   The tension applying unit includes a winding length adjusting unit that is provided so as to be able to change a relative position between the tension applying member and the winding member, and that adjusts a winding length of the raw material around the tension applying member. The sheet sticking device according to claim 2, wherein the sheet sticking device is provided. A sheet sticking method for sticking an adhesive sheet to an adherend,
A step of feeding out an original fabric in which the adhesive sheet is temporarily attached to one surface of a strip-shaped release sheet in a predetermined feeding direction;
Bending the unrolled original fabric and peeling the adhesive sheet from the release sheet;
A pressing step of pressing the peeled adhesive sheet against the adherend;
And a step of applying a predetermined tension to the adhesive sheet that is pressed against the adherend in the pressing step without sandwiching the original fabric.

Images