JP7064891B2 - Sheet pasting device and sheet pasting method - Google Patents

Description

The present invention relates to a sheet pasting device and a sheet pasting method.

Conventionally, a sheet affixing device for affixing an adhesive sheet to an adherend is known (see, for example, Patent Document 1).

Japanese Unexamined Patent Publication No. 10-3330022

However, in the conventional semiconductor wafer protective film affixing device (sheet affixing device) described in Patent Document 1, the chuck 135 (sheet tip holding means) faces the adherend surface of the wafer W (adhesive body). ), Then the protective film 109 (adhesive sheet) is pulled out from the supply reel 101 (supporting means), and then the adhesive sheet is pressed against the adherend by the press roller 107 (pressing means) to be attached. Considering the conditions for attaching the sheet and the characteristics and composition of the adhesive sheet and the adherend, etc., it is not possible to apply the sheets suitable for those conditions, characteristics, composition, etc., resulting in inconvenience of inferior versatility. do.

An object of the present invention is to provide a sheet pasting device and a sheet pasting method capable of improving versatility.

The present invention has adopted the configuration described in the claims.

According to the present invention, since the control means identifies and executes one pasting mode from a plurality of pasting modes, versatility can be improved.

Explanatory drawing of the sheet sticking apparatus which concerns on embodiment of this invention.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
The X-axis, Y-axis, and Z-axis in the present embodiment are orthogonal to each other, the X-axis and the Y-axis are axes in a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. do. Further, in the present embodiment, "up" is "down" in the direction of the arrow on the Z axis when the direction is shown without specifying the figure, based on the case of viewing from the front direction in FIG. 1 parallel to the Y axis. Is the opposite direction, "left" is the arrow direction of the X axis, "right" is the opposite direction, "front" is the middle front direction parallel to the Y axis, and "rear" is the opposite direction. In addition, all the figures other than FIG. 1 (A) in which the arrow indicating the direction is not described are views viewed from the same direction as in FIG. 1 (A).

The sheet sticking device EA of the present invention adheres the adhesive sheet supporting means 10 for pulling out the adhesive sheet AS, the sheet tip holding means 20 for holding the adhesive sheet AS sticking tip AS1, and the adhesive sheet AS. A pressing means 30 that presses and attaches to the body WK, a cutting means 40 that cuts the adhesive sheet AS, and a control means 50 that controls each means are provided, and the adherend WK is moved relative to the adhesive sheet supporting means 10. It is arranged above the adherend supporting means 60.

The adhesive sheet supporting means 10 is supported by a support roller 11 that supports the original fabric RS on which the band-shaped adhesive sheet AS is temporarily attached on the band-shaped release sheet RL, and an output shaft (not shown) of the rotary motor 12A as a drive device. A drive roller 12 that sandwiches the original fabric RS with a pinch roller 12B, a moving roller 13 that is rotatably supported by a slider 13B of a linear motor 13A as a drive device, and a guide roller 14 that guides the original fabric RS. The release sheet is supported by a release roller 15 as a release means for peeling the adhesive sheet AS from the release sheet RL by folding back the release sheet RL, and an output shaft (not shown) of the rotary motor 16A as a drive device, and the release sheet is formed by a pinch roller 16B. A recovery roller 17 and a release roller 15 that are supported by a drive roller 16 that sandwiches the RL and an output shaft of a drive device (not shown) and that constantly applies a predetermined tension to the release sheet RL that exists between the pinch roller 16B and collects the release sheet RL. It is provided with a guide roller 18 for guiding the peeling sheet RL peeled off from the adhesive sheet AS.

The seat tip holding means 20 is illustrated by a linear motor 21 as a drive device, a linear motor 22 as a drive device supported by the slider 21A, and a pressure reducing pump, a vacuum ejector, etc. supported by the output shaft 22A. It is provided with a base material side support member 23 having a base material side support surface 23A that can be adsorbed and held by a depressurizing means (holding means).

The pressing means 30 includes a linear motor 21 shared with the seat tip holding means 20, a linear motor 31 as a drive device supported by the slider 21A, and a pressing member rotatably supported by the output shaft 31A. It is provided with a pressing roller 32 of.

The cutting means 40 includes an air cylinder 41 as a drive device supported by the base material side support member 23, and a cutting blade 42 as a cutting member supported by the output shaft 41A thereof.

The control means 50 includes a control device 51 such as a sequencer or a personal computer, and is connected to each means constituting the sheet sticking device EA, an adherend support means 60, or the like by a communication medium such as electricity or radio waves. It is provided so that the operation can be controlled.
With such a configuration, the control means 50 pulls out the adhesive sheet AS from the adhesive sheet supporting means 10 by the sheet tip holding means 20 so as to face the adherend surface WK1 of the adherend WK, and then presses the means 30. In the first sticking mode in which the adhesive sheet AS is pressed against the adherend WK and affixed, the adherend support means 60 is made to support the adhesive sheet AS by the sheet tip holding means 20, and the adhesive sheet AS is supported by the adhesive sheet AS. The first sticking mode or the second sticking mode is specified from a plurality of sticking modes including the second sticking mode in which the adhesive sheet AS is pressed against the adherend WK by the pressing means 30 while being pulled out from the means 10. It is designed to run.

The adherend support means 60 includes a linear motor 61 as a drive device and a support table 62 supported by the slider 61A thereof. The support table 62 surrounds the adherend support surface 62A capable of supporting the adherend WK by a decompression means (holding means) (not shown) such as a decompression pump or a vacuum ejector, and the adherend support surface 62A. A decompression means (holding means) (not shown) such as a decompression pump or a vacuum ejector forms an adhesive surface side support surface 62B capable of supporting the adhesive surface side of the adhesive sheet AS, and the adhesive surface side support surface 62B is formed on the adhesive surface side support surface 62B. A non-adhesive treatment is applied so that the adhesive sheet AS does not adhere.

The operation of the above sheet pasting device EA will be described.
First, for the sheet sticking device EA in which each member is arranged at the initial position shown by the solid line in FIG. 1, the user of the sheet sticking device EA (hereinafter, simply referred to as “user”) is the original fabric RS as shown in the figure. After setting, the first sticking mode is selected via an operation means (not shown) such as an operation panel or a personal computer, and when a signal for starting automatic operation is input to the control means 50, the sheet sticking device EA controls the control means 50. The adhesive sheet AS is attached to the adherend WK by the following first attachment mode.
That is, in the first sticking mode, the sheet tip holding means 20 drives a decompression means (not shown) to start suction holding of the sticking tip AS1 of the adhesive sheet AS on the base material side support surface 23A. Next, when the user or a transport means (not shown) such as an articulated robot or a belt conveyor places the adherend WK on the support table 62 as shown in FIG. 1 (A), the adherend support means 60 is used. A depressurizing means (not shown) is driven to start adsorbing and holding the adherend WK on the adherend support surface 62A.

After that, the adherend supporting means 60 drives the linear motor 61 to move the support table 62 to the left, and as shown by the two-dot chain line in FIG. 1 (A), the left side of the adhesive surface side support surface 62B is. When it reaches directly below the base material side support surface 23A, after stopping the driving of the linear motor 61, the sheet tip holding means 20 drives the linear motion motor 22 to lower the base material side support member 23 to lower the base material side. The sticking tip portion AS1 of the adhesive sheet AS is sandwiched between the support surface 23A and the left side of the adhesive surface side support surface 62B. Next, the adhesive sheet supporting means 10, the sheet tip holding means 20, and the adherend supporting means 60 drive the rotary motors 12A, 16A, the linear motors 21, 61, and the speed at which the support table 62 is moved to the left. At the same time, while moving the slider 21A to the left, the original fabric RS is fed out from the support roller 11. As a result, the adhesive sheet AS from which the release sheet RL has been peeled off is pulled out by the release roller 15, and the adhesive surface of the adhesive sheet AS becomes the adherend surface WK1 as shown by the solid line in FIG. 1 (B) [B-1]. When they are arranged to face each other, the adhesive sheet supporting means 10, the sheet tip holding means 20, and the adherend supporting means 60 stop driving the rotary motors 12A and 16A and the linear motors 21 and 61.

Then, the pressing means 30 drives the linear motion motor 31, and as shown by the solid line in FIG. 1B [B-1], the pressing roller 32 is lowered to attach the adhesive sheet AS to the left of the adhesive surface side support surface 62B. After pressing toward the side, the sheet tip holding means 20 stops driving the decompression means (not shown) to drive the linear motion motor 22 and raise the base material side support member 23. Next, with the adhesive sheet supporting means 10 locking the drive of the rotary motor 12A, the pressing means 30 drives the linear motor 21, and as shown by the two-dot chain line in FIG. 1 (B) [B-1], The slider 21A is returned to the initial position, and the adhesive sheet AS is pressed and attached to the adherend surface WK1 of the adherend WK. At this time, the adhesive sheet supporting means 10 drives the linear motor 13A to move the moving roller 13 left and right so that a predetermined tension is applied to the adhesive sheet AS attached to the adherend WK.

After that, the sheet tip holding means 20 drives the linear motion motor 22, lowers the base material side support member 23, brings the base material side support surface 23A into contact with the adhesive sheet AS, and then drives the decompression means (not shown). Then, the adsorption and holding of the adhesive sheet AS on the support surface 23A on the base material side is started. Next, the cutting means 40 drives the air cylinder 41, and as shown by the solid line in FIG. 1C, the cutting blade 42 is moved up and down to cut the adhesive sheet AS, and then the sheet tip holding means 20 and the pressing means 30 drives the linear motion motors 22 and 31 to return the base material side support member 23 and the pressing roller 32 that have attracted and held the new adhesive sheet AS's new attachment tip portion AS1 on the base material side support surface 23A to the initial positions.

Then, after the adherend supporting means 60 stops driving the decompression means (not shown) and releases the adsorption and holding of the adherend WK on the adherend support surface 62A, the user or the transporting means (not shown) uses the adhesive sheet. The adherend WK to which AS is attached is transported to the next step. Next, the adherend supporting means 60 drives the linear motor 61 to return the support table 62 to the initial position, and thereafter, the operation of attaching the adhesive sheet AS to the adherend WK by the same first attachment mode as described above is repeated. ..
The above-mentioned first sticking mode is effective when the adhesive sheet AS is attached without applying tension as much as possible, or when the adhesive sheet AS is attached with even tension applied, for example, tension. It is possible to prevent the inconvenience that the ultra-thin adherend WK to which the adhesive sheet AS is attached is warped due to the internal stress of the adhesive sheet AS.

On the other hand, when the user selects the second sticking mode via an operation means (not shown) and inputs the signal for starting automatic operation to the control means 50, the sheet sticking device EA is subjected to the following second sticking mode by the control means 50. The adhesive sheet AS is attached to the adherend WK.
That is, in the second sticking mode, the same operation as in the first sticking mode is performed, and as shown by the alternate long and short dash line in FIG. 1, the adhesive sheet AS is formed on the left side of the base material side support surface 23A and the adhesive surface side support surface 62B. The sticking tip portion AS1 of is sandwiched. After that, the pressing means 30 drives the linear motion motor 31 to lower the pressing roller 32 to press the adhesive sheet AS to the left of the adhesive surface side support surface 62B, and then the sheet tip holding means 20 is a depressurizing means (not shown). The drive is stopped to drive the linear motion motor 22, and the base material side support member 23 is returned to the initial position.

Next, the adhesive sheet supporting means 10 and the adherend supporting means 60 drive the rotary motors 12A, 16A and the linear motor 61, and the original fabric RS is adjusted from the support roller 11 to the speed at which the support table 62 is moved to the left. To pay out. As a result, while the adhesive sheet AS from which the release sheet RL has been peeled off is pulled out by the release roller 15, the adherend WK is pressed by the pressing roller 32 as shown by the solid line in FIG. 1 (B) [B-2]. It is attached to the adherend surface WK1. At this time as well, as in the first sticking mode, the adhesive sheet supporting means 10 drives the linear motor 13A, and the moving rollers 13 are moved to the left and right so that a predetermined tension is applied to the adhesive sheet AS attached to the adherend WK. Move to.

Then, when the right side of the adhesive surface side support surface 62B reaches directly below the base material side support surface 23A, the adhesive sheet support means 10 and the adherend support means 60 drive the rotary motors 12A, 16A and the linear motor 61. After stopping, the sheet tip holding means 20 drives the linear motor 22 to lower the base material side support member 23 and bring the base material side support surface 23A into contact with the adhesive sheet AS. Next, the sheet tip holding means 20 drives a depressurizing means (not shown) to start suction holding of the adhesive sheet AS on the base material side support surface 23A, and then the cutting means 40 drives the air cylinder 41. C) As shown by the solid line, the cutting blade 42 is moved up and down to cut the adhesive sheet AS. After that, the sheet tip holding means 20 and the pressing means 30 drive the linear motion motors 22 and 31, and the base material side support member 23 sucks and holds the new sticking tip portion AS1 of the adhesive sheet AS on the base material side support surface 23A. After returning the pressing roller 32 to the initial position, the adherend supporting means 60 stops driving the depressurizing means (not shown) to release the suction holding of the adherend WK on the adherend support surface 62A. Next, after the user or a transporting means (not shown) transports the adherend WK to which the adhesive sheet AS is attached to the next step, the adherend supporting means 60 drives the linear motor 61 to initially set the support table 62. After returning to the position, the operation of attaching the adhesive sheet AS to the adherend WK by the same second attachment mode as described above is repeated.
The above second attachment mode is effective when the adhesive sheet AS is quickly attached to the adherend WK, or when the adhesive sheet AS and the adherend WK are attached without mixing air bubbles or dust. For example, when it is desired to attach a large number of adhesive sheet AS to the adherend WK per unit time, the adhesive sheet AS can be attached according to the request.

According to the above embodiment, since the control means 50 identifies and executes one sticking mode from the plurality of sticking modes, the versatility can be improved.

The means and processes in the present invention are not limited as long as they can perform the operations, functions or processes described for the means and processes, much less the constituents of the mere embodiment shown in the above-described embodiment. It is not limited to the process at all. For example, the adhesive sheet supporting means is not limited as long as it can pull out and support the adhesive sheet, as long as it is within the technical range in light of the common general technical knowledge at the time of filing.

The adhesive sheet supporting means 10 supports the fan-folded original fabric RS by supporting it from below instead of the wound original fabric RS and supports it so that it can be fed out, and the adhesive sheet AS that is not temporarily attached to the release sheet RL. May be supported so as to be able to be pulled out, or the rotary motor 12A and the linear motor 13A may not be provided.

In the first sticking mode, the sheet tip holding means 20 moves only the base material side support member 23 holding the sticking tip AS1 of the adhesive sheet AS, or the sticking tip of the adhesive sheet AS with the base material side support member 23. The adhesive surface of the adhesive sheet AS may be arranged to face the adherend surface WK1 by moving only the support table 62 holding the portion AS1.

The pressing means 30 may move the pressing roller 32 in the left-right direction by adopting a drive device independent of the seat tip holding means 20 without sharing the linear motor 21 with the seat tip holding means 20. When sandwiching the sticking tip AS1 of the adhesive sheet AS with the support table 62 in the first sticking mode or the second sticking mode, it may be sandwiched by the pressing roller 32. In such a configuration, the sheet tip holding means 20 may be sandwiched. The pressing means 30 can also be used as the sheet tip holding means without adopting the linear motor 22 or the base material side support member 23.

The cutting means 40 may not be supported by the sheet tip holding means 20, or the adhesive sheet AS may be moved to cut the adhesive sheet AS without or while moving the cutting blade 42. However, the adhesive sheet AS may be cut along the outer edge of the adherend WK, or may not be provided in the sheet attaching device EA of the present invention.

The control means 50 is, for example, pasted in the first sticking mode halfway through the adherend surface WK1 and then pasted in the second sticking mode, or is pasted halfway through the adherend surface WK1 in the second sticking mode and then first. Other sticking modes such as sticking in the sticking mode may be specified and executed, or other sticking such as spotting the adhesive sheet AS on the adherend surface WK1 by the sheet tip holding means 20 or the pressing means 30. The mode may be specified and executed, and any pasting mode may be provided other than the first and second pasting modes.

The adherend supporting means 60 may attach the adhesive sheet AS to the adherend WK by moving another object without or while moving the adherend WK, or the sheet attachment of the present invention. It may be provided as a constituent member of the device EA, or may not be provided in the sheet attaching device EA of the present invention when the adherend WK is relatively moved with the adhesive sheet supporting means 10 by another device.

In the above-described embodiment, the sheet sticking device EA selects the first sticking mode or the second sticking mode from a plurality of sticking modes including the first sticking mode and the second sticking mode, and the control means 50 selects the sheet sticking device EA. An example of specifying and executing the pasted sticking mode is shown. For example, an imaging means such as a camera or a projector, an optical sensor, an ultrasonic sensor, a temperature sensor, a pressure sensor, a length measuring sensor, a weight sensor, or an illuminance sensor is shown. , Various sensors such as sound sensors, etc., which are not shown, detect the characteristics, characteristics, properties, materials, composition, composition, shape, dimensions, weight, atmosphere conditions, etc. of the adhesive sheet AS and the adherend WK. , The control means 50 selects the first sticking mode or the second sticking mode from a plurality of sticking modes including the first sticking mode and the second sticking mode according to the detection result, and the control means 50 is selected. You may specify the pasting mode and execute it.
The sheet attaching device EA may be arranged upside down or arranged sideways to attach the adhesive sheet AS to the adherend WK.

The materials, types, shapes, etc. of the adhesive sheet AS and the adherend WK in the present invention are not particularly limited. For example, the adhesive sheet AS may have a circular shape, an elliptical shape, a polygonal shape such as a triangle or a square, or any other shape, or may have an adhesive form such as pressure-sensitive adhesiveness or heat-sensitive adhesiveness. When the heat-sensitive adhesive sheet AS is adopted, it may be adhered by an appropriate method such as providing an appropriate coil heater for heating the adhesive sheet AS or a heating means such as a heating side of a heat pipe. Further, such an adhesive sheet AS has three layers, for example, a single layer having only an adhesive layer, an intermediate layer between a base material and an adhesive layer, and a cover layer on the upper surface of the base material. Further, it may be a so-called double-sided adhesive sheet capable of peeling the base material from the adhesive layer, and the double-sided adhesive sheet may have a single-layer or multi-layer intermediate layer. It may be a single layer or a multi-layer without an intermediate layer. The adherend WK includes, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit boards, information recording boards such as optical disks, glass plates, steel plates, pottery, wood plates or resins. It may be a single substance or a composite product formed of two or more of them, and any form of a member or an article can be targeted. The adhesive sheet AS may be read in a functional and versatile manner, and may be, for example, an information description label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, a recording layer forming resin sheet, or the like. Sheets, films, tapes, etc. may be used.

The drive device in the above embodiment is an electric device such as a rotary motor, a linear motor, a linear motor, a single-axis robot, an articulated robot having two-axis or three-axis or more joints, an air cylinder, a hydraulic cylinder, and a rodless. Actuators such as cylinders and rotary cylinders can be adopted, and those in which they are directly or indirectly combined can also be adopted.
In the above embodiment, when a rotating member such as a roller is adopted, a driving device for rotationally driving the rotating member may be provided, or the surface of the rotating member or the rotating member itself can be deformed by rubber, resin, or the like. It may be composed of a member, the surface of the rotating member or the rotating member itself may be composed of a member that does not deform, or another member such as a shaft or a blade that rotates or does not rotate may be adopted instead of the roller. Alternatively, when a pressing means such as a pressing roller or a pressing head or a pressing member that presses a pressed object is adopted, a roller, a round bar, or a blade may be used in place of or in combination with the above-exemplified ones. A member such as a material, rubber, resin, or sponge may be adopted, or a configuration may be adopted in which the material is pressed by spraying a gas such as air or gas, or the material to be pressed is a deformable member such as rubber or resin. It may be composed of a member that does not deform, or if a peeling means such as a peeling plate or a peeling roller or a peeling member that peels off an object to be peeled is adopted, it is exemplified above. A plate-shaped member, a round bar, a roller, or the like may be adopted in place of or in combination with the one, or the peelable member may be composed of a deformable member such as rubber or resin, or may be deformed. It may be composed of a member that does not support, or if a member that supports or holds a supported member such as a support (holding) means or a support (holding) member is adopted, a gripping means such as a mechanical chuck or a chuck cylinder, or a Coulomb. A configuration may be adopted in which the supported member is supported (held) by force, an adhesive (adhesive sheet, adhesive tape), an adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, drive equipment, or the like. However, if a cutting means, a cutting member, or the like that cuts the cut member or forms a cut or a cutting line in the cut member is adopted, the cutter may be used in place of or in combination with the above-exemplified one. Use a blade, laser cutter, ion beam, thermal power, heat, water pressure, heating wire, spraying gas or liquid, etc., or move the one that cuts with a combination of appropriate drive equipment. You may try to cut it.

EA ... Sheet sticking device 10 ... Adhesive sheet supporting means 20 ... Sheet tip holding means 30 ... Pressing means 50 ... Control means 60 ... Adhesive supporting means AS ... Adhesive sheet WK ... Adhesive body WK1 ... Adhesive surface

Claims (2)

Adhesive sheet support means that supports the adhesive sheet so that it can be pulled out,
A sheet tip holding means for holding the adhesive sheet sticking tip and
A pressing means for pressing and attaching the adhesive sheet to the adherend,
A control means for controlling each of the above means is provided.
When the adhesive sheet is attached to the adherend, the control means uses the sheet tip holding means to adhere the adhesive sheet by the size of the adherent surface so as to face the adherend surface of the adherend. After pulling out the sheet from the adhesive sheet supporting means, the first sticking mode in which the adhesive sheet is pressed and attached to the adherend by the pressing means, and the adherend is moved relative to the adhesive sheet supporting means. The adherend supporting means is made to support the adhesive sheet by the sheet tip holding means, and while the adhesive sheet is pulled out from the adhesive sheet supporting means, the adhesive sheet is pressed against the adherend by the pressing means. A sheet pasting device characterized in that it is possible to specify and execute only one of the first sticking mode and the second sticking mode from a plurality of sticking modes including a second sticking mode for sticking. When attaching the adhesive sheet to the adherend, the adhesive sheet corresponding to the size of the adherend surface is pulled out so as to face the adherend surface of the adherend , and then the adhesive sheet is attached to the adherend. The adhesive sheet is pulled out by supporting the adhesive sheet by the first attachment mode in which the adhesive sheet is pressed and attached, and the adherend support means that moves the adherend relative to the adhesive sheet support means that supports the adhesive sheet. At the same time, only one of the first sticking mode and the second sticking mode is specified and executed from a plurality of sticking modes including the second sticking mode in which the adhesive sheet is pressed against the adherend to be stuck. How to attach the sheet.

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