JP6990592B2 - Sheet peeling device and sheet peeling method - Google Patents

Description

The present invention relates to a sheet peeling device and a sheet peeling method.

Conventionally, a sheet peeling device that holds the peeling tip of an adhesive sheet with an adhesive sheet holding member, peels the adhesive sheet from an adherend, and attaches the peeled rear end of the peeled adhesive sheet to the previously peeled adhesive sheet. Is known (see, for example, Patent Document 1).

Japanese Unexamined Patent Publication No. 2013-219087

However, in the conventional protective tape peeling device (sheet peeling device) as described in Patent Document 1, in order to attach the peeled protective tape PT (adhesive sheet) to the previously peeled adhesive sheet, an adhesive tape AT or an adhesive is used. Since the adhesive member such as the agent is attached to the adhesive sheet attached to the wafer W (adhesive body), there is an inconvenience that the adherend is damaged.

An object of the present invention is a sheet peeling device and a sheet peeling method capable of attaching the peeled rear end portion of the peeled adhesive sheet to the previously peeled adhesive sheet without damaging the adherend to which the adhesive sheet is attached. Is to provide.

The present invention has adopted the configuration described in the claims.

According to the present invention, since the peeled rear end portion of the adhesive sheet after being peeled from the adherend is attached to the pre-peeled adhesive sheet by welding, the adherend to which the adhesive sheet is attached is not damaged. The peeled rear end of the peeled adhesive sheet can be attached to the previously peeled adhesive sheet.
In addition, since the peeled rear end of the adhesive sheet after being peeled from the adherend is attached to the pre-peeled adhesive sheet with a stapler, the peeled adhesive sheet is not damaged to the adherend to which the adhesive sheet is attached. The rear end of the peeling can be attached to the previously peeled adhesive sheet.
Further, since the adhesive member is attached to at least one of the peeled rear end portion of the adhesive sheet after being peeled from the adherend and the peeled rear end portion of the first peeled adhesive sheet, the adherend to which the adhesive sheet is attached is attached. The peeled rear end of the peeled adhesive sheet can be attached to the previously peeled adhesive sheet without damaging the peeled adhesive sheet.

(A) to (C) are explanatory views of the sheet peeling apparatus which concerns on embodiment of this invention. (A) to (C) are explanatory views of the sheet peeling apparatus which concerns on the modification of this invention.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
The X-axis, Y-axis, and Z-axis in the present embodiment are orthogonal to each other, the X-axis and the Y-axis are axes in a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. do. Further, in the present embodiment, "up" is "down" in the direction of the arrow on the Z axis when the direction is shown without specifying the figure, based on the case of viewing from the front direction in FIG. 1 parallel to the Y axis. Is the opposite direction, "left" is the arrow direction of the X axis, "right" is the opposite direction, "front" is the middle front direction parallel to the Y axis, and "rear" is the opposite direction. In addition, all the figures other than FIG. 1 (A) in which the arrow indicating the direction is not described are views viewed from the same direction as in FIG. 1 (A).

The sheet peeling device EA of the present invention includes an adhesive sheet holding means 10 for holding the peeling tip ASF of the adhesive sheet AS attached to the adherend WK with a peeling tape PT as an adhesive sheet holding member, and an adherend WK. And the peeling tape PT are relatively moved, and the adhesive sheet AS is peeled from the adherend WK from the peeling tip ASF of the adhesive sheet AS toward the peeling rear end ASR, and is covered by the peeling means 20. The peeling rear end attachment means 30 which first peels the peeled rear end ASR of the adhesive sheet AS peeled from the body WK by the peeling means 20 and attaches it to the peeling adhesive sheet ASB held by the peeling tape PT. And is arranged below the adherend supporting means 40 that supports the adherend WK.

The adhesive sheet holding means 10 includes a support roller 11 that is supported by an output shaft (not shown) of the rotary motor 11A as a drive device to support the peeling tape PT, a guide roller 12 that guides the peeling tape PT, and a peeling means. A linear motor 13 as a drive device supported by the moving plate 22 of 20 and a pressing member as a pressing means supported by the output shaft 13A and heated by a heating means 14A such as a coil heater or a heating side of a heat pipe. A collection roller 15 is provided, which is supported by an output shaft (not shown) of the rotation motor 15A and collects the peeling tape PT.

The peeling means 20 includes a moving plate 22 supported by a slider 21A of a linear motor 21 as a driving device, a guide roller 23 for guiding the peeling tape PT, and a rotating motor as a driving device supported by the moving plate 22. It includes a drive roller 24 that is supported by an output shaft (not shown) and sandwiches the peeling tape PT with the pinch roller 25.

The peeling rear end attachment means 30 includes a welding means 31 for welding the peeling rear end ASR of the adhesive sheet AS after being peeled from the adherend WK to the first peeling adhesive sheet ASB.
The welding means 31 applies ultrasonic waves to the linear motor 31A supported by the moving plate 22, the pressing member 31C supported by the slider 31B, and the adhesive sheet AS or the like sandwiched between the receiving member 31D, and the pressing member 31C. It is provided with an ultrasonic wave application means (not shown) capable of welding adhesive sheets to each other. The peeling rear end attachment means 30 can also attach the peeling rear end ASR of the adhesive sheet AS to the peeling tape PT.

The adherend support means 40 has a linear motor 41 as a drive device and a support surface 42A supported by the slider 41A and capable of suction holding by a decompression means as a holding means (not shown) such as a decompression pump or a vacuum ejector. The support table 42 and the like are provided.

The peeling operation of the above sheet peeling device EA will be described.
In this operation description, the first peeling operation is performed first by the same peeling operation as described below, and the adhesive sheet AS peeled from the adherend WK becomes the first peeling adhesive sheet ASB and is supported by the peeling tape PT. Each member of the sheet peeling device EA stands by at the initial position shown by the solid line in FIG. 1 (A). Then, as shown by the solid line in FIG. 1 (A), the user of the sheet peeling device EA (hereinafter, simply referred to as “user”) or the transport means (not shown) such as a drive device or a conveyor is attached with the adhesive sheet AS. When the attached adherend WK is brought into contact with the support surface 42A of the support table 42, the adherend support means 40 drives a decompression means (not shown) and starts adsorbing and holding the adherend WK on the support surface 42A. ..

Next, the adherend supporting means 40 drives the linear motor 41 to move the support table 42 to the right, and as shown by the two-dot chain line in FIG. 1 (A), the right end portion of the adhesive sheet AS is the pressing member 14. When it reaches directly above, the drive of the linear motor 41 is stopped. After that, the adhesive sheet holding means 10 drives the linear motion motor 13 and the heating means 14A, and as shown by the alternate long and short dash line in FIG. 1A, the pressing member 14 is raised to attach the peeling tape PT to the adhesive sheet AS. The peeling tip ASF is pressed and attached to the peeling tip ASF, and the peeling tip ASF of the adhesive sheet AS is held by the peeling tape PT. When the peeling tip ASF of the adhesive sheet AS is held by the peeling tape PT, the adhesive sheet holding means 10 stops driving the heating means 14A and drives the linear motion motor 13 to return the pressing member 14 to the initial position. ..

Next, the adhesive sheet holding means 10 and the peeling means 20 drive the rotary motors 11A, 24A and the linear motor 21, and while moving the moving plate 22 to the left by a predetermined distance, the drive roller 24 and the support roller 11 are rotated as appropriate. Then, the peeling tape PT is fed out from the support roller 11 side by a predetermined length, and the uppermost portion of the drive roller 24 is positioned below the peeling tip portion ASF of the adhesive sheet AS. As a result, as shown by the solid line in FIG. 1B, the peeling tape PT has a slack of a predetermined length, and the slack forms a folded-back portion PT1, and the folded-back portion PT1 is adhered by the drive roller 24. It is pressed in the WK direction, and the peeling tape PT takes a pressing posture. Then, the peeling means 20 drives the linear motor 21 and the rotary motor 24A to move the moving plate 22 to the left and the drive roller 24 to rotate, as shown by the two-dot chain line in FIG. 1 (B). While maintaining the pressing posture of the peeling tape PT, the adherend WK and the peeling tape PT are relatively moved, and the adhesive sheet AS is covered from the peeling tip ASF of the adhesive sheet AS toward the peeling rear end ASR. Peel off from the body WK. In this way, by peeling the adhesive sheet AS from the adherend WK while maintaining the pressing posture, the adhesive sheet AS can be peeled off while pressing the adherend WK against the support surface 42A, and the adherend WK can be peeled off. It is possible to prevent stress from being pulled by the adhesive sheet AS to be peeled off and the adherend WK from falling from the support table 42.

When the entire adhesive sheet AS is peeled off from the adherend WK, the user or the transport means (not shown) supports the adherend WK from which the adhesive sheet AS is peeled off, and then the adherend support means 40 does not show the reduced pressure. The drive of the means is stopped, and the suction holding of the adherend WK on the support surface 42A is released. Next, the adherend WK supported by the user or a transport means (not shown) is transported to the next step.

On the other hand, when the entire adhesive sheet AS is peeled from the adherend WK, the peeling means 20 stops driving the linear motor 21 and the rotary motor 24A, and then the adhesive sheet holding means 10 drives the rotary motor 15A. The peeling tape PT is wound up by the recovery roller 15 to eliminate the slack (folded portion PT1) of the peeling tape PT. After that, the adhesive sheet holding means 10 and the peeling means 20 drive the rotating motors 11A and 24A, the peeling tape PT is wound by the support roller 11, and as shown by the solid line in FIG. 1C, the adhesive sheet AS When the peeling rear end ASR reaches the position sandwiched between the drive roller 24 and the pinch roller 25, the adhesive sheet holding means 10 and the peeling means 20 stop driving the rotary motors 11A and 24A. Next, the peeling rear end mounting means 30 drives the linear motor 31A, and as shown by the solid line in FIG. 1C, the pressing member 31C is moved to the left, and the adhesive sheet AS is attached to the receiving member 31D. After sandwiching the peeling adhesive sheet ASB and the peeling tape PT, an ultrasonic application means (not shown) is driven to attach the peeling rear end ASR of the adhesive sheet AS to the peeling adhesive sheet ASB by welding. Then, when the attachment of the peeling rear end portion ASR of the peeling rear end portion ASR of the adhesive sheet AS to the pre-peeling adhesive sheet ASB is completed, the peeling rear end portion attaching means 30 stops driving the ultrasonic wave applying means (not shown) and drives the linear motor 31A. The pressing member 31C is returned to the initial position.

Next, the adherend support means 40 drives the linear motor 41 to return the support table 42 to the initial position, and the peeling means 20 drives the linear motor 21 and the rotary motor 24A to move the moving plate 22 to the initial position. After the return, the adhesive sheet holding means 10 and the peeling means 20 drive the rotary motors 11A, 15A, 24A, and the peeling tape PT is wound up by the recovery roller 15. After that, as shown by the alternate long and short dash line in FIG. 1C, when the unused peeling tape PT portion is located above the pressing member 14, the adhesive sheet holding means 10 and the peeling means 20 move the rotary motors 11A and 15A. , 24A drive is stopped. As a result, the adhesive sheet AS peeled from the adherend WK by this peeling operation becomes the first peeling adhesive sheet ASB and is supported by the peeling tape PT, and the same peeling operation as described above is repeated thereafter.

According to the sheet peeling device EA as described above, since the peeled rear end ASR of the adhesive sheet AS after being peeled from the adherend WK is attached to the pre-peeled adhesive sheet ASB by welding, the adhesive sheet AS is attached. The peeled rear end ASR of the peeled adhesive sheet AS can be attached to the previously peeled adhesive sheet ASB without damaging the adherend WK.

The means and processes in the present invention are not limited as long as they can perform the operations, functions or processes described for the means and processes, much less the constituents of the mere embodiment shown in the above-described embodiment. It is not limited to the process at all. For example, if the adhesive sheet holding means can hold the peeled tip of the adhesive sheet attached to the adherend with the adhesive sheet holding member, it is within the technical scope in light of the common general technical knowledge at the time of filing. If so, there is no limitation (the same applies to other means and processes).

For example, the adhesive sheet holding means 10 may support or guide the peeling tape PT with a plate-shaped member, a shaft member, or the like instead of the rollers such as the support roller 11 and the guide roller 12, or for peeling. It may be supported by, for example, fanfold folding without winding the tape PT, or it may be collected by, for example, fanfold folding without winding the peeling tape PT, or by chopping it with a shredder or the like. However, a pressure-sensitive adhesive tape may be adopted as the peeling tape PT, a heat-sensitive adhesive tape may be adopted, and a pressure-sensitive adhesive tape may be adopted as the peeling tape PT. If so, the heating means 14A may or may not be present.
As the adhesive sheet holding member, the adhesive sheet holding means 10 includes, for example, a gripping means such as a mechanical chuck or a chuck cylinder, a Coulomb force, an adhesive (adhesive sheet, adhesive tape), an adhesive (adhesive sheet, adhesive tape), magnetic force, and the like. Bernoulli adsorption, suction adsorption, drive equipment, etc. may be adopted to hold the peeling tip ASF of the adhesive sheet AS.

The peeling means 20 may move the adherend WK to peel off the adhesive sheet AS from the adherend WK without or while moving the peeling tape PT, or instead of the guide roller 23. The peeling tape PT may be guided by a plate-shaped member, a shaft member, or the like.

As shown in FIG. 2A, the peeling rear end attachment means 30 replaces the welding means 31 with the peeling rear end ASR of the adhesive sheet AS after being peeled from the adherend WK. The stapler mounting means 32 to be mounted on the ASB by the stapler SP may be provided.
Such a stapler mounting means 32 includes a stapler mounting device 32A for sandwiching an adhesive sheet AS or the like with a receiving member 32B and mounting the stapler SP, and in the above embodiment, the peeling rear end mounting means 30 drives the linear motor 31A. The stapler mounting device 32A is driven at the same timing as the stapler, and the stapler SP is struck to attach the peeled rear end portion ASR of the adhesive sheet AS to the pre-peeled adhesive sheet ASB.

As shown in FIG. 2B, the peeling rear end attachment means 30 replaces the welding means 31 with the peeling rear end ASR of the adhesive sheet AS after being peeled from the adherend WK, and the first peeling adhesion. At least one of the sheet AS may be provided with an adhesive member attaching means 33 for attaching a double-sided adhesive sheet BA as an adhesive member for adhering the adhesive sheet AS and the pre-peeling adhesive sheet ASB.
Such an adhesive member attaching means 33 is supported by a supply means 33A for supplying a double-sided adhesive sheet BA, a linear motion motor 33B as a driving device and a pressing means, and an output shaft 33C thereof, and is supported by a pressure reducing pump or a vacuum ejector. The holding member 33D capable of adsorbing and holding the double-sided adhesive sheet BA supplied from the supply means 33A by a depressurizing means (not shown), the receiving member 33E for sandwiching the adhesive sheet AS or the like between the holding members 33D, and the guide roller 23. It is provided with a receiving roller 33F for crimping an adhesive sheet AS or the like. The surface of the holding member 33D that holds the double-sided adhesive sheet BA is subjected to a non-adhesive treatment that prevents the double-sided adhesive sheet BA from adhering. As the supply means 33A, for example, a known sheet supply device disclosed in Japanese Patent Application Laid-Open No. 2016-117520, Japanese Patent Application Laid-Open No. 2011-11890, and the like can be exemplified.
Then, in the same manner as in the above embodiment, when the entire adhesive sheet AS is peeled from the adherend WK and the looseness of the peeling tape PT is eliminated, the peeling rear end mounting means 30 provides the supply means 33A and the decompression means (not shown). It is driven, and as shown by the solid line in FIG. 2B [B1], the double-sided adhesive sheet BA is supplied from the supply means 33A, and the double-sided adhesive sheet BA is adsorbed and held by the holding member 33D. Next, the adhesive sheet holding means 10 and the peeling means 20 drive the rotary motors 11A, 15A, and 24A to release the peeling rear end ASR of the adhesive sheet AS from the sandwiching between the rotary motor 24A and the pinch roller 25. 2 (B) [B1] As shown by the solid line, the peeling rear end ASR is separated from the peeling adhesive sheet ASB. At this time, the peeling rear end ASR may be held by a holding means (not shown), the holding means may be moved by a driving device (not shown), and the peeling rear end ASR may be forcibly separated from the pre-peeling adhesive sheet ASB. After that, the peeling rear end mounting means 30 drives the linear motion motor 33B, and as shown by the alternate long and short dash line in FIG. After that, the drive of the decompression means (not shown) is stopped to return the holding member 33D to the initial position. Next, the adhesive sheet holding means 10 and the peeling means 20 drive the rotation motors 11A, 15A, 24A, and the peeling tape PT is wound up by the support roller 11, and as shown in FIGS. 2B and 2B. The guide roller 23 and the receiving roller 33F press the peeled rear end portion ASR of the bonded sheet AS and the pre-peeled adhesive sheet ASB via the double-sided adhesive sheet BA. When the crimping between the peeling rear end portion ASR and the pre-peeling adhesive sheet ASB is completed, an unused peeling tape PT portion is arranged above the pressing member 14 in the same manner as in the above embodiment.
The adhesive member attaching means 33 may be used as an adhesive member applying means for applying an adhesive as an adhesive member, a liquid, gel-like or semi-individual adhesive such as glue or hot melt, or the pre-peeling adhesive sheet ASB. An adhesive member may be attached or applied to the peeled rear end ASR separated from the peeled rear end ASR, or the peeled adhesive sheet ASR separated from the peeled rear end ASR and the peeled rear end separated from the peeled adhesive sheet ASB. An adhesive member may be attached or applied to both the portion ASR, or as shown in FIG. 2C, the adhesive sheet AS1 for attachment as an adhesive member is peeled off and bonded to the rear end portion ASR. It may be attached to both the sheet ASB.

As the welding means 31, the peeling rear end attachment means 30 may employ a heating means such as a coil heater or a heating side of a heat pipe, a laser irradiation means capable of irradiating a laser beam, or the like, and after peeling the adhesive sheet AS. Any material may be used as long as the end ASR can be welded to the pre-peelable adhesive sheet ASB, and when the exfoliated rear end ASR is attached to the pre-peelable adhesive sheet ASB by the welding means 31, one or more locations. When the rear end ASR is attached to the first peeling adhesive sheet ASB, the stapler SP may be struck at one or more places, or the adhesive member mounting means 33 may be used for peeling. When attaching the rear end ASR to the first peeling adhesive sheet ASB, the adhesive member may be attached to one or more places.

The adherend supporting means 40 may not have a holding means, or may be adopted as a member constituting the sheet peeling device EA of the present invention.

The sheet peeling device EA may attach the peeling rear end ASR of the adhesive sheet AS, which is peeled from the adherend WK by the first peeling, to the peeling tape PT by the adhesive sheet holding means 10, or the peeling rear end. It may be attached to the peeling tape PT by the attaching means 30.

The materials, types, shapes, etc. of the adhesive sheet AS, the adhesive sheet AS1 for mounting, the double-sided adhesive sheet BA, the peeling tape PT, and the adherend WK in the present invention are not particularly limited. For example, the adhesive sheet AS, the adhesive sheet AS1 for mounting, the double-sided adhesive sheet BA, or the peeling tape PT may have a circular shape, an elliptical shape, a polygonal shape such as a triangle or a square, or any other shape, and may have pressure-sensitive adhesiveness. , It may be of an adhesive form such as heat-sensitive adhesive, and when a heat-sensitive adhesive is adopted, the adhesive sheet AS, the mounting adhesive sheet AS1, the double-sided adhesive sheet BA, or the peeling tape PT is heated. Adhesion may be performed by an appropriate method such as providing an appropriate heating means such as a coil heater or a heating side of a heat pipe. Further, such an adhesive sheet AS, an adhesive sheet AS1 for attachment, or a tape PT for peeling may be, for example, a single layer having only an adhesive layer, a base having an intermediate layer between a base material and an adhesive layer, or a base. It may be a so-called double-sided adhesive sheet having three or more layers such as having a cover layer on the upper surface of the material, and further capable of peeling the base material from the adhesive layer, and includes a double-sided adhesive sheet BA. The double-sided adhesive sheet may have a single-layer or multi-layer intermediate layer, or may be a single-layer or multi-layer without an intermediate layer. The adherend WK includes, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit boards, information recording boards such as optical disks, glass plates, steel plates, pottery, wood boards or resins. It may be a single object or a composite product formed of two or more of them, and any form of a member or an article can be targeted. The adhesive sheet AS may be read in a functional and versatile manner, and may be, for example, an information description label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, a recording layer forming resin sheet, or the like. Sheets, films, tapes, etc. may be used.

The drive device in the above embodiment is an electric device such as a rotary motor, a linear motor, a linear motor, a single-axis robot, an articulated robot having two-axis or three-axis or more joints, an air cylinder, a hydraulic cylinder, and a rodless. Actuators such as cylinders and rotary cylinders can be adopted, and those in which they are directly or indirectly combined can also be adopted.
In the above embodiment, when a rotating member such as a roller is adopted, a driving device for rotationally driving the rotating member may be provided, or the surface of the rotating member or the rotating member itself can be deformed by rubber, resin, or the like. It may be composed of a member, the surface of the rotating member or the rotating member itself may be composed of a member that does not deform, or another member such as a shaft or a blade that rotates or does not rotate may be adopted instead of the roller. Alternatively, when a pressing means such as a pressing roller or a pressing head or a pressing member such as a pressing member is used, a roller, a round bar, or a blade may be used in place of or in combination with the above-exemplified ones. A member such as a material, rubber, resin, or sponge may be adopted, or a structure that presses by blowing a gas such as air or gas may be adopted, or a deformable member such as rubber or resin may be adopted. It may be composed of a member that does not deform, or if a support (holding) means or a support (holding) member or the like that supports or holds the supported member is adopted, the mechanical chuck may be used. Supports (holds) supported members with gripping means such as chuck cylinders, Coulomb force, adhesives (adhesive sheets, adhesive tapes), adhesives (adhesive sheets, adhesive tapes), magnetic force, Bernoulli suction, suction suction, drive equipment, etc. ) May be adopted.

EA ... Sheet peeling device 10 ... Adhesive sheet holding means 20 ... Peeling means 30 ... Peeling rear end mounting means 31 ... Welding means 32 ... Stapla mounting means 33 ... Adhesive member mounting means AS ... Adhesive sheet ASB ... Pre-peeling adhesive sheet ASF ... Peeling tip ASR ... Peeling rear end AS1 ... Adhesive sheet for mounting (adhesive member)
BA ... Double-sided adhesive sheet (adhesive member)
PT ... Peeling tape (adhesive sheet holding member)
SP ... Stapler WK ... Adhesive body

Claims (6)

An adhesive sheet holding means that holds the peeled tip of the adhesive sheet attached to the adherend with an adhesive sheet holding member, and
A peeling means for peeling the adhesive sheet from the adherend by relatively moving the adherend and the adhesive sheet holding member from the peeling tip portion of the adhesive sheet toward the peeling rear end portion.
The peeled rear end portion of the adhesive sheet peeled off from the adherend by the peeling means is first peeled off by the peeling means and attached to the peeled rear end portion held by the adhesive sheet holding member. Equipped with mounting means,
The peeled rear end attachment means is provided with a welding means for attaching the peeled rear end portion of the adhesive sheet after being peeled from the adherend to the first peeled adhesive sheet by welding. Peeling device. An adhesive sheet holding means that holds the peeled tip of the adhesive sheet attached to the adherend with an adhesive sheet holding member, and
A peeling means for peeling the adhesive sheet from the adherend by relatively moving the adherend and the adhesive sheet holding member from the peeling tip portion of the adhesive sheet toward the peeling rear end portion.
The peeled rear end portion of the adhesive sheet peeled off from the adherend by the peeling means is first peeled off by the peeling means and attached to the peeled rear end portion held by the adhesive sheet holding member. Equipped with mounting means,
The peeled rear end attachment means is provided with a stapler attaching means for attaching the peeled rear end portion of the adhesive sheet after being peeled from the adherend to the first peeled adhesive sheet with a stapler. Sheet peeling device. An adhesive sheet holding means that holds the peeled tip of the adhesive sheet attached to the adherend with an adhesive sheet holding member, and
A peeling means for peeling the adhesive sheet from the adherend by relatively moving the adherend and the adhesive sheet holding member from the peeling tip portion of the adhesive sheet toward the peeling rear end portion.
The peeled rear end portion of the adhesive sheet peeled off from the adherend by the peeling means is first peeled off by the peeling means and attached to the peeled rear end portion held by the adhesive sheet holding member. Equipped with mounting means,
The peeled rear end attachment means has the adhesive sheet and the peeled adhesive sheet on at least one of the peeled rear end of the adhesive sheet after being peeled from the adherend and the first peeled adhesive sheet. A sheet peeling device comprising an adhesive member attaching means for attaching an adhesive member to which the adhesive is attached. An adhesive sheet holding process that holds the peeled tip of the adhesive sheet attached to the adherend with an adhesive sheet holding member, and
A peeling step of relatively moving the adherend and the adhesive sheet holding member to peel the adhesive sheet from the adherend from the peeling tip portion of the adhesive sheet toward the peeling rear end portion.
The peeled end portion of the adhesive sheet peeled from the adherend in the peeling step is first peeled in the peeling step immediately before the peeling step and held by the adhesive sheet holding member. Equipped with a peeling rear end mounting process to be mounted on the sheet,
The peeling rear end attachment step is characterized by carrying out a welding step of attaching the peeling rear end portion of the adhesive sheet after being peeled from the adherend to the first peeling adhesive sheet by welding. Method. An adhesive sheet holding process that holds the peeled tip of the adhesive sheet attached to the adherend with an adhesive sheet holding member, and
A peeling step of relatively moving the adherend and the adhesive sheet holding member to peel the adhesive sheet from the adherend from the peeling tip portion of the adhesive sheet toward the peeling rear end portion.
The peeled end portion of the adhesive sheet peeled from the adherend in the peeling step is first peeled in the peeling step immediately before the peeling step and held by the adhesive sheet holding member. Equipped with a peeling rear end mounting process to be mounted on the sheet,
The peeling rear end attachment step is characterized by carrying out a stapler attachment step of attaching the peeling rear end portion of the adhesive sheet after being peeled from the adherend to the first peeling adhesive sheet with a stapler. Peeling method. An adhesive sheet holding process that holds the peeled tip of the adhesive sheet attached to the adherend with an adhesive sheet holding member, and
A peeling step of relatively moving the adherend and the adhesive sheet holding member to peel the adhesive sheet from the adherend from the peeling tip portion of the adhesive sheet toward the peeling rear end portion.
The peeled end portion of the adhesive sheet peeled from the adherend in the peeling step is first peeled in the peeling step immediately before the peeling step and held by the adhesive sheet holding member. Equipped with a peeling rear end mounting process to be mounted on the sheet,
In the peeling rear end attachment step, the adhesive sheet and the peeling adhesive sheet are attached to at least one of the peeling rear end portion of the adhesive sheet after being peeled from the adherend and the first peeling adhesive sheet. A sheet peeling method, characterized in that an adhesive member attachment step for attaching an adhesive member is carried out.

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