TW202316540A - Sheet sticking apparatus and sheet sticking method capable of firmly protecting outer edge surface of adhered object and outer edge surface sides of other surfaces adjacent to outer edge surface - Google Patents

Sheet sticking apparatus and sheet sticking method capable of firmly protecting outer edge surface of adhered object and outer edge surface sides of other surfaces adjacent to outer edge surface Download PDF

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Publication number
TW202316540A
TW202316540A TW111125262A TW111125262A TW202316540A TW 202316540 A TW202316540 A TW 202316540A TW 111125262 A TW111125262 A TW 111125262A TW 111125262 A TW111125262 A TW 111125262A TW 202316540 A TW202316540 A TW 202316540A
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Taiwan
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outer edge
sheet
unit
adhesive sheet
aforementioned
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TW111125262A
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Chinese (zh)
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上道厚史
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日商琳得科股份有限公司
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Publication of TW202316540A publication Critical patent/TW202316540A/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65CLABELLING OR TAGGING MACHINES, APPARATUS, OR PROCESSES
    • B65C1/00Labelling flat essentially-rigid surfaces
    • B65C1/04Affixing labels, e.g. wrap-around labels, to two or more flat surfaces of a polyhedral article
    • B65C1/042Affixing labels, e.g. wrap-around labels, to two or more flat surfaces of a polyhedral article using two or more applicators, e.g. cooperating rollers or brushes
    • B65C1/045Affixing labels, e.g. wrap-around labels, to two or more flat surfaces of a polyhedral article using two or more applicators, e.g. cooperating rollers or brushes acting one after the other
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65CLABELLING OR TAGGING MACHINES, APPARATUS, OR PROCESSES
    • B65C9/00Details of labelling machines or apparatus
    • B65C9/26Devices for applying labels
    • B65C9/30Rollers
    • B65C9/32Cooperating rollers between which articles and labels are fed
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H35/00Delivering articles from cutting or line-perforating machines; Article or web delivery apparatus incorporating cutting or line-perforating devices, e.g. adhesive tape dispensers
    • B65H35/0006Article or web delivery apparatus incorporating cutting or line-perforating devices
    • B65H35/006Article or web delivery apparatus incorporating cutting or line-perforating devices with means for delivering a predetermined length of tape
    • B65H35/0066Article or web delivery apparatus incorporating cutting or line-perforating devices with means for delivering a predetermined length of tape this length being adjustable
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H35/00Delivering articles from cutting or line-perforating machines; Article or web delivery apparatus incorporating cutting or line-perforating devices, e.g. adhesive tape dispensers
    • B65H35/0006Article or web delivery apparatus incorporating cutting or line-perforating devices
    • B65H35/0073Details
    • B65H35/008Arrangements or adaptations of cutting devices
    • B65H35/0086Arrangements or adaptations of cutting devices using movable cutting elements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67132Apparatus for placing on an insulating substrate, e.g. tape
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2301/00Handling processes for sheets or webs
    • B65H2301/50Auxiliary process performed during handling process
    • B65H2301/51Modifying a characteristic of handled material
    • B65H2301/515Cutting handled material
    • B65H2301/5153Details of cutting means
    • B65H2301/51532Blade cutter, e.g. single blade cutter

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Labeling Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)

Abstract

The subject of the present invention is to provide a sheet sticking apparatus and a sheet sticking method for making an adhesive sheet firmly protecting the outer edge surface of an adhered object and the outer edge surface sides of other surfaces adjacent to the outer edge surface. The sheet sticking apparatus EA of the present invention comprises: a supply unit 10 for supplying adhesive sheets AS that may be elastically deformed; a pressing unit 20 for pressing the adhesive sheet AS supplied by the supply unit 10 against the outer edge surface WKE of an adhered object WK; and, a moving unit 30 for moving the pressing unit 20 relative to the adhered object WK so as to stick the adhesive sheet AS onto the outer edge surface WKE. The pressing unit 20 presses the adhesive sheet AS against the outer edge surface WKE so as to form a protrusion region ASH protruded from the outer edge surface WKE on at least one of the outer edge AS1 of one side and the outer edge AS2 the other side along the supplying direction of the adhesive sheet AS. The sheet sticking apparatus EA further comprises: a bending and sticking unit 40 for applying tension force in the direction along the supplying direction of the adhesive sheet AS to the adhesive sheet AS positioned between the supply unit 10 and the pressing unit 20, so as to bend the protrusion region ASH and stick to the direction of the other surfaces WK1, WK2 adjacent to the outer edge surface WKE.

Description

片貼附裝置以及片貼附方法Sheet attaching device and sheet attaching method

本發明係關於一種片(sheet)貼附裝置以及片貼附方法。The invention relates to a sheet attaching device and a sheet attaching method.

已知有一種用於將接著片貼附至被接著體之片貼附裝置(例如參照專利文獻1)。 [先前技術文獻] [專利文獻] There is known a sheet attaching device for attaching an adhesive sheet to an adherend (for example, refer to Patent Document 1). [Prior Art Literature] [Patent Document]

專利文獻1:日本特開2012-84578號公報。Patent Document 1: Japanese Patent Application Laid-Open No. 2012-84578.

[發明所欲解決之課題][Problem to be Solved by the Invention]

於專利文獻1所記載的片貼附裝置(1)(片貼附裝置)中,即使將兩面接著膠帶(S)(接著片)貼附至晶圓(W)(被接著體)的一邊的面的外緣部,也無法將接著片貼附至該被接著體的外緣端面。因此,例如,當將被接著體浸漬於液體中或是暴露於氣體中以施加預定的處理時,會發生如液體、氣體等異物附著至被接著體的外緣端面之缺陷。In the sheet attaching device (1) (sheet attaching device) described in Patent Document 1, even if the double-sided adhesive tape (S) (adhesive sheet) is attached to one side of the wafer (W) (adhered body), The outer edge portion of the surface, and the adhesive sheet cannot be attached to the outer edge end surface of the adhered body. Therefore, for example, when an adherend is immersed in a liquid or exposed to a gas to apply a predetermined process, a defect that foreign matter such as liquid, gas, etc. adheres to the outer peripheral end surface of the adherend occurs.

本發明的目的在於提供能用接著片確實地保護被接著體的外緣端面以及與該外緣端面相鄰的其他面中的外緣端面側之片貼附裝置以及片貼附方法。 [用於解決課題的手段] An object of the present invention is to provide a sheet attaching device and a sheet attaching method capable of reliably protecting the outer edge end surface of an adherend and the outer edge end surface side of other surfaces adjacent to the outer edge end surface with an adhesive sheet. [Means used to solve the problem]

本發明係採用申請專利範圍所記載之構成。 [發明功效] The present invention adopts the constitution described in the scope of the patent application. [Efficacy of the invention]

根據本發明,由於將貼附至外緣端面的接著片的突出區域彎折並貼附至與該外緣端面相鄰的其他面的方向,因此能用接著片確實地保護被接著體的外緣端面以及與該外緣端面相鄰的其他面中的外緣端面側。According to the present invention, since the protruding region of the adhesive sheet attached to the outer edge end surface is bent and attached in the direction of the other surface adjacent to the outer edge end surface, the outer surface of the adherend can be reliably protected by the adhesive sheet. The outer edge end surface and the outer edge end surface side of the other surfaces adjacent to the outer edge end surface.

以下,基於圖式對本發明一實施形態進行說明。 另外,本實施形態中的X軸、Y軸、Z軸係處於分別正交之關係,將X軸以及Y軸設為預定平面內的軸,將Z軸設為與該預定平面正交的軸。進一步地,在本實施形態中以與Y軸平行的從圖1中的下方方向來觀察之情況作為基準,當未指定圖而表示方向時,「上」係指Z軸的箭頭方向而「下」為該Z軸的箭頭方向的反方向,「左」為X軸的箭頭方向而「右」為該X軸的箭頭方向的反方向,「前」為與Y軸平行的圖1中的中正前方方向而「後」為該正前方方向的反方向。另外,由於圖1中的(E)、(F)係於X-Y平面上從斜向觀察的圖,因此不顯示表示方向的箭頭。 Hereinafter, one embodiment of the present invention will be described based on the drawings. In addition, the X-axis, Y-axis, and Z-axis in this embodiment are in a relationship of being perpendicular to each other, and the X-axis and the Y-axis are set as axes in a predetermined plane, and the Z-axis is set as an axis orthogonal to the predetermined plane. . Further, in the present embodiment, the case of viewing from the downward direction in FIG. 1 parallel to the Y axis is used as a reference. When the direction is indicated without specifying the figure, "up" refers to the arrow direction of the Z axis and "down" refers to the arrow direction of the Z axis. " is the opposite direction of the arrow direction of the Z-axis, "left" is the direction of the arrow of the X-axis and "right" is the opposite direction of the arrow direction of the X-axis, and "front" is the center positive in Figure 1 parallel to the Y-axis The front direction and "rear" is the opposite direction of the front direction. In addition, since (E) and (F) in FIG. 1 are views viewed obliquely on the X-Y plane, arrows indicating directions are not displayed.

本發明的片貼附裝置EA係具備:供給單元10,係實施供給工序,該供給工序係供給能夠彈性變形的接著片AS;按壓單元20,係實施按壓工序,該按壓工序係將由供給單元10所供給的接著片AS按壓至被接著體WK的外緣端面WKE;移動單元30,係實施移動工序,該移動工序係使按壓單元20與被接著體WK相對移動,以將接著片AS貼附至外緣端面WKE;彎折貼附單元40,係實施彎折貼附工序,該彎折貼附工序係藉由對位於供給單元10與按壓單元20之間CL的接著片AS賦予沿著該接著片AS的供給方向SD之方向的張力,以將突出區域ASH彎折並貼附至作為與外緣端面WKE相鄰的其他面之一邊的面WK1以及另一邊的面WK2的方向;以及突出區域按壓單元50,係實施突出區域按壓工序,該突出區域按壓工序係將突出區域ASH按壓至一邊的面WK1以及另一邊的面WK2兩者。 另外,於本實施形態中係採用以基準位置WKR為中心的圓形形狀的被接著體WK。 The sheet sticking device EA of the present invention is equipped with: the supply unit 10 implements the supply process, and the supply process supplies the elastically deformable bonding sheet AS; The supplied adhesive sheet AS is pressed to the outer edge end surface WKE of the adhered body WK; the moving unit 30 implements a moving process, which moves the pressing unit 20 and the adhered object WK relatively to attach the adhesive sheet AS To the outer edge end surface WKE; the bending and attaching unit 40 implements the bending and attaching process. The bending and attaching process is to give the adhesive sheet AS located between the supply unit 10 and the pressing unit 20 along the Tension in the direction of the supply direction SD of the sheet AS is followed to bend and attach the protruding area ASH to the surface WK1 on one side and the surface WK2 on the other side as the other surfaces adjacent to the outer edge end surface WKE; and protruding The area pressing unit 50 performs a protruding area pressing process of pressing the protruding area ASH to both the one surface WK1 and the other surface WK2. In addition, in this embodiment, the circular-shaped adherend WK centering on the reference position WKR is employed.

供給單元10係具備:支撐構件11,係直接或間接支撐構成該供給單元10之各構件;支撐輥12,係支撐由接著片AS暫時附著至帶狀的剝離片RL而成的原料片(raw sheet)RS;導輥(guide roller)13,係引導原料片RS;作為剝離單元之剝離板14,係用剝離緣14A將剝離片RL折返,並從該剝離片RL將接著片AS剝離;驅動輥15,係被作為驅動裝置的轉動馬達15A中未圖示的輸出軸所支撐,並與壓輥(pinch roller)15B一起夾入剝離片RL;作為回收單元之回收輥16,係被未圖示的驅動裝置的輸出軸所支撐,並於片貼附裝置EA進行自動運轉的期間,對存在於回收輥16與壓輥15B之間的剝離片RL常態地賦予預定的張力而回收該剝離片RL;以及作為切斷單元之長度調整單元17,係將接著片AS切斷。 長度調整單元17係具備:作為驅動裝置之氣缸(air cylinder)17A、被該氣缸17A的輸出軸17B所支撐的切刀(cutter)刃17C。 The supply unit 10 is provided with: a support member 11 for directly or indirectly supporting each member constituting the supply unit 10; a support roller 12 for supporting a raw material sheet (raw sheet) RS; guide roller (guide roller) 13 is to guide the raw material sheet RS; as the peeling plate 14 of the peeling unit, the peeling sheet RL is folded back with the peeling edge 14A, and the adhesive sheet AS is peeled off from the peeling sheet RL; The roller 15 is supported by an output shaft not shown in the rotating motor 15A as the driving device, and clamps the peeling sheet RL together with the pinch roller 15B; is supported by the output shaft of the driving device shown, and during the automatic operation of the sheet attaching device EA, a predetermined tension is normally applied to the release sheet RL existing between the recovery roller 16 and the pressure roller 15B, and the release sheet is collected. RL; and the length adjustment unit 17 as the cutting unit, which cuts the adhesive sheet AS. The length adjustment unit 17 includes an air cylinder (air cylinder) 17A as a driving device, and a cutter (cutter) blade 17C supported by an output shaft 17B of the air cylinder 17A.

按壓單元20係具備按壓輥21,該按壓輥21係被未圖示的支架以可旋轉方式而支撐。按壓單元20係能將該接著片AS按壓至外緣端面WKE,使得沿著接著片AS的供給方向SD之一邊的外緣AS1側以及另一邊的外緣AS2側兩者形成從外緣端面WKE突出的突出區域ASH。The pressing unit 20 includes a pressing roller 21 rotatably supported by a bracket not shown. The pressing unit 20 is capable of pressing the adhesive sheet AS to the outer edge end surface WKE so that both the outer edge AS1 side on one side and the outer edge AS2 side on the other side along the supply direction SD of the adhesive sheet AS are formed from the outer edge end surface WKE. Prominent prominent areas of ASH.

移動單元30係具備:作為驅動裝置之線性馬達31;作為驅動裝置之轉動馬達32,係被線性馬達31中的滑件(slider)31A所支撐;支撐台33,係被轉動馬達32的輸出軸32A所支撐,並具有能夠藉由減壓泵、真空抽氣器 (vacuum ejector)等未圖示的減壓單元(保持單元)進行吸附保持之支撐面33A;上部推壓單元34,係從上方將被接著體WK壓靠至該支撐台33。另外,支撐台33係藉由轉動馬達32而以台中心33R為中心旋轉之構成。 上部推壓單元34係具備:作為驅動裝置之直動馬達34A;以及上部推壓板34C,係被直動馬達34A的輸出軸34B所支撐,並能夠追隨支撐台33的移動而旋轉。另外,上部推壓板34C係以上部推壓板中心34R為中心而旋轉。 The moving unit 30 is equipped with: a linear motor 31 as a driving device; a rotating motor 32 as a driving device, which is supported by a slider (slider) 31A in the linear motor 31; 32A, and has a support surface 33A that can be adsorbed and held by a decompression unit (holding unit) not shown in the figure such as a decompression pump and a vacuum ejector; the upper pushing unit 34 is from above The adherend WK is pressed against the support table 33 . In addition, the support table 33 is configured to rotate around the table center 33R by the rotation motor 32 . The upper pressing unit 34 is provided with: a linear motor 34A as a driving device; In addition, the upper pressing plate 34C rotates around the upper pressing plate center 34R.

彎折貼附單元40係具備:作為扭矩可控的驅動裝置之轉動馬達41;以及驅動輥42,係被轉動馬達41中未圖示的輸出軸所支撐,並與壓輥43一起夾入原料片RS。The bending and attaching unit 40 is provided with: a rotating motor 41 as a drive device with controllable torque; Slice RS.

突出區域按壓單元50係具備第一按壓輥51、第二按壓輥52、第三按壓輥53,此三者係被未圖示的支架以可旋轉方式而支撐。於本實施形態中,第一按壓輥51、第二按壓輥52、第三按壓輥53係如圖1中的(E)至圖1中的(G)所示,分別配置為上下一對,當這些第一按壓輥51、第二按壓輥52、第三按壓輥53將被接著體WK夾入時,成為第一按壓輥51、第二按壓輥52、第三按壓輥53配置為沿著該被接著體WK的外緣之狀態。此外,例如,第一按壓輥51、第二按壓輥52、第三按壓輥53係能以分別相對於Z軸以30度、60度、90度往基準位置WKR的方向傾斜之未圖示的旋轉軸為中心而旋轉。The protrusion area pressing unit 50 includes a first pressing roller 51 , a second pressing roller 52 , and a third pressing roller 53 , and these three are rotatably supported by a bracket not shown. In this embodiment, the first pressing roller 51, the second pressing roller 52, and the third pressing roller 53 are arranged as a pair of upper and lower sides respectively, as shown in (E) to (G) in FIG. 1 , When the first pressing roller 51, the second pressing roller 52, and the third pressing roller 53 are sandwiched by the adhered body WK, the first pressing roller 51, the second pressing roller 52, and the third pressing roller 53 are arranged along the The state of the outer edge of the adhered body WK. In addition, for example, the first pressing roller 51, the second pressing roller 52, and the third pressing roller 53 can be tilted toward the reference position WKR at 30 degrees, 60 degrees, and 90 degrees with respect to the Z axis, respectively. Rotate around the axis of rotation.

對以上的片貼附裝置EA的動作進行說明。 首先,如圖1中的(A)所示,片貼附裝置EA的使用者(以下僅稱「使用者」)將原料片RS設置到該片貼附裝置EA,且該片貼附裝置EA中各構件係已配置於如該圖中以實線所示的初始位置,於設置原料片RS之後,經由操作面板、個人電腦等未圖示的操作單元輸入開始自動運轉的訊號。然後,供給單元10係驅動轉動馬達15A,以拉出原料片RS,當如圖1(A)中實線所示,藉由剝離板14的剝離緣14A將接著片AS的供給方向前端部剝離預定長度時,停止驅動轉動馬達15A。 The operation|movement of the sheet|seat sticking apparatus EA mentioned above is demonstrated. First, as shown in (A) in FIG. 1 , the user of the sheet attaching device EA (hereinafter simply referred to as "user") sets the raw material sheet RS to the sheet attaching device EA, and the sheet attaching device EA Each component is arranged at the initial position shown by the solid line in the figure. After the raw sheet RS is set, a signal to start automatic operation is input through an operation unit (not shown) such as an operation panel or a personal computer. Then, the supply unit 10 drives the rotating motor 15A to pull out the raw material sheet RS. As shown by the solid line in FIG. At a predetermined length, the drive of the rotation motor 15A is stopped.

接著,如圖1中的(A)所示,當使用者或多關節機器人、輸送帶等未圖示的搬送單元將被接著體WK載放於支撐面33A上使得基準位置WKR與台中心33R重疊時,移動單元30係驅動未圖示的減壓單元,並開始由該支撐面33A進行吸附保持。此外,供給單元10係驅動轉動馬達15A,並拉出原料片RS,如圖1中的(A)中的二點鏈線所示,使接著片AS的供給方向前端部位於按壓輥21的前方預定位置。此時,接著片AS的供給方向前端部係藉由未圖示的空氣噴嘴、離子產生器等施力單元進行施力而成為與按壓輥21的前方接觸的狀態。Next, as shown in (A) in FIG. 1 , when the user or an unillustrated conveying unit such as an articulated robot or a conveyor belt places the adhered body WK on the support surface 33A so that the reference position WKR and the table center 33R When overlapping, the moving unit 30 drives a decompression unit (not shown), and starts suction and holding by the supporting surface 33A. In addition, the supply unit 10 drives the rotary motor 15A, and pulls out the raw material sheet RS, as shown by the two-dot chain line in (A) in FIG. Book a spot. At this time, the leading end portion of the adhesive sheet AS in the feeding direction is urged by an unshown air nozzle, an ion generator, or other urging means, and is brought into a state of being in contact with the front of the pressing roller 21 .

之後,移動單元30係驅動線性馬達31,以使被接著體WK往左側移動,且當如圖1中的(B)、(C)所示般,台中心33R(基準位置WKR)與上部推壓板中心34R一致時,停止驅動線性馬達31。此時,接著片AS的供給方向前端部係如圖1中的(B)所示般,成為被按壓輥21與被接著體WK的外緣端面WKE夾入的狀態,且成為第一按壓輥51、第二按壓輥52、第三按壓輥53能夠將接著片AS按壓至被接著體WK的外緣部的狀態。Afterwards, the moving unit 30 drives the linear motor 31 to move the adhered body WK to the left, and as shown in (B) and (C) in FIG. When the platen centers 34R coincide, the drive of the linear motor 31 is stopped. At this time, the leading end portion of the adhesive sheet AS in the supply direction is in a state of being sandwiched between the pressing roller 21 and the outer edge end surface WKE of the adherend WK as shown in (B) of FIG. 1 , and becomes the first pressing roller. 51. A state in which the second pressing roller 52 and the third pressing roller 53 can press the bonding sheet AS to the outer edge of the adherend WK.

接著,移動單元30係驅動直動馬達34A,如圖1中的(C)所示,藉由上部推壓板34C與支撐台33夾入被接著體WK之後,驅動轉動馬達32,使被接著體WK沿逆時針方向旋轉,並將接著片AS貼附至被接著體WK的外緣端面WKE。此時,彎折貼附單元40係驅動轉動馬達41,並檢測從接著片AS經由驅動輥42施加的扭矩,使該扭矩常態地為預定的值,並於此情況下供給接著片AS,藉此對接著片AS賦予沿著供給方向SD之方向的張力。藉由彎折單元40如上述般進行供給,使得被貼附至被接著體WK的外緣端面WKE之能夠彈性變形的接著片AS因內在的彈性恢復力而如圖1中的(C)中的二點鏈線所示般,一邊的外緣AS1側的突出區域ASH係往一邊的面WK1側彎折並貼附至該一邊的面WK1,且另一邊的外緣AS2側的突出區域ASH係往另一邊的面WK2側彎折並貼附至該另一邊的面WK2。Next, the moving unit 30 drives the linear motor 34A, as shown in (C) in FIG. WK rotates in the counterclockwise direction, and attaches the adhesive sheet AS to the outer edge end surface WKE of the adhered body WK. At this time, the bending and attaching unit 40 drives the rotary motor 41, and detects the torque applied from the adhesive sheet AS via the driving roller 42, so that the torque is normally a predetermined value, and in this case supplies the adhesive sheet AS, by Tension in the direction along the supply direction SD is given to this pair of adhesive sheets AS. The bending unit 40 is supplied as described above, so that the elastically deformable adhesive sheet AS attached to the outer edge end surface WKE of the adherend WK is deformed as shown in (C) in FIG. 1 due to the internal elastic restoring force. As shown by the chain line of two dots, the protruding area ASH on the outer edge AS1 side of one side is bent toward the side WK1 of one side and attached to the surface WK1 on the one side, and the protruding area ASH on the outer edge AS2 side of the other side is The tie is bent toward the other surface WK2 and attached to the other surface WK2.

另外,若有下述等情況,亦可進行:突出區域按壓工序,係藉由突出區域按壓單元50將各突出區域ASH按壓至一邊的面WK1以及另一邊的面WK2;上述情況係指如因為接著片AS的特性、特質、性質、材質、組成、構成、形狀、尺寸以及重量、氛圍的條件、其他因素等各種條件導致各突出區域ASH並未如圖1中的(C)中的二點鏈線所示般地彎折至與被接著體WK接觸之情況;雖然各突出區域ASH彎折至與被接著體WK接觸,但仍因按壓力不足而無法得到預定的接著力之情況;出於確保起見而想要先將各突出區域ASH按壓至一邊的面WK1以及另一邊的面WK2之情況。此突出區域按壓工序係如圖1中的(D)、(E)、(F)所示般,於持續使被接著體WK往逆時針方向旋轉的期間,第一按壓輥51、第二按壓輥52係逐步地將各突出區域ASH彎折,最終如圖1中的(G)所示,第三按壓輥53將各突出區域ASH按壓至被接著體WK中的一邊的面WK1以及另一邊的面WK2(以上為「突出區域按壓工序」)。In addition, if there are the following situations, it can also be carried out: the protruding area pressing process is to press each protruding area ASH to the surface WK1 on one side and the surface WK2 on the other side by the protruding area pressing unit 50; Various conditions such as the characteristics, characteristics, properties, materials, composition, composition, shape, size, weight, atmosphere conditions, and other factors of the adhesive sheet AS cause each prominent area ASH to be different from the two points in (C) in Figure 1. The chain line is bent to contact with the adhered body WK as shown; although each protruding area ASH is bent to contact with the adhered body WK, the predetermined adhesive force cannot be obtained due to insufficient pressing force; For the sake of security, it is desirable to press each protruding area ASH to one surface WK1 and the other surface WK2 first. This protruding area pressing process is as shown in (D), (E) and (F) in FIG. The roller 52 bends each protruding area ASH step by step, and finally, as shown in (G) in FIG. Surface WK2 (the above is the "protruding area pressing process").

而且,於持續旋轉支撐台31以及貼附接著片AS的期間,供給單元10係驅動氣缸17A,並使切刀刃17C前後移動將該接著片AS切斷並使得接著片AS為能貼附至環繞被接著體WK的外緣端面WKE一圈之長度。接著,當用剝離板14的剝離緣14A將藉由切斷而形成之接著片AS的新的供給方向前端部予以剝離預定長度時,供給單元10係停止驅動轉動馬達15A,並停止拉出原料片RS。之後,當藉由切斷而形成之接著片AS的供給方向後端部係貼附至被接著體WK中的一邊的面WK1以及另一邊的面WK2而形成一體物UP時,移動單元30係停止驅動轉動馬達32。此時,貼附至被接著體WK中的一邊的面WK1以及另一邊的面WK2之接著片AS中的前端部與後端部係可彼此重疊,亦可彼此分離,亦可以彼此對接的方式接觸。Moreover, during the continuous rotation of the support table 31 and the attachment of the adhesive sheet AS, the supply unit 10 drives the air cylinder 17A, and moves the cutting blade 17C back and forth to cut off the adhesive sheet AS and make the adhesive sheet AS capable of being attached to the surrounding area. The length of one circle of the outer edge end surface WKE of the adhered body WK. Then, when the new feeding direction front end of the adhesive sheet AS formed by cutting is peeled off by the peeling edge 14A of the peeling plate 14 to a predetermined length, the supply unit 10 stops driving the rotary motor 15A, and stops pulling out the raw material. Slice RS. After that, when the rear end portion of the adhesive sheet AS formed by cutting is attached to the surface WK1 on one side and the surface WK2 on the other side of the adherend WK to form an integrated object UP, the moving unit 30 is The drive of the swing motor 32 is stopped. At this time, the front end and rear end of the adhesive sheet AS attached to one surface WK1 and the other surface WK2 of the adherend WK may overlap each other, or may be separated from each other, or may be butted against each other. touch.

接著,於移動單元30驅動直動馬達34A並使上部推壓板34C返回至初始位置之後,停止驅動未圖示的減壓單元,並解除由支撐面33A進行的吸附保持。之後,當使用者或未圖示的搬送單元將一體物UP搬送至下個工序時,移動單元30係驅動線性馬達31,並使支撐台33返回初始位置,於此之後也重複與上述相同的動作。Next, after the moving unit 30 drives the linear motor 34A to return the upper pressing plate 34C to the initial position, the drive of the decompression unit (not shown) is stopped, and the adsorption and holding by the support surface 33A is released. Afterwards, when the user or the conveying unit not shown transports the integrated object UP to the next process, the moving unit 30 drives the linear motor 31 to return the support table 33 to the initial position, and then repeats the same process as above. action.

根據如上所述的實施形態,由於將貼附至外緣端面WKE之接著片AS中的突出區域AS1、AS2彎折並貼附至與該外緣端面WKE相鄰的一邊的面WK1以及另一邊的面WK2,因此能用接著片AS確實地保護被接著體WK的外緣端面WKE以及與該外緣端面WKE相鄰的一邊的面WK1以及另一邊的面WK2中的外緣端面側。According to the embodiment described above, since the protruding areas AS1 and AS2 of the adhesive sheet AS attached to the outer edge end surface WKE are bent and attached to the surface WK1 on one side adjacent to the outer edge end surface WKE and the other side Therefore, the adhesive sheet AS can reliably protect the outer edge end surface WKE of the adherend WK and the outer edge end surface side of the one side surface WK1 adjacent to the outer edge end surface WKE and the other side surface WK2.

本發明中的單元以及工序在能發揮針對這些單元以及工序所說明的動作、功能或工序的前提下就沒有任何限制,尤其是完全不限為前述實施形態中所示的僅一實施形態的構成物、工序。例如,供給單元只要是能夠供給能夠彈性變形的接著片則可為任何單元,只要是對照申請時的技術常識在該技術範圍內則沒有任何限制(其他單元以及工序也相同)。The units and processes in the present invention are not limited in any way on the premise that the actions, functions or processes described for these units and processes can be performed, and in particular, they are not limited to the configuration of only one embodiment shown in the foregoing embodiments at all. objects, processes. For example, the supply unit may be any unit as long as it can supply an elastically deformable adhesive sheet, and there is no limitation as long as it is within the scope of the technical common sense at the time of application (other units and processes are also the same).

供給單元10可從原料片RS將接著片AS剝離而供給該接著片AS,且該原料片RS中係於暫時附著至帶狀的剝離片RL之帶狀的接著片基材形成閉環狀或整個短邊寬度方向的切口,並以該切口所劃分出的預定區域作為該接著片AS;亦可從原料片RS將接著片AS剝離而供給該接著片AS,且該原料片RS中係採用由帶狀的接著片基材暫時附著至帶狀的剝離片RL而成的帶狀接著片原料片,並於拉出該帶狀接合片原料片的途中由作為切斷單元之切斷刀而於接著片基材形成閉環狀或整個短邊寬度方向的切口,並以該切口所劃分出的預定區域為接著片AS;亦可從由帶狀的接著片AS暫時附著至帶狀的剝離片RL而成的原料片RS將該帶狀的接著片AS剝離而供給該接著片AS;亦可從並非捲繞而是例如扇折(fanfold)之原料片RS剝離接著片AS而供給接著片AS;亦可採用對剝離片RL並非進行捲繞而是進行例如扇折而回收、以切碎機切碎而回收、不刻意地累積而回收之回收單元;亦可不採用回收單元;亦可拉出並供給並未暫時附著至剝離片RL之接著片AS;供給單元可具備未圖示的施力單元,亦可不具備施力單元;亦可採用長度調整單元17,該長度調整單元17係將跨越供給單元10與按壓輥21(按壓單元20)之間CL的接著片AS切斷或是於被接著體WK上將接著片AS切斷;當採用事先設定為預定長度之接著片AS時、以及於拉出帶狀接著片原料片的途中形成預定形狀的接著片AS時等情況下,供給單元10可具備長度調整單元17,亦可不具備長度調整單元17。The supply unit 10 can peel the adhesive sheet AS from the raw sheet RS and supply the adhesive sheet AS, and in the raw sheet RS, the tape-shaped adhesive sheet base material temporarily attached to the tape-shaped release sheet RL forms a closed loop or A slit in the width direction of the entire short side, and the predetermined area divided by the slit is used as the adhesive sheet AS; the adhesive sheet AS can also be peeled off from the raw sheet RS to supply the adhesive sheet AS, and the raw sheet RS uses A strip-shaped adhesive sheet raw material sheet formed by temporarily attaching a strip-shaped adhesive sheet base material to a strip-shaped release sheet RL is cut by a cutting knife as a cutting unit while pulling out the strip-shaped adhesive sheet raw material sheet. Form a closed loop or a cutout in the width direction of the entire short side on the base material of the adhesive sheet, and use the predetermined area divided by the cutout as the adhesive sheet AS; it can also be temporarily attached from the tape-shaped adhesive sheet AS to the tape-shaped peel The raw sheet RS made of the sheet RL is peeled off from the tape-shaped adhesive sheet AS and supplied to the adhesive sheet AS; the adhesive sheet AS may also be peeled off from the raw sheet RS that is not wound but fanfolded (fanfold) and supplied to the adhesive sheet. AS; It is also possible to use a recycling unit that does not wind the peeling sheet RL, but for example, fan-folding and recycling, shredding and recycling with a shredder, and recycling without deliberately accumulating; it is also possible not to use the recycling unit; it can also be pulled Take out and supply the adhesive sheet AS that is not temporarily attached to the peeling sheet RL; the supply unit may be equipped with a force applying unit not shown in the figure, or may not be equipped with a force applying unit; a length adjustment unit 17 may also be used, and the length adjustment unit 17 will The bonding sheet AS spanning the gap between the supply unit 10 and the pressing roller 21 (pressing unit 20 ) is cut off or the bonding sheet AS is cut on the adhered body WK; when using the bonding sheet AS with a predetermined length in advance, And when the adhesive sheet AS of a predetermined shape is formed in the middle of pulling out the strip-shaped adhesive sheet raw material sheet, the supply unit 10 may be provided with the length adjustment unit 17 or may not be provided with the length adjustment unit 17 .

按壓單元20亦可將接著片AS按壓至外緣端面WKE並使得該接著片AS中僅沿著供給方向SD的一邊的外緣AS1側形成從外緣端面WKE突出的突出區域ASH;亦可將接著片AS按壓至外緣端面WKE並使得接著片AS中僅沿著供給方向SD的另一邊的外緣AS2側形成從外緣端面WKE突出的突出區域ASH。The pressing unit 20 can also press the adhesive sheet AS to the outer edge end surface WKE so that only the outer edge AS1 side of the adhesive sheet AS along one side of the supply direction SD forms a protruding area ASH protruding from the outer edge end surface WKE; The adhesive sheet AS is pressed against the outer edge end surface WKE so that only the outer edge AS2 side of the other side along the supply direction SD in the adhesive sheet AS forms the protruding area ASH protruding from the outer edge end surface WKE.

移動單元30可在不使支撐台33移動的情況下或是使支撐台33移動的情況下,使供給單元10以及/或者按壓單元20移動,以將接著片AS貼附至被接著體WK;亦可採用無法由保持面33A進行吸附保持之支撐台33;移動單元30可具備上部推壓單元34,亦可不具備上部推壓單元34。The moving unit 30 can move the supply unit 10 and/or the pressing unit 20 without moving the support table 33 or with the support table 33 moved, so as to attach the adhesive sheet AS to the adherend WK; A support table 33 that cannot be sucked and held by the holding surface 33A may also be used; the moving unit 30 may or may not be provided with an upper pressing unit 34 .

彎折貼附單元40亦可對位於供給單元10與按壓單元20之間CL的接著片AS賦予沿著該接著片AS的供給方向SD之方向的張力,藉此將突出區域ASH彎折並僅貼附至與外緣端面WKE相鄰的一邊的面WK1的方向;亦可將突出區域ASH彎折並僅貼附至與外緣端面WKE相鄰的另一邊的面WK2的方向;使用者能考慮接著片AS的特性、特質、性質、材質、組成、構成、形狀、尺寸以及重量、氛圍的條件、其他因素等各種條件而任意地決定賦予至接著片AS的預定的張力。The bending and attaching unit 40 can also apply tension along the supply direction SD of the adhesive sheet AS to the adhesive sheet AS located between the supply unit 10 and the pressing unit 20, thereby bending the protruding area ASH and only Attached to the direction of the surface WK1 on the side adjacent to the outer edge end surface WKE; the protruding area ASH can also be bent and only attached to the direction of the surface WK2 on the other side adjacent to the outer edge end surface WKE; the user can The predetermined tension to be applied to the adhesive sheet AS is arbitrarily determined in consideration of various conditions such as characteristics, characteristics, properties, material, composition, configuration, shape, size, and weight, atmospheric conditions, and other factors of the adhesive sheet AS.

突出區域按壓單元50亦可不由第一按壓輥51、第二按壓輥52、第三按壓輥53三者所構成,而是由例如一者或兩者之按壓輥所構成,或是由四者以上之按壓輥所構成;亦可取代或併用第一按壓輥51、第二按壓輥52、第三按壓輥53而採用利用氣體的噴射之單元、利用刷狀構件之單元、利用葉片(blade)狀構件之單元等;第一按壓輥51、第二按壓輥52、第三按壓輥53等的按壓物的材質亦可為橡膠、樹脂、海綿、金屬等;第一按壓輥51、第二按壓輥52、第三按壓輥53亦可不為一對,亦可僅設置於被接著體WK中一邊的面WK1側或是另一邊的面WK2側,亦可僅將突出區域ASH按壓至一邊的面WK1,亦可僅按壓至另一邊的面WK2;第一按壓輥51、第二按壓輥52、第三按壓輥53相對於Z軸的傾斜角度亦可分別為30度、60度、90度之外的傾斜角度,例如各個傾斜角度亦可為15度、45度、91度等任意的傾斜角度;當即使不進行突出區域按壓工序該突出區域ASH也會貼附至一邊的面WK1或另一邊的面WK2時,本發明的片貼附裝置EA可具備也可不具備突出區域按壓單元50。The protruding area pressing unit 50 may not be composed of the first pressing roller 51, the second pressing roller 52, and the third pressing roller 53, but may be composed of, for example, one or both pressing rollers, or may be composed of four pressing rollers. The above pressing rollers are formed; the first pressing roller 51, the second pressing roller 52, and the third pressing roller 53 can also be used instead of or in combination with a unit that utilizes gas injection, a unit that utilizes a brush-like member, and a unit that utilizes a blade (blade). The unit of the shape member etc.; The material of the pressing objects such as the first pressing roller 51, the second pressing roller 52, the third pressing roller 53 can also be rubber, resin, sponge, metal etc.; The first pressing roller 51, the second pressing roller The roller 52 and the third pressing roller 53 may not be a pair, and may be provided only on one surface WK1 side or the other surface WK2 side of the adhered body WK, or may only press the protruding area ASH to one surface. WK1 can also only be pressed to the surface WK2 on the other side; the inclination angles of the first pressing roller 51, the second pressing roller 52, and the third pressing roller 53 with respect to the Z axis can also be 30 degrees, 60 degrees, or 90 degrees. The external inclination angles, for example, each inclination angle can also be any inclination angles such as 15 degrees, 45 degrees, 91 degrees, etc.; even if the protruding area pressing process is not carried out, the protruding area ASH will be attached to the surface WK1 on one side or the other side In the case of the surface WK2 of the present invention, the sheet attaching device EA of the present invention may or may not be provided with the protruding area pressing unit 50 .

片貼附裝置EA可將一片接著片AS或是複數片的接著片AS貼附至被接著體WK的外緣端面WKE以及與該外緣端面WKE相鄰的其他面;當將一片接著片AS或是複數片的接著片AS貼附至被接著體WK的外緣端面WKE以及與該外緣端面WKE相鄰的其他面時,接著片AS的供給方向前端部與供給方向後端部係可彼此重疊,亦可彼此分離,亦可以彼此對接的方式接觸。 於片貼附裝置EA中,亦可於支撐台33與被接著體WK之間配置金屬、玻璃、樹脂、其他接著片等支撐構件,並用接著片AS使被接著體WK與支撐構件一體化;亦可採用藉由預定的能量而變形的接著片以作為接著片AS,並如圖1中的(A)中的二點鏈線所示,具備用於對接著片AS賦予預定的能量之能量賦予單元60。作為如此的預定的能量,能例示如紫外線、紅外線、可見光、聲波、X射線或珈瑪射線等的電磁波、熱等;作為能量賦予單元60,可為賦予紫外線、紅外線、可見光、聲波、X射線或珈瑪射線等電磁波、熱水、熱風等熱之單元;能考慮接著片AS的特性、特質、性質、材質、組成以及構成等而任意決定。此外,如此的接著片AS可為藉由預定的能量隨著收縮而變形之接著片;亦可為隨著膨脹而變形之接著片;亦可為不伴隨收縮也不伴隨膨脹而變形之接著片。 The sheet attaching device EA can attach one sheet AS or a plurality of sheets AS to the outer edge end surface WKE of the adhered body WK and other surfaces adjacent to the outer edge end surface WKE; Or when a plurality of adhesive sheets AS are attached to the outer edge end surface WKE of the adhered body WK and other surfaces adjacent to the outer edge end surface WKE, the feeding direction front end and the feeding direction rear end of the adhesive sheet AS can be They overlap each other, can also be separated from each other, and can also be in contact with each other. In the sheet attaching device EA, support members such as metal, glass, resin, and other bonding sheets can also be arranged between the support table 33 and the adherend WK, and the adherend WK and the support member can be integrated with the adhesive sheet AS; It is also possible to use an adhesive sheet deformed by a predetermined energy as the adhesive sheet AS, and as shown by the two-point chain line in (A) in FIG. 1 , it has energy for imparting predetermined energy to the adhesive sheet AS Grant unit 60. As such predetermined energy, for example, electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays, or gamma rays, heat, etc.; Or heat units such as electromagnetic waves such as gamma rays, hot water, and hot air; it can be arbitrarily determined in consideration of the characteristics, characteristics, properties, materials, composition, and composition of the adhesive sheet AS. In addition, such an adhesive sheet AS may be an adhesive sheet that deforms with shrinkage by predetermined energy; may also be an adhesive sheet that deforms with expansion; or may be an adhesive sheet that deforms without shrinkage or expansion. .

本發明中之接著片AS、支撐構件以及被接著體WK的材質、種類、形狀等並無特別限制。例如,接著片AS、支撐構件以及被接著體WK可為圓形、橢圓形、三角形或四邊形等多邊形,亦可為其他形狀;接著片AS可為感壓接著性、感熱接著性等接著形態,當採用感熱接著性的接著片AS時,只要用適當方式進行接著即可,例如設置用來加熱該接著片AS之適當的線圈加熱器(coil heater)以及/或者熱管(heat pipe)之加熱側等加熱單元。而且,如此的接著片AS可為例如僅具有接著劑層之單層的接著片;由基材與接著劑層積層而成的兩層的接著片;於基材與接著劑層之間積層有一個或複數個中間層而成的三層或三層以上的接著片;於基材的上表面積層有一個或複數個覆蓋層之三層或三層以上的接著片;基材、中間層或是覆蓋層係設置為能夠剝離之接著片;僅由接著劑層構成之單層的兩面接著片;於一個或複數個中間層的兩個最外表面積層有接著劑層之兩面接著片等,可為任何的接著片。進一步地,作為支撐構件以及被接著體WK,例如可為食品、樹脂容器、矽半導體晶圓或化合物半導體晶圓等半導體晶圓、電路基板、光碟等資訊記錄基板、玻璃板、鋼板、陶器、木板或樹脂等單獨物質,亦可為該等兩個以上形成之複合物,可將任意形態之構件或物品等作為對象。另外,接著片AS可以替換為功能性、用途性的讀法,例如,可為資訊記載用標籤、裝飾用標籤、保護片、切割帶、晶粒黏著膜(die attach film)、固晶帶(die bond tape)、記錄層形成樹脂片等任意的片、膜、帶等。The material, type, shape, etc. of the adhesive sheet AS, the supporting member, and the adhered body WK in the present invention are not particularly limited. For example, the adhesive sheet AS, the supporting member, and the adhered body WK may be polygons such as circular, elliptical, triangular or quadrilateral, or other shapes; the adhesive sheet AS may be in the form of pressure-sensitive adhesiveness, heat-sensitive adhesiveness, etc. When adopting the heat-sensitive adhesive adhesive sheet AS, it only needs to be bonded in an appropriate way, for example, an appropriate coil heater (coil heater) and/or the heating side of the heat pipe (heat pipe) are provided for heating the adhesive sheet AS and other heating units. Moreover, such an adhesive sheet AS may be, for example, a single-layer adhesive sheet having only an adhesive layer; a two-layer adhesive sheet formed by laminating a substrate and an adhesive layer; A three-layer or more than three-layer adhesive sheet made of one or more intermediate layers; a three-layer or more than three-layer adhesive sheet with one or more covering layers layered on the upper surface of the base material; a base material, an intermediate layer or It is an adhesive sheet with a cover layer that can be peeled off; a single-layer double-sided adhesive sheet composed of only an adhesive layer; a double-sided adhesive sheet with an adhesive layer on the two outermost layers of one or more intermediate layers, etc. Can be any adhesive. Further, as the supporting member and the adherend WK, for example, food, resin containers, semiconductor wafers such as silicon semiconductor wafers or compound semiconductor wafers, circuit boards, information recording substrates such as optical discs, glass plates, steel plates, ceramics, A single substance such as a wood board or resin may also be a composite of two or more of them, and any form of member or article may be used as an object. In addition, the adhesive sheet AS can be replaced with a functional and usable reading method, for example, it can be a label for information recording, a label for decoration, a protective sheet, a dicing tape, a die attach film (die attach film), a die attach tape ( die bond tape), recording layer forming resin sheet, and other arbitrary sheets, films, tapes, and the like.

前述實施形態中的驅動裝置中可採用:轉動馬達、直動馬達、線性馬達、單軸機器人、具備二軸或三軸以上的關節之多關節機器人等電動機器,氣缸、油壓缸、無桿缸(rod-less cylinder)以及旋轉缸(rotary cylinder)等致動器(actuator)等,此外,亦可採用將該等直接或間接組合而成的驅動裝置。 在前述實施形態中,當採用輥等旋轉構件時,也可具備使該旋轉構件旋轉驅動之驅動裝置;可由橡膠或樹脂等能夠變形的構件來構成旋轉構件的表面或是構成旋轉構件本身;也可由不變形的構件來構成旋轉構件的表面或是構成旋轉構件本身;也可代替輥而採用旋轉或不旋轉的軸件(shaft)或葉片等其他構件;當採用按壓輥或按壓頭等按壓單元或如按壓構件之用於對被按壓物進行按壓的構件時,也可代替上述例示構件或與上述例示構件併用地採用輥、圓棒、葉片材、刷子狀構件,另外也可採用藉由大氣或空氣等氣體之噴射進行按壓之構成;也可由橡膠、樹脂、海綿等能夠變形之構件來構成進行按壓之構件;也可由金屬、樹脂等不變形的構件來構成進行按壓之構件;當採用如剝離板或剝離輥等剝離單元或剝離構件之用於剝離被剝離物之構件時,也可代替上述例示構件或與上述例示構件併用地採用板狀構件、圓棒、輥等構件;進行剝離的構件也可由橡膠、樹脂等能夠變形的構件所構成;亦可由不變形的構件所構成;當採用支撐(保持)單元或支撐(保持)構件等用於對被支撐構件(被保持構件)進行支撐(保持)之構件時,也可採用於機械夾具(mechanical chuck)或夾具缸(chuck cylinder)等固持單元、庫侖力(Coulomb force)、接著劑(接著片、接著帶)、黏著劑(黏著片、黏著帶)、磁力、伯努利(Bernoulli)吸附、抽吸吸附、驅動裝置等將被支撐構件予以支撐(保持)之構成;當採用切斷單元或切斷構件等用於將被切斷構件切斷或在被切斷構件形成切口或切斷線之構件時,也可代替上述例示構件或與上述例示構件併用地採用於切刀刃、雷射刀(laser cutter)、離子束(ion bean)、熱力(thermal power)、熱、水壓、電熱線、氣體或液體等之噴射等進行切斷之構件、或使以適當的驅動裝置組合而成之機器進行切斷之構件移動來進行切斷;當採用施力單元時,可由彈簧、橡膠、樹脂或驅動裝置等來構成施力單元。 The driving device in the foregoing embodiments can be used: electric machines such as rotary motors, linear motors, linear motors, single-axis robots, multi-joint robots with two or more joints, cylinders, hydraulic cylinders, rodless Actuators such as cylinders (rod-less cylinders) and rotary cylinders (rotary cylinders), etc., and drive devices in which these are directly or indirectly combined may also be used. In the aforementioned embodiments, when a rotating member such as a roller is used, a driving device for rotating the rotating member may be provided; the surface of the rotating member may be formed of a deformable member such as rubber or resin, or the rotating member itself may be formed; The surface of the rotating member can be formed by a non-deformable member or the rotating member itself; other members such as a rotating or non-rotating shaft (shaft) or blade can also be used instead of a roller; when pressing units such as pressing rollers or pressing heads are used Or as a member for pressing an object to be pressed such as a pressing member, a roller, a round rod, a blade material, or a brush-shaped member may be used instead of or in combination with the above-mentioned exemplified members. The composition of pressing by spraying gas such as the atmosphere or air; the pressing member can also be composed of deformable members such as rubber, resin, sponge, etc.; the pressing member can also be composed of non-deformable members such as metal and resin; when using When a peeling unit such as a peeling plate or a peeling roller or a member for peeling off the object is peeled off, it is also possible to use a plate-shaped member, a round rod, a roller, etc. instead of the above-mentioned exemplified members or in combination with the above-mentioned exemplified members; to perform peeling The components can also be made of deformable components such as rubber and resin; they can also be composed of non-deformable components; when using support (holding) units or support (holding) components, etc. When supporting (holding) components, it can also be used in holding units such as mechanical chucks or chuck cylinders, Coulomb force, adhesives (adhesive sheets, adhesive tapes), adhesives (adhesives) sheet, adhesive tape), magnetic force, Bernoulli (Bernoulli) adsorption, suction adsorption, driving device, etc. to support (hold) the supported member; When cutting a broken member or forming a cut or a cutting line on the cut member, it can also be used in place of the above-mentioned exemplified members or in combination with the above-mentioned exemplified members. bean), heat (thermal power), heat, water pressure, electric heating wire, jet of gas or liquid, etc. to cut off components, or to move components that are cut off by a machine combined with an appropriate drive device Cut off; when the force application unit is used, the force application unit can be composed of spring, rubber, resin or driving device.

10:供給單元 11:支撐構件 12:支撐輥 13:導輥 14:剝離板 14A:剝離緣 15:驅動輥 15A:轉動馬達 15B:壓輥 16:回收輥 17:長度調整單元 17A:氣缸 17B:輸出軸 17C:切刀刃 20:按壓單元 21:按壓輥 30:移動單元 31:線性馬達 31A:滑件 32:轉動馬達 32A:輸出軸 33:支撐台 33A:支撐面 33R:台中心 34:上部推壓單元 34A:直動馬達 34B:輸出軸 34C:上部推壓板 34R:上部推壓板中心 40:彎折貼附單元 41:轉動馬達 42:驅動輥 43:壓輥 50:突出區域按壓單元 51:第一按壓輥 52:第二按壓輥 53:第三按壓輥 60:能量賦予單元 AS:接著片 AS1:外緣 AS2:外緣 ASH:突出區域 CL:供給單元與按壓單元之間 EA:片貼附裝置 SD:供給方向 RL:剝離片 RS:原料片 UP:一體物 WK:被接著體 WK1:面(一邊的面、其他面) WK2:面(另一邊的面、其他面) WKE:外緣端面 WKR:基準位置 10: Supply unit 11: Support member 12: Support roller 13: guide roller 14: Stripping board 14A: Stripping edge 15: Drive roller 15A: Turn the motor 15B: Pressure roller 16: Recovery roller 17: Length adjustment unit 17A: Cylinder 17B: output shaft 17C: cutting edge 20: Press unit 21: Press roller 30: mobile unit 31: Linear motor 31A: Slider 32: Turn the motor 32A: output shaft 33: support platform 33A: Support surface 33R: Taiwan center 34: Upper pushing unit 34A: Direct drive motor 34B: output shaft 34C: Upper push plate 34R: Center of upper push plate 40: Bending attachment unit 41: Turn the motor 42: Drive roller 43: pressure roller 50: Protruding area pressing unit 51: The first pressing roller 52: The second pressing roller 53: The third pressing roller 60:Energy Giving Unit AS: Follow-up film AS1: outer edge AS2: outer edge ASH: highlighted area CL: between supply unit and pressing unit EA: Sheet Attachment Device SD: supply direction RL: Stripping sheet RS: Raw sheet UP: one body WK: bonded body WK1: Face (face on one side, other face) WK2: Face (face on the other side, other face) WKE: outer edge end face WKR: reference position

圖1係本發明的一實施形態的片貼附裝置的說明圖以及該片貼附裝置的動作說明圖。Fig. 1 is an explanatory view of a sheet sticking device according to an embodiment of the present invention and an explanatory view of the operation of the sheet sticking device.

10:供給單元 10: Supply unit

11:支撐構件 11: Support member

12:支撐輥 12: Support roller

13:導輥 13: guide roller

14:剝離板 14: Stripping board

14A:剝離緣 14A: Stripping edge

15:驅動輥 15: Drive roller

15A:轉動馬達 15A: Turn the motor

15B:壓輥 15B: Pressure roller

16:回收輥 16: Recovery roller

17:長度調整單元 17: Length adjustment unit

17A:氣缸 17A: Cylinder

17B:輸出軸 17B: output shaft

17C:切刀刃 17C: cutting edge

20:按壓單元 20: Press unit

21:按壓輥 21: Press roller

30:移動單元 30: mobile unit

31:線性馬達 31: Linear motor

31A:滑件 31A: Slider

32:轉動馬達 32: Turn the motor

32A:輸出軸 32A: output shaft

33:支撐台 33: support table

33A:支撐面 33A: Support surface

33R:台中心 33R: Taiwan center

34:上部推壓單元 34: Upper pushing unit

34A:直動馬達 34A: Direct drive motor

34B:輸出軸 34B: output shaft

34C:上部推壓板 34C: Upper push plate

34R:上部推壓板中心 34R: Center of upper push plate

40:彎折貼附單元 40: Bending attachment unit

41:轉動馬達 41: Turn the motor

42:驅動輥 42: Drive roller

43:壓輥 43: pressure roller

50:突出區域按壓單元 50: Protruding area pressing unit

51:第一按壓輥 51: The first pressing roller

52:第二按壓輥 52: The second pressing roller

53:第三按壓輥 53: The third pressing roller

60:能量賦予單元 60:Energy Giving Unit

AS:接著片 AS: Follow-up film

AS1:外緣 AS1: outer edge

AS2:外緣 AS2: outer edge

ASH:突出區域 ASH: highlighted area

CL:供給單元與按壓單元之間 CL: between supply unit and pressing unit

EA:片貼附裝置 EA: Sheet Attachment Device

SD:供給方向 SD: supply direction

RL:剝離片 RL: Stripping sheet

RS:原料片 RS: Raw sheet

UP:一體物 UP: one body

WK:被接著體 WK: bonded body

WK1:面(一邊的面、其他面) WK1: Face (face on one side, other face)

WK2:面(另一邊的面、其他面) WK2: Face (face on the other side, other face)

WKE:外緣端面 WKE: outer edge end face

WKR:基準位置 WKR: reference position

Claims (4)

一種片貼附裝置,係具備: 供給單元,係供給能夠彈性變形的接著片; 按壓單元,係將由前述供給單元所供給的前述接著片按壓至被接著體的外緣端面;以及 移動單元,係使前述按壓單元與前述被接著體相對移動,以將前述接著片貼附至前述外緣端面; 前述按壓單元係將前述接著片按壓至前述外緣端面,使得沿著前述接著片的供給方向之一邊的外緣側以及另一邊的外緣側中的至少其中之一形成從前述外緣端面突出的突出區域; 於前述片貼附裝置中還具備: 彎折貼附單元,係藉由對位於前述供給單元與前述按壓單元之間的前述接著片賦予沿著前述接著片的供給方向之方向的張力,以將前述突出區域彎折並貼附至與前述外緣端面相鄰的其他面的方向。 A sheet attaching device is provided with: The supply unit is for supplying elastically deformable bonding sheets; The pressing unit presses the aforementioned adhesive sheet supplied by the aforementioned supply unit to the outer edge end surface of the adhered body; and The moving unit is used to relatively move the aforementioned pressing unit and the aforementioned adhered body, so as to attach the aforementioned adhesive sheet to the aforementioned outer edge end surface; The pressing unit presses the adhesive sheet to the outer edge end surface so that at least one of the outer edge side of one side and the outer edge side of the other side along the feeding direction of the adhesive sheet protrudes from the outer edge end surface. prominent area of In the aforementioned sheet attaching device, it is also provided with: The bending and attaching unit bends and attaches the protruding area to the bonding sheet located between the supplying unit and the pressing unit by applying tension in the direction along the feeding direction of the bonding sheet to the bonding sheet between the feeding unit and the pressing unit. The direction of other surfaces adjacent to the aforementioned outer edge end surface. 如請求項1所記載之片貼附裝置,其中具備:突出區域按壓單元,係將前述突出區域按壓至前述其他面。The sheet sticking device according to claim 1, further comprising: a protrusion area pressing unit for pressing the protrusion area to the other surface. 如請求項1或2所記載之片貼附裝置,其中前述接著片係藉由預定的能量而變形; 前述片貼附裝置並具備:能量賦予單元,係對前述接著片賦予前述預定的能量。 The sheet attaching device as described in claim 1 or 2, wherein the aforementioned bonding sheet is deformed by predetermined energy; The sheet sticking device further includes: an energy imparting unit for imparting the predetermined energy to the adhesive sheet. 一種片貼附方法,係實施: 供給工序,係用供給單元來供給能夠彈性變形的接著片; 按壓工序,係用按壓單元將於前述供給工序中所供給的前述接著片按壓至被接著體的外緣端面;以及 移動工序,係使前述按壓單元與前述被接著體相對移動,以將前述接著片貼附至前述外緣端面; 於前述按壓工序中係將前述接著片按壓至前述外緣端面,使得沿著前述接著片的供給方向之一邊的外緣側以及另一邊的外緣側中的至少其中之一形成從前述外緣端面突出的突出區域; 於前述片貼附方法中還進行: 彎折貼附工序,係藉由對位於前述供給單元與前述按壓單元之間的前述接著片賦予沿著前述接著片的供給方向之方向的張力,以將前述突出區域彎折並貼附至與前述外緣端面相鄰的其他面的方向。 A method for attaching sheets, which is implemented by: The supply process is to use the supply unit to supply the elastically deformable bonding sheet; The pressing step is to use a pressing unit to press the aforementioned bonding sheet supplied in the aforementioned supplying step to the outer edge end surface of the adherend; and The moving process is to move the aforementioned pressing unit and the aforementioned adhered body relatively, so as to attach the aforementioned adhesive sheet to the aforementioned outer edge end surface; In the pressing step, the adhesive sheet is pressed to the outer edge end surface so that at least one of the outer edge side of one side and the outer edge side of the other side along the feeding direction of the adhesive sheet is formed from the outer edge. protruding areas of the end face; In the aforementioned sheet attaching method, also carry out: The bending and attaching process is to bend and attach the protruding area to the bonding sheet located between the supplying unit and the pressing unit by applying tension in the direction along the feeding direction of the bonding sheet to the bonding sheet. The direction of other surfaces adjacent to the aforementioned outer edge end surface.
TW111125262A 2021-09-30 2022-07-06 Sheet sticking apparatus and sheet sticking method capable of firmly protecting outer edge surface of adhered object and outer edge surface sides of other surfaces adjacent to outer edge surface TW202316540A (en)

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