TW202316540A - Sheet sticking apparatus and sheet sticking method capable of firmly protecting outer edge surface of adhered object and outer edge surface sides of other surfaces adjacent to outer edge surface - Google Patents
Sheet sticking apparatus and sheet sticking method capable of firmly protecting outer edge surface of adhered object and outer edge surface sides of other surfaces adjacent to outer edge surface Download PDFInfo
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65C—LABELLING OR TAGGING MACHINES, APPARATUS, OR PROCESSES
- B65C1/00—Labelling flat essentially-rigid surfaces
- B65C1/04—Affixing labels, e.g. wrap-around labels, to two or more flat surfaces of a polyhedral article
- B65C1/042—Affixing labels, e.g. wrap-around labels, to two or more flat surfaces of a polyhedral article using two or more applicators, e.g. cooperating rollers or brushes
- B65C1/045—Affixing labels, e.g. wrap-around labels, to two or more flat surfaces of a polyhedral article using two or more applicators, e.g. cooperating rollers or brushes acting one after the other
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65C—LABELLING OR TAGGING MACHINES, APPARATUS, OR PROCESSES
- B65C9/00—Details of labelling machines or apparatus
- B65C9/26—Devices for applying labels
- B65C9/30—Rollers
- B65C9/32—Cooperating rollers between which articles and labels are fed
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H35/00—Delivering articles from cutting or line-perforating machines; Article or web delivery apparatus incorporating cutting or line-perforating devices, e.g. adhesive tape dispensers
- B65H35/0006—Article or web delivery apparatus incorporating cutting or line-perforating devices
- B65H35/006—Article or web delivery apparatus incorporating cutting or line-perforating devices with means for delivering a predetermined length of tape
- B65H35/0066—Article or web delivery apparatus incorporating cutting or line-perforating devices with means for delivering a predetermined length of tape this length being adjustable
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H35/00—Delivering articles from cutting or line-perforating machines; Article or web delivery apparatus incorporating cutting or line-perforating devices, e.g. adhesive tape dispensers
- B65H35/0006—Article or web delivery apparatus incorporating cutting or line-perforating devices
- B65H35/0073—Details
- B65H35/008—Arrangements or adaptations of cutting devices
- B65H35/0086—Arrangements or adaptations of cutting devices using movable cutting elements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2301/00—Handling processes for sheets or webs
- B65H2301/50—Auxiliary process performed during handling process
- B65H2301/51—Modifying a characteristic of handled material
- B65H2301/515—Cutting handled material
- B65H2301/5153—Details of cutting means
- B65H2301/51532—Blade cutter, e.g. single blade cutter
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Labeling Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
Abstract
Description
本發明係關於一種片(sheet)貼附裝置以及片貼附方法。The invention relates to a sheet attaching device and a sheet attaching method.
已知有一種用於將接著片貼附至被接著體之片貼附裝置(例如參照專利文獻1)。 [先前技術文獻] [專利文獻] There is known a sheet attaching device for attaching an adhesive sheet to an adherend (for example, refer to Patent Document 1). [Prior Art Literature] [Patent Document]
專利文獻1:日本特開2012-84578號公報。Patent Document 1: Japanese Patent Application Laid-Open No. 2012-84578.
[發明所欲解決之課題][Problem to be Solved by the Invention]
於專利文獻1所記載的片貼附裝置(1)(片貼附裝置)中,即使將兩面接著膠帶(S)(接著片)貼附至晶圓(W)(被接著體)的一邊的面的外緣部,也無法將接著片貼附至該被接著體的外緣端面。因此,例如,當將被接著體浸漬於液體中或是暴露於氣體中以施加預定的處理時,會發生如液體、氣體等異物附著至被接著體的外緣端面之缺陷。In the sheet attaching device (1) (sheet attaching device) described in Patent Document 1, even if the double-sided adhesive tape (S) (adhesive sheet) is attached to one side of the wafer (W) (adhered body), The outer edge portion of the surface, and the adhesive sheet cannot be attached to the outer edge end surface of the adhered body. Therefore, for example, when an adherend is immersed in a liquid or exposed to a gas to apply a predetermined process, a defect that foreign matter such as liquid, gas, etc. adheres to the outer peripheral end surface of the adherend occurs.
本發明的目的在於提供能用接著片確實地保護被接著體的外緣端面以及與該外緣端面相鄰的其他面中的外緣端面側之片貼附裝置以及片貼附方法。 [用於解決課題的手段] An object of the present invention is to provide a sheet attaching device and a sheet attaching method capable of reliably protecting the outer edge end surface of an adherend and the outer edge end surface side of other surfaces adjacent to the outer edge end surface with an adhesive sheet. [Means used to solve the problem]
本發明係採用申請專利範圍所記載之構成。 [發明功效] The present invention adopts the constitution described in the scope of the patent application. [Efficacy of the invention]
根據本發明,由於將貼附至外緣端面的接著片的突出區域彎折並貼附至與該外緣端面相鄰的其他面的方向,因此能用接著片確實地保護被接著體的外緣端面以及與該外緣端面相鄰的其他面中的外緣端面側。According to the present invention, since the protruding region of the adhesive sheet attached to the outer edge end surface is bent and attached in the direction of the other surface adjacent to the outer edge end surface, the outer surface of the adherend can be reliably protected by the adhesive sheet. The outer edge end surface and the outer edge end surface side of the other surfaces adjacent to the outer edge end surface.
以下,基於圖式對本發明一實施形態進行說明。 另外,本實施形態中的X軸、Y軸、Z軸係處於分別正交之關係,將X軸以及Y軸設為預定平面內的軸,將Z軸設為與該預定平面正交的軸。進一步地,在本實施形態中以與Y軸平行的從圖1中的下方方向來觀察之情況作為基準,當未指定圖而表示方向時,「上」係指Z軸的箭頭方向而「下」為該Z軸的箭頭方向的反方向,「左」為X軸的箭頭方向而「右」為該X軸的箭頭方向的反方向,「前」為與Y軸平行的圖1中的中正前方方向而「後」為該正前方方向的反方向。另外,由於圖1中的(E)、(F)係於X-Y平面上從斜向觀察的圖,因此不顯示表示方向的箭頭。 Hereinafter, one embodiment of the present invention will be described based on the drawings. In addition, the X-axis, Y-axis, and Z-axis in this embodiment are in a relationship of being perpendicular to each other, and the X-axis and the Y-axis are set as axes in a predetermined plane, and the Z-axis is set as an axis orthogonal to the predetermined plane. . Further, in the present embodiment, the case of viewing from the downward direction in FIG. 1 parallel to the Y axis is used as a reference. When the direction is indicated without specifying the figure, "up" refers to the arrow direction of the Z axis and "down" refers to the arrow direction of the Z axis. " is the opposite direction of the arrow direction of the Z-axis, "left" is the direction of the arrow of the X-axis and "right" is the opposite direction of the arrow direction of the X-axis, and "front" is the center positive in Figure 1 parallel to the Y-axis The front direction and "rear" is the opposite direction of the front direction. In addition, since (E) and (F) in FIG. 1 are views viewed obliquely on the X-Y plane, arrows indicating directions are not displayed.
本發明的片貼附裝置EA係具備:供給單元10,係實施供給工序,該供給工序係供給能夠彈性變形的接著片AS;按壓單元20,係實施按壓工序,該按壓工序係將由供給單元10所供給的接著片AS按壓至被接著體WK的外緣端面WKE;移動單元30,係實施移動工序,該移動工序係使按壓單元20與被接著體WK相對移動,以將接著片AS貼附至外緣端面WKE;彎折貼附單元40,係實施彎折貼附工序,該彎折貼附工序係藉由對位於供給單元10與按壓單元20之間CL的接著片AS賦予沿著該接著片AS的供給方向SD之方向的張力,以將突出區域ASH彎折並貼附至作為與外緣端面WKE相鄰的其他面之一邊的面WK1以及另一邊的面WK2的方向;以及突出區域按壓單元50,係實施突出區域按壓工序,該突出區域按壓工序係將突出區域ASH按壓至一邊的面WK1以及另一邊的面WK2兩者。
另外,於本實施形態中係採用以基準位置WKR為中心的圓形形狀的被接著體WK。
The sheet sticking device EA of the present invention is equipped with: the
供給單元10係具備:支撐構件11,係直接或間接支撐構成該供給單元10之各構件;支撐輥12,係支撐由接著片AS暫時附著至帶狀的剝離片RL而成的原料片(raw sheet)RS;導輥(guide roller)13,係引導原料片RS;作為剝離單元之剝離板14,係用剝離緣14A將剝離片RL折返,並從該剝離片RL將接著片AS剝離;驅動輥15,係被作為驅動裝置的轉動馬達15A中未圖示的輸出軸所支撐,並與壓輥(pinch roller)15B一起夾入剝離片RL;作為回收單元之回收輥16,係被未圖示的驅動裝置的輸出軸所支撐,並於片貼附裝置EA進行自動運轉的期間,對存在於回收輥16與壓輥15B之間的剝離片RL常態地賦予預定的張力而回收該剝離片RL;以及作為切斷單元之長度調整單元17,係將接著片AS切斷。
長度調整單元17係具備:作為驅動裝置之氣缸(air cylinder)17A、被該氣缸17A的輸出軸17B所支撐的切刀(cutter)刃17C。
The
按壓單元20係具備按壓輥21,該按壓輥21係被未圖示的支架以可旋轉方式而支撐。按壓單元20係能將該接著片AS按壓至外緣端面WKE,使得沿著接著片AS的供給方向SD之一邊的外緣AS1側以及另一邊的外緣AS2側兩者形成從外緣端面WKE突出的突出區域ASH。The
移動單元30係具備:作為驅動裝置之線性馬達31;作為驅動裝置之轉動馬達32,係被線性馬達31中的滑件(slider)31A所支撐;支撐台33,係被轉動馬達32的輸出軸32A所支撐,並具有能夠藉由減壓泵、真空抽氣器 (vacuum ejector)等未圖示的減壓單元(保持單元)進行吸附保持之支撐面33A;上部推壓單元34,係從上方將被接著體WK壓靠至該支撐台33。另外,支撐台33係藉由轉動馬達32而以台中心33R為中心旋轉之構成。
上部推壓單元34係具備:作為驅動裝置之直動馬達34A;以及上部推壓板34C,係被直動馬達34A的輸出軸34B所支撐,並能夠追隨支撐台33的移動而旋轉。另外,上部推壓板34C係以上部推壓板中心34R為中心而旋轉。
The moving
彎折貼附單元40係具備:作為扭矩可控的驅動裝置之轉動馬達41;以及驅動輥42,係被轉動馬達41中未圖示的輸出軸所支撐,並與壓輥43一起夾入原料片RS。The bending and attaching
突出區域按壓單元50係具備第一按壓輥51、第二按壓輥52、第三按壓輥53,此三者係被未圖示的支架以可旋轉方式而支撐。於本實施形態中,第一按壓輥51、第二按壓輥52、第三按壓輥53係如圖1中的(E)至圖1中的(G)所示,分別配置為上下一對,當這些第一按壓輥51、第二按壓輥52、第三按壓輥53將被接著體WK夾入時,成為第一按壓輥51、第二按壓輥52、第三按壓輥53配置為沿著該被接著體WK的外緣之狀態。此外,例如,第一按壓輥51、第二按壓輥52、第三按壓輥53係能以分別相對於Z軸以30度、60度、90度往基準位置WKR的方向傾斜之未圖示的旋轉軸為中心而旋轉。The protrusion
對以上的片貼附裝置EA的動作進行說明。
首先,如圖1中的(A)所示,片貼附裝置EA的使用者(以下僅稱「使用者」)將原料片RS設置到該片貼附裝置EA,且該片貼附裝置EA中各構件係已配置於如該圖中以實線所示的初始位置,於設置原料片RS之後,經由操作面板、個人電腦等未圖示的操作單元輸入開始自動運轉的訊號。然後,供給單元10係驅動轉動馬達15A,以拉出原料片RS,當如圖1(A)中實線所示,藉由剝離板14的剝離緣14A將接著片AS的供給方向前端部剝離預定長度時,停止驅動轉動馬達15A。
The operation|movement of the sheet|seat sticking apparatus EA mentioned above is demonstrated.
First, as shown in (A) in FIG. 1 , the user of the sheet attaching device EA (hereinafter simply referred to as "user") sets the raw material sheet RS to the sheet attaching device EA, and the sheet attaching device EA Each component is arranged at the initial position shown by the solid line in the figure. After the raw sheet RS is set, a signal to start automatic operation is input through an operation unit (not shown) such as an operation panel or a personal computer. Then, the
接著,如圖1中的(A)所示,當使用者或多關節機器人、輸送帶等未圖示的搬送單元將被接著體WK載放於支撐面33A上使得基準位置WKR與台中心33R重疊時,移動單元30係驅動未圖示的減壓單元,並開始由該支撐面33A進行吸附保持。此外,供給單元10係驅動轉動馬達15A,並拉出原料片RS,如圖1中的(A)中的二點鏈線所示,使接著片AS的供給方向前端部位於按壓輥21的前方預定位置。此時,接著片AS的供給方向前端部係藉由未圖示的空氣噴嘴、離子產生器等施力單元進行施力而成為與按壓輥21的前方接觸的狀態。Next, as shown in (A) in FIG. 1 , when the user or an unillustrated conveying unit such as an articulated robot or a conveyor belt places the adhered body WK on the
之後,移動單元30係驅動線性馬達31,以使被接著體WK往左側移動,且當如圖1中的(B)、(C)所示般,台中心33R(基準位置WKR)與上部推壓板中心34R一致時,停止驅動線性馬達31。此時,接著片AS的供給方向前端部係如圖1中的(B)所示般,成為被按壓輥21與被接著體WK的外緣端面WKE夾入的狀態,且成為第一按壓輥51、第二按壓輥52、第三按壓輥53能夠將接著片AS按壓至被接著體WK的外緣部的狀態。Afterwards, the moving
接著,移動單元30係驅動直動馬達34A,如圖1中的(C)所示,藉由上部推壓板34C與支撐台33夾入被接著體WK之後,驅動轉動馬達32,使被接著體WK沿逆時針方向旋轉,並將接著片AS貼附至被接著體WK的外緣端面WKE。此時,彎折貼附單元40係驅動轉動馬達41,並檢測從接著片AS經由驅動輥42施加的扭矩,使該扭矩常態地為預定的值,並於此情況下供給接著片AS,藉此對接著片AS賦予沿著供給方向SD之方向的張力。藉由彎折單元40如上述般進行供給,使得被貼附至被接著體WK的外緣端面WKE之能夠彈性變形的接著片AS因內在的彈性恢復力而如圖1中的(C)中的二點鏈線所示般,一邊的外緣AS1側的突出區域ASH係往一邊的面WK1側彎折並貼附至該一邊的面WK1,且另一邊的外緣AS2側的突出區域ASH係往另一邊的面WK2側彎折並貼附至該另一邊的面WK2。Next, the moving
另外,若有下述等情況,亦可進行:突出區域按壓工序,係藉由突出區域按壓單元50將各突出區域ASH按壓至一邊的面WK1以及另一邊的面WK2;上述情況係指如因為接著片AS的特性、特質、性質、材質、組成、構成、形狀、尺寸以及重量、氛圍的條件、其他因素等各種條件導致各突出區域ASH並未如圖1中的(C)中的二點鏈線所示般地彎折至與被接著體WK接觸之情況;雖然各突出區域ASH彎折至與被接著體WK接觸,但仍因按壓力不足而無法得到預定的接著力之情況;出於確保起見而想要先將各突出區域ASH按壓至一邊的面WK1以及另一邊的面WK2之情況。此突出區域按壓工序係如圖1中的(D)、(E)、(F)所示般,於持續使被接著體WK往逆時針方向旋轉的期間,第一按壓輥51、第二按壓輥52係逐步地將各突出區域ASH彎折,最終如圖1中的(G)所示,第三按壓輥53將各突出區域ASH按壓至被接著體WK中的一邊的面WK1以及另一邊的面WK2(以上為「突出區域按壓工序」)。In addition, if there are the following situations, it can also be carried out: the protruding area pressing process is to press each protruding area ASH to the surface WK1 on one side and the surface WK2 on the other side by the protruding
而且,於持續旋轉支撐台31以及貼附接著片AS的期間,供給單元10係驅動氣缸17A,並使切刀刃17C前後移動將該接著片AS切斷並使得接著片AS為能貼附至環繞被接著體WK的外緣端面WKE一圈之長度。接著,當用剝離板14的剝離緣14A將藉由切斷而形成之接著片AS的新的供給方向前端部予以剝離預定長度時,供給單元10係停止驅動轉動馬達15A,並停止拉出原料片RS。之後,當藉由切斷而形成之接著片AS的供給方向後端部係貼附至被接著體WK中的一邊的面WK1以及另一邊的面WK2而形成一體物UP時,移動單元30係停止驅動轉動馬達32。此時,貼附至被接著體WK中的一邊的面WK1以及另一邊的面WK2之接著片AS中的前端部與後端部係可彼此重疊,亦可彼此分離,亦可以彼此對接的方式接觸。Moreover, during the continuous rotation of the support table 31 and the attachment of the adhesive sheet AS, the
接著,於移動單元30驅動直動馬達34A並使上部推壓板34C返回至初始位置之後,停止驅動未圖示的減壓單元,並解除由支撐面33A進行的吸附保持。之後,當使用者或未圖示的搬送單元將一體物UP搬送至下個工序時,移動單元30係驅動線性馬達31,並使支撐台33返回初始位置,於此之後也重複與上述相同的動作。Next, after the moving
根據如上所述的實施形態,由於將貼附至外緣端面WKE之接著片AS中的突出區域AS1、AS2彎折並貼附至與該外緣端面WKE相鄰的一邊的面WK1以及另一邊的面WK2,因此能用接著片AS確實地保護被接著體WK的外緣端面WKE以及與該外緣端面WKE相鄰的一邊的面WK1以及另一邊的面WK2中的外緣端面側。According to the embodiment described above, since the protruding areas AS1 and AS2 of the adhesive sheet AS attached to the outer edge end surface WKE are bent and attached to the surface WK1 on one side adjacent to the outer edge end surface WKE and the other side Therefore, the adhesive sheet AS can reliably protect the outer edge end surface WKE of the adherend WK and the outer edge end surface side of the one side surface WK1 adjacent to the outer edge end surface WKE and the other side surface WK2.
本發明中的單元以及工序在能發揮針對這些單元以及工序所說明的動作、功能或工序的前提下就沒有任何限制,尤其是完全不限為前述實施形態中所示的僅一實施形態的構成物、工序。例如,供給單元只要是能夠供給能夠彈性變形的接著片則可為任何單元,只要是對照申請時的技術常識在該技術範圍內則沒有任何限制(其他單元以及工序也相同)。The units and processes in the present invention are not limited in any way on the premise that the actions, functions or processes described for these units and processes can be performed, and in particular, they are not limited to the configuration of only one embodiment shown in the foregoing embodiments at all. objects, processes. For example, the supply unit may be any unit as long as it can supply an elastically deformable adhesive sheet, and there is no limitation as long as it is within the scope of the technical common sense at the time of application (other units and processes are also the same).
供給單元10可從原料片RS將接著片AS剝離而供給該接著片AS,且該原料片RS中係於暫時附著至帶狀的剝離片RL之帶狀的接著片基材形成閉環狀或整個短邊寬度方向的切口,並以該切口所劃分出的預定區域作為該接著片AS;亦可從原料片RS將接著片AS剝離而供給該接著片AS,且該原料片RS中係採用由帶狀的接著片基材暫時附著至帶狀的剝離片RL而成的帶狀接著片原料片,並於拉出該帶狀接合片原料片的途中由作為切斷單元之切斷刀而於接著片基材形成閉環狀或整個短邊寬度方向的切口,並以該切口所劃分出的預定區域為接著片AS;亦可從由帶狀的接著片AS暫時附著至帶狀的剝離片RL而成的原料片RS將該帶狀的接著片AS剝離而供給該接著片AS;亦可從並非捲繞而是例如扇折(fanfold)之原料片RS剝離接著片AS而供給接著片AS;亦可採用對剝離片RL並非進行捲繞而是進行例如扇折而回收、以切碎機切碎而回收、不刻意地累積而回收之回收單元;亦可不採用回收單元;亦可拉出並供給並未暫時附著至剝離片RL之接著片AS;供給單元可具備未圖示的施力單元,亦可不具備施力單元;亦可採用長度調整單元17,該長度調整單元17係將跨越供給單元10與按壓輥21(按壓單元20)之間CL的接著片AS切斷或是於被接著體WK上將接著片AS切斷;當採用事先設定為預定長度之接著片AS時、以及於拉出帶狀接著片原料片的途中形成預定形狀的接著片AS時等情況下,供給單元10可具備長度調整單元17,亦可不具備長度調整單元17。The
按壓單元20亦可將接著片AS按壓至外緣端面WKE並使得該接著片AS中僅沿著供給方向SD的一邊的外緣AS1側形成從外緣端面WKE突出的突出區域ASH;亦可將接著片AS按壓至外緣端面WKE並使得接著片AS中僅沿著供給方向SD的另一邊的外緣AS2側形成從外緣端面WKE突出的突出區域ASH。The
移動單元30可在不使支撐台33移動的情況下或是使支撐台33移動的情況下,使供給單元10以及/或者按壓單元20移動,以將接著片AS貼附至被接著體WK;亦可採用無法由保持面33A進行吸附保持之支撐台33;移動單元30可具備上部推壓單元34,亦可不具備上部推壓單元34。The moving
彎折貼附單元40亦可對位於供給單元10與按壓單元20之間CL的接著片AS賦予沿著該接著片AS的供給方向SD之方向的張力,藉此將突出區域ASH彎折並僅貼附至與外緣端面WKE相鄰的一邊的面WK1的方向;亦可將突出區域ASH彎折並僅貼附至與外緣端面WKE相鄰的另一邊的面WK2的方向;使用者能考慮接著片AS的特性、特質、性質、材質、組成、構成、形狀、尺寸以及重量、氛圍的條件、其他因素等各種條件而任意地決定賦予至接著片AS的預定的張力。The bending and attaching
突出區域按壓單元50亦可不由第一按壓輥51、第二按壓輥52、第三按壓輥53三者所構成,而是由例如一者或兩者之按壓輥所構成,或是由四者以上之按壓輥所構成;亦可取代或併用第一按壓輥51、第二按壓輥52、第三按壓輥53而採用利用氣體的噴射之單元、利用刷狀構件之單元、利用葉片(blade)狀構件之單元等;第一按壓輥51、第二按壓輥52、第三按壓輥53等的按壓物的材質亦可為橡膠、樹脂、海綿、金屬等;第一按壓輥51、第二按壓輥52、第三按壓輥53亦可不為一對,亦可僅設置於被接著體WK中一邊的面WK1側或是另一邊的面WK2側,亦可僅將突出區域ASH按壓至一邊的面WK1,亦可僅按壓至另一邊的面WK2;第一按壓輥51、第二按壓輥52、第三按壓輥53相對於Z軸的傾斜角度亦可分別為30度、60度、90度之外的傾斜角度,例如各個傾斜角度亦可為15度、45度、91度等任意的傾斜角度;當即使不進行突出區域按壓工序該突出區域ASH也會貼附至一邊的面WK1或另一邊的面WK2時,本發明的片貼附裝置EA可具備也可不具備突出區域按壓單元50。The protruding
片貼附裝置EA可將一片接著片AS或是複數片的接著片AS貼附至被接著體WK的外緣端面WKE以及與該外緣端面WKE相鄰的其他面;當將一片接著片AS或是複數片的接著片AS貼附至被接著體WK的外緣端面WKE以及與該外緣端面WKE相鄰的其他面時,接著片AS的供給方向前端部與供給方向後端部係可彼此重疊,亦可彼此分離,亦可以彼此對接的方式接觸。
於片貼附裝置EA中,亦可於支撐台33與被接著體WK之間配置金屬、玻璃、樹脂、其他接著片等支撐構件,並用接著片AS使被接著體WK與支撐構件一體化;亦可採用藉由預定的能量而變形的接著片以作為接著片AS,並如圖1中的(A)中的二點鏈線所示,具備用於對接著片AS賦予預定的能量之能量賦予單元60。作為如此的預定的能量,能例示如紫外線、紅外線、可見光、聲波、X射線或珈瑪射線等的電磁波、熱等;作為能量賦予單元60,可為賦予紫外線、紅外線、可見光、聲波、X射線或珈瑪射線等電磁波、熱水、熱風等熱之單元;能考慮接著片AS的特性、特質、性質、材質、組成以及構成等而任意決定。此外,如此的接著片AS可為藉由預定的能量隨著收縮而變形之接著片;亦可為隨著膨脹而變形之接著片;亦可為不伴隨收縮也不伴隨膨脹而變形之接著片。
The sheet attaching device EA can attach one sheet AS or a plurality of sheets AS to the outer edge end surface WKE of the adhered body WK and other surfaces adjacent to the outer edge end surface WKE; Or when a plurality of adhesive sheets AS are attached to the outer edge end surface WKE of the adhered body WK and other surfaces adjacent to the outer edge end surface WKE, the feeding direction front end and the feeding direction rear end of the adhesive sheet AS can be They overlap each other, can also be separated from each other, and can also be in contact with each other.
In the sheet attaching device EA, support members such as metal, glass, resin, and other bonding sheets can also be arranged between the support table 33 and the adherend WK, and the adherend WK and the support member can be integrated with the adhesive sheet AS; It is also possible to use an adhesive sheet deformed by a predetermined energy as the adhesive sheet AS, and as shown by the two-point chain line in (A) in FIG. 1 , it has energy for imparting predetermined energy to the adhesive sheet AS
本發明中之接著片AS、支撐構件以及被接著體WK的材質、種類、形狀等並無特別限制。例如,接著片AS、支撐構件以及被接著體WK可為圓形、橢圓形、三角形或四邊形等多邊形,亦可為其他形狀;接著片AS可為感壓接著性、感熱接著性等接著形態,當採用感熱接著性的接著片AS時,只要用適當方式進行接著即可,例如設置用來加熱該接著片AS之適當的線圈加熱器(coil heater)以及/或者熱管(heat pipe)之加熱側等加熱單元。而且,如此的接著片AS可為例如僅具有接著劑層之單層的接著片;由基材與接著劑層積層而成的兩層的接著片;於基材與接著劑層之間積層有一個或複數個中間層而成的三層或三層以上的接著片;於基材的上表面積層有一個或複數個覆蓋層之三層或三層以上的接著片;基材、中間層或是覆蓋層係設置為能夠剝離之接著片;僅由接著劑層構成之單層的兩面接著片;於一個或複數個中間層的兩個最外表面積層有接著劑層之兩面接著片等,可為任何的接著片。進一步地,作為支撐構件以及被接著體WK,例如可為食品、樹脂容器、矽半導體晶圓或化合物半導體晶圓等半導體晶圓、電路基板、光碟等資訊記錄基板、玻璃板、鋼板、陶器、木板或樹脂等單獨物質,亦可為該等兩個以上形成之複合物,可將任意形態之構件或物品等作為對象。另外,接著片AS可以替換為功能性、用途性的讀法,例如,可為資訊記載用標籤、裝飾用標籤、保護片、切割帶、晶粒黏著膜(die attach film)、固晶帶(die bond tape)、記錄層形成樹脂片等任意的片、膜、帶等。The material, type, shape, etc. of the adhesive sheet AS, the supporting member, and the adhered body WK in the present invention are not particularly limited. For example, the adhesive sheet AS, the supporting member, and the adhered body WK may be polygons such as circular, elliptical, triangular or quadrilateral, or other shapes; the adhesive sheet AS may be in the form of pressure-sensitive adhesiveness, heat-sensitive adhesiveness, etc. When adopting the heat-sensitive adhesive adhesive sheet AS, it only needs to be bonded in an appropriate way, for example, an appropriate coil heater (coil heater) and/or the heating side of the heat pipe (heat pipe) are provided for heating the adhesive sheet AS and other heating units. Moreover, such an adhesive sheet AS may be, for example, a single-layer adhesive sheet having only an adhesive layer; a two-layer adhesive sheet formed by laminating a substrate and an adhesive layer; A three-layer or more than three-layer adhesive sheet made of one or more intermediate layers; a three-layer or more than three-layer adhesive sheet with one or more covering layers layered on the upper surface of the base material; a base material, an intermediate layer or It is an adhesive sheet with a cover layer that can be peeled off; a single-layer double-sided adhesive sheet composed of only an adhesive layer; a double-sided adhesive sheet with an adhesive layer on the two outermost layers of one or more intermediate layers, etc. Can be any adhesive. Further, as the supporting member and the adherend WK, for example, food, resin containers, semiconductor wafers such as silicon semiconductor wafers or compound semiconductor wafers, circuit boards, information recording substrates such as optical discs, glass plates, steel plates, ceramics, A single substance such as a wood board or resin may also be a composite of two or more of them, and any form of member or article may be used as an object. In addition, the adhesive sheet AS can be replaced with a functional and usable reading method, for example, it can be a label for information recording, a label for decoration, a protective sheet, a dicing tape, a die attach film (die attach film), a die attach tape ( die bond tape), recording layer forming resin sheet, and other arbitrary sheets, films, tapes, and the like.
前述實施形態中的驅動裝置中可採用:轉動馬達、直動馬達、線性馬達、單軸機器人、具備二軸或三軸以上的關節之多關節機器人等電動機器,氣缸、油壓缸、無桿缸(rod-less cylinder)以及旋轉缸(rotary cylinder)等致動器(actuator)等,此外,亦可採用將該等直接或間接組合而成的驅動裝置。 在前述實施形態中,當採用輥等旋轉構件時,也可具備使該旋轉構件旋轉驅動之驅動裝置;可由橡膠或樹脂等能夠變形的構件來構成旋轉構件的表面或是構成旋轉構件本身;也可由不變形的構件來構成旋轉構件的表面或是構成旋轉構件本身;也可代替輥而採用旋轉或不旋轉的軸件(shaft)或葉片等其他構件;當採用按壓輥或按壓頭等按壓單元或如按壓構件之用於對被按壓物進行按壓的構件時,也可代替上述例示構件或與上述例示構件併用地採用輥、圓棒、葉片材、刷子狀構件,另外也可採用藉由大氣或空氣等氣體之噴射進行按壓之構成;也可由橡膠、樹脂、海綿等能夠變形之構件來構成進行按壓之構件;也可由金屬、樹脂等不變形的構件來構成進行按壓之構件;當採用如剝離板或剝離輥等剝離單元或剝離構件之用於剝離被剝離物之構件時,也可代替上述例示構件或與上述例示構件併用地採用板狀構件、圓棒、輥等構件;進行剝離的構件也可由橡膠、樹脂等能夠變形的構件所構成;亦可由不變形的構件所構成;當採用支撐(保持)單元或支撐(保持)構件等用於對被支撐構件(被保持構件)進行支撐(保持)之構件時,也可採用於機械夾具(mechanical chuck)或夾具缸(chuck cylinder)等固持單元、庫侖力(Coulomb force)、接著劑(接著片、接著帶)、黏著劑(黏著片、黏著帶)、磁力、伯努利(Bernoulli)吸附、抽吸吸附、驅動裝置等將被支撐構件予以支撐(保持)之構成;當採用切斷單元或切斷構件等用於將被切斷構件切斷或在被切斷構件形成切口或切斷線之構件時,也可代替上述例示構件或與上述例示構件併用地採用於切刀刃、雷射刀(laser cutter)、離子束(ion bean)、熱力(thermal power)、熱、水壓、電熱線、氣體或液體等之噴射等進行切斷之構件、或使以適當的驅動裝置組合而成之機器進行切斷之構件移動來進行切斷;當採用施力單元時,可由彈簧、橡膠、樹脂或驅動裝置等來構成施力單元。 The driving device in the foregoing embodiments can be used: electric machines such as rotary motors, linear motors, linear motors, single-axis robots, multi-joint robots with two or more joints, cylinders, hydraulic cylinders, rodless Actuators such as cylinders (rod-less cylinders) and rotary cylinders (rotary cylinders), etc., and drive devices in which these are directly or indirectly combined may also be used. In the aforementioned embodiments, when a rotating member such as a roller is used, a driving device for rotating the rotating member may be provided; the surface of the rotating member may be formed of a deformable member such as rubber or resin, or the rotating member itself may be formed; The surface of the rotating member can be formed by a non-deformable member or the rotating member itself; other members such as a rotating or non-rotating shaft (shaft) or blade can also be used instead of a roller; when pressing units such as pressing rollers or pressing heads are used Or as a member for pressing an object to be pressed such as a pressing member, a roller, a round rod, a blade material, or a brush-shaped member may be used instead of or in combination with the above-mentioned exemplified members. The composition of pressing by spraying gas such as the atmosphere or air; the pressing member can also be composed of deformable members such as rubber, resin, sponge, etc.; the pressing member can also be composed of non-deformable members such as metal and resin; when using When a peeling unit such as a peeling plate or a peeling roller or a member for peeling off the object is peeled off, it is also possible to use a plate-shaped member, a round rod, a roller, etc. instead of the above-mentioned exemplified members or in combination with the above-mentioned exemplified members; to perform peeling The components can also be made of deformable components such as rubber and resin; they can also be composed of non-deformable components; when using support (holding) units or support (holding) components, etc. When supporting (holding) components, it can also be used in holding units such as mechanical chucks or chuck cylinders, Coulomb force, adhesives (adhesive sheets, adhesive tapes), adhesives (adhesives) sheet, adhesive tape), magnetic force, Bernoulli (Bernoulli) adsorption, suction adsorption, driving device, etc. to support (hold) the supported member; When cutting a broken member or forming a cut or a cutting line on the cut member, it can also be used in place of the above-mentioned exemplified members or in combination with the above-mentioned exemplified members. bean), heat (thermal power), heat, water pressure, electric heating wire, jet of gas or liquid, etc. to cut off components, or to move components that are cut off by a machine combined with an appropriate drive device Cut off; when the force application unit is used, the force application unit can be composed of spring, rubber, resin or driving device.
10:供給單元 11:支撐構件 12:支撐輥 13:導輥 14:剝離板 14A:剝離緣 15:驅動輥 15A:轉動馬達 15B:壓輥 16:回收輥 17:長度調整單元 17A:氣缸 17B:輸出軸 17C:切刀刃 20:按壓單元 21:按壓輥 30:移動單元 31:線性馬達 31A:滑件 32:轉動馬達 32A:輸出軸 33:支撐台 33A:支撐面 33R:台中心 34:上部推壓單元 34A:直動馬達 34B:輸出軸 34C:上部推壓板 34R:上部推壓板中心 40:彎折貼附單元 41:轉動馬達 42:驅動輥 43:壓輥 50:突出區域按壓單元 51:第一按壓輥 52:第二按壓輥 53:第三按壓輥 60:能量賦予單元 AS:接著片 AS1:外緣 AS2:外緣 ASH:突出區域 CL:供給單元與按壓單元之間 EA:片貼附裝置 SD:供給方向 RL:剝離片 RS:原料片 UP:一體物 WK:被接著體 WK1:面(一邊的面、其他面) WK2:面(另一邊的面、其他面) WKE:外緣端面 WKR:基準位置 10: Supply unit 11: Support member 12: Support roller 13: guide roller 14: Stripping board 14A: Stripping edge 15: Drive roller 15A: Turn the motor 15B: Pressure roller 16: Recovery roller 17: Length adjustment unit 17A: Cylinder 17B: output shaft 17C: cutting edge 20: Press unit 21: Press roller 30: mobile unit 31: Linear motor 31A: Slider 32: Turn the motor 32A: output shaft 33: support platform 33A: Support surface 33R: Taiwan center 34: Upper pushing unit 34A: Direct drive motor 34B: output shaft 34C: Upper push plate 34R: Center of upper push plate 40: Bending attachment unit 41: Turn the motor 42: Drive roller 43: pressure roller 50: Protruding area pressing unit 51: The first pressing roller 52: The second pressing roller 53: The third pressing roller 60:Energy Giving Unit AS: Follow-up film AS1: outer edge AS2: outer edge ASH: highlighted area CL: between supply unit and pressing unit EA: Sheet Attachment Device SD: supply direction RL: Stripping sheet RS: Raw sheet UP: one body WK: bonded body WK1: Face (face on one side, other face) WK2: Face (face on the other side, other face) WKE: outer edge end face WKR: reference position
圖1係本發明的一實施形態的片貼附裝置的說明圖以及該片貼附裝置的動作說明圖。Fig. 1 is an explanatory view of a sheet sticking device according to an embodiment of the present invention and an explanatory view of the operation of the sheet sticking device.
10:供給單元 10: Supply unit
11:支撐構件 11: Support member
12:支撐輥 12: Support roller
13:導輥 13: guide roller
14:剝離板 14: Stripping board
14A:剝離緣 14A: Stripping edge
15:驅動輥 15: Drive roller
15A:轉動馬達 15A: Turn the motor
15B:壓輥 15B: Pressure roller
16:回收輥 16: Recovery roller
17:長度調整單元 17: Length adjustment unit
17A:氣缸 17A: Cylinder
17B:輸出軸 17B: output shaft
17C:切刀刃 17C: cutting edge
20:按壓單元 20: Press unit
21:按壓輥 21: Press roller
30:移動單元 30: mobile unit
31:線性馬達 31: Linear motor
31A:滑件 31A: Slider
32:轉動馬達 32: Turn the motor
32A:輸出軸 32A: output shaft
33:支撐台 33: support table
33A:支撐面 33A: Support surface
33R:台中心 33R: Taiwan center
34:上部推壓單元 34: Upper pushing unit
34A:直動馬達 34A: Direct drive motor
34B:輸出軸 34B: output shaft
34C:上部推壓板 34C: Upper push plate
34R:上部推壓板中心 34R: Center of upper push plate
40:彎折貼附單元 40: Bending attachment unit
41:轉動馬達 41: Turn the motor
42:驅動輥 42: Drive roller
43:壓輥 43: pressure roller
50:突出區域按壓單元 50: Protruding area pressing unit
51:第一按壓輥 51: The first pressing roller
52:第二按壓輥 52: The second pressing roller
53:第三按壓輥 53: The third pressing roller
60:能量賦予單元 60:Energy Giving Unit
AS:接著片 AS: Follow-up film
AS1:外緣 AS1: outer edge
AS2:外緣 AS2: outer edge
ASH:突出區域 ASH: highlighted area
CL:供給單元與按壓單元之間 CL: between supply unit and pressing unit
EA:片貼附裝置 EA: Sheet Attachment Device
SD:供給方向 SD: supply direction
RL:剝離片 RL: Stripping sheet
RS:原料片 RS: Raw sheet
UP:一體物 UP: one body
WK:被接著體 WK: bonded body
WK1:面(一邊的面、其他面) WK1: Face (face on one side, other face)
WK2:面(另一邊的面、其他面) WK2: Face (face on the other side, other face)
WKE:外緣端面 WKE: outer edge end face
WKR:基準位置 WKR: reference position
Claims (4)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2021160461A JP2023050393A (en) | 2021-09-30 | 2021-09-30 | Sheet sticking device and sheet sticking method |
JP2021-160461 | 2021-09-30 |
Publications (1)
Publication Number | Publication Date |
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TW202316540A true TW202316540A (en) | 2023-04-16 |
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Application Number | Title | Priority Date | Filing Date |
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TW111125262A TW202316540A (en) | 2021-09-30 | 2022-07-06 | Sheet sticking apparatus and sheet sticking method capable of firmly protecting outer edge surface of adhered object and outer edge surface sides of other surfaces adjacent to outer edge surface |
Country Status (4)
Country | Link |
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JP (1) | JP2023050393A (en) |
CN (1) | CN115872216A (en) |
DE (1) | DE102022209016A1 (en) |
TW (1) | TW202316540A (en) |
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Publication number | Priority date | Publication date | Assignee | Title |
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JP5654311B2 (en) | 2010-10-07 | 2015-01-14 | リンテック株式会社 | Sheet sticking device and sticking method |
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2021
- 2021-09-30 JP JP2021160461A patent/JP2023050393A/en active Pending
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2022
- 2022-07-06 TW TW111125262A patent/TW202316540A/en unknown
- 2022-07-26 CN CN202210884724.1A patent/CN115872216A/en active Pending
- 2022-08-31 DE DE102022209016.0A patent/DE102022209016A1/en active Pending
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CN115872216A (en) | 2023-03-31 |
DE102022209016A1 (en) | 2023-03-30 |
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