JP2023050390A - Device and method for sticking sheet - Google Patents

Abstract

To provide a sheet sticking device and a sheet sticking method which can prevent a foreign object from invading into a protection part.SOLUTION: A sheet sticking device EA includes: supply means 10 which supplies an adhesive sheet AS; and sticking means 20 which sticks the adhesive sheet AS, supplied by the supply means 10, to an outer edge part WK1 of an adherend WK as a predetermined protection part. The sticking means 20 sticks the adhesive sheet AS to the adherend WK in a manner to cover a part of the outer edge part WK1. The sheet sticking device EA further includes complementary member addition means 40 which adds a complementary member CM in a manner to cover both the supply direction tip part ASF and the supply direction rear end part ASR of the adhesive sheet AS stuck to the adherend WK, and to cover the whole outer edge part WK1 together with the adhesive sheet AS.SELECTED DRAWING: Figure 1

Description

The present invention relates to a sheet sticking device and a sheet sticking method.

2. Description of the Related Art A sheet sticking device that sticks an adhesive sheet to an adherend is known (see, for example, Patent Document 1).

JP 2012-84578 A

In the sheet sticking device 1 (sheet sticking device) described in Patent Document 1, a sticking start end (supply direction leading end) and a sticking end end of a double-sided adhesive tape S (adhesive sheet) stuck to a wafer W (adherend). A gap is likely to be formed at the butted portion with (rear end in the supply direction). Therefore, for example, the predetermined protective portion of the adherend is protected by abutting the leading end in the supply direction and the trailing end in the supply direction of the adhesive sheet, and the adherend is immersed in liquid or gas. When a predetermined treatment is performed by exposing, a foreign matter such as a liquid or a gas enters a predetermined protective portion through a gap formed in the abutting portion, causing inconvenience such as contamination of the protective portion.

SUMMARY OF THE INVENTION An object of the present invention is to provide a sheet sticking device and a sheet sticking method that can prevent foreign matter from entering a protective portion.

The present invention employs the configurations described in the claims.

According to the present invention, both the leading end portion and the trailing end portion of the adhesive sheet in the supply direction are covered with the complementary member, and the protective portion is entirely covered with both the adhesive sheet and the complementary member. Intrusion can be prevented.

1A to 1G are explanatory diagrams of a sheet sticking device according to an embodiment of the present invention and explanatory diagrams of the operation of the same device; FIG. (H) to (K) are explanatory diagrams of modifications.

An embodiment of the present invention will be described below with reference to the drawings.
Note that the X-axis, Y-axis, and Z-axis in this embodiment are orthogonal to each other, and the X-axis and Y-axis are axes within a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. do. Furthermore, in the present embodiment, when viewed from the front in FIG. 1 parallel to the Y-axis, when the direction is indicated without designating the drawing, "up" is the direction of the arrow of the Z-axis and "down". is the opposite direction, "left" is the arrow direction of the X axis, "right" is the opposite direction, "front" is the direction parallel to the Y axis in FIG. 1, and "rear" is the opposite direction. Note that since FIGS. 1C to 1K are views viewed from the same direction as that shown in FIG. 1B, arrows indicating directions are omitted.

The sheet sticking apparatus EA of the present invention comprises a supply means 10 for performing a supply step of supplying an adhesive sheet AS, and an outer edge portion WK1 as a predetermined protection portion of an adherend WK for the adhesive sheet AS supplied by the supply means 10. a pasting means 20 for performing a pasting step of sticking to the adherend WK; a shape recognition means 30 for performing a shape recognition step of recognizing the shape of the adherend WK; A complementary member applying step of applying the complementary member CM so as to cover both the ASF and the supply direction rear end ASR (see FIG. 1(D)) and cover the entire outer edge WK1 with the adhesive sheet AS is performed. Complementary member imparting means 40 is provided.
Note that the sheet sticking apparatus EA of this embodiment straddles the circular outer edge WK1 of the adherend WK centered on the reference position WKR and the circular support plate BP centered on the reference position BPR. , an adhesive sheet AS.

The supply means 10 includes a support member 11 that directly or indirectly supports each member constituting the supply means 10 and the pressing roller 22, and a raw sheet RS in which an adhesive sheet AS is temporarily attached to a strip-shaped release sheet RL. A support roller 12 for supporting, a guide roller 13 for guiding the original sheet RS, a release plate 14 as a peeling means for folding back the release sheet RL at the release edge 14A and peeling the adhesive sheet AS from the release sheet RL, and a driving device. A drive roller 15 which is supported by an output shaft (not shown) of a rotating motor 15A as a pinch roller 15B and which sandwiches the release sheet RL with a pinch roller 15B, and an output shaft of a drive device (not shown). During the bonding, a collection roller 16 as a collecting means for collecting the release sheet RL by constantly applying a predetermined tension to the release sheet RL existing between the pinch roller 15B and a cutting means for cutting the adhesive sheet AS. It is provided with a length adjustment means 17 as.
The length adjusting means 17 includes an air cylinder 17A as a driving device and a cutter blade 17C supported by its output shaft 17B.

The sticking means 20 includes a linear motor 21 as a driving device, a pressing roller 22 as a pressing means for pressing and sticking the adhesive sheet AS, a linear motor 23 as a driving device, and a driving device supported by the slider 23A. and a support table 25 having a holding surface 25A which is supported by its output shaft 24A and which can be sucked and held by decompression means (holding means) (not shown) such as a decompression pump and a vacuum ejector. An upper pressing means 26 for pressing the adherend WK against the support table 25 from above is provided, and the adhesive sheet AS is adhered to the adherend WK so as to partially cover the outer edge portion WK1. The linear motor 21 supports the supporting member 11 with its slider 21A. Further, the support table 25 is configured to be rotated around a table center 25R by a direct-acting rotary motor 24. As shown in FIG.
The upper pressing means 26 includes a direct-acting motor 26A as a driving device, and an upper pressing plate 26C supported by its output shaft 26B and rotatable following the rotation of the support table 25. As shown in FIG. The upper pressing plate 26C is configured to rotate around the upper pressing plate center 26R.

The shape recognizing means 30 includes an imaging means such as a camera or a projector, and a detection device 31 including various sensors such as an optical sensor and an ultrasonic sensor.

In this embodiment, the complementary member application means 40 is composed of the supply means 10 and the sticking means 20, and the complementary member CM is composed of the adhesive sheet AS.

The operation of the above sheet sticking apparatus EA will be described.
First, a user of the sheet sticking device EA (hereinafter simply referred to as the "user") moves the sheet sticking device EA in which the respective members are arranged at the initial positions indicated by the solid lines in FIG. After the raw fabric RS is set in the machine, a signal for starting automatic operation is inputted via an operation means (not shown) such as an operation panel or a personal computer. Then, the supply means 10 drives the rotation motor 15A to feed the original sheet RS so that the leading edge ASF in the supply direction of the adhesive sheet AS is aligned with the peeling edge 14A of the peeling plate 14 as shown by the solid line in FIG. 1(A). When the predetermined length is peeled off, the driving of the rotation motor 15A is stopped.

Next, a user or a conveying means (not shown) such as an articulated robot or a belt conveyor lowers the support plate BP so that the reference positions BPR and WKR overlap the table center 25R as shown in FIG. 1(A). When the adherend WK and the support plate BP are placed on the support surface 25A, the sticking means 20 drives the decompression means (not shown) to start suctioning and holding on the support surface 25A. Further, the feeding means 10 drives the rotation motor 15A to feed the original sheet RS, and as shown by the two-dot chain line in FIG. Place it directly below. At this time, the leading end ASF in the supply direction of the adhesive sheet AS is brought into contact with the lower surface of the pressure roller 22 by an urging means (not shown) such as an air nozzle or an ionizer.

After that, the shape recognition means 30 drives the detection device 31 to recognize the shapes, positions, etc. of the adherend WK and the support plate BP. At this time, when the detection device 31 detects that at least one of the adherend WK and the support plate BP is out of alignment, the shape recognition means 30 emits sound or light through notification means (not shown) such as a speaker or an electric light. , etc., to notify the user of the deviation, or stop the operation of the sheet sticking apparatus EA. Next, the pasting means 20 drives the linear motor 23 to move the support table 25 to the left so that the table center 25R (reference position WKR, BPR) coincide with the upper presser plate center 26R, the driving of the linear motor 23 is stopped. The posture of the adherend WK viewed from above in this state is taken as a reference posture.

Then, the sticking means 20 drives the linear motor 21, and based on the recognition result of the shape recognition means 30, the position of the adhesive sheet AS pressed by the pressure roller 22 is determined as shown in FIG. After moving the support member 11 to a position straddling the outer edge WK1 of the WK and the support plate BP, the direct-acting rotation motor 24 is driven, and as indicated by the chain double-dashed line in FIG. The adherend WK is rotated counterclockwise by 30 degrees from the reference posture. Next, the pasting means 20 drives the direct-acting rotary motor 24 to raise the support table 25 as indicated by the two-dot chain line in FIG. After the adherend WK and the support plate BP are sandwiched, the linear motion motor 26A is driven to lower the upper pressing plate 26C so that the upper pressing plate 26C and the support table 25 hold the adherend WK and the support plate BP together. Sandwich.

After that, the pasting means 20 drives the linear rotation motor 24 to rotate the support table 25 counterclockwise around the table center 25R as shown in FIG. The moving motor 15A is driven to let out the original fabric RS in accordance with the rotational speed of the outer edge portion WK1 of the adherend WK. As a result, the adhesive sheet AS is separated from the release sheet RL, and the adhesive sheet AS separated from the release sheet RL is pressed by the pressure roller 22 to form the outer edge WK1 of the adherend WK and the outer edge WK1 of the adherend WK, as shown in FIG. It is pressed and attached to the support plate BP.

Next, while the rotation of the support table 25 and the application of the adhesive sheet AS are continued, the supply means 10 drives the air cylinder 17A to move the cutter blade 17C forward and backward, thereby covering the central angle of 300 degrees. The adhesive sheet AS is cut to a length that allows the adhesive sheet AS to be attached to the outer edge WK1 of the body WK. Then, a new leading edge portion in the supply direction of the adhesive sheet AS formed by cutting with the cutter blade 17C, that is, the leading edge portion CMF in the supply direction of the complementary member CM in this embodiment, is peeled off by the peeling edge 14A of the peeling plate 14 for a predetermined length. Then, the supply means 10 stops driving the rotary motor 15A. Next, after the supply direction trailing edge ASR of the adhesive sheet AS formed by cutting with the cutter blade 17C is adhered to the outer edge WK1 of the adherend WK and the support plate BP, when the adherend WK assumes the reference posture, The pasting means 20 stops driving the direct-acting rotary motor 24 . As a result, as shown in FIG. 1(D), the adhesive sheet AS is attached to a portion of the outer edge WK1 of the adherend WK, that is, to the outer edge WK1 corresponding to the central angle of 300 degrees, and the tip of the adhesive sheet AS in the supply direction is attached. A gap CL corresponding to a central angle of 60 degrees is formed at the abutted portion between the portion ASF and the supply direction rear end portion ASR.

After that, when the pasting means 20 drives the linear motion motor 24 and the linear motion motor 26A to lower the support table 25 and raise the upper pressing plate 26C, the complementary member applying means 40 drives the rotary motor 15A. Then, the leading edge of the complementary member CM in the supply direction is positioned directly below the lowermost end of the pressing roller 22, and the direct-acting rotating motor 24 is driven to move the adherend WK to the reference posture as shown in FIG. 1(E). 60 degrees clockwise. Next, the complementary member applying means 40 drives the direct-acting rotary motor 24 to lift the support table 25, and the support table 25 and the pressure roller 22 move the complementary member CM (adhesive sheet AS), the adhesive sheet AS, and the adhering member CM (adhesive sheet AS). After sandwiching the body WK and the support plate BP, the direct motor 26A is driven to lower the upper pressing plate 26C and the upper pressing plate 26C and the support table 25 sandwich the adherend WK and the support plate BP. After that, the complementary member applying means 40 drives the rotating motor 15A and the linear motion rotating motor 24 to rotate the support table 25 counterclockwise about the table center 25R as shown in FIG. 1(F). At the same time, the original fabric RS is delivered in accordance with the rotational speed of the outer edge WK1 of the adherend WK. As a result, the complementary member CM is peeled off from the release sheet RL, and as shown in FIG. It is pressed and attached to the support plate BP.

Next, while the rotation of the support table 25 and the application of the adhesive sheet AS are continued, the complementary member application means 40 drives the air cylinder 17A to move the cutter blade 17C forward and backward over a central angle of 120 degrees. The complementary member CM is cut to a length that allows the complementary member CM to be attached to the outer edge WK1 of the adherend WK. Then, a new leading end portion in the supply direction of the complementary member CM formed by cutting with the cutter blade 17C, that is, the leading end portion ASF in the supply direction of the adhesive sheet AS in this embodiment, is peeled off by the peeling edge 14A of the peeling plate 14 for a predetermined length. Then, the supply means 10 stops driving the rotary motor 15A.

Next, when the supply direction rear end portion CMR of the complementary member CM formed by cutting with the cutter blade 17C is attached to the outer edge portion WK1 of the adherend WK and the support plate BP, the complementary member applying means 40 is linearly rotated. After the motor 24 is driven to bring the adherend WK into the reference posture as shown in FIG. The holding means 26C is returned to the initial position. As a result, as shown in FIG. 1G, the complementary member CM is attached to the outer edge portion WK1 with a central angle of 120 degrees, and the supply direction leading end portion ASF of the adhesive sheet AS attached to the adherend WK and the supply direction A complementary member CM is adhered to the adherend WK so as to cover both the rear end ASR and the entire outer edge WK1 of the adherend WK together with the adhesive sheet AS to form an integrated object UP. . After that, the sticking means 20 stops driving the decompressing means (not shown) and releases the sucking and holding on the support surface 25A. The linear motor 23 and the linear motor 24 are driven to return the support table 25 to the initial position, and the same operations as described above are repeated thereafter.

According to the embodiment as described above, both the supply direction leading end ASF and the supply direction trailing end ASR of the adhesive sheet AS are covered with the complementary member CM, and both the adhesive sheet AS and the complementary member CM are used for attachment. Since the entire outer edge WK1 of the body WK is covered, foreign matter can be prevented from entering the outer edge WK1.

The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions or steps described for those means and steps. The process is not limited at all. For example, the supply means may be any means as long as it can supply the adhesive sheet, and is not limited at all as long as it is within the technical scope in light of the common general knowledge at the time of filing (other means and the same process).

The supply means 10 is formed by forming a closed-loop shape or a notch in the entire short width direction in the strip-shaped adhesive sheet base material temporarily attached to the strip-shaped release sheet RL, so that a predetermined region partitioned by the cut is formed. may be supplied by peeling off the adhesive sheet AS and the complementary member CM from the original sheet RS that is the adhesive sheet AS and the complementary member CM, or a strip-shaped adhesive sheet base material may be temporarily attached to the strip-shaped release sheet RL. A strip-shaped adhesive sheet material is adopted, and in the middle of feeding the strip-shaped adhesive sheet material, a closed loop shape or a cut in the entire short width direction is formed in the adhesive sheet base material with a cutting blade as a cutting means. The adhesive sheet AS and the complementary member CM may be peeled off and supplied from the original fabric RS in which the adhesive sheet AS and the complementary member CM are provided in a predetermined region partitioned with the adhesive sheet AS, or may be supplied without being wound, for example The adhesive sheet AS and the complementary member CM may be peeled off and supplied from the fanfold-folded raw fabric RS, or the raw fabric RS may be fanfold-folded, chopped with a shredder or the like, or casually accumulated without winding. Alternatively, a recovery means may be employed to recover the release sheet RL, or the recovery means may not be employed. Alternatively, immediately before attaching the adhesive sheet AS or the complementary member CM to the adherend WK, the leading edge of the adhesive sheet AS in the supply direction is not positioned directly below the lowermost end of the pressure roller 22, for example, by bonding. The leading edge in the supply direction of the sheet AS and the leading edge in the supply direction of the complementary member CM may be positioned away from the pressing roller 22, or may or may not be provided with biasing means (not shown). It is possible to cut the adhesive sheet AS or the complementary member CM straddling the gap CL between the supply means 10 (complementary member applying means 40) and the pressure roller 22, or cut the adhesive sheet AS or the complementary member CM on the adherend WK. Alternatively, the adhesive sheet AS having a length that can be affixed to a part of the outer edge WK1 and the leading edge ASF in the supply direction of the adhesive sheet AS An adhesive sheet AS serving as a complementary member CM having a length capable of covering both the supply direction rear end ASR and covering the entire outer edge WK1 with the adhesive sheet AS is temporarily attached to the release sheet RL. In this case, the length adjusting means 17 may or may not be present.

The interval CL of the abutting portion formed by the supply direction front end portion ASF and the supply direction rear end portion ASR of the adhesive sheet AS by the sticking means 20 does not have to be a region corresponding to a central angle of 60 degrees, for example, a central angle of 1 Areas such as degrees, 10 degrees, 180 degrees, and 300 degrees may be used. In this case, the attachment area of the complementary member CM is an area that covers both the supply direction leading end ASF and the supply direction trailing end ASR of the adhesive sheet AS and covers the entire protective portion WK1 together with the adhesive sheet AS. , for example, areas of 5 degrees, 30 degrees, 230 degrees, 330 degrees, and the like.
The sticking means 20 may move the supply means 10 and the pressing roller 22 without or while moving the support table 25 to stick the adhesive sheet AS to the outer edge portion WK1 of the adherend WK and the support plate BP. Alternatively, the pressure roller 22 may be moved separately from the support member 11, or the support member 11 may be moved when the size of the adherend WK is constant or when the bonding position of the adhesive sheet AS does not change. A configuration that does not move (a configuration that does not include the linear motor 21) may be used. For example, in addition to the ring shown in FIG. The adhesive sheet AS may be pasted in any planar shape, such as a letter or V shape. Alternatively, a support table 25 that cannot be held by suction on the holding surface 25A may be employed, the upper pressing means 26 may or may not be provided, and the outer edge of the adherend WK may be The adhesive sheet AS may be attached only to the portion WK1, or the adhesive sheet AS may be attached not only to the outer edge portion WK1 of the adherend WK but also to the inner surface or central portion of the adherend WK. 23 may not be provided, and if not provided, another device may be used to support and convey the linear motion rotation motor 24, or the position where the linear motion rotation motor 24 is shown by the two-dot chain line in FIG. It is sufficient if it is fixed to

The shape recognition means 30 may be provided in the sheet sticking apparatus EA of the present invention. It may not be provided in the sheet sticking apparatus EA of the present invention.

The complementary member applying means 40 may not be composed of the supply means 10 and the sticking means 20, and for example, as shown by the two-dot chain line in FIG. 1(A), the second adhesive sheet AS2 ( 1 (I) and (J)), and a second applying means 42 for applying the second adhesive sheet AS2 supplied by the second supplying means 41 to the adherend WK. may be provided. Such a second supply means 41 can be exemplified by, for example, the same as the supply means 10 shown in the above embodiment, and the second sticking means 42 can be, for example, the second sticking means 20 shown in the above embodiment. A configuration in which the upper pressing means 27 is added can be exemplified. In this case, for example, the same operation as in the above-described embodiment is performed, and after the adhesive sheet AS is applied to a part of the outer edge WK1 by the supplying means 10 and the applying means 20, the support table 25 is moved leftward to complement the adhesive sheet AS. The member application means 40 may apply the second adhesive sheet AS2 to the adherend WK by the second supply means 41 and the second upper pressing means 42 in the same manner as in the above embodiment. Further, the second supply means 41 is, for example, a second supply means (not shown) equivalent to the supply means 10 shown in the above embodiment, and the second supply means (not shown) is positioned behind the supply means 10 and the slider 21A, and the second sticking means (not shown) can be shared with the sticking means 20. As shown in FIG. In this case, for example, the same operation as in the above-described embodiment is performed, and after the adhesive sheet AS is applied to a part of the outer edge WK1 by the supplying means 10 and the applying means 20, the slider 21A is moved forward. Alternatively, the second adhesive sheet AS2 may be adhered to the adherend WK by the second supply means (not shown) and the second adhesion means (not shown) in the same manner as in the above embodiment. When the complementary member applying means 40 employs the second supply means, the second adhesive sheet AS2 as the complementary member CM may have a width perpendicular to the supply direction narrower than that of the adhesive sheet AS (see FIG. 1 ( I)), may be wider (see FIG. 1(J)), or may be the same. Also, the second supply means 41 and the second sticking means 42 may not have the same configuration as the supply means 10 and the sticking means 20 .
The complementary member applying means 40 may be configured to apply a plurality of complementary members CM as shown in FIG. The sticking direction of the adhesive sheet AS2 may be different from the sticking direction of the adhesive sheet AS stuck to a part of the adherend WK.
When the complementary member CM is a fluid member such as an adhesive, energy ray-curable resin, varnish, or caulking material, the complementary member applying means 40 stores the fluid member, for example, and supplies the stored fluid member to a nozzle or the like. A means for supplying the fluid material that is dripped from a pipe or the like may be employed, or a heater for curing the fluid material, an energy beam irradiation means, a blower, etc. may be employed. Electromagnetic waves such as infrared rays, visible light, sound waves, X-rays, or gamma rays, or heat such as hot water or hot air may be used, and may be arbitrarily determined in consideration of the properties, properties, properties, materials, composition, and configuration of the fluid member. can do.

The sheet sticking apparatus EA, for example, sticks a plurality of adhesive sheets AS on the protective portion of the adherend WK with a predetermined interval CL therebetween, and supplies the adhesive sheets AS positioned at both ends of the interval CL. By providing a plurality of complementary members CM so as to cover both the leading edge ASF and the trailing edge ASR in the supply direction, the entire outer edge WK1 may be covered, or they may be arranged upside down. The adhesive sheet AS may be attached to the adherend WK by arranging it sideways, or the support plate BP may not be employed.

Any complementary member CM may be used as long as it can cover both the supply direction front end ASF and the supply direction rear end ASR of the adhesive sheet AS and cover the entire protective portion WK1 together with the adhesive sheet AS. , adhesive tape, adhesive, resin, varnish, caulking material, and the like.
The protective portion of the adherend WK may be not the outer edge portion WK1 of the adherend WK, but may be the in-plane or central portion of the adherend WK, or may not be annular. The apparatus EA, for example, attaches a plurality of adhesive sheets AS to the protective portion of the adherend WK with a predetermined interval CL therebetween, and the leading ends of the adhesive sheets AS in the supply direction located at both ends of the interval CL. By providing one or a plurality of complementary members CM so as to cover both the portion ASF and the supply direction rear end portion ASR, it is possible to cover the entire protective portion.
Any material such as an iron plate, glass, or other adhesive sheet may be used as the support plate BP. The sheet sticking apparatus EA of the present invention may be provided with sticking means for another adhesive sheet to be stuck to the adherend WK.

The materials, types, shapes, etc. of the adhesive sheet AS, the second adhesive sheet AS2, the support plate BP, the complementary member CM, and the adherend WK in the present invention are not particularly limited. For example, the adhesive sheet AS, the second adhesive sheet AS2, the support plate BP, and the adherend WK may be circular, elliptical, polygonal such as triangular or quadrangular, or other shapes. 2 The adhesive sheet AS2 and the complementary member CM may be adhesive forms such as pressure-sensitive adhesive and heat-sensitive adhesive, and the heat-sensitive adhesive sheet AS, the second adhesive sheet AS2 or the complementary member CM is adopted. In such a case, the adhesive sheet AS, the second adhesive sheet AS2, or the complementary member CM may be adhered by an appropriate method such as providing a heating means such as an appropriate coil heater or a heating side of a heat pipe. Further, the adhesive sheet AS, the second adhesive sheet AS2, and the complementary member CM may be, for example, a single-layer adhesive layer, a two-layer laminate including a base material and an adhesive layer, or a base material. 3 layers or 3 layers or more in which one or more intermediate layers are laminated between the substrate and the adhesive layer, 3 layers or 3 layers or more in which one or more cover layers are laminated on the upper surface of the base material , a base material, an intermediate layer or a cover layer provided in a detachable manner, a single-layer double-sided adhesive sheet consisting only of an adhesive layer, and a double-sided adhesive layer laminated on both outermost surfaces of one or more intermediate layers Any material such as an adhesive sheet may be used. Further, as the supporting plate BP and the adherend WK, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit boards, information recording substrates such as optical discs, glass plates, steel plates, ceramics, and wooden boards. Alternatively, it may be a single substance such as a resin, or a composite formed by two or more of them, and members or articles of any shape can also be targeted. Note that the adhesive sheet AS, the second adhesive sheet AS2, and the complementary member CM are, for example, labels for information description, decorative labels, protective sheets, dicing tapes, die attach films, and die bonding. Arbitrary sheets such as tapes and recording layer-forming resin sheets, films, tapes, and the like may be used.

The drive device in the above embodiment includes a rotating motor, a linear motor, a linear motor, a single-axis robot, an electric device such as a multi-joint robot having two or more joints, an air cylinder, a hydraulic cylinder, and a rodless robot. Actuators such as cylinders and rotary cylinders can be used, and combinations thereof directly or indirectly can also be used.
In the above embodiments, when a rotating member such as a roller is employed, a drive device for rotating the rotating member may be provided, or the surface of the rotating member or the rotating member itself may be made of deformable material such as rubber or resin. It may be composed of a member, the surface of the rotating member or the rotating member itself may be composed of a member that does not deform, or other members such as a shaft or a blade that rotates or does not rotate instead of the roller. Alternatively, if a pressing means such as a pressing roller or a pressing head or a pressing member that presses an object to be pressed is adopted, a roller, a round bar, a blade can be used instead of or in combination with the above examples In addition to the material and brush-like member, it may be possible to adopt the one by blowing gas such as air or gas. It may be composed of a member that does not deform such as , resin, etc., or if a peeling means such as a peeling plate or a peeling roller or a peeling member such as a peeling member is used, instead of the above examples Alternatively, a member such as a plate-shaped member, a round bar, or a roller may be adopted, and the peelable member may be made of a deformable member such as rubber or resin, or may be made of a non-deformable member. Alternatively, if a supporting (holding) means or a supporting (holding) member or the like that supports (holds) a member to be supported (member to be held) is employed, gripping means such as a mechanical chuck or a chuck cylinder may be used. , Coulomb force, adhesive (adhesive sheet, adhesive tape), adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, drive equipment, etc. to support (hold) the supported member. Alternatively, if a cutting means or a cutting member that cuts the member to be cut or forms a cut or a cutting line in the member to be cut is adopted, it can be used in place of or in combination with the above examples. , Cutter blades, laser cutters, ion beams, thermal power, heat, water pressure, heating wires, spraying of gas or liquid, etc., or moving objects to be cut with a combination of appropriate driving equipment Alternatively, if an urging means is employed, it may be composed of a spring, rubber, resin, driving device, or the like.

EA... Sheet sticking device 10... Supply means 20... Sticking means 40... Complementary member applying means 41... Second supplying means (complementary member applying means)
42 . . . Second pasting means (complementary member applying means)
AS... Adhesive sheet AS2... Second adhesive sheet ASF... Leading edge in supply direction ASR... Trailing edge in supply direction CM... Complementary member WK... Adherend WK1... Outer edge (protective part)

Claims (5)

supply means for supplying an adhesive sheet;
A sheet sticking device comprising sticking means for sticking the adhesive sheet supplied by the supplying means to a predetermined protective portion of an adherend,
The attaching means attaches the adhesive sheet to the adherend so as to cover a part of the protective portion,
Complementation in which a complementary member is provided so as to cover both the supply direction leading end portion and the supply direction trailing end portion of the adhesive sheet attached to the adherend and to cover the entire protective portion together with the adhesive sheet. A sheet sticking device, further comprising member applying means. 2. The sheet sticking apparatus according to claim 1, wherein said complementary member applying means comprises said supply means and said sticking means, and said complementary member comprises said adhesive sheet. The complementary member application means includes second supply means for supplying a second adhesive sheet as the complementary member, and second pasting means for applying the second adhesive sheet supplied by the second supply means to the adherend. 2. The sheet sticking device according to claim 1, further comprising means. 4. The sheet sticking apparatus according to claim 1, wherein said complementary member applying means applies a plurality of said complementary members. a supply step of supplying an adhesive sheet;
In the sheet attaching method, performing an attaching step of attaching the adhesive sheet supplied in the supplying step to a predetermined protective portion of an adherend,
In the attaching step, the adhesive sheet is attached to the adherend so as to cover a part of the protective portion,
Complementation in which a complementary member is provided so as to cover both the supply direction leading end portion and the supply direction trailing end portion of the adhesive sheet attached to the adherend and to cover the entire protective portion together with the adhesive sheet. A method for attaching a sheet, characterized by further performing a step of applying a member.

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