JP7154737B2 - Sheet sticking device and sticking method - Google Patents

Sheet sticking device and sticking method Download PDF

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Publication number
JP7154737B2
JP7154737B2 JP2017060769A JP2017060769A JP7154737B2 JP 7154737 B2 JP7154737 B2 JP 7154737B2 JP 2017060769 A JP2017060769 A JP 2017060769A JP 2017060769 A JP2017060769 A JP 2017060769A JP 7154737 B2 JP7154737 B2 JP 7154737B2
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adhesive sheet
peeling
sheet
adherend
edge
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JP2018162094A (en
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浩二 木村
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Lintec Corp
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Lintec Corp
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Priority to JP2017060769A priority Critical patent/JP7154737B2/en
Priority to TW106144107A priority patent/TWI766917B/en
Priority to KR1020180001480A priority patent/KR102520735B1/en
Priority to CN201810116121.0A priority patent/CN108666234B/en
Publication of JP2018162094A publication Critical patent/JP2018162094A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65CLABELLING OR TAGGING MACHINES, APPARATUS, OR PROCESSES
    • B65C1/00Labelling flat essentially-rigid surfaces
    • B65C1/02Affixing labels to one flat surface of articles, e.g. of packages, of flat bands
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L21/6836Wafer tapes, e.g. grinding or dicing support tapes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65CLABELLING OR TAGGING MACHINES, APPARATUS, OR PROCESSES
    • B65C9/00Details of labelling machines or apparatus
    • B65C9/0006Removing backing sheets
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65CLABELLING OR TAGGING MACHINES, APPARATUS, OR PROCESSES
    • B65C9/00Details of labelling machines or apparatus
    • B65C9/02Devices for moving articles, e.g. containers, past labelling station
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65CLABELLING OR TAGGING MACHINES, APPARATUS, OR PROCESSES
    • B65C9/00Details of labelling machines or apparatus
    • B65C9/06Devices for presenting articles in predetermined attitude or position at labelling station
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65CLABELLING OR TAGGING MACHINES, APPARATUS, OR PROCESSES
    • B65C9/00Details of labelling machines or apparatus
    • B65C9/08Label feeding
    • B65C9/18Label feeding from strips, e.g. from rolls
    • B65C9/1865Label feeding from strips, e.g. from rolls the labels adhering on a backing strip
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65CLABELLING OR TAGGING MACHINES, APPARATUS, OR PROCESSES
    • B65C9/00Details of labelling machines or apparatus
    • B65C9/26Devices for applying labels
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65CLABELLING OR TAGGING MACHINES, APPARATUS, OR PROCESSES
    • B65C9/00Details of labelling machines or apparatus
    • B65C9/40Controls; Safety devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67132Apparatus for placing on an insulating substrate, e.g. tape
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H01L2221/683Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L2221/68304Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L2221/68327Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Labeling Devices (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Dicing (AREA)
  • Adhesive Tapes (AREA)
  • Supplying Of Containers To The Packaging Station (AREA)
  • Basic Packing Technique (AREA)

Description

本発明は、シート貼付装置および貼付方法に関する。 TECHNICAL FIELD The present invention relates to a sheet sticking device and a sticking method.

従来、繰り出される接着シートベース材に切込を形成して当該切込の内側に接着シートを形成し、当該接着シートを剥離手段で剥離して被着体に貼付するマウント装置(シート貼付装置)が知られている(例えば、特許文献1参照)。 Conventionally, a mounting device (sheet sticking device) forms a notch in a delivered adhesive sheet base material, forms an adhesive sheet inside the cut, peels off the adhesive sheet by a peeling means, and sticks it to an adherend. is known (see, for example, Patent Document 1).

特開2005-116928号公報JP-A-2005-116928

しかしながら、特許文献1に記載された従来のシート貼付装置では、ピールプレート26(剥離手段)の先端(剥離縁)の形状を考慮することなく、プリカット装置13(切断手段)が切込を形成してダイシングテープT(接着シート)を形成するため、接着シートの形状によっては、その剥離開始縁が剥離手段の剥離縁と平行になる場合がある。このような場合、接着シートは、剥離手段の剥離縁で一挙に多くの剥離開始縁を含む先端部領域が剥離されるため、当該先端部領域のベースシートS(剥離シート)に接着する力が当該先端部領域の剛性に勝ると、従来のシート貼付装置では、剥離シートから接着シートを剥離できなくなり剥離不良を発生する。 However, in the conventional sheet sticking apparatus described in Patent Document 1, the pre-cutting device 13 (cutting means) forms a notch without considering the shape of the tip (peeling edge) of the peel plate 26 (peeling means). Since the dicing tape T (adhesive sheet) is formed by pressing, the peel start edge of the adhesive sheet may be parallel to the peel edge of the peeling means depending on the shape of the adhesive sheet. In such a case, since the adhesive sheet is peeled at once by the peeling edge of the peeling means, the tip region including many peel start edges is peeled off, so that the force of adhering the tip region to the base sheet S (release sheet) is reduced. If the rigidity of the leading end region is superior, the conventional sheet sticking device cannot separate the adhesive sheet from the release sheet, resulting in poor separation.

本発明の目的は、剥離手段で剥離不良を発生させることなく、当該接着シートを被着体に貼付することができるシート貼付装置および貼付方法を提供することにある。 SUMMARY OF THE INVENTION It is an object of the present invention to provide a sheet sticking apparatus and a sticking method that can stick the adhesive sheet to an adherend without causing peeling failure in the peeling means.

本発明は、請求項に記載した構成を採用した。 The present invention employs the configurations described in the claims.

本発明によれば、剥離手段の剥離縁の形状を考慮し、接着シートの剥離開始縁が当該剥離縁と平行にならないように切込を形成するので、接着シートは、剥離手段の剥離縁で一挙に多くの先端部領域が剥離されることがなくなり、剥離手段で剥離不良を発生させることなく、当該接着シートを被着体に貼付することができる。
また、移動手段が変位手段を備えれば、接着シートと被着体との位置合わせを行って当該接着シートを被着体に貼付することができる。
さらに、シート方向検知手段の検知結果を基に、変位手段が被着体の向きを変える構成とすれば、労力を使わずして接着シートと被着体との位置合わせを行って当該接着シートを被着体に貼付することができる。
According to the present invention, considering the shape of the peeling edge of the peeling means, the cut is formed so that the peeling start edge of the adhesive sheet is not parallel to the peeling edge. The adhesive sheet can be attached to the adherend without causing a peeling failure in the peeling means because many tip regions are not peeled off at once.
Further, if the moving means includes a displacement means, the adhesive sheet can be aligned with the adherend and the adhesive sheet can be applied to the adherend.
Furthermore, if the displacement means changes the orientation of the adherend based on the detection result of the sheet direction detection means, the position of the adhesive sheet and the adherend can be aligned without using labor, and the adhesive sheet can be adjusted. can be attached to the adherend.

(A)は、本発明の一実施形態に係るシート貼付装置の側面図。(B)は、図1(A)の補足図。1A is a side view of a sheet sticking device according to an embodiment of the present invention; FIG. (B) is a supplementary diagram of FIG. 1(A). 図1(A)の斜視図。The perspective view of FIG. 1(A).

以下、本発明の一実施形態を図面に基づいて説明する。
なお、本実施形態におけるX軸、Y軸、Z軸は、それぞれが直交する関係にあり、X軸およびY軸は、所定平面内の軸とし、Z軸は、前記所定平面に直交する軸とする。さらに、本実施形態では、Y軸と平行な図1中手前方向から観た場合を基準とし、方向を示した場合、「上」がZ軸の矢印方向で「下」がその逆方向、「左」がX軸の矢印方向で「右」がその逆方向、「前」がY軸と平行な図1中手前方向で「後」がその逆方向とする。
An embodiment of the present invention will be described below with reference to the drawings.
Note that the X-axis, Y-axis, and Z-axis in this embodiment are orthogonal to each other, and the X-axis and Y-axis are axes within a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. do. Furthermore, in this embodiment, when viewed from the front in FIG. The direction of the arrow on the X axis is left, and the opposite direction is right, and the front direction is parallel to the Y axis in FIG.

図1において、本発明のシート貼付装置10は、帯状の接着シートベース材ASBの接着面AS1に帯状の剥離シートRLが仮着された原反RSを繰り出す繰出手段20と、繰出手段20で繰り出される原反RSの接着シートベース材ASBに所定形状の切込CUを形成することで、当該切込CUの内側に接着シートASを形成する切断手段30と、接着シートベース材ASBに形成された接着シートASの向きを検知するカメラや投影機等の撮像手段、光学センサや音波センサ等の各種センサ等のシート方向検知手段40と、繰出手段20で繰り出される原反RSを剥離縁50Aで折り返し、接着シートASを剥離シートRLから剥離する剥離手段としての剥離板50と、剥離板50で剥離された接着シートASを被着体WKに押圧して貼付する押圧手段としての押圧ローラ60と、剥離板50および押圧ローラ60と、被着体WKとを所定の貼付方向SD(X軸方向)に相対移動させる移動手段70とを備えている。 In FIG. 1, a sheet sticking apparatus 10 of the present invention includes a feed-out means 20 for feeding an original sheet RS in which a strip-shaped release sheet RL is temporarily adhered to an adhesive surface AS1 of a strip-shaped adhesive sheet base material ASB, and feed-out means 20 feeds out the original fabric RS. Cutting means 30 for forming an adhesive sheet AS inside the cut CU by forming a cut CU having a predetermined shape in the adhesive sheet base material ASB of the original fabric RS formed in the adhesive sheet base material ASB Sheet direction detection means 40 such as imaging means such as a camera or a projector for detecting the orientation of the adhesive sheet AS, various sensors such as an optical sensor or a sound wave sensor, and the original sheet RS fed out by the feeding means 20 are folded back at the peeling edge 50A. a peeling plate 50 as a peeling means for peeling the adhesive sheet AS from the peeling sheet RL; a pressing roller 60 as a pressing means for pressing and attaching the adhesive sheet AS peeled by the peeling plate 50 to the adherend WK; It has a peeling plate 50, a pressure roller 60, and a moving means 70 for relatively moving the adherend WK in a predetermined sticking direction SD (X-axis direction).

繰出手段20は、原反RSを支持する支持ローラ21と、原反RSを案内するガイドローラ22と、駆動機器としての回動モータ23Aによって駆動され、ピンチローラ24との間に剥離シートRLを挟み込む駆動ローラ23と、図示しない駆動機器によって駆動され、剥離シートRLに所定の張力を付与して回収する回収ローラ25とを備えている。 The delivery means 20 is driven by a support roller 21 that supports the original sheet RS, a guide roller 22 that guides the original sheet RS, and a rotary motor 23A as a driving device, and feeds the release sheet RL between itself and a pinch roller 24. It is provided with a drive roller 23 for pinching, and a collection roller 25 driven by a driving device (not shown) to apply a predetermined tension to the release sheet RL and collect it.

切断手段30は、駆動機器としての回動モータ31の出力軸31Aに支持され、周面に切断部材としての切断刃33が設けられたカッタローラ32と、カッタローラ32と同期して回転する受けローラ34とを備え、剥離板50の剥離縁50Aの形状を考慮し、接着シートASの剥離開始縁ASFが当該剥離縁50Aと平行にならないように、切込CUを形成可能に構成されている。 The cutting means 30 is supported by an output shaft 31A of a rotary motor 31 as a driving device, and includes a cutter roller 32 having a cutting blade 33 as a cutting member on its peripheral surface and a receiver rotating in synchronization with the cutter roller 32. In consideration of the shape of the peeling edge 50A of the peeling plate 50, the notch CU can be formed so that the peeling start edge ASF of the adhesive sheet AS is not parallel to the peeling edge 50A. .

移動手段70は、駆動機器としてのリニアモータ71のスライダ71Aに支持されたベースプレート72と、ベースプレート72に支持され、接着シートベース材ASBに形成された接着シートASの向きに応じて、被着体WKの向きを変える変位手段としての回動モータ73と、その出力軸73Aに支持され、減圧ポンプや真空エジェクタ等の図示しない減圧手段によって被着体WKを支持可能な支持面74Aを有する支持テーブル74と、支持面74A上に載置された被着体WKの向きを検知可能なカメラや投影機等の撮像手段、光学センサや音波センサ等の各種センサ等の被着体方向検知手段75とを備えている。
なお、本実施形態の場合、回動モータ73は、シート方向検知手段40の検知結果を基に、被着体WKの向きを変える構成となっている。
The moving means 70 includes a base plate 72 supported by a slider 71A of a linear motor 71 as a driving device, and an adhesive sheet AS supported by the base plate 72, which is formed on the adhesive sheet base material ASB, and moves the adherend according to the orientation. A rotation motor 73 as displacement means for changing the direction of WK, and a support table 74A supported by its output shaft 73A and having a support surface 74A capable of supporting the adherend WK by decompression means (not shown) such as a decompression pump and a vacuum ejector. 74, and an adherend direction detection means 75 such as imaging means such as a camera or a projector capable of detecting the orientation of the adherend WK placed on the support surface 74A, or various sensors such as an optical sensor or a sound wave sensor. It has
In the case of this embodiment, the rotation motor 73 is configured to change the direction of the adherend WK based on the detection result of the sheet direction detection means 40 .

以上のシート貼付装置10の動作を説明する。
先ず、図1中実線で示す初期位置に各部材が配置されたシート貼付装置10に対し、シート貼付装置10の使用者(以下、単に「使用者」という)が原反RSを同図に示すようにセットした後、操作パネルやパーソナルコンピュータ等の図示しない操作手段を介して自動運転開始の信号を図示しない制御手段に入力する。すると、繰出手段20および切断手段30が回動モータ23A、31を駆動し、原反RSを繰り出すとともに、当該原反RSの繰り出しに同期させてカッタローラ32を回転させ、接着シートベース材ASBに切込CUを形成してその内側に接着シートASを形成する。
なお、本実施形態の場合、接着シートASの平面形状は、図1(B)に示すように、長方形状とされ、切断手段30は、剥離板50の原反案内面50Bに直交する方向から観た直交視(以下、単に「直交視」という)において、剥離縁50Aの形状が直線であることを考慮し、接着シートASの剥離開始縁ASFが当該剥離縁50Aと平行にならないように、切込CUを形成するようになっている。また、接着シートASは、原反RSと共に繰り出される際、シート方向検知手段40によって、図1(B)に示すように、接着シートASの2つの短辺の中心を通る中心線CLAと、原反RSの繰出方向LDとの傾きである接着シートASの傾きθ1が検出され、その向きが検知される。
The operation of the sheet sticking apparatus 10 described above will be described.
First, the user of the sheet sticking device 10 (hereinafter simply referred to as the "user") shows the raw sheet RS in FIG. After setting as described above, a signal for starting automatic operation is inputted to the control means (not shown) through an operation means (not shown) such as an operation panel or a personal computer. Then, the feeding means 20 and the cutting means 30 drive the rotary motors 23A and 31 to feed the original sheet RS, rotate the cutter roller 32 in synchronism with the feeding of the original sheet RS, and cut the adhesive sheet base material ASB. A cut CU is formed and an adhesive sheet AS is formed inside it.
In the case of this embodiment, the planar shape of the adhesive sheet AS is rectangular as shown in FIG. Considering that the shape of the peeling edge 50A is a straight line in an orthogonal view (hereinafter simply referred to as "orthoscopic view"), the peeling start edge ASF of the adhesive sheet AS is not parallel to the peeling edge 50A. It is adapted to form a notch CU. Further, when the adhesive sheet AS is fed out together with the raw sheet RS, the sheet direction detection means 40 detects the center line CLA passing through the centers of the two short sides of the adhesive sheet AS and the original sheet as shown in FIG. The inclination θ1 of the adhesive sheet AS, which is the inclination with respect to the feeding direction LD of the anti-RS, is detected, and the orientation thereof is detected.

その後、図1(A)、図2に示すように、先頭の接着シートASが剥離板50の剥離縁50Aで剥離シートRLから所定長さ剥離されたことをカメラ等の撮像手段や光学センサ等の図示しない先端検知手段が検知すると、繰出手段20および切断手段30が回動モータ23A、31の駆動を停止し、スタンバイ状態となる。そして、使用者または多関節ロボットやベルトコンベア等の図示しない搬送手段によって、被着体WKが支持面74A上に載置されると、移動手段70が図示しない減圧手段を駆動し、被着体WKの吸着保持を開始する。
なお、本実施形態の場合、被着体WKは、図1(A)の状態で上方から見下ろした平面視において、接着シートASと同形状の長方形状のものが採用されている。
After that, as shown in FIGS. 1A and 2, an imaging means such as a camera, an optical sensor, or the like detects that the leading adhesive sheet AS has been peeled off from the release sheet RL by the release edge 50A of the release plate 50 by a predetermined length. When the leading end detection means (not shown) detects it, the feed means 20 and the cutting means 30 stop driving the rotation motors 23A and 31 and enter a standby state. Then, when the adherend WK is placed on the support surface 74A by a user or a conveying means such as an articulated robot or a belt conveyor (not shown), the moving means 70 drives the depressurizing means (not shown) to move the adherend. WK suction and hold is started.
In the case of this embodiment, the adherend WK has the same rectangular shape as the adhesive sheet AS in a plan view looking down from above in the state of FIG. 1(A).

その後、移動手段70が回動モータ73および被着体方向検知手段75を駆動し、被着体WKの2つの短辺の中心を通る中心線CLWと、貼付方向SDとの傾きである被着体WKの傾きθ2が、接着シートASの傾きθ1と同じ角度になるように支持テーブル74を回転させる。そして、移動手段70がリニアモータ71を駆動し、支持テーブル74を左方へ移動させ、被着体WKが所定の位置に到達したことをカメラや投影機等の撮像手段、光学センサや音波センサ等の各種センサ等の図示しない被着体検知手段が検知すると、繰出手段20および切断手段30が回動モータ23A、31を駆動し、接着シートベース材ASBに接着シートASを形成しつつ、被着体WKの搬送速度に合わせて原反RSを繰り出す。これにより、接着シートASは、図1(A)、図2中二点鎖線で示すように、剥離板50の剥離縁50Aで剥離シートRLから剥離されつつ、押圧ローラ60によって被着体WKの上面に押圧されて貼付される。 After that, the moving means 70 drives the rotation motor 73 and the adherend direction detection means 75, and the adhesion direction SD, which is the inclination between the center line CLW passing through the centers of the two short sides of the adherend WK and the adhesion direction SD, is detected. The support table 74 is rotated so that the inclination .theta.2 of the body WK becomes the same angle as the inclination .theta.1 of the adhesive sheet AS. Then, the moving means 70 drives the linear motor 71 to move the support table 74 leftward, and the arrival of the adherend WK at a predetermined position is detected by an imaging means such as a camera or a projector, an optical sensor or a sound wave sensor. When the adherend detecting means (not shown) such as various sensors detects, the feeding means 20 and the cutting means 30 drive the rotation motors 23A and 31 to form the adhesive sheet AS on the adhesive sheet base material ASB, and The original fabric RS is delivered in accordance with the transport speed of the adhered body WK. As a result, the adhesive sheet AS is peeled off from the release sheet RL by the release edge 50A of the release plate 50 as indicated by the two-dot chain lines in FIGS. It is pressed and attached to the upper surface.

接着シートAS全体が被着体WKに貼付された後、次の接着シートASが剥離板50の剥離縁50Aで剥離シートRLから所定長さ剥離されたことを図示しない先端検知手段が検知すると、繰出手段20および切断手段30が回動モータ23A、31の駆動を停止し、再びスタンバイ状態となる。接着シートAS全体が貼付された被着体WKが押圧ローラ60の左方の所定位置に到達したことをカメラや投影機等の撮像手段、光学センサや音波センサ等の各種センサ等の図示しない製品検知手段が検知すると、移動手段70がリニアモータ71および図示しない減圧手段の駆動を停止する。その後、使用者または図示しない搬送手段が、接着シートASが貼付された被着体WKを次の工程に搬送した後、移動手段70が各駆動機を駆動し、支持テーブル74を初期位置に復帰させ、以降上記同様の動作が繰り返される。 After the entire adhesive sheet AS has been attached to the adherend WK, when the leading end detection means (not shown) detects that the next adhesive sheet AS has been peeled off from the release sheet RL by the peel edge 50A of the release plate 50 by a predetermined length, The feeding means 20 and the cutting means 30 stop driving the rotation motors 23A and 31, and enter the standby state again. When the adherend WK to which the entire adhesive sheet AS is adhered reaches a predetermined position on the left side of the pressure roller 60, a product (not shown) such as imaging means such as a camera or a projector, various sensors such as an optical sensor or a sound wave sensor, etc. When detected by the detection means, the moving means 70 stops driving the linear motor 71 and the decompression means (not shown). After that, the user or a transporting means (not shown) transports the adherend WK having the adhesive sheet AS attached to the next step, and then the moving means 70 drives each driving device to return the support table 74 to the initial position. After that, the same operation as described above is repeated.

以上のような実施形態によれば、剥離板50の剥離縁50Aの形状を考慮し、接着シートASの剥離開始縁ASFが当該剥離縁50Aと平行にならないように切込CUを形成するので、接着シートASは、剥離板50の剥離縁50Aで一挙に多くの先端部領域が剥離されることがなくなり、剥離板50で剥離不良を発生させることなく、当該接着シートASを被着体WKに貼付することができる。 According to the embodiment as described above, the shape of the peeling edge 50A of the peeling plate 50 is considered, and the cut CU is formed so that the peeling start edge ASF of the adhesive sheet AS is not parallel to the peeling edge 50A. The adhesive sheet AS is prevented from being peeled off at once at the peeling edge 50A of the peeling plate 50, and the adhesive sheet AS can be attached to the adherend WK without causing peeling defects at the peeling plate 50. Can be pasted.

本発明における手段および工程は、それら手段および工程について説明した動作、機能または工程を果たすことができる限りなんら限定されることはなく、まして、前記実施形態で示した単なる一実施形態の構成物や工程に全く限定されることはない。例えば、繰出手段は、帯状の接着シートベース材の接着面に帯状の剥離シートが仮着された原反を繰り出し可能なものであれば、出願当初の技術常識に照らし合わせ、その技術範囲内のものであればなんら限定されることはない(その他の手段および工程も同じ)。 The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions or steps described for those means and steps. The process is not limited at all. For example, if the feeding means is capable of feeding the raw material in which the strip-shaped release sheet is temporarily attached to the adhesive surface of the strip-shaped adhesive sheet base material, it is within the technical scope in light of the common general knowledge at the time of filing. There is no limitation as long as it is a thing (other means and steps are the same).

繰出手段20は、接着シートASを剥離シートRLから剥離する際、原反RSに所定の張力が付与されるように回動モータ23Aのトルク制御を行ってもよいし、支持ローラ21やガイドローラ22等の各ローラの代わりに板状部材やシャフト部材等で原反RSを支持したり案内したりしてもよいし、巻回された原反RSではなく例えばファンフォールド折りにされた原反RSを繰り出し可能に支持してもよいし、剥離シートRLを巻回することなく例えばファンフォールド折りにしたり、シュレッダ等で切り刻んだりして回収してもよいし、剥離シートRLを回収しなくてもよい。 When the adhesive sheet AS is peeled off from the release sheet RL, the delivery means 20 may perform torque control of the rotation motor 23A so that a predetermined tension is applied to the original sheet RS, or the support roller 21 and the guide rollers may be controlled. Instead of rollers such as 22, a plate-shaped member or a shaft member may be used to support or guide the original fabric RS. The RS may be supported so that it can be extended, the release sheet RL may be fan-folded without being wound, or the release sheet RL may be shredded and recovered, or the release sheet RL may not be recovered. good too.

切断手段30は、剥離板50の剥離縁50Aの形状を考慮し、接着シートASの剥離開始縁ASFが当該剥離縁50Aと平行にならない切込CUであれば、どのような形状の切込CUを形成し、どのような形状の接着シートASを形成してもよいし、周面に直接切断刃33が設けられたカッタローラ32を採用してもよいし、周面に対して切断刃33を着脱可能なカッタローラ32を採用し、周面上で切断刃33の向きを変更できる構成としてもよい。なお、周面に直接切断刃33が設けられたカッタローラ32が採用された場合、剥離板50の剥離縁50Aの形状を考慮し、接着シートASの剥離開始縁ASFが当該剥離縁50Aと平行にならないような切断刃33を、予めカッタローラ32の周面に形成するようにすればよいし、カッタローラ32の周面に対して着脱可能な切断刃33が採用された場合、剥離板50の剥離縁50Aの形状を考慮し、接着シートASの剥離開始縁ASFが当該剥離縁50Aと平行にならないように、着脱可能な切断刃33をカッタローラ32の周面に取り付けるようにすればよい。 The cutting means 30 considers the shape of the peeling edge 50A of the peeling plate 50, and if the peeling start edge ASF of the adhesive sheet AS is not parallel to the peeling edge 50A, any shape of the cutout CU can be used. may be formed to form an adhesive sheet AS of any shape, a cutter roller 32 having a cutting blade 33 directly provided on the peripheral surface may be employed, or a cutting blade 33 may be formed on the peripheral surface A detachable cutter roller 32 may be employed so that the direction of the cutting blade 33 can be changed on the peripheral surface. Note that when the cutter roller 32 having the cutting blade 33 directly provided on the peripheral surface is adopted, the shape of the peeling edge 50A of the peeling plate 50 is taken into consideration, and the peeling start edge ASF of the adhesive sheet AS is parallel to the peeling edge 50A. The cutting blade 33 may be formed in advance on the peripheral surface of the cutter roller 32 so that the cutting blade 33 does not become distorted. Considering the shape of the peeling edge 50A, the detachable cutting blade 33 may be attached to the peripheral surface of the cutter roller 32 so that the peeling start edge ASF of the adhesive sheet AS is not parallel to the peeling edge 50A. .

シート方向検知手段40は、接着シートベース材ASBに形成された接着シートASの2つの長辺の中心を通る中心線と、原反RSの繰出方向LDとの傾きを検知することでその向きを検知してもよいし、接着シートASの一辺の傾きを検知することでその向きを検知してもよいし、接着シートASの全体像を観て当該接着シートASの向きを検知してもよいし、接着シートASの外縁の一部や、接着シートASに記された模様、文字、印や、接着シートAS上に積層されたもの等の特定の部分を観て当該接着シートASの向きを検知してもよく、接着シートベース材ASBに形成された接着シートASの向きを検知できれば、どのような検知方法を採用してもよいし、本発明のシート貼付装置10に備わっていなくてもよい。 The sheet direction detection means 40 detects the inclination between the center line passing through the centers of the two long sides of the adhesive sheet AS formed on the adhesive sheet base material ASB and the delivery direction LD of the original fabric RS, thereby detecting the orientation. Alternatively, the orientation of the adhesive sheet AS may be detected by detecting the inclination of one side of the adhesive sheet AS, or the orientation of the adhesive sheet AS may be detected by observing the entire image of the adhesive sheet AS. Then, the direction of the adhesive sheet AS is determined by looking at a part of the outer edge of the adhesive sheet AS, patterns, characters, marks written on the adhesive sheet AS, and specific parts such as those laminated on the adhesive sheet AS. Any detection method may be adopted as long as the direction of the adhesive sheet AS formed on the adhesive sheet base material ASB can be detected, and even if the sheet sticking apparatus 10 of the present invention does not have it, good.

剥離手段は、直交視において円弧状やその他の形状の剥離縁を備えていてもよく、このような場合、切断手段30は、剥離手段の剥離縁の形状が直交視において円弧状やその他の形状であることを考慮し、接着シートASの剥離開始縁ASFに剥離縁の形状と同じ円弧部やその他の形状部が形成されることで、当該剥離開始縁ASFと剥離縁とが平行にならないように、切込CUを形成すればよい。 The stripping means may have a stripping edge of an arc shape or other shape when viewed orthogonally. Considering that, the peel start edge ASF of the adhesive sheet AS is formed with an arc portion having the same shape as the peel edge or other shaped portion so that the peel start edge ASF and the peel edge are not parallel to each other. , a notch CU may be formed.

押圧手段は、押圧ローラ60を被着体WKに離間接近させる押圧手段接離手段としての駆動機器を備え、被着体WKにストレスがかかったり損傷したりすることを防止するようにしてもよく、このような押圧手段接離手段としては、駆動機器以外に手動で押圧ローラ60を移動させるものでもよい。 The pressing means may include a driving device as a pressing means contacting/separating means for moving the pressing roller 60 toward and away from the adherend WK to prevent the adherend WK from being stressed or damaged. As such pressing means contacting/separating means, other than the driving device, the pressing roller 60 may be manually moved.

移動手段70は、接着シートベース材ASBに形成された接着シートASの向きに被着体WKの向きを合わせる際、支持面74A上に載置される被着体WKの向きが予め解っている場合、被着体方向検知手段75を採用せずに、シート方向検知手段40の検知結果を基に、支持テーブル74を回転させればよいし、シート方向検知手段40の検知結果を基に、接着シートASの向きに合わせて被着体WKが支持テーブル74上に載置される場合、回動モータ73を回転させなくしたり、回動モータ73をなくしたりしてもよいし、接着シートベース材ASBに形成された接着シートASの向きが一定の向きである場合、接着シートASの一定の向きに合わせて被着体WKを支持テーブル74上に載置するように構成すれば、回動モータ73、シート方向検知手段40および被着体方向検知手段75のうち少なくとも1つは、なくてもよい。
移動手段70は、被着体WKを移動させずにまたは移動させつつ、剥離板50および押圧ローラ60等を移動させてもよいし、シート方向検知手段40や被着体方向検知手段75を採用せずに、人手でコントローラ等を操って回動モータ73を回転させてもよいし、変位手段として、ベースプレート72上に支持され、支持テーブル74を回転可能に支持する回転部材と、支持テーブル74の回転を抑制可能な固定手段とを備えたものを採用し、人手で支持テーブル74を回転させた後、人手で固定手段で支持テーブル74の回転を抑制するようにしてもよいし、他の装置で剥離板50および押圧ローラ60等と、被着体WKとを相対移動させる場合、本発明のシート貼付装置10に備わっていなくてもよい。
When the moving means 70 aligns the adherend WK with the orientation of the adhesive sheet AS formed on the adhesive sheet base material ASB, the orientation of the adherend WK placed on the support surface 74A is known in advance. In this case, the support table 74 may be rotated based on the detection result of the sheet direction detection means 40 without adopting the adherend direction detection means 75, and based on the detection result of the sheet direction detection means 40, When the adherend WK is placed on the support table 74 in accordance with the orientation of the adhesive sheet AS, the rotating motor 73 may not be rotated, or the rotating motor 73 may be eliminated, or the adhesive sheet base may be removed. When the orientation of the adhesive sheet AS formed on the material ASB is fixed, if the adherend WK is placed on the support table 74 in accordance with the fixed orientation of the adhesive sheet AS, it can be rotated. At least one of the motor 73, sheet orientation detection means 40 and adherend orientation detection means 75 may be omitted.
The moving means 70 may move the peeling plate 50 and the pressing roller 60 without or while moving the adherend WK, or the sheet direction detecting means 40 and the adherend direction detecting means 75 may be employed. Alternatively, a rotating member supported on the base plate 72 to rotatably support the support table 74 and the support table 74 may be used as displacement means. After manually rotating the support table 74, the rotation of the support table 74 may be manually suppressed by the fixing means. When the peeling plate 50, the pressure roller 60, etc., and the adherend WK are moved relative to each other in the apparatus, the sheet sticking apparatus 10 of the present invention does not have to have them.

シート貼付装置10は、天地反転して配置したり横向きに配置したりして、接着シートASを被着体WKに貼付してもよい。
被着体WKと接着シートASの形状は、正方形であってもよいし、三角形や五角形以上の多角形、円形、楕円形等の同形状でもよいし、同形状でなくてもよいし、それらの大きさも同じ大きさでもよいし、異なる大きさでもよい。
The sheet sticking device 10 may be placed upside down or sideways to stick the adhesive sheet AS to the adherend WK.
The shape of the adherend WK and the adhesive sheet AS may be a square, or may be the same shape such as a triangle, a polygon of pentagon or more, a circle, or an oval, or they may not be the same shape. may be the same size, or may be different sizes.

本発明における接着シートベース材ASB、接着シートASおよび被着体WKの材質、種別、形状等は、特に限定されることはない。例えば、接着シートASは、円形、楕円形、三角形や四角形等の多角形、その他の形状であってもよいし、感圧接着性、感熱接着性等の接着形態のものであってもよく、感熱接着性の接着シートベース材ASBや接着シートASが採用された場合は、それらを加熱する適宜なコイルヒータやヒートパイプの加熱側等の加熱手段を設けるといった適宜な方法で接着されればよい。また、このような接着シートベース材ASBや接着シートASは、例えば、接着剤層だけの単層のもの、基材と接着剤層との間に中間層を有するもの、基材の上面にカバー層を有する等3層以上のもの、更には、基材を接着剤層から剥離することのできる所謂両面接着シートのようなものであってもよく、両面接着シートは、単層又は複層の中間層を有するものや、中間層のない単層又は複層のものであってよい。また、被着体WKとしては、例えば、食品、樹脂容器、シリコン半導体ウエハや化合物半導体ウエハ等の半導体ウエハ、回路基板、光ディスク等の情報記録基板、ガラス板、鋼板、陶器、木板または樹脂等の単体物であってもよいし、それら2つ以上で形成された複合物であってもよく、任意の形態の部材や物品なども対象とすることができる。なお、接着シートASは、機能的、用途的な読み方に換え、例えば、情報記載用ラベル、装飾用ラベル、保護シート、ダイシングテープ、ダイアタッチフィルム、ダイボンディングテープ、記録層形成樹脂シート等の任意のシート、フィルム、テープ等でもよい。 The materials, types, shapes, etc. of the adhesive sheet base material ASB, the adhesive sheet AS and the adherend WK in the present invention are not particularly limited. For example, the adhesive sheet AS may have a circular shape, an elliptical shape, a polygonal shape such as a triangle or a quadrangle, or other shapes, and may have adhesive forms such as pressure-sensitive adhesiveness and heat-sensitive adhesiveness. When a heat-sensitive adhesive sheet base material ASB or adhesive sheet AS is used, it may be adhered by an appropriate method such as providing a heating means such as an appropriate coil heater or heat pipe for heating them. . Further, such adhesive sheet base material ASB and adhesive sheet AS may be, for example, a single layer having only an adhesive layer, one having an intermediate layer between the base material and the adhesive layer, or a cover material on the upper surface of the base material. It may be a so-called double-sided adhesive sheet that can separate the substrate from the adhesive layer. It may be one having an intermediate layer, or one having a single layer or multiple layers without an intermediate layer. Examples of the adherend WK include food, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, information recording substrates such as circuit boards and optical discs, glass plates, steel plates, ceramics, wood plates, resins, and the like. It may be a single substance, or a composite formed by two or more of them, and may be a member or article of any shape. In addition, the adhesive sheet AS can be arbitrarily used, for example, a label for information recording, a label for decoration, a protective sheet, a dicing tape, a die attach film, a die bonding tape, a resin sheet for forming a recording layer, etc. sheet, film, tape, or the like.

前記実施形態における駆動機器は、回動モータ、直動モータ、リニアモータ、単軸ロボット、多関節ロボット等の電動機器、エアシリンダ、油圧シリンダ、ロッドレスシリンダおよびロータリシリンダ等のアクチュエータ等を採用することができる上、それらを直接的又は間接的に組み合せたものを採用することもできる。
前記実施形態において、ローラが採用されている場合、ローラを回転駆動させる駆動機器を備えてもよいし、ローラの表面やローラ自体をゴムや樹脂等の変形可能な部材で構成してもよいし、ローラの表面やローラ自体を変形しない部材で構成してもよいし、押圧ローラや押圧ヘッド等の押圧手段や押圧部材が採用されている場合、上記で例示したものに代えてまたは併用して、ローラ、丸棒、ブレード材、ゴム、樹脂、スポンジ等の部材を採用したり、大気やガス等の気体の吹き付けにより押圧する構成を採用したりしてもよいし、押圧手段や押圧部材をゴムや樹脂等の変形可能な部材で構成してもよいし、変形しない部材で構成してもよいし、剥離板や剥離ローラ等の剥離手段や剥離部材が採用されている場合、上記で例示したものに代えてまたは併用して、板状部材、丸棒、ローラ等の部材を採用してもよいし、剥離手段や剥離部材をゴムや樹脂等の変形可能な部材で構成してもよいし、変形しない部材で構成してもよいし、支持(保持)手段や支持(保持)部材等の被支持部材を支持または保持するものが採用されている場合、メカチャックやチャックシリンダ等の把持手段、クーロン力、接着剤、粘着剤、磁力、ベルヌーイ吸着、駆動機器等で被支持部材を支持(保持)する構成を採用してもよいし、切断手段や切断部材が採用されている場合、上記で例示したものに代えてまたは併用して、カッター刃、レーザカッタ、イオンビーム、火力、熱、水圧、電熱線、気体や液体等の吹付け等で切断するものを採用したり、適宜な駆動機器を組み合わせたもので切断するものを移動させて切断するようにしたりしてもよいし、付勢手段が採用されている場合、ばね、ゴム、樹脂等で構成してもよい。
The driving device in the above embodiment employs electric devices such as rotary motors, direct-acting motors, linear motors, single-axis robots, multi-joint robots, actuators such as air cylinders, hydraulic cylinders, rodless cylinders, rotary cylinders, and the like. In addition, a direct or indirect combination thereof can also be employed.
In the above embodiment, when rollers are employed, a driving device for rotating the rollers may be provided, or the surfaces of the rollers or the rollers themselves may be made of a deformable member such as rubber or resin. The surface of the roller or the roller itself may be made of a member that does not deform, and if a pressing means or pressing member such as a pressing roller or a pressing head is employed, it may be used in place of or in combination with the above examples. A member such as a roller, a round bar, a blade material, rubber, resin, sponge, or the like may be employed, or a configuration in which pressure is applied by blowing air or gas may be employed. It may be composed of a deformable member such as rubber or resin, or may be composed of a non-deformable member. A member such as a plate-shaped member, a round bar, or a roller may be employed instead of or in combination with the above, and the peeling means and the peeling member may be formed of a deformable member such as rubber or resin. However, it may be composed of a member that does not deform, or if a support (holding) means or a support (holding) member that supports or holds the supported member is employed, a mechanical chuck, chuck cylinder, or the like may be used to hold the member. Means, coulomb force, adhesive, adhesive, magnetic force, Bernoulli adsorption, drive equipment, etc. may be used to support (hold) the supported member. Instead of or in combination with the above examples, cutter blades, laser cutters, ion beams, thermal power, heat, water pressure, heating wires, spraying of gas, liquid, etc. are used for cutting, or appropriate A combination of driving devices may be used to move the material to be cut for cutting, or when biasing means is employed, it may be composed of a spring, rubber, resin, or the like.

10…シート貼付装置
20…繰出手段
30…切断手段
40…シート方向検知手段
50…剥離板(剥離手段)
50A…剥離縁
60…押圧ローラ(押圧手段)
70…移動手段
73…回動モータ(変位手段)
AS…接着シート
ASB…接着シートベース材
ASF…剥離開始縁
AS1…接着面
CU…切込
RL…剥離シート
RS…原反
WK…被着体
DESCRIPTION OF SYMBOLS 10... Sheet sticking apparatus 20... Feeding means 30... Cutting means 40... Sheet direction detection means 50... Peeling plate (peeling means)
50A... Stripping edge 60... Pressing roller (pressing means)
70... Moving means 73... Rotary motor (displacement means)
AS... Adhesive sheet ASB... Adhesive sheet base material ASF... Peel start edge AS1... Adhesive surface CU... Notch RL... Release sheet RS... Original fabric WK... Adherend

Claims (3)

帯状の接着シートベース材の接着面に帯状の剥離シートが仮着された原反を繰り出す繰出手段と、
前記繰出手段で繰り出される前記原反の接着シートベース材に所定形状の切込を形成することで、当該切込の内側に接着シートを形成する切断手段と、
前記繰出手段で繰り出される前記原反を直線形状の剥離縁で折り返し、前記接着シートを前記剥離シートから剥離する剥離手段と、
前記剥離手段で剥離された前記接着シートを被着体に押圧して貼付する押圧手段と、
前記剥離手段および押圧手段と、前記被着体とを所定の貼付方向に相対移動させる移動手段とを備え、
前記切断手段は、前記剥離手段の剥離縁の形状が直線であることを考慮し、前記接着シートの剥離開始縁が当該剥離縁と平行な形状にならないように、前記切込を形成可能に構成され、
前記移動手段は、前記接着シートベース材に形成された接着シートの向きに応じて、前記被着体の向きを変える変位手段を備えていることを特徴とするシート貼付装置。
a feeding means for feeding the original fabric in which the strip-shaped release sheet is temporarily attached to the adhesive surface of the strip-shaped adhesive sheet base material;
a cutting means for forming an adhesive sheet inside the cut by forming a cut of a predetermined shape in the adhesive sheet base material of the raw fabric fed out by the feeding means;
a peeling means for folding back the raw material fed by the feeding means at a linear peeling edge to peel the adhesive sheet from the release sheet;
a pressing means for pressing and attaching the adhesive sheet peeled by the peeling means to an adherend;
The peeling means, the pressing means, and the moving means for relatively moving the adherend in a predetermined sticking direction,
Considering that the shape of the peeling edge of the peeling means is straight, the cutting means can form the cut so that the peeling start edge of the adhesive sheet is not parallel to the peeling edge. is,
The sheet sticking device , wherein the moving means includes displacement means for changing the direction of the adherend according to the direction of the adhesive sheet formed on the adhesive sheet base material .
前記接着シートベース材に形成された接着シートの向きを検知するシート方向検知手段を備え、前記変位手段は、前記シート方向検知手段の検知結果を基に、前記被着体の向きを変えることを特徴とする請求項に記載のシート貼付装置。 A sheet direction detection means for detecting the orientation of the adhesive sheet formed on the adhesive sheet base material is provided, and the displacement means changes the orientation of the adherend based on the detection result of the sheet direction detection means. The sheet sticking device according to claim 1 . 帯状の接着シートベース材の接着面に帯状の剥離シートが仮着された原反を繰り出す繰出工程と、
前記繰出工程で繰り出される前記原反の接着シートベース材に所定形状の切込を形成することで、当該切込の内側に接着シートを形成する切断工程と、
前記繰出工程で繰り出される前記原反を直線形状の剥離手段の剥離縁で折り返し、前記接着シートを前記剥離シートから剥離する剥離工程と、
前記剥離工程で剥離された前記接着シートを押圧手段で被着体に押圧して貼付する押圧工程と、
前記剥離手段および押圧手段と、前記被着体とを所定の貼付方向に相対移動させる移動工程とを有し、
前記切断工程は、前記剥離手段の剥離縁の形状が直線であることを考慮し、前記接着シートの剥離開始縁が当該剥離縁と平行な形状にならないように、前記切込を形成し、
前記移動工程は、変位手段で前記接着シートベース材に形成された接着シートの向きに応じて、前記被着体の向きを変えることを特徴とするシート貼付方法。
A feed-out step of feeding out a raw fabric in which a strip-shaped release sheet is temporarily attached to the adhesive surface of a strip-shaped adhesive sheet base material;
a cutting step of forming a cut of a predetermined shape in the adhesive sheet base material of the raw fabric fed out in the feeding step, thereby forming an adhesive sheet inside the cut;
a peeling step of folding back the raw material fed out in the feeding step at a peeling edge of a linear peeling means to peel off the adhesive sheet from the peeling sheet;
A pressing step of pressing and attaching the adhesive sheet peeled in the peeling step to an adherend by a pressing means ;
a moving step of relatively moving the peeling means, the pressing means, and the adherend in a predetermined sticking direction ;
In the cutting step, considering that the shape of the peeling edge of the peeling means is straight, the cut is formed so that the peeling start edge of the adhesive sheet is not parallel to the peeling edge ,
The sheet sticking method , wherein the moving step changes the orientation of the adherend according to the orientation of the adhesive sheet formed on the adhesive sheet base material by displacement means .
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