CN115872216A - Sheet sticking apparatus and sheet sticking method - Google Patents

Sheet sticking apparatus and sheet sticking method Download PDF

Info

Publication number
CN115872216A
CN115872216A CN202210884724.1A CN202210884724A CN115872216A CN 115872216 A CN115872216 A CN 115872216A CN 202210884724 A CN202210884724 A CN 202210884724A CN 115872216 A CN115872216 A CN 115872216A
Authority
CN
China
Prior art keywords
adhesive sheet
outer edge
pressing
face
edge end
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202210884724.1A
Other languages
Chinese (zh)
Inventor
上道厚史
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lintec Corp
Original Assignee
Lintec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lintec Corp filed Critical Lintec Corp
Publication of CN115872216A publication Critical patent/CN115872216A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65C—LABELLING OR TAGGING MACHINES, APPARATUS, OR PROCESSES
    • B65C1/00—Labelling flat essentially-rigid surfaces
    • B65C1/04—Affixing labels, e.g. wrap-around labels, to two or more flat surfaces of a polyhedral article
    • B65C1/042—Affixing labels, e.g. wrap-around labels, to two or more flat surfaces of a polyhedral article using two or more applicators, e.g. cooperating rollers or brushes
    • B65C1/045—Affixing labels, e.g. wrap-around labels, to two or more flat surfaces of a polyhedral article using two or more applicators, e.g. cooperating rollers or brushes acting one after the other
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65C—LABELLING OR TAGGING MACHINES, APPARATUS, OR PROCESSES
    • B65C9/00—Details of labelling machines or apparatus
    • B65C9/26—Devices for applying labels
    • B65C9/30—Rollers
    • B65C9/32—Cooperating rollers between which articles and labels are fed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H35/00—Delivering articles from cutting or line-perforating machines; Article or web delivery apparatus incorporating cutting or line-perforating devices, e.g. adhesive tape dispensers
    • B65H35/0006—Article or web delivery apparatus incorporating cutting or line-perforating devices
    • B65H35/006—Article or web delivery apparatus incorporating cutting or line-perforating devices with means for delivering a predetermined length of tape
    • B65H35/0066—Article or web delivery apparatus incorporating cutting or line-perforating devices with means for delivering a predetermined length of tape this length being adjustable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H35/00—Delivering articles from cutting or line-perforating machines; Article or web delivery apparatus incorporating cutting or line-perforating devices, e.g. adhesive tape dispensers
    • B65H35/0006—Article or web delivery apparatus incorporating cutting or line-perforating devices
    • B65H35/0073—Details
    • B65H35/008—Arrangements or adaptations of cutting devices
    • B65H35/0086—Arrangements or adaptations of cutting devices using movable cutting elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2301/00—Handling processes for sheets or webs
    • B65H2301/50—Auxiliary process performed during handling process
    • B65H2301/51—Modifying a characteristic of handled material
    • B65H2301/515—Cutting handled material
    • B65H2301/5153—Details of cutting means
    • B65H2301/51532—Blade cutter, e.g. single blade cutter

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Labeling Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)

Abstract

A sheet sticking device and a sheet sticking method for reliably protecting an outer edge end face of an adherend and an outer edge end face side of the other face adjacent to the outer edge end face with an adhesive sheet. The disclosed device is provided with: a supply unit (10) for supplying an elastically deformable adhesive sheet AS; a pressing unit (20) for pressing the adhesive sheet supplied by the supply unit to the outer edge end surface WKE of the adherend WK; and a moving means (30) for moving the pressing means and the adherend relative to each other to attach the adhesive sheet to the outer edge face WKE. The pressing unit presses the adhesive sheet against the outer edge end face WKE so that an extending region ASH extending from the outer edge end face WKE is formed on at least one of the one outer edge AS1 side and the other outer edge AS2 side in the adhesive sheet feeding direction. The adhesive sheet between the supply unit and the pressing unit is applied with tension along the adhesive sheet supply direction, and the extending region ASH is bent and adhered towards other surfaces WK1 and WK2 adjacent to the outer edge end surface WKE.

Description

Sheet sticking apparatus and sheet sticking method
Technical Field
The present invention relates to a sheet sticking apparatus and a sheet sticking method.
Background
A sheet sticking apparatus for sticking an adhesive sheet to an adherend is known (see, for example, patent document 1).
Documents of the prior art
Patent document
Patent document 1: japanese unexamined patent publication No. 2012-84578
Disclosure of Invention
Technical problem to be solved
In the sheet sticking apparatus 1 (sheet sticking apparatus) described in patent document 1, even when the double-sided adhesive tape S (adhesive sheet) is stuck to the outer edge portion of one surface of the wafer W (adherend), the adhesive sheet cannot be stuck to the outer edge end face of the adherend. Therefore, for example, when the adherend is immersed in a liquid or exposed to a gas to be subjected to a predetermined treatment, a problem occurs in that foreign matter such as a liquid or a gas adheres to the outer edge end face of the adherend.
An object of the present invention is to provide a sheet sticking apparatus and a sheet sticking method capable of reliably protecting an outer edge end face of an adherend and an outer edge end face side of another face adjacent to the outer edge end face by an adhesive sheet.
(II) technical scheme
The present invention adopts the structure described in the claims.
(III) advantageous effects
According to the present invention, since the protruding region of the adhesive sheet attached to the outer edge end face is bent in the direction of the other surface adjacent to the outer edge end face and attached, the outer edge end face of the adherend and the outer edge end face side of the other surface adjacent to the outer edge end face can be reliably protected by the adhesive sheet.
Drawings
Fig. 1 is an explanatory view of a sheet sticking apparatus according to an embodiment of the present invention and an explanatory view of an operation of the apparatus.
Description of the reference numerals
EA-sheet sticking means; 10-a supply unit; 20-a pressing unit; 30-a mobile unit; 40-bending and pasting unit; 50-a protruding area pressing unit; 60-an energy imparting unit; an AS-adhesive sheet; AS 1-an outer edge; AS 2-another outer edge; ASH-protrusion area; SD-feed direction; WK-adherend; WK 1-one side (other side); WK 2-another side (other side); WKE — outer edge face.
Detailed Description
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
In the present embodiment, the X axis, the Y axis, and the Z axis have orthogonal relationships, respectively, the X axis and the Y axis are axes within a predetermined plane, and the Z axis is an axis orthogonal to the predetermined plane. In the present embodiment, when the direction is not specified in the drawing and is expressed with reference to a case of being viewed from below in fig. 1 in parallel with the Y axis, "up" is an arrow direction of the Z axis and "down" is an opposite direction thereof, "left" is an arrow direction of the X axis and "right" is an opposite direction thereof, "front" is a front direction in fig. 1 in parallel with the Y axis and "rear" is an opposite direction thereof.
The sheet sticking device EA of the present invention includes: a supply unit 10 that performs a supply step of supplying an elastically deformable adhesive sheet AS; a pressing unit 20 that performs a pressing step of pressing the adhesive sheet AS supplied by the supply unit 10 against the outer edge end face WKE of the adherend WK; a moving means 30 that performs a moving step of moving the pressing means 20 and the adherend WK relative to each other to attach the adhesive sheet AS to the outer edge end face WKE; a bending and bonding unit 40 that performs a bending and bonding process: applying a tension to the adhesive sheet AS positioned between the supply unit 10 and the pressing unit 20 in a direction along the supply direction SD of the adhesive sheet AS, thereby folding and attaching the overhang region ASH in a direction of one surface WK1 and the other surface WK2 which are the other surfaces adjacent to the outer edge end surface WKE; and a protruding region pressing means 50 that performs a protruding region pressing step of pressing the protruding region ASH against both the one surface WK1 and the other surface WK2.
In the present embodiment, a circular adherend WK centered on the reference position WKR is used.
The supply unit 10 includes: a support member 11 that directly or indirectly supports each member constituting the supply unit 10; a support roller 12 for supporting the raw material RS in which the adhesive sheet AS is temporarily adhered to the strip-shaped release sheet RL; a guide roller 13 for guiding the raw material RS; a peeling plate 14 AS a peeling means for folding back the peeling sheet RL at the peeling edge 14A and peeling the adhesive sheet AS from the peeling sheet RL; a drive roller 15 supported by an output shaft, not shown, of a rotary motor 15A as a driving device, and sandwiching the release sheet RL with the pinch roller 15B; a recovery roller 16 as a recovery unit supported by an output shaft of a driving device not shown, for applying a predetermined tension to the peel sheet RL existing between the recovery roller 16 and the pinch roller 15B and recovering the peel sheet RL while the sheet sticking apparatus EA is automatically operated; and a length adjusting means 17 AS a cutting means for cutting the adhesive sheet AS.
The length adjustment unit 17 includes: an air cylinder 17A as a driving means, and a cutter 17C, the cutter 17C being supported on an output shaft 17B of the air cylinder 17A.
The pressing unit 20 includes a pressing roller 21, and the pressing roller 21 is rotatably supported by a not-shown bracket. The pressing unit 20 can press the adhesive sheet AS against the outer edge end surface WKE such that the protruding region ASH protruding from the outer edge end surface WKE is formed along both the one outer edge AS1 side and the other outer edge AS2 side of the supply direction SD of the adhesive sheet AS.
The moving unit 30 includes: a linear motor 31 as a driving device; a rotary motor 32 as a driving device supported on the slider 31A of the linear motor 31; a support table 33 supported by an output shaft 32A of the rotation motor 32 and having a support surface 33A capable of being sucked and held by a decompression unit (holding unit) not shown such as a decompression pump or a vacuum pump; and an upper pressing unit 34 that presses the adherend WK against the support base 33 from above. The support base 33 is configured to rotate about a base center 33R by a turning motor 32.
The upper pressing unit 34 includes: a translation motor 34A as a driving device; and an upper pressing plate 34C supported by the output shaft 34B of the linear motor 34A and rotatable in accordance with the movement of the support base 33. The upper pressing plate 34C rotates about the upper pressing plate center 34R.
The folding and bonding unit 40 includes: a rotation motor 41 as a driving device capable of torque control; and a drive roller 42 supported by an output shaft, not shown, and nipping the material RS with the pinch roller 43.
The extension area pressing unit 50 includes first, second, and third pressing rollers 51, 52, and 53, and the first, second, and third pressing rollers 51, 52, and 53 are rotatably supported by a not-shown bracket. In the present embodiment, as shown in fig. 1 (E) to (G), a pair of upper and lower first, second, and third pressing rollers 51, 52, and 53 are disposed, respectively, and when the adherend WK is nipped by these first, second, and third pressing rollers 51, 52, and 53, the first, second, and third pressing rollers 51, 52, and 53 are disposed along the outer edge of the adherend WK. The first, second, and third pressing rollers 51, 52, and 53 are rotatable about rotation axes, not shown, which are inclined in the directions of the reference positions WKR of 30 degrees, 60 degrees, and 90 degrees with respect to the Z axis, respectively.
The operation of the sheet sticking apparatus EA described above will be described.
First, in the sheet sticking apparatus EA in which the respective members are arranged at the initial position shown by the solid line in fig. 1 (a), a user of the sheet sticking apparatus EA (hereinafter, simply referred to as "user") sets the material RS as shown in the drawing, and then inputs a signal for starting the automatic operation via an operation unit (not shown) such as an operation panel or a personal computer. Then, the supply unit 10 drives the rotary motor 15A to feed the material RS, and stops the drive of the rotary motor 15A when the leading end portion of the adhesive sheet AS in the supply direction is peeled off by a predetermined length at the peeling edge 14A of the peeling plate 14 AS shown by the solid line in fig. 1 (a).
Next, as shown in fig. 1 (a), when the user, an unillustrated conveying means such as an articulated robot or a belt conveyor, etc., places the adherend WK on the support surface 33A so that the reference position WKR overlaps the table center 33R, the moving means 30 drives the unillustrated decompressing means to start suction holding on the support surface 33A. The supply unit 10 drives the rotary motor 15A to feed the material RS, and positions the front end of the adhesive sheet AS in the supply direction at a predetermined position in front of the pressing roller 21 AS shown by the two-dot chain line in fig. 1 (a). At this time, the front end portion of the adhesive sheet AS in the supply direction is biased by a biasing means such AS an air nozzle and an ionizer, not shown, and is brought into contact with the front side of the pressing roller 21.
Then, the moving means 30 drives the linear motor 31 to move the adherend WK leftward, and stops the driving of the linear motor 31 when the table center 33R (reference position WKR) coincides with the upper pressing plate center 34R as shown in fig. 1 (B) and (C). At this time, AS shown in fig. 1 (B), the supply-direction distal end portion of the adhesive sheet AS is sandwiched between the pressure roller 21 and the outer edge end face WKE of the adherend WK, and the first, second, and third pressure rollers 51, 52, and 53 are in a state capable of pressing the adhesive sheet AS against the outer edge portion of the adherend WK.
Next, the moving means 30 drives the linear motor 34A to sandwich the adherend WK between the upper pressing plate 34C and the supporting base 33 AS shown in fig. 1 (C), and then drives the rotary motor 32 to rotate the adherend WK counterclockwise to attach the adhesive sheet AS to the outer edge end face WKE of the adherend WK. At this time, the folding and pasting unit 40 drives the rotary motor 41, detects the torque applied from the adhesive sheet AS via the driving roller 42, and supplies the adhesive sheet AS while keeping the torque at a predetermined value, thereby applying tension in the direction along the supply direction SD to the adhesive sheet AS. The elastically deformable adhesive sheet AS supplied by the folding means 40 and adhered to the outer edge end face WKE of the adherend WK is, due to its inherent elastic restoring force, folded and adhered to the one surface WK1 side by the protruding region ASH on the one outer edge AS1 side, and folded and adhered to the other surface WK2 side by the protruding region ASH on the other outer edge AS2 side, AS shown by the two-dot chain line in fig. 1 (C).
Depending on various conditions such AS the characteristics, properties, material, composition, structure, shape, size, weight, atmosphere conditions, and other reasons of the adhesive sheet AS, if any, the following may occur: each protruding region ASH is not bent until it comes into contact with the adherend WK as indicated by the two-dot chain line in fig. 1 (C); even if each of the protruding regions ASH is bent until it comes into contact with the adherend WK, the predetermined adhesive strength cannot be obtained due to insufficient pressing force; in a case where it is desired to press the respective projecting regions ASH against the one surface WK1 and the other surface WK2 for reliability, etc., the projecting region pressing step of pressing the respective projecting regions ASH against the one surface WK1 and the other surface WK2 may be performed by the projecting region pressing unit 50. In this extending region pressing step, as shown in fig. 1 (D), (E), and (F), while the adherend WK continues to rotate counterclockwise, the first and second pressing rollers 51 and 52 bend the extending regions ASH in stages, and finally, as shown in fig. 1 (G), the third pressing roller 53 presses the extending regions ASH against the one surface WK1 and the other surface WK2 of the adherend WK (the above is the "extending region pressing step").
While the rotation of the support base 31 and the continuous application of the adhesive sheet AS are being performed, the supply unit 10 drives the air cylinder 17A to advance and retreat the cutter 17C, and cuts the adhesive sheet AS so long AS the adhesive sheet AS can be applied to the outer edge end face WKE of the adherend WK over the entire circumference. Next, when the new feeding direction tip portion of the adhesive sheet AS formed by cutting is peeled off by a predetermined length at the peeling edge 14A of the peeling plate 14, the feeding unit 10 stops the driving of the rotary motor 15A and stops the feeding of the raw material RS. Then, when the supply-direction rear end portion of the adhesive sheet AS formed by cutting is bonded to the one surface WK1 and the other surface WK2 of the adherend WK to form the integrated object UP, the moving unit 30 stops the driving of the rotary motor 32. In this case, the front end portion and the rear end portion of the adhesive sheet AS attached to the one surface WK1 and the other surface WK2 of the adherend WK may overlap with each other, may be separated from each other, or may be in contact with each other in a butt joint manner.
Next, the moving means 30 drives the linear motor 34A to return the upper pressing plate 34C to the initial position, and then stops the driving of the decompression means, not shown, to release the suction holding on the supporting surface 33A. Thereafter, when the user or a conveying unit not shown conveys the integrated object UP to the next step, the moving unit 30 drives the linear motor 31 to return the support base 33 to the initial position, and thereafter, the same operation as described above is repeated.
According to the above embodiment, since the extension regions AS1 and AS2 of the adhesive sheet AS attached to the outer edge end face WKE are folded and attached to the one surface WK1 and the other surface WK2 adjacent to the outer edge end face WKE, the outer edge end face sides of the outer edge end face WKE of the adherend WK and the one surface WK1 and the other surface WK2 adjacent to the outer edge end face WKE can be reliably protected by the adhesive sheet AS.
The means and steps in the present invention are not particularly limited as long as the operations, functions, and steps described in the means and steps can be realized, and are not limited to the structures and steps of the simple one embodiment shown in the above embodiments. For example, the supply means may be any means as long as it can supply the elastically deformable adhesive sheet, and is not particularly limited as long as it is within the technical scope in accordance with the technical common knowledge at the time of the first application (the same applies to other means and steps).
The supply means 10 may form a closed loop or overall short widthwise slit in the strip-shaped adhesive sheet base material temporarily bonded to the strip-shaped release liner RL and peel the adhesive sheet AS from the raw material RS in which the adhesive sheet AS is set AS a predetermined region partitioned by the slit, and supply the adhesive sheet AS, or may use a strip-shaped adhesive sheet raw material in which the strip-shaped adhesive sheet base material is temporarily bonded to the strip-shaped release liner RL, and in the process of feeding out the strip-shaped adhesive sheet raw material, form a closed loop or overall short widthwise slit in the adhesive sheet base material by a cutting blade AS cutting means, and peel the adhesive sheet AS from the raw material RS in which the adhesive sheet AS is set AS a predetermined region partitioned by the slit, and supply the adhesive sheet AS, or may peel the strip-shaped adhesive sheet AS from the raw material RS in which the strip-shaped adhesive sheet AS is temporarily bonded to the strip-shaped release liner RL, for example, a recovery means for separating and supplying the adhesive sheet AS from the fan-folded material RS, or for recovering the release sheet RL by cutting with a shredder or the like, or a recovery means for recovering the release sheet RL by folding in a fan-shape, or for feeding out and supplying the adhesive sheet AS which is not temporarily adhered to the release sheet RL, may be used without using the recovery means, or a not-shown urging means may be provided, or a length adjusting means 17 may be used, in which the length adjusting means 17 cuts the adhesive sheet AS which is present between the supply means 10 and the pressing roller 21, or cuts the adhesive sheet AS on the adherend WK, or in the case where an adhesive sheet AS set in advance to a predetermined length is used, or in the case where an adhesive sheet AS of a predetermined shape is formed during feeding out of a tape-like adhesive sheet material, the length adjusting means 17 may be provided or not.
The pressing unit 20 may press the adhesive sheet AS against the outer edge end face WKE so that the protruding region ASH protruding from the outer edge end face WKE is formed only on one outer edge AS1 side of the adhesive sheet AS in the supply direction SD, or may press the adhesive sheet AS against the outer edge end face WKE so that the protruding region ASH protruding from the outer edge end face WKE is formed only on the other outer edge AS2 side of the adhesive sheet AS in the supply direction SD.
The moving means 30 may be configured to attach the adhesive sheet AS to the adherend WK without moving the support base 33 or by moving the supply means 10 and the pressing means 20 while moving the support base 33, or may be configured to employ a support base 33 that is incapable of performing suction holding on the holding surface 33A, and may or may not include the upper pressing means 34.
The folding and bonding unit 40 applies a tension in the direction along the supply direction SD of the adhesive sheet AS to the adhesive sheet AS located between the supply unit 10 and the pressing unit 20, whereby the protruding region ASH can be folded and bonded only in the direction of one surface WK1 adjacent to the outer edge end surface WKE, or the protruding region ASH can be folded and bonded only in the direction of the other surface WK2 adjacent to the outer edge end surface WKE, and the user can arbitrarily determine the predetermined tension to be applied to the adhesive sheet AS in consideration of various conditions such AS the characteristics, properties, material, composition, structure, shape, size, weight, atmosphere conditions, and other reasons of the adhesive sheet AS.
The protruding region pressing means 50 may be constituted by not only 3 pressing rollers, for example, one or 2 pressing rollers, but also 4 or more pressing rollers instead of or in addition to the first, second, and third pressing rollers 51, 52, 53, and may be constituted by a gas-jet system, a brush-like member, a blade-like member, or the like, the first, second, and third pressing rollers 51, 52, 53 and the like may be made of rubber, resin, sponge, metal, or the like, and the first, second, and third pressing rollers 51, 52, 53 may not be a pair, the extension area ASH may be provided only on the one surface WK1 side or the other surface WK2 side of the adherend WK and may be pressed only on the one surface WK1 or only on the other surface WK2, and the inclination angles of the first, second, and third pressing rollers 51, 52, and 53 with respect to the Z axis may be inclination angles other than 30 degrees, 60 degrees, and 90 degrees, respectively, and may be inclination angles such as 15 degrees, 45 degrees, and 91 degrees, respectively, for example, and the extension area pressing unit 50 may be provided or not provided in the sheet attachment device EA of the present invention when the extension area ASH is attached to the one surface WK1 or the other surface WK2 without performing the extension area pressing step.
The sheet sticking device EA may be configured to stick one adhesive sheet AS or a plurality of adhesive sheets AS to the outer edge end face WKE of the adherend WK and the other surface adjacent to the outer edge end face WKE, and when one adhesive sheet AS or a plurality of adhesive sheets AS are stuck to the outer edge end face WKE of the adherend WK and the other surface adjacent to the outer edge end face WKE, the front end in the supply direction and the rear end in the supply direction of the adhesive sheet AS may overlap each other, may be separated from each other, or may be in abutting contact with each other.
The sheet bonding apparatus EA may be configured such that a support member such AS metal, glass, resin, or another adhesive sheet is disposed between the support base 33 and the adherend WK, and the adherend WK and the support member are integrated with each other by the adhesive sheet AS, and the adhesive sheet AS may be deformable by a predetermined energy, and may include an energy applying unit 60 AS shown by a two-dot chain line in fig. 1 (a), the energy applying unit 60 applying the predetermined energy to the adhesive sheet AS. The predetermined energy may be electromagnetic waves such AS ultraviolet rays, infrared rays, visible light, acoustic waves, X-rays, and gamma rays, or thermal energy, and the energy applying means 60 may apply electromagnetic waves such AS ultraviolet rays, infrared rays, visible light, acoustic waves, X-rays, and gamma rays, or thermal energy such AS hot water and hot air, and may be arbitrarily determined in consideration of the characteristics, properties, material, composition, and configuration of the adhesive sheet AS. In addition, such an adhesive sheet AS may be deformed with contraction by a predetermined energy, may be deformed with expansion, or may be deformed without contraction and expansion.
The material, type, shape, and the like of the adhesive sheet AS, the supporting member, and the adherend WK in the present invention are not particularly limited. For example, the adhesive sheet AS, the support member, and the adherend WK may be polygonal such AS circular, oval, triangular, or rectangular, or may have other shapes, the adhesive sheet AS may be an adhesive sheet of an adhesive system such AS pressure-sensitive adhesive property or heat-sensitive adhesive property, and when the adhesive sheet AS having heat-sensitive adhesive property is used, the adhesive sheet AS may be bonded by an appropriate method such AS providing an appropriate coil heater for heating the adhesive sheet AS, or a heating means such AS a heating side of a heat pipe. In addition, such an adhesive sheet AS may be a single layer having only an adhesive layer; 2 layers each comprising a base material and an adhesive layer; 3 or more layers of one or more intermediate layers laminated between the base material and the adhesive layer; laminating 3 or more than 3 covering layers on the upper surface of the substrate; providing a substrate, an intermediate layer or a cover layer in a manner enabling peeling; a single-layer double-sided adhesive sheet composed only of an adhesive layer; and a double-sided adhesive sheet in which an adhesive layer is laminated on both outermost surfaces of one or more intermediate layers. The supporting member and the adherend WK may be, for example, food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit board, an information recording board such as an optical disk, a glass plate, a steel plate, ceramics, a wood plate, or a monomer such as a resin, or may be a composite of two or more of these, and any type of member or article may be an object. The adhesive sheet AS may be modified depending on the function and use, and may be any sheet, film, tape, or the like, such AS an information recording label, a decorative label, a protective sheet, a dicing tape, a chip adhesive film, a chip bonding tape, or a recording layer forming resin sheet.
The driving apparatus in the above embodiment may employ: electric devices such as a rotary motor, a linear motor, a single-axis robot, a multi-joint robot having joints with two or more axes, actuators such as a cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder, and the like, and a system in which these are directly or indirectly combined may be employed.
In the above embodiment, when a rotating member such as a roller is used, a driving device for rotationally driving the rotating member may be provided, the surface of the rotating member or the rotating member itself may be formed of a deformable member such as rubber or resin, the surface of the rotating member or the rotating member itself may be formed of a non-deformable member, another member such as a shaft or a blade that rotates or does not rotate may be used instead of the roller, and when a pressing means such as a pressing roller or a pressing head or a pressing member is used to press an object to be pressed, the following embodiments may be used instead of or in combination with the above-described exemplary embodiment: the roller, the round bar, the blade material, the brush-like member, and further, the member for pressing by spraying a gas such as air or other gas may be formed of a deformable member such as rubber, resin, or sponge, or may be formed of a non-deformable member such as metal or resin, and when the object to be peeled is peeled by a peeling means or a peeling member such as a peeling plate or a peeling roller, the following methods may be employed instead of or in combination with the above-described exemplary method: the member to be peeled may be a deformable member such as a rubber or a resin, or may be a non-deformable member, and when the supported member (the supported member) is supported (held) by a supporting (holding) means, a supporting (holding) member, or the like, a structure for supporting (holding) the supported member by a holding means such as a mechanical chuck, a chuck cylinder, or the like, coulomb force, an adhesive (adhesive sheet, adhesive tape), a magnetic force, bernoulli suction, suction, a driving device, or the like may be employed, and when the member to be cut is cut or a cut line is formed in the member to be cut by a cutting means, a cutting member, or the like, the above-described exemplary structure may be employed instead of or in combination with the above-described structure: the cutting is performed by a cutting blade, a laser cutter, an ion beam, thermal power, thermal energy, water pressure, a heating wire, a gas or liquid jet, or by moving an object to be cut by an apparatus combined with an appropriate driving device.

Claims (4)

1. A sheet sticking apparatus includes:
a supply unit that supplies an elastically deformable adhesive sheet;
a pressing unit that presses the adhesive sheet supplied by the supply unit against an outer edge end face of an adherend; and
a moving means for moving the pressing means and the adherend relative to each other to attach the adhesive sheet to the outer edge end surface,
the pressing unit presses the adhesive sheet to the outer edge end face so that an extension region extending from the outer edge end face is formed on at least one of one outer edge side and the other outer edge side in a feeding direction of the adhesive sheet,
it is characterized in that the preparation method is characterized in that,
the adhesive sheet feeding device further includes a bending and bonding unit that applies tension in a direction along a feeding direction of the adhesive sheet to the adhesive sheet positioned between the feeding unit and the pressing unit, and bends and bonds the protruding region in a direction of the other surface adjacent to the outer edge end surface.
2. The sheet application apparatus according to claim 1,
and an extension area pressing means for pressing the extension area against the other surface.
3. The sheet attaching apparatus according to claim 1 or 2,
the adhesive sheet is deformed by a prescribed energy,
the adhesive sheet is provided with an energy applying means for applying the predetermined energy to the adhesive sheet.
4. A sheet sticking method is implemented:
a supply step of supplying an elastically deformable adhesive sheet by a supply unit;
a pressing step of pressing the adhesive sheet supplied in the supplying step against an outer edge end face of an adherend by a pressing unit; and
a moving step of moving the pressing means and the adherend relative to each other to attach the adhesive sheet to the outer edge end face,
in the pressing step, the adhesive sheet is pressed against the outer edge end face so that an extended region extending from the outer edge end face is formed on at least one of the one outer edge side and the other outer edge side along the feeding direction of the adhesive sheet,
it is characterized in that the preparation method is characterized in that,
and a bending and sticking process is also carried out: the adhesive sheet positioned between the supply unit and the pressing unit is applied with tension in a direction along the supply direction of the adhesive sheet, and the protruding region is bent in a direction of the other surface adjacent to the outer edge end surface and is bonded.
CN202210884724.1A 2021-09-30 2022-07-26 Sheet sticking apparatus and sheet sticking method Pending CN115872216A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021-160461 2021-09-30
JP2021160461A JP2023050393A (en) 2021-09-30 2021-09-30 Sheet sticking device and sheet sticking method

Publications (1)

Publication Number Publication Date
CN115872216A true CN115872216A (en) 2023-03-31

Family

ID=85477688

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210884724.1A Pending CN115872216A (en) 2021-09-30 2022-07-26 Sheet sticking apparatus and sheet sticking method

Country Status (4)

Country Link
JP (1) JP2023050393A (en)
CN (1) CN115872216A (en)
DE (1) DE102022209016A1 (en)
TW (1) TW202316540A (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5654311B2 (en) 2010-10-07 2015-01-14 リンテック株式会社 Sheet sticking device and sticking method

Also Published As

Publication number Publication date
TW202316540A (en) 2023-04-16
JP2023050393A (en) 2023-04-11
DE102022209016A1 (en) 2023-03-30

Similar Documents

Publication Publication Date Title
JP7390124B2 (en) Sheet pasting device and sheet pasting method
JP5185868B2 (en) Sheet peeling apparatus and peeling method
CN115872216A (en) Sheet sticking apparatus and sheet sticking method
CN115910897A (en) Sheet sticking apparatus and sheet sticking method
CN116805585A (en) Sheet bonding apparatus and sheet bonding method
CN116805584A (en) Sheet bonding apparatus and sheet bonding method
CN117352422A (en) Sheet sticking apparatus and sheet sticking method
CN116978816A (en) Sheet bonding apparatus and sheet bonding method
JP2024111985A (en) Sheet pasting device and sheet pasting method
JP2024006764A (en) Sheet attachment device and sheet attachment method
JP2024141530A (en) Sheet pasting device and sheet pasting method
JP2024141529A (en) Sheet pasting device and sheet pasting method
JP7441734B2 (en) Transfer device and method
JP2024029590A (en) Sheet sticking method and sheet sticking device
JP2024141531A (en) Sheet pasting device and sheet pasting method
JP2024047624A (en) Adherend processing method and adherend processing equipment
JP2024029589A (en) Sheet sticking device and sheet sticking method
JP2024047622A (en) Adherend processing method and adherend processing equipment
JP2023050392A (en) Sheet sticking device and sheet sticking method
JP2024047623A (en) Adherend processing method and adherend processing equipment
JP2023163814A (en) Sheet pasting device and sheet pasting method
JP7213046B2 (en) Unnecessary sheet removing device and unnecessary sheet removing method
JP2024029591A (en) Sheet sticking device and sheet sticking method
WO2022264883A1 (en) Sheet affixing device and sheet affixing method
CN117352421A (en) Sheet sticking apparatus and sheet sticking method

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination