JP2024047624A - Adherend processing method and adherend processing device - Google Patents

Abstract

[Problem] To provide an adherend processing method and adherend processing device capable of compensating for insufficient strength of an adherend after grinding without employing a special grinding method. [Solution] The adherend processing device EA is equipped with a grinding means 30 that grinds an adherend WK to a predetermined thickness, and further includes an adhesive sheet application means 50 that applies an adhesive sheet AS to the outer edge of the adherend WK, avoiding the center of the adherend WK, after grinding by the grinding means 30. [Selected Figure] Figure 1

Description

The present invention relates to a method for processing adherends and an apparatus for processing adherends.

A method for processing an adherend is known (see, for example, Patent Document 1).

JP 2007-103582 A

In the wafer processing method (adherend processing method) described in Patent Document 1, a special grinding method is adopted in which, in order to compensate for the lack of strength of the semiconductor wafer 10 (adherend) after grinding, a reinforcing portion is formed by not grinding the excess region 105 of the adherend.

The object of the present invention is to provide an adherend processing method and adherend processing device that can compensate for the lack of strength of the adherend after grinding without adopting a special grinding method.

The present invention employs the configuration described in the claims.

According to the present invention, after grinding the adherend, an adhesive sheet is attached to the outer edge of the adherend, so that the strength deficiency of the adherend after grinding can be compensated for without employing a special grinding method.

1A to 1H are explanatory diagrams of an adherend processing apparatus according to one embodiment of the present invention, and FIG. 1M are explanatory diagrams of modified examples of the adherend processing apparatus according to the present invention.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
In this embodiment, the X-axis, Y-axis, and Z-axis are mutually orthogonal, the X-axis and Y-axis are axes in a predetermined plane, and the Z-axis is an axis perpendicular to the predetermined plane. Furthermore, in this embodiment, the view from the direction of the arrow DR parallel to the Y-axis is used as a reference, and when a direction is indicated without specifying a figure, "up" is the direction of the Z-axis arrow, "down" is the opposite direction, "left" is the direction of the X-axis arrow, "right" is the opposite direction, "front" is the forward direction in FIG. 1 parallel to the Y-axis, and "rear" is the opposite direction. Note that FIG. 1(F) is a view seen from the arrow AA in FIG. 1(A). FIG. 1(G) is a view seen from the arrow BB in FIG. 1(A).

The adherend processing apparatus EA for carrying out the adherend processing method of the present invention includes protective sheet supplying means 10 for carrying out a protective sheet supplying step of supplying a protective sheet PS (see FIG. 1(B)), protective sheet applying means 20 for carrying out a protective sheet applying step of applying the protective sheet PS to the other surface WK2 of the adherend WK, grinding means 30 for carrying out a grinding step of grinding the adherend WK to a predetermined thickness, adhesive sheet supplying means 40 for carrying out an adhesive sheet supplying step of supplying an adhesive sheet AS, adhesive sheet applying means 50 for carrying out an adhesive sheet applying step of applying an adhesive sheet AS to the outer edge portion of the adherend WK avoiding the central portion of the adherend WK after grinding by the grinding means 30, and curing energy applying means 60 for carrying out a curing energy applying step of applying ultraviolet rays UV as curing energy to the adhesive sheet AS applied to the adherend WK, and curing the adhesive sheet AS, and is disposed near adherend transport means 70 for carrying out an adherend transport step of transporting the adherend WK.
In addition, the adherend WK in this embodiment has a circular shape centered on the adherend center WKC.

As shown in FIG. 1(B), the protective sheet supplying means 10 includes a support member 11 that directly or indirectly supports each of the components that constitute the protective sheet supplying means 10, a support roller 12 that supports an original roll RS having a protective sheet PS temporarily attached to a strip-shaped release sheet RL, a guide roller 13 that guides the original roll RS, a peeling plate 14 as peeling means that folds back the release sheet RL at a peeling edge 14A and peels the protective sheet PS from the release sheet RL, a drive roller 15 that is supported by an output shaft (not shown) of a rotary motor 15A as a driving device and pinches the release sheet RL between itself and a pinch roller 15B, a recovery roller 16 that is supported by an output shaft (not shown) of the driving device and serves as recovery means that constantly applies a predetermined tension to the release sheet RL present between it and the pinch roller 15B and recovers the release sheet RL while the adherend processing apparatus EA is automatically operating, and a tension applying means 17 that applies tension to the protective sheet PS to be attached to the adherend WK.
The tension applying means 17 includes a rotary motor 17A as a torque-controllable driving device, and a driving roller 17C supported by an output shaft (not shown) of the rotary motor 17A and configured to pinch the raw web RS between itself and a pinch roller 17B.

The protective sheet attachment means 20 includes a pressure roller 21 as a pressure member rotatably supported on a bracket (not shown).

The grinding means 30 is composed of multiple driving devices, and includes a so-called XY table 31 as a driving device that can move what is supported by a slider 31A, which is the working part, to any position in the XY plane within its working range, a grinding table 32 supported by the slider 31A and having a support surface 32A that can be adsorbed and held by a pressure reduction means (holding means) such as a pressure reduction pump or vacuum ejector (not shown), a linear motor 33 as a driving device, a rotary motor 35 as a driving device supported by the slider 33A via an arm 34, and a grinding member 36 such as a grinding wheel or blade supported by the output shaft 35A and capable of grinding the adherend WK.

The adhesive sheet supplying means 40 has the same configuration as the protective sheet supplying means 10, and a detailed description will be omitted since it is sufficient to replace the 1 in the tens digit of the numbering in the description of the configuration of the protective sheet supplying means 10 with a 4, and further to replace the protective sheet PS with the adhesive sheet AS, the release sheet RL with the second release sheet RL2, and the original roll RS with the second original roll RS2.
The adhesive sheet AS of this embodiment is deformable by heat as deformation energy and hardenable by ultraviolet light UV as hardening energy. Specifically, the adhesive sheet AS includes a base material BS (see the figure marked with CC in FIG. 1A) that is deformed by heat, and an adhesive layer AL that is hardened by ultraviolet light UV.

The adhesive sheet application means 50 includes a first application means 51 that performs a first application step of applying the adhesive sheet AS to the outer peripheral surface WK3 of the adherend WK so as to form an overhanging area ASH (see Figure 1 (E)) in which the adhesive sheet AS overhangs the outer peripheral surface WK3 of the adherend WK, and a second application means 52 that performs a second application step of folding the overhanging area ASH and applying the folded overhanging area ASH to both one surface WK1 and the other surface WK2 of the adherend WK.
The first attachment means 51 includes a first pressing roller 51A as a pressing member rotatably supported on a bracket (not shown), and is configured to form a straight-shaped adhesive sheet AS into a cylindrical ring shape with the adhesive surface (the exposed surface of the adhesive layer AL) facing each other on the inside, and attach the adhesive sheet AS to the outer peripheral surface WK3 of the adherend WK.
The second attachment means 52 includes a hot air blower 52A as a deformation energy imparting means that blows hot air HA, which is heat as deformation energy heated by a heating device not shown such as a coil heater or the heating side of a heat pipe, onto the protruding area ASH, thereby performing a deformation energy imparting process of bending the protruding area ASH, and a second pressing roller 52B and a third pressing roller 52C as pressing members rotatably supported on a bracket not shown.
As shown by the dotted line in Figure 1 (A), the first pressing roller 51A is positioned so that when the center WKC of the adherend WK is positioned at the reference position RP, the first pressing roller 51A can press the adhesive sheet AS supplied from the adhesive sheet supplying means 40 against the outer peripheral surface WK3 of the adherend WK.
In addition, as shown by the dotted line in Figure 1 (A), the hot air blower 52A is positioned so that when the center WKC of the adherend WK is positioned at the reference position RP, hot air HA can be blown onto the protruding area ASH of the adhesive sheet AS attached to the outer peripheral surface WK3 of the adherend WK.
1(G) and 1(H), the second and third pressing rollers 52B and 52C are arranged in pairs, one above the other, and are arranged in positions where, when the adherend center WKC of the adherend WK is placed at the reference position RP, the protruding area ASH of the adhesive sheet AS attached to the outer peripheral surface WK3 of the adherend WK can be folded in the direction of one surface WK1 and the direction of the other surface WK2, respectively, as shown by the two-dot chain line in FIG. 1(A). In this embodiment, the second and third pressing rollers 52B and 52C rotate around a rotation axis inclined at angles of 45 degrees (135 degrees) and 180 degrees (0 degrees) respectively to the XY plane toward the reference position RP.

The curing energy applying means 60 includes an ultraviolet irradiator 61 that irradiates ultraviolet light emitted by an ultraviolet light emitting device (not shown) such as a light emitting diode or an ultraviolet light emitting lamp.
In addition, as shown by the dotted line in Figure 1 (A), the ultraviolet irradiator 61 is positioned at a position where it can irradiate ultraviolet rays UV to the adhesive sheet AS attached to the adherend WK when the adherend center WKC of the adherend WK is positioned at the reference position RP.

The adherend transport means 70 includes a linear motor 71 as a driving device, a rotary motor 72 as a driving device supported by a slider 71A of the linear motor, a support table 73 supported by the output shaft 72A and having a support surface 73A that can be adsorbed and held by a decompression means (holding means) not shown, such as a decompression pump or a vacuum ejector, a so-called articulated robot 74 as a driving device formed of a plurality of arms and capable of displacing an object supported by a tip arm 74A, which is a working part, to any position and any angle within its working range, and a transport arm 75 as a holding means supported by the tip arm 74A and having a holding surface 75A that can be adsorbed and held by a decompression means (holding means) not shown, such as a decompression pump or a vacuum ejector.
In this embodiment, the support table 73 is configured to rotate around a table center 73C by a rotary motor 72.

The operation of the above-mentioned adherend processing apparatus EA will now be described.
1A and 1B, the adherend processing apparatus EA has its respective members arranged in the initial positions shown by solid lines. A user of the adherend processing apparatus EA (hereinafter simply referred to as the "user") sets the original roll RS and the second original roll RS2 as shown in the figures, and then inputs a signal to start automatic operation via an operation means (not shown) such as an operation panel or a personal computer. Then, the protective sheet supply means 10 drives the rotary motors 15A and 17A to pay out the original roll RS, and when a predetermined length of the leading end of the leading protective sheet PS in the supply direction is peeled off from the release sheet RL at the folded-back portion of the release sheet RL folded back by the peeling edge 14A of the peeling plate 14 as shown in FIG. 1B, the driving of the rotary motors 15A and 17A is stopped. In addition, the adhesive sheet supply means 40 drives the rotary motors 45A, 47A to pay out the second original roll RS2, and when the leading end of the leading adhesive sheet AS in the supply direction is peeled off a predetermined length from the second release sheet RL2 at the folded-back portion of the second release sheet RL2 folded back by the peeling edge 44A of the peeling plate 44 as shown in Figure 1 (A), the driving of the rotary motors 45A, 47A is stopped.

Next, as shown in Fig. 1(A), a user or a conveying means (not shown) such as an articulated robot or a belt conveyor places the adherend WK on the support surface 73A with one surface WK1 facing the support surface 73A so that the adherend center WKC overlaps with the table center 73C, and the adherend conveying means 70 drives a pressure reducing means (not shown) to start suction and holding on the support surface 73A. Thereafter, the adherend conveying means 70 drives the linear motor 71 to move the support table 73 to the left, and when the adherend WK reaches a predetermined position relative to the protective sheet supplying means 10, the protective sheet supplying means 10 drives the rotary motors 15A and 17A to pay out the original web RS in accordance with the movement speed of the adherend WK. As a result, the protective sheet PS is peeled off from the peel-off sheet RL at the folded-back portion of the peel-off sheet RL, and is pressed and attached to the other surface WK2 of the adherend WK by the pressure roller 21, as shown by the two-dot chain line in FIG. 1B. Next, when the entire leading protective sheet PS is attached to the adherend WK, and the leading end of the next protective sheet PS following the leading protective sheet PS in the supply direction is peeled off a predetermined length from the peel-off sheet RL at the folded-back portion of the peel-off sheet RL, the protective sheet supply means 10 stops driving the rotary motors 15A and 17A. Then, when the entire leading protective sheet PS is attached to the other surface WK2 of the adherend WK by the pressure roller 21, the adherend transport means 70 drives the linear motor 71 and moves the support table 73 to the right to return it to its initial position.

Next, the adherend transport means 70 drives the multi-joint robot 74, and as shown by the two-dot chain line in FIG. 1(B), the holding surface 75A is brought into contact with the underside of the adherend WK, and then the pressure reducing means (not shown) is driven to start suction and holding on the holding surface 75A. After that, the adherend transport means 70 stops driving the pressure reducing means (not shown) and releases the suction and holding on the support surface 73A, and then drives the multi-joint robot 74, and as shown in FIG. 1(C), the adherend WK is placed on the support surface 32A with the other surface WK2 facing the support surface 32A. Next, when the grinding means 30 drives the pressure reducing means (not shown) and starts suction and holding on the support surface 32A, the adherend transport means 70 stops driving the pressure reducing means (not shown) and releases the suction and holding on the holding surface 75A, and then drives the multi-joint robot 74 to return the transport arm 75 to its initial position.

The grinding means 30 then drives the XY table 31, linear motor 33, and rotary motor 35 to rotate the grinding member 36 and move the adherend WK relative to the rotating grinding member 36, grinding one surface WK1 of the adherend WK as shown in FIG. 1(D). Next, when the adherend WK is ground to a predetermined thickness, the grinding means 30 stops driving the rotary motor 35, and then drives the XY table 31 and linear motor 33 to return the grinding table 32 and grinding member 36 to their initial positions.

Then, the adherend transport means 70 drives the articulated robot 74, abuts the holding surface 75A against one surface WK1 of the adherend WK ground by the grinding means 30, and then drives the pressure reducing means (not shown) to start suction and holding on the holding surface 75A. Next, when the grinding means 30 stops driving the pressure reducing means (not shown) and releases the suction and holding on the support surface 32A, the adherend transport means 70 drives the articulated robot 74, places the adherend WK on the support surface 73A with the other surface WK2 facing the support surface 73A, and then drives the pressure reducing means (not shown) to start suction and holding on the support surface 73A. Then, the adherend transport means 70 stops driving the pressure reducing means (not shown) and releases the suction and holding on the holding surface 75A, and then drives the articulated robot 74 to return the transport arm 75 to its initial position.

Next, the adherend transport means 70 drives the linear motor 71 to move the support table 73 to the left, and when the table center 73C (adherend center WKC) coincides with the reference position RP as shown by the two-dot chain line in Figure 1 (A), the adherend transport means 70 stops driving the linear motor 71. Thereafter, the adhesive sheet supply means 40 and the adherend transport means 70 drive the rotary motors 45A, 47A, 72 to supply the adhesive sheet AS while rotating the adherend WK in the counterclockwise direction RD when viewed from above. As a result, the adhesive sheet AS is peeled off from the second release sheet RL2 at the folded-back portion of the second release sheet RL2, and is pressed against the outer peripheral surface WK3 of the adherend WK by the first pressing roller 51A as shown by the two-dot chain line in Fig. 1(A) and Fig. 1(E) to form an overhanging area ASH that overhangs the outer peripheral surface WK3 and is attached to the adherend WK. Next, when the leading end in the supply direction of the adhesive sheet AS attached to the outer peripheral surface WK3 approaches the hot air blowing area of the hot air blower 52A, the adhesive sheet attachment means 50 drives the hot air blower 52A to blow hot air HA toward the adherend WK. Then, when the adhesive sheet AS attached to the outer peripheral surface WK3 passes through the hot air blowing area of the hot air blower 52A, the base material BS in the protruding area ASH is deformed by the hot air HA, and the protruding area ASH is bent toward one surface WK1 and toward the other surface WK2, as shown in FIG. 1(F).

As the rotary motors 45A, 47A, and 72 continue to be driven, the adhesive sheet AS is folded in stages at the protruding area ASH by the second and third pressure rollers 52B and 52C, as shown in Fig. 1 (G) and (H), and the folded protruding area ASH is attached to one surface WK1 and the other surface WK2 of the adherend WK to form an integrated object UP. Next, when the leading end of the adhesive sheet AS attached to the outer peripheral surface WK3 approaches the ultraviolet irradiation area of the ultraviolet irradiator 61, the curing energy applying means 60 drives the ultraviolet irradiator 61 to irradiate ultraviolet rays UV toward the adherend WK. Then, when the adhesive sheet AS attached to the outer peripheral surface WK3 passes through the ultraviolet irradiation area of the ultraviolet irradiator 61, the adhesive layer AL in the protruding area ASH is cured by the ultraviolet rays UV. Next, when the leading end of the next adhesive sheet AS following the leading adhesive sheet AS in the supply direction is peeled off a predetermined length from the second release sheet RL2 at the folded-back portion of the second release sheet RL2, the adhesive sheet supply means 40 stops driving the rotary motors 45A and 47A, and stops supplying the adhesive sheet AS.

Then, when the rear end of the leading adhesive sheet AS in the supply direction passes through the hot air blowing area, the adhesive sheet attachment means 50 stops driving the hot air blower 52A, and when the rear end of the leading adhesive sheet AS in the supply direction passes through the ultraviolet irradiation area, the curing energy application means 60 stops driving the ultraviolet irradiator 61, and the adherend transport means 70 stops driving the rotary motor 72. Next, the adherend transport means 70 drives the linear motor 71 to move the support table 73 to the right and return it to its initial position, then stops driving the pressure reducing means (not shown), and releases the suction and holding on the support surface 73A, and the user or the transport means (not shown) removes the integrated object UP from the support surface 73A and transports the integrated object UP to the next process, and the same operations as above are repeated thereafter.

According to the above embodiment, after grinding the adherend WK, the adhesive sheet AS is attached to the outer edge of the adherend WK, so that the strength deficiency of the adherend WK after grinding can be compensated for without employing a special grinding method.

The means and steps of the present invention are not limited in any way as long as they can perform the operations, functions or steps described for those means and steps, and are in no way limited to the components and steps of a single embodiment shown in the above embodiment. For example, the grinding means may be anything that can grind the adherend to a predetermined thickness, and is not limited in any way as long as it is within the technical scope in light of the common general technical knowledge at the time of filing (the same goes for the other means and steps).

The protective sheet supplying means 10 may peel and supply the protective sheet PS from the original roll RS in which a predetermined area partitioned by the cut is the protective sheet PS by forming a closed loop-shaped or entire short width direction cut in the strip-shaped protective sheet base material temporarily attached to the strip-shaped release sheet RL, or may use a strip-shaped protective sheet original roll in which a strip-shaped protective sheet base material is temporarily attached to the strip-shaped release sheet RL, and while the strip-shaped protective sheet original roll is being unwound, a closed loop-shaped or entire short width direction cut is formed in the protective sheet base material by a cutting blade as a cutting means, and the protective sheet PS is peeled and supplied from the original roll RS in which a predetermined area partitioned by the cut is the protective sheet PS, or may peel and supply the protective sheet PS from the original roll RS in which the strip-shaped protective sheet PS is temporarily attached to the strip-shaped release sheet RL, without being rolled up. For example, the protective sheet PS may be peeled off from the fan-folded original roll RS and supplied, or a recovery means may be used to recover the release sheet RL by, for example, fan-folding it without rolling it up, shredding it with a shredder or the like, or piling it up randomly, or a recovery means may not be used, or the protective sheet PS that is not temporarily attached to the release sheet RL may be unwound and supplied, or a cutting means may be provided to cut the protective sheet PS attached to the adherend WK to a predetermined length, or the adhesive sheet supply means 40 may have a configuration equivalent to or different from that of the adhesive sheet supply means 40, or may be provided in the adherend processing apparatus EA of the present invention, or may not be provided, and if the adherend processing apparatus EA of the present invention is not provided with this, for example, another device or a user may supply the protective sheet PS.

The protective sheet application means 20 may employ, in place of or in combination with the pressure roller 21, a guide plate, a rotating belt, air blowing, or driving equipment such as a chuck cylinder or an articulated robot, and the like, to apply the protective sheet PS to the other side WK2 of the adherend WK. The protective sheet PS may be applied to the other side WK2 of the adherend WK not by relative movement with the adherend WK by the adherend transport means 70, but by relative movement with the adherend WK by, for example, another device or a driving equipment not shown, or the like, instead of the pressure roller 21, for example, a linear motor as a driving equipment and pressing means. A holding member that is supported by the output shaft of the substrate 1 and can be adsorbed and held by a decompression means (holding means) such as a decompression pump or vacuum ejector (not shown), and the protective sheet PS held by the holding member can be pressed against the other surface WK2 of the substrate WK to be attached, or as shown in FIG. 1(K), a flat ring-shaped protective sheet PS whose adhesive surface is located within a single plane, or a protective sheet PS that has been converted from a straight shape to a flat ring (while being converted from a straight shape to a flat ring) can be attached to the other surface WK2, and this may or may not be provided in the substrate processing apparatus EA of the present invention.
The protective sheet attachment means 20 may include tension applying means 17. In such a case, the torque applied from the protective sheet PS may be detected via the drive roller 17C, and the rotary motor 17A may be driven while the torque is always kept at a predetermined value, so that the protective sheet PS may be supplied while being applied with a predetermined tension, or may be supplied without being applied with tension, or such tension applying means 17 may slidably hold the original sheet RS or the protective sheet PS and adjust the gripping force to apply tension to the protective sheet PS to be attached to the adherend WK, or the tension to be applied to the protective sheet PS may be determined by the user in consideration of various conditions such as the characteristics, properties, properties, material, composition, configuration, shape, dimensions, and weight of the protective sheet PS, atmospheric conditions, and other factors, or a rotary motor 17A that cannot be torque controlled may be employed so that a constant torque is always applied to the protective sheet PS.

The grinding means 30 may grind the adherend WK to a predetermined thickness by applying laser light, electromagnetic waves, vibration, heat, chemicals, or the like, grinding with an abrasive, or cutting with a cutting means such as a cutter blade, or may move the grinding table 32 without moving the rotating grinding member 36, or move the rotating grinding member 36 without moving the grinding table 32, or move both the rotating grinding member 36 and the grinding table 32, or may grind the adherend WK to a predetermined thickness by applying laser light, electromagnetic waves, vibration, heat, chemicals, or the like, grinding with an abrasive, or cutting with a cutting means such as a cutter blade, or may move the grinding table 32 without moving the rotating grinding member 36, or move both the rotating grinding member 36 and the grinding table 32, or may grind the adherend WK to a predetermined thickness by applying laser light, electromagnetic waves, vibration, heat, chemicals, or the like, grinding with an abrasive, or cutting with a cutting means such as a cutter blade, or may move the grinding table 32 without moving the rotating grinding member 36, or may ... the grinding table 32 without moving the rotating grinding member 36, or may move the grinding table 32 without moving the rotating grinding member 36, or may move the grinding table 32 without moving the rotating grinding member 36, or may move the grinding table 32 without moving the rotating grinding member 36, or may move the grinding table 32 without moving the rotating grinding member 36, or may move the grinding table 32 without moving the rotating grinding member 36, or may move the grinding A grinding table 32 that cannot be held by suction may be used, or instead of the XY table 31 and grinding table 32, the adherend WK may be held or moved by, for example, another device or a driving device not shown, or the adherend WK may be supported on the support table 73 of the adherend transport means 70 and ground to a predetermined thickness, or at least one of the surfaces WK1 and WK2 of the adherend WK may be ground to a predetermined thickness.

The adhesive sheet supplying means 40 is equivalent to the protective sheet supplying means 10, and may be in a form in which the protective sheet PS in other examples of the protective sheet supplying means 10 is replaced with the adhesive sheet AS, the release sheet RL with the second release sheet RL2, and the original roll RS with the second original roll RS2. It may have the same configuration as the adhesive sheet supplying means 10 or a different configuration, and may or may not be included in the adherend processing apparatus EA of the present invention. If it is not included in the adherend processing apparatus EA of the present invention, for example, another device or a user may supply the adhesive sheet AS.

The adhesive sheet sticking means 50 may include a first sticking means 51 that performs a first sticking step of sticking the adhesive sheet AS to the outer peripheral surface WK3 of the adherend WK so as to form an overhanging region ASH in which the adhesive sheet AS overhangs only in the direction of one surface WK1, and a second sticking means 52 that performs a second sticking step of folding the overhanging region ASH and sticking the folded overhanging region ASH to one surface WK1 of the adherend WK, or may include a first sticking means 51 that performs a first sticking step of sticking the adhesive sheet AS to the outer peripheral surface WK3 of the adherend WK so as to form an overhanging region ASH in which the adhesive sheet AS overhangs only in the direction of the other surface WK2, and a second sticking means 52 that performs a second sticking step of folding the overhanging region ASH and sticking the folded overhanging region ASH to one surface WK1 of the adherend WK. Alternatively, after grinding the adherend WK, and before attaching the protective sheet PS to the other surface WK2, an adhesive sheet AS may be attached to the outer edge of the adherend WK to form an integrated object UP as shown in FIG. 1(I). Alternatively, instead of or in combination with at least one of the first attaching means 51 and the second attaching means 52, a guide plate, a rotating belt, air blowing, a chuck cylinder, an articulated robot, or the like may be used to attach the adhesive sheet AS to the outer edge of the adherend WK while avoiding the center of the adherend WK. Alternatively, a pressing means may be provided to clamp the adherend WK with a support table 73 when attaching the adhesive sheet AS to the adherend WK. Alternatively, instead of the relative movement with respect to the adherend WK by the adherend conveying means 70, for example, the adhesive sheet AS may be applied to the outer edge of the adherend WK while avoiding the center of the adherend WK by relative movement with respect to the adherend WK by another device or a driving device not shown, or the adhesive sheet AS previously formed in a cylindrical ring shape may be applied to the outer edge of the adherend WK. Alternatively, instead of the first applying means 51 and the second applying means 52, a holding member that is supported by the output shaft of a linear motor as a driving device and pressing means and that can be sucked and held by a decompression means (holding means) not shown such as a decompression pump or a vacuum ejector may be adopted, and a flat ring-shaped adhesive sheet AS or an adhesive sheet AS that has been changed from a straight shape to a flat ring (while being changed from a straight shape to a flat ring) may be applied. may be held by a holding member, and the adhesive sheet AS held by the holding member may be pressed and attached to the outer edge of the adherend WK, avoiding the central portion of the adherend WK, or a flat ring-shaped adhesive sheet AS or an adhesive sheet AS that has been converted from a straight shape to a flat ring (while being converted from a straight shape to a flat ring) may be attached to the outer edge of the adherend WK to form an integrated object UP as shown in FIGS. 1(J) and 1(K). When an adhesive sheet AS that has been converted from a straight shape to a cylindrical ring or flat ring (while being converted from a straight shape to a cylindrical ring or flat ring) is attached to the outer edge of the adherend WK, the straight extension direction end portions may overlap, the straight extension direction end edges may be in contact with each other, or a gap may be formed between the straight extension direction end edges.
The adhesive sheet sticking means 50 may include a tension applying means 47. In such a case, an elastically deformable adhesive sheet AS is adopted, the torque applied from the adhesive sheet AS is detected via the drive roller 47C, and the rotary motor 47A is driven to supply the adhesive sheet AS while the torque is always kept at a predetermined value. This allows the protruding area ASH to assume a bent position bent toward one surface WK1 or the other surface WK2 by the inherent elastic restoring force, and the protruding area ASH is bent toward one surface WK1 or the other surface WK2 via at least one of the pressing member and the deformation energy applying means, and the folded protruding area ASH is stuck to one surface WK1 or the other surface WK2 of the adherend WK, or the folded protruding area ASH is stuck to one surface WK1 or the other surface WK2 of the adherend WK without the intervention of both the pressing member and the deformation energy applying means. Such tension applying means 47 may involve slidably gripping the second original roll RS2 or the adhesive sheet AS and adjusting the gripping force to apply tension to the adhesive sheet AS to be attached to the adherend WK, or the tension to be applied to the adhesive sheet AS may be determined by the user in consideration of various conditions such as the characteristics, properties, qualities, material, composition, configuration, shape, dimensions, and weight of the adhesive sheet AS, atmospheric conditions, and other factors, or a rotary motor 47A that cannot be torque controlled may be employed so that a constant torque is always applied to the adhesive sheet AS.
The first attachment means 51 may attach the adhesive sheet AS, which has been previously formed into a cylindrical ring shape, to the outer peripheral surface WK3 of the adherend WK so that an overhang area ASH is formed in which the adhesive sheet AS overhangs the outer peripheral surface WK3 of the adherend WK, and may or may not be provided in the adherend processing apparatus EA of the present invention.
The second bonding means 52 may be provided with the second and third pressure rollers 52B, 52C not as a pair of upper and lower rollers, but only on one side WK1 of the adherend WK or only on the other side WK2 of the adherend WK, and the second and third pressure rollers 52B, 52C may rotate about a rotation axis inclined toward the reference position RP at an angle of 30 degrees (150 degrees) or 179 degrees (1 degree) with respect to the XY plane, respectively. In the above embodiment, three pressure members, the second and third pressure rollers 52B, 52C, are used to press the protruding area ASH in two stages on one side WK1. and the other surface WK2, three or more pressing members may be used and the protruding area ASH may be attached to one surface WK1 or the other surface WK2 in three or more stages, or one pressing member may be used and the protruding area ASH may be attached to one surface WK1 or the other surface WK2 in one stage, or the protruding area ASH may be folded all at once toward one surface WK1 or the other surface WK2 and the folded protruding area ASH may be attached to one surface WK1 or the other surface WK2, and this may or may not be provided in the adherend processing apparatus EA of the present invention.
The deformation energy applying means may apply, as deformation energy, electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays or gamma rays, or heat such as hot water or hot air, and may apply any type of deformation energy as long as it can deform the adhesive sheet AS taking into consideration the characteristics, properties, properties, material, composition and configuration of the adhesive sheet AS, and may be provided at a position other than that shown in the above embodiment, and may be provided at a position where deformation energy can be applied to the protruding region ASH of the protective sheet PS attached to the outer peripheral surface WK3. It may be provided anywhere, and by applying deformation energy to the protrusion area ASH all at once, the protrusion area ASH may be folded all at once toward one side WK1 or the other side WK2, or the protrusion area ASH may be folded in the direction of one side WK1 or the other side WK2 without the use of the second and third pressing rollers 52B, 52C or other pressing members, and the folded protrusion area ASH may be affixed to one side WK1 or the other side WK2 of the adherend WK, and it may or may not be provided in the adherend processing apparatus EA of the present invention.

The curing energy applying means 60 may apply electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays or gamma rays, or heat such as hot water or hot air as curing energy. Any curing energy may be applied as long as it can cure the adhesive sheet AS taking into consideration the characteristics, properties, properties, material, composition and configuration of the adhesive sheet AS. It may be provided at a position other than that shown in the above embodiment. For example, it may apply curing energy to the adhesive sheet AS before the adhesive sheet AS is applied to one side WK1 by the sheet application means 50. It may be provided anywhere as long as it is a position where curing energy can be applied to the adhesive sheet AS applied to the adherend WK. It may apply curing energy to the adhesive sheet AS applied to the adherend WK all at once, and cure the adhesive sheet AS all at once. It may or may not be provided in the adherend processing device EA of the present invention.

The adherend transport means 70 may be a support table 73 that cannot be held by suction on the support surface 73A, or an articulated robot 74 and a transport arm 75 may be used instead of the linear motor 71, the rotary motor 72 and the support table 73 to move the adherend WK relative to the protective sheet application means 20 or the adhesive sheet application means 50 and apply the protective sheet PS or the adhesive sheet AS to the adherend WK, or the adherend WK may be transported by, for example, another device or a driving device not shown in the figure, instead of or in combination with the linear motor 71, the rotary motor 72, the support table 73, the articulated robot 74 and the transport arm 75, or may be provided in the adherend processing apparatus EA of the present invention, or may not be provided.

The adherend processing apparatus EA may operate each means to process the adherend WK in the order of a protective sheet application step, a grinding step, and an adhesive sheet application step, or may operate each means to process the adherend WK in the order of a grinding step, a protective sheet application step, and an adhesive sheet application step, or may operate each means to process the adherend WK in the order of a grinding step, an adhesive sheet application step, and a protective sheet application step, or may operate each means to perform the adhesive sheet application step after the grinding step without performing the protective sheet application step, thereby forming an integrated object UP as shown in Figures 1 (L) and (M), or may apply one protective sheet PS or one adhesive sheet AS to one or more adherends WK, or may apply multiple protective sheets PS or multiple adhesive sheets AS to one or more adherends WK, or may operate a plurality of adhesive sheets UP on at least one of the one surface WK1 side and the other surface WK2 side of the adherend WK. A supporting member such as a metal, glass, resin, or other protective sheet may be placed or attached to at least one of the surfaces of the adherend WK, and the adherend WK and the supporting member may be integrated with each other using the protective sheet PS or adhesive sheet AS. Alternatively, in a protective sheet attachment step performed before or after the grinding step, instead of the protective sheet PS exemplified in the above embodiment, an adhesive sheet AS having a size that protrudes beyond the outer edge of the adherend WK may be used, and the adhesive sheet AS may be attached to the other surface WK2 of the adherend WK so that an overhang area ASH (not shown) is formed in which the outer edge of the adhesive sheet AS protrudes beyond the outer edge of the adherend WK, and then the adhesive sheet attachment step may be performed by operating each means to process the adherend WK. When a protective sheet attachment step is performed using an adhesive sheet AS having a size that protrudes beyond the outer edge of the adherend WK instead of the protective sheet PS, the adhesive sheet supply means 40 exemplified in the above embodiment may not be necessary.
The next process may be any process such as plating, etching, dipping, cutting, grinding, polishing, painting, laminating, sheet bonding, surface treatment, drilling, bending, inspection, verification, irradiation, etc.

The adhesive sheet AS may be one in which at least one of the substrate BS and the adhesive layer AL deforms due to deformation energy, or one in which neither the substrate BS nor the adhesive layer AL deforms due to deformation energy, or, if at least one of the substrate BS and the adhesive layer AL deforms due to deformation energy, the adhesive sheet AS may deform with contraction, with expansion, or without contraction or expansion.
The adhesive sheet AS may be one in which at least one of the substrate BS and the adhesive layer AL is cured by curing energy, or one in which neither the substrate BS nor the adhesive layer AL is cured by curing energy, or, if at least one of the substrate BS and the adhesive layer AL is cured by curing energy, the adhesive sheet AS may be one in which the substrate BS and the adhesive layer AL are cured by curing energy, the substrate BS and the adhesive layer AL may be cured with shrinkage, with expansion, or without shrinkage or expansion.
The adhesive sheet AS may be deformed by any type of deformation energy, and may be hardened by any type of curing energy, such as electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays, or gamma rays, or heat such as hot water or hot air, or may be hardened by any type of curing energy, may not be deformed by deformation energy, may not be hardened by curing energy, may be deformed by deformation energy and not hardened by curing energy, may not be deformed by deformation energy and hardened by curing energy, or may not be deformed by deformation energy and hardened by curing energy.
The adhesive layer AL may be composed of a single layer, may be formed of multiple layers, may be composed of all layers other than the substrate BS, or may be composed of some layers other than the substrate BS.
The substrate BS may be composed of a single layer, may be formed of multiple layers, may be composed of all layers other than the adhesive layer AL, or may be composed of some layers other than the adhesive layer AL.
The protective sheet PS may have the same characteristics, properties, properties, material, composition, and configuration as the adhesive sheet AS, or may have completely different properties, or may have some of the same properties but other properties different.
The adherend WK may have a supporting member such as metal, glass, resin, or another protective sheet attached to the other surface WK2 side.

The materials, types, shapes, etc. of the protective sheet PS, adhesive sheet AS, support member, and adherend WK in the present invention are not particularly limited. For example, the protective sheet PS, adhesive sheet AS, support member, and adherend WK may be circular, elliptical, polygonal such as triangular or rectangular, or other shapes, and the protective sheet PS and adhesive sheet AS may be pressure-sensitive adhesive, heat-sensitive adhesive, or other adhesive forms. When a heat-sensitive adhesive protective sheet PS or adhesive sheet AS is used, the protective sheet PS or adhesive sheet AS may be adhered by an appropriate method such as providing a heating means such as a suitable coil heater or the heating side of a heat pipe for heating the protective sheet PS or adhesive sheet AS. In addition, such protective sheets PS and adhesive sheets AS may be any of the following: a single layer of adhesive layer only, a two-layered one in which a substrate and an adhesive layer are laminated, a three-layered one or more layers in which one or more intermediate layers are laminated between the substrate and the adhesive layer, a three-layered one or more layers in which one or more cover layers are laminated on the upper surface of the substrate, a substrate, an intermediate layer or a cover layer provided in a peelable manner, a double-sided adhesive sheet of a single layer consisting of an adhesive layer only, a double-sided adhesive sheet in which an adhesive layer is laminated on both outermost surfaces of one or more intermediate layers, etc. Furthermore, the adherend WK may be, for example, a single object such as food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit board, an information recording substrate such as an optical disk, a glass plate, a steel plate, a ceramic, a wooden board or a resin, or a composite formed of two or more of them, and any form of member or article may also be the subject. The protective sheet PS, adhesive sheet AS, or other adhesive sheets may be any sheet, film, tape, etc., such as an information label, decorative label, protective sheet, dicing tape, die attach film, die bonding tape, or recording layer forming resin sheet.

The driving device in the above embodiment may be a single electric device such as a rotary motor, a linear motor, a single-axis robot, a so-called multi-joint robot with two or more joints, or an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, or a rotary cylinder, or a direct or indirect combination of such electric devices and actuators, or may be an electric device, actuator, or the like that may or may not be capable of torque control or speed control of the output part of such electric device or actuator.

In the above embodiment, some object (hereinafter referred to as "object A") and an object (hereinafter referred to as "object B") that moves relative to object A, i.e., object A and object B that move relative to each other, may be object B moving relative to object A that does not move, object A may moving relative to object B that does not move, or both objects A and B may move. If the result achieved by the movement is the same, either object A or object B may move. If a rotating member such as a roller is used, a driving device that rotates the rotating member may be provided. The surface of the rotating member or the rotating member itself may be made of a deformable member such as rubber or resin. The surface of the rotating member or the rotating member itself may be made of a non-deformable member. Other members such as a rotating or non-rotating shaft or blade may be used instead of the roller. If a pressing means or pressing member such as a pressing roller or a pressing head that presses the object to be pressed is used, a roller, a round bar, a blade material, a brush-like member, or a member that blows air or gas may be used instead of or in combination with the above examples. The pressing member may be a deformable member such as rubber, resin, sponge, etc. Alternatively, it may be made of a non-deformable material such as metal or glass. In the case where a peeling means or peeling member such as a peeling plate or a peeling roller is used to peel off the object to be peeled off, a member such as an adherend, a round bar, or a roller may be used instead of or in combination with the above examples. The peeling means may be made of a deformable material such as rubber or resin, or may be made of a non-deformable material. In the case where a supporting (holding) means or a supporting (holding) member that supports (holds) the supported member (held member) is used, a gripping means such as a mechanical chuck or a chuck cylinder, Coulomb force, adhesion, etc. may be used. A configuration may be adopted in which the supported member is supported (held) by a material (adhesive sheet, adhesive tape), a pressure sensitive adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, a driving device, etc., or when a cutting means or cutting member that cuts the member to be cut or forms an incision or cutting line in the member to be cut is used, a cutter blade, laser cutter, ion beam, fire, heat, water pressure, heating wire, spraying of gas or liquid, etc. may be used instead of or in combination with the above examples, or a suitable driving device may be combined to move the cutting device to cut.

EA...Adherend processing device 30...Grinding means 50...Adhesive sheet application means 51...First application means 52...Second application means 60...Curing energy application means AS...Adhesive sheet ASH...Protruding area UV...Ultraviolet light (curing energy)
WK...Substrate WK1...One side WK2...Other side WK3...Outer surface

Claims (4)

A method for processing an adherend, comprising a grinding step of grinding an adherend to a predetermined thickness,
The method for processing an adherend further comprises, after grinding in the grinding step, carrying out an adhesive sheet application step of applying an adhesive sheet to an outer edge portion of the adherend while avoiding a central portion of the adherend. The method for processing adherends according to claim 1, characterized in that the adhesive sheet attachment step includes a first attachment step of attaching the adhesive sheet to the outer peripheral surface of the adherend so as to form an overhanging area in which the adhesive sheet overhangs the outer peripheral surface of the adherend, and a second attachment step of folding the overhanging area and attaching the folded overhanging area to at least one of the one surface and the other surface of the adherend. the adhesive sheet is provided so as to be curable by curing energy,
The method for processing an adherend according to claim 1 or 2, further comprising carrying out a curing energy applying step of applying the curing energy to the adhesive sheet attached to the adherend, thereby curing the adhesive sheet. An apparatus for processing adherends, comprising a grinding means for grinding an adherend to a predetermined thickness,
The adherend processing apparatus further comprises an adhesive sheet applying means for applying an adhesive sheet to an outer edge portion of the adherend, avoiding a central portion of the adherend, after grinding by the grinding means.