CN116805585A - Sheet bonding apparatus and sheet bonding method - Google Patents

Sheet bonding apparatus and sheet bonding method Download PDF

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Publication number
CN116805585A
CN116805585A CN202211627672.6A CN202211627672A CN116805585A CN 116805585 A CN116805585 A CN 116805585A CN 202211627672 A CN202211627672 A CN 202211627672A CN 116805585 A CN116805585 A CN 116805585A
Authority
CN
China
Prior art keywords
adhesive sheet
unit
sheet
adherend
pressing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202211627672.6A
Other languages
Chinese (zh)
Inventor
丸山政徳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lintec Corp
Original Assignee
Lintec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lintec Corp filed Critical Lintec Corp
Publication of CN116805585A publication Critical patent/CN116805585A/en
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65C—LABELLING OR TAGGING MACHINES, APPARATUS, OR PROCESSES
    • B65C9/00—Details of labelling machines or apparatus
    • B65C9/08—Label feeding
    • B65C9/18—Label feeding from strips, e.g. from rolls
    • B65C9/1865—Label feeding from strips, e.g. from rolls the labels adhering on a backing strip
    • B65C9/1869—Label feeding from strips, e.g. from rolls the labels adhering on a backing strip and being transferred directly from the backing strip onto the article
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65C—LABELLING OR TAGGING MACHINES, APPARATUS, OR PROCESSES
    • B65C9/00—Details of labelling machines or apparatus
    • B65C9/26—Devices for applying labels
    • B65C9/30—Rollers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L2221/6835—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used as a support during build up manufacturing of active devices

Abstract

Provided are a sheet sticking apparatus and a sheet sticking method capable of preventing the front end of an adhesive sheet in the feeding direction from being separated from an adherend as much as possible before the front end is stuck to the adherend by an extension-area sticking unit. The device is provided with: a supply unit that supplies the adhesive sheet in a predetermined supply direction; a pressing unit that presses the adhesive sheet supplied by the supply unit so that at least one of one end side and the other end side in the supply direction of the adhesive sheet forms a protruding region protruding from the outer edge end surface of the adherend; a moving unit for relatively moving the pressing unit and the adherend, and adhering the adhesive sheet to the outer edge end surface; and an extension region attaching means for bending and attaching the extension region to the other surface adjacent to the outer edge end surface. The adhesive sheet is provided with a front end portion sticking unit which is positioned between the pressing unit and the extension region sticking unit, and before the extension region sticking unit sticks, only the extension region of the front end portion of the adhesive sheet in the feeding direction is bent in the other surface direction to stick.

Description

Sheet bonding apparatus and sheet bonding method
Technical Field
The present invention relates to a sheet bonding apparatus and a sheet bonding method.
Background
A sheet sticking apparatus for sticking an adhesive sheet to an adherend is known (for example, refer to patent document 1).
Prior art literature
Patent literature
Patent document 1: japanese patent application laid-open No. 2022-30877
Disclosure of Invention
First, the technical problem to be solved
In the tape application system (sheet application device) described in patent document 1, since there is a small number of adhesive areas in which the protective tape 27 (adhesive sheet) is applied to the front end in the supply direction of the outer peripheral side surface (outer peripheral end surface) of the wafer W (adherend) by the use of the side roller 43 (pressing means), the front end in the supply direction of the adhesive sheet may be separated from the adherend before reaching the first roller 46 (protruding area application means).
The present invention provides a sheet sticking apparatus and a sheet sticking method, which can prevent the front end of the adhesive sheet in the feeding direction from separating from the adherend before sticking to the adherend by the sticking-out area sticking unit.
(II) technical scheme
The present invention adopts the structure described in the claims.
(III) beneficial effects
According to the present invention, only the protruding region of the front end portion in the feeding direction of the adhesive sheet is folded in the other surface direction before the attachment by the protruding region attaching means, and therefore the number of the adhesive regions between the front end portion in the feeding direction and the adherend increases. Therefore, the front end portion in the feeding direction of the adhesive sheet can be prevented as much as possible from being detached from the adherend before being attached to the adherend by the protruding area attaching unit.
Drawings
Fig. 1 is an explanatory view of a sheet sticking apparatus according to an embodiment of the present invention and an explanatory view of the operation of the apparatus.
Description of the reference numerals
EA-sheet sticking means; 10-a supply unit; 20-a pressing unit; 30-a mobile unit; 40-an extension area pasting unit; 50-a front end pasting unit; 60-a bending initiation site forming unit; 70-a tension applying unit; 80-an energy application unit; AS-adhesive sheets; ASC-bend initiation site; ASF-supply direction front end; ASH-extension region; AS 1-one end; AS 2-the other end; SD-feed direction; WK-adherend; WK 1-one side (other side); WK 2-other side (other side); WKE-peripheral end face.
Detailed Description
An embodiment of the present invention will be described below with reference to the drawings.
In the present embodiment, the X axis, the Y axis, and the Z axis have an orthogonal relationship, and the X axis and the Y axis are set to axes in a predetermined plane, and the Z axis is set to an axis orthogonal to the predetermined plane. In the present embodiment, when the direction is indicated by not designating the drawing, based on the case of viewing from the lower side in fig. 1 parallel to the Y axis, "upper" is the arrow direction of the Z axis and "lower" is the opposite direction thereof, "left" is the arrow direction of the X axis and "right" is the opposite direction thereof, and "front" is the near-front direction and "rear" is the opposite direction thereof in fig. 1 parallel to the Y axis. Fig. 1 (D) is an AA direction view of fig. 1 (E), fig. 1 (F) is a BB direction view of fig. 1 (E), and fig. 1 (G) is a CC direction view of fig. 1 (E).
The sheet sticking apparatus EA of the present invention includes: a supply unit 10 that performs a supply process and supplies the adhesive sheet AS in a predetermined supply direction SD; the pressing means 20 performs a pressing step of pressing the adhesive sheet AS supplied from the supply means 10 against the outer edge end face WKE so that an extension area ASH extending from the outer edge end face WKE of the adherend WK is formed on both the one end AS1 side and the other end AS2 side in the supply direction SD of the adhesive sheet AS; a moving unit 30 for performing a moving step of relatively moving the pressing unit 20 and the adherend WK and adhering the adhesive sheet AS to the outer edge end surface WKE; an extension region pasting means 40 for performing an extension region pasting step of bending and pasting an extension region ASH in the directions of one surface WK1 and the other surface WK2, which are other surfaces adjacent to the outer edge end surface WKE; a tip adhering means 50 which is located between the pressing means 20 and the extension area adhering means 40 and performs a tip adhering process, and before adhering by the extension area adhering means 40, only the extension area ASH of the tip ASF in the supply direction of the adhesive sheet AS is folded and adhered in the directions of one surface WK1 and the other surface WK 2; a bending start portion forming unit 60 that performs a bending start portion forming step of forming a bending start portion ASC (see fig. 1C) on the adhesive sheet AS, the bending start portion ASC being a bending start portion of the adhesive sheet AS; a tension applying unit 70 that performs a tension applying step of applying tension in a direction along the feeding direction SD to the adhesive sheet AS positioned between the feeding unit 10 and the pressing unit 20, thereby bending the extension area ASH in the direction of one surface WK1 and the other surface WK 2; and an energy application unit 80 that performs an energy application process to apply heat AS predetermined energy to the adhesive sheet AS.
The adhesive sheet according to the present embodiment is provided so as to be elastically deformable, and is deformed by heat which is a predetermined energy.
The adherend WK of the present embodiment has a circular shape centered on the adherend center WKR.
The supply unit 10 includes: a support member 11 that directly or indirectly supports each member constituting the supply unit 10; a support roller 12 for supporting the raw material RS temporarily adhered to the band-shaped release sheet RL by the adhesive sheet AS; a guide roller 13 that guides the raw material RS; a release sheet 14 AS a release means for folding back the release sheet RL at the release edge 14A and peeling the adhesive sheet AS from the release sheet RL; a drive roller 15 supported by an output shaft, not shown, of a rotary motor 15A as a drive means, and sandwiching the release sheet RL with a pinch roller 15B; the recovery roller 16 is supported as recovery means by an output shaft of a driving device not shown, and always applies a predetermined tension to the release sheet RL existing between the recovery roller 16 and the pinch roller 15B during the automatic operation of the sheet adhering device EA, and recovers the release sheet RL.
The pressing unit 20 includes a pressing roller 21, and the pressing roller 21 is rotatably supported by a bracket not shown.
The mobile unit 30 includes: a linear motor 31 as a driving device; a rotation motor 32 as a driving device supported by the slider 31A of the linear motor 31; and a support base 33 that is supported by an output shaft 32A of the rotary motor 32 and has a support surface 33A, wherein the support surface 33A can be sucked and held by a decompression unit (holding unit) not shown, such as a decompression pump or a vacuum pump. The support base 33 has the following structure: the rotation motor 32 rotates around a table center 33R.
The extended region attaching unit 40 includes a first pressing roller 41, a second pressing roller 42, and a third pressing roller 43, and the first pressing roller 41, the second pressing roller 42, and the third pressing roller 43 are rotatably supported by a bracket not shown. In the present embodiment, AS shown in fig. 1 (F) to (H), a pair of first pressing roller 41, second pressing roller 42, and third pressing roller 43 are arranged vertically, respectively, and when the adherend center WKR of the adherend WK is located at the roller arrangement center 40R, the protruding area ASH of the adhesive sheet AS attached to the outer edge end surface WKE of the adherend WK is arranged at a position capable of being bent in the one surface WK1 direction and the other surface WK2 direction. The first pressing roller 41, the second pressing roller 42, and the third pressing roller 43 are rotatable about rotation axes, not shown, and the rotation axes, not shown, of the first pressing roller 41, the second pressing roller 42, and the third pressing roller 43 are inclined, for example, at 30 degrees, 60 degrees, and 90 degrees with respect to the Z axis, with respect to the roller arrangement center 40R direction.
The tip attaching unit 50 includes: a direct-acting motor 51 as a driving device; a first bracket 52 supported on an output shaft 51A of the linear motor 51; a two-body second bracket 53 swingably supported to the first bracket 52 and capable of rotatably supporting the grip roller 54 for each body, respectively; and a coil spring 55 that acts as a biasing means to bias the pinch rollers 54 in a direction to approach each other.
The bending start portion forming unit 60 includes: a bending start point forming roller 61 rotatably supported by the peeling plate 14; a linear motor 62 as a driving device capable of torque control; and a pressing roller 63 rotatably supported by the output shaft 62A of the linear motor 62 and pressing the raw material RS against the bending start position forming roller 61.
The bending start point forming roller 61 has a disk shape with a tapered outer edge, and presses the raw material RS by the pressing roller 63 to form a concave pressing trace on the adhesive surface side of the adhesive sheet AS, and the pressing trace is used AS the bending start point ASC.
The tension applying unit 70 includes: a rotation motor 71 as a driving device capable of torque control; and a driving roller 72 supported by an output shaft of the rotary motor 71, not shown, and sandwiching the raw material RS with the pinch roller 73.
The energy application unit 80 includes a hot air blower 81, and the hot air blower 81 blows hot air heated by a heating device, not shown, such as a coil heater or a heating side of a heat pipe.
The operation of the above-described sheet sticking apparatus EA will be described.
First, in the sheet adhering device EA in which each member is disposed at the initial position shown by the solid line in fig. 1 (a), a user of the sheet adhering device EA (hereinafter simply referred to as "user") sets a raw material RS as shown in the figure, and then inputs a signal to start an automatic operation via an operation panel, an operation unit not shown such as a personal computer, or the like. Then, the bending start point forming unit 60 drives the linear motor 62, and clamps the raw material RS with a predetermined pressing force by the bending start point forming roller 61 and the pressing roller 63 as indicated by the two-dot chain line in fig. 1 (a). At this time, the original adhesive sheet AS on the raw material RS is not sandwiched by the bending original portion forming roller 61 and the pressing roller 63. Next, the supply unit 10 and the tension applying unit 70 drive the rotary motors 15A and 71 to feed out the raw material RS, and AS shown by the two-dot chain line in fig. 1 (a), when the leading end ASF in the supply direction of the original adhesive sheet AS is peeled off by a predetermined length at the peeling edge 14A of the peeling plate 14, the drive of the rotary motors 15A and 71 is stopped. When the adhesive sheet AS passes between the bending start point forming roller 61 and the pressing roller 63, a groove-shaped bending start point ASC along the feeding direction SD is formed on the adhesive surface side of the adhesive sheet AS by the bending start point forming roller 61.
Thereafter, as shown in fig. 1 (a), when a user or a not-shown conveying means such as an articulated robot or a belt conveyor places the adherend WK on the supporting surface 33A so that the adherend center WKR overlaps the stage center 33R, the moving means 30 drives a not-shown pressure reducing means, and starts suction holding on the supporting surface 33A. The supply unit 10 and the tension applying unit 70 drive the rotary motors 15A and 71 to feed the raw material RS, and AS shown in fig. 1 (B), the front end ASF of the adhesive sheet AS in the supply direction is positioned at a predetermined position in front of the pressing roller 21. At this time, the front end ASF of the adhesive sheet AS in the feeding direction is brought into contact with the front of the pressing roller 21 by the biasing force of a biasing means such AS a gas nozzle or an ionizer, not shown.
Next, the moving unit 30 drives the linear motor 31 to move the adherend WK to the left, and stops the driving of the linear motor 31 when the table center 33R (adherend center WKR) coincides with the roller arrangement center 40R as shown in fig. 1 (B) and (C). At this time, AS shown in fig. 1 (B) and (C), the adhesive sheet AS is held between the pressing roller 21 and the outer edge end surface WKE in the feeding direction with the bending start portion ASC facing the outer edge end surface WKE. Further, the projecting region ASH is easily bent in the directions of the one surface WK1 and the other surface WK2 by bringing the bending start portion ASC into a state of facing the outer edge end surface WKE, and thus the bending of the adhesive sheet AS can be smoothly performed.
The supply unit 10, the moving unit 30, and the tension applying unit 70 drive the rotation motors 15A, 32, and 71, and rotate the adherend WK in the counterclockwise rotation direction RD in a plan view from above to below, thereby supplying the adhesive sheet AS. AS a result, the adhesive sheet AS is pressed by the pressing roller 21 and stuck to the outer edge end surface WKE, and when the front end ASF of the adhesive sheet AS in the feeding direction reaches the predetermined position in front of the grip roller 54, the feeding unit 10, the moving unit 30, and the tension applying unit 70 stop driving the rotation motors 15A, 32, and 71. When the adhesive sheet AS is attached to the peripheral end face WKE, the tension applying unit 70 drives the rotary motor 71, detects the torque applied from the adhesive sheet AS via the drive roller 72, and supplies the adhesive sheet AS so that the torque is always a predetermined value, thereby applying tension to the adhesive sheet AS in the direction along the supply direction SD. AS a result, the elastically deformable adhesive sheet AS has a posture in which the protruding areas ASH on the one end AS1 side and the other end AS2 side are bent toward the one surface WK1 side and the other surface WK2 side AS shown in fig. 1 (C) due to the inherent elastic restoring force. At this time, since the bending start portion ASC is formed in the adhesive sheet AS, the extension area ASH is easily bent in the directions of the one surface WK1 and the other surface WK2, and the bending of the adhesive sheet AS can be smoothly performed.
Next, the tip end adhering unit 50 drives the linear motor 51, advances the pinch roller 54 AS shown by a two-dot chain line in fig. 1 (D) and fig. 1 (E), adheres the tip end ASF of the adhesive sheet AS in the feeding direction to the adherend WK by the pinch roller 54, and then returns the pinch roller 54 to the initial position. Thereafter, the supply unit 10, the moving unit 30, the tension applying unit 70, and the energy applying unit 80 drive the rotary motors 15A, 32, and 71, and the hot air blower 81, and rotate the adherend WK in the counterclockwise rotation direction RD in plan view to supply the adhesive sheet AS. AS a result, AS shown by the two-dot chain line in fig. 1 (E) and (F), (G) and (H) in fig. 1, the adhesive sheet AS is folded stepwise by the first pressing roller 41, the second pressing roller 42 and the third pressing roller 43, and finally the protruding region ASH on the one end AS1 side is attached to the one surface WK1 side and the protruding region ASH on the other end AS2 side is attached to the other surface WK2 side. At this time, since the bending start portion ASC is formed in the adhesive sheet AS, the extension area ASH is easily bent in the directions of the one surface WK1 and the other surface WK2, and the adhesive sheet AS can be smoothly bent. The adhesive sheet AS is deformed such that the two extending areas ASH are bent in the direction of the adherend WK by the hot air blown by the hot air blower 81, and the extending areas ASH are easily adhered to the adherend WK.
Next, when the leading end ASF in the feeding direction of the next adhesive sheet AS following the initial adhesive sheet AS is peeled off by a predetermined length from the peeling edge 14A of the peeling plate 14, the feeding unit 10 and the tension applying unit 70 stop driving the rotary motors 15A and 71, and stop feeding the raw material RS. When the two extension areas ASH of the rear end ASR in the feeding direction of the initial adhesive sheet AS are adhered to the one surface WK1 and the other surface WK2 by the third pressing roller 43 to form the integrated object UP, the moving unit 30 and the energy applying unit 80 stop driving the turning motor 32 and the hot air blower 81. The front end ASF and the rear end ASR of the adhesive sheet AS attached to the adherend WK may overlap each other, may be separated from each other, or may be in contact with each other in a butt joint manner.
Next, the moving means 30 drives the linear motor 31 to return the support base 33 to the initial position, and thereafter stops driving of a decompression means, not shown, to release the suction and holding on the support surface 33A. Thereafter, the user or a not-shown conveying means conveys the integrated object UP to the next step, and thereafter, the same operation as described above is repeated.
According to the above embodiment, only the extension area ASH of the front end ASF in the supply direction of the adhesive sheet AS is folded and adhered in the directions of the one surface WK1 and the other surface WK2 before the adhesion by the extension area adhering means 40, and therefore, the adhesion area between the front end ASF in the supply direction and the adherend WK increases. Therefore, the front end ASF in the feeding direction of the adhesive sheet AS can be prevented AS much AS possible from coming off the adherend WK before being attached to the adherend WK by the extension-area attaching unit 40.
The units and steps in the present invention are not limited as long as the operations, functions, or steps described in the units and steps can be realized, and are not limited to the simple constitution and steps of one embodiment shown in the above embodiment. For example, the supply means is not limited as long as it can supply the adhesive sheet in a predetermined supply direction, and is within the technical scope of the present invention (the same applies to other means and steps).
The supply unit 10 may be configured to form a cut in the whole width direction of a closed loop or short length on the tape-shaped adhesive sheet base material temporarily adhered to the tape-shaped release sheet RL, to peel the tape-shaped adhesive sheet AS from the raw material RS having the tape-shaped adhesive sheet AS set in a predetermined area partitioned by the cut, or may be configured to supply the tape-shaped adhesive sheet AS by using the tape-shaped adhesive sheet base material temporarily adhered to the tape-shaped release sheet RL, to form a cut in the whole width direction of the closed loop or short length on the adhesive sheet base material by using a cutter blade serving AS a cutting unit while the tape-shaped adhesive sheet raw material is being fed, to peel the adhesive sheet AS from the raw material RS having the tape-shaped adhesive sheet AS set in a predetermined area partitioned by the cut, or may be configured to peel the tape-shaped adhesive sheet AS from the raw material RS having the tape-shaped release sheet AS temporarily adhered thereto, or may not be wound, and may be configured to supply the tape-shaped adhesive sheet AS from the tape-shaped adhesive sheet RS temporarily adhered to the tape-shaped release sheet AS, or may not be wound, for example, to cut by using a fan-shaped folding, or may be configured to cut by a cutter blade, and may not be configured to cut off the tape-shaped adhesive sheet AS by a predetermined length, or may be temporarily cut and may be configured to be supplied from the adhesive sheet AS and may not be supplied to a predetermined adhesive sheet.
The pressing unit 20 may press the adhesive sheet AS against the outer edge end surface WKE so that only one end AS1 side of the adhesive sheet AS supplied from the supply unit 10 in the supply direction SD forms the protruding region ASH protruding from the outer edge end surface WKE of the adherend WK, or may press the adhesive sheet AS against the outer edge end surface WKE so that only the other end AS2 side of the adhesive sheet AS supplied from the supply unit 10 in the supply direction SD forms the protruding region ASH protruding from the outer edge end surface WKE of the adherend WK.
The moving means 30 may move the pressing means 20 without moving the adherend WK or while moving it, may adhere the adhesive sheet AS to the outer edge end surface WKE, may not have the linear motor 31, may employ the support table 33 which is incapable of suction holding on the holding surface 33A, and may include an upper pressing means which sandwiches the adherend WK with the support table 33.
The sticking-out region sticking unit 40 may be configured to stick the sticking-out region ASH by bending the first pressing roller 41, the second pressing roller 42, and the third pressing roller 43 in other directions without moving the adherend WK or while moving it, and may stick the sticking-out region ASH by bending only the sticking-out region ASH on one end AS1 side in one direction WK1, and by bending only the sticking-out region ASH on the other end AS2 side in the other direction WK2, and the first pressing roller 41, the second pressing roller 42, and the third pressing roller 43 may be provided on only one side WK1 or the other side WK2 without being vertically paired, and the first pressing roller 41, the second pressing roller 42, and the third pressing roller 43 may be inclined at various angles such AS 15 degrees, 45 degrees, and 91 degrees with respect to the Z axis, and in the embodiment, the sticking-out region ASH may be stuck in other directions by bending the sticking-out region ASH in 3 stages, and may be stuck out by bending the sticking-out region ASH in other directions in 4 stages, and may be stuck out by rolling the sticking-out region ASH in other directions by rotating the opposite directions with respect to the other directions by using a tape moving device such AS a device, and the sticking-out region may be moved in other directions, for example, and the sticking-out region may be moved by moving the sticking-out region may be moved by rotating the sticking-out region by moving the sticking-out device in other directions relative to the opposite directions, and the sticking-out region by bending the sticking-out region is moved to the opposite directions.
The tip attaching means 50 may be configured to attach the adhesive sheet AS by bending only the protruding area ASH on the one end AS1 side of the adhesive sheet AS in the supply direction toward the one surface WK1, attach the adhesive sheet AS by bending only the protruding area ASH on the other end AS2 side of the adhesive sheet AS in the supply direction toward the other surface WK2, may be configured to attach the adhesive sheet AS by bending only the protruding area ASH on the one surface WK1 side or the other surface WK2 side instead of the pair of upper and lower nip rollers 54, attach the adhesive sheet AS by bending the protruding area ASH on the front end ASF in the supply direction toward the other surface side by using a guide plate, a rotary belt, blowing of gas, or the like instead of or in combination with the rollers, and may be made of a material that is elastically deformable such AS rubber, resin, or the like, or a material that is not elastically deformable such AS metal, glass, or may be attached by bending only the protruding area ASH on the front end ASF in the supply direction of the adhesive sheet SS toward the other surface by using an output shaft such AS a chuck cylinder, a chuck motor, or the like.
The bending start point forming means 60 may be configured such that a plurality of bending start point forming rollers 61 are provided along a direction intersecting the feeding direction SD, and AS shown by two-dot chain lines in (F) to (H) of fig. 1, a plurality of bending start points ASC are formed (2 or more), the bending start point forming rollers 61 provided with a plurality of bending start point forming rollers are separated from each other, the space between the bending start points ASC is increased or decreased, the bending start point forming rollers 61 are separated from the adhesive sheet AS, the pressing roller 63 is not separated from the adhesive sheet AS, and the user can consider various conditions such AS characteristics, properties, materials, composition, structure, shape, size, weight, atmosphere conditions, and other main factors of the adhesive sheet AS, the predetermined tension of the raw material RS is arbitrarily determined by sandwiching the raw material RS between the bending start point forming roller 61 and the pressing roller 63, and the bending start point ASC can be formed by pressing the bonding sheet AS against the bending start point forming roller 61 by using a linear motor 62 which cannot perform torque control, a convex protrusion formed on the release sheet 14, or a substance formed by blowing a gas such AS air or another gas, instead of or in combination with the bending start point forming roller 61, or by using a substance formed by blowing a gas such AS air or another gas, and the bending start point ASC can be formed on the bonding sheet AS without the release sheet RL, the bending start point ASC may be formed on the adhesive surface side (the surface side to which the release sheet RL is attached) of the adhesive sheet AS, the bending start point ASC may be formed on the non-adhesive surface side (the surface side opposite to the surface to which the release sheet RL is attached) of the adhesive sheet AS, the bending start point ASC may be formed on both the adhesive surface side and the non-adhesive surface side of the adhesive sheet AS, the adhesive sheet AS may be ground, and the starting point may be formed on the adhesive sheet AS to form the groove-shaped bending start point ASC, but the present invention may not be limited to the groove-shaped bending start point.
The tension applying unit 70 may be configured such that a user can arbitrarily determine a predetermined tension applied to the adhesive sheet AS in consideration of various conditions such AS characteristics, properties, materials, composition, structure, shape, size, weight, atmosphere, other main factors, and the like of the adhesive sheet AS, and the torque-controllable rotation motor 71 may be employed, and the raw material RS and the adhesive sheet AS may be slidably held, and the holding force may be adjusted to apply the tension in the direction of the feeding direction SD to the adhesive sheet AS located between the feeding unit 10 and the pressing unit 20, and the tension in the direction of the feeding direction SD may be applied to the adhesive sheet AS located outside the feeding unit 10, and may be provided in the sheet adhering apparatus EA of the present invention, or may not be provided.
The energy application means 80 may be means for applying electromagnetic waves such AS ultraviolet rays, infrared rays, visible rays, acoustic waves, X-rays, gamma rays, etc., heat such AS hot water, hot air, etc., AS predetermined energy, and may be arbitrarily determined in consideration of the characteristics, properties, materials, compositions, structures, etc., of the adhesive sheet AS, and may or may not be provided in the sheet bonding apparatus EA of the present invention.
The sheet adhering device EA may adhere one adhesive sheet AS to one adherend WK and a plurality of adhesive sheets AS to one adherend WK, and may dispose a support member such AS a metal, glass, resin, or other adhesive sheet on at least one of the one surface WK1 side and the other surface WK2 side, and may integrate the adherend WK and the support member with the adhesive sheet AS.
The adhesive sheet may be a material that deforms with electromagnetic waves such as ultraviolet rays, infrared rays, visible rays, sound waves, X-rays, and gamma rays, heat such as hot water and hot air, and the like as predetermined energy, and may be a material that does not undergo elastic deformation, or a material that does not deform with predetermined energy.
The adhesive sheet AS deformed by a predetermined energy may be deformed by shrinkage, by expansion, or may be deformed without shrinkage or expansion.
The adherend WK may have an annular or non-annular convex portion formed on at least one of the one surface WK1 side and the other surface WK2 side, and may have a support member such as a metal, glass, resin, or other adhesive sheet attached to at least one of the one surface WK1 side and the other surface WK2 side.
The material, type, shape, and the like of the adhesive sheet AS, the support member, and the adherend WK in the invention are not particularly limited. For example, the adhesive sheet AS, the support member, and the adherend WK may be polygonal such AS circular, elliptical, triangular, or quadrangular, or may be of other shapes, and the adhesive sheet AS may be of an adhesive type such AS pressure-sensitive adhesive or heat-sensitive adhesive, and in the case of using the heat-sensitive adhesive sheet AS, the adhesive may be bonded by an appropriate method such AS providing an appropriate coil heater for heating the adhesive sheet AS or heating means such AS a heating side of a heat pipe. In addition, such an adhesive sheet AS may be, for example, a single layer having only an adhesive layer; 2 layers of a base material and an adhesive layer; 3 or more layers of one or more intermediate layers are laminated between the base material and the adhesive layer; 3 or more cover layers are laminated on the upper surface of the base material; a base material, an intermediate layer or a cover layer is arranged in a peelable manner; a single-layer double-sided adhesive sheet composed of only an adhesive layer; and a double-sided adhesive sheet having an adhesive layer laminated on both outermost surfaces of one or more intermediate layers. The adherend WK may be, for example, a single body such as a food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, an information recording substrate such as a circuit board or an optical disk, a glass plate, a steel plate, a ceramic, a wood plate or a resin, or a composite of two or more of these, and any type of member, article, or the like may be used. The adhesive sheet AS and other adhesive sheets may be modified in terms of functions and applications, and may be any sheet, film, tape, or the like such AS an information recording label, a decorative label, a protective sheet, a dicing tape, a die bonding film, a die bonding tape, a recording layer forming resin sheet, or the like.
The driving device in the above embodiment may be an electric device such as a rotary motor, a linear motor, a single-axis robot, or a so-called multi-joint robot having joints of two or more axes, an actuator such as a cylinder, a hydraulic cylinder, a rodless cylinder, or a rotary cylinder, or the like, and may be a device in which these electric devices, actuators, or the like are directly or indirectly combined, and torque control, speed control, or the like may or may not be performed on the output portion of these electric devices, actuators, or the like.
In the above-described embodiment, when a rotating member such as a roller is used, a driving device for rotationally driving the rotating member may be provided, and the surface of the rotating member or the rotating member itself may be constituted by a deformable member such as rubber or resin, or the surface of the rotating member or the rotating member itself may be constituted by a non-deformable member, or other members such as a shaft or a blade that rotates or does not rotate may be used instead of the roller, and when a pressing roller, a pressing unit such as a pressing head, or the like, or a pressing member is used to press a pressed object, the above-described exemplary embodiment or the combination thereof may be used instead of or in addition to the above-described embodiment: the roller, round bar, blade material, brush member may be pressed by jetting air, other gas, or the like, and the pressing member may be made of a deformable member such as rubber, resin, or sponge, or may be made of a non-deformable member such as metal, glass, or the like, and when the peeling member or peeling unit such as a peeling plate or peeling roller is used to peel the object, the above-described exemplary method may be used instead of or in combination with the above-described method: the member to be peeled off may be formed of a deformable member such as rubber or resin, or may be formed of a non-deformable member, and in the case of supporting (holding) the supported member (the held member) by a supporting (holding) means, a supporting (holding) member, or the like, a structure in which the supported member is supported (held) by a holding means such as a mechanical chuck or a chuck cylinder, coulomb force, an adhesive (an adhesive sheet, an adhesive tape), magnetic force, bernoulli adsorption, suction adsorption, a driving device, or the like may be employed instead of or in combination with the above-described exemplary manner, in the case of cutting the cut member by a cutting means, a cutting member, or the like, or forming a starting point or a cutting line on the cut member, or the like: the cutting is performed by a cutter, a laser cutter, an ion beam, fire, heat energy, water pressure, a heating wire, a jet gas, a liquid, or the like, or by moving an object to be cut by a device constituted by combining an appropriate driving means, and in the case of using the biasing means, the cutting may be constituted by a spring, rubber, resin, a driving means, or the like.

Claims (6)

1. A sheet sticking apparatus is characterized by comprising:
a supply unit that supplies the adhesive sheet in a predetermined supply direction;
a pressing unit that presses the adhesive sheet supplied by the supply unit so that at least one of one end side and the other end side of the adhesive sheet in the supply direction forms an extension region extending from an outer edge end surface of an adherend;
a moving unit that relatively moves the pressing unit and the adherend, and attaches the adhesive sheet to the outer edge end surface; and
an extension region attaching unit that bends and attaches the extension region in a direction of other surface adjacent to the outer edge end surface,
the sheet sticking apparatus further includes a tip sticking unit located between the pressing unit and the extension area sticking unit, and is configured to bend and stick only the extension area of the tip in the feeding direction of the adhesive sheet in the other surface direction before sticking by the extension area sticking unit.
2. The sheet sticking apparatus according to claim 1, wherein,
the adhesive sheet is provided with a bending start part forming unit which forms a bending start part on the adhesive sheet, wherein the bending start part is the bending start part of the adhesive sheet.
3. The sheet sticking apparatus according to claim 1 or 2, wherein,
the adhesive sheet is deformed by a predetermined energy,
the sheet sticking apparatus includes an energy applying unit that applies the predetermined energy to the adhesive sheet.
4. The sheet sticking apparatus according to claim 1 or 2, wherein,
the adhesive sheet is provided to be elastically deformable,
the sheet sticking apparatus includes a tension applying unit that applies tension in the feeding direction to the adhesive sheet located between the feeding unit and the pressing unit, thereby bending the protruding region in the other surface direction.
5. The sheet sticking apparatus according to claim 4, wherein,
the adhesive sheet is deformed by a predetermined energy,
the sheet sticking apparatus includes an energy applying unit that applies the predetermined energy to the adhesive sheet.
6. A sheet sticking method, characterized by comprising:
a supply step of supplying the adhesive sheet in a predetermined supply direction;
a pressing step of pressing the adhesive sheet supplied in the supplying step against the outer edge end surface of the adherend by a pressing means so that at least one of one end side and the other end side of the adhesive sheet in the supplying direction forms an extension region extending from the outer edge end surface;
a moving step of relatively moving the pressing means and the adherend, and adhering the adhesive sheet to the outer edge end surface; and
an extension region attaching step of bending and attaching the extension region to other surface direction adjacent to the outer edge end surface,
and a tip attaching step of bending and attaching only the projecting region of the tip in the feeding direction of the adhesive sheet in the other surface direction before attaching by the projecting region attaching step, between the pressing step and the projecting region attaching step.
CN202211627672.6A 2022-03-23 2022-12-16 Sheet bonding apparatus and sheet bonding method Pending CN116805585A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022047196A JP2023141063A (en) 2022-03-23 2022-03-23 Sheet pasting device and sheet pasting method
JP2022-047196 2022-03-23

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Publication Number Publication Date
CN116805585A true CN116805585A (en) 2023-09-26

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CN202211627672.6A Pending CN116805585A (en) 2022-03-23 2022-12-16 Sheet bonding apparatus and sheet bonding method

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JP (1) JP2023141063A (en)
CN (1) CN116805585A (en)
DE (1) DE102023101094A1 (en)
TW (1) TW202339050A (en)

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Publication number Priority date Publication date Assignee Title
JP2022030877A (en) 2020-08-07 2022-02-18 株式会社荏原製作所 Tape pasting system, tape pasting method, tape peeling system, and tape peeling method

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