JP2024006763A - Sheet attachment device and sheet attachment method - Google Patents
Sheet attachment device and sheet attachment method Download PDFInfo
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- JP2024006763A JP2024006763A JP2022107952A JP2022107952A JP2024006763A JP 2024006763 A JP2024006763 A JP 2024006763A JP 2022107952 A JP2022107952 A JP 2022107952A JP 2022107952 A JP2022107952 A JP 2022107952A JP 2024006763 A JP2024006763 A JP 2024006763A
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- adherend
- adhesive
- adhesive sheet
- pasting
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- 238000000034 method Methods 0.000 title claims abstract description 16
- 239000000853 adhesive Substances 0.000 claims abstract description 147
- 230000001070 adhesive effect Effects 0.000 claims abstract description 133
- 238000005452 bending Methods 0.000 claims abstract description 5
- 238000011282 treatment Methods 0.000 claims description 46
- 239000000463 material Substances 0.000 claims description 41
- 238000010438 heat treatment Methods 0.000 claims description 11
- 238000003825 pressing Methods 0.000 description 31
- 239000004744 fabric Substances 0.000 description 12
- 239000010410 layer Substances 0.000 description 10
- 238000005520 cutting process Methods 0.000 description 8
- 230000002093 peripheral effect Effects 0.000 description 8
- 239000011347 resin Substances 0.000 description 8
- 229920005989 resin Polymers 0.000 description 8
- 239000012790 adhesive layer Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 230000001464 adherent effect Effects 0.000 description 3
- 230000006837 decompression Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000032258 transport Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000007664 blowing Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- -1 optical disks Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C63/00—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor
- B29C63/0026—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor an edge face with strip material, e.g. a panel edge
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C63/00—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor
- B29C63/02—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor using sheet or web-like material
- B29C63/04—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor using sheet or web-like material by folding, winding, bending or the like
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
- Labeling Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
本発明は、シート貼付装置およびシート貼付方法に関する。 The present invention relates to a sheet pasting device and a sheet pasting method.
接着シートを被着体に貼付するシート貼付装置が知られている（例えば、特許文献１参照）。 BACKGROUND ART A sheet pasting device for pasting an adhesive sheet onto an adherend is known (for example, see Patent Document 1).
特許文献１に記載されたテープ貼り付けシステム１（シート貼付装置）では、保護テープ２７（接着シート）を貼付するウェハＷ（被着体）のシート貼付領域に当該接着シートが接着し難い難接着処理が施されていると、折り曲げて貼付された接着シートが自身の弾性復元力によって当該シート貼付領域から剥がれてしまうというという不都合を発生する。 In the tape pasting system 1 (sheet pasting device) described in Patent Document 1, the protective tape 27 (adhesive sheet) is difficult to adhere to the sheet pasting area of the wafer W (adherend) to which the adhesive sheet is difficult to adhere. If this treatment is applied, the adhesive sheet that has been bent and pasted will be peeled off from the sheet pasting area due to its own elastic restoring force.
本発明の目的は、接着シートを貼付する被着体のシート貼付領域に難接着処理が施されていたとしても、折り曲げて貼付した接着シートが当該シート貼付領域から剥がれないようにすることができるシート貼付装置およびシート貼付方法を提供することにある。 An object of the present invention is to prevent an adhesive sheet that has been bent and pasted from peeling off from the sheet pasting area even if the sheet pasting area of the adherend to which the adhesive sheet is pasted is subjected to a difficult-to-adhesive treatment. An object of the present invention is to provide a sheet pasting device and a sheet pasting method.
本発明は、請求項に記載した構成を採用した。 The present invention employs the configuration described in the claims.
本発明によれば、接着シートが貼付される被着体のシート貼付領域に施されている難接着処理を除去するので、接着シートを貼付する被着体のシート貼付領域に難接着処理が施されていたとしても、折り曲げて貼付した接着シートが当該シート貼付領域から剥がれないようにすることができる。 According to the present invention, since the difficult-to-adhesive treatment applied to the sheet pasting region of the adherend to which the adhesive sheet is pasted is removed, the hard-to-adhesive treatment is applied to the sheet pasting region of the adherend to which the adhesive sheet is pasted. Even if the adhesive sheet is bent and pasted, it can be prevented from peeling off from the sheet pasting area.
以下、本発明の一実施形態を図面に基づいて説明する。
なお、本実施形態におけるＸ軸、Ｙ軸、Ｚ軸は、それぞれが直交する関係にあり、Ｘ軸およびＹ軸は、所定平面内の軸とし、Ｚ軸は、前記所定平面に直交する軸とする。さらに、本実施形態では、図１（Ａ）に示すＹ軸と平行な矢印ＤＲ方向から観た場合を基準とし、図を指定することなく方向を示した場合、「上」がＺ軸の矢印方向で「下」がその逆方向、「左」がＸ軸の矢印方向で「右」がその逆方向、「前」がＹ軸と平行な図１中手前方向で「後」がその逆方向とする。なお、図２（Ｃ）は、図１（Ａ）のＡＡ矢視図、図２（Ｄ）は、図１（Ａ）のＢＢ矢視図。
Hereinafter, one embodiment of the present invention will be described based on the drawings.
Note that the X-axis, Y-axis, and Z-axis in this embodiment are orthogonal to each other, and the X-axis and Y-axis are axes within a predetermined plane, and the Z-axis is an axis perpendicular to the predetermined plane. do. Furthermore, in this embodiment, when viewed from the arrow DR direction parallel to the Y-axis shown in FIG. In the direction, "down" is the opposite direction, "left" is the direction of the arrow on the X axis, "right" is the opposite direction, "front" is parallel to the Y axis, and "back" is the opposite direction. shall be. Note that FIG. 2(C) is a view taken in the direction of the AA arrow in FIG. 1(A), and FIG. 2(D) is a view taken in the direction of the BB arrow in FIG. 1(A).
本発明のシート貼付装置ＥＡは、接着シートＡＳを所定の供給方向ＳＤに沿って供給する供給工程を実施する供給手段１０と、供給方向ＳＤに沿って供給された接着シートＡＳの当該供給方向ＳＤに沿う一端ＡＳ１側（図２（Ｂ）参照）および他端ＡＳ２側の両方に、被着体ＷＫの所定の一面としての外周面ＷＫ３からはみ出したはみ出し領域ＡＳＨが形成されるように当該接着シートＡＳを外周面ＷＫ３に貼付し、はみ出し領域ＡＳＨを別の面としての一方の面ＷＫ１および他方の面ＷＫ２方向に折り曲げて貼付する貼付工程を実施する貼付手段２０と、接着シートＡＳが貼付される被着体ＷＫのシート貼付領域ＷＫＡに施されている難接着処理としてのマット処理ＭＴ（各図にジグザグ線で表示）を除去する難接着処理除去工程を実施する難接着処理除去手段３０とを備え、被着体ＷＫとシート貼付装置ＥＡとを相対移動させる移動手段４０の近傍に配置されている。
なお、本実施形態における被着体ＷＫには、接着シートＡＳが接着し難いマット処理ＭＴが施されている。具体的には、本実施形態の被着体ＷＫは、被着体本体ＷＫＭと当該被着体本体ＷＫＭに貼付されたシート材ＷＫＳとによって構成され、シート材ＷＫＳにマット処理ＭＴが施されている。
また、本実施形態の被着体ＷＫは、被着体中心ＷＫＣを中心とする円形形状のものが採用されている。
The sheet pasting device EA of the present invention includes a supply means 10 that performs a supply step of supplying an adhesive sheet AS along a predetermined supply direction SD, and a supply direction SD of the adhesive sheet AS supplied along the supply direction SD. The adhesive sheet is arranged so that a protruding area ASH protruding from the outer circumferential surface WK3 as a predetermined surface of the adherend WK is formed on both one end AS1 side (see FIG. 2(B)) and the other end AS2 side along the The adhesive sheet AS is attached to an attaching means 20 that performs an attaching step of attaching AS to the outer circumferential surface WK3 and bending and attaching the protruding area ASH in the direction of one surface WK1 and the other surface WK2 as another surface. A difficult-to-adhesion treatment removing means 30 that performs a difficult-to-adhesion treatment removal step for removing the matte treatment MT (indicated by a zigzag line in each figure) as a difficult-to-adhesion treatment applied to the sheet pasting area WKA of the adherend WK. It is arranged near a moving means 40 that relatively moves the adherend WK and the sheet pasting device EA.
Note that the adherend WK in this embodiment is subjected to a matte treatment MT that makes it difficult for the adhesive sheet AS to adhere thereto. Specifically, the adherend WK of this embodiment is composed of an adherend body WKM and a sheet material WKS attached to the adherend body WKM, and the sheet material WKS is subjected to matte treatment MT. There is.
Further, the adherend WK of this embodiment has a circular shape centered at the adherend center WKC.
供給手段１０は、当該供給手段１０を構成する各部材を直接的または間接的に支持する支持部材１１と、接着シートＡＳが帯状の剥離シートＲＬに仮着された原反ＲＳを支持する支持ローラ１２と、原反ＲＳを案内するガイドローラ１３と、剥離縁１４Ａで剥離シートＲＬを折り返し、当該剥離シートＲＬから接着シートＡＳを剥離する剥離手段としての剥離板１４と、駆動機器としての回動モータ１５Ａの図示しない出力軸に支持され、ピンチローラ１５Ｂとで剥離シートＲＬを挟み込む駆動ローラ１５と、図示しない駆動機器の出力軸に支持され、シート貼付装置ＥＡの自動運転が行われている間、ピンチローラ１５Ｂとの間に存在する剥離シートＲＬに常に所定の張力を付与し、当該剥離シートＲＬを回収する回収手段としての回収ローラ１６と、被着体ＷＫに貼付される接着シートＡＳに張力を付与する張力付与手段１７とを備えている。
張力付与手段１７は、トルク制御が可能な駆動機器としての回動モータ１７Ａと、その図示しない出力軸に支持され、ピンチローラ１７Ｂとで原反ＲＳを挟み込む駆動ローラ１７Ｃとを備えている。
The supply means 10 includes a support member 11 that directly or indirectly supports each member constituting the supply means 10, and a support roller that supports the raw fabric RS on which the adhesive sheet AS is temporarily attached to the strip-shaped release sheet RL. 12, a guide roller 13 for guiding the raw fabric RS, a peeling plate 14 as a peeling means for folding back the release sheet RL at the peeling edge 14A and peeling the adhesive sheet AS from the release sheet RL, and a rotating drive device. The drive roller 15 is supported by the output shaft (not shown) of the motor 15A and pinches the release sheet RL with the pinch roller 15B, and the output shaft of a drive device (not shown) is supported while the sheet pasting apparatus EA is automatically operated. , the collection roller 16 as a collection means that constantly applies a predetermined tension to the release sheet RL existing between the pinch roller 15B and collects the release sheet RL, and the adhesive sheet AS attached to the adherend WK. A tension applying means 17 for applying tension is provided.
The tension applying means 17 includes a rotation motor 17A as a drive device capable of torque control, and a drive roller 17C supported by an output shaft (not shown) of the rotation motor 17A, which pinches the original fabric RS with a pinch roller 17B.
貼付手段２０は、図示しないブラケットに回転可能に支持された押圧部材としての第１、第２、第３、第４押圧ローラ２１、２２、２３、２４を備えている。
なお、本実施形態では、第１押圧ローラ２１は、図２（Ａ）に示すように、被着体ＷＫの被着体中心ＷＫＣが基準位置ＲＰに配置された際、供給手段１０から供給された接着シートＡＳを当該被着体ＷＫの外周面ＷＫ３に押圧可能な位置に配置されている。また、第２～第４押圧ローラ２２～２４は、図２（Ｃ）～（Ｅ）に示すように、それぞれ上下一対とされ、図２（Ａ）に示すように、被着体ＷＫの被着体中心ＷＫＣが基準位置ＲＰに配置された際、当該被着体ＷＫの外周面ＷＫ３に貼付された接着シートＡＳのはみ出し領域ＡＳＨを、それぞれ一方の面ＷＫ１方向および他方の面ＷＫ２方向に折り曲げ可能な位置に配設されている。本実施形態では、第２～第４押圧ローラ２２～２４は、Ｚ軸に対してそれぞれ３０度、６０度、９０度基準位置ＲＰ方向に傾斜した回転軸を中心に回転するようになっている。
The pasting means 20 includes first, second, third, and fourth pressing rollers 21, 22, 23, and 24 as pressing members rotatably supported by a bracket (not shown).
In addition, in this embodiment, the first pressing roller 21 is supplied from the supply means 10 when the adherend center WKC of the adherend WK is placed at the reference position RP, as shown in FIG. 2(A). The adhesive sheet AS is placed at a position where it can be pressed against the outer circumferential surface WK3 of the adherend WK. Further, the second to fourth pressing rollers 22 to 24 are arranged as a pair of upper and lower rollers, respectively, as shown in FIGS. 2(C) to 2(E), and as shown in FIG. When the center WKC of the adherend is placed at the reference position RP, the protruding area ASH of the adhesive sheet AS attached to the outer peripheral surface WK3 of the adherend WK is bent in the direction of one surface WK1 and the direction of the other surface WK2, respectively. placed in a possible location. In this embodiment, the second to fourth pressing rollers 22 to 24 rotate around rotational axes that are inclined in the direction of the reference position RP by 30 degrees, 60 degrees, and 90 degrees with respect to the Z axis, respectively. .
難接着処理除去手段３０は、加熱によってマット処理ＭＴを除去する加熱手段としての熱風送風機３１を備えている。
熱風送風機３１は、コイルヒータやヒートパイプの加熱側等の加熱機器３１Ａで加熱された熱風ＨＡを排気口３１Ｂから噴き出す構成となっている。
The difficult-to-adhesion treatment removing means 30 includes a hot air blower 31 as a heating means for removing the matte treatment MT by heating.
The hot air blower 31 is configured to blow out hot air HA heated by a heating device 31A such as a coil heater or a heating side of a heat pipe from an exhaust port 31B.
移動手段４０は、駆動機器としてのリニアモータ４１と、そのスライダ４１Ａに支持された駆動機器としての回動モータ４２と、その出力軸４２Ａに支持され、減圧ポンプや真空エジェクタ等の図示しない減圧手段（保持手段）によって吸着保持が可能な支持面４３Ａを有する支持テーブル４３とを備えている。支持テーブル４３は、回動モータ４２によってテーブル中心４３Ｃを中心に回転する構成となっている。 The moving means 40 includes a linear motor 41 as a driving device, a rotary motor 42 as a driving device supported by a slider 41A thereof, and a decompression device (not shown) such as a decompression pump or a vacuum ejector supported by an output shaft 42A thereof. The support table 43 has a support surface 43A that can be held by suction (holding means). The support table 43 is configured to rotate around a table center 43C by a rotation motor 42.
以上のシート貼付装置ＥＡの動作を説明する。
先ず、図１（Ａ）中実線で示す初期位置に各部材が配置されたシート貼付装置ＥＡに対し、当該シート貼付装置ＥＡの使用者（以下、単に「使用者」という）が同図のように原反ＲＳをセットした後、操作パネルやパーソナルコンピュータ等の図示しない操作手段を介して自動運転開始の信号を入力する。すると、供給手段１０が回動モータ１５Ａ、１７Ａを駆動し、原反ＲＳを繰り出して図１（Ａ）に示すように、先頭の接着シートＡＳの供給方向先端部ＡＳＦが剥離板１４の剥離縁１４Ａで所定長さ剥離されると、回動モータ１５Ａ、１７Ａの駆動を停止する。
The operation of the above sheet pasting device EA will be explained.
First, a user of the sheet applicator EA (hereinafter simply referred to as "user") sets the sheet applicator EA in which each member is placed at the initial position shown by the solid line in FIG. After setting the original fabric RS, a signal to start automatic operation is inputted via an operation means (not shown) such as an operation panel or a personal computer. Then, the supply means 10 drives the rotary motors 15A and 17A to feed out the original fabric RS, and as shown in FIG. When a predetermined length is peeled off at 14A, the rotation motors 15A and 17A are stopped.
次いで、使用者または多関節ロボットやベルトコンベア等の図示しない搬送手段が、図１（Ａ）に示すように、被着体中心ＷＫＣがテーブル中心４３Ｃと重なるように、シート材ＷＫＳ側を下方にして被着体ＷＫを支持面４３Ａ上に載置すると、移動手段４０が図示しない減圧手段を駆動し、当該支持面４３Ａでの吸着保持を開始する。その後、移動手段４０が回動モータ４２を駆動し、上方から見下ろした上面視で反時計回転方向ＲＤに被着体ＷＫを回転させるとともに、難接着処理除去手段３０が熱風送風機３１を駆動し、図１（Ｄ）に示すように、排気口３１Ｂから熱風ＨＡを噴き出す。熱風ＨＡが吹き付けられると、シート材ＷＫＳの表面が融化され、図１（Ｃ）に示すように、シート貼付領域ＷＫＡに及んでいたマット処理ＭＴを構成する凹凸が、図１（Ｄ）に示すように均されて平坦化されて除去されていく。 Next, as shown in FIG. 1(A), the user or a transport means (not shown) such as an articulated robot or a belt conveyor moves the sheet material WKS side downward so that the center WKC of the adherend overlaps the center 43C of the table. When the adherend WK is placed on the support surface 43A, the moving means 40 drives a pressure reducing means (not shown) to start suction and holding on the support surface 43A. After that, the moving means 40 drives the rotation motor 42 to rotate the adherend WK in the counterclockwise direction RD when viewed from above, and the difficult-to-adhesion treatment removing means 30 drives the hot air blower 31, As shown in FIG. 1(D), hot air HA is blown out from the exhaust port 31B. When the hot air HA is blown, the surface of the sheet material WKS is melted, and as shown in FIG. 1(C), the unevenness constituting the matte treatment MT that extends to the sheet pasting area WKA is changed as shown in FIG. 1(D). It is leveled, flattened, and removed.
次に、シート貼付領域ＷＫＡ全体からマット処理ＭＴが除去されると、難接着処理除去手段３０および移動手段４０が熱風送風機３１および回動モータ４２の駆動を停止する。そして、移動手段４０がリニアモータ４１を駆動し、支持テーブル４３を左方へ移動させて図２（Ａ）に示すように、テーブル中心４３Ｃ（被着体中心ＷＫＣ）が基準位置ＲＰと一致すると、リニアモータ４１の駆動を停止する。次いで、供給手段１０および移動手段４０が回動モータ１５Ａ、１７Ａ、４２を駆動し、上面視で反時計回転方向ＲＤに被着体ＷＫを回転させつつ接着シートＡＳを供給する。これにより、接着シートＡＳは、押圧ローラ２１によって押圧され、図２（Ａ）、（Ｂ）に示すように、はみ出し領域ＡＳＨが形成された状態で外周面ＷＫ３に貼付された後、図２（Ｃ）、（Ｄ）、（Ｅ）に示すように、第２～第４押圧ローラ２２～２４によってはみ出し領域ＡＳＨが段階的に折り曲げられ、当該はみ出し領域ＡＳＨが被着体ＷＫの一方の面ＷＫ１側および他方の面ＷＫ２側に貼付される。 Next, when the matte treatment MT is removed from the entire sheet pasting area WKA, the difficult-to-adhesion treatment removal means 30 and the moving means 40 stop driving the hot air blower 31 and the rotation motor 42. Then, the moving means 40 drives the linear motor 41 to move the support table 43 to the left, and as shown in FIG. 2(A), when the table center 43C (adherent center WKC) coincides with the reference position RP. , the driving of the linear motor 41 is stopped. Next, the supplying means 10 and the moving means 40 drive the rotation motors 15A, 17A, and 42 to supply the adhesive sheet AS while rotating the adherend WK in the counterclockwise direction RD when viewed from above. As a result, the adhesive sheet AS is pressed by the pressure roller 21 and is attached to the outer circumferential surface WK3 with the protruding area ASH formed as shown in FIGS. 2(A) and 2(B). As shown in C), (D), and (E), the protruding area ASH is folded in stages by the second to fourth pressing rollers 22 to 24, and the protruding area ASH is folded into one surface WK1 of the adherend WK. and the other surface WK2 side.
その後、先頭の接着シートＡＳに続く次の接着シートＡＳの供給方向先端部ＡＳＦが剥離板１４の剥離縁１４Ａで所定長さ剥離されると、供給手段１０が回動モータ１５Ａ、１７Ａの駆動を停止し、原反ＲＳの繰り出しを停止する。次に、先頭の接着シートＡＳの供給方向後端部ＡＳＲのはみ出し領域ＡＳＨが、第４押圧ローラ２４によって被着体ＷＫの一方の面ＷＫ１側および他方の面ＷＫ２側に貼付され、図２（Ｅ）に示すように、一体物ＵＰが形成されると、移動手段４０が回動モータ４２の駆動を停止する。 Thereafter, when the leading end ASF in the feeding direction of the next adhesive sheet AS following the first adhesive sheet AS is peeled off for a predetermined length by the peeling edge 14A of the peeling plate 14, the feeding means 10 starts driving the rotation motors 15A and 17A. and stops feeding out the original fabric RS. Next, the protruding area ASH of the rear end portion ASR in the feeding direction of the leading adhesive sheet AS is pasted to one surface WK1 side and the other surface WK2 side of the adherend WK by the fourth pressing roller 24, and as shown in FIG. As shown in E), when the integral object UP is formed, the moving means 40 stops driving the rotation motor 42.
そして、移動手段４０がリニアモータ４１を駆動し、支持テーブル４３を初期位置に復帰させた後、図示しない減圧手段の駆動を停止し、支持面４３Ａでの吸着保持を解除する。次いで、使用者または図示しない搬送手段が一体物ＵＰを支持面４３Ａ上から取り去り、当該一体物ＵＰをめっき工程やドライエッチング工程等の次工程に搬送し、以降上記同様の動作が繰り返される。 After the moving means 40 drives the linear motor 41 to return the support table 43 to the initial position, the drive of the pressure reducing means (not shown) is stopped, and the suction and holding on the support surface 43A is released. Next, the user or a transport means (not shown) removes the integral object UP from the support surface 43A, and transports the integral object UP to the next process such as a plating process or a dry etching process, and the same operation as described above is repeated thereafter.
以上のような実施形態によれば、接着シートＡＳが貼付される被着体ＷＫのシート貼付領域ＷＫＡに施されているマット処理ＭＴを除去するので、接着シートＡＳを貼付する被着体ＷＫのシート貼付領域ＷＫＡにマット処理ＭＴが施されていたとしても、折り曲げて貼付した接着シートＡＳが当該シート貼付領域ＷＫＡから剥がれないようにすることができる。 According to the embodiment described above, since the matte treatment MT applied to the sheet pasting area WKA of the adherend WK to which the adhesive sheet AS is pasted is removed, the matte treatment MT applied to the sheet pasting area WKA of the adherend WK to which the adhesive sheet AS is pasted is removed. Even if the sheet pasting area WKA is subjected to matte treatment MT, the adhesive sheet AS bent and pasted can be prevented from peeling off from the sheet pasting area WKA.
本発明における手段および工程は、それら手段および工程について説明した動作、機能または工程を果たすことができる限りなんら限定されることはなく、まして、前記実施形態で示した単なる一実施形態の構成物や工程に全く限定されることはない。例えば、貼付手段は、所定の供給方向に沿って供給された接着シートの当該供給方向に沿う一端側および他端側のうち少なくとも一方に、被着体の所定の一面からはみ出したはみ出し領域が形成されるように当該接着シートを一面に貼付し、はみ出し領域を別の面方向に折り曲げて貼付可能なものであればどんなものでもよく、出願当初の技術常識に照らし合わせてその技術範囲内のものであればなんら限定されることはない（その他の手段および工程も同じ）。 The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described with respect to the means and steps; It is not limited to the process at all. For example, the pasting means may include forming a protruding area protruding from a predetermined surface of the adherend on at least one of one end side and the other end side along the supply direction of the adhesive sheet supplied along the predetermined supply direction. Any adhesive sheet may be used as long as it can be applied by pasting the adhesive sheet on one surface and bending the protruding area toward another surface, and is within the technical scope of the application in light of the common general knowledge at the time of filing. If so, there is no limitation at all (the same applies to other means and steps).
供給手段１０は、帯状の剥離シートＲＬに仮着された帯状の接着シート基材に閉ループ状または短寸幅方向全体の切込が形成されることで、その切込で仕切られた所定の領域が接着シートＡＳとされた原反ＲＳから当該接着シートＡＳを剥離して供給してもよいし、帯状の剥離シートＲＬに帯状の接着シート基材が仮着された帯状接着シート原反を採用し、当該帯状接着シート原反を繰り出す途中で、接着シート基材に閉ループ状または短寸幅方向全体の切込を切断手段としての切断刃で形成し、その切込で仕切られた所定の領域が接着シートＡＳとされた原反ＲＳから当該接着シートＡＳを剥離して供給してもよいし、帯状の剥離シートＲＬに帯状の接着シートＡＳが仮着された原反ＲＳから当該帯状の接着シートＡＳを剥離して供給してもよいし、巻回されることなく、例えばファンフォールド折りにされた原反ＲＳから接着シートＡＳを剥離して供給してもよいし、巻回することなく、例えばファンフォールド折りにしたり、シュレッダ等で切り刻んだり、無造作に集積したりして剥離シートＲＬを回収する回収手段を採用してもよいし、回収手段を採用しなくてもよいし、剥離シートＲＬに仮着されていない接着シートＡＳを繰り出して供給してもよいし、被着体ＷＫに貼付された接着シートＡＳを所定の長さに切断する切断手段を備えていてもよいし、弾性変形が可能な接着シートＡＳが採用された場合、当該接着シートＡＳを被着体ＷＫに貼付する際、回動モータ１７Ａを駆動し、駆動ローラ１７Ｃを介して接着シートＡＳから加わるトルクを検知して、当該トルクが所定の値となるようにしながら接着シートＡＳを供給することで、被着体ＷＫに貼付される接着シートＡＳに張力を付与してもよいし、本発明のシート貼付装置ＥＡに備わっていてもよいし、備わっていなくてもよく、本発明のシート貼付装置ＥＡに備わっていない場合、他の装置や使用者が所定の供給方向に沿って接着シートＡＳを供給すればよい。
張力付与手段１７は、原反ＲＳや接着シートＡＳを摺動可能に把持し、この把持力を調整して被着体ＷＫに貼付される接着シートＡＳに張力を付与したり、トルク制御ができない回動モータ１７Ａが採用されたりしてもよいし、接着シートＡＳの特性、特質、性質、材質、組成、構成、形状、寸法および重量や、雰囲気の条件、その他の要因等の諸条件を考慮して接着シートＡＳに付与する所定の張力を使用者が任意に決定することができるし、本発明のシート貼付装置ＥＡに備わっていてもよいし、備わっていなくてもよい。
なお、上記の実施形態では、張力付与手段１７を供給手段１０の構成物として説明したが、当該張力付与手段１７は、供給手段１０の構成物ではなく独立した構成されてもよく、例えば、剥離板１４と押圧ローラ２１との間に位置し、被着体ＷＫに貼付される接着シートＡＳに張力を付与してもよい。
The supply means 10 is provided by forming a closed loop cut or a notch in the entire width direction of the short dimension in the band-shaped adhesive sheet base material temporarily attached to the band-shaped release sheet RL, thereby supplying a predetermined area partitioned by the cut. The adhesive sheet AS may be peeled off and supplied from the original fabric RS which has been made into the adhesive sheet AS, or a band-shaped adhesive sheet original fabric in which a band-shaped adhesive sheet base material is temporarily attached to a band-shaped release sheet RL is used. Then, in the middle of unwinding the belt-shaped adhesive sheet raw material, a cut in the adhesive sheet base material in a closed loop shape or across the entire short width direction is formed with a cutting blade serving as a cutting means, and a predetermined area partitioned by the cut is formed. The adhesive sheet AS may be peeled off and supplied from the original fabric RS on which the adhesive sheet AS is made, or the adhesive sheet AS may be peeled off from the original fabric RS on which the adhesive sheet AS is temporarily attached to the release sheet RL. The sheet AS may be peeled off and supplied, or the adhesive sheet AS may be peeled off and fed from the fan-folded original fabric RS without being wound, for example, or without being wound. For example, a collection means for collecting the release sheet RL by fan-folding it, cutting it into pieces with a shredder, etc., or randomly accumulating it, or it is not necessary to adopt a collection means, or the release sheet RL The adhesive sheet AS that is not temporarily attached to the RL may be fed out and supplied, or a cutting means may be provided to cut the adhesive sheet AS attached to the adherend WK into a predetermined length, or an elastic When a deformable adhesive sheet AS is adopted, when attaching the adhesive sheet AS to the adherend WK, the rotation motor 17A is driven and the torque applied from the adhesive sheet AS is detected via the drive roller 17C. Tension may be applied to the adhesive sheet AS to be applied to the adherend WK by supplying the adhesive sheet AS while maintaining the torque at a predetermined value. If the sheet pasting apparatus EA of the present invention is not equipped with the adhesive sheet AS, the adhesive sheet AS may or may not be provided with the adhesive sheet AS. .
The tension applying means 17 slidably grips the original fabric RS and the adhesive sheet AS, adjusts this gripping force to apply tension to the adhesive sheet AS attached to the adherend WK, and cannot perform torque control. The rotation motor 17A may be adopted, and various conditions such as the characteristics, properties, properties, material, composition, configuration, shape, dimensions, and weight of the adhesive sheet AS, atmospheric conditions, and other factors are taken into consideration. The user can arbitrarily determine the predetermined tension to be applied to the adhesive sheet AS, and the sheet pasting device EA of the present invention may or may not be provided with the tension.
In the above embodiment, the tension applying means 17 has been described as a component of the supply means 10, but the tension applying means 17 may be configured independently instead of being a component of the supply means 10. Tension may be applied to the adhesive sheet AS located between the plate 14 and the pressing roller 21 and attached to the adherend WK.
貼付手段２０は、所定の供給方向ＳＤに沿って供給された接着シートＡＳの当該供給方向ＳＤに沿う一端ＡＳ１側のみに、被着体ＷＫの外周面ＷＫ３からはみ出したはみ出し領域ＡＳＨが形成されるように当該接着シートＡＳを外周面ＷＫ３に貼付し、はみ出し領域ＡＳＨを別の面としての一方の面ＷＫ１方向に折り曲げて貼付してもよいし、所定の供給方向ＳＤに沿って供給された接着シートＡＳの当該供給方向ＳＤに沿う他端ＡＳ２側のみに、被着体ＷＫの外周面ＷＫ３からはみ出したはみ出し領域ＡＳＨが形成されるように当該接着シートＡＳを外周面ＷＫ３に貼付し、はみ出し領域ＡＳＨを別の面としての他方の面ＷＫ２方向に折り曲げて貼付してもよいし、被着体ＷＫに接着シートＡＳを貼付する際、当該被着体ＷＫを支持テーブル４３とで挟み込む押え手段を備えていてもよいし、移動手段４０による被着体ＷＫとの相対移動ではなく、例えば、他の装置や図示しない駆動機器等による被着体ＷＫとの相対移動によって、被着体ＷＫに接着シートＡＳを貼付してもよいし、第２～第４押圧ローラ２２～２４が上下一対でなく、被着体ＷＫの一方の面ＷＫ１側のみまたは他方の面ＷＫ２側のみに設けられていてもよいし、第２～第４押圧ローラ２２～２４が、Ｚ軸に対してそれぞれ１３度、４７度、９１度といった角度で基準位置ＲＰ方向に傾斜した回転軸を中心に回転するようになっていてもよいし、前記実施形態では、第１～第４押圧ローラ２１～２４の４体の押圧部材を採用し、接着シートＡＳを４段階で被着体ＷＫに貼付したが、５体以上の押圧部材を採用し、接着シートＡＳを５段階以上で被着体ＷＫに貼付したり、３体以下の押圧部材を採用し、接着シートＡＳを３段階以下で被着体ＷＫに貼付したりしてもよいし、押圧部材として第１～第４押圧ローラ２１～２４に代えてまたは併用して、ガイド板、回行ベルトまたはエアの吹付け等を採用し、接着シートＡＳを被着体ＷＫに貼付してもよいし、接着シートＡＳの供給方向先端部ＡＳＦと供給方向後端部ＡＳＲとが重なり合うようにして当該接着シートＡＳを被着体ＷＫに貼付したり、接着シートＡＳの供給方向先端部ＡＳＦ側の先端縁と、供給方向後端部ＡＳＲの後端縁とが接触するように突き合わせ、当該接着シートＡＳを被着体ＷＫに貼付したり、接着シートＡＳの先端縁と後端縁との間に隙間ができるように突き合わせ、当該接着シートＡＳを被着体ＷＫに貼付したりしてもよい。 In the pasting means 20, a protruding area ASH protruding from the outer circumferential surface WK3 of the adherend WK is formed only on one end AS1 side along the supply direction SD of the adhesive sheet AS supplied along the predetermined supply direction SD. Alternatively, the adhesive sheet AS may be attached to the outer circumferential surface WK3, and the protruding area ASH may be bent in the direction of one surface WK1 as another surface, or the adhesive sheet AS may be attached along the predetermined supply direction SD. The adhesive sheet AS is attached to the outer circumferential surface WK3 so that a protruding area ASH protruding from the outer circumferential surface WK3 of the adherend WK is formed only on the other end AS2 side along the supply direction SD of the sheet AS, and the protruding area is ASH may be bent and attached in the direction of the other surface WK2, and when attaching the adhesive sheet AS to the adherend WK, a presser means for sandwiching the adherend WK between the support table 43 may be used. Alternatively, instead of being moved relative to the adherend WK by the moving means 40, for example, by moving relative to the adherend WK by another device or a drive device (not shown), etc., the adhesive may be attached to the adherend WK. The sheet AS may be attached, or the second to fourth pressing rollers 22 to 24 may be provided not as a pair of upper and lower surfaces but only on one surface WK1 side or only on the other surface WK2 side of the adherend WK. Also, the second to fourth pressing rollers 22 to 24 are configured to rotate around rotating shafts that are inclined in the direction of the reference position RP at angles of 13 degrees, 47 degrees, and 91 degrees, respectively, with respect to the Z axis. In the embodiment described above, four pressing members, the first to fourth pressing rollers 21 to 24, are used and the adhesive sheet AS is attached to the adherend WK in four stages. A pressing member may be used to apply the adhesive sheet AS to the adherend WK in five or more stages, or three or less pressing members may be employed to apply the adhesive sheet AS to the adherend WK in three stages or less. Alternatively, instead of or in combination with the first to fourth pressing rollers 21 to 24, a guide plate, a rotating belt, or air blowing may be used as a pressing member, and the adhesive sheet AS is pressed against the adherend WK. Alternatively, the adhesive sheet AS may be attached to the adherend WK so that the leading end ASF in the feeding direction and the rear end ASR in the feeding direction of the adhesive sheet AS overlap, or the adhesive sheet AS may be stuck to the adherend WK in the feeding direction. The leading edge on the leading edge ASF side and the trailing edge of the trailing end ASR in the supply direction are brought into contact with each other, and the adhesive sheet AS is pasted on the adherend WK, or the leading edge and trailing edge of the adhesive sheet AS are The adhesive sheet AS may be attached to the adherend WK by abutting the adhesive sheet AS so that there is a gap between the edges.
難接着処理除去手段３０は、例えば、バーナーやライタ等の火器で焙ることで、難接着処理を融化させて除去したり、熱した金属板や陶器等の押し付け部材を押し付けることで、難接着処理を加熱加圧して除去したり、研削加工や研磨加工等によって難接着処理を削って除去したり、切断加工やスライス加工等によって難接着処理を切断して除去したり、プレス加工や加圧加工によって難接着処理を押し潰して除去したり、エッチング加工によって難接着処理を腐食させて除去したり、溶剤の付与によって難接着処理を溶かして除去したり、洗剤、吸引等の清掃によって難接着処理を洗浄して除去したり、パテや樹脂等の硬化剤によって難接着処理を埋めて除去したりしてもよく、シート貼付領域ＷＫＡに施された難接着処理を除去できるものであればどのようなものでもよいし、被着体ＷＫの一方の面ＷＫ１におけるシート貼付領域ＷＫＡ、他方の面ＷＫ２におけるシート貼付領域ＷＫＡおよび外周面ＷＫ３におけるシート貼付領域ＷＫＡのうち少なくとも１カ所に施された難接着処理を除去できるものでもよいし、シート貼付領域ＷＫＡに施されている難接着処理を全部除去したり、部分的に除去したりしてもよい。 The difficult-to-adhesive treatment removal means 30 may, for example, melt and remove the difficult-to-adhesive treatment by burning it with a firearm such as a burner or lighter, or remove the difficult-to-adhesive treatment by pressing a pressing member such as a heated metal plate or ceramics. The process can be removed by heating and pressurizing, the difficult-to-adhesive process can be removed by grinding or polishing, the difficult-to-adhere process can be cut and removed by cutting or slicing, or the process can be removed by pressing or pressurizing. The difficult-to-adhesive treatment can be crushed and removed by processing, the difficult-to-adhesive treatment can be corroded and removed by etching, the difficult-to-adhesive treatment can be dissolved and removed by applying a solvent, the difficult-to-adhesive can be removed by cleaning with detergent, suction, etc. The treatment may be removed by cleaning, or the difficult-to-adhesive treatment may be buried and removed using a hardening agent such as putty or resin. It is also possible to have a hardening applied to at least one of the sheet pasting area WKA on one surface WK1 of the adherend WK, the sheet pasting area WKA on the other surface WK2, and the sheet pasting area WKA on the outer circumferential surface WK3. The adhesive treatment may be removed, or the difficult-to-adhesion treatment applied to the sheet pasting area WKA may be completely or partially removed.
移動手段４０は、保持面４３Ａでの吸着保持ができない支持テーブル４３が採用されてもよいし、リニアモータ４１、回動モータ４２および支持テーブル４３に代えてまたは併用して、例えば、他の装置や図示しない駆動機器等によって、被着体ＷＫを第１～第４押圧ローラ２１～２４に対して相対移動させ、接着シートＡＳを被着体ＷＫに貼付してもよいし、本発明のシート貼付装置ＥＡに備わっていてもよいし、備わっていなくてもよい。 The moving means 40 may employ a support table 43 that cannot be held by suction on the holding surface 43A, or may be replaced with or used in combination with the linear motor 41, rotation motor 42, and support table 43, for example, by using other devices. The adhesive sheet AS may be attached to the adherend WK by moving the adherend WK relative to the first to fourth pressing rollers 21 to 24 using a drive device (not shown) or the like, or the sheet of the present invention The pasting device EA may or may not be provided with it.
シート貼付装置ＥＡは、１つまたは複数の被着体ＷＫに１枚の接着シートＡＳを貼付したり、１つまたは複数の被着体ＷＫに複数の接着シートＡＳを貼付したりしてもよいし、被着体ＷＫの一方の面ＷＫ１側、他方の面ＷＫ２側および外周面ＷＫ３側のうち少なくとも１カ所に、金属、硝子、樹脂、他の接着シート等の支持部材を配置したり貼付したりして、接着シートＡＳで当該被着体ＷＫと支持部材とを一体化させてもよいし、被着体ＷＫの一方の面ＷＫ１側、他方の面ＷＫ２側および外周面ＷＫ３側のうち少なくとも１カ所に、支持部材を配置する支持部材配置手段を備えていてもよいし、被着体本体ＷＫＭにシート材ＷＫＳを貼付するシート材貼付手段を備えていてもよい。
シート貼付装置ＥＡは、接着シートＡＳが所定のエネルギーによって変形が可能なものが採用されてもよく、この場合、例えば、図１（Ａ）中二点鎖線で示すように、接着シートＡＳに所定のエネルギーを付与するエネルギー付与手段５０を備えていてもよい。このようなエネルギー付与手段５０は、押圧ローラ２１に対する接着シートＡＳの貼付方向下流側に設けてもよいし、剥離板１４と第１押圧ローラ２１との間に設けてもよい。このような構成とすることで、シート貼付装置ＥＡは、はみ出し領域ＡＳＨが形成されるようにして接着シートＡＳを外周面ＷＫ３に貼付した後、当該はみ出し領域ＡＳＨに所定のエネルギーを付与して変形させ、当該はみ出し領域ＡＳＨが一方の面ＷＫ１方向や他の面ＷＫ２方向に折れ曲がった折れ曲がり姿勢とすることができる。この場合、はみ出し領域ＡＳＨは、折れ曲がり姿勢の状態から第２～第４押圧ローラ２２～２４を介して一方の面ＷＫ１側や他方の面ＷＫ２側に貼付されてもよいし、折れ曲がり姿勢となることで、第２～第４押圧ローラ２２～２４を介さずに一方の面ＷＫ１側や他方の面ＷＫ２側に貼付されてもよい。
なお、所定のエネルギーによって変形が可能な接着シートＡＳとしては、紫外線、赤外線、可視光線、音波、Ｘ線またはガンマ線等の電磁波や、熱湯や熱風等の熱等を所定のエネルギーとして変形するものや、それ以外のエネルギーによって変形するものでもよい。
また、エネルギー付与手段としては、紫外線、赤外線、可視光線、音波、Ｘ線またはガンマ線等の電磁波や、熱湯や熱風等の熱等を付与するものでもよく、接着シートＡＳの特性、特質、性質、材質、組成および構成等を考慮して当該接着シートを変形させることができるものを任意に採用することができる。
所定のエネルギーによって変形が可能な接着シートＡＳは、収縮を伴って変形するものでもよいし、膨張を伴って変形するものでもよいし、収縮も膨張も伴うことなく変形するものでもよい。
The sheet applying device EA may apply one adhesive sheet AS to one or more adherends WK, or apply a plurality of adhesive sheets AS to one or more adherends WK. Then, a supporting member such as metal, glass, resin, or other adhesive sheet is arranged or attached to at least one of one surface WK1 side, the other surface WK2 side, and the outer peripheral surface WK3 side of the adherend WK. The adherend WK and the support member may be integrated with the adhesive sheet AS, or at least one surface WK1 side, the other surface WK2 side, and the outer circumferential surface WK3 side of the adherend WK may be integrated. A supporting member arranging means for arranging the supporting member may be provided at one location, or a sheet material applying means for adhering the sheet material WKS to the adherend main body WKM may be provided.
The sheet pasting device EA may be one in which the adhesive sheet AS can be deformed by a predetermined energy. In this case, for example, as shown by the two-dot chain line in FIG. It may be provided with an energy applying means 50 that applies energy of . Such energy applying means 50 may be provided on the downstream side of the pressure roller 21 in the direction in which the adhesive sheet AS is pasted, or may be provided between the peeling plate 14 and the first pressure roller 21 . With such a configuration, the sheet adhering device EA applies predetermined energy to the protruding area ASH to deform it after adhering the adhesive sheet AS to the outer circumferential surface WK3 so that the protruding area ASH is formed. The protruding region ASH can be bent in the direction of one surface WK1 and the other surface WK2. In this case, the protruding area ASH may be affixed to one surface WK1 side or the other surface WK2 side via the second to fourth pressing rollers 22 to 24 from a bent position, or may be stuck to a bent position. Alternatively, it may be attached to one surface WK1 side or the other surface WK2 side without using the second to fourth pressing rollers 22 to 24.
Note that adhesive sheets AS that can be deformed by a predetermined energy include those that can be deformed by using electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays, or gamma rays, or heat such as hot water or hot air as a predetermined energy. , it may be deformed by other energy.
In addition, the energy imparting means may be one that imparts electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays, or gamma rays, or heat such as hot water or hot air. Any material that can deform the adhesive sheet can be adopted in consideration of the material, composition, structure, etc.
The adhesive sheet AS that can be deformed by a predetermined energy may be one that deforms with contraction, one that deforms with expansion, or one that deforms without contraction or expansion.
被着体ＷＫが被着体本体ＷＫＭと当該被着体本体ＷＫＭに貼付されたシート材ＷＫＳとで構成されたものであった場合、当該被着体ＷＫの一方の面ＷＫ１側、他方の面ＷＫ２側および外周面ＷＫ３側のうち少なくとも１カ所にシート材ＷＫＳが貼付されていてもよく、被着体ＷＫに複数のシート材ＷＫＳが貼付されている場合、それらシート材ＷＫＳは、全部または一部が同種のものでもよいし、全部が異種のものでもよい。
被着体ＷＫが、一方の面ＷＫ１側、他方の面ＷＫ２側および外周面ＷＫ３側のうち少なくとも１カ所にシート材ＷＫＳが貼付されているものであった場合、被着体本体ＷＫＭおよびシート材ＷＫＳのうち、少なくとも一方に難接着処理が施されていてもよい。
被着体ＷＫは、シート材ＷＫＳが貼付されていない被着体本体ＷＫＭのみであってもよく、この場合、被着体ＷＫの一方の面ＷＫ１側、他方の面ＷＫ２側および外周面ＷＫ３側のうち少なくとも１カ所に難接着処理が施されていてもよい。
被着体ＷＫや被着体本体ＷＫＭは、一方の面ＷＫ１側、他方の面ＷＫ２側および外周面ＷＫ３側のうち少なくとも一方に、環状または非環状の凸部ＷＫ４が形成されていてもよい（図１（Ｂ）中付番ＣＣを付した図参照。当図では、被着体ＷＫおよび被着体本体ＷＫＭの他方の面ＷＫ２側に環状または非環状の凸部ＷＫ４が形成されている）。
シート材ＷＫＳは、接着剤、静電気または水分等の接着部材によって被着体本体ＷＫＭに貼付されていてもよく、それら接着部材は、シート材ＷＫＳ自身に積層されていたものでもよいし、シート材ＷＫＳ自身に積層されていなかったものでもよい。
難接着処理は、サンドブラスト加工やサンドペーパ加工等の粗面加工によって形成された粗面処理や、網目加工、ローレット加工、ディンプル加工等の表面加工によって形成された凹凸処理や、オイル付着やパウダー付着等の付着加工によって形成された付着処理等、接着シートが接着し難い処理であればどのような処理でもよく、被着体ＷＫの一方の面ＷＫ１側、他方の面ＷＫ２側および外周面ＷＫ３側のうち少なくとも１カ所に施されていてもよい。
When the adherend WK is composed of an adherend main body WKM and a sheet material WKS attached to the adherend main body WKM, one side of the adherend WK is the WK1 side, and the other side A sheet material WKS may be attached to at least one of the WK2 side and the outer peripheral surface WK3 side, and when a plurality of sheet materials WKS are attached to the adherend WK, all or one of the sheet materials WKS may be attached to the WK2 side and the outer peripheral surface WK3 side. The parts may be of the same type, or all of them may be of different types.
If the adherend WK has a sheet material WKS attached to at least one of one surface WK1 side, the other surface WK2 side, and the outer peripheral surface WK3 side, the adherend body WKM and the sheet material At least one of the WKSs may be subjected to anti-adhesion treatment.
The adherend WK may be only the adherend main body WKM to which the sheet material WKS is not attached, and in this case, one surface WK1 side, the other surface WK2 side, and the outer circumferential surface WK3 side of the adherend WK. A difficult-to-adhesion treatment may be applied to at least one of the locations.
The adherend WK and the adherend main body WKM may have an annular or non-annular convex portion WK4 formed on at least one of one surface WK1 side, the other surface WK2 side, and the outer peripheral surface WK3 side ( (See Figure 1 (B) with number CC in the middle. In this figure, an annular or non-annular convex portion WK4 is formed on the other surface WK2 side of the adherend WK and the adherend main body WKM.) .
The sheet material WKS may be attached to the adherend main body WKM with an adhesive material such as adhesive, static electricity, or moisture, and these adhesive materials may be laminated on the sheet material WKS itself, or It may also be one that is not layered on the WKS itself.
Difficult adhesion treatments include rough surface treatments such as sandblasting and sandpaper processing, uneven surface treatments such as mesh processing, knurling, and dimple processing, as well as oil adhesion and powder adhesion. Any treatment may be used as long as it is difficult for the adhesive sheet to adhere, such as an adhesion treatment formed by an adhesion process. It may be applied to at least one of the locations.
上記の実施形態では、所定の一面を外周面ＷＫ３としたが、当該一面は、一方の面ＷＫ１でもよいし、他方の面ＷＫ２でもよく、例えば、当該一面が一方の面ＷＫ１であった場合、別の面は、外周面ＷＫ３や他方の面ＷＫ２でもよい。
シート貼付装置ＥＡは、例えば、被着体ＷＫの一方の面ＷＫ１の外縁に沿う外縁を備えた形状（例えば円形状や円環形状）とされた接着シートＡＳが採用されてもよく、この場合、例えば、第１押圧ローラ２１で接着シートＡＳを被着体ＷＫの所定の一面としての一方の面ＷＫ１に貼付した後、当該一方の面ＷＫ１に対して傾斜した１または複数の傾斜ローラ等によって、一方の面ＷＫ１からはみ出した接着シートＡＳのはみ出し領域を別の面としての外周面ＷＫ３側や、他方の面ＷＫ２側に折り曲げて貼付してもよい。
また、例えば、被着体ＷＫの一方の面ＷＫ１の外縁に沿う外縁を備えた形状（例えば円形状や円環形状）とされた接着シートＡＳが採用された場合、第1押圧ローラ２１の代わりに、駆動機器としての直動モータの出力軸に支持され、減圧ポンプや真空エジェクタ等の図示しない減圧手段（保持手段）によって吸着保持が可能な保持部材を採用し、当該保持部材で保持した接着シートＡＳを被着体ＷＫの所定の一面としての一方の面ＷＫ１側に貼付した後、当該一方の面ＷＫ１に対して傾斜した１または複数の傾斜等によって、一方の面ＷＫ１からはみ出した接着シートＡＳのはみ出し領域を別の面としての外周面ＷＫ３側や、他方の面ＷＫ２側に折り曲げて貼付してもよい。
In the above embodiment, the predetermined surface is the outer peripheral surface WK3, but the surface may be one surface WK1 or the other surface WK2. For example, if the surface is the surface WK1, The other surface may be the outer peripheral surface WK3 or the other surface WK2.
The sheet pasting device EA may employ, for example, an adhesive sheet AS having a shape (for example, a circular shape or an annular shape) having an outer edge along the outer edge of one surface WK1 of the adherend WK. For example, after the adhesive sheet AS is pasted on one surface WK1 as a predetermined surface of the adherend WK by the first pressing roller 21, it is applied by one or more inclined rollers, etc. that are inclined with respect to the one surface WK1. The protruding area of the adhesive sheet AS that protrudes from one surface WK1 may be bent and attached to the outer circumferential surface WK3 side as another surface or the other surface WK2 side.
Further, for example, if an adhesive sheet AS having an outer edge along the outer edge of one surface WK1 of the adherend WK is adopted (for example, a circular shape or an annular shape), the first pressing roller 21 may be replaced by an adhesive sheet AS. In addition, a holding member that is supported by the output shaft of a direct-acting motor as a driving device and that can be held by suction by a depressurizing means (holding means) not shown, such as a decompression pump or a vacuum ejector, is used, and the adhesive held by the holding member is used. After the sheet AS is attached to one surface WK1 side as a predetermined surface of the adherend WK, the adhesive sheet protrudes from one surface WK1 due to one or more slopes inclined with respect to the one surface WK1. The protruding area of AS may be bent and attached to the outer circumferential surface WK3 side, which is another surface, or to the other surface WK2 side.
本発明における接着シートＡＳ、シート材ＷＫＳ、被着体ＷＫ、被着体本体ＷＫＭおよび支持部材の材質、種別、形状等は、特に限定されることはない。例えば、接着シートＡＳ、被着体ＷＫ、被着体本体ＷＫＭ、シート材ＷＫＳおよび支持部材は、円形、楕円形、三角形や四角形等の多角形、円環形状、楕円環形状、多角環形状、その他の形状等、どのような形状であってもよいし、接着シートＡＳやシート材ＷＫＳは、感圧接着性、感熱接着性等の接着形態のものであってもよく、感熱接着性の接着シートＡＳやシート材ＷＫＳが採用された場合は、当該接着シートＡＳやシート材ＷＫＳを加熱する適宜なコイルヒータやヒートパイプの加熱側等の加熱手段を設けるといった適宜な方法で接着されればよい。また、このような接着シートＡＳやシート材ＷＫＳは、例えば、接着剤層だけの単層のもの、基材と接着剤層とが積層された２層のもの、基材と接着剤層との間に１または複数の中間層が積層された３層または３層以上のもの、基材の上面に１または複数のカバー層が積層された３層または３層以上のもの、基材、中間層またはカバー層が剥離可能に設けられたもの、接着剤層のみからなる単層の両面接着シート、１または複数の中間層の両最外面に接着剤層が積層された両面接着シート等、どのようなものでもよい。さらに、被着体ＷＫ、被着体本体ＷＫＭおよび支持部材としては、例えば、食品、樹脂容器、シリコン半導体ウエハや化合物半導体ウエハ等の半導体ウエハ、回路基板、光ディスク等の情報記録基板、ガラス板、鋼板、陶器、木板または樹脂等の単体物であってもよいし、それら２つ以上で形成された複合物であってもよく、任意の形態の部材や物品なども対象とすることができる。なお、接着シートＡＳやシート材ＷＫＳは、機能的、用途的な読み方に換え、例えば、情報記載用ラベル、装飾用ラベル、保護シート、ダイシングテープ、ダイアタッチフィルム、ダイボンディングテープ、記録層形成樹脂シート等の任意のシート、フィルム、テープ等でもよい。 The materials, types, shapes, etc. of the adhesive sheet AS, sheet material WKS, adherend WK, adherend main body WKM, and supporting member in the present invention are not particularly limited. For example, the adhesive sheet AS, the adherend WK, the adherend main body WKM, the sheet material WKS, and the support member may have a circular, oval, polygonal shape such as a triangle or quadrangle, a circular ring shape, an elliptical ring shape, a polygonal ring shape, The adhesive sheet AS and the sheet material WKS may have any other shape, and the adhesive sheet AS and the sheet material WKS may have an adhesive form such as pressure-sensitive adhesive or heat-sensitive adhesive. When sheet AS or sheet material WKS is adopted, it may be bonded by an appropriate method such as providing heating means such as an appropriate coil heater or heating side of a heat pipe to heat the adhesive sheet AS or sheet material WKS. . In addition, such adhesive sheets AS and sheet materials WKS include, for example, single-layer adhesive sheets, two-layer adhesive sheets consisting of a base material and an adhesive layer, and laminated adhesive sheets consisting of a base material and an adhesive layer. Three layers or three or more layers with one or more intermediate layers laminated between them, three or more layers with one or more cover layers laminated on the top surface of the base material, base material, intermediate layer Or, what type of adhesive sheet can be used, such as one with a removable cover layer, a single-layer double-sided adhesive sheet consisting only of an adhesive layer, or a double-sided adhesive sheet with adhesive layers laminated on both outermost surfaces of one or more intermediate layers? It can be anything. Further, as the adherend WK, the adherend main body WKM and the support member, examples include foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit boards, information recording substrates such as optical disks, glass plates, etc. It may be a single object such as a steel plate, ceramics, wooden board, or resin, or it may be a composite formed of two or more of these, and members or articles of any form can also be targeted. Adhesive sheet AS and sheet material WKS can be read in terms of functionality and usage, such as information label, decorative label, protective sheet, dicing tape, die attach film, die bonding tape, recording layer forming resin. Any sheet, film, tape, etc. may be used.
前記実施形態における駆動機器は、回動モータ、直動モータ、リニアモータ、単軸ロボット、２軸または３軸以上の関節を備えた所謂多関節ロボット等の電動機器、エアシリンダ、油圧シリンダ、ロッドレスシリンダおよびロータリシリンダ等のアクチュエータ等が単体で採用されてもよいし、それら電動機器やアクチュエータ等が直接的又は間接的に組み合わされたものが採用されてもよいし、それら電動機器やアクチュエータ等の出力部に対するトルク制御や速度制御等が可能なものや不能なものが採用されてもよい。 The drive devices in the embodiment include rotary motors, direct-acting motors, linear motors, single-axis robots, so-called multi-joint robots with two or more axes of joints, and other electric devices, air cylinders, hydraulic cylinders, and rods. Actuators such as non-resistance cylinders and rotary cylinders may be used alone, or a direct or indirect combination of these electric devices and actuators may be used, and these electric devices, actuators, etc. It is also possible to adopt a device that allows torque control, speed control, etc. for the output portion of the device, or a device that does not allow torque control or speed control.
前記実施形態において、何らかの物体（以下「物体Ａ」という）および当該物体Ａに対して移動する物体（以下「物体Ｂ」という）すなわち、相対移動する物体Ａおよび物体Ｂは、移動することのない物体Ａに対して物体Ｂが移動してもよいし、移動することのない物体Ｂに対して物体Ａが移動してもよいし、物体Ａおよび物体Ｂの両方が移動してもよいく、移動によって達成される結果が同じであれば、物体Ａおよび物体Ｂの何れが移動してもよいし、ローラ等の回転部材が採用されている場合、当該回転部材を回転駆動させる駆動機器を備えてもよいし、回転部材の表面や回転部材自体をゴムや樹脂等の変形可能な部材で構成してもよいし、回転部材の表面や回転部材自体を変形しない部材で構成してもよいし、ローラの代わりに回転するまたは回転しないシャフトやブレード等の他の部材を採用してもよいし、押圧ローラ、押圧板３２または押圧ヘッド等の押圧手段や押圧部材または規制部材といった被押圧物を押圧するものが採用されている場合、上記で例示したものに代えてまたは併用して、ローラ、丸棒、ブレード材、ブラシ状部材の他、大気やガス等の気体の吹き付けによるものを採用してもよいし、押圧するものをゴム、樹脂、スポンジ等の変形可能な部材で構成してもよいし、金属や硝子等の変形しない部材で構成してもよいし、剥離板や剥離ローラ等の剥離手段や剥離部材といった被剥離物を剥離するものが採用されている場合、上記で例示したものに代えてまたは併用して、板状部材、丸棒、ローラ等の部材を採用してもよいし、剥離するものをゴムや樹脂等の変形可能な部材で構成してもよいし、変形しない部材で構成してもよいし、支持（保持）手段や支持（保持）部材等の被支持部材（被保持部材）を支持（保持）するものが採用されている場合、メカチャックやチャックシリンダ等の把持手段、クーロン力、接着剤（接着シート、接着テープ）、粘着剤（粘着シート、粘着テープ）、磁力、ベルヌーイ吸着、吸引吸着、駆動機器等で被支持部材を支持（保持）する構成を採用してもよいし、切断手段や切断部材等の被切断部材を切断または、被切断部材に切込や切断線を形成するものが採用されている場合、上記で例示したものに代えてまたは併用して、カッター刃、レーザカッタ、イオンビーム、火力、熱、水圧、電熱線、気体や液体等の吹付け等で切断するものを採用したり、適宜な駆動機器を組み合わせたもので切断するものを移動させて切断するようにしたりしてもよい。 In the above embodiments, some object (hereinafter referred to as "object A") and an object that moves with respect to the object A (hereinafter referred to as "object B"), that is, objects A and B that move relatively, do not move. Object B may move relative to object A, object A may move relative to object B that does not move, or both object A and object B may move. Either object A or object B may be moved as long as the result achieved by the movement is the same, and if a rotating member such as a roller is employed, a drive device that rotationally drives the rotating member may be provided. Alternatively, the surface of the rotating member and the rotating member itself may be made of a deformable member such as rubber or resin, or the surface of the rotating member and the rotating member itself may be made of a material that does not deform. Instead of the roller, other members such as rotating or non-rotating shafts and blades may be used, and pressing means such as a pressing roller, pressing plate 32, or pressing head, pressing members, or regulating members may be used. If a pressing device is used, instead of or in combination with the examples listed above, a roller, round bar, blade material, brush-like member, or a device that uses air, gas, or other gas blowing may be used. Alternatively, the pressing object may be made of a deformable member such as rubber, resin, or sponge, or may be made of a non-deformable member such as metal or glass, or a peeling plate, peeling roller, etc. If a peeling means or a peeling member is used to peel off the object to be peeled, members such as a plate-shaped member, a round bar, a roller, etc. may be used in place of or in combination with those exemplified above. Alternatively, the thing to be peeled off may be made of a deformable member such as rubber or resin, or it may be made of a non-deformable member, and the part to be peeled may be made of a deformable member such as a supporting (holding) means or a supported (holding) member. If something that supports (holds) the member (member to be held) is used, it may include gripping means such as a mechanical chuck or chuck cylinder, Coulomb force, adhesive (adhesive sheet, adhesive tape), adhesive (adhesive sheet, adhesive A configuration may be adopted in which the supported member is supported (held) by magnetic force, Bernoulli adsorption, suction adsorption, drive equipment, etc., or the member to be cut is cut by a cutting means or a cutting member, or the member to be cut is If a device is used to form a cut or cutting line, a cutter blade, laser cutter, ion beam, thermal power, heat, water pressure, heating wire, gas or It is also possible to use a device that cuts by spraying liquid or the like, or to move the object to be cut using a combination of appropriate drive equipment.
ＥＡ…シート貼付装置
２０…貼付手段
３０…難接着処理除去手段
３１…熱風送風機（加熱手段）
ＡＳ…接着シート
ＡＳＨ…はみ出し領域
ＡＳ１…一端
ＡＳ２…他端
ＭＴ…マット処理（難接着処理）
ＳＤ…供給方向
ＷＫ…被着体
ＷＫＡ…シート貼付領域
ＷＫＭ…被着体本体
ＷＫＳ…シート材
ＷＫ１…一方の面（別の面）
ＷＫ２…他方の面（別の面）
ＷＫ３…外周面（一面）
EA... Sheet pasting device 20... Pasting means 30... Difficult adhesion treatment removal means 31... Hot air blower (heating means)
AS...adhesive sheet ASH...protruding area AS1...one end AS2...other end MT...matte treatment (difficult adhesion treatment)
SD... Supply direction WK... Adherent WKA... Sheet pasting area WKM... Adherent body WKS... Sheet material WK1... One side (another side)
WK2...other side (another side)
WK3...outer surface (one surface)
Claims (4)
前記被着体には、前記接着シートが接着し難い難接着処理が施されており、
前記接着シートが貼付される前記被着体のシート貼付領域に施されている前記難接着処理を除去する難接着処理除去手段をさらに備えていることを特徴とするシート貼付装置。 The adhesive is applied so that a protruding area protruding from one predetermined surface of the adherend is formed on at least one of one end side and the other end side along the supply direction of the adhesive sheet supplied along the predetermined supply direction. A sheet pasting device comprising pasting means for pasting a sheet on one surface and bending and pasting the protruding area toward another surface,
The adherend is subjected to a difficult-to-adhesion treatment that makes it difficult for the adhesive sheet to adhere to the adherend,
A sheet pasting device further comprising a hard-to-adhesion treatment removing means for removing the hard-to-adhesion treatment applied to a sheet pasting area of the adherend to which the adhesive sheet is pasted.
前記シート材に前記難接着処理が施されていることを特徴とする請求項１または請求項２に記載のシート貼付装置。 The adherend is composed of an adherend body and a sheet material attached to the adherend body,
3. The sheet pasting device according to claim 1, wherein the sheet material is subjected to the difficult-to-adhesion treatment.
前記被着体には、前記接着シートが接着し難い難接着処理が施されており、
前記接着シートが貼付される前記被着体のシート貼付領域に施されている前記難接着処理を除去する難接着処理除去工程をさらに実施することを特徴とするシート貼付方法。 The adhesive is applied so that a protruding area protruding from one predetermined surface of the adherend is formed on at least one of one end side and the other end side along the supply direction of the adhesive sheet supplied along the predetermined supply direction. In a sheet pasting method that includes a pasting step of pasting a sheet on one surface and bending and pasting the protruding area toward another surface,
The adherend is subjected to a difficult-to-adhesion treatment that makes it difficult for the adhesive sheet to adhere to the adherend,
A sheet pasting method characterized by further carrying out a hard-to-adhesion treatment removal step of removing the hard-to-adhesion treatment applied to a sheet pasting area of the adherend to which the adhesive sheet is pasted.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022107952A JP2024006763A (en) | 2022-07-04 | 2022-07-04 | Sheet attachment device and sheet attachment method |
| TW112108817A TW202403926A (en) | 2022-07-04 | 2023-03-10 | Sheet sticking device and sheet sticking method for preventing folded and stuck adhesive sheet from being peeled from sheet sticking area even if hard-to-stick treatment is subject to sheet sticking area of an adhered body |
| CN202310426925.1A CN117352421A (en) | 2022-07-04 | 2023-04-20 | Sheet sticking apparatus and sheet sticking method |
| DE102023111352.6A DE102023111352A1 (en) | 2022-07-04 | 2023-05-03 | Film sticking device and film sticking method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022107952A JP2024006763A (en) | 2022-07-04 | 2022-07-04 | Sheet attachment device and sheet attachment method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2024006763A true JP2024006763A (en) | 2024-01-17 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022107952A Pending JP2024006763A (en) | 2022-07-04 | 2022-07-04 | Sheet attachment device and sheet attachment method |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2024006763A (en) |
| CN (1) | CN117352421A (en) |
| DE (1) | DE102023111352A1 (en) |
| TW (1) | TW202403926A (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022030877A (en) | 2020-08-07 | 2022-02-18 | 株式会社荏原製作所 | Tape pasting system, tape pasting method, tape peeling system, and tape peeling method |
-
2022
- 2022-07-04 JP JP2022107952A patent/JP2024006763A/en active Pending
-
2023
- 2023-03-10 TW TW112108817A patent/TW202403926A/en unknown
- 2023-04-20 CN CN202310426925.1A patent/CN117352421A/en active Pending
- 2023-05-03 DE DE102023111352.6A patent/DE102023111352A1/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DE102023111352A1 (en) | 2024-01-04 |
| CN117352421A (en) | 2024-01-05 |
| TW202403926A (en) | 2024-01-16 |
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