JP2019096704A - Sheet peeling device and peeling method - Google Patents

Abstract

To provide a sheet peeling device and a peeling method capable of preventing peeling failure of an adhesive sheet.SOLUTION: A sheet peeling device 10 includes feeding means 20 that feeds a peeling tape PT, sticking means 30 that presses and sticks the peeling tape PT to an adhesive sheet AS stuck to an adherend WK, moving means 50 that relatively moves the peeling tape PT and the adherend WK to peel the adhesive sheet AS from the adherend WK, and warpage correction means 70 that presses the adherend WK to the holding means 60 for holding the adherend WK and corrects the warpage of the adherend WK, and the warpage correction means 70 presses the adherend WK to the holding means 60 by the sticking means 30.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a sheet peeling apparatus and a peeling method.

  Conventionally, there is known a sheet peeling apparatus which applies a peeling tape to an adhesive sheet stuck to an adherend, and relatively moves the peeling tape and the adherend to peel the adhesive sheet from the adherend. (See, for example, Patent Document 1).

JP, 2014-30039, A

  In the conventional sheet peeling apparatus as described in Patent Document 1, when the semiconductor wafer (adherend) held by the table 11 (holding unit) is warped, the adherend floats with respect to the holding unit. Since the adhesive sheet may be held in a state, the adherend may be detached from the holding means during peeling of the adhesive sheet, resulting in a defect in peeling of the adhesive sheet.

  An object of the present invention is to provide a sheet peeling apparatus and a peeling method capable of preventing peeling failure of an adhesive sheet.

  The present invention adopts the configuration described in the claims.

  According to the present invention, since the adherend is pressed against the holding means for holding the adherend to correct the warp of the adherend, the adherend is held in a floating state with respect to the holding means. Can be prevented, and peeling defects of the adhesive sheet can be prevented.

(A)-(C) is an explanatory view of a sheet exfoliation device concerning one embodiment of the present invention. (A), (B) is explanatory drawing of the sheet peeling apparatus which concerns on the modification of this invention. (A)-(D) are explanatory drawings of the sheet peeling apparatus which concerns on the modification of this invention.

Hereinafter, an embodiment of the present invention will be described based on the drawings.
In the present embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis orthogonal to the predetermined plane. Do. Furthermore, in the present embodiment, when referring to a direction from the front in FIG. 1 parallel to the Y-axis and indicating a direction without specifying a figure, “upper” is “down” in the arrow direction of the Z-axis. Is the opposite direction, “left” is the arrow direction of the X axis, “right” is the opposite direction, and “front” is the opposite direction in the front direction in FIG. 1 parallel to the Y axis.

  In FIG. 1 (A), the sheet peeling apparatus 10 includes a feeding means 20 for feeding the peeling tape PT, and a sticking means 30 for pressing the peeling tape PT onto the adhesive sheet AS stuck to the adherend WK. A cutting means 40 for cutting the peeling tape PT into a predetermined length; a moving means 50 for peeling the adhesive sheet AS from the adherend WK by relatively moving the peeling tape PT and the adherend WK; The holding means 60 holding the body WK includes a warp correction means 70 for pressing the adherend WK to correct the warpage of the adherend WK.

  The feeding means 20 includes a support roller 21 for supporting the peeling tape PT, a guide roller 22 for guiding the peeling tape PT, a slide plate 24 supported by a slider 23A of the linear motor 23 as a driving device, and a driving device The pressure roller 26 as a pressing member rotatably supported on the output shaft 25A of the linear motion motor 25 as a holding member, and a holding member having a pair of holding claws 27A and a chuck cylinder 27 as a driving device .

  The sticking means 30 is supported by a linear motion motor 31 as a driving device, a coil heater supported by the output shaft 31A of the linear motion motor 31, an infrared heater, heating means 32 such as a heating side of a heat pipe, etc. And a pressing head 33 as a pressing member for pressing and sticking the peeling tape PT to the adhesive sheet AS stuck to the adherend WK.

  The cutting means 40 includes a cutting blade 42 supported by an output shaft 41A of a linear motion motor 41 as a driving device.

  The moving means 50 includes a linear motor 51 as a driving device for supporting the holding means 60 by the slider 51A.

  The holding means 60 includes a table 61 having a holding surface 61A which can be held by suction by a pressure reducing means (not shown) which is a holding member such as a pressure reducing pump or a vacuum ejector.

  The warpage correction means 70 is also configured to double as the sticking means 30, and the holding means 60 is configured to press the adherend WK by the sticking means 30.

A procedure of peeling the adhesive sheet AS from the adherend WK in the above-described sheet peeling apparatus 10 will be described.
First, with respect to the sheet peeling apparatus 10 in which each member is disposed at an initial position shown by a solid line in FIG. 1A, a user of the sheet peeling apparatus 10 (hereinafter simply referred to as "user") Are set as shown in the figure, and an automatic operation start signal is input through an operation means (not shown) such as an operation panel or a personal computer. Then, when the adherend WK is placed on the holding surface 61A as shown in FIG. 1A, the holding means 60 is not shown. The depressurizing means is driven to start attracting and holding the adherend WK on the holding surface 61A. Next, the warp correction means 70 drives the linear motion motor 31, and as shown by the two-dot chain line in FIG. 1A, the pressing head 33 is lowered to press the adherend WK against the holding surface 61A. After the lapse, the pressing head 33 is raised. As a result, even if the adherend WK is warped, the warp is corrected and the entire surface is adsorbed and held on the holding surface 61A.

  Next, the moving means 50 drives the linear motor 51 to move the table 61 so that the right end of the adhesive sheet AS is positioned directly below the lower right end of the pressing head 33 as shown in FIG. 1B. . Thereafter, the feeding means 20 drives the linear motor 23 to move the slide plate 24 to the right, and as shown in FIG. 1B, the peeling tape PT is fed between the pair of holding claws 27A. Subsequently, the feeding means 20 drives the linear motion motor 25 and the linear motor 23 to retract the pressing roller 26 upward and return the slide plate 24 to the initial position, and then drive the chuck cylinder 27 to hold the gripping claw 27A. Hold the peeling tape PT.

  Next, the attaching means 30 drives the linear motion motor 31 and the heating means 32 to lower the heated pressing head 33, and as shown in FIG. 1C, the pressing head 33 adheres the peeling tape PT. The outer edge of the sheet AS is pressed and stuck. Next, in a state where the feeding means 20 drives the linear motion motor 25 and the peeling tape PT is pressed against the slide plate 24 by the pressing roller 26, the cutting means 40 drives the linear motion motor 41, as shown in FIG. As shown, the cutting blade 42 is lowered to cut the peeling tape PT. And the sticking means 30 and the cutting means 40 drive the linear motion motors 31 and 41, and return the pressing head 33 and the cutting blade 42 to the initial position. Thereafter, the moving means 50 drives the linear motor 51 to move the table 61 to the right as shown by the two-dot chain line in FIG. 1C, and peels off the adhesive sheet AS from the adherend WK.

  When the peeling of the adhesive sheet AS is completed, the moving means 50 stops the driving of the linear motor 51, and the holding means 60 stops the driving of the pressure reducing means (not shown). Next, the feeding means 20 drives the chuck cylinder 27 to release the holding of the peeling tape PT by the holding claws 27A, and the user does not have to use a collecting means (not shown) such as a box or bag for collecting the peeled adhesive sheet AS. Deliver adhesive sheet AS. Then, after the user or the conveying means (not shown) conveys the adherend WK to the next process, the moving means 50 drives the linear motor 51 to return the table 61 to the initial position, and the same operation is repeated thereafter. .

  According to the embodiment as described above, since the adherend WK is pressed against the holding means 60 for holding the adherend WK to correct the warp of the adherend WK, the adherend WK becomes the holding means 60. Can be prevented from being held in a floating state, and peeling defects of the adhesive sheet AS can be prevented.

  As described above, the best configuration, method and the like for carrying out the present invention are disclosed in the above description, but the present invention is not limited to this. That is, although the present invention has been particularly illustrated and described primarily with respect to particular embodiments, it is to be understood that shapes relative to the above-described embodiments can be made without departing from the spirit and scope of the invention. A person skilled in the art can make various modifications in material, quantity, and other detailed configurations. Moreover, the description which limited the shape, the material, etc. which were disclosed above is described in an exemplification for facilitating the understanding of the present invention, and the present invention is not limited. The description in the name of the member from which the limitation of some or all of the limitations such as is removed is included in the present invention.

For example, the sheet peeling apparatus 10 has a configuration in which the cutting means 40 doubles as the warpage correction means 70, and after the suction holding of the adherend WK on the holding surface 61A is started as in the above embodiment, the warpage correction means 70 may drive the linear motion motor 41 to lower the cutting blade 42 and press the adherend WK against the holding surface 61A to correct the warp of the adherend WK, instead of the cutting means 40, as shown in FIG. A cutting means 40A shown in 2 may be employed, and the cutting means 40A may be used as the warp correcting means 70.
The cutting means 40A is supported by the output shaft 41A of the linear motion motor 41, and has a pressing head 43 having a recess 43A opened downward, a linear motor 44 as a driving device supported in the recess 43A, and a slider 44A. And a supported cutting blade 42.
In this case, as shown in FIG. 2A, with the cutting blade 42 housed in the recess 43A, the warpage correction means 70 drives the linear motion motor 41 to lower the pressing head 43, and the adherend WK Is pressed against the holding surface 61A to correct the warp of the adherend WK. Further, the cutting means 40A drives the linear motor 44, and as shown in FIG. 2B, after the cutting blade 42 protrudes from the recess 43A, the linear motion motor 41 is driven to lower the cutting blade 42 for peeling. The tape PT.

The sheet peeling apparatus 10 may be provided with a feeding means 20A and a sticking means 30A shown in FIG. 3A, instead of the feeding means 20 and the sticking means 30.
The feeding means 20A includes a support roller 21 and a recovery roller 28 which is driven by a rotation motor 28A as a drive device and recovers the peeling tape PT.
The sticking means 30A includes a pressing roller 35 as a pressing member rotatably supported by the output shaft 34A of the linear motion motor 34 as a driving device.
In this case, the sticking means 30A is also used as the warp correction means 70, and as shown in FIG. 3A, when the suction holding of the adherend WK placed on the holding surface 61A is started, the warping is performed. The correction means 70 drives the linear motion motor 34, and as shown in FIG. 3B, the pressure roller 35 is lowered to attach the peeling tape PT to the adhesive sheet AS, and the adherend WK is held by the holding surface 61A. To correct the warp of the adherend WK. Next, the feeding means 20A and the moving means 50 drive the rotation motor 28A and the linear motor 51 to move the table 61 to the left as shown in FIG. 3C, and the peeling tape PT to the adhesive sheet AS. While sticking, the adherend WK is moved to the peeling start position. Thereafter, the feeding means 20A and the moving means 50 drive the rotary motor 28A and the linear motor 51, and while the recovery roller 28 winds up the peeling tape PT, as shown in FIG. The adhesive sheet AS is peeled from the adherend WK.

  The feeding means 20 may feed the peeling tape PT for single sheet.

The sticking means 30 may employ heating means such as a discharge heater, a microwave irradiation device, a warm air blowing device or the like.
The sticking means 30, 30A may be provided with vibration means for vibrating the pressing head 33 and the pressing roller 35 instead of or in combination with the heating means, and as the peeling tape PT, pressure-sensitive adhesiveness or heat-sensitive adhesiveness The adhesive sheet AS may be employed, and in the case where the peeling tape PT is a pressure-sensitive adhesive sheet AS, the heating means may or may not be provided.

  The cutting means 40 may not be provided. In this case, the adhesive sheet AS can be peeled from the adherend WK without cutting the strip-like peeling tape PT, or the feeding means 20 can be used to peel the sheet peeling tape PT. You just have to pay out.

  The moving means 50 may include a driving device for movably supporting the chuck cylinder 27. The position of the table 61 may be fixed and the chuck cylinder 27 may be moved. The chuck cylinder 27 and the table 61 may be provided. And both may be moved.

The sheet peeling apparatus 10 includes an imaging unit such as a camera or a projector that detects a warp of the adherend WK, and a warp detection unit such as an optical sensor, an ultrasonic sensor, a pressure sensor, or various sensors such as a contact sensor. It is also good. In this case, the warpage correction means 70 may correct the warpage of the adherend WK only when the warpage detection means detects the warpage of the adherend WK.
The sheet peeling apparatus 10 may be provided with a pressure sensor for detecting a pressure reduction state by pressure reducing means (not shown) of the holding means 60 and a pressure reduction detection means such as a load cell. In this case, for example, the adherend WK on the holding surface 61A. After the suction holding is started, the warpage correction means 70 corrects the warpage of the adherend WK only when the pressure reduction detection means detects that the predetermined pressure reduction state does not occur even when the predetermined time has elapsed. May be

  The warpage correction means 70 may press the adherend WK to the holding means 60 with a pressing member such as a shaft member or an annular member to correct the warpage of the adherend WK, air, or the like other than those exemplified above. The adherend WK may be pressed against the holding means 60 by spraying gas such as gas to correct the warp of the adherend WK, or the outer edge of the adherend WK may be lifted from the holding surface 61A. In this case, for example, the warping is corrected by the pressing head 33 and the cutting means 40, the warping is corrected by the pressing head 33 and the pressing member, the warping is corrected by a plurality of pressing members, and the gas is It may be sprayed to correct the warpage.

  The adherend WK may be supported by a frame member such as a ring frame via another adhesive sheet, or may be held by another device. In this case, the holding means 60 may be omitted.

  The material, type, shape and the like of the adhesive sheet AS, the peeling tape PT and the adherend WK in the present invention are not particularly limited. For example, the adhesive sheet AS may have a circular shape, an elliptical shape, a polygonal shape such as a triangle or a quadrangle, or another shape, or may have an adhesive form such as pressure-sensitive adhesiveness or heat-sensitive adhesiveness. In addition, the adhesive sheet AS has, for example, a single-layer adhesive layer only, an intermediate layer between the substrate and the adhesive layer, and three or more layers such as a cover layer on the upper surface of the substrate. Further, it may be a so-called double-sided adhesive sheet capable of peeling the substrate from the adhesive layer, the double-sided adhesive sheet having a single layer or multiple layers, or an intermediate layer It may be a single layer or a multilayer one without. The adherend WK includes, for example, food, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit substrates, information recording substrates such as optical disks, glass plates, steel plates, ceramics, wood plates, resins, etc. It may be a single substance or a composite formed of two or more of them, and members or articles of any form may be targeted. The adhesive sheet AS is changed to a functional and practical reading, for example, an information description label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, a recording layer forming resin sheet, etc. Sheets, films, tapes and the like.

The means and steps in the present invention are not limited in any way as long as the operations, functions or steps described in the means and steps can be performed, and it is needless to say that the constitutions of only one embodiment shown in the above embodiment or There is no limitation to the process. For example, the feeding means is not limited as long as the peeling tape can be fed, in light of the technical common sense at the time of filing of the application, and within the technical scope of the application (other means and steps are also the same).
The drive device in the above embodiment includes a rotary motor, a linear motion motor, a linear motor, a single-axis robot, an electric machine such as an articulated robot having joints of two or three or more axes, an air cylinder, a hydraulic cylinder, a rodless Not only actuators such as cylinders and rotary cylinders can be employed, but also combinations of them directly or indirectly can be employed.
In the embodiment, in the case where a rotating member such as a roller is employed, a drive device may be provided to rotate the rotating member, or the surface of the rotating member or the rotating member itself may be deformed by rubber or resin. It may be constituted by a member, or the surface of the rotating member or the rotating member itself may be constituted by a member which does not deform, or one which presses an object to be pressed such as pressing means or pressing member such as pressing roller or pressing head. When employed, instead of or in combination with those exemplified above, a member such as a roller, a round bar, a blade, rubber, resin, sponge or the like is adopted, or pressure is applied by spraying a gas such as the atmosphere or gas. May be adopted, or those to be pressed may be constituted by a deformable member such as rubber or resin, or may be constituted by a member which is not deformed, a peeling plate, a peeling roller, etc. Means of peeling off When a member that peels off a material to be peeled off is employed, a member such as a plate-like member, a round bar, a roller or the like may be employed instead of or in combination with the members exemplified above. It may be composed of a deformable member such as rubber or resin, or may be composed of a non-deformable member, or support or hold a supported member such as a supporting (holding) means or a supporting (holding) member. If something is adopted, holding means such as mechanical chuck or chuck cylinder, Coulomb force, adhesive (adhesive sheet, adhesive tape), adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, A configuration for supporting (holding) a supported member by a drive device or the like may be adopted, or a member to be cut such as a cutting means or a cutting member may be cut, or a cut or a cutting line may be formed in the member to be cut If adopted, In place of or in combination with those exemplified in the above, a cutter blade, a laser cutter, an ion beam, thermal power, heat, water pressure, electric heating wire, spraying with gas or liquid, etc. may be adopted. The combination of the driving devices may be cut by moving one to be cut.

DESCRIPTION OF SYMBOLS 10 sheet peeling apparatus 20, 20A delivery means 30, 30A sticking means 33 press head 35 press roller 40, 40A cutting means 50 moving means 70 curvature correction means AS adhesive sheet PT peeling tape WK adherend

Claims (4)

Feeding means for feeding a peeling tape;
Sticking means for pressing and sticking the peeling tape to an adhesive sheet stuck to an adherend;
Moving means for relatively moving the peeling tape and the adherend to peel the adhesive sheet from the adherend;
The holding means for holding the adherend includes a warp correction means for pressing the adherend to correct the warp of the adherend.
A sheet peeling apparatus characterized in that the warp correction means presses the adherend to the holding means by the sticking means. Feeding means for feeding a peeling tape;
Affixing means for affixing the peeling tape to an adhesive sheet attached to an adherend;
Cutting means for cutting the peeling tape into a predetermined length;
Moving means for relatively moving the peeling tape and the adherend to peel the adhesive sheet from the adherend;
The holding means for holding the adherend includes a warp correction means for pressing the adherend to correct the warp of the adherend.
The sheet peeling apparatus according to claim 1, wherein the warp correction unit presses the adherend to the holding unit by the cutting unit. A feeding step of feeding a peeling tape;
A sticking step of pressing and sticking the peeling tape to the adhesive sheet stuck to the adherend by a sticking means;
A moving step of relatively moving the peeling tape and the adherend to peel the adhesive sheet from the adherend;
And a warp correction step of pressing the adherend to holding means for holding the adherend to correct the warp of the adherend.
A sheet peeling method comprising: pressing the adherend on the holding means by the sticking means in the warp correction step. A feeding step of feeding a peeling tape;
An attaching step of attaching the peeling tape to an adhesive sheet attached to an adherend;
A cutting step of cutting the peeling tape into a predetermined length by a cutting means;
A moving step of relatively moving the peeling tape and the adherend to peel the adhesive sheet from the adherend;
And a warp correction step of pressing the adherend to holding means for holding the adherend to correct the warp of the adherend.
A sheet peeling method characterized in that the warp correcting step presses the adherend to the holding means by the cutting means.

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