JP2023014516A - Sheet peeling device and sheet peeling method - Google Patents

Abstract

To provide a sheet peeling device and a sheet peeling method that can prevent a situation in which an adhesive sheet cannot be peeled off from an adherend.SOLUTION: A sheet peeling device EA peels off an adhesive sheet AS from an adherend WK having one face WK1 supported on a support surface SM1 and the other face WK2 pasted with one face AS1 of the adhesive sheet, and comprises: detection means 10 that detects a peeling start part AS3 on the basis of the positional relationship between a detection reference position CP based on at least one position of the support surface SM1 and the other face AS2 of the adhesive sheet AS, and the support surface SM1 or the other face AS2 of the adhesive sheet AS; pasting means 20 that pastes a tape PT for peeling to the peeling start part AS3; and peeling means 30 that applies a tension to the tape PT for peeling to peel off the adhesive sheet AS from the adherend WK. The detection means 10 detects irregularities of at least one of the support surface SM1 and the other face AS2 of the adhesive sheet, and reflects the difference of elevation in the irregularities on the detection reference position CP.SELECTED DRAWING: Figure 1

Description

The present invention relates to a sheet peeling device and a sheet peeling method.

2. Description of the Related Art A sheet peeling device for peeling an adhesive sheet from an adherend having one surface supported by a support surface and an adhesive sheet attached to the other surface is known (see, for example, Patent Document 1).

JP 2010-157543 A

In the protective tape peeling device 30 (sheet peeling device) described in Patent Document 1, the wafer W (adherend) supported on the upper surface (support surface) of the adhesive tape DT for support is moved, and the position sensor 62 ( By detecting the height difference between the position of the support surface (detection reference position) and the position of the protective tape PT (adhesive sheet) attached to the adherend, the front end e of the adhesive sheet (peeling start portion ). For this reason, if the support surface has unevenness, the height difference of the unevenness causes the convex portion to be erroneously detected as the peeling start portion of the adhesive sheet, and the peeling tape Ts (peeling tape) is used as the peeling start portion of the adhesive sheet. The problem arises that the adhesive sheet cannot be attached and the adhesive sheet cannot be peeled off from the adherend.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a sheet peeling device and a sheet peeling method that can prevent an adhesive sheet from becoming incapable of being peeled from an adherend.

The present invention employs the configurations described in the claims.

According to the present invention, the unevenness of at least one of the support surface and the adhesive sheet is detected, and the height difference of the unevenness is reflected in the detection reference position to detect the peeling start portion of the adhesive sheet. can be prevented from being unable to be peeled off.

1 is an explanatory diagram of a sheet peeling device according to one embodiment of the present invention; FIG.

An embodiment of the present invention will be described below with reference to FIG.
Note that the X-axis, Y-axis, and Z-axis in this embodiment are orthogonal to each other, and the X-axis and Y-axis are axes within a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. do. Furthermore, in the present embodiment, when viewed from the front side of FIG. In terms of direction, "left" is the direction of the arrow on the X axis and "right" is the opposite direction, and "front" is the direction of the arrow on the Y axis and "back" is the opposite direction.

The sheet peeling device EA separates the adhesive sheet AS from the adherend WK having one surface WK1 supported by the upper surface SM1 of the sheet member SM as a support surface and one surface AS1 of the adhesive sheet AS adhered to the other surface WK2. , wherein a detection reference position CP based on the position of at least one of the upper surface SM1 of the sheet member SM and the other surface AS2 of the adhesive sheet AS, and the upper surface SM1 of the sheet member SM or the other surface of the adhesive sheet AS A detecting means 10 for performing a detection step of detecting the peeling start portion AS3 of the adhesive sheet AS attached to the adherend WK based on the positional relationship with AS2, and a peeling tape at the peeling start portion AS3 of the adhesive sheet AS. A sticking means 20 for performing a sticking step of sticking the PT, and a peeling step of applying tension to the peeling tape PT stuck to the peeling start portion AS3 of the adhesive sheet AS and peeling the adhesive sheet AS from the adherend WK. It is provided with a peeling means 30 for carrying out, and is arranged in the vicinity of a support means 40 for supporting the adherend WK.
The adherend WK of the present embodiment is integrated with the ring frame RF as a frame member through the sheet member SM to form an integrated object UP.

The detection means 10 includes a distance measurement means 11 including imaging means such as a camera and a projector, various sensors such as an optical sensor and an ultrasonic sensor, and the like, and the adhesive sheet AS based on the measurement result of the distance measurement means 11. A control means 12 such as a personal computer or a sequencer for detecting the peeling start portion AS3 and controlling the entire or partial operation of the sheet peeling device EA is provided. The unevenness of at least one side of the surface AS2 is detected, and the height difference of the unevenness is reflected in the detection reference position CP to detect the peeling start portion AS3 of the adhesive sheet AS.

The sticking means 20 includes feeding means 21 for feeding the heat-sensitive adhesive peeling tape PT, pressing means 22 for pressing and sticking the peeling tape PT to the adhesive sheet AS, and cutting the peeling tape PT to a predetermined length. It comprises a cutting means 23 and a frame 25 which is supported by an output shaft 24A of a direct-acting motor 24 as a driving device and which directly or indirectly supports each of the above-described means constituting the sticking means 20 .
The feeding means 21 includes a support roller 21A that supports the peeling tape PT, a drive roller 21D that is supported by an output shaft (not shown) of a rotating motor 21B as a driving device and sandwiches the peeling tape PT with a pinch roller 21C, A guide roller 21E for guiding the peeling tape PT, a slide plate 21H supported by a slider 21G of a linear motor 21F as a driving device, and a linear motor 21J as a driving device are rotatably supported by an output shaft 21K. It is provided with a pressing roller 21L and a chuck cylinder 21Q as a driving device which is a holding means having a pair of gripping claws 21P supported by a slider 21N of a linear motor 21M as a driving device.
The pressing means 22 includes a direct-acting motor 22A as a driving device, a heating means 22C such as a coil heater or a heat pipe on the heating side supported by an output shaft 22B of the direct-acting motor 22A, and a pressing means supported by the heating means 22C. and a member 22D.
The cutting means 23 includes a linear motion motor 23A as a driving device, a cutting blade 23C supported by an output shaft 23B of the linear motion motor 23A, and a receiving plate 23D for receiving the cutting blade 23C.

The peeling means 30 also serves as part of the sticking means 20, and is composed of the linear motor 21M and the chuck cylinder 21Q of the sticking means 20. As shown in FIG.

The support means 40 is supported by a linear motor 41 as a drive device and a slider 41A of the linear motor 41, and has a support surface 42A that can be held by suction by a decompression means (holding means) (not shown) such as a decompression pump or a vacuum ejector. A table 42 is provided.
The table 42 includes a concave portion 42B provided on the upper surface, and a porous member 42C arranged in the concave portion 42B and having a support surface 42A having an uneven upper surface.

The operation of the above sheet peeling device EA will be described.
First, the user of the sheet peeling device EA (hereinafter simply referred to as the “user”) puts the peeling tape PT on the sheet peeling device EA in which each member is arranged at the initial position indicated by the solid line in FIG. is set as shown in the figure, a signal for starting automatic operation is inputted via an operation means (not shown) such as an operation panel or a personal computer. Next, the sticking means 20 drives the heating means 22C to heat the pressing member 22D to a predetermined temperature and maintain that temperature while the sheet peeling device EA is automatically operated. After that, when a user or a conveying means (not shown) such as a belt conveyor or an articulated robot places the integral object UP at a predetermined position on the support surface 42A as shown in FIG. A decompressing means (not shown) is driven to start sucking and holding the integrated object UP on the support surface 42A. At this time, as shown in FIG. 1C, the sheet member SM follows the unevenness of the support surface 42A to form unevenness on the upper surface SM1.

Next, the support means 40 drives the linear motor 41 to move the table 42 left and right to reciprocate as shown in FIG. 1(B). At this time, as shown in FIG. 1C, the detection means 10 measures the distance to the sheet member SM exposed between the ring frame RF and the adherend WK by the distance measurement means 11, and the control means 12 detects the unevenness of the upper surface SM1 of the sheet member SM based on the measurement result. A position obtained by adding the thickness TH1 of the adherend WK in the direction of the distance measuring means 11 to the position of the vertex PP1 is defined as a detection reference position CP. Then, while the table 42 is moving rightward, the peeling start portion AS3 of the adhesive sheet AS passes below the distance measuring means 11, and as shown in FIG. When the distance to the start portion AS3 is measured, the measured distance becomes shorter than the distance to the detection reference position CP, so the control means 12 detects the peel start portion AS3 of the adhesive sheet AS. Next, when the table 42 moves leftward and returns to the initial position, the support means 40 stops driving the linear motor 41 .

After that, the sticking means 20 drives the linear motor 21F to move the slide plate 21H rightward, and as shown by the chain double-dashed line in FIG. . Next, the pasting means 20 drives the direct-acting motor 21J to retract the pressing roller 21L upward, and then drives the linear motor 21F to leave the peeling tape PT between the pair of gripping claws 21P and move the slide plate. 21H is returned to the initial position. After the sticking means 20 drives the chuck cylinder 21Q and grips the peeling tape PT with the gripping claws 21P, the linear motor 21M is driven to move the chuck cylinder 21Q rightward and pull out the peeling tape PT. Next, the sticking means 20 drives the direct-acting motor 22A to lower the pressing member 22D, and as shown by the two-dot chain line in FIG. It is pressed and stuck to the starting part AS3. After that, the pasting means 20 drives the linear motion motor 21J to return the pressing roller 21L to the initial position, and then drives the linear motion motor 23A to lower the cutting blade 23C to cut the peeling tape PT. Next, the pasting means 20 drives the direct-acting motors 22A and 23A to return the pressing member 22D and the cutting blade 23C to their initial positions. After the sticking means 20 drives the linear motor 24 to retract the frame 25 upward, the linear motor 21M is driven to move the chuck cylinder 21Q leftward, and the support means 40 moves the linear motor 41. drive to move the table 42 to the right. As a result, as shown in FIG. 1(D), the peeling tape PT and the adherend WK are moved relative to each other, and the adhesive sheet AS is peeled from the adherend WK starting from the peel start portion AS3.

When the entire adhesive sheet AS is peeled off from the adherend WK, the support means 40 stops driving the linear motor 41, and then stops driving the decompression means (not shown), thereby sucking the adherend WK onto the support surface 42A. Release hold. Next, the sticking means 20 drives the chuck cylinder 21Q, releases the grip of the peeling tape PT by the gripping claws 21P, and adheres the peeled adhesive sheet AS to collecting means (not shown) such as a box or a bag for collecting the peeled adhesive sheet AS or to the user. Pass the sheet AS. After that, after the user or unillustrated conveying means conveys the integrated product UP from which the adhesive sheet AS has been peeled off to the next process, each means drives the respective driving devices to return the respective members to their initial positions, Thereafter, operations similar to those described above are repeated.

According to the embodiment as described above, the unevenness of the adhesive sheet AS is detected, and the height difference of the unevenness is reflected in the detection reference position CP to detect the peeling start portion AS3 of the adhesive sheet AS. It is possible to prevent the adhesive sheet AS from becoming unable to be peeled off.

As described above, the best configuration, method, etc. for carrying out the present invention are disclosed in the above description, but the present invention is not limited thereto. That is, although the present invention has been particularly illustrated and described primarily with respect to certain embodiments, it is understood that there may be modifications to the above-described embodiments without departing from the spirit and scope of the invention. Various modifications can be made by those skilled in the art in terms of materials, quantity, and other detailed configurations. In addition, the descriptions that limit the shape, material, etc. disclosed above are exemplified to facilitate understanding of the present invention, and do not limit the present invention. The description by the name of the member that removes some or all of the limitations such as is included in the present invention.

For example, the detection means 10 may set the detection reference position CP based on the position of the other surface AS2 of the adhesive sheet AS. The unevenness of the adhesive sheet AS attached to the object WK was detected, and the thickness TH2 of the adhesive sheet AS was added in the opposite direction to the distance measuring means 11 at the position of the bottom point DP1 of the lowest recessed portion DP of the unevenness. The position may be the detection reference position CP. In this case, when the table 42 moves leftward, the peeling start portion AS3 of the adhesive sheet AS passes below the distance measuring means 11, and when the distance measuring means 11 measures the distance to the support surface 42A, the measurement Since the distance becomes longer than the distance to the detection reference position CP, the control means 12 detects the peeling start portion AS3 of the adhesive sheet AS.
The detection means 10 may set the detection reference position CP based on the positions of both the upper surface SM1 of the sheet member SM and the other surface AS2 of the adhesive sheet AS. , and a position between the peak PP1 of the highest convex portion PP among the unevenness of the sheet member SM and the bottom point DP1 of the lowest concave portion DP among the unevenness of the adhesive sheet AS may be set as the detection reference position CP. In this case, when the table 42 moves to the right and the peeling start portion AS3 of the adhesive sheet AS passes below the distance measuring means 11, the distance measuring means 11 measures the distance to the peeling starting portion AS3, and the measured distance becomes shorter than the distance to the detection reference position CP, the control means 12 detects the peeling start portion AS3 of the adhesive sheet AS. Further, when the table 42 moves leftward and the peeling start portion AS3 of the adhesive sheet AS passes below the distance measuring means 11, the distance measuring means 11 measures the distance to the support surface 42A, and the measured distance is detected. Since it is longer than the distance to the reference position CP, the control means 12 detects the peeling start portion AS3 of the adhesive sheet AS.
If the end edge of the adherend WK is not located outside the peeling start portion AS3 of the adhesive sheet AS, the detecting means 10 detects the position of the peak PP1 of the highest convex portion PP among the unevenness of the sheet member SM, The position of the bottom point DP1 of the lowest concave portion DP among the unevenness of the adhesive sheet AS may be the detection reference position CP. The surface 42A may be used as a support surface for supporting the adherend WK, and the unevenness thereof may be detected, and the detection reference position CP based on the support surface 42A may be set in the same manner as described above.

The sticking means 20 may stick the strip-shaped peeling tape PT to the adhesive sheet AS without cutting it, or may stick a sheet-shaped peeling tape PT to the adhesive sheet AS. When attaching the tape PT to the adhesive sheet AS, the cutting means 23 may or may not be provided.
The sticking means 20 may stick the pressure-sensitive peeling tape PT to the adhesive sheet AS. In this case, the heating means 22C may or may not be provided.
The feeding means 21 may support or guide the peeling tape PT by a plate member or a shaft member instead of each roller such as the support roller 21A and the guide roller 21E, or may wind the peeling tape PT. It may be supported by, for example, fanfold folding without turning.
The pressing means 22 may include a heating means such as an electric discharge heater, a microwave irradiation device, or a hot air blowing device. A vibrating means such as a vibrator may be provided.

The peeling means 30 may not be combined with the sticking means 20. In this case, a drive device such as an articulated robot that applies tension to the peeling tape PT independently of the sticking means 20 may be employed.
The peeling means 30 may move the table 42 without or while moving the chuck cylinder 21Q to apply tension to the peeling tape PT and peel the adhesive sheet AS from the adherend WK.

The support means 40 may or may not support the ring frame RF, may or may not be provided in the sheet peeling apparatus EA of the present invention, If not, another device may be used to support or move the adherend WK and ring frame RF.

The adherend WK may be integrated with the frame member via the sheet member SM, may not be integrated with the frame member, or may be supported by the support surface 42A without being supported by the sheet member SM. may be
Other than the ring frame RF, the frame member may have a non-annular shape (the outer circumference is not connected), a circular shape, an elliptical shape, a polygonal shape, or other shapes.

The material, type, shape, etc. of the adhesive sheet AS, sheet member SM, peeling tape PT, and adherend WK are not particularly limited. For example, the adhesive sheet AS, sheet member SM, peeling tape PT, and adherend WK may be circular, elliptical, polygonal such as triangular or quadrangular, or other shapes. The SM and release tape PT may be of adhesive form such as pressure sensitive adhesive, heat sensitive adhesive, and the like. Further, the adhesive sheet AS, the sheet member SM and the peeling tape PT are, for example, those having a single layer with only an adhesive layer, those having an intermediate layer between the base material and the adhesive layer, and those having a cover on the upper surface of the base material. It may be a so-called double-sided adhesive sheet that can separate the substrate from the adhesive layer, and the double-sided adhesive sheet may have a single layer or multiple layers. It may be one having an intermediate layer, or one having a single layer or multiple layers without an intermediate layer. Examples of the adherend WK include food, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, information recording substrates such as circuit boards and optical discs, glass plates, steel plates, ceramics, wood plates, resins, and the like. It may be a single substance, or a composite formed by two or more of them, and may be a member or article of any shape. Note that the adhesive sheet AS and the sheet member SM may be read in terms of functionality and usage, such as information label, decorative label, protective sheet, dicing tape, die attach film, die bonding tape, recording layer forming resin. Any sheet such as a sheet, a film, a tape, or the like may be used.

The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions or steps described for those means and steps. The process is not limited at all. For example, the attaching means may be any means as long as it can attach the peeling tape to the peeling start portion of the adhesive sheet, and is not limited as long as it is within the technical scope in light of the common general knowledge at the time of filing. (other means and steps are the same).

The drive device in the above embodiment includes a rotating motor, a linear motor, a linear motor, a single-axis robot, an electric device such as a multi-joint robot having two or more joints, an air cylinder, a hydraulic cylinder, and a rodless robot. Actuators such as cylinders and rotary cylinders can be used, and combinations thereof directly or indirectly can also be used.
In the above embodiments, when a rotating member such as a roller is employed, a drive device for rotating the rotating member may be provided, or the surface of the rotating member or the rotating member itself may be made of deformable material such as rubber or resin. It may be composed of a member, the surface of the rotating member or the rotating member itself may be composed of a member that does not deform, or other members such as a shaft or a blade that rotates or does not rotate instead of the roller. Alternatively, if a pressing means such as a pressing roller or a pressing head or a pressing member that presses an object to be pressed is adopted, a roller, a round bar, a blade can be used instead of or in combination with the above examples In addition to the material and brush-like member, it may be possible to adopt the one by blowing gas such as air or gas. It may be composed of a non-deformable member such as , resin, etc., the part to be peeled may be composed of a deformable member such as rubber or resin, or may be composed of a non-deformable member. ) means or a supporting (holding) member that supports (holds) the supported member (held member), gripping means such as a mechanical chuck or chuck cylinder, Coulomb force, adhesive (adhesive sheet , adhesive tape), adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, a configuration in which the supported member is supported (held) by a driving device, etc., or a cutting means or cutting member When cutting a member to be cut or forming a cut or a cutting line in the member to be cut, a cutter blade, a laser cutter, an ion beam can be used instead of or in combination with the above examples. , Thermal power, heat, water pressure, heating wire, spraying of gas or liquid, etc. are used to cut, or a combination of appropriate driving equipment is used to move and cut the material to be cut. good too.

EA... Sheet peeling device 10... Detecting means 20... Sticking means 30... Peeling means AS... Adhesive sheet AS1... One side of adhesive sheet AS2... Other side of adhesive sheet AS3... Peeling start part CP... Detection reference position SM1... Sheet Top surface of member (support surface)
PT... peeling tape WK... adherend WK1... one side of adherend WK2... other side of adherend

Claims (2)

A sheet peeling device for peeling the adhesive sheet from an adherend having one surface supported by a support surface and one surface of the adhesive sheet attached to the other surface,
Sticking to the adherend based on the positional relationship between the detection reference position based on the position of at least one of the support surface and the other surface of the adhesive sheet and the support surface or the other surface of the adhesive sheet detection means for detecting a peeling start portion of the adhesive sheet;
an attaching means for attaching a peeling tape to the peeling start portion of the adhesive sheet;
a peeling means for applying tension to the peeling tape attached to the peel start portion of the adhesive sheet and peeling the adhesive sheet from the adherend;
The detection means detects unevenness of at least one of the support surface and the other surface of the adhesive sheet, and detects the peeling start portion of the adhesive sheet by reflecting the height difference of the unevenness on the detection reference position. A sheet peeling device characterized by: A sheet peeling method for peeling the adhesive sheet from an adherend having one surface supported by a support surface and one surface of the adhesive sheet attached to the other surface, comprising:
Sticking to the adherend based on the positional relationship between the detection reference position based on the position of at least one of the support surface and the other surface of the adhesive sheet and the support surface or the other surface of the adhesive sheet a detection step of detecting a peeling start portion of the adhesive sheet;
an attaching step of attaching a peeling tape to the peeling start portion of the adhesive sheet;
a peeling step of applying tension to the peeling tape attached to the peeling start portion of the adhesive sheet to peel the adhesive sheet from the adherend;
In the detecting step, the unevenness of at least one of the support surface and the other surface of the adhesive sheet is detected, and the peeling start portion of the adhesive sheet is detected by reflecting the height difference of the unevenness in the detection reference position. A sheet peeling method characterized by:

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