JP7016679B2 - Sheet peeling device and peeling method - Google Patents

Description

The present invention relates to a sheet peeling device and a peeling method.

Conventionally, a holding surface in which a first adhesive sheet is attached to one surface and a second adhesive sheet is attached to the other surface to hold an adherend integrated with a frame member via the second adhesive sheet. And a sheet peeling device for peeling the first adhesive sheet from the adherend by relatively moving the sheet holding means for holding the first adhesive sheet is known (see, for example, Patent Document 1).

Japanese Unexamined Patent Publication No. 2014-30039

In the conventional sheet peeling device as described in Patent Document 1, when the semiconductor wafer (adhesive body) held on the table 11 (adhesive body holding means) is warped, the upper surface of the adherend holding means (adhesive body holding means) is warped. Since a gap may be created between the holding surface) and the dicing sheet DS (second adhesive sheet), the adherend is separated from the adherend holding means while the adhesive sheet is being peeled off, and the adhesive sheet There is an inconvenience that peeling failure occurs.

An object of the present invention is to provide a sheet peeling device and a peeling method capable of preventing poor peeling of an adhesive sheet.

The present invention has adopted the configuration described in the claims.

According to the present invention, the adherend is attracted to the holding surface by the negative pressure in the sealed space by sucking the closed space formed between the holding surface and the adherend attachment area in the second adhesive sheet. Since the warp of the adherend is corrected, it is possible to prevent a gap from being generated between the holding surface and the second adhesive sheet, and it is possible to prevent the adhesive sheet from being poorly peeled off.

(A) and (B) are explanatory views of the sheet peeling apparatus which concerns on one Embodiment of this invention.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
The X-axis, Y-axis, and Z-axis in the present embodiment are orthogonal to each other, the X-axis and the Y-axis are axes in a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. do. Further, in the present embodiment, "up" is "down" in the direction of the arrow on the Z axis when the direction is shown without specifying the figure, based on the case of viewing from the front direction in FIG. 1 parallel to the Y axis. Is the opposite direction, "left" is the arrow direction of the X axis, "right" is the opposite direction, "front" is the middle front direction parallel to the Y axis, and "rear" is the opposite direction.

In FIG. 1A, in the sheet peeling device 10, the first adhesive sheet AS1 is attached to one surface and the second adhesive sheet AS2 is attached to the other surface, and the sheet peeling device 10 is attached via the second adhesive sheet AS2. An adherend holding means 20 having a holding surface 21A for holding an adherend WK integrated into a ring frame RF as a frame member, a sheet holding means 30 for holding a first adhesive sheet AS1, and a holding surface 21A. It is provided with a moving means 40 for peeling the first adhesive sheet AS1 from the adherend WK by relatively moving the sheet holding means 30.

The adherend holding means 20 has a holding table 21 whose upper surface is a holding surface 21A and a region outside the adherend sticking region on the second adhesive sheet AS2 to which the adherend WK is attached to the holding surface 21A. It is provided with a closed space forming means 22 for forming a closed space SP between the attracting and holding surface 21A and the adherend sticking region in the second adhesive sheet AS2, and a closed space suction means 23 for sucking the closed space SP. ..
The closed space forming means 22 is via an outer suction portion 22A such as a porous body or a suction hole for sucking the second adhesive sheet AS2 outside the adherend sticking area to which the adherend WK is attached, and a pipe 22B. It is provided with an outer decompression means 22C as a holding member such as a decompression pump and a vacuum ejector that apply a suction force to the outer suction portion 22A.
The closed space suction means 23 is located in the closed space SP formed by the closed space forming means 22, and is inside through an inner suction portion 23A such as a porous body or a suction hole for sucking the second adhesive sheet AS2 and a pipe 23B. It is provided with an inner depressurizing means 23C as a holding member such as a decompression pump and a vacuum ejector that apply a suction force to the suction unit 23A.

The sheet holding means 30 includes a feeding means 31 for feeding out the peeling tape PT, a pressing means 32 for pressing and attaching the peeling tape PT to the first adhesive sheet AS1, and a cutting for cutting the peeling tape PT to a predetermined length. It is provided with means 33.

The feeding means 31 includes a support roller 31A that supports the peeling tape PT, a guide roller 31B that guides the peeling tape PT, a slide plate 31E supported by a slider 31D of the linear motor 31C as a drive device, and a drive device. It is provided with a pressing roller 31H as a pressing member rotatably supported by the output shaft 31G of the linear motor 31F, and a chuck cylinder 31K as a holding member having a pair of gripping claws 31J and as a driving device. ..

The pressing means 32 is supported by a linear motor 32A as a drive device, a heating means 32C such as a coil heater, an infrared heater, and a heating side of a heat pipe supported by the output shaft 32B of the linear motor 32A, and a heating means 32C. It is provided with a pressing head 32D as a pressing member.

The cutting means 33 includes a linear motion motor 33A as a drive device and a cutting blade 33C supported by the output shaft 33B of the linear motion motor 33A.

The moving means 40 includes a linear motor 41 as a driving device that supports the adherend holding means 20 with the slider 41A.

The procedure for peeling the first adhesive sheet AS1 from the adherend WK in the above sheet peeling device 10 will be described.
First, with respect to the sheet peeling device 10 in which each member is arranged at the initial position shown by the solid line in FIG. 1 (A), the user of the sheet peeling device 10 (hereinafter, simply referred to as “user”) removes the tape PT. Is set as shown in the figure, and a signal for starting automatic operation is input via an operation means (not shown) such as an operation panel or a personal computer. Then, as shown in FIG. 1A, a user or a transporting means (not shown) such as a belt conveyor or an articulated robot places the adherend WK on the holding surface 21A with the second adhesive sheet AS2 facing down. When placed, the adherend holding means 20 drives the outer decompression means 22C and starts suction holding of the region outside the adherend sticking region on the second adhesive sheet AS2 at the outer suction portion 22A. As a result, the region outside the adherend sticking region on the second adhesive sheet AS2 is in close contact with the holding surface 21A, and as shown in FIG. 1A, the adherend on the holding surface 21A and the second adhesive sheet AS2. A closed space SP is formed between the sticking area and the sticking area. Next, the adherend holding means 20 drives the inner depressurizing means 23C to start suctioning the closed space SP by the inner suction portion 23A. As a result, even if the adherend WK is warped, the warp is corrected, and the entire surface of the adherend-attached region to which the adherend WK is attached on the second adhesive sheet AS2 is adsorbed on the holding surface 21A. Be retained.

Then, the moving means 40 drives the linear motor 41 and moves the adherend holding means 20 so that the right end portion of the first adhesive sheet AS1 is located directly below the lower right end portion of the pressing head 32D. After that, the sheet holding means 30 drives the linear motor 31C to move the slide plate 31E to the right, and as shown by the two-dot chain line in FIG. 1 (A), the peeling tape PT is inserted between the pair of gripping claws 31J. Pay out. Next, the seat holding means 30 drives the linear motor 31F and the linear motor 31C to retract the pressing roller 31H upward, and after returning the slide plate 31E to the initial position, drives the chuck cylinder 31K to grip the claws. The peeling tape PT is gripped by 31J.

Next, the sheet holding means 30 drives the linear motion motor 32A and the heating means 32C to lower the heated pressing head 32D, and as shown in FIG. 1 (B), the peeling tape PT is pressed by the pressing head 32D. The first adhesive sheet AS1 is pressed and attached to the outer edge portion. Next, in a state where the sheet holding means 30 drives the linear motion motor 31F and the release tape PT is pressed against the slide plate 31E by the pressing roller 31H, the linear motion motor 33A is driven and the cutting blade 33C is lowered for peeling. Cut the tape PT. Then, the seat holding means 30 drives the linear motion motors 32A and 33A to return the pressing head 32D and the cutting blade 33C to the initial positions. After that, the moving means 40 drives the linear motor 41, and as shown by the alternate long and short dash line in FIG. 1B, the adherend holding means 20 is moved to the right, and the first adhesive sheet AS1 is moved from the adherend WK. To peel off.

When the peeling of the first adhesive sheet AS1 is completed, the moving means 40 stops driving the linear motor 41, and the adherend holding means 20 stops driving the outer and inner decompressing means 22C and 23C. Next, the sheet holding means 30 drives the chuck cylinder 31K, releases the gripping of the peeling tape PT by the gripping claw 31J, and uses a collecting means (not shown) such as a box or a bag for collecting the peeled first adhesive sheet AS1. Hand over the first adhesive sheet AS1 to the person. Then, after the user or the conveying means (not shown) conveys the adherend WK to the next step, the moving means 40 drives the linear motor 41 to return the adherend holding means 20 to the initial position, and so on. The operation is repeated.

According to the above embodiment, the adherend WK is in the closed space SP by sucking the closed space SP formed between the holding surface 21A and the adherend sticking region in the second adhesive sheet AS2. Since it is attracted to the holding surface 21A by the negative pressure and the warp of the adherend WK is corrected, it is possible to prevent a gap from being formed between the holding surface 21A and the second adhesive sheet AS2, and the first adhesive sheet can be prevented from forming. It is possible to prevent the AS1 from being poorly peeled off.

As described above, the best configuration, method, etc. for carrying out the present invention are disclosed in the above description, but the present invention is not limited thereto. That is, although the present invention has been particularly illustrated and described primarily with respect to a particular embodiment, the shape, with respect to the embodiments described above, without departing from the scope of the technical idea and object of the present invention. Those skilled in the art can make various modifications in terms of material, quantity, and other detailed configurations. Further, the description limiting the shape, material, etc. disclosed above is merely an example for facilitating the understanding of the present invention, and does not limit the present invention. Therefore, the shape, material, and the like are described above. The description in the name of the member excluding a part or all of the limitation such as is included in the present invention.

For example, the sheet peeling device 10 may press the adherend WK against the holding surface 21A in combination with suction by the closed space suction means 23 to correct the warp of the adherend WK, for example, the pressing means 32. The adherend WK may be pressed against the holding surface 21A by the cutting means 33 or a pressing member such as a shaft material or an annular member, or the adherend WK may be pressed against the holding surface 21A by spraying a gas such as air or gas. You may press it.
The sheet peeling device 10 is provided with a decompression detecting means such as a pressure sensor and a load cell that detect a depressurized state by the inner depressurizing means 23C, and a predetermined depressurizing even if a predetermined time elapses after the suction of the closed space SP is started. Only when the decompression detecting means detects that the state does not occur, the adherend holding means 20 drives the outer depressurizing means 22C to form a closed space SP, and then drives the inner depressurizing means 23C to drive the inner suction unit. The adherend WK may be pressed against the holding surface 21A by sucking the closed space SP at 23A or by spraying a pressing member or gas.
The sheet peeling device 10 includes an image pickup means such as a camera or a projector for detecting the warp of the adherend WK, and a warp detection means such as various sensors such as an optical sensor, an ultrasonic sensor, a pressure sensor, and a contact sensor. It is also good. In this case, for example, the image pickup means, the optical sensor, and the ultrasonic sensor may be provided above or to the side of the adherend WK, and the pressure sensor or the contact type sensor may be provided on the holding surface 21A, and the warp detecting means is covered. Only when the warp of the body WK is detected, the closed space SP may be formed and then the closed space SP may be sucked.

The adherend holding means 20 may include heating means such as a coil heater, an infrared heater, and a heating side of a heat pipe, and the second adhesive sheet AS2 may be heated and softened by the heating means.
The closed space forming means 22 may suck the frame member sticking area to which the ring frame RF is stuck on the second adhesive sheet AS2, or cool the area outside the adherend sticking area on the second adhesive sheet AS2. The closed space SP may be formed by attracting the closed space SP to the holding surface 21A by force or magnetic force, or the closed space SP may be formed by pressing the region outside the adherend attachment region of the second adhesive sheet AS2 toward the holding surface 21A. It may be formed, and in this case, the outer suction portion 22A, the pipe 22B, and the outer decompression means 22C may or may not be present.
The closed space forming means 22 and the closed space suction means 23 may form the closed space SP or suck the closed space SP even if the adherend WK is not warped.
The closed space forming means 22 and the closed space suction means 23 may perform suction of the closed space SP after forming the closed space SP even when the outer edge portion of the adherend WK is warped from the holding surface 21A. , Each may be connected to the same depressurizing means via a switching valve that switches the presence or absence of suction.

The sheet holding means 30 may hold the first adhesive sheet AS1 with a holding member other than the peeling tape PT. Further, the sheet holding means 30 peels the first adhesive sheet AS1 from the adherend WK without cutting the strip-shaped peeling tape PT, or holds the first adhesive sheet AS1 with the single-wafer peeling tape PT. In this case, the cutting means 33 may not be provided.
The pressing means 32 may employ a heating means such as a discharge heater, a microwave irradiation device, or a warm air blowing device, or may include a vibrating means for vibrating the pressing head 32D in place of or in combination with the heating means. You may.

The moving means 40 may be provided with a drive device that movably supports the seat holding means 30, or the adherend holding means 20 may be fixed in position and the seat holding means 30 may be moved. Both the adherend holding means 20 and the sheet holding means 30 may be moved.

In addition to the ring frame RF, the frame member may have a non-circular shape (the outer circumference is not connected), a circular shape, an elliptical shape, a polygonal shape having a triangle or more, or any other shape.

The materials, types, shapes, etc. of the first and second adhesive sheets AS1, AS2, the peeling tape PT, and the adherend WK in the present invention are not particularly limited. For example, the first and second adhesive sheets AS1 and AS2 may have a circular shape, an elliptical shape, a polygonal shape such as a triangle or a quadrangle, or any other shape, and may have an adhesive form such as pressure-sensitive adhesiveness or heat-sensitive adhesiveness. It may be a thing. Further, the first and second adhesive sheets AS1 and AS2 are, for example, a single layer having only an adhesive layer, a material having an intermediate layer between the base material and the adhesive layer, and a cover layer on the upper surface of the base material. It may have three or more layers, such as a so-called double-sided adhesive sheet capable of peeling the base material from the adhesive layer, and the double-sided adhesive sheet may be a single-layer or multi-layer intermediate layer. It may be a single layer or a multi-layer without an intermediate layer. The adherend WK includes, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit boards, information recording boards such as optical disks, glass plates, steel plates, pottery, wood boards or resins. It may be a single object, or it may be a compound formed by two or more of them, and any form of a member, an article, or the like can be targeted. The first and second adhesive sheets AS1 and AS2 can be read in a functional and versatile manner, for example, an information description label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, and a recording. Any sheet such as a layer-forming resin sheet, a film, a tape, or the like may be used.

The means and processes in the present invention are not limited as long as they can perform the operations, functions or processes described for the means and processes, much less the constituents of the mere embodiment shown in the above-described embodiment. It is not limited to the process at all. For example, if the moving means can peel off the first adhesive sheet from the adherend by relatively moving the holding surface and the sheet holding means, the moving means is within the technical range in light of the common general technical knowledge at the time of filing. If so, there is no limitation (the same applies to other means and processes).
The drive device in the above embodiment is an electric device such as a rotary motor, a linear motor, a linear motor, a single-axis robot, an articulated robot having two-axis or three-axis or more joints, an air cylinder, a hydraulic cylinder, and a rodless. Actuators such as cylinders and rotary cylinders can be adopted, and those in which they are directly or indirectly combined can also be adopted.
In the above embodiment, when a rotating member such as a roller is adopted, a driving device for rotationally driving the rotating member may be provided, or the surface of the rotating member or the rotating member itself can be deformed by rubber, resin, or the like. It may be composed of a member, a member that does not deform the surface of the rotating member or the rotating member itself, or a pressing means such as a pressing roller or a pressing head or a member that presses a pressed object such as a pressing member. If adopted, instead of or in combination with those exemplified above, members such as rollers, round bars, blade materials, rubber, resin, sponge, etc. may be adopted, or pressed by spraying gas such as air or gas. The material to be pressed may be made of a deformable member such as rubber or resin, or may be made of a non-deformable member, such as a release plate or a release roller. When a material that peels off an object to be peeled off, such as a peeling means or a peeling member, is used, a member such as a plate-shaped member, a round bar, or a roller may be used in place of or in combination with the above-exemplified one. Alternatively, the material to be peeled off may be made of a deformable member such as rubber or resin, or may be made of a non-deformable member, or may be supported by a supporting (holding) means, a supporting (holding) member, or the like. When a member that supports or holds a member is used, gripping means such as a mechanical chuck or chuck cylinder, Coulomb force, adhesive (adhesive sheet, adhesive tape), adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli A configuration may be adopted in which the supported member is supported (held) by suction, suction suction, a drive device, or the like, or the cut member such as a cutting means or a cutting member is cut, or a cut or a cutting line is cut in the cut member. Cutter blades, laser cutters, ion beams, thermal power, heat, hydraulic pressure, heating wires, spraying of gas, liquid, etc., in place of or in combination with those exemplified above. You may adopt the one that cuts with, or you may move the one that cuts with a combination of appropriate drive devices and cut it.

10 Sheet peeling device 20 Adhesive holding means 21A Holding surface 22 Sealed space forming means 23 Sealed space suction means 30 Sheet holding means AS1 First adhesive sheet AS2 Second adhesive sheet PT Peeling tape RF Ring frame (frame member)
SP enclosed space WK adherend

Claims (2)

A holding surface is attached to one surface and a second adhesive sheet is attached to the other surface to hold an adherend integrated with the frame member via the second adhesive sheet. The adherend holding means to have
A sheet holding means for holding the first adhesive sheet and
A moving means for peeling the first adhesive sheet from the adherend by relatively moving the holding surface and the sheet holding means is provided.
The adherend holding means attracts a region outside the adherend sticking region to which the adherend is attached on the second adhesive sheet to the holding surface, and the holding surface and the second adhesive sheet have the said. A sheet peeling device comprising: a closed space forming means for forming a closed space between the adherend and a sticking area, and a closed space suction means for sucking the closed space. The first adhesive sheet is attached to one surface, and the second adhesive sheet is attached to the other surface, and the adherend integrated with the frame member via the second adhesive sheet is held by the holding surface. Adhesive holding process and
A sheet holding step of holding the first adhesive sheet by the sheet holding means, and
A moving step of relatively moving the holding surface and the sheet holding means to peel off the first adhesive sheet from the adherend is provided.
In the adherend holding step, a region outside the adherend sticking region on the second adhesive sheet to which the adherend is attached is attracted to the holding surface, and the holding surface and the second adhesive sheet are said to have the same. A sheet peeling method comprising a closed space forming step of forming a closed space between the adherend and the adhered region and a closed space suction step of sucking the closed space.

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