JP7296222B2 - Sheet peeling device and sheet peeling method - Google Patents

Description

The present invention relates to a sheet peeling device and a sheet peeling method.

Conventionally, there has been known a sheet peeling device that cuts out an adhesive sheet of a predetermined shape from a band-shaped adhesive sheet substrate attached to a sheet supporting means, and peels off the adhesive sheet substrate with a cutout mark remaining on the sheet supporting means from the sheet supporting means. (See, for example, Patent Document 1).

Utility Model Registration No. 3186062

However, in the conventional sheet peeling device 8 (sheet peeling device) described in Patent Document 1, the unnecessary sheet US (adhesive sheet base material with cutout marks) left on both sides in the width direction orthogonal to the belt-like extending direction Tension is applied to both ends, and the adhesive sheet base material with the punched-out mark is peeled off from the support means 4 (sheet support means). , a slack portion ABS is formed in the center portion in the width direction of the adhesive sheet base material with the punch mark. With such a slack ABS formed, when the adhesive sheet base material with the cutout mark is repeatedly peeled off from the sheet supporting means, the slack ABS is pinched by the pinch roller 83 ( Each time it abuts against the guide means), additional tension is applied to the remaining ends, and the mutual approach of the remaining ends becomes pronounced, expanding the slack ABS. As a result, as shown in FIG. 1(J), the enlarged slack portion ABS wrinkles the adhesive sheet substrate portion (the portion cut out as the adhesive sheet) attached to the wafer WF, and the adhesive sheet has a desired shape. This causes the inconvenience of not being able to form

SUMMARY OF THE INVENTION It is an object of the present invention to provide a sheet peeling method capable of peeling an adhesive sheet base material with cut-out marks from a sheet supporting means so that even if a slack part is formed in the adhesive sheet base material with cut-out marks, the slack part does not expand. An object of the present invention is to provide an apparatus and a sheet peeling method.

The present invention employs the configurations described in the claims.

According to the present invention, since the slack portion is removed and the adhesive sheet base material with the punching mark is fed to the guide means, even if the slackening portion is formed in the adhesive sheet base material with the punching mark, the slack portion is prevented from expanding. Then, the adhesive sheet base material with the punch mark can be peeled off from the sheet support means.

(A) to (C) are explanatory diagrams of the sheet peeling device of the present invention. (D) to (G) are explanatory diagrams of modifications of the sheet peeling device of the present invention. (H) to (J) are explanatory diagrams of defects of the conventional sheet peeling device.

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described below with reference to the drawings.
Note that the X-axis, Y-axis, and Z-axis in this embodiment are orthogonal to each other, and the X-axis and Y-axis are axes within a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. do. Furthermore, in the present embodiment, when viewed from the front in FIG. 1 parallel to the Y-axis, when the direction is indicated without designating the drawing, "up" is the direction of the arrow of the Z-axis and "down". is the opposite direction, "left" is the arrow direction of the X axis, "right" is the opposite direction, "front" is the direction parallel to the Y axis in FIG. 1, and "rear" is the opposite direction. Also, since FIGS. 1B to 1G are views viewed from the same direction as FIG. 1A, arrows indicating directions are omitted.

A sheet sticking apparatus EA1 employing the sheet peeling apparatus EA of the present invention includes a sheet supporting means 10 for supporting an adherend WK and an adhesive sheet substrate AB protruding from the adherend WK, and an adhesive sheet Sheet attaching means 20 for attaching the base material AB to the adherend WK and the sheet supporting means 10, and sheet cutting means 30 for cutting the adhesive sheet base material AB attached to the adherend WK to form the adhesive sheet AS. A sheet for cutting out an adhesive sheet AS having a predetermined shape from a band-shaped adhesive sheet base AB attached to the sheet supporting means 10, and peeling off the adhesive sheet base ABH with a cutout mark remaining on the sheet supporting means 10 from the sheet supporting means 10. and a peeling device EA.

The sheet support means 10 includes an adherend support surface 11A which can be adsorbed and held by decompression means (holding means) (not shown) such as a decompression pump and a vacuum ejector, and an annular recess formed on the outer periphery of the adherend support surface 11A. A support table 11 is provided with a sheet attachment surface 11C formed across a groove 11B.

The sheet sticking means 20 is supported by an output shaft (not shown) of a rotary motor 21A as a driving device, and supports the original sheet RS in which the strip-shaped adhesive sheet base material AB is temporarily attached to one surface of the strip-shaped release sheet RL. a support roller 21 that guides the original fabric RS, and a load cell 23A as a tension detection means capable of detecting the tension applied to the adhesive sheet base material AB around which the original fabric RS is wound. A tension detecting roller 23 rotatably supported by a shaft 23B, a peeling plate 24 as peeling means for folding back the peeling sheet RL at the peeling edge 24A and peeling the adhesive sheet AS from the peeling sheet RL, an adherend WK and A pressing means 25 that presses and sticks the adhesive sheet base AB to the sheet sticking surface 11C, and a drive roller that is supported by an output shaft (not shown) of a rotation motor 26A as a drive device and sandwiches the release sheet RL with a pinch roller 26B. 26 and the output shaft of a driving device (not shown), and while the sheet peeling device EA is automatically operated, a predetermined tension is constantly applied to the release sheet RL existing between the pinch roller 26B and the A recovery roller 27 as a recovery means for recovering the release sheet RL, and a linear motor 28 as a driving device for supporting a pasting frame 28B directly or indirectly supporting the above members 21 to 27 with a slider 28A. I have it.
The pressing means 25 includes a linear motor 25A as a drive device, a linear motor 25C as a drive device supported by the first slider 25B, and a pressure roller 25E rotatably supported by the slider 25D. .

The sheet cutting means 30 is composed of a plurality of arms, and is a so-called multi-joint driving device capable of displacing an object supported by a tip arm 31A, which is a working portion, to any position and any angle within its working range. It comprises a robot 31 and a cutting blade 32 as a cutting member supported by a tip arm 31A via a bracket 32A.

The sheet peeling device EA includes tension applying means 40 for applying tension to the adhesive sheet base material ABH with the punched-out mark and peeling the adhesive sheet base material ABH with the punched-out mark from the sheet supporting means 10, and an adhesive sheet base material ABH with the punched-out mark. and a slack portion ABS (see FIG. 1(C)) at the center of the width direction (Y-axis direction) orthogonal to the strip-shaped extending direction of the adhesive sheet base material ABH with a punched mark. A slackness eliminating means 60 is provided for biasing in the opposite direction of the slackness direction to eliminate the slackness ABS and send the adhesive sheet base material ABH with the punched-out mark to the guide roller 50.例文帳に追加

The tension applying means 40 includes a linear motor 25A shared with the sheet sticking means 20, a peeling frame 41 supported by the second slider 25F and supporting the guide roller 50 so as to be rotatable, and a driving force supported by the peeling frame 41. A linear motor 42 as a device, a stripping position regulating roller 43 rotatably supported by a slider 42A thereof, a rotary motor 44 as a drive device supported by a stripping frame 41, and an output shaft (not shown) of the motor 44 supported by the stripping frame 41. and a recovery roller 46 as recovery means for recovering the adhesive sheet base material ABH with the punched-out trace, which is biased toward the tension-applying roller 45 by a biasing means (not shown).

The slack eliminating means 60 includes a gas blowing means 61 for blowing a gas AR onto the slack portion ABS, a sheet receiving means 62 for preventing the adhesive sheet base material AB from loosening in the gas blowing direction of the gas blowing means 61, a camera or a projector. and slack detection means 63 configured by various sensors such as an optical sensor, an ultrasonic sensor, and the like, and detecting the slack portion ABS.
The gas blowing means 61 includes pressurizing means (not shown) such as a pressurizing pump and a turbine, and a blowing nozzle 61A for blowing the gas AR sent from the pressurizing means onto the slack portion ABS.
The sheet receiving means 62 flattens the slack portion ABS pressed by the blowing of the gas AR, and comprises a plate-like member 62A provided with a sliding surface 62B on which the flattened adhesive sheet base material ABH with the cutout mark can slide. I have it.

The operation of the sheet sticking apparatus EA1 employing the above sheet peeling apparatus EA will be described.
First, a user of the sheet sticking device EA1 (hereinafter simply referred to as "user") moves the sheet sticking device EA1 in which each member is arranged at the initial position indicated by the solid line in FIG. After the raw fabric RS is set in the machine, a signal for starting automatic operation is inputted through an operation means (not shown) such as an operation panel or a personal computer. Then, after the sheet pasting means 20 locks the rotation motor 21A so that the adhesive sheet base AB supported by the support roller 21 is not fed out, the sheet peeling device EA drives the rotation motor 44, Tension is applied to such an extent that the adhesive sheet substrate AB portion located between the support roller 21 and the tension applying roller 45 does not loosen. Next, the sheet peeling device EA locks the rotary motor 44 so that the adhesive sheet base material AB (adhesive sheet base material ABH with punching marks) is not let out from the recovery roller 46 .

After that, when the user or a transport means (not shown) such as an articulated robot or a belt conveyor places the adherend WK on the adherend support surface 11A as shown in FIG. 1A, the sheet support means 10 drives the depressurizing means (not shown) to start sucking and holding the adherend WK on the adherend support surface 11A. Next, the sheet sticking means 20 and the sheet peeling device EA drive the linear motors 25C and 42 to lower the pressing roller 25E and the peeling position regulating roller 43 as indicated by the chain double-dashed line in FIG. The pressing roller 25E and the peeling position regulating roller 43 press the adhesive sheet base material AB against the sheet sticking surface 11C with a predetermined pressing force. Then, the sheet sticking means 20 drives the linear motor 25A to move the pressure roller 25E rightward to press the adhesive sheet base material AB against the upper surface of the adherend WK and the sheet sticking surface 11C with a predetermined pressing force. affix. At this time, the sheet pasting means 20 drives the linear motor 28 to move the pasting frame 28B in the lateral direction based on the detection result of the load cell 23A. A predetermined tension is applied to the AB portion of the adhesive sheet substrate.

1A, when the pressure roller 25E reaches a predetermined position on the right side of the support table 11, the sheet pasting means 20 stops driving the linear motor 25A. After that, the sheet cutting means 30 drives the articulated robot 31, and as shown in FIG. , and the cutting blade 32 is returned to the initial position. As a result, an adhesive sheet AS having a predetermined shape is formed from the adhesive sheet base AB and attached to the adherend WK, and an integrated product UP is formed by attaching the adhesive sheet AS to the adherend WK. Next, when the sheet supporting means 10 stops driving the depressurizing means (not shown) and releases the adsorption and holding of the adherend WK on the adherend supporting surface 11A, the user or the conveying means (not shown) lifts the integrated object UP. It is removed from the support table 11 and the integrated product UP is conveyed to the next process.

Then, the sheet peeling device EA drives the linear motor 25A and the rotating motor 44 to move the peeling frame 41 to the right as indicated by the two-dot chain line in FIG. The attached adhesive sheet base material ABH is peeled off. Next, as shown in FIG. 1(C), when the adhesive sheet base material ABH with the punch mark is peeled from the sheet sticking surface 11C, the sheet peeling device EA stops driving the linear motor 25A and the rotation motor 44. , the sheet sticking means 20 and the sheet peeling device EA drive the linear motors 25C and 42 to raise the pressing roller 25E and the peeling position regulating roller 43 as indicated by the chain double-dashed lines in the figure. After that, after the sheet peeling device EA locks the rotation motor 44 so that the adhesive sheet base material ABH with the punching mark is not let out from the collection roller 46, the sheet sticking means 20 and the sheet peeling device EA are driven by the linear motor 25A. to return the pressing roller 25E and the peeling frame 41 to their initial positions. Simultaneously with the start of driving of the linear motor 25A, the sheet pasting means 20 drives the rotary motors 21A and 26A to let out the raw material RS from the support rollers 21 and spread the new adhesive sheet base material AB onto the adherend support surface 11A. and the sheet sticking surface 11C, and the same operation as described above is repeated thereafter.

Here, when the slack portion ABS is formed as shown in FIG. 1(C) by the same operation as described above, the slack detection means 63 detects the slack portion ABS. Then, before the sheet peeling device EA moves the peeling frame 41 to the right in order to peel off the adhesive sheet base material ABH with the cut-out mark from the sheet sticking surface 11C, the pressure means (not shown) is driven, and the spray nozzle 61A A gas AR is blown. As a result, the ABH portion of the adhesive sheet base material with the punched-out mark is pressed against the sliding surface 62B, and the slack portion ABS is eliminated. Next, while the slack ABS is eliminated, the sheet peeling device EA drives the linear motor 25A and the rotating motor 44 to move the peeling frame 41 to the right, thereby removing the slack ABS. The adhesive sheet base material ABH with the mark is sent to the guide roller 50, and the adhesive sheet base material ABH with the punched mark is peeled off from the sheet sticking surface 11C. Then, when the portion where the slack portion ABS was present is sent closer to the rotary motor 44 than the guide roller 50, the sheet peeling device EA stops driving the pressure means (not shown), and the gas AR is sprayed from the spray nozzle 61A. to stop.

According to the embodiment as described above, since the slack portion ABS is removed and the adhesive sheet base material ABH with the cut-out mark is fed to the guide roller 50, even if the slack portion ABS is formed in the adhesive sheet base material ABH with the cut-out mark, Also, the adhesive sheet base material ABH with the cutout mark can be peeled off from the sheet supporting means 10 so that the slack portion ABS does not expand.

The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions or steps described for those means and steps. The process is not limited at all. For example, as long as the guide means guides the adhesive sheet base material with the cutout mark, it is not limited at all as long as it is within the technical scope in light of the common general knowledge at the time of filing (other means and the same process).

The sheet supporting means 10 may not support the adherend WK, may not be provided with the adherend supporting surface 11A, or may support only the adhesive sheet base material ABH with the cut-out mark. , the concave groove 11B may be omitted, and the sheet peeling device EA and the sheet sticking device EA1 of the present invention may or may not be provided.

The sheet pasting means 20 may support or guide the original fabric RS by a plate-like member or a shaft member instead of each roller such as the support roller 21 and the original fabric guide roller 22. For example, the release sheet RL may be fanfold-folded without winding for support, or fan-folded without winding the release sheet RL, or may be collected by shredding with a shredder or the like, or may be collected by winding. The release sheet RL may be collected simply by stacking without folding or fan-folding, or the release sheet RL may not be collected. The motor 28, the sticking frame 28B, etc. may be moved to dispose a new adhesive sheet base material AB facing the adherend support surface 11A and the sheet sticking surface 11C. The pressure roller 25E may be moved in the horizontal direction by a device, or the sheet supporting means 10 may be moved without or while moving the pressure roller 25E to apply the adhesive sheet base to the adherend WK and the sheet sticking surface 11C. The material AB may be pressed and pasted, or the pressure roller 25E may not be moved up and down. may be omitted, and may or may not be provided in the sheet peeling device EA or the sheet sticking device EA1 of the present invention.

The sheet cutting means 30 may employ any cutting member as long as it can cut the adhesive sheet base material AB. A cutting blade 32 having a ridge parallel to the Z-axis direction) may be employed, or a cutting blade 32 having a ridge parallel to the extending direction of the cutting blade 32 and having a ridge inclined may be employed. Alternatively, a cutting blade 32 in which both the cutting edge and the ridge are inclined with respect to the extending direction of the cutting blade 32 may be employed, or a so-called double-edged blade having a blade on the side of the original ridge may be used. The cutting blade 32 may be adopted, or the cutting blade 32 of other shapes such as a circular blade and a saw blade may be adopted. A linear cutter or the like may be employed, and it may not be supported by the bracket 32A.
The sheet cutting means 30 may cut the adhesive sheet base material AB by moving the sheet supporting means 10 without or while moving the cutting blade 32, or as shown in FIG. The cutting edge side of the cutting blade 32 may be inclined in a direction away from the adherend WK to cut the adhesive sheet substrate AB, or the cutting edge side may be inclined in a direction approaching the adherend WK. The cutting edge 32 may be inclined to cut the adhesive sheet base material AB, or the adhesive sheet AS may be cut without inclining the edge of the cutting edge toward or away from the adherend WK. Alternatively, the adhesive sheet base material AB may be cut so as to have the same shape as the outer edge of the adherend WK, or the adhesive sheet base material AB may be cut at a position farther from the adherend WK than the outer edge of the adherend WK. AB may be cut, the adhesive sheet base material AB may be cut regardless of the shape of the outer edge of the adherend WK, only the adhesive sheet base material AB may be cut, or the adhesive sheet base material AB may be cut. Both the base material AB and the adherend WK may be cut, the cutting blade 32 may be detachable or non-detachable, the cutting blade 32 may be attached and detached automatically, manually, or otherwise. , or may or may not be provided in the sheet peeling device EA or the sheet sticking device EA1 of the present invention.

The tensioning means 40 may move the sheet supporting means 10 without or while moving the peeling frame 41 to peel off the adhesive sheet base material ABH with the cutout from the sheet supporting means 10, or It is possible to collect the adhesive sheet base material ABH with the punched-out mark without moving up and down the position regulating roller 43, without the peeling position regulating roller 43, and without being urged in the direction of the tension applying roller 45. A recovery means may be employed, or a recovery means may be employed that recovers the adhesive sheet base material ABH with punched marks by, for example, fan-folding it without winding it, or shredding it with a shredder or the like, A recovery means may be employed for recovering the adhesive sheet base material ABH with punch marks by simply accumulating it without winding or fan-folding, or the recovery means may not be provided, for example, a chuck. The adhesive sheet base material ABH with punch marks is gripped by a driving device such as a cylinder, and the driving device that grips the adhesive sheet base material ABH with punch marks and the sheet supporting means 10 are relatively moved, and the sheet supporting means 10 is pulled out. The adhesive sheet substrate ABH with marks may be peeled off.

The guide means is not limited to the guide roller 50 around which the adhesive sheet base material ABH is wound. It may be a member that guides the ABH, or may be composed of, for example, a plate-like member or a shaft member, or a member in which the side of the adhesive sheet base material ABH with a cutout that is adhered to the sheet attachment surface 11C abuts. Alternatively, the side that is not adhered to the sheet sticking surface 11C may abut, or both sides may abut.

Only when the slackness detection means 63 detects the slackness ABS, the slackness elimination means 60 may urge the slackness ABS in the direction opposite to the slackness direction, or the slackness detection means 63 may detect the slackness ABS. Alternatively, the slack portion ABS may be urged in the direction opposite to the slack direction, or the driven roller 64 may be driven as shown in FIG. , and a band-shaped member 64A such as a round belt or a flat belt that is wound around the driven roller 64 and the guide roller 50. Alternatively, as shown in FIG. A roller 65B, a belt-like member 65C such as a round belt or a flat belt that is wound around the drive roller 65A and the driven roller 65B, and a suction member 65D that can be sucked by a decompression means (not shown) such as a decompression pump or a vacuum ejector. Alternatively, it may be composed only of the suction member 65D, or it may be composed of a suction roller (not shown).
As shown in FIG. 1(F), the slack eliminating means 60 comprises a sheet receiving means 62 with a roller member 62C, and flattens the slack portion ABS pressed against the circumferential surface by blowing gas AR. The adhesive sheet base material ABH with punch marks may be guided toward the guide roller 50, or as shown in FIG. The sheet receiving means 62 may be composed of a band-shaped member 62F such as a round belt or a flat belt that is wound around the sheet receiving means 62. Alternatively, the sheet receiving means 62 may not be provided, or the looseness detection means 63 may not be provided. may

The sheet peeling device EA may be used in other devices other than the sheet sticking device EA1, such as a sheet stacking device that stacks the adhesive sheets AS and a printing device that prints or coats the adhesive sheets AS. It may be used alone without being used in the sticking device EA1 or other devices.
The release sheet RL may not be temporarily attached to the adhesive sheet base AB.

The materials, types, shapes, and the like of the adhesive sheet substrate AB, the adhesive sheet AS, and the adherend WK in the present invention are not particularly limited. For example, the adhesive sheet substrate AB and the adhesive sheet AS may be circular, elliptical, polygonal such as triangular or quadrangular, or other shapes. When the adhesive sheet base AB or the adhesive sheet AS having heat-sensitive adhesive properties is employed, an appropriate coil heater or heating side of a heat pipe is used to heat the adhesive sheet base AB or the adhesive sheet AS. It may be adhered by an appropriate method such as providing a heating means of. Further, such adhesive sheet substrate AB and adhesive sheet AS include, for example, a single-layer adhesive layer only, an intermediate layer between the substrate and the adhesive layer, and a cover layer on the upper surface of the substrate. It may be a so-called double-sided adhesive sheet that can separate the substrate from the adhesive layer. It may be one having an intermediate layer, or one having a single layer or multiple layers without an intermediate layer. Examples of the adherend WK include food, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, information recording substrates such as circuit boards and optical discs, glass plates, steel plates, ceramics, wood plates, resins, and the like. It may be a single substance, or a composite formed by two or more of them, and may be a member or article of any shape. Note that the adhesive sheet base AB and the adhesive sheet AS may be read in terms of functionality and usage, such as information recording labels, decorative labels, protective sheets, dicing tapes, die attach films, die bonding tapes, and recording layers. Any sheet such as a formed resin sheet, a film, a tape, or the like may be used.

The drive device in the above embodiment includes a rotating motor, a linear motor, a linear motor, a single-axis robot, an electric device such as a multi-joint robot having two or more joints, an air cylinder, a hydraulic cylinder, and a rodless robot. Actuators such as cylinders and rotary cylinders can be used, and a direct or indirect combination thereof can also be used.
In the above embodiments, when a rotating member such as a roller is employed, a drive device for rotating the rotating member may be provided, or the surface of the rotating member or the rotating member itself may be made of deformable material such as rubber or resin. It may be composed of a member, the surface of the rotating member or the rotating member itself may be composed of a member that does not deform, or other members such as a shaft or a blade that rotates or does not rotate instead of the roller. Alternatively, if a pressing means such as a pressing roller or a pressing head or a pressing member that presses an object to be pressed is adopted, a roller, a round bar, a blade can be used instead of or in combination with the above examples A member such as material, rubber, resin, sponge, etc. may be adopted, or a configuration in which pressure is applied by blowing gas such as air or gas may be adopted. It may be configured with a member that does not deform. A member such as a plate-shaped member, a round bar, or a roller may be adopted instead of or in combination with the object, and the object to be peeled may be configured with a deformable member such as rubber or resin, or may be deformed. It may be composed of a member that does not support, or if a member that supports (holds) a supported member (held member) such as a supporting (holding) means or a supporting (holding) member is adopted, a mechanical chuck or a chuck cylinder A structure that supports (holds) the supported member by gripping means such as, Coulomb force, adhesive (adhesive sheet, adhesive tape), adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, driving equipment, etc. may be adopted, or if a cutting means or cutting member that cuts the member to be cut or forms a cut or a cutting line in the member to be cut is adopted, instead of the above examples Alternatively, a cutter blade, laser cutter, ion beam, thermal power, heat, water pressure, heating wire, spraying of gas or liquid, etc. can be used for cutting, or cutting can be performed by combining an appropriate driving device. Alternatively, if an urging means is employed, it may be made of a spring, rubber, resin, or the like.

EA... Sheet peeling device 10... Sheet supporting means 40... Tension applying means 50... Guide roller (guiding means)
60 Looseness eliminating means 61 Gas blowing means 62 Sheet receiving means 63 Looseness detecting means AB Adhesive sheet base material ABH Adhesive sheet base material with punching marks ABS Slack part AS Adhesive sheet

Claims (4)

A sheet peeling device for cutting out an adhesive sheet having a predetermined shape from a band-shaped adhesive sheet base attached to a sheet supporting means, and peeling off the adhesive sheet base with a cut-out mark remaining on the sheet supporting means from the sheet supporting means,
tension applying means for applying tension to the adhesive sheet base material with the punched-out mark and peeling the adhesive sheet base material with the punched-out mark from the sheet supporting means;
and a guide means for guiding the adhesive sheet base material with the punched mark,
The slack portion of the adhesive sheet base material with the cutout mark at the central portion in the width direction perpendicular to the band-shaped extending direction is biased in the direction opposite to the slackening direction, and the slackness portion is eliminated to form the adhesive sheet base material with the cutout mark. Further comprising slack elimination means for sending to the guide means ,
The sheet peeling device, wherein the slack eliminating means eliminates the slack portion of the adhesive sheet base material with the punched-out mark to which the tension is applied by the tension applying means. The slack eliminating means includes gas blowing means for blowing gas onto the slack portion, and sheet receiving means for preventing the adhesive sheet base material from loosening in the gas blowing direction of the gas blowing means. The sheet peeling device according to claim 1. The slack eliminating means includes slack detecting means for detecting the slack portion, and when the slack portion is detected by the slack detecting means, the slack portion is urged in a direction opposite to the slack direction. The sheet peeling device according to claim 1 or 2. In a sheet peeling method, an adhesive sheet having a predetermined shape is cut out from a band-shaped adhesive sheet base attached to a sheet supporting means, and the adhesive sheet base with a cutout mark remaining on the sheet supporting means is peeled off from the sheet supporting means,
a tension applying step of applying tension to the adhesive sheet base material with the punched mark and peeling the adhesive sheet base material with the punched mark from the sheet supporting means;
a guiding step of guiding the adhesive sheet base material with the punched-out mark by guiding means;
The slack portion of the adhesive sheet base material with the cutout mark at the central portion in the width direction perpendicular to the band-shaped extending direction is biased in the direction opposite to the slackening direction, and the slackness portion is eliminated to form the adhesive sheet base material with the cutout mark. further performing a slack eliminating step of sending to the guide means ;
The sheet peeling method, wherein, in the slack eliminating step, the slack portion of the adhesive sheet base material with the punched-out mark to which the tension is applied in the tension applying step is eliminated.

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