WO2020084968A1

WO2020084968A1 - Sheet application method

Info

Publication number: WO2020084968A1
Application number: PCT/JP2019/036713
Authority: WO
Inventors: 康喜中石
Original assignee: リンテック株式会社
Priority date: 2018-10-25
Filing date: 2019-09-19
Publication date: 2020-04-30
Also published as: JP2020068327A; TW202018795A

Abstract

Provided is a sheet application method with which both a first sheet and a second sheet can be applied on an adherend without a lingering impression being formed. The method involves carrying out: a first feeding step of feeding, from a rolled-up state, a first base material RS1 in which a first sheet substrate BS1 is temporarily bonded to a first peel sheet RL1; a first cutting step of forming a first cut CU1 in the first sheet substrate BS1, said first cut CU1 having a closed-loop shape, and forming a first sheet AS1 in a region partitioned with the first cut CU1, said first sheet AS1 having a prescribed shape; a first peeling step of peeling the first sheet AS1 from the first peel sheet RL1; a first application step of pressing and applying the first sheet AS1 on one surface WK1 of an adherend WK; a second feeding step of feeding, from a rolled-up state, a second base material RS2 in which a second sheet substrate BS2 is temporarily bonded to a second peel sheet RL2; a second cutting step of forming a second cut CU2 in the second sheet substrate BS2, said second cut CU2 having a closed-loop shape, and forming a second sheet AS2 in a region partitioned with the second cut CU2, said second sheet AS2 having a prescribed shape; a second peeling step of peeling the second sheet AS2 from the second peel sheet RL2; and a second application step of pressing and applying the second sheet AS2 on the first sheet AS1 applied on the adherend WK or on the other surface WK2 of the adherend WK.

Description

Sheet attachment method

The present invention relates to a sheet attaching method.

Conventionally, a sheet sticking method is known in which a sheet having a predetermined shape is formed by forming a closed loop cut into a sheet base material temporarily attached to one surface of a release sheet, and the sheet is attached to an adherend. (See, for example, Patent Document 1).

Japanese Patent Laid-Open No. 2007-165363

However, in the conventional mounting method (sheet attaching method) described in Patent Document 1, a closed-loop notch C (second notch) is formed in the tape base material TB (second sheet base material) to have a predetermined shape. Although the adhesive tape DDT (second sheet) is formed, the original located on the step of the die bonding sheet portion DS (first sheet) in the period in which the original fabric L is wound and overlapped with each other. There is a disadvantage that a push trace due to the step is formed on the anti-L, and the first sheet and the second sheet having the push trace are attached to the wafer W (adherend).

An object of the present invention is to provide a sheet sticking method capable of sticking both the first sheet and the second sheet, which are free from the imprint, to the adherend.

The present invention has adopted the configuration described in the claims.

According to the present invention, the first and second sheet base materials having no steps are fed out, the first and second sheets are formed on the respective first and second sheet base materials, and the first and second sheets are covered. Since it is affixed to the adherend, it is possible to affix both the first sheet and the second sheet to the adherend, in which no pressing marks are formed even when the first and second original fabrics are fed out from the overlapping state. it can.

Explanatory drawing of the sheet sticking method which concerns on embodiment of this invention.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
The X axis, the Y axis, and the Z axis in the present embodiment are in a relationship of being orthogonal to each other, the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis orthogonal to the predetermined plane. To do. Furthermore, in the present embodiment, when viewed from the front direction in FIG. 1 parallel to the Y axis as a reference, when the direction is indicated without designating the figure, “up” is “down” in the arrow direction of the Z axis. Is the opposite direction, “left” is the arrow direction of the X axis, “right” is the opposite direction, “front” is the front direction in FIG. 1 parallel to the Y axis, and “rear” is the opposite direction.

The sheet sticking method of the present invention can be implemented by, for example, the following sheet sticking apparatus EA.
That is, the sheet sticking apparatus EA performs the first feeding step by feeding the first original fabric RS1 in which the first sheet base material BS1 is temporarily attached to the first release sheet RL1 from the overlapping state to perform the first feeding process. 10 and the first sheet base material BS1 to form the first cut CU1 in a closed loop shape, the first sheet AS1 having a predetermined shape is formed in the region partitioned by the first cut CU1, and the first sheet First cutting means 20 for performing a first cutting step of forming the first unnecessary sheet US1 in a region other than AS1 and first peeling for performing a first peeling step of peeling the first sheet AS1 from the first release sheet RL1. A first peeling plate 30 as a means, a first pressing roller 40 as a first sticking means for carrying out a first sticking step of sticking the first sheet AS1 on one surface WK1 of the adherend WK by pressing, Second stripping Second feeding means 50 for performing a second feeding step of feeding the second original fabric RS2 in which the second sheet base material BS2 is temporarily attached to the sheet RL2, and a closed loop shape on the second sheet base material BS2. The second cut CU2 is formed, the second sheet AS2 having a predetermined shape is formed in a region partitioned by the second cut CU2, and the second unnecessary sheet US2 is formed in a region other than the second sheet AS2. A second cutting means 60 for performing the second cutting step, a second peeling plate 70 as a second peeling means for performing the second peeling step of peeling the second sheet AS2 from the second release sheet RL2, and an adherend. A transport for transporting an adherend WK, which includes a second pressing roller 80 as a second sticking unit that performs a second sticking step of pressing and sticking the second sheet AS2 to the first sheet AS1 stuck to WK. Actual process It is disposed in the vicinity of the conveying means 90 for.
In the case of the present embodiment, in the second attaching step, the second sheet AS2 is pressed and attached to the first sheet AS1 attached to the adherend WK and the ring frame as the frame member, The adherend WK and the ring frame RF are integrally formed with each other via the second sheets AS1 and AS2.

The first feeding means 10 is wound around the support roller 11 that supports the first original fabric RS1 that has been wound by being wound, the guide roller 12 that guides the first original fabric RS1, and the first unnecessary sheet US1. While the automatic operation of the peeling roller 13 and the sheet sticking apparatus EA is being performed, a predetermined tension is constantly applied to the first unnecessary sheet US1 existing between the peeling roller 13 and the first unnecessary sheet US1. And a drive roller 15 which is supported by an output shaft (not shown) of a rotation motor 15A as a drive device and which sandwiches the first release sheet RL1 with a pinch roller 15B. While the sheet sticking apparatus EA is being automatically supported by the output shaft of the driving device, the first release sheet RL1 existing between the pinch roller 15B and the pinch roller 15B is always located. And the tension, and a collection roller 16 serving as recovery means for recovering the first release sheet RL1.

The first cutting means 20 includes a die cutting roller 22 supported by an output shaft 21A of a rotary motor 21 as a driving device, a cutting blade 23 as a flat loop-shaped cutting member supported by a circumferential surface 22A of the die cutting roller 22, The die-cut roller 22 and the anvil roller 24 that rotates in synchronization with each other are provided.

The second feeding means 50 is wound around the support roller 51 that supports the second original fabric RS2 that has been wound up by being wound, the guide roller 52 that guides the second original fabric RS2, and the second unnecessary sheet US2. While the automatic operation of the peeling roller 53 and the sheet sticking apparatus EA is performed, a predetermined tension is constantly applied to the second unnecessary sheet US2 existing between the peeling roller 53 and the second unnecessary sheet US2. And a drive roller 55 which is supported by an output shaft (not shown) of a rotation motor 55A as a driving device and which sandwiches the second release sheet RL2 with a pinch roller 55B. The second peeling sheet RL2 existing between the pinch roller 55B and the pinch roller 55B is always supported while the sheet sticking apparatus EA is automatically operated while being supported by the output shaft of the driving device. And the tension, and a collection roller 56 serving as recovery means for recovering the second release sheet RL2.

The second cutting means 60 includes a die cutting roller 62 supported by an output shaft 61A of a rotary motor 61 as a driving device, a cutting blade 63 as a flat loop-shaped cutting member supported by a circumferential surface 62A of the die cutting roller 62, The die-cut roller 62 and the anvil roller 64 that rotates synchronously are provided.

The carrying means 90 includes a holding table 92 which is supported by a slider 91A of a linear motor 91 as a driving device and has a holding surface 92A which can be held by suction by a depressurizing means (holding means) such as a depressurizing pump or a vacuum ejector (not shown). ing.

The sheet sticking method of the present invention performed by the above sheet sticking apparatus EA will be described.
First, with respect to the sheet sticking apparatus EA in which each member is arranged at the initial position shown by the solid line in FIG. 1 (A), the user of the sheet sticking apparatus EA (hereinafter, simply referred to as “user”) is as shown in FIG. After setting the first and second originals RS1 and RS2, the operation start signal is input through an operation means (not shown) such as an operation panel or a personal computer. Then, the first and second feeding means 10 and 50 and the first and second cutting means 20 and 60 drive the

rotation motors

15A, 55A and 21, 61 to rotate the die-

cut rollers

22 and 62, respectively. While forming the first and second cuts CU1 and CU2 on the second sheet base materials BS1 and BS2 to form the first and second sheets AS1 and AS2 and the first and second unnecessary sheets US1 and US2, The first and second original fabrics RS1 and RS2 are fed out. At this time, the first and second unnecessary sheets US1 and US2 are peeled from the first and second peeling sheets RL1 and RL2 by the

peeling rollers

13 and 53, and wound around the unnecessary

sheet collecting rollers

14 and 54 to be collected. (The same applies hereafter). Next, as shown in FIG. 1, the leading end portions of the first and second sheets AS1 and AS2 in the feeding direction are the first and second release sheets at the

release edges

30A and 70A of the first and

second release plates

30 and 70. When the RL1 and RL2 are separated by a predetermined length, the first and second feeding means 10 and 50 and the first and second cutting means 20 and 60 stop the driving of the

rotation motors

15A, 55A and 21, 61. .

After that, as shown in FIG. 1, a user of the sheet sticking apparatus EA (hereinafter simply referred to as “user”) or an unillustrated conveying means such as an articulated robot or a belt conveyor is placed inside the opening RF1 of the ring frame RF. When the adherends WK are placed on the holding table 92 so that the adherends WK are positioned, the transporting means 90 drives the depressurizing means (not shown) to hold the ring frame RF and the adherend WK by suction on the holding surface 92A. Start. Next, when the transporting means 90 drives the linear motor 91 to move the holding table 92 to the left and the adherend WK reaches a predetermined position with respect to the first peeling plate 30, the first feeding means 10 and the first feeding means 10 The cutting means 20 drives the

rotation motors

15A and 21 to form a new first cut CU1 in the first sheet base material BS1 and feeds the first original fabric RS1 in accordance with the moving speed of the holding table 92. As a result, the first sheet AS1 is peeled from the first release sheet RL1, and the first sheet AS1 peeled from the first release sheet RL1 is moved by the first pressing roller 40 as shown by the chain double-dashed line in FIG. It is pressed and attached to the adherend WK. Then, when the leading end portion in the feeding direction of the next first sheet AS1 next to the leading first sheet AS1 is peeled by the peeling edge 30A of the first peeling plate 30 for a predetermined length, the first feeding means 10 and the first cutting device. The means 20 stops driving the

rotation motors

15A and 21.

Next, when the holding table 92 continues to be moved leftward by the carrying means 90 and the ring frame RF reaches a predetermined position with respect to the second peeling plate 70, the second feeding means 50 and the second cutting means 60 rotate. The

motors

55A and 61 are driven to form a new second cut CU2 in the second sheet base material BS2, and the second original fabric RS2 is fed out in accordance with the moving speed of the holding table 92. As a result, the second sheet AS2 is peeled off from the second release sheet RL2, and the second sheet AS2 peeled off from the second release sheet RL2 is moved by the second pressing roller 80 as indicated by the chain double-dashed line in FIG. The ring frame RF and the first sheet AS1 are pressed and attached to form an integrated article UP. After that, when the front end portion of the second sheet AS2 next to the first second sheet AS2 in the feeding direction is peeled by the peeling edge 70A of the second peeling plate 70 for a predetermined length, the second feeding means 50 and the second cutting device. The means 60 stops driving the

rotation motors

55A and 61.

Next, when the entire second sheet AS2 is attached to the ring frame RF and the holding table 92 reaches a predetermined position on the left side of the second pressing roller 80, the transporting means 90 stops driving the linear motor 91, and then is not shown. The driving of the pressure reducing means is stopped, and the suction holding of the ring frame RF and the adherend WK on the holding surface 92A is released. When the user or the transporting means (not shown) transports the integrated article UP to the next step, the transporting means 90 drives the linear motor 91 to return the holding table 92 to the initial position, and thereafter, the same operation as described above is repeated.

According to the above-described embodiment, the first and second sheet base materials BS1 and BS2 having no step are fed out, and the first and second cut CU1 are respectively provided to the first and second sheet base materials BS1 and BS2. , CU2 to form the first and second sheets AS1 and AS2, and the first and second sheets AS1 and AS2 are attached to the adherend WK, so that the first and second original fabrics RS1 and RS2 are It is possible to attach both the first sheet AS1 and the second sheet AS2, which do not form a push trace even when they are fed out from the overlapping state, to the adherend WK.

The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions or steps described for the means and steps, let alone the constituents of one embodiment shown in the above-mentioned embodiment. The process is not limited at all. For example, if the first feeding step is a step capable of feeding the first original sheet in which the first sheet base material is temporarily attached to the first release sheet from the state of being overlapped, in view of the technical common sense at the time of filing the application. In addition, there is no limitation as long as it is within the technical scope (other means and steps are the same).

The first and second feeding steps may be a step of feeding the first and second original fabrics RS1 and RS2 from a state in which they are folded and folded by fanfold folding, or a plurality of first and second original fabrics RS1 and RS2. May be unrolled from the stacked state by stacking each of the first and second release sheets RL1 and RL2 and the first and second unnecessary sheets US1 and US2 without winding, for example, a fan. It may be a process of collecting by folding or folding with a shredder or the like, or may be a process of simply collecting and collecting without winding or fan-folding. It may be a step in which the first and second unnecessary sheets US1 and US2 are not peeled from the second release sheets RL1 and RL2.

In the first and second cutting steps, the first and second cuts CU1 and CU2 are formed in the first and second sheet base materials BS1 and BS2 along the entire width in the short width direction. The areas partitioned by the included CU1 and CU2 may be the first and second sheets AS1 and AS2, and the other areas may be the first and second unnecessary sheets US1 and US2, or the first and second original sheets RS1 and RS2. The cutting member may be moved without moving or while being moved to form the first and second cuts CU1 and CU2 in the first and second sheet base materials BS1 and BS2. , A so-called flat blade as a cutting member that approaches and separates from the second sheet base materials BS1 and BS2 to form the first and second cuts CU1 and CU2 in the first and second sheet base materials BS1 and BS2. Can be attached to or detached from the die-

cut rollers

22 and 62 Or

non-removable cutting blades

23 and 63, first, the first to the second sheet base BS1, BS2, it is also possible to form the second cut CU1, CU2.

In the first and second attaching steps, the first and second

pressing rollers

40, 80 are separated from and close to the adherend WK so as to prevent the adherend WK from being stressed or damaged. The first and second sheets AS1 and AS2 may be attached to the adherend WK, or instead of the first and second

pressing rollers

40 and 80, they are supported by the output shaft of a linear motion motor as a driving device. The first and second sheets AS1 and AS2 are held by a holding member that can be sucked and held by a pressure reducing means (not shown) such as a pressure reducing pump or a vacuum ejector, and the first and second sheets AS1 and AS2 held by the holding members are held. It is also possible to press and attach to the adherend WK.

In the carrying step, the first and second feeding means 10, 50 and the first and second sticking means are moved to move the adherend WK first or not while the adherend WK is moved or not moved. The second sheets AS1 and AS2 may be attached, the adherend WK, the ring frame RF, or the like may not be adsorbed and held by the holding table 92, or the frame member may be eliminated to hold only the adherend WK. Alternatively, when carrying out the carrying step with another device, the carrying step may not be carried out in the sheet sticking method of the present invention.

The sheet attaching method of the present invention is not limited to the method of forming the integrated article UP, and for example, the first sheet AS1 and the second sheet AS2 may be attached only to the adherend WK, or one of the adherends WK The first sheet AS1 may be attached to the surface WK1 and the second sheet AS2 may be attached to the other surface WK2 of the adherend WK.
The first and second release sheets RL1 and RL2 and the first and second sheet base materials BS1 and BS2 may be strip-shaped or may be single-wafer.
The frame member may or may not be annular.
The sheet sticking method of the present invention may be carried out by a device other than the sheet sticking device EA or manually.

The materials, types, shapes, etc. of the first and second sheets AS1, AS2 and the adherend WK in the present invention are not particularly limited. For example, the first and second sheets AS1 and AS2 may have a circular shape, an elliptical shape, a polygonal shape such as a triangle or a quadrangle, or any other shape, and may have a pressure-sensitive adhesive property, a heat-sensitive adhesive property, or the like. In the case of the heat-sensitive adhesive first and second sheets AS1 and AS2, heating means such as an appropriate coil heater for heating the first and second sheets AS1 and AS2 or a heating side of a heat pipe. It may be adhered by an appropriate method such as providing. Further, such first and second sheets AS1 and AS2 are, for example, a single layer having only an adhesive layer, one having an intermediate layer between the base material and the adhesive layer, and a cover on the upper surface of the base material. It may have three or more layers, such as a layer, or a so-called double-sided adhesive sheet capable of peeling the base material from the adhesive layer. It may have an intermediate layer, or may have a single layer or multiple layers without an intermediate layer. Examples of the adherend WK include foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit boards, information recording boards such as optical disks, glass plates, steel plates, pottery, wooden boards or resins. It may be a simple substance or a composite formed by two or more of them, and members and articles of any form can be targeted. Note that the first and second sheets AS1 and AS2 are changed to those that are read in a functional and practical manner, and, for example, information description labels, decorative labels, protective sheets, dicing tapes, die attach films, die bonding It may be a tape, an arbitrary sheet such as a recording layer forming resin sheet, a film, a tape or the like.

The drive device in the above-described embodiment includes a rotary motor, a linear motion motor, a linear motor, a single-axis robot, an electric device such as a multi-joint robot having joints of two or more axes, an air cylinder, a hydraulic cylinder, and a rod. Actuators such as a pressure cylinder and a rotary cylinder can be adopted, and a combination of them, either directly or indirectly, can also be adopted.
When a rotary member such as a roller is adopted in the above-described embodiment, a driving device for rotationally driving the rotary member may be provided, and the surface of the rotary member or the rotary member itself may be deformed by rubber or resin. It may be configured by a member, the surface of the rotating member or the rotating member itself may not be deformed, or other members such as a shaft or a blade that rotates or does not rotate may be used instead of the roller. Alternatively, when a member that presses an object to be pressed such as a pressing unit such as a pressing roller or a pressing head or a pressing member is adopted, a roller, a round bar, or a blade may be used instead of or in combination with the one exemplified above. A member such as material, rubber, resin, sponge or the like may be adopted, or a structure of pressing by blowing gas such as atmosphere or gas may be adopted. Or a member that does not deform, and a peeling means such as a peeling plate or a peeling roller or a peeling member that peels off an object to be peeled is used as an example. A member such as a plate-shaped member, a round bar, or a roller may be adopted instead of or in combination with the member, or the member to be peeled off may be formed of a deformable member such as rubber or resin, or may be deformed. A mechanical chuck or a chuck cylinder may be used if a member that supports (holds) a supported member (holding member) such as a supporting (holding) means or a supporting (holding) member is adopted. A structure for supporting (holding) a supported member with a gripping means such as Coulomb force, adhesive (adhesive sheet, adhesive tape), adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, drive equipment, etc. May be adopted or cutting When cutting a member to be cut such as a step or a cutting member or forming a cut or a cutting line on the member to be cut is adopted, instead of or in combination with those exemplified above, a cutter blade, a laser Use a cutter, ion beam, thermal power, heat, water pressure, heating wire, spray of gas or liquid, etc., or move by using a combination of appropriate drive equipment to cut. You may choose

AS1 ... 1st sheet AS2 ... 2nd sheet BS1 ... 1st sheet base material BS2 ... 2nd sheet base material CU1 ... 1st cut CU2 ... 2nd cut RL1 ... 1st peeling sheet RL2 ... 2nd peeling sheet RS1 ... 1st original fabric RS2 ... 2nd original fabric WK ... Adherend WK1 ... One side WK2 ... The other side

Claims

A first feeding step of feeding out a first original sheet in which a first sheet base material is temporarily attached to a first release sheet from an overlapping state;
A first cutting step of forming a closed loop-shaped first cut in the first sheet base material, and forming a first sheet having a predetermined shape in a region partitioned by the first cut;
A first peeling step of peeling the first sheet from the first release sheet,
A first attaching step of attaching the first sheet by pressing it on one surface of an adherend;
A second feeding step of feeding out a second raw material in which the second sheet base material is temporarily attached to the second release sheet from an overlapping state;
A second cutting step of forming a closed loop-shaped second cut in the second sheet base material, and forming a second sheet having a predetermined shape in a region partitioned by the second cut;
A second peeling step of peeling the second sheet from the second release sheet;
A sheet attaching method comprising performing the first sheet attached to the adherend or a second attaching step of attaching the second sheet by pressing the second sheet on the other surface of the adherend.