JP2020047881A - Unnecessary sheet removing device and unnecessary sheet removing method - Google Patents

Unnecessary sheet removing device and unnecessary sheet removing method Download PDF

Info

Publication number
JP2020047881A
JP2020047881A JP2018177229A JP2018177229A JP2020047881A JP 2020047881 A JP2020047881 A JP 2020047881A JP 2018177229 A JP2018177229 A JP 2018177229A JP 2018177229 A JP2018177229 A JP 2018177229A JP 2020047881 A JP2020047881 A JP 2020047881A
Authority
JP
Japan
Prior art keywords
sheet
unnecessary
unnecessary sheet
collection
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2018177229A
Other languages
Japanese (ja)
Other versions
JP7364327B2 (en
Inventor
祐太 黒澤
Yuta Kurosawa
祐太 黒澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lintec Corp
Original Assignee
Lintec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lintec Corp filed Critical Lintec Corp
Priority to JP2018177229A priority Critical patent/JP7364327B2/en
Publication of JP2020047881A publication Critical patent/JP2020047881A/en
Application granted granted Critical
Publication of JP7364327B2 publication Critical patent/JP7364327B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Abstract

To provide an unnecessary sheet removing device and an unnecessary sheet removing method that can prevent unnecessary sheet collection failure as much as possible.SOLUTION: An unnecessary sheet removing device EA includes feeding means 10 that feeds a raw sheet RS in which a plurality of adhesive sheets AS and a strip-shaped unnecessary sheet US are temporarily attached to a strip-shaped release sheet RL, collection means 20 that separates the unnecessary sheet US from the release sheet RL and performs a predetermined collection operation to collect the unnecessary sheet US, and unnecessary sheet feeding means 30 that feeds the unnecessary sheet US in the collection means 20 direction between a peeling start part PT1 where the unnecessary sheet US is peeled from the release sheet RL and a collection start part PT2 where the unnecessary sheet US is collected by the collection means 20 in synchronization with a collection operation of the collection means 20.SELECTED DRAWING: Figure 1

Description

本発明は、不要シート除去装置および不要シート除去方法に関する。   The present invention relates to an unnecessary sheet removing apparatus and an unnecessary sheet removing method.

従来、複数の接着シートと帯状の不要シートとが帯状の剥離シートに仮着された原反から、当該不要シートを剥離して回収する装置が知られている(例えば、特許文献1参照)。   2. Description of the Related Art Conventionally, there has been known an apparatus that peels and collects an unnecessary sheet from a raw material in which a plurality of adhesive sheets and a strip-shaped unnecessary sheet are temporarily attached to a strip-shaped release sheet (for example, see Patent Document 1).

特開2008−55661号公報JP 2008-55661 A

しかしながら、特許文献1に記載された連続ラベル製造装置11(不要シート除去装置)では、ラベル連続体12(原反)から剥離したラベルカス21A(不要シート)をカス巻取ローラ18(回収手段)で引っ張りながら回収するため、剥離紙23(剥離シート)から不要シートが剥離される剥離開始部と、回収手段で不要シートが回収される回収開始部との間に位置する支持なし不要シート部分が回収手段の張力によって切断され、不要シートの回収不良が生じるという不都合がある。このような不都合は、不要シートが軟弱または脆弱であったり、幅が細かったりした場合等において顕著化する。   However, in the continuous label manufacturing apparatus 11 (unnecessary sheet removing apparatus) described in Patent Literature 1, the label waste 21A (unnecessary sheet) peeled from the label continuous body 12 (raw material) is removed by the waste take-up roller 18 (recovery means). Since the sheet is collected while being pulled, the unsupported unnecessary sheet portion located between the separation start portion where the unnecessary sheet is separated from the release paper 23 (release sheet) and the collection start portion where the unnecessary sheet is collected by the collection unit is collected. There is an inconvenience that the sheet is cut by the tension of the unit, and a collection failure of the unnecessary sheet occurs. Such inconvenience becomes remarkable when the unnecessary sheet is soft or fragile, or when the width is small.

本発明の目的は、不要シートの回収不良を極力防止することができる不要シート除去装置および不要シート除去方法を提供することにある。   An object of the present invention is to provide an unnecessary sheet removing apparatus and an unnecessary sheet removing method that can minimize the collection failure of unnecessary sheets.

本発明は、請求項に記載した構成を採用した。   The present invention has adopted the configuration described in the claims.

本発明によれば、回収手段の回収動作に同期して不要シートを回収手段方向に送るので、剥離開始部と回収開始部との間に位置する支持なし不要シート部分が回収手段の張力によって切断されることが極力抑制され、不要シートの回収不良を極力防止することができる。
また、不要シートを挟み込んで湾曲させる複数のローラ部材や、プーリに掛け回されたベルト部材によって不要シートを回収手段方向に送るようにすれば、支持なし不要シート部分に接触する領域を多くして、当該支持なし不要シート部分を回収手段方向に送ることができる。
According to the present invention, since the unnecessary sheet is sent in the direction of the collecting means in synchronization with the collecting operation of the collecting means, the unsupported unnecessary sheet portion located between the peeling start portion and the collecting start portion is cut by the tension of the collecting means. Is prevented as much as possible, and defective collection of unnecessary sheets can be prevented as much as possible.
In addition, if the unnecessary sheets are sent in the direction of the collecting means by a plurality of roller members that sandwich and bend the unnecessary sheets and a belt member that is wrapped around a pulley, the area in contact with the unsupported unnecessary sheet portion is increased. In addition, the unsupported unnecessary sheet portion can be sent toward the collection unit.

本発明の一実施形態に係る不要シート除去装置の説明図。FIG. 1 is an explanatory diagram of an unnecessary sheet removing device according to an embodiment of the present invention.

以下、本発明の一実施形態を図面に基づいて説明する。
なお、本実施形態におけるX軸、Y軸、Z軸は、それぞれが直交する関係にあり、X軸およびY軸は、所定平面内の軸とし、Z軸は、前記所定平面に直交する軸とする。さらに、本実施形態では、Y軸と平行な図1の手前方向から観た場合を基準とし、方向を示した場合、「上」がZ軸の矢印方向で「下」がその逆方向、「左」がX軸の矢印方向で「右」がその逆方向、「前」がY軸と平行な図1中手前方向で「後」がその逆方向とする。
Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
In this embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other. The X axis and the Y axis are axes within a predetermined plane, and the Z axis is an axis orthogonal to the predetermined plane. I do. Furthermore, in the present embodiment, based on the case of viewing from the near side of FIG. 1 parallel to the Y axis, when the direction is indicated, “up” is the arrow direction of the Z axis, “down” is the opposite direction, The left is the direction of the arrow on the X axis, the right is the opposite direction, the front is the front direction in FIG. 1 parallel to the Y axis, and the rear is the opposite direction.

図1において、不要シート除去装置EAは、複数の接着シートASと帯状の不要シートUSとが帯状の剥離シートRLに仮着された原反RSを繰り出す繰出手段10と、剥離シートRLから不要シートUSを剥離し、所定の回収動作を行って当該不要シートUSを回収する回収手段20と、剥離シートRLから不要シートUSが剥離される剥離開始部PT1と、回収手段20で不要シートUSが回収される回収開始部PT2との間で、回収手段20の回収動作に同期して不要シートUSを回収手段20方向に送る不要シート送り手段30とを備え、被着体としての半導体ウエハ(以下、単に「ウエハ」ともいう)WFに接着シートASを押圧して貼付する押圧手段40と、ウエハWFを支持する支持手段50とでシート貼付装置EA1を形成している。   In FIG. 1, an unnecessary sheet removing device EA includes a feeding unit 10 that feeds out a raw sheet RS in which a plurality of adhesive sheets AS and a strip-shaped unnecessary sheet US are temporarily attached to a strip-shaped release sheet RL, and an unnecessary sheet from the release sheet RL. The collecting unit 20 that separates the US and performs a predetermined collecting operation to collect the unnecessary sheet US, the separation start part PT1 where the unnecessary sheet US is separated from the separation sheet RL, and the collecting unit 20 collects the unnecessary sheet US An unnecessary sheet feeding means 30 for sending an unnecessary sheet US toward the collection means 20 in synchronization with the collection operation of the collection means 20 between the collection start part PT2 and the semiconductor wafer (hereinafter, referred to as an adherend). A sheet sticking apparatus EA1 is formed by a pressing means 40 for pressing and bonding the adhesive sheet AS to the WF and a supporting means 50 for supporting the wafer WF. To have.

繰出手段10は、剥離シートRLに帯状の接着シート基材BSが仮着され、当該接着シート基材BS上にカバーシートCSが仮着された接着シート積層体RS1を支持する支持ローラ11と、接着シート積層体RS1等を案内する第1〜第4ガイドローラ12A〜12Dと、第2ガイドローラ12Bに掛け回されて接着シート基材BSから剥離されたカバーシートCSに、常に所定の張力を付与して当該カバーシートCSを巻回して回収するカバーシート回収ローラ13と、接着シート基材BSに閉ループ状の切込CUを形成し、当該切込CUの内側に位置する接着シートASと、当該切込CUの外側に位置する不要シートUSとを形成する切断手段14と、原反RSに繰出力を付与する繰出力付与手段15とを備え、原反RSを繰り出す構成となっている。
切断手段14は、駆動機器としての回動モータ14Aの出力軸14Bに支持され、円周面に平ループ状の切断部材としての切断刃14Cが設けられたダイカットローラ14Dと、ダイカットローラ14Dと同期回転するアンビルローラ14Eとを備えている。
繰出力付与手段15は、駆動機器としてのリニアモータ15Aのスライダ15Bに支持された支持プレート15Cと、支持プレート15Cに支持された駆動機器としての回動モータ15Dと、回動モータ15Dの図示しない出力軸に支持され、ピンチローラ15Eとで剥離シートRLを挟み込む駆動ローラ15Fと、ピンチローラ15Eとの間に存在する剥離シートRLに、常に所定の張力を付与して当該剥離シートRLを巻回して回収する剥離シート回収ローラ15Gとを備えている。
The feeding means 10 includes a support roller 11 that supports an adhesive sheet laminate RS1 in which a strip-shaped adhesive sheet base material BS is temporarily attached to the release sheet RL and a cover sheet CS is temporarily attached on the adhesive sheet base material BS. A predetermined tension is always applied to the first to fourth guide rollers 12A to 12D that guide the adhesive sheet laminate RS1 and the like, and the cover sheet CS that is wrapped around the second guide roller 12B and separated from the adhesive sheet base material BS. A cover sheet collecting roller 13 that applies and winds and collects the cover sheet CS, an adhesive sheet AS that forms a closed loop cut CU in the adhesive sheet base material BS, and is located inside the cut CU. A cutting unit 14 for forming an unnecessary sheet US located outside the cut CU and a repetitive output applying unit 15 for applying repetitive output to the raw RS are provided to feed the raw RS. It has become.
The cutting means 14 is supported by an output shaft 14B of a rotary motor 14A as a driving device, and is provided with a die-cut roller 14D provided with a cutting blade 14C as a flat loop-shaped cutting member on a circumferential surface, and is synchronized with the die-cut roller 14D. And a rotating anvil roller 14E.
The repetitive output applying means 15 includes a support plate 15C supported by a slider 15B of a linear motor 15A as a drive device, a rotation motor 15D as a drive device supported by the support plate 15C, and a rotation motor 15D (not shown). A predetermined tension is always applied to the release sheet RL between the drive roller 15F, which is supported by the output shaft and sandwiches the release sheet RL with the pinch roller 15E, and the pinch roller 15E, and the release sheet RL is wound. And a release sheet collecting roller 15G for collecting the sheet.

回収手段20は、第4ガイドローラ12Dに掛け回されて剥離シートRLから剥離された不要シートUSを巻回して回収する不要シート回収ローラ21と、駆動機器としての回動モータ22によって駆動される駆動ローラ23と、不要シートUSを間に挟んで不要シート回収ローラ21を駆動ローラ23方向に付勢し、当該不要シート回収ローラ21に不要シートUSを巻回させる付勢手段24とを備えている。
付勢手段24は、支点軸24Aに回転自在に支持され、当該支点軸24Aの反対側で不要シート回収ローラ21を回転自在に支持する回動アーム24Bと、回動アーム24Bを駆動ローラ23方向に付勢するばね24Cとを備えている。
The collection unit 20 is driven by an unnecessary sheet collection roller 21 that winds and collects the unnecessary sheet US that is wound around the fourth guide roller 12D and separated from the separation sheet RL, and a rotation motor 22 as a driving device. A drive roller 23; and urging means 24 for urging the unnecessary sheet collection roller 21 in the direction of the drive roller 23 with the unnecessary sheet US interposed therebetween, and winding the unnecessary sheet US around the unnecessary sheet collection roller 21. I have.
The urging means 24 is rotatably supported by a fulcrum shaft 24A, and rotatably supports the unnecessary sheet collection roller 21 on the opposite side of the fulcrum shaft 24A. And a spring 24C for urging the spring 24C.

不要シート送り手段30は、不要シートUSを挟み込んで当該不要シートUSを湾曲させる複数のローラ部材31と、複数のローラ部材31に回転力を付与する回転力付与手段であって駆動機器としての回動モータ32とを備え、剥離開始部PT1と回収開始部PT2との間に位置する支持なし不要シート部分US1を支持して不要シートUSを回収手段20方向に送るようになっている。なお、各ローラ部材31は、それぞれに取り付けられた図示しないプーリと、それら各プーリに掛け回された駆動力伝達手段としてのベルト33とを介して回動モータ32によって回転駆動される構成となっている。   The unnecessary sheet feeding unit 30 includes a plurality of roller members 31 that sandwiches the unnecessary sheet US to bend the unnecessary sheet US, and a rotating force applying unit that applies a rotating force to the plurality of roller members 31. A dynamic motor 32 is provided to support the unsupported unnecessary sheet portion US1 located between the peeling start portion PT1 and the collection start portion PT2 and send the unnecessary sheet US toward the collection means 20. Each of the roller members 31 is configured to be rotationally driven by a rotation motor 32 via pulleys (not shown) attached to the respective pulleys, and a belt 33 as a driving force transmitting means wound around the respective pulleys. ing.

押圧手段40は、全部が繰出手段10と共用されており、リニアモータ15A、スライダ15B、支持プレート15C、回動モータ15D、ピンチローラ15E、駆動ローラ15Fおよび剥離シート回収ローラ15Gを備えている。   The pressing means 40 is shared with the feeding means 10 and includes a linear motor 15A, a slider 15B, a support plate 15C, a rotating motor 15D, a pinch roller 15E, a driving roller 15F, and a release sheet collecting roller 15G.

支持手段50は、駆動機器としての直動モータ51と、直動モータ51の出力軸51Aに支持され、減圧ポンプや真空エジェクタ等の図示しない減圧手段(保持手段)によって吸着保持が可能な保持面52Aを有するテーブル52とを備えている。   The supporting means 50 is supported by a linear motor 51 as a driving device and an output shaft 51A of the linear motor 51, and is provided with a holding surface capable of being suction-held by a pressure reducing means (holding means) (not shown) such as a pressure reducing pump or a vacuum ejector. And a table 52 having 52A.

以上の不要シート除去装置EAを備えたシート貼付装置EA1の動作を説明する。
先ず、図1中実線で示す初期位置に各部材が配置されたシート貼付装置EA1に対し、当該シート貼付装置EA1の使用者(以下、単に「使用者」という)が接着シート積層体RS1を同図に示すようにセットし、操作パネルやパーソナルコンピュータ等の図示しない操作手段を介して自動運転開始の信号を入力する。すると、繰出手段10、回収手段20および不要シート送り手段30が回動モータ14A、15D、22、32を駆動し、接着シート積層体RS1を繰り出しつつ、ダイカットローラ14Dを回転させて接着シート基材BSに閉ループ状の切込CUを形成することにより、剥離シートRLに接着シートASと不要シートUSとが仮着された原反RSを形成し、当該原反RSを繰り出す。
The operation of the sheet sticking device EA1 including the above unnecessary sheet removing device EA will be described.
First, the user of the sheet sticking apparatus EA1 (hereinafter, simply referred to as “user”) attaches the adhesive sheet laminate RS1 to the sheet sticking apparatus EA1 in which each member is arranged at an initial position indicated by a solid line in FIG. It is set as shown in the figure, and a signal for starting automatic operation is inputted through operation means (not shown) such as an operation panel and a personal computer. Then, the feeding means 10, the collecting means 20, and the unnecessary sheet feeding means 30 drive the rotation motors 14A, 15D, 22, 32, and while feeding out the adhesive sheet laminate RS1, rotate the die cut roller 14D to rotate the adhesive sheet base material. By forming the cut CU having a closed loop shape in the BS, a material RS on which the adhesive sheet AS and the unnecessary sheet US are temporarily attached is formed on the release sheet RL, and the material RS is fed.

次いで、図1に示すように、剥離シートRLに仮着された先頭の接着シートASの繰出方向先端部が第3ガイドローラ12Cの下方所定位置に到達したことを、カメラや投影機等の撮像手段や、光学センサや超音波センサ等の各種センサ等からなる図示しないシート先端検知機器が検知すると、繰出手段10、回収手段20および不要シート送り手段30が回動モータ14A、15D、22、32の駆動を停止する。
なお、上記のようにして原反RSが繰り出されると、カバーシートCSは、第2ガイドローラ12Bで接着シート基材BSから剥離され、カバーシート回収ローラ13に巻回されて回収されるとともに、不要シートUSは、第4ガイドローラ12Dで剥離シートRLから剥離され、不要シート回収ローラ21に巻回されて回収される。
ここで、剥離シートRLから剥離された不要シートUSは、回収手段20の回収動作すなわち、不要シート回収ローラ21の回転動作に同期して回転駆動されるローラ部材31によって回収手段20方向に送られ、不要シート回収ローラ21に巻き取られる。
Next, as shown in FIG. 1, the arrival of the leading end of the first adhesive sheet AS temporarily attached to the release sheet RL in the feeding direction reaches a predetermined position below the third guide roller 12 </ b> C. When a sheet leading end detecting device (not shown) including various sensors such as an optical sensor and an ultrasonic sensor detects the feeding, the feeding unit 10, the collecting unit 20, and the unnecessary sheet feeding unit 30 rotate the rotary motors 14A, 15D, 22, 32. Stop driving.
When the raw sheet RS is fed out as described above, the cover sheet CS is separated from the adhesive sheet base material BS by the second guide roller 12B, wound around the cover sheet collecting roller 13, and collected. The unnecessary sheet US is separated from the separation sheet RL by the fourth guide roller 12D, wound around the unnecessary sheet collection roller 21, and collected.
Here, the unnecessary sheet US peeled from the release sheet RL is sent toward the collection unit 20 by the roller member 31 that is driven to rotate in synchronization with the collection operation of the collection unit 20, that is, the rotation operation of the unnecessary sheet collection roller 21. , And is wound up by the unnecessary sheet collecting roller 21.

その後、使用者または、ベルトコンベアや多関節ロボット等の図示しない搬送手段が、図1に示すように、保持面52A上にウエハWFを載置すると、支持手段50が図示しない減圧手段を駆動し、保持面52AでのウエハWFの吸着保持を開始する。次に、繰出手段10が回動モータ15Dの駆動をロックした状態でリニアモータ15Aを駆動し、図1中二点鎖線で示すように、支持プレート15Cを右方へ移動させて原反RSを繰り出す。この際も、繰出手段10、回収手段20および不要シート送り手段30が回動モータ14A、22、32を駆動し、カバーシート回収ローラ13でカバーシートCSを回収し、接着シート基材BSに切込CUを形成して原反RSを形成するとともに、ローラ部材31によって送られてくる不要シートUSを不要シート回収ローラ21で回収する。そして、先頭の接着シートASに次ぐ次の接着シートASの繰出方向先端部が第3ガイドローラ12Cの下方所定位置に到達したことを、図示しないシート先端検知機器が検知すると、繰出手段10、回収手段20および不要シート送り手段30がリニアモータ15A、回動モータ14A、22、32の駆動を停止する。   Thereafter, when a user or a transfer means (not shown) such as a belt conveyor or an articulated robot places the wafer WF on the holding surface 52A as shown in FIG. 1, the support means 50 drives the pressure reducing means (not shown). Then, the suction holding of the wafer WF on the holding surface 52A is started. Next, the linear motor 15A is driven in a state where the feeding means 10 locks the driving of the rotation motor 15D, and the support plate 15C is moved rightward as shown by a two-dot chain line in FIG. Roll out. Also at this time, the feeding means 10, the collecting means 20, and the unnecessary sheet feeding means 30 drive the rotating motors 14A, 22, 32, collect the cover sheet CS with the cover sheet collecting roller 13, and cut the adhesive sheet base material BS. An unnecessary sheet US sent by the roller member 31 is collected by the unnecessary sheet collecting roller 21 while forming the sheet CU to form the raw sheet RS. When the sheet leading end detecting device (not shown) detects that the leading end of the next adhesive sheet AS following the leading adhesive sheet AS has reached a predetermined position below the third guide roller 12C, the feeding means 10, the collecting means. The means 20 and the unnecessary sheet feeding means 30 stop driving the linear motor 15A and the rotation motors 14A, 22, 32.

次いで、支持手段50が直動モータ51を駆動し、図1中二点鎖線で示すように、テーブル52を上昇させた後、押圧手段40がリニアモータ15Aおよび回動モータ15Dを駆動し、駆動ローラ15Fを転動させて原反RSをウエハWFに押圧しながら支持プレート15Cを左方に移動させる。これにより、ウエハWFの上面に接着シートASが貼付されるとともに、当該接着シートASから剥離シートRLが剥離され、剥離された剥離シートRLが剥離シート回収ローラ15Gに回収される。その後、接着シートASから剥離シートRLが完全に剥離され、支持プレート15Cが初期位置に復帰すると、押圧手段40がリニアモータ15Aおよび回動モータ15Dの駆動を停止する。   Next, the support means 50 drives the linear motion motor 51 and raises the table 52 as shown by a two-dot chain line in FIG. 1, and then the pressing means 40 drives the linear motor 15A and the rotary motor 15D, The support plate 15C is moved to the left while rolling the roller 15F to press the material RS against the wafer WF. Thereby, the adhesive sheet AS is stuck on the upper surface of the wafer WF, the release sheet RL is peeled off from the adhesive sheet AS, and the peeled release sheet RL is collected by the release sheet collecting roller 15G. Thereafter, when the release sheet RL is completely released from the adhesive sheet AS and the support plate 15C returns to the initial position, the pressing means 40 stops driving the linear motor 15A and the rotation motor 15D.

次に、支持手段50が直動モータ51を駆動し、テーブル52を初期位置に復帰させた後、図示しない減圧手段の駆動を停止し、保持面52AでのウエハWFの吸着保持を解除する。そして、使用者または図示しない搬送手段が、保持面52A上のウエハWFを次の工程に搬送し、以降上記同様の動作が繰り返される。   Next, after the supporting means 50 drives the linear motor 51 to return the table 52 to the initial position, the driving of the pressure reducing means (not shown) is stopped, and the suction holding of the wafer WF on the holding surface 52A is released. Then, the user or a transfer unit (not shown) transfers the wafer WF on the holding surface 52A to the next step, and thereafter, the same operation as described above is repeated.

以上のような実施形態によれば、回収手段20の回収動作に同期して不要シートUSを回収手段20方向に送るので、剥離開始部PT1と回収開始部PT2との間に位置する支持なし不要シート部分US1が回収手段20の張力によって切断されることが極力抑制され、不要シートUSの回収不良を極力防止することができる。   According to the above-described embodiment, the unnecessary sheet US is sent in the direction of the collection unit 20 in synchronization with the collection operation of the collection unit 20, so that there is no need for support provided between the separation start part PT1 and the collection start part PT2. Cutting of the sheet portion US1 by the tension of the collection unit 20 is suppressed as much as possible, and collection failure of the unnecessary sheet US can be prevented as much as possible.

以上のように、本発明を実施するための最良の構成、方法等は、前記記載で開示されているが、本発明は、これに限定されるものではない。すなわち、本発明は、主に特定の実施形態に関して特に図示され、かつ説明されているが、本発明の技術的思想および目的の範囲から逸脱することなく、以上述べた実施形態に対し、形状、材質、数量、その他の詳細な構成において、当業者が様々な変形を加えることができるものである。また、上記に開示した形状、材質などを限定した記載は、本発明の理解を容易にするために例示的に記載したものであり、本発明を限定するものではないから、それらの形状、材質などの限定の一部もしくは全部の限定を外した部材の名称での記載は、本発明に含まれる。   As described above, the best configuration and method for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this. That is, although the present invention has been particularly shown and described with particular reference to particular embodiments, without departing from the spirit and scope of the invention, the shape, Those skilled in the art can make various modifications in materials, quantities, and other detailed configurations. In addition, the description in which the shapes, materials, and the like disclosed above are limited is merely an example for facilitating the understanding of the present invention, and does not limit the present invention. The description by the name of the member excluding some or all of the limitations such as is included in the present invention.

例えば、繰出手段10は、接着シート基材BSに予め切込CUが形成されることで剥離シートRLに接着シートASと不要シートUSとが仮着された原反RSを支持ローラ11で支持し、当該原反RSを繰り出してもよく、この場合、当該繰出手段10に切断手段14が備わっていてもよいし、備わっていなくてもよい。
繰出手段10は、支持プレート15Cを移動させずにまたは移動させつつ、支持ローラ11、第1〜第4ガイドローラ12A〜12D、カバーシート回収ローラ13、切断手段14等を移動させ、原反RSを繰り出してもよいし、チャックシリンダや吸着パッド等の保持手段で原反RSを保持して繰り出してもよいし、巻回することなく例えばファンフォールド折りにして支持した接着シート積層体RS1や原反RSを繰り出してもよいし、カバーシートCSや剥離シートRLを巻回することなく例えばファンフォールド折りにしたり、シュレッダ等で切り刻んだりして回収してもよいし、カバーシートCSや剥離シートRLを巻回したりファンフォールド折りにしたりすることなく単に集積して回収してもよい。
切断手段14は、接着シート積層体RS1を移動させずにまたは移動させつつ切断部材を移動させ、接着シート基材BSに切込CUを形成して原反RSを形成してもよいし、接着シート基材BSからカバーシートCSを剥離する前に当該カバーシートCSを貫通し、接着シート基材BSに切込CUを形成して原反RSを形成してもよいし、切断部材として、例えば、接着シート基材BSに離間接近することで、当該接着シート基材BSに所定形状の切込CUを形成する所謂平刃を採用してもよいし、切断刃14Cがダイカットローラ14Dに対して着脱可能でもよいし、着脱不能でもよい。
For example, the feeding means 10 supports, with the support roller 11, the raw sheet RS on which the adhesive sheet AS and the unnecessary sheet US are temporarily attached to the release sheet RL by forming the cut CU in the adhesive sheet base material BS in advance. The source RS may be fed out. In this case, the feeding means 10 may or may not be provided with the cutting means 14.
The feeding unit 10 moves the support roller 11, the first to fourth guide rollers 12A to 12D, the cover sheet collecting roller 13, the cutting unit 14, and the like without moving the support plate 15C or while moving the raw plate RS. May be fed out, may be fed out while holding the raw material RS by holding means such as a chuck cylinder or a suction pad, or may be an adhesive sheet laminate RS1 or a raw material that is supported without being wound, for example, by fanfold folding. The anti-RS may be fed out, or the cover sheet CS or the release sheet RL may be collected without being wound, for example, by fanfold folding, shredded with a shredder or the like, or may be recovered by the cover sheet CS or the release sheet RL. May be simply collected and collected without winding or fanfold folding.
The cutting means 14 may move the cutting member without moving the adhesive sheet laminate RS1 or while moving the adhesive sheet laminate RS1, form the cut CU in the adhesive sheet base material BS to form the raw material RS, or Before peeling the cover sheet CS from the sheet base material BS, the cover sheet CS may be penetrated, the cut sheet CU may be formed in the adhesive sheet base material BS to form the raw material RS, or as a cutting member, A so-called flat blade that forms a cut CU of a predetermined shape in the adhesive sheet base material BS by separating from and approaching the adhesive sheet base material BS may be employed, or the cutting blade 14C may be moved relative to the die cut roller 14D. It may be removable or non-removable.

回収手段20は、第4ガイドローラ12Dに掛け回されることなく剥離シートRLから剥離された不要シートUSを回収してもよいし、例えば、ファンフォールド折りにしたり、シュレッダ等で切り刻んだりして不要シートUSを回収してもよく、これらの場合、不要シート送り手段30は、ファンフォールド折りにしたり、シュレッダ等で切り刻んだりする回収手段20の回収動作に同期して、不要シートUSを回収手段20方向に送る動作を行うように構成すればよい。
回収手段20は、駆動機器としての回動モータで不要シート回収ローラ21を駆動してもよく、この場合、回動モータ22、駆動ローラ23および付勢手段24はなくてもよい。
付勢手段24は、駆動機器としての直動モータや、駆動機器としてのリニアモータによって、不要シート回収ローラ21を駆動ローラ23方向に付勢してもよいし、不要シート回収ローラ21を上下方向に自由移動可能に構成し、不要シート回収ローラ21の自重で当該不要シート回収ローラ21を駆動ローラ23方向に付勢してもよい。
The collecting means 20 may collect the unnecessary sheet US peeled from the peeling sheet RL without being wrapped around the fourth guide roller 12D. For example, the collecting means 20 may be folded in a fan fold or cut with a shredder or the like. The unnecessary sheet US may be collected. In these cases, the unnecessary sheet feeding unit 30 collects the unnecessary sheet US in synchronization with the collection operation of the collection unit 20 that folds the fan fold or cuts it with a shredder or the like. What is necessary is just to comprise so that the operation | movement which sends to 20 directions may be performed.
The collection unit 20 may drive the unnecessary sheet collection roller 21 with a rotation motor as a driving device. In this case, the rotation motor 22, the driving roller 23, and the urging unit 24 may be omitted.
The urging means 24 may urge the unnecessary sheet collection roller 21 in the direction of the driving roller 23 by a linear motor as a driving device or a linear motor as a driving device. The unnecessary sheet collecting roller 21 may be urged toward the drive roller 23 by its own weight.

不要シート送り手段30は、ローラ部材31を不要シートUSから離間接近させる駆動機器を備えていてもよいし、不要シートUSにおける剥離シートRLに仮着していた面のみに当接し、回収手段20の回収動作に同期して不要シートUSを回収手段20方向に送る構成でもよいし、不要シートUSにおける剥離シートRLに仮着していなかった面のみに当接し、回収手段20の回収動作に同期して不要シートUSを回収手段20方向に送る構成でもよい。
不要シート送り手段30は、例えば、図1中左上に示した符号AAの図のように、駆動機器としての回動モータ34Aによって駆動される第1プーリ34と、自由回転可能な第2プーリ35と、第1プーリ34および第2プーリ35に掛け回されたベルト部材36とを備えていてもよい。この場合も前記実施形態と同様に、ベルト部材36で不要シートUSを挟み込んで当該不要シートUSを回収手段20方向に送るように構成してもよいし、不要シートUSにおける剥離シートRLに仮着していなかった面のみに当接し、回収手段20の回収動作に同期して不要シートUSを当該回収手段20方向に送る構成としてもよいし、図1中符号AAの図に二点鎖線で示すように、ベルト部材36を多孔質部材で構成し、減圧ポンプや真空エジェクタ等の図示しない減圧手段によって吸引が可能な吸引面37Aを有する吸引チャンバ37を採用し、ベルト部材36で不要シートUSを吸着保持しながら、当該不要シートUSを回収手段20方向に送るように構成してもよいし、前記実施形態で示した不要シート送り手段30と、図1中符号AAの図に示した不要シート送り手段30とを併用してもよい。
ローラ部材31は、不要シートUSの幅と同じ長さであってもよいし、不要シートUSの幅の長さよりも長くてもよいし、短くてもよい。
回転力付与手段は、全てのローラ部材31を個別に回転駆動させる駆動機器としての回動モータを採用してもよいし、前記実施形態の態様において、不要シートUSにおける剥離シートRLに仮着していた面側に当接するローラ部材31のみに回転力を付与してもよいし、不要シートUSにおける剥離シートRLに仮着していなかった面側に当接するローラ部材31のみに回転力を付与してもよい。
駆動力伝達手段は、ギヤやチェーン等で構成してもよい。
The unnecessary sheet feeding means 30 may include a driving device for moving the roller member 31 away from and approaching the unnecessary sheet US, or may contact only the surface of the unnecessary sheet US temporarily attached to the release sheet RL, and The unnecessary sheet US may be sent in the direction of the collecting unit 20 in synchronization with the collecting operation of the collecting unit 20, or only the surface of the unnecessary sheet US that has not been temporarily attached to the release sheet RL may be contacted and synchronized with the collecting operation of the collecting unit 20. Then, the unnecessary sheet US may be sent in the direction of the collection unit 20.
The unnecessary sheet feeding means 30 includes, for example, a first pulley 34 driven by a rotating motor 34A as a driving device and a second pulley 35 which can rotate freely, as shown in the figure of AA shown at the upper left in FIG. And a belt member 36 wrapped around the first pulley 34 and the second pulley 35. In this case, similarly to the above-described embodiment, the unnecessary sheet US may be sandwiched by the belt member 36 and the unnecessary sheet US may be sent to the collection unit 20 or may be temporarily attached to the release sheet RL of the unnecessary sheet US. The unnecessary sheet US may be sent in the direction of the collection unit 20 in synchronization with the collection operation of the collection unit 20 by contacting only the surface that has not been processed, or as indicated by a two-dot chain line in FIG. As described above, the belt member 36 is formed of a porous member, and a suction chamber 37 having a suction surface 37A that can be suctioned by a pressure reducing means (not shown) such as a pressure reducing pump or a vacuum ejector is used. The unnecessary sheet US may be sent toward the collection means 20 while being suction-held, or the unnecessary sheet feeding means 30 shown in the above-described embodiment and the unnecessary sheet feeding means 30 in FIG. It may be used in combination with unnecessary sheet feeding means 30 shown in figure No. AA.
The roller member 31 may have the same length as the width of the unnecessary sheet US, or may be longer or shorter than the width of the unnecessary sheet US.
The rotating force applying means may employ a rotating motor as a driving device for individually rotating and driving all the roller members 31. In the embodiment of the embodiment, the rotating force applying means temporarily attaches to the release sheet RL of the unnecessary sheet US. The rotational force may be applied only to the roller member 31 that comes into contact with the surface side that has been contacted, or the rotational force may be applied only to the roller member 31 that comes into contact with the surface side of the unnecessary sheet US that has not been temporarily attached to the release sheet RL. May be.
The driving force transmitting means may be constituted by a gear, a chain, or the like.

押圧手段40は、リニアモータ15A、スライダ15B、支持プレート15C、回動モータ15D、ピンチローラ15E、駆動ローラ15Fおよび剥離シート回収ローラ15Gの一部または全部に代えて、繰出手段10と共用することのない部材を採用してもよいし、駆動機器としての直動モータの出力軸に支持された押圧部材で剥離シートRL上から原反RSをウエハWFに押圧し、接着シートASを当該ウエハWFに貼付してもよいし、駆動機器としての直動モータの出力軸に支持され、減圧ポンプや真空エジェクタ等の減圧手段によって吸着保持が可能な保持部材で剥離シートRLを保持し、当該保持部材で保持した剥離シートRLを接着シートASから離間させて剥離する構成を採用してもよい。   The pressing means 40 is shared with the feeding means 10 instead of part or all of the linear motor 15A, the slider 15B, the support plate 15C, the rotating motor 15D, the pinch roller 15E, the driving roller 15F, and the release sheet collecting roller 15G. May be employed, or the raw sheet RS may be pressed against the wafer WF from above the release sheet RL with a pressing member supported on the output shaft of a linear motor as a driving device, and the adhesive sheet AS may be used as the wafer WF. Or holding the release sheet RL with a holding member supported by an output shaft of a linear motion motor as a driving device and capable of being suction-held by a decompression means such as a decompression pump or a vacuum ejector. A configuration may be adopted in which the release sheet RL held in the step is separated from the adhesive sheet AS and separated.

支持手段50は、保持手段がなくてもよいし、テーブル52を上昇させた際、ウエハWFを接着シートASに当接させてもよいし、当接させなくてもよいし、他の装置でウエハWFを支持する場合、シート貼付装置EA1に備わっていなくてもよい。   The supporting means 50 may not have the holding means, may make the wafer WF abut on the adhesive sheet AS when the table 52 is raised, may or may not make the wafer WF abut, or may be provided by another device. When supporting the wafer WF, the sheet pasting device EA1 may not be provided.

不要シート除去装置EAは、シート貼付装置EA1以外に、例えば、帯状の剥離シートRLに所定の間隔を隔てて複数の接着シートASが仮着された原反RSであって、不要シートUSのない原反RSを形成する原反製造装置や、接着シートASに所定の印刷や印字を行う印刷機械やプリンタ等、どのようなものに採用されてもよい。
不要シートUSは、剥離シートRLにおける接着シートASが仮着された面に仮着されていてもよいし、剥離シートRLにおける接着シートASが仮着されていない面に仮着されていてもよいし、剥離シートRLにおける接着シートASが仮着された面に仮着されている場合、接着シートASと重ならないように当該接着シートASに隣接して仮着されていてもよいし、接着シートASと重ならないように当該接着シートASから離れるようにして仮着されていてもよいし、接着シートASと重なるように仮着されていてもよい。
The unnecessary sheet removing apparatus EA is, for example, a raw sheet RS in which a plurality of adhesive sheets AS are temporarily attached at predetermined intervals to a strip-shaped release sheet RL, in addition to the sheet attaching apparatus EA1, and there is no unnecessary sheet US. The present invention may be applied to any material, such as a material manufacturing apparatus that forms the material RS, a printing machine or a printer that performs predetermined printing or printing on the adhesive sheet AS.
The unnecessary sheet US may be temporarily attached to the surface of the release sheet RL to which the adhesive sheet AS is temporarily attached, or may be temporarily attached to the surface of the release sheet RL to which the adhesive sheet AS is not temporarily attached. When the adhesive sheet AS of the release sheet RL is temporarily attached to the temporarily attached surface, the adhesive sheet AS may be temporarily attached adjacent to the adhesive sheet AS so as not to overlap with the adhesive sheet AS, It may be temporarily attached so as to be away from the adhesive sheet AS so as not to overlap with the AS, or may be temporarily attached so as to overlap with the adhesive sheet AS.

本発明における接着シートAS、不要シートUSおよび被着体の材質、種別、形状等は、特に限定されることはない。例えば、接着シートASは、円形、楕円形、三角形や四角形等の多角形、その他の形状であってもよいし、感圧接着性、感熱接着性等の接着形態のものであってもよく、感熱接着性の接着シートASが採用された場合は、当該接着シートASを加熱する適宜なコイルヒータやヒートパイプ等の加熱側等の加熱手段を設けるといった適宜な方法で接着されればよい。また、このような接着シートASは、例えば、接着剤層だけの単層のもの、基材と接着剤層とを有するもの、基材と接着剤層との間に中間層を有するもの等1層または2層以上のもの、更には、基材を接着剤層から剥離することのできる所謂両面接着シートのようなものであってもよく、両面接着シートは、単層又は複層の中間層を有するものや、中間層のない単層又は複層のものであってよい。また、被着体としては、例えば、食品、樹脂容器、シリコン半導体ウエハや化合物半導体ウエハ等の半導体ウエハ、回路基板、光ディスク等の情報記録基板、ガラス板、鋼板、陶器、木板または樹脂板等の単体物であってもよいし、それら2つ以上で形成された複合物であってもよく、任意の形態の部材や物品なども対象とすることができる。なお、接着シートASは、機能的、用途的な読み方に換え、例えば、情報記載用ラベル、装飾用ラベル、保護シート、ダイシングテープ、ダイアタッチフィルム、ダイボンディングテープ、記録層形成樹脂シート等の任意の形状の任意のシート、フィルム、テープ等でもよい。   The material, type, shape, and the like of the adhesive sheet AS, the unnecessary sheet US, and the adherend in the present invention are not particularly limited. For example, the adhesive sheet AS may have a circular shape, an elliptical shape, a polygonal shape such as a triangle or a quadrangle, or other shapes, or may have an adhesive form such as pressure-sensitive adhesiveness or heat-sensitive adhesiveness. When the heat-sensitive adhesive sheet AS is employed, the adhesive sheet AS may be adhered by an appropriate method such as providing an appropriate coil heater for heating the adhesive sheet AS or a heating means such as a heating side such as a heat pipe. In addition, such an adhesive sheet AS is, for example, a single layer having only an adhesive layer, a sheet having a substrate and an adhesive layer, a sheet having an intermediate layer between the substrate and the adhesive layer, and the like. Layer or two or more layers, and further, a so-called double-sided adhesive sheet capable of peeling the substrate from the adhesive layer may be used, and the double-sided adhesive sheet may be a single-layer or multilayer intermediate layer Or a single-layer or multilayer having no intermediate layer. Examples of the adherend include foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit substrates, information recording substrates such as optical disks, glass plates, steel plates, pottery, wood plates, resin plates, and the like. It may be a simple substance or a composite formed by two or more of them, and may be a member or an article of any form. In addition, the adhesive sheet AS may be replaced with a functional or application-specific reading method. Any sheet, film, tape, or the like having the shape described above may be used.

本発明における手段および工程は、それら手段および工程について説明した動作、機能または工程を果たすことができる限りなんら限定されることはなく、まして、前記実施形態で示した単なる一実施形態の構成物や工程に全く限定されることはない。例えば、繰出手段は、複数の接着シートと帯状の不要シートとが帯状の剥離シートに仮着された原反を繰り出すことが可能なものであれば、出願当初の技術常識に照らし合わせ、その技術範囲内のものであればなんら限定されることはない(他の手段および工程についての説明は省略する)。
前記実施形態における駆動機器は、回動モータ、直動モータ、リニアモータ、単軸ロボット、2軸または3軸以上の関節を備えた多関節ロボット等の電動機器、エアシリンダ、油圧シリンダ、ロッドレスシリンダ及びロータリシリンダ等のアクチュエータ等を採用することができる上、それらを直接的又は間接的に組み合せたものを採用することもできる。
前記実施形態において、ローラ等の回転部材が採用されている場合、当該回転部材を回転駆動させる駆動機器を備えてもよいし、回転部材の表面や回転部材自体をゴムや樹脂等の変形可能な部材で構成してもよいし、回転部材の表面や回転部材自体を変形しない部材で構成してもよいし、押圧ローラや押圧ヘッド等の押圧手段や押圧部材といった被押圧物を押圧するものが採用されている場合、上記で例示したものに代えてまたは併用して、ローラ、丸棒、ブレード材、ゴム、樹脂、スポンジ等の部材を採用したり、大気やガス等の気体の吹き付けにより押圧する構成を採用したりしてもよいし、押圧するものをゴムや樹脂等の変形可能な部材で構成してもよいし、変形しない部材で構成してもよいし、剥離板や剥離ローラ等の剥離手段や剥離部材といった被剥離物を剥離するものが採用されている場合、上記で例示したものに代えてまたは併用して、板状部材、丸棒、ローラ等の部材を採用してもよいし、剥離するものをゴムや樹脂等の変形可能な部材で構成してもよいし、変形しない部材で構成してもよいし、支持(保持)手段や支持(保持)部材等の被支持部材を支持または保持するものが採用されている場合、メカチャックやチャックシリンダ等の把持手段、クーロン力、接着剤(接着シート、接着テープ)、粘着剤(粘着シート、粘着テープ)、磁力、ベルヌーイ吸着、吸引吸着、駆動機器等で被支持部材を支持(保持)する構成を採用してもよいし、切断手段や切断部材等の被切断部材を切断または、被切断部材に切込や切断線を形成するものが採用されている場合、上記で例示したものに代えてまたは併用して、カッター刃、レーザカッタ、イオンビーム、火力、熱、水圧、電熱線、気体や液体等の吹付け等で切断するものを採用したり、適宜な駆動機器を組み合わせたもので切断するものを移動させて切断するようにしたりしてもよいし、付勢手段が採用されている場合、ばね、ゴム、樹脂等で構成してもよい。
The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions or steps described for the means and steps, much less the constituents of only one embodiment shown in the above embodiment and There is no limitation to the process at all. For example, if the feeding means can feed out an original sheet in which a plurality of adhesive sheets and a strip-shaped unnecessary sheet are temporarily attached to a strip-shaped release sheet, the feeding means can be compared with the common general technical knowledge at the time of filing the application. There is no limitation as long as it is within the range (the description of other means and steps is omitted).
Driving devices in the above embodiment include electric motors such as a rotary motor, a linear motion motor, a linear motor, a single-axis robot, a multi-joint robot having two or three or more joints, an air cylinder, a hydraulic cylinder, and a rodless. Actuators, such as cylinders and rotary cylinders, can be employed, and those obtained by directly or indirectly combining them can be employed.
In the embodiment, when a rotating member such as a roller is employed, a driving device for rotating the rotating member may be provided, or the surface of the rotating member or the rotating member itself may be deformable such as rubber or resin. It may be constituted by a member, may be constituted by a member that does not deform the surface of the rotating member or the rotating member itself, or may be a member that presses an object to be pressed such as pressing means such as a pressing roller or a pressing head or a pressing member. When employed, instead of or in combination with those exemplified above, a member such as a roller, a round bar, a blade material, rubber, a resin, a sponge, or the like, or pressed by blowing air or gas such as gas. Or a member to be pressed may be formed of a deformable member such as rubber or resin, or may be formed of a member that does not deform, or a peeling plate or a peeling roller. Peeling means and peeling When a member such as a member that separates an object to be separated is used, a member such as a plate member, a round bar, a roller, or the like may be used instead of or in combination with the above examples, or the member may be separated. The object may be formed of a deformable member such as rubber or resin, or may be formed of a member that does not deform, or supports or holds a supported member such as a supporting (holding) means or a supporting (holding) member. When such a device is used, gripping means such as a mechanical chuck or a chuck cylinder, Coulomb force, adhesive (adhesive sheet, adhesive tape), adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli suction, suction suction, A configuration in which a supported member is supported (held) by a driving device or the like may be employed, or a member that cuts a member to be cut such as a cutting unit or a cutting member, or forms a cut or a cutting line in the member to be cut. If employed, Instead of or in combination with those exemplified in the above, a cutter blade, a laser cutter, an ion beam, thermal power, heat, water pressure, a heating wire, or a material that is cut by spraying a gas or liquid, or the like, may be used, or an appropriate material may be used. The cutting device may be combined with a driving device to move and cut, or when a biasing unit is employed, the cutting device may be formed of a spring, rubber, resin, or the like.

EA…不要シート除去装置
10…繰出手段
20…回収手段
30…不要シート送り手段
31…ローラ部材
32…回動モータ(回転力付与手段)
34…第1プーリ
35…第2プーリ
36…ベルト部材
AS…接着シート
PT1…剥離開始部
PT2…回収開始部
RL…剥離シート
RS…原反
US…不要シート
EA: unnecessary sheet removing device 10: feeding means 20: collecting means 30: unnecessary sheet feeding means 31: roller member 32: rotating motor (rotational force applying means)
34 ... first pulley 35 ... second pulley 36 ... belt member AS ... adhesive sheet PT1 ... peeling start part PT2 ... recovery starting part RL ... peeling sheet RS ... raw material US ... unnecessary sheet

Claims (4)

複数の接着シートと帯状の不要シートとが帯状の剥離シートに仮着された原反を繰り出す繰出手段と、
前記剥離シートから前記不要シートを剥離し、所定の回収動作を行って当該不要シートを回収する回収手段と、
前記剥離シートから前記不要シートが剥離される剥離開始部と、前記回収手段で前記不要シートが回収される回収開始部との間で、前記回収手段の回収動作に同期して前記不要シートを回収手段方向に送る不要シート送り手段とを備えていることを特徴とする不要シート除去装置。
A feeding unit that feeds out an original sheet in which a plurality of adhesive sheets and a strip-shaped unnecessary sheet are temporarily attached to a strip-shaped release sheet,
A collection unit that separates the unnecessary sheet from the release sheet and performs a predetermined collection operation to collect the unnecessary sheet.
The unnecessary sheet is collected in synchronization with the collection operation of the collection unit between a separation start unit where the unnecessary sheet is separated from the release sheet and a collection start unit where the unnecessary sheet is collected by the collection unit. An unnecessary sheet feeding means for feeding the sheet in the direction of the means.
前記不要シート送り手段は、前記不要シートを挟み込んで当該不要シートを湾曲させる複数のローラ部材と、前記複数のローラ部材に回転力を付与する回転力付与手段とを備えていることを特徴とする請求項1に記載の不要シート除去装置。   The unnecessary sheet feeding unit includes a plurality of roller members that sandwich the unnecessary sheet and curve the unnecessary sheet, and a rotational force applying unit that applies a rotational force to the plurality of roller members. The unnecessary sheet removing device according to claim 1. 前記不要シート送り手段は、駆動機器によって駆動される第1プーリと、自由回転可能な第2プーリと、前記第1プーリおよび前記第2プーリに掛け回されたベルト部材とを備えていることを特徴とする請求項1または請求項2に記載の不要シート除去装置。   The unnecessary sheet feeding means includes a first pulley driven by a driving device, a second freely rotatable pulley, and a belt member wrapped around the first and second pulleys. The unnecessary sheet removing device according to claim 1 or 2, wherein 複数の接着シートと帯状の不要シートとが帯状の剥離シートに仮着された原反を繰り出す繰出工程と、
前記剥離シートから前記不要シートを剥離し、回収手段で所定の回収動作を行って当該不要シートを回収する回収工程と、
前記剥離シートから前記不要シートが剥離される剥離開始部と、前記回収手段で前記不要シートが回収される回収開始部との間で、前記回収手段の回収動作に同期して前記不要シートを回収手段方向に送る不要シート送り工程とを実施することを特徴とする不要シート除去方法。
A feeding step in which a plurality of adhesive sheets and a strip-shaped unnecessary sheet are fed out of a web temporarily attached to a strip-shaped release sheet,
A collecting step of separating the unnecessary sheet from the release sheet and performing a predetermined collecting operation with a collecting unit to collect the unnecessary sheet;
The unnecessary sheet is collected in synchronization with the collection operation of the collection unit between a separation start unit where the unnecessary sheet is separated from the release sheet and a collection start unit where the unnecessary sheet is collected by the collection unit. An unnecessary sheet feeding step of feeding the sheet in the direction of the means.
JP2018177229A 2018-09-21 2018-09-21 Unnecessary sheet removal device and unnecessary sheet removal method Active JP7364327B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2018177229A JP7364327B2 (en) 2018-09-21 2018-09-21 Unnecessary sheet removal device and unnecessary sheet removal method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018177229A JP7364327B2 (en) 2018-09-21 2018-09-21 Unnecessary sheet removal device and unnecessary sheet removal method

Publications (2)

Publication Number Publication Date
JP2020047881A true JP2020047881A (en) 2020-03-26
JP7364327B2 JP7364327B2 (en) 2023-10-18

Family

ID=69901709

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018177229A Active JP7364327B2 (en) 2018-09-21 2018-09-21 Unnecessary sheet removal device and unnecessary sheet removal method

Country Status (1)

Country Link
JP (1) JP7364327B2 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012084688A (en) * 2010-10-12 2012-04-26 Nitto Denko Corp Method of pasting double-sided adhesive tape, and device of pasting double-sided adhesive tape
JP2013074102A (en) * 2011-09-28 2013-04-22 Lintec Corp Sheet sticking apparatus and sticking method, and sheet manufacturing apparatus and manufacturing method
JP2015056613A (en) * 2013-09-13 2015-03-23 リンテック株式会社 Sheet sticking device and sticking method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012084688A (en) * 2010-10-12 2012-04-26 Nitto Denko Corp Method of pasting double-sided adhesive tape, and device of pasting double-sided adhesive tape
JP2013074102A (en) * 2011-09-28 2013-04-22 Lintec Corp Sheet sticking apparatus and sticking method, and sheet manufacturing apparatus and manufacturing method
JP2015056613A (en) * 2013-09-13 2015-03-23 リンテック株式会社 Sheet sticking device and sticking method

Also Published As

Publication number Publication date
JP7364327B2 (en) 2023-10-18

Similar Documents

Publication Publication Date Title
JP7446071B2 (en) Sheet pasting device and sheet pasting method
JP7390124B2 (en) Sheet pasting device and sheet pasting method
JP6539523B2 (en) Sheet feeding apparatus and feeding method
JP5155079B2 (en) Sheet pasting device
JP2019145569A (en) Sheet sticking device and sheet sticking method
JP5660859B2 (en) Sheet laminating apparatus and laminating method
JP2020047881A (en) Unnecessary sheet removing device and unnecessary sheet removing method
JP2019153640A (en) Sheet feeding apparatus and sheet feeding method, and sheet pasting apparatus and sheet pasting method
JP7236237B2 (en) Unnecessary sheet removing device and unnecessary sheet removing method
JP6600135B2 (en) Sheet feeding apparatus and feeding method
JP7240942B2 (en) Variable temperature device for cutting means and variable temperature method for cutting means
JP2019034744A (en) Sheet pressing equipment, method of sheet pressing, sheet pasting equipment and method of sheet pasting
JP7213046B2 (en) Unnecessary sheet removing device and unnecessary sheet removing method
JP6401447B2 (en) Sheet feeding apparatus and feeding method, and sheet pasting apparatus and pasting method
JP3212700U (en) Sheet pasting device
JP3225039U (en) Winding device
JP7346092B2 (en) Sheet collection device and sheet collection method
JP6442273B2 (en) Sheet feeding apparatus and feeding method
JP2020047882A (en) Unnecessary sheet removing device and unnecessary sheet removing method
JP2020057745A (en) Unnecessary sheet removal device and unnecessary sheet removal method
JP2020055276A (en) Unnecessary sheet removal device and unnecessary sheet removal method
JP6211827B2 (en) Sheet pasting device and pasting preparation method
JP6983062B2 (en) Sheet supply device and sheet supply method
JP7360812B2 (en) Seat support device and seat support method
JP7208747B2 (en) Sheet sticking device and sheet sticking method

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20210701

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20220624

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20220705

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220831

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20230110

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20230711

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230825

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20230904

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20230926

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20231005

R150 Certificate of patent or registration of utility model

Ref document number: 7364327

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150