JP2013074104A - Sheet sticking apparatus and sticking method, and sheet manufacturing apparatus and manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To allow an unnecessary sheet to be successfully peeled and an adhesive sheet to be successfully stuck.SOLUTION: A sheet sticking apparatus 10 comprises: delivery means 14 for delivering a master roll RS in which a belt-like sheet WS is tentatively adhered to a belt-like peeling sheet RL; cutting means 15 for forming a notch CU in the belt-like sheet WS to form an adhesive sheet AS inside the notch CU; and a peeling plate 18 for peeling the adhesive sheet AS from an initial stage peeling region Sa toward a next stage peeling region Sb. The cutting means 15 includes a die cut roller 36, a platen roller 37, and adjustment means 38 having a function as vibration applying means capable of applying vibration to the die cut roller 36.

Description

  The present invention relates to a sheet sticking apparatus and a sticking method, and a sheet manufacturing apparatus and a manufacturing method, and more specifically, a sheet sticking apparatus and a sticking method capable of forming an adhesive sheet by forming a cut in a belt-like sheet, In addition, the present invention relates to a sheet manufacturing apparatus and a manufacturing method.

  Conventionally, a sheet sticking apparatus for sticking an adhesive sheet to an adherend such as a semiconductor wafer (hereinafter sometimes simply referred to as “wafer”) has been widely used. As such a sheet sticking apparatus, for example, It is disclosed in Patent Document 1. The sheet sticking device of Patent Document 1 includes a feeding unit that feeds an original fabric in which a belt-like sheet is temporarily attached to a release sheet, a cutting blade that forms a closed-loop cut in the course of feeding the original fabric, A peel plate for peeling the adhesive sheet formed on the inside from the release sheet, and a press roller capable of pressing the peeled adhesive sheet against the wafer and the ring frame for pasting. In such a sheet affixing device, after the notch formation, and before the adhesive sheet is peeled from the release sheet, a winding means for peeling off the unnecessary sheet formed outside the notch from the release sheet and winding it up. What you have is known. According to such an apparatus, the adhesive sheet can be peeled off and pasted by unwinding the original fabric in which only the adhesive sheet is temporarily attached to the release sheet to the peel plate through the winding means.

JP-A-2005-116929

  By the way, recently, there is a tendency that the diameter of the wafer is increased, and the diameter of the adhesive sheet is increased accordingly. Accordingly, as shown in FIG. 2, the adhesive sheet AS has a vertical tip end with respect to a certain interval along the feeding direction of the adhesive sheet AS at the leading end portion in the feeding direction (hereinafter referred to as “tip vertical gap Sx”). The ratio of the distance (hereinafter referred to as “tip lateral distance Sy”) along the direction orthogonal to the feeding direction of the adhesive sheet AS at the position advanced by the distance Sx increases (hereinafter referred to as “tip vertical / horizontal ratio Sxy”). If you look at it, the bag will be in a straight line. When the leading end aspect ratio Sxy is increased, when the unnecessary sheet at the leading end in the feeding direction of the adhesive sheet AS is separated from the adhesive sheet AS by the winding means, the separation is performed at once in a wide range. As a result, it becomes difficult to form the separation sheet between the adhesive sheet AS and the unnecessary sheet, and the adhesive sheet AS is taken up together with the unnecessary sheet by the winding means, so that the adhesive sheet AS cannot be attached. . Such inconvenience appears remarkably when the cutting blade is deteriorated or the like and the cutting ability is inferior.

[Object of invention]
An object of the present invention is to provide a sheet sticking apparatus and a sticking method, and a sheet manufacturing apparatus and a manufacturing method capable of satisfactorily peeling an unnecessary sheet, and thus sticking an adhesive sheet regardless of the shape of the adhesive sheet. There is.

In order to achieve the above-mentioned object, the present invention feeds out a raw material in which a belt-like sheet having an adhesive layer on one surface of a belt-like base material sheet is temporarily attached to the belt-like release sheet via the adhesive layer. A cutting means for forming an incision in a predetermined shape in the belt-like sheet and forming an adhesive sheet inside the incision, and forming an unnecessary sheet outside the incision; and temporarily attaching to the release sheet A sheet sticking device including a peeling means for peeling the adhesive sheet, and a pressing means for pressing and sticking the adhesive sheet to an adherend,
The cutting means is disposed on the belt-like sheet side of the original fabric and has a cutter blade having a cutting blade capable of forming the incision, and the cutter portion is arranged to face the cutter portion with the original fabric interposed therebetween. The pressure receiving unit that receives the pressing force of the pressure and a vibration applying unit that can apply vibration to at least one of the cutter unit and the pressure receiving unit are employed.

In the present invention, the peeling means is provided so as to be able to peel the adhesive sheet temporarily attached to the release sheet from the leading end portion in the feeding direction of the adhesive sheet toward the inner region of the adhesive sheet,
The cutting means further includes an adjusting means capable of adjusting an interval between the cutter part and the pressure receiving part, and the adjusting means can change the depth of the notch forming the adhesive sheet by adjusting the interval. It is possible to adopt a configuration that is provided in

  In addition, it is preferable to employ a configuration in which the cutter unit is displaced so as to be capable of changing a cutter blade region that forms a cut corresponding to the leading end portion in the feeding direction of the adhesive sheet.

  Further, the feeding means may perform cutting at a leading end portion in the feeding direction of the adhesive sheet a plurality of times for forming one adhesive sheet in conjunction with the cutting means.

  Further, the adjusting means can form a notch corresponding to the leading end portion of the adhesive sheet in the feeding direction by performing the separation and approach operation of the cutter portion and the pressure receiving portion at least once for the formation of one adhesive sheet. It is possible to adopt a configuration that is provided in

Furthermore, the sheet sticking method of the present invention is a feeding step in which a belt-like sheet having an adhesive layer on one surface of a belt-like base material sheet is fed out from the original fabric temporarily attached to the belt-like release sheet via the adhesive layer. When,
A slit having a predetermined shape is formed in the belt-like sheet by a cutter portion having a cutting blade capable of forming a cut having a predetermined shape and a pressure receiving portion that receives the pressing force of the cutter blade with the original fabric interposed therebetween. Forming an adhesive sheet on the inside of the cut and forming an unnecessary sheet on the outside of the cut,
A peeling step of peeling the adhesive sheet temporarily attached to the release sheet;
A pressing step of pressing and bonding the adhesive sheet to an adherend,
In the cutting step, a method of applying vibration to at least one of the cutter part and the pressure receiving part is adopted.

Further, the sheet manufacturing apparatus of the present invention is a feeding means for feeding out a raw material in which a belt-like sheet having an adhesive layer on one surface of a belt-like base material sheet is temporarily attached to the belt-like release sheet via the adhesive layer. When,
A sheet manufacturing apparatus including a cutting means for forming an incision having a predetermined shape in the belt-like sheet to form an adhesive sheet inside the notch and forming an unnecessary sheet outside the notch,
The cutting means is disposed on the belt-like sheet side of the original fabric and has a cutter blade having a cutting blade capable of forming the incision, and the cutter portion is arranged to face the cutter portion with the original fabric interposed therebetween. The pressure receiving unit that receives the pressing force of the pressure and a vibration applying unit that can apply vibration to at least one of the cutter unit and the pressure receiving unit are employed.

The sheet manufacturing method of the present invention is a feeding step in which a belt-like sheet having an adhesive layer on one surface of a belt-like base material sheet is fed out from the original fabric temporarily attached to the belt-like release sheet via the adhesive layer. When,
A slit having a predetermined shape is formed in the belt-like sheet by a cutter portion having a cutting blade capable of forming a cut having a predetermined shape and a pressure receiving portion that receives the pressing force of the cutter blade with the original fabric interposed therebetween. Forming an adhesive sheet on the inside of the cut and forming a unnecessary sheet on the outside of the cut,
In the cutting step, a method of applying vibration to at least one of the cutter part and the pressure receiving part is adopted.

According to the present invention, vibration is applied to the cutter blade and the pressure receiving portion during the incision formation by the cutter portion, so even when the cutting blade is inferior in cutting ability due to deterioration or the like, it is surely cut into a belt-like sheet. Can be formed. Thereby, even if the tip aspect ratio Sxy is large, it is possible to reliably form the separation between the adhesive sheet and the unnecessary sheet, and it is possible to prevent the adhesive sheet from being wound together with the unnecessary sheet by the winding means. Thus, it is possible to eliminate the inconvenience that the adhesive sheet cannot be attached.
In addition, according to the said sheet manufacturing apparatus and manufacturing method, it can prevent that an adhesive sheet is wound up with an unnecessary sheet | seat, and the raw material by which the adhesive sheet is not temporarily attached is produced partially. When the original fabric is employed in an adhesive sheet sticking apparatus such as Patent Document 1 having no cutting blade, it is possible to eliminate the inconvenience that the adhesive sheet cannot be stuck.

  Further, when an adjusting means for adjusting the distance between the cutter portion and the pressure receiving portion is provided, the depth of the cut corresponding to the leading end portion in the feeding direction of the adhesive sheet is formed deeper than the depth of the cut corresponding to the other region. Therefore, it is easy to form a severing detachment between the adhesive sheet and the unnecessary sheet and a separation severing between the adhesive sheet and the release sheet, and it is possible to better eliminate the inability to stick as described above.

  Further, when the cutter blade region that forms the cut corresponding to the leading end of the adhesive sheet in the feeding direction is configured to have a displacement means that can be changed, even if a partial region of the cutter blade deteriorates due to wear or the like, A notch corresponding to the leading end of the adhesive sheet in the feeding direction can be formed in the region.

  Moreover, the cutting | disconnection in the feed-off direction of an adhesive sheet can be more reliably cut | disconnected from an unnecessary sheet | seat by performing the cutting | disconnection in an initial stage peeling area | region several times.

  Further, if the adjusting means is configured to form a notch corresponding to the leading end portion in the feeding direction of the adhesive sheet by performing the separating and approaching operation of the cutter portion and the pressure receiving portion at least once, it corresponds to the leading end portion in the feeding direction. The notch can be formed reliably, and the adhesive sheet can be reliably separated from the unnecessary sheet.

The schematic front view of the sheet sticking apparatus which concerns on embodiment. The schematic perspective view of the original fabric after cutting formation. (A), (B) is explanatory drawing which shows the cutting | disconnection point of a cutting | disconnection means.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
In this specification, “left”, “right”, “upper”, and “lower” are used with reference to FIG. 1 unless otherwise specified.

  1 to 3, a sheet sticking apparatus 10 includes a table 11 that sucks and supports a wafer WF as an adherend and a ring frame RF, and a linear motion motor 12 as a drive device that can move the table 11 in the left-right direction. A stripping sheet RL and a strip-shaped sheet WS temporarily attached to one surface of the strip-shaped sheet WS. The cut sheet CU is formed in the belt-like sheet WS, the adhesive sheet AS is formed inside the cut CU, and the unnecessary sheet US is formed outside the cut CU, and the unnecessary sheet US is wound up. A possible winding means 16, a peeling plate 18 as a peeling means for folding the peeling sheet RL and peeling the adhesive sheet AS from the peeling sheet RL, and peeling with this peeling plate 18 It is constituting the adhesive sheet AS that a pressing roller 19 as a pressing means for affixing is pressed against the ring frame RF and the wafer WF. The belt-like sheet WS includes a base sheet BS and an adhesive layer AD laminated on one surface of the base sheet BS, and is temporarily attached to the release sheet RL via the adhesive layer AD. A protective sheet PS is stuck on the lower surface of the wafer WF.

  The feeding means 14 includes a support shaft 25 that supports the original fabric RS, and a first drive roller 27 and a first pinch roller 28 that sandwich the original fabric RS that is fed from the support shaft 25 and passes through the cutting means 15. The second drive roller 31 and the second pinch roller 32 that sandwich the release sheet RL after passing through the release plate 18, and the winding shaft that winds the release sheet RL after passing through the release sheet RL with a predetermined torque by a drive device (not shown). 34. The drive rollers 27 and 31 are rotatably provided via rotation motors DM1 and DM2 as drive devices.

  The cutting means 15 is disposed on the belt-like sheet WS side of the raw fabric RS to be fed out, and the die cut roller 36 as a cutter portion provided rotatably by a rotation motor DM3 as a driving device, and the raw fabric RS in between. A platen roller 37 as a pressure receiving portion that is disposed opposite to the die cut roller 36 and receives the pressing force of the die cut roller 36, and a vibration applying means 38 such as an ultrasonic vibrator or an eccentric motor that can apply vibration to the die cut roller 36. It has. The platen roller 37 is rotatably provided in conjunction with the die cut roller 36 by a mechanism (not shown).

  The die cut roller 36 is supported by the vibration applying means 38 via a bracket 39 together with the rotation motor DM3. The die-cut roller 36 includes a closed-loop cutting blade 40 projecting from the outer peripheral surface, and is provided so that a substantially circular cut CU that is larger than the inner diameter dimension of the ring frame RF and smaller than the outer dimension dimension can be formed on the belt-like sheet WS. It has been. Further, the cutting blade 40 is provided, for example, over a range of 270 ° in the rotational direction of the die cut roller 36, the front end in the rotational direction is indicated by reference numeral 40a in FIG. 3, and the rear end is indicated by reference numeral 40b in the same figure. Show. The height of the cutting blade 40 is set to 450 μm.

  Here, the adhesive sheet AS formed by the cutting blade 40 is formed by the tip end 40a of the cutting blade 40 at the leading end region of the strip-shaped sheet WS (direction in which the original fabric RS is directed from the support shaft 25 to the take-up shaft 34). The The portion of the adhesive sheet AS formed by the tip 40a becomes the initial peeling region Sa as the leading edge in the feeding direction of the adhesive sheet that is first peeled from the peeling sheet RL by the peeling plate 18, and the cut corresponding to the initial peeling region Sa. The cut-in CU part is set as an initial cut-in CU1. Further, the area to be peeled after the peeling of the initial peeling area Sa, that is, the entire area other than the initial peeling area Sa in the adhesive sheet AS becomes the next peeling area Sb as the inner area of the adhesive sheet, and this next peeling area Sb. The cut CU portion corresponding to is the next cut CU2, and the rear end portion of the adhesive sheet in the feeding direction is formed by the rear end 40b of the cutting blade 40. The next release region Sb is not limited to the entire region other than the initial release region Sa, and may be a partial region of the adhesive sheet AS that is adjacent to the initial release region Sa and is peeled off after the initial release region Sa is peeled off. Good.

The vibration applying means 38 includes an output shaft 38A connected to the bracket 39, a function capable of applying vibration to the output shaft 38A, and the main shaft 38A in the direction of arrow R1 in FIG. 3A or opposite to the arrow R1. It has a function as a rotation motor as a drive device capable of rotating the output shaft 38A in the direction. The displacement means is configured by a function capable of rotating the output shaft 38A in the direction of the arrow R1 in FIG. 3A or in the direction opposite to the arrow R1, and the die cut roller 36 is moved in the direction of arrow R1 or in the direction opposite to the arrow R1 in FIG. By rotating 180 degrees, the direction of the die cut roller 36 in the direction perpendicular to the paper surface in the figure can be reversed. As a result, the region where the initial cut CU1 is formed can be changed to the rear end 40b of the cutting blade 40, and the initial cut CU1 corresponding to the initial separation region Sa is formed at either the front end 40a or the rear end 40b of the cutting blade 40. It becomes possible, and it becomes possible to form the initial cut CU1 by selectively using one of them according to the deterioration state of the front end 40a and the rear end 40b. The displacement means may employ a rotation motor as a drive device independent of the vibration applying means 38.
The frequency of the vibration applying means 38 is not particularly limited, but may be a frequency such as 5 to 200,000 Hz, and may be a higher frequency or a lower frequency. Further, the direction of vibration is not particularly limited, and may be a direction including at least one component in the left-right direction, the up-down direction, the direction orthogonal to the paper surface in FIG. 3 and the direction of the arrow R1, and the amplitude is particularly limited. It will never be done.

  Here, the cutting means 15 is provided with energy applying means (not shown), and the cutting CU can be formed while applying energy to the raw fabric RS by the energy applying means. Examples of the energy applying means include a coil heater built in at least one of the die-cut roller 36 and the platen roller 37, and a blower that blows hot air from a position away from the rollers 36 and 37 to the formation position of the cut CU. An irradiation device that irradiates energy rays such as a vessel, ultraviolet rays, infrared rays, and microwaves.

  The winding means 16 is wound around the unnecessary sheet US after the cutting means 15 forms the cut CU, and peels off the unnecessary sheet US from the release sheet RL. A take-up shaft 51 for taking up the unnecessary sheet US is provided. The take-up shaft 51 is rotatably provided via a rotation motor DM4 as a drive device, and can take up the unnecessary sheet US with a predetermined torque.

  Next, a method for applying the adhesive sheet AS in the present embodiment will be described.

First, the raw fabric RS supported by the support shaft 25 is passed between the first drive roller 27 and the first pinch roller 28 and between the die cut roller 36 and the platen roller 37. Then, the strip-like sheet WS is peeled from the release sheet RL, and the strip-like sheet WS is wound around the peeling roller 50, and then the lead end is fixed to the winding shaft 51. Further, the release sheet RL is folded at the tip of the release plate 18 to pass between the second drive roller 31 and the second pinch roller 32, and its lead end is fixed to the winding shaft 34. In the present embodiment, the belt-like sheet WS has a thickness of 100 μm, and the release sheet RL has a thickness of 25 μm. Further, the relative distance between the die cut roller 36 and the platen roller 37 is adjusted by the adjusting means 38.
In the present embodiment, the die cutting roller 36 is rotated 45 ° counterclockwise from the position shown in FIG. 3A, that is, the cutting blade 40 in the rotational direction of the die cutting roller 36 is not formed 90 °. The center of the range is the start position St of the die cut roller 36, and the rotation of the die cut roller 36 is stopped in a state where the start position St approaches the platen roller 37 again.

  Then, when the raw fabric RS is fed out by interlocking the rotation motors DM1 to DM4, the cutting blade 40 forms a cut CU from the base sheet BS side to the release sheet RL side, and the strip sheet WS is cut. It is divided into an adhesive sheet AS inside the CU and an unnecessary sheet US outside the cut CU. In the formation of the adhesive sheet AS, first, the die cutting roller 36 rotates in the direction of the arrow in FIG. 3 (A) in a state where the vibration is applied to the die cutting roller 36 by the vibration applying means 38, and 45 ° from the start position St. At the time of rotation, the formation of the initial cut CU1 is started. Then, after the formation of the initial cut CU1 is started, the application of vibration by the vibration applying means 38 is stopped when the set angle α1 is rotated by, for example, 5 °, and the initial cut CU1 is formed. Thereafter, the next cutting CU2 is formed by the cutting blade 40, and the next peeling region Sb is formed. Thereby, the initial cut CU1 is reliably formed, and the initial peeling area Sa is easily separated from the unnecessary sheet US.

  After the formation of the cut CU, the unrolled sheet RS is peeled off from the release sheet RL by the peeling roller 50, and the unnecessary sheet US is wound around the take-up shaft 51. At this time, since the peeling region Sa is easily separated from the unnecessary sheet US, the adhesive sheet AS does not rise together with the unnecessary sheet US in the direction of the winding shaft 51. Next, when the adhesive sheet AS of the original web RS on which the unnecessary sheet US is wound is peeled off from the front end of the release plate 18 by a predetermined amount, the front end of the adhesive sheet AS is detected by a sensor (not shown) and stopped. It becomes a state. At this time, since the initial cut CU1 is reliably formed, the release sheet RL can be reliably removed from the adhesive sheet AS without the initial release area Sa being wound up in the direction of the second drive roller 31 together with the release sheet RL. Can be peeled off. In the standby state, as shown in FIG. 1, the die cut roller 36 has the start position St opposed to the platen roller 37, and the die cut roller 36 and The position of the platen roller 37 can be displaced in the vertical direction. According to this, the intervals between the adhesive sheets AS can be arbitrarily adjusted, and the positions thereof can be changed in the vertical direction according to the length in the feeding direction of the adhesive sheet AS. Thereafter, the ring complaint RF and the wafer WF are placed on the table 11 via a transfer means (not shown) and are sucked and held. Next, the table 11 is conveyed below the peeling plate 18 from the right side to the left side via the linear motor 12. When the table 11 is detected at a predetermined position by a sensor (not shown), the first and second drive rollers 27 and 31 are rotated in synchronism with the conveyance of the table 11 to feed out the original fabric RS, and the leading edge of the peeling plate 18 The adhesive sheet AS is peeled off. Then, the peeled adhesive sheet AS receives a pressing force by the pressing roller 19 and is attached to each upper surface of the ring claim RF and the wafer WF, and the wafer WF and the ring claim RF are integrated through the adhesive sheet AS. At this time, since the release sheet RL portion corresponding to the initial release region Sa is reliably peeled from the adhesive sheet AS, the adhesive sheet AS with the release sheet RL portion attached thereto is attached to the adherend. There is no.

  Therefore, according to such an embodiment, since vibration is applied to the cutting blade 40, for example, even when the cutting blade 40 is inferior in cutting ability due to deterioration or the like, the cutting blade 40 is surely cut into the belt-like sheet WS. A CU can be formed.

As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this.
In other words, the present invention has been illustrated and described mainly with respect to specific embodiments, but without departing from the scope of the technical idea and object of the present invention, the shape, position, or With respect to the arrangement and the like, those skilled in the art can make various changes as necessary.
Therefore, the description limited to the shape disclosed above is an example for easy understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded one part or all part is included in this invention.

  For example, the winding means 16 is omitted, and the unnecessary sheet US is not peeled from the release sheet RL, but the adhesive sheet AS is peeled off by the release plate 18, and the release sheet RL and the unnecessary sheet US are wound around the take-up shaft 34. You may make it take. Even in such a case, it is possible to prevent the initial peeling region Sa from being peeled off by the peeling plate 18 and the adhesive sheet AS being taken up in the direction of the second drive roller 31 together with the unnecessary sheet US.

Further, in forming the cut C, each of the rotation motors DM1 to DM4 is interlocked to reciprocate the original fabric RS in the feed-out direction, and the cut in the initial peeling region Sa with respect to the formation of one adhesive sheet AS. May be performed multiple times.
Further, in the above-described embodiment, the adjusting means 38 is operated at the time of 45 ° rotation from the start position St, the cutting blade 40 is once pulled out from the cutting CU, the cutting blade 40 is inserted into the cutting CU again, and one adhesive sheet In contrast to the formation of AS, the separating operation and the approaching operation of the cutting blade 40 and the platen roller 37 may be performed at least once to form the cut SU corresponding to the initial peeling region Sa. At this time, the feeding of the raw fabric RS may be stopped.
Further, an adjusting means such as a linear motor is provided as a driving device capable of adjusting the distance between the die-cut roller 36 and the platen roller 37, and the adjusting means adjusts the distance so that the cutting sheet CU for forming the adhesive sheet AS is adjusted. The depth may be changed partially or entirely. Thereby, for example, if the initial cut CU1 is formed deeper than the next cut CU2, the initial release region Sa is easily separated from the unnecessary sheet US, and is easily peeled from the release sheet RL. As the adjusting means, one in which the die cut roller 36 can move in the left-right direction, one in which the platen roller 37 can move in the left-right direction, or one in which both of them can move in the left-right direction can be adopted.
Further, vibration applying means similar to the vibration applying means 38 is attached to the platen roller 37 so that vibration is applied to both the die-cut roller 36 and the platen roller 37, or vibration is applied only to the platen roller 37. Good.
In the above embodiment, the vibration applying means is provided outside the die cut roller 36. However, the vibration applying means may be provided inside the die cut roller 36.
Furthermore, the set angle α1 may be changed in the range of 0 ° to 270 °.

  Moreover, you may comprise a sheet manufacturing apparatus by abbreviate | omitting the peeling plate 18 and the press roller 19 of the said sheet sticking apparatus 10. FIG. According to the apparatus, after the adhesive sheet AS is formed by the cutting means 15 as in the above-described embodiment, the original fabric RS on which the adhesive sheet AS is temporarily attached to the release sheet RL is wound around the winding shaft 34. The raw fabric RS wound on the winding shaft 34 can be separately conveyed and stored, or used in a sheet sticking apparatus or the like that does not have a cutting means. Thus, when the raw fabric RS wound on the winding shaft 34 is used in a sheet sticking apparatus or the like that does not have cutting means in that state, the rear end portion in the feeding direction of the feeding means 14 is the sheet sticking apparatus or the like. Therefore, it is only necessary to apply vibration to the die-cut roller 36 and the platen roller 37 when forming the cut CU at the rear end in the feeding direction of the feeding means 14 in the adhesive sheet AS.

  Furthermore, the planar shape of the cutting blade 40 is a polygonal shape, an ellipse, an ellipse, a rhombus, a straight line as long as the cut CU can be formed in the belt-like sheet WS and the inside of the cut CU can be formed as the adhesive sheet AS. Various changes such as a shape combined with a curve are possible, and the height of the blade can also be arbitrarily changed.

  The cutting blade 40 may be an engraving blade formed by machining other than etching, a flat blade having a blade formed on a flat plate, a Thomson blade, or the like in addition to a rotary die. .

Furthermore, various design changes can be made to the feeding means 14, the peeling plate 18, and the pressing roller 19.
Moreover, the thickness of the member which comprises original fabric RS is not limited to what was illustrated by the said embodiment at all.
Further, a driving device for moving the sheet sticking apparatus 10 is provided, and the sheet sticking apparatus 10 is moved rightward in FIG. 1 or the table 11 is moved leftward while the table 11 is stopped. You may comprise so that the apparatus 10 may be moved to the right direction and the adhesive sheet AS may be stuck on a to-be-adhered body.

  The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single-axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

  Further, the adherend may be a glass plate, a steel plate, or a resin plate instead of the wafer WF or the ring frame RF, and the semiconductor wafer may be a silicon semiconductor wafer or a compound semiconductor wafer. It may be. Further, instead of the ring frame RF, a frame having a different shape such as a C-shape or U-shape may be used, or a single adherend may be used as an attachment target of the adhesive sheet AS without the ring frame RF.

DESCRIPTION OF SYMBOLS 10 Sheet sticking apparatus 14 Feeding means 15 Cutting means 18 Release plate (peeling means)
19 Pressing roller (pressing means)
36 Cutter (die cut roller)
37 Pressure receiver (platen roller)
38 Vibration imparting means 40 Cutting blade AD Adhesive layer AS Adhesive sheet BS Substrate sheet CU Cutting RF Ring frame (Substrate)
RL Release sheet RS Original Sa Initial release area (adhesive sheet feed direction tip)
Sb Next release area (inner area of adhesive sheet)
US Unnecessary sheet WF Semiconductor wafer (adhered body)
WS Strip sheet

Claims (8)

The belt-like sheet having an adhesive layer on one surface of the belt-like base material sheet is provided with a feeding means for feeding out the original fabric temporarily attached to the belt-like release sheet via the adhesive layer, and the belt-like sheet is cut into a predetermined shape. A cutting means for forming an adhesive sheet inside the cut and forming an unnecessary sheet outside the cut, and a peeling means for peeling the adhesive sheet temporarily attached to the release sheet; A sheet sticking device including a pressing means for pressing and sticking the adhesive sheet to an adherend,
The cutting means is disposed on the belt-like sheet side of the original fabric and has a cutter blade having a cutting blade capable of forming the incision, and the cutter portion is arranged to face the cutter portion with the original fabric interposed therebetween. A sheet sticking apparatus comprising: a pressure receiving portion that receives the pressing force of the pressure; and a vibration applying unit that can apply vibration to at least one of the cutter portion and the pressure receiving portion. The peeling means is provided so that the adhesive sheet temporarily attached to the release sheet can be peeled from the leading end portion in the feeding direction of the adhesive sheet toward the inner region of the adhesive sheet,
The cutting means further includes an adjusting means capable of adjusting an interval between the cutter part and the pressure receiving part, and the adjusting means can change the depth of the notch forming the adhesive sheet by adjusting the interval. The sheet sticking device according to claim 1, wherein the sheet sticking device is provided.   The sheet sticking device according to claim 1, further comprising a displacement unit capable of changing a cutter blade region that forms a cut corresponding to a leading end portion in the feeding direction of the adhesive sheet by displacing the cutter unit.   The said feeding means performs the cutting | disconnection in the delivery direction front-end | tip part of the said adhesive sheet in multiple times with respect to one adhesive sheet formation in conjunction with the said cutting | disconnection means. Sheet pasting device.   The adjusting means is provided so as to be able to form a notch corresponding to the leading end portion of the adhesive sheet by performing the approaching and separating operation of the cutter portion and the pressure receiving portion at least once for the formation of one adhesive sheet. The sheet sticking device according to claim 1, wherein the sheet sticking device is provided. A feeding step of feeding out the original fabric temporarily attached to the strip-shaped release sheet via the adhesive layer by the strip-shaped sheet having the adhesive layer on one surface of the strip-shaped base sheet;
A slit having a predetermined shape is formed in the belt-like sheet by a cutter portion having a cutting blade capable of forming a cut having a predetermined shape and a pressure receiving portion that receives the pressing force of the cutter blade with the original fabric interposed therebetween. Forming an adhesive sheet on the inside of the cut and forming an unnecessary sheet on the outside of the cut,
A peeling step of peeling the adhesive sheet temporarily attached to the release sheet;
A pressing step of pressing and bonding the adhesive sheet to an adherend,
In the cutting step, a vibration is applied to at least one of the cutter part and the pressure receiving part. A feeding means for feeding out the original fabric temporarily attached to the strip-shaped release sheet by the strip-shaped sheet having the adhesive layer on one surface of the strip-shaped base sheet;
A sheet manufacturing apparatus including a cutting means for forming an incision having a predetermined shape in the belt-like sheet to form an adhesive sheet inside the notch and forming an unnecessary sheet outside the notch,
The cutting means is disposed on the belt-like sheet side of the original fabric and has a cutter blade having a cutting blade capable of forming the incision, and the cutter portion is arranged to face the cutter portion with the original fabric interposed therebetween. A sheet manufacturing apparatus comprising: a pressure receiving portion that receives the pressing force of the pressure; and a vibration applying unit that can apply vibration to at least one of the cutter portion and the pressure receiving portion. A feeding step of feeding out the original fabric temporarily attached to the strip-shaped release sheet via the adhesive layer by the strip-shaped sheet having the adhesive layer on one surface of the strip-shaped base sheet;
A slit having a predetermined shape is formed in the belt-like sheet by a cutter portion having a cutting blade capable of forming a cut having a predetermined shape and a pressure receiving portion that receives the pressing force of the cutter blade with the original fabric interposed therebetween. Forming an adhesive sheet on the inside of the cut and forming a unnecessary sheet on the outside of the cut,
In the cutting step, a vibration is applied to at least one of the cutter part and the pressure receiving part.

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