JP4713541B2 - Sheet pasting device - Google Patents

Description

  The present invention relates to a sheet sticking apparatus. More specifically, the present invention does not increase the roll diameter of the original supported by the supporting means, and temporarily attaches the original to the original in the course of feeding the original. The present invention relates to a sheet sticking device that enables reuse of a release sheet.

2. Description of the Related Art A semiconductor wafer (hereinafter simply referred to as “wafer”) is bonded to an adhesive sheet on its surface in order to perform various processes such as back surface grinding and dicing.
Patent Document 1 and Patent Document 2 disclose a sheet sticking apparatus capable of sticking an adhesive sheet to a wafer.

JP 2003-257898 A JP 2006-73920 A

  The sheet sticking device disclosed in Patent Document 1 is for sticking a belt-like adhesive sheet to a wafer and a ring frame, and then cutting the adhesive sheet on the ring frame in a closed loop shape. Therefore, the ring frame is inevitably damaged, and the cutter blade has a short life.

  In this regard, Patent Document 2 discloses that in the process of drawing out the belt-shaped original fabric, the original fabric is cut according to the size of the ring frame to form an adhesive sheet, and the adhesive sheet is peeled off to form the ring frame and the wafer inside thereof. Since it is the structure to stick, the inherent disadvantage in patent document 1 does not arise.

However, in the configuration of Patent Document 2, since the support member supports the original fabric in which the release sheet is temporarily attached to the tape base material via the adhesive layer, the roll diameter of the original fabric in the support device Has the disadvantage of becoming too large. Such inconvenience can be dealt with by using a raw material having a small roll diameter. In this case, however, the replenishment frequency of the raw material is increased, and it is difficult to avoid a decrease in production efficiency.
Moreover, since the said peeling sheet is discarded after being wound up with a winding device, there also exists a waste of cost.

[Object of invention]
The present invention has been devised by paying attention to such inconveniences, and an object of the present invention is to provide a sheet sticking device that does not increase the roll diameter of the adhesive sheet supported by the support means. It is in.
Another object of the present invention is to provide a sheet sticking device capable of reducing the material cost of an adhesive sheet by enabling reuse or reuse of a release sheet.

In order to achieve the above object, the present invention provides a sheet supporting means for supporting a belt-shaped original fabric provided with an adhesive layer on one side of a base sheet so as to be able to be fed out, and a belt-shaped belt temporarily attached to the adhesive layer. Release sheet supporting means for supporting the release sheet, notch forming means for forming a closed-loop cut in the unrolled original fabric, and an attaching means for attaching the inner side surrounded by the notch to a predetermined adherend as an adhesive sheet , and a laminating means disposed upstream of said cut-forming means, and laminating the release sheet to the adhesive layer in the laminate means feeding can providing with raw, adopts a configuration that.

  In this invention, the said peeling sheet is comprised with an endless sheet, and it can take the structure that it is wound around so that it may return to the front | former stage of the said lamination | stacking means through the said lamination | stacking means, a notch formation means, and a sticking means.

  Moreover, it is preferable to employ a configuration that further includes a removing roller that removes unnecessary materials from the surface of the release sheet supplied to the laminating means.

  Furthermore, it is possible to adopt a configuration in which unnecessary sheet winding means for winding the base sheet portion that is outside the notch as an unnecessary sheet is disposed on the rear side of the notch forming means.

According to the present invention, since the original fabric has a layer structure in which an adhesive layer is provided on one side of the base sheet, it is not necessary to use an original fabric in which a release sheet is laminated in advance on the adhesive layer. The conventional inconvenience that the roll diameter becomes too large when the roll is wound into a roll shape can be solved. In addition, the degree of freedom in layout, such as the position of the support means and the route of the unwinding raw material, can be increased. Moreover, even if the roll diameter is small, the length of the original fabric can be sufficiently secured as long as there is no release sheet, and the roll can be replenished frequently.
Further, since the release sheet is laminated before the notch forming means, that is, upstream of the sheet feeding direction, it is not necessary to perform surface treatment to avoid transfer of the adhesive to the notch forming means and the downstream constituent members. .

  Furthermore, when the release sheet is constituted by an endless sheet, it is possible to eliminate the need to provide a special take-up means for the release sheet by rotating the release sheet along the feed path of the original fabric. Can be used over and over again, and material costs can be significantly reduced.

  In addition, in the configuration provided with a removal roller that removes unnecessary materials from the surface of the release sheet, there is a problem that unnecessary materials adhere to the adhesive layer and the unnecessary materials are sandwiched between the adhesive sheet and the adherend. It can be avoided.

  Further, in the configuration in which the unnecessary sheet winding means is provided, the unnecessary sheet does not accompany the release sheet, so that the reuse of the release sheet can also be achieved from this point.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 shows a schematic front view of a sheet sticking apparatus according to the present embodiment. In this figure, a sheet sticking device 10 is a sheet supporting means 11 for supporting a belt-shaped raw fabric R provided with an adhesive layer A on one side of a base sheet BS (see an enlarged view of the P portion in FIG. 1) so that it can be fed out. And a release sheet support means 12 that is disposed below the sheet support means 11 and supports the release sheet RL temporarily attached to the adhesive layer A, and is peeled to the adhesive layer A side of the original fabric R Lamination means 13 for laminating sheets RL, notch forming means 14 for forming a closed-loop notch C (see FIG. 2) in the original fabric R, and a wafer as an adherend with an inner side surrounded by the notch C as an adhesive sheet S Affixing means 15 for affixing to the W and ring frame RF, an unnecessary sheet winding means 16 for winding the outside of the notch C as an unnecessary sheet S1, and a release sheet winding means 17 for winding the release sheet RL are provided. It is configured Te.

  The sheet support means 11 is composed of a motor M1 and a support shaft 20 that is rotationally driven by the motor M1, and an original fabric R wound in a roll shape is supported on the support shaft 20. The raw roll R fed out from the sheet supporting means 11 is supplied to the laminating means 13 via the guide roller 21, and the peeling sheet RL is laminated on the adhesive layer A side by the laminating means 13. Yes.

  The release sheet support means 12 includes a motor M2 and a support shaft 22 that is rotationally driven by the motor M2, and a release sheet RL wound around the support shaft 22 in a roll shape is supported. The release sheet RL is fed to the laminating means 13 via a removal roller 23 and a nip roller 24 facing the removal roller 23. The removal roller 23 removes the unnecessary material when unnecessary material such as dust adheres to the surface of the release sheet RL or the surface of the release sheet RL when the release sheet RL is used a plurality of times. For this reason, an adhesive surface capable of transferring unnecessary materials is formed on the surface.

  The stacking unit 13 includes a motor M3, a driving roller 26 that is rotationally driven by the motor M3, and a pinch roller 28 that sandwiches the original fabric R and the release sheet RL between the driving roller 26. The motor M3 cooperates with the motor M1 and the motor M2 to give a constant tension to the original fabric R and the release sheet RL, and to give a repetitive output to the release sheet RL.

  The notch forming means 14 includes a die cut roller 31 having a cutting blade 30 provided on the surface thereof, a die receiving roller 33 disposed relative thereto, a motor M4 for rotating the die cut roller 31, and a central axis of the die cut roller 31. The main drive gear 35 is fixed to 34 and the driven gear 38 is fixed to the central shaft 37 of the die receiving roller 33. The die cut roller 31 is rotated once to form a closed loop (in this embodiment, circular) cut C in the original fabric R by the cutting blade 30.

  The sticking means 15 includes a peel plate 40 having a tip formed at an acute angle, and a press roller 41 disposed in the vicinity of the tip of the peel plate 40. The original fabric R together with the release sheet RL is abruptly folded back at the tip of the peel plate 40, whereby the adhesive sheet S surrounded by the cuts C is peeled off. Affixed to the frame RF and the wafer W. Here, the ring frame RF and the wafer W are supported by a table T provided so that the height position of the upper surface can be adjusted. The table T is screw-engaged with the feed screw shaft 43 and the feed screw shaft 43. 1 is provided so as to be movable along a guide rail 46 extending in the left-right direction in FIG.

  The unnecessary sheet winding means 16 includes a motor M6 and a winding shaft 48 rotated by the motor M6, and an unnecessary sheet R is disposed outside the notch C with guide rollers 55 and 56 as branch points. Wind as S1.

  The release sheet winding means 17 includes a driving roller 49 that is rotated by a motor M7, a pinch roller 50 that sandwiches the release sheet RL between the drive roller 49, and a release sheet winding that is rotationally driven via a motor M8. The release sheet RL, which is constituted by the shaft 52 and from which the adhesive sheet S is peeled off by the peel plate 40, is wound up.

  Next, the operation of the sheet sticking device 10 in this embodiment will be described.

  As an initial operation, the original fabric R and the release sheet RL are drawn out from the sheet support means 11 and the release sheet support means 12 by a predetermined length, and after passing through the lamination means 13 and the notch formation means 14, respectively, the guide roller 55, The base sheet BS and the release sheet RL are separated at a position after the passage of 56, and the lead end of the original fabric R is fixed to the take-up shaft 48 of the unnecessary sheet take-up means 16, while the release sheet RL is attached to the peel plate 40. After being wound around the tip, the lead end is fixed to the release sheet take-up shaft 52.

  When the power is turned on, a control device (not shown) controls each part of the device as a whole. That is, when the motors M1 to M8 are driven to feed out the original fabric R and the release sheet RL, the original fabric R and the release sheet RL are laminated by the laminating unit 13, and then the original fabric R is cut by the notch forming unit 14. A circular cut C is formed. At this time, the release sheet RL fed out from the release sheet support means 22 is removed by transferring to the removal roller 23 even if an unnecessary object is attached to the mating surface side with the original fabric R. When S is affixed to the wafer W, there is no inconvenience that an unnecessary object is interposed between the adhesive sheet S and the wafer W.

  The original fabric R portion outside the adhesive sheet S formed by the notch forming means 14 is wound around the unnecessary sheet winding means 16 as the unnecessary sheet S1. On the other hand, the adhesive sheet S left on the release sheet RL is fed to the sticking means 15 side together with the release sheet RL and is peeled off at the tip of the peel plate 40. The peeling timing is detected by a sensor (not shown), and the adhesive sheet S is applied to the ring frame RF and the wafer W on the table T that moves to the right in FIG. Will be.

  Then, the release sheet RL after the adhesive sheet S is peeled off is wound up by the release sheet winding means 17.

  Therefore, according to such an embodiment, the raw fabric R is constituted by the base sheet BS and the adhesive layer A, and the release sheet RL is drawn out from another route and laminated to the cut forming means 14 in a stacked state. Therefore, the roll diameter of the raw fabric R in the sheet support means 11 is not increased, and the length that does not require frequent roll replenishment can be secured.

As described above, the best configuration, method, and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this.
In other words, the present invention has been illustrated and described mainly with respect to specific embodiments, but without departing from the scope of the technical idea and object of the present invention, the shape, position, or With respect to the arrangement and the like, those skilled in the art can make various changes as necessary.

  For example, in the above-described embodiment, the case where the release sheet RL is wound up is illustrated and described. However, the present invention is not limited to this. For example, as illustrated in FIG. 3, the release sheet RL is formed of an endless sheet. It is possible to adopt a configuration that is configured so as to pass through the laminating unit 13, the notch forming unit 14, and the pasting unit 15 so as to return to the previous stage of the laminating unit 13.

  In such a configuration, as long as the release sheet RL can withstand use, the release sheet RL can be reused, and the number of times of replenishing the roll of the release sheet RL can be greatly reduced. In addition, the necessity of providing the release sheet support means 12 and the release sheet winding means 17 can be eliminated, and the motors M2 and M8 can be omitted, and the effect that the apparatus configuration can be simplified can be added.

  In the embodiment, the adhesive sheet S is attached to the ring frame RF and the wafer W. However, the adhesion target object of the adhesive sheet S may be other plate-like members or the like.

The schematic front view of the sheet sticking apparatus which concerns on this embodiment. The schematic plan view of the lamination | stacking means 13 and the notch formation means 14 in the said sheet sticking apparatus. The schematic front view of the sheet sticking apparatus which shows the modification of the said embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Sheet sticking apparatus 11 Sheet support means 12 Release sheet support means 13 Lamination means 14 Cutting formation means 15 Sticking means 16 Unnecessary sheet winding means 17 Release sheet winding means 23 Removal roller A Adhesive layer C Cutting R Original fabric RL Release sheet S Adhesive Sheet S1 Unnecessary Sheet BS Base Material Sheet W Semiconductor Wafer (Substrate)
RF ring frame (adherence)

Claims (4)

A sheet supporting means for supporting the belt-shaped original fabric provided with an adhesive layer on one side of the base sheet so as to be able to be fed, a release sheet supporting means for supporting the strip-shaped release sheet temporarily attached to the adhesive layer; A notch forming means for forming a closed loop-shaped notch in the unrolled original fabric, and an attaching means for attaching an inner side surrounded by the notch to a predetermined adherend as an adhesive sheet ;
Said notch and a deployed laminating means in front of the forming means, the sheet sticking apparatus according to claim in the laminating means to said provided to be laminated to the release sheet to the adhesive layer with raw feeding.   2. The sheet sticking apparatus according to claim 1, wherein the release sheet is composed of an endless sheet, and is wound around so as to return to the previous stage of the stacking means through the stacking means, the notch forming means, and the sticking means.   The sheet sticking apparatus according to claim 1, further comprising a removing roller that removes unnecessary materials from the surface of the release sheet supplied to the laminating means.   4. The sheet according to claim 1, 2, or 3, wherein an unnecessary sheet winding means for winding a base sheet portion that is outside of the notch as an unnecessary sheet is disposed on the rear side of the notch forming means. Pasting device.

Images