JP2013074103A - Sheet sticking apparatus and sticking method, and sheet manufacturing apparatus and manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To allow an adhesive sheet to be successfully formed, peeled and stuck even if a peeling sheet is thinned.SOLUTION: A sheet sticking apparatus 10 comprises: delivery means 14 for delivering a master roll RS in which a belt-like sheet WS is tentatively adhered to a belt-like peeling sheet RL; cutting means 15 for forming a notch CU in the belt-like sheet WS to form an adhesive sheet AS inside the notch CU; and a peeling plate 18 for peeling the adhesive sheet AS from an initial stage peeling region Sa toward a next stage peeling region Sb. The cutting means 15 includes a die cut roller 36, a platen roller 37, and adjustment means 38 capable of adjusting a gap between the rollers 36 and 37, and forms a notch so that an initial stage notch CU1 corresponding to the initial stage peeling region (a tip end in a delivering direction) Sa is deeper than a next stage notch CU2 corresponding to the next stage peeling region (an inside region) Sb, by allowing the adjustment means 38 to adjust the gap during formation of the notch CU.

Description

  The present invention relates to a sheet sticking apparatus and a sticking method, and a sheet manufacturing apparatus and a manufacturing method, and more specifically, a sheet sticking apparatus and a sticking method capable of forming an adhesive sheet by forming a cut in a belt-like sheet, In addition, the present invention relates to a sheet manufacturing apparatus and a manufacturing method.

  Conventionally, a sheet sticking apparatus for sticking an adhesive sheet to an adherend such as a semiconductor wafer (hereinafter sometimes simply referred to as “wafer”) has been widely used. As such a sheet sticking apparatus, for example, It is disclosed in Patent Document 1. The sheet sticking device of Patent Document 1 includes a feeding unit that feeds an original fabric in which a belt-like sheet is temporarily attached to a release sheet, a cutting blade that forms a closed-loop cut in the course of feeding the original fabric, A peel plate for peeling the adhesive sheet formed on the inside from the release sheet, and a press roller capable of pressing the peeled adhesive sheet against the wafer and the ring frame for pasting. When forming a cut with such a sheet sticking apparatus, as shown in FIG. 4A, the cutting blade HC and the platen roller PR are arranged so that the cutting edge of the cutting blade HC enters the peeling sheet RL around 20 μm. The relative spacing of is adjusted. Such a release sheet RL usually has a thickness of about 50 μm. In the figure, WS is a belt-like sheet, BS is a base material sheet, AD is an adhesive layer, and RS is an original fabric.

JP-A-2005-116929

  By the way, in the release sheet RL, in order to reduce the material cost, a thin one having a thickness of about 25 μm is increasingly used. When the original fabric employing such a thin release sheet RL is used in the apparatus of Patent Document 1, the cutting edge of the cutting blade HC does not enter the release sheet RL as shown in FIG. The adhesive sheet formed on the inside of the cut CU and the unnecessary sheet formed on the outside cannot be reliably separated, and the adhesive sheet is wound together with the unnecessary sheet. The inconvenience that sticking cannot be performed occurs.

  Here, in FIG. 4B, the adhesive sheet is reliably removed from the unnecessary sheet by readjusting the relative distance between the cutting blade HC and the platen roller PR so that the cutting edge of the cutting blade HC enters the release sheet RL. It can be separated. However, in this case, since the thickness of the release sheet RL at the position where the cut CU is formed becomes too thin, the adhesive sheet and the release sheet portion corresponding to the adhesive sheet and the corresponding release sheet portion can be removed from the original fabric RS with only a slight external force. When the adhesive sheet is peeled off or peeled off with a peel plate, the corresponding release sheet part is also removed together with the adhesive sheet, and the adhesive sheet with the release sheet part attached is adhered to the adherend. Inconveniences such as poor adhesion of the adhesive sheet occur.

[Object of invention]
An object of the present invention is to provide a sheet sticking apparatus and a sticking method, and a sheet manufacturing apparatus and a manufacturing method capable of satisfactorily forming, peeling and sticking an adhesive sheet even when the release sheet is thinned. is there.

In order to achieve the above-mentioned object, the present invention feeds out a raw material in which a belt-like sheet having an adhesive layer on one surface of a belt-like base material sheet is temporarily attached to the belt-like release sheet via the adhesive layer. A cutting means for forming an incision in a predetermined shape in the belt-like sheet and forming an adhesive sheet inside the incision, and forming an unnecessary sheet outside the incision; and temporarily attaching to the release sheet Sheet pasting including peeling means for peeling the adhesive sheet from the leading end in the feeding direction of the adhesive sheet toward the inner region of the adhesive sheet, and pressing means for pressing and sticking the adhesive sheet to the adherend A device,
The cutting means is disposed on the belt-like sheet side of the original fabric and has a cutter blade having a cutting blade capable of forming the incision, and the cutter portion is arranged to face the cutter portion with the original fabric interposed therebetween. A pressure receiving portion that receives the pressure of the pressure, and an adjustment means that can adjust the interval between the cutter portion and the pressure receiving portion,
The adjusting means adjusts the interval during the formation of the cut so that the depth of the cut corresponding to the leading end portion in the feeding direction of the adhesive sheet corresponds to the inner region of the adhesive sheet. The configuration is such that a deep cut can be formed in comparison with the depth.

  In this invention, it is preferable to take the structure of having the displacement means which can change the cutter blade area | region which displaces the said cutter part and forms the notch corresponding to the feed direction front-end | tip part of the said adhesive sheet.

  Further, the feeding means may perform cutting at a leading end portion in the feeding direction of the adhesive sheet a plurality of times for forming one adhesive sheet in conjunction with the cutting means.

  Further, the adjusting means can form a notch corresponding to the leading end portion of the adhesive sheet in the feeding direction by performing the separation and approach operation of the cutter portion and the pressure receiving portion at least once for the formation of one adhesive sheet. It is possible to adopt a configuration that is provided in

Furthermore, the sheet sticking method of the present invention is a feeding step in which a belt-like sheet having an adhesive layer on one surface of a belt-like base material sheet is fed out from the original fabric temporarily attached to the belt-like release sheet via the adhesive layer. When,
A slit having a predetermined shape is formed in the belt-like sheet by a cutter portion having a cutting blade capable of forming a cut having a predetermined shape and a pressure receiving portion that receives the pressing force of the cutter blade with the original fabric interposed therebetween. Forming an adhesive sheet on the inside of the cut and forming an unnecessary sheet on the outside of the cut,
A peeling step of peeling the adhesive sheet temporarily attached to the release sheet from the leading end of the adhesive sheet toward the inner region of the adhesive sheet;
A pressing step of pressing and bonding the adhesive sheet to an adherend,
In the cutting step, by adjusting the distance between the cutter portion and the pressure receiving portion, the depth of the cut corresponding to the leading end portion in the feeding direction of the adhesive sheet corresponds to the inner region of the adhesive sheet. The method is to form a deep cut compared to the depth.

Further, the sheet manufacturing apparatus of the present invention is a feeding means for feeding out a raw material in which a belt-like sheet having an adhesive layer on one surface of a belt-like base material sheet is temporarily attached to the belt-like release sheet via the adhesive layer When,
A sheet manufacturing apparatus including a cutting means for forming an incision having a predetermined shape in the belt-like sheet to form an adhesive sheet inside the notch and forming an unnecessary sheet outside the notch,
The cutting means is disposed on the belt-like sheet side of the original fabric and has a cutter blade having a cutting blade capable of forming the incision, and the cutter portion is arranged to face the cutter portion with the original fabric interposed therebetween. A pressure receiving portion that receives the pressure of the pressure, and an adjustment means that can adjust the interval between the cutter portion and the pressure receiving portion,
The adjusting means adjusts the interval during the formation of the cut so that the depth of the cut corresponding to at least one of the leading end portion in the feeding direction and the trailing end portion in the feeding direction of the adhesive sheet is The configuration is such that a deep cut can be formed as compared with the depth of the cut corresponding to the inner region.

The sheet manufacturing method of the present invention is a feeding step in which a belt-like sheet having an adhesive layer on one surface of a belt-like base material sheet is fed out from the original fabric temporarily attached to the belt-like release sheet via the adhesive layer. When,
A slit having a predetermined shape is formed in the belt-like sheet by a cutter portion having a cutting blade capable of forming a cut having a predetermined shape and a pressure receiving portion that receives the pressing force of the cutter blade with the original fabric interposed therebetween. Forming an adhesive sheet on the inside of the cut and forming a unnecessary sheet on the outside of the cut,
In the cutting step, by adjusting the distance between the cutter part and the pressure receiving part, the depth of the cut corresponding to at least one of the leading end part and the trailing end part in the feeding direction of the adhesive sheet is A method is adopted in which a deep cut is formed as compared with the depth of the cut corresponding to the inner region.

According to the present invention, by adjusting the distance between the cutter portion and the pressure receiving portion, the depth of the cut corresponding to the leading end portion in the feeding direction of the adhesive sheet is deeper than the depth of the cut corresponding to the inner region of the adhesive sheet. Since it can form, the front-end | tip part of the feed direction of an adhesive sheet can be reliably cut | disconnected from an unnecessary sheet | seat. Thereby, the adhesive sheet is wound together with the unnecessary sheet as in the conventional case, so that the inconvenience that the adhesive sheet cannot be attached can be solved. At this time, the depth of the cut corresponding to the inner region of the adhesive sheet is formed shallower than the cut corresponding to the leading end of the adhesive sheet in the feeding direction, but even the leading end of the adhesive sheet in the feeding direction is unnecessary. If the adhesive sheet can be separated, the adhesive sheet is separated from the unnecessary sheet along the cut corresponding to the inner region of the adhesive sheet as the adhesive sheet is peeled off.
Moreover, since the depth of cut of the release sheet corresponding to the inner region of the adhesive sheet is shallower than the depth of cut of the release sheet corresponding to the leading end portion of the adhesive sheet in the feeding direction, the adhesive sheet and the corresponding depth It is possible to suppress poor adhesion of the adhesive sheet such that the release sheet portion falls off from the original fabric or the adhesive sheet with the release sheet portion attached thereto is attached to the adherend. At this time, as in the apparatus of Patent Document 1, the peeling sheet portion corresponding to the leading end portion in the feeding direction of the adhesive sheet may come off together with the adhesive sheet with the peel plate, but corresponds to the inner region of the adhesive sheet. Since the depth of the cut of the release sheet is shallow, the release sheet part that has come off together with the adhesive sheet will not become larger, and the release sheet part is recovered by pulling in the normal recovery direction of the release sheet Will come to be.
In addition, according to the said sheet manufacturing apparatus and manufacturing method, the raw material by which the notch was formed similarly to the above can be prepared, and when the said original fabric is used for a sheet sticking apparatus and the sticking method, as mentioned above, it is an adhesive sheet. Can be peeled and pasted without difficulty.

  Further, when the cutter blade region that forms the cut corresponding to the leading end of the adhesive sheet in the feeding direction is configured to have a displacement means that can be changed, even if a partial region of the cutter blade deteriorates due to wear or the like, A notch corresponding to the leading end of the adhesive sheet in the feeding direction can be formed in the region.

  Moreover, the cutting | disconnection in the feed-off direction of an adhesive sheet can be more reliably cut | disconnected from an unnecessary sheet | seat by performing the cutting | disconnection in an initial stage peeling area | region several times.

  Furthermore, if the adjusting means is configured to form a notch corresponding to the leading end portion in the feeding direction of the adhesive sheet by performing the separating and approaching operation of the cutter portion and the pressure receiving portion at least once, the leading end portion in the feeding direction of the adhesive sheet is formed. It can be effectively separated from unnecessary sheets.

The schematic front view of the sheet sticking apparatus which concerns on embodiment. The schematic perspective view of the original fabric after cutting formation. (A), (B) is explanatory drawing which shows the cutting | disconnection point of a cutting | disconnection means. (A) And (B) is explanatory drawing which shows the cutting point which concerns on a prior art example.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
In this specification, “left”, “right”, “upper”, and “lower” are used with reference to FIG. 1 unless otherwise specified.

  1 to 3, a sheet sticking apparatus 10 includes a table 11 that sucks and supports a wafer WF as an adherend and a ring frame RF, and a linear motion motor 12 as a drive device that can move the table 11 in the left-right direction. A stripping sheet RL and a strip-shaped sheet WS temporarily attached to one surface of the strip-shaped sheet WS. The cut sheet CU is formed in the belt-like sheet WS, the adhesive sheet AS is formed inside the cut CU, and the unnecessary sheet US is formed outside the cut CU, and the unnecessary sheet US is wound up. A possible winding means 16, a peeling plate 18 as a peeling means for folding the peeling sheet RL and peeling the adhesive sheet AS from the peeling sheet RL, and peeling with this peeling plate 18 It is constituting the adhesive sheet AS that a pressing roller 19 as a pressing means for affixing is pressed against the ring frame RF and the wafer WF. The belt-like sheet WS includes a base sheet BS and an adhesive layer AD laminated on one surface of the base sheet BS, and is temporarily attached to the release sheet RL via the adhesive layer AD. A protective sheet PS is stuck on the lower surface of the wafer WF.

  The feeding means 14 includes a support shaft 25 that supports the original fabric RS, and a first drive roller 27 and a first pinch roller 28 that sandwich the original fabric RS that is fed from the support shaft 25 and passes through the cutting means 15. The second drive roller 31 and the second pinch roller 32 that sandwich the release sheet RL after passing through the release plate 18, and the winding shaft that winds the release sheet RL after passing through the release sheet RL with a predetermined torque by a drive device (not shown). 34. The drive rollers 27 and 31 are rotatably provided via rotation motors DM1 and DM2 as drive devices.

  The cutting means 15 is disposed on the belt-like sheet WS side of the raw fabric RS to be fed out, and the die cut roller 36 as a cutter portion provided rotatably by a rotation motor DM3 as a driving device, and the raw fabric RS in between. A platen roller 37 serving as a pressure receiving portion that receives the pressing force of the die cut roller 36 and is opposed to the die cut roller 36, and the die cut roller 36 is moved in the left-right direction so that the relative distance between the die cut roller 36 and the platen roller 37 is increased. And an adjusting means 38 that can be adjusted. The platen roller 37 is rotatably provided in conjunction with the die cut roller 36 by a mechanism (not shown).

  The die cut roller 36 is supported by an adjusting means 38 via a bracket 39 together with a rotation motor DM3. The die-cut roller 36 includes a closed-loop cutting blade 40 projecting from the outer peripheral surface, and is provided so that a substantially circular cut CU that is larger than the inner diameter dimension of the ring frame RF and smaller than the outer dimension dimension can be formed on the belt-like sheet WS. It has been. Moreover, the cutting blade 40 is provided over the range of 270 degrees in the rotation direction of the die-cut roller 36, for example, and the height is set to 450 μm.

  Here, the adhesive sheet AS formed by the cutting blade 40 is formed by the tip end 40a of the cutting blade 40 at the leading end region of the strip-shaped sheet WS (direction in which the original fabric RS is directed from the support shaft 25 to the take-up shaft 34). The The portion of the adhesive sheet AS formed by the tip 40a becomes the initial peeling region Sa as the leading edge in the feeding direction of the adhesive sheet that is first peeled from the peeling sheet RL by the peeling plate 18, and the cut corresponding to the initial peeling region Sa. The cut-in CU part is set as an initial cut-in CU1. Further, the area to be peeled after the peeling of the initial peeling area Sa, that is, the entire area other than the initial peeling area Sa in the adhesive sheet AS becomes the next peeling area Sb as the inner area of the adhesive sheet, and this next peeling area Sb. The cut CU portion corresponding to is the next cut CU2, and the rear end portion of the adhesive sheet in the feeding direction is formed by the rear end 40b of the cutting blade 40. The next release region Sb is not limited to the entire region other than the initial release region Sa, and may be a partial region of the adhesive sheet AS that is adjacent to the initial release region Sa and is peeled off after the initial release region Sa is peeled off. Good.

  The adjusting means 38 includes an output shaft 38A connected to the bracket 39, and functions as a linear motor as a driving device capable of moving the output shaft 38A in the left-right direction, and in the direction of arrow R1 in FIG. Alternatively, it has a function as a rotation motor as a driving device capable of rotating the output shaft 38A in the direction opposite to the arrow R1. The displacement means is configured by a function capable of rotating the output shaft 38A in the direction of the arrow R1 in FIG. 3A or in the direction opposite to the arrow R1, and the die cut roller 36 is moved in the direction of arrow R1 or in the direction opposite to the arrow R1. By rotating 180 degrees, the direction of the die cut roller 36 in the direction perpendicular to the paper surface in the figure can be reversed. As a result, the region where the initial cut CU1 is formed can be changed to the rear end 40b of the cutting blade 40, and the initial cut CU1 corresponding to the initial separation region Sa is formed at either the front end 40a or the rear end 40b of the cutting blade 40. Any of them can be selectively used according to the deterioration state of the front end 40a and the rear end 40b. Note that the displacement means may employ a rotation motor as a drive device independent of the adjustment means 38.

  Here, the cutting means 15 is provided with energy applying means (not shown), and the cutting CU can be formed while applying energy to the raw fabric RS by the energy applying means. Examples of the energy applying means include a coil heater built in at least one of the die-cut roller 36 and the platen roller 37, and a blower that blows hot air from a position away from the rollers 36 and 37 to the formation position of the cut CU. An irradiation device that irradiates energy rays such as a vessel, ultraviolet rays, infrared rays, and microwaves.

  The winding means 16 is wound around the unnecessary sheet US after the cutting means 15 forms the cut CU, and peels off the unnecessary sheet US from the release sheet RL. A take-up shaft 51 for taking up the unnecessary sheet US is provided. The take-up shaft 51 is rotatably provided via a rotation motor DM4 as a drive device, and can take up the unnecessary sheet US with a predetermined torque.

  Next, a method for applying the adhesive sheet AS in the present embodiment will be described.

  First, the raw fabric RS supported by the support shaft 25 is passed between the first drive roller 27 and the first pinch roller 28 and between the die cut roller 36 and the platen roller 37. Then, the strip-like sheet WS is peeled from the release sheet RL, and the strip-like sheet WS is wound around the peeling roller 50, and then the lead end is fixed to the winding shaft 51. Further, the release sheet RL is folded at the tip of the release plate 18 to pass between the second drive roller 31 and the second pinch roller 32, and its lead end is fixed to the winding shaft 34. In the present embodiment, the belt-like sheet WS has a thickness of 100 μm, and the release sheet RL has a thickness of 25 μm. Further, the relative distance between the die cut roller 36 and the platen roller 37 is adjusted by the adjusting means 38. In the present embodiment, when the tip 40a of the cutting blade 40 forms the initial cut CU1, the distance CL1 between the tip 40a and the platen roller 37 is set to 5 μm, and other than the tip 40a of the cutting blade 40 is cut. When forming the embedded CU, the distance CL2 between the cutting blade 40 and the platen roller 37 is set to 20 μm. In the present embodiment, as shown in FIG. 1, the center of the area where the cutting blade 40 is not formed in the rotation direction of the die cut roller 36 is set as the start position St of the die cut roller 36, and the start position St is set to the platen roller 37. The rotation of the die cut roller 36 is stopped in the state of approaching again.

  Then, when the raw fabric RS is fed out by interlocking the rotation motors DM1 to DM4, the cutting blade 40 forms a cut CU from the base sheet BS side to the release sheet RL side, and the strip sheet WS is cut. It is divided into an adhesive sheet AS inside the CU and an unnecessary sheet US outside the cut CU. In the process of forming the adhesive sheet AS, first, the die cut roller 36 rotates in the direction of the arrow in FIG. 3A, and the formation of the initial cut CU1 is started when the die cut roller 36 rotates 45 ° from the start position St. Then, the initial cut CU1 is formed by setting the interval CL1 from this time point to the time point when the set angle α1 is rotated by 5 °, for example. The set angle α1 may be changed in the range of 0 ° to 45 °. Thereafter, the adjusting means 38 is operated to adjust the interval CL2 (see FIG. 3B) to 20 μm, and the next cutting CU2 is formed by the cutting blade 40 to form the next peeling region Sb. Therefore, a cut CU having a depth of 20 μm is formed in the release sheet RL corresponding to the initial cut CU1, and the initial cut CU1 surely enters the release sheet RL, and thereby the initial peel region Sa. Is easily separated from the unnecessary sheet US. In addition, the release sheet RL corresponding to the next cut CU2 is formed with a cut CU having a depth of 5 μm, whereby the release sheet RL portion corresponding to the next peel area Sb becomes the initial peel area Sa. It becomes difficult to cut compared with the release sheet RL portion corresponding to. After the cut CU is formed and before the next cut CU is formed, the adjusting means 38 is operated to adjust the distance CL1 between the tip 40a and the platen roller 37 to 5 μm again.

  After the formation of the cut CU, the unrolled sheet RS is peeled off from the release sheet RL by the peeling roller 50, and the unnecessary sheet US is wound around the take-up shaft 51. At this time, since the peeling region Sa is easily separated from the unnecessary sheet US, the adhesive sheet AS does not rise together with the unnecessary sheet US in the direction of the winding shaft 51. Next, when the adhesive sheet AS of the original web RS on which the unnecessary sheet US is wound is peeled off from the front end of the release plate 18 by a predetermined amount, the front end of the adhesive sheet AS is detected by a sensor (not shown) and stopped. It becomes a state. At this time, since the initial cut CU1 surely enters the release sheet RL, the initial release area Sa is reliably released from the release sheet RL, and is taken up in the direction of the second drive roller 31 together with the release sheet RL. There is no. Note that the part of the release sheet RL corresponding to the initial release area Sa may also come out of the release plate 18 together with the adhesive sheet AS. However, since the release sheet RL portion corresponding to the next release region Sb is difficult to be cut, the release sheet portion that has come out together with the adhesive sheet AS along with the feeding of the original fabric RS does not further increase. A force pulling from the tip of the release plate 18 toward the second drive roller 31 acts on the release sheet portion that has come out together with the sheet AS, and the release sheet RL portion corresponding to the initial release area Sa can be reliably released from the adhesive sheet AS. . In the standby state, as shown in FIG. 1, the die cut roller 36 has the start position St opposed to the platen roller 37, and the die cut roller 36 and The position of the platen roller 37 can be displaced in the vertical direction. According to this, the intervals between the adhesive sheets AS can be arbitrarily adjusted, and the positions thereof can be changed in the vertical direction according to the length in the feeding direction of the adhesive sheet AS. Thereafter, the ring complaint RF and the wafer WF are placed on the table 11 via a transfer means (not shown) and are sucked and held. Next, the table 11 is conveyed below the peeling plate 18 from the right side to the left side via the linear motor 12. When the table 11 is detected at a predetermined position by a sensor (not shown), the first and second drive rollers 27 and 31 are rotated in synchronism with the conveyance of the table 11 to feed out the original fabric RS, and the leading edge of the peeling plate 18 The adhesive sheet AS is peeled off. Then, the peeled adhesive sheet AS receives a pressing force by the pressing roller 19 and is attached to each upper surface of the ring claim RF and the wafer WF, and the wafer WF and the ring claim RF are integrated through the adhesive sheet AS. At this time, since the release sheet RL portion corresponding to the initial release region Sa is reliably peeled from the adhesive sheet AS, the adhesive sheet AS with the release sheet RL portion attached thereto is attached to the adherend. There is no.

  Therefore, according to such an embodiment, by changing the interval between the cutting blade 40 and the platen roller 37 during the formation of one cut CU, the initial peeling region Sa becomes the next peeling region by cutting with the cutting blade 40. Since the cutting depth can be made deeper than Sb, it is possible to prevent the adhesive sheet AS from being peeled off together with the unnecessary sheet US and the adhesive sheet AS from being unable to be pasted. And since the cutting depth of the cutting blade 40 to the peeling sheet RL part corresponding to the next peeling area Sb is shallow, the adhesive sheet AS falls off from the original fabric RS after passing through the cutting means 15, and the adhesive sheet AS It is possible to prevent the sticking from being impossible. As described above, according to the embodiment, even if the release sheet RL is thinned, the adhesive sheet AS can be formed, peeled off, and pasted accordingly, and cost reduction due to the thinning is required. Can be met.

As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this.
In other words, the present invention has been illustrated and described mainly with respect to specific embodiments, but without departing from the scope of the technical idea and object of the present invention, the shape, position, or With respect to the arrangement and the like, those skilled in the art can make various changes as necessary.
Therefore, the description limited to the shape disclosed above is an example for easy understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded one part or all part is included in this invention.

  For example, the winding means 16 is omitted, and the unnecessary sheet US is not peeled from the release sheet RL, but the adhesive sheet AS is peeled off by the release plate 18, and the release sheet RL and the unnecessary sheet US are wound around the take-up shaft 34. You may make it take. Even in such a case, it is possible to prevent the initial peeling region Sa from being peeled off by the peeling plate 18 and the adhesive sheet AS being taken up in the direction of the second drive roller 31 together with the unnecessary sheet US.

Further, in forming the cut C, each of the rotation motors DM1 to DM4 is interlocked to reciprocate the original fabric RS in the feed-out direction, and the cut in the initial peeling region Sa with respect to the formation of one adhesive sheet AS. May be performed multiple times.
Further, in the above-described embodiment, the adjusting means 38 is actuated at the time of 45 ° rotation from the start position St, the cutting blade 40 is once pulled out from the cutting CU, the cutting blade 40 is inserted into the cutting CU again, and one adhesive sheet In contrast to the formation of AS, the separating operation and the approaching operation of the cutting blade 40 and the platen roller 37 may be performed at least once to form the cut SU corresponding to the initial peeling region Sa. At this time, the feeding of the raw fabric RS may be stopped.

  Moreover, you may comprise a sheet manufacturing apparatus by abbreviate | omitting the peeling plate 18 and the press roller 19 of the said sheet sticking apparatus 10. FIG. According to the apparatus, after the adhesive sheet AS is formed by the cutting means 15 as in the above-described embodiment, the original fabric RS on which the adhesive sheet AS is temporarily attached to the release sheet RL is wound around the winding shaft 34. The raw fabric RS wound on the winding shaft 34 can be separately conveyed and stored, or used in a sheet sticking apparatus or the like that does not have a cutting means. Thus, when the raw fabric RS wound on the winding shaft 34 is used in a sheet sticking apparatus or the like that does not have cutting means in that state, the rear end portion in the feeding direction of the feeding means 14 is the sheet sticking apparatus or the like. Therefore, it is only necessary to change the setting of the adjusting means 38 so that the cut CU at the rear end in the feeding direction of the feeding means 14 in the adhesive sheet AS becomes deeper than the other areas.

  Furthermore, the planar shape of the cutting blade 40 is a polygonal shape, an ellipse, an ellipse, a rhombus, a straight line as long as the cut CU can be formed in the belt-like sheet WS and the inside of the cut CU can be formed as the adhesive sheet AS. Various changes such as a shape combined with a curve are possible, and the height of the blade can also be arbitrarily changed.

  The cutting blade 40 may be an engraving blade formed by machining other than etching, a flat blade having a blade formed on a flat plate, a Thomson blade, or the like in addition to a rotary die. .

  Further, the distance between the cutting blade 40 and the platen roller 37 by the adjusting means 38 can be changed as appropriate in consideration of the thickness and properties of the original fabric RS, particularly the thickness and properties of the release sheet RS.

Furthermore, various design changes can be made to the feeding means 14, the peeling plate 18, and the pressing roller 19.
Moreover, the thickness of the member which comprises original fabric RS is not limited to what was illustrated by the said embodiment at all.
Further, a driving device for moving the sheet sticking apparatus 10 is provided, and the sheet sticking apparatus 10 is moved rightward in FIG. 1 or the table 11 is moved leftward while the table 11 is stopped. The apparatus 10 may be configured to stick the adhesive sheet AS to the adherend by moving the apparatus 10 in the right direction,
Further, the same adjustment means 38 as in the above embodiment is also provided on the platen roller 37 side, and with the die cut roller 36 stopped, the platen roller 37 is moved away from the die cut roller 36 or the die cut roller 36 and the platen The distance between the cutting blade 40 and the platen roller 37 may be adjusted by moving the rollers 37 apart from each other.

  Furthermore, the drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

  In addition, the adherend may be a glass plate, a steel plate, or a resin plate instead of the wafer WF or the ring frame RF, and the semiconductor wafer may be a silicon semiconductor wafer or a compound semiconductor wafer. It may be. Further, instead of the ring frame RF, a frame having a different shape such as a C-shape or U-shape may be used, or a single adherend may be used as an attachment target of the adhesive sheet AS without the ring frame RF.

DESCRIPTION OF SYMBOLS 10 Sheet sticking apparatus 14 Feeding means 15 Cutting means 18 Release plate (peeling means)
19 Pressing roller (pressing means)
36 Cutter (die cut roller)
37 Pressure receiver (platen roller)
38 Adjusting means 40 Cutting blade AD Adhesive layer AS Adhesive sheet BS Base sheet CU Cutting CU1 Initial cutting CU2 Next cutting
RF ring frame (adherence)
RL Release sheet RS Original Sa Initial release area (adhesive sheet feed direction tip)
Sb Next release area (inner area of adhesive sheet)
US Unnecessary sheet WF Semiconductor wafer (adhered body)
WS Strip sheet

Claims (7)

The belt-like sheet having an adhesive layer on one surface of the belt-like base material sheet is provided with a feeding means for feeding out the original fabric temporarily attached to the belt-like release sheet via the adhesive layer, and the belt-like sheet is cut into a predetermined shape. A cutting means for forming an adhesive sheet inside the cut and forming an unnecessary sheet outside the cut, and feeding the adhesive sheet temporarily attached to the release sheet to the adhesive sheet A sheet sticking device including a peeling means for peeling from the front end portion toward the inner region of the adhesive sheet, and a pressing means for pressing and sticking the adhesive sheet to an adherend,
The cutting means is disposed on the belt-like sheet side of the original fabric and has a cutter blade having a cutting blade capable of forming the incision, and the cutter portion is arranged to face the cutter portion with the original fabric interposed therebetween. A pressure receiving portion that receives the pressure of the pressure, and an adjustment means that can adjust the interval between the cutter portion and the pressure receiving portion,
The adjusting means adjusts the interval during the formation of the cut so that the depth of the cut corresponding to the leading end portion in the feeding direction of the adhesive sheet corresponds to the inner region of the adhesive sheet. A sheet sticking device, characterized in that it is provided so as to be able to form a deep cut compared to the depth.   The sheet sticking apparatus according to claim 1, further comprising: a displacing unit capable of changing a cutter blade region that forms a cut corresponding to a leading end portion in the feeding direction of the adhesive sheet by displacing the cutter portion.   The sheet sticking according to claim 1 or 2, wherein the feeding means performs cutting at a leading end portion in the feeding direction of the adhesive sheet a plurality of times for forming one adhesive sheet in conjunction with the cutting means. apparatus.   The adjusting means is provided so as to be able to form a notch corresponding to the leading end portion of the adhesive sheet by performing the approaching and separating operation of the cutter portion and the pressure receiving portion at least once for the formation of one adhesive sheet. The sheet sticking device according to claim 1, wherein the sheet sticking device is provided. A feeding step of feeding out the original fabric temporarily attached to the strip-shaped release sheet via the adhesive layer by the strip-shaped sheet having the adhesive layer on one surface of the strip-shaped base sheet;
A slit having a predetermined shape is formed in the belt-like sheet by a cutter portion having a cutting blade capable of forming a cut having a predetermined shape and a pressure receiving portion that receives the pressing force of the cutter blade with the original fabric interposed therebetween. Forming an adhesive sheet on the inside of the cut and forming an unnecessary sheet on the outside of the cut,
A peeling step of peeling the adhesive sheet temporarily attached to the release sheet from the leading end of the adhesive sheet toward the inner region of the adhesive sheet;
A pressing step of pressing and bonding the adhesive sheet to an adherend,
In the cutting step, by adjusting the distance between the cutter portion and the pressure receiving portion, the depth of the cut corresponding to the leading end portion in the feeding direction of the adhesive sheet corresponds to the inner region of the adhesive sheet. A sheet sticking method characterized by forming a deep cut compared to the depth. A feeding means for feeding out the original fabric temporarily attached to the strip-shaped release sheet by the strip-shaped sheet having the adhesive layer on one surface of the strip-shaped base sheet;
A sheet manufacturing apparatus including a cutting means for forming an incision having a predetermined shape in the belt-like sheet to form an adhesive sheet inside the notch and forming an unnecessary sheet outside the notch,
The cutting means is disposed on the belt-like sheet side of the original fabric and has a cutter blade having a cutting blade capable of forming the incision, and the cutter portion is arranged to face the cutter portion with the original fabric interposed therebetween. A pressure receiving portion that receives the pressure of the pressure, and an adjustment means that can adjust the interval between the cutter portion and the pressure receiving portion,
The adjusting means adjusts the interval during the formation of the cut so that the depth of the cut corresponding to at least one of the leading end portion in the feeding direction and the trailing end portion in the feeding direction of the adhesive sheet is A sheet manufacturing apparatus, characterized in that it is provided so as to be able to form a deeper cut than a depth of cut corresponding to the inner region. A feeding step of feeding out the original fabric temporarily attached to the strip-shaped release sheet via the adhesive layer by the strip-shaped sheet having the adhesive layer on one surface of the strip-shaped base sheet;
A slit having a predetermined shape is formed in the belt-like sheet by a cutter portion having a cutting blade capable of forming a cut having a predetermined shape and a pressure receiving portion that receives the pressing force of the cutter blade with the original fabric interposed therebetween. Forming an adhesive sheet on the inside of the cut and forming a unnecessary sheet on the outside of the cut,
In the cutting step, by adjusting the distance between the cutter part and the pressure receiving part, the depth of the cut corresponding to at least one of the leading end part and the trailing end part in the feeding direction of the adhesive sheet is A sheet manufacturing method comprising forming a cut deeper than a depth of cut corresponding to an inner region.

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