JP2013074101A - Sheet sticking apparatus and sticking method, and sheet manufacturing apparatus and manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To allow an unnecessary sheet to be successfully peeled and an adhesive sheet to be successfully stuck.SOLUTION: A sheet sticking apparatus 10 comprises: delivery means 14 for delivering a master roll RS in which a belt-like sheet WS is tentatively adhered to a belt-like peeling sheet RL; cutting means 15 for forming a notch CU in the belt-like sheet WS to form an adhesive sheet AS inside the notch CU and to form an unnecessary sheet US outside the notch CU; and a peeling plate 18 for peeling the adhesive sheet AS from an initial stage peeling region (a tip end in a delivering direction) Sa. The delivery means 14 has tension applying means 17 capable of increasing and decreasing tension applied to the master roll RS, and is provided so as to form a gap SP between an outer edge of the adhesive sheet AS of the initial stage peeling region Sa and the unnecessary sheet US.

Description

  The present invention relates to a sheet sticking apparatus and a sticking method, and a sheet manufacturing apparatus and a manufacturing method, and more specifically, a sheet sticking apparatus and a sticking method capable of forming an adhesive sheet by forming a cut in a belt-like sheet, In addition, the present invention relates to a sheet manufacturing apparatus and a manufacturing method.

  Conventionally, a sheet sticking apparatus for sticking an adhesive sheet to an adherend such as a semiconductor wafer (hereinafter sometimes simply referred to as “wafer”) has been widely used. As such a sheet sticking apparatus, for example, It is disclosed in Patent Document 1. The sheet sticking device of Patent Document 1 includes a feeding unit that feeds an original fabric in which a belt-like sheet is temporarily attached to a release sheet, a cutting blade that forms a circular cut in the course of feeding the original fabric, A peel plate for peeling the adhesive sheet formed on the inside from the release sheet, and a press roller capable of pressing the peeled adhesive sheet against the wafer and the ring frame for pasting. In such a sheet affixing device, after the notch formation, and before the adhesive sheet is peeled from the release sheet, a winding means for peeling off the unnecessary sheet formed outside the notch from the release sheet and winding it up. What you have is known.

JP-A-2005-116929

  By the way, recently, there is a tendency that the diameter of the wafer is increased, and the diameter of the adhesive sheet is increased accordingly. Therefore, as shown in FIG. 4, the adhesive sheet AS has a leading end vertical length with respect to a certain interval along the feeding direction of the adhesive sheet AS at the leading end portion in the feeding direction (hereinafter referred to as “tip vertical interval Sx”). The ratio of the distance (hereinafter referred to as “tip lateral distance Sy”) along the direction orthogonal to the feeding direction of the adhesive sheet AS at the position advanced by the distance Sx increases (hereinafter referred to as “tip vertical / horizontal ratio Sxy”). If you look at it, the bag will be in a straight line. When the leading end aspect ratio Sxy is increased, when the unnecessary sheet at the leading end in the feeding direction of the adhesive sheet AS is separated from the adhesive sheet AS by the winding means, the separation is performed at once in a wide range. In such a case, the cutting formed by the cutting means is insufficient, for example, the adhesive sheet AS and the unnecessary sheet are not completely separated, or the adhesive between the adhesive sheet AS and the unnecessary sheet is reattached. In some cases, the force required to separate the adhesive sheet AS and the unnecessary sheet may exceed the force required to separate the adhesive sheet AS and the release sheet, and the adhesive sheet AS may be wound together with the unnecessary sheet. There arises a disadvantage that the adhesive sheet AS cannot be pasted by being taken up by the take-up means. Such an inconvenience also occurs when the adhesive sheet is formed in a square or the like and the front end in the feeding direction is formed in a straight line and becomes longer in the width direction of the original fabric.

[Object of invention]
An object of the present invention is to provide a sheet sticking apparatus and a sticking method, and a sheet manufacturing apparatus and a manufacturing method capable of satisfactorily peeling an unnecessary sheet, and thus sticking an adhesive sheet regardless of the shape of the adhesive sheet. There is.

In order to achieve the above-mentioned object, the present invention feeds out a raw material in which a belt-like sheet having an adhesive layer on one surface of a belt-like base material sheet is temporarily attached to the belt-like release sheet via the adhesive layer. A cutting means for forming an incision in a predetermined shape in the belt-like sheet and forming an adhesive sheet inside the incision, and forming an unnecessary sheet outside the incision; and temporarily attaching to the release sheet A peeling means for peeling the adhesive sheet from the leading end portion in the feeding direction of the adhesive sheet, and a pressing means for pressing and sticking the adhesive sheet to an adherend,
The feeding means has tension applying means capable of increasing or decreasing the tension applied to the original fabric, and increases the tension applied to the original fabric to increase the outer edge of the adhesive sheet and the unnecessary sheet at the leading end of the adhesive sheet in the feeding direction. The gap is provided so that a gap can be formed.

  In this invention, it is preferable that the said tension | tensile_strength provision means takes the structure that the tension | tensile_strength provided to an original fabric is adjustable based on the positional information on the cutting by the said cutting | disconnection means.

  The feeding means may perform cutting at the initial peeling region a plurality of times for forming one adhesive sheet in conjunction with the cutting means.

  Further, the tension applying means can be configured to be provided so that the tension can be increased stepwise.

Furthermore, the sheet sticking method of the present invention is a feeding step in which a belt-like sheet having an adhesive layer on one surface of a belt-like base material sheet is fed out from the original fabric temporarily attached to the belt-like release sheet via the adhesive layer. When,
A cutting step of forming an incision of a predetermined shape in the belt-like sheet to form an adhesive sheet inside the notch, and forming an unnecessary sheet outside the notch,
A peeling step of peeling the adhesive sheet temporarily attached to the release sheet from the leading end portion in the feeding direction of the adhesive sheet;
A pressing step of pressing and bonding the adhesive sheet to an adherend,
In the feeding step, a method is adopted in which a gap is formed between the outer edge of the adhesive sheet and the unnecessary sheet at the leading end in the feeding direction of the adhesive sheet by increasing the tension applied to the original fabric.

Further, the sheet manufacturing apparatus of the present invention is a feeding means for feeding out a raw material in which a belt-like sheet having an adhesive layer on one surface of a belt-like base material sheet is temporarily attached to the belt-like release sheet via the adhesive layer. When,
A sheet manufacturing apparatus including a cutting means for forming an incision having a predetermined shape in the belt-like sheet to form an adhesive sheet inside the notch and forming an unnecessary sheet outside the notch,
The feeding means has tension applying means capable of increasing / decreasing the tension applied to the original fabric, and increases the tension applied to the original fabric, thereby increasing the leading end portion and the trailing end portion of the adhesive sheet in the feeding direction. In this configuration, a gap is provided between at least one of the outer edge of the adhesive sheet and the unnecessary sheet.

The sheet manufacturing method of the present invention is a feeding step in which a belt-like sheet having an adhesive layer on one surface of a belt-like base material sheet is fed out from the original fabric temporarily attached to the belt-like release sheet via the adhesive layer. When,
A cutting step of forming a cut in a predetermined shape in the belt-like sheet to form an adhesive sheet inside the cut and forming an unnecessary sheet outside the cut,
In the feeding step, a gap is formed between the outer edge of the adhesive sheet and the unnecessary sheet at at least one of the leading end portion and the trailing end portion in the feeding direction of the adhesive sheet by increasing the tension applied to the original fabric. , Is adopted.

According to the present invention, by increasing the tension of the original fabric, before peeling the unnecessary sheet from the release sheet, a gap is formed between the outer edge of the adhesive sheet and the unnecessary sheet at the leading end of the adhesive sheet in the feeding direction, Once they have been reliably disconnected. Thus, once the outer edge of the adhesive sheet and the unnecessary sheet are separated from each other, the adhesive sheet can be reliably used even if the tip aspect ratio Sxy is large or the cutting formed by the cutting means is insufficient. It is possible to avoid being wound together. Moreover, it becomes easy to make a gap by separating them once, it becomes difficult to re-adhere the adhesives of the adhesive sheet AS and the unnecessary sheet, and the inconvenience that the adhesive sheet cannot be pasted as in the past can be solved. It becomes possible.
In addition, according to the said sheet manufacturing apparatus and manufacturing method, it can prevent that an adhesive sheet is wound up with an unnecessary sheet | seat, and the raw material by which the adhesive sheet is not temporarily attached is produced partially. When preparing an original fabric in which a gap is formed between the outer edge of the adhesive sheet and the unnecessary sheet at the leading end of the adhesive sheet in the feeding direction, and using the original fabric for a sheet pasting apparatus or pasting method, Thus, it becomes possible to eliminate the inconvenience that the adhesive sheet cannot be attached.

  Further, since the tension applied to the original fabric by the tension applying unit can be adjusted based on the position information of the cutting by the cutting unit, an unnecessary sheet is peeled off after forming a cut at the leading end of the adhesive sheet in the feeding direction. At the previous timing, a gap can be formed between the outer edge of the adhesive sheet and the unnecessary sheet at the leading end of the adhesive sheet in the feeding direction.

  Furthermore, by performing the cutting at the leading end in the feeding direction of the adhesive sheet a plurality of times, the depth of the cut can be stably set to a predetermined depth.

  In addition, when the tension of the original fabric by the tension applying unit can be increased stepwise, the size of the gap can be adjusted stepwise.

The schematic front view of the sheet sticking apparatus which concerns on embodiment. The schematic perspective view of the original fabric after cutting formation. The partial front view of the sheet sticking apparatus which concerns on a modification. Explanatory drawing of peeling operation | movement.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
In this specification, “left”, “right”, “upper”, and “lower” are used with reference to FIG. 1 unless otherwise specified.

  1 and 2, a sheet sticking apparatus 10 includes a table 11 that sucks and supports a wafer WF and a ring frame RF as adherends, and a linear motion motor 12 as a drive device that can move the table 11 in the left-right direction. A stripping sheet RL and a strip-shaped sheet WS temporarily attached to one surface of the strip-shaped sheet WS. The cut sheet CU is formed in the belt-like sheet WS, the adhesive sheet AS is formed inside the cut CU, and the unnecessary sheet US is formed outside the cut CU, and the unnecessary sheet US is wound up. The possible winding means 16, the peeling plate 18 as a peeling means for folding the release sheet RL and peeling the adhesive sheet AS from the release sheet RL, and the peeling plate 18 It is constituted by a pressing roller 19 as a pressing means for sticking an adhesive sheet AS which is to press the ring frame RF and the wafer WF. The belt-like sheet WS includes a base sheet BS and an adhesive layer AD laminated on one surface of the base sheet BS, and is temporarily attached to the release sheet RL via the adhesive layer AD. A protective sheet PS is stuck on the lower surface of the wafer WF.

  The feeding means 14 includes a support shaft 25 that supports the original fabric RS, and a first drive roller 27 and a first pinch roller 28 that sandwich the original fabric RS that is fed from the support shaft 25 and passes through the cutting means 15. The second drive roller 31 and the second pinch roller 32 that sandwich the release sheet RL after passing through the release plate 18, and the winding shaft that winds the release sheet RL after passing through the release sheet RL with a predetermined torque by a drive device (not shown). 34. The drive rollers 27 and 31 are rotatably provided via rotation motors DM1 and DM2 as drive devices. The first drive roller 27, the rotation motor DM1, the second drive roller 31, and the rotation motor DM2 constitute the tension applying means 17. The rotation motor DM1 and the rotation motor DM2 are capable of rotating in the forward and reverse directions of the output shaft and are provided so that the rotation speed and torque can be adjusted. By this adjustment, the rotation between the drive rollers 27 and 31 is achieved. A tension can be applied to the original fabric RS, and the tension can be adjusted to increase or decrease the tension.

  The cutting means 15 is disposed on the side of the strip-shaped sheet WS of the unstretched fabric RS that is rotatable, and is disposed on the release sheet RL side of the unfolded fabric RS, and is interlocked with the die-cut roller 36 by a mechanism (not shown). A platen roller 37 that is rotatably provided, a rotation motor DM3 as a driving device for rotating the die cut roller 36, and a distance adjusting means for adjusting a relative distance between the die cut roller 36 and the platen roller 37, not shown. And a drive device such as a linear motor.

  The die cut roller 36 includes a closed-loop cutting blade 40 protruding from the outer peripheral surface, and can form a substantially circular cut CU that is larger than the inner diameter dimension of the ring frame RF and smaller than the outer dimension on the belt-like sheet WS. Is provided. The adhesive sheet AS formed by the cutting blade 40 is first peeled off from the release sheet RL by the release plate 18 at the leading end region of the belt-like sheet WS (the direction in which the original fabric RS is directed from the support shaft 25 toward the take-up shaft 34). This is an initial peeling region Sa (see FIG. 2) as a leading end portion in the feeding direction of the adhesive sheet. A position sensor (not shown) capable of detecting the rotational position of the die cut roller 36 is provided, and position information of the cut CU formed by the die cut roller 36 can be output based on the detection result of the sensor. This position sensor may be configured to detect the position of the cutting blade 40 from the outside of the die cut roller 36 with an imaging means such as a camera or an optical sensor, or to determine the position of the cutting blade 40 from the pulse of the rotation motor DM3. You may comprise as follows.

  Here, the cutting means 15 is provided with energy applying means (not shown), and the cutting CU can be formed while applying energy to the raw fabric RS by the energy applying means. Examples of the energy applying means include a coil heater built in at least one of the die-cut roller 36 and the platen roller 37, and a blower that blows hot air from a position away from the rollers 36 and 37 to the formation position of the cut CU. An irradiation device that irradiates energy rays such as a vessel, ultraviolet rays, infrared rays, and microwaves.

  The winding means 16 is wound around the unnecessary sheet US after the cutting means 15 forms the cut CU, and peels off the unnecessary sheet US from the release sheet RL. A take-up shaft 51 for taking up the unnecessary sheet US is provided. The take-up shaft 51 is rotatably provided via a rotation motor DM4 as a drive device, and can take up the unnecessary sheet US with a predetermined torque.

  Next, a method for applying the adhesive sheet AS in the present embodiment will be described.

  First, the raw fabric RS supported by the support shaft 25 is passed between the first drive roller 27 and the first pinch roller 28 and between the die cut roller 36 and the platen roller 37. Then, the strip-like sheet WS is peeled from the release sheet RL, and the strip-like sheet WS is wound around the peeling roller 50, and then the lead end is fixed to the winding shaft 51. Further, the release sheet RL is folded at the tip of the release plate 18 to pass between the second drive roller 31 and the second pinch roller 32, and its lead end is fixed to the winding shaft 34. In the present embodiment, as shown in FIG. 1, the center of the area where the cutting blade 40 is not formed in the rotation direction of the die cut roller 36 is set as the start position St of the die cut roller 36, and the start position St is set to the platen roller 37. The rotation of the die cut roller 36 is stopped in the state of approaching again.

  Then, when the raw fabric RS is fed out by interlocking the rotation motors DM1 to DM4, the cutting blade 40 forms a cut CU from the base sheet BS side to the release sheet RL side, and the strip sheet WS is cut. It is divided into an adhesive sheet AS inside the CU and an unnecessary sheet US outside the cut CU. Here, as shown in FIG. 2, when it is confirmed by the position sensor (not shown) that the initial separation region Sa has been formed, the rotation motor DM2 performs the first operation while the rotation of the rotation motor DM1 is locked. 2 The first driving roller 27 is rotated in the direction opposite to the feeding direction of the belt-like sheet WS by the rotation motor DM1 while the driving roller 31 is rotated in the feeding direction of the belt-like sheet WS or the rotation of the rotation motor DM2 is locked. The first and second drive rollers 27 and 31 are rotated in the feeding direction of the belt-like sheet WS, and the rotation speed of the second drive roller 31 is made faster than the rotation speed of the first drive roller 27. The tension applied to the original fabric RS is increased by making the rotation speed of the first drive roller 27 slower than the rotation speed of the drive roller 31. As a result, the release sheet RL and the unnecessary sheet US are extended in the extending direction, and a gap SP is formed between the outer edge of the adhesive sheet AS in the initial release region Sa and the unnecessary sheet US, and once they are reliably separated. It becomes a state. By forming the gap SP, the adhesive sheet AS and the unnecessary sheet US are temporarily separated from each other at the initial peeling area Sa in a state where the adhesive sheet AS and the unnecessary sheet US are temporarily attached to the release sheet RL. In addition, in order to adjust the magnitude | size of the clearance gap SP, you may increase the tension | tensile_strength of the original fabric RS by the rotation motor DM1 and DM2 in steps.

  After the formation of the gap SP, when the raw material RS is fed out by interlocking the rotation motors DM1 to DM4, the unnecessary sheet US is peeled from the release sheet RL by the peeling roller 50, and the unnecessary sheet US is removed by the take-up shaft 51. Is wound up. At this time, since the initial peeling area Sa is once separated from the unnecessary sheet US, the adhesive sheet AS does not rise together with the unnecessary sheet US in the direction of the winding shaft 51. Next, when the adhesive sheet AS of the original web RS on which the unnecessary sheet US is wound is peeled off from the front end of the release plate 18 by a predetermined amount, the front end of the adhesive sheet AS is detected by a sensor (not shown) and stopped. It becomes a state. In the standby state, as shown in FIG. 1, the die cut roller 36 has the start position St opposed to the platen roller 37, and the die cut roller 36 and The position of the platen roller 37 can be displaced in the vertical direction. According to this, the intervals between the adhesive sheets AS can be arbitrarily adjusted, and the positions thereof can be changed in the vertical direction according to the length in the feeding direction of the adhesive sheet AS. Thereafter, the ring complaint RF and the wafer WF are placed on the table 11 via a transfer means (not shown) and are sucked and held. Next, the table 11 is conveyed below the peeling plate 18 from the right side to the left side via the linear motor 12. When the table 11 is detected at a predetermined position by a sensor (not shown), the first and second drive rollers 27 and 31 are rotated in synchronism with the conveyance of the table 11 to feed out the original fabric RS, and the leading edge of the peeling plate 18 The adhesive sheet AS is peeled off. Then, the peeled adhesive sheet AS receives a pressing force by the pressing roller 19 and is attached to each upper surface of the ring claim RF and the wafer WF, and the wafer WF and the ring claim RF are integrated through the adhesive sheet AS.

  Therefore, according to such an embodiment, the adhesive sheet AS and the unnecessary sheet US are separated once before the unnecessary sheet US is peeled off from the release sheet RL by the peeling roller 50, whereby the curvature of the outer edge of the adhesive sheet AS, etc. Regardless of the shape and size of the adhesive sheet AS, it is possible to increase the certainty of separation and prevent the adhesive sheet AS from rising together with the unnecessary sheet US in the direction of the winding shaft 51.

As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this.
In other words, the present invention has been illustrated and described mainly with respect to specific embodiments, but without departing from the scope of the technical idea and object of the present invention, the shape, position, or With respect to the arrangement and the like, those skilled in the art can make various changes as necessary.
Therefore, the description limited to the shape disclosed above is an example for easy understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded one part or all part is included in this invention.

  For example, the winding means 16 is omitted, and the unnecessary sheet US is not peeled from the release sheet RL, but the adhesive sheet AS is peeled off by the release plate 18, and the release sheet RL and the unnecessary sheet US are wound around the take-up shaft 34. You may make it take. Even in such a case, it is possible to prevent the initial peeling region Sa from being peeled off by the peeling plate 18 and the adhesive sheet AS being taken up in the direction of the second drive roller 31 together with the unnecessary sheet US.

  Further, in forming the cut CU, each of the rotation motors DM1 to DM4 is interlocked to reciprocate the original fabric RS in the feed-out direction, and cut in the initial peeling region Sa for the formation of one adhesive sheet AS. May be performed multiple times.

  Furthermore, you may comprise a sheet manufacturing apparatus by abbreviate | omitting the peeling plate 18 and the press roller 19 of the said sheet sticking apparatus 10. FIG. According to the apparatus, after the adhesive sheet AS is formed by the cutting means 15 as in the above-described embodiment, the original fabric RS on which the adhesive sheet AS is temporarily attached to the release sheet RL is wound around the winding shaft 34. The raw fabric RS wound on the winding shaft 34 can be separately conveyed and stored, or used in a sheet sticking apparatus or the like that does not have a cutting means. Thus, since the raw fabric RS wound on the winding shaft 34 becomes an initial peeling region Sa of a sheet sticking device or the like that is used separately in the feeding direction rear end portion of the feeding means 14, at least in the adhesive sheet AS. What is necessary is just to comprise so that the clearance gap SP may be formed when the feeding direction rear end part of the feeding means 14 is formed.

  In addition, the band-shaped sheet WS in the raw fabric RS is formed in advance with a predetermined interval at a predetermined interval by another device or the like, whereby the adhesive sheet AS is formed inside the cut CU. In the case where the unnecessary sheet US is formed outside the cut CU, the cutting means 15 of the sheet sticking device 10 can be omitted. Even in such a case, the same effect as that of the above embodiment can be obtained.

  Further, the planar shape of the cutting blade 40 can be variously changed such as a polygonal shape, an ellipse, an ellipse, a rhombus, and a shape combining a straight line and a curve.

Further, the tension applying means 17 can be variously modified as long as the tension of the raw fabric RS can be increased as in the embodiment. For example, the first drive roller 27 and the first pinch roller 28 are provided so as to be movable up and down by a drive device, or the original fabric RS is provided so as to be pressed by an output shaft that can advance and retreat in the thickness direction of the original fabric RS, and is fed out linearly The tension of the original fabric RS may be increased by deforming the original fabric RS to be bent. Further, the rotational motor DM2 can be adjusted in rotational speed and rotational torque, and the rotational speed and rotational torque of the rotational motor DM2 are controlled to increase the tension of the original fabric RS. Both the rotational speed and the rotational torque may be controlled to increase the tension of the original fabric RS.
Further, the rotation speed of the rotation motor DM1 is delayed, the rotation is temporarily stopped, or the rotation of the rotation motor DM2 is accelerated while the raw material RS is fed out without stopping the rotation motors DM1 to DM4. Thus, the tension of the raw fabric RS may be increased. In such a case, the tension applying means 17 also includes the second drive roller 31, the second pinch roller 32, and the rotation motor DM2.
Further, as shown in FIG. 3, on the downstream side of the cutting means 15 in the original roll feeding direction, bypass means such as hanging rollers 60, 61, 62, etc. for winding the release sheet RL are provided. A configuration may be adopted in which a driving roller 63 and a pinch roller 64 that are rotated by a rotation motor DM5 that is a driving device are arranged downstream of the 15 original fabric feeding direction. In this case, even when the release sheet RL does not extend or is difficult to extend, the gap SP can be reliably formed. The drive roller 63 is subjected to a non-adhesion process in which no adhesive is adhered.

The cutting means 15 may use other cutting means such as a laser beam as long as the cut CU can be formed.
Further, the cutting blade 40 is not only formed by etching, but also a sculpting blade formed by machining, a rotary die, a flat blade having a blade formed on a flat plate, a Thomson blade, etc. May be used.

Furthermore, the design of the feeding means 14, the peeling plate 18, and the pressing roller 19 can be changed in various ways as long as the same function as that of the above embodiment is exhibited.
Further, the interval adjusting means may be a so-called bearer, and the relative distance between the cutting blade 40 and the platen roller 37 by the interval adjusting means is the thickness and properties of the original RS, particularly the thickness and properties of the release sheet RS. Can be changed as appropriate.
Furthermore, the thickness of the member which comprises original fabric RS is not limited at all.
In addition, a driving device for moving the sheet sticking device 10 is provided, and the sheet sticking device 10 is moved rightward in FIG. 1 or the table 11 is moved leftward while the table 11 is stopped. The apparatus 10 may be configured to stick the adhesive sheet AS to the adherend by moving the apparatus 10 in the right direction,

  Furthermore, the drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

  In addition, the adherend may be a glass plate, a steel plate, or a resin plate instead of the wafer WF or the ring frame RF, and the semiconductor wafer may be a silicon semiconductor wafer or a compound semiconductor wafer. It may be. Further, instead of the ring frame RF, a frame having a different shape such as a C-shape or U-shape may be used, or a single adherend may be used as an attachment target of the adhesive sheet AS without the ring frame RF.

DESCRIPTION OF SYMBOLS 10 Sheet sticking apparatus 14 Feeding means 15 Cutting means 17 Tension applying means 18 Peeling plate (peeling means)
19 Pressing roller (pressing means)
AD Adhesive layer AS Adhesive sheet BS Base sheet CU Cutting RF Ring frame (Substrate)
RL Release sheet RS Original Sa Initial release area (adhesive sheet feed direction tip)
SP Clearance US Unnecessary sheet WF Semiconductor wafer (Substrate)
WS Strip sheet

Claims (7)

The belt-like sheet having an adhesive layer on one surface of the belt-like base material sheet is provided with a feeding means for feeding out the original fabric temporarily attached to the belt-like release sheet via the adhesive layer, and the belt-like sheet is cut into a predetermined shape. A cutting means for forming an adhesive sheet inside the cut and forming an unnecessary sheet outside the cut, and feeding the adhesive sheet temporarily attached to the release sheet to the adhesive sheet A sheet sticking device comprising a peeling means for peeling from the tip of the direction, and a pressing means for pressing and sticking the adhesive sheet to an adherend,
The feeding means has tension applying means capable of increasing or decreasing the tension applied to the original fabric, and increases the tension applied to the original fabric to increase the outer edge of the adhesive sheet and the unnecessary sheet at the leading end of the adhesive sheet in the feeding direction. The sheet sticking device is provided so that a gap can be formed therebetween.   2. The sheet sticking apparatus according to claim 1, wherein the tension applying means is provided so as to be capable of adjusting a tension applied to the original fabric based on position information of a cut by the cutting means.   The sheet sticking device according to claim 1 or 2, wherein the feeding means performs cutting at the initial peeling region a plurality of times for forming one adhesive sheet in conjunction with the cutting means.   3. The sheet sticking apparatus according to claim 2, wherein the tension applying means is provided so that the tension can be increased stepwise. A feeding step of feeding out the original fabric temporarily attached to the strip-shaped release sheet via the adhesive layer by the strip-shaped sheet having the adhesive layer on one surface of the strip-shaped base sheet;
A cutting step of forming an incision of a predetermined shape in the belt-like sheet to form an adhesive sheet inside the notch, and forming an unnecessary sheet outside the notch,
A peeling step of peeling the adhesive sheet temporarily attached to the release sheet from the leading end portion in the feeding direction of the adhesive sheet;
A pressing step of pressing and bonding the adhesive sheet to an adherend,
In the feeding process, a gap is formed between the outer edge of the adhesive sheet and the unnecessary sheet at the leading end in the feeding direction of the adhesive sheet by increasing the tension applied to the original fabric. A feeding means for feeding out the original fabric temporarily attached to the strip-shaped release sheet by the strip-shaped sheet having the adhesive layer on one surface of the strip-shaped base sheet;
A sheet manufacturing apparatus including a cutting means for forming an incision having a predetermined shape in the belt-like sheet to form an adhesive sheet inside the notch and forming an unnecessary sheet outside the notch,
The feeding means has tension applying means capable of increasing / decreasing the tension applied to the original fabric, and increases the tension applied to the original fabric, thereby increasing the leading end portion and the trailing end portion of the adhesive sheet in the feeding direction. A sheet manufacturing apparatus characterized in that a gap can be formed between the outer edge of the adhesive sheet and the unnecessary sheet in at least one of the above. A feeding step of feeding out the original fabric temporarily attached to the strip-shaped release sheet via the adhesive layer by the strip-shaped sheet having the adhesive layer on one surface of the strip-shaped base sheet;
A cutting step of forming a cut in a predetermined shape in the belt-like sheet to form an adhesive sheet inside the cut and forming an unnecessary sheet outside the cut,
In the feeding step, a gap is formed between the outer edge of the adhesive sheet and the unnecessary sheet at at least one of the leading end portion and the trailing end portion in the feeding direction of the adhesive sheet by increasing the tension applied to the original fabric. The sheet manufacturing method characterized by the above-mentioned.

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