JP2011114270A - Sheet peeling device, and sheet peeling method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent an adhesive sheet from having a peeling defect. <P>SOLUTION: A sheet peeling device 10 peels the adhesive sheet S stuck on one surface of a wafer W from the wafer W through a peeling tape PT. The adhesive sheet S includes a base sheet B and an adhesive layer AD provided on one surface of the base sheet B. The sheet peeling device 10 includes a cutting unit 16 of cutting the base sheet B and adhesive layer AD, a feeding unit 12 of feeding the peeling tape PT, a sticking unit 14 of sticking the peeling tape PT on the adhesive sheet S, and a moving unit 15 capable of peeling the adhesive sheet S by relatively moving the wafer W and peeling tape PT. The cutting unit 16 is configured to form a cut C both ends of which reach outer edges of the base sheet B to form the adhesive sheet S as a plurality of divided sheets S1 and S2. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a sheet peeling apparatus and a peeling method, and more specifically, a sheet capable of sticking a peeling tape to an adhesive sheet attached to an adherend and peeling the adhesive sheet through the peeling tape. The present invention relates to a peeling apparatus and a peeling method.

  A semiconductor wafer (hereinafter, sometimes simply referred to as “wafer”) has a protective adhesive sheet attached to its circuit surface, and the adhesive sheet is peeled off after various processes such as back grinding. An example of such an adhesive sheet peeling apparatus is disclosed in Patent Document 1. In the same document, the step of peeling the adhesive sheet from the wafer is performed by relatively moving the peeling tape and the wafer after the peeling tape is attached to the adhesive sheet.

JP 2004-165570 A

  By the way, recently, since the diameter of the wafer tends to increase, the size of the adhesive sheet increases accordingly. For this reason, when peeling as in Patent Document 1, a large peeling force is required when peeling the adhesive sheet, and the peeling tape is extended or cut at the time of peeling, resulting in frequent inconvenience of peeling failure. is there.

[Object of invention]
The objective of this invention is providing the sheet peeling apparatus and peeling method which can prevent that the peeling defect of an adhesive sheet generate | occur | produces.

In order to achieve the above object, the present invention provides a sheet peeling apparatus for peeling an adhesive sheet attached to one surface of an adherend from the adherend via a peeling tape.
The adhesive sheet includes a base sheet and an adhesive layer provided on one surface of the base sheet,
Cutting means for forming cuts in the base material sheet or base material sheet and adhesive layer, feeding means for feeding out the peeling tape, sticking means for sticking the peeling tape to the adhesive sheet, adherend and peeling A moving means capable of peeling the adhesive sheet by relatively moving the tape,
The cutting means adopts a configuration in which the adhesive sheet can be formed as a plurality of divided sheets by forming cuts whose both ends reach the outer edge of the base sheet.

  In the present invention, it is preferable to adopt a configuration in which the sheet further includes an anti-floating means capable of restricting the other divided sheet adjacent to the divided sheet to be separated through the cut.

  Furthermore, it is preferable that the sticking means adopt a configuration in which a peeling tape can be attached to each of the plurality of divided sheets.

In addition, it further comprises a joining tape attaching means for attaching a joining tape for joining the divided sheets across the notch,
The sticking means may take a configuration in which a peeling tape can be attached to any one of the plurality of divided sheets.

  Moreover, the structure that the said cutting | disconnection means is provided so that it can form in the depth which reaches a to-be-adhered body is preferably employ | adopted only in the edge part of the notch | incision in the peeling initial stage part of an adhesive sheet.

  Further, the moving means performs the primary peeling that performs the relative movement in the first direction, and then performs the secondary peeling that performs the relative movement in a second direction different from the first direction to peel the adhesive sheet. It is possible to adopt a configuration of performing.

  Moreover, it is preferable to employ a configuration in which a positioning unit is further provided that can adjust and position the relative position between the adherend and the attaching unit in a plane parallel to one surface of the adherend.

  Furthermore, you may take the structure of further providing the rotation means to relatively rotate the said to-be-adhered body and the peeling tape affixed on the adhesive sheet.

Further, the peeling method of the present invention is a sheet peeling method for peeling an adhesive sheet attached to one surface of an adherend from the adherend via a peeling tape.
The adhesive sheet includes a base sheet and an adhesive layer provided on one surface of the base sheet,
Forming the adhesive sheet as a plurality of divided sheets by forming notches that reach both outer edges of the base sheet in the base sheet or base sheet and the adhesive layer; and
A step of pasting the drawn-off peeling tape to the adhesive sheet;
The method of performing the process of peeling an adhesive sheet by making a to-be-adhered body and the peeling tape move relatively is taken.

Further, after forming the notch, performing a step of applying a connecting tape for connecting the divided sheets across the notch,
In the step of applying the release tape, the release tape is applied to any one of the plurality of divided sheets,
In the step of peeling the adhesive sheet, a method of peeling another divided sheet via a connecting tape following any one of the divided sheets may be employed.

  Moreover, when forming the said notch | incision, it is preferable to form only the edge part of the notch | incision in the peeling initial stage part of an adhesive sheet to the depth which reaches a to-be-adhered body.

  Further, the adhesive sheet in a state in which the other divided sheet is pressed against the adherend side so as to regulate that the other divided sheet adjacent to the divided sheet to be peeled is peeled along with the cut. It is good to peel off.

  According to the present invention, it is possible to form a plurality of divided sheets by forming cuts in the adhesive sheet, and to perform separation for each of the divided sheets. Since each divided sheet is made smaller than the whole adhesive sheet, the force required for peeling can be reduced by peeling each divided sheet as compared with peeling of the whole adhesive sheet having no cut. As a result, even if the adherend is a wafer having a large diameter, it is possible to prevent the peeling tape from extending or cutting, and to avoid occurrence of defective peeling.

  Furthermore, in the case where any anti-floating means is provided, when any one of the divided sheets is peeled, it is cut by uncut portions of the base sheet or the adhesive layer or by re-adhesion of the adhesive layer. It is possible to reliably prevent other adjacent divided sheets from being followed and peeled off.

  Moreover, by making it possible to apply a peeling tape to each of the plurality of divided sheets, each divided sheet can be efficiently peeled.

  Furthermore, when the connecting tape sticking means is provided, it becomes possible to peel in a state in which a plurality of divided sheets are integrated without sticking a peeling tape for each divided sheet, and the reduction of the peeling tape and the separation processing capability can be achieved. Improvement can be achieved.

  In addition, when the depth of cut at the cut end portion of the initial peeling portion reaches the adherend, both side regions sandwiching the cut can be reliably divided. Accordingly, when any one of the divided sheets is peeled at the initial stage of peeling, the edge of the other divided sheet can be surely cut through the cut, and the plurality of divided sheets are peeled at the same time. This can be reliably prevented.

  Furthermore, when primary peeling and secondary peeling with different peeling directions are possible, for example, after peeling in a direction in which a peeling stake is easily formed on the adhesive sheet in the initial stage of peeling, after the initial stage of peeling, by divided peeling It is possible to perform peeling in a direction in which the force required for peeling is reduced.

  Further, when the relative position between the adherend and the pasting unit is adjusted by the positioning unit to enable positioning, the pasting position of the peeling tape can be arbitrarily set according to the cut formation position.

  Furthermore, by making the adherend and the peeling tape relatively rotatable by the positioning means, it is possible to change the advancing direction of peeling during peeling of the adhesive sheet.

The schematic front view which carried out partial cross section view of the sheet peeling apparatus concerning each embodiment. The partial cross-sectional enlarged view of a cutting | disconnection means and its periphery. The longitudinal cross-sectional view of FIG. (A)-(C) are peeling operation explanatory drawings of an adhesive sheet. (A)-(D) are peeling operation explanatory drawing of the adhesive sheet which concerns on 1st Embodiment. (A)-(D) are peeling operation explanatory drawings which show the modification of peeling operation | movement of FIG. (A)-(E) is peeling explanatory drawing of the adhesive sheet which concerns on 2nd Embodiment. (A)-(C) are peeling operation | movement explanatory drawings of the adhesive sheet which concerns on 3rd Embodiment. (A)-(C) are peeling operation explanatory drawing of the adhesive sheet which concerns on 4th Embodiment. Explanatory drawing of the adhesive sheet which concerns on 5th Embodiment. Explanatory drawing of peeling operation | movement of the adhesive sheet which concerns on 6th Embodiment. (A)-(C) are peeling operation | movement explanatory drawings of the adhesive sheet which concerns on 7th Embodiment. Explanatory drawing of the adhesive sheet which concerns on 8th Embodiment. Explanatory drawing of peeling operation | movement of the adhesive sheet which concerns on 9th Embodiment. Explanatory drawing of the adhesive sheet which concerns on a 1st modification. Explanatory drawing of the adhesive sheet which concerns on a 2nd modification. (A)-(C) are peeling operation | movement explanatory drawings of the adhesive sheet which concerns on a 3rd modification.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
In this specification, “upper”, “lower”, “left”, and “right” are used with reference to FIG. 1 unless otherwise specified.

[First Embodiment]
1 to 4, the sheet peeling apparatus 10 includes a holding unit 11 that holds a wafer W as an adherend, a feeding unit 12 that feeds a strip-shaped peeling tape PT, and a circuit surface of the wafer W. The affixing means 14 for affixing the peeling tape PT to the adhesive sheet S affixed to the surface (upper surface) and the peeling tape PT affixed to the adhesive sheet S and the wafer W held by the holding means 11 are moved relative to each other. A moving means 15, a cutting means 16 capable of forming a cut in the adhesive sheet S attached to the wafer W, a joining tape attaching means 17 for attaching the joining tape LT to the adhesive sheet S, and a floating prevention means 18 are provided. It is configured. In this embodiment, the peeling tape PT is a heat-sensitive adhesive tape. The adhesive sheet S includes a base sheet B and an adhesive layer AD provided on one surface, that is, the lower surface of the base sheet B, and is attached to the upper surface of the wafer W via the adhesive layer AD. ing.

  The holding means 11 is composed of a table for adsorbing and holding the wafer W integrated with the ring frame RF on the upper surface from the dicing sheet DS side.

  The feeding means 12 supports a peeling tape PT that is supported and wound by a frame (not shown), a support shaft 21 that is rotatable via a motor M1, and a driving roller 22 that is rotatable via a motor M2. A pinch roller 23 that sandwiches the peeling tape PT between the drive roller 22, a plate-like guide member 25 that supports the peeling tape PT from below in FIG. A rotatable press roller 27 that sandwiches the PT and an elevating cylinder 28 that raises and lowers the press roller 27 are provided. The guide member 25 is provided so as to be movable in the left-right direction in FIG. 1 via the cylinder 29. As shown in FIG. 4A, the lead end region of the peeling tape PT sandwiched between the press rollers 27 will be described later. It can be guided to a position where it can be gripped by the chuck 41.

  The sticking means 14 includes a linear motion motor 31 and a pressing head 32 having a heater 32A provided by the linear motion motor 31 so as to advance and retract in the vertical direction. The affixing means 14 adheres the peeling tape PT to the adhesive sheet S by pressing and heating the peeling tape PT fed to the upper surface side of the adhesive sheet S with the pressing head 32 by a chuck 41 described later. It has become. A tape cutting means 34 is provided on the left side of the sticking means 14. The tape cutting means 34 includes a cutter blade 35, a tape receiving plate 36 provided on the lower side of the cutter blade 35 and having a concave portion on the upper surface, and a vertical cylinder 37 for moving the cutter blade 35 in the vertical direction. It comprises a cutting cylinder 38 for moving the cutter blade 35 in the direction perpendicular to the plane of the drawing in FIG.

  The moving means 15 includes a driving means 40 that movably supports the holding means 11 and a chuck 41 that is provided below the sticking means 14 and can hold the peeling tape PT with a holding member 41A. The driving means 40 is provided so as to be able to position the wafer W by moving the holding means 11 in the direction orthogonal to the paper surface in FIG. Here, the drive means 40 constitutes a positioning means and a rotation means. The chuck 41 is configured to be movable in the left-right direction in FIG. 1 via a driving device (not shown).

  As shown in FIGS. 2 and 3, the cutting means 16 supports a disk-shaped cutter blade 43 whose outer edge is a cutting blade, a rotation motor 44 that rotates the cutter blade 43, and a rotation motor 44. A possible interval holding means 45, an articulated robot 46 that supports the interval holding means 45 and moves the cutter blade 43, and a camera 47 are provided.

  The interval holding means 45 includes a sensor 53 as a detecting means provided on the lower surface side of the rotation motor 44, a linear motion motor 54 having an output shaft 54A connected to the rotation motor 44, and the linear motion motor 54. 2, a roller 57 that is provided on both left and right sides in FIG. 2 and that can roll on the adhesive sheet S, and a damper 59 that is provided on the upper surface of the frame 56. And. While the adhesive sheet S is being cut by the cutter blade 43, the sensor 53 is provided so as to be able to detect a vertical distance D1 between the reference surface 53A serving as the lower end surface and the upper surface of the wafer W. The vertical distance between the reference surface 53A of the sensor 53 and the rotation center position of the cutter blade 43 is kept constant as the distance D2. As shown in FIG. 3, the sensor 53 is provided at a position away from the rotation center of the cutter blade 43 by a distance D3 on the downstream side in the moving direction when the cutter blade 43 is cut. The linear motion motor 54 can move the output shaft 54 </ b> A up and down to raise and lower the sensor 53, the cutter blade 43, and the rotation motor 44. Further, the direct acting motor 54 is provided so that the moving direction and the moving amount of the output shaft 54A can be adjusted based on the detection result of the sensor 53. The damper 59 is detachably provided on the articulated robot 46 via the arm holder 60 and is provided so as to be able to absorb the vibration of the frame 56.

  The articulated robot 46 includes a base 62, an articulated arm 63 that can be rotated by position-controllable motors provided on the upper surface of the base 62, and the articulated arm. 63 is a so-called six-axis robot provided with a holding chuck 64 attached to the free end side of 63, and the holding chuck 64 can be moved in any position and in any direction within the work area. The holding chuck 64 includes a pair of chuck claws 64 </ b> A that can be separated from each other, and the chuck claws 64 </ b> A can be engaged with and disengaged from the arm holder 60.

  The camera 47 is provided so as to be able to recognize the position of the cutting edge of the cutter blade 43 by imaging the outer peripheral area of the rotating cutter blade 43, and the distance D4 from the rotation center position of the cutter blade 43 to the cutting edge (see FIG. 3). Can be measured.

  The connecting tape affixing means 17 is a supply means 72 that can be folded back by the peel plate 70 in the middle of feeding the strip-shaped release sheet RL, and can be supplied by peeling the connection tape LT temporarily attached to the release sheet RL one by one; The pressing means 73 is configured to press and paste the connecting tape LT supplied from the supply means 72. The pressing means 73 includes a suction head 75 that can suck and hold the tape LT with the lower surface as the suction surface, and a linear motor 76 that moves the suction head 75 up and down.

  The levitation preventing means 18 includes an arm holder 67 having the same configuration as the arm holder 60, and a plate-like pressing member 68 that is connected to the arm holder 67 and can be positioned along the notch C. The joint claw 46A of the joint robot 46 can be engaged and disengaged.

  Next, the cutting method and peeling method of the adhesive sheet S in the sheet peeling apparatus 10 will be described with reference to FIGS.

  First, the peeling tape PT is pulled out from the support shaft 21, passed between the drive roller 22 and the pinch roller 23, sandwiched between the press roller 27 and the guide member 25, and the lead end side protrudes from the tip of the guide member 25. Is done. Then, the adhesive sheet S is pasted via a conveying means (not shown), and the wafer W integrated with the ring frame RF is attracted and held on the upper surface of the holding means 11 via the dicing sheet DS. Next, the articulated robot 46 is operated so that the cutter blade 43 is positioned on the front side of the camera 47. In this state, while rotating the cutter blade 43 by operating the rotation motor 44, the cutting edge of the cutter blade 43 is imaged by the camera 47, and the distance D4 is measured and stored in a control means (not shown).

  Next, when the cut C as shown in FIG. 5A is formed in the adhesive sheet S, the cutter blade 43 is attached to the outer edge of the base sheet B that is the cutting start position of the cut C by the operation of the articulated robot 46. Move. Thereafter, the articulated robot 46 is operated, and the cutter blade 43 is moved in a direction substantially parallel to the upper surface of the base sheet B and in a moving direction at the time of cutting indicated by an arrow in FIG. At this time, each roller 57 rolls on the adhesive sheet S, and the rotation motor 44 is operated to rotate the cutter blade 43. Thereby, the cut | notch C which both ends reach to the outer edge of the base material sheet B is formed, and the adhesive sheet S is formed as the first divided sheet S1 and the second divided sheet S2.

Here, during the cutting of the adhesive sheet S, the vertical distance D between the lowermost edge of the cutter blade 43 and the upper surface of the wafer W is adjusted in real time based on the detection result of the sensor 53.
Specifically, while the adhesive sheet S is being cut, the sensor 53 always detects the distance D1, and the detection result of the distance D1 and the distance D2 and the distance D4 use the control means (not shown) to The distance D is obtained from the equation (1).
D = D1 + D2-D4 (1)
Further, the control means obtains the time during which the lowermost edge of the cutter blade 43 passes after the sensor 53 passes, based on the moving speed in the cutting direction of the cutter blade 43 by the articulated robot 46 and the distance D3. Then, the linear motion motor 54 is controlled to be displaced so that the distance D becomes a predetermined distance at the timing when the obtained time has elapsed after the sensor 53 passes, and the cutter blade 43 is displaced. Note that the predetermined distance is input in advance to a control means (not shown) by the operator. Thereby, the distance D is maintained at a predetermined distance in the entire area of the cut C. The cut C may have a depth that does not divide the base sheet B so that the cutting edge of the cutter blade 43 does not contact the upper surface of the wafer W, or may have a depth that divides the base sheet B. The depth reaching the adhesive layer AD may be sufficient.

  Note that the predetermined distance may be set to “0” or minus several μm only at the right end in FIG. 5A of the notch C that is the initial site of peeling of the adhesive sheet S. In such a setting, the cutting edge of the cutter blade 43 comes into contact with the upper surface of the wafer W when cutting the right end of the cutting C in the same figure, and the cutting C is performed in all the thickness directions of both the base material sheet B and the adhesive layer AD. And a cut C having a depth reaching the wafer W is formed. Thereby, in the initial stage of peeling of the first divided sheet S1, it is possible to reliably perform edge cutting with the adjacent second divided sheet S2 through the cut C, and to prevent the divided sheets S1 and S2 from being peeled simultaneously. .

  After the formation of the cut C is completed, the articulated robot 46 is operated to retract the cutter blade 43 to a predetermined position, and the holding chuck 64 is detached from the arm holder 60 and connected to the arm holder 67 of the anti-lifting means 66.

  Next, as shown in FIG. 4A, the guide member 25 is advanced in the right direction in the figure via the cylinder 29, and at the same time, the motor M2 is operated to rotate the driving roller 22 to release the peeling tape PT. To pay out. As a result, the guide member 25 and the lead end side of the peeling tape PT are positioned between the gripping members 41 </ b> A of the chuck 41. When the press roller 27 is retracted upward and the guide member 25 is retracted, the peeling tape PT is left between the gripping members 41A and is gripped by the operation of the chuck 41. Thereafter, the chuck 41 is moved to a position indicated by a two-dot chain line in FIG. 4A by a driving device (not shown), the peeling tape PT is pulled out, and the peeling tape PT is peeled so as to face the adhesive sheet S below the pressing head 32. The tape PT is positioned.

  Next, as shown in FIG. 4B, when the pressing head 32 is moved downward by the linear motor 31, the peeling tape PT is pressed down, and the peeling tape PT is heated by the heater 31A to be the first. Adhere to the split sheet S1. Thereafter, the peeling tape PT is sandwiched between the press roller 27 and the guide member 25, and the cylinders 37 and 38 are operated to cut the peeling tape PT with the cutter blade 35 on the tape receiving plate 36.

  Thereafter, by the operation of the articulated robot 46, the pressing member 68 is placed on the second divided sheet S2 so that the pressing member 68 is positioned along the notch C as shown by a two-dot chain line in FIG. Make contact.

  Thereafter, as shown in FIG. 4C and FIG. 5B, the driving means 40 and the like so that the peeling tape PT attached to the first divided sheet S1 and the wafer W relatively move in the opposite direction. The first divided sheet S1 is peeled from the wafer W by moving the chuck 41 and the holding means 11 via At this time, even if the base sheet B and the adhesive layer AD of each of the divided sheets S1 and S2 are connected without being completely separated in the cut C, the pressing member 68 holds the second divided sheet S2. Thus, it is possible to prevent the second divided sheet S2 from being lifted following the first divided sheet S1.

  When the separation of the divided sheet S1 is completed, the peeled first divided sheet S1 and the peeling tape PT attached thereto are collected by a collecting unit (not shown). Next, the floating preventing means 66 is retracted from the second divided sheet S2 by the operation of the articulated robot 46 in order to peel the second divided sheet S2. Then, the holding means 11 is moved in the vertical and horizontal directions in FIG. 5C so that the right outer edge position in FIG. 5 of the second divided sheet S2 stops just below the pressing head 32. Thereafter, as shown in FIGS. 5C and 5D, similarly to the first divided sheet S <b> 1, the peeling tape PT is also attached to the second divided sheet S <b> 2 and is peeled off from the wafer W. When positioning the second divided sheet S2, as shown in FIG. 6, the driving means 40 is operated so that the holding means 11 is rotated 180 in the arrow direction in FIG. You may make it rotate.

  After the separation of both the divided sheets S1 and S2, the wafer W is transferred to the next process by a transfer means (not shown). Then, after the holding means 11 and the chuck 41 are returned to the initial positions, and the holding chuck 64 in the multi-joint robot 46 is changed from the floating prevention means 66 to the cutter blade 43 and the like, the same operation as described above is repeated.

  Therefore, according to such a 1st embodiment, it can exfoliate for every division sheet S1 and S2 which divided adhesive sheet S into two and miniaturized. Thereby, compared with the case where the adhesive sheet S that is not divided is peeled off, the tensile force generated in the peeling tape PT at the time of peeling can be reduced, and the peeling failure caused by the extending or cutting of the peeling tape PT. Can be prevented.

  Next, other embodiments of the present invention will be described. In the following description, each embodiment uses the same sheet peeling apparatus 10 as the first embodiment, and changes the formation position of the cut C and / or the peeling method of each of the divided sheets S1 and S2. . Therefore, the same reference numerals are used for the same or equivalent components as those in the first embodiment, and overlapping descriptions or similar descriptions are omitted or simplified.

[Second Embodiment]
In FIG. 7, in the second embodiment, after the cut C is formed as in the first embodiment, the driving means 40 causes the left end side of the cut C in FIG. 7A to stop immediately below the suction head 75. The holding means 11 is moved. Next, when the suction head 75 is moved downward by the linear motion motor 76, the connecting tape LT is pasted on each of the divided sheets S1 and S2 across the cut C. Next, the peeling tape PT attached to the first divided sheet S1 and the wafer W are relatively moved in the opposite directions, and the first divided sheet S1 is peeled to the intersection P between the connecting tape LT and the notch C (see FIG. 7 (B)). Thereafter, the holding means 11 is rotationally moved by the driving means 40 with the intersection P as the rotation center, and the wafer W is rotated 360 ° to peel off the divided sheets S1 around the connecting tape LT (FIGS. 7C and 7D). )reference). Next, as shown in FIG. 7E, the chuck 41 and the holding means 11 are moved via the driving means 40 and the like so that the peeling tape PT and the wafer W are relatively moved in the opposite directions. As a result, the divided sheets S1 and S2 are peeled in series through the connecting tape LT, so that the divided sheets S1 and S2 can be collected only once and the peeling tape PT is attached. Can be made once, and the process can be simplified and speeded up.

[Third Embodiment]
In FIG. 8, in the third embodiment, a cut C is formed in the same manner as in the first embodiment, the first divided sheet S1 is peeled off, and the peeling tape PT and the wafer W are relative to each other before the peeling is completed. Stop moving. Thereafter, the holding means 11 is moved by the driving means 40 so that the left end side of the incision C in FIG. 8B stops immediately below the suction head 75, and each division across the incision C is performed by the operation of the linear motor 76. The connecting tape LT is attached to the sheets S1 and S2. Next, as shown in FIG. 8C, the chuck 41 and the holding means 11 are moved via the driving means 40 and the like so that the peeling tape PT and the wafer W relatively move in the opposite directions. Also in the present embodiment, the divided sheets S1 and S2 can be separated in series via the connecting tape LT, and the step of rotating the holding means 11 can be omitted.

[Fourth Embodiment]
In FIG. 9, in 4th Embodiment, the cut | notch C is formed similarly to 1st Embodiment, and the peeling tape PT is affixed on the position adjacent to the right end side of the notch C in the same figure in 1st division | segmentation sheet S1. Thereby, the peeling tape PT is affixed to a region including the corner portion CN formed by the right end of the cut C and the outer peripheral edge of the first divided sheet S1. Thereafter, the peeling tape PT and the wafer W are driven so as to move relative to each other in a direction away from the notch C in a plan view, that is, in the arrow direction (first direction) in FIGS. 9A and 9B. Primary peeling is performed by moving the chuck 41 and the holding means 11 through the means 40 or the like. After peeling a predetermined amount of the first divided sheet S1 by this primary peeling, as shown in FIG. 9C, the relative movement direction of the peeling tape PT and the wafer W is parallel to the cut C, that is, the same. Secondary peeling is performed by changing to the left and right direction (second direction) in the figure. After the first divided sheet S1 is completely peeled off by this secondary peeling, the second divided sheet S2 is also peeled by performing primary peeling and secondary peeling similarly to the first divided sheet S1. According to the present embodiment, in the primary peeling that starts peeling, each of the divided sheets S1 and S2 can be peeled from the corner portion CN. Therefore, the peeling resistance can be reduced and the peeling failure can be prevented. In the secondary peeling, It is possible to perform peeling in a direction in which the force required for peeling is reduced.

[Fifth Embodiment]
In FIG. 10, in 5th Embodiment, the two cuts C extended in the left-right direction in the figure are formed, and the adhesive sheet S is formed as 1st-3rd division sheet S1-S3. The peeling of the adhesive sheet S is performed for each of the divided sheets S1 to S3. After the peeling tape PT is applied to the right side region of the divided sheets S1 to S3 in the figure, the peeling tape PT and the wafer W Is performed by moving the chuck 41 and the holding means 11 via the driving means 40 or the like so as to move relative to each other in the opposite direction. In attaching the peeling tape PT, the wafer W is moved and positioned by the driving means 40 so that the right region of each of the divided sheets S1 to S3 is located immediately below the pressing head 50.

[Sixth Embodiment]
In FIG. 11, in the sixth embodiment, a cut C is formed as in the fifth embodiment. Thereafter, on the left end side of the lower notch C and the right end side of the upper notch C in the figure, each connecting tape LT is pasted so as to straddle the notch C, and the three divided sheets S1 are connected via the connecting tape LT. Let it be in the state. Next, the peeling tape PT is attached to the right region of the first divided sheet S1. Next, the chuck 41 and the holding means 11 are moved via the driving means 40 and the like so that the peeling tape PT and the wafer W are relatively moved in the opposite directions in the direction of the arrow in FIG. As a result, the three divided sheets S1 to S3 can be peeled in a state of being connected in series by the connecting tape LT.

[Seventh Embodiment]
In FIG. 12, in the seventh embodiment, a cut C is formed in the same manner as in the fifth embodiment, the second divided sheet S2 is peeled off, and the peeling tape PT and the wafer W are relative to each other before the peeling is completed. Stop moving. Thereafter, the connecting tape LT is pasted across the two cuts C, that is, across the second divided sheet S2 being peeled and the other two divided sheets S1 and S3 (see FIG. 12B). ). Next, as shown in FIG. 12C, the chuck 41 and the holding unit 11 are moved via the driving unit 40 and the like so that the peeling tape PT and the wafer W relatively move in the opposite directions. All the divided sheets S1 to S3 are peeled off. In addition, as shown with a dashed-two dotted line in the figure, when peeling 2nd division sheet S2, it is good to employ | adopt the pressing member 68A which can hold down both 1st, 3rd division sheets S1, S3.

[Eighth Embodiment]
In FIG. 13, in the eighth embodiment, cuts C extending in the left-right direction and the up-down direction in FIG. 13 are formed, and the adhesive sheet S is formed as the first to fourth divided sheets S <b> 1 to S <b> 4. Peeling of the adhesive sheet S is performed so that the peeling tape PT and the wafer W move relative to each other in the opposite direction after the peeling tape PT is applied to the arcuate outer edge central portion of each of the divided sheets S1 to S4. This is done by moving the chuck 41 and the holding means 11 via the driving means 40 and the like.

[Ninth Embodiment]
In FIG. 14, in the ninth embodiment, a cut C is formed as in the eighth embodiment. Thereafter, the connecting tape LT is pasted so as to straddle the notch C on both ends of the notch C extending vertically in the figure and on the left side of the notch C extending horizontally in the figure. The divided sheets S1 to S4 are connected. Next, the peeling tape PT is affixed to the right region of the first divided sheet S1. Next, the chuck 41 and the holding means 11 are moved via the driving means 40 and the like so that the peeling tape PT and the wafer W are relatively moved in the opposite directions in the direction of the arrow in FIG. As a result, the four divided sheets S1 to S4 can be peeled in a state where they are continuously connected by the connecting tape LT.

As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this.
In other words, the present invention has been illustrated and described mainly with respect to specific embodiments, but without departing from the scope of the technical idea and object of the present invention, the shape, position, or With respect to the arrangement and the like, those skilled in the art can make various changes as necessary.
Therefore, the description limited to the shape disclosed above is an example for easy understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded one part or all part is included in this invention.

  The number of cuts C to be formed, the formation position, and the shape can be variously changed, such as a curved shape, as long as both ends reach the outer edge of the base sheet B to form a plurality of divided sheets S1. For example, as shown in FIG. 15, each of the divided sheets S1 to S3 is formed with the right ends of the two cuts C in the figure as the same position, or in the plane of the base sheet B as shown in FIG. 16. The cut C may be formed in a shape bent in a V shape, and peeling may be performed using the peeling tape PT as the two divided sheets S1 and S2.

  Moreover, as shown in FIGS. 17A to 17C, the separation of each of the divided sheets S <b> 1 and S <b> 2 performed in the fourth embodiment may be performed simultaneously. In this case, two chucks 41 for gripping the peeling tape PT and two drive devices (not shown) for driving the chucks may be provided.

  Furthermore, the adherend in the present invention is not limited to a semiconductor wafer, and other adherends such as a glass plate, a steel plate, or a resin plate can also be targeted. It may be a wafer or a compound wafer.

  Further, the cutter blade 43 can be variously changed in design, and a cutter blade or the like whose plane shape forms a sharp angle may be used.

  Further, the holding means 11 may be moved while the operation of the articulated robot 46 is stopped, and the cutter blade 43 and the wafer W may be moved relative to each other. The operation of the articulated robot 46 and the movement of the holding means 11 may be performed. May be performed simultaneously to cut the adhesive sheet S.

Moreover, the peeling operation | movement of the adhesive sheet S may stop the operation | movement of the chuck | zipper 41 and may move the holding means 11 as long as peeling can be performed as mentioned above, and conversely, the operation | movement of the holding means 11 is stopped, The chuck 41 may be moved.
Further, a pressure-sensitive adhesive tape may be adopted as the peeling tape PT.
Further, the tape cutting means 34 for cutting the peeling tape PT is not an essential requirement.
Further, the floating prevention means 18 may be constituted by jet air, and other adjacent divided sheets may be pressed toward the wafer W via the cuts C.

DESCRIPTION OF SYMBOLS 10 Sheet peeling apparatus 12 Feeding means 14 Sticking means 15 Moving means 16 Cutting means 17 Connecting tape sticking means 18 Lift prevention means 40 Driving means (positioning means, rotating means)
AD adhesive layer B base material sheet C cut CN corner part LT connecting tape PT peeling tape S adhesive sheet S1 to S4 first to fourth divided sheets (divided sheets)
W Semiconductor wafer (adherence)

Claims (12)

In the sheet peeling apparatus for peeling the adhesive sheet attached to one surface of the adherend from the adherend via the peeling tape,
The adhesive sheet includes a base sheet and an adhesive layer provided on one surface of the base sheet,
Cutting means for forming cuts in the base material sheet or base material sheet and adhesive layer, feeding means for feeding out the peeling tape, sticking means for sticking the peeling tape to the adhesive sheet, adherend and peeling A moving means capable of peeling the adhesive sheet by relatively moving the tape,
The sheet cutting apparatus, wherein the cutting means is provided so that both ends of the cutting sheet reach the outer edges of the base sheet so that the adhesive sheet can be formed as a plurality of divided sheets.   2. The sheet peeling apparatus according to claim 1, further comprising an anti-floating means capable of restricting other divided sheets adjacent to the divided sheet to be peeled along with the cut.   The sheet peeling apparatus according to claim 1 or 2, wherein the sticking means is provided so that a peeling tape can be stuck to each of the plurality of divided sheets. It further comprises a joining tape attaching means for attaching a joining tape for joining the divided sheets across the notches,
The sheet peeling apparatus according to claim 1 or 2, wherein the sticking means is provided so that a peeling tape can be stuck to any one of the plurality of divided sheets.   5. The sheet peeling apparatus according to claim 1, wherein the cutting means is provided so as to be formed at a depth reaching the adherend only at an end of the cut at an initial peeling portion of the adhesive sheet.   The moving means performs primary peeling that performs the relative movement in the first direction, and then peels the adhesive sheet by performing secondary peeling that performs the relative movement in a second direction different from the first direction. The sheet peeling apparatus according to any one of claims 1 to 5, wherein:   7. The positioning apparatus according to claim 1, further comprising positioning means capable of positioning by adjusting a relative position between the adherend and the attaching means in a plane parallel to one surface of the adherend. The sheet peeling apparatus in any one.   The sheet peeling apparatus according to any one of claims 1 to 7, further comprising a rotating means for relatively rotating the adherend and the peeling tape attached to the adhesive sheet. In the sheet peeling method of peeling the adhesive sheet affixed to one surface of the adherend from the adherend via the peeling tape,
The adhesive sheet includes a base sheet and an adhesive layer provided on one surface of the base sheet,
Forming the adhesive sheet as a plurality of divided sheets by forming notches that reach both outer edges of the base sheet in the base sheet or base sheet and the adhesive layer; and
A step of pasting the drawn-off peeling tape to the adhesive sheet;
The sheet peeling method characterized by performing the process of peeling an adhesive sheet by making a to-be-adhered body and the peeling tape move relatively. After forming the notch, performing a step of applying a connecting tape for connecting the divided sheets across the notch,
In the step of applying the release tape, the release tape is applied to any one of the plurality of divided sheets,
The sheet peeling method according to claim 9, wherein, in the step of peeling the adhesive sheet, another divided sheet is peeled off via any one of the divided sheets via a connecting tape.   11. The sheet peeling method according to claim 9, wherein when the cut is formed, only an end portion of the cut at an initial peeling portion of the adhesive sheet is formed to a depth reaching the adherend.   The adhesive sheet is peeled in a state in which the other divided sheet is pressed against the adherend side so as to regulate that the other divided sheet adjacent to the separated sheet is peeled off along the cut. The sheet peeling method according to claim 9, 10 or 11.

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