JP2013143509A - Sheet manufacturing device and sheet manufacturing method, and sheet sticking device and sheet sticking method - Google Patents

Sheet manufacturing device and sheet manufacturing method, and sheet sticking device and sheet sticking method Download PDF

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JP2013143509A
JP2013143509A JP2012003594A JP2012003594A JP2013143509A JP 2013143509 A JP2013143509 A JP 2013143509A JP 2012003594 A JP2012003594 A JP 2012003594A JP 2012003594 A JP2012003594 A JP 2012003594A JP 2013143509 A JP2013143509 A JP 2013143509A
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sheet
unnecessary
adhesive
adhesive sheet
adherend
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JP5872907B2 (en
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Miki Nakada
幹 中田
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Lintec Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a sheet sticking device capable of effectively suppressing generation of dust when an unnecessary adhesive sheet is folded and removed.SOLUTION: A sheet sticking device which sticks an adhesive sheet AS on an adherend AH includes: feeding means of feeding an original sheet; pressing means of pressing the adhesive sheet AS from a release sheet side and sticking the original sheet on the adherend AH; cutting means of making a cut in a predetermined shape penetrating the original sheet to form an unnecessary adhesive sheet US and an outside unnecessary sheet RLo; connection sheet sticking means of sticking a connection sheet CS connecting an inside unnecessary sheet RLi and the outside unnecessary sheet RLo; moving means of relatively moving the adherend AH and the connection sheet CS to peel an object RM to be peeled while leaving the adhesive sheet AS on the adherend AH; and heating means including folding means of folding the object RM to be peeled and heating the unnecessary adhesive sheet US while or after folding the object RM to be peeled by the folding means.

Description

本発明は、一方向に延出可能な剥離シートと当該剥離シートの一方の面に積層された接着体を有する少なくとも2層構造の原反から接着シートを形成するシート製造装置及びシート製造方法、並びに、前記接着シートを被着体に貼付するシート貼付装置及びシート貼付方法に関する。   The present invention relates to a sheet manufacturing apparatus and a sheet manufacturing method for forming an adhesive sheet from an original fabric of at least a two-layer structure having a release sheet that can be extended in one direction and an adhesive laminated on one surface of the release sheet, The present invention also relates to a sheet sticking apparatus and a sheet sticking method for sticking the adhesive sheet to an adherend.

従来、上記種のシート貼付装置は例えば特許文献1で知られている。このものでは、剥離シートの一方の面に、予め所定形状に切断された接着シートが所定間隔で仮着された原反を繰り出す繰出しローラと、繰出しローラから繰り出された原反を折り曲げて剥離シートから接着シートを剥離する剥離板と、剥離された接着シートを被着体に押圧して貼付する押圧手段と、剥離シートを巻き取る巻取りローラとを備えている。   Conventionally, a sheet sticking device of the above kind is known from Patent Document 1, for example. In this case, on one surface of the release sheet, an adhesive sheet that has been preliminarily cut into a predetermined shape is temporarily fed at a predetermined interval. A peeling plate for peeling the adhesive sheet, pressing means for pressing and attaching the peeled adhesive sheet to the adherend, and a take-up roller for winding the release sheet.

また、幅が被着体の外縁からはみ出す大きさであって一方の面に接着剤層を有する帯状シートの他方の面に剥離シートが仮着されたものを原反とし、繰出しローラから当該原反を繰り出し、帯状シートに所定形状の切込みを形成し、当該帯状シートを切込み内側の接着シートと切込み外側の不要接着シートとに分断し、その後、この原反を折り曲げて剥離シートと接着シートとを互いに剥離しながら被着体に接着シートを貼付し、当該不要接着シートを剥離シートと共に巻き取るものも知られている(例えば、特許文献2参照)。ここで、接着シートと剥離シートとを互いに剥離する場合、上記特許文献1を適用して剥離板により原反を折り曲げることで接着シートを剥離することが考えられる。   Further, the width is a size that protrudes from the outer edge of the adherend, and a belt-like sheet having an adhesive layer on one side and a release sheet is temporarily attached to the other side is defined as a raw fabric, and the original is fed from a feeding roller. Unwind, form a cut in a predetermined shape in the belt-like sheet, divide the belt-like sheet into an adhesive sheet inside the cut and an unnecessary adhesive sheet outside the cut, and then bend this raw fabric to release sheet and adhesive sheet There is also known a technique in which an adhesive sheet is applied to an adherend while peeling each other off, and the unnecessary adhesive sheet is wound together with the release sheet (see, for example, Patent Document 2). Here, when peeling an adhesive sheet and a peeling sheet mutually, it is possible to peel the adhesive sheet by applying the said patent document 1 and bending an original fabric with a peeling plate.

然しながら、帯状シートが、特に感熱性接着シートのように脆弱なものである場合に、剥離板で折り曲げると、粉塵が発生して周辺環境を汚染することがある。つまり、剥離板で不要接着シートが折り曲げられると、当該不要接着シートが微細にひび割れ、この微細な不要接着シート片が粉塵となる場合がある。   However, when the belt-like sheet is fragile, particularly like a heat-sensitive adhesive sheet, if it is folded with a release plate, dust may be generated and the surrounding environment may be contaminated. That is, when the unnecessary adhesive sheet is bent by the peeling plate, the unnecessary adhesive sheet is finely cracked, and the fine unnecessary adhesive sheet piece may become dust.

特開2007−158037号公報JP 2007-158037 A 特開2007−317886号公報JP 2007-317886 A

本発明は、不要接着シートを折り曲げて当該不要接着シートを除去する場合に、粉塵の発生を効果的に抑制することができるシート製造装置及びシート製造方法、並びに、シート貼付装置及びシート貼付方法を提供することをその課題としている。   The present invention provides a sheet manufacturing apparatus, a sheet manufacturing method, a sheet sticking apparatus, and a sheet sticking method that can effectively suppress the generation of dust when the unnecessary adhesive sheet is folded and removed. The issue is to provide.

上記課題を解決するために、一方向に延出可能な剥離シートと当該剥離シートの一方の面に積層された接着体を有する少なくとも2層構造の原反から接着シートを形成する本発明のシート製造装置は、前記原反を繰り出す繰出手段と、前記接着体に所定形状の切込みを形成することで、当該切込みの内側に接着シートを形成すると共に、当該切込みの外側に不要接着シートを形成する切断手段と、前記接着シートと不要接着シートとを相対移動させることで、前記剥離シート上に接着シートを残して前記不要接着シートからなる剥離対象物を剥離する移動手段とを備え、前記剥離対象物を折り曲げる折り曲げ手段を更に含み、当該折り曲げ手段による剥離対象物の折り曲げと同時または折り曲げ前に、前記不要接着シートを加熱可能な加熱手段を有することを特徴とする。   In order to solve the above-mentioned problem, the sheet of the present invention forms an adhesive sheet from an original fabric of at least a two-layer structure having a release sheet that can be extended in one direction and an adhesive laminated on one surface of the release sheet. The manufacturing apparatus forms an adhesive sheet on the inside of the notch and forms an unnecessary adhesive sheet on the outside of the notch by forming the predetermined shape in the adhesive and the feeding means for feeding out the original fabric. A cutting means; and a moving means for peeling the peeling object made of the unnecessary adhesive sheet by leaving the adhesive sheet on the peeling sheet by moving the adhesive sheet and the unnecessary adhesive sheet relative to each other. A heating means that can further heat the unnecessary adhesive sheet at the same time as or before folding the object to be peeled by the bending means. Characterized in that it has a.

また、上記課題を解決するために、一方向に延出可能な剥離シートと当該剥離シートの一方の面に積層された接着体を有する少なくとも2層構造の原反から接着シートを形成する本発明のシート製造方法は、前記原反を繰り出す工程と、前記接着体に所定形状の切込みを形成することで、当該切込みの内側に接着シートを形成すると共に、当該切込みの外側に不要接着シートを形成する工程と、 前記接着シートと不要接着シートとを相対移動させることで、前記剥離シート上に接着シートを残して前記不要接着シートからなる剥離対象物を剥離する工程とを備え、前記剥離対象物を折り曲げる折り曲げ工程を更に含み、当該折り曲げ工程における剥離対象物の折り曲げと同時または折り曲げ前に、前記不要接着シートを加熱する工程を有することを特徴とする。   In order to solve the above-mentioned problem, the present invention forms an adhesive sheet from an original fabric of at least a two-layer structure having a release sheet that can be extended in one direction and an adhesive laminated on one surface of the release sheet. The sheet manufacturing method forms the adhesive sheet on the inside of the cut and forms an unnecessary adhesive sheet on the outside of the cut by forming the original fabric and forming a cut with a predetermined shape in the adhesive body. And a step of separating the peeling target made of the unnecessary adhesive sheet by leaving the adhesive sheet on the release sheet by relatively moving the adhesive sheet and the unnecessary adhesive sheet. And a step of heating the unnecessary adhesive sheet at the same time as or before the folding of the object to be peeled in the folding step. It is characterized in.

更に、上記課題を解決するために、一方向に延出可能な剥離シートと当該剥離シートの一方の面に積層された接着体を有する少なくとも2層構造の原反から接着シートを形成し、当該接着シートを被着体に貼付する本発明のシート貼付装置は、前記原反を繰り出す繰出手段と、前記剥離シート側から押圧して前記原反を被着体に貼付する押圧手段と、前記被着体に貼付された原反を貫通する所定形状の切込みを形成することで、当該切込みの内側であって前記接着体及び剥離シートに、接着シート及び内側不要シートを形成すると共に、当該切込みの外側であって前記接着体及び剥離シートに、不要接着シート及び外側不要シートを形成する切断手段と、前記内側不要シートと前記外側不要シートとを繋ぐ繋ぎシートを貼付する繋ぎシート貼付手段と、前記被着体と繋ぎシートとを相対移動させることで、前記被着体上に接着シートを残して前記不要接着シート、内側不要シート及び外側不要シートからなる剥離対象物を剥離する移動手段とを備え、前記剥離対象物を折り曲げる折り曲げ手段を更に含み、当該折り曲げ手段による剥離対象物の折り曲げと同時または折り曲げ前に、前記不要接着シートを加熱可能な加熱手段を有することを特徴とする。   Furthermore, in order to solve the above-mentioned problem, an adhesive sheet is formed from an original fabric of at least a two-layer structure having a release sheet that can be extended in one direction and an adhesive layer laminated on one surface of the release sheet, The sheet sticking apparatus of the present invention for sticking an adhesive sheet to an adherend includes a feeding means for feeding out the original fabric, a pressing means for pressing the original fabric on the adherend by pressing from the release sheet side, and the adherend. By forming an incision of a predetermined shape that penetrates the original fabric affixed to the kimono, an adhesive sheet and an inner unnecessary sheet are formed on the adhesive body and the release sheet inside the incision, and the incision of the incision Cutting means for forming an unnecessary adhesive sheet and an outer unnecessary sheet on the adhesive body and the release sheet, and a connecting sheet affixing a connecting sheet for connecting the inner unnecessary sheet and the outer unnecessary sheet. A means for moving the means and the adherend and the connecting sheet relative to each other to leave the adhesive sheet on the adherend and to peel off the peeling target object composed of the unnecessary adhesive sheet, the inner unnecessary sheet, and the outer unnecessary sheet. And a folding means for folding the object to be peeled, and further comprising a heating means capable of heating the unnecessary adhesive sheet simultaneously with or before the folding of the peeled object by the folding means. .

本発明において、前記加熱手段は、前記剥離対象物の剥離の進行に伴って変動する不要接着シートの幅に対応して、当該不要接着シートに対する加熱領域を変更可能な加熱領域変更手段を備える構成を採用することができ、また、前記接着シートが加熱されることを防止する加熱防止手段を更に備える構成を採用することができる。   In the present invention, the heating means includes a heating area changing means capable of changing a heating area for the unnecessary adhesive sheet corresponding to a width of the unnecessary adhesive sheet that varies with the progress of peeling of the peeling target. In addition, it is possible to employ a configuration further comprising a heating preventing means for preventing the adhesive sheet from being heated.

更に、上記課題を解決するために、一方向に延出可能な剥離シートと当該剥離シートの一方の面に積層された接着体を有する少なくとも2層構造の原反から接着シートを形成し、当該接着シートを被着体に貼付する本発明のシート貼付方法は、前記原反を繰り出す工程と、前記剥離シート側から押圧して前記原反を被着体に貼付する工程と、前記被着体に貼付された原反を貫通する切込みを形成することで、当該切込みの内側であって前記接着体及び剥離シートに、接着シート及び内側不要シートを形成するとともに、当該切込みの外側であって前記接着体及び剥離シートに、不要接着シート及び外側不要シートを形成する工程と、前記内側不要シートと前記外側不要シートとを繋ぐ繋ぎシートを貼付する工程と、前記被着体と繋ぎシートとを相対移動させることで、当該被着体に接着シートを残して前記不要接着シート、内側不要シート及び外側不要シートからなる剥離対象物を剥離する工程とを備え、前記剥離対象物を折り曲げる折り曲げ工程を更に含み、当該折り曲げ工程における剥離対象物の折り曲げと同時または折り曲げ前に、前記不要接着シートを加熱する工程を有することを特徴とする。   Furthermore, in order to solve the above-mentioned problem, an adhesive sheet is formed from an original fabric of at least a two-layer structure having a release sheet that can be extended in one direction and an adhesive layer laminated on one surface of the release sheet, The sheet sticking method of the present invention for sticking an adhesive sheet to an adherend includes a step of feeding out the original fabric, a step of pressing from the release sheet side to stick the original fabric to an adherend, and the adherend. Forming an incision that penetrates the original fabric affixed to the inner side of the incision, and forming an adhesive sheet and an inner unnecessary sheet on the adhesive body and the release sheet. A step of forming an unnecessary adhesive sheet and an outer unnecessary sheet on the adhesive and release sheet; a step of attaching a connecting sheet connecting the inner unnecessary sheet and the outer unnecessary sheet; and the adherend and the connecting sheet; A step of bending the peeling target object, comprising a step of peeling the peeling target object composed of the unnecessary adhesive sheet, the inner unnecessary sheet and the outer unnecessary sheet while leaving the adhesive sheet on the adherend by relative movement. In addition, the method further includes a step of heating the unnecessary adhesive sheet simultaneously with the folding of the object to be peeled in the folding step or before the folding.

本発明によると、折り曲げ手段による原反の折り曲げと同時または折り曲げ前に、接着シートと分断された不要接着シートが所定温度に加熱される。これにより、不要接着シートは、軟化した状態で折り曲げ手段によって折り曲げられるので、微細にひび割れるようなことがなくなり、当該ひび割れに起因した粉塵の発生を効果的に抑制し、周辺環境を汚染する等の不具合を防止することができる。また、加熱領域変更手段や加熱防止手段を備えていれば、接着シートが必要以上に加熱されることが確実に防止され、接着シートの接着不良が生じるといった不具合は生じない。更に、振動印加手段を備えて当該折り曲げ手段に振動を加えながら剥離対象物を剥離すれば、剥離不良の発生を確実に防止することができる。   According to the present invention, the unnecessary adhesive sheet separated from the adhesive sheet is heated to a predetermined temperature simultaneously with or before the folding of the original fabric by the bending means. As a result, the unnecessary adhesive sheet is bent by the bending means in a softened state, so that it is not cracked finely, effectively preventing the generation of dust due to the crack, and contaminating the surrounding environment, etc. Problems can be prevented. In addition, if the heating region changing means and the heating preventing means are provided, the adhesive sheet is reliably prevented from being heated more than necessary, and there is no inconvenience that the adhesion failure of the adhesive sheet occurs. Furthermore, if the object to be peeled is peeled off by providing vibration applying means and applying vibration to the bending means, it is possible to reliably prevent the occurrence of peeling failure.

本発明の実施形態のシート貼付装置の側面図。The side view of the sheet sticking apparatus of embodiment of this invention. 折り曲げ手段での内側不要シートの剥離を説明する斜視図。The perspective view explaining peeling of the inner unnecessary sheet | seat in a bending means. 剥離板の内部構造を説明する断面図。Sectional drawing explaining the internal structure of a peeling board. (a)〜(c)は、被着体への接着シートの貼付手順を説明する側面図。(A)-(c) is a side view explaining the sticking procedure of the adhesive sheet to a to-be-adhered body. (a)〜(c)は、不要接着シートの幅の変化に対応した送風領域の変化を説明する断面図。(A)-(c) is sectional drawing explaining the change of the ventilation area | region corresponding to the change of the width | variety of an unnecessary adhesive sheet.

以下、図面を参照して、一方向に延出可能な剥離シートRLと当該剥離シートRLの一方の面に積層された接着体AMを有する少なくとも2層構造の原反RSから接着シートASを形成し、当該接着シートASを半導体ウエハ等の略円形の被着体AHに貼付するシート貼付装置SMを例とした実施形態について説明する。なお、本実施形態において基準となる図を挙げることなく、上、下、左、右、といった方向を示した場合は、全て図1を基準としている。また、本実施形態の場合、接着体AMは、単層の感熱接着性の接着シートとする。   Hereinafter, with reference to the drawings, an adhesive sheet AS is formed from an original fabric RS having at least a two-layer structure including a release sheet RL that can be extended in one direction and an adhesive AM laminated on one surface of the release sheet RL. An embodiment in which the sheet sticking device SM for sticking the adhesive sheet AS to a substantially circular adherend AH such as a semiconductor wafer is taken as an example will be described. It should be noted that all the directions such as up, down, left, and right are shown in FIG. 1 without giving a reference figure in the present embodiment. In the present embodiment, the adhesive AM is a single-layer heat-sensitive adhesive sheet.

図1〜図3を参照して、シート貼付装置SMは、原反RSを繰り出す繰出手段1と、剥離シートRL側から押圧して原反RSを被着体AHに貼付する押圧手段2と、被着体AHに貼付された原反RSを貫通する所定形状の切込みを形成することで、当該切込みの内側であって接着体AM及び剥離シートRLに、接着シートAS及び内側不要シートRLiを形成すると共に、当該切込みの外側であって接着体AM及び剥離シートRLに、不要接着シートUS及び外側不要シートRLoを形成する切断手段3と、内側不要シートRLiと外側不要シートRLoとを繋ぐ繋ぎシートCSを貼付する繋ぎシート貼付手段4と、被着体AHと繋ぎシートCSとを相対移動させることで、当該被着体AH上に接着シートASを残して不要接着シートUS、内側不要シートRLi及び外側不要シートRLoからなる剥離対象物RMを剥離する移動手段5と、剥離対象物RMを折り曲げる折り曲げ手段6と、折り曲げ手段6による剥離対象物RMの折り曲げと同時に不要接着シートUSを加熱可能な加熱手段7と、接着シートASが加熱されることを防止する加熱防止手段8とを備える。   With reference to FIGS. 1 to 3, the sheet sticking device SM includes a feeding unit 1 that feeds out the original fabric RS, a pressing unit 2 that presses the raw fabric RS to the adherend AH by pressing from the release sheet RL side, By forming a notch of a predetermined shape that penetrates the original fabric RS attached to the adherend AH, an adhesive sheet AS and an inner unnecessary sheet RLi are formed in the adhesive AM and the release sheet RL inside the notch. In addition, cutting means 3 for forming the unnecessary adhesive sheet US and the outer unnecessary sheet RLo on the adhesive body AM and the release sheet RL outside the notch, and the connecting sheet that connects the inner unnecessary sheet RLi and the outer unnecessary sheet RLo The bonding sheet sticking means 4 for sticking CS, and the adherend AH and the joining sheet CS are relatively moved to leave the adhesive sheet AS on the adherend AH and the unnecessary adhesive sheet US, The moving means 5 for peeling the peeling object RM composed of the side unnecessary sheet RLi and the outer unnecessary sheet RLo, the folding means 6 for bending the peeling object RM, and the unnecessary adhesive sheet US simultaneously with the folding of the peeling object RM by the bending means 6 Heating means 7 capable of heating the adhesive sheet AS, and a heating prevention means 8 for preventing the adhesive sheet AS from being heated.

繰出手段1は、原反RSを繰出可能に保持する繰出ローラ11と、繰出ローラ11から繰り出された原反RSを、案内するガイドローラ12a、12b、12cと、ガイドローラ12cの直上に位置し、駆動機器としての回転モータDM1により回転駆動される駆動ローラ13と、駆動ローラ13との間に剥離対象物RMを挟み込むニップローラ14と、回転モータDM2により回転駆動され剥離対象物RMを巻き取る巻取軸15とを備えている。   The feeding means 1 is positioned immediately above the guide roller 12c, a guide roller 12a, 12b, 12c for guiding the raw fabric RS fed from the feed roller 11, a feed roller 11 that holds the raw fabric RS so that the feed web 11 can be fed. , A driving roller 13 that is rotationally driven by a rotary motor DM1 as a driving device, a nip roller 14 that sandwiches the separation object RM between the driving roller 13, and a winding that is rotationally driven by the rotation motor DM2 and winds up the separation object RM. A take-up shaft 15 is provided.

押圧手段2は、駆動機器としての直動モータLM1のスライダ21に回転可能に支持され、左右方向に移動可能な押圧ローラ22を備えている。   The pressing means 2 includes a pressing roller 22 that is rotatably supported by a slider 21 of a direct acting motor LM1 serving as a driving device and is movable in the left-right direction.

切断手段3は、切断刃31と、この切断刃31を支持するアーム32と、このアーム32を回動させる駆動機器としての回動モータDM3と、回動モータDM3をスライダ33で支持し、切断刃31を上下方向に移動可能とする駆動機器としての直動モータLM2を備える。   The cutting means 3 supports a cutting blade 31, an arm 32 that supports the cutting blade 31, a rotation motor DM 3 as a driving device that rotates the arm 32, and a rotation motor DM 3 supported by a slider 33. A linear motion motor LM2 is provided as a drive device that enables the blade 31 to move in the vertical direction.

繋ぎシート貼付手段4は、基材シートBSの一方の面に接着剤層AD1を有する繋ぎシートCSを繰出可能に支持する繰出ローラ41と、直動モータLM1のスライダ42に回転可能に支持され、左右方向に移動可能とする押圧ローラ43とを備えている。なお、繰出ローラ41は図示しないフレームによってスライダ42に支持されている。   The connecting sheet sticking means 4 is rotatably supported by a feeding roller 41 that supports the connecting sheet CS having the adhesive layer AD1 on one surface of the base sheet BS and a slider 42 of the linear motor LM1, And a pressing roller 43 that is movable in the left-right direction. The feeding roller 41 is supported on the slider 42 by a frame (not shown).

移動手段5は、被着体AHを吸着保持可能に設けられ、駆動機器としての直動モータLM3のスライダ51に支持されて左右方向に移動可能なテーブル52を備えている。テーブル52は、駆動機器としての直動モータLM4によって上部テーブル53を上下方向に移動可能に設けられている。なお、上部テーブル53には、図示しないコイルヒータや赤外線ヒータ等の加熱手段が設けられている。   The moving means 5 includes a table 52 that is provided so as to be capable of adsorbing and holding the adherend AH, and that is supported by a slider 51 of a linear motion motor LM3 as a driving device and is movable in the left-right direction. The table 52 is provided so that the upper table 53 can be moved in the vertical direction by a direct acting motor LM4 as a drive device. The upper table 53 is provided with heating means such as a coil heater and an infrared heater (not shown).

折り曲げ手段6は、剥離板61と、剥離板61をスライダ62で支持し、当該剥離板61を左斜め下方向に移動可能とする駆動機器としての直動モータLM5と、剥離板61を一定の周期で振動させる振動印加手段であり駆動機器としての超音波振動機63とを備えている。剥離板61は、原反RSの幅より広い幅を有する側面視略三角形状とされ、その内部に空間SPが形成されて左下方の頂部に、剥離板61の幅方向にのびる開口部64が開設されている。また接着シートASから内側不要シートRLiを剥離する際に、超音波振動機63によって剥離板61を振動させて剥離を促進するようになっている。   The bending means 6 includes a peeling plate 61, a linear motion motor LM5 as a driving device that supports the peeling plate 61 with a slider 62, and is capable of moving the peeling plate 61 diagonally to the left, and a peeling plate 61. It is provided with an ultrasonic vibrator 63 as a driving device that is a vibration applying means for vibrating at a period. The peeling plate 61 has a substantially triangular shape in a side view having a width wider than the width of the original fabric RS. A space SP is formed in the peeling plate 61, and an opening 64 extending in the width direction of the peeling plate 61 is formed at the top of the lower left. It has been established. Further, when peeling the inner unnecessary sheet RLi from the adhesive sheet AS, the peeling plate 61 is vibrated by the ultrasonic vibrator 63 to promote peeling.

加熱手段7は、図示しないコイルヒータや赤外線ヒータ等の加熱手段によって所定温度(例えば50℃〜120℃)に加熱された気体を送風可能なポンプやタービン等の温風送風手段71と、温風送風手段71から送風された気体を剥離板61の空間SP内に導く配管72と、剥離対象物RMの剥離の進行に伴って変動する不要接着シートUSの幅に対応して、当該不要接着シートUSに対する加熱領域を変更可能な加熱領域変更手段73とを備えている。加熱領域変更手段73は、空間SPの内部を3分割にすることで、開口部64の図3中上下に温風用開口部64a、64bを形成する仕切り板74、75と、両仕切り板74、75を支持するナット部材76、77と、これらナット部材76、77が螺合され、剥離板61の側面で夫々支承される送りねじ78と、送りねじ78を回動させる駆動機器としての回動モータDM4とを備えている。送りねじ78は軸心方向中央で逆ねじとなっている。   The heating unit 7 includes a hot air blowing unit 71 such as a pump or a turbine that can blow a gas heated to a predetermined temperature (for example, 50 ° C. to 120 ° C.) by a heating unit such as a coil heater or an infrared heater (not shown), Corresponding to the width of the pipe 72 that guides the gas blown from the blowing means 71 into the space SP of the peeling plate 61 and the unnecessary adhesive sheet US that fluctuates with the progress of peeling of the peeling target RM, the unnecessary adhesive sheet. Heating area changing means 73 capable of changing the heating area for the US is provided. The heating area changing means 73 divides the interior of the space SP into three parts, so that the partition plates 74 and 75 that form the hot air openings 64a and 64b above and below the opening 64 in FIG. , 75, nut members 76, 77 that are screwed together, a feed screw 78 that is supported on the side surface of the peeling plate 61, and a rotation device as a drive device that rotates the feed screw 78. And a dynamic motor DM4. The feed screw 78 is a reverse screw at the center in the axial direction.

加熱防止手段8は、図示しないフロンやペルチェ等を利用した冷却手段によって所定温度(例えば0℃〜20℃)に冷却された気体を送風可能なポンプやタービン等の冷風送風手段81と、冷風送風手段81から送風された気体を剥離板61の空間SP内に導く配管82とを備えている。なお、加熱防止手段8から送風される気体は、強制的に冷却されることのない気体でもよい。本実施形態の場合、加熱領域変更手段73は、剥離対象物RMの剥離の進行に伴って変動する接着シートASの幅に対応して、当該接着シートASに対する加熱防止領域を変更可能な加熱防止領域変更手段としての機能を果たし、開口部64の図3中上下方向中央に加熱防止用開口部64cを形成する。これにより、回動モータDM4を一方向に回転すると、両仕切り板74、75が互いに近接する方向に移動し、回動モータDM4を他方向に回転すると、両仕切り板74、75が互いに離間する方向に移動する。これにより、温風用開口部64a、64bと加熱防止用開口部64cとの通路幅を変更して開口部64から吹き出す温風または冷風の領域を変化させることができる。温風用の気体及び加熱防止用の気体は、大気でもよいし、混合ガスやアルゴンガスや窒素ガス等の不活性ガス等であって良いよい。   The heating preventing means 8 includes a cooling air blowing means 81 such as a pump or a turbine capable of blowing a gas cooled to a predetermined temperature (for example, 0 ° C. to 20 ° C.) by a cooling means using a not-shown Freon or Peltier, and a cold air blowing And a pipe 82 for guiding the gas blown from the means 81 into the space SP of the peeling plate 61. The gas blown from the heating preventing means 8 may be a gas that is not forcibly cooled. In the case of the present embodiment, the heating region changing means 73 is capable of changing the heating prevention region for the adhesive sheet AS in accordance with the width of the adhesive sheet AS that varies with the progress of the peeling of the peeling object RM. A function as a region changing means is achieved, and a heating preventing opening 64c is formed at the center of the opening 64 in the vertical direction in FIG. Accordingly, when the rotation motor DM4 is rotated in one direction, the partition plates 74 and 75 are moved in directions close to each other, and when the rotation motor DM4 is rotated in the other direction, the partition plates 74 and 75 are separated from each other. Move in the direction. Thereby, the area | region of the warm air or cold air which blows off from the opening part 64 can be changed by changing the passage width of the opening parts 64a and 64b for hot air, and the opening part 64c for a heating prevention. The gas for warm air and the gas for preventing heating may be air or an inert gas such as a mixed gas, argon gas, or nitrogen gas.

次に、上記実施形態のシート貼付装置SMを用いたシート貼付方法を説明する。
先ず、図1中実線で示すように、原反RSが繰出ローラ11から巻取軸15に繰り出された状態で、直動モータLM4が駆動されて上部テーブル53が下方に下がり、図示しない搬送手段によって被着体AHが上部テーブル53の上面に載置されて保持される。次いで、直動モータLM4が駆動され、上部テーブル53が上方に移動される。このとき原反RSと被着体AHとは接触することのない間隔に保たれる。なお、被着体AHは、上部テーブル53の上面であって、切断刃31の回転中心にその中心が位置するように載置される。
Next, a sheet sticking method using the sheet sticking device SM of the above embodiment will be described.
First, as shown by a solid line in FIG. 1, with the original fabric RS being fed from the feed roller 11 to the take-up shaft 15, the linear motor LM4 is driven and the upper table 53 is lowered downward, and transport means (not shown) As a result, the adherend AH is placed and held on the upper surface of the upper table 53. Next, the linear motor LM4 is driven, and the upper table 53 is moved upward. At this time, the original fabric RS and the adherend AH are kept at an interval where they do not come into contact with each other. The adherend AH is placed on the upper surface of the upper table 53 so that its center is located at the rotation center of the cutting blade 31.

上部テーブル53が上方に移動されたことが検知されると、押圧ローラ22が図1中実線で示す位置から右方に移動され、押圧ローラ22が剥離シートRL側から押圧して原反RSを被着体AHの上表面に貼付する。このとき接着体AMが上部テーブル53に設けられた加熱手段によって所定の温度に加熱されて接着する。そして、押圧ローラ22が被着体AHを超え図4(a)に示す位置に到達すると、切断手段3が図1中実線で示す待機位置から原反RSを貫通する切断位置まで切断刃31を下降し、この状態で回動モータDM3が駆動されアーム32を回動することで、原反RSに被着体AHの輪郭に沿う所定形状の切込みを形成する。この切断により、接着シートAS、内側不要シートRLi、不要接着シートUS及び外側不要シートRLoが形成される。   When it is detected that the upper table 53 has been moved upward, the pressing roller 22 is moved to the right from the position indicated by the solid line in FIG. 1, and the pressing roller 22 presses from the release sheet RL side to remove the original fabric RS. Affixed to the upper surface of adherend AH. At this time, the adhesive body AM is heated to a predetermined temperature by the heating means provided on the upper table 53 and bonded. When the pressing roller 22 passes over the adherend AH and reaches the position shown in FIG. 4A, the cutting means 3 moves the cutting blade 31 from the standby position shown by the solid line in FIG. 1 to the cutting position that penetrates the original fabric RS. In this state, the rotation motor DM3 is driven and the arm 32 is rotated, thereby forming a cut with a predetermined shape along the contour of the adherend AH in the original fabric RS. By this cutting, the adhesive sheet AS, the inner unnecessary sheet RLi, the unnecessary adhesive sheet US, and the outer unnecessary sheet RLo are formed.

上記のように切込みが形成された後、切断手段3が初期位置に戻ると、直動モータLM1が駆動され、押圧ローラ43が図1中実線で示す位置から右方に向かって移動され、図4(a)に示すように、押圧ローラ43が、基材シートBS側から押圧して繋ぎシートCSを内側不要シートRLiと外側不要シートRLoとを繋ぐように貼付する。そして、押圧ローラ43が被着体AHを超え図4(a)に示す位置に到達すると、図4(b)に示すように、直動モータLM5が駆動され、剥離板61が左下方に移動され温風送風手段71及び冷風送風手段81が作動され、温風用開口部64a、64bから温風が噴出される。このとき、図4(a)に示すように、仕切り板74、75が配管82の空間SP内の開口部(図3中中央)に位置することで、当該開口部を塞ぐので、加熱防止用開口部64cは形成されない上、冷風送風手段81から送風された気体が空間SP内に送風されることはない。   When the cutting means 3 returns to the initial position after the cut is formed as described above, the linear motion motor LM1 is driven, and the pressing roller 43 is moved rightward from the position indicated by the solid line in FIG. As shown to 4 (a), the press roller 43 presses from the base material sheet BS side, and affixes the connection sheet | seat CS so that the inner side unnecessary sheet | seat RLi and the outer side unnecessary sheet | seat RLo may be connected. When the pressing roller 43 passes the adherend AH and reaches the position shown in FIG. 4A, the linear motor LM5 is driven and the peeling plate 61 moves to the lower left as shown in FIG. 4B. Then, the hot air blowing means 71 and the cold air blowing means 81 are operated, and hot air is ejected from the hot air openings 64a and 64b. At this time, as shown in FIG. 4A, the partition plates 74 and 75 are located in the opening (center in FIG. 3) in the space SP of the pipe 82, thereby closing the opening. The opening 64c is not formed, and the gas blown from the cold air blowing means 81 is not blown into the space SP.

その後、直動モータLM1及びLM3が駆動され、各押圧ローラ22、43とテーブル52とが同期して左方向に移動されると同時に、回動モータDM1及びDM2も同期して駆動され、剥離対象物RMが巻き取られる。   Thereafter, the linear motion motors LM1 and LM3 are driven, and the pressing rollers 22 and 43 and the table 52 are moved in the left direction in synchronization. At the same time, the rotation motors DM1 and DM2 are also driven in synchronization and removed. The object RM is wound up.

そして、図4(b)に示すように、切込みの左端が剥離板61の左下端部に到達すると、剥離対象物RMは、剥離板61によって折り曲げられて上方へ導かれるとともに、接着シートASは、被着体AHの上面に貼付された状態で内側不要シートRLiから剥離される。このとき、超音波振動機62を作動させて剥離板61を振動させることで、剥離を促進させることができる。   Then, as shown in FIG. 4 (b), when the left end of the cut reaches the lower left end of the peeling plate 61, the peeling object RM is bent by the peeling plate 61 and guided upward, and the adhesive sheet AS is And it peels from the inner side unnecessary sheet | seat RLi in the state affixed on the upper surface of the to-be-adhered body AH. At this time, peeling can be promoted by operating the ultrasonic vibrator 62 to vibrate the peeling plate 61.

なお、接着シートASが内側不要シートRLiから剥離されるとき、図5(b)及び図5(c)に示すように、不要接着シートUSの幅は変化する。このように不要接着シートUSの幅が変化するにも関わらず、開口部64全域から温風を送風し続けると接着シートASにも温風が吹き付けられ、当該接着シートASが必要以上に加熱されて強固に接着されてしまう。これを防止するために、回動モータDM4が駆動され、不要接着シートUSの幅に応じて仕切り板74、75が互いに離間する方向に一旦移動され、再度近接するように移動される。このとき、仕切り板74、75が互いに離間する方向に移動されて加熱防止用開口部64cに通じる空間SPが形成され、冷風送風手段81から送風された気体が当該空間SP内に送風されて加熱防止用開口部64cから接着シートASの加熱を防止する気体が吹き付けられることになる。これにより、不要接着シートUSに対応する外側不要シートRLoには温風が、内側不要シートRLiには冷風が夫々吹き付けられる。その後、繋ぎシートCS及び剥離対象物RMが同時に巻取軸15に巻き取られ、図1に示す状態に戻り、以降上記同様の動作が繰り返される。なお、内側不要シートRLiに冷風を吹き付けることで、当該内側不要シートRLiと接着シートASとの接着力を弱め、それらの剥離を容易にさせる効果もある。   When the adhesive sheet AS is peeled from the inner unnecessary sheet RLi, the width of the unnecessary adhesive sheet US changes as shown in FIGS. 5B and 5C. Although the width of the unnecessary adhesive sheet US changes as described above, if the hot air continues to be blown from the entire opening 64, the hot air is blown to the adhesive sheet AS, and the adhesive sheet AS is heated more than necessary. Will be firmly bonded. In order to prevent this, the rotation motor DM4 is driven, and the partition plates 74 and 75 are once moved in a direction away from each other according to the width of the unnecessary adhesive sheet US, and moved again so as to approach each other. At this time, the partition plates 74 and 75 are moved away from each other to form a space SP leading to the heating preventing opening 64c, and the gas blown from the cold air blowing means 81 is blown into the space SP and heated. A gas for preventing the adhesive sheet AS from being heated is blown from the prevention opening 64c. Accordingly, warm air is blown to the outer unnecessary sheet RLo corresponding to the unnecessary adhesive sheet US, and cold air is blown to the inner unnecessary sheet RLi. Thereafter, the connecting sheet CS and the separation object RM are simultaneously wound around the winding shaft 15 and return to the state shown in FIG. 1, and thereafter the same operation as described above is repeated. In addition, by blowing cold air on the inner unnecessary sheet RLi, there is also an effect of weakening the adhesive force between the inner unnecessary sheet RLi and the adhesive sheet AS and facilitating their peeling.

以上の実施形態によると、折り曲げ手段6の剥離板61による原反RSの折り曲げと同時に、接着シートASから分断された不要接着シートUSが所定温度に加熱されるため、当該不要シートUSが軟化した状態で不要接着シートUSが折り曲げられることで、当該不要接着シートUSが微細にひび割れることを防止することができる。その結果、粉塵の発生が効果的に抑制され、周辺環境を汚染する等の不具合が生じない。また、接着シートASからの内側不要シートRLiの剥離の進行に伴って、不要接着シートUSの加熱領域と接着シートASの冷却領域とを変更することで、接着シートASが必要以上に加熱されることが確実に防止され、接着シートASの接着不良が生じるといった不具合は生じない。更に、剥離板61を微振動させつつ接着シートASから剥離シートRLを剥離するため、剥離不良の発生を防止することができる。   According to the above embodiment, the unnecessary adhesive sheet US separated from the adhesive sheet AS is heated to a predetermined temperature simultaneously with the folding of the raw material RS by the peeling plate 61 of the bending means 6, so that the unnecessary sheet US is softened. Since the unnecessary adhesive sheet US is bent in a state, the unnecessary adhesive sheet US can be prevented from being finely cracked. As a result, generation of dust is effectively suppressed, and problems such as contamination of the surrounding environment do not occur. Further, the adhesive sheet AS is heated more than necessary by changing the heating region of the unnecessary adhesive sheet US and the cooling region of the adhesive sheet AS as the inner unnecessary sheet RLi peels from the adhesive sheet AS. This is surely prevented, and there is no inconvenience that an adhesion failure of the adhesive sheet AS occurs. Further, since the release sheet RL is peeled from the adhesive sheet AS while the release plate 61 is slightly vibrated, it is possible to prevent the occurrence of peeling failure.

以上、本発明の実施形態について図面を参照して説明したが、本発明はこれに限定されない。例えば、一方向に延出可能な剥離シートRLと当該剥離シートRLの一方の面に積層された接着体AMを有する少なくとも2層構造の原反RSから接着シートASを形成するシート製造装置に適応することもできる。即ち、原反RSを繰り出す繰出手段1と、接着体AMに所定形状の切込みを形成することで、当該切込みの内側に接着シートASを形成すると共に、当該切込みの外側に不要接着シートUSを形成する切断手段3と、接着シートASと不要接着シートUSとを相互移動させることで、剥離シートRL上に接着シートASを残して不要接着シートUSからなる剥離対象物RMを剥離する移動手段5と、剥離対象物RMを折り曲げる折り曲げ手段6と、当該折り曲げ手段6による剥離対象物RMの折り曲げと同時に不要接着シートUSを加熱可能な加熱手段7とでシート製造装置を構成することもできる。この場合、繰出手段1は、前記実施形態とは上下反転させた状態で原反RSを繰り出すように構成すると共に、切断手段3は、剥離シートRLを分断しないように構成し、巻取軸15で不要接着シートUSのみを巻き取るようにすればよい。   As mentioned above, although embodiment of this invention was described with reference to drawings, this invention is not limited to this. For example, it is applicable to a sheet manufacturing apparatus that forms an adhesive sheet AS from an original RS having at least a two-layer structure having a release sheet RL that can be extended in one direction and an adhesive AM laminated on one surface of the release sheet RL. You can also That is, the feeding means 1 for feeding out the raw fabric RS and the cut of a predetermined shape are formed in the adhesive AM, thereby forming the adhesive sheet AS inside the cut and forming the unnecessary adhesive sheet US outside the cut. Cutting means 3 for moving, and moving means 5 for peeling the peeling object RM made of the unnecessary adhesive sheet US leaving the adhesive sheet AS on the peeling sheet RL by moving the adhesive sheet AS and the unnecessary adhesive sheet US relative to each other. The sheet manufacturing apparatus can also be configured by the bending means 6 for bending the peeling object RM and the heating means 7 capable of heating the unnecessary adhesive sheet US simultaneously with the bending of the peeling object RM by the bending means 6. In this case, the feeding unit 1 is configured to feed the original fabric RS in a state inverted upside down from the above embodiment, and the cutting unit 3 is configured not to divide the release sheet RL, and the winding shaft 15 Thus, only the unnecessary adhesive sheet US may be wound up.

また、上記実施形態では、被着体AHに接着体AMを貼付した後、切断手段3で接着シートASと不要接着シートUSとに分断したものを例に説明したが、接着シートASと不要接着シートUSとに分断した後、折り曲げ手段6で原反RSを折り曲げながら接着シートASを被着体AHに貼付し、剥離対象物RMを巻取軸15に巻き取るものにも本発明は適用できる。   In the above embodiment, the adhesive AM is attached to the adherend AH and then divided into the adhesive sheet AS and the unnecessary adhesive sheet US by the cutting means 3. However, the adhesive sheet AS and the unnecessary adhesive are separated. The present invention can also be applied to a structure in which the adhesive sheet AS is attached to the adherend AH while the raw material RS is folded by the bending means 6 after being divided into the sheet US, and the peeling object RM is wound around the winding shaft 15. .

また、加熱手段は、剥離板61の頂部に、例えばサーマルヘッド等の加熱プレートを組み付けた構成としてもよい。
また、折り曲げ手段6とは別体で温風を吹き付ける加熱手段を設け、剥離対象物RMの折り曲げ前に不要接着シートUSを加熱するようにしてもよい。
Further, the heating means may have a configuration in which a heating plate such as a thermal head is assembled on the top of the peeling plate 61.
In addition, a heating unit that blows warm air separately from the bending unit 6 may be provided, and the unnecessary adhesive sheet US may be heated before the separation object RM is bent.

更に、加熱領域変更手段及び加熱防止手段は、空間SPを複数に分割し、分割された空間SP毎に開閉弁を備えた加熱気体供給管及び冷却気体供給管を接続し、この開閉弁を開閉制御して、加熱領域や加熱防止領域を変更するようにしてもよい。   Further, the heating region changing means and the heating preventing means divide the space SP into a plurality of spaces, connect a heating gas supply pipe and a cooling gas supply pipe each having an opening / closing valve for each divided space SP, and open / close the opening / closing valve. The heating area and the heating prevention area may be changed by control.

また、振動印加手段は、変心モータや公知のバイブレータ等で構成してもよい。   Further, the vibration applying means may be constituted by a concentric motor, a known vibrator or the like.

更に、切り込みの形状は、円形、多角形、楕円形、又はそれらが組み合わさった形状のもの等であってもよい。
また、折り曲げ手段6は、ローラ等で剥離シートRLを折り曲げる構成としてもよい。
Furthermore, the shape of the cut may be circular, polygonal, elliptical, or a combination thereof.
Further, the bending means 6 may be configured to bend the release sheet RL with a roller or the like.

更に、接着体AMや接着シートASは、接着剤層単層のものでもよいし、単数又は複数の層からなる基材シートに接着剤層が積層されたものでもよい。
また、接着体AMは、感熱接着性の接着シートであってもよい。
Furthermore, the adhesive body AM and the adhesive sheet AS may be a single adhesive layer, or may be one in which an adhesive layer is laminated on a base sheet composed of one or a plurality of layers.
Further, the adhesive body AM may be a heat-sensitive adhesive sheet.

また、被着体AHとしては、半導体ウエハ、ガラス板、鋼板、陶器、木板、半導体基板または樹脂板等、その他の被着体も対象とすることができ、更に、ウエハは、シリコーン半導体ウエハや化合物半導体ウエハであってもよく、被着体が適宜な物品(例えば、段ボールケースや樹脂容器等)であって、接着シートASがラベルであってもよく、被着体AHが半導体ウエハであって、接着シートASが保護シート、ダイアタッチフィルムなどであってもよい。また、接着シートASは、上記に限らず、その他の任意のシート、フィルム、テープ等、任意の用途、形状の接着シート等が適用できる。   Further, as the adherend AH, other adherends such as a semiconductor wafer, a glass plate, a steel plate, a pottery, a wooden plate, a semiconductor substrate, or a resin plate can also be targeted. It may be a compound semiconductor wafer, the adherend may be an appropriate article (for example, a cardboard case or a resin container), the adhesive sheet AS may be a label, and the adherend AH is a semiconductor wafer. The adhesive sheet AS may be a protective sheet, a die attach film, or the like. Further, the adhesive sheet AS is not limited to the above, and other arbitrary sheets, films, tapes, and the like can be used for arbitrary uses and shapes.

更に、上記実施形態における駆動機器は、回動モータ、直動モータ、リニアモータ、単軸ロボット、多関節ロボット等の電動機器、エアシリンダ、油圧シリンダ、ロッドレスシリンダ及びロータリシリンダ等のアクチュエタ等を採用することができる上、それらを直接的又は間接的に組み合せたものを採用することもできる。   Furthermore, the drive device in the above embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single-axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed.

AH…被着体、AM…接着体、AS…接着シート、CS…繋ぎシート、RL…剥離シート、RLi…内側不要シート、RLo…外側不要シート、RM…剥離対象物、RS…原反、US…不要接着シート、1…繰出手段、2…押圧手段、3…切断手段、4…繋ぎシート貼付手段、5…移動手段、6…折り曲げ手段、7…加熱手段、73…加熱領域変更手段、8…加熱防止手段。

AH ... Adherence, AM ... Adhesive, AS ... Adhesive sheet, CS ... Connecting sheet, RL ... Release sheet, RLi ... Inner unnecessary sheet, RLo ... Outer unnecessary sheet, RM ... Removal object, RS ... Original fabric, US ... unnecessary adhesive sheet, 1 ... feeding means, 2 ... pressing means, 3 ... cutting means, 4 ... connecting sheet attaching means, 5 ... moving means, 6 ... bending means, 7 ... heating means, 73 ... heating region changing means, 8 ... heating prevention means.

Claims (6)

一方向に延出可能な剥離シートと当該剥離シートの一方の面に積層された接着体を有する少なくとも2層構造の原反から接着シートを形成するシート製造装置において、
前記原反を繰り出す繰出手段と、
前記接着体に所定形状の切込みを形成することで、当該切込みの内側に接着シートを形成すると共に、当該切込みの外側に不要接着シートを形成する切断手段と、
前記接着シートと不要接着シートとを相対移動させることで、前記剥離シート上に接着シートを残して前記不要接着シートからなる剥離対象物を剥離する移動手段とを備え、
前記剥離対象物を折り曲げる折り曲げ手段を更に含み、当該折り曲げ手段による剥離対象物の折り曲げと同時または折り曲げ前に、前記不要接着シートを加熱可能な加熱手段を有することを特徴とするシート製造装置。
In a sheet manufacturing apparatus for forming an adhesive sheet from an original fabric of at least a two-layer structure having a release sheet that can be extended in one direction and an adhesive laminated on one surface of the release sheet,
A feeding means for feeding out the original fabric;
A cutting means for forming an adhesive sheet on the inner side of the cut and forming an unnecessary adhesive sheet on the outer side of the cut by forming a cut with a predetermined shape in the adhesive body,
By moving the adhesive sheet and the unnecessary adhesive sheet relative to each other, a moving means for leaving the adhesive sheet on the release sheet and peeling the peeling target made of the unnecessary adhesive sheet is provided.
The sheet manufacturing apparatus further includes a bending unit configured to bend the object to be peeled, and further includes a heating unit capable of heating the unnecessary adhesive sheet simultaneously with or before the folding of the object to be peeled by the bending unit.
一方向に延出可能な剥離シートと当該剥離シートの一方の面に積層された接着体を有する少なくとも2層構造の原反から接着シートを形成するシート製造方法において、
前記原反を繰り出す工程と、
前記接着体に所定形状の切込みを形成することで、当該切込みの内側に接着シートを形成すると共に、当該切込みの外側に不要接着シートを形成する工程と、
前記接着シートと不要接着シートとを相対移動させることで、前記剥離シート上に接着シートを残して前記不要接着シートからなる剥離対象物を剥離する工程とを備え、
前記剥離対象物を折り曲げる折り曲げ工程を更に含み、当該折り曲げ工程における剥離対象物の折り曲げと同時または折り曲げ前に、前記不要接着シートを加熱する工程を有することを特徴とするシート製造方法。
In the sheet manufacturing method of forming an adhesive sheet from an original fabric of at least a two-layer structure having a release sheet that can extend in one direction and an adhesive layer laminated on one surface of the release sheet,
Unwinding the original fabric;
Forming an adhesive sheet on the inner side of the cut by forming a cut with a predetermined shape in the adhesive body, and forming an unnecessary adhesive sheet on the outer side of the cut; and
By relatively moving the adhesive sheet and the unnecessary adhesive sheet, to leave the adhesive sheet on the release sheet, and to peel off the peeling target made of the unnecessary adhesive sheet,
The sheet manufacturing method further comprising a folding step of bending the peeling object, and heating the unnecessary adhesive sheet at the same time as or before folding the peeling object in the folding step.
一方向に延出可能な剥離シートと当該剥離シートの一方の面に積層された接着体を有する少なくとも2層構造の原反から接着シートを形成し、当該接着シートを被着体に貼付するシート貼付装置において、
前記原反を繰り出す繰出手段と、
前記剥離シート側から押圧して前記原反を被着体に貼付する押圧手段と、
前記被着体に貼付された原反を貫通する所定形状の切込みを形成することで、当該切込みの内側であって前記接着体及び剥離シートに、接着シート及び内側不要シートを形成すると共に、当該切込みの外側であって前記接着体及び剥離シートに、不要接着シート及び外側不要シートを形成する切断手段と、
前記内側不要シートと前記外側不要シートとを繋ぐ繋ぎシートを貼付する繋ぎシート貼付手段と、
前記被着体と繋ぎシートとを相対移動させることで、前記被着体上に接着シートを残して前記不要接着シート、内側不要シート及び外側不要シートからなる剥離対象物を剥離する移動手段とを備え、
前記剥離対象物を折り曲げる折り曲げ手段を更に含み、当該折り曲げ手段による剥離対象物の折り曲げと同時または折り曲げ前に、前記不要接着シートを加熱可能な加熱手段を有することを特徴とするシート貼付装置。
A sheet for forming an adhesive sheet from an original fabric having at least a two-layer structure having a release sheet that can be extended in one direction and an adhesive laminated on one surface of the release sheet, and sticking the adhesive sheet to an adherend In the pasting device,
A feeding means for feeding out the original fabric;
A pressing means for pressing from the release sheet side to attach the original fabric to an adherend;
By forming a notch of a predetermined shape that penetrates the original fabric affixed to the adherend, an adhesive sheet and an inner unnecessary sheet are formed on the adhesive body and the release sheet inside the notch, and the Cutting means for forming an unnecessary adhesive sheet and an outer unnecessary sheet on the adhesive body and the release sheet outside the cut;
A joining sheet attaching means for attaching a joining sheet that connects the inner unnecessary sheet and the outer unnecessary sheet;
A moving means for separating an object to be peeled including the unnecessary adhesive sheet, the inner unnecessary sheet, and the outer unnecessary sheet while leaving an adhesive sheet on the adherend by moving the adherend and the connecting sheet relative to each other; Prepared,
The sheet sticking apparatus further comprising a bending unit that bends the object to be peeled, and further includes a heating unit that can heat the unnecessary adhesive sheet at the same time as or before the folding of the object to be peeled by the bending unit.
前記加熱手段は、前記剥離対象物の剥離の進行に伴って変動する不要接着シートの幅に対応して、当該不要接着シートに対する加熱領域を変更可能な加熱領域変更手段を備えることを特徴とする請求項3記載のシート貼付装置。   The heating means includes a heating area changing means capable of changing a heating area for the unnecessary adhesive sheet corresponding to a width of the unnecessary adhesive sheet that varies with the progress of peeling of the object to be peeled. The sheet sticking apparatus according to claim 3. 前記接着シートが加熱されることを防止する加熱防止手段を更に備えることを特徴とする請求項3または請求項4に記載のシート貼付装置。   The sheet sticking apparatus according to claim 3, further comprising a heating preventing unit that prevents the adhesive sheet from being heated. 一方向に延出可能な剥離シートと当該剥離シートの一方の面に積層された接着体を有する少なくとも2層構造の原反から接着シートを形成し、当該接着シートを被着体に貼付するシート貼付方法において、
前記原反を繰り出す工程と、
前記剥離シート側から押圧して前記原反を被着体に貼付する工程と、
前記被着体に貼付された原反を貫通する切込みを形成することで、当該切込みの内側であって前記接着体及び剥離シートに、接着シート及び内側不要シートを形成するとともに、当該切込みの外側であって前記接着体及び剥離シートに、不要接着シート及び外側不要シートを形成する工程と、
前記内側不要シートと前記外側不要シートとを繋ぐ繋ぎシートを貼付する工程と、
前記被着体と繋ぎシートとを相対移動させることで、当該被着体に接着シートを残して前記不要接着シート、内側不要シート及び外側不要シートからなる剥離対象物を剥離する工程とを備え、
前記剥離対象物を折り曲げる折り曲げ工程を更に含み、当該折り曲げ工程における剥離対象物の折り曲げと同時または折り曲げ前に、前記不要接着シートを加熱する工程を有することを特徴とするシート貼付方法。

A sheet for forming an adhesive sheet from an original fabric having at least a two-layer structure having a release sheet that can be extended in one direction and an adhesive laminated on one surface of the release sheet, and sticking the adhesive sheet to an adherend In the pasting method,
Unwinding the original fabric;
A step of applying the original fabric to an adherend by pressing from the release sheet side;
By forming a notch that penetrates the original fabric affixed to the adherend, an adhesive sheet and an inner unnecessary sheet are formed on the adhesive and release sheet inside the notch, and the outside of the notch And forming the unnecessary adhesive sheet and the outer unnecessary sheet on the adhesive body and the release sheet,
A step of pasting a connecting sheet connecting the inner unnecessary sheet and the outer unnecessary sheet;
By relatively moving the adherend and the connecting sheet, and leaving the adhesive sheet on the adherend, and removing the peeling object composed of the unnecessary adhesive sheet, the inner unnecessary sheet, and the outer unnecessary sheet,
The sheet sticking method further comprising a bending step of bending the peeling object, and heating the unnecessary adhesive sheet at the same time as or before folding the peeling object in the bending step.

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