JP5827525B2 - Sheet sticking device and sheet sticking method - Google Patents

Description

  The present invention relates to a sheet sticking apparatus and sticking method for sticking an adhesive sheet such as a dicing sheet to an adherend such as a semiconductor wafer.

  In a semiconductor manufacturing process, when dicing a semiconductor wafer (hereinafter referred to as a wafer) on which a circuit surface is formed, a ring frame is provided to enclose the wafer, and a dicing sheet is attached to the wafer and the ring frame, whereby the wafer and Integration with a ring frame is performed.

  Conventionally, as a sheet sticking device for sticking an adhesive sheet made of a dicing sheet to an adherend made of a wafer and a ring frame, a raw sheet in which a belt-like sheet as a material for the adhesive sheet is temporarily attached to one surface of the belt-like release sheet Is disposed on the downstream side in the unwinding direction of the original fabric with respect to the cutting means, and is peeled off by folding the release sheet. There is known one provided with a peeling means for peeling an adhesive sheet from a sheet and a pressing means for pressing and sticking the adhesive sheet to an adherend (for example, see Patent Document 1).

  In this device, a die cutting roller having an endless cutting blade on the outer peripheral surface is provided as a cutting means, and the cutting blade of the die cutting roller is bitten into the adhesive sheet while the raw material is conveyed in the feeding direction. Yes. In this case, as the cutting blade bites in, a phenomenon occurs in which the adhesive layer of the adhesive sheet enters the inside of the release sheet. Since the inside of the release sheet is not subjected to a release treatment for preventing adhesion of the adhesive, as shown in FIG. 6, even if the release sheet is folded back by the release means 4, the adhesive layer that has entered the inside of the release sheet RL. The leading edge portion Asa of the adhesive sheet AS in the feeding direction is hardly peeled from the release sheet RL due to the influence of AD, and may cause a peeling failure of the adhesive sheet AS.

  By the way, the sheet sticking apparatus which conventionally made the cut | notch in a strip | belt-shaped sheet | seat with the die-cut roller which is a cutting means, conveying the original fabric in the anti-feeding direction which is a direction opposite to a feeding direction by patent document 2 is also known. . This is intended to reduce the size of the sheet sticking device, but the inventors of the present application have found that the following effects can also be obtained. That is, when the cut is formed while the original fabric is conveyed in the counter feed direction, the cut portion that matches the leading end of the adhesive sheet in the feed direction is formed at the end, and when the cutting blade of the die cut roller comes out from the cut portion, Scrapes off the adhesive layer that has entered the inside of the release sheet, so that the leading end of the adhesive sheet in the feeding direction is easily peeled off from the release sheet. However, since the adhesive layer that has entered the inside of the release sheet cannot be completely scraped off, it is not possible to reliably prevent the release failure of the adhesive sheet.

  In addition, in the thing of patent document 2, when a cutting | disconnection means is arrange | positioned in the vicinity of a peeling means for forming a notch | incision by a cutting means for size reduction of a sheet sticking apparatus, the arrangement | positioning part of a peeling means is included. The whole is conveyed in the anti-feeding direction, a cut is formed in the portion of the belt-like sheet once folded by the peeling means, and the adhesive sheet is formed in this portion. Here, the part of the belt-like sheet once folded by the peeling means will be folded again by the peeling means when transported in the anti-feeding direction, and the adhesive sheet formed in this part will be damaged or the peeling sheet will be repeatedly folded. In some cases, the material may be damaged and broken, and the original fabric may not be fed out.

JP 2006-73920 A JP 2010-40874 A

  This invention makes it the subject to provide the sheet sticking apparatus and the sheet sticking method which enabled it to prevent reliably the peeling defect of an adhesive sheet in view of the above point.

In order to solve the above-mentioned problem, the sheet sticking device of the present invention for sticking an adhesive sheet to an adherend is provided with a feeding means capable of feeding out a raw material in which a belt-like sheet is temporarily attached to one surface of a belt-like release sheet. A cutting means for forming an endless cut in the belt-like sheet, and forming the adhesive sheet inside the cut; and disposed downstream of the cutting means in the feeding direction of the original fabric, and from the release sheet comprising a peeling means for peeling the adhesive sheet, and a pressing means for affixing by pressing the adhesive sheet to the adherend, the feeding means is the raw in the opposite direction of the feeding direction and the feeding direction The cutting means is configured to be able to be conveyed in the counter-feeding direction, and the cutting means is configured to be able to form the notch in the original sheet conveyed in the counter-feeding direction, and the peeling sheet is used to remove the adhesive sheet. Before peeling the bets, characterized in that it comprises a floating-up means to float the feeding direction front end portion of the adhesive sheet from the release sheet.

  In the present invention, the lifting means includes a holding means for holding the leading end portion in the feeding direction of the adhesive sheet, the holding means holds the leading end portion in the feeding direction of the adhesive sheet, and the peeling off the leading end portion in the feeding direction. You may comprise so that it may float from a sheet | seat. In this case, it is desirable to provide the holding means on the cutting means.

  Further, when the cutting means includes a die-cut roller having an endless cutting blade on the outer peripheral surface, the lifting means is used when the cutting blade comes out from the cut portion that matches the leading end portion in the feeding direction of the adhesive sheet. You may comprise so that the peripheral speed of the said die cut roller may be made faster than the conveyance speed in the reverse feed direction of the said original fabric, and the front-end | tip part of the said delivery direction of the said adhesive sheet may float from the said peeling sheet.

  Further, the feeding means includes storage means capable of applying a predetermined tension to the original fabric between the cutting means and the peeling means, and the storage means allows the feeding direction of the original fabric to the peeling means and Transporting the original fabric in the feeding direction and the counter-feeding direction with respect to the cutting means without causing conveyance in the counter-feeding direction, and conveying the original fabric in the feeding direction and the counter-feeding direction with respect to the cutting means The material is configured to be capable of at least one of feeding in the feeding direction and the feeding direction of the original with respect to the peeling unit without causing the peeling, or counter-feeding of the original with respect to the cutting unit The conveyance in the direction and the feeding direction and the conveyance in the feeding direction and the counter feeding direction of the original fabric with respect to the peeling means can be performed at least partially overlapping each other in time. Configuration it is desirable.

Moreover, in order to solve the said subject, the sheet | seat sticking method of this invention which sticks an adhesive sheet to a to-be-adhered body is the process of extending | stretching the original fabric by which the strip | belt-shaped sheet was temporarily attached to one side of the strip | belt-shaped peeling sheet, A cutting step of forming an endless cut in the belt-like sheet and forming the adhesive sheet inside the cut, and the bonding from the release sheet while conveying the original fabric in the feeding direction after forming the cut. includes a peeling step of peeling the sheet, and a step of pasting by pressing the adhesive sheet to the adherend, the cutting process is to convey the raw counter-feeding direction which is opposite to the direction of the feeding direction However, before forming the notch in the belt-like sheet and peeling the adhesive sheet from the release sheet in the peeling step, the leading end of the adhesive sheet is lifted from the peeling sheet. Characterized in that it comprises the step of want.

  According to the present invention, the adhesive layer entering the inside of the release sheet can be scraped off at the cut portion matching the leading end portion in the feeding direction of the adhesive sheet by forming the cut while conveying the original fabric in the anti-feeding direction. it can. Therefore, the leading end portion in the feeding direction of the adhesive sheet can be lifted easily and reliably from the release sheet by the lifting means. As a result, it is possible to reliably prevent the peeling failure of the adhesive sheet at the peeling means.

The figure which shows typically the structure of the sheet sticking apparatus of embodiment of this invention. The perspective view of the die cut roller provided in the sheet sticking apparatus of embodiment. Explanatory drawing explaining the action | operation of the sheet sticking apparatus of embodiment. Sectional drawing of the principal part which shows the state which raised the front-end | tip part of the adhesive sheet from the peeling sheet. Sectional drawing of the principal part of other embodiment which shows the state which raised the front-end | tip part of the adhesive sheet from the peeling sheet. The figure which shows the generation | occurrence | production state of the peeling defect of the adhesive sheet in the peeling means in a conventional apparatus.

  Hereinafter, with reference to the drawings, the present invention is applied to a sheet sticking apparatus that attaches an adhesive sheet AS made of a dicing sheet to a wafer WF and a ring plate RF, which are adherends, and integrates the wafer WF and the ring frame RF. Embodiments will be described. In the present embodiment, reference is made to FIG. 1 when directions such as up, down, left, right, clockwise rotation direction, and counterclockwise rotation direction are shown without giving a reference figure.

  As shown in FIG. 1, the sheet sticking apparatus of the present embodiment is a material for the adhesive sheet AS on one surface of the transporting unit 1 that holds and transports the wafer WF and the ring frame RF and the strip-shaped release sheet RL. The feeding means 2 capable of feeding the original fabric RS temporarily attached with the belt-like sheet WS, the endless cut CU is formed in the belt-like sheet WS, the adhesive sheet AS is formed inside the cut CU, and the cut-out CU The cutting means 3 for forming the unnecessary sheet portion WSa on the outside and the cutting sheet 3 are arranged downstream of the cutting means 3 in the feed direction SD of the original RS, and the adhesive sheet AS is peeled from the release sheet RL by folding the release sheet RL. Peeling means 4 and pressing means 5 for pressing and adhering the adhesive sheet AS to the wafer WF and the ring plate RF are provided. The feeding means 2, the cutting means 3, the peeling means 4 and the pressing means 5 are installed on the apparatus frame 6.

  The transport means 1 is provided below the apparatus frame 6 at a position below the apparatus frame 6 and holds the wafer WF and the ring plate RF. The transport means 1 is provided below the table 11 and is capable of transporting the table 11 in the left-right direction via the slider 12. A linear motion motor LM as a device is provided.

  The feeding means 2 is held in a state where the original fabric RS is wound, and is arranged between the feeding shaft 21 that is rotationally driven by a rotation motor DM1 as a driving device, and between the feeding shaft 21 and the cutting means 3, and is driven. The first drive roller 22 that is rotationally driven by a rotation motor DM2 as a device, and is disposed downstream of the cutting means 3 in the feed direction SD of the original RS, and is rotationally driven by a rotation motor DM3 as a drive device. The second drive roller 23, the upper guide roller 24 and the lower guide roller 25 arranged between the second drive roller 23 and the peeling means 4, and the feed direction SD of the original fabric RS downstream of the peeling means 4 The third drive roller 26 that is rotationally driven by a rotation motor DM4 as a drive device, and is arranged downstream of the third drive roller 26 in the feed direction SD of the original fabric RS, and the rotation motor DM5 as a drive device Rotating drive A winding shaft 27, a second winding shaft 28 that is rotationally driven by a rotation motor DM6 as a driving device, and winds up an unnecessary sheet portion WSa peeled off from the release sheet RL by the lower guide roller 25; Pinch rollers 22a, 23a, and 26a that sandwich the original fabric RS or release sheet RL between the first to third drive rollers 22, 23, and 26 are provided. The feeding shaft 21 and the first and second drive rollers 22 and 23 are provided so as to be freely reversible.

  The feeding means 2 is further a storage means capable of applying a predetermined tension to the original fabric RS between the cutting means 3 and the peeling means 4, specifically between the second drive roller 23 and the upper guide roller 24. The dancer roller 29 is provided. The dancer roller 29 is energized by a direct acting motor as a driving device (not shown), and is provided so as to move up and down along a guide hole 29 a formed in the apparatus frame 6. Then, when a reverse rotation operation is performed in which the feeding shaft 21 and the first and second drive rollers 22 and 23 are rotated in the clockwise direction, that is, the reverse rotation operation is performed, the original fabric RS stored by the lowering of the dancer roller 29 is As it rises, it is conveyed in the counter feed direction RD with respect to the cutting means 3. At this time, conveyance of the raw fabric RS in the anti-feeding direction RD with respect to the peeling means 4 does not occur. In addition to the dancer roller 29, the storage means may be constituted by a plate spring, a winding spring, or a device that ejects gas. Moreover, the length of the raw fabric RS stored by the storage means is set to be twice or more the length of the adhesive sheet AS in the feeding direction SD.

  The cutting means 3 includes a die cut roller 31 that is rotationally driven by a rotation motor DM7 as a drive device, and a receiving roller 32 that sandwiches the original fabric RS between the die cut roller 31. An endless cutting blade 31a is provided on the outer peripheral surface of the die cut roller 31 as shown in FIG. Then, by rotating the die-cut roller 31 at a peripheral speed equal to the conveying speed at which the original RS is conveyed in the anti-feeding direction RD, an endless cut CU that matches the contour of the adhesive sheet AS is formed on the belt-like sheet WS. .

  The die-cut roller 31 is provided with holding means 31b composed of a plurality of suction holes for sucking and holding the leading end portion Asa (see FIG. 4) of the adhesive sheet AS. The rotation motor DM7, the die cut roller 31, and the holding means 31b constitute a lifting means.

  The peeling means 4 includes a sharp peeling plate 41. Then, the adhesive sheet AS is peeled from the release sheet RL by rapidly folding the release sheet RL at the tip of the release plate 41.

  The pressing means 5 includes a pressing roller 51 disposed at a position adjacent to the tip of the peeling plate 41. Then, the pressing roller 51 rolls on the wafer WF and the ring frame RF conveyed by the movement of the table 11, and presses and adheres the adhesive sheet AS to the wafer WF and the ring frame RF.

  Next, the operation of the sheet sticking device of this embodiment will be described. FIG. 1 shows a state before the adhesive sheet AS is attached to the wafer WF and the ring frame RF. The adhesive sheets AS of # 1 to # 5 are already formed on the belt-like sheet WS, and the adhesive sheet AS of # 1 is shown. Is conveyed to the arrangement part of the peeling means 4. Further, the table 11 stands by at the right standby position, and the die cut roller 31 is stopped at a position where the peripheral surface portion where the cutting blade 31 a does not exist faces the receiving roller 32 (hereinafter referred to as “passable position”). In the passable position, the belt-like sheet WS is not in contact with the die cut roller 31 or the cutting blade 31a.

  When the wafer WF and the ring frame RF are placed and held on the table 11 at the standby position by the transfer means (not shown), the table 11 moves to the left. When the sensor (not shown) detects that the table 11 has reached a predetermined position, the delivery shaft 21, the first to third drive rollers 22, 23, 26, the winding are performed while the dancer roller 29 is stopped downward. The take-up shaft 27 and the second take-up shaft 28 are rotated forward to convey the original fabric RS in the feeding direction SD. Then, as shown in FIG. 3A, the peeling means 4 peels the adhesive sheet AS # 1 from the peeling sheet RL, and the adhesive sheet AS is pressed against the wafer WF and the ring frame RF on the table 11 by the pressing means 5. And paste it. As a result, the wafer WF and the ring frame RF are integrated by the # 1 adhesive sheet AS to become an integrated object. Thereafter, the table 11 is moved to the pasting completion position shown in FIG. 3B, and after the integrated object is taken out by the transport robot 7 at that position, the table 11 is moved to the standby position.

  Here, the feeding means 2 further transports the original fabric RS in the feeding direction SD even after the application of the # 1 adhesive sheet AS is completed. Then, as shown in FIG. 3 (b), the leading end portion Asa of the # 2 adhesive sheet AS is peeled by a predetermined length at the leading end of the peeling means 4, and when it is detected by a sensor (not shown), the feeding shaft 21, The normal rotation of the first to third drive rollers 22, 23, 26, the winding shaft 27, and the second winding shaft 28 is stopped.

  Next, as shown in FIG. 3C, in the state where the rotation of the third driving roller 26, the winding shaft 27, and the second winding shaft 28 is stopped, the feeding shaft 21 and the first and second driving rollers. 22 and 23 are reversed, and the dancer roller 29 is raised, while the portion of the original fabric RS stored by the dancer roller 29 is conveyed in the anti-feeding direction RD, and the die cut roller 31 is moved in the anti-feeding direction RD of the original fabric RS. 1 turn in the counterclockwise direction at a peripheral speed equal to the transport speed. As a result, the cut CU is formed in the belt-like sheet WS, and the adhesive sheet AS of # 6 is formed.

  Thereafter, while the rotation of the third drive roller 26, the winding shaft 27, and the second winding shaft 28 is stopped, the die cutting roller 31 is stopped at the passable position and the first and second feeding shafts 21 are stopped. The drive rollers 22 and 23 are rotated forward to lower the dancer roller 29 to the position shown in FIG. 1, and the raw material RS having a predetermined length is stored again by the dancer roller 29. Thus, one sheet pasting operation is completed, and thereafter the same operation as described above is repeated.

  According to this embodiment, in order to form the cut CU while conveying the original fabric RS in the counter feed direction RD, the cut portion CUa (see FIG. 4) that matches the feed direction front end portion Asa of the adhesive sheet AS is formed last. The Then, when the cutting blade 31a of the die cut roller 31 comes out of the cut portion CUa, the cutting blade 31a moves so as to scrub the bottom of the cut portion CUa. Thereby, even if the adhesive layer AD enters the inside of the release sheet RL at the cut portion CUa, the cutting blade 31a scrapes the adhesive layer AD, and the release process inside the release sheet RL is not performed. It is possible to release the adhesion to the part, and to easily peel the front end portion Asa of the adhesive sheet AS in the transport direction from the release sheet RL. Furthermore, in this embodiment, as shown in FIG. 4, the holding means 31b provided on the die cut roller 31 rotates and moves in the direction (upward) away from the release sheet RL while holding the conveyance direction front end portion Asa of the adhesive sheet AS. By this, the conveyance direction front-end | tip part ASA of the adhesive sheet AS floats reliably from the peeling sheet RL. Therefore, it is possible to reliably prevent the peeling failure of the adhesive sheet AS in the peeling means 4 that has been a problem in the conventional apparatus.

  Moreover, since it comprised so that the part of original fabric RS stored in the dancer roller 29 might be conveyed in the anti-feeding direction RD, it can prevent that original fabric RS is conveyed in the anti-feeding direction RD by the arrangement | positioning part of the peeling means 4. . As a result, the portion of the belt-like sheet WS that is formed with the cut CU and becomes the adhesive sheet AS is a portion that has not been folded back once by the peeling means 4, so that the adhesive sheet AS is not damaged. Moreover, the malfunction that the peeling sheet RL is repeatedly folded by the peeling means 4 and the peeling sheet RL breaks can be prevented.

  As mentioned above, although embodiment of this invention was described with reference to drawings, this invention is not limited to this. For example, in the above embodiment, by providing the die cutting roller 31 with the holding unit 31b, the lifting unit that lifts the leading end portion Asa of the adhesive sheet AS from the release sheet RL is integrated with the cutting unit 3. However, it is possible to provide a lifting means separately from the cutting means 3. For example, holding means for holding the leading end portion Asa in the conveyance direction of the adhesive sheet AS on the upstream side or downstream side in the feeding direction SD of the original fabric RS with respect to the cutting means 3, and in a direction in which the holding means is separated from the release sheet RL. You may arrange | position the floating means which consists of a drive means to move. However, it is advantageous that the lifting means is integrated with the cutting means 3 as in the above embodiment because the structure can be simplified. The holding means 31b is not limited to the suction hole, and holds the front end portion Asa of the adhesive sheet AS in the conveying direction with an adhesive or an adhesive, or holds it with a driving device such as a chuck cylinder. Also good.

  Further, it is possible to configure the lifting means without providing the holding means 31b. That is, when the cutting blade 31a comes out of the cut portion CUa that coincides with the conveyance direction front end portion Asa of the adhesive sheet AS, the peripheral speed of the die cut roller 31 is higher than the conveyance speed of the original fabric RS in the anti-feeding direction RD. Speed control. According to this, as shown in FIG. 5, since the cutting blade 31a moves with a relative speed in the counter feed direction RD with respect to the conveyance direction front end portion Asa of the adhesive sheet AS, the conveyance direction front end portion Asa of the adhesive sheet AS. Can be lifted from the release sheet RL so as to be removed by the cutting blade 31a. Note that the speed control includes at least increasing the rotational speed of the die cut roller 31 and decreasing the transport speed of the raw fabric RS in the counter-feeding direction when the cutting blade 31a comes out of the cut portion CUa. It can be done by one side. Further, the die cut roller 31 may be provided with a holding means 31b and the speed control may be performed.

In the above-described embodiment, the adhesive sheet AS is stuck while the adherend including the wafer WF and the ring frame RF is being conveyed. However, the apparatus frame 6 is moved in the right direction by the driving device while the adherend is stopped. Alternatively, the movement of the adherend to the left and the movement of the device frame 6 to the right may be performed simultaneously.
Furthermore, an adsorption pad for adsorbing and holding the adhesive sheet peeled off by the peeling means and its moving means are provided, and the adhesive pad is attached by moving the suction pad to a position directly above the adherend by the moving means and pushing it down. You may affix and press on a body. In this case, the suction pad and its moving means constitute a pressing means.
In addition to the pressing roller 51, the pressing means may be configured to press and adhere the adhesive sheet to the adherend by blowing gas or by using a plate-like member or the like.

Further, in the above-described embodiment, the conveyance of the raw material RS in the feeding direction SD with respect to the cutting means 3 and the conveyance of the raw material RS in the feeding direction SD with respect to the peeling plate 41 are performed in a time-overlapping manner to form a belt-like shape. The operation of applying the adhesive sheet AS to the adherend without forming the notch CU in the sheet WS and the conveyance of the raw fabric RS to the peeling plate 41 in the feeding direction SD and the counter feeding direction RD are not caused. In this way, the feed RS is transported in the anti-feeding direction RD to the cutting means 3 to form the cut CU in the belt-like sheet WS, and the feed direction SD and the anti-feeding direction of the original RS with respect to the peeling plate 41. The raw material RS after the formation of the cut CU is transferred to the dancer roller 29 by a predetermined length by conveying the raw material RS to the cutting means 3 in the feeding direction SD without causing the conveying in the feeding direction RD. A combination of rotation control of the feeding shaft 21, the first drive roller 22 and the second drive roller 23 and rotation control of the third drive roller 26 and the take-up shaft 27, and the dancer roller 29. Due to the function, the conveyance of the original fabric RS to the cutting means 3 in the feeding direction SD and the counter feeding direction RD is prevented, and the conveyance of the original fabric RS to the peeling plate 41 in the feeding direction SD and the counter feeding direction RD is performed. The operation to be performed, the conveyance of the original RS to the cutting means 3 in the anti-feeding direction RD and the feeding direction SD, and the conveyance of the original RS to the peeling plate 41 in the feeding direction SD and the anti-feeding direction RD are temporally exceeded. It is also possible to perform the following operations showing the operation performed by wrapping.
That is, by feeding the third drive roller 26 and the take-up shaft 27 forward with the feed shaft 21, the first drive roller 22 and the second drive roller 23 being stopped, the feed direction of the original fabric RS with respect to the cutting means 3. It is possible to stick the adhesive sheet AS to the adherend by carrying the raw fabric RS in the feeding direction SD with respect to the peeling plate 41 without causing the conveyance in the SD and the counter feeding direction RD.
Further, the feed direction SD of the original fabric RS with respect to the cutting means 3 is achieved by reversing the third drive roller 26 and the take-up shaft 27 in a state where the feed shaft 21, the first drive roller 22 and the second drive roller 23 are stopped. And the conveyance to the anti-feeding direction RD of the original fabric RS with respect to the peeling plate 41 is performed so as not to cause the conveyance in the counter-feeding direction RD, and for example, the adhesive sheet AS that could not be peeled off by the peeling plate 41 again. In order to stick to the adherend, the adhesive sheet AS can be pulled back until it passes the tip of the peeling plate 41.
Further, the feed shaft 21, the first drive roller 22 and the second drive roller 23 are rotated in the reverse direction and the third drive roller 26 and the take-up shaft 27 are rotated in the normal direction, whereby the feed direction RD of the original fabric RS with respect to the cutting means 3 is reversed. And the conveyance in the feeding direction SD of the original fabric RS with respect to the peeling plate 41 are performed in a time-overlapping manner to form the cut CU in the belt-like sheet WS and the adhesive sheet AS to the adherend. It is also possible to perform pasting. Thereby, it can prevent that the sticking capability which sticks adhesive sheet AS per unit time falls.
Further, the feed shaft 21, the first drive roller 22 and the second drive roller 23 are reversed and the third drive roller 26 and the take-up shaft 27 are reversed, so that the raw material RS with respect to the cutting means 3 is moved in the counter feed direction RD. Can be peeled off with the peeling plate 41 while forming the cut CU into the belt-like sheet WS by temporally overlapping the conveyance of the original sheet RS with respect to the peeling plate 41 in the reverse feeding direction RD. It is also possible to pull back the adhesive sheet AS until it passes the tip of the release plate 41 in order to attach the adhesive sheet AS that has not been attached to the adherend again.
Further, the feed shaft 21, the first drive roller 22 and the second drive roller 23 are rotated in the forward direction, and the third drive roller 26 and the take-up shaft 27 are rotated in the reverse direction, whereby the feed RS is fed in the feed direction SD. The adhesive sheet AS that could not be peeled off by the peeling plate 41 is affixed to the adherend again by temporally overlapping the conveyance of the film and the conveyance of the raw material RS with respect to the peeling plate 41 in the anti-feeding direction RD. In order to do this, the adhesive sheet AS can be pulled back until it passes the tip of the peeling plate 41.
In addition, when conveying the raw fabric RS in the anti-feeding direction RD with respect to the peeling means 4, for example, the raw fabric RS is sandwiched between the upper guide roller 24 and can be driven by a driving device such as a rotation motor. It is desirable to add rollers. Moreover, regarding overlapping in time, it may be completely overlapped or partially overlapped.

Further, the shape of the cut CU may be a circle, a polygon, an ellipse, or a combination thereof.
Further, the cutting means is not limited to the above-described ones, and may be one that forms the cut CU by employing, for example, a Thomson blade having a flat plate provided with an endless cutting blade or a laser beam.
Furthermore, in the above embodiment, the die cut roller 31 is rotated once to form the adhesive sheet AS. However, depending on the number and size of the cutting blades 31 a provided on the die cut roller 31, half turn or one third. One rotation or less, such as rotation, may be one rotation or more, such as one rotation half, two rotations, or the like.

Further, the peeling means is not limited to the above-described one, and the adhesive sheet AS may be peeled from the release sheet RL by bending the release sheet RL with a guide plate or a roller.
Further, the second winding shaft 28 may be omitted, and the unnecessary sheet portion WSa may be wound around the winding shaft 27 together with the release sheet RL.

Further, the belt-like sheet WS or the adhesive sheet AS may be a single layer of the adhesive layer AD, or may be one in which the adhesive layer AD is laminated on a base sheet made of one or a plurality of layers.
Furthermore, the adherend is not limited to the wafer WF and the ring frame RF, and other adherends such as a wafer WF alone without the ring frame RF, a glass plate, a steel plate, a ceramic, a wooden plate, a semiconductor substrate, or a resin plate. The body can also be a target, and the wafer WF may be a silicone semiconductor wafer or a compound semiconductor wafer.
Further, the adherend may be an appropriate article (for example, a cardboard case or a resin container), and the adhesive sheet AS may be a label, the adherend is a wafer, and the adhesive sheet AS is a protective sheet, It may be a die attach film.
Furthermore, the adhesive sheet is not limited to the above, and other arbitrary sheets, films, tapes, and the like can be used for arbitrary uses and shapes.

  The drive device in the above embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single-axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed.

  WF ... wafer (adhered body), RF ... ring frame (adhered body), RS ... original fabric, RL ... release sheet, WS ... band-like sheet, AS ... adhesive sheet, Asa ... leading end in feeding direction, CU ... notch, DM7: Rotating motor (lifting means), 2 ... Feeding means, 29 ... Dancer roller (storage means), 3 ... Cutting means, 31 ... Die-cut roller (lifting means), 31a ... Cutting blade, 31b ... Holding means (floating) Raising means), 4 ... peeling means, 5 ... pressing means.

Claims (2)

In a sheet sticking device for sticking an adhesive sheet to an adherend,
A feeding means capable of feeding out the original fabric in which the belt-like sheet is temporarily attached to one surface of the belt-like release sheet;
Cutting means for forming an endless cut in the belt-like sheet, and forming the adhesive sheet inside the cut;
A peeling means that is arranged on the downstream side in the feed direction of the original fabric than the cutting means, and peels the adhesive sheet from the release sheet
And a pressing means for affixing by pressing the adhesive sheet to the adherend,
Said feeding means, said raw together with the conveying configured to enable the anti-feeding direction which is opposite to the direction of the feeding direction and the feeding direction, said cutting means, said the raw conveyed the counter-feeding direction It is configured to be able to form a notch,
A sheet sticking device, comprising: a lifting means for lifting a leading end portion of the adhesive sheet in a feeding direction from the peeling sheet before peeling the adhesive sheet from the peeling sheet by the peeling means. In the sheet sticking method for sticking the adhesive sheet to the adherend,
A step of feeding out the raw material in which the belt-like sheet is temporarily attached to one surface of the belt-like release sheet;
A cutting step of forming an endless cut in the belt-like sheet, and forming the adhesive sheet inside the cut;
A peeling step of peeling the adhesive sheet from the release sheet while conveying the original fabric in the feeding direction after forming the notch,
And a step of pasting by pressing the adhesive sheet to the adherend,
Wherein in the cutting step, the cut to form the raw fabric to the belt-like sheet while conveying the counter-feeding direction which is opposite to the direction of the feeding direction,
The sheet sticking method comprising a step of lifting a leading end portion of the adhesive sheet in the feeding direction from the peeling sheet before peeling the adhesive sheet from the release sheet in the peeling step.

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