JP4866312B2 - Sheet manufacturing apparatus and method for sticking - Google Patents

Description

  The present invention relates to a sticking sheet manufacturing apparatus and manufacturing method, and more particularly to a sticking sheet manufacturing apparatus and manufacturing method suitable for sticking to an adherend such as a semiconductor wafer.

  Conventionally, an adhesive sheet for die bonding is attached to a semiconductor wafer (hereinafter simply referred to as “wafer”) before dicing. When sticking a sheet for die bonding to a wafer, use a strip-shaped raw material in which a release sheet is temporarily attached to an adhesive sheet. After sticking the adhesive sheet to the wafer, the adhesive sheet and the release sheet are bonded together. A configuration is adopted in which the wafer outer peripheral side portion is cut to fit the size of the wafer and recovered as an unnecessary sheet (see, for example, Patent Document 1).

JP 2003-257898 A

  In the configuration of Patent Document 1, a cutting unit that cuts the adhesive sheet into a wafer shape is required, and also a sheet peeling unit that peels the release sheet positioned on the upper surface of the adhesive sheet after the cutting.

[Object of invention]
The present invention has been devised paying attention to such inconveniences, and the object thereof is not to require the above-described peeling means or cutting means when adhering to an adherend such as a wafer. An object of the present invention is to provide a sticking sheet manufacturing apparatus and manufacturing method.

In order to achieve the above object, the adhesive sheet manufacturing apparatus according to the present invention has a first release sheet temporarily attached to one surface of an adhesive sheet and a second release sheet temporarily attached to the other surface. A feeding means for feeding the strip-shaped original fabric, and an adhesive sheet portion surrounded by the cut by forming a closed loop-shaped cut from the first release sheet side to the second release sheet in the course of feeding the original fabric. An incision means formed as a sticking sheet, an outer adhesive sheet portion located outside the sticking sheet and a first release sheet portion located on the upper surface thereof are used as outer unnecessary sheets, A collecting means for collecting the first release sheet portion positioned on the sheet as an inner unnecessary sheet; and a connecting means for connecting the outer unnecessary sheet and the inner unnecessary sheet via a connecting member,
A configuration is adopted in which the inner unnecessary sheet is provided so that it can be recovered simultaneously when the outer unnecessary sheet is recovered.

  In the present invention, the connection means includes a connection adhesive tape supply means and a pressing means that holds the connection adhesive tape and affixes to the first release sheet so as to cross the cut. Has been.

  In addition, the connecting adhesive tape may be configured to be pasted so as to cross the cut portion at the leading end side in the raw fabric feeding direction.

Furthermore, the method for producing an adhesive sheet according to the present invention includes a belt-shaped original fabric in which a first release sheet is temporarily attached to one surface of an adhesive sheet and a second release sheet is temporarily attached to the other surface. And the process of
Forming a closed-loop cut that reaches from the first release sheet side to the second release sheet in the course of feeding out the original fabric, and forming an adhesive sheet portion surrounded by the cut as an adhesive sheet; and
The outer adhesive sheet portion positioned on the outer side of the sticking sheet and the first release sheet portion positioned on the upper surface thereof are used as outer unnecessary sheets, while the first release sheet portion on the sticking sheet is set on the inner side. A connecting step for connecting them together as an unnecessary sheet;
The method includes a recovery step of simultaneously recovering the outer unnecessary sheet and the inner unnecessary sheet.

According to the present invention, the raw material having a three-layer structure is used to connect the outer unnecessary sheet and the inner unnecessary sheet via the connecting means. The unnecessary inner sheets can be collected at the same time. Therefore, the release sheet does not remain on the sticking sheet, and it is only necessary to peel the second release sheet after sticking the sticking sheet to the adherend. There is no need to provide a cutting means or a peeling means in the device for attaching to the tape.
Furthermore, when winding an unnecessary outer sheet of a low-rigidity sheet such as a die bonding sheet, the outer unnecessary sheet is cut off by winding together with the first release sheet positioned on the upper surface, so that winding failure occurs. This can prevent anything.
Moreover, since it is the structure which affixes the adhesive tape for a connection to a 1st peeling sheet so that the said notch may be crossed, a connection with an outer unnecessary sheet | seat and an inner unnecessary sheet | seat can be performed easily. In particular, when the connecting adhesive tape is applied so as to cross the cut portion at the leading end side in the original feed direction, the consumption of the connecting tape can be suppressed.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 shows a schematic front view of a sticking sheet manufacturing apparatus according to this embodiment, and FIG. 2 shows an enlarged perspective view of a main part in the process of manufacturing a sticking sheet. In these drawings, the sticking sheet manufacturing apparatus 10 has a first release sheet A temporarily attached to one surface (upper surface in the drawing) of the adhesive sheet S and the first surface on the other surface (lower surface in the drawing). A feeding means 11 for feeding the strip-shaped original fabric R temporarily attached with the second release sheet B, and a closed-loop cut that reaches from the first release sheet A to the second release sheet B in the course of feeding the original fabric R; A cutting means 12 for forming an adhesive sheet portion surrounded by the cut C and forming an adhesive sheet S1, an outer adhesive sheet portion S2 located outside the adhesive sheet S1, and an upper surface side thereof. The outer release sheet portion A1 positioned as an outer unnecessary sheet D, and the recovery means 14 for recovering the inner release sheet portion A2 positioned on the sticking sheet S1 as an inner unnecessary sheet E; Connecting means 15 for connecting the sheet D and the inner unnecessary sheet E via the connecting adhesive tape T, and a winding means 16 for winding the second release sheet B and the sticking sheet S1. ing. Here, in the present embodiment, the adhesive sheet S is particularly composed of a heat-sensitive adhesive sheet that is bonded to the back surface of the wafer and used when bonding the diced chip to the lead frame. .

  The feeding means 11 includes a drive roller 20 disposed below a support roller 19 that supports the roll R and a pinch roller 21 that sandwiches the roll R between the drive roller 20 and the drive roller 20. The motor M1 is configured to rotate the driving roller 20.

  The cutting means 12 includes a die cut roller 23 disposed on the first release sheet A side, an anvil roller 24 disposed on the second release sheet B side, and rotated synchronously with the die cut roller 23 by a mechanism (not shown), The motor M2 that rotates the die cut roller 23 is included. The die cut roller 23 includes a roller main body 23A and a cutting blade 23B provided on the outer peripheral surface of the roller main body 23A. The cutting blade 23B is formed so as to have substantially the same shape as the wafer shape when unfolded on a flat surface. Therefore, the raw fabric R after passing through the cutting means 12 has a substantially circular cut C ( 2) is formed. As shown in FIG. 1, the roller body 23 </ b> A is formed with a cutting blade absence region 23 </ b> C so that the raw fabric R can be passed through. When positioned on the side, the forming interval of the sticking sheet S1 can be arbitrarily set by changing the feeding speed of the original fabric R. Moreover, the cutting blade 23B can also be made into the shape corresponding to V notch and orientation flat formed in the wafer.

  The collecting means 14 includes a peeling block 26, a collecting roller 27 disposed above the peeling block 26, and a motor M3 that rotates the collecting roller 27. The peeling block 26 is for peeling the outer unnecessary sheet D and the inner unnecessary sheet E from the second peeling sheet B and the sticking sheet S1, and in the present embodiment, the upper side orthogonal to the substantially horizontal direction. However, it is not particularly limited, and it may be constituted by a roller or a plate-like blade material.

  The connecting means 15 includes a supplying means 30 for connecting adhesive tape T and a pressing means 31 for attaching the connecting tape T to the cut C portion. The supply means 30 includes an original tape support roller 33 that supports the original tape TR with the connecting tape T temporarily attached to one surface of the strip-shaped release sheet RL, and a sheet winding of the strip-shaped release sheet RL. A roller 34 and a peel plate 36 which is disposed between the original tape support roller 33 and the sheet take-up roller 34 and peels the connecting adhesive tape T from the strip-like release sheet RL. On the other hand, the pressing means 31 includes a suction grid 38 having suction holes (not shown) formed on the lower surface side, and the suction grid 38 is provided so as to be able to advance and retreat along the vertical direction via a cylinder 39. Although not shown here, a cradle serving as a receiving surface for the pressing force by the suction grid 38 is provided on the second release sheet B side.

  The winding means 16 rotates the winding drive roller 40, the pinch roller 41 that sandwiches the second release sheet B and the sticking sheet S1 between the winding drive roller 40, and the winding drive roller 40. The motor M4, the winding roller 43, and a motor M5 that rotates the winding roller 43 with a predetermined torque are included.

  Next, the manufacturing method of the sticking sheet in this embodiment will be described.

  As shown in FIG. 1, a roll-shaped original fabric R is pulled out by a predetermined length and passed between the driving roller 20 and the pinch roller 21 and between the die-cut roller 23 and the anvil roller 24. Then, the first release sheet A and the adhesive sheet S are peeled from the second release sheet B, and the lead ends of the first release sheet A and the adhesive sheet S are fixed to the collection roller 27. On the other hand, the second release sheet B passes between the drive roller 40 and the pinch roller 41 and fixes its lead end to the take-up roller 43, thereby completing the initial setting. In this initial setting stage, the die cut roller 23 and the pinch rollers 21 and 41 are retracted above the anvil roller 24 and the drive rollers 20 and 40 by a driving means (not shown) so as to ensure a predetermined clearance. It has become.

  Next, driving of the apparatus is started via a control apparatus (not shown). That is, when the motor M1 of the feeding means 11 rotates, the original fabric R is pulled out, and the motors M3, M4, and M5 of the collecting means 14 and the winding means 16 are driven to start collecting and winding, respectively. . At the same time, the die cut roller 23 rotates via the motor M2 of the cutting means 12, and a cutting C having a depth reaching the second release sheet B from the first release sheet A side is formed by the cutting blade 23B. By this cut C, the adhesive sheet S is divided into an adhesive sheet S1 and an outer adhesive sheet portion S2. The first release sheet A is divided into an inner release sheet portion A2 and an outer release sheet portion A1.

  After the original fabric R passes through the cutting means 12, the connecting adhesive tape T is applied to the first release sheet A at the portion where the cut C is formed. That is, the connecting adhesive tape T is supplied one by one from the supply means 30 to the suction grid 38 so as to cross the notch C on the leading end side in the original feed direction, that is, the outer release sheet portion A1 and the inner release sheet portion A2 Affixed to straddle (see FIG. 2). The attachment of the connecting adhesive tape T is adjusted in timing when a sensor (not shown) detects that the leading end side of the cut C in the original feed direction has reached a predetermined position.

  The raw fabric R that has passed through the lower region of the connecting means 15 is such that the outer unnecessary sheet D and the inner unnecessary sheet E are peeled upward by the peeling block 26, and on the second release sheet B, there is no adhesive. Only the sheet S <b> 1 is left, and the second release sheet B from which the sticking sheet S <b> 1 is left is sequentially wound around the winding roller 43.

  Therefore, according to such an embodiment, the product wound in a roll shape by the winding means 16 is loaded into, for example, a separate sheet sticking device, and the sticking sheet S1 is heated together with the second release sheet B. And bonded to the back surface of the wafer. Thereafter, the second release sheet B is peeled off from the sticking sheet S1 to complete the sticking. In this way, there is no need to provide a cutting means for cutting in accordance with the wafer shape and a peeling means for peeling the release sheet on the sticking sheet S1 in the sheet sticking apparatus.

As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this.
In other words, the present invention has been illustrated and described mainly with respect to specific embodiments, but without departing from the scope of the technical idea and object of the present invention, the shape, position, or With respect to the arrangement and the like, those skilled in the art can make various changes as necessary.

  For example, in the above-described embodiment, a case where a heat-sensitive adhesive sheet is used as the adhesive sheet S has been described. However, the present invention is not limited to this, and a pressure-sensitive adhesive sheet or energy ray curing is used. A mold adhesive sheet or the like can also be used.

  Further, the planar shape of the sticking sheet S1 is not limited to a circle, and various shapes can be adopted according to the planar shape of the adherend, and if a die-cut roller 23 that forms a closed loop according to this shape is used. Good. Furthermore, it may replace with the die-cut roller 23 of the cutting means 12, and may use the press type | mold with which the cutting blade was formed in the plane.

  Further, the connecting member can be a pressure-sensitive adhesive tape or a heat-sensitive adhesive tape as the connecting tape T. When using a heat-sensitive adhesive tape, the suction grid 38 is heated. Means may be provided.

  In addition, the connecting member may be configured to be affixed not only to the leading end side in the feed direction of the raw fabric R but also to a plurality of locations, or instead of the single wafer type shown in the present embodiment, a continuous strip-shaped connecting tape It is good also as a structure which sticks continuously along the delivery direction of the 1st peeling sheet A. FIG.

  Furthermore, as an adhesive sheet, an original fabric having an adhesive layer on both surfaces of a substrate can be used.

  In addition, a sheet sticking device having a wafer or the like as an adherend can be interposed between the winding means 16 and the collection means 14. In this case, the winding means 16 performs the second peeling. Only the sheet B is taken up.

The schematic front view of the sheet production apparatus for sticking concerning this embodiment. The principal part expansion perspective view which shows the process of manufacturing the said sheet | seat for sticking.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Sticking sheet manufacturing apparatus 11 Feeding means 12 Cutting means 14 Collecting means 15 Connection means 30 Supply means 31 Pressing means A 1st release sheet A1 Outer release sheet part A2 Inner release sheet part B 2nd release sheet C Notch D Outer unnecessary sheet E Inner unnecessary sheet R Original fabric S Adhesive sheet S1 Adhesive sheet S2 Outer adhesive sheet part T Connecting adhesive tape (connecting member)

Claims (4)

A feeding means for feeding out a belt-like original fabric in which the first release sheet is temporarily attached to one surface of the adhesive sheet and the second release sheet is temporarily attached to the other surface, and a process of delivering the original fabric A cutting means for forming an adhesive sheet portion surrounded by the cut as an adhesive sheet, and an outer side of the adhesive sheet, and forming a closed loop notch that reaches from the first release sheet side to the second release sheet The outer adhesive sheet portion positioned on the upper surface and the first release sheet portion positioned on the upper surface thereof are used as outer unnecessary sheets, while the first release sheet portion positioned on the sticking sheet is recovered as an inner unnecessary sheet. Collecting means for connecting, and a connecting means for connecting the outer unnecessary sheet and the inner unnecessary sheet via a connecting member,
The sticking sheet manufacturing apparatus, wherein the inner unnecessary sheet can be simultaneously recovered when the outer unnecessary sheet is recovered.   The connection means includes supply means for supplying an adhesive tape for connection, and pressing means for holding the connection adhesive tape and sticking it to the first release sheet so as to cross the cut. Item 1. The sheet manufacturing apparatus for sticking according to Item 1.   The sticking sheet manufacturing apparatus according to claim 2, wherein the connecting adhesive tape is stuck so as to cross a cut portion at a leading end side in a raw material feeding direction. A step of feeding a strip-shaped raw material in which the first release sheet is temporarily attached to one surface of the adhesive sheet and the second release sheet is temporarily attached to the other surface;
Forming a closed-loop cut that reaches from the first release sheet side to the second release sheet in the course of feeding out the original fabric, and forming an adhesive sheet portion surrounded by the cut as an adhesive sheet; and
The outer adhesive sheet portion positioned on the outer side of the sticking sheet and the first release sheet portion positioned on the upper surface thereof are used as outer unnecessary sheets, while the first release sheet portion on the sticking sheet is set on the inner side. A connecting step for connecting them together as an unnecessary sheet;
A method for manufacturing a sticking sheet, comprising: a collecting step of simultaneously collecting the outer unnecessary sheet and the inner unnecessary sheet.

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