JP5234755B2 - Sheet sticking device and sticking method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To stably peel an unnecessary sheet positioned outside a cut from a release sheet. <P>SOLUTION: A sheet sticking device 10 includes a support means 11 for supporting a rolled material R having an adhesive sheet S temporarily bonded to one surface of a belt-like first release sheet RL1, a driving means 12 for applying paying-out force to the rolled material R, a cutting means 14 for forming a cut C in a closed-loop shape in the adhesive sheet S in a process of paying out the rolled material R, and forming a sheet S1 for sticking inside the cut C, a peel plate 16 which peels an unnecessary sheet positioned outside the cut C from the release sheet, and a sticking means 18 for pressing the sheet S1 for sticking against a wafer W to stick it. The unnecessary sheet S2 is cooled by the cooling means 17 before being peeled by the peel plate 16. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

The present invention relates to a sheet over preparative sticking apparatus and a sticking method, and more particularly, in raw feed-out course, relates to sheet over preparative sticking apparatus and a sticking method for separating the unnecessary sheet from the release sheet.

  2. Description of the Related Art Semiconductor wafers (hereinafter simply referred to as “wafers”) are bonded to a protective sheet on the front side and an adhesive sheet such as a die bonding sheet on the back side. When producing this adhesive sheet, after using the original fabric in which the adhesive sheet is temporarily attached to one side of the strip-shaped release sheet, after forming the adhesive sheet on the adhesive sheet by a closed loop cut corresponding to the wafer outer shape, An unnecessary sheet outside the cut is peeled from the release sheet (see Patent Document 1).

JP 2006-352054 A

  However, in Patent Document 1, when the adhesive sheet is heat-sensitive adhesive, the adhesive sheet may increase the adhesive force even at room temperature heat. In such a case, as indicated by a two-dot chain line in FIG. 5, the unnecessary sheet S <b> 2 may be softened and extended at the peeling position from the peeling sheet RL. If this state continues, the extended unnecessary sheet S2 adheres to an unintended part of the apparatus, and the unnecessary sheet S2 is cut off, resulting in inconvenience that the unnecessary sheet S2 cannot be continuously peeled off. .

[Object of invention]
The present invention has been proposed in view of such disadvantages, that the aim is to provide a sheet over preparative sticking apparatus and a sticking method capable of peeling continuously unnecessary sheet stably It is in.

In order to achieve the above object , the present invention provides a support means for supporting an original fabric in which an adhesive sheet is temporarily attached to one surface of a strip-shaped release sheet, a driving means for applying a repetitive output to the original fabric, Forming a closed-loop cut in the adhesive sheet during the process of unwinding the original fabric, the adhesive sheet portion located inside the cut is used as the adhesive sheet, and the adhesive sheet portion located continuously outside the multiple cuts is unnecessary in the sheet sticking apparatus, comprising: a cutting means, a peeling means for peeling a continuous pre Symbol unnecessary sheet from the release sheet, and a sticking means for sticking by pressing the sticking sheet to a predetermined adherend to There ,
The peeling means is provided with a cooling means for cooling the adhesive sheet before the unnecessary sheet is peeled off ,
The drive means adopts a configuration in which an unnecessary sheet is peeled off and the sticking sheet left on the release sheet is fed out so as to face the adherend .

  In the present invention, the cooling means may include a blowing means for blowing cold air.

  Moreover, the structure that the said cooling means contains the cooling roller by which an original fabric is wound is preferably employ | adopted.

  Furthermore, it is preferable that the peeling means includes a peel plate, and the peel plate is configured to cool the adhesive sheet so as to constitute the cooling means.

In addition, the sheet sticking method of the present invention is a process in which the adhesive sheet is temporarily attached to one surface of the strip-shaped release sheet, and a closed loop-shaped cut is formed in the adhesive sheet so as to be positioned inside the cut. The adhesive sheet portion to be a sheet for sticking, the adhesive sheet portion that is continuously located outside the plurality of cuts, and an unnecessary sheet ,
Cooling the adhesive sheet;
A step of removing the unnecessary sheet continuously from the raw,
Extending the sheet for sticking left on the release sheet onto a predetermined adherend, and disposing the sheet opposite to the adherend;
Performing the step of attaching presses the sticking sheet to the adherend, it adopts a method called.

  According to the present invention, since the adhesive sheet before peeling is cooled, even if a heat-sensitive adhesive sheet is used, it is possible to prevent the adhesive force of an unnecessary sheet before peeling from being increased. It can be easily peeled off, and it is possible to prevent the inconvenience that the unnecessary sheet is stretched or cut as in the past, making it impossible to peel off, and the peeling of the unnecessary sheet can be continued stably. Is possible.

  In addition, when cooling is performed by blowing cool air, the raw material can be easily cooled over a wide range.

  Further, when the adhesive sheet can be cooled with a roller or a peel plate, it is only necessary to replace the components of the existing apparatus, and cooling can be easily performed without employing a large-scale apparatus configuration.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 shows a schematic front view of a sheet sticking apparatus according to the embodiment, and FIG. 2 shows a perspective view of a main part when the sheet sticking apparatus is viewed from below. In these drawings, the sheet sticking apparatus 10 includes a supporting means 11 for supporting an original fabric R in which a first release sheet RL1 and a second release sheet RL2 are temporarily attached to both surfaces of a belt-like adhesive sheet S, and the original A driving means 12 for applying a feeding force to the anti-R, and in the process of feeding the raw fabric R, a closed loop-shaped cut C is formed from the second release sheet RL2 side, and an adhesive sheet S portion surrounded by the cut C is pasted The notch 14 formed as the sheet S1 and the adhesive sheet S located outside the notch C are used as the unnecessary sheet S2, and the unnecessary sheet S2 is peeled from the first release sheet RL1 together with the second release sheet RL2. A peeling plate 16 as a peeling means, a cooling means 17 provided around the peeling plate 16, and the sticking sheet S1 are pressed against a wafer W as an adherend. Is constituted by a sticking means 18 for sticking Te. Here, in the present embodiment, the adhesive sheet S is composed of a heat-sensitive adhesive sheet that is used when bonding the dicing chip to the lead frame by bonding to the back surface of the wafer W.

  The support means 11 includes a support shaft 19 that is rotatably supported with respect to a frame (not shown), and an original fabric R wound in a roll shape is supported on the support shaft 19.

  The drive means 12 is provided on the downstream side of the support means 11 and the peel plate 16 in the feeding direction. Each drive unit 12 includes a drive roller 21 that is rotatably provided via a motor M1 and a pinch roller 22 that sandwiches the original fabric R between the drive roller 21 and the drive roller 21, respectively. The lower drive unit 12 in FIG. 1 is provided with a winding shaft 24 that winds the unnecessary sheet S2 and the second release sheet RL2 with a predetermined torque by the motor M2.

  The cutting means 14 includes a die cut roller 26 disposed on the second release sheet RL2 side, an anvil roller 27 disposed on the first release sheet RL1 side, and rotated synchronously with the die cut roller 26 by a mechanism (not shown), The motor M3 that rotates the die cut roller 26 is included. The die cut roller 26 includes a roller body 26A and a cutting blade 26B provided on the outer peripheral surface of the roller body 26A. The cutting blade 26B is formed so as to have substantially the same shape as the shape of the wafer W when deployed on a flat surface. Therefore, the cutting edge 26B has a substantially circular cut C in the original fabric R after passing through the cutting means 14. (See FIG. 2) is formed. As shown in FIG. 1, the roller body 26 </ b> A is formed with a cutting blade absence region 26 </ b> C so that the raw fabric R can be passed through. The cutting blade absence region 26 </ b> C corresponds to the anvil roller 27. When positioned on the side, the forming interval of the sticking sheet S1 can be arbitrarily set by changing the feeding speed of the original fabric R. In addition, the cutting blade 26B may have a shape corresponding to a V notch or an orientation flat formed on the wafer W.

  The cooling means 17 includes a shield 30 that surrounds the peel plate 16 and a blower 31 that blows cool air into the shield 30. As a result, the adhesive sheet S before being peeled off by the peel plate 16 is cooled, and the adhesive force thereof is reduced so that the unnecessary sheet S2 can be easily peeled off from the first release sheet RL1. The shield 30 is not always necessary. The cooling means 17 also includes a cooling roller 33 that is wound around the original fabric R on the peel plate 16. As shown in FIG. 3, the cooling roller 33 is configured so that the refrigerant can circulate through the rotation center shaft 33 </ b> A, and is cooled when the raw fabric R passes through the cooling roller 33. As shown in FIG. 2, a passage 35 through which the refrigerant can circulate may be formed in the peel plate 16, so that the raw fabric R passing through the peel plate 16 can be cooled. . Here, the said refrigerant | coolant is not specifically limited, Cold water, CFC, liquid nitrogen, etc. can be illustrated.

  The affixing means 18 is supported by a table 37 for holding the wafer W, a linear motion motor 38 for supporting the table 37 so as to be movable up and down, and a frame F, and is rotated by the motor M4 to roll on the table 37. A movable press roller 40, a pinch roller 41 that sandwiches the first release sheet RL1 between the press roller 40, and a winding that is configured to rotate synchronously with the press roller 40 and winds up the first release sheet RL1. And a roller 42. The table 37 includes a heater (not shown). The frame F can be moved in the left-right direction in FIG. 1 via a slider (not shown). By this movement, the press roller 40 rolls to press the adhesive sheet S against the wafer W.

  Next, the sticking method of the sticking sheet in this embodiment will be described.

  First, the original fabric R is pulled out by a predetermined length, passed as shown in FIG. 1, the second release sheet RL2 and the adhesive sheet S are fixed to the take-up shaft 24, and the first release sheet RL1 is Fix to the winding roller 42. Further, cool air is introduced from the blower 31 to the shield 30 to set the inside of the shield 30 to be lower than the normal temperature, and the coolant is circulated through the rotation center shaft 33A and the passage 35 so that the cooling roller 33 and the peel plate 16 are disposed. Cool down to complete the initial setup.

  When the wafer W is placed on the table 37 in this state, the original fabric R is pulled out through the rotation of the driving roller 21 and the movement of the frame F in the right direction in FIG. 1, and at the same time, the motor M3 is pulled out. The die-cutting roller 26 rotates through the cutting blade 26B, and a cut C having a depth reaching the first release sheet RL1 from the second release sheet RL2 side is formed by the cutting blade 26B. By this cut C, the adhesive sheet S is divided into a sticking sheet S 1 inside the cut C and an unnecessary sheet S 2 outside the cut C.

  After the cut C is formed, the original fabric R is guided into the shield 30, and the second release sheet RL <b> 2 and the unnecessary sheet S <b> 2 are folded and peeled from the first release sheet RL <b> 1 by the peel plate 16. Prior to this peeling, the adhesive sheet S is cooled and the unnecessary sheet S2 is easily peeled off from the peeling sheet RL1 by the cold air blown from the blowing means 31 or the original fabric R coming into contact with the cooling roller 33 and the peel plate 16. Is done. Thereafter, the second release sheet RL2 and the unnecessary sheet S2 attached to the second release sheet RL2 are wound around the winding shaft 24 and collected.

After the second release sheet RL2 and the unnecessary sheet S2 are peeled off, the first release sheet RL1 in which the sticking sheet S1 is left is drawn out on the wafer W and a sensor (not shown) indicates that it has reached a predetermined position. When detected, the feeding is stopped. Then, the table 37 rises via the linear motor 38, and the wafer W comes into contact with the sticking sheet S1 and is overheated. Thereafter, the frame F is moved to the left from the state shown in FIG. 1, so that the press roller 40 rolls and presses the sticking sheet S <b> 1 against the wafer W, and the first release sheet from the sticking sheet S <b> 1. RL1 is peeled off, and the adhesive sheet S1 and the wafer W are bonded. Further, along with the rolling of the press roller 12, the take-up roller 43 takes up the first release sheet RL1. After pasting the pasting sheet S1, the table 37 is lowered, and the original fabric R is pulled out while the cut C is formed through the rotation of the driving roller 21 and the movement of the frame F in the right direction in FIG. Sheet S1 is fed out.
Thereafter, the sticking sheet S1 can be stuck by the same operation.

  Therefore, according to such embodiment, before the unnecessary sheet | seat S2 peels with the peel plate 16, the adhesive sheet S can be cooled and adhesive force can be reduced. As a result, the unnecessary sheet S2 is easily peeled off from the first release sheet RL1, and it is possible to avoid the unnecessary sheet S2 from being extended or cut at the front end side of the peel plate 16, and the unnecessary sheet S2 can be continuously peeled off. It can be performed stably.

As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this.
In other words, the present invention has been illustrated and described mainly with respect to specific embodiments, but without departing from the scope of the technical idea and object of the present invention, the shape, position, or With respect to the arrangement and the like, those skilled in the art can make various changes as necessary.
Therefore, the description limited to the shape disclosed above is an example for easy understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded one part or all part is included in this invention.

  For example, the present invention may be applied to a sheet manufacturing apparatus 50 as shown in FIG. In the apparatus 50, the first release sheet RL1 on which the sticking sheet S1 is left after passing through the peel plate 16 is passed through the driving roller 51 and the pinch roller 52, and then wound around the winding roller 53 driven by the motor M5. I'm taking it. Thereby, the first release sheet RL1 temporarily attached with the sticking sheet S1 can be produced as a product wound in a roll shape.

  Further, the cooling means 17 can be variously modified in the configuration as long as the unnecessary sheet S2 can be cooled. For example, at least one of the air blowing means 31, the cooling roller 33, and the coolable peel plate 16 can be used. Any configuration is sufficient.

  Further, the cooling method of the cooling roller 33 and the peel plate 16 may be cooling by a Peltier element other than the circulation of the refrigerant.

  Further, the planar shape of the sticking sheet S1 is not limited to a circular shape, and various shapes can be adopted according to the planar shape of the adherend, and a die cut roller 26 corresponding to this can be used. Furthermore, it may replace with the die-cut roller 26 of the cutting means 14, and may use the press type | mold with which the cutting blade was formed in the plane.

  Furthermore, although the raw fabric R using 2nd peeling sheet RL2 was illustrated in the said embodiment, 2nd peeling sheet RL2 does not need to be. In this case, only the adhesive sheet S may be fixed to the winding shaft 24 at the time of initial setting.

The schematic front view of the sheet sticking apparatus which concerns on embodiment. The principal part schematic perspective view which looked at FIG. 1 from the bottom. Sectional drawing of a cooling roller. The schematic front view of the sheet manufacturing apparatus which concerns on a modification. Explanatory drawing of the inconvenience of a conventional structure.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Sheet sticking apparatus 11 Support means 12 Drive means 14 Cutting means 16 Peel plate (peeling means)
DESCRIPTION OF SYMBOLS 17 Cooling means 18 Sticking means 31 Blowing means 33 Cooling roller 50 Sheet manufacturing apparatus C Notch RL1 1st peeling sheet RL2 2nd peeling sheet S Adhesive sheet S1 Sticking sheet S2 Unnecessary sheet R Original fabric W Semiconductor wafer (Substrate) )

Claims (5)

A support means for supporting the original fabric having an adhesive sheet temporarily attached to one surface of the strip-shaped release sheet, a driving means for applying a feed force to the original fabric, and a closed loop shape on the adhesive sheet in the course of feeding the original fabric cut to the form and sticking sheet adhesive sheet portion positioned on the inner side of the cut the, and cutting means for unnecessary sheet adhesive sheet portion positioned consecutively on the outside of a plurality of cuts, before Symbol unnecessary for a sheet sticking device comprising a peeling means for peeling a continuous sheet from the release sheet, and a sticking means for sticking by pressing the sticking sheet to a predetermined adherend,
The peeling means is provided with a cooling means for cooling the adhesive sheet before the unnecessary sheet is peeled off ,
The driving means feeds out the sticking sheet left on the peeling sheet so that the unnecessary sheet is peeled off so as to face the adherend . It said cooling means, the sheet sticking apparatus according to claim 1, characterized in that it comprises a blowing means for blowing cold air. It said cooling means, the sheet sticking apparatus according to claim 1 or 2 wherein, characterized in that it comprises a cooling roller that raw is reeved. The sheet sticking device according to claim 1, 2 or 3 , wherein the peeling means includes a peel plate, and the peel plate is provided so that the adhesive sheet can be cooled. In the process of drawing out the original fabric on which the adhesive sheet is temporarily attached to one surface of the strip-shaped release sheet, the adhesive sheet portion located inside the notch by forming a closed loop-shaped cut in the adhesive sheet is used as the adhesive sheet, A step of making the adhesive sheet portion located continuously outside the plurality of cuts an unnecessary sheet ;
Cooling the adhesive sheet;
A step of removing the unnecessary sheet continuously from the raw,
Extending the sheet for sticking left on the release sheet onto a predetermined adherend, and disposing the sheet opposite to the adherend;
Sheet sticking method characterized by performing the step of attaching presses the sticking sheet to the adherend.

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