KR101317731B1 - Transport device for plate-shaped objects - Google Patents

Abstract

This invention provides the plate-shaped conveyance apparatus which can suppress the contamination of a plate-shaped body. Blowing support means 2 for supplying clean air toward the lower surface of the plate body 1 to support the plate body 1 in a non-contact state, and an end portion in the horizontal width direction at the lower surface of the plate body 1. Thrust force imparting means (3) for driving the plurality of rotary rollers (10) in contact with each other by rotating means by the drive means (11) to impart the propulsion force in the conveying direction to the plate-shaped body (1), and the horizontal width direction. The support body 18 which rotatably supports the some rotation roller 10 so that the some rotation roller 10 may be located in the inside of the inside, and communicates the inner side and the outer side of the support body 18 in the horizontal width direction ( In the same height as the lower surface of the plate-shaped object 1 conveyed, the air which flowed and flowed along the lower surface of the plate-shaped object 1 conveyed in the horizontal width direction between several rotation rollers 10, and is conveyed at the same time When flowing through from the inside to the outside of the horizontal width direction of the support body 18 Forms an introduction portion (導入 部) (23).

Description

Plate-shaped conveying device {TRANSPORT DEVICE FOR PLATE-SHAPED OBJECTS}

The present invention provides a blowing support means for supplying clean air toward a lower surface of a plate-shaped body to support the plate-shaped body in a non-contact state, and a transverse width direction orthogonal to the conveying direction at the lower surface of the plate-shaped body. With respect to the plate-shaped body which arrange | positions in the said conveyance direction the some rotation roller which contacts and supports the edge part of this, and rotates the said some rotation roller by a drive means, and is supported by the said blowing type support means. A support for rotatably supporting the plurality of rotating rollers so that the plurality of rotating rollers are positioned inside the propulsion force applying means for imparting the driving force in the conveying direction and the blowing support means in the horizontal width direction. It is related with the plate-shaped object conveying apparatus in which is provided.

Such a plate-shaped conveying apparatus supports a plate-shaped object in a non-contact state by a blow-type support means, contacts and supports a plate-shaped body by a propulsion force provision means, and makes a propulsion force in a conveyance direction with respect to a plate-shaped object by this propulsion force provision means. By providing, a plate-shaped object is conveyed along a conveyance direction. That is, for example, when conveying the glass substrate for liquid crystals as a plate-shaped object, the part to be commercialized in the glass substrate is supported by a blowing support means in a non-contact state, and the part cut | disconnected when making into a glass substrate is produced. It is comprised so that a propulsion force may be provided, without contact-supporting the part which it is not preferable to perform contact support in a conveyed object so that it may contact-support by a propulsion force provision means and provide a propulsion force.

And, conventionally, the driving force imparting means is provided by arranging a plurality of rotating rollers in contact with the end portion of the transverse width direction on the lower surface of the plate-like body in the conveying direction, and rotationally drives the plurality of rotating rollers by the driving means. It is comprised so that the propulsion force in a conveyance direction may be given with respect to the plate-shaped object supported by the ventilation type support means, The support body which supports a plurality of rotating rollers has several inside inside which the ventilation type support means in a horizontal width direction exists. It was formed so that a rotating roller could be rotatably supported, and this support body was located at the same height as the lower surface of the plate-shaped object conveyed (for example, refer patent document 1).

Japanese Laid-Open Patent Publication No. 2005-29360

Air supplied to the lower surface of the plate-shaped body by the blowing support means flows along the lower surface of the plate-shaped body, and a part thereof flows along the lower surface of the plate-shaped body in the horizontal width direction. And since a support body is provided in the same height as the lower surface of the plate-shaped object conveyed, the air which flowed along the horizontal width direction on the lower surface of the plate-shaped object collides with a support body, and is supported by the support body from between the rotating rollers arranged in the conveyance direction. It is rolled up on the plate through the gap with the plate. In this manner, the air is dried on the plate-like body, and the dust generated by the rotary roller or the like is also dried up, and the dried-up dust adheres to the upper surface of the plate-like body, which may contaminate the plate-like body.

This invention is made | formed in order to solve the above problems, The objective is to provide the plate-shaped conveyance apparatus which can suppress the contamination of a plate-shaped object.

The plate-shaped body conveying apparatus which concerns on this invention is a ventilation support means which supplies clean air toward the lower surface of a plate-shaped object, and supports a plate-shaped object in a non-contact state, and the horizontal width direction orthogonal to the conveyance direction in the lower surface of a plate-shaped object. A plurality of rotary rollers arranged in contact with the end in the conveying direction, and the plurality of rotary rollers are rotated by a driving means to drive the plate-shaped body supported by the blowing support means in the conveying direction. As a propulsion force imparting means for imparting a propulsion force, and a support for rotatably supporting the plurality of rotation rollers so that the plurality of rotation rollers are located inside the ventilation support means in the horizontal width direction. ,

The plate-shaped which conveys the air which flowed in the said horizontal width direction along the lower surface of the plate-shaped object conveyed by communicating the inner side of the said horizontal support direction with the outer side of the opposite side, and being conveyed between the said several rotation rollers. At the same height as the lower surface of the sieve, an introduction portion is formed so as to flow through from the inner side in the horizontal width direction of the support to the outer side.

That is, the air which flowed along the lower surface of the plate-shaped object conveyed at the same height as the lower surface of the plate-shaped object conveyed while communicating inside and outer side of the horizontal direction of a support body between several rotation rollers, and flowed in the horizontal width direction. Since the introduction part which flows into the outer side from the inside of the horizontal width direction of a support body is formed, the air which flowed along the lower surface of the plate-shaped body in the horizontal width direction can flow from the inside of a support body to the outer side.

And the plate-shaped object is made to flow in the transverse direction of the support body by introducing the air which flowed along the lower surface of the plate-shaped body inside the horizontal width direction of a support body from the introduction part located downstream of the flow, and flowing it outward in the horizontal width direction of a support body. The air which flowed along the widthwise direction to the edge part of the lower surface collides with a support body, and it can suppress that air rolls up from the clearance gap between a support body and a plate-shaped object. Therefore, it is possible to suppress that air is dried up and dust is rolled up on the plate body to contaminate the plate body. Thus, it came to be able to provide the plate-shaped conveyance apparatus which can suppress the contamination of a plate-shaped object.

In the Example of the plate-shaped object conveying apparatus which concerns on this invention, in a 1st characteristic structure, of the plate-shaped object located in the horizontal side of the installation space which installs the said blowing type support means and the said propulsion force provision means, and the upper side of the installation space. A cover body covering the transverse side of the conveying path is provided so as to be located outside the horizontal width direction from the support, and the blowing support means sucks air below the blowing support means, Is configured to blow out clean air toward the upper side, and communicates the inside and the outside of the support in the transverse direction so that air flows inward from the outside of the support in the transverse direction from below the inlet. A part is formed, and a space above the blowable support means and a ball below the blowable support means. An inner flow passage communicating with the inner side in the horizontal width direction of the support is formed by a space formed between the support and the blowable support means, and includes the introduction portion and the lead portion, It is preferable that the outer side flow path which communicates an upper space and the said inner side flow path to the outer side of the width direction of the said support body is formed by the space formed between the said support body and the said cover body.

That is, the blowing support means is configured to suck air from the bottom of the blowing support means and blow it toward the upper side of the blowing support means. The air introduced from the inlet portion flows outward from the lead-out portion to the inner passage after flowing through the outer passage, and flows into the space below the blowing support means together with the air flowing through the inner passage. That is, for example, in the case of being drawn out in the transverse direction of the cover body from the outlet port, the drawn air may be rolled up on the glass substrate by the flow of the surrounding air flow, but is introduced from the inlet as described above. Since it is comprised so that air may flow to the space below the blowing support means, the air derived from the induction part does not flow easily on a plate-shaped body by flowing the air introduced from the introduction part below the blowing support means, Contamination can be effectively suppressed.

In the Example of the plate-shaped object conveying apparatus which concerns on this invention, the said drive means is comprised by the some electric motor provided separately with respect to the said some rotating roller, The said some electric motor is the said support body by the said support body, It is preferable that it is supported so that it may be located in the outer side of a horizontal width direction, and is provided in the said outer flow path.

That is, the drive means is constituted by a plurality of electric motors provided separately with respect to the plurality of rotation rollers, so that, for example, the drive means is interlocked with a single electric motor and the single electric motor with the plurality of rotation rollers. Compared with the case where the gear-type linkage mechanism is connected, dust is not easily generated from the driving means, and even if the driving means constituted by the plurality of electric motors is disposed in the outer flow path, Air is not easily contaminated. Therefore, the external flow path can be formed by the space in which the drive means is provided.

In the Example of the plate-shaped object conveying apparatus which concerns on this invention, in the 2nd or 3rd characteristic structure, the said introduction part is formed by the space | interval of the upper edge part of the said support body, and the said cover body, and the lower edge part of the said support body. It is preferable that the said lead-out part is formed by the space | interval of the said cover body.

That is, the introduction portion or the lead-out portion can be formed only by providing the support so that a gap is formed between the upper edge portion of the support body and the cover body or between the lower edge portion of the support body and the cover body. Since it is not necessary to separately provide the member which communicates with an inner side and an outer side in a support body in order to form a lead-out part, it becomes easy to form an introduction part and a lead-out part.

In the Example of the plate-shaped object conveying apparatus which concerns on this invention, in a 4th characteristic structure, the space | interval of the upper edge part of the said support body and the said cover body, and the space | interval of the lower edge part of the said support body, and the said cover body are said, It is preferable that it is formed so that it may be located in the same position in a conveyance direction.

That is, the space | interval of the upper edge part of a support body and a cover body, and the space | interval of the lower edge part of a support body, and a cover body are formed so that it may be located in the same position in a conveyance direction, and the lead-out part formed below the inlet part and the conveyance direction is formed. Since it is located at the same position in, the air introduced from the inlet portion can be easily derived from the induction portion, so that the air introduced from the inlet portion can be smoothly derived from the induction portion.

In the Example of the plate-shaped object conveying apparatus which concerns on this invention, in a 4th or 5th characteristic structure, the said support body is connected by the said cover body, the lower end part is connected to the said cover body, ie, one support. It is preferable that it is supported by the state and it is formed so that the space | interval of the upper part of the said support body and the said cover body may be continued along the said conveyance direction.

That is, since the support can be supported by the cover by connecting the lower end thereof to the cover, the support can be easily connected to the cover. Moreover, since the space | interval of the upper part of a support body and a cover body is formed so that it may continue along a conveyance direction, since an introduction part can be formed in a wide width in a conveyance direction, air can be easily introduce | transduced from an introduction part, It is possible to effectively suppress the curling of the air due to the collision with air.

In the Example of the plate-shaped object conveying apparatus which concerns on this invention, in the 4th or 5th characteristic structure, the said support body is connected to the said cover body, the upper end part and the lower end part are supported by the said cover body in both supported states. It is preferable.

That is, by connecting each of the upper and lower ends of the support to the cover body, the support body can be firmly supported by the cover body, and by the rotating roller rotatably supported by the support body firmly supported in this way. Therefore, the propulsion force can be imparted stably to the plate-shaped body.

In the Example of the plate-shaped object conveying apparatus which concerns on this invention, the lower end of the said introduction part is in the position lower than the height of the contact point with respect to the plate-shaped object of the said rotary roller, and the upper end of the said lead-out part is lower than the rotation center of the said rotary roller. It is desirable to be at a lower position.

BRIEF DESCRIPTION OF THE DRAWINGS It is a top view of the plate-shaped object conveyance apparatus in 1st Example.
It is a front view of the plate-shaped object conveyance apparatus in 1st Example.
3 is a front view showing the drive means and the support body in the first embodiment.
Fig. 4 is a perspective view showing the drive means and the support in the first embodiment.
Fig. 5 is a diagram showing the flow of air in the first embodiment.
Fig. 6 is a front view showing the drive means and the support body in the second embodiment.
Fig. 7 is a perspective view showing a drive means and a support in the second embodiment.
Fig. 8 is a diagram showing the flow of air in the second embodiment.

EMBODIMENT OF THE INVENTION Hereinafter, the plate-shaped object conveyance apparatus which concerns on this invention is demonstrated with reference to drawings. Although a plurality of embodiments are described herein, a combination of the features of one embodiment of the invention with the features of another embodiment is within the scope of the invention.

[First Embodiment]

As shown to FIG. 1 and FIG. 2, plate-shaped conveyance apparatus H supplies clean air toward the lower surface of the glass substrate 1 for liquid crystals as a plate-shaped object, and supports the glass substrate 1 in a non-contact state. Blowing support means 2, propulsion force imparting means 3 for imparting a propulsive force in the conveying direction with respect to glass substrate 1 by supporting the lower surface of glass substrate 1, and blowing support means 2 In addition, the cover body 4 which covers the propulsion force provision means 3 and the glass substrate 1 conveyed is provided and comprised. And plate-shaped object conveyance apparatus H is provided in multiple numbers by the conveyance direction so that the glass substrate 1 may be conveyed over several plate-shaped object conveyance apparatus H. As shown in FIG.

And as shown in FIG. 2, the plate-shaped object conveyance apparatus H supports the glass substrate 1 in a non-contact state by the ventilation type support means 2, and also the glass substrate by the propulsion force provision means 3 It is comprised so that the glass substrate 1 may be conveyed along a conveyance direction by providing the propulsion force in a conveyance direction with respect to the glass substrate 1 by the propulsion force provision means 3, supporting 1 in contact state.

Blowing fan 2 as a blowing means which supplies clean air to the lower surface of the glass substrate 1 through the damping filter 6 which removes dust, and the damping filter 6 to the blowing support means 2; (7) is provided. In addition, the fan which comprised the one blower fan 7 which rotates around a vertical axis, and the plate-shaped damping filter 6 which covers the upper part of the blower fan 7 integrally are integrated together. Two filter units 8 are provided in the state in which the space | interval was spaced in the horizontal width direction, and two were installed in the state which does not have space | interval in the conveyance direction. It is comprised by the some fan filter unit 8 added.

Then, the blowing support means 2 sucks the air below the blowing support means 2 by the blowing action of the blowing fan 7, and blows the air through the vibration suppression filter 6 into the blowing support means ( It is comprised so that it may eject as clean air toward the upper side of 2), and by spraying clean air in this way, clean air is supplied to the lower surface of the glass substrate 1 conveyed, and the glass substrate 1 is horizontal or almost horizontal attitude | position It is configured to support. And the lower part of the blowing support means 2 is depressurized by the suction of the air of the blowing support means 2, and the blowing support means 2 is blown out by the air of the blowing support means 2; The space above is pressed.

As shown to FIG. 1 and FIG. 2, the propulsion force provision means 3 conveys several rotating rollers 10 which contact-support the edge part of the horizontal width direction orthogonal to the conveyance direction in the lower surface of the glass substrate 1. As shown in FIG. The rotational drive of the plurality of rotary rollers 10 by the drive means 11, and the thrust force in the conveyance direction is provided with respect to the glass substrate 1 supported by the blow-out support means 2, and arrange | positioned in the direction. It is configured to. And the drive means 11 is comprised by the some electric motor 12 provided separately with respect to the some rotating roller 10. As shown in FIG.

In addition, the propulsion force applying means 3 is one end side which contacts and supports the one end part of the horizontal width direction in the lower surface of the glass substrate 1, in order to support the both ends of the horizontal width direction in the lower surface of the glass substrate 1. A pair of propulsion force imparting means (3) and a propulsion force imparting means (3) of the other end side in contact with and supporting the other end portion in the horizontal width direction at the lower surface of the glass substrate (1) have. Moreover, the blowing support means 2 is located between a pair of propulsion force provision means 3, so that clean air may be supplied to the intermediate part of the horizontal width direction in the lower surface of the glass substrate 1, and to support it in a non-contact state. It is installed.

The cover body 4 is a horizontal side of a transverse side of the installation space in which the blowing support means 2 and the propulsion force imparting means 3 are installed, and a conveying path of the glass substrate 1 located above the installation space. And these installation spaces and are comprised so that the upper part of the conveyance path | route of the glass substrate 1 located above it may be covered. 3 and 4, the cover body 4 has a horizontal side of the installation space in the frame frame 14 in which a plurality of frame members are arranged with a gap in the vertical direction and the horizontal direction. And a pair of plate-shaped sidewall members 15 covering the horizontal side of the conveyance path of the glass substrate 1, and a plate-shaped upper wall member 16 covering the installation space and the upper portion of the conveyance path of the glass substrate 1. ), The horizontal sides and the upper and lower sides are closed, and the front, rear, and bottom sides are blocked.

And as a frame material of the frame | skeleton frame 14, the main frame material 14a etc. which were provided in four corners along the conveyance direction as seen from a conveyance direction are formed, and the side wall member 15 is the main frame material of the upper left side. Located between 14a and the lower left main frame member 14a, and between the upper right main frame member 14a and the lower left main frame member 14a, the upper wall is disposed so as to close them. The member 16 is provided between the main frame member 14a on the upper left side and the main frame member 14a on the upper right side, and is provided to close the gap. The main frame member 14a on the upper left side and the main frame member 14a on the upper right side are referred to as the upper main frame member 14a, and the lower main frame member 14a and the lower right main frame member ( 14a) may be called main frame material 14a below.

And, as shown in FIG. 3, the support body 18 which supports the propulsion force provision means 3 is located between the side wall member 15 in the cover body 4, and the ventilation type support means 2. As shown in FIG. It is supported by the frame frame 14 in the cover body 4. The support body 18 rotatably supports the plurality of rotating rollers 10 so that the plurality of rotating rollers 10 are positioned inside the blowing support means 2 in the horizontal width direction. It is comprised so that the some electric motor 12 may be located in the outer side which does not exist the ventilation type support means 2 in the width direction, and is supporting so that the electric motor 12 may be carried out.

4, the holes 18 are formed in the support 18 to insert the output shafts of the plurality of electric motors 12, and each of the plurality of electric motors 12 is formed as follows. It is supported by the outer side in the support body 18 in the state which inserted the output shaft through the hole. And the rotation roller 10 is fixed to the output shaft of the electric motor 12 which protruded inwardly from the hole of the support body 18 so that rotation roller 10 may be integrally rotated, and the rotation roller 10 also supports through the electric motor 12. It is supported by (18).

In addition, if the description of the shape of the support body 18 is added, as shown in FIG. 3 and FIG. 4, the support part extended in the vertical direction by the formation of the hole which supports the plurality of electric motors 12, and inserts the output shaft. 18a, the connection part 18b which connects to the cover body 4, the 1st connection part 18c which connects the support part 18a and the connection part 18b, and the adjacent support part 18a The 2nd connection part 18d which connects mutually is comprised, and the ventilation hole enclosed by the support part 18a and the 2nd connection part 18d is formed in the lower part of the support body 18. FIG. And each of these support part 18a, the connection part 18b, the 1st connection part 18c, and the 2nd connection part 18d is formed in plate shape.

And the connection part 18b is formed in the frame | skeleton frame 14 in the state which protrudes in the horizontal width direction from the lower main frame material 14a, and is the support part 18a and the 2nd connection part 18d. ) Is spaced apart from the side wall member 15 of the cover 4, the lower main frame member 14a and the upper main frame member 14a in the horizontal width direction, and the cover member 4 is closed. The upper wall member 16 and the upper main frame member 14a are spaced apart from the lower side, and the lower main frame member 14a is provided to be spaced apart from the upper side. Thus, the support body 18 has the lower end part connected to the cover body 4, and is formed in one support type by the cover body 4, and the whole upper part of the support body 18 is the cover body 4 whole. ) Is spaced apart in the vertical and horizontal directions.

And the rotating roller 10 is comprised by the pulley with which 0 ring was attached, the small diameter part 10a which O-ring is attached, and mounts and supports the glass substrate 1, and the width | variety of it are The large diameter part 10b which regulates the movement with respect to the horizontal width direction of the glass substrate 1 by providing the outer side in the direction and contacting the side surface of the glass substrate 1 is provided. It is also conceivable to construct the O-ring with NBR (nitrile rubber), the pulley with nylon, the O-ring with urethane rubber, and the pulley with ABS resin.

The plate-shaped object conveying apparatus H communicates with the inner side of the width direction of the support body 18, and the outer side of the opposite side, and is the same height as the lower surface of the glass substrate 1 conveyed while being between several rotation rollers 10. WHEREIN: The introduction part 23 which flows the air which flowed along the lower surface of the glass substrate 1 conveyed in the horizontal width direction from the inside of the horizontal width direction of the support body 18 to the outer side, and the horizontal width of the support body 18 The induction part 24 which communicates the inner side and the outer side of the direction, and flows inward from the outer side of the width direction of the support body 18 in the lower part than the introduction part 23 is formed, is formed, have.

In addition, as shown in FIG. 5, in the plate-shaped object conveying apparatus H, the space above the blowing type support means 2 and the space below the blowing type support means 2 are made into the horizontal width direction of the support body 18. As shown in FIG. The inner passage 21 and the introduction portion 23 and the lead portion 24 communicated with each other in the inner side of the opening, and the space above the blowable support means 2 and the inner passage 21 have a horizontal width of the support 18. The outer side flow path 22 which communicated to the outer side of the direction is formed.

First, the introduction portion 23 and the lead portion 24 will be described. The introduction portion 23 is formed by the gap between the upper edge portion of the support 18 and the cover 4, and the lower edge of the support 18. The lead-out part 24 is formed by the ventilation hole formed in the part. That is, the upper part of the support body 18 is spaced apart from the cover body 4 in the up-down direction and the horizontal width direction, and is formed in a line (ie, continuously) along the conveying direction formed by this separation. The introduction part 23 is formed by the clearance gap between the upper part of the support body 18, and the cover body 4. As shown in FIG. In addition, the lower part of the support body 18 is formed in the lower part of the support body 18 by the vent hole of the support body 18 in which multiple air holes are formed along the conveyance direction, and the plurality of air holes are formed along this conveyance direction. 24 is formed. Moreover, the lower end of the introduction part 23 is in the position lower than the height of the contact point with respect to the plate-shaped object of the said rotary roller 10, and the upper end of the lead-out part 24 is smaller than the rotation center of the said rotary roller 10. It is in a low position.

And a part of the clearance gap formed in a line along the conveyance direction between the upper part of the support body 18, and the cover body 4, and the ventilation hole formed in multiple numbers along the conveyance direction in the lower part of the support body 1 are horizontal It is formed in the state arranged in the up-down direction when seen from the width direction, and the introduction part 23 and the lead-out part 24 formed by these clearances and the ventilation hole are also arranged in the up-down direction when seen from the horizontal width direction. It is formed.

Next, the inner flow passage 21 and the outer flow passage 22 will be described. As shown in FIG. 5, the support 18 is spaced apart from the blower supporting means 2 in the horizontal width direction. The inner flow passage 21 is formed by a space between the blower supporting means 2 and the support 18. In addition, the support body 18 is formed in the state spaced apart from the side wall part 15 in the horizontal width direction, and the outer side flow path 22 is formed by the space between this support body 18 and the side wall part 15. As shown in FIG. ) Is formed. Moreover, the upper part of the blowing support means 2 is pressurized by the blowing of the blowing support means 2, and the lower pressure of the blowing support means 2 is decompressed by the suction of the blowing support means 2, In the inner flow passage 21 which communicates the space above the blowable support means 2 and the space below the blowable support means 2, from the space side above the blowable support means 2. Air flow to the space side below the blowing support means 2 is generated. In addition, in the outer side flow path 22, the airflow to the inner side flow path 21 side is generated from the space side of the upper side of the blowing type support means 2 similarly.

And the some rotation roller 10 located in the horizontal width direction inner side of the support body 18 is provided in the inner side flow path 21, and the several electric motor located in the horizontal width direction outer side of the support body 18 is shown. 12 is provided in the outer side flow path 22. As shown in FIG. 2, the space above the blowable support means 2 and the space below the blowable support means 2 are provided by the space between the fan filter units 8 arranged in the horizontal width direction. An internal flow path 20 is formed in which the airflow support means 2 communicates with the center portion in the horizontal width direction.

Therefore, as shown in FIG. 5, after the air supplied toward the lower surface of the glass substrate 1 by the blowing support means 2 flows along the horizontal width direction along the lower surface of the glass substrate 1, As shown by arrow a, the air is circulated by passing through the inner flow passage 21 or through the outer flow passage 22 as shown by arrow b to flow through the space below the blowing support means 2. . In particular, the air which passes between the rotating rollers 10 arranged in the conveyance direction among the air which flows outward in the horizontal width direction along the lower surface of the glass substrate 1, as indicated by the arrow b, the introduction portion 23. After being introduced to the outside of the support body 18, it can be led out from the lead-out portion 24 to the inner passage 21 via the outer passage 22. That is, by forming the introduction part 23 at the same height as the lower surface of the glass substrate 1 conveyed between the some rotation rollers 10, the air which passes between the rotation rollers 10 arrange | positioned in a conveyance direction Since it does not collide with the support body 18 easily, it is suppressed that air rolls up the glass substrate 1.

[Second Embodiment]

Next, a second embodiment of the plate-shaped object conveying apparatus will be described. The second embodiment has a configuration similar to that of the first embodiment except that the shapes of the cover body and the support body are different from those of the first embodiment, and thus the method of forming the inner flow path, the outer flow path, the introduction part and the lead-out part is different. Therefore, about the component same as the 1st Example, and the component which has the same effect | action, description is abbreviate | omitted by attaching | subjecting the same code | symbol, and a structure different from 1st Embodiment is mainly demonstrated.

As shown in FIG. 6, the cover body 4 has the horizontal side of the installation space which installs the ventilation type support means 2 and the propulsion force provision means 3, and the horizontal side of the conveyance path | route of the glass substrate 1 The plate-shaped upper wall member (not shown) which covers the installation space and the upper part of the conveyance path | route of the glass substrate 1 is assembled and comprised in the frame 26 for side walls to cover, and similarly to 1st Example, the horizontal right and left The sides and top are sealed, and the front, rear and bottom are open.

And the upper part of the side wall frame 26 is formed by the vertical wall part 26a, the upper wall part 26b, and the lower wall part 26c in the c-shape which opened inside in the conveyance direction, and the said side wall use By providing the support body 18 over the upper wall part 26b and the lower wall part 26c of the frame 26, it is surrounded by the vertical wall part 26a, the upper wall part 26b, the lower wall part 26c, and the support body 18. As shown in FIG. A sign space is formed. That is, the plate-shaped support body 18 which supports the propulsion force provision means 3 is between the vertical wall part 26a of the side wall frame 26 in the cover body 4, and the ventilation type support means 2. It is supported by the frame 26 for side walls in the cover body 4 so that it may be located.

As shown in FIG. 7, the support body 18 has the support part 18e in which the hole which supports the several electric motor 12, and inserts the output shaft, and the upper connection part 18f connected to the upper wall part 26b. ), A lower connecting portion 18g connected to the lower wall portion 26c, and a connecting portion 18h for connecting adjacent supporting portions 18e to each other, and having a lower portion and an upper portion of the support 18. A plurality of notches are formed in each of these. And the support body 18 is formed in flat form, and the support part 18e and the connection part 18h are horizontal width direction from the vertical wall part 26a of the side wall frame 26 in the cover body 4. As shown in FIG. Are spaced apart from the inside of the wall, spaced downward from the upper wall portion 26b, and spaced upward from the lower wall portion 26c. In this way, the support 18 has its upper and lower ends connected to the cover 4 and formed in both supported states by the cover 4, and each of the upper and lower portions of the support 18 is cut out. Since it is formed, it is partially spaced apart from the cover body 4 in the vertical direction and the horizontal width direction.

Referring to the introduction portion 23 and the lead portion 24, the upper edge portion of the support 18 is partially spaced apart from the upper wall portion 26b of the cover body 4 in the vertical direction and partially covers the cover body 4. The introduction portion 23 is spaced apart from the vertical wall portion 26a of the vertical wall portion 26a in the horizontal width direction, and is separated by the gap between the upper portion of the support body 18 and the cover body 4, which are formed to be dispersed along the conveying direction formed by the separation. Is formed. In addition, the lower portion of the support 18 is partially spaced apart from the lower wall portion 26c of the cover 4 in the vertical direction and partially spaced apart from the vertical wall portion 26a of the cover 4 in the horizontal width direction. The lead-out portion 24 is formed by a gap between the lower portion of the support 18 and the cover body 4 which are dispersed and formed along the conveying direction formed by this separation.

The gap is formed between the upper part of the support body 18 and the cover body 4 along the conveying direction, and is dispersed and formed along the conveying direction between the lower part of the support body 18 and the cover body 4. The clearance gap is formed so that it may be located in the same position in the conveyance direction, and the introduction part 23 and the lead-out part 24 formed by these clearance gaps are also formed so that it may be located in the same position in the conveyance direction.

Next, the inner flow passage 21 and the outer flow passage 22 will be described. The support 18 is formed in a state spaced apart from the outside in the transverse direction with respect to the blowing support means 2. The inner flow passage 21 is formed by the space between the expression support means 2 and the support 18. In addition, the support body 18 is formed in the state spaced apart from the vertical wall part 26a in the horizontal width direction, and the outer side flow path 22 is formed by the space between this support body 18 and the vertical wall part 26a. Is formed.

And although it is the same as 1st Example, as shown in FIG. 8, the air supplied toward the lower surface of the glass substrate 1 by the ventilation support means 2 transverses along the lower surface of the glass substrate 1 After flowing along the width direction, as shown by arrow a, the inner flow path 21 is flowed through, or as shown by arrow b, it flows through the outer flow path 22, and the space below the blowing support means 2 is shown. By circulating, air can be circulated. In particular, the air which passes between the rotating rollers 10 arranged in the conveyance direction among the air which flows outward in the horizontal width direction along the lower surface of the glass substrate 1, as indicated by the arrow b, the introduction portion 23. After being introduced from the support 18 to the outside, it can be guided from the lead-out portion 24 to the inner flow passage 21 through the outer flow passage 22. That is, by forming the introduction part 23 at the same height as the lower surface of the glass substrate 1 conveyed between the some rotating rollers 10, the air which passes between the rotating rollers 10 arrange | positioned in a conveyance direction is a support body. Since it does not collide easily with 18, air is suppressed from rolling up the glass substrate 1 above.

[Other Embodiments]

(1) In the first and second embodiments, the outer flow passage 22 communicates the space above the blowable support means 2 with the inner flow passage 21, but by the outer flow passage 22, The space above the blowable support means 2 communicates with the outer side of the cover body 4 in the horizontal width direction, or the space above the blowable support means 2 and the space below the cover body 4. By communicating with each other, the outer flow passage 22 may not communicate with the inner flow passage 21. Moreover, you may provide the derivation part 24 with the filter which removes dust when drawing air from the derivation part 24, and the suction fan for sucking air from the inlet part 23. As shown in FIG.

(2) In the first and second embodiments, the drive means 11 is constituted by a plurality of electric motors 12 provided separately with respect to the plurality of rotary rollers 10, but the drive means 11 You may comprise with the single electric motor 12 and the interlock mechanism which couples the some rotation roller 10 with this electric motor 12. FIG. In addition, although the drive means 11 was arrange | positioned in the outer side flow path 22, you may provide the drive means 11 outside and install the drive means 11 outside the outer side flow path 22 separately.

(3) In the first and second embodiments, the gap between the upper part of the support body 18 and the cover body 4 and the gap between the upper part of the support body 18 and the cover body 4 are viewed in the horizontal width direction. Although formed in the up-down direction, the gap between the upper part of the support body 18 and the cover body 4 and the gap between the upper part of the support body 18 and the cover body 4 are formed in a zigzag shape in the conveying direction, You may form in the state which is not arranged in an up-down direction when seen from a horizontal width direction.

(4) In the said 1st Example, the support body 18 is connected to the cover body 4, and the support body 18 is supported by the cover body 4 in one support state, In the said 2nd Example, the support body ( Although the upper and lower ends thereof were connected to the cover body 4 and supported by the cover body 4 in both supported states, the support body 18 was connected to the cover body 4 to cover the cover body 4. You may support by (4) in one support state. In this case, the gap between the lower part of the support body 18 and the cover body 4 is formed in a line along the conveyance direction.

(5) In the first and second embodiments, the introduction portion 23 is formed by the gap between the upper end portion of the support 18 and the cover 4, but the vent hole for forming the introduction portion of the support 18 is formed. In addition, you may form the introduction part 23 by this ventilation hole.

In addition, in the first embodiment, the vent hole for forming the lead portion is formed in the lower portion of the support body 18, and the lead portion 24 is formed by the vent hole, but the lower portion of the support body 18 and the cover body are formed. You may form the lead-out part 24 by the clearance gap with (4).

In the second embodiment, although the lead portion 24 is formed by the gap between the lower portion of the support body 18 and the cover body 4, vent holes for forming the lead-out portion are formed in the support body 18, You may form the lead-out part 24 by this ventilation hole.

(6) Although the rectangular glass substrate 1 was illustrated as a plate-shaped object in the said 1st and 2nd Example, other plate-shaped bodies, such as a semiconductor wafer, may be sufficient, and plate-shaped bodies of other shapes, such as circular shape, may be sufficient.

(7) In the said 1st and 2nd Example, the installation space which installs the cover body 4 and the ventilation support means 2 and the propulsion force provision means 3, and the glass substrate located above this installation space Although it was comprised so that the horizontal side and the upper side with the conveyance path of (1) may be covered, for example, in the 1st Example, according to the method of not providing the upper wall member 15, the cover body 4 was made into, for example. You may comprise so that only the horizontal side of the installation space and the conveyance path | route of the glass substrate 1 may be covered, and also the lower wall member between main frames 14a of lower sides in 1st Example, for example. The cover body 4 is configured to cover the horizontal side, the upper side, and the lower side of the conveyance path between the horizontal side of the installation space and the glass substrate 1 located above the installation space, according to a method such as installing You may also

(8) In the said 1st and 2nd Example, although the blowable support means 2 was comprised so that the glass substrate 1 might be supported in a non-contact state horizontally or almost horizontally, the blowable support means 2 It is provided so that it may be provided in the inclined posture in the horizontal width direction, and it is comprised so that the glass substrate 1 may be supported in the inclined posture inclined in the horizontal width direction by the ventilation support means 2. In this case, in order to incline the propulsion force imparting means 3 (the plurality of rotary rollers 10) along the inclination of the blowing support means 2, the support body 18 is provided in the inclined posture in the horizontal width direction. You may also

1: plate-shaped body
2: blowing support means
3: propulsion means
4; Cover
10: rolling roller
11: drive means
12: electric motor
18: support
21: inner passage
22: outer channel
23: Introduction
24: derivation unit

Claims (8)

Blowing support means for supplying clean air toward the lower surface of the plate body to support the plate body in a non-contact state;
A plurality of rotating rollers contacting and supporting end portions of the transverse width direction orthogonal to the conveying direction at the lower surface of the plate-shaped body are arranged in the conveying direction, and provided with the plurality of rotating rollers. Propulsion force imparting means for imparting a propulsive force in the conveying direction to the plate-shaped body supported by the blow-type support means by rotationally driving by
A plate-shaped conveyance apparatus provided with the support body which rotatably supports the said some rotation roller so that the said some rotation roller may be located in the inside which the said ventilation type support means exists in the said horizontal width direction,
An introduction portion for communicating the inner side of the support in the transverse direction and the outer side on the opposite side is formed at the same height as the lower surface of the plate-shaped body to be conveyed while being between the plurality of rotating rollers,
The introduction section allows air flowing in the horizontal width direction along the lower surface of the plate-shaped body to be conveyed from the inside of the horizontal width direction of the support to the outside.
Plate-shaped conveying device. The method of claim 1,
The cover body which covers the horizontal side of the installation space which installs the said blowing type support means and the said propulsion force provision means, and the horizontal side of the conveyance path | route of the said plate-shaped object located above the said installation space is the outer side of the said horizontal width direction than the said support body Installed in the
The blowable support means is configured to suck air from the bottom of the blowable support means and blow out clean air toward the top of the blowable support means,
A lead-out part is formed in which the inner side and the outer side of the support in the transverse direction communicate with each other, and below the introduction portion, the air flows inward from the outer side in the transverse direction of the support.
An inner flow path that communicates the space above the blowable support means with the space below the blowable support means in the transverse width direction of the support is a space formed between the support and the blowable support means. Formed by
A space provided between the support body and the cover body is provided between the support body and the cover body including the introduction part and the lead-out part to communicate the space above the blowable support means with the inner flow path outward in the horizontal width direction of the support body. The plate-shaped object conveyance apparatus formed by the. 3. The method of claim 2,
The drive means is constituted by a plurality of electric motors provided separately with respect to the plurality of rotating rollers,
The said plurality of electric motors are plate-shaped conveyance apparatuses supported by the said support body so that it may be located in the outer side of the said horizontal width direction, and are provided in the said outer flow path. The method according to claim 2 or 3,
The introduction body part is formed by the space | interval of the upper edge part of the said support body, and the said cover body, The plate-shaped object conveying apparatus in which the said lead-out part is formed by the space | interval of the lower edge part of the said support body, and the said cover body. 5. The method of claim 4,
The plate-shaped conveyance apparatus which is formed so that the space | interval of the upper part of the said support body and the said cover body and the space | interval of the lower part of the said support body and the said cover body may be located in the same position in the said conveyance direction. 5. The method of claim 4,
The support is connected to the lower end of the support by the cover body and supported by the cover body in one supporting state,
The plate-shaped conveyance apparatus which is formed so that the space | interval of the upper part of the said support body and the said cover body may be continued along the said conveyance direction. 5. The method of claim 4,
The said support body is a plate-shaped object conveying apparatus in which the said support body upper end part and a lower end part are connected to the said cover body, and are supported by the said cover body in both supporting states. 3. The method of claim 2,
The lower end of the introduction portion is at a position lower than the height of the contact point with respect to the plate-shaped body of the rotary roller,
The upper end of the said lead-out part is a plate-shaped object conveying apparatus in the position lower than the rotation center of the said rotating roller.

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