JP4067703B2 - Transport cart - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a transport carriage, and in particular, a transport object such as a semiconductor wafer, a liquid crystal, a magnetic disk, an optical disk, a compact disk or the like in a manufacturing process or the like, or a cassette that stores these (in this specification, simply “transport object”). Is related to a transport carriage suitable for transporting in a clean environment.
[0002]
[Prior art]
Conventionally, semiconductor wafers, liquid crystals, magnetic disks, optical disks, compact disks, and the like are manufactured in a clean room because fine particles such as dust greatly affect the accuracy and yield of products.
[0003]
In a clean room used for this type of purpose, generally, a so-called downflow is formed in which clean air flows down from the ceiling and exhausts from below the floor. The flow is quickly discharged out of the clean room.
[0004]
Also, a transport cart is used to transport the transported object in the clean room, but in order to maintain a high degree of cleanliness in the clean room, the downflow is caused by the turbulent flow generated by the transport cart traveling. In order to avoid being disturbed, the transport cart is driven at a low speed.
[0005]
[Problems to be solved by the invention]
By the way, in order to improve the transport capability using a limited number of transport carts, it is necessary to increase the traveling speed of the transport cart.
However, when the transport carriage is run at high speed, turbulent flow is generated at the front and rear surfaces of the transport carriage, and this turbulent flow disturbs the downflow, so that fine particles such as dust rise from the floor and under the floor. There has been a problem that the transported goods and the manufacturing apparatus mounted on the transport carriage are contaminated by fine particles such as dust that has soared.
[0006]
In view of the above problems of the conventional transport cart, the present invention does not generate turbulent flow or dust soars even when the transport cart is run at a high speed in a clean room. It is an object of the present invention to provide a transport cart capable of improving the transport capability without contaminating a manufacturing apparatus installed in the vicinity.
[0007]
[Means for Solving the Problems]
In order to achieve the above object, the transport carriage of the present invention has the same cross-sectional shape that extends horizontally in the running direction of the transport carriage on one or both side surfaces of the transport carriage below the delivery position of the transport object mounted on the transport carriage . In addition to forming an air flow groove formed of a concave groove, an air inlet is formed on the front and rear surfaces formed on the downward inclined surface of the transport carriage, and at least a part of the air sucked from the air inlet is forced into the air flow groove It is characterized in that it is escaped to the air circulation groove by a fan for letting it escape .
In this case, the present invention can be applied to either a transport cart that travels in a clean room or a transport cart that travels in a tunnel-shaped transport path.
[0008]
This transport carriage has an air flow groove formed of a concave groove having the same cross-sectional shape extending horizontally in the running direction of the transport carriage on one or both side surfaces of the transport carriage below the delivery position of the transport object to be mounted on the transport carriage. In addition, the air circulation groove is formed by a fan for forcibly releasing at least a part of the air sucked from the air intake groove to the air circulation groove by forming air inlets on the front and rear surfaces formed on the downward inclined surface of the transport carriage. When the transport cart is running, the air on the front and rear surfaces of the transport cart flows so as to be sucked into the air flow channel, so that even if the transport cart runs at high speed, the air flow channel It is possible to prevent the turbulent flow from being generated further upward and the dust from rising, so that the conveyed items and the manufacturing apparatus mounted on the conveying cart can be prevented from being contaminated.
More specifically, it is possible to prevent the air in the transport path on which the transport cart travels from flowing into the clean room, and when the transport cart travels in the tunnel-shaped transport path, the front surface of the transport cart In addition, the air in the tunnel-shaped conveyance path on the rear surface can be released to the air circulation groove, and thereby, the tunnel-shaped conveyance formed above the position where the air circulation groove of the conveyance carriage is formed. Even if no special blocking device is provided at the delivery port of the transported product on the side of the road manufacturing device side, dust can be prevented from entering from the delivery port of the transported product, and the cleanliness of the clean room can be maintained economically. it can.
[0009]
In particular , by forming air inlets on the front and rear surfaces of the transport carriage so that at least a part of the air sucked from the air inlets escapes to the air flow grooves, uneven air generated on the front surface of the transport carriage Combined with the ability to reduce the flow and suck the turbulent flow on the rear surface, and to allow the air on the front and rear surfaces of the transport carriage to escape smoothly to the air flow groove, There is no turbulent flow or dust rises up, and it is possible to reliably prevent the transported goods and the manufacturing apparatus mounted on the transport cart from being contaminated, thereby further increasing the speed of the transport cart.
[0010]
In addition, by disposing a fan for forcibly releasing the air sucked from the air inlet into the air circulation groove, the air on the front and rear surfaces of the transport carriage can be surely released to the air circulation groove. Of course, when the transport cart travels in a clean room, especially when the transport cart is configured to travel in a tunnel-shaped transport path, turbulence occurs above the air flow groove, and dust rises. Can be more reliably prevented.
[0011]
Moreover, the conveyed product mounted in a conveyance trolley can be accommodated and mounted in a conveyance trolley, or can be exposed and mounted on a conveyance trolley.
[0012]
Thereby, a conveyance form can be selected according to the cleanliness etc. of the conveyance path on which the conveyance trolley travels the kind and shape of the conveyed product mounted on the conveyance trolley.
[0013]
DETAILED DESCRIPTION OF THE INVENTION
DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments of a transport carriage according to the present invention will be described with reference to the drawings.
[0014]
1 to 2 show a first embodiment of a transport carriage according to the present invention.
The transport cart 2 is configured to run in a tunnel-shaped transport path 1 partitioned from a clean room. The transport path 1 and the transport cart 2 are configured such that the transport cart 2 is transported as shown in FIG. The inner width W0 of the transport path 1 is formed to be larger than the lateral width W1 of the main body 21 of the transport carriage 2 and a travel rail R on which the transport carriage 2 travels is laid as necessary. In order to maintain a predetermined cleanliness, a downflow is formed inside the conveyance path 1.
[0015]
In addition, a station where the transport carriage 2 stops is formed at an appropriate position on the transport path 1, and the delivery position of the transported goods mounted on the transport carriage stopped at the station is a delivery port for the transported goods on the manufacturing apparatus side. An opening 11 is formed in the cover 10 of the conveyance path 1.
[0016]
The transport carriage 2 forms a storage chamber 20 in the main body 21 for mounting a semiconductor wafer, a liquid crystal, a magnetic disk, an optical disk, a compact disk, etc. directly or a transported object such as a cassette storing these. If necessary, a transfer device or the like (not shown) for delivering the conveyed product is disposed between the manufacturing device and the delivery port of the conveyed product.
In this case, the storage chamber 20 is partitioned by a ceiling 21a and a floor 21b in the upper and lower sides, and in the traveling direction of the transport carriage 2 by partition walls 21c and 21d, respectively, and the main body 21 for delivering the transported material. By providing a door in the opening (not shown) formed in the container, the accommodation chamber 20 can be closed, so that the transported goods mounted on the transport cart 2 while traveling in the transport path 1 It is possible to reliably prevent contamination by dust or the like.
[0017]
Then, air flow grooves 24 and 24 made of concave grooves extending in the traveling direction of the transport carriage 2 are formed on both side surfaces of the transport carriage 2 at positions below the storage chamber 20 in which the transported goods are mounted. A width W3 narrower than the width W1 of the main body 21 and the width W2 of the bogie 22 that connects the main body 21, the car 22 with the traveling wheels 25, and the main body 21 and the bogie 22. It is made to comprise so that the longitudinal cross-sectional shape which consists of the intermediate | middle connection part 23 which has may become a substantially horizontal H shape.
In addition, the longitudinal cross-sectional shape of the conveyance trolley 2 is not limited to the substantially horizontal H shape of the present embodiment. For example, the shape of the trolley portion 22 provided with the traveling wheels 25 is downsized to connect the lateral width W3 of the trolley portion 22 to the intermediate connection. The lateral width W2 of the portion 23 can be formed to be substantially equal and can be configured to be substantially T-shaped.
In addition, when the opening 11 serving as a delivery port for the conveyed product on the manufacturing apparatus side is formed only on one side of the cover 10 of the conveyance path 1, the air circulation groove 24 is not necessarily provided on both side surfaces of the conveyance carriage 2. It is not necessary to form the opening 11 on the side surface on the side where the opening 11 is formed, and the other side surface can be formed in a flat shape.
[0018]
Further, the front surface 3 and the rear surface 4 of the transport carriage 2 are configured to be inclined downward, and the intake ports 5 and 6 are formed, and the air sucked from the intake ports 5 and 6 is supplied to the air circulation groove 24 and the transport cart 2. An appropriate position on the lower surface 21b facing the air circulation groove 24 of the main body portion 21 (however, the position where the storage chamber 20 is formed may be excluded), in this embodiment, so that it can escape downward. A total of four exhaust ports 8 are provided at two positions before and after the traveling direction of the carriage 2 in a suitable position on the floor 22a of the carriage section 22, that is, two places before and after the traveling direction of the carriage 2 in this embodiment. The exhaust port 9 is formed, and the exhaust port 8 and the exhaust port 9 are provided with a fan 10 for forcibly releasing the air sucked from the intake ports 5 and 6 below the air circulation groove 24 and the transport carriage 2. Each is arranged.
In this case, the angle θ of the inclined surfaces of the front surface 3 and the rear surface 4 of the transport carriage 2 is such that when the transport cart 2 travels, the air in the transport path 1 on the front surface 3 and the rear surface 4 of the transport cart 2 is as downward as possible. , B, d, e are preferably set.
In addition, any member that can smoothly pass air such as a louver or a net can be disposed in the intake ports 5 and 6.
In addition, when the downflow is formed in the inside of the conveyance path 1, the air which escaped below the air circulation groove | channel 24 and the conveyance trolley 2 is exhausted under the floor from the grating which comprises the floor of the conveyance path 1. Is done.
Further, in the present embodiment, the space formed in the back portions of the intake ports 5 and 6 of the main body 21 and the intermediate connecting portion 23 is configured so as not to communicate by being partitioned by the lower surface 21b of the main body 21. A communication hole can also be formed in the lower surface 21b of the main body portion 21 that divides.
[0019]
By the way, in the present embodiment, the conveyed product is accommodated and mounted in the accommodating chamber 20 of the conveying cart 2, but the present invention is not limited to this, and the second embodiment of the conveying cart of the present invention shown in FIG. As in the example, it is also possible to configure such that a transport object G such as a cassette for storing a semiconductor wafer, liquid crystal, etc. is exposed and mounted on the transport carriage 2, whereby the transport object to be mounted on the transport carriage 2 can be configured. Depending on the type, shape, etc., the transport mode can be selected.
The other basic configuration of the transport cart 2 of the second embodiment is the same as that of the transport cart 2 of the first embodiment.
[0020]
Next, the operation of the transport carriage 2 will be described.
When the transport cart 2 is loaded with a transported object and travels in the direction of the arrow V in the tunnel-shaped transport path 1, most of the air in the transport path 1 is inclined surfaces of the front surface 3 and the rear surface 4 of the transport cart 2. The airflows a, b, d, and e are downwardly drawn along the front and rear suction surfaces 5 and 6 formed on the front surface 3 and the rear surface 4 of the transport carriage 2. The air flows to the lower side of the air circulation groove 24 and the transport carriage 2 through the exhaust port 8 formed in 21 b and the exhaust port 9 formed in the floor 22 a of the carriage unit 22.
[0021]
In this case, the air inlet 8 and the air outlet 9 are respectively provided with fans 10 for forcibly releasing the air sucked from the air inlets 5 and 6 below the air circulation groove 24 and the transport carriage 2. Therefore, the air on the front surface 3 and the rear surface 4 of the transport carriage 2 can escape to the lower side of the air circulation groove 24 and the transport carriage 2.
[0022]
Further, part of the air in the conveyance path 1 on the front surface 3 and the rear surface 4 of the conveyance carriage 2 enters a narrow gap between the main body 21 of the conveyance carriage 2 and the cover 10 of the conveyance path 1, and the conventional longitudinal cross-sectional shape is substantially the same. In the rectangular transport carriage, the transport carriage on the transport path 1 rides on the air flow, and further, the air in the lower part of the tunnel-shaped transport path 1 rises with the dust along with the air flow. Dust enters from the opening 11 serving as a delivery port for the transported material on the manufacturing apparatus side formed at the delivery position of the transported product to be mounted on the transport path 1 and the clean room blocked from the transport path 1 is contaminated or mounted on the transport cart 2 There was a problem that the transported goods were contaminated.
[0023]
On the other hand, in the transport carriage 2 of the present embodiment, the air flow formed by the concave grooves extending in the traveling direction of the transport carriage 2 on the side surface of the transport carriage 2 below the delivery position of the transport object mounted on the transport carriage 2. Since the groove 24 is formed, the airflow c in the narrow gap between the main body 21 of the transport carriage 2 and the cover 10 of the transport path 1 is such that the flow velocity of the airflow c is smaller than the flow velocity of the airflow flowing through the air circulation groove 24. Therefore, the air flows into the air circulation groove 24 due to the difference in the dynamic pressure of the air flow, and the turbulent flow and the dust soaring are not generated above the air circulation groove 24 and are blocked from the conveyance path 1. It is possible to prevent the clean room from being contaminated and the transported goods mounted on the transport carriage 2 from being contaminated.
[0024]
In this way, when the transport cart 2 is traveling, the air on the front surface 3 and the rear surface 4 of the transport cart 2 flows so as to be sucked below the air flow grooves 24 and the transport cart 2, thereby causing the transport cart 2 to move at high speed. Even when the vehicle travels, turbulent flow and dust soaring are not generated above the air circulation groove 24, and it is possible to prevent the conveyed items and the manufacturing apparatus mounted on the conveying cart 2 from being contaminated.
[0025]
In addition, in the said Example, although the case where it drive | works the inside of the tunnel-shaped conveyance path 1 which divided the conveyance trolley 2 with the clean room was demonstrated, it is not limited to this, The conveyance trolley which drive | works the conveyance path directly formed in the clean room In addition, the configuration of the transport carriage of the present invention can be applied, and the same effect can be obtained.
[0026]
【The invention's effect】
According to the transport carriage of the present invention, the air is formed of concave grooves having the same cross-sectional shape that extend horizontally in the traveling direction of the transport carriage on one or both side surfaces of the transport carriage below the delivery position of the transport object to be mounted on the transport carriage. A fan for forming a flow groove and forming an intake port on the front and rear surfaces of the downwardly inclined surface of the transport carriage and forcing at least a part of the air sucked from the intake port to escape to the air flow channel since as escape to the air circulation groove by, during traveling of the conveyance carriage, the air of the front and rear surfaces of the conveyance carriage is by flowing as sucked into the air circulation groove, even if running the conveyance carriage at a high speed In addition, turbulent flow is not generated above the air circulation groove, and dust does not rise, so that it is possible to prevent the conveyed items and the manufacturing apparatus mounted on the conveying cart from being contaminated.
Thereby, in order to maintain the cleanliness of a clean room, it becomes possible to drive a conveyance trolley at high speed without requiring equipment cost and maintenance cost, and it is possible to improve conveyance capability.
More specifically, it is possible to prevent the air in the transport path on which the transport cart travels from flowing into the clean room, and when the transport cart travels in the tunnel-shaped transport path, the front surface of the transport cart In addition, the air in the tunnel-shaped conveyance path on the rear surface can be released to the air circulation groove, and thereby, the tunnel-shaped conveyance formed above the position where the air circulation groove of the conveyance carriage is formed. Even if no special blocking device is provided at the delivery port of the transported product on the side of the road manufacturing device side, dust can be prevented from entering from the delivery port of the transported product, and the cleanliness of the clean room can be maintained economically. In addition, it is possible to reduce the cleanliness of the conveyance path and to greatly reduce the cost required for the air-conditioning equipment by accommodating and mounting the conveyed product in the conveyance carriage.
[0027]
In particular , by forming air inlets on the front and rear surfaces of the transport carriage so that at least a part of the air sucked from the air inlets escapes to the air flow grooves, uneven air generated on the front surface of the transport carriage Combined with the ability to reduce the flow and suck the turbulent flow on the rear surface, and to allow the air on the front and rear surfaces of the transport carriage to escape smoothly to the air flow groove, There is no turbulent flow or dust rises up, and it is possible to reliably prevent the transported goods and the manufacturing apparatus mounted on the transport cart from being contaminated, thereby further increasing the speed of the transport cart.
[0028]
In addition, by disposing a fan for forcibly releasing the air sucked from the intake port to the air circulation groove, the air on the front and rear surfaces of the transport carriage can be surely released to the air circulation groove. Of course, when the transport cart travels in a clean room, especially when the transport cart is configured to travel in a tunnel-shaped transport path, turbulent flow or dust rises above the air flow groove. Can be more reliably prevented.
[0029]
In addition, depending on the type, shape, and cleanliness of the transport path on which the transport cart travels, the transported items to be mounted on the transport cart can be accommodated in the transport cart and mounted on the transport cart. It can also be mounted, thereby increasing the degree of freedom of the transport form of the transported object.
[Brief description of the drawings]
FIG. 1 is an external perspective view showing a first embodiment of a transport carriage according to the present invention.
2A and 2B are a front view and a side view, respectively, of the transport cart.
FIGS. 3A and 3B show a second embodiment of the transport carriage of the present invention, in which FIG. 3A is a front view and FIG. 3B is a side view.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Conveyance path 2 Conveyor trolley 21 Main part 22 Carriage part 23 Intermediate connection part 24 Air circulation groove 3 Front surface 4 Rear surface 5 Intake port 6 Intake port 8 Exhaust port 9 Exhaust port 10 Exhaust fan 11 Opening part R Running rail

Claims (3)

An air flow groove formed of a concave groove having the same cross-sectional shape extending horizontally in the traveling direction of the transport carriage is formed on one or both side surfaces of the transport carriage below the delivery position of the transported goods mounted on the transport carriage , and the transport carriage An air inlet is formed on the front and rear surfaces configured with a downwardly inclined surface, and at least a part of the air sucked from the air inlet is allowed to escape to the air circulation groove by a fan for forcibly releasing the air to the air circulation groove . A transport cart characterized by that. 2. The transport carriage according to claim 1, wherein the transported article is accommodated and mounted in the transport carriage. 2. The transport carriage according to claim 1, wherein the transported object is exposed and mounted on the transport carriage.

Images