JPH11322068A - Air current control device for automated guided vehicle - Google Patents
Air current control device for automated guided vehicleInfo
- Publication number
- JPH11322068A JPH11322068A JP12738298A JP12738298A JPH11322068A JP H11322068 A JPH11322068 A JP H11322068A JP 12738298 A JP12738298 A JP 12738298A JP 12738298 A JP12738298 A JP 12738298A JP H11322068 A JPH11322068 A JP H11322068A
- Authority
- JP
- Japan
- Prior art keywords
- air
- vehicle body
- fan
- filter
- storage space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、本体の収容空間に
空気を導入するフィルター付きファンを備えた無人搬送
車に関し、特に空気の気流を制御する無人搬送車の気流
制御装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an automatic guided vehicle equipped with a fan having a filter for introducing air into a housing space of a main body, and more particularly to an air flow control device of an automatic guided vehicle for controlling an air flow of air.
【0002】[0002]
【従来の技術】従来、工場や物流現場において、自動化
や省力化を目的とした無人搬送システムに無人搬送車が
用いられているが、液晶用ガラス基板や半導体ディスク
等を扱うクリーンルーム内でも、無人搬送車が用いられ
ている。2. Description of the Related Art Conventionally, unmanned transport vehicles have been used in unmanned transport systems for the purpose of automation and labor saving in factories and logistics sites. Carriers are used.
【0003】この無人搬送車は図2に示すように、本体
である車体21とフィルター付きファン22と、走行車
輪27とから主構成される。車体21は収容空間23を
備え、その収容空間23には基台24上にカセットボッ
クス25が挿脱可能に収容される。As shown in FIG. 2, this automatic guided vehicle mainly comprises a vehicle body 21 as a main body, a fan 22 with a filter, and running wheels 27. The vehicle body 21 has a housing space 23, and a cassette box 25 is housed in the housing space 23 on a base 24 so as to be insertable and removable.
【0004】カセットボックス25は、上枠25aと下
枠25bとそれらの各4隅を縦方向に支える4本の支柱
25cと多数段の左右の桟(図示せず)とからなる全周
面が開放された箱型をなし、各左右の桟により液晶用ガ
ラス基板等の板状体28を間隔をおいて上下に積層状に
保持している。[0004] The cassette box 25 has an upper frame 25a, a lower frame 25b, four columns 25c for vertically supporting the four corners thereof, and a multistage left and right crosspiece (not shown). It has an open box shape, and plate members 28 such as a glass substrate for a liquid crystal are held in a vertically stacked manner at intervals by respective right and left crosspieces.
【0005】車体21の上面中央に設けられるフィルタ
ー付きファン22は、収容空間23内のダスト等を吹き
飛ばして除去するためにクリーンルーム内の空気を導入
するためのものである。導入された空気が排出されるま
での収容空間23内の気流によって、ダスト等が排出さ
れ、カセットボックス25に保持された板状体28の一
層のクリーン化を図ろうとしている。[0005] A fan 22 with a filter provided at the center of the upper surface of the vehicle body 21 is for introducing air in a clean room in order to blow off and remove dust and the like in the storage space 23. Dust and the like are discharged by the airflow in the storage space 23 until the introduced air is discharged, and the plate-like body 28 held in the cassette box 25 is further cleaned.
【0006】車体21は駆動車輪や従動車輪等の走行車
輪27によってクリーンルーム内の所定の搬送路上を走
行し、駆動モータによって回転するファン22aによっ
て矢印で示すように、フィルター22bでダスト等を濾
過した上で収容空間23内に空気が導入され、車体21
内面と基台24外面周囲との間に形成される通路を通過
して車体21の下方へ排出される。The vehicle body 21 travels on a predetermined transport path in a clean room by traveling wheels 27 such as driving wheels and driven wheels, and dusts and the like are filtered by a filter 22b as indicated by an arrow by a fan 22a rotated by a driving motor. Air is introduced into the accommodation space 23 above, and
The air is discharged to the lower part of the vehicle body 21 through a passage formed between the inner surface and the periphery of the outer surface of the base 24.
【0007】[0007]
【発明が解決しようとする課題】上記従来の無人搬送車
は、車体21の上面中央にフィルター付きファン22を
備えているので、空気の気流Aは図2で矢印で示すよう
に、収容空間23内を上方から下方へと流れる。従っ
て、カセットボックス25内に間隔をおいて上下に積み
重ねられている板状体28間の扁平な隙間に空気が流通
しにくく、板状体28に付着するダスト等を十分に除去
できないという問題がある。Since the above-described conventional automatic guided vehicle has a fan 22 with a filter in the center of the upper surface of the vehicle body 21, the air flow A of the air flows into the accommodation space 23 as shown by the arrow in FIG. It flows from the top down. Accordingly, there is a problem that air is difficult to flow through the flat gap between the plate-like bodies 28 stacked vertically at intervals in the cassette box 25, and dust or the like attached to the plate-like body 28 cannot be sufficiently removed. is there.
【0008】また車体21内面と基台24外面周囲との
間に形成される空気の通路から車体21の下方に排出さ
れる上から下への気流で床面26のダスト等が浮上する
ので、車体21の周囲環境のクリーン度も低下し、ひい
てはダスト等が前記収容空間23内に導入されやすいと
いう問題もある。Further, dust and the like on the floor surface 26 float due to a top-to-bottom airflow discharged below the vehicle body 21 from an air passage formed between the inner surface of the vehicle body 21 and the periphery of the outer surface of the base 24. There is also a problem that the degree of cleanness of the surrounding environment of the vehicle body 21 is reduced, and that dust and the like are likely to be introduced into the accommodation space 23.
【0009】そこで本発明は上記問題点に鑑み、車体の
収容空間に導入される空気の気流の向きを制御すること
によって、カセットボックスに保持されて搬送される板
状体クリーン度の一層の向上を図ることのできる無人搬
送車の気流制御装置を提供することを目的とするもので
ある。In view of the above problems, the present invention further improves the cleanliness of a plate-like body held and conveyed in a cassette box by controlling the direction of the airflow introduced into the housing space of the vehicle body. It is an object of the present invention to provide an air flow control device for an automatic guided vehicle that can achieve the following.
【0010】[0010]
【課題を解決するための手段】本発明は上記目的を達成
するために、板状体を間隔をおいて上下に積層状に保持
するカセットボックスを挿脱可能に収容する収容空間を
備えた車体と、収容空間に濾過された空気を導入するフ
ィルター付きファンとを有する無人搬送車において、フ
ィルター付きファンを車体の上面周辺の適所に前記収容
空間内に斜下に向け空気が導入されるように配置し、空
気の排出口を車体の下面の前記フィルター付きファンの
斜下対角線位置に配置し、前記収容空間と前記排出口の
間を漸次断面積が減少する通路で結んだことを特徴とす
る。SUMMARY OF THE INVENTION In order to achieve the above object, the present invention provides a vehicle body having a housing space for accommodating and removably accommodating cassette boxes for holding plate-like bodies in a vertically stacked manner at intervals. And an automatic guided vehicle having a fan with a filter that introduces filtered air into the accommodation space, such that air is directed obliquely downward into the accommodation space at a suitable location around the upper surface of the vehicle body. The air outlet is disposed on the lower surface of the vehicle body at a position diagonally below the fan with a filter, and the accommodating space and the outlet are connected by a passage having a gradually decreasing cross-sectional area. .
【0011】本発明によれば、フィルター付きファンが
車体の上面周辺の適所に前記収容空間内に斜下に向け空
気が導入されるように配置されているので、カセットボ
ックスに間隔をおいて保持される板状体間の扁平な隙間
に水平方向に空気が流通し、板状体にダスト等が付着し
ていれば、その空気の気流により吹き飛ばして除去さ
れ、板状体の一層のクリーン化を図ることができる。According to the present invention, since the fan with the filter is arranged at an appropriate position around the upper surface of the vehicle body so that air is introduced obliquely downward into the housing space, the fan is held at an interval in the cassette box. If air flows horizontally in the flat gaps between the plate-shaped objects and dust or the like adheres to the plate-shaped objects, they are blown away by the air current and removed to further clean the plate-shaped objects. Can be achieved.
【0012】また、空気の排出口がフィルター付きファ
ンの斜下対角線位置に配置され、排出口と収容空間との
間を結ぶ通路は漸次断面積が減少しているので、板状体
間の隙間に水平方向に流通した気流が、スムースに排出
口に導かれる。また排出口から床面に排出された空気に
より床面のダスト等が浮上しても、前記フィルター付き
ファンが排出口の斜上対角線位置にあるため、前記ダス
ト等は車体によって邪魔され、再び収容空間内に導入さ
れることが少なくなり、板状体のクリーン度を保つこと
ができる。[0012] Further, the air outlet is disposed diagonally below the fan with the filter, and the passage connecting the outlet and the accommodating space has a gradually reduced cross-sectional area. The airflow circulating in the horizontal direction is smoothly led to the outlet. Further, even if dust and the like on the floor surface float due to the air discharged from the outlet to the floor, the dust and the like are obstructed by the vehicle body and stored again because the fan with the filter is located diagonally above the outlet. It is less likely to be introduced into the space, and the cleanness of the plate can be maintained.
【0013】[0013]
【発明の実施の形態】以下、本発明の無人搬送車の気流
制御装置の一実施形態について図1を参照しながら説明
する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of an air flow control device for an automatic guided vehicle according to the present invention will be described below with reference to FIG.
【0014】この無人搬送車は図1に示すように、本体
である車体1とフィルター付きファン2と、走行車輪7
とから主構成される。車体1は開閉扉(図示せず)によ
り開閉されるほぼ密閉空間の収容空間3を備え、その収
容空間3には基台4上にカセットボックス5が挿脱可能
に収容されている。基台4は車体1の進行方向(図面右
方向)に対しその後面と両側面を車体1の内面に密着さ
せ、その前面は図1に示すような断面曲線状に形成さ
れ、車体1の前方内面と間隔を開けて配置されている。
この空間が後記通路11を形成し、その下面開放部が後
記排出口10を形成する。As shown in FIG. 1, this automatic guided vehicle has a vehicle body 1 as a main body, a fan 2 with a filter,
It is mainly composed of The vehicle body 1 has a substantially enclosed space 3 that is opened and closed by an opening / closing door (not shown), and a cassette box 5 is removably accommodated on a base 4 in the accommodation space 3. The base 4 has its rear surface and both side surfaces in close contact with the inner surface of the vehicle body 1 with respect to the traveling direction of the vehicle body 1 (rightward in the drawing), and its front surface is formed into a cross-sectional curved shape as shown in FIG. It is arranged at an interval from the inner surface.
This space forms a passage 11 to be described later, and a lower opening portion thereof forms an outlet 10 to be described later.
【0015】カセットボックス5は、上枠5aと下枠5
bとそれらの各4隅を縦方向に支える4本の支柱5cと
多数段の左右の桟(図示せず)とからなる全周面が開放
された箱型をなし、各左右の桟により液晶用ガラス基板
等の板状体8を間隔をおいて上下に積層状に保持してい
る。The cassette box 5 includes an upper frame 5a and a lower frame 5
b and four columns 5c for supporting each of the four corners in the vertical direction, and a box-like shape having an open entire peripheral surface composed of a large number of left and right crosspieces (not shown). A plate-shaped body 8 such as a glass substrate for use is held vertically in a stacked manner at intervals.
【0016】車体1には、その上面の後辺を利用して約
45°程傾斜させて収容空間3に斜下に向け前記収容空
間3内に空気が導入されるようにフィルター付きファン
2を配置している。本実施形態では上面が矩形のもので
示しているが、上面が円形の無人搬送車の場合には、そ
の上面の周辺の適所に斜下に向け空気が導入されるよう
に適宜配置するとよい。The vehicle body 1 is provided with a fan 2 with a filter so that the rear side of the upper surface thereof is inclined at about 45 ° to the accommodation space 3 so that air is introduced into the accommodation space 3 obliquely downward. Have been placed. In the present embodiment, the upper surface is shown as a rectangular shape. However, in the case of an automatic guided vehicle having a circular upper surface, it may be appropriately arranged so that air is introduced obliquely downward at an appropriate position around the upper surface.
【0017】フィルター付きファン2は、駆動モータに
より回転する羽根を備えたファン2aと、ファン2aの
回転による圧送空気を収容空間3内に送り込む際にダス
トを濾過するフィルター2bとからなる。フィルター付
きファン2により導入された空気の気流Aによって、後
述のようにカセットボックス5に保持された板状体8の
クリーン化を図っている。The fan 2 with a filter comprises a fan 2a having blades rotated by a drive motor, and a filter 2b for filtering dust when the air fed by the rotation of the fan 2a is sent into the housing space 3. The airflow A of the air introduced by the fan 2 with the filter cleans the plate 8 held in the cassette box 5 as described later.
【0018】車体1は前方の駆動車輪7aや後方に設け
られた従動車輪7bによってクリーンルーム内の所定の
搬送路上を走行する際に、フィルター付きファン2も駆
動されて収容空間3に空気が導入される。本実施形態で
は図2で示した従来のものと異なり、フィルター付きフ
ァン2を車体1の上面の後辺に設けることによって収容
空間3内に斜下に向け空気が導入されるように配置され
ているので、ファン2aから圧送される空気の大半は、
基台4の上面に収容されているカセットボックス5の側
方より水平方向に入る。よって、カセットボックス5に
積層状に保持されている板状体8間の扁平な隙間に空気
が流通し、板状体8にダスト等が付着していれば、その
気流Aが吹き飛ばして除去し、板状体8および桟等のク
リーン化を図ることができる。When the vehicle body 1 travels on a predetermined transport path in a clean room by a front driving wheel 7a or a driven wheel 7b provided behind, a fan 2 with a filter is also driven to introduce air into the accommodation space 3. You. In the present embodiment, unlike the conventional fan shown in FIG. 2, the fan 2 with a filter is provided on the rear side of the upper surface of the vehicle body 1 so that the air is introduced into the housing space 3 so as to be directed obliquely downward. Most of the air pumped from the fan 2a
It enters the horizontal direction from the side of the cassette box 5 housed on the upper surface of the base 4. Therefore, if air flows through the flat gap between the plate-like bodies 8 held in a stacked manner in the cassette box 5 and dust or the like adheres to the plate-like body 8, the airflow A is blown off and removed. In addition, the plate member 8 and the crosspiece can be cleaned.
【0019】前記のように斜め方向から水平方向に流れ
た空気は車体1の前方内面に突き当たって下方に流れ、
車体1の下面のフィルター付きファン6の斜下対角線位
置に形成される排出口10から外部へ排出される。本実
施形態では、気流Aの向きと流速を制御するために、車
体1の上方内側に気流制御板9を設けており、また下方
では基台4の前面が丁度下方内側の気流制御板9の役割
を果たす。このことで、収容空間3と前記排出口10と
の間に、漸次断面積が減少する通路11が形成される。
尚、通路11は収容空間3と排出口10の間を漸次断面
積が減少するように形成されていれば、気流制御板9は
任意のものを採用することができる。As described above, the air flowing from the oblique direction to the horizontal direction hits the front inner surface of the vehicle body 1 and flows downward,
The air is discharged to the outside from an outlet 10 formed at a diagonal line below the fan 6 with a filter on the lower surface of the vehicle body 1. In the present embodiment, in order to control the direction and the flow velocity of the airflow A, an airflow control plate 9 is provided on the upper inside of the vehicle body 1, and the front of the base 4 is located just below the airflow control plate 9 on the lower inside. Play a role. As a result, a passage 11 having a gradually decreasing cross-sectional area is formed between the accommodation space 3 and the outlet 10.
In addition, as long as the passage 11 is formed so that the cross-sectional area between the accommodation space 3 and the discharge port 10 gradually decreases, the airflow control plate 9 can employ an arbitrary one.
【0020】通路11が排出口10に向かうにつれて狭
小となることでその部分を通る気流Aの流速が大きくな
り、車体1が前方(図1の右方向)に走行する際はその
気流Aが床面6上を相対的に後方(図1の左方向)へと
水平に流れて、車体1によりダスト等の浮上が阻げられ
るので、従来のように、上方から下方へ排出される気流
で床面6のダスト等が浮上して再び収容空間3内に導入
されるということを防止することができる。As the passage 11 becomes narrower toward the discharge port 10, the flow velocity of the airflow A passing through the part becomes larger, and when the vehicle body 1 travels forward (to the right in FIG. 1), the airflow A becomes the floor. Since it flows horizontally on the surface 6 relatively backward (to the left in FIG. 1) and the floating of dust and the like is prevented by the vehicle body 1, the floor is discharged by the airflow discharged from the upper side to the lower side as in the related art. It is possible to prevent dust and the like on the surface 6 from floating and being introduced into the housing space 3 again.
【0021】[0021]
【発明の効果】以上説明したように本発明によれば、フ
ィルター付きファンの配置を工夫して収容空間内に導入
される気流の向きを制御することによって、カセットボ
ックスに保持されて搬送される板状体に付着するダスト
等を前記気流により除去し、板状体の一層のクリーン化
を図れ、又空気の通路を漸次断面積が減少するように形
成することによって前記気流をスムースに形成でき、更
に空気の排出口をフィルター付きファンの斜下対角線位
置に配することにより、排出空気により浮上した床面の
ダスト等が収容空間内に導入されることを防止すること
ができる。As described above, according to the present invention, the arrangement of the fan with the filter is devised to control the direction of the airflow introduced into the housing space, thereby being held and conveyed by the cassette box. By removing dust and the like adhering to the plate-like body by the air flow, the plate-like body can be further cleaned, and the air flow can be formed smoothly by forming the air passage so as to gradually reduce the cross-sectional area. Further, by arranging the air outlet at a diagonal position diagonally below the fan with a filter, it is possible to prevent the dust and the like on the floor surface floated by the exhaust air from being introduced into the storage space.
【図1】本発明の実施形態における無人搬送車の気流制
御装置の概略構成を示す縦断側面図。FIG. 1 is a vertical sectional side view showing a schematic configuration of an airflow control device of an automatic guided vehicle according to an embodiment of the present invention.
【図2】従来例の概略構成を示す縦断側面図。FIG. 2 is a vertical sectional side view showing a schematic configuration of a conventional example.
1 車体 2 フィルター付きファン 3 収容空間 4 基台 5 カセットボックス 8 板状体 9 気流制御板 10 排出口 11 通路 DESCRIPTION OF SYMBOLS 1 Body 2 Fan with filter 3 Housing space 4 Base 5 Cassette box 8 Plate 9 Air flow control plate 10 Outlet 11 Passage
Claims (1)
持するカセットボックスを挿脱可能に収容する収容空間
を備えた車体と、収容空間に濾過された空気を導入する
フィルター付きファンとを有する無人搬送車において、
フィルター付きファンを車体の上面周辺の適所に前記収
容空間内に斜下に向け空気が導入されるように配置し、
空気の排出口を車体の下面の前記フィルター付きファン
の斜下対角線位置に配置し、前記収容空間と前記排出口
の間を漸次断面積が減少する通路で結んだことを特徴と
する無人搬送車の気流制御装置。1. A vehicle body having an accommodation space for accommodating a cassette box for holding a plate-like body in a vertically stacked manner at intervals, and a fan with a filter for introducing filtered air into the accommodation space. In an automatic guided vehicle having
A filter-equipped fan is arranged at an appropriate position around the upper surface of the vehicle body so that air is introduced obliquely downward into the housing space,
An automatic guided vehicle characterized in that an air discharge port is disposed at a diagonal position diagonally below the fan with a filter on the lower surface of the vehicle body, and the accommodating space and the discharge port are connected by a passage having a gradually decreasing cross-sectional area. Airflow control device.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12738298A JPH11322068A (en) | 1998-05-11 | 1998-05-11 | Air current control device for automated guided vehicle |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12738298A JPH11322068A (en) | 1998-05-11 | 1998-05-11 | Air current control device for automated guided vehicle |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH11322068A true JPH11322068A (en) | 1999-11-24 |
Family
ID=14958616
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12738298A Withdrawn JPH11322068A (en) | 1998-05-11 | 1998-05-11 | Air current control device for automated guided vehicle |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH11322068A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003058706A1 (en) * | 2001-12-27 | 2003-07-17 | Tokyo Electron Limited | Work convey system, unmanned convey vehicle system, unmanned convey vehicle, and work convey method |
KR100505027B1 (en) * | 2002-12-13 | 2005-07-29 | 주식회사 신성이엔지 | Wafer transferring cart |
US7058468B2 (en) | 2002-11-11 | 2006-06-06 | Semiconductor Energy Laboratory Co., Ltd. | Automatic material handling system, production system for semiconductor device, and production management method for semiconductor device |
JP2007015799A (en) * | 2005-07-06 | 2007-01-25 | Taisei Corp | Automatic guided vehicle |
JP2007045606A (en) * | 2005-08-11 | 2007-02-22 | Murata Mach Ltd | Carriage |
-
1998
- 1998-05-11 JP JP12738298A patent/JPH11322068A/en not_active Withdrawn
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003058706A1 (en) * | 2001-12-27 | 2003-07-17 | Tokyo Electron Limited | Work convey system, unmanned convey vehicle system, unmanned convey vehicle, and work convey method |
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