JP4029968B2 - Transport vehicle, manufacturing apparatus and transport system - Google Patents

Abstract

A conveying vehicle includes a running unit (14) that runs along a predetermined carrying path, a cleaning unit (12) that supplies cleaned air, a housing section (13) to which the cleaned air is supplied and in which manufactured articles are housed, a transfer port (11) which is formed in a side of a housing and through which a manufactured article is loaded into or unloaded from the housing section (13), and an air injecting section (19A) that blows out air toward the transfer port (11).in that way, the delivery system with a better environment comparing to the periphery in the conveying vehicle and the manufacturing system avoids the manufactured objects adhering at the carrying opening with impurities and other pollutants.

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a transport vehicle, a manufacturing apparatus, and a transport system. More specifically, the present invention relates to a manufacturing line that is required to maintain a product in a purified atmosphere, such as a liquid crystal display device, a PDP (Plasma Display Panel). ), Organic EL (Electro Luminescence), and other semiconductor device manufacturing lines suitable for local cleaning of a transport vehicle, a manufacturing apparatus, and a transport system.
[0002]
[Prior art]
In the manufacture of semiconductor devices, microfabrication on the order of microns or less is performed on a substrate made of Si wafer, flat glass or the like, so that the adhesion of foreign matters (for example, dust particles) to the substrate being manufactured immediately decreases the product yield. Cause. For this reason, the conventional semiconductor device production line is provided in a clean room where the entire line is managed in an environment with a high cleanliness (cleanness).
[0003]
However, if the entire production line is to be maintained at a high cleanliness, a large-capacity clean room having a large number of cleaning units is required, and a large cost is required for the construction of the clean room. In addition, a cleaning unit including a blower fan and a HEPA filter requires a large amount of running cost because it requires a large amount of power to drive the blower fan. Furthermore, in order to keep the cleanness uniform in a large clean room, a technique for controlling the air flow by pressure control or the like is required, and its maintenance is not easy.
[0004]
As a method for solving such a problem, there has conventionally been a local cleaning technique for improving the cleanliness of only a part of the production line, not the entire production line. The local cleaning technique is a technique for locally increasing the cleanliness only in the space in which the product is moved. For example, it is a method of increasing the cleanliness on a passage through which a semiconductor device being manufactured is transported more than other spaces. In this case, the cost can be reduced as compared with the case of increasing the cleanliness of the entire line.
[0005]
Japanese Patent Application Laid-Open No. 11-238777 discloses an invention relating to a cassette carrying system in which the above-mentioned local cleaning technology is further developed. This system is intended to reduce the clean room maintenance cost by increasing the cleanliness in the loader / unloader of the semiconductor manufacturing apparatus and in the automated guided vehicle more than the cleanliness of the clean room.
[0006]
FIG. 17 is a diagram showing a schematic configuration of a conventional automatic conveyance system described in the above publication. The cassette storage unit 13 of the automatic transport vehicle 1 and the loader / unloader 21 of the semiconductor manufacturing apparatus 2 are respectively provided with transfer ports 11 and 22 for transferring a cassette 17 storing a Si wafer, a glass substrate and the like. ing. The transfer ports 11 and 22 are openings with shutters provided in the same shape and at the same height.
[0007]
By providing such transfer ports 11 and 22, the insides of the automatic transport vehicle 1 and the semiconductor manufacturing apparatus 2 are maintained at high cleanliness. For this reason, the cleanliness of the transport path and the like can be relatively suppressed, and the cost for the construction and maintenance of the clean room can be reduced.
[0008]
[Problems to be solved by the invention]
However, in the method of increasing the cleanliness on the passage where the semiconductor device being manufactured is higher than in other spaces, the foreign matter on the floor surface is wound up during the transfer and the transfer vehicle 1 itself and the semiconductor manufacturing device 2 are moved. Foreign matter adheres to the semiconductor device in the cassette set in the loading slot. For this reason, there existed a problem that the downflow on a passage was strengthened, the shape of the partition wall around a passage part was changed, and the speed of a conveyance vehicle had to be made slow depending on the case.
[0009]
In the conventional automatic transfer system described in the above publication, when the cassette 17 is transferred between the automatic transfer vehicle 1 and the semiconductor manufacturing apparatus 2, the transfer port 11 of the automatic transfer vehicle 1 and the semiconductor manufacturing apparatus 2 is used. , 22 is moved to a position where the two are opposed to each other, and both shutters are opened. At this time, foreign matter adhering to the outside of the shutter rises, and the vicinity of the automatic transport vehicle 1 and the semiconductor manufacturing apparatus 2 where the transfer is performed, in particular, the vicinity of the transfer ports 11 and 22 is contaminated with the raised foreign matter. There was a problem.
[0010]
Further, when the automatic transport vehicle 1 travels, the foreign matter on the floor surface is rolled up, and the foreign matter adheres to the automatic transport vehicle 1 itself and the shutter of the semiconductor manufacturing apparatus 2. For this reason, if an attempt is made to increase the traveling speed of the automated guided vehicle to improve productivity, there is a problem that the influence of contamination near the transfer port becomes larger and the yield is lowered.
[0011]
The present invention has been made in view of the above circumstances, and in a transport system in which the inside of the transport vehicle and the manufacturing apparatus are cleaned from the surrounding environment, the object to be transferred due to foreign matters or the like attached to the transfer port. It is an object of the present invention to provide a transport vehicle, a manufacturing apparatus, and a transport system that prevent a product from being contaminated.
[0012]
In addition, the present invention shortens the transport time by enabling the transfer operation to start when the transport vehicle arrives at the transfer point, reduces the cost of the transport system, or improves the productivity. It is an object of the present invention to provide a transport vehicle, a manufacturing apparatus, and a transport system.
[0013]
[Means for Solving the Problems]
  The transport vehicle according to the first aspect of the present invention includes a traveling unit that travels along a predetermined transport path, a cleaning unit that supplies purified air, and purified air that is supplied to the product. A storage unit to be stored, a transfer port provided on a side surface of the housing where the product is carried into or out of the storage unit, and provided on the moving direction side of the transfer port, to the outside on the transfer port side A first air blowing portion for blowing air toward the first air blowing portion,Along the transfer direction side of the transfer portIt is composed of a plurality of air nozzles arranged at different heights.
[0014]
  The side surface on the transfer port side of the transport vehicle faces the front surface (the surface on which the transfer port is provided) of a manufacturing apparatus (for example, a semiconductor manufacturing apparatus or stocker) that delivers a product to or from the transport vehicle. It becomes. For this reason, an air blowing part is provided on the side surface on the transfer port side of the transport vehicle, and air is blown to blow air toward the front surface of the manufacturing apparatus to remove foreign matters and the like attached to the front surface of the manufacturing apparatus. be able to.In addition, since the plurality of air nozzles are arranged at different heights, if the transport vehicle is run in a state where air is blown from each air nozzle, the side surface of the manufacturing apparatus that delivers the product is wide. Air can be blown against the range. In particular, if each air nozzle is configured to form an air curtain having a spread in the vertical direction, air can be blown more effectively over a wide range. In this case, air can be blown over a wide range of the manufacturing apparatus using a small number of air nozzles, and air can be blown efficiently. For example, air can be blown over a wide range of the transfer port of the manufacturing apparatus. Further, it is particularly desirable to spray the entire surface of the transfer port of the manufacturing apparatus.
[0015]
In addition, the cleaning unit is configured by a blower fan and a filter, and supplies air that has been cleaned at least than air in an atmosphere in which the transport vehicle is used. Moreover, the air from the air blowing section is blown out in a direction having an angle with respect to the side surface on the transfer port side (a direction away from the side surface). For example, it is blown out in the direction of the normal to the side surface, or blown out more toward the traveling direction.
[0016]
In addition, the air blowing portion may be a peripheral portion of the transfer port as long as it is provided on the side surface of the transfer vehicle on the transfer port side, or when an opening / closing means such as a shutter is provided in the transfer port. May be provided in the opening / closing means.
[0017]
  Claim1In the transport vehicle according to the present invention, the first air blowing portion is provided on the traveling direction side of the transfer port. With such a configuration, when the transport vehicle travels to the manufacturing apparatus for the manufactured product and delivers the manufactured product, air is blown to the transfer port of the manufacturing apparatus while the transport vehicle is traveling. Can do. Therefore, before the transport vehicle stops when the transfer port of the transport vehicle reaches the transfer point facing the transfer port of the manufacturing device, an opening / closing means such as a shutter is provided. If so, the air can be blown to the opening / closing means.
[0021]
  Claim3The transport vehicle according to the present invention described in (2) is arranged at different positions in the traveling direction above the transfer port.Air is blown out to the outside on the transfer port sideMultiple air nozzlesWithComposed. For this reason, the air curtain which spreads in a horizontal direction by a some air nozzle can be formed.
[0022]
  Claim4In the transport vehicle according to the present invention, the traveling unit detects an approach to a transfer point where a product is carried in or out and outputs an approach signal, and the first air blowing unit is Based on this approach signal, it is configured to start air blowing before arrival at the transfer point.
[0023]
With such a configuration, when the transport vehicle approaches the transfer point at which the product is transferred during traveling of the transport vehicle, the first air blowing section starts blowing air. For this reason, air can be sprayed with respect to the manufacturing apparatus in which a to-be-manufactured product is delivered during driving | running | working of a conveyance vehicle.
[0024]
  Claim5The transport vehicle according to the present invention described in 1 is configured to include a second air blowing portion that blows air from above the transfer port and forms a downflow on the outer surface of the transfer port.
[0025]
The second air blowing part forms a downflow of air (more desirably, purified air) on the outer surface of the transfer port of itself (conveyance vehicle), thereby removing foreign matters and the like attached to the transfer port of itself. Can be removed. For example, when an opening / closing means such as a shutter is provided at the transfer port, foreign matter or the like attached to the opening / closing means can be removed.
[0026]
  Claim6In the transport vehicle according to the present invention, the traveling unit detects an approach to a transfer point where a product is carried in or out, and outputs an approach signal, and the second air blowing unit is Based on this approach signal, it is configured to start air blowing before arrival at the transfer point.
[0027]
With this configuration, when the transport vehicle approaches the manufacturing apparatus, the second air blowing section forms an air downflow on the outer surface of the transfer port of itself (the transport vehicle), thereby Foreign matters and the like attached to the transfer port can be removed. For example, when an opening / closing means such as a shutter is provided at the transfer port, foreign matter adhering to the opening / closing means can be removed, and useless air blowing can be prevented.
[0028]
  Claim7The transport vehicle according to the present invention described in 1) includes a cleaning unit that supplies purified air, a storage unit that is supplied with the cleaned air and stores the product, and a product to be loaded into the storage unit. Alternatively, a transfer port provided on the side surface of the casing where unloading is performed and air is blown out from above the transfer port to form a down flow on the outer surface of the transfer port.RueAnd a balloon part.
[0029]
  Claim8The transport vehicle according to the present invention includes a travel unit that travels along a predetermined transport path, and the travel unit detects an approach signal to the transfer point where the product is carried in or out, and generates an approach signal. Output and onRecordingThe air blowing unit is configured to start blowing air before arrival at the transfer point based on the approach signal.
[0030]
  According to a ninth aspect of the present invention, there is provided a manufacturing apparatus according to the present invention, a cleaning unit that supplies purified air, a spare chamber that is supplied with the cleaned air and temporarily stores a product, a spare chamber, and an outside A transfer port through which the product is carried in or out, and a first air blowing unit that is provided in the periphery of the transfer port and blows out air toward the outside on the transfer port side. Provided, the first air blowing section,Along the side of the transfer portIt is composed of a plurality of air nozzles arranged at different heights.
[0031]
The front surface of the manufacturing apparatus is a surface that faces the side surface on the transfer port side of a transport vehicle (usually an automatic transport vehicle) that delivers a product to be manufactured. For this reason, by providing an air blowing part on the front surface of the manufacturing apparatus and blowing out air, the air was blown toward the side surface on the transfer port side of the transport vehicle and adhered to the side surface on the transfer port side of the transport vehicle. Foreign matters and the like can be removed.
[0032]
In addition, the cleaning unit is composed of, for example, a blower fan and a filter, and supplies air that has been cleaned more than air in an atmosphere in which at least the manufacturing apparatus is installed. Moreover, the cleaning air from the first air blowing section is blown out in a direction having an angle with respect to the front surface (a direction away from the side surface). For example, it blows out in the normal direction of the side surface, or blows out more toward the arrival direction side of the transport vehicle.
[0033]
Further, the first air blowing part may be a peripheral part of the transfer port as long as it is provided on the side surface on the transfer port side of the manufacturing apparatus, and the transfer port is provided with opening / closing means such as a shutter. If it is, it may be provided in the opening / closing means.
[0034]
  Claim10The manufacturing apparatus according to the present invention described in (1) is configured such that each of the air nozzles forms an air curtain. With such a configuration, when the transport vehicle travels to the manufacturing apparatus and delivers the product to be manufactured, air can be blown to the transfer port of the transport vehicle while the transport vehicle is traveling. Accordingly, before the transfer port of the transport vehicle reaches the transfer point facing the transfer port of the semiconductor manufacturing apparatus and the transport vehicle stops, the transfer port of the transport vehicle (opening and closing means such as a shutter is provided. If it is, air can be blown to the opening / closing means).
[0035]
  Claim11The manufacturing apparatus according to the present invention described above includes a transport vehicle monitoring unit that detects an approach of the transport vehicle and outputs an approach signal, and the first air blowing unit is configured to detect the transport vehicle based on the access signal. It is configured to start air blowing before arrival.
[0036]
  Claim12The manufacturing apparatus according to the present invention described above is configured to include a second air blowing unit that blows air from above the transfer port and forms a downflow on the outer surface of the transfer port.
[0037]
The second air blowing section forms a downflow of the cleaning air on the outer surface of the transfer port of itself (manufacturing apparatus), so that foreign matters and the like attached to the transfer port of the second air can be removed. For example, when an opening / closing means such as a shutter is provided at the transfer port, foreign matter or the like attached to the opening / closing means can be removed.
[0039]
  Claim13The manufacturing apparatus according to the present invention described in (1) includes a transport vehicle monitoring unit that detects the approach of the transport vehicle and outputs an approach signal, and the second air blowing unit is configured to detect the transport vehicle based on the access signal. It is configured to start air blowing before arrival.
[0040]
With such a configuration, when the transport vehicle approaches the manufacturing apparatus, the second air blowing unit starts blowing air. Therefore, air can be blown to the transport vehicle on which the product is delivered while the transport vehicle is traveling, and unnecessary air can be prevented from being blown out.
[0041]
  According to a fourteenth aspect of the present invention, there is provided a transport system according to the present invention, which includes a transport vehicle that transports a workpiece, and a plurality of manufacturing apparatuses that are installed at fixed positions and store or process or store the workpiece. The transport vehicle includes a traveling unit that travels between manufacturing apparatuses, a cleaning unit that supplies purified air, a storage unit that is supplied with purified air and stores a product, and a manufacturing apparatus. A transfer port having an opening and closing means for transferring the product to be transferred between,Provided on the moving direction side from this transfer port,And a first air blowing section that blows air toward the outside on the transfer port side. In addition, the manufacturing apparatus transfers the product between the cleaning unit that supplies the purified air, the storage unit that receives the purified air and stores the product, and the transport vehicle. And a transfer port having an opening / closing means for performing the above. And the first air blowing section isAlong the side on the direction of travel of the transfer port of the transport vehicleIt is comprised by the several air nozzle arrange | positioned by varying height, and it is comprised so that air may be sprayed with respect to the opening-and-closing means of the transfer port of a manufacturing apparatus.
[0042]
With such a configuration, air is blown from the first air blowing portion of the transport vehicle to the opening / closing means of the transfer port of the manufacturing apparatus, for example, an automatic opening / closing means such as a shutter, and foreign matters attached to the opening / closing means are removed. can do.
[0043]
The manufacturing apparatus may be a manufacturing apparatus for processing a product to be manufactured, or a storage apparatus for storing the product to be manufactured. For example, when applied to a semiconductor production line, a stocker is also included.
[0044]
  Claim15The transport system according to the present invention is configured such that the first air blowing section starts blowing air before arrival at the transfer point of the transport vehicle. With such a configuration, air can be blown to a manufacturing apparatus in which a workpiece is delivered while the transport vehicle is traveling.
[0045]
  Claim16In the transport system according to the present invention, the manufacturing apparatus includes a second air blowing unit that blows air, and the second air blowing unit cleans the opening / closing means of the transfer port of the transport vehicle. It is comprised so that the blown air may be blown.
[0046]
With such a configuration, the cleaning air is blown from the second air blowing portion of the manufacturing apparatus to the opening / closing means of the transfer port of the transport vehicle, for example, the automatic opening / closing means such as a shutter, and the foreign matter adhered to the opening / closing means. Can be removed.
[0047]
  Claim17The transport system according to the present invention is configured such that the second air blowing section starts air blow before arrival at the transfer point of the transport vehicle. With such a configuration, air can be blown onto the transport vehicle while the transport vehicle is traveling.
[0048]
  According to an eighteenth aspect of the present invention, there is provided a conveyance system according to the present invention, which includes a conveyance vehicle that conveys a workpiece, and a plurality of manufacturing apparatuses that are installed at a fixed position and store or process or store the workpiece. The transport vehicle includes a traveling unit that travels between manufacturing apparatuses, a cleaning unit that supplies purified air, a storage unit that is supplied with purified air and stores a product, and a manufacturing apparatus. And a transfer port having an opening / closing means for carrying in or carrying out the article to be manufactured. The manufacturing apparatus also includes a cleaning unit for supplying purified air, a storage unit to which the cleaned air is supplied, and the product to be stored, and a transport vehicle. A transfer port having an opening / closing means for carrying out, and first and second air blowing portions for blowing out air are provided. And the first air blowing section isProvided around the transfer port of the manufacturing device, along the side of the transfer portIt is composed of a plurality of air nozzles arranged at different heights, and air is blown against the opening / closing means of the transfer port of the transport vehicle, and the second air blowing part is located above the transfer port of the manufacturing apparatus. The air is blown out from the transfer port, and a downflow is formed on the outer surface of the opening / closing means of the transfer port.
[0049]
With such a configuration, the cleaning air is blown from the first air blowing part of the manufacturing apparatus to the opening / closing means of the transfer port of the transport vehicle, for example, the automatic opening / closing means such as a shutter, and the foreign matter adhered to the opening / closing means. Can be removed. Further, an air flow is formed on the outer surface of the automatic opening / closing means such as a shutter from the second air blowing part of the manufacturing apparatus, and adheres to the opening / closing means. It is possible to remove foreign matters and the like.
[0050]
  Claim19The transport system according to the present invention is configured such that the second air blowing section starts blowing air that has been cleaned before arrival at the transfer point of the transport vehicle. With such a configuration, air can be blown to the manufacturing apparatus while the transport vehicle is traveling.
[0051]
  The transport system according to the present invention as set forth in claim 20 comprises a transport vehicle for transporting a product to be manufactured and a plurality of manufacturing apparatuses that are installed at fixed positions and store or process or store the product to be manufactured. It is. The transport vehicle includes a traveling unit that travels between manufacturing apparatuses, a cleaning unit that supplies purified air, a storage unit that is supplied with purified air and stores a product, and a manufacturing apparatus. And a transfer port having an opening / closing means for carrying in or carrying out the article to be manufactured. The manufacturing apparatus includes a cleaning unit that supplies purified air, a cleaning unit that is supplied with the cleaned air, and a product that is carried in or out of a storage unit that stores the product. And a transfer port having opening / closing means to be performed. And at least one of the transport vehicle or the manufacturing apparatus is disposed in a peripheral portion of the transfer port, and includes an air blowing unit that blows air toward the outside on the transfer port side, the air blowing unit,Along the side of the transfer portA plurality of air nozzles arranged at different heights;Along the upper side of the transfer portIt is comprised by the several air nozzle arrange | positioned by changing the position in the advancing direction of a conveyance vehicle, and it is comprised so that an air tunnel may be formed between the conveyance vehicle and the transfer port of a manufacturing apparatus.
[0052]
DETAILED DESCRIPTION OF THE INVENTION
Embodiment 1 FIG.
FIG. 1 is a schematic view showing one configuration example of an automatic transfer system according to Embodiment 1 of the present invention, and shows an automatic transfer system applied to a manufacturing line for manufacturing a semiconductor device such as a liquid crystal display device. Has been. In the figure, 1A is an automatic conveyance vehicle, 2 is a semiconductor manufacturing apparatus, 3 is a stocker, 4 is a conveyance path, 11 is a transfer port of an automatic conveyance vehicle, 20 is a process processing unit, and 21 is a loader / unloader. , 22 are transfer ports of the semiconductor manufacturing apparatus.
[0053]
This automatic conveyance system is constituted by an automatic conveyance vehicle 1A, a plurality of semiconductor manufacturing apparatuses 2 and a plurality of stockers 3, and is used in a clean room having a relatively low cleanliness. The insides of the automatic transport vehicle 1A, the semiconductor manufacturing apparatus 2 and the stocker 3 are maintained at a higher cleanliness than that of a clean room, and the products to be manufactured are kept in an atmosphere with high cleanliness by local cleaning. . For example, the inside of the clean room is about 10,000 to 100,000, and the inside of the automatic transport vehicle 1, the semiconductor manufacturing apparatus 2, and the stocker 3 is about 100.
[0054]
The semiconductor manufacturing apparatus 2 is a semiconductor manufacturing apparatus for performing process processing such as film formation and etching on a substrate made of flat glass or the like, and is fixedly installed at a predetermined position in a clean room. The semiconductor manufacturing apparatus 2 includes a process processing unit 20 and a loader / unloader 21.
[0055]
The process processing unit 20 includes an airtight chamber that performs a process for processing a substrate. The loader / unloader 21 is a spare chamber used when the substrate is carried into or out of the process processing unit 20, and temporarily stores the substrate before or after the process. For this reason, the loader / unloader 21 is supplied with air cleaned by a cleaning unit (not shown), filled with the cleaning air and maintained at a positive pressure with respect to the surrounding environment (in the clean room), It is maintained at a higher level of cleanliness than the surrounding environment.
[0056]
The transfer port 22 is an opening for carrying the substrate into or out of the loader / unloader 21 and is provided on the front surface of the housing on the conveyance path 4 side. A shutter that is opened and closed by automatic control is attached to the transfer port 22. Usually, the transfer port 22 is closed by a shutter and is opened only when a substrate is carried in and out.
[0057]
The stocker 3 is a storage device for temporarily storing a substrate. The inside of the stocker 3 is supplied with cleaning air by a cleaning unit (not shown) and is also supplied to the surrounding environment (in a clean room), like a loader / unloader. On the other hand, it is maintained at a positive pressure and is maintained at a higher degree of cleanliness than the surrounding environment.
[0058]
The automatic transport vehicle 1A is an unmanned transport vehicle such as an RGV (rail guided vehicle), an AGV (Auto Guided Vehicle), or a traverser, and travels on the transport path 4 by automatic control, between different semiconductor manufacturing apparatuses 2 and between different stockers 3. Alternatively, the substrate is transported between the semiconductor manufacturing apparatus 2 and the stocker 3. At the time of transport, a plurality of substrates are usually stored in a cassette, and one or more cassettes are stored in one automatic transport vehicle 1A.
[0059]
The transfer port 11 is an opening for loading or unloading the cassette to / from the automatic transport vehicle 1A, and is a side surface (a housing surface parallel to the traveling direction) viewed from the traveling direction. It is provided on the side surface. Further, the transfer port 11 has the same shape as the transfer port 22 of the semiconductor manufacturing apparatus 2 and is disposed at the same height so as to face the transfer port 22 of the semiconductor manufacturing apparatus 2. Can be made.
[0060]
Furthermore, a shutter that is opened and closed by automatic control is attached to the transfer port 11. Normally, the transfer port 11 is closed by the shutter and is opened only when the cassette is loaded and unloaded. In addition, since the automatic conveyance vehicle 1A shown in FIG. 1 is transferred in both directions, the transfer port 11 is provided on both sides, but when the transfer direction is only on one side, It is sufficient if the transfer port 11 is provided only on the one side surface.
[0061]
This automatic transport vehicle 1A travels while performing air blow with purified air on the semiconductor manufacturing apparatus 2 to remove foreign matter adhering to the front surface (surface on the transfer port 22 side) of the semiconductor manufacturing apparatus 2. be able to. Details thereof will be described below with reference to FIGS.
[0062]
2 and 3 are configuration diagrams showing the automatic conveyance vehicle 1A of FIG. 1 in more detail. FIG. 2 shows an internal schematic configuration viewed from the traveling direction, and FIG. 3 shows the traveling direction. The external view at the time of seeing from the side with respect to is shown. In the figure, 1A is an automatic transport vehicle, 11 is a transfer port, 12 is a cleaning unit, 13 is a storage unit, 14 is a traveling unit, 15 is a blower fan, 16 is a cleaning filter, 17 is a cassette, and 18A is an air nozzle. , 19A is an air blowing part.
[0063]
The cleaning unit 12 is an air cleaning device called FFU (Fan Filter Unit) that supplies cleaned air, and includes a blower fan 15 and a cleaning filter 16. As the cleaning filter 16, an HEPA (High Efficiency Particulate Air) filter, an ULPA (Ultra Low Particulate Air) filter, or the like is used.
[0064]
The outside air and the circulating air from the storage unit 13 are sent to the cleaning filter 16 by the blower fan 15, cleaned by the cleaning filter 16, and then sent to the storage unit 13 and the air nozzle 18 </ b> A. The storage unit 13 is supplied with clean air and is maintained at a positive pressure with respect to the surrounding environment (in the clean room), and is maintained at a higher degree of cleanliness than the surrounding environment.
[0065]
A large number of air nozzles 18A constituting an air blowing portion 19A are arranged around the shutter of the transfer port 11 and its periphery, and air blow is performed from the entire surface of the shutter and its periphery toward the outside. The peripheral air nozzle 18 </ b> A is disposed outside the transfer port 11 so as to be adjacent to the peripheral edge of the transfer port 11. Moreover, it arrange | positions toward the transfer port in the upward direction, the left direction, and the right direction, and is not arrange | positioned in the downward direction (at least a part of downward direction, for example, center part). That is, the air nozzle 18 </ b> A is arranged so as to surround the periphery of the transfer port 11 excluding the downward direction.
[0066]
Note that the air blown from the air nozzle 18A is desirably air cleaned by the cleaning unit 12. Further, the supply of the cleaning air to the air nozzle 18 </ b> A may be performed by a power fan (not shown) different from the blower fan 15. Further, the air blowing unit 19A can perform air blowing by using the wind pressure that the automatic guided vehicle 1A receives during traveling. For example, if air is taken in from the front of the automatic conveyance vehicle 1A and the taken-in air is blown out from the nozzle, the power for blowing out the air can be reduced or made unnecessary.
[0067]
The travel unit 14 travels along a predetermined transport route, moves to a predetermined semiconductor manufacturing apparatus 2 or the stocker 3, and performs travel control of the automatic transport vehicle 1A so as to stop at a predetermined transfer point.
[0068]
FIG. 4 is a diagram illustrating a state where the automatic transport vehicle 1A performs air blowing. The automatic transport vehicle 1A blows air from the entire surface of the shutter and the periphery thereof toward the outside in a direction substantially normal to the side surface of the housing. For this reason, the foreign matter adhering to the shutter is removed, and the air blow is performed on the front surface of the semiconductor manufacturing apparatus 2 facing the side surface of the automatic transport vehicle 1A. Is removed.
[0069]
Since the transfer port 11 of the automatic transport vehicle 1A has the same shape as the transfer port 22 of the semiconductor manufacturing apparatus 2 and is disposed at the same height, the entire surface of the transfer port 11 of the automatic transport vehicle 1A and its transfer By performing air blow from the periphery, air blow can be performed on the entire surface of the transfer port 22 of the semiconductor manufacturing apparatus 2, and foreign matters and the like attached to the shutter of the transfer port 22 of the semiconductor manufacturing apparatus 2 are removed. be able to.
[0070]
FIG. 5 is an explanatory diagram showing the timing of air blow, in which the position of the automatic transport vehicle 1A is shown in the horizontal direction, and the passage of time is shown in the vertical direction, from (a) to (h). Time has passed in order.
[0071]
First, when the automatic transport vehicle 1A approaches the semiconductor manufacturing apparatus 2 that transfers the cassette, the traveling unit 14 detects the approach to the semiconductor manufacturing apparatus 2 and outputs an approach signal. Based on this approach signal, the air blowing portion 19A starts blowing air and air blow is formed ((a) in the figure). Here, since the traveling unit 14 of the automatic guided vehicle 1A generally has information such as the current position of the own vehicle, a destination, and a traveling route as information for performing automatic traveling, the traveling unit 14 is based on these information. However, apart from the automatic travel control, the approach signal may be generated using a detection unit that detects the approach of the semiconductor manufacturing apparatus 2.
[0072]
Next, after decelerating the automatic conveyance vehicle 1A ((b) in the figure), the traveling unit 14 stops at the transfer point where the automatic conveyance vehicle 1A and the transfer ports 11 and 22 of the semiconductor manufacturing apparatus 2 face each other. Let The automatic transport vehicle 1A starts air blowing before arriving at the transfer point and travels while performing air blow to the semiconductor manufacturing apparatus 2. Therefore, when the automatic conveyance vehicle 1A arrives at the transfer point, Air blow to the transfer port 22 is sufficiently performed.
[0073]
Further, based on the approach signal, before the automatic transport vehicle 1A arrives at the transfer point, the shutter opening operation of the automatic transport vehicle 1A and the semiconductor manufacturing apparatus 2 is started ((c) in the figure). The shutter opening operation is completed before arrival at the transfer point. Therefore, when the automatic transport vehicle 1A stops at the transfer point, the shutter is fully open, and immediately, from the automatic transport vehicle 1A to the semiconductor manufacturing apparatus 2 (or automatic transfer from the semiconductor manufacturing apparatus 2). The cassette 17 is transferred (to the car 1A) ((d) in the figure). The transfer of the cassette 17 is performed by a transfer fork provided in the automatic conveyance vehicle 1A.
[0074]
When the transfer of the cassette 17 is completed, the traveling unit 14 causes the automatic conveyance vehicle to travel again. At this time, simultaneously with the start of traveling, the shutter closing operation of the automatic guided vehicle 1A and the semiconductor manufacturing apparatus 2 is started ((e) in the figure), and the shutter is completely closed during the traveling ((f) in the figure). ). Then, while accelerating to a predetermined speed and traveling at a constant speed, head to the next transfer point ((g) (h) in the figure).
[0075]
FIG. 6 is a diagram illustrating a state when the cassette is transferred between the automatic conveyance vehicle 1 </ b> A and the semiconductor manufacturing apparatus 2. 5 in the figure is a clean tunnel. When transfer is performed between the automatic transport vehicle 1A and the semiconductor manufacturing apparatus 2 at the transfer point, the shutters of the transfer ports 11 and 22 facing each other are opened. At this time, since the inside of the storage unit 13 and the loader / unloader 21 of the automatic transport vehicle 1A are both more positive than the surrounding environment, the clean tunnel 5 is formed in the space between the transfer ports 11 and 22. Is done.
[0076]
The clean tunnel 5 is a highly clean space filled with purified air, and the cassette 17 passes through the clean tunnel 5 from the automatic transport vehicle 1A to the semiconductor manufacturing apparatus 2 or from the semiconductor. Transferred from the manufacturing apparatus 2 to the automatic conveyance vehicle 1A. For this reason, the cassette 17 is not transferred through the atmosphere with low cleanliness.
[0077]
According to the present embodiment, the air blowing portion is provided on the side surface of the automatic transport vehicle 1 </ b> A where the transfer port 11 is provided, and air blowing is performed toward the front surface of the semiconductor manufacturing apparatus 2. For this reason, the foreign material adhering to the front surface of the semiconductor manufacturing apparatus 2 can be removed by air blow. Therefore, when the shutter of the transfer port 22 is opened, foreign matter adhering to the shutter or its periphery can be prevented or suppressed.
[0078]
In addition, a large number of air nozzles 18A are provided in the transfer port 11 of the automatic transport vehicle 1A, and air is blown from the entire surface and the periphery of the transfer port 11. Therefore, air blow is performed on the entire surface and the periphery of the transfer port 22 of the semiconductor manufacturing apparatus 2 provided on the front surface of the semiconductor manufacturing apparatus 2 and at a position facing the transfer port 11 of the automatic transport vehicle 1A. be able to.
[0079]
Further, when the automatic transport vehicle 1A approaches the semiconductor manufacturing apparatus 2 to be transferred, the air blowing unit 19A starts blowing air. For this reason, air blow is performed during the traveling of the automatic conveyance vehicle 1A, and the air blow is completed before reaching the transfer point. For this reason, the time required for transfer can be shortened.
[0080]
Further, when the automatic transport vehicle 1A approaches the semiconductor manufacturing apparatus 2, the shutter opening operation of the transfer port 11 is performed, and the shutter opening operation is completed before arrival at the transfer point. For this reason, the transfer can be started immediately upon arrival at the transfer point, and the time required for the transfer can be shortened. In this way, since the conveyance time can be shortened, the productivity can be improved if it is applied to a production line.
[0081]
Embodiment 2. FIG.
In the first embodiment, an example in which the air blowing portion is provided on the entire surface of the transfer port of the automatic transport vehicle has been described. However, in the present embodiment, the air blowing portion is located on the traveling direction side of the transfer port. The case where it is provided will be described. Moreover, the case where the air blowing part forms the air curtain which spreads in the perpendicular direction is demonstrated.
[0082]
FIG. 7 is a schematic diagram showing an example of the configuration of an automatic conveyance system according to Embodiment 2 of the present invention. In the figure, 1B is an automatic conveyance vehicle, 2 is a semiconductor manufacturing apparatus, 3 is a stocker, 4 is a conveyance path, 18B is an air nozzle, 19B is an air blowing unit, 20 is a process processing unit, 21 is a loader / unloader, 11 and 22 Is a transfer port.
[0083]
The air blowing portion 19B is provided on the side surface in the traveling direction of the automatic transport vehicle 1B and on the surface on the transfer port 11 side. Moreover, it is provided on the side in the traveling direction from the transfer port 11 on the side surface. The air blowing portion 19B blows air from the side surface to the outside, that is, at an angle with respect to the traveling direction and away from the side surface. Typically, as shown in FIG. 7, air blow is performed in the normal direction of the side surface.
[0084]
In FIG. 7, the air blowing portion 19 </ b> B is provided in the peripheral portion adjacent to the transfer port 11, but may be provided at a position away from the transfer port 11. In FIG. 7, the transfer port 11 and the air blowing portion 19 </ b> B are provided on both side surfaces of the automatic transport vehicle 1 </ b> B, but the transfer port 11 is provided only on one side, and transfer is performed only on the one side. In such a case, the air blowing portion 19B may be provided only on the same side surface.
[0085]
FIG. 8 is a diagram showing a state where the automatic transport vehicle 1B of FIG. 7 performs air blowing. The automatic transport vehicle 1B detects the approach to the semiconductor manufacturing apparatus 2 that is the next transfer partner, and is provided on the transfer direction 11 side where the transfer is performed before reaching the transfer point. Air is blown out from the blowout portion 19B to form an air blow.
[0086]
The air blowing portion 19B is composed of a plurality of air nozzles 18B arranged at different heights, and an air curtain having a spread in the vertical direction is formed by air blow from each air nozzle 18B. For this reason, if the air blow is performed while the automatic transport vehicle 1B is traveling, the air curtain having a spread in the vertical direction can be moved in the horizontal direction, and the air blow can be efficiently performed on the front surface of the semiconductor manufacturing apparatus 2. It can be carried out.
[0087]
Here, the upper air nozzle 18B constituting the air blowing portion 19B is attached to a height equal to or higher than the upper edge of the transfer port 11 of the automatic transport vehicle 1B, and the lower air nozzle 18B is the lower edge of the transfer port 11. It is desirable to be attached at a height of less than the part. If the blowing portion has such a configuration, the air curtain can cover the upper edge portion to the lower edge portion of the transfer port 22 of the semiconductor manufacturing apparatus 2, and the entire surface of the transfer port 22 of the semiconductor manufacturing apparatus 2 can be covered. Air blow can be performed.
[0088]
In addition, the air blowing unit 19B detects the approach to the semiconductor manufacturing apparatus 2 that is the next transfer partner, and starts the air blow before reaching the transfer point. At the time of reaching, the air blow to the transfer port 22 of the semiconductor manufacturing apparatus 2 is sufficiently performed. In particular, when the air blowing unit 19B reaches the transfer point by starting air blow before facing the transfer port 22 of the semiconductor manufacturing apparatus 2 as a transfer partner, Air blow is sufficiently performed on the entire surface.
[0089]
When the automatic transport vehicle 1B can travel in both directions, that is, when it can move forward and backward, it is on the same side surface where the transfer port 11 is provided and is horizontal to the transfer port 11. By providing the air blowing portions 19B on both sides of the direction, the above-described air blow can be performed even when traveling in any direction.
[0090]
Embodiment 3 FIG.
In the first and second embodiments, the example in which the air blowing portion is provided on the side surface of the automatic transport vehicle has been described. However, in the present embodiment, the case in which the air blowing portion is provided in the corner portion of the automatic transport vehicle will be described. Further, the case where the air blowing portion blows air toward the traveling direction side as compared with the normal direction of the side surface of the automatic conveyance vehicle 1A will be described.
[0091]
FIG. 9 is a schematic diagram showing a configuration example of an automatic conveyance system according to Embodiment 3 of the present invention. In the figure, 1C is an automatic conveyance vehicle, 2 is a semiconductor manufacturing apparatus, 3 is a stocker, 4 is a conveyance path, 18C is an air nozzle, 19C is an air blowing unit, 20 is a process processing unit, 21 is a loader / unloader, and 22 is a transfer unit. It is a loading gate.
[0092]
The blowing portion 19C is provided at a corner portion of the automatic conveyance vehicle 1C. This blowing portion is provided at the front side in the traveling direction and at the side corner provided with the transfer port 11. This air blowing portion 19C can also form an air blow in the same direction as in the second embodiment, but here, from the side to the outside and compared to the normal direction of the side, Air blows in the direction of travel.
[0093]
In FIG. 9, the transfer port 11 and the air blowing portion 19 </ b> C are provided on both side surfaces of the automatic transport vehicle 1 </ b> C, but the transfer port 11 is provided only on one side, and transfer is performed only on the one side. In that case, the air blowing portion 19C may be provided only on the same side surface.
[0094]
FIG. 10 is a diagram illustrating a state where the automatic conveyance vehicle 1C of FIG. 9 performs air blowing. When the automatic transport vehicle 1C detects the approach to the semiconductor manufacturing apparatus 2 to which the transfer is performed, the automatic transport vehicle 1C draws air from the blowing portion 19C provided in the corner portion on the moving direction side and the transfer port 11 side used for the transfer. Blow out to form an air blow.
[0095]
As in the case of the second embodiment, the air blowing portion 19C is composed of a plurality of air nozzles 18C arranged at different mounting positions, and spreads in the vertical direction by air blow from each air nozzle. An air curtain is formed.
[0096]
From each air nozzle 18C, air is blown in the traveling direction rather than the normal direction of the side surface, and air is blown to the front surface of the semiconductor manufacturing apparatus 2 in front of the mounting position of the air blowing portion.
[0097]
In addition, when the automatic conveyance vehicle 1C can travel in both directions, that is, when forward and backward movements are possible, air blowing is performed at the corners on both sides (front and rear) of the side surface on which the transfer port 11 is provided. By providing the portion 19C, the above-described air blow can be performed even when traveling in any direction.
[0098]
Embodiment 4 FIG.
In each of the above embodiments, an example has been described in which an air blowing portion is provided in an automatic transport vehicle to remove foreign matters and the like attached to a transfer port of a semiconductor manufacturing apparatus. In this embodiment, semiconductor manufacturing is performed. A case where an air blowing portion is provided in the apparatus 2 to remove foreign matters and the like attached to the transfer port 22 of the semiconductor manufacturing apparatus 2 will be described.
[0099]
FIG. 11 is a cross-sectional view showing a schematic structure of a semiconductor manufacturing apparatus 2A according to Embodiment 4 of the present invention, and is a view of a semiconductor manufacturing apparatus 2A applied to an automatic transfer system similar to FIG. It is. In the figure, 2A is a semiconductor manufacturing apparatus, 17 is a cassette, 20 is a process processing unit, 21 is a loader / unloader, 22 is a transfer port, 23 is a cleaning unit, 24 is a blower fan, 25 is a cleaning filter, and 26A is An air nozzle 27A is an air blowing portion.
[0100]
The cleaning unit 23 is an air cleaning device that supplies purified air, and includes a blower fan 24 and a filter 25. As the filter 25, a HEPA filter, a ULPA filter, or the like is used. The outside air or the circulating air circulated from the loader / unloader 21 is sent to the cleaning filter 25 by the blower fan 24, cleaned by the cleaning filter 25, and then sent to the loader / unloader 21 and the air nozzle 26 </ b> A.
[0101]
The air blowing portion 27 </ b> A includes a plurality of air nozzles 26 </ b> A provided above the transfer port 22. Each air nozzle 26 </ b> A is provided with a different position in the horizontal direction (direction parallel to the front surface), and forms an air curtain that flows downward along the front surface of the semiconductor manufacturing apparatus 2. That is, a downflow is formed on the outer surface of the transfer port 22, and foreign matters and the like attached to the transfer port 22 can be removed.
[0102]
The supply of the cleaning air to the air nozzle 26A may be performed by a power fan (not shown) different from the blower fan 24. The air blown out from the air nozzle 26A is preferably air cleaned by the cleaning unit 23, but may be air in an ambient environment with a low cleanliness.
[0103]
FIG. 12 is a diagram showing a state in which the semiconductor manufacturing apparatus 2A of FIG. 11 performs air blowing. The semiconductor manufacturing apparatus 2 </ b> A has a transport vehicle monitoring unit (not shown) that monitors the automatic transport vehicle 1 as a transfer partner and detects the approach of the automatic transport vehicle 1. When this transport vehicle monitoring unit detects the approach of an automatic transport vehicle that is a transfer partner, it outputs a detection signal. Note that the semiconductor manufacturing apparatus 2A may not be provided with the carrier monitoring unit, and may be configured such that an approach signal is input from the outside through a signal line or the like (not shown).
[0104]
Based on the detection signal, air is blown out from the blowing portion 27 provided above the transfer port 22 where the transfer is performed, before arrival at the transfer point, and onto the outer surface of the transfer port 22. Form a downflow. For this reason, the foreign material adhering to the transfer port 22 shutter can be removed by the downflow until the automatic transport vehicle reaches the transfer point.
[0105]
Embodiment 5. FIG.
In each of the above-described embodiments, an example in which the foreign matter attached to the transfer port of the semiconductor manufacturing apparatus is removed by air blow has been described. In this embodiment, the foreign matter attached to the transfer port of the automatic transport vehicle. A case of removing the above will be described.
[0106]
FIG. 13 is a cross-sectional view showing a schematic structure of a semiconductor manufacturing apparatus according to Embodiment 5 of the present invention, and is a view of a semiconductor manufacturing apparatus 2B applied to an automatic transfer system similar to FIG. is there. FIG. 14 is a view showing a state in which the semiconductor manufacturing apparatus 2B of FIG. 13 performs air blowing. In the figure, 1 is an automatic transport vehicle, 2B is a semiconductor manufacturing apparatus, 20 is a process processing unit, 21 is a loader / unloader, 22 is a transfer port, 23 is a cleaning unit, 24 is a blower fan, 25 is a cleaning filter, 28B is an air nozzle and 29B is an air blowing part.
[0107]
The shutter of the transfer port 22 of the semiconductor manufacturing apparatus 2B is provided with an air blowing part similar to the automatic conveyance vehicle 1A in the first embodiment. That is, the shutter of the transfer port 22 is provided with a large number of air nozzles 28B constituting the air blowing portion 29B, and air blow is performed outward from the entire surface of the shutter and its periphery.
[0108]
The semiconductor manufacturing apparatus 2B blows air from the entire surface of the shutter and its periphery toward the outside in the normal direction with respect to the front surface of the housing. For this reason, foreign matter or the like attached to the transfer port 22 of the semiconductor manufacturing apparatus 2B is removed, and air blow is performed on the side surface of the automatic transport vehicle 1 facing the front surface of the semiconductor manufacturing apparatus 2B. Foreign matter and the like adhering to the side surfaces of the surface are removed.
[0109]
Since the transfer port 22 of the semiconductor manufacturing apparatus 2B is disposed at a position facing the transfer port 11 of the automatic transport vehicle 1, air is blown from the entire shutter surface of the transfer port 22 of the semiconductor manufacturing apparatus 2B. In addition, air blow can be performed on the entire surface of the transfer port 11 of the automatic transport vehicle 1, and foreign matters and the like attached to the shutter of the transfer port 11 of the automatic transport vehicle 1 can be removed.
[0110]
When the semiconductor manufacturing apparatus 2B detects the approach of the automatic transfer vehicle that is the transfer partner, the air blower 29B provided in the transfer port 22 where the transfer is performed is air blown before arrival at the transfer point. Is formed, and air is blown onto the transfer port 11 of the traveling automatic transport vehicle 1. For this reason, the foreign material adhering to the shutter of the transfer port 11 can be removed before the automatic transport vehicle reaches the transfer point.
[0111]
In the present embodiment, as a method of removing foreign matter adhering to the transfer port of the automatic conveyance vehicle, the same air blowing as that of the automatic conveyance vehicle 1A in the first embodiment is applied to the shutter of the transfer port 22 of the semiconductor manufacturing apparatus 2B. However, as in the second embodiment, air blowing portions may be provided on both sides of the transfer port, and air blowing may be performed from the air blowing portion in the direction in which the transport vehicle approaches. As in the third embodiment, the air blowing portion may be provided at the corner portion of the semiconductor manufacturing apparatus.
[0112]
Embodiment 6 FIG.
In the fourth and fifth embodiments, examples have been described in which foreign matter or the like adhering to the transfer port of the semiconductor manufacturing apparatus or automatic transport vehicle is removed by air blow. However, in this embodiment, the air blow is further cleaned. An example in the case of using for tunnel formation will be described.
[0113]
FIG. 15 is a diagram showing a state in which the semiconductor manufacturing apparatus according to the sixth embodiment of the present invention performs air blowing. An automatic transport vehicle 1D and a semiconductor manufacturing apparatus 2C applied to the automatic transport system similar to FIG. It is shown. In the figure, 1D is an automatic conveyance vehicle, 2C is a semiconductor manufacturing apparatus, 11 and 22 are transfer ports, 23 is a cleaning unit, 19C, 27A, 27B and 29C are air blowing sections, and 18C and 28C are air nozzles.
[0114]
When the automatic transport vehicle 1D approaches the semiconductor manufacturing apparatus 2C to be transferred, an air blowing section provided above the transfer port 11 where the transfer is performed before arrival at the transfer point. The air blow from 27B is started, and the air blow from the air blowing part 19C provided in the peripheral part of the transfer port 11 is started.
[0115]
Further, when the semiconductor manufacturing apparatus 2C detects the approach of the automatic transport vehicle 1 as a transfer partner, the air blowing unit provided above the transfer port 22 where the transfer is performed before arrival at the transfer point. The air blow from 27A is started, and the air blow from the air blowing part 29C provided in the peripheral part of the transfer port 22 is started. If air blows are simultaneously performed from the air blowing parts 27A and 29C, they will cancel each other out. First, after air blowing from the air blowing part 27A, air blowing from the air blowing part 29C is performed. It is desirable.
[0116]
The air blowing unit 27B is different from the air blowing unit 27A of the semiconductor manufacturing apparatus 2A shown in FIGS. 11 and 12 (Embodiment 4) in that the automatic blowing vehicle 1D is provided. That is, the air blowing part 27B is composed of a plurality of air nozzles provided above the transfer port 11 and forms an air curtain that flows downward along the side surface on the transfer port 11 side of the automatic transport vehicle. For this reason, a downflow is formed on the outer surface of the transfer port 11, and foreign matters and the like attached to the transfer port 11 can be removed.
[0117]
The air blowing portion 19 </ b> C is provided in the peripheral portion of the transfer port 11, and includes a plurality of air nozzles that blow out air that has been cleaned toward the outside, and forms an air curtain around the transfer port 11. The air nozzle 18C is disposed outside the transfer port 11 so as to be adjacent to the peripheral edge of the transfer port 11 so as to surround the periphery of the transfer port 11, and is generally legal relative to the front surface of the casing of the automatic transport vehicle 1D. Air blow is performed outward in the linear direction, and a cylindrical air curtain surrounding the transfer port 11 is formed.
[0118]
As shown in FIG. 15, the air nozzle 18C is arranged in the upward direction, the left direction, and the right direction toward the transfer port 11, and in the downward direction (at least part of the downward direction, for example, the central portion). It is not necessary to arrange. That is, the air nozzle 18C may be disposed so as to surround the periphery of the transfer port 11 excluding the downward direction.
[0119]
In this case, an air curtain that extends in the horizontal direction above the transfer port 11 is formed by the air nozzles 18 </ b> C arranged at different positions above the transfer port 11. In addition, air curtains that extend in the vertical direction on both sides of the transfer port 11 are formed by the air nozzles 18 </ b> C arranged at different positions in the vertical direction on the left and right sides of the transfer port 11. In this way, a cylindrical air curtain surrounding the transfer port 11 is formed except in the downward direction.
[0120]
The air blowing portion 27A is the same as that shown in FIGS. 11 and 12 (Embodiment 4). The air blowing portion 29C is provided in the peripheral portion of the transfer port 22 adjacent to the transfer port 22, and is composed of a plurality of air nozzles that blow out the cleaned air toward the outside. An air curtain is formed around. In FIG. 15, an air nozzle 28 </ b> C is arranged outside the transfer port 22 so as to surround the transfer port 22, and the air blow is directed toward the outside in the normal direction with respect to the front surface of the housing of the semiconductor manufacturing apparatus 2 </ b> C. And a cylindrical air curtain surrounding the transfer port 22 is formed.
[0121]
FIG. 16 is a diagram illustrating a state when the cassette is transferred between the semiconductor manufacturing apparatus 2C and the automatic transport vehicle 1D of FIG. 5 in the figure is a clean tunnel. When transfer is performed between the automatic transport vehicle 1D and the semiconductor manufacturing apparatus 2C at the transfer point, the shutters of the transfer ports 11 and 22 facing each other are opened.
[0122]
At this time, a clean tunnel 5 is formed in the space between the transfer ports 11 and 22 by the positive pressure in the loader / unloader 21 and the automatic transport vehicle 1, and the air blowing portion 29 </ b> C or the automatic transport A clean tunnel 5 is formed by at least one of the air blowing portions 19C of the vehicle 1D, and the clearance portion between the automatic transfer device and the manufacturing device is kept clean, so that air with low cleanliness around the peripheral portion hardly flows into the clean tunnel. . The cassette 17 passes through the clean tunnel 5 formed in this way, and is transferred from the automatic transport vehicle 1A to the semiconductor manufacturing apparatus 2 or from the semiconductor manufacturing apparatus 2 to the automatic transport vehicle 1A.
[0123]
The air blow of at least one of the automatic transport vehicle or the manufacturing apparatus starts before the automatic transport vehicle 1D arrives at the semiconductor manufacturing apparatus 2C, opens the shutter, completes the transfer operation after stopping the transport vehicle, and starts. But keep blowing until the shutter closes.
[0124]
In this way, when the automatic transport vehicle 1D stops at a predetermined position with the transfer port 22 of the semiconductor manufacturing apparatus 2C being cleaned, the automatic transport vehicle 1D can move between the transfer port 11 and the transfer port 22. An air tunnel is formed between them, and dust can be prevented from adhering to the cassette during transfer. Further, since the air blow is continued while the shutters are closed, when the automatic transport vehicle 1D starts, even if dust rolls up, air with low cleanliness around the transfer ports 11 and 22 is clean tunnel. It can be made difficult to flow in.
[0125]
In each of the above embodiments, an example of an automatic transfer system for a semiconductor device production line has been described. However, the application target of the present invention is not limited to this, and an atmosphere in which a workpiece is cleaned is used. It can be applied to various transport systems that are required to be maintained inside. Moreover, it is applicable also to the conveyance system which conveys various to-be-conveyed objects other than a to-be-manufactured product between two or more accommodation apparatuses which accommodate these.
[0126]
The semiconductor device in the above embodiment includes not only a semiconductor device for inputting / outputting an electric signal but also a display device such as a liquid crystal, a PDP, and an organic EL. The present invention is used in these production lines. Of course, the present invention can also be applied to a transfer system.
[0127]
Moreover, although each said embodiment demonstrated the example in case a conveyance system is used in a clean room, the automatic conveyance system by this invention is not necessarily limited to what is used in a clean room. The present invention is applicable to various automatic transfer systems in which the cleanliness of the storage unit of the product in the automatic transfer vehicle 1, the semiconductor manufacturing apparatus 2, and the stocker 3 is higher than the cleanliness of the atmosphere in which the transfer system is used. it can.
[0128]
Moreover, although each said embodiment showed the example of the automatic conveyance system, the application range of this invention is not limited to the thing regarding an automatic conveyance system, It is the same also about the manual line which conveys a trolley manually. Can be applied to.
[0129]
Further, the above embodiments can be used in appropriate combination.
[0130]
【The invention's effect】
According to the present invention, in a transport system for transporting an article to be manufactured by an automatic transport vehicle whose interior is cleaned from the surrounding environment, between the manufacturing apparatuses whose interior is cleaned from the surrounding environment, the transport vehicle and the manufacturing apparatus It is possible to prevent the transferred product from being contaminated by foreign matter or the like adhering to the transfer port.
[0131]
In addition, since the transfer time can be shortened and the transfer time can be shortened, the cost required for the production system can be reduced and the productivity can be improved when applied to the production line. it can.
[Brief description of the drawings]
FIG. 1 is a schematic diagram showing a configuration example of an automatic conveyance system according to Embodiment 1 of the present invention.
FIG. 2 is a diagram showing a schematic internal configuration of the automatic guided vehicle 1A shown in FIG. 1 as viewed from the traveling direction.
FIG. 3 is an external view of the automatic guided vehicle 1A shown in FIG. 1 as viewed from the side with respect to the traveling direction.
FIG. 4 is a diagram showing a state in which the automatic transport vehicle 1A performs air blowing.
FIG. 5 is an explanatory diagram showing air blow timing.
6 is a view showing a state when a cassette is transferred between the automatic conveyance vehicle 1A and the semiconductor manufacturing apparatus 2. FIG.
FIG. 7 is a schematic diagram showing a configuration example of an automatic conveyance system according to a second embodiment of the present invention.
FIG. 8 is a diagram showing a state where the automatic conveyance vehicle 1B of FIG. 7 performs air blow.
FIG. 9 is a schematic diagram showing a configuration example of an automatic conveyance system according to a third embodiment of the present invention.
10 is a view showing a state where the automatic conveyance vehicle 1C of FIG. 9 performs air blowing. FIG.
FIG. 11 is a sectional view showing a schematic structure of a semiconductor manufacturing apparatus 2A according to a fourth embodiment of the present invention.
12 is a diagram showing a state in which the semiconductor manufacturing apparatus 2A of FIG. 11 performs air blow.
FIG. 13 is a sectional view showing a schematic structure of a semiconductor manufacturing apparatus according to a fifth embodiment of the present invention.
14 is a view showing a state in which the semiconductor manufacturing apparatus 2B of FIG. 13 performs air blowing. FIG.
FIG. 15 is a diagram showing a state where an automated guided vehicle and a semiconductor manufacturing apparatus according to a sixth embodiment of the present invention perform air blowing.
16 is a view showing a state when a cassette is transferred between the semiconductor manufacturing apparatus 2C of FIG. 15 and the automatic transport vehicle 1. FIG.
FIG. 17 is a diagram showing a schematic configuration of a conventional automatic conveyance system disclosed in Japanese Patent Laid-Open No. 11-238777.
[Explanation of symbols]
1,1A ~ 1D Automated guided vehicle
2,2A ~ 2C Semiconductor manufacturing equipment
3 Stocker, 4 Transport path
5 Clean tunnel, 11 Transfer port
12 cleaning unit, 13 storage
14 traveling units, 15 blower fans
16 cleaning filter, 17 cassette
18A-18C air nozzle
19A-19C Air blowing part
20 Process processing department
21 Spare room (loader / unloader)
22 Transfer port, 23 Cleaning unit
24 Blower fan 25 Cleaning filter
26A, 26B, 28B, 28C Air nozzle
27A, 27B, 29B, 29C Air blowing part

Claims (20)

A traveling unit that travels along a predetermined conveyance path, a cleaning unit that supplies purified air, a storage unit that receives the purified air and stores the product, A transfer port provided on the side surface of the case where loading or unloading is performed, and a first air blowing unit provided on the traveling direction side of the transfer port and blowing air toward the outside of the transfer port side Prepared,
The transport vehicle, wherein the first air blowing section is composed of a plurality of air nozzles arranged at different heights along a side of the transfer port on the traveling direction side .   The transport vehicle according to claim 1, wherein each of the air nozzles forms an air curtain.   The transport vehicle according to claim 1, further comprising a plurality of air nozzles that are arranged at different positions in the traveling direction above the transfer port and blow out air toward the outside on the transfer port side. A traveling unit that travels along a predetermined conveyance path, a cleaning unit that supplies purified air, a storage unit that receives the purified air and stores the product, A transfer port provided on the side surface of the case where loading or unloading is performed, and a transfer port provided on the moving direction side of the transfer port and arranged at different heights along the side of the transfer port on the moving direction side A plurality of air nozzles, including a first air blowing portion that blows air toward the outside on the transfer port side,
The traveling unit detects the approach to the transfer point where the product is carried in or out, and outputs an approach signal,
The transport vehicle, wherein the first air blowing section starts blowing air before arrival at the transfer point based on the approach signal. A traveling unit that travels along a predetermined conveyance path, a cleaning unit that supplies purified air, a storage unit that receives the purified air and stores the product, A transfer port provided on the side surface of the case where loading or unloading is performed, and a transfer port provided on the moving direction side of the transfer port and arranged at different heights along the side of the transfer port on the moving direction side A plurality of air nozzles, a first air blowing section that blows out air toward the outside of the transfer port side, and air is blown out from above the transfer port, and a down flow is applied to the outer surface of the transfer port. A transport vehicle comprising a second air blowing portion to be formed. The traveling unit detects the approach to the transfer point where the product is carried in or out, and outputs an approach signal,
6. The transport vehicle according to claim 5, wherein the second air blowing unit starts blowing air before arrival at the transfer point based on the approach signal.   A cleaning unit that supplies purified air, a storage unit that receives the purified air, stores the product, and is provided on the side of the housing where the product is carried into or out of the storage unit. A transfer vehicle comprising: the transfer port provided; and an air blowing unit that blows air from above the transfer port and forms a downflow on the outer surface of the transfer port. A traveling unit that travels along a predetermined transport path is provided.
The traveling unit detects the approach to the transfer point where the product is carried in or out, and outputs an approach signal,
8. The transport vehicle according to claim 7, wherein the air blowing unit starts blowing air before arrival at the transfer point based on the approach signal. A cleaning unit that supplies purified air, a purified air is supplied, and a product is carried in or out between a spare chamber that temporarily stores the product, and the spare chamber and the outside. A transfer port, and a first air blowing unit that is provided in a peripheral part of the transfer port and blows out air toward the outside of the transfer port side;
The manufacturing apparatus according to claim 1, wherein the first air blowing section includes a plurality of air nozzles arranged at different heights along the side of the transfer port .   The manufacturing apparatus according to claim 9, wherein each of the air nozzles forms an air curtain. A cleaning unit that supplies purified air, a purified air is supplied, and a product is carried in or out between a spare chamber that temporarily stores the product, and the spare chamber and the outside. Consists of a transfer port and a plurality of air nozzles provided at the periphery of the transfer port and arranged at different heights along the side of the transfer port. A first air blowing unit that blows out air and a carrier monitoring unit that detects the approach of the carrier and outputs an approach signal,
The first air blowing unit starts blowing air before arrival of the transport vehicle based on the approach signal. A cleaning unit that supplies purified air, a purified air is supplied, and a product is carried in or out between a spare chamber that temporarily stores the product, and the spare chamber and the outside. Consists of a transfer port and a plurality of air nozzles provided at the periphery of the transfer port and arranged at different heights along the side of the transfer port. And a second air blowing unit that blows air from above the transfer port and forms a downflow on the outer surface of the transfer port. Manufacturing equipment. A transport vehicle monitoring unit that detects the approach of the transport vehicle and outputs an approach signal,
13. The manufacturing apparatus according to claim 12, wherein the second air blowing unit starts blowing air before arrival of the transport vehicle based on the approach signal. In a transport system consisting of a transport vehicle that transports a workpiece and a plurality of manufacturing devices installed at fixed positions,
The transport vehicle includes a traveling unit that travels between manufacturing apparatuses, a cleaning unit that supplies purified air, a storage unit that is supplied with purified air and stores a product, and a manufacturing apparatus. A transfer port having an opening / closing means for transferring the product to be transferred, and a first air blower which is provided on the moving direction side of the transfer port and blows air toward the outside of the transfer port side With
The manufacturing apparatus transfers the product to and from the cleaning unit that supplies the purified air, the storage unit that stores the product to be supplied, and the transport vehicle. A transfer port having an opening / closing means to be opened,
The first air blowing section is composed of a plurality of air nozzles arranged at different heights along the side in the traveling direction of the transfer port of the transport vehicle, and means for opening and closing the transfer port of the manufacturing apparatus On the other hand, the conveyance system characterized by performing air blow.   The transport system according to claim 14, wherein the first air blowing section starts air blow before arrival of the transport vehicle at the transfer point. The manufacturing apparatus includes a second air blowing unit that performs air blowing,
15. The transport system according to claim 14, wherein the second air blowing section performs air blow on the opening / closing means of the transfer port of the transport vehicle.   The transport system according to claim 16, wherein the second air blowing section starts air blow before arrival of the transport vehicle at the transfer point. In a transport system consisting of a transport vehicle that transports a workpiece and a plurality of manufacturing devices installed at fixed positions,
The transport vehicle includes a traveling unit that travels between manufacturing apparatuses, a cleaning unit that supplies purified air, a storage unit that is supplied with purified air and stores a product, and a manufacturing apparatus. A transfer port having an opening and closing means for carrying in or carrying out the product between them,
The manufacturing apparatus includes a cleaning unit that supplies purified air, a cleaning unit that is supplied with the cleaned air, and a product that is carried in or out of a storage unit that stores the product. A transfer port having opening and closing means to be performed; and first and second air blowing portions for blowing out air;
The first air blowing portion is provided by a plurality of air nozzles provided at a peripheral portion of the transfer port of the manufacturing apparatus and arranged at different heights along the side of the transfer port. Air blow is applied to the opening and closing means of the transfer port,
The transport system, wherein the second air blowing section blows air from above the transfer port of the manufacturing apparatus, and forms a down flow on the outer surface of the opening / closing means of the transfer port.   The transport system according to claim 18, wherein the second air blowing unit starts blowing air before arrival of the transport vehicle at the transfer point. In a transport system consisting of a transport vehicle that transports a workpiece and a plurality of manufacturing devices installed at fixed positions,
The transport vehicle includes a traveling unit that travels between manufacturing apparatuses, a cleaning unit that supplies purified air, a storage unit that is supplied with purified air and stores a product, and a manufacturing apparatus. A transfer port having an opening and closing means for carrying in or carrying out the product between them,
The manufacturing apparatus includes a cleaning unit that supplies purified air, a cleaning unit that is supplied with the cleaned air, and a product that is carried in or out of a storage unit that stores the product. A transfer port having opening and closing means to be performed,
At least one of the transport vehicle or the manufacturing apparatus is disposed in a peripheral portion of the transfer port, and includes an air blowing unit that blows out air toward the outside on the transfer port side,
A plurality of air nozzles arranged at different heights along the side of the transfer port and the position of the air blowing unit in the traveling direction of the transport vehicle along the upper side of the transfer port A transportation system comprising a plurality of arranged air nozzles, wherein an air tunnel is formed between a transportation vehicle and a transfer port of a manufacturing apparatus.

Images