JP2001153420A - Unmanned carrier vehicle for clean room - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent entrance of dust to the cargo chamber of an unmanned carrier for clean room during running. SOLUTION: An unmanned carrier 100 for a clean room having a cargo chamber 103 loaded on a running track 102 is progressed in a direction A. The work W is carried through right and left entrance windows 106. High- efficient particle removing filters 113 and 114 are arranged in ducts 110 and 111 for an air curtain. Air generated by running is purified by the filters and flows through the ducts and supplied through air outlets 110b and 111b. Thereby, an air curtain AC is formed, the entrance part 106 is closed, and entrance of dust in a cargo window 103 is prevented from occurring.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an automatic guided vehicle for a clean room, and is designed to prevent dust and the like from entering a cargo room when transferring a work in a clean room.

[0002]

2. Description of the Related Art Semiconductor manufacturing and flat panel display devices (FP)
In the clean room where D) is manufactured, the work is transferred by an unmanned transfer vehicle for the clean room.
Here, the work is a wafer cassette (a container for storing semiconductors), an open cassette (a container for storing substrates for FPD), or the like.

Here, a conventional automatic guided vehicle for a clean room will be described with reference to FIG. 3 which is a side view. As shown in FIG. 1, an automatic guided vehicle 1 for a clean room is configured by mounting a cargo room 3 on a traveling vehicle 2. The traveling vehicle 2 travels in the direction of arrow A (forward traveling) in FIG. The cargo room 3 is provided with a work base 4 for supporting the work, and a fork transfer machine 5 for transferring the work between the inside and the outside of the cargo room 3.

[0004] On the left and right side surfaces of the cargo room 3 (surfaces located on the left and right when facing the traveling direction), there are formed entrance / exit windows 6 for taking in and out the work into / from the cargo room 3. The entrance window 6 is provided with a shutter 7 that opens and closes the entrance window 6 by moving up and down. Shutter 7
As a material for the above, metal, nonmetal, or the like having low dusting properties is used. The shutter 7 is a winding type or a cylinder type, and performs an opening / closing operation (a vertical movement operation) using a motor as a driving source.

The front of the cargo room 3 (the front surface in the traveling direction)
Is provided with a filter 8. The filter 8 includes a HEPA filter (HEPA Filter: high efficiency p).
A high-efficiency particle removal filter such as articulate air filte) is adopted.

[0006] When the workpiece is being conveyed, the shutter 7 is lowered, the entrance window 6 is closed, and the cargo room 3 is closed.
It prevents contamination of the inside atmosphere.

[0007]

The shutter 7 of the conventional automatic guided vehicle 1 for a clean room is for ensuring airtightness. Therefore, a sliding portion is provided between the shutter 7 and the entrance / exit window 6. I have to have it. Since the shutter 7 has the sliding portion as described above, there is a possibility that dust is generated from the sliding portion when the shutter 7 moves up and down.

SUMMARY OF THE INVENTION In view of the above prior art, an object of the present invention is to provide an automatic guided vehicle for a clean room that can prevent dust and the like from entering a cargo room during traveling without fear of dust generation.

[0009]

According to the present invention, a cargo room is mounted on a traveling vehicle, and an entrance window for taking a work in and out of the cargo room is provided in the cargo room. In the automatic guided vehicle for a clean room formed on the side surface, the suction port is located on the front surface in the traveling direction among the surfaces of the cargo room, and the outlet is located on the side of the cargo room on the front side of the front side of the entrance window. Air duct that blows air taken in from the suction port during traveling from the air outlet during traveling, forms an air curtain with the blown air and closes the entrance window, and high-efficiency particles disposed in the duct. And a removal filter.

[0010] Further, the configuration of the present invention is characterized in that a straightening plate is arranged in a portion near the outlet in the air curtain duct.

[0011]

Embodiments of the present invention will be described below in detail with reference to the drawings.

FIG. 1 is a plan sectional view showing an automatic guided vehicle 100 for a clean room according to an embodiment of the present invention.
FIG. 2 is a rear view showing the automatic guided vehicle 100 for a clean room.

As shown in FIGS. 1 and 2, an automatic guided vehicle 100 for a clean room is provided with a cargo room 103 on a traveling carriage 102.
It is configured with. The traveling trolley 102 travels in the direction of arrow A (forward traveling) in FIG. The cargo room 103 is provided with a work stand (not shown) for supporting the work, and a fork transfer machine (not shown) for transferring the work between the inside and the outside of the cargo room 103.

On the left and right side surfaces of the cargo room 103 (surfaces located left and right when facing the traveling direction), the cargo room 103
There is formed an entrance window 106 for taking in and out of the work. The entrance window 106 is open without a shutter or the like.

The front of the cargo room 3 (the front surface in the traveling direction)
A cargo room filter 108 is disposed at the center position of the filter. The filter 108 includes a hepafilter (HEPAFilter: high efficiency particulate air filt).
e) High efficiency particle removal filter is adopted.

Further, ducts 110 and 111 for air curtain are arranged on the front side of the cargo room 103 so as to be divided into right and left. The air inlets 110a, 111a of the air curtain ducts 110, 111 are located in front of the cargo room 103, and the air inlets 110a1 of the air curtain ducts 110, 111 are placed just with the filter 108 interposed therebetween.
11a is arranged.

Filters 113 and 114 are arranged inside the air curtain ducts 110 and 111. As the filters 113 and 114, a hepa filter (HEPA
Filter: A high efficiency particulate filter such as high efficiency particulate air filter is adopted.

The outlet 110b of the air curtain duct 110 on the right side is located on the right side of the cargo room 103 in front of the front side of the entrance window 106 on the right side.
The right entrance window 106 is opened so as to send air from the front side to the rear side. Further, a portion 103a of the right side surface of the cargo room 103 that forms the rear side of the right entrance window 106 is bent toward the cargo room.

Similarly, the left air curtain duct 11
The one outlet 111b is located on the left side of the cargo room 103 on the front side of the front side of the left side entrance window 106, and sends air from the front side of the left side entrance window 106 to the rear side. So that it is open. In addition, a portion 103b of the left side surface of the cargo room 103 that forms the rear side of the left entrance window 106 is bent toward the cargo room.

Also, air curtain ducts 110 and 11 are provided.
In 1, rectifying plates 110c and 111c are arranged in portions near the outlets 110b and 111b.

In FIG. 1, W denotes a wafer cassette (a container for storing semiconductors) or an open cassette (FP).
A work such as a container for storing a substrate for D).

When the automatic guided vehicle 100 for a clean room advances (moves forward) in the direction of arrow A, air is sucked into the air inlets 110a, 111a of the air curtain ducts 110, 111.
The air is passed through the filters 113 and 114 and is purified, and the purified air is blown out from the air outlets 110b and 111b of the air curtain ducts 110 and 111. The blown out air is flow straightening plate 110c,
The cargo room 1 is rectified and becomes laminar, and the cargo room 1
Along the outer side surface of the left and right sides of 03, it is blown backward. Thus, the air curtain AC is formed by the blown air, and the left and right entrance windows 106 are closed by the air curtain AC.

As a result, the automatic guided vehicle for clean room 1
00 is running in the clean room, the left and right entrance windows 106 are closed by the air curtain AC,
Dust and the like can be prevented from entering the cargo chamber 103 during the transfer of the work W, and contamination in the cargo chamber 103 during the transfer can be prevented. Thus,
During transportation, the atmosphere in the cargo room 103 can be always kept clean.

As means for closing the entrance window 106,
Since no sliding mechanical shielding means such as a shutter is employed, there is no generation of dust due to sliding and no pollution of the surrounding environment.

[0025]

According to the present invention, as described in detail with the above embodiments, the air curtain is formed by the air curtain duct at the time of traveling, and the entrance window is closed by the air curtain. Dust can be prevented from entering the chamber, and dust generation can be prevented.

[Brief description of the drawings]

FIG. 1 is a plan sectional view showing an automatic guided vehicle for a clean room according to an embodiment of the present invention.

FIG. 2 is a rear view showing the automatic guided vehicle for a clean room according to the embodiment of the present invention.

FIG. 3 is a side view showing a conventional automatic guided vehicle for a clean room.

[Explanation of symbols]

 REFERENCE SIGNS LIST 100 Unmanned guided vehicle for clean room 102 Traveling trolley 103 Cargo room 106 Door window 108 Filter 110, 111 Duct for air curtain 110a, 111a Inlet 110b, 111b Outlet 110c, 111c Rectifying plate 113, 114 Filter AC air curtain

Claims (2)

[Claims] 1. An automatic guided vehicle for a clean room, wherein a cargo room is mounted on a traveling vehicle, and an entrance window for taking in and out of a work into and out of the cargo room is formed on a side surface of the cargo room. Is located on the front side in the traveling direction of the plane of the cargo room, and the outlet is located on the side of the front side of the entrance window on the side of the cargo room, and blows air taken in from the suction port during traveling. Blowing from the outlet, an air curtain duct that forms an air curtain with the blown air and closes the entrance window, a high-efficiency particle removal filter disposed in the duct,
An automatic guided vehicle for a clean room, comprising: 2. An automatic guided vehicle for a clean room, wherein a straightening plate is disposed in a portion of the duct for the air curtain near the outlet.